WO2018230315A1

WO2018230315A1 - Valve and fluid control device

Info

Publication number: WO2018230315A1
Application number: PCT/JP2018/020290
Authority: WO
Inventors: 宏之横井; 寛基阿知波; 洋竹村
Original assignee: 株式会社村田製作所
Priority date: 2017-06-13
Filing date: 2018-05-28
Publication date: 2018-12-20
Also published as: DE212018000220U1

Abstract

A valve (1) comprises: a top plate (20) having a plurality of first through-holes; an outer plate (50) having a plurality of second through-holes; a valve chamber (60) configured by the top plate (20) and the outer plate (50), between one main surface of the top plate (20) and one main surface of the outer plate (50) which faces the one main surface of the top plate (20); and a valve body (10) that is disposed in the valve chamber (60), moves up and down between the top plate (20) and the outer plate (50), and has valve through-holes (100). The valve body has, in the top plate (20) and/or the outer plate (50), a fixing part (30) that is fixed in one location and that does not overlap the valve through-holes (100) in a front view.

Description

Valve and fluid control device

The present invention relates to a valve and a fluid control device having the valve.

Conventionally, in a diaphragm pump using a piezoelectric body, a rectifying mechanism including two metal plates and a valve body has been disclosed.

The structure described in Patent Document 1 includes a valve chamber formed of two metal plates and a valve body disposed between the two metal plates.

Japanese Patent No. 6052475

However, when the structure described in Patent Document 1 is used, it is necessary to provide a certain gap due to variations in positional accuracy when the valve body is arranged in the valve chamber. As a result, the position where the valve body is arranged may be greatly displaced, an unnecessary stress is applied to an unintended location, and the valve body is easily broken.

In order to solve this problem, it is conceivable to fix the valve body to a metal plate with an adhesive or the like. When the entire circumference of the valve body is fixed with an adhesive, if the amount of the adhesive is large, the through hole of the valve body may be blocked along the surface of the valve body by capillary action. In addition, when the valve body is fixed at a plurality of points with an adhesive, the valve body may become wrinkled depending on the fixing location, and the characteristics and reliability of the valve body may be impaired.

Therefore, an object of the present invention is to provide a structure for fixing a valve body without impairing the function of the valve body.

The valve of the present invention includes a first plate having a plurality of first through holes, a second plate having a plurality of second through holes, a first plate and a first plate, and a first plate and a second plate. A valve chamber configured between the one main surface of the second plate facing the one main surface of the one plate, and disposed in the valve chamber, and moves up and down between the first plate and the second plate, And a valve body having a through hole. In addition, the valve body has a fixing portion that is fixed at one place so as not to overlap the valve through hole when viewed from the front, on at least one of the first plate and the second plate.

In this configuration, the valve body can be fixed to the first plate and / or the second plate. Moreover, the location to fix does not overlap with a valve through-hole in front view, and does not impair the function as a valve body.

Further, the valve of the present invention includes a first plate having a plurality of first through holes, a second plate having a plurality of second through holes, one main surface of the first plate, and one main surface of the first plate. A valve chamber configured between one main surface of the opposing second plate, a valve body disposed in the valve chamber, vertically moving between the first plate and the second plate, and having a valve through hole; . Moreover, a valve body has a some fixing | fixed part fixed to each at multiple places in at least one of a 1st board or a 2nd board. The valve fixing region is a region formed by a line segment connecting the regions of the plurality of fixing portions and the outer edge portion of the fixing portion, and a plurality of the valve fixing regions are viewed from the front of the main surface of the first plate or the second plate. The maximum valve fixing region composed of the region including the fixing portion is not overlapped with the valve through hole when viewed from the front.

In this configuration, the valve body can be fixed. Moreover, even if the location to fix is plural, the function as a valve body is not impaired.

Further, the valve of the present invention includes a plate fixing region for fixing the first plate and the second plate, and the plate fixing region is a valve body when the main surface of the first plate or the second plate is viewed from the front. It is preferable to have a feature that does not overlap.

In this configuration, when the first plate and the second plate are fixed with an adhesive, the adhesive is not transmitted to the valve body, and the valve through hole of the valve body is not blocked, so that the function as the valve body is impaired. Absent.

In addition, the valve of the present invention includes a plate fixing region for fixing the first plate and the second plate, and the valve body protrudes from the valve main body in which the valve through-hole is formed, and the valve main body. It is preferable to have a part. Moreover, it is preferable that the protrusion part is pinched | interposed into the board fixing area | region in a 1st board and a 2nd board.

In this configuration, the protruding part of the valve body can be used as a fixed part.

Also, the fluid control device of the present invention includes a valve and a piezoelectric blower that sends fluid into the valve chamber or sucks fluid from the valve chamber.

With this configuration, it is possible to realize a fluid control device that can send and suck fluid without impairing the function of the valve body.

According to this invention, the valve body can be fixed without impairing the function of the valve body.

FIG. 1A is a front view (perspective view) in which a part of the configuration of the valve 1 according to the first embodiment of the present invention is overlaid. FIG. 1B is a cross-sectional view showing the configuration of the valve 1 according to the first embodiment of the present invention. FIG. 2A is a front view (perspective view) in which a part of the configuration of the valve 1A according to the second embodiment of the present invention is overlaid. 2B and 2C are cross-sectional views showing the configuration of a valve 1A according to the second embodiment of the present invention. FIG. 3A is a front view (perspective view) in which a part of the configuration of the valve 1B according to the third embodiment of the present invention is overlaid. 3 (B), 3 (C), and 3 (D) are cross-sectional views showing the configuration of a valve 1B according to the third embodiment of the present invention. FIG. 4A is a front view (perspective view) in which the configurations of the valve 1C according to the fourth embodiment of the present invention are overlaid. FIG. 4B is a schematic cross-sectional view of the fluid control apparatus including the valve 1C according to the fourth embodiment of the present invention. FIG. 5A is a front view (perspective view) in which the configurations of the valve 1D according to the fifth embodiment of the present invention are overlaid. FIG. 5B is a cross-sectional view showing a configuration of a valve 1D according to the fifth embodiment of the present invention. FIG. 6 is a cross-sectional view showing a configuration of a valve 1E, which is a modification of the present invention.

(First embodiment)
A valve according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1A is a front view (perspective view) in which a part of the configuration of the valve 1 according to the first embodiment of the present invention is overlaid. FIG. 1B is a cross-sectional view taken along line BB of FIG. 1A, in the valve 1 according to the first embodiment of the present invention. In each drawing, in order to make the configuration easy to see, some symbols are omitted, and the dimensional relationship is appropriately changed. In FIG. 1A, the outer plate 50 is omitted for easy viewing of the drawing.

1A and 1B, the valve 1 includes a valve body 10, a top plate 20, an outer plate 50, and a fixing portion 30. The valve 1 is substantially circular in plan view (front view). The top plate 20, the valve body 10, and the outer plate 50 are stacked in this order so that the principal surfaces of the flat portions are parallel to each other and face each other. The top plate 20 corresponds to the “first plate” of the present invention, and the outer plate 50 corresponds to the “second plate” of the present invention.

With this configuration, a hollow valve chamber 60 surrounded by the top plate 20 and the outer plate 50 is formed, and the valve body 10 is disposed in the valve chamber 60. The outer plate 50 is fixed to the top plate 20 with high adhesion by some method. The top plate 20 and the outer plate 50 are rigid bodies, and the valve body 10 is an elastic body.

As shown in FIGS. 1A and 1B, the valve body 10 includes a plurality of valve through holes 100. The valve through hole 100 has a circular shape, for example, and penetrates the valve body 10. The valve through holes 100 are formed in a predetermined arrangement pattern. The valve through hole 100 is formed in a central region when the valve body 10 is viewed in plan from one main surface to the other main surface. The outer edge (outer periphery) of the valve body 10 is R1.

The top plate 20 includes a plurality of top plate through holes 200. The top plate through hole 200 has, for example, a circular shape, and penetrates from one main surface of the top plate 20 to the other main surface. The top plate through-hole 200 is formed in a predetermined arrangement pattern. The top plate through hole 200 is formed in a central region when the top plate 20 is viewed in plan from the one main surface to the other main surface.

The outer plate 50 includes a plurality of outer plate through holes 500. The outer plate through hole 500 has, for example, a circular shape, and penetrates from one main surface of the outer plate 50 to the other main surface. The outer plate through-hole 500 is formed in a predetermined arrangement pattern. The outer plate through-hole 500 is formed in a central region when the outer plate 50 is viewed in plan from one main surface to the other main surface.

The plurality of valve through holes 100 of the valve body 10 and the plurality of top plate through holes 200 of the top plate 20 do not substantially overlap in plan view. Note that the term “substantially not overlapping” mentioned here means that the valve through hole 100 and the top plate through hole 200 are slightly overlapped, and means that the function as a valve is not lost.

Further, a part of the outer plate through hole 500 substantially overlaps with the valve through hole 100 in plan view. In addition, the substantially overlapping described here means a case where the outer plate through hole 500 and the valve through hole 100 do not overlap slightly, and the function as a valve is not lost.

More preferably, the top through hole 200 and the valve through hole 100 which are the first through holes do not overlap in plan view from the one main surface of the top plate 20 to the one main surface direction of the outer plate 50, and the second through hole The outer plate through-hole 500 and the valve through-hole 100, which are as described above, overlap each other in plan view from the one main surface of the top plate 20 toward the one main surface of the outer plate 50.

Furthermore, in plan view, the width of the valve through hole 100 (diameter in the present embodiment) is preferably larger than the width of the outer plate through hole 500 (diameter in the present embodiment). Moreover, it is preferable that the width | variety of the outer-plate through-hole 500 is larger than the width | variety (diameter in this embodiment) of the top-plate through-hole 200. FIG.

The fixing part 30 is formed at a position close to the outer edge R1 of the valve body 10. The valve body 10 is fixed to the top plate 20 via a fixing portion 30. The fixing portion 30 has, for example, a substantially elliptic shape, and may have any shape as long as the valve body 10 can be fixed to the top plate 20. Further, the fixed portion 30 is disposed at a position close to the outer edge R1 of the valve body 10 so as not to overlap the valve through hole 100 in a plan view from the one main surface of the valve body 10 to the one main surface direction of the top plate 20. Yes.

The fixing portion 30 is, for example, an adhesive and may be any material that can fix the valve body 10 to the top plate 20.

The valve body 10 is fixed to the top plate 20 by using this configuration. Therefore, it is possible to suppress unintended stress on the valve through-hole 100 due to the behavior of the valve body 10 as in the case where the valve body 10 is not fixed. Thereby, the tearing of the valve body 10 can be suppressed.

Furthermore, since the fixing portion 30 does not overlap the valve through-hole 100 and is formed at a position close to the outer edge R1, even if an adhesive is used for the fixing portion 30, the adhesive does not cover the surface of the valve body 10. By transmitting, the possibility of closing the valve through hole 100 is reduced. Thereby, the valve body 10 can be fixed without impairing the function of the valve body 10, and the valve 1 having excellent reliability and characteristics can be realized.

(Second Embodiment)
A valve according to a second embodiment of the present invention will be described with reference to the drawings. FIG. 2A is a front view (perspective view) in which a part of the configuration of the valve 1A according to the second embodiment of the present invention is overlaid. FIG. 2B is a cross-sectional view taken along the line BB of FIG. 2A, in the valve 1A according to the second embodiment of the present invention. FIG. 2C is a cross-sectional view taken along the line CC of FIG. 2A in the valve 1A according to the second embodiment of the present invention. In FIG. 2A, in describing this embodiment, a part of the area is hatched. In each drawing, in order to make the configuration easy to see, some symbols are omitted, and the dimensional relationship is appropriately changed.

As shown in FIGS. 2 (A), 2 (B), and 2 (C), the valve 1A according to the second embodiment includes a fixing portion 31 with respect to the valve 1 according to the first embodiment. It differs in the added shape. The other configuration of the valve 1A is the same as that of the valve 1, and the description of the same portion is omitted.

The fixing

portions

30 and 31 are formed at positions close to the outer edge R1 of the valve body 10. The valve body 10 is fixed to the top plate 20 via fixing

portions

30 and 31. The fixing

portions

30 and 31 have, for example, a substantially elliptic shape, and may have any shape as long as the valve body 10 can be fixed to the top plate 20. Further, the fixing

portions

30 and 31 are arranged at positions close to the outer edge R1 of the valve body 10 so as not to overlap the valve through-hole 100 in plan view from the one main surface of the valve body to the one main surface direction of the top plate. Yes.

The fixing

portions

30 and 31 are, for example, an adhesive and may be any material that can fix the valve body 10 to the top plate 20.

The straight lines connecting the end of the fixed part 30 and the end of the fixed part 31 are referred to as fixed straight lines F1 and F2, respectively. The fixed straight lines F1 and F2 do not intersect. A straight line close to the center of the valve body 10 is a fixed straight line F1, and a straight line close to the outer edge R1 is a fixed straight line F2.

Suppose that the largest area in front view including the fixing part 30 and the fixing part 31 and formed by the fixing straight lines F1 and F2 is a valve fixing area FR1. That is, the fixing

portions

30 and 31 are both ends, and a region including the fixing

portions

30 and 31 is the valve fixing region FR1. The valve fixing region FR1 does not overlap the valve through hole 100.

The valve body 10 is also fixed to the top plate 20 by using this configuration. Therefore, it is possible to prevent unintended stress from being applied to the valve through hole 100 due to the behavior of the valve body 10 in a mode in which the valve body 10 is not fixed. Thereby, the tearing of the valve body 10 can be suppressed.

In addition, since the fixing

portions

30 and 31 do not overlap with the valve through-hole 100 and are formed at positions close to the outer edge R1, even if an adhesive is used for the fixing

portions

30 and 31, the adhesive is not used in the valve body. The possibility of blocking the valve through-hole 100 is reduced by passing through the surface of 10. Accordingly, the valve body 10 can be fixed without impairing the function of the valve body 10, and the valve 1A having excellent reliability and characteristics can be realized.

Furthermore, when the valve body 10 is fixed by the plurality of fixing

portions

30 and 31, a tensile stress is applied to the valve body 10, and the valve body 10 may be wrinkled. However, there is a possibility that the valve body 10 can be wrinkled is the valve fixing region FR1 in the present embodiment and does not overlap with the valve through hole 100, so that the function as the valve body 10 is not impaired. This is because the length of the valve body 10 in the surface direction is sufficiently larger than the height of the valve chamber 60. More specifically, the area of the valve body 10 excluding the valve fixing area FR1 moves so that the main surface of the valve body 10 comes into contact with or comes into contact with the top plate 20 or the outer plate 50. This is because the movement of R1 inside the valve chamber 60 is restricted.

Also, even when the discharge pressure from the pump is higher, the fixing of the valve body is stabilized by providing the valve body with a plurality of fixing portions. This produces the effect of improving the reliability of the valve and the product life.

(Third embodiment)
A valve according to a third embodiment of the present invention will be described with reference to the drawings. FIG. 3A is a front view (perspective view) in which a part of the configuration of the valve 1B according to the third embodiment of the present invention is overlaid. FIG. 3B is a cross-sectional view taken along line BB of FIG. 3A, in a valve 1B according to a third embodiment of the present invention. FIG. 3C is a cross-sectional view taken along the line CC of FIG. 3A in the valve 1B according to the third embodiment of the present invention. FIG. 3D is a cross-sectional view taken along the line DD of FIG. 3A in the valve 1B according to the third embodiment of the present invention. In FIG. 3A, in describing this embodiment, a part of the area is hatched. In each drawing, in order to make the configuration easy to see, some symbols are omitted, and the dimensional relationship is appropriately changed. In FIG. 3A, the outer plate is omitted for easy understanding of the drawing.

As shown in FIGS. 3A, 3B, 3C, and 3D, the valve 1B according to the third embodiment is different from the valve 1 according to the first embodiment. Thus, the shape is different in that the fixing

portions

31 and 32 are added. The other structure of the valve 1B is the same as that of the valve 1, and the description of the same part is omitted.

The fixing

portions

30, 31, and 32 are formed at positions close to the outer edge R1 of the valve body 10. The valve body 10 is fixed to the top plate 20 via fixing

portions

30, 31, 32. The fixing

portions

30, 31, and 32 are, for example, substantially elliptical and may have any shape as long as the valve body 10 can be fixed to the top plate 20. Further, the fixing

portions

30, 31, and 32 are located close to the outer edge R <b> 1 of the valve body 10 so as not to overlap the valve through-hole 100 in plan view from the one main surface of the valve body 10 to the one main surface direction of the top plate 20. Is arranged.

The straight lines connecting the end of the fixed portion 30, the end of the fixed portion 31, and the end of the fixed portion 32 are set as fixed straight lines F3, F4, and F5. The fixed straight lines F3, F4, F5 do not intersect. A straight line closest to the center of the valve body 10 is a fixed straight line F3. A straight line connecting the end of the fixed part 30 and the end of the fixed part 31 near the outer edge R1 is a fixed straight line F4. A straight line connecting the end of the fixed part 31 and the end of the fixed part 32 near the outer edge R1 is a fixed straight line F5.

The maximum region in front view, which includes the fixing portion 30, the fixing portion 31, and the fixing portion 32 and is formed by the fixing straight lines F3, F4, and F5, is defined as a valve fixing region FR2. That is, the fixing

portions

30, 31, and 32 are corner portions, and a region including the fixing

portions

30, 31, and 32 is the valve fixing region FR2. The valve fixing region FR2 is a region that does not overlap the valve through hole 100.

The fixing

portions

30, 31, and 32 are, for example, adhesives, and may be any material that can fix the valve body 10 to the top plate 20.

Furthermore, the fixing

portions

30, 31, and 32 are not overlapped with the valve through hole 100 and are formed at positions close to the outer edge R1. Therefore, even if an adhesive is used for the fixing

portions

30, 31, and 32, the possibility that the adhesive will block the valve through-hole 100 due to propagation through the surface of the valve body 10 is reduced. Thereby, the valve body 10 can be fixed without impairing the function of the valve body 10, and the valve 1B having excellent reliability and characteristics can be realized.

Furthermore, when the valve body 10 is fixed by the plurality of fixing

portions

30, 31, 32, tensile stress is applied to the valve body 10, and the valve body 10 may be wrinkled. However, since the part which may be wrinkled to the valve body 10 is the valve fixing region FR2 in the present embodiment, the valve body 10 does not overlap with the valve through hole 100, and thus the function as the valve body is not impaired.

(Fourth embodiment)
A valve according to a fourth embodiment of the present invention will be described with reference to the drawings. FIG. 4A is a front view (perspective view) in which a part of the configuration of the fluid control device according to the fourth embodiment of the present invention is overlaid. FIG. 4B is a cross-sectional view taken along line BB in FIG. 4A in the fluid control apparatus including the valve 1C according to the fourth embodiment of the present invention. In each drawing, in order to make the configuration easy to see, some symbols are omitted, and the dimensional relationship is appropriately changed.

As shown in FIGS. 4A and 4B, the valve 1C of the fluid control device according to the fourth embodiment is different from the valve 1 according to the first embodiment in the shape of the valve body 10C. Different. The other configuration of the valve 1C is the same as that of the valve 1, and the description of the same portion is omitted. The outer edge (outer periphery) of the valve body 10C is R2.

The valve 1 </ b> C constitutes a fluid control device 80 together with the piezoelectric blower 70. The piezoelectric blower 70 includes a piezoelectric element 700, a pump chamber 710, an inflow hole 730, a flow path 750, and a discharge hole 740. The discharge hole 740 is disposed on the top plate 20 side of the valve 1C.

The fluid flows into the discharge hole 740 via the inflow hole 730 and the flow path 750 due to the vibration of the piezoelectric element 700. The fluid passes through the top plate through hole 200 and pushes up the valve body 10C in the fluid discharge direction. The fluid flows out from the outer plate through hole 500 through the valve through hole 100 of the valve body 10C.

When the fluid control device is used for fluid suction, the piezoelectric blower 70 may be disposed on the outer plate 50 side of the valve 1C.

The outer plate 50 is connected to the top plate 20 through the adhesive layer 40. The adhesive layer 40 is, for example, an adhesive.

The outer edge R2 of the valve body 10C is formed at a position closer to the center of the valve 1C in plan view and far from the adhesive layer 40 in plan view than the valve 1 according to the first embodiment. Has been. That is, a substantially constant gap d1 is provided between the valve body 10C and the inner wall surface of the outer plate 50 in the horizontal direction.

The fixing portion 33 is formed at a position close to the outer edge R2 of the valve body 10C. 10 C of valve bodies are being fixed to the top plate 20 via the fixing | fixed part 33. FIG. The fixing portion 33 has, for example, a substantially elliptic shape, and may have any shape as long as the valve body 10C can be fixed to the top plate 20. Further, the fixed portion 33 is disposed at a position close to the outer edge R2 of the valve body 10C so as not to overlap the valve through hole 100 in plan view.

The fixing portion 33 is, for example, an adhesive and may be any material that can fix the valve body 10C to the top plate 20.

The valve body 10C is also fixed to the top plate 20 by using this configuration. Therefore, it is possible to prevent unintended stress from being applied to the valve through hole 100 due to the behavior of the valve body 10C in a mode in which the valve body 10C is not fixed. Thereby, the tearing of the valve body 10 can be suppressed.

Further, since the fixing portion 33 does not overlap the valve through hole 100 and is formed at a position close to the outer edge R2, even if an adhesive is used for the fixing portion 33, the adhesive does not cover the surface of the valve body 10C. By transmitting, the possibility of closing the valve through hole 100 is reduced. Accordingly, the valve body 10C can be fixed without impairing the function of the valve body 10C, and the valve 1C having excellent reliability and characteristics can be realized.

Furthermore, a gap d1 is provided between the outer plate 50 and the valve body 10C, and the adhesive layer 40 and the valve body 10C are separated to some extent. Accordingly, the possibility that the adhesive layer 40 that fixes the top plate 20 and the outer plate 50 passes through the valve body 10C and the top plate 20 to block the valve through hole 100 is reduced.

(Fifth embodiment)
A valve according to a fifth embodiment of the present invention will be described with reference to the drawings. FIG. 5A is a front view (perspective view) in which a part of the configuration of a valve 1D according to the fifth embodiment of the present invention is overlaid. FIG. 5B is a cross-sectional view taken along line BB of FIG. 5A, in a valve 1D according to the fifth embodiment of the present invention. In each drawing, in order to make the configuration easy to see, some symbols are omitted, and the dimensional relationship is appropriately changed.

As shown in FIG. 5A, the valve 1D according to the fifth embodiment differs from the valve 1 according to the first embodiment in the shape of the valve body 10D. The other configuration of the valve 1D is the same as that of the valve 1, and the description of the same portion is omitted. Moreover, let the outer edge (outer periphery) of valve body 10D be R3.

Further, the outer plate 50 is connected to the top plate 20 through the adhesive layer 41. The adhesive layer 41 is, for example, an adhesive. A region where the outer plate 50 and the top plate 20 are connected via the adhesive layer 41 is referred to as a plate fixing region 510.

The valve body 10D includes a valve body 35 and a protrusion 34. The valve body 35 has the same shape as the valve body 10 and is substantially circular in plan view. The protrusion 34 has a shape that protrudes outward from the valve body 35 in plan view.

The outer edge R3 of the valve body of the valve body 10D is closer to the center of the valve 1D in plan view than the valve 1 according to the first embodiment, and is viewed from the adhesive layer 41 in plan view. It is formed at a position where a certain gap is provided. That is, a certain gap d2 is provided between the valve body 10D and the adhesive layer 40.

As shown in FIG. 5 (B), the protruding portion 34 is formed at a position sandwiched between the outer plate 50 and the top plate 20 in the thickness direction. Furthermore, since the outer plate 50 and the top plate 20 are connected via the adhesive layer 40, the protruding portion 34 is connected to the outer plate 50 and the top plate via the adhesive layer 40 in the thickness direction. It is formed at a position sandwiched between the plate 20. In addition, the protrusion part 34 is a fixing | fixed part in this embodiment.

The valve body 10D is also fixed to the top plate 20 by using this configuration. Therefore, it is possible to suppress unintended stress from being applied to the valve through hole 100 by the behavior of the valve body 10D in a mode in which the valve body 10D is not fixed. Thereby, tearing of valve body 10D can be suppressed.

Furthermore, the protruding portion 34 (fixed portion) does not overlap the valve through hole 100 and is formed at a position close to the outer edge R3. Therefore, even when the protruding portion 34 (fixed portion) is fixed by the plate fixing region 510, even if an adhesive is used, the valve through-hole 100 due to the adhesive propagating through the surface of the valve body 10D. The possibility of blocking is reduced. Thereby, the valve body 10 can be fixed without impairing the function of the valve body 10, and the valve 1D having excellent reliability and characteristics can be realized.

Furthermore, a gap d2 is provided between the outer plate 50 and the valve body 10D, and the adhesive layer 40 and the valve body 10D are separated to some extent. Therefore, the possibility that the adhesive layer 41 blocks the valve through-hole 100 by passing through the valve body 10D and the top plate 20 is reduced.

In each embodiment of the present invention, a mode in which the top plate and the valve body are fixed is shown. However, the same effect can be obtained in an embodiment in which the valve body and the outer plate are fixed.

(Modification)
A valve according to a modification of the present invention will be described with reference to the drawings. FIG. 6 is a cross-sectional view of a valve 1E according to a modification of the present invention. In each drawing, in order to make the configuration easy to see, some symbols are omitted, and the dimensional relationship is appropriately changed.

As shown in FIG. 6, the valve 1E according to the modification is provided with an intermediate plate 90 with respect to the valve 1A according to the second embodiment, and the valve body 10 is fixed to the intermediate plate 90 by a fixing portion 30E. Is different. The other structure of the valve 1E is the same as that of the valve 1A, and the description of the same part is omitted.

The valve 1E includes an intermediate plate 90 between the top plate 20 and the outer plate 50. The intermediate plate 90 is a cylinder. The intermediate plate 90 is disposed between the top plate 20 and the outer plate 50 and connects the top plate 20 and the outer plate 50 so as to face each other. More specifically, the centers of the top plate 20 and the outer plate 50 coincide in plan view. The intermediate plate 90 connects the peripheral edges of the top plate 20 and the outer plate 50 arranged in this way over the entire circumference.

The valve chamber 60E is formed by using the top plate 20, the outer plate 50, and the intermediate plate 90. The valve body 10 is disposed in the valve chamber 60E and is fixed to the intermediate plate 90 via the fixing portion 30E.

Even with this configuration, it is possible to prevent unintended stress from being applied to the valve through hole 100. Thereby, the tearing of the valve body 10 can be suppressed.

That is, the valve body 10 can be fixed without impairing the function of the valve body 10, and the valve 1E having excellent reliability and characteristics can be realized.

Further, in the second embodiment of the present invention, the valve fixing region is defined with two fixing portions, and in the third embodiment, there are three fixing portions. However, if the valve fixing region can form a region that does not overlap the valve through hole, there is no need to limit the number of fixing portions. That is, the fixed part may be formed continuously and may have a shape that covers a part of the outer edge (outer periphery) of the valve body.

Further, in the fourth embodiment of the present invention, the aspect provided with the piezoelectric blower is shown, but the piezoelectric blower can be similarly provided in other embodiments. The drive source is not limited to the piezoelectric blower, and may be another blower such as a motor pump as long as it supplies air to the top plate through hole 200.

Further, in the fifth embodiment of the present invention, the mode in which the valve body is directly sandwiched between the outer plate and the top plate is shown, but another member (for example, between the valve body and the outer plate, or / and between the valve body and the top plate) An intermediate plate) may be provided, and the valve body may be fixed via the member.

Further, a part of a fillet such as an adhesive for fixing the top plate and the outer plate may be protruded toward the valve body, and the fillet may be used as a fixing portion of the valve body.

d1, d2 ... clearances F1, F2, F3, F4, F5 ... fixed straight lines FR1, FR2 ... valve fixing regions R1, R2, R3 ...

outer edges

1, 1A, 1B, 1C, 1D, 1E ...

valves

10, 10C, 10D ... Valve body 20 ...

Top plate

30, 31, 32, 33, 30E ... Fixed portion 34 ... Projection 35 ...

Valve body

40, 41 ... Adhesive layer 50 ...

Outer plate

60, 60E ... Valve chamber 70 ... Piezoelectric blower 80 ... Fluid control Apparatus 90 ... Intermediate plate 100 ... Valve through hole 200 ... Top plate through hole 500 ... Outer plate through hole 510 ... Plate fixing region 700 ... Piezoelectric element 710 ... Pump chamber 730 ... Inflow hole 740 ... Discharge hole 750 ... Flow path

Claims

A first plate having a plurality of first through holes;
A second plate having a plurality of second through holes;
A valve chamber configured by the first plate and the second plate between one main surface of the first plate and one main surface of the second plate facing the one main surface of the first plate;
A valve body disposed in the valve chamber, moving up and down between the first plate and the second plate, and having a valve through hole;
With
The valve body is fixed to at least one of the first plate and the second plate at a single position that does not overlap the valve through hole when the main surface of the first plate or the second plate is viewed from the front. Having a part,
valve.
A first plate having a plurality of first through holes;
A second plate having a plurality of second through holes;
A valve chamber configured between one main surface of the first plate and one main surface of the second plate facing the one main surface of the first plate;
A valve body disposed in the valve chamber, moving up and down between the first plate and the second plate, and having a valve through hole;
With
The valve body has a plurality of fixing portions fixed to each of the first plate and the second plate at a plurality of locations, respectively.
The valve fixing area is an area formed by a line segment connecting the areas of the plurality of fixing portions and an outer edge portion of the fixing portion, and the main surface of the first plate or the second plate is viewed from the front. The maximum valve fixing region does not overlap with the valve through hole in front view,
valve.
A fixing region for fixing the first plate and the second plate;
The valve according to claim 1 or 2, wherein the fixed region does not overlap the valve body when a main surface of the first plate or the second plate is viewed from the front.
A plate fixing region for fixing the first plate and the second plate;
The valve body has a valve main body in which the valve through-hole is formed, and a protruding portion as the fixing portion protruding from the valve main body,
The valve according to claim 1 or 2, wherein the protrusion is sandwiched between the plate fixing regions of the first plate and the second plate.
A valve according to any one of claims 1 to 4;
A piezoelectric blower that delivers fluid into the valve chamber or sucks fluid from the valve chamber;
A fluid control device comprising: