Classifications

• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
  • G01B9/00—Measuring instruments characterised by the use of optical techniques
  • G01B9/02—Interferometers
  • G01B9/02015—Interferometers characterised by the beam path configuration
  • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
  • G01B11/00—Measuring arrangements characterised by the use of optical techniques
  • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
  • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
  • G01B9/00—Measuring instruments characterised by the use of optical techniques
  • G01B9/02—Interferometers
  • G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
  • G01B9/00—Measuring instruments characterised by the use of optical techniques
  • G01B9/02—Interferometers
  • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
  • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
  • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
  • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
  • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
  • G01S17/66—Tracking systems using electromagnetic waves other than radio waves
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
  • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
  • G01S17/88—Lidar systems specially adapted for specific applications

Definitions

• This invention relates in general to the measurement of the position of objects in space, such as in the field of optical coordinate measuring machines, and, in particular, to a novel approach based on tracking directly the point of contact of the measurement probe.
• CMMs coordinate measurement machines
• a typical CMM is shown schematically in FIG. 1, illustrating a conventional probe 10 with a single- point-contact sensing tip 12 used to measure an object O.
• a metrology frame 14 is used to track the position of the probe tip 12 as it is moved to measure the surface of the object O.
• the machine reads the input from the probe as it traces the part at various points and the ⁇ , ⁇ , ⁇ coordinates of these points are used to determine size and shape of the measured object with micrometer precision.
• DMI distance measuring interferometer
• non-contact probes are optics-based. They typically provide good sensitivity but are limited by the amount of light reflected by the tested surface, thus requiring proper positioning relative to the surface to achieve optimal sensing conditions. In practice this means that a limited range of surface slopes can be reliably detected, which requires the repeated reorienting of the probe to place it substantially perpendicular to the tested surface, a task that makes the measurement systems less accurate and more complex. Furthermore, the ability to reorient the probe through rotation requires calibration of additional critical parameters in the operation of a coordinate measurement machine, with attendant uncertainties and potential errors. Therefore, contact probes are simpler to operate and generally preferred.
• CMMs equipped with contact probes and a DMI are examples of high- accuracy metrology-frame implementation, but even DMIs are subject to the so-called Abbe angular error (also known as sine error); i.e., the error of positional measurements resulting from the actual contact point being separated by some distance from the point where the linear coordinates are measured.
• Abbe angular error also known as sine error
• the probe 10 is always perpendicular to the plane of motion of the driving axes.
• the probe 10 tends to tilt in relation to the tip 12 as it is moved between successive positions, such as in the direction illustrated by arrow 16.
• the distance D' measured at the base of the probe 10 along the line of motion of the translating mechanism (that is, the distance reported by DMI) is different from the actual displacement D of the probe tip 12.
• This is a purely geometric distortion error that is hard to avoid in real- world CMM probe designs.
• Various schemes have been implemented in the art to reduce the influence of this error, but they invariably complicate the design and increase the cost of the CMM, and do not fully achieve their goal.
• the invention resides in the idea of producing interference fringes in a bullseye pattern by interfering a flat reference beam with a spherical beam reflected by a curved test surface.
• Such bullseye pattern amounts to interferometric fringes from which the precise location of the test surface (its coordinate with respect to a reference system) can be established by conventional interferometric analysis.
• the interferometric system for measuring the position of an object in space includes an
• interferometric measurement module configured to emit a test wavefront shaped as a diverging cone of light directed toward a curved reflective test surface attached to a probe in point contact with the object.
• the bullseye interferogram produced by interfering the returning test beam with the reference beam is registered at a detector and analyzed conventionally to produce a position measurement of the reflective test surface.
• a beam correction module is preferably used to align the bullseye interferogram with the illumination axis of the measurement module to facilitate the analysis of the fringes.
• An exemplary correction model includes a sensor with multiple detector elements receiving signals from the bullseye interferogram, and a processor programmed to drive the correction module to change the axial position of the bullseye interferogram such that the detector elements detect a perfect bullseye pattern when the interferogram is centered on the axis of illumination.
• the multiple detector elements are preferably configured as four satellite detectors disposed symmetrically around a center detector.
• the reflective surface is preferably spherical and attached to the probe very near the point of contact with the test object or, best, it constitutes the tip of the probe itself.
• the invention includes at least three interferometric measurement modules configured to emit respective test wavefronts shaped as diverging cones of light directed toward the curved reflective surface attached to the probe of the CMM. Accordingly, respective bullseye interferograms are produced and sensed by respective detectors, and a three-dimensional position measurement of the reflective surface and the connected probe can be obtained from analysis of the bullseye interferograms registered by the multiple detectors.
• the object can be scanned and measured with high precision and greatly reduced Abbe error.
• FIG. 1 is a basic schematic illustration of the main components of a conventional coordinate measurement machine.
• FIG. 2 is a schematic illustration of the Abbe error in conventional CMMs.
• FIG. 3 is a schematic illustration of a typical DMI setup.
• FIG. 4 is a schematic drawing of an interferometric setup for tracking objects in space according to the invention.
• FIG. 5 illustrates an example of a "bullseye" interference pattern between a flat wavefront and a spherical wavefront.
• FIG. 6 illustrates the geometry of interference location in Cartesian and spherical coordinates.
• FIG. 7 is a schematic of a bullseye compensation system.
• FIG. 8 illustrates a detector scheme suitable for centering the bullseye of the invention on the optical axis of the illumination system.
• FIG. 9 illustrates a CMM using three sensors according to the invention.
• High-precision tracking methods typically employ light interference because of its high sensitivity and because measurement uncertainty is directly related to the wavelength used, which can be generated with high accuracy.
• a typical DMI consists of two reflective surfaces, one attached to the tracked object on a stage (the object beam), the other stationary (the reference beam) to provide a reference against which distance is measured.
• the most common arrangement uses a Twyman-Green configuration, illustrated in FIG. 3, in a setup where retro- reflectors placed at the turn-around points of the beams provide a high-quality interference signal.
• a DMI measurement module 20 sends out a collimated laser beam B that is divided by a beam splitter 22 into a reference beam BR and an object beam BO.
• the reference beam is reflected by a stationary retroreflector 24 back toward the instrument.
• the object beam is similarly reflected by a retroreflector 26 attached to the moving stage 28 containing the measured object.
• the reflected beams BRR and BOR are then recombined by the beam splitter 22 and the resulting interference beam IB is detected by a detector (not shown) and processed in the measurement module 20 to convert the interference pattern into distance readings in conventional manner.
• homodyne and heterodyne detection are normally utilized to detect the position in space of the contact point on the object.
• Homodyne detection measures the interference signal directly as its intensity modulates.
• Heterodyne detection introduces an optical frequency shift between the BO and BR beams such that continuous high-quality phase detection can be accomplished using heterodyne methods.
• the disadvantage of either setup is that the distance can only be measured along a single line of sight, which allows the introduction of Abbe error as a result of the spatial gap between the line of sight of probe translation and the line of motion of the probe's contact point.
• the present invention is an interferometric method, and related apparatus, that allows tracking of the measured object by tracking a location at or very near the point of contact of the probe's tip with the object (rather than tracking the measurement probe), not along a single line of sight but within a cone of light generated by the measurement device, thereby producing 3-D measurements with a significant reduction of the Abbe and related errors.
• FIG. 4 The basic configuration of the invention is shown in FIG. 4.
• interferometric measurement module 30 emits a beam of light B that is divided by a beam splitter 32 into a reference beam BR and an object beam BO.
• the reference beam BR is reflected by a reference mirror 34 (or a retroreflector) back toward the beam splitter and the measurement module 30 (beam BRR).
• the object beam BO is shaped into a diverging cone of light DW by an optical system 36, which produces a virtual source point 38.
• a reflective object 40 such as a sphere made of reflective material like silicon carbide, is placed in the illuminated space so that a part DWN of the light DW that is normal to the object 40 is reflected back as a beam DWR that is collected by the optical system.
• the returning beam toward the module 30 is shown as ray DRR which in general is not located on the optical axis Z of the illumination system in the module.
• the light ray DRR is then brought to interfere with the reference beam BRR and will produce a beam IB with an interference pattern substantially as shown in FIG. 5.
• Such interference pattern between a flat wave (BRR) and a spherical wave (DRR) is typically referred to as a "bullseye" pattern.
• the reference beam BR is a plane wave that can be generated by any conventional means, but it could be any other wavefront that may be suitable for making detection and processing easier.
• the phase of the interference pattern is constant across the interference wavefront so it can be analyzed by a single detector using all collected light.
• the device of the present invention only a small portion of the object beam is captured and it interferes with the reference beam only in a limited space.
• the two interfering beams as a two-dimensional 'image' where the fringes resulting from interference of a plane reference wave (the reference) and the spherical wave (the object beam) collected by the interferometer will be only visible locally.
• This representation is similar to what an imaging interferometer would 'see' when a spherical object is inserted into its field of view and any detection scheme must only select this region for analysis.
• the device of the invention is not an imaging system and does not require that an image of the object be formed onto the detector. All that is required is to form an interference pattern between the object and the reference beams.
• the interference pattern produced by the setup of FIG. 4 is a bullseye, as shown in FIG. 5.
• the center of the bullseye corresponds to the location where the ray DWN normal to the illuminated object 40 strikes the object.
• the object wave DW is locally flat resulting in a nulled interference pattern, but moving further away from this point higher density fringes are seen in the interferogram. So, the processing method needs to take into account spatial fringe phase variability within the interference pattern.
• the illumination wavefront will appear as emanating from the origin (i.e., the center 51 of the sphere 50, corresponding to the virtual source point
• the adjacent rectangular coordinate system 56 (left side in the figure) represents the interference detection plane in the measurement module
• the angular deflection 58 of the spot 54 in the spherical coordinates corresponds to a ring 60 with given radius 62 in the interference plane within the rectangular coordinate system 56.
• the angular location 64 of the spot 54 in the spherical coordinate system corresponds to line 66 in the detection plane.
• the intersection of these two lines (60 and 66) establishes the coordinates of the interference pattern 54 in the detection plane.
• Another way to think about this is in terms of a gnomonic map projection. That is, a unique correspondence between cartesian and spherical coordinates that allows back calculation of the viewing direction from the information collected with a plane detector.
• This relationship is unique so it is possible to calculate the spherical coordinates of the DWN ray based on the location of the interference pattern, which therefore provides information about the location of the tracked object and can be used in the measurement process. As the object moves in the illuminated volume, the location of the bullseye follows in the interference detection plane and can be measured to provide information about the exact position of the reflective surface 40.
• the phase of the interferogram at the bullseye center gives a direct indication of the distance of the object from the interferometer and can be used to track the position of the object in the same way as in conventional DMIs.
• the same approach of DMI analysis i.e., using all collected light simultaneously to detect the interference of the reference and object beams
• the detection of phase must be done locally.
• a photodetector is inserted at the location where the bullseye center is produced in the illumination module 30 and this detector's lateral dimensions are chosen to provide good amplitude of signal (typically they should be smaller than 0.5 times the diameter of the circle corresponding to the phase of 1 fringe period).
• the location of the interference pattern in the detection plane changes as the object is moved in the field of illumination, so a suitable mechanism must be provided either to follow the bullseye pattern in the field of view in response to the object's movement, or to shift the interference pattern such that it always illuminates the detector centrally. Either of these approaches is acceptable. Being preferred as a method of operation, a system for shifting the bullseye to ensure its center is always on axis is described below, but the same principles of operation are applicable to all approaches.
• FIG. 7 An example of a system for correcting the lateral, off-axis, bullseye position in the detector plane is shown in FIG. 7.
• a light shifting optical module 70 is inserted in the path of the interfering beam 72 (corresponding to the combined beams DRR and BRR in FIG. 4, for example) in order to enable the lateral shift of the interference pattern such that the bullseye position can be maintained in the center 74 of the detection field along the optical axis Z of the illumination system in the detection plane 76 even when the measured object is moved within the field of illumination.
• the interfering beam 72 is illustrated as located in the center of the detection field 74. The beam passes through the correction optical module 70 without being deviated and exits as beam 78 on axis.
• the interference pattern is thus centered on the center 74 of the detection plane 76.
• the interfering beam 72 is shown as propagating off axis, which, without correction, would result in the bullseye being located away from the center 74.
• a proper correction signal 80 is applied to produce a corrected beam 82 directed toward the center 74 of the detection plane and the interference pattern's location is thus centered on the detector.
• Such a correction module 70 can be any optical system capable of lateral shifts of the transmitted wavefront, or with the ability to tilt the wavefront.
• a controlled driving signal needs to be supplied in conventional manner to produce the desired correction.
• FIG. 8 A possible embodiment of a system capable of producing the appropriate driving signal in feedback loop based on the interferogram signals measured by a specialized sensor is illustrated in FIG. 8.
• a sensor 88 includes a central detector 90, used to track the phase of the bullseye pattern, and a set of four satellite detectors (92,94,96,98) used to detect the position of the pattern relative to the center of the detector.
• the satellite detectors can be used to provide the correction signal required to maintain the position of the bullseye pattern centered on the central detector 90 simply by shifting the beam such that the satellite detectors measure the same signals. As illustrated in the figure, they are preferably used in pairs, each pair including detectors equidistant on opposite sides of the center (i.e., detectors 92 and 96 form one pair and detectors 94 and 98 form the second pair), with each detector positioned symmetrically with respect to the center and set to either detect the phase or the intensity of the fringes.
• the difference of signals read by each detector in a pair is a measure of the asymmetry of the interference pattern and can be used to produce a correction signal to maintain the position of the bullseye using a correction module 70 such as illustrated in FIG. 7.
• the size of the detectors needs to be chosen so as to provide a good quality signal; i.e., typically they need to be smaller than the size of the interference fringes. It is understood that the symmetry of the detectors' positions in the sensor 88, while preferred, is not an absolute requirement because appropriate correction signals could be obtained as well from other configurations by calibrating the system accordingly.
• the senor 88 has been described as including five detectors as separate sensing elements, but it is clear that the same result can be obtained with a single detector wherein only portions of the detector (such as five areas corresponding to detectors 90-98 in Fig. 8) are measured, as required to accomplish the correction scheme of the invention. It is also understood that an extended detector, such as a camera, can be used to track the bullseye interferogram in conventional manner.
• various detection schemes can be used to continuously monitor the phase of the bullseye center in order to determine the distance of the reflective surface 40 (see FIG. 4) from a reference position, thereby tracking its movements.
• a heterodyne method can be used by introducing an optical frequency shift between the object and the reference beams.
• the phase of the interference pattern is directly related to the distance to the measured object and, as in DMI, it can be used to provide coordinate readings.
• this device allows the accurate measurement of the distance of a reflective object relative to the reference surface.
• the reflective object 44 can be measured within the cone of light DW (FIG.
• Any conventional interferometric analysis programmed in a processor in the measuring module 30 can be used to produce precise information about the position of the reflective surface 40 within the frame of reference of the system.
• the detection scheme of the invention makes it possible to measure the distance from a single point in space; however, CMMs are used to measure the 3 -dimensional shape of objects. Therefore, at least three tracking systems must be used simultaneously.
• a schematic of such a CMM is shown in FIG. 9, where a probe 100 is positioned in the measurement volume and moved around by a conventional 3-axis Cartesian metrology frame (not shown).
• a reflective surface 102 typically a high quality reflective sphere, is attached to the probe in proximity of the measuring tip 104.
• the position of the sphere is then tracked by three independent measurement modules 106, 108 and 110, each including the functional elements described above, located such that the reflective surface 102 is visible to each at all times during the measurement process.
• the probe is used to measure an object O in the usual way, i.e., by detecting the surface using the probe's tip; however, the coordinates of the tip are retrieved by
• the reflective surface 102 should be positioned as close as possible to the probe's point of sensing on the measuring tip 104 to minimize the Abbe error. In some cases it might be possible to use the probe's measuring tip as the reflective element as well.
• the overall accuracy of the measurement is influenced by the sphericity of the reflective surface, or in general by knowledge about the shape of the reflective surface, but, as it is in the case of mechanical probe tips, such errors can be calibrated and subtracted from the measurand using an appropriate procedure.
• a reflective sphere was used as an example of an object the position of which can be tracked in space, but this particular shape has been chosen only to illustrate the point. It should be understood that other shapes are possible and perhaps more appropriate for this task as well. It is also anticipated that more than one reflective sphere (or other surface) may be used on the probe 100 in order to track more precisely its movements as it is being used to measure hidden areas of the test object.
• the probe may be configured such that it can change direction to allow the tip 104 to reach cavities in the test object. If so, an additional reflective sphere with corresponding measurement modules directed to it could be attached to the other end the probe, or closer to the tip, to provide information about any deviation of the probe with respect to the translating mechanism driving it.
• any conventional interferometric light source and related analysis tool can be used to carry out the measurements of the invention, including the spectrally-controlled-interferometry sources and related analysis tools described in the various patents issued on the subject since 2014. Therefore, the invention is not to be limited to the disclosed details but is to be accorded the full scope of the claims, including any and all equivalents thereof.

Landscapes

• Physics & Mathematics (AREA)
• General Physics & Mathematics (AREA)
• Engineering & Computer Science (AREA)
• Electromagnetism (AREA)
• Computer Networks & Wireless Communication (AREA)
• Radar, Positioning & Navigation (AREA)
• Remote Sensing (AREA)
• Spectroscopy & Molecular Physics (AREA)
• Instruments For Measurement Of Length By Optical Means (AREA)
• Length Measuring Devices By Optical Means (AREA)
• Length Measuring Devices With Unspecified Measuring Means (AREA)

Priority Applications (3)

Applications Claiming Priority (4)

Publications (1)

Family

ID=65229191

Family Applications (1)

Country Status (5)

Cited By (2)

Families Citing this family (2)

Citations (5)

Family Cites Families (11)

• 2018
  • 2018-08-05 US US16/055,125 patent/US10473451B2/en not_active Expired - Fee Related
  • 2018-08-06 GB GB2004039.0A patent/GB2587826B/en not_active Expired - Fee Related
  • 2018-08-06 JP JP2020502661A patent/JP7182306B2/ja active Active
  • 2018-08-06 WO PCT/US2018/045327 patent/WO2019032430A1/en not_active Ceased
  • 2018-08-06 DE DE112018004038.0T patent/DE112018004038B4/de not_active Expired - Fee Related

Patent Citations (5)

Also Published As

Similar Documents

Legal Events