WO2019010670A1 - Capteur de contrainte extensible souple et procédé de préparation de celui-ci - Google Patents

Capteur de contrainte extensible souple et procédé de préparation de celui-ci Download PDF

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Publication number
WO2019010670A1
WO2019010670A1 PCT/CN2017/092799 CN2017092799W WO2019010670A1 WO 2019010670 A1 WO2019010670 A1 WO 2019010670A1 CN 2017092799 W CN2017092799 W CN 2017092799W WO 2019010670 A1 WO2019010670 A1 WO 2019010670A1
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WO
WIPO (PCT)
Prior art keywords
flexible
microchannel
strain sensor
silicone rubber
liquid conductor
Prior art date
Application number
PCT/CN2017/092799
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English (en)
Chinese (zh)
Inventor
李晖
陈静
高钦武
王磊
Original Assignee
中国科学院深圳先进技术研究院
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 中国科学院深圳先进技术研究院 filed Critical 中国科学院深圳先进技术研究院
Priority to PCT/CN2017/092799 priority Critical patent/WO2019010670A1/fr
Publication of WO2019010670A1 publication Critical patent/WO2019010670A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress

Definitions

  • the present invention belongs to the technical field of sensor fabrication and packaging, and in particular, to a flexible tensile strain sensor and a preparation method thereof.
  • sensors In the actual use of wearable devices, many times require sensors to be transparent, flexible, stretchable, free to bend or even fold, high sensitivity, etc., especially the working environment is directly on the complex irregular skin surface of the human body with large deformation. For example, deformation detection of joints, etc.
  • Porous nylon which is similar to skin mechanical properties, is used as a substrate to electrochemically deposit polypyrrole as a conductive dopant in the matrix. When the load is loaded, the conductivity of the sensor is increased to measure the external load.
  • PDMS Using a highly elastic and durable telescopic spiral electrode, PDMS is used as the main structural material. Create a highly distorted array of tactile sensors. It can accommodate complex work surfaces without damaging the sensor array and the sensing array on the metal interconnect.
  • the strain sensor described above has a certain flexibility, it does not achieve true stretchability, lacks skin-like flexibility, and cannot fully realize the external load under the condition of covering a three-dimensional complex static/dynamic surface. Measurement. When the strain or bending angle is large, the entire system will destroy the failure. Compared with the surface of human skin, the same kind of rigidity still shows a certain degree of discomfort, which makes the human body feel uncomfortable and difficult to integrate, which greatly limits the stability, accuracy and accuracy of the measurement. In addition, human physiological signals are easily interfered by external factors such as perspiration, muscle contraction, etc., and users cannot eliminate these influencing factors, resulting in ambiguity and incompleteness of data collection, and poor reliability.
  • the object of the present invention is to overcome the above deficiencies of the prior art, and to provide a flexible tensile strain sensor and a preparation method thereof, the stability, accuracy, accuracy and reliability of the flexible tensile strain sensor.
  • a flexible tensile strain sensor comprising a flexible substrate, the flexible substrate has a flexible microchannel, the microchannel is provided with a liquid conductor or a semi-liquid conductor, Electrodes are provided at both ends of the microchannel.
  • the flexible substrate is made of a degradable polyester material or a silicone rubber material.
  • a liquid conductor eutectic gallium indium is disposed in the microchannel.
  • the microchannels are strip-shaped, line-shaped, serpentine, circular or curved; or/and, the microchannels are provided with one or at least two.
  • the present invention also provides a wearable device having the above-described flexible stretch strain sensor.
  • the present invention also provides a method for preparing a flexible tensile strain sensor, comprising the following steps:
  • preparing the flexible substrate comprises the following steps:
  • injecting the liquid conductor or the semi-liquid conductor into the microchannel comprises the following steps:
  • two syringes are inserted into both ends of the microchannel, one of the syringes has a liquid conductor; the other syringe draws air in the microchannel, and a syringe having a liquid conductor injects a liquid conductor into the microchannel , fill the liquid conductor with the microchannel and pull out the syringe.
  • inserting the electrodes at both ends of the microchannel includes the following steps:
  • Two electrodes are respectively inserted at both ends of the microchannel, and the microchannel is sealed with a flexible material solution.
  • mixing and removing the bubbles of the flexible material solution comprises the steps of:
  • the Ecoflex series silicone rubber solution is placed in a container of a centrifugal mixer, the rotation speed of the centrifugal mixer is 300-400 rpm, and after maintaining the turn for 10-15 s, the rotation speed of the centrifugal mixer is increased to 1400- 1600 rp m, maintaining a turn of 25-30 s, obtaining a mixed silicone rubber solution;
  • the mixed silicone rubber solution is placed in a vacuum suction device, and the vacuum pump of the vacuum suction device is activated to obtain a silicone rubber solution after removing bubbles;
  • Forming the flexible substrate body comprises the steps of:
  • the flexible substrate body after demolding is pressed on the silicone rubber film, and the flexible substrate body and the silicone rubber film are sealed and sealed, and left at room temperature for 45-60 minutes to obtain A flexible substrate with microchannels.
  • a flexible tensile strain sensor and a preparation method thereof are provided by the present invention, and the strain sensor is made of a highly flexible Ecoflex series material as a basic material. Pour into an internal microchannel or microchannel array by microlithography previously prepared by photolithography, followed by spin coating a film of the same material to seal the entire microchannel. The liquid conductor eutectic gallium indium is injected to fill the entire channel. Finally, the electrode is resealed at both ends of the microchannel to complete the preparation. After the sensor is operated, the resistance of the microchannel length and cross section is changed due to the external load. A constant current source is applied across the electrodes. The resistance signal is changed into a voltage signal that is convenient for measurement, and the corresponding strain value is obtained by analyzing the voltage signal.
  • the flexible sensor can still work normally after the strain reaches 300%, and it can work with almost any complicated three-dimensional surface.
  • FIG. 1 is a schematic plan view of a flexible tensile strain sensor according to an embodiment of the present invention
  • FIG. 2 is a schematic plan view showing a microchannel having a serpentine shape in a flexible tensile strain sensor according to an embodiment of the present invention
  • FIG. 3 is a method for preparing a flexible and stretchable strain sensor according to an embodiment of the present invention. a schematic plan view of the glue solution
  • FIG. 4 is a schematic plan view showing a mixture of a silicone rubber solution in a method for preparing a flexible tensile strain sensor according to an embodiment of the present invention
  • FIG. 5 is a schematic plan view of a silicone rubber solution in which a bubble is removed in a method for preparing a flexible tensile strain sensor according to an embodiment of the present invention
  • FIG. 6 is a schematic plan view of a method for preparing a flexible tensile strain sensor according to an embodiment of the present invention, in which a microchannel mold is filled with a silicone rubber solution;
  • FIG. 7 is a schematic plan view showing a method for preparing a flexible tensile strain sensor according to an embodiment of the present invention, after baking a silicone rubber solution on a microchannel mold;
  • FIG. 8 is a schematic plan view of a method for preparing a flexible tensile strain sensor according to an embodiment of the present invention, in which a silicone rubber solution is dropped onto a substrate;
  • FIG. 9 is a schematic plan view showing a method of manufacturing a flexible tensile strain sensor according to an embodiment of the present invention, in which a flexible substrate body and a film are pressed together;
  • FIG. 10 is a schematic plan view of a flexible tensile strain sensor obtained in a method for preparing a flexible tensile strain sensor according to an embodiment of the present invention.
  • a flexible stretchable strain sensor provided by an embodiment of the present invention includes a flexible substrate 1 which can be made of a silicone rubber material (for example, Ecoflex series) or the like.
  • the flexible substrate 1 has a flexible microchannel therein, and the length and cross section of the flexible microchannel can be changed by an external force, and
  • the microchannel 10 is a closed cavity in which a semi-liquid conductor or a liquid conductor 3 is disposed, and the semi-liquid conductor or liquid conductor 3 can fill the microchannel 10.
  • the two ends of the microchannel 10 are provided with an electrode 2, and the end of the electric plate is in contact with the semi-liquid conductor or the liquid conductor 3 in the microchannel 10.
  • the length of the microchannel 10 is caused by the external load. And the cross section changes to change the electrical resistance of the semi-liquid conductor or the liquid conductor 3.
  • a constant current source is applied to the electrodes 2 at both ends.
  • the resistance signal is changed into a voltage signal for convenient measurement, and the corresponding strain value is obtained by analyzing the voltage signal.
  • the sensor mainly collects the liquid conductor or the semi-liquid conductor resistance change signal in the sealed microchannel 10 during operation, and has high flexibility.
  • the stretchability and thin geometry make it easy to integrate directly with any flexible actuator. It has high sensitivity and strong anti-interference ability.
  • the flexible sensor can work normally after the strain reaches 300%, especially suitable for wearable.
  • the field of equipment is especially large deformation, and the stability, accuracy, accuracy and reliability are high.
  • the flexible tensile strain sensor may have a thickness of less than 1 mm, that is, the flexible substrate 1 may have a thickness of less than 1 mm, which is well suited for use in smart wearable devices.
  • the flexible substrate 1 may be made of a degradable polyester material or a silicone rubber material.
  • the flexible substrate 1 is made of a silicone rubber material of the Ecoflex series as a basic material.
  • Ecoflex the German BASF may be used.
  • the company's aliphatic aromatic random copolyester (Ecoflex), its monomers can be: adipic acid, terephthalic acid, 1,4-butanediol.
  • Degradable materials are generally considered to be plastics that can be decomposed into low molecular weight by means of solar radiation or microorganisms in the soil. In addition to being degradable, they should also have properties that are easy to process and meet the requirements of use.
  • PCL polycaprolactone
  • Biodegradable polyester is a new type of polymeric material that can be synthesized by fermentation, chemical methods and enzymatic catalysis.
  • a liquid conductor eutectic gallium indium is disposed in the microchannel 10 as a liquid conductor, and of course, To set up other liquid metal conductors.
  • the electrode 2 may be inserted from both ends of the flexible substrate 1 in the longitudinal direction or both ends of the microchannel 10 to the front end to be in contact with the semi-liquid conductor or the liquid conductor 3 in the microchannel 10.
  • the electrode 2 and the flexible substrate 1 can be sealed by a sealing material to further improve the reliability.
  • the sealing material may be a silicone rubber solution material (Ecoflex).
  • the microchannel 10 may be in the form of a strip, a line, or a serpentine.
  • the serpentine microchannel 10 of the flexible tensile strain sensor 100 has a reciprocating shape. It is more deformable and can be used on the surface of human skin at a relatively large area. The accuracy and stability of sensing can be further improved.
  • the microchannel 10 can also have other structural shapes, such as a circular shape, an arc shape, a tapered shape or a profile, etc., all of which fall within the scope of the present invention.
  • the microchannel may be provided with one or at least two, the microchannel may be one or more, and at least two microchannels may form a microchannel array, and the microchannel in the microchannel array It may be in the form of a rectangular array or a circular array or the like.
  • the sensitivity is high, and the acquired signal exhibits good linearity and repeatability, and has high stability, accuracy, accuracy, and reliability.
  • the strain reaches 300% and still works normally. It can adhere well to complex three-dimensional dynamic and static surfaces, such as large deformed human joints (elbow joints, knee joints), with good affinity with the skin, and almost normal for people to work. did not affect. It is the ideal flexible sensor for wearing equipment.
  • the present invention also provides a wearable device having the above-described flexible stretch strain sensor.
  • Wearable devices can be smart watches, smart bracelets, smart glasses, smart clothing, virtual reality helmets, and more.
  • the flexible tensile strain sensor exhibits a thickness of less than 1 mm and exhibits very good flexibility.
  • the tensile strain reaches 300% and still works properly, which is comparable to human skin.
  • Biocompatible Ecoflex materials can be used as the basic material, and there is almost no discomfort in the integration into wearable devices.
  • the sensor collects the sealed microchannel 10 resistance signal, which eliminates the interference of external noise on the signal, and the collected data is more accurate.
  • the microchannel 10 which is characterized by photolithography, greatly increases the sensitivity of the sensor.
  • the flexible tensile strain sensor provided by the embodiment of the present invention can also be applied to other devices, and is also within the protection range of the present invention.
  • Embodiments of the present invention also provide a method for preparing a flexible tensile strain sensor, as shown in FIGS. 3 to 10 Show, including the following steps:
  • a flexible substrate 1 having a sealed microchannel 10 is prepared; a semi-liquid conductor or a liquid conductor 3 is injected into the microchannel 10, and an electrode 2 is inserted at both ends of the microchannel 10.
  • the semi-liquid conductor or liquid conductor 3 can fill the microchannel 10, and the end of the electrode 2 is in contact with the semi-liquid conductor or the liquid conductor 3.
  • preparing the flexible substrate 1 comprises the following steps:
  • a flexible material solution mixed with and removed from the bubble is dropped onto the substrate 42, and the flexible material solution is formed into a film of a flexible material (silicone rubber film 12);
  • injecting the semi-liquid conductor or the liquid conductor 3 into the microchannel 10 includes the following steps:
  • Two syringes may be inserted into both ends of the microchannel 10, one of which has a liquid conductor 3 therein; another syringe draws air in the microchannel 10, and a syringe having a liquid conductor 3 is directed to the micro The liquid conductor 3 is injected into the channel 10, the liquid conductor 3 is filled with the microchannel 10, and the syringe is pulled out.
  • inserting the electrode 2 at both ends of the microchannel 10 includes the following steps:
  • Two electrodes 2 are respectively inserted into both ends of the microchannel 10, and the microchannel 10 is sealed with a flexible material solution.
  • mixing and removing the bubbles of the flexible material solution comprises the steps of:
  • the Ecoflex series silicone rubber solution can be placed in a container of a centrifugal mixer, the rotation speed of the centrifugal mixer is 300-400 rpm, and the rotation speed of the centrifugal mixer is increased to 1400 after maintaining the daytime for 10-15 s. -1
  • the silicone rubber solution after the bubble removal is obtained; it is understood that the flexible material solution is not limited to the silicone rubber solution.
  • Forming the flexible substrate body 11 includes the following steps: [0074] spraying at least one release agent film on the surface of the microchannel mold 41, and then using a pipette to fill the microchannel mold 41 with a silicone rubber solution after removing bubbles;
  • microchannel mold 41 is moved to an oven, baked at 80 degrees Celsius for 45-60 minutes, after demolding to obtain a flexible substrate body 11;
  • the silicone rubber solution after removing the bubbles is dropped on the substrate 42 and rotated into a homogenizer to form a silicone rubber film 12, and the speed of the homogenizer is set to 350-400 rpm, and the uniformity is 25-30. second;
  • the demolded flexible substrate body 11 is pressed against the silicone rubber film 12, and the flexible substrate body 11 and the silicone rubber film 12 are sealed and sealed, and left at room temperature. 45-60 min, a flexible substrate 1 with microchannels 10 is obtained.
  • a microchannel mold 41 (material is SU-8 photoresist) prepared by photolithography; liquid metal conductor eutectic gallium indium ((EGaln); highly flexible Ecoflex series material; ease release 200 demoulding Specifically, the following steps are included:
  • First step As shown in FIG. 3 and FIG. 4, equal amounts of Ecoflex 1 A and 1B are respectively placed in a container of the centrifugal mixer to ensure that the two silicone rubbers are sufficiently uniformly mixed.
  • the centrifugal mixer rotates at 300-400 rpm for 10-15 s, then increases to 1400-1600 rpm for 25-30 s.
  • Second step As shown in FIG. 4 and FIG. 5, the silicone rubber solution in the first step is placed in a vacuum suction device, and the vacuum pump is driven until all the bubbles in the solution are removed.
  • the third step as shown in FIG. 6, the surface of the microchannel mold 41 is sprayed with a release agent film 12, and then the liquid rubber is used to fill the mold with the silicone rubber solution obtained in the second step, as shown in the figure. 6 is shown.
  • the fourth step The filled microchannel mold 41 is moved to the oven and baked at 80 degrees Celsius for 45-60 m in, as shown in Fig. 7, to obtain a flexible substrate main body 11.
  • Step 5 Drip an appropriate amount of the silicone rubber solution obtained in the second step onto the substrate 42 and rotate it into a homogenizer to form a film 12, and the speed of the homogenizer is set to 350-400 rpm.
  • the daytime is 25-30s, as shown in Figure 8.
  • Step 6 The film 12 formed in the fifth step is in a semi-solidified state, and the demolded microchannel silicone rubber is removed.
  • Step 7 Two micro-injectors are inserted into the microchannels 10, one syringe is used to pump the air inside the microchannels 10, and the liquid conductor-EGaln is drained, and a syringe is used to continuously inject the liquid conductors (EGaln) to In the microchannel 10.
  • the liquid conductor (EGaln) fills the entire microchannel 10 ⁇
  • insert the electrode 2 take a small amount of silicone rubber solution (obtained in the second step) to seal the port, so that a flexible stretchable electronic strain sensor can be obtained, as shown in Fig. 10. Shown.
  • the method is simple to prepare, can realize mass production at one time, and improves daytime and cost effectiveness. It is especially suitable for the field of wearable devices, especially large deformations.
  • a flexible tensile strain sensor and a preparation method thereof are provided by an embodiment of the present invention, and the strain sensor is made of a highly flexible Ecoflex series material.
  • the inner microchannel 10 or microchannel 10 array is inverted by pouring into a micro mold prepared by a photolithography process, and then a thin film 12 of the same material is spin-coated to seal the entire microchannel 10.
  • the liquid conductor eutectic gallium indium is injected to fill the entire channel.
  • the electrode 2 is inserted at both ends of the microchannel 10 to be sealed again to complete the preparation.
  • a constant current source is applied across the electrodes 2.
  • the resistance signal is changed to a voltage signal that is convenient for measurement, and the corresponding strain value is obtained by analyzing the voltage signal.
  • the flexible sensor still works properly when the strain reaches 300%. Works with virtually any complex 3D surface.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)

Abstract

Selon l'invention, un capteur de contrainte extensible souple, comprenant un substrat souple (1), où un microcanal (10) souple est agencé dans le substrat souple (1), un conducteur liquide ou un conducteur semi-liquide (3) est agencé dans le microcanal (10), et des électrodes (2) sont agencées aux deux extrémités du microcanal. L'invention concerne également un dispositif vestimentaire comportant le capteur de contrainte extensible souple. L'invention concerne également un procédé de préparation du capteur de contrainte extensible souple, comprenant les étapes suivantes : préparer le substrat souple (1) comportant le microcanal (10) ; et injecter le conducteur liquide ou le conducteur semi-liquide (3) dans le microcanal (10), et insérer les électrodes (2) aux deux extrémités du microcanal. Le capteur de contrainte extensible souple selon la présente invention présente les caractéristiques géométriques de souplesse élevée, d'extensibilité et de finesse, il peut être intégré directement à tout actionneur souple, a une sensibilité élevée et une excellente capacité de résistance aux interférences, et peut encore fonctionner normalement lorsque la contrainte atteint 300 %.
PCT/CN2017/092799 2017-07-13 2017-07-13 Capteur de contrainte extensible souple et procédé de préparation de celui-ci WO2019010670A1 (fr)

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PCT/CN2017/092799 WO2019010670A1 (fr) 2017-07-13 2017-07-13 Capteur de contrainte extensible souple et procédé de préparation de celui-ci

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PCT/CN2017/092799 WO2019010670A1 (fr) 2017-07-13 2017-07-13 Capteur de contrainte extensible souple et procédé de préparation de celui-ci

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112179262A (zh) * 2019-07-05 2021-01-05 中国科学院理化技术研究所 一种功能化石墨烯基柔性应变传感器及其制备方法与应用

Citations (5)

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Publication number Priority date Publication date Assignee Title
US20020179985A1 (en) * 1998-07-28 2002-12-05 Boggs Bradley J. Flexible silicon strain gage
CN106017752A (zh) * 2016-07-07 2016-10-12 燕山大学 一种柔性多维力传感器
CN106595940A (zh) * 2016-12-30 2017-04-26 电子科技大学 一种柔性多功能传感器及其制备方法
CN106662914A (zh) * 2014-12-08 2017-05-10 罗希特·塞思 可穿戴无线hmi装置
CN107478148A (zh) * 2017-07-13 2017-12-15 中国科学院深圳先进技术研究院 一种柔性可穿戴式电子应变传感器及其制备方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020179985A1 (en) * 1998-07-28 2002-12-05 Boggs Bradley J. Flexible silicon strain gage
CN106662914A (zh) * 2014-12-08 2017-05-10 罗希特·塞思 可穿戴无线hmi装置
CN106017752A (zh) * 2016-07-07 2016-10-12 燕山大学 一种柔性多维力传感器
CN106595940A (zh) * 2016-12-30 2017-04-26 电子科技大学 一种柔性多功能传感器及其制备方法
CN107478148A (zh) * 2017-07-13 2017-12-15 中国科学院深圳先进技术研究院 一种柔性可穿戴式电子应变传感器及其制备方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112179262A (zh) * 2019-07-05 2021-01-05 中国科学院理化技术研究所 一种功能化石墨烯基柔性应变传感器及其制备方法与应用

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