WO2019033926A1 - 制绒清洗药液扩散装置 - Google Patents

制绒清洗药液扩散装置 Download PDF

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Publication number
WO2019033926A1
WO2019033926A1 PCT/CN2018/098104 CN2018098104W WO2019033926A1 WO 2019033926 A1 WO2019033926 A1 WO 2019033926A1 CN 2018098104 W CN2018098104 W CN 2018098104W WO 2019033926 A1 WO2019033926 A1 WO 2019033926A1
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WIPO (PCT)
Prior art keywords
liquid
turbulence plate
plate
turbulence
diffusion device
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PCT/CN2018/098104
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English (en)
French (fr)
Inventor
范慧斌
郭政
蔡涔
王旭东
黄同阳
Original Assignee
君泰创新（北京）科技有限公司
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Publication of WO2019033926A1 publication Critical patent/WO2019033926A1/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
    • B01F25/421—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions by moving the components in a convoluted or labyrinthine path
    • B01F25/423—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions by moving the components in a convoluted or labyrinthine path by means of elements placed in the receptacle for moving or guiding the components
    • B01F25/4233—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions by moving the components in a convoluted or labyrinthine path by means of elements placed in the receptacle for moving or guiding the components using plates with holes, the holes being displaced from one plate to the next one to force the flow to make a bending movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/45—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads
    • B01F25/452—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by elements provided with orifices or interstitial spaces
    • B01F25/4521—Mixers in which the materials to be mixed are pressed together through orifices or interstitial spaces, e.g. between beads characterised by elements provided with orifices or interstitial spaces the components being pressed through orifices in elements, e.g. flat plates or cylinders, which obstruct the whole diameter of the tube
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0236—Special surface textures
    • H01L31/02366—Special surface textures of the substrate or of a layer on the substrate, e.g. textured ITO/glass substrate or superstrate, textured polymer layer on glass substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
    • B01F2101/24—Mixing of ingredients for cleaning compositions

Definitions

  • the present disclosure relates to the field of solar cell flocking cleaning technology, and in particular, to a flocking cleaning chemical liquid diffusion device.
  • the fluffing cleaning equipment in the preparation process of the crystalline silicon battery is an important process equipment, wherein the uniformity circulation of the liquid in the process of the fluffing cleaning plays a particularly important role in the pyramid appearance of the silicon wafer after the fluffing cleaning.
  • Existing flocking cleaning equipment is difficult to form a standard pyramid appearance, resulting in more solar reflection on the silicon wafer.
  • a fluffing and cleaning liquid dispersion device comprising: a tank body, the tank body is provided with a liquid inlet; the first turbulence plate, the first turbulence plate is fixedly disposed at the In the tank body, the first turbulence plate is spaced apart from the plurality of first injection holes; the second turbulence plate is fixedly disposed in the groove body, and the a plurality of second injection holes are disposed on the two turbulence plates, and a projection of each of the first injection holes and each of the second injection holes on a plane where the liquid inlet is located is misaligned; The first turbulence plate and the second turbulence plate are sequentially disposed in the liquid medicine spraying direction.
  • a cross section of the first injection hole perpendicular to the first injection hole axis is strip-shaped; a cross section of the second injection hole perpendicular to the second injection hole axis The cross section is round.
  • the trough body includes a bottom plate and sidewall plates disposed along both sides of the bottom plate; the liquid inlet is disposed on the bottom plate; the first turbulence plate and the The second turbulence plate is parallel to the bottom plate; the first turbulence plate and the second turbulence plate are both fixedly connected to the side wall plate.
  • a plane in which the liquid inlet is located is a plane of the bottom plate, and is a horizontal plane; a projection of each of the first nozzle holes and each of the second nozzle holes on a horizontal plane is uniformly displaced distributed.
  • a longitudinal section of the second injection hole parallel to the axis of the second injection hole is flared, and a diameter of the second injection hole is gradually increased in a direction in which the liquid medicine is sprayed.
  • an inlet conduit is fixedly disposed on the liquid inlet, and a liquid outlet of the inlet conduit is in communication with the liquid inlet, and the diameter of the inlet conduit is along the liquid medicine The direction of the spray gradually increases.
  • the liquid inlet conduit includes a drainage end and a liquid expansion end that are in communication with each other, the diameter of the drainage end is smaller than the diameter of the liquid expansion end, and the liquid outlet of the liquid expansion end and the inlet The liquid port is connected.
  • the liquid outlet of the liquid expansion end is fixedly embedded in the liquid inlet.
  • the inlet conduit is integrally formed with the bottom plate.
  • the number of the inlet conduits is two, and the number of the inlet ports is two, and the two inlet ports are disposed on the bottom plate, and each of the The fluid inlet is connected to one of the inlet conduits.
  • the first turbulence plate is placed in an injection section of the inlet conduit.
  • a distance between the first turbulence plate and the liquid inlet is greater than a distance between the first turbulence plate and the second turbulence plate.
  • the first turbulence plate and the second turbulence plate are welded to the trough.
  • a plurality of the second orifices are grouped, each group including at least two of the second orifices.
  • FIG. 1 is a schematic structural view of a fluffing cleaning liquid dispersion device according to some embodiments of the present disclosure
  • Figure 2 is a front elevational view of the texturing cleaning liquid diffusion device of Figure 1;
  • FIG. 3 is a schematic diagram showing the working principle of a texturing cleaning liquid dispersion device according to some embodiments of the present disclosure.
  • solar cells mainly include silicon solar cells and thin film solar cells.
  • the silicon wafer needs to be cleaned after a series of processing procedures to eliminate various contaminants on the surface of the silicon wafer and to create a suede structure that reduces surface solar reflection (ie, texturing). ). Texturing is an important process for the manufacture of silicon solar cells, also known as "surface texturing.”
  • the effective suede structure allows the incident light to be reflected and refracted multiple times on the surface of the silicon wafer, increasing the absorption of light, reducing the reflectivity, and contributing to the performance of the solar cell.
  • some embodiments of the present disclosure provide a fluffing cleaning chemical liquid diffusion device including a tank body 100 , a first turbulence plate 200 and a second turbulence plate 300 ;
  • the tank body 100 is provided with a liquid inlet 101.
  • the first turbulence plate 200 is fixedly connected to the tank body 100, and the first turbulence plate 200 is spaced apart from the plurality of first injection holes 210, and the second turbulence plate 300 is
  • the tank body 100 is fixedly connected, and the second turbulence plate 300 is provided with a plurality of second injection holes 310, and the projections of the respective first injection holes 210 and the respective second injection holes 310 on the plane of the liquid inlet 101 are misaligned;
  • the liquid inlet 101, the first turbulence plate 200, and the second turbulence plate 300 are sequentially disposed in the liquid medicine ejection direction.
  • the chemical liquid can enter the tank 100 through the liquid inlet 101, as shown in FIG. 3, due to being ejected from the liquid inlet 101.
  • the liquid medicine has a certain pressure, and the medical liquid can pass through the plurality of first injection holes 210 on the first turbulence plate 200 into the area between the first turbulence plate 200 and the second turbulence plate 300, wherein the liquid medicine
  • the liquid medicine When the liquid medicine sprayed in the oblique direction enters the plurality of first spray holes 210, the liquid medicine may rebound with the inner wall of the plurality of first spray holes 210, or may be inclined.
  • the liquid medicine sprayed in the line direction rebounds after colliding with the tank body 100, so that the liquid medicine entering the region between the first turbulence plate 200 and the second turbulence plate 300 can have different spray directions, thereby dispersing the liquid medicine.
  • the flow rate of the dispersed chemical solution is also increased; further, a second turbulence plate 300 is disposed in the direction in which the liquid medicine is ejected, so that the liquid medicine passing through the plurality of first injection holes 210 continues to pass through the first a plurality of second injection holes 310 on the second turbulence plate 300, and each of the second injection holes 310 and each of the first Orifice 210 onto the plane where the liquid inlet 101 offset from each other distributions, which can achieve ejected from a plurality of liquid through the first orifice 210 is uniformly diffused effect after a second plurality of orifices 310.
  • Each of the first injection holes 210 is a strip hole.
  • the strip hole means that its cross section perpendicular to the axis of a first nozzle hole 210 is strip-shaped.
  • the first turbulence plate 200 is disposed closer to the liquid inlet 101, so the first turbulence plate 200 is equivalent to the first turbulent flow, and the second turbulence plate 300 is equivalent to the second turbulence plate 300.
  • Turbulent flow In the first-order turbulent flow, the diameter of each of the first injection holes 210 on the first turbulence plate 200 is larger than the diameter of each of the second injection holes 310 on the second turbulence plate 300 in the secondary turbulence.
  • Each of the second injection holes 310 is a circular hole.
  • the circular hole means that its cross section perpendicular to the axis of a second injection hole 310 is circular.
  • the diameter of each of the second injection holes 310 on the second turbulence plate 300 is smaller than each of the first injection holes 210 on the first turbulence plate 200 in the first-order turbulent flow. diameter of.
  • the trough 100 has the following structure, including a bottom plate 120 and side wall panels 110 disposed along both sides of the bottom plate 120.
  • the liquid inlet 101 is disposed on the bottom plate 120.
  • the first turbulence plate 200 and the second turbulence plate 300 are both parallel to the bottom plate 120 and are both fixedly coupled to the side wall plate 110.
  • the first turbulence plate 200 is located between the bottom plate 120 and the second turbulence plate 300.
  • the first turbulence plate 200 and the second turbulence plate 300 are disposed perpendicular to the direction in which the liquid medicine is sprayed, shortening the flow path of the liquid medicine, so that the liquid medicine can pass the first spray while maintaining a certain flow rate.
  • the hole 210 and the second injection hole 310 improve the turbulence effect and enhance the uniformity.
  • the plane in which the liquid inlet 101 is located is the plane of the bottom plate 120, and in the case of normal placement, the plane in which the liquid inlet 101 is located is a horizontal plane.
  • the projections of the respective first injection holes 210 and the respective second injection holes 310 on the horizontal plane are uniformly misaligned.
  • the pitch of the projection of the adjacent one of the first nozzle holes 210 and the second nozzle hole 310 on the horizontal plane is the same.
  • each of the second injection holes 310 is a horn-shaped hole, and the horn-shaped hole means that the longitudinal section thereof is parallel to the axis of the second injection hole 310, and the diameter of the horn-shaped hole is in the medicine.
  • the liquid jet direction is gradually increased, so that the flow rate of the liquid medicine can be reduced to a certain extent, the uniformity of the liquid medicine is further improved, and the quality of etching the silicon wafer is ensured.
  • the distance between the first turbulence plate 200 and the bottom plate 120 may be greater than the distance between the first turbulence plate 200 and the second turbulence plate 300, as it is ejected from the liquid inlet 101.
  • the liquid medicine has a high speed and is too concentrated locally, and the uniformity of the silicon wafer etching cannot be achieved, so that the distance between the first turbulence plate 200 and the bottom plate 120 is greater than the first turbulence plate 200 and the second turbulence.
  • the distance between the flow plates 300 can gradually attenuate the rate of the liquid medicine during the movement to the first turbulence plate 200, and realize the dispersion of the liquid medicine by the action of the first turbulence plate 200, and at the same time, improve the dispersed medicine.
  • the flow rate of the liquid is such that the dispersed drug solution has a sufficient velocity to pass through the second turbulence plate 300.
  • the first turbulence plate 200 and the second turbulence plate 300 are fixedly coupled to the tank body 100, for example, fixedly coupled to the side wall panel 110 of the tank body 100.
  • the first turbulence plate 200 and the second turbulence plate 300 may be welded to the trough body. 100 on the side wall panel 110.
  • the liquid inlet port on the bottom plate 120 is fixedly provided with an inlet conduit 400, and the liquid outlet of the inlet conduit 400 communicates with the liquid inlet 101 on the tank body 100.
  • the diameter of the inlet conduit 400 The direction of the liquid medicine is gradually increased, so that the rate of the liquid medicine outputted from the liquid inlet conduit 400 can be lowered, and at the same time, the liquid medicine can be sprayed into the tank body 100 in a divergent form, facilitating the first turbulence plate 200. Further dispersion of the drug solution.
  • the inlet conduit 400 may be configured in a funnel shape, which may include a liquid diffusion end 410 and a drain end 420 that communicate with each other, and a liquid outlet of the liquid expansion end 410 and the liquid inlet on the tank body 100.
  • the mouth 101 is connected, and the diameter of the drain end 420 is smaller than the diameter of the liquid-expanding end 410.
  • the liquid inlet conduit 400 can be connected to the chemical supply device through the drain end 420, and the chemical liquid can store a certain amount of energy in the drain end 420.
  • the inlet conduit 400 can be welded to the surface of the bottom plate 120, but when the weld seam is cracked or the like, the chemical liquid overflows from the gap at the junction of the inlet conduit 400 and the tank body 100 during the spraying.
  • the liquid outlet of the liquid expansion end 410 can be fixedly embedded in the liquid inlet 101, so that the liquid outlet of the liquid expansion end 410 extends to the inner cavity of the tank body 100, so that the liquid medicine is sprayed therein.
  • the direction of the liquid diffusion end 410 and the tank body 100 is not in the direction; wherein the liquid outlet of the liquid expansion end 410 can be provided with an external thread, and the inner wall of the liquid inlet 101 can be provided with the inner thread.
  • the thread is such that the liquid outlet of the liquid expansion end 410 can be screwed directly into the liquid inlet 101.
  • the bottom plate 120 and the inlet conduit 400 may be integrally formed, thereby avoiding the problem of the liquid medicine overflowing from the joint.
  • the number of the inlet conduit 400 and the inlet port 101 may be multiple, each inlet port 101 is correspondingly connected to one inlet conduit 400, and the plurality of inlet ports 101 are evenly distributed on the bottom plate. 120 on.
  • the number of the inlet conduits 400 may be two, and the number of the inlet ports 101 is also two, and the two inlet ports 101 are disposed on the bottom plate 120, and each inlet port 101 corresponds to the communication of one inlet conduit 400, whereby the uniformity of the injection of the liquid medicine can be improved.
  • the first turbulence plate 200 is placed in the injection section of the inlet conduit 400.
  • the outer wall of the liquid-expanding end 410 has a tapered shape, such as a funnel shape, and the liquid chemical injection section of the liquid-expelling end 410 is the injection section of the liquid inlet conduit 400.
  • the first turbulence plate 200 is placed in the injection section, so that the liquid medicine sprayed from the liquid expansion end 410 can be in contact with each of the first injection holes 210 of the first turbulence plate 200, thereby realizing the liquid medicine. Spread evenly.
  • the plurality of second injection holes 310 may be arranged in groups, each group including at least two second injection holes 310. At least two of the second orifices in each group are arranged in a straight line, a circle, an ellipse or a polygon, and the purpose of being offset from the respective first nozzle holes 210 can be achieved.
  • the at least two second injection holes 310 in a group are arranged in a straight line, so that there are a total of 11 sets of second injection holes 310 visible in FIG. .
  • the nubographic cleaning liquid diffusion device provided by some embodiments of the present disclosure provides a uniformity of the liquid in the circulation process by providing the first turbulence plate and the second turbulence plate, thereby ensuring the process of the silicon sheet being softened and cleaned.
  • the contact between the solution and the surface of the silicon wafer is relatively uniform, and the batch stability and quality pass rate of the pyramid after the wafer cleaning is improved.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Dispersion Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Infusion, Injection, And Reservoir Apparatuses (AREA)

Abstract

一种制绒清洗药液扩散装置，其包括槽体、第一紊流板和第二紊流板；其中，槽体上设置有入液口，第一紊流板与槽体固定连接，且第一紊流板上间隔设置有多个第一喷孔，第二紊流板与槽体固定连接，且第二紊流板上设置有多个第二喷孔，各个第一喷孔与各个第二喷孔在所述入液口所在的平面上的投影错位分布。

Description

制绒清洗药液扩散装置
本申请要求于2017年8月16日提交中国专利局、申请号为201721025578.8、申请名称为“用于均匀循环制绒清洗药液的装置”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本公开涉及太阳能电池制绒清洗技术领域，尤其涉及一种制绒清洗药液扩散装置。
背景技术
在晶硅电池制备工序中制绒清洗设备是很重要的工艺设备，其中在制绒清洗过程中药液均匀性循环对硅片制绒清洗后的金字塔貌形起到尤为重要的作用。现有的制绒清洗设备，难以形成标准的金字塔貌形，导致硅片上存在较多的太阳光反射。
发明内容
本公开一些实施例提供了一种制绒清洗药液扩散装置，包括：槽体，所述槽体上设置有入液口；第一紊流板，所述第一紊流板固定设置在所述槽体中，且所述第一紊流板上间隔设置有多个第一喷孔；第二紊流板，所述第二紊流板固定设置在所述槽体中，且所述第二紊流板上设置有多个第二喷孔，各个所述第一喷孔与各个所述第二喷孔在所述入液口所在的平面上的投影错位分布；所述入液口、所述第一紊流板和所述第二紊流板在药液喷射方向上依次顺序设置。
在本公开的一些实施例中，所述第一喷孔的垂直于所述第一喷孔轴线的横截面呈条形；所述第二喷孔的垂直于所述第二喷孔轴线的横截面呈圆形。
在本公开的一些实施例中，所述槽体包括底板和沿所述底板的两侧设置的侧壁板；所述入液口设置在所述底板上；所述第一紊流板和所述第二紊流板均与所述底板平行；所述第一紊流板和所述第二紊流板均与所述侧壁板固定连接。
在本公开的一些实施例中，所述入液口所在的平面为所述底板的平 面，且为水平面；各个所述第一喷孔与各个所述第二喷孔在水平面上的投影均匀错位分布。
在本公开的一些实施例中，所述第二喷孔的平行于所述第二喷孔轴线的纵截面呈喇叭形，且所述第二喷孔的直径在药液喷射方向上逐渐增大。
在本公开的一些实施例中，所述入液口上固定设置有进液导管，所述进液导管的出液口与所述入液口连通，所述进液导管的直径沿所述药液喷射方向逐渐增大。
在本公开的一些实施例中，所述进液导管包括相互连通的引流端和扩液端，所述引流端的直径小于所述扩液端的直径，所述扩液端的出液口与所述入液口连通。
在本公开的一些实施例中，所述扩液端的出液口固定嵌设在所述入液口中。
在本公开的一些实施例中，所述进液导管与所述底板为一体成型。
在本公开的一些实施例中，所述进液导管的数量是两个、且所述入液口的数量是两个，两个所述入液口设置于所述底板上，且每个所述入液口对应连通一个所述进液导管。
在本公开的一些实施例中，所述第一紊流板置于所述进液导管的喷射区间中。
在本公开的一些实施例中，所述第一紊流板与所述入液口之间的距离大于所述第一紊流板与所述第二紊流板之间的距离。
在本公开的一些实施例中，所述第一紊流板和所述第二紊流板焊接在所述槽体上。
在本公开的一些实施例中，多个所述第二喷孔分组设置，每组包括至少两个所述第二喷孔。
附图说明
图1为本公开一些实施例提供的制绒清洗药液扩散装置的结构示意图；
图2为图1所示制绒清洗药液扩散装置的正视图；
图3为本公开一些实施例提供的制绒清洗药液扩散装置的工作原理示意图。
具体实施方式
下面详细描述本公开的实施例，所述实施例的示例在附图中示出，其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的，仅用于解释本公开，而不能解释为对本公开的限制。
目前太阳能电池主要有硅太阳能电池和薄膜太阳能电池。对于硅太阳能电池而言，硅片在经过一系列的加工程序后需要进行清洗，目的是消除硅片表面的各种污染物，并制作能够减少表面太阳光反射的绒面结构(即，制绒)。制绒是制造硅太阳能电池的重要工艺，又称为“表面织构化”。有效的绒面结构使得入射光在硅片表面多次反射和折射，增加光的吸收，降低反射率，有助于提高太阳能电池的性能。
请同时参照图1、图2和图3，本公开的一些实施例提供了一种制绒清洗药液扩散装置，其包括槽体100、第一紊流板200和第二紊流板300；槽体100上设置有入液口101，第一紊流板200与槽体100固定连接，且第一紊流板200上间隔设置有多个第一喷孔210，第二紊流板300与槽体100固定连接，且第二紊流板300上设置有多个第二喷孔310，各个第一喷孔210与各个第二喷孔310在入液口101所在平面上的投影错位分布；入液口101、第一紊流板200和第二紊流板300在药液喷射方向上依次顺序设置。
在利用本公开一些实施例提供的制绒清洗药液扩散装置刻蚀硅片时，药液可以通过入液口101进入槽体100，如图3所示，由于从入液口101喷射出的药液具有一定压力，药液可以穿过第一紊流板200上的多个第一喷孔210进入第一紊流板200和第二紊流板300之间的区域，其中，由于药液呈发散状喷入槽体100，当沿斜线方向喷射的药液进入多个第一喷孔210中时，药液可以与多个第一喷孔210的内壁碰撞后发生反弹，或者沿斜线方向喷射的药液与槽体100碰撞后发生反弹，从而可以使进入到第一紊流板200和第二紊流板300之间区域的药液具有不同的喷射方向，进而使药液分散，同时也增加了分散后的药液的流速；此外在所述药液喷射方向上还设置了第二紊流板300，从而穿过多个第一喷孔210后的药液继续穿过第二紊流板300上的多个第二喷孔310，且各个第二喷孔310与各个 第一喷孔210在入液口101所在平面上的投影相互错位分布，从而可以达到从多个第一喷孔210喷出的药液穿过多个第二喷孔310后均匀扩散的效果。
各个第一喷孔210为条形孔。条形孔指的是，其垂直于一个第一喷孔210轴线的横截面呈条形。相对于第二紊流板300而言，第一紊流板200设置为更靠近入液口101，因此第一紊流板200相当于一级紊流，第二紊流板300相当于二级紊流。在一级紊流中，第一紊流板200上的各个第一喷孔210的直径大于二级紊流中第二紊流板300上的各个第二喷孔310的直径。
各个第二喷孔310为圆形孔。圆形孔指的是，其垂直于一个第二喷孔310轴线的横截面呈圆形。在二级紊流中，为了进一步提高紊流效果，第二紊流板300上的各个第二喷孔310的直径小于一级紊流中第一紊流板200上的各个第一喷孔210的直径。
本公开的一些实施例中，如图1所示，槽体100具有以下结构，包括底板120和沿底板120的两侧设置的侧壁板110。入液口101设置在底板120上。第一紊流板200和第二紊流板300均与底板120平行，并且均与侧壁板110固定连接。第一紊流板200位于底板120和第二紊流板300之间。
本公开的一些实施例中，第一紊流板200和第二紊流板300垂直于药液喷射方向设置，缩短了药液流动路径，使得药液可以在保持一定的流速下通过第一喷孔210和第二喷孔310，提高紊流效果，增强均匀性。
入液口101所在的平面即为底板120的平面，且在正常放置的情况下，入液口101所在的平面为水平面。各个第一喷孔210与各个第二喷孔310在水平面上的投影均匀错位分布。例如，相邻的一个第一喷孔210和一个第二喷孔310在水平面上的投影的间距相同。
在本公开的一些实施例中，各个第二喷孔310为喇叭形孔，喇叭形孔指的是其平行于第二喷孔310轴线的纵截面呈喇叭形，且喇叭形孔的直径在药液喷射方向上逐渐增大，从而可以在一定程度上降低药液流速，进一步提高了药液均匀性，进而保证了对硅片刻蚀的质量。
在本公开的一些实施例中，第一紊流板200与底板120之间的距离可以大于第一紊流板200与第二紊流板300之间的距离，由于从入液口 101喷出的药液具有较高的速度，且在局部过于集中，无法实现硅片刻蚀的均匀性，故使第一紊流板200与底板120之间的距离大于第一紊流板200与第二紊流板300之间的距离，可以使药液的速率在向第一紊流板200运动过程中逐渐衰减，并通过第一紊流板200的作用实现药液的分散，同时提高分散后的药液的流速，以便使分散后的药液具有足够的速度穿过第二紊流板300。
在本公开的一些实施例中，第一紊流板200和第二紊流板300固定连接在槽体100上，例如固定连接在槽体100的侧壁板110上。为了保证第一紊流板200和第二紊流板300分别与槽体100的侧壁板110之间的固定可靠性，第一紊流板200和第二紊流板300可以焊接在槽体100的侧壁板110上。
在本公开的一些实施例中，底板120上的入液口上固定设置有进液导管400，进液导管400的出液口与槽体100上的入液口101连通，进液导管400的直径沿药液喷射的方向逐渐增大，从而可以降低从进液导管400输出的药液的速率，同时可以实现将药液以发散状的形式喷入槽体100中，便于第一紊流板200对药液的进一步分散。
在本公开的一些实施例中，进液导管400可以设置为漏斗形，其可以包括相互连通的扩液端410和引流端420，扩液端410的出液口与槽体100上的入液口101连通，且引流端420的直径小于扩液端410的直径，由此，进液导管400可以通过引流端420与药液供给装置连接，并使药液在引流端420中积蓄一定的能量，当药液开始流入扩液端410中时，由于引流端420的直径小于扩液端410的直径，引流端420中积蓄的能量得到释放，使药液喷射而出，从而使药液获得一定的速率。
进液导管400可以焊接在底板120表面，但当焊缝出现开裂等缺陷时，药液会在喷射过程中从进液导管400和槽体100连接处的缝隙中溢出。为了防止此问题发生，扩液端410的出液口可以固定嵌设在入液口101中，从而使扩液端410的出液口延伸至槽体100的内腔，使药液在其喷射方向上不会经过扩液端410与槽体100的连接处；其中，扩液端410的出液口处可以设置有外螺纹，入液口101的内壁上可以设置有与外螺纹配合的内螺纹，从而可以使扩液端410的出液口直接旋入入液口101中。当然，可选的是，底板120与进液导管400可以为一体成型，由此避免了药液从连 接处溢出的问题。
在本公开的一些实施例中，进液导管400和入液口101的数量均可以是多个，每个入液口101对应连通一个进液导管400，多个入液口101均匀分布在底板120上。
在本公开的一些实施例中，进液导管400的数量可以是两个，相应地入液口101的数量也是两个，且两个入液口101设置于底板120上，每个入液口101对应连通一个进液导管400，由此可以提高药液喷射的均匀性。
在本公开的一些实施例中，第一紊流板200置于进液导管400的喷射区间中。扩液端410的外壁呈锥形，例如漏斗形，扩液端410的药液喷射区间即进液导管400的喷射区间。第一紊流板200置于喷射区间中，从而可以保证从扩液端410喷出的药液可以与第一紊流板200的各个第一喷孔210均有接触，实现了对药液的均匀扩散。
可以理解的是，当仅设置一个入液口101以及与该入液口101连通一个进液导管400时，也可以在该进液导管400的扩液端410的外壁的延伸面之间构成喷射区间。
多个第二喷孔310可以分组设置，每组包括至少两个第二喷孔310。每组中的至少两个所述第二喷孔排列成直线、圆形、椭圆形或多边形，能够达到与各个第一喷孔210错开设置的目的即可。例如，在本公开的一些实施例中，如图1所示，一组中的所述至少两个第二喷孔310排列成直线，因此在图1中可见的共有11组第二喷孔310。
本公开一些实施例提供的制绒清洗药液扩散装置，通过设置第一紊流板和第二紊流板，使药液在循环过程中较为均匀，保证了在硅片制绒、清洗过程中使得溶液与硅片表面接触较为均匀，提高了硅片制绒清洗后金字塔批量稳定性和质量合格率。
以上依据图式所示的实施例详细说明了本公开的构造、特征及作用效果，以上所述仅为本公开的较佳实施例，但本公开不以图面所示限定实施范围，凡是依照本公开的构想所作的改变，或修改为等同变化的等效实施例，仍未超出说明书与图示所涵盖的精神时，均应在本公开的保护范围内。

Claims (13)

  1. 一种制绒清洗药液扩散装置，其中，所述装置包括：
    槽体，所述槽体上设置有入液口；
    第一紊流板，所述第一紊流板固定设置在所述槽体中，且所述第一紊流板上间隔设置有多个第一喷孔；
    第二紊流板，所述第二紊流板固定设置在所述槽体中，且所述第二紊流板上设置有多个第二喷孔，各个所述第一喷孔与各个所述第二喷孔在所述入液口所在平面上的投影错位分布；
    所述入液口、所述第一紊流板和所述第二紊流板在药液喷射方向上依次顺序设置。
  2. 根据权利要求1所述的用于绒清洗药液扩散装置，其中；
    所述第一喷孔的垂直于所述第一喷孔轴线的横截面呈条形；
    所述第二喷孔的垂直于所述第二喷孔轴线的横截面呈圆形。
  3. 根据权利要求1或2所述的制绒清洗药液扩散装置，其中，
    所述槽体包括底板和沿所述底板的两侧设置的侧壁板；
    所述入液口设置在所述底板上；
    所述第一紊流板和所述第二紊流板均与所述底板平行；
    所述第一紊流板和所述第二紊流板均与所述侧壁板固定连接。
  4. 根据权利要求3所述的制绒清洗药液扩散装置，其中，所述入液口所在的平面为所述底板的平面，且为水平面；
    各个所述第一喷孔与各个所述第二喷孔在水平面上的投影均匀错位分布。
  5. 根据权利要求1-4任一项所述的制绒清洗药液扩散装置，其中，所述第二喷孔的平行于所述第二喷孔轴线的纵截面呈喇叭形，且所述第二喷孔的直径在药液喷射方向上逐渐增大。
  6. 根据权利要求1-4任一项所述的制绒清洗药液扩散装置，其中，所述入液口上固定设置有进液导管，所述进液导管的出液口与所述入液口连通，所述进液导管的直径沿所述药液喷射方向逐渐增大。
  7. 根据权利要求6所述的制绒清洗药液扩散装置，其中，所述进液导管包括相互连通的引流端和扩液端，所述扩液端的出液口与所述入液口连通。
  8. 根据权利要求7所述的制绒清洗药液扩散装置，其中，所述扩液端的出液口固定嵌设在所述入液口中。
  9. 根据权利要求6-8任一项所述的制绒清洗药液扩散装置，其中，所述 进液导管的数量是两个、且所述入液口的数量是两个，两个所述入液口设置于所述底板上，且每个所述入液口对应连通一个所述进液导管。
  10. 根据权利要求6-9任一项所述的制绒清洗药液扩散装置，其中，所述第一紊流板置于所述进液导管的喷射区间中。
  11. 根据权利要求1-10任一项所述的制绒清洗药液扩散装置，其中，所述第一紊流板与所述入液口之间的距离大于所述第一紊流板与所述第二紊流板之间的距离。
  12. 根据权利要求1-11任一项所述的制绒清洗药液扩散装置，其中，所述第一紊流板和所述第二紊流板焊接在所述槽体上。
  13. 根据权利要求1-12任一项所述的制绒清洗药液扩散装置，其中，多个所述第二喷孔分组设置，每组包括至少两个所述第二喷孔。
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