WO2019008964A1 - Interféromètre, dispositif spectroscopique à transformée de fourier et dispositif d'analyse de composant - Google Patents

Interféromètre, dispositif spectroscopique à transformée de fourier et dispositif d'analyse de composant Download PDF

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Publication number
WO2019008964A1
WO2019008964A1 PCT/JP2018/021192 JP2018021192W WO2019008964A1 WO 2019008964 A1 WO2019008964 A1 WO 2019008964A1 JP 2018021192 W JP2018021192 W JP 2018021192W WO 2019008964 A1 WO2019008964 A1 WO 2019008964A1
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Prior art keywords
light
polarizing element
polarized light
interferometer
birefringent crystal
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PCT/JP2018/021192
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English (en)
Japanese (ja)
Inventor
祐光 古川
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国立研究開発法人産業技術総合研究所
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Priority to JP2019528412A priority Critical patent/JP7253801B2/ja
Publication of WO2019008964A1 publication Critical patent/WO2019008964A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light

Definitions

  • the present invention relates to an interferometer, a Fourier transform spectrometer, and a component analyzer.
  • Fourier transform spectroscopy is performed by obtaining interference light by a Michelson interferometer and performing Fourier transform on the interference light.
  • the Michelson-type interferometer splits incident light into two paths with a beam splitter, reflects light from mirrors placed in each path and returns the light to the beam splitter, and obtains interference light by the optical path difference between the two paths. .
  • Patent Document 1 there are a moving mechanism for causing the reflecting mirror to reciprocate linearly and reversely, a first feedback control unit for controlling the moving mechanism according to the moving speed of the reflecting mirror, and a moving mechanism for the reflecting mirror.
  • the second feedback control unit controls the movement according to the position, and in the case of the linear movement of the reflecting mirror, the moving mechanism is controlled by the first feedback control unit, and in the case of the inverting movement of the reflecting mirror, the second feedback control
  • An interferometer is described which controls the moving mechanism by means of a part.
  • Patent No. 5947193 gazette International Publication No. 2012/140980 JP 2008-128654 A JP, 2016-142527, A JP, 2015-194359, A JP, 2010-66280, A JP 2005-250144 A
  • the conventional Michelson interferometer reciprocates one of the two mirrors to change the optical path difference to temporally form interference light.
  • the angle of the moving mirror may be slightly inclined by driving of the mirror or vibration applied from the outside, but if the angle of the mirror is slightly inclined, interference light can not be obtained.
  • Patent documents 1 to 4 propose various improvements to the Michelson interferometer, a technique for keeping the angle of two mirrors constant, a technique for stabilizing the drive of the mirror, and a technique for accurately detecting the position of the mirror. It is done. However, these techniques may lead to an increase in cost and an increase in size of the device.
  • Non-Patent Documents 1 to 3 propose a multi-channel interferometer that spatially forms interference light.
  • the Michelson interferometer temporally forms interference light
  • the multi-channel interferometer spatially forms interference light using a Wollaston prism or a Savart plate.
  • multi-channel interferometers do not move mirrors to create an optical path difference, so they have higher vibration resistance than Michelson interferometers, but if they do not detect spatially spread interference light with a photodetector Sufficient resolution can not be achieved and resolution is limited by the size of the photodetector.
  • the present invention provides an interferometer, a Fourier transform spectrometer, and a component analyzer that are high in vibration resistance, inexpensive, small, and high in resolution.
  • the interferometer includes a first polarizing element that transmits predetermined polarized light of incident light, and an incident of the light emitted from the first polarizing element, which is disposed downstream of the first polarizing element.
  • a second polarization element disposed downstream of the birefringence crystal, the second polarization element transmitting a predetermined polarization of light emitted from the birefringence crystal, and a second polarization element;
  • a light receiving element disposed downstream of the element and converting light emitted from the second polarizing element into an electric signal, wherein the first polarizing element, the birefringent crystal, the second polarizing element, and the light receiving element are linearly arranged. Be placed.
  • the first polarizing element transmits linearly polarized light in the first direction of the incident light
  • the second polarizing element transmits linearly polarized light in the second direction of the light emitted from the birefringence crystal.
  • the first direction and the second direction may be the same direction or orthogonal directions.
  • the second polarizing element separates two types of polarized light of the light emitted from the birefringent crystal and emits the polarized light in different directions
  • the light receiving element includes two types of polarized light separated by the second polarizing element. And a second element that receives the other.
  • two types of interference light having peaks in opposite directions can be obtained, and by taking the difference, noise can be reduced and interference peaks can be clarified.
  • the first polarization element transmits linearly polarized light in the first direction of the incident light
  • the second polarization element transmits linearly polarized light in the second direction of the light emitted from the birefringent crystal.
  • the linearly polarized light in three directions is separated and emitted in different directions.
  • the first direction and the second direction are the same direction or orthogonal directions
  • the first direction and the third direction are the same direction or orthogonal directions
  • the second direction and the third direction may be orthogonal to each other.
  • it further comprises a third polarization element which is disposed between the first polarization element and the birefringence crystal and separates two kinds of polarized light of the light emitted from the first polarization element and emits it in the same direction. It is also good.
  • the incident light can be made incident on the birefringent crystal without being narrowed by the slit, and the incident light can be efficiently used to obtain bright interference light.
  • the light receiving element may include a line sensor in which single channel sensors are aligned or an area sensor in which single channel sensors are aligned in a matrix.
  • temporally formed interference can be measured in parallel in space, and the measurement time can be shortened, and spatial spectral information can also be measured.
  • a Fourier transform spectroscopy device includes the interferometer of the above aspect, and a conversion unit that Fourier-transforms an electric signal.
  • a component analysis apparatus includes: the Fourier transform spectrometer of the above aspect; and an analysis unit that performs component analysis based on the Fourier-transformed electrical signal.
  • a component analyzer that can be carried and used by providing a Fourier transform spectrometer that is high in vibration resistance, inexpensive, compact, and high in resolution.
  • an interferometer a Fourier transform spectroscopy device and a component analysis device which are high in vibration resistance, inexpensive, small in size, and high in resolution.
  • FIG. 1 is a block diagram of a component analyzer 100 according to the first embodiment of the present invention.
  • the component analysis device 100 includes a Fourier transform spectroscopy device 200, and an analysis unit 30 that performs component analysis based on the electrical signal subjected to Fourier transform.
  • the Fourier transform spectrometer 200 includes an interferometer 10 and a converter 20 that Fourier-transforms an electrical signal.
  • the interferometer 10 forms interference light with respect to the light reflected by the sample 300 or the light transmitted through the sample 300, receives the interference light by the light receiving element, and outputs the light as an electric signal.
  • the component analysis apparatus 100 forms interference light by the interferometer 10, Fourier transforms the spectrum of the electric signal of the interference light by the conversion unit 20 of the Fourier transform spectroscopy apparatus 200, and decomposes the spectrum. The essential constituents.
  • the light irradiated to the sample 300 is an infrared ray.
  • the light irradiated to the sample 300 may be near infrared light, or may be light of any wavelength such as visible light or ultraviolet light.
  • the sample 300 may be any of gas, liquid and solid, and may be, for example, an organic compound.
  • the sample 300 may not be synthetic but may be a natural product such as agricultural products.
  • the component analysis apparatus 100 may analyze a chemical component contained in a natural product by using a natural product as the sample 300.
  • the sample 300 may be any target.
  • FIG. 2 is a block diagram of the interferometer 10 according to the first embodiment of the present invention.
  • the interferometer 10 includes a slit 11, a first lens 12, a first polarizing element 13, a birefringent crystal 14, a second polarizing element 15, a second lens 16 and a light receiving element 17.
  • the slit 11 narrows the incident light IN incident on the interferometer 10.
  • the slit 11 may be, for example, a pinhole.
  • the first lens 12 may be a convex lens that converts light emitted from the slit 11 into parallel light.
  • the first polarization element 13 transmits a predetermined polarization of the incident light.
  • the first polarizing element 13 may be an element that transmits linearly polarized light in the first direction among incident light.
  • the first direction may be any direction along the surface of the first polarizing element 13.
  • the light passing through the first polarizing element 13 is a straight line in the direction of 45 ° to the horizontal plane.
  • the first polarized light P1 which is polarized light and the second polarized light P2 which is linearly polarized light in the -45 ° direction with respect to the horizontal plane are included with the same intensity.
  • the birefringent crystal 14 is disposed downstream of the first polarizing element 13 and is rotatably disposed with the incident direction of the light emitted from the first polarizing element 13 as the rotation axis.
  • the incident direction of the light emitted from the first polarizing element 13 is the direction in which the first polarized light P1 and the second polarized light P2 having passed through the first polarizing element 13 are incident, and the surface of the first polarizing element 13 is And the direction orthogonal to
  • the birefringent crystal 14 is rotated at a constant angular velocity ⁇ to give a phase difference according to the angle with respect to the incident first polarized light P1 and second incident polarized light P2.
  • the phase of the second polarized light P2 is delayed by ⁇ with respect to the first polarized light P1.
  • the birefringent crystal 14 may be a uniaxial crystal, and may be formed of different materials according to the wavelength of light with which the sample 300 is irradiated.
  • calcite CaCO 3
  • YVO 4 can be used in the near infrared region
  • GaSe can be used in the infrared region.
  • the material forming the birefringent crystal 14 should be selected in consideration of not only the characteristic of birefringence but also the availability, ease of processing, ease of handling, cost and the like.
  • quartz, TiO 2 , CdSe or the like can be used besides the above-mentioned ones.
  • the second polarizing element 15 is disposed downstream of the birefringent crystal 14 and transmits predetermined polarized light of the light emitted from the birefringent crystal 14.
  • the second polarizing element 15 may be an element for transmitting linearly polarized light in the second direction among the light emitted from the birefringent crystal 14, and the first direction and the second direction may be the same direction or orthogonal directions. You may For example, when the first direction is the 0 ° direction, the second direction may be the 0 ° direction or the 90 ° direction. As a result, part of the first polarized light P1 which is linearly polarized light in the 45.degree.
  • Direction and part of the second polarized light P2 which is linearly polarized light in the -45.degree. Direction and which has the phase delay .delta. It passes through, and interference light according to the phase delay ⁇ is formed.
  • the first direction and the second direction are the same direction or orthogonal directions, it is possible to efficiently interfere the light given the phase difference by the birefringent crystal 14 and to use incident light efficiently for brightening. Interference light can be obtained.
  • the second lens 16 condenses the light that has passed through the second polarizing element 15 and emits the outgoing light OUT to the light receiving element 17.
  • the light receiving element 17 is disposed downstream of the second polarizing element 15, and converts the outgoing light OUT into an electrical signal.
  • the birefringent crystal 14 is a uniaxial crystal, the light receiving element 17 may be continuously exposed while the birefringent crystal 14 makes a quarter rotation.
  • the electrical signal output by the light receiving element 17 is Fourier transformed by the transformation unit 20 and spectrally resolved.
  • interference light is formed every quarter rotation of the birefringent crystal 14. That is, each time the birefringent crystal 14 is rotated one time, interference light is formed four times.
  • the birefringent crystal 14 may be rotated at one constant angular velocity in one direction.
  • the end face of the birefringent crystal 14 may be slightly inclined when the birefringent crystal 14 is rotated, but even if the end face is inclined by several degrees, the formation of interference light is not affected.
  • the interferometer 10 according to the present embodiment, high-precision control is not required to rotate the birefringent crystal 14, and precise control is not required as in the conventional Michelson-type interferometer.
  • the mechanism can be simple, and the drive mechanism can be configured inexpensively.
  • the first polarization element 13, the birefringent crystal 14, the second polarization element 15, and the light receiving element 17 are linearly arranged.
  • the linear arrangement means that the directions in which light is incident on the respective optical elements are almost the same. In other words, the linear arrangement means that the optical axes of the respective optical elements almost coincide with each other. Note that the optical axis does not mean the optical axis of the birefringent crystal 14, but in the optical element, it means a virtual ray representing a light flux passing through the element.
  • An example of the case where the plurality of optical elements are not arranged linearly is that the direction in which light is incident on a certain optical element and the direction in which light is incident on another optical element are orthogonal to each other.
  • the first polarization element 13, the birefringence crystal 14, the second polarization element 15 and the light receiving element 17 are arranged in a straight line, even if some vibration can be applied to the interferometer 10, all The element vibrates in the same direction with respect to the incident direction of light, and the influence of displacement due to vibration or the like is reduced as compared with the case where the element is not arranged linearly.
  • FIG. 3 is a graph showing a spectrum A obtained by the interferometer 10 according to the first embodiment of the present invention and a spectrum B obtained by the conventional multi-channel interferometer.
  • the infrared rays irradiated to the sample 300 are made to interfere by the interferometer 10 according to the present embodiment, and infrared rays of the same wavelength are irradiated to the same sample 300 as in the case where the spectrum A is obtained by the conversion unit 20.
  • the case where interference is obtained by the multi-channel interferometer and spectrum B is obtained is shown.
  • the horizontal axis of the graph shown in the figure indicates the wave number, the unit is [1 / cm], and the vertical axis indicates non-dimensionalized energy.
  • the spectrum A obtained by the interferometer 10 according to the present embodiment shows a plurality of sharp peaks, and clearly shows that the light of a specific wavelength is absorbed by the sample 300.
  • the spectrum B obtained by the conventional multi-channel interferometer shows gentle unevenness, no sharp peak is obtained and only insufficient resolution for specifying the absorption wavelength is obtained .
  • the conventional multi-channel interferometer spatially forms interference light by about 1024 light receiving elements, so when the light irradiated to the sample 300 is in the infrared region, only part of the interference light can be received by the light receiving element And the number of sampling points is insufficient and sufficient resolution can not be obtained.
  • the interferometer 10 by configuring the interferometer 10 with the first polarizing element 13, the birefringent crystal 14, the second polarizing element 15, and the light receiving element 17, it is inexpensive and compact.
  • the interferometer 10 can be used, and the vibration resistance can be improved by arranging these elements linearly.
  • the interference light can be temporally formed by the rotatably arranged birefringent crystal 14, and sufficiently high resolution can be obtained.
  • the Fourier transform spectroscopy apparatus 200 it is possible to carry and use it by providing the interferometer 10 that is high in vibration resistance, inexpensive, small in size, and high in resolution, and has high spectral resolution.
  • a Fourier transform spectrometer is obtained.
  • the component analysis device 100 the component analysis device that can be carried and used can be obtained by providing the Fourier transform spectroscopy device 200 that is high in vibration resistance, inexpensive, small, and high in resolution. .
  • the influence of the wavelength dispersion of the birefringent crystal 14 may make it impossible to obtain a linear spectral distribution with respect to the wavenumber over the entire measurement wavelength range.
  • the measurement result may be corrected in consideration of the wavelength dispersion of the birefringent crystal 14.
  • the correction is a correction amount for offsetting the influence of wavelength dispersion of the birefringent crystal 14 by measuring the spectral distribution in advance using a laser light source having a plurality of known wavelengths or a white light source passing through a known wavelength filter or the like. May be stored in the Fourier transform spectrometer 200 and may be performed based on the correction amount.
  • the portable component analysis apparatus 100 enables nondestructive analysis of agricultural products, and chemical components contained in agricultural products Because changes in can be grasped quantitatively, it is possible to accurately measure the growing situation of agricultural products.
  • FIG. 4 is a block diagram of an interferometer 10a according to a second embodiment of the present invention.
  • the second polarizing element is configured of a Wollaston prism 18 as compared to the interferometer 10 according to the first embodiment, and the first element 17a and the first element 17a are used as light receiving elements.
  • the difference is that the two elements 17b are included.
  • the interferometer 10a according to the second embodiment has the same configuration as the interferometer 10 according to the first embodiment. The differences will be mainly described below.
  • the first polarizing element 13, the birefringent crystal 14, the Wollaston prism 18, the first element 17a and the second element 17b are linearly arranged.
  • the first element 17a and the second element 17b may be disposed with the light receiving surface slightly inclined.
  • the second polarization element of the interferometer 10 a is configured of a Wollaston prism 18 that separates two types of polarized light of the light emitted from the birefringent crystal 14 and emits the polarized light in different directions.
  • the first polarized light P1 and the second polarized light P2 of which the phase difference ⁇ is given by the birefringent crystal 14 are incident on the Wollaston prism 18.
  • the Wollaston prism 18 separates two types of polarized light contained in the first polarized light P1 and the second polarized light into the first element 17a and the second element 17b and emits them.
  • the first element 17 a receives one of the two types of polarized light separated by the Wollaston prism 18, and the second element 17 b receives the other of the two types of polarized light separated by the Wollaston prism 18.
  • the first polarization element 13 transmits linearly polarized light in the first direction of the incident light
  • the Wollaston prism 18 as the second polarization element transmits light in the second direction of the light emitted from the birefringence crystal 14.
  • Linearly polarized light and linearly polarized light in the third direction are separated and emitted in different directions.
  • the first direction and the second direction are the same direction or orthogonal directions
  • the first direction and the third direction are the same direction or orthogonal directions
  • the second direction and the third direction are orthogonal It is a direction.
  • the interferometer 10a is placed in a horizontal plane and the first direction is at 0 ° with respect to the horizontal plane, the second direction may be at 0 ° with respect to the horizontal plane, and the third direction is with respect to the horizontal plane And 90.degree. (Direction along the horizontal plane).
  • linearly polarized light in the 0 ° direction with respect to the horizontal plane is emitted by the Wollaston prism 18 as the first outgoing light OUT1 to the first element 17a side, and 45 ° direction with respect to the horizontal plane Of the first polarized light P1 which is linearly polarized light in the direction of 90 ° with respect to the horizontal plane and in the direction of ⁇ 45 ° with respect to the horizontal plane, in the horizontal plane of the second polarized light P2 having the phase delay ⁇
  • linearly polarized light in the 90 ° direction is emitted by the Wollaston prism 18 as the second outgoing light
  • Interference light corresponding to the ⁇ is measured. If the first direction is a 0 ° direction with respect to the horizontal plane, the second direction may be a 90 ° direction with respect to the horizontal plane, and the third direction may be a 0 ° direction with respect to the horizontal plane Good.
  • the first emission light OUT1 and the second emission light OUT2 have waveforms in which the peaks appear in opposite directions. Therefore, in the difference data DIFF of the first outgoing light OUT1 and the second outgoing light OUT2, the respective peaks reinforce each other, and the noise contained in the first outgoing light OUT1 and the second outgoing light OUT2 is canceled out.
  • the Wollaston prism 18 as the second polarizing element, two types of interference light having peaks in opposite directions can be obtained, and the interference light is generated by the first element 17a and the second element 17b.
  • the interferometer 10 a According to the interferometer 10 a according to the present embodiment, light having a phase difference given by the birefringent crystal 14 can be efficiently interfered, and incident light is efficiently used to have peaks in the opposite direction 2 A kind of bright interference light can be obtained, and by taking the difference, noise can be reduced and interference peaks can be clarified.
  • FIG. 6 is a block diagram of an interferometer 10b according to a third embodiment of the present invention.
  • the interferometer 10b according to the present embodiment is different from the interferometer 10 according to the first embodiment in that the third polarizing element 19 is not provided and the slit 11 is not provided.
  • the interferometer 10b according to the third embodiment has the same configuration as that of the interferometer 10 according to the first embodiment, except for the configurations described above. The differences will be mainly described below.
  • the third polarizing element 19 is disposed between the first polarizing element 13 and the birefringent crystal 14 and separates two types of polarized light of the light emitted from the first polarizing element 13 and emits the same in the same direction.
  • the third polarizing element 19 may be, for example, a Savart plate.
  • the third polarization element 19 emits linearly polarized light from the first polarization element 13 at 45 ° to the horizontal plane among the linear polarizations at 0 ° to the horizontal plane.
  • the first polarized light P1 and the second polarized light P2 which is linearly polarized light in the ⁇ 45 ° direction with respect to the horizontal plane may be separated and emitted.
  • the incident light can be made incident on the birefringent crystal 14 without being narrowed by the slit, and bright interference light can be obtained by efficiently using the incident light.
  • the light receiving element 17 may include a line sensor in which single channel sensors are aligned or an area sensor in which single channel sensors are aligned in a matrix.
  • a line sensor or an area sensor temporally formed interference can be measured in parallel in space, and the measurement time can be shortened and spatial spectral information can also be measured.
  • spatially formed interference can be measured, and since the light receiving area and the signal to noise ratio can be increased, higher resolution measurement can be performed. .
  • the converter 20 can perform Fourier transform on the electric signal of the interference light, and the analysis unit 30 can perform component analysis, so that a compact and portable component can be used.
  • An analyzer 100 can be provided.

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Abstract

L'invention concerne un interféromètre, un dispositif spectroscopique à transformée de Fourier et un dispositif d'analyse de composant qui sont hautement résistants aux vibrations, qui sont peu coûteux et compacts, et qui ont une résolution élevée. Un interféromètre (10) est pourvu : d'un premier élément de polarisation (13), qui permet à une certaine lumière polarisée au sein d'une lumière incidente de passer ; un cristal biréfringent (14), qui est disposé en aval du premier élément de polarisation (13) et qui est agencé de façon à pouvoir tourner autour d'un axe de rotation dans le sens d'incidence de la lumière émise par le premier élément de polarisation (13) ; un second élément polarisant (15), qui est disposé en aval du cristal biréfringent (14) et qui permet à une certaine lumière polarisée au sein de la lumière émise par le cristal biréfringent (14) de passer ; et un élément de réception de lumière (17), qui est disposé en aval du second élément de polarisation (15) et qui convertit la lumière émise par le second élément de polarisation (15) en un signal électrique ; le premier élément de polarisation (13), le cristal biréfringent (14), le second élément de polarisation (15) et l'élément de réception de lumière (17) étant disposés en ligne droite.
PCT/JP2018/021192 2017-07-03 2018-06-01 Interféromètre, dispositif spectroscopique à transformée de fourier et dispositif d'analyse de composant WO2019008964A1 (fr)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06221993A (ja) * 1993-01-27 1994-08-12 Sumitomo Electric Ind Ltd 偏光子の消光比測定方法及び測定装置
US20130194558A1 (en) * 2010-10-27 2013-08-01 Korea Research Institute Of Standards And Science Apparatus for forming fine patterns capable of switching direction of polarization interference pattern in laser scanning method and method of forming fine patterns using the same
JP2015194359A (ja) * 2014-03-31 2015-11-05 国立研究開発法人産業技術総合研究所 散乱体分光分析装置

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Publication number Priority date Publication date Assignee Title
JP5493509B2 (ja) * 2009-06-30 2014-05-14 株式会社リコー 分光装置および分光方法
JP6221993B2 (ja) 2014-08-08 2017-11-01 マツダ株式会社 エンジンの制御装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06221993A (ja) * 1993-01-27 1994-08-12 Sumitomo Electric Ind Ltd 偏光子の消光比測定方法及び測定装置
US20130194558A1 (en) * 2010-10-27 2013-08-01 Korea Research Institute Of Standards And Science Apparatus for forming fine patterns capable of switching direction of polarization interference pattern in laser scanning method and method of forming fine patterns using the same
JP2015194359A (ja) * 2014-03-31 2015-11-05 国立研究開発法人産業技術総合研究所 散乱体分光分析装置

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Title
KIKUCHI, TAKAHIRO ET AL.: "Study on ultraviolet fourier-transform spectral measurement using polarization interferometer", PROCEEDINGS OF 2001 ANNUAL CONFERENCE OF THE ILLUMINATING ENGINEERING INSTITUTE OF JAPAN, vol. 252, 2001 *

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