WO2018230315A1 - Vanne et dispositif de contrôle de fluide - Google Patents

Vanne et dispositif de contrôle de fluide Download PDF

Info

Publication number
WO2018230315A1
WO2018230315A1 PCT/JP2018/020290 JP2018020290W WO2018230315A1 WO 2018230315 A1 WO2018230315 A1 WO 2018230315A1 JP 2018020290 W JP2018020290 W JP 2018020290W WO 2018230315 A1 WO2018230315 A1 WO 2018230315A1
Authority
WO
WIPO (PCT)
Prior art keywords
valve
plate
valve body
fixing
hole
Prior art date
Application number
PCT/JP2018/020290
Other languages
English (en)
Japanese (ja)
Inventor
宏之 横井
寛基 阿知波
洋 竹村
Original Assignee
株式会社村田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Priority to DE212018000220.7U priority Critical patent/DE212018000220U1/de
Publication of WO2018230315A1 publication Critical patent/WO2018230315A1/fr

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K15/00—Check valves
    • F16K15/14—Check valves with flexible valve members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/18—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with diaphragm secured at one side only, e.g. to be laid on the seat by rolling action

Definitions

  • the present invention relates to a valve and a fluid control device having the valve.
  • Patent Document 1 The structure described in Patent Document 1 includes a valve chamber formed of two metal plates and a valve body disposed between the two metal plates.
  • Patent Document 1 when the structure described in Patent Document 1 is used, it is necessary to provide a certain gap due to variations in positional accuracy when the valve body is arranged in the valve chamber. As a result, the position where the valve body is arranged may be greatly displaced, an unnecessary stress is applied to an unintended location, and the valve body is easily broken.
  • valve body In order to solve this problem, it is conceivable to fix the valve body to a metal plate with an adhesive or the like.
  • an adhesive When the entire circumference of the valve body is fixed with an adhesive, if the amount of the adhesive is large, the through hole of the valve body may be blocked along the surface of the valve body by capillary action.
  • the valve body when the valve body is fixed at a plurality of points with an adhesive, the valve body may become wrinkled depending on the fixing location, and the characteristics and reliability of the valve body may be impaired.
  • an object of the present invention is to provide a structure for fixing a valve body without impairing the function of the valve body.
  • the valve of the present invention includes a first plate having a plurality of first through holes, a second plate having a plurality of second through holes, a first plate and a first plate, and a first plate and a second plate.
  • a valve chamber configured between the one main surface of the second plate facing the one main surface of the one plate, and disposed in the valve chamber, and moves up and down between the first plate and the second plate, And a valve body having a through hole.
  • the valve body has a fixing portion that is fixed at one place so as not to overlap the valve through hole when viewed from the front, on at least one of the first plate and the second plate.
  • valve body can be fixed to the first plate and / or the second plate. Moreover, the location to fix does not overlap with a valve through-hole in front view, and does not impair the function as a valve body.
  • the valve of the present invention includes a first plate having a plurality of first through holes, a second plate having a plurality of second through holes, one main surface of the first plate, and one main surface of the first plate.
  • a valve chamber configured between one main surface of the opposing second plate, a valve body disposed in the valve chamber, vertically moving between the first plate and the second plate, and having a valve through hole; .
  • a valve body has a some fixing
  • the valve fixing region is a region formed by a line segment connecting the regions of the plurality of fixing portions and the outer edge portion of the fixing portion, and a plurality of the valve fixing regions are viewed from the front of the main surface of the first plate or the second plate.
  • the maximum valve fixing region composed of the region including the fixing portion is not overlapped with the valve through hole when viewed from the front.
  • valve body can be fixed. Moreover, even if the location to fix is plural, the function as a valve body is not impaired.
  • the valve of the present invention includes a plate fixing region for fixing the first plate and the second plate, and the plate fixing region is a valve body when the main surface of the first plate or the second plate is viewed from the front. It is preferable to have a feature that does not overlap.
  • the valve of the present invention includes a plate fixing region for fixing the first plate and the second plate, and the valve body protrudes from the valve main body in which the valve through-hole is formed, and the valve main body. It is preferable to have a part. Moreover, it is preferable that the protrusion part is pinched
  • the protruding part of the valve body can be used as a fixed part.
  • the fluid control device of the present invention includes a valve and a piezoelectric blower that sends fluid into the valve chamber or sucks fluid from the valve chamber.
  • the valve body can be fixed without impairing the function of the valve body.
  • FIG. 1A is a front view (perspective view) in which a part of the configuration of the valve 1 according to the first embodiment of the present invention is overlaid.
  • FIG. 1B is a cross-sectional view showing the configuration of the valve 1 according to the first embodiment of the present invention.
  • FIG. 2A is a front view (perspective view) in which a part of the configuration of the valve 1A according to the second embodiment of the present invention is overlaid.
  • 2B and 2C are cross-sectional views showing the configuration of a valve 1A according to the second embodiment of the present invention.
  • FIG. 3A is a front view (perspective view) in which a part of the configuration of the valve 1B according to the third embodiment of the present invention is overlaid.
  • FIG. 3 (B), 3 (C), and 3 (D) are cross-sectional views showing the configuration of a valve 1B according to the third embodiment of the present invention.
  • FIG. 4A is a front view (perspective view) in which the configurations of the valve 1C according to the fourth embodiment of the present invention are overlaid.
  • FIG. 4B is a schematic cross-sectional view of the fluid control apparatus including the valve 1C according to the fourth embodiment of the present invention.
  • FIG. 5A is a front view (perspective view) in which the configurations of the valve 1D according to the fifth embodiment of the present invention are overlaid.
  • FIG. 5B is a cross-sectional view showing a configuration of a valve 1D according to the fifth embodiment of the present invention.
  • FIG. 6 is a cross-sectional view showing a configuration of a valve 1E, which is a modification of the present invention.
  • FIG. 1A is a front view (perspective view) in which a part of the configuration of the valve 1 according to the first embodiment of the present invention is overlaid.
  • FIG. 1B is a cross-sectional view taken along line BB of FIG. 1A, in the valve 1 according to the first embodiment of the present invention.
  • the outer plate 50 is omitted for easy viewing of the drawing.
  • the valve 1 includes a valve body 10, a top plate 20, an outer plate 50, and a fixing portion 30.
  • the valve 1 is substantially circular in plan view (front view).
  • the top plate 20, the valve body 10, and the outer plate 50 are stacked in this order so that the principal surfaces of the flat portions are parallel to each other and face each other.
  • the top plate 20 corresponds to the “first plate” of the present invention
  • the outer plate 50 corresponds to the “second plate” of the present invention.
  • a hollow valve chamber 60 surrounded by the top plate 20 and the outer plate 50 is formed, and the valve body 10 is disposed in the valve chamber 60.
  • the outer plate 50 is fixed to the top plate 20 with high adhesion by some method.
  • the top plate 20 and the outer plate 50 are rigid bodies, and the valve body 10 is an elastic body.
  • the valve body 10 includes a plurality of valve through holes 100.
  • the valve through hole 100 has a circular shape, for example, and penetrates the valve body 10.
  • the valve through holes 100 are formed in a predetermined arrangement pattern.
  • the valve through hole 100 is formed in a central region when the valve body 10 is viewed in plan from one main surface to the other main surface.
  • the outer edge (outer periphery) of the valve body 10 is R1.
  • the top plate 20 includes a plurality of top plate through holes 200.
  • the top plate through hole 200 has, for example, a circular shape, and penetrates from one main surface of the top plate 20 to the other main surface.
  • the top plate through-hole 200 is formed in a predetermined arrangement pattern.
  • the top plate through hole 200 is formed in a central region when the top plate 20 is viewed in plan from the one main surface to the other main surface.
  • the outer plate 50 includes a plurality of outer plate through holes 500.
  • the outer plate through hole 500 has, for example, a circular shape, and penetrates from one main surface of the outer plate 50 to the other main surface.
  • the outer plate through-hole 500 is formed in a predetermined arrangement pattern.
  • the outer plate through-hole 500 is formed in a central region when the outer plate 50 is viewed in plan from one main surface to the other main surface.
  • the plurality of valve through holes 100 of the valve body 10 and the plurality of top plate through holes 200 of the top plate 20 do not substantially overlap in plan view.
  • substantially not overlapping means that the valve through hole 100 and the top plate through hole 200 are slightly overlapped, and means that the function as a valve is not lost.
  • a part of the outer plate through hole 500 substantially overlaps with the valve through hole 100 in plan view.
  • the substantially overlapping described here means a case where the outer plate through hole 500 and the valve through hole 100 do not overlap slightly, and the function as a valve is not lost.
  • the top through hole 200 and the valve through hole 100 which are the first through holes do not overlap in plan view from the one main surface of the top plate 20 to the one main surface direction of the outer plate 50, and the second through hole
  • the width of the valve through hole 100 is preferably larger than the width of the outer plate through hole 500 (diameter in the present embodiment).
  • variety of the outer-plate through-hole 500 is larger than the width
  • the fixing part 30 is formed at a position close to the outer edge R1 of the valve body 10.
  • the valve body 10 is fixed to the top plate 20 via a fixing portion 30.
  • the fixing portion 30 has, for example, a substantially elliptic shape, and may have any shape as long as the valve body 10 can be fixed to the top plate 20. Further, the fixed portion 30 is disposed at a position close to the outer edge R1 of the valve body 10 so as not to overlap the valve through hole 100 in a plan view from the one main surface of the valve body 10 to the one main surface direction of the top plate 20. Yes.
  • the fixing portion 30 is, for example, an adhesive and may be any material that can fix the valve body 10 to the top plate 20.
  • the valve body 10 is fixed to the top plate 20 by using this configuration. Therefore, it is possible to suppress unintended stress on the valve through-hole 100 due to the behavior of the valve body 10 as in the case where the valve body 10 is not fixed. Thereby, the tearing of the valve body 10 can be suppressed.
  • the fixing portion 30 does not overlap the valve through-hole 100 and is formed at a position close to the outer edge R1, even if an adhesive is used for the fixing portion 30, the adhesive does not cover the surface of the valve body 10. By transmitting, the possibility of closing the valve through hole 100 is reduced. Thereby, the valve body 10 can be fixed without impairing the function of the valve body 10, and the valve 1 having excellent reliability and characteristics can be realized.
  • FIG. 2A is a front view (perspective view) in which a part of the configuration of the valve 1A according to the second embodiment of the present invention is overlaid.
  • FIG. 2B is a cross-sectional view taken along the line BB of FIG. 2A, in the valve 1A according to the second embodiment of the present invention.
  • FIG. 2C is a cross-sectional view taken along the line CC of FIG. 2A in the valve 1A according to the second embodiment of the present invention.
  • FIG. 2A in describing this embodiment, a part of the area is hatched. In each drawing, in order to make the configuration easy to see, some symbols are omitted, and the dimensional relationship is appropriately changed.
  • the valve 1A according to the second embodiment includes a fixing portion 31 with respect to the valve 1 according to the first embodiment. It differs in the added shape.
  • the other configuration of the valve 1A is the same as that of the valve 1, and the description of the same portion is omitted.
  • the fixing portions 30 and 31 are formed at positions close to the outer edge R1 of the valve body 10.
  • the valve body 10 is fixed to the top plate 20 via fixing portions 30 and 31.
  • the fixing portions 30 and 31 have, for example, a substantially elliptic shape, and may have any shape as long as the valve body 10 can be fixed to the top plate 20. Further, the fixing portions 30 and 31 are arranged at positions close to the outer edge R1 of the valve body 10 so as not to overlap the valve through-hole 100 in plan view from the one main surface of the valve body to the one main surface direction of the top plate. Yes.
  • the fixing portions 30 and 31 are, for example, an adhesive and may be any material that can fix the valve body 10 to the top plate 20.
  • the straight lines connecting the end of the fixed part 30 and the end of the fixed part 31 are referred to as fixed straight lines F1 and F2, respectively.
  • the fixed straight lines F1 and F2 do not intersect.
  • a straight line close to the center of the valve body 10 is a fixed straight line F1
  • a straight line close to the outer edge R1 is a fixed straight line F2.
  • the largest area in front view including the fixing part 30 and the fixing part 31 and formed by the fixing straight lines F1 and F2 is a valve fixing area FR1. That is, the fixing portions 30 and 31 are both ends, and a region including the fixing portions 30 and 31 is the valve fixing region FR1.
  • the valve fixing region FR1 does not overlap the valve through hole 100.
  • the valve body 10 is also fixed to the top plate 20 by using this configuration. Therefore, it is possible to prevent unintended stress from being applied to the valve through hole 100 due to the behavior of the valve body 10 in a mode in which the valve body 10 is not fixed. Thereby, the tearing of the valve body 10 can be suppressed.
  • the fixing portions 30 and 31 do not overlap with the valve through-hole 100 and are formed at positions close to the outer edge R1, even if an adhesive is used for the fixing portions 30 and 31, the adhesive is not used in the valve body.
  • the possibility of blocking the valve through-hole 100 is reduced by passing through the surface of 10. Accordingly, the valve body 10 can be fixed without impairing the function of the valve body 10, and the valve 1A having excellent reliability and characteristics can be realized.
  • valve body 10 when the valve body 10 is fixed by the plurality of fixing portions 30 and 31, a tensile stress is applied to the valve body 10, and the valve body 10 may be wrinkled.
  • the valve body 10 can be wrinkled is the valve fixing region FR1 in the present embodiment and does not overlap with the valve through hole 100, so that the function as the valve body 10 is not impaired. This is because the length of the valve body 10 in the surface direction is sufficiently larger than the height of the valve chamber 60. More specifically, the area of the valve body 10 excluding the valve fixing area FR1 moves so that the main surface of the valve body 10 comes into contact with or comes into contact with the top plate 20 or the outer plate 50. This is because the movement of R1 inside the valve chamber 60 is restricted.
  • the fixing of the valve body is stabilized by providing the valve body with a plurality of fixing portions. This produces the effect of improving the reliability of the valve and the product life.
  • FIG. 3A is a front view (perspective view) in which a part of the configuration of the valve 1B according to the third embodiment of the present invention is overlaid.
  • FIG. 3B is a cross-sectional view taken along line BB of FIG. 3A, in a valve 1B according to a third embodiment of the present invention.
  • FIG. 3C is a cross-sectional view taken along the line CC of FIG. 3A in the valve 1B according to the third embodiment of the present invention.
  • FIG. 3D is a cross-sectional view taken along the line DD of FIG. 3A in the valve 1B according to the third embodiment of the present invention.
  • FIG. 3A is a front view (perspective view) in which a part of the configuration of the valve 1B according to the third embodiment of the present invention is overlaid.
  • FIG. 3B is a cross-sectional view taken along line BB of FIG. 3A, in a valve 1B according to a third embodiment of the present invention.
  • FIG. 3A in describing this embodiment, a part of the area is hatched. In each drawing, in order to make the configuration easy to see, some symbols are omitted, and the dimensional relationship is appropriately changed. In FIG. 3A, the outer plate is omitted for easy understanding of the drawing.
  • the valve 1B according to the third embodiment is different from the valve 1 according to the first embodiment.
  • the shape is different in that the fixing portions 31 and 32 are added.
  • the other structure of the valve 1B is the same as that of the valve 1, and the description of the same part is omitted.
  • the fixing portions 30, 31, and 32 are formed at positions close to the outer edge R1 of the valve body 10.
  • the valve body 10 is fixed to the top plate 20 via fixing portions 30, 31, 32.
  • the fixing portions 30, 31, and 32 are, for example, substantially elliptical and may have any shape as long as the valve body 10 can be fixed to the top plate 20. Further, the fixing portions 30, 31, and 32 are located close to the outer edge R ⁇ b> 1 of the valve body 10 so as not to overlap the valve through-hole 100 in plan view from the one main surface of the valve body 10 to the one main surface direction of the top plate 20. Is arranged.
  • the straight lines connecting the end of the fixed portion 30, the end of the fixed portion 31, and the end of the fixed portion 32 are set as fixed straight lines F3, F4, and F5.
  • the fixed straight lines F3, F4, F5 do not intersect.
  • a straight line closest to the center of the valve body 10 is a fixed straight line F3.
  • a straight line connecting the end of the fixed part 30 and the end of the fixed part 31 near the outer edge R1 is a fixed straight line F4.
  • a straight line connecting the end of the fixed part 31 and the end of the fixed part 32 near the outer edge R1 is a fixed straight line F5.
  • the maximum region in front view which includes the fixing portion 30, the fixing portion 31, and the fixing portion 32 and is formed by the fixing straight lines F3, F4, and F5, is defined as a valve fixing region FR2. That is, the fixing portions 30, 31, and 32 are corner portions, and a region including the fixing portions 30, 31, and 32 is the valve fixing region FR2.
  • the valve fixing region FR2 is a region that does not overlap the valve through hole 100.
  • the fixing portions 30, 31, and 32 are, for example, adhesives, and may be any material that can fix the valve body 10 to the top plate 20.
  • the valve body 10 is also fixed to the top plate 20 by using this configuration. Therefore, it is possible to prevent unintended stress from being applied to the valve through hole 100 due to the behavior of the valve body 10 in a mode in which the valve body 10 is not fixed. Thereby, the tearing of the valve body 10 can be suppressed.
  • the fixing portions 30, 31, and 32 are not overlapped with the valve through hole 100 and are formed at positions close to the outer edge R1. Therefore, even if an adhesive is used for the fixing portions 30, 31, and 32, the possibility that the adhesive will block the valve through-hole 100 due to propagation through the surface of the valve body 10 is reduced. Thereby, the valve body 10 can be fixed without impairing the function of the valve body 10, and the valve 1B having excellent reliability and characteristics can be realized.
  • valve body 10 when the valve body 10 is fixed by the plurality of fixing portions 30, 31, 32, tensile stress is applied to the valve body 10, and the valve body 10 may be wrinkled.
  • the part which may be wrinkled to the valve body 10 is the valve fixing region FR2 in the present embodiment, the valve body 10 does not overlap with the valve through hole 100, and thus the function as the valve body is not impaired.
  • FIG. 4A is a front view (perspective view) in which a part of the configuration of the fluid control device according to the fourth embodiment of the present invention is overlaid.
  • FIG. 4B is a cross-sectional view taken along line BB in FIG. 4A in the fluid control apparatus including the valve 1C according to the fourth embodiment of the present invention.
  • some symbols are omitted, and the dimensional relationship is appropriately changed.
  • valve 1C of the fluid control device according to the fourth embodiment is different from the valve 1 according to the first embodiment in the shape of the valve body 10C. Different.
  • the other configuration of the valve 1C is the same as that of the valve 1, and the description of the same portion is omitted.
  • the outer edge (outer periphery) of the valve body 10C is R2.
  • the valve 1 ⁇ / b> C constitutes a fluid control device 80 together with the piezoelectric blower 70.
  • the piezoelectric blower 70 includes a piezoelectric element 700, a pump chamber 710, an inflow hole 730, a flow path 750, and a discharge hole 740.
  • the discharge hole 740 is disposed on the top plate 20 side of the valve 1C.
  • the fluid flows into the discharge hole 740 via the inflow hole 730 and the flow path 750 due to the vibration of the piezoelectric element 700.
  • the fluid passes through the top plate through hole 200 and pushes up the valve body 10C in the fluid discharge direction.
  • the fluid flows out from the outer plate through hole 500 through the valve through hole 100 of the valve body 10C.
  • the piezoelectric blower 70 may be disposed on the outer plate 50 side of the valve 1C.
  • the outer plate 50 is connected to the top plate 20 through the adhesive layer 40.
  • the adhesive layer 40 is, for example, an adhesive.
  • the outer edge R2 of the valve body 10C is formed at a position closer to the center of the valve 1C in plan view and far from the adhesive layer 40 in plan view than the valve 1 according to the first embodiment. Has been. That is, a substantially constant gap d1 is provided between the valve body 10C and the inner wall surface of the outer plate 50 in the horizontal direction.
  • the fixing portion 33 is formed at a position close to the outer edge R2 of the valve body 10C. 10 C of valve bodies are being fixed to the top plate 20 via the fixing
  • the fixing portion 33 has, for example, a substantially elliptic shape, and may have any shape as long as the valve body 10C can be fixed to the top plate 20. Further, the fixed portion 33 is disposed at a position close to the outer edge R2 of the valve body 10C so as not to overlap the valve through hole 100 in plan view.
  • the fixing portion 33 is, for example, an adhesive and may be any material that can fix the valve body 10C to the top plate 20.
  • the valve body 10C is also fixed to the top plate 20 by using this configuration. Therefore, it is possible to prevent unintended stress from being applied to the valve through hole 100 due to the behavior of the valve body 10C in a mode in which the valve body 10C is not fixed. Thereby, the tearing of the valve body 10 can be suppressed.
  • the fixing portion 33 does not overlap the valve through hole 100 and is formed at a position close to the outer edge R2, even if an adhesive is used for the fixing portion 33, the adhesive does not cover the surface of the valve body 10C. By transmitting, the possibility of closing the valve through hole 100 is reduced. Accordingly, the valve body 10C can be fixed without impairing the function of the valve body 10C, and the valve 1C having excellent reliability and characteristics can be realized.
  • a gap d1 is provided between the outer plate 50 and the valve body 10C, and the adhesive layer 40 and the valve body 10C are separated to some extent. Accordingly, the possibility that the adhesive layer 40 that fixes the top plate 20 and the outer plate 50 passes through the valve body 10C and the top plate 20 to block the valve through hole 100 is reduced.
  • FIG. 5A is a front view (perspective view) in which a part of the configuration of a valve 1D according to the fifth embodiment of the present invention is overlaid.
  • FIG. 5B is a cross-sectional view taken along line BB of FIG. 5A, in a valve 1D according to the fifth embodiment of the present invention.
  • some symbols are omitted, and the dimensional relationship is appropriately changed.
  • valve 1D according to the fifth embodiment differs from the valve 1 according to the first embodiment in the shape of the valve body 10D.
  • the other configuration of the valve 1D is the same as that of the valve 1, and the description of the same portion is omitted.
  • the outer edge (outer periphery) of valve body 10D be R3.
  • the outer plate 50 is connected to the top plate 20 through the adhesive layer 41.
  • the adhesive layer 41 is, for example, an adhesive.
  • a region where the outer plate 50 and the top plate 20 are connected via the adhesive layer 41 is referred to as a plate fixing region 510.
  • the valve body 10D includes a valve body 35 and a protrusion 34.
  • the valve body 35 has the same shape as the valve body 10 and is substantially circular in plan view.
  • the protrusion 34 has a shape that protrudes outward from the valve body 35 in plan view.
  • the outer edge R3 of the valve body of the valve body 10D is closer to the center of the valve 1D in plan view than the valve 1 according to the first embodiment, and is viewed from the adhesive layer 41 in plan view. It is formed at a position where a certain gap is provided. That is, a certain gap d2 is provided between the valve body 10D and the adhesive layer 40.
  • the protruding portion 34 is formed at a position sandwiched between the outer plate 50 and the top plate 20 in the thickness direction. Furthermore, since the outer plate 50 and the top plate 20 are connected via the adhesive layer 40, the protruding portion 34 is connected to the outer plate 50 and the top plate via the adhesive layer 40 in the thickness direction. It is formed at a position sandwiched between the plate 20.
  • the protrusion part 34 is a fixing
  • valve body 10D is also fixed to the top plate 20 by using this configuration. Therefore, it is possible to suppress unintended stress from being applied to the valve through hole 100 by the behavior of the valve body 10D in a mode in which the valve body 10D is not fixed. Thereby, tearing of valve body 10D can be suppressed.
  • the protruding portion 34 (fixed portion) does not overlap the valve through hole 100 and is formed at a position close to the outer edge R3. Therefore, even when the protruding portion 34 (fixed portion) is fixed by the plate fixing region 510, even if an adhesive is used, the valve through-hole 100 due to the adhesive propagating through the surface of the valve body 10D. The possibility of blocking is reduced. Thereby, the valve body 10 can be fixed without impairing the function of the valve body 10, and the valve 1D having excellent reliability and characteristics can be realized.
  • a gap d2 is provided between the outer plate 50 and the valve body 10D, and the adhesive layer 40 and the valve body 10D are separated to some extent. Therefore, the possibility that the adhesive layer 41 blocks the valve through-hole 100 by passing through the valve body 10D and the top plate 20 is reduced.
  • FIG. 6 is a cross-sectional view of a valve 1E according to a modification of the present invention.
  • FIG. 6 is a cross-sectional view of a valve 1E according to a modification of the present invention.
  • some symbols are omitted, and the dimensional relationship is appropriately changed.
  • the valve 1E according to the modification is provided with an intermediate plate 90 with respect to the valve 1A according to the second embodiment, and the valve body 10 is fixed to the intermediate plate 90 by a fixing portion 30E. Is different.
  • the other structure of the valve 1E is the same as that of the valve 1A, and the description of the same part is omitted.
  • the valve 1E includes an intermediate plate 90 between the top plate 20 and the outer plate 50.
  • the intermediate plate 90 is a cylinder.
  • the intermediate plate 90 is disposed between the top plate 20 and the outer plate 50 and connects the top plate 20 and the outer plate 50 so as to face each other. More specifically, the centers of the top plate 20 and the outer plate 50 coincide in plan view.
  • the intermediate plate 90 connects the peripheral edges of the top plate 20 and the outer plate 50 arranged in this way over the entire circumference.
  • the valve chamber 60E is formed by using the top plate 20, the outer plate 50, and the intermediate plate 90.
  • the valve body 10 is disposed in the valve chamber 60E and is fixed to the intermediate plate 90 via the fixing portion 30E.
  • valve body 10 can be fixed without impairing the function of the valve body 10, and the valve 1E having excellent reliability and characteristics can be realized.
  • the valve fixing region is defined with two fixing portions, and in the third embodiment, there are three fixing portions.
  • the valve fixing region can form a region that does not overlap the valve through hole, there is no need to limit the number of fixing portions. That is, the fixed part may be formed continuously and may have a shape that covers a part of the outer edge (outer periphery) of the valve body.
  • the piezoelectric blower can be similarly provided in other embodiments.
  • the drive source is not limited to the piezoelectric blower, and may be another blower such as a motor pump as long as it supplies air to the top plate through hole 200.
  • valve body is directly sandwiched between the outer plate and the top plate, but another member (for example, between the valve body and the outer plate, or / and between the valve body and the top plate) An intermediate plate) may be provided, and the valve body may be fixed via the member.
  • another member for example, between the valve body and the outer plate, or / and between the valve body and the top plate
  • An intermediate plate may be provided, and the valve body may be fixed via the member.
  • a part of a fillet such as an adhesive for fixing the top plate and the outer plate may be protruded toward the valve body, and the fillet may be used as a fixing portion of the valve body.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Reciprocating Pumps (AREA)
  • Valve Housings (AREA)

Abstract

L'invention concerne une vanne (1), qui comprend : une plaque supérieure (20) ayant une pluralité de premiers trous traversants ; une plaque externe (50) ayant une pluralité de seconds trous traversants ; une chambre de vanne (60) constituée par la plaque supérieure (20) et la plaque externe (50), entre une surface principale de la plaque supérieure (20) et une surface principale de la plaque externe (50) qui fait face à la surface principale de la plaque supérieure (20) ; et un corps de vanne (10) qui est disposé dans la chambre de vanne (60), qui se déplace vers le haut et vers le bas entre la plaque supérieure (20) et la plaque externe (50), et qui a des trous traversants de vanne (100). Le corps de vanne a, dans la plaque supérieure (20) et/ou la plaque externe (50), une partie de fixation (30) qui est fixée dans un emplacement et qui ne chevauche pas les trous traversants de vanne (100), en vue de face.
PCT/JP2018/020290 2017-06-13 2018-05-28 Vanne et dispositif de contrôle de fluide WO2018230315A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE212018000220.7U DE212018000220U1 (de) 2017-06-13 2018-05-28 Ventil und Fluidsteuerungsvorrichtung

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017115599 2017-06-13
JP2017-115599 2017-06-13

Publications (1)

Publication Number Publication Date
WO2018230315A1 true WO2018230315A1 (fr) 2018-12-20

Family

ID=64659267

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2018/020290 WO2018230315A1 (fr) 2017-06-13 2018-05-28 Vanne et dispositif de contrôle de fluide

Country Status (2)

Country Link
DE (1) DE212018000220U1 (fr)
WO (1) WO2018230315A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI768809B (zh) * 2021-04-06 2022-06-21 研能科技股份有限公司 微型氣體傳輸裝置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5691959U (fr) * 1979-12-18 1981-07-22
JPS57181981A (en) * 1981-04-30 1982-11-09 Hitachi Ltd Valve structure of closed type electric motor-driven compressor
JPS628472U (fr) * 1985-06-28 1987-01-19
JPH01173393U (fr) * 1988-05-21 1989-12-08
JP2012528981A (ja) * 2009-06-03 2012-11-15 ザ テクノロジー パートナーシップ ピーエルシー ディスク状キャビティを備えるポンプ
JP2013519038A (ja) * 2010-02-03 2013-05-23 ケーシーアイ ライセンシング インコーポレイテッド バルブの単一化
US20160351366A1 (en) * 2014-02-14 2016-12-01 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Micro-electro-mechanical system and method for producing the same

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5691959U (fr) * 1979-12-18 1981-07-22
JPS57181981A (en) * 1981-04-30 1982-11-09 Hitachi Ltd Valve structure of closed type electric motor-driven compressor
JPS628472U (fr) * 1985-06-28 1987-01-19
JPH01173393U (fr) * 1988-05-21 1989-12-08
JP2012528981A (ja) * 2009-06-03 2012-11-15 ザ テクノロジー パートナーシップ ピーエルシー ディスク状キャビティを備えるポンプ
JP2013519038A (ja) * 2010-02-03 2013-05-23 ケーシーアイ ライセンシング インコーポレイテッド バルブの単一化
US20160351366A1 (en) * 2014-02-14 2016-12-01 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Micro-electro-mechanical system and method for producing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI768809B (zh) * 2021-04-06 2022-06-21 研能科技股份有限公司 微型氣體傳輸裝置

Also Published As

Publication number Publication date
DE212018000220U1 (de) 2020-01-08

Similar Documents

Publication Publication Date Title
JP6581124B2 (ja) 圧電アクチュエータ
JP6574451B2 (ja) 小型空気圧動力装置
US11635072B2 (en) Pump
US10097927B2 (en) Loud speaker arrangement with circuit-board-integrated ASIC
WO2018021514A1 (fr) Soupape et dispositif de régulation de gaz
CN103369442A (zh) 具有微机械麦克风结构的构件
JPWO2012140967A1 (ja) ポンプ装置
CN112771295B (zh) 阀以及气体控制装置
WO2020195036A1 (fr) Pompe piézoélectrique
JPWO2018221287A1 (ja) バルブおよび流体制御装置
WO2019138676A1 (fr) Pompe et dispositif de régulation de fluide
JP2016066969A (ja) 音響トランスデューサ及びマイクロフォン
US20190058953A1 (en) Diaphragm suspension for a loudspeaker
WO2018230315A1 (fr) Vanne et dispositif de contrôle de fluide
US20220381361A1 (en) Fluid control device
JP2017133511A (ja) 小型流体制御装置
WO2020195075A1 (fr) Pompe piézoélectrique
TWM570534U (zh) 流體驅動裝置
US11879449B2 (en) Piezoelectric pump with vibrating plate, protrusion and valve arrangement
WO2019208400A1 (fr) Convertisseur électromécanique et convertisseur électroacoustique
US20230235732A1 (en) Fluid control device
US11441553B2 (en) Piezoelectric driving device
WO2021002100A1 (fr) Dispositif de régulation de fluide
JP7327514B2 (ja) ポンプ装置
WO2022230678A1 (fr) Dispositif de pompe

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 18817273

Country of ref document: EP

Kind code of ref document: A1

122 Ep: pct application non-entry in european phase

Ref document number: 18817273

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP