WO2019031019A1 - 結晶相定量分析装置、結晶相定量分析方法、及び結晶相定量分析プログラム - Google Patents
結晶相定量分析装置、結晶相定量分析方法、及び結晶相定量分析プログラム Download PDFInfo
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/2055—Analysing diffraction patterns
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/05—Investigating materials by wave or particle radiation by diffraction, scatter or reflection
- G01N2223/056—Investigating materials by wave or particle radiation by diffraction, scatter or reflection diffraction
- G01N2223/0566—Investigating materials by wave or particle radiation by diffraction, scatter or reflection diffraction analysing diffraction pattern
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/605—Specific applications or type of materials phases
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/62—Specific applications or type of materials powders
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/633—Specific applications or type of materials thickness, density, surface weight (unit area)
Definitions
- the present invention relates to a crystal phase quantitative analyzer that quantitatively analyzes a crystal phase contained in a sample based on a powder diffraction pattern of the sample, a crystal phase quantitative analysis method, and a crystal phase quantitative analysis program.
- the sample is a mixture sample comprising a plurality of crystalline phases
- a powder diffraction pattern of the sample is obtained, for example, by measurement using an X-ray diffractometer.
- the powder diffraction pattern of a certain crystal phase is unique to that crystal phase
- the powder diffraction pattern of the sample is a powder diffraction pattern in which the powder diffraction patterns of each of the plurality of crystal phases contained in the sample are added based on the content. It becomes a pattern.
- the crystalline phase is a crystalline pure substance solid and has a chemical composition and a crystalline structure.
- Qualitative analysis is analysis of what crystalline phase is present in a sample.
- the quantitative analysis is an analysis of what ratio of crystal phases contained in a sample is present.
- qualitative analysis of the crystal phase contained in the sample has already been performed, as a premise of performing quantitative analysis.
- Non-Patent Document 1 and Non-Patent Document 2 describe IC formulas (Intensity-Composition formulas) used in the present invention.
- the following describes the IC formula. Assume that the powder sample contains K (K is an integer of 2 or more) crystal phases, and the j-th (j is an integer of 1 or more) of the k-th (k is an integer of 1 or more and K or less) crystal phase
- I jk The integral intensity of the diffraction line of is denoted by I jk .
- Equation 1 I 0 is the incident X-ray intensity, V k is the volume fraction of the k th crystal phase, Q is the incident X-ray intensity, physical constants such as the velocity of light, and optical a constant containing a system parameter, mu is the linear absorption coefficient of the powder sample (linear absorption coefficient), U k is the unit cell volume of the k th crystalline phases (unit cell volume), m jk multi reflective It is multiplicity of reflection and F jk is a crystal structure factor.
- G jk is defined by Equation 2 shown below using Lorentz-polarization factor Lp jk (Lorentz-polarization factor: Lp factor) and a factor (sin ⁇ jk ) regarding the light receiving slit width.
- the above equation (2) is a case where an optical system in which a one-dimensional detector is placed on the diffraction side is assumed, and it goes without saying that the format is different in an optical system in which a monochromator is placed on the diffraction side.
- Z k is the number of chemical formula unit
- M k is a chemical formula weight.
- Equation 4 When G jk is multiplied by both sides of Equation 3 and the kth crystal phase is added, Equation 4 shown below is obtained.
- N k is the number of diffraction lines of the k-th crystal phase (therefore, j is an integer of 1 or more and N k or less). N k is ideally the total number of diffraction lines of the k th crystal phase.
- sum means sum and N k may be the number of diffraction lines in the 2 ⁇ range selected by the user. In the range of 2 ⁇ , it is sufficient if the number of diffraction lines necessary for performing quantitative analysis is sufficiently included. Also, although it actually exists, there may be diffraction lines which are not included in the sum, as needed.
- Equation 4 The parentheses in the right side of Equation 4 correspond to the height of the peak at the origin of the Patterson function.
- the amount is proportional to the sum of the number of electrons (n jk ) belonging to individual atoms in the chemical formula unit and added together. . Therefore, assuming that a proportional constant is C, Equation 5 shown below holds.
- N k A is the total number of atoms in the chemical formula unit of the k th crystal phase.
- substance parameter a k is defined by Equation 6 shown below.
- the material parameter a k is a physical quantity specific to the crystal phase (material). Therefore, material parameters may be referred to as crystalline phase factors. Further, the parameter S k is defined by Equation 7 shown below.
- the weight factor W k enables the weight ratio of K crystal phases contained in the sample to be calculated.
- the weight ratio of K crystal phases may be calculated as W 1 : W 2 :...: W K , and a part of the crystal phases of K crystal phases may be selected. , Their weight ratio may be determined.
- the sample does not contain an amorphous component and all the crystal phases contained in the sample are qualitatively analyzed, the whole sample is relatively represented by the sum ⁇ W k from 1 to K for k Can do.
- the weight fraction w k of the k-th crystal phase can be expressed by Equation 8 shown below.
- Equation 9 is the IC formula.
- Hideo Toraya "A new method for quantitative phase analysis using X-ray powder diffraction: direct derivation of weight fractions from observed integrated intensities and chemical compositions of individual phases", J. Appl. Cryst., 2016, No. 49, 1508-1516 Hideo Toraya, "Quantitative phase analysis using observed integrated intensities and chemical composition data of individual crystalline phases: quantification of materials with indefinite chemical compositions", J. Appl. Cryst., 2017, No. 50, 820-829 Alexander, L. E. & Klug, H. P., Anal. Chem., 1948, No. 20, 886-889. Chung, F. H., "Quantitative Interpretation of X-ray Diffraction Patterns of Mixtures. I.
- the substance parameter a k shown in the IC formula (Equation 9) is a physical quantity specific to the crystal phase (substance). Therefore, material parameters may be referred to as crystalline phase factors. Material parameters a k can be obtained if the chemical composition of the crystal phase is specified by qualitative analysis. In addition, even when the sample contains a crystal phase with an uncertain chemical composition (indeterminate crystal phase), there are cases where it is possible to estimate the substance parameter ak of such a substance.
- Parameter S k shown in IC official is a physical quantity obtained by the measurement (observation). As shown in Formula 7, if the integral intensity I jk of each diffraction line is obtained from the measurement, the parameter S k can be obtained.
- Qualitative analysis identifies K crystal phases contained in the sample, and if the peak position (2 ⁇ ) of the powder diffraction pattern of each crystal phase is known, a plurality of diffraction lines appearing in the powder diffraction pattern are It can be determined which of the K crystal phases it belongs to.
- the parameter S k of each crystal phase is distributed by equally distributing the integral intensity of the superimposed diffraction line or according to the volume fraction, for example. It can be calculated by a simple method.
- Non-Patent Document 3 internal (and external) standard methods are known as highly accurate methods.
- a simple quantitative method of determining the weight ratio of the crystal phase from the ratio of RIR (Reference Intensity Ratio) value made in a database to the strongest peak intensity.
- Non-Patent Document 4 and Non-Patent Document 5 disclose RIR determination methods using RIR values.
- the Rietveld method is known which uses the full profile strength within the measurement angle range.
- Non-Patent Document 6 and Non-Patent Document 7 disclose quantitative methods using Rietveld method.
- WPPD whole-power pattern decomposition
- Non-Patent Document 8 discloses a quantitative method using total pattern decomposition. Further, Non-Patent Document 9 discloses a full-pattern fitting method in which a powder diffraction pattern of a sample (from which background intensity has been removed) is directly fitted as a profile intensity and quantitative analysis is performed. There is.
- the internal (and external) standard method has problems of lack of versatility and speed since it requires the acquisition of a sample of a single crystal phase of each of a plurality of crystal phases contained in the sample and preparation of a calibration curve.
- databased RIR values are required.
- the Rietveld method requires crystal structure parameters of a plurality of crystal phases contained in a powder sample.
- the full pattern decomposition method requires the acquisition of a sample of a single crystal phase.
- the PONKCS method is disclosed in Non-Patent Document 10.
- the measured RIR value is obtained in the RIR quantification method, or in the PONKCS method, a sample of a single crystal phase or a sample close thereto is determined as reference data.
- crystallographic data such as an experimentally determined calibration curve (internal standard method), an RIR value, and a crystal structure parameter (Lietveld method) are required.
- a crystal phase quantitative analysis method is desired which enables quantitative analysis by performing all pattern fitting on the powder diffraction pattern of the sample by a simpler method.
- the present invention has been made in view of such problems, and a crystal phase quantitative analysis device, a crystal phase quantitative analysis method, and a crystal phase quantitative analysis program capable of performing quantitative analysis of a sample containing a plurality of crystal phases more easily. Its purpose is to provide
- the crystal phase quantitative analysis device is a crystal phase quantitative analysis device that quantitatively analyzes the crystal phase contained in the sample from the powder diffraction pattern of the sample, Powder diffraction pattern acquiring means for acquiring a powder diffraction pattern of a sample, qualitative analysis result acquiring means for acquiring information of a plurality of crystal phases contained in the sample, and a fitting function for acquiring a fitting function for each of the plurality of crystal phases All pattern fitting means for performing all pattern fitting on the powder diffraction pattern of the sample using acquisition means and the fitting function for each of the plurality of crystal phases, and obtaining the fitting result, and the fitting result Weight ratio calculation means for calculating the weight ratio of the plurality of crystal phases based on
- the fitting function for each of the plurality of crystal phases is a first fitting function using an integral intensity obtained by whole pattern decomposition, a second fitting function using an integral intensity by observation or calculation, and a profile intensity by observation or calculation It is characterized in that it is one fitting function selected from
- the weight ratio calculation means may calculate a weight fraction using an IC formula.
- the crystal phase quantitative analysis method is a crystal phase quantitative analysis method of quantitatively analyzing the crystal phase contained in the sample from the powder diffraction pattern of the sample, and acquires the powder diffraction pattern of the sample
- Weight ratio calculating step of calculating the weight ratio of The fitting function for each of the plurality of crystal phases is a first fitting function using an integral intensity obtained by whole pattern decomposition, a second fitting function using an integral intensity by observation or calculation, a profile intensity by observation or calculation It may be one fitting function selected from the group consisting of three fitting functions.
- the crystal phase quantitative analysis program according to the present invention is a crystal phase quantitative analysis program for quantitatively analyzing the crystal phase contained in the sample from the powder diffraction pattern of the sample, and the computer is a powder diffraction pattern of the sample
- a powder diffraction pattern acquiring unit for acquiring a qualitative analysis result acquiring unit for acquiring information on a plurality of crystal phases contained in the sample
- a fitting function acquiring unit for acquiring a fitting function for each of the plurality of crystal phases
- Weight ratio calculation means for calculating the weight ratio of the crystal phase of Function and each of the fitting functions for each of the plurality of crystal phases is a first fitting function using an integral intensity obtained by whole pattern decomposition, a second fitting function using an integral intensity by observation or calculation, or an observation or calculation It may be one
- the present invention provides a crystal phase quantitative analysis device, a crystal phase quantitative analysis method, and a crystal phase quantitative analysis program that can perform quantitative analysis of a sample containing a plurality of crystal phases more easily.
- FIG. 1 is a block diagram showing the configuration of a crystal phase quantitative analysis device 1 according to an embodiment of the present invention.
- the crystal phase quantitative analysis method according to the embodiment is performed by the crystal phase quantitative analysis device 1 according to the embodiment. That is, the crystal phase quantitative analysis device 1 according to the embodiment is a device that can easily perform quantitative analysis of a sample using the crystal phase quantitative analysis method according to the embodiment.
- the crystal phase quantitative analysis device 1 includes an analysis unit 2, an information input unit 3, an information output unit 4, and a storage unit 5.
- the crystal phase quantitative analysis device 1 is realized by a commonly used computer, and although not shown, the ROM (Read Only Memory) or the RAM (Random Random) Furthermore, the ROM and the RAM constitute an internal memory of the computer.
- the storage unit 5 is a recording medium, and may be configured by a semiconductor memory, a hard disk, or any other recording medium. Here, the storage unit 5 is installed inside the computer, but may be installed outside the computer. Further, the storage unit 5 may be a single unit or a plurality of recording media.
- the crystal phase quantitative analysis device 1 is connected to the X-ray diffraction device 11 and the input device 13.
- the X-ray diffraction apparatus 11 measures X-ray diffraction data of the sample having a powder shape by X-ray diffraction measurement, and the measured X-ray diffraction data is information of the crystal phase quantitative analysis apparatus 1 Output to the input unit 3.
- the input device 13 is realized by a keyboard, a mouse, a touch panel or the like.
- the information input unit 3 is an interface or the like connected to the X-ray diffractometer 11 and the input device 13.
- the analysis unit 2 acquires the X-ray diffraction data from the information input unit 3 and performs preprocessing on the X-ray diffraction data to generate a powder diffraction pattern of the sample.
- pre-processing refers to processing such as smoothing of data and removal of the K ⁇ 2 component.
- the powder diffraction pattern generated by the analysis unit 2 is input to the storage unit 5 and held.
- the X-ray diffraction apparatus 11 includes an analysis unit (data processing unit), and the X-ray diffraction data measured by the analysis unit of the X-ray diffraction apparatus 11 is pretreated to generate a powder diffraction pattern of the sample.
- the powder diffraction pattern of the sample may be output to the information input unit 3 of the crystal phase quantitative analysis device 1.
- the analysis unit 2 acquires the powder diffraction pattern of the sample from the storage unit 5 (or the information input unit 3), performs quantitative analysis of the crystal phase contained in the sample based on the powder diffraction pattern, and outputs the result as an analysis result
- the weight ratio of the crystal phase quantitatively analyzed is output to the information output unit 4.
- the information output unit 4 is an interface or the like connected to the display device 12, outputs the weight ratio of the crystal phase to the display device 12, and the display device 12 displays the analysis result of the quantitative analysis.
- FIG. 2 is a flowchart showing the crystal phase quantitative analysis method according to the embodiment.
- the analysis unit 2 of the crystal phase quantitative analysis device 1 includes a powder diffraction pattern acquisition unit 21, a qualitative analysis result acquisition unit 22, a fitting function acquisition unit 23, a total pattern fitting unit 24, and a weight ratio calculation unit 25. Is a means for executing each step of the crystal phase quantitative analysis method described below.
- the crystal phase quantitative analysis program according to the embodiment is a program for causing a computer to function as each means.
- Step S1 Powder Diffraction Pattern Acquisition Step
- the powder diffraction pattern of a sample is acquired (S1: powder diffraction pattern acquisition step).
- the powder diffraction pattern of the sample is held in the storage unit 5.
- the X-ray diffraction apparatus 11 includes the analysis unit (data processing unit), performs pretreatment on the X-ray diffraction data of the sample to be measured to generate a powder diffraction pattern of the sample, and the powder diffraction of the sample
- the pattern may be output to the information input unit 3 of the crystal phase identification device 1.
- the analysis unit 2 of the crystal phase identification device 1 acquires a powder diffraction pattern of the sample from the storage unit 5 (or the information input unit 3).
- the powder diffraction pattern is a spectrum in which the horizontal axis represents a diffraction angle 2 ⁇ indicating a peak position, and the vertical axis represents the intensity of diffracted X-rays.
- the diffraction angle 2 ⁇ is an angle between the incident X-ray direction and the diffracted X-ray direction.
- the X-ray diffraction data of the sample measured by the X-ray diffraction apparatus 11 may be input to the information input unit 3 or may be held in the storage unit 5.
- the analysis unit 2 acquires X-ray diffraction data of the sample from the information input unit 3 or the storage unit 5 and preprocesses the X-ray diffraction data of the sample to generate a powder diffraction pattern of the sample. .
- Step S2 Qualitative Analysis Result Acquisition Step
- Information on a plurality of crystal phases contained in the sample is acquired (S2: qualitative analysis result acquisition step).
- the analysis unit 2 identifies the crystal phase from the position and the intensity of the diffraction line (peak) of the powder diffraction pattern of the sample acquired in step S1. That is, information on a plurality of crystal phases contained in the sample is acquired by qualitative analysis.
- the information on the crystal phase is the chemical composition and, if the crystal phase has polymorphs having different crystal structures, information on the polymorph and a plurality of peaks of the powder diffraction pattern of the crystal phase. And position.
- the intensity at multiple peak positions of the powder diffraction pattern of the crystal phase may further be included.
- the analysis unit 2 Based on the peak position and the peak intensity of the powder diffraction pattern of the sample acquired in step S1, the analysis unit 2 performs qualitative analysis of the sample to acquire information on a plurality of crystal phases contained in the sample.
- the present invention is not limited to this, and the information input unit 3 may obtain, from the input device 13, information of a plurality of crystal phases contained in the sample which is the result of the qualitative analysis of the sample.
- Step S3 Fitting Function Acquisition Step
- a fitting function is obtained for each of the plurality of crystal phases included in the sample (S3: fitting function acquisition step).
- the user decides to perform the fitting using one fitting function selected from the group of
- the user uses the input device 13 to input a fitting function to be used for each of the plurality of crystal phases.
- the analysis unit 2 acquires a fitting function for each of the plurality of crystal phases input to the input device 13 from the information input unit 3.
- the first to third fitting functions will be described below. If the powder diffraction pattern y (2 ⁇ ) of the sample can be regarded as the superposition of the background intensity y (2 ⁇ ) back and the powder diffraction patterns y (2 ⁇ ) k of each of the K crystal phases, the powder diffraction of the sample
- the pattern y (2 ⁇ ) is expressed by Equation 10 shown below.
- the powder diffraction pattern y (2 ⁇ ) k of each crystal phase has various notations, which is a fitting function.
- the first fitting function uses the integrated intensity obtained by all pattern decomposition based on the Pawley method, and is expressed by Equation 11 shown below.
- P (2 ⁇ ) jk is a standardized profile function that describes the profile shape.
- P (2 ⁇ ) for example, a function defined by [- ⁇ , + ⁇ ⁇ ] such as a pseudo-Voigt function is used, but in practice it is considered to have a value only before and after the peak position of each diffraction line No problem.
- the second fitting function uses an integrated intensity by observation or calculation input from the outside, and is expressed by Equation 12 shown below.
- the set of integrated intensities ⁇ I ' jk ⁇ may be a set of integrated intensities separately measured (or calculated) for a single-phase sample of the k-th crystal phase, which is a function of crystal structure parameters May be In the fitting, the integral intensity set ⁇ I ' jk ⁇ is fixed, and instead the scale factor Sc k will be refined.
- the third fitting function is a profile intensity by observation or calculation input from the outside, and is expressed by Equation 13 shown below.
- Sck is a scale factor as in the second fitting function.
- y (2 ⁇ ) ' k may be a profile intensity measured (or calculated) separately for a single phase sample of the k th crystal phase, and may be calculated in situ at the time of fitting based on crystal structure parameters Good. In fitting, secure the profile strength y (2 ⁇ ) 'k, and thus to refine the scale factor Sc k instead.
- the user uses one of the first to third fitting functions to perform the fitting on the powder diffraction patterns of each of the plurality of crystal phases decide.
- the first fitting function is preferably selected when the crystallinity of the crystal phase is high and the symmetry of the crystal is relatively high.
- the third fitting function may be used.
- Step S4 All Pattern Fitting Step
- All pattern fitting is performed on the powder diffraction pattern of the sample using the fitting function for each of the plurality of crystal phases acquired in step S3, and the result is acquired (S4: all pattern fitting step).
- the fitting function used for all pattern fitting is Formula 10
- the fitting function y (2 ⁇ ) k of the k-th crystal phase described in Formula 10 is any of the first to third fitting functions.
- the parameters of the model necessary to calculate the shape of the profile are (a) a parameter for determining the half width (FWHM), (b) a parameter for determining the shape of the profile, and (c) k Lattice constant of the second crystal phase.
- the initial value of the integral intensity I jk is unnecessary.
- the parameters of the model necessary to calculate the shape of the profile include the above (a) to (c) as in the case of using the first fitting function, but are determined in advance. It further includes a parameter of integrated intensity and a scale factor. As described above, in the fitting, the integrated intensity parameter is fixed.
- the parameters of the model necessary to calculate the shape of the profile are data of the profile function y (2 ⁇ ) by observation or calculation minus background intensity, and a scale factor.
- the profile function y (2 ⁇ ) is fixed in fitting.
- Step S5 Weight Ratio Calculation Step
- the weight ratio of the plurality of crystal phases is calculated based on the fitting result acquired in step S4 (weight ratio calculation step).
- the parameter S k of the k-th crystal phase is calculated by the integral intensity I jk using Equation 7.
- Equation 15 the parameter S k of the crystal phase of the k-th crystal phase is calculated using Equation 15 shown below.
- Equation 15 The derivation of Equation 15 will be described below.
- G jk defined by Equation 2 can be regarded as a continuous function G (2 ⁇ ) with respect to the diffraction angle 2 ⁇ , and by multiplying G (2 ⁇ ) by both sides of Equation 11, a finite 2 ⁇ range [2 ⁇ L , 2 ⁇ H ] Integrate with to obtain Equation 16 shown below. Note that an integral value of the integration is Y k .
- the number of diffraction lines necessary for performing the quantitative analysis may be sufficiently included as described above.
- the material parameter a k is obtained if the chemical composition of the crystal phase is specified by qualitative analysis, and the sample contains a crystal phase with an uncertain chemical composition (indeterminate crystal phase).
- the weight factor W k of the k-th crystal phase is calculated using the substance parameter a k and the parameter S k obtained from the fitting result obtained in step S4.
- the weight factor W k can be used to calculate the weight ratio of the plurality of crystal phases contained in the sample. Further, it is possible to use the equation 8 or IC official (Equation 9), calculates the weight fraction w k of the k-th crystalline phase.
- FIG. 3 is a view showing a sample used in an example of the crystal phase quantitative analysis method according to the embodiment.
- the sample uses a mixture sample consisting of three rock forming minerals (which are crystal phases).
- the sample, the composition ratio of weathered granite which is also used in the ceramic raw material is obtained by simulating the weight fraction w k of each crystal phase is shown in FIG.
- step S1 an observed powder diffraction pattern of the sample is obtained.
- FIG. 4 is a view showing an observed powder diffraction pattern and a calculated powder diffraction pattern of the sample according to the embodiment.
- the diamond diamond symbol shown in FIG. 4 is the observed powder diffraction pattern. The measurement is performed in the range of 10 ° to 80 °. The calculated powder diffraction pattern will be described later.
- step S2 information on a plurality of crystal phases contained in the sample is acquired.
- the sample contains three crystal phases (A, B and C), and the chemical composition of each crystal phase is also clarified.
- step S3 a fitting function is obtained for each of the plurality of crystal phases included in the sample.
- the user uses the first fitting function for the fitting function for Quartz, which is crystal phase A, the second fitting function for the fitting function for Albite, which is crystal phase B, and the crystal phase C.
- the third fitting function is selected as the fitting function for a certain Kaolinite.
- the user uses the input device 13 to input the fitting function used for each of the crystal phases A to C, and the analysis unit 2 acquires the fitting function for each of the crystal phases A to C.
- the crystal phase A Quartz
- integral intensity parameters ⁇ I jA ⁇ are all optimized at the time of fitting.
- Albite which is a crystal phase B is a kind of feldspar, is triclinic, and has low crystal symmetry. For example, it is known that 810 diffraction lines exist in the range of 5 ° to 80 ° in 2 ⁇ .
- the user selects the second fitting function as the fitting function used for the crystal phase B.
- a set ⁇ I j B ⁇ of observed integral intensities is obtained, which is obtained by all pattern decomposition already performed on a sample containing Albite as a single component.
- a set of observed integral intensities acquired in advance is defined as an integral intensity parameter ⁇ I ' jB ⁇ , which is multiplied by a scale factor to be used for calculation of the profile intensity.
- FIG. 5 is a diagram showing the result of total pattern decomposition for the observed powder diffraction pattern of a sample containing Albite as a single component.
- the observed powder diffraction pattern is shown in FIG. 5 by the diamond diamond symbol. The measurement is performed in the range of 10 ° to 80 °.
- the calculated powder diffraction pattern which is the result of total pattern decomposition, is shown in solid lines superimposed on the observed powder diffraction pattern.
- the residual diffraction pattern obtained by subtracting all pattern decomposition results from the diffraction pattern interpolated from the observed powder diffraction pattern is shown below the observed powder diffraction pattern, and observed powder diffraction It shows that all the pattern decomposition can be fitted with high accuracy to the pattern.
- Kaolinite which is a crystalline phase C is one of clay minerals, and is formed by weathering and modification of feldspar and the like. Kaolinite is known to have low crystallinity. Therefore, among the plurality of peaks of the observed powder diffraction pattern of Kaolinite, many peaks are spread and adjacent peaks overlap each other, and the shape of the diffraction profile is not clear. It makes it difficult to apply the full pattern decomposition method that assumes a clear diffraction profile shape. Therefore, the user selects the third fitting function as the fitting function to use for the crystal phase C. What removed background intensity from the observation powder diffraction pattern of the sample which makes Kaolinite single component is acquired as observation profile intensity y (2 ⁇ ) C. In this case, an observation profile intensity acquired in advance is taken as an observation profile intensity y ′ (2 ⁇ ) C , which is multiplied by a scale factor to be used for calculation of the profile intensity.
- FIG. 6 is a diagram showing the shape of an observed powder diffraction profile obtained by removing the background intensity from the observed powder diffraction pattern of a sample having Kaolinite as a single component. The measurement is performed in the range of 5 ° to 80 °. As shown in FIG. 6, the observed powder diffraction profile shapes of Kaolinite are often in such a manner as to adhere to each other.
- step S4 the full pattern fitting is performed on the powder diffraction pattern of the sample using the fitting function for each of the plurality of crystal phases, and the result is acquired.
- the fitting functions for the crystal phases A to C are first to third fitting functions, respectively, as shown in FIG.
- a calculated powder diffraction pattern, which is the result of full pattern fitting, is shown in FIG.
- three calculated powder diffraction patterns (calculated profile intensities) corresponding to the crystal phases A to C, respectively, are described and shown in FIG. 4 as curves A to C, respectively.
- the three calculated powder diffraction patterns match the observed powder diffraction pattern with high accuracy.
- step S5 the weight ratio of the plurality of crystal phases is calculated based on the fitting result acquired in step S4.
- the weight fraction wk is determined, and the result is shown in FIG.
- the weighed values (design values) of each crystal phase in the sample are 50%, 39.97%, and 10.03%, respectively.
- the weight fraction w A crystal phase A is 51.23% (difference + 1.23%)
- the weight fraction w B crystal phase B 39.12 % (Difference -0.85%)
- weight fraction w A of crystal phase C is 9.65% (difference -0.38%)
- Quantitative analysis is realized.
- the crystal phase quantitative analysis method according to the embodiment has been described above.
- the fitting can be performed as long as parameters to be input can be determined, and further, inclusion in the sample by qualitative analysis It is possible to realize quantitative analysis if the material parameters ak of the plurality of crystal phases to be determined can be specified or estimated.
- the fitting function for the plurality of crystal phases may be any of the first to third fitting functions, and the powder of the sample
- the fitting function for the diffraction pattern is any of the first to third fitting functions consisting of one, two or three fitting functions, the entire pattern is obtained for the powder diffraction pattern of the sample Fitting can be performed to calculate the weight ratio of multiple crystalline phases.
- the user determines from the diffraction pattern of the sample that the fitting function for each of the plurality of crystal phases included in the sample corresponds to which of the first to third fitting functions.
- the analysis unit 2 may automatically determine itself, determine a fitting function for each of the plurality of crystal phases, and acquire the result.
- the powder diffraction pattern of the sample for which the full pattern fitting is performed includes the background intensity, and thus the fitting function also includes the background intensity, but is not limited thereto. There is nothing to do. Background removal is applied in the pretreatment, and the powder diffraction pattern of the sample for which the full pattern fitting is to be performed may not include the background intensity. In this case, the fitting function does not include background intensity.
- the crystal phase quantitative analysis device, the crystal phase quantitative analysis method, and the crystal phase quantitative analysis program according to the embodiments of the present invention have been described above.
- the present invention can be widely applied without being limited to the above embodiment.
- the powder diffraction pattern in the above-mentioned embodiment is obtained by X-ray diffraction measurement, it is not limited to this, and may be by other measurement such as neutron diffraction measurement.
- various approximations can be considered as necessary, such as discrimination of diffraction lines included in a powder diffraction pattern, distribution of intensities of superimposed or adjacent diffraction lines, and the like.
- the weight ratio of a plurality of crystal phases is calculated, but other quantitative ratio such as molar ratio may be calculated based on the weight ratio.
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Abstract
Description
Access Memory)をさらに備えており、ROMやRAMはコンピュータの内部メモリを構成している。記憶部5は記録媒体であり、半導体メモリ、ハードディスク、又は、その他の任意の記録媒体によって構成されていてもよい。ここで、記憶部5は、コンピュータの内部に設置されているが、コンピュータの外部に設置されていてもよい。また、記憶部5は、1つの単体であっても、複数の記録媒体であってもよい。結晶相定量分析装置1は、X線回折装置11及び入力装置13に接続されている。X線回折装置11は、粉末形状である試料に対して、X線回折測定により、当該試料のX線回折データを測定し、測定されたX線回折データを、結晶相定量分析装置1の情報入力部3へ出力する。入力装置13は、キーボードやマウス、タッチパネルなどによって実現される。情報入力部3はX線回折装置11及び入力装置13に接続されるインターフェイスなどである。解析部2は、情報入力部3より、当該X線回折データを取得し、当該X線回折データに前処理を施して、試料の粉末回折パターンを生成する。ここで、前処理は、データの平滑化、Kα2成分の除去などの処理をいう。解析部2で生成される当該粉末回折パターンは、記憶部5に入力され、保持される。なお、X線回折装置11が解析部(データ処理部)を備え、X線回折装置11の解析部が測定されるX線回折データに前処理を施すことにより試料の粉末回折パターンを生成して、結晶相定量分析装置1の情報入力部3へ試料の粉末回折パターンを出力してもよい。解析部2は、記憶部5(又は情報入力部3)より、当該試料の当該粉末回折パターンを取得し、当該粉末回折パターンに基づき、当該試料に含まれる結晶相を定量分析し、分析結果として、定量分析された結晶相の重量比を情報出力部4へ出力する。情報出力部4は、表示装置12に接続されるインターフェイスなどであり、表示装置12へ結晶相の重量比を出力し、表示装置12において定量分析の分析結果の表示が行われる。
試料の粉末回折パターンを取得する(S1:粉末回折パターン取得ステップ)。試料の粉末回折パターンは、記憶部5に保持されている。又は、前述の通り、X線回折装置11が解析部(データ処理部)を備え、測定される試料のX線回折データに前処理を施して試料の粉末回折パターンを生成し、試料の粉末回折パターンを結晶相同定装置1の情報入力部3へ出力してもよい。結晶相同定装置1の解析部2は、記憶部5(又は情報入力部3)より当該試料の粉末回折パターンを取得する。粉末回折パターンは、横軸がピーク位置を示す回折角2θであり、縦軸が回折X線の強度を示すスペクトルである。ここで、回折角2θは、入射X線方向と回折X線方向とのなす角度である。なお、X線回折装置11により測定される試料のX線回折データが情報入力部3に入力されるか、記憶部5に保持されていてもよい。この場合は、解析部2が、情報入力部3又は記憶部5より、試料のX線回折データを取得し、試料のX線回折データに前処理を施して、試料の粉末回折パターンを生成する。
試料に含まれる複数の結晶相の情報を取得する(S2:定性分析結果取得ステップ)。解析部2が、ステップS1により取得した試料の粉末回折パターンの回折線(ピーク)の位置と強度より、結晶相を同定する。すなわち、定性分析により、試料に含まれる複数の結晶相の情報を取得する。ここで、結晶相の情報は、その化学組成と、その結晶相が結晶構造の異なる多形を有している場合にはその多形に関する情報と、当該結晶相の粉末回折パターンの複数のピーク位置と、を含んでいる。当該結晶相の粉末回折パターンの複数のピーク位置における強度を、さらに含んでいてもよい。
試料に含まれる複数の結晶相それぞれに対するフィッティング関数を取得する(S3:フィッティング関数取得ステップ)。ステップS1により取得される試料の粉末回折パターンと、ステップS2により取得される複数の結晶相の情報とに基づいて、複数の結晶相それぞれの粉末回折パターンに対して、第1乃至第3フィッティング関数の群より選択される1のフィッティング関数を用いてフィッティングを実行することをユーザが決定する。ユーザは、入力装置13を用いて、複数の結晶相それぞれに対して用いるフィッティング関数を入力する。解析部2が、情報入力部3より、入力装置13に入力される、複数の結晶相それぞれに対するフィッティング関数を取得する。
ステップS3により取得される複数の結晶相それぞれに対するフィッティング関数を用いて、試料の粉末回折パターンに対して全パターンフィッティングを実行し、その結果を取得する(S4:全パターンフィッティングステップ)。ここで、全パターンフィッティングに用いるフィッティング関数は数式10であり、数式10に記載されるk番目の結晶相のフィッティング関数y(2θ)kは、第1乃至第3フィッティング関数のいずれかである。
ステップS4により取得されるフィッティング結果に基づいて、複数の結晶相の重量比を計算する(重量比計算ステップ)。
Claims (5)
- 試料の粉末回折パターンより前記試料に含まれる結晶相を定量分析する、結晶相定量分析装置であって、
前記試料の粉末回折パターンを取得する粉末回折パターン取得手段と、
前記試料に含まれる複数の結晶相の情報を取得する定性分析結果取得手段と、
前記複数の結晶相それぞれに対するフィッティング関数を取得するフィッティング関数取得手段と、
前記複数の結晶相それぞれに対する前記フィッティング関数を用いて、前記試料の前記粉末回折パターンに対して全パターンフィッティングを実行し、フィッティング結果を取得する、全パターンフィッティング手段と、
前記フィッティング結果に基づいて、複数の結晶相の重量比を計算する重量比計算手段と、
を備え、
前記複数の結晶相それぞれに対する前記フィッティング関数はそれぞれ、全パターン分解によって得られる積分強度を用いる第1フィッティング関数、観測又は計算による積分強度を用いる第2フィッティング関数、観測又は計算によるプロファイル強度を用いる第3フィッティング関数からなる群から選択される1のフィッティング関数である、
ことを特徴とする結晶相定量分析装置。 - 請求項1に記載の結晶相定量分析装置であって、
前記重量比計算手段は、IC公式を用いて、重量分率を計算する、
ことを特徴とする結晶相定量分析装置。 - 請求項1又は2に記載の結晶相定量分析装置であって、
前記複数の結晶相に対して、前記第1乃至第3フィッティング関数のうち、2種類以上のフィッティング関数が選択される、
ことを特徴とする結晶相定量分析装置。 - 試料の粉末回折パターンより前記試料に含まれる結晶相を定量分析する、結晶相定量分析方法であって、
前記試料の粉末回折パターンを取得する粉末回折パターン取得ステップと、
前記試料に含まれる複数の結晶相の情報を取得する定性分析結果取得ステップと、
前記複数の結晶相それぞれに対するフィッティング関数を取得するフィッティング関数取得ステップと、
前記複数の結晶相それぞれに対する前記フィッティング関数を用いて、前記試料の前記粉末回折パターンに対して全パターンフィッティングを実行し、フィッティング結果を取得する、全パターンフィッティングステップと、
前記フィッティング結果に基づいて、複数の結晶相の重量比を計算する重量比計算ステップと、
を備え、
前記複数の結晶相それぞれに対する前記フィッティング関数はそれぞれ、全パターン分解によって得られる積分強度を用いる第1フィッティング関数、観測又は計算による積分強度を用いる第2フィッティング関数、観測又は計算によるプロファイル強度を用いる第3フィッティング関数からなる群から選択される1のフィッティング関数である、
ことを特徴とする結晶相定量分析方法。 - 試料の粉末回折パターンより前記試料に含まれる結晶相を定量分析する、結晶相定量分析プログラムであって、
コンピュータを、
前記試料の粉末回折パターンを取得する粉末回折パターン取得手段と、
前記試料に含まれる複数の結晶相の情報を取得する定性分析結果取得手段と、
前記複数の結晶相それぞれに対するフィッティング関数を取得するフィッティング関数取得手段と、
前記複数の結晶相それぞれに対する前記フィッティング関数を用いて、前記試料の前記粉末回折パターンに対して全パターンフィッティングを実行し、フィッティング結果を取得する、全パターンフィッティング手段と、
前記フィッティング結果に基づいて、複数の結晶相の重量比を計算する重量比計算手段と、
して機能させ、
前記複数の結晶相それぞれに対する前記フィッティング関数はそれぞれ、全パターン分解によって得られる積分強度を用いる第1フィッティング関数、観測又は計算による積分強度を用いる第2フィッティング関数、観測又は計算によるプロファイル強度を用いる第3フィッティング関数からなる群から選択される1のフィッティング関数である、
ことを特徴とする結晶相定量分析プログラム。
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