WO2019021436A1 - Laser device and method for controlling temperature of transmissive optical element - Google Patents

Laser device and method for controlling temperature of transmissive optical element Download PDF

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Publication number
WO2019021436A1
WO2019021436A1 PCT/JP2017/027310 JP2017027310W WO2019021436A1 WO 2019021436 A1 WO2019021436 A1 WO 2019021436A1 JP 2017027310 W JP2017027310 W JP 2017027310W WO 2019021436 A1 WO2019021436 A1 WO 2019021436A1
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temperature
optical element
laser
temperature control
transmission type
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PCT/JP2017/027310
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French (fr)
Japanese (ja)
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進吾 宇野
東條　公資
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株式会社島津製作所
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Priority to JP2019532304A priority Critical patent/JPWO2019021436A1/en
Priority to PCT/JP2017/027310 priority patent/WO2019021436A1/en
Publication of WO2019021436A1 publication Critical patent/WO2019021436A1/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure

Definitions

  • the present invention relates to a laser device that couples the output of a semiconductor laser to a fiber through a transmissive optical element and a temperature control method for the transmissive optical element.
  • a light emitting device described in Patent Document 1 is known as a laser device that couples the output of a semiconductor laser or a solid state laser to a fiber.
  • the light emitting device described in Patent Document 1 collimates outgoing light from a plurality of light sources, changes the beam diameter of the collimated light with a transmission type optical element (prism), or changes the optical path.
  • a transmission type optical element pris
  • the refractive index of the transmission type optical element changes due to the temperature change due to the beam absorption of the transmission type optical element or the change of the environmental temperature.
  • the optical path of the beam changes, which changes the fiber coupling efficiency with which the output of the semiconductor laser is coupled to the fiber.
  • the fiber coupling efficiency changes significantly.
  • the present invention provides a laser device and a temperature control method of a transmission type optical device that can stabilize and optimize the fiber coupling efficiency even when the optical path length is long.
  • a laser device includes a semiconductor laser for emitting a laser beam, a collimator lens for collimating the laser beam from the semiconductor laser, and an optical path of the laser beam collimated by the collimator lens.
  • a transmissive optical element for bending, a condensing lens for condensing the laser beam bent by the transmissive optical element and coupling it to a fiber, and a temperature detection unit for detecting the temperature of the transmissive optical element;
  • a temperature control element for adjusting the temperature of the transmissive optical element, and a temperature for controlling the temperature of the transmissive optical element to a predetermined temperature by controlling the temperature control element based on the temperature detected by the temperature detection unit
  • a control unit is provided.
  • a semiconductor laser for emitting a laser beam
  • a collimating lens for collimating the laser beam from the semiconductor laser
  • a transmissive optical system for bending an optical path of the laser beam collimated by the collimating lens
  • a plurality of temperature detection units that detect the temperature of the corresponding side, and a plurality of temperature control that are disposed corresponding to the plurality of sides of the transmissive optical element and that adjust the temperature of the corresponding side of the transmissive optical element The temperature of the corresponding side of the transmission type optical element by controlling the temperature control element based on the temperature detected by the temperature detection unit on the plurality of sides of the element and the transmission type optical element A control temperature control unit.
  • a laser device includes a plurality of semiconductor lasers emitting laser light, a plurality of collimating lenses disposed corresponding to the plurality of semiconductor lasers, and collimating laser light from the semiconductor lasers, and the plurality A plurality of transmissive optical elements disposed corresponding to the collimating lens for bending the optical path of the laser light collimated by the collimating lens, and collecting the plurality of laser beams bent by the plurality of transmissive optical elements And a plurality of temperature detection devices disposed corresponding to a plurality of sides of each of the transmission type optical elements and detecting a temperature of a corresponding side of each of the transmission type optical elements.
  • a plurality of temperature control elements disposed corresponding to the plurality of sides of each of the transmissive optical elements, for adjusting the temperature of the corresponding side of each of the transmissive optical elements;
  • a temperature control unit that controls the temperature of the corresponding side of the transmissive optical element by controlling the temperature control element based on the temperature detected by the temperature detection unit for each side of each of the transmissive optical elements
  • the temperature control method of the transmission type optical element includes a semiconductor laser for emitting a laser beam, a collimator lens for collimating the laser beam from the semiconductor laser, and a transmission type for bending an optical path of the laser beam collimated by the collimator lens.
  • a temperature control method of a transmission type optical element of a laser device comprising: an optical element; and a condensing lens which condenses laser light bent by the transmission type optical element and couples it to a fiber, wherein the transmission type optical element
  • By controlling the temperature control device by a temperature control unit based on the detected temperature by the detection section and a temperature control step of controlling the temperature of the corresponding side of the transmissive optical element.
  • the temperature control unit controls the temperature of the transmissive optical element to a predetermined temperature by controlling the temperature adjustment element based on the temperature detected by the temperature detection unit, even when the optical path length is long. Fiber coupling efficiency can be stabilized and optimized.
  • the temperature control unit controls the temperature control element on the plurality of sides of the transmission type optical element based on the temperatures detected by the temperature detection unit
  • the temperature control portion controls the temperature of the corresponding side of the transmission type optical element.
  • the refractive index distribution is generated according to the temperature gradient in the transmission type optical element, and the light path in the transmission type optical element is bent. That is, the fiber coupling efficiency can be adjusted by temperature control of the transmission type optical element.
  • FIG. 1 is a block diagram of a laser apparatus of Embodiment 1 of the present invention.
  • FIG. 2 is a block diagram of a laser apparatus of Embodiment 2 of the present invention.
  • FIG. 3 is a block diagram of a laser apparatus according to a modification of the second embodiment of the present invention.
  • FIG. 4 is a side view of a laser apparatus according to a third embodiment of the present invention.
  • FIG. 5 is a block diagram of the laser device according to the third embodiment of the present invention as viewed from below.
  • FIG. 1 is a block diagram of a laser apparatus according to a first embodiment of the present invention.
  • the laser apparatus of the first embodiment includes a semiconductor laser 1, a collimator lens 2, a prism 3, a holder 4, a condenser lens 5, a fiber 6, a Peltier element 7, a heat sink 8, a thermistor 9, and a temperature control unit 10.
  • the semiconductor laser 1 emits a laser beam.
  • the collimator lens 2 collimates the laser light from the semiconductor laser 1.
  • the prism 3 corresponds to the transmission type optical element of the present invention, and comprises, for example, four long sides and two oblique sides inclined with respect to the four sides, and the optical path of the laser light collimated by the collimator lens 2 It bends at two oblique sides and leads to the condenser lens 5.
  • the condenser lens 5 condenses the laser beam bent by the prism 3 and couples it to the core of the fiber 1.
  • the prism 3 is fixed to the holder 4, and a thermistor 9 is provided at the periphery of the prism 3 and in the holder 4.
  • the thermistor 9 corresponds to the temperature detection unit of the present invention, and detects the temperature of the prism 3.
  • a Peltier element 7 is attached to the holder 4, and the Peltier element 7 corresponds to the temperature control element of the present invention, and adjusts the temperature of the prism 3 in the holder 4.
  • the temperature control element may be an element other than the Peltier element 7.
  • a heat sink 8 for radiating heat of the Peltier element 7 is attached to the Peltier element 7.
  • the temperature control unit 10 controls the temperature of the prism 3 to a predetermined temperature by controlling the Peltier element 7 based on the temperature detected by the thermistor 9.
  • the temperature control unit 10 controls the temperature of the prism 3 to a predetermined temperature by controlling the Peltier element 7 based on the temperature detected by the thermistor 9. It is possible to suppress the fluctuation of the refractive index distribution of
  • FIG. 2 is a block diagram of a laser apparatus of Embodiment 2 of the present invention.
  • FIG. 2A is a front view of the laser device of the second embodiment
  • FIG. 2B is a top view of the laser device of the second embodiment.
  • the laser device of the second embodiment shown in FIG. 2 is different from the laser device of the first embodiment shown in FIG. 1 in the following points.
  • a holder 4a is disposed on the side 3a of the prism 3
  • a holder 4b is disposed on the side 3b of the prism 3
  • the prism 3 is fixed by the holders 4a and 4b.
  • a thermistor 9a is disposed in the holder 4a
  • a thermistor 9b is disposed in the holder 4b.
  • the thermistor 9 a detects the temperature of the side 3 a of the prism 3 and outputs first temperature information to the temperature control unit 10.
  • the thermistor 9 b detects the temperature of the side 3 b of the prism 3 and outputs the second temperature information to the temperature control unit 10.
  • the Peltier element 7a is disposed corresponding to the side 3a of the prism 3 and the holder 4a, and adjusts the temperature of the side 3a of the prism 3 via the holder 4a.
  • the Peltier element 7b is disposed corresponding to the side 3b of the prism 3 and the holder 4b, and adjusts the temperature of the side 3b of the prism 3 via the holder 4b.
  • the temperature control unit 10 controls the temperature of the side 3a of the prism 3 by controlling the Peltier element 7a based on the first temperature information detected by the thermistor 9a, and based on the second temperature information detected by the thermistor 9b.
  • the temperature of the side 3b of the prism 3 is controlled by controlling the element 7b.
  • the thermistor 9 a detects the temperature of the side 3 a of the prism 3 and outputs the first temperature information to the temperature control unit 10.
  • the thermistor 9 b detects the temperature of the side 3 b of the prism 3 and outputs the second temperature information to the temperature control unit 10.
  • the Peltier element 7 a adjusts the temperature of the side 3 a of the prism 3.
  • the Peltier element 7 b adjusts the temperature of the side 3 b of the prism 3.
  • the temperature control unit 10 controls the temperature of the side 3 a of the prism 3 by controlling the Peltier element 7 a based on the first temperature information detected by the thermistor 9 a.
  • the temperature control unit 10 controls the temperature of the side 3 b of the prism 3 by controlling the Peltier element 7 b based on the second temperature information detected by the thermistor 9 b.
  • the temperature control unit 10 can control the temperature of the side 3 a of the prism 3 and the temperature of the side 3 b of the prism 3 to the same temperature.
  • the temperature control unit 10 can perform control so as to make a temperature difference between the temperature of the side 3 a of the prism 3 and the temperature of the side 3 b of the prism 3.
  • the direction of light can be controlled in accordance with the change of the refractive index distribution in the prism 3. Accordingly, temperature control of the prism 3 can adjust the fiber coupling efficiency.
  • the temperature control unit 10 causes the temperature of the side 3 a of the prism 3 and the temperature of the side 3 b of the prism 3 to maximize the amount of light incident on the core of the fiber 6, that is, maximize the fiber coupling efficiency. And may be controlled. This control can maximize the fiber coupling efficiency.
  • the fiber coupling efficiency can be adjusted by temperature control of the prism 3.
  • FIG. 3 is a block diagram of a laser apparatus according to a modification of the second embodiment of the present invention.
  • a thermistor 9a is disposed corresponding to the side 3c different from the sides 3a and 3b of the prism 3.
  • a thermistor 9 b is disposed corresponding to the side 3 d different from the sides 3 a and 3 b of the prism 3.
  • the thermistor 9 a detects the temperature of the side 3 c of the prism 3 and outputs third temperature information to the temperature control unit 10.
  • the thermistor 9 b detects the temperature of the side 3 d of the prism 3 and outputs fourth temperature information to the temperature control unit 10.
  • the Peltier element 7 a is disposed corresponding to the side 3 c of the prism 3, and adjusts the temperature of the side 3 c of the prism 3.
  • the Peltier element 7 b is disposed corresponding to the side 3 d of the prism 3, and adjusts the temperature of the side 3 d of the prism 3.
  • the holder 4a is disposed outside the Peltier element 7a, and the holder 4b is disposed outside the Peltier element 7b.
  • the temperature control unit 10 controls the temperature of the side 3c of the prism 3 by controlling the Peltier element 7a based on the third temperature information detected by the thermistor 9a, and based on the fourth temperature information detected by the thermistor 9b.
  • the temperature of the side 3 d of the prism 3 is controlled by controlling the element 7 b.
  • the temperature control unit 10 causes the temperature of the side 3 c of the prism 3 and the temperature of the side 3 d of the prism 3 to maximize the amount of light incident on the core of the fiber 6, that is, maximize the fiber coupling efficiency. And control.
  • the same operation as the operation of the laser device of the second embodiment and the same effect can be obtained.
  • FIG. 4 is a side view of a laser apparatus according to a third embodiment of the present invention.
  • FIG. 5 is a block diagram of the laser device according to the third embodiment of the present invention as viewed from below, showing only the periphery of the prisms 3A and 3B.
  • the laser device includes a plurality of semiconductor lasers 1a to 1d, a plurality of collimator lenses 2a to 2d, a plurality of prisms 3A to 3D, a condenser lens 5, and a fiber 6.
  • Each of the plurality of semiconductor lasers 1a to 1d comprises a plurality of laser elements as shown in FIG. 4, and each of the plurality of laser elements emits a laser beam.
  • the plurality of collimator lenses 2a to 2d are arranged corresponding to the plurality of semiconductor lasers 1a to 1d.
  • Each of the plurality of collimating lenses 2a to 2d is composed of a plurality of collimating lens elements as shown in FIG. 4, and the plurality of collimating lens elements collimate the laser light from the plurality of laser elements.
  • the plurality of prisms 3A to 3D are arranged corresponding to the plurality of collimator lenses 2a to 2d, fixed to the holders 4A to 4D, and bend the optical paths of the laser beams collimated by the collimator lenses 2a to 2d.
  • the prisms 3A and 3D are larger than the prisms 3B and 3C.
  • the condenser lens 5 condenses the plurality of laser beams bent by the plurality of prisms 3A to 3D and couples the plurality of laser beams to the fiber 6.
  • FIG. 5 shows the prisms 3A and 3B.
  • a holder 4aA is disposed on the side 3aA of the prism 3A
  • a holder 4bA is disposed on the side 3bA of the prism 3A
  • the prism 3A is fixed by the holders 4aA and 4bA.
  • a thermistor 9aA is disposed in the holder 4aA
  • a thermistor 9bA is disposed in the holder 4bA.
  • the thermistor 9aA detects the temperature of the side 3aA of the prism 3A, and outputs temperature information to the temperature control unit 10.
  • the thermistor 9bA detects the temperature of the side 3bA of the prism 3A, and outputs temperature information to the temperature control unit 10.
  • the Peltier element 7aA is disposed corresponding to the side 3aA of the prism 3A and the holder 4aA, and adjusts the temperature of the side 3aA of the prism 3A via the holder 4aA.
  • Peltier element 7bA is arranged corresponding to side 3bA of prism 3A and holder 4bA, and adjusts the temperature of side 3bA of prism 3A via holder 4bA.
  • Temperature control unit 10 controls the temperature of side 3aA of prism 3A by controlling Peltier element 7aA based on the temperature information detected by thermistor 9aA, and controls Peltier element 7bA based on the temperature information detected by thermistor 9bA Thus, the temperature of the side 3bA of the prism 3A is controlled.
  • the temperature control unit 10 causes the temperature of the side 3aA of the prism 3A and the temperature of the side 3bA of the prism 3A to maximize the amount of light incident on the core of the fiber 6, that is, maximize the fiber coupling efficiency. And control.
  • a holder 4aB is disposed on the side 3aB of the prism 3B
  • a holder 4bB is disposed on the side 3bB of the prism 3B
  • the prism 3B is fixed by the holders 4aB and 4bB.
  • a thermistor 9aB is disposed in the holder 4aB
  • a thermistor 9bB is disposed in the holder 4bB.
  • the thermistor 9aB detects the temperature of the side 3aB of the prism 3B, and outputs temperature information to the temperature control unit 10.
  • the thermistor 9 b B detects the temperature of the side 3 b B of the prism 3 B, and outputs temperature information to the temperature control unit 10.
  • the Peltier element 7aB is disposed corresponding to the side 3aB of the prism 3B and the holder 4aB, and adjusts the temperature of the side 3aB of the prism 3B via the holder 4aB.
  • the Peltier element 7bB is disposed corresponding to the side 3bB of the prism 3B and the holder 4bB, and adjusts the temperature of the side 3bB of the prism 3B via the holder 4bB.
  • the temperature control unit 10 controls the temperature of the side 3aB of the prism 3B by controlling the Peltier element 7aB based on the temperature information detected by the thermistor 9aB, and controls the Peltier element 7bB based on the temperature information detected by the thermistor 9bB. Thus, the temperature of the side 3bB of the prism 3B is controlled.
  • the temperature control unit 10 causes the temperature of the side 3aB of the prism 3B and the temperature of the side 3bB of the prism 3B to maximize the amount of light incident on the core of the fiber 6, that is, maximize the fiber coupling efficiency. And control.
  • the prisms 3C and 3D are the same as the prisms 3A and 3B although not shown.
  • the temperature control unit 10 controls the temperature of the two sides of the prism for each of the prisms 3A, 3B, 3C, 3D. Change the internal refractive index distribution.
  • each prism 3A, 3B, 3C, 3D By adjusting the optical path for each of the prisms 3A, 3B, 3C, 3D, individual differences between the semiconductor lasers 1a to 1d and aberrations of the condenser lens 5 can be corrected, and each prism 3A,
  • the fiber coupling efficiency can be optimized for 3B, 3C, and 3D to obtain a high output as a whole.
  • the temperatures of the two sides of the prism 3 are controlled in the laser devices according to the first to third embodiments, the temperatures of the three or more sides of the prism 3 may be controlled without being limited thereto. good. In this case, it is necessary to arrange a holder, a thermistor, a Peltier element, and a heat sink corresponding to each side.
  • the prism 3 is used in the laser devices of the first to third embodiments, a beam splitter may be used instead of the prism 3.
  • the present invention is applicable to fiber coupled laser devices.

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  • Optics & Photonics (AREA)
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  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
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Abstract

In the present invention, a collimating lens collimates a laser beam from a laser-beam-emitting semiconductor laser. A transmissive optical element bends the light path of the laser beam collimated by the collimating lens. A condensing lens condenses the laser beam bent by the transmissive optical element, and couples said laser beam into a fibre. A temperature-detecting unit detects the temperature of the transmissive optical element. A temperature-adjusting element adjusts the temperature of the transmissive optical element. A temperature-controlling unit controls the temperature-adjusting element on the basis of the temperature detected by the temperature-detecting unit, and thereby controls the temperature of the transmissive optical element to a prescribed temperature.

Description

レーザ装置及び透過型光学素子の温度制御方法Laser apparatus and temperature control method of transmission type optical element
　本発明は、半導体レーザの出力を透過型光学素子を通してファイバに結合するレーザ装置及び透過型光学素子の温度制御方法に関する。 The present invention relates to a laser device that couples the output of a semiconductor laser to a fiber through a transmissive optical element and a temperature control method for the transmissive optical element.
　半導体レーザや固体レーザの出力をファイバに結合するレーザ装置は、例えば、特許文献１に記載された発光装置が知られている。 For example, a light emitting device described in Patent Document 1 is known as a laser device that couples the output of a semiconductor laser or a solid state laser to a fiber.
　特許文献１に記載された発光装置は、複数の光源からの出射光をコリメートして、コリメートされた光を透過型光学素子（プリズム）によりビーム径を変更したり、光路を変更している。 The light emitting device described in Patent Document 1 collimates outgoing light from a plurality of light sources, changes the beam diameter of the collimated light with a transmission type optical element (prism), or changes the optical path.
特開２０１５－７２９５６号公報JP, 2015-72956, A
　しかしながら、透過型光学素子を用いてビームを伝搬する際に、透過型光学素子のビーム吸収による温度変化や環境温度の変化によって、透過型光学素子の屈折率が変化する。 However, when transmitting a beam using a transmission type optical element, the refractive index of the transmission type optical element changes due to the temperature change due to the beam absorption of the transmission type optical element or the change of the environmental temperature.
　このため、ビームの光路が変わるため、半導体レーザの出力がファイバに結合されるファイバ結合効率が変化してしまう。特に、光路長が長くなる複数の半導体レーザからの光を合成するようなレーザ装置においては、ファイバ結合効率が大幅に変化する。 As a result, the optical path of the beam changes, which changes the fiber coupling efficiency with which the output of the semiconductor laser is coupled to the fiber. In particular, in a laser device that combines light from a plurality of semiconductor lasers whose optical path lengths are long, the fiber coupling efficiency changes significantly.
　本発明は、光路長が長い場合でもファイバ結合効率を安定化及び最適化することができるレーザ装置及び透過型光学素子の温度制御方法を提供する。 The present invention provides a laser device and a temperature control method of a transmission type optical device that can stabilize and optimize the fiber coupling efficiency even when the optical path length is long.
　上記の課題を解決するために、本発明のレーザ装置は、レーザ光を出射する半導体レーザと、前記半導体レーザからのレーザ光をコリメートするコリメートレンズと、前記コリメートレンズでコリメートされたレーザ光の光路を曲げるための透過型光学素子と、前記透過型光学素子で曲げられたレーザ光を集光してファイバに結合する集光レンズと、前記透過型光学素子の温度を検出する温度検出部と、前記透過型光学素子の温度を調整する温調素子と、前記温度検出部で検出された温度に基づき前記温調素子を制御することにより前記透過型光学素子の温度を所定の温度に制御する温度制御部を備える。 In order to solve the above problems, a laser device according to the present invention includes a semiconductor laser for emitting a laser beam, a collimator lens for collimating the laser beam from the semiconductor laser, and an optical path of the laser beam collimated by the collimator lens. A transmissive optical element for bending, a condensing lens for condensing the laser beam bent by the transmissive optical element and coupling it to a fiber, and a temperature detection unit for detecting the temperature of the transmissive optical element; A temperature control element for adjusting the temperature of the transmissive optical element, and a temperature for controlling the temperature of the transmissive optical element to a predetermined temperature by controlling the temperature control element based on the temperature detected by the temperature detection unit A control unit is provided.
　また、本発明のレーザ装置は、レーザ光を出射する半導体レーザと、前記半導体レーザからのレーザ光をコリメートするコリメートレンズと、前記コリメートレンズでコリメートされたレーザ光の光路を曲げるための透過型光学素子と、前記透過型光学素子で曲げられたレーザ光を集光してファイバに結合する集光レンズと、前記透過型光学素子の複数の辺に対応して配置され、前記透過型光学素子の対応する辺の温度を検出する複数の温度検出部と、前記透過型光学素子の前記複数の辺に対応して配置され、前記透過型光学素子の対応する辺の温度を調整する複数の温調素子と、前記透過型光学素子の前記複数の辺に、前記温度検出部で検出された温度に基づき前記温調素子を制御することにより前記透過型光学素子の対応する辺の温度を制御する温度制御部を備える。 Further, according to the laser device of the present invention, there is provided a semiconductor laser for emitting a laser beam, a collimating lens for collimating the laser beam from the semiconductor laser, and a transmissive optical system for bending an optical path of the laser beam collimated by the collimating lens. An element, a condensing lens for condensing laser light bent by the transmission type optical element and coupling it to a fiber, and the transmission type optical element disposed corresponding to a plurality of sides of the transmission type optical element A plurality of temperature detection units that detect the temperature of the corresponding side, and a plurality of temperature control that are disposed corresponding to the plurality of sides of the transmissive optical element and that adjust the temperature of the corresponding side of the transmissive optical element The temperature of the corresponding side of the transmission type optical element by controlling the temperature control element based on the temperature detected by the temperature detection unit on the plurality of sides of the element and the transmission type optical element A control temperature control unit.
　また、本発明のレーザ装置は、レーザ光を出射する複数の半導体レーザと、前記複数の半導体レーザに対応して配置され、前記半導体レーザからのレーザ光をコリメートする複数のコリメートレンズと、前記複数のコリメートレンズに対応して配置され、前記コリメートレンズでコリメートされたレーザ光の光路を曲げるための複数の透過型光学素子と、前記複数の透過型光学素子で曲げられた複数のレーザ光を集光してファイバに結合する集光レンズと、各々の前記透過型光学素子の複数の辺に対応して配置され、各々の前記透過型光学素子の対応する辺の温度を検出する複数の温度検出部と、各々の前記透過型光学素子の前記複数の辺に対応して配置され、各々の前記透過型光学素子の対応する辺の温度を調整する複数の温調素子と、各々の前記透過型光学素子の各辺毎に、前記温度検出部で検出された温度に基づき前記温調素子を制御することにより前記透過型光学素子の対応する辺の温度を制御する温度制御部とを備える。 A laser device according to the present invention includes a plurality of semiconductor lasers emitting laser light, a plurality of collimating lenses disposed corresponding to the plurality of semiconductor lasers, and collimating laser light from the semiconductor lasers, and the plurality A plurality of transmissive optical elements disposed corresponding to the collimating lens for bending the optical path of the laser light collimated by the collimating lens, and collecting the plurality of laser beams bent by the plurality of transmissive optical elements And a plurality of temperature detection devices disposed corresponding to a plurality of sides of each of the transmission type optical elements and detecting a temperature of a corresponding side of each of the transmission type optical elements. A plurality of temperature control elements, disposed corresponding to the plurality of sides of each of the transmissive optical elements, for adjusting the temperature of the corresponding side of each of the transmissive optical elements; A temperature control unit that controls the temperature of the corresponding side of the transmissive optical element by controlling the temperature control element based on the temperature detected by the temperature detection unit for each side of each of the transmissive optical elements And
　透過型光学素子の温度制御方法は、レーザ光を出射する半導体レーザと、前記半導体レーザからのレーザ光をコリメートするコリメートレンズと、前記コリメートレンズでコリメートされたレーザ光の光路を曲げるための透過型光学素子と、前記透過型光学素子で曲げられたレーザ光を集光してファイバに結合する集光レンズとを備えたレーザ装置の透過型光学素子の温度制御方法であって、前記透過型光学素子の複数の辺に対応して配置された複数の温度検出部により前記透過型光学素子の対応する辺の温度を検出する温度検出工程と、前記透過型光学素子の前記複数の辺に対応して配置された複数の温調素子により、前記透過型光学素子の対応する辺の温度を調整する温度調整工程と、前記透過型光学素子の前記複数の辺に、前記温度検出部で検出された温度に基づき温度制御部により前記温調素子を制御することにより前記透過型光学素子の対応する辺の温度を制御する温度制御工程とを備える。 The temperature control method of the transmission type optical element includes a semiconductor laser for emitting a laser beam, a collimator lens for collimating the laser beam from the semiconductor laser, and a transmission type for bending an optical path of the laser beam collimated by the collimator lens. A temperature control method of a transmission type optical element of a laser device comprising: an optical element; and a condensing lens which condenses laser light bent by the transmission type optical element and couples it to a fiber, wherein the transmission type optical element A temperature detection step of detecting the temperature of the corresponding side of the transmissive optical element by a plurality of temperature detection units arranged corresponding to a plurality of sides of the element; and corresponding to the plurality of sides of the transmissive optical element Temperature adjusting step of adjusting the temperature of the corresponding side of the transmissive optical element by the plurality of temperature control elements arranged in the second step; and the temperature on the plurality of sides of the transmissive optical element By controlling the temperature control device by a temperature control unit based on the detected temperature by the detection section and a temperature control step of controlling the temperature of the corresponding side of the transmissive optical element.
　本発明によれば、温度制御部は、温度検出部で検出された温度に基づき温調素子を制御することにより透過型光学素子の温度を所定の温度に制御するので、光路長が長い場合でもファイバ結合効率を安定化及び最適化することができる。 According to the present invention, since the temperature control unit controls the temperature of the transmissive optical element to a predetermined temperature by controlling the temperature adjustment element based on the temperature detected by the temperature detection unit, even when the optical path length is long. Fiber coupling efficiency can be stabilized and optimized.
　また、温度制御部は、透過型光学素子の前記複数の辺に、温度検出部で検出された温度に基づき温調素子を制御することにより透過型光学素子の対応する辺の温度を制御するので、透過型光学素子内の温度勾配に応じて屈折率分布が生じ、透過型光学素子内の光路が曲げられる。即ち、透過型光学素子の温度制御によりファイバ結合効率を調整することができる。 In addition, since the temperature control unit controls the temperature control element on the plurality of sides of the transmission type optical element based on the temperatures detected by the temperature detection unit, the temperature control portion controls the temperature of the corresponding side of the transmission type optical element. The refractive index distribution is generated according to the temperature gradient in the transmission type optical element, and the light path in the transmission type optical element is bent. That is, the fiber coupling efficiency can be adjusted by temperature control of the transmission type optical element.
図１は本発明の実施例１のレーザ装置の構成図である。FIG. 1 is a block diagram of a laser apparatus of Embodiment 1 of the present invention. 図２は本発明の実施例２のレーザ装置の構成図である。FIG. 2 is a block diagram of a laser apparatus of Embodiment 2 of the present invention. 図３は本発明の実施例２の変形例のレーザ装置の構成図である。FIG. 3 is a block diagram of a laser apparatus according to a modification of the second embodiment of the present invention. 図４は本発明の実施例３のレーザ装置を側面から見た構成図である。FIG. 4 is a side view of a laser apparatus according to a third embodiment of the present invention. 図５は本発明の実施例３のレーザ装置を下側から見た構成図である。FIG. 5 is a block diagram of the laser device according to the third embodiment of the present invention as viewed from below.
　（実施例１）
　以下、本発明の実施形態に係るレーザ装置を図面を参照しながら詳細に説明する。図１は本発明の実施例１のレーザ装置の構成図である。 Example 1
Hereinafter, a laser apparatus according to an embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 is a block diagram of a laser apparatus according to a first embodiment of the present invention.
　実施例１のレーザ装置は、半導体レーザ１、コリメートレンズ２、プリズム３、ホルダ４、集光レンズ５、ファイバ６、ペルチェ素子７、ヒートシンク８、サーミスタ９、温度制御部１０を備えている。 The laser apparatus of the first embodiment includes a semiconductor laser 1, a collimator lens 2, a prism 3, a holder 4, a condenser lens 5, a fiber 6, a Peltier element 7, a heat sink 8, a thermistor 9, and a temperature control unit 10.
　半導体レーザ１は、レーザ光を出射する。コリメートレンズ２は、半導体レーザ１からのレーザ光をコリメートする。 The semiconductor laser 1 emits a laser beam. The collimator lens 2 collimates the laser light from the semiconductor laser 1.
　プリズム３は、本発明の透過型光学素子に対応し、例えば縦に長い４つの辺と４つの辺に対して傾斜した２つの斜辺とからなり、コリメートレンズ２でコリメートされたレーザ光の光路を２つの斜辺で曲げて、集光レンズ５に導く。 The prism 3 corresponds to the transmission type optical element of the present invention, and comprises, for example, four long sides and two oblique sides inclined with respect to the four sides, and the optical path of the laser light collimated by the collimator lens 2 It bends at two oblique sides and leads to the condenser lens 5.
　集光レンズ５は、プリズム３で曲げられたレーザ光を集光してファイバ１のコアに結合する。プリズム３は、ホルダ４に固定されており、プリズム３の周辺部で且つホルダ４内にサーミスタ９が設けられている。サーミスタ９は、本発明の温度検出部に対応し、プリズム３の温度を検出する。 The condenser lens 5 condenses the laser beam bent by the prism 3 and couples it to the core of the fiber 1. The prism 3 is fixed to the holder 4, and a thermistor 9 is provided at the periphery of the prism 3 and in the holder 4. The thermistor 9 corresponds to the temperature detection unit of the present invention, and detects the temperature of the prism 3.
　ホルダ４にはペルチェ素子７が取り付けられており、ペルチェ素子７は、本発明の温調素子に対応し、ホルダ４内のプリズム３の温度を調整する。温調素子は、ペルチェ素子７以外の素子を用いてもよい。 A Peltier element 7 is attached to the holder 4, and the Peltier element 7 corresponds to the temperature control element of the present invention, and adjusts the temperature of the prism 3 in the holder 4. The temperature control element may be an element other than the Peltier element 7.
　ペルチェ素子７には、ペルチェ素子７の放熱を行うヒートシンク８が取り付けられている。温度制御部１０は、サーミスタ９で検出された温度に基づきペルチェ素子７を制御することによりプリズム３の温度を所定の温度に制御する。 A heat sink 8 for radiating heat of the Peltier element 7 is attached to the Peltier element 7. The temperature control unit 10 controls the temperature of the prism 3 to a predetermined temperature by controlling the Peltier element 7 based on the temperature detected by the thermistor 9.
　このように実施例１のレーザ装置によれば、温度制御部１０は、サーミスタ９で検出された温度に基づきペルチェ素子７を制御することによりプリズム３の温度を所定の温度に制御し、プリズム内の屈折率分布の変動を抑制することができる。 As described above, according to the laser device of the first embodiment, the temperature control unit 10 controls the temperature of the prism 3 to a predetermined temperature by controlling the Peltier element 7 based on the temperature detected by the thermistor 9. It is possible to suppress the fluctuation of the refractive index distribution of
　従って、プリズム３を用いてビーム伝搬を行っても、特に、光路長が長い場合でもファイバ結合効率を安定化及び最適化することができる。 Therefore, even if beam propagation is performed using the prism 3, fiber coupling efficiency can be stabilized and optimized even when the optical path length is long.
　（実施例２）
　図２は本発明の実施例２のレーザ装置の構成図である。図２（ａ）は実施例２のレーザ装置の正面図、図２（ｂ）は実施例２のレーザ装置の上面図である。図２に示す実施例２のレーザ装置は、図１に示す実施例１のレーザ装置に対して、以下の点が異なる。 (Example 2)
FIG. 2 is a block diagram of a laser apparatus of Embodiment 2 of the present invention. FIG. 2A is a front view of the laser device of the second embodiment, and FIG. 2B is a top view of the laser device of the second embodiment. The laser device of the second embodiment shown in FIG. 2 is different from the laser device of the first embodiment shown in FIG. 1 in the following points.
　プリズム３の辺３ａにはホルダ４ａが配置され、プリズム３の辺３ｂにはホルダ４ｂが配置され、プリズム３は、ホルダ４ａ，４ｂにより固定されている。ホルダ４ａ内にはサーミスタ９ａが配置され、ホルダ４ｂ内にはサーミスタ９ｂが配置されている。 A holder 4a is disposed on the side 3a of the prism 3, a holder 4b is disposed on the side 3b of the prism 3, and the prism 3 is fixed by the holders 4a and 4b. A thermistor 9a is disposed in the holder 4a, and a thermistor 9b is disposed in the holder 4b.
　サーミスタ９ａは、プリズム３の辺３ａの温度を検出して、第１温度情報を温度制御部１０に出力する。サーミスタ９ｂは、プリズム３の辺３ｂの温度を検出して、第２温度情報を温度制御部１０に出力する。 The thermistor 9 a detects the temperature of the side 3 a of the prism 3 and outputs first temperature information to the temperature control unit 10. The thermistor 9 b detects the temperature of the side 3 b of the prism 3 and outputs the second temperature information to the temperature control unit 10.
　ペルチェ素子７ａは、プリズム３の辺３ａ及びホルダ４ａに対応して配置され、ホルダ４ａを介してプリズム３の辺３ａの温度を調整する。ペルチェ素子７ｂは、プリズム３の辺３ｂ及びホルダ４ｂに対応して配置され、ホルダ４ｂを介してプリズム３の辺３ｂの温度を調整する。 The Peltier element 7a is disposed corresponding to the side 3a of the prism 3 and the holder 4a, and adjusts the temperature of the side 3a of the prism 3 via the holder 4a. The Peltier element 7b is disposed corresponding to the side 3b of the prism 3 and the holder 4b, and adjusts the temperature of the side 3b of the prism 3 via the holder 4b.
　温度制御部１０は、サーミスタ９ａで検出された第１温度情報に基づきペルチェ素子７ａを制御することによりプリズム３の辺３ａの温度を制御し、サーミスタ９ｂで検出された第２温度情報に基づきペルチェ素子７ｂを制御することによりプリズム３の辺３ｂの温度を制御する。 The temperature control unit 10 controls the temperature of the side 3a of the prism 3 by controlling the Peltier element 7a based on the first temperature information detected by the thermistor 9a, and based on the second temperature information detected by the thermistor 9b. The temperature of the side 3b of the prism 3 is controlled by controlling the element 7b.
　このように実施例２のレーザ装置の動作、即ち、プリズムの温度制御方法を説明する。まず、サーミスタ９ａは、プリズム３の辺３ａの温度を検出して、第１温度情報を温度制御部１０に出力する。サーミスタ９ｂは、プリズム３の辺３ｂの温度を検出して、第２温度情報を温度制御部１０に出力する。 The operation of the laser apparatus of Embodiment 2, that is, the method of controlling the temperature of the prism will be described. First, the thermistor 9 a detects the temperature of the side 3 a of the prism 3 and outputs the first temperature information to the temperature control unit 10. The thermistor 9 b detects the temperature of the side 3 b of the prism 3 and outputs the second temperature information to the temperature control unit 10.
　ペルチェ素子７ａは、プリズム３の辺３ａの温度を調整する。ペルチェ素子７ｂは、プリズム３の辺３ｂの温度を調整する。 The Peltier element 7 a adjusts the temperature of the side 3 a of the prism 3. The Peltier element 7 b adjusts the temperature of the side 3 b of the prism 3.
　さらに、温度制御部１０は、サーミスタ９ａで検出された第１温度情報に基づきペルチェ素子７ａを制御することによりプリズム３の辺３ａの温度を制御する。温度制御部１０は、サーミスタ９ｂで検出された第２温度情報に基づきペルチェ素子７ｂを制御することによりプリズム３の辺３ｂの温度を制御する。例えば、温度制御部１０は、プリズム３の辺３ａの温度とプリズム３の辺３ｂの温度とを同じ温度に制御することができる。 Furthermore, the temperature control unit 10 controls the temperature of the side 3 a of the prism 3 by controlling the Peltier element 7 a based on the first temperature information detected by the thermistor 9 a. The temperature control unit 10 controls the temperature of the side 3 b of the prism 3 by controlling the Peltier element 7 b based on the second temperature information detected by the thermistor 9 b. For example, the temperature control unit 10 can control the temperature of the side 3 a of the prism 3 and the temperature of the side 3 b of the prism 3 to the same temperature.
　また、温度制御部１０は、プリズム３の辺３ａの温度とプリズム３の辺３ｂの温度とに温度差を付けるように制御することができる。この場合には、プリズム３内の屈折率分布の変化に伴い、光の方向を制御することができる。従って、プリズム３の温度制御によりファイバ結合効率を調整することができる。 Further, the temperature control unit 10 can perform control so as to make a temperature difference between the temperature of the side 3 a of the prism 3 and the temperature of the side 3 b of the prism 3. In this case, the direction of light can be controlled in accordance with the change of the refractive index distribution in the prism 3. Accordingly, temperature control of the prism 3 can adjust the fiber coupling efficiency.
　また、温度制御部１０は、ファイバ６のコアへ入射する光量が最大となるように、即ち、ファイバ結合効率が最大になるように、プリズム３の辺３ａの温度とプリズム３の辺３ｂの温度とを制御するようにしても良い。このように制御すれば、ファイバ結合効率を最大にすることができる。 Further, the temperature control unit 10 causes the temperature of the side 3 a of the prism 3 and the temperature of the side 3 b of the prism 3 to maximize the amount of light incident on the core of the fiber 6, that is, maximize the fiber coupling efficiency. And may be controlled. This control can maximize the fiber coupling efficiency.
　また、例えば、プリズム３の上面と下面の温度を制御する場合、上面の温度を下面の温度よりも高くすると、プリズム３の温度勾配に応じて屈折率分布が生じ、プリズム３内の光路が真直ぐではなく、上方向に曲げられる。これによれば、プリズム３の温度制御によりファイバ結合効率を調整することができる。 Also, for example, when controlling the temperatures of the upper surface and the lower surface of the prism 3, if the temperature of the upper surface is higher than the temperature of the lower surface, a refractive index distribution is generated according to the temperature gradient of the prism 3 and the light path in the prism 3 is straight It is not bent upwards. According to this, the fiber coupling efficiency can be adjusted by temperature control of the prism 3.
　（実施例２の変形例）
　図３は本発明の実施例２の変形例のレーザ装置の構成図である。図３に示す実施例２の変形例のレーザ装置は、プリズム３の辺３ａ，３ｂとは別の辺３ｃに対応してサーミスタ９ａが配置されている。また、プリズム３の辺３ａ，３ｂとは別の辺３ｄに対応してサーミスタ９ｂが配置されている。 (Modification of Embodiment 2)
FIG. 3 is a block diagram of a laser apparatus according to a modification of the second embodiment of the present invention. In the laser device of the modification of the second embodiment shown in FIG. 3, a thermistor 9a is disposed corresponding to the side 3c different from the sides 3a and 3b of the prism 3. Further, a thermistor 9 b is disposed corresponding to the side 3 d different from the sides 3 a and 3 b of the prism 3.
　サーミスタ９ａは、プリズム３の辺３ｃの温度を検出して、第３温度情報を温度制御部１０に出力する。サーミスタ９ｂは、プリズム３の辺３ｄの温度を検出して、第４温度情報を温度制御部１０に出力する。 The thermistor 9 a detects the temperature of the side 3 c of the prism 3 and outputs third temperature information to the temperature control unit 10. The thermistor 9 b detects the temperature of the side 3 d of the prism 3 and outputs fourth temperature information to the temperature control unit 10.
　ペルチェ素子７ａは、プリズム３の辺３ｃに対応して配置され、プリズム３の辺３ｃの温度を調整する。ペルチェ素子７ｂは、プリズム３の辺３ｄに対応して配置され、プリズム３の辺３ｄの温度を調整する。ペルチェ素子７ａの外側にホルダ４ａが配置され、ペルチェ素子７ｂの外側にホルダ４ｂが配置されている。 The Peltier element 7 a is disposed corresponding to the side 3 c of the prism 3, and adjusts the temperature of the side 3 c of the prism 3. The Peltier element 7 b is disposed corresponding to the side 3 d of the prism 3, and adjusts the temperature of the side 3 d of the prism 3. The holder 4a is disposed outside the Peltier element 7a, and the holder 4b is disposed outside the Peltier element 7b.
　温度制御部１０は、サーミスタ９ａで検出された第３温度情報に基づきペルチェ素子７ａを制御することによりプリズム３の辺３ｃの温度を制御し、サーミスタ９ｂで検出された第４温度情報に基づきペルチェ素子７ｂを制御することによりプリズム３の辺３ｄの温度を制御する。 The temperature control unit 10 controls the temperature of the side 3c of the prism 3 by controlling the Peltier element 7a based on the third temperature information detected by the thermistor 9a, and based on the fourth temperature information detected by the thermistor 9b. The temperature of the side 3 d of the prism 3 is controlled by controlling the element 7 b.
　また、温度制御部１０は、ファイバ６のコアへ入射する光量が最大となるように、即ち、ファイバ結合効率が最大になるように、プリズム３の辺３ｃの温度とプリズム３の辺３ｄの温度とを制御する。 Further, the temperature control unit 10 causes the temperature of the side 3 c of the prism 3 and the temperature of the side 3 d of the prism 3 to maximize the amount of light incident on the core of the fiber 6, that is, maximize the fiber coupling efficiency. And control.
　このように実施例２の変形例のレーザ装置によれば、実施例２のレーザ装置の動作と同様に動作し、且つ同様な効果が得られる。 As described above, according to the laser device of the modified example of the second embodiment, the same operation as the operation of the laser device of the second embodiment and the same effect can be obtained.
　（実施例３）
　図４は本発明の実施例３のレーザ装置を側面から見た構成図である。図５は本発明の実施例３のレーザ装置を下側から見た構成図でプリズム３Ａ，３Ｂの周辺のみを示す図ある。 (Example 3)
FIG. 4 is a side view of a laser apparatus according to a third embodiment of the present invention. FIG. 5 is a block diagram of the laser device according to the third embodiment of the present invention as viewed from below, showing only the periphery of the prisms 3A and 3B.
　レーザ装置は、複数の半導体レーザ１ａ～１ｄ、複数のコリメートレンズ２ａ～２ｄ、複数のプリズム３Ａ～３Ｄ、集光レンズ５、ファイバ６を備えている。 The laser device includes a plurality of semiconductor lasers 1a to 1d, a plurality of collimator lenses 2a to 2d, a plurality of prisms 3A to 3D, a condenser lens 5, and a fiber 6.
　複数の半導体レーザ１ａ～１ｄの各々は、図４に示すように複数のレーザ素子からなり、複数のレーザ素子の各々は、レーザ光を出射する。 Each of the plurality of semiconductor lasers 1a to 1d comprises a plurality of laser elements as shown in FIG. 4, and each of the plurality of laser elements emits a laser beam.
　複数のコリメートレンズ２ａ～２ｄは、複数の半導体レーザ１ａ～１ｄに対応して配置されている。複数のコリメートレンズ２ａ～２ｄの各々は、図４に示すように複数のコリメートレンズ素子からなり、複数のコリメートレンズ素子は、複数のレーザ素子からのレーザ光をコリメートする。 The plurality of collimator lenses 2a to 2d are arranged corresponding to the plurality of semiconductor lasers 1a to 1d. Each of the plurality of collimating lenses 2a to 2d is composed of a plurality of collimating lens elements as shown in FIG. 4, and the plurality of collimating lens elements collimate the laser light from the plurality of laser elements.
　複数のプリズム３Ａ～３Ｄは、複数のコリメートレンズ２ａ～２ｄに対応して配置され、ホルダ４Ａ～４Ｄに固定され、コリメートレンズ２ａ～２ｄでコリメートされたレーザ光の光路を曲げる。プリズム３Ａ，３Ｄは、プリズム３Ｂ，３Ｃよりも大きい。 The plurality of prisms 3A to 3D are arranged corresponding to the plurality of collimator lenses 2a to 2d, fixed to the holders 4A to 4D, and bend the optical paths of the laser beams collimated by the collimator lenses 2a to 2d. The prisms 3A and 3D are larger than the prisms 3B and 3C.
　集光レンズ５は、複数のプリズム３Ａ～３Ｄで曲げられた複数のレーザ光を集光してファイバ６に結合する。 The condenser lens 5 condenses the plurality of laser beams bent by the plurality of prisms 3A to 3D and couples the plurality of laser beams to the fiber 6.
　図５では、プリズム３Ａ，３Ｂについて示す。プリズム３Ａの辺３ａＡにはホルダ４ａＡが配置され、プリズム３Ａの辺３ｂＡにはホルダ４ｂＡが配置され、プリズム３Ａは、ホルダ４ａＡ，４ｂＡにより固定されている。ホルダ４ａＡ内にはサーミスタ９ａＡが配置され、ホルダ４ｂＡ内にはサーミスタ９ｂＡが配置されている。 FIG. 5 shows the prisms 3A and 3B. A holder 4aA is disposed on the side 3aA of the prism 3A, a holder 4bA is disposed on the side 3bA of the prism 3A, and the prism 3A is fixed by the holders 4aA and 4bA. A thermistor 9aA is disposed in the holder 4aA, and a thermistor 9bA is disposed in the holder 4bA.
　サーミスタ９ａＡは、プリズム３Ａの辺３ａＡの温度を検出して、温度情報を温度制御部１０に出力する。サーミスタ９ｂＡは、プリズム３Ａの辺３ｂＡの温度を検出して、温度情報を温度制御部１０に出力する。 The thermistor 9aA detects the temperature of the side 3aA of the prism 3A, and outputs temperature information to the temperature control unit 10. The thermistor 9bA detects the temperature of the side 3bA of the prism 3A, and outputs temperature information to the temperature control unit 10.
　ペルチェ素子７ａＡは、プリズム３Ａの辺３ａＡ及びホルダ４ａＡに対応して配置され、ホルダ４ａＡを介してプリズム３Ａの辺３ａＡの温度を調整する。ペルチェ素子７ｂＡは、プリズム３Ａの辺３ｂＡ及びホルダ４ｂＡに対応して配置され、ホルダ４ｂＡを介してプリズム３Ａの辺３ｂＡの温度を調整する。 The Peltier element 7aA is disposed corresponding to the side 3aA of the prism 3A and the holder 4aA, and adjusts the temperature of the side 3aA of the prism 3A via the holder 4aA. Peltier element 7bA is arranged corresponding to side 3bA of prism 3A and holder 4bA, and adjusts the temperature of side 3bA of prism 3A via holder 4bA.
　温度制御部１０は、サーミスタ９ａＡで検出された温度情報に基づきペルチェ素子７ａＡを制御することによりプリズム３Ａの辺３ａＡの温度を制御し、サーミスタ９ｂＡで検出された温度情報に基づきペルチェ素子７ｂＡを制御することによりプリズム３Ａの辺３ｂＡの温度を制御する。 Temperature control unit 10 controls the temperature of side 3aA of prism 3A by controlling Peltier element 7aA based on the temperature information detected by thermistor 9aA, and controls Peltier element 7bA based on the temperature information detected by thermistor 9bA Thus, the temperature of the side 3bA of the prism 3A is controlled.
　また、温度制御部１０は、ファイバ６のコアへ入射する光量が最大となるように、即ち、ファイバ結合効率が最大になるように、プリズム３Ａの辺３ａＡの温度とプリズム３Ａの辺３ｂＡの温度とを制御する。 Further, the temperature control unit 10 causes the temperature of the side 3aA of the prism 3A and the temperature of the side 3bA of the prism 3A to maximize the amount of light incident on the core of the fiber 6, that is, maximize the fiber coupling efficiency. And control.
　次に、プリズム３Ｂの辺３ａＢにはホルダ４ａＢが配置され、プリズム３Ｂの辺３ｂＢにはホルダ４ｂＢが配置され、プリズム３Ｂは、ホルダ４ａＢ，４ｂＢにより固定されている。ホルダ４ａＢ内にはサーミスタ９ａＢが配置され、ホルダ４ｂＢ内にはサーミスタ９ｂＢが配置されている。 Next, a holder 4aB is disposed on the side 3aB of the prism 3B, a holder 4bB is disposed on the side 3bB of the prism 3B, and the prism 3B is fixed by the holders 4aB and 4bB. A thermistor 9aB is disposed in the holder 4aB, and a thermistor 9bB is disposed in the holder 4bB.
　サーミスタ９ａＢは、プリズム３Ｂの辺３ａＢの温度を検出して、温度情報を温度制御部１０に出力する。サーミスタ９ｂＢは、プリズム３Ｂの辺３ｂＢの温度を検出して、温度情報を温度制御部１０に出力する。 The thermistor 9aB detects the temperature of the side 3aB of the prism 3B, and outputs temperature information to the temperature control unit 10. The thermistor 9 b B detects the temperature of the side 3 b B of the prism 3 B, and outputs temperature information to the temperature control unit 10.
　ペルチェ素子７ａＢは、プリズム３Ｂの辺３ａＢ及びホルダ４ａＢに対応して配置され、ホルダ４ａＢを介してプリズム３Ｂの辺３ａＢの温度を調整する。ペルチェ素子７ｂＢは、プリズム３Ｂの辺３ｂＢ及びホルダ４ｂＢに対応して配置され、ホルダ４ｂＢを介してプリズム３Ｂの辺３ｂＢの温度を調整する。 The Peltier element 7aB is disposed corresponding to the side 3aB of the prism 3B and the holder 4aB, and adjusts the temperature of the side 3aB of the prism 3B via the holder 4aB. The Peltier element 7bB is disposed corresponding to the side 3bB of the prism 3B and the holder 4bB, and adjusts the temperature of the side 3bB of the prism 3B via the holder 4bB.
　温度制御部１０は、サーミスタ９ａＢで検出された温度情報に基づきペルチェ素子７ａＢを制御することによりプリズム３Ｂの辺３ａＢの温度を制御し、サーミスタ９ｂＢで検出された温度情報に基づきペルチェ素子７ｂＢを制御することによりプリズム３Ｂの辺３ｂＢの温度を制御する。 The temperature control unit 10 controls the temperature of the side 3aB of the prism 3B by controlling the Peltier element 7aB based on the temperature information detected by the thermistor 9aB, and controls the Peltier element 7bB based on the temperature information detected by the thermistor 9bB. Thus, the temperature of the side 3bB of the prism 3B is controlled.
　また、温度制御部１０は、ファイバ６のコアへ入射する光量が最大となるように、即ち、ファイバ結合効率が最大になるように、プリズム３Ｂの辺３ａＢの温度とプリズム３Ｂの辺３ｂＢの温度とを制御する。 Further, the temperature control unit 10 causes the temperature of the side 3aB of the prism 3B and the temperature of the side 3bB of the prism 3B to maximize the amount of light incident on the core of the fiber 6, that is, maximize the fiber coupling efficiency. And control.
　なお、プリズム３Ｃ，３Ｄについては、図示していないが、プリズム３Ａ，３Ｂと同様である。 The prisms 3C and 3D are the same as the prisms 3A and 3B although not shown.
　このように構成された実施例３のレーザ装置によれば、プリズム３Ａ，３Ｂ，３Ｃ，３Ｄの各々のプリズム毎に、温度制御部１０がプリズムの２つの辺の温度を制御することで、プリズム内部の屈折率分布を変更させる。 According to the laser apparatus of the third embodiment configured as described above, the temperature control unit 10 controls the temperature of the two sides of the prism for each of the prisms 3A, 3B, 3C, 3D. Change the internal refractive index distribution.
　プリズム３Ａ，３Ｂ，３Ｃ，３Ｄの各々のプリズム毎に、光路を調整することで、各半導体レーザ１ａ～１ｄの個体差、集光レンズ５の収差を補正することができ、各々のプリズム３Ａ，３Ｂ，３Ｃ，３Ｄについて、ファイバ結合効率を最適化して全体として高い出力を得ることができる。 By adjusting the optical path for each of the prisms 3A, 3B, 3C, 3D, individual differences between the semiconductor lasers 1a to 1d and aberrations of the condenser lens 5 can be corrected, and each prism 3A, The fiber coupling efficiency can be optimized for 3B, 3C, and 3D to obtain a high output as a whole.
　なお、実施例１乃至実施例３のレーザ装置では、プリズム３の２つの辺の温度を制御したが、これに限定されることなく、プリズム３の３つ以上の辺の温度を制御しても良い。この場合には、各辺に対応させて、ホルダ、サーミスタ、ペルチェ素子、ヒートシンクを配置する必要がある。 Although the temperatures of the two sides of the prism 3 are controlled in the laser devices according to the first to third embodiments, the temperatures of the three or more sides of the prism 3 may be controlled without being limited thereto. good. In this case, it is necessary to arrange a holder, a thermistor, a Peltier element, and a heat sink corresponding to each side.
　また、実施例１乃至実施例３のレーザ装置では、プリズム３を用いたが、プリズム３の代わりに、ビームスプリッタを用いても良い。 Further, although the prism 3 is used in the laser devices of the first to third embodiments, a beam splitter may be used instead of the prism 3.
　本発明は、ファイバ結合型レーザ装置に適用可能である。 The present invention is applicable to fiber coupled laser devices.

Claims (7)

  1. 　レーザ光を出射する半導体レーザと、
    　前記半導体レーザからのレーザ光をコリメートするコリメートレンズと、
    　前記コリメートレンズでコリメートされたレーザ光の光路を曲げるための透過型光学素子と、
    　前記透過型光学素子で曲げられたレーザ光を集光してファイバに結合する集光レンズと、
    　前記透過型光学素子の温度を検出する温度検出部と、
    　前記透過型光学素子の温度を調整する温調素子と、
    　前記温度検出部で検出された温度に基づき前記温調素子を制御することにより前記透過型光学素子の温度を所定の温度に制御する温度制御部と、
    を備えるレーザ装置。     A semiconductor laser for emitting laser light;
    A collimating lens for collimating laser light from the semiconductor laser;
    A transmissive optical element for bending the optical path of the laser light collimated by the collimating lens;
    A condensing lens for condensing the laser light bent by the transmission type optical element and coupling it to a fiber;
    A temperature detection unit that detects the temperature of the transmissive optical element;
    A temperature control element for adjusting the temperature of the transmissive optical element;
    A temperature control unit that controls the temperature of the transmissive optical element to a predetermined temperature by controlling the temperature control element based on the temperature detected by the temperature detection unit;
    Laser device.
  2. 　レーザ光を出射する半導体レーザと、
    　前記半導体レーザからのレーザ光をコリメートするコリメートレンズと、
    　前記コリメートレンズでコリメートされたレーザ光の光路を曲げるための透過型光学素子と、
    　前記透過型光学素子で曲げられたレーザ光を集光してファイバに結合する集光レンズと、
    　前記透過型光学素子の複数の辺に対応して配置され、前記透過型光学素子の対応する辺の温度を検出する複数の温度検出部と、
    　前記透過型光学素子の前記複数の辺に対応して配置され、前記透過型光学素子の対応する辺の温度を調整する複数の温調素子と、
    　前記透過型光学素子の前記複数の辺に、前記温度検出部で検出された温度に基づき前記温調素子を制御することにより前記透過型光学素子の対応する辺の温度を制御する温度制御部と、
    を備えるレーザ装置。     A semiconductor laser for emitting laser light;
    A collimating lens for collimating laser light from the semiconductor laser;
    A transmissive optical element for bending the optical path of the laser light collimated by the collimating lens;
    A condensing lens for condensing the laser light bent by the transmission type optical element and coupling it to a fiber;
    A plurality of temperature detection units disposed corresponding to a plurality of sides of the transmission type optical element and detecting temperatures of corresponding sides of the transmission type optical element;
    A plurality of temperature control elements disposed corresponding to the plurality of sides of the transmission type optical element and adjusting the temperature of the corresponding side of the transmission type optical element;
    A temperature control unit for controlling the temperature of the corresponding side of the transmissive optical element by controlling the temperature control element on the plurality of sides of the transmissive optical element based on the temperature detected by the temperature detection unit; ,
    Laser device.
  3. 　前記温度制御部は、前記ファイバのコアへ入射する光量が最大となるように前記透過型光学素子の複数の辺の温度を制御する請求項２記載のレーザ装置。 The laser apparatus according to claim 2, wherein the temperature control unit controls the temperatures of the plurality of sides of the transmission type optical element such that the amount of light incident on the core of the fiber is maximized.
  4. 　レーザ光を出射する複数の半導体レーザと、
    　前記複数の半導体レーザに対応して配置され、前記半導体レーザからのレーザ光をコリメートする複数のコリメートレンズと、
    　前記複数のコリメートレンズに対応して配置され、前記コリメートレンズでコリメートされたレーザ光の光路を曲げるための複数の透過型光学素子と、
    　前記複数の透過型光学素子で曲げられた複数のレーザ光を集光してファイバに結合する集光レンズと、
    　各々の前記透過型光学素子の複数の辺に対応して配置され、各々の前記透過型光学素子の対応する辺の温度を検出する複数の温度検出部と、
    　各々の前記透過型光学素子の前記複数の辺に対応して配置され、各々の前記透過型光学素子の対応する辺の温度を調整する複数の温調素子と、
    　各々の前記透過型光学素子の各辺毎に、前記温度検出部で検出された温度に基づき前記温調素子を制御することにより前記透過型光学素子の対応する辺の温度を制御する温度制御部と、
    を備えるレーザ装置。     A plurality of semiconductor lasers emitting laser light;
    A plurality of collimating lenses disposed corresponding to the plurality of semiconductor lasers and collimating laser light from the semiconductor lasers;
    A plurality of transmissive optical elements disposed corresponding to the plurality of collimator lenses, for bending the optical path of the laser light collimated by the collimator lenses;
    A condensing lens for condensing a plurality of laser beams bent by the plurality of transmission optical elements and coupling the plurality of laser beams to a fiber;
    A plurality of temperature detection units disposed corresponding to a plurality of sides of each of the transmissive optical elements, for detecting temperatures of corresponding sides of the respective transmissive optical elements;
    A plurality of temperature control elements disposed corresponding to the plurality of sides of each of the transmissive optical elements and adjusting the temperature of the corresponding side of each of the transmissive optical elements;
    A temperature control unit that controls the temperature of the corresponding side of the transmissive optical element by controlling the temperature control element based on the temperature detected by the temperature detection unit for each side of each transmissive optical element When,
    Laser device.
  5. 　前記温度制御部は、前記ファイバのコアへ入射する光量が最大となるように前記透過型光学素子の複数の辺の温度を制御する請求項４記載のレーザ装置。 5. The laser apparatus according to claim 4, wherein the temperature control unit controls the temperatures of the plurality of sides of the transmission type optical element such that the amount of light incident on the core of the fiber is maximized.
  6. 　レーザ光を出射する半導体レーザと、前記半導体レーザからのレーザ光をコリメートするコリメートレンズと、前記コリメートレンズでコリメートされたレーザ光の光路を曲げるための透過型光学素子と、前記透過型光学素子で曲げられたレーザ光を集光してファイバに結合する集光レンズとを備えたレーザ装置の透過型光学素子の温度制御方法であって、
    　前記透過型光学素子の複数の辺に対応して配置された複数の温度検出部により前記透過型光学素子の対応する辺の温度を検出する温度検出工程と、
    　前記透過型光学素子の前記複数の辺に対応して配置された複数の温調素子により、前記透過型光学素子の対応する辺の温度を調整する温度調整工程と、
    　前記透過型光学素子の前記複数の辺に、前記温度検出部で検出された温度に基づき温度制御部により前記温調素子を制御することにより前記透過型光学素子の対応する辺の温度を制御する温度制御工程と、
    を備える透過型光学素子の温度制御方法。     A semiconductor laser for emitting a laser beam, a collimating lens for collimating the laser beam from the semiconductor laser, a transmissive optical element for bending an optical path of the laser beam collimated by the collimating lens, and the transmissive optical element What is claimed is: 1. A temperature control method of a transmission type optical element of a laser device, comprising: a focusing lens for focusing bent laser light and coupling it to a fiber,
    A temperature detection step of detecting a temperature of a corresponding side of the transmission type optical element by a plurality of temperature detection units arranged corresponding to a plurality of sides of the transmission type optical element;
    A temperature adjustment step of adjusting a temperature of a corresponding side of the transmission type optical element by a plurality of temperature control elements arranged corresponding to the plurality of sides of the transmission type optical element;
    The temperature control unit controls the temperature control element based on the temperature detected by the temperature detection unit on the plurality of sides of the transmission type optical device to control the temperature of the corresponding side of the transmission type optical device Temperature control process,
    A method of controlling the temperature of a transmissive optical element comprising:
  7. 　前記温度制御部は、前記ファイバのコアへ入射する光量が最大となるように前記透過型光学素子の複数の辺の温度を制御する請求項６記載の透過型光学素子の温度制御方法。 The temperature control method of a transmission type optical element according to claim 6, wherein the temperature control unit controls the temperatures of the plurality of sides of the transmission type optical element so as to maximize the amount of light incident on the core of the fiber.
PCT/JP2017/027310 2017-07-27 2017-07-27 Laser device and method for controlling temperature of transmissive optical element WO2019021436A1 (en)

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