WO2018205764A1 - 一种液晶天线及其制作方法 - Google Patents

一种液晶天线及其制作方法 Download PDF

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Publication number
WO2018205764A1
WO2018205764A1 PCT/CN2018/081108 CN2018081108W WO2018205764A1 WO 2018205764 A1 WO2018205764 A1 WO 2018205764A1 CN 2018081108 W CN2018081108 W CN 2018081108W WO 2018205764 A1 WO2018205764 A1 WO 2018205764A1
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Prior art keywords
liquid crystal
substrate
inertial navigation
navigation unit
crystal antenna
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PCT/CN2018/081108
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English (en)
French (fr)
Inventor
王瑛
曹雪
蔡佩芝
李治福
刘昊
Original Assignee
京东方科技集团股份有限公司
北京京东方光电科技有限公司
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Application filed by 京东方科技集团股份有限公司, 北京京东方光电科技有限公司 filed Critical 京东方科技集团股份有限公司
Priority to US16/099,541 priority Critical patent/US11262607B2/en
Publication of WO2018205764A1 publication Critical patent/WO2018205764A1/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1313—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells specially adapted for a particular application
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S1/00—Beacons or beacon systems transmitting signals having a characteristic or characteristics capable of being detected by non-directional receivers and defining directions, positions, or position lines fixed relatively to the beacon transmitters; Receivers co-operating therewith
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1339—Gaskets; Spacers; Sealing of cells
    • G02F1/13394—Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00—Details of, or arrangements associated with, antennas
    • H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00—Details of, or arrangements associated with, antennas
    • H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
    • H01Q1/364—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith using a particular conducting material, e.g. superconductor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q21/00—Antenna arrays or systems
    • H01Q21/06—Arrays of individually energised antenna units similarly polarised and spaced apart
    • H01Q21/061—Two dimensional planar arrays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q21/00—Antenna arrays or systems
    • H01Q21/06—Arrays of individually energised antenna units similarly polarised and spaced apart
    • H01Q21/061—Two dimensional planar arrays
    • H01Q21/065—Patch antenna array
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q3/00—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
    • H01Q3/26—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture
    • H01Q3/30—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture varying the relative phase between the radiating elements of an array
    • H01Q3/34—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the relative phase or relative amplitude of energisation between two or more active radiating elements; varying the distribution of energy across a radiating aperture varying the relative phase between the radiating elements of an array by electrical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q3/00—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system
    • H01Q3/44—Arrangements for changing or varying the orientation or the shape of the directional pattern of the waves radiated from an antenna or antenna system varying the electric or magnetic characteristics of reflecting, refracting, or diffracting devices associated with the radiating element
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q9/00—Electrically-short antennas having dimensions not more than twice the operating wavelength and consisting of conductive active radiating elements
    • H01Q9/04—Resonant antennas
    • H01Q9/0407—Substantially flat resonant element parallel to ground plane, e.g. patch antenna
    • H01Q9/0442—Substantially flat resonant element parallel to ground plane, e.g. patch antenna with particular tuning means

Definitions

  • Embodiments of the present invention relate to a liquid crystal antenna and a method of fabricating the same.
  • the liquid crystal antenna refers to an adaptive antenna, which can automatically adjust the weight vector of each antenna element to a certain direction signal according to a specific receiving criterion to transmit or receive a beam in a preset direction, and align the main lobe direction with a useful signal. At the same time, the low side lobes or zero trap directions are aligned with the interference signal direction, which can achieve the purpose of "spatial filtering".
  • An inertial navigation system is an autonomous navigation system that does not rely on external information and does not radiate energy to the outside.
  • the gyro and accelerometer are used as the navigation parameter solving system of the sensitive device.
  • the system establishes a navigation coordinate system according to the output of the gyro, and calculates the speed and position of the carrier in the navigation coordinate system according to the output of the accelerometer.
  • At least one embodiment of the present disclosure provides a liquid crystal antenna including: an antenna array including a first substrate and a second substrate disposed opposite to each other, and configured to change a phase of an electromagnetic wave signal fed to the liquid crystal antenna, to transmit or receive a pre- a direction-directed beam; at least one inertial navigation unit configured to determine a motion parameter of the liquid crystal antenna in a navigation coordinate system, the inertial navigation unit being located on a side of the second substrate facing the first substrate, The antenna array adjusts the preset direction according to the motion parameter acquired by the inertial navigation unit.
  • the liquid crystal antenna further includes a seed layer between the second substrate and the inertial navigation unit.
  • the inertial navigation unit includes: at least one accelerometer configured to detect an acceleration of a translational motion of the liquid crystal antenna in a three-dimensional direction, and determine an antenna Translational motion parameters.
  • the inertial navigation unit further includes: at least one gyroscope configured to measure a rotational motion parameter of the liquid crystal antenna in a three-dimensional direction.
  • the inertial navigation unit is located in a peripheral area surrounding the antenna array.
  • the antenna array further includes: a position between the second substrate and the first substrate, and a direction along the first substrate toward the second substrate a first electrode, a first alignment layer, a liquid crystal layer, a second alignment layer, a second electrode, and a side of the first substrate facing away from the second substrate or the second substrate facing away from the first electrode A plurality of patch units arranged in a matrix on one side of a substrate.
  • the antenna array further includes a spacer between the first substrate and the second substrate, and the spacer is supported by the first Between the alignment layer and the second alignment layer.
  • the first electrode includes a plurality of first sub-electrodes
  • the second electrode includes a plurality of second sub-electrodes.
  • a material of the patch unit, the first electrode, and the second electrode is a high conductivity metal material.
  • the patch unit has a rectangular shape.
  • the shape of the antenna array is any one of a circular array, a square array, or an octagonal array.
  • the embodiment of the present disclosure further provides a method for fabricating a liquid crystal antenna, comprising: the liquid crystal antenna according to any one of the above, wherein the manufacturing method comprises: forming the antenna array by using a semiconductor fabrication process; and The inertial navigation unit is formed by a semiconductor fabrication process and a sacrificial layer process on a side of the substrate facing the first substrate.
  • forming the inertial navigation unit by using a semiconductor fabrication process and a sacrificial layer process on a side of the second substrate facing the first substrate includes: Forming a stacked structure by a semiconductor fabrication process on a side of the second substrate facing the first substrate, the stacked structure including a sacrificial layer and a plurality of film layers of the inertial navigation unit, the sacrificial layer being located in the plurality of films Between the layers; and removing the sacrificial layer and forming a cavity to form the inertial navigation unit.
  • removing the sacrificial layer and forming a cavity to form the inertial navigation unit includes: etching the sacrificial layer by a wet etching process to form the empty Cavity.
  • the method for fabricating a liquid crystal antenna according to an embodiment of the present disclosure further includes forming a seed layer between the second substrate and the inertial navigation unit.
  • the material of the sacrificial layer includes one or more of silicon nitride, silicon oxide, and silicon oxynitride.
  • 1a is a schematic plan view of a liquid crystal antenna according to an embodiment of the present invention.
  • FIG. 1b is a schematic structural diagram of a liquid crystal antenna according to an embodiment of the present invention.
  • FIG. 2 is a schematic diagram of a working principle of a liquid crystal antenna according to an embodiment of the present invention
  • FIG. 3a is a schematic structural diagram of an inertial navigation unit according to an embodiment of the present invention.
  • FIG. 3b is a schematic structural diagram of another inertial navigation unit according to an embodiment of the present invention.
  • FIGS. 4a-4c are schematic diagrams showing the shape of an antenna array according to an embodiment of the present invention.
  • FIG. 5 is a flowchart of a method for fabricating a liquid crystal antenna according to an embodiment of the present invention
  • FIG. 6 is a flowchart of a method for fabricating an antenna array according to an embodiment of the present invention.
  • the inventor of the present application noticed that in the current stage antenna system, the antenna and the inertial navigation system are two independent modules, which need to be separately designed, manufactured and packaged, and then integrated, so the antenna system It is bulky and cannot meet the needs of lightening and miniaturization of various electronic products.
  • the inertial navigation system in these antenna systems belongs to the platform-type inertial navigation system, and the inertial coordinate system needs to be established, and the back-end calculation needs to be compensated for the influence of the earth rotation, gravity acceleration and the like. Since the antenna and the inertial navigation system are two independent modules, the position and motion state of the inertial navigation system cannot perfectly reflect the position and motion state of the antenna, so the efficiency and accuracy of the antenna system still have room for improvement.
  • Embodiments of the present disclosure provide a liquid crystal antenna and a method of fabricating the same.
  • the liquid crystal antenna includes an antenna array including a first substrate and a second substrate disposed opposite to each other, and configured to change a phase of an electromagnetic wave signal fed to the liquid crystal antenna, to transmit or receive a beam in a preset direction; at least one inertial navigation unit And configured to determine a motion parameter of the liquid crystal antenna in a navigation coordinate system, wherein the inertial navigation unit is located on a side of the second substrate facing the first substrate, and the antenna array is navigated according to the inertia The motion parameters acquired by the unit adjust the preset direction.
  • the liquid crystal antenna integrates the antenna array and the inertial navigation unit, so that the liquid crystal antenna can be made thinner and lighter, and the efficiency and accuracy of the liquid crystal antenna can be improved.
  • FIG. 1 is a schematic plan view of a liquid crystal antenna according to an embodiment of the present invention
  • FIG. 1b is a schematic structural diagram of a liquid crystal antenna according to an embodiment of the present invention.
  • the liquid crystal antenna includes an antenna array 01 and at least one inertial navigation unit 02.
  • the antenna array 01 includes a first substrate 011 and a second substrate 012 disposed opposite to each other; the antenna array 01 is configured to change a phase of an electromagnetic wave signal fed into the liquid crystal antenna, and transmit or receive a beam in a preset direction.
  • the preset direction described above is the direction in which the interactive target is located.
  • the inertial navigation unit 02 is located on a side of the second substrate 012 facing the first substrate 011.
  • the inertial navigation unit 02 can determine the motion parameters of the liquid crystal antenna in the navigation coordinate system.
  • the inertial navigation unit 02 communicates with the antenna array 01, and the antenna array 01 adjusts the preset direction according to the motion parameters acquired by the inertial navigation unit 02.
  • the inertial navigation unit since the inertial navigation unit is located on a side of the second substrate facing the first substrate, the inertial navigation unit and the antenna array are better integrated.
  • the position and motion of the inertial navigation system perfectly reflect the position and motion of the antenna. Therefore, when the carrier of the liquid crystal antenna is used, since the inertial navigation unit can determine the motion parameter of the liquid crystal antenna in the navigation coordinate system, the inertial navigation unit communicates with the antenna array, and the antenna array can be provided by the inertial navigation system.
  • the motion parameters and the state information of the interaction target can be quickly aligned with the antenna array to quickly align the interactive targets to achieve precise alignment, thereby improving the accuracy and efficiency of the liquid crystal antenna.
  • the deflection of the liquid crystal can be continuously adjusted, the continuous change of the antenna pattern can be realized, thereby realizing full-angle electronically controlled scanning and realizing fast tracking of the interactive target.
  • the inertial navigation unit is passive, it is not interfered by the antenna signal of the antenna array, and does not affect the performance of signal transmission, filtering, and beam control of the liquid crystal antenna.
  • the inertial navigation unit 02 is located within a peripheral region surrounding the antenna array 01.
  • the liquid crystal antenna further includes a seed layer 021 located between the second substrate 012 and the inertial navigation unit 02.
  • the seed layer 021 can provide a good adhesion and conductive substrate environment for the metal layer growth process of the subsequent inertial navigation unit 02, and improve the bonding force between the substrate and the metal wiring film layer.
  • the antenna array 01 may include: being located between the second substrate 012 and the first substrate 011, and pointing along the first substrate 011 to the second substrate 012.
  • the direction of the first electrode 013, the first alignment layer 014, the liquid crystal layer 015, the second alignment layer 017, the second electrode 018, and the side of the first substrate 011 facing away from the second substrate 012 or the second substrate 012 are separated from each other.
  • a plurality of patch units 019 arranged in a matrix on one side of the first substrate 011 (FIG. 1b is an example in which the patch unit is located on the first substrate).
  • the liquid crystal antenna further includes a spacer 016 supported between the first alignment layer 014 and the second alignment layer 017.
  • FIG. 2 is a schematic diagram of a working principle of a liquid crystal antenna according to an embodiment of the present disclosure.
  • the deflection state of the liquid crystal is controlled by applying different voltage signals, so that the feed wave forms a certain phase difference.
  • the electromagnetic wave signal in the feed network passes through the adjusted liquid crystal layer and is radiated from the patch unit, The electromagnetic waves will be coupled to each other in the outer space to form a main beam in a predetermined direction to complete the emission of the electromagnetic signal.
  • the feed signal is fed from the patch unit, and the deflection state of the liquid crystal is controlled by applying different voltages. After the external electromagnetic wave signal passes through the adjusted liquid crystal cell, the signal is fully received in a preset direction, and finally transmitted to the feed network.
  • the inertial navigation unit can determine the motion parameters of the liquid crystal antenna in the navigation coordinate system, and the actual motion parameters of the antenna array can be provided by the inertial navigation system. And the state information of the interactive target can be quickly adjusted by adjusting the applied voltage signal to quickly align the interactive target to achieve precise alignment, thereby improving the accuracy and efficiency of the liquid crystal antenna. Moreover, since the deflection of the liquid crystal can be continuously adjusted, the continuous change of the antenna pattern can be realized, thereby realizing full-angle electronically controlled scanning and realizing fast tracking of the interactive target. In addition, since the inertial navigation unit is passive, it is not interfered by the antenna signal of the antenna array, and does not affect the performance of signal transmission, filtering, and beam control of the liquid crystal antenna.
  • the material of the patch unit, the first electrode, and the second electrode is a high conductivity metal material.
  • the upper and lower electrodes (corresponding to the first electrode and the second electrode) and the patch unit are metal structures, and a metal layer with high conductivity, such as gold, aluminum, copper, etc., is selected.
  • the metal structure can be realized by a semiconductor process such as sputtering, evaporation or electroplating, that is, it can be fabricated by using an existing semiconductor fabrication process.
  • the shape of the patch unit may be a rectangle, a circle, or other shapes that meet the design requirements, which is not limited herein.
  • the inertial navigation unit 021 includes at least one accelerometer 03 that can detect the acceleration of the translational motion of the liquid crystal antenna in three dimensions, determining the translational motion parameters of the antenna.
  • the accelerometer can measure the translational motion state of the antenna, detect the acceleration of the translational motion in three directions, and integrate the time to obtain the velocity and distance, and realize the measurement of the attitude, position, speed and other parameters of the liquid crystal antenna itself, and give a liquid crystal antenna. Motion state parameters.
  • the accelerometer can be any one or more of a piezoelectric accelerometer, a piezoresistive accelerometer, a capacitive accelerometer, a resonant accelerometer, or a tunnel accelerometer.
  • the inertial navigation unit 02 further includes at least one gyroscope 04 that can measure rotational motion parameters of the liquid crystal antenna in three dimensions.
  • the gyroscope is used to measure the rotational motion of the antenna in three directions, such as attitude angle (pitch angle, roll angle and heading angle), angular displacement or angular position, etc., to form a navigation coordinate system to make the accelerometer
  • the measuring axis is stabilized in the coordinate system, and the heading and attitude angles are given, thereby enriching the motion state parameters of the liquid crystal antenna, thereby further improving the accuracy of the liquid crystal antenna.
  • the gyroscope may be any one or more of a piezoelectric type detecting gyroscope, a piezoresistive type detecting gyroscope, a capacitance type detecting gyroscope, an optical detecting gyroscope, or a tunnel effect detecting gyroscope.
  • both the accelerometer and the gyroscope can be fabricated using a semiconductor process, compatible with the manufacturing process of the antenna array, and the order of manufacture of the antenna array, the accelerometer, and the gyroscope is not limited, and can be simultaneously produced.
  • a stacked structure can be formed by a semiconductor fabrication process that includes a sacrificial layer and a plurality of film layers of an inertial navigation unit; and then at least partially removes the sacrificial layer and forms a cavity to form an inertial navigation unit.
  • the cavity described above provides the space required for the accelerometer and gyroscope.
  • FIG. 3 is a schematic structural diagram of an inertial navigation unit according to an embodiment of the present invention
  • FIG. 3b is a schematic structural diagram of another inertial navigation unit according to an embodiment of the present invention.
  • the inertial navigation unit includes an accelerometer 03, and a plurality of film layers 030 (for example, a plurality of metal film layers) of the accelerometer 03 and a sacrificial layer 022 are laminated on the seed layer 021; the sacrificial layer 022 can be used for Forming a cavity of a micromechanical structure or a movable sensor structure, the sacrificial layer 022 acts only as a separation layer, and after being formed on the film layer thereon, can be removed by a release process to form a cavity 024, thereby forming the navigation unit 02 Three-dimensional structure. It should be noted that when the sacrificial layer 022 is removed, the sacrificial layer 022 at the location of the accelerometer 03 becomes the cavity 024.
  • a sacrificial layer is formed between the plurality of film layers, and a cavity may be formed after the sacrificial layer is removed.
  • the inertial navigation unit includes an accelerometer 03 and a gyroscope 04, which is similar in structure to the accelerometer 03.
  • a plurality of film layers of the accelerometer 04 may also be stacked on the seed layer 021 with the sacrificial layer 022; the sacrificial layer 022 may be used to form a cavity of a micromechanical structure or a movable sensor structure, sacrificing Layer 022 acts only as a separation layer and, after forming the film layer thereon, can be removed by a release process to form cavity 025, thereby forming a three-dimensional structure of navigation unit 02.
  • the sacrificial layer 022 when the sacrificial layer 022 is removed, the sacrificial layer 022 at the location of the gyroscope 04 becomes the cavity 025.
  • the shape of the antenna array 01 can be a circular array as shown in Figure 4b, a square array as shown in Figure 4c, or eight sides as shown in Figure 4a.
  • Any one of the arrays, and the inertial navigation unit is located in a peripheral region surrounding the antenna array (corresponding to the shaded region n in FIGS. 4a-4c), for example, integrating the inertial navigation unit around the antenna array or in four corners It can integrate a set of inertial navigation unit, or integrate multiple sets of inertial navigation units. Multiple sets of inertial navigation units cooperate with each other to navigate with higher navigation accuracy, and the inertial navigation unit is passive, free from antenna signal interference, and will not Affects the performance of signal transmission, filtering, and beam steering of the antenna array.
  • an embodiment of the present invention provides a method for fabricating the above liquid crystal antenna. As shown in FIG. 5, the manufacturing method includes:
  • the antenna array includes a first substrate and a second substrate disposed opposite to each other.
  • S102 Form an inertial navigation unit by using a semiconductor fabrication process and a sacrificial layer process on a side of the second substrate facing the first substrate.
  • the antenna array and the inertial navigation unit are formed by using a semiconductor manufacturing process, which is beneficial to improving the integration of the antenna system, and the manufacturing processes of the two are the same, which is beneficial to the integrated manufacturing of the liquid crystal antenna.
  • the above semiconductor fabrication process includes semiconductor fabrication processes such as deposition, coating, sputtering, patterning, and printing.
  • the above patterning process may include processes such as exposure, development, etching, and the like.
  • forming the inertial navigation unit by using a semiconductor fabrication process and a sacrificial layer process on a side of the second substrate facing the first substrate includes: forming a stacked structure by using a semiconductor fabrication process on a side of the second substrate facing the first substrate
  • the stacked structure includes a sacrificial layer and a plurality of film layers of the inertial navigation unit; and the sacrificial layer is removed and a cavity is formed to form an inertial navigation unit.
  • the layer function after forming the upper layer structure, can be removed by the release process, that is, various film layer structures are formed in the process of fabricating the inertial navigation unit, including forming a sacrificial layer at an appropriate position, and then etching or drying with a chemical etchant.
  • the etching process and the like remove the sacrificial layer film without damaging the other film structure, and then obtain the three-dimensional structure of the inertial navigation unit.
  • removing the sacrificial layer and forming a cavity to form the inertial navigation unit includes etching the sacrificial layer using a wet etch process to form a cavity.
  • the method of fabricating further includes forming a seed layer between the second substrate and the inertial navigation unit.
  • the conductive substrate environment improves the bonding force between the substrate and the metal wiring film layer, that is, the main metal film layer structure of the long inertial navigation unit can be regenerated after the seed layer is grown on the substrate in advance.
  • the material of the sacrificial layer includes one or more of silicon nitride, silicon oxide, and silicon oxynitride.
  • step S101 may include:
  • the liquid crystal cell portion (the upper second substrate, the alignment layer, and the liquid crystal) of the antenna array is similar to the manufacturing process of the conventional liquid crystal display panel, and the production line of the liquid crystal display panel is slightly It can be manufactured by adding modifications.

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  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
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  • Engineering & Computer Science (AREA)
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Abstract

一种液晶天线及其制作方法，液晶天线包括：天线阵列(01)，包括相对设置的第一基板(011)和第二基板(012)，并被配置为改变馈入液晶天线的电磁波信号的相位，发射或接收预设方向的波束；至少一个惯性导航单元(02)，被配置为确定液晶天线在导航坐标系中的运动参数，惯性导航单元(02)位于第二基板(012)面向第一基板(011)的一侧，天线阵列(01)根据惯性导航单元(02)获取的运动参数调节预设方向。液晶天线将惯性导航单元(02)与天线阵列(01)集成在一起，可提高了天线系统的集成化，并可提高液晶天线的精度和效率。

Description

一种液晶天线及其制作方法
本申请要求于2017年05月09日递交的中国专利申请第201710322058.1号的优先权，在此全文引用上述中国专利申请公开的内容以作为本申请的一部分。
技术领域
本发明实施例涉及一种液晶天线及其制作方法。
背景技术
液晶天线是指一种自适应天线，它能够根据特定的接收准则自动调节各天线阵元对某方向信号的加权向量，以发射或接收预设方向的波束，把主瓣方向对准有用信号，同时把低的旁瓣或零陷方向对准干扰信号方向，可达到“空间滤波”的目的。
惯性导航系统是一种不依赖于外部信息、也不向外部辐射能量的自主式导航系统。以陀螺和加速度计为敏感器件的导航参数解算系统，该系统根据陀螺的输出建立导航坐标系，根据加速度计输出解算出运载体在导航坐标系中的速度和位置。
发明内容
本公开至少一个实施例提供一种液晶天线，包括：天线阵列，包括相对设置的第一基板和第二基板，并被配置为改变馈入所述液晶天线的电磁波信号的相位，发射或接收预设方向的波束；至少一个惯性导航单元，被配置为确定所述液晶天线在导航坐标系中的运动参数，所述惯性导航单元位于所述第二基板面向所述第一基板的一侧，所述天线阵列根据所述惯性导航单元获取的所述运动参数调节所述预设方向。
例如，在本公开一实施例提供的液晶天线中，该液晶天线还包括：种子层，位于所述第二基板与所述惯性导航单元之间。
例如，在本公开一实施例提供的液晶天线中，所述惯性导航单元包括：至少一个加速度计，所述加速度计被配置为检测所述液晶天线在三维方向的平移运动的加速度，确定天线的平移运动参数。
例如，在本公开一实施例提供的液晶天线中，所述惯性导航单元还包括：至少一个陀螺仪，所述陀螺仪被配置为测量所述液晶天线在三维方向的转动运动参数。
例如，在本公开一实施例提供的液晶天线中，所述惯性导航单元位于包围所述天线阵列的周边区域内。
例如，在本公开一实施例提供的液晶天线中，所述天线阵列还包括：位于所述第二基板与所述第一基板之间，且沿所述第一基板指向所述第二基板的方向依次设置的第一电极、第一配向层、液晶层、第二配向层、第二电极，以及位于所述第一基板背离所述第二基板的一面或者所述第二基板背离所述第一基板的一面的呈矩阵排列的多个贴片单元。
例如，在本公开一实施例提供的液晶天线中，所述天线阵列还包括位于所述第一基板和所述第二基板之间的隔垫物，所述隔垫物支撑于所述第一配向层与所述第二配向层之间。
例如，在本公开一实施例提供的液晶天线中，所述第一电极包括多个第一子电极，所述第二电极包括多个第二子电极。
例如，在本公开一实施例提供的液晶天线中，所述贴片单元、所述第一电极和所述第二电极的材料为高电导率金属材料。
例如，在本公开一实施例提供的液晶天线中，所述贴片单元的形状为矩形。
例如，在本公开一实施例提供的液晶天线中，所述天线阵列的形状为圆形阵列、方形阵列或八边形阵列中的任意一种。
本公开实施例还提供一种液晶天线的制作方法，该液晶天线包括上述任一项所述的液晶天线，所述制作方法包括：采用半导体制作工艺形成所述天线阵列；以及在所述第二基板面向所述第一基板的一侧采用半导体制作工艺和牺牲层工艺形成所述惯性导航单元。
例如，在本公开一实施例提供的液晶天线的制作方法中，在所述第二基板面向所述第一基板的一侧采用半导体制作工艺和牺牲层工艺形成所述惯性导航单元包括：在所述第二基板面向所述第一基板的一侧采用半导体制作工艺形成层叠结构，所述层叠结构包括牺牲层和所述惯性导航单元的多个膜层，所述牺牲层位于所述多个膜层之间；以及去除所述牺牲层并形成空腔以形成所述惯性导航单元。
例如，在本公开一实施例提供的液晶天线的制作方法中，去除所述牺牲层 并形成空腔以形成所述惯性导航单元包括：采用湿刻工艺刻蚀所述牺牲层以形成所述空腔。
例如，本公开一实施例提供的液晶天线的制作方法还包括：在所述第二基板与所述惯性导航单元之间形成种子层。
例如，在本公开一实施例提供的液晶天线的制作方法中，所述牺牲层的材料包括氮化硅、氧化硅和氮氧化硅中的一种或多种。
附图说明
为了更清楚地说明本公开实施例的技术方案，下面将对实施例的附图作简单地介绍，显而易见地，下面描述中的附图仅仅涉及本公开的一些实施例，而非对本公开的限制。
图1a为本发明一实施例提供的一种液晶天线的平面示意图；
图1b为本发明一实施例提供的一种液晶天线的结构示意图；
图2为本发明一实施例提供的一种液晶天线的工作原理示意图；
图3a为本发明一实施例提供的一种惯性导航单元的结构示意图；
图3b为本发明一实施例提供的另一种惯性导航单元的结构示意图；
图4a-图4c分别为本发明一实施例提供的一种天线阵列的形状示意图；
图5为本发明一实施例提供的一种液晶天线的制作方法流程图；以及
图6为本发明一实施例提供的一种天线阵列的制作方法流程图。
具体实施方式
为使本发明实施例的目的、技术方案和优点更加清楚，下面将结合本发明实施例的附图，对本发明实施例的技术方案进行清楚、完整地描述。显然，所描述的实施例是发明的一部分实施例，而不是全部的实施例。基于所描述的发明的实施例，本领域普通技术人员在无需创造性劳动的前提下所获得的所有其它实施例，都属于发明保护的范围。
除非另作定义，此处使用的技术术语或者科学术语应当为发明所属领域内具有一般技能的人士所理解的通常意义。发明专利申请说明书以及权利要求书中使用的“第一”、“第二”以及类似的词语并不表示任何顺序、数量或者重要性，而只是用来区分不同的组成部分。“包括”或者“包含”等类似的词语意指出现该词前面的元件或者物件涵盖出现在该词后面列举的元件或者物件及 其等同，而不排除其他元件或者物件。“连接”或者“相连”等类似的词语并非限定于物理的或者机械的连接，而是可以包括电性的连接，不管是直接的还是间接的。
在研究中，本申请的发明人注意到：在现阶段天线系统中，天线和惯性导航系统是两个独立存在的模块，需要分别进行设计、制造和封装，然后再进行集成，因此该天线系统的体积较大，无法满足各种电子产品轻薄化、小型化的需求。
另外，这些天线系统中的惯性导航系统属于平台式惯性导航系统，需要建立惯性坐标系，并且需要针对地球自转、重力加速度等因素影响进行后端计算加以补偿。由于，天线和惯性导航系统是两个独立存在的模块，惯性导航系统的位置和运动状态并不能完美地反应天线的位置和运动状态，因此该天线系统的效率和精度仍有提高的空间。
本公开实施例提供一种液晶天线及其制作方法。该液晶天线包括天线阵列，包括相对设置的第一基板和第二基板，并被配置为改变馈入所述液晶天线的电磁波信号的相位，发射或接收预设方向的波束；至少一个惯性导航单元，被配置为确定所述液晶天线在导航坐标系中的运动参数，其中，所述惯性导航单元位于所述第二基板面向所述第一基板的一侧，所述天线阵列根据所述惯性导航单元获取的所述运动参数调节所述预设方向。由此，该液晶天线将天线阵列与惯性导航单元集成在一起，从而可实现该液晶天线的轻薄化、小型化，并且还可提高该液晶天线的效率和精度。
本公开一实施例提供一种液晶天线。图1a为本发明一实施例提供的一种液晶天线的平面示意图；图1b为本发明一实施例提供的一种液晶天线的结构示意图。如图1a和1b所示，该液晶天线包括：天线阵列01和至少一个惯性导航单元02。
如图1b所示，天线阵列01包括相对设置的第一基板011和第二基板012；天线阵列01用于改变馈入液晶天线的电磁波信号的相位，发射或接收预设方向的波束。例如，上述的预设方向为交互目标所在的方向。惯性导航单元02位于第二基板012面向第一基板011的一侧。惯性导航单元02可确定液晶天线在导航坐标系中的运动参数，惯性导航单元02与天线阵列01相通信，天线阵列01根据惯性导航单元02获取的运动参数调节预设方向。
在本公开实施例提供的液晶天线中，由于惯性导航单元位于第二基板面向 第一基板的一侧，惯性导航单元与天线阵列较好地集成为一体。惯性导航系统的位置和运动状态可完美地反应天线的位置和运动状态。由此，当采用该液晶天线的载具运动时，由于惯性导航单元可确定液晶天线在导航坐标系中的运动参数，惯性导航单元与天线阵列相通信，可通过惯性导航系统提供的天线阵列实际的运动参数和交互目标的状态信息，通过对天线阵列快速调节预设方向以快速对准交互目标，实现精确对准，从而可提高该液晶天线的精度和效率。并且由于液晶的偏转可进行连续调节，可实现天线方向图的连续变化，从而可实现全角度电控扫描，实现对交互目标的快速跟踪。另外，由于惯性导航单元是无源的，不受天线阵列的天线信号的干扰，同时也不会影响液晶天线的信号收发、滤波作用和波束控制等性能。
例如，在一些示例中，如图1a所示，惯性导航单元02位于包围天线阵列01的周边区域内。
例如，在一些示例中，如图1b所示，该液晶天线还包括：种子层021，位于,第二基板012与惯性导航单元02之间。种子层021可以为后续的惯性导航单元02的金属层生长工艺提供良好的粘附和导电的基片环境，提高基板与金属布线膜层的结合力。
例如，在本发明实施例提供的上述液晶天线中，如图1b所示，天线阵列01可以包括：位于第二基板012与第一基板011之间，且沿第一基板011指向第二基板012的方向依次为第一电极013、第一配向层014、液晶层015、第二配向层017、第二电极018，以及位于第一基板011背离第二基板012的一侧或第二基板012背离第一基板011的一侧的呈矩阵排列的多个贴片单元019(图1b以贴片单元位于第一基板为例)。
例如，在一些示例中，该液晶天线还包括：隔垫物016，隔垫物016支撑于第一配向层014与第二配向层017之间。
图2为根据本公开一实施例提供的一种液晶天线的工作原理示意图。如图2所示，通过施加不同电压信号控制液晶的偏转状态，使馈波形成一定相位差，当馈电网络中的电磁波信号通过调节后的液晶层后，从贴片单元向外辐射时，电磁波将在外空间相互耦合，在预设方向形成主波束，完成电磁信号的发射。反之，馈波信号从贴片单元馈入，通过施加不同电压控制液晶的偏转状态，外部电磁波信号通过调节后的液晶盒后，保证在预设方向对信号进行全面接收，最后传输到馈电网络，完成电磁信号的接收。当采用该液晶天线的载具运动时， 由于惯性导航单元可确定液晶天线在导航坐标系中的运动参数，惯性导航单元与天线阵列相通信，可通过惯性导航系统提供的天线阵列实际的运动参数和交互目标的状态信息，可通过改变施加的电压信号来快速调节预设方向以快速对准交互目标，实现精确对准，从而可提高该液晶天线的精度和效率。并且由于液晶的偏转可进行连续调节，可实现天线方向图的连续变化，从而可实现全角度电控扫描，实现对交互目标的快速跟踪。另外，由于惯性导航单元是无源的，不受天线阵列的天线信号的干扰，同时也不会影响液晶天线的信号收发、滤波作用和波束控制等性能。
例如，在一些示例中，贴片单元、第一电极和第二电极的材料为高电导率金属材料。例如，本发明实施例提供的上述液晶天线中，上、下电极(对应第一电极和第二电极)和贴片单元为金属结构，选用高电导率的金属层，如金、铝、铜等等，使用溅射、蒸镀或电镀等半导体工艺实现金属结构，即采用现有的半导体制作工艺即可制作。
例如，在一些示例中，贴片单元的形状可以为矩形、圆形或者其他满足设计需求的形状，在此不做限定。
例如，在一些示例中，如图1b所示，惯性导航单元021包括至少一个加速度计03，加速度计03可检测液晶天线在三维方向的平移运动的加速度，确定天线的平移运动参数。例如，加速度计可测量天线平移运动状态，检测三个方向的平移运动的加速度，并对时间积分得到速度和距离，实现对液晶天线本身的姿态、位置、速度等参数的测量，给出液晶天线运动状态参数。
例如，加速度计可以为压电式加速度计、压阻式加速度计、电容式加速度计、谐振式加速度计或隧道式加速度计中的任意一种或多种。
例如，在一些示例中，如图1b所示，惯性导航单元02还包括至少一个陀螺仪04，陀螺仪04可测量液晶天线在三维方向的转动运动参数。陀螺仪用来测量天线的三个方向的转动运动，如姿态角(俯仰角、横滚角和航向角)、角位移或角位置等姿态参数，用来形成一个导航坐标系，使加速度计的测量轴稳定在该坐标系中，并给出航向和姿态角，从而可丰富液晶天线运动状态参数，从而进一步提高该液晶天线的精度。
例如，陀螺仪可以为压电型检测陀螺仪、压阻型检测陀螺仪、电容型检测陀螺仪、光学检测陀螺仪或隧道效应检测陀螺仪中的任意一种或多种。
需要说明的是，加速度计和陀螺仪均可使用半导体工艺制造，与天线阵列 的制造工艺兼容，天线阵列、加速度计和陀螺仪的制造顺序不限，亦可同步制作。
由于通常的加速度计和陀螺仪均需要使用一定的运动空间来实现对各种运动参数的检测。因此，可先通过半导体制作工艺形成层叠结构，层叠结构包括牺牲层和惯性导航单元的多个膜层；然后再至少部分去除所述牺牲层并形成空腔以形成惯性导航单元。上述的空腔即可提供加速度计和陀螺仪所需的运动空间。
图3a为本发明一实施例提供的一种惯性导航单元的结构示意图；图3b为本发明一实施例提供的另一种惯性导航单元的结构示意图。如图3a所示，该惯性导航单元包括一个加速度计03，加速度计03的多个膜层030(例如，多个金属膜层)和牺牲层022层叠在种子层021上；牺牲层022可用于形成微机械结构的空腔或可活动的传感器结构，牺牲层022只起分离层作用，在形成其上的膜层之后，可通过释放工艺去除，以形成空腔024，从而形成导航单元02的立体结构。需要说明的是，当牺牲层022被去除时，加速度计03所在位置处的牺牲层022变为空腔024。
例如，牺牲层形成在多个膜层之间，当牺牲层被去除之后就可以形成空腔。
例如，在一些示例中，如图3b所示，该惯性导航单元包括一个加速度计03和一个陀螺仪04，陀螺仪04与加速度计03的结构相似。加速度计04的多个膜层(例如，多个金属膜层)也可和牺牲层022层叠在种子层021上；牺牲层022可用于形成微机械结构的空腔或可活动的传感器结构，牺牲层022只起分离层作用，在形成其上的膜层之后，可通过释放工艺去除，以形成空腔025，从而形成导航单元02的立体结构。需要说明的是，当牺牲层022被去除时，陀螺仪04所在位置处的牺牲层022变为空腔025。
例如，在一些示例中，如图4a-图4c所示，天线阵列01的形状可以为如图4b所示的圆形阵列、如图4c所示的方形阵列或如图4a所示的八边形阵列中的任意一种，而惯性导航单元则位于包围天线阵列的周边区域(对应图4a-图4c中阴影区域n)内，例如，将惯性导航单元集成在天线阵列的四周或四个角落，可以集成一套惯性导航单元，也可以集成多套惯性导航单元，多套惯性导航单元协同导航其导航精度更高，并且惯性导航单元是无源的，不受天线信号干扰，同时也不会影响天线阵列的信号收发、滤波作用和波束控制等性能。
基于同一发明构思，本发明一实施例提供了一种上述液晶天线的制作方 法，如图5所示，该制作方法包括：
S101：采用半导体制作工艺形成天线阵列。天线阵列包括相对设置的第一基板和第二基板。
S102：在第二基板面向第一基板的一侧采用半导体制作工艺和牺牲层工艺形成惯性导航单元。
本发明实施例提供的上述制作方法中，采用半导体制作工艺形成天线阵列和惯性导航单元，有利于提高天线系统的集成化，二者制作工艺相同，有利于实现液晶天线的集成制造。需要说明的是，上述的半导体制作工艺包括沉积、涂布、溅射、图案化、印刷等半导体制作工艺。上述的图案化工艺可包括曝光、显影、刻蚀等工艺。
例如，在一些示例中，在第二基板面向第一基板的一侧采用半导体制作工艺和牺牲层工艺形成惯性导航单元包括：在第二基板面向第一基板的一侧采用半导体制作工艺形成层叠结构，所述层叠结构包括牺牲层和惯性导航单元的多个膜层；以及去除牺牲层并形成空腔以形成惯性导航单元。由此，可通过形成牺牲层来利用半导体制作工艺形成需要运动空间的惯性导航单元。
本发明实施例提供的上述制作方法中，为了实现惯性导航单元的立体结构需要增加牺牲层，该膜层用于形成微机械结构的空腔或可活动的传感器结构，由于此膜层只起分离层作用，形成上层结构后可以通过释放工艺被去掉，即在制作惯性导航单元的过程中先形成各种膜层结构，其中包括在适当的位置形成牺牲层，再用化学刻蚀剂腐蚀或干法刻蚀等工艺将此牺牲层薄膜去掉，但不损伤其他膜层结构，然后得到惯性导航单元的立体结构。
例如，在一些示例中，去除牺牲层并形成空腔以形成惯性导航单元包括：采用湿刻工艺刻蚀牺牲层以形成空腔。
例如，在一些示例中，该制作方法还包括：在第二基板与惯性导航单元之间形成种子层。
本发明实施例提供的上述制作方法中，为了将惯性导航单元的各功能膜层制作于玻璃基板上，需要沉积一层种子层，该种子层为后续的金属层生长工艺可以提供良好的粘附和导电的基片环境，提高基板与金属布线膜层的结合力，即可以预先在基板上生长种子层后，再生长惯性导航单元的主体金属膜层结构。
例如，在本公开一实施例提供的液晶天线的制作方法中，牺牲层的材料包 括氮化硅、氧化硅和氮氧化硅中的一种或多种。
例如，在一些示例中，如图6所示，步骤S101可以包括：
S201：在第一基板面向第二基板的一面形成第一电极；
S202：在形成的第一电极之上涂覆第一配向层；
S203：在第二基板面向第一基板的一面形成第二电极；
S204：在形成的第二电极之上涂覆第二配向层；
S205：在第一基板背离第二基板的一面形成贴片单元；
S206：对第二基板涂覆带有隔垫物的封接胶并滴注液晶；
S207：将第一基板与第二基板进行对盒。
例如，本发明实施例提供的上述制作方法中，天线阵列的液晶盒部分(上第二基板、取向层和液晶)与现有的液晶显示面板的制造工艺相似，将液晶显示面板的产线稍加改造即可进行生产制造。
显然，本领域的技术人员可以对本发明进行各种改动和变型而不脱离本发明的精神和范围。这样，倘若本发明的这些修改和变型属于本发明权利要求及其等同技术的范围之内，则本发明也意图包含这些改动和变型在内。

Claims (16)

  1. 一种液晶天线，其中包括：
    天线阵列，包括相对设置的第一基板和第二基板，并被配置为改变馈入所述液晶天线的电磁波信号的相位，发射或接收预设方向的波束；以及
    至少一个惯性导航单元，被配置为确定所述液晶天线在导航坐标系中的运动参数，
    其中，所述惯性导航单元位于所述第二基板面向所述第一基板的一侧，所述天线阵列被配置为根据所述惯性导航单元获取的所述运动参数调节所述预设方向。
  2. 如权利要求1所述的液晶天线，还包括：
    种子层，位于所述第二基板与所述惯性导航单元之间。
  3. 如权利要求1所述的液晶天线，其中，所述惯性导航单元包括：至少一个加速度计，所述加速度计被配置为检测所述液晶天线在三维方向的平移运动的加速度，确定天线的平移运动参数。
  4. 如权利要求3所述的液晶天线，其中，所述惯性导航单元还包括：至少一个陀螺仪，所述陀螺仪被配置为测量所述液晶天线在三维方向的转动运动参数。
  5. 如权利要求1-4中任一项所述的液晶天线，其中，所述惯性导航单元位于包围所述天线阵列的周边区域内。
  6. 如权利要求1-5中任一项所述的液晶天线，其中，所述天线阵列还包括：
    位于所述第二基板与所述第一基板之间，且沿所述第一基板指向所述第二基板的方向依次设置的第一电极、第一配向层、液晶层、第二配向层、第二电极，以及位于所述第一基板背离所述第二基板的一面或者所述第二基板背离所述第一基板的一面的呈矩阵排列的多个贴片单元。
  7. 根据权利要求6所述的液晶天线，其中，所述天线阵列还包括位于所述第一基板和所述第二基板之间的隔垫物，所述隔垫物支撑于所述第一配向层与所述第二配向层之间。
  8. 根据权利要求6所述的液晶天线，其中，所述第一电极包括多个第一子电极，所述第二电极包括多个第二子电极。
  9. 如权利要求6所述的液晶天线，其中，所述贴片单元、所述第一电极和所述第二电极的材料为高电导率金属材料。
  10. 如权利要求1-9中任一项所述的液晶天线，其中，所述贴片单元的形状为矩形。
  11. 如权利要求1-9任一项所述的液晶天线，其中，所述天线阵列的形状为圆形阵列、方形阵列或八边形阵列中的任意一种。
  12. 一种如权利要求1-11任一项所述的液晶天线的制作方法，包括：
    采用半导体制作工艺形成所述天线阵列；
    在所述第二基板面向所述第一基板的一侧采用半导体制作工艺和牺牲层工艺形成所述惯性导航单元。
  13. 根据权利要求12所述的液晶天线的制作方法，其中，在所述第二基板面向所述第一基板的一面采用半导体制作工艺和牺牲层工艺形成所述惯性导航单元包括：
    在所述第二基板面向所述第一基板的一侧采用半导体制作工艺形成层叠结构，所述层叠结构包括牺牲层和所述惯性导航单元的多个膜层，所述牺牲层位于所述多个膜层之间；以及
    去除所述牺牲层并形成空腔以形成所述惯性导航单元。
  14. 根据权利要求13所述的液晶天线的制作方法，其中，去除所述牺牲层并形成空腔以形成所述惯性导航单元包括：
    采用湿刻工艺刻蚀所述牺牲层以形成所述空腔。
  15. 根据权利要求12-14中任一项所述的液晶天线的制作方法，还包括：
    在所述第二基板与所述惯性导航单元之间形成种子层。
  16. 根据权利要求12-14中任一项所述的液晶天线的制作方法，其中，所述牺牲层的材料包括氮化硅、氧化硅和氮氧化硅中的一种或多种。
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112787100A (zh) * 2019-11-04 2021-05-11 群创光电股份有限公司 电磁波调整装置
CN114284707A (zh) * 2020-09-27 2022-04-05 上海天马微电子有限公司 一种液晶天线的制作方法与液晶天线

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106932933B (zh) * 2017-05-09 2019-08-27 京东方科技集团股份有限公司 一种液晶天线及其制作方法
US10705391B2 (en) 2017-08-30 2020-07-07 Wafer Llc Multi-state control of liquid crystals
CN107425279A (zh) * 2017-08-31 2017-12-01 电子科技大学 一种基于液晶超材料的二维龙伯透镜天线
CN107706502A (zh) 2017-09-29 2018-02-16 京东方科技集团股份有限公司 天线单元及其制造方法、液晶天线、通信设备
CN108232383A (zh) * 2018-01-03 2018-06-29 京东方科技集团股份有限公司 高通滤波器、液晶天线单元、以及液晶相控阵天线
CN108461931B (zh) * 2018-03-22 2021-02-05 京东方科技集团股份有限公司 一种建筑用基板
CN108767456B (zh) * 2018-05-07 2020-07-31 电子科技大学 一种可分块控制的方向图可重构液晶天线及重构方法
CN108663854B (zh) * 2018-05-09 2021-08-27 京东方科技集团股份有限公司 显示基板的制备方法及液晶设备的制备方法
CN108615966B (zh) * 2018-05-28 2020-06-30 京东方科技集团股份有限公司 一种天线及其制作方法
CN108803165A (zh) 2018-06-08 2018-11-13 京东方科技集团股份有限公司 一种液晶天线及其驱动方法、通讯设备
CN109462009B (zh) * 2018-11-08 2021-01-26 京东方科技集团股份有限公司 液晶天线基板及其制作方法和液晶天线及其制作方法
CN109830806A (zh) 2019-03-12 2019-05-31 信利半导体有限公司 一种平板液晶天线及其制作方法
CN109818150A (zh) * 2019-03-12 2019-05-28 信利半导体有限公司 一种液晶天线及其制作方法
CN110534881B (zh) * 2019-09-25 2021-01-22 京东方科技集团股份有限公司 液晶天线及其制作方法
CN113690633A (zh) * 2020-05-18 2021-11-23 北京道古视界科技有限公司 一种基于二元全息编码的液晶阵列天线波束合成与控制方法
CN113871818B (zh) * 2020-06-30 2022-07-26 上海天马微电子有限公司 移相器及其制作方法、天线及其制作方法
TWI795151B (zh) * 2021-10-12 2023-03-01 稜研科技股份有限公司 電磁波反射結構
CN114762186A (zh) 2020-11-10 2022-07-15 京东方科技集团股份有限公司 一种天线及其制作方法
TWI749987B (zh) * 2021-01-05 2021-12-11 友達光電股份有限公司 天線結構及陣列天線模組

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150147965A1 (en) * 2010-05-18 2015-05-28 University Of South Carolina Wireless Power Transfer to Embedded Sensors
CN105552535A (zh) * 2016-02-22 2016-05-04 电子科技大学 一种基于液晶材料的频率可重构天线
CN106299627A (zh) * 2016-10-18 2017-01-04 京东方科技集团股份有限公司 一种液晶天线及通信设备
CN106450765A (zh) * 2016-09-08 2017-02-22 电子科技大学 一种毫米波可重构天线
CN206134947U (zh) * 2016-11-04 2017-04-26 中国人民解放军陆军军官学院 毫米波相控阵天线及天线设备
CN106932933A (zh) * 2017-05-09 2017-07-07 京东方科技集团股份有限公司 一种液晶天线及其制作方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5537242A (en) * 1994-02-10 1996-07-16 Hughes Aircraft Company Liquid crystal millimeter wave open transmission lines modulators
JP2003318133A (ja) * 2002-04-22 2003-11-07 Seiko Epson Corp 膜パターンの形成方法、膜パターン形成装置、導電膜配線、半導体チップの実装構造、半導体装置、発光装置、電気光学装置、電子機器、並びに非接触型カード媒体
US7514283B2 (en) * 2003-03-20 2009-04-07 Robert Bosch Gmbh Method of fabricating electromechanical device having a controlled atmosphere
US7226802B2 (en) * 2004-08-06 2007-06-05 Freescale Semiconductor, Inc. Tungsten coated silicon fingers
JP2008089619A (ja) * 2005-03-29 2008-04-17 Sharp Corp 表示装置および電子機器
KR101245991B1 (ko) * 2006-06-23 2013-03-20 엘지디스플레이 주식회사 액정표시장치 및 그 제조 방법
US7808429B2 (en) * 2006-12-21 2010-10-05 The Boeing Company Beam steering control for mobile antennas
EP2768072A1 (en) * 2013-02-15 2014-08-20 Technische Universität Darmstadt Phase shifting device
CN103576399B (zh) * 2013-09-26 2016-06-01 西安空间无线电技术研究所 一种液晶光学相控阵天线实现方法
CN203870250U (zh) * 2014-03-05 2014-10-08 大连中睿科技发展有限公司 一种车载道路灾害病害预警雷达系统
CN105116169B (zh) * 2015-09-24 2018-05-01 京东方科技集团股份有限公司 加速度传感器、显示装置、检测系统和检测方法
GB201522722D0 (en) * 2015-12-23 2016-02-03 Sofant Technologies Ltd Method and steerable antenna apparatus
US10756440B2 (en) * 2016-08-26 2020-08-25 Sharp Kabushiki Kaisha Scanning antenna and method of manufacturing scanning antenna

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150147965A1 (en) * 2010-05-18 2015-05-28 University Of South Carolina Wireless Power Transfer to Embedded Sensors
CN105552535A (zh) * 2016-02-22 2016-05-04 电子科技大学 一种基于液晶材料的频率可重构天线
CN106450765A (zh) * 2016-09-08 2017-02-22 电子科技大学 一种毫米波可重构天线
CN106299627A (zh) * 2016-10-18 2017-01-04 京东方科技集团股份有限公司 一种液晶天线及通信设备
CN206134947U (zh) * 2016-11-04 2017-04-26 中国人民解放军陆军军官学院 毫米波相控阵天线及天线设备
CN106932933A (zh) * 2017-05-09 2017-07-07 京东方科技集团股份有限公司 一种液晶天线及其制作方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112787100A (zh) * 2019-11-04 2021-05-11 群创光电股份有限公司 电磁波调整装置
CN114284707A (zh) * 2020-09-27 2022-04-05 上海天马微电子有限公司 一种液晶天线的制作方法与液晶天线

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