WO2018205087A1 - Heterojunction saturable absorption mirror and preparation method therefor, and pulse fiber laser - Google Patents

Heterojunction saturable absorption mirror and preparation method therefor, and pulse fiber laser Download PDF

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Publication number
WO2018205087A1
WO2018205087A1 PCT/CN2017/083438 CN2017083438W WO2018205087A1 WO 2018205087 A1 WO2018205087 A1 WO 2018205087A1 CN 2017083438 W CN2017083438 W CN 2017083438W WO 2018205087 A1 WO2018205087 A1 WO 2018205087A1
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heterojunction
laser
saturable absorption
absorption mirror
atomic
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PCT/CN2017/083438
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French (fr)
Chinese (zh)
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闫培光
陈浩
邢凤飞
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深圳大学
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Priority to PCT/CN2017/083438 priority Critical patent/WO2018205087A1/en
Publication of WO2018205087A1 publication Critical patent/WO2018205087A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers

Definitions

  • the invention belongs to the field of laser technology, and in particular relates to a heterojunction saturable absorption mirror, a preparation method thereof and a pulsed fiber laser.
  • passive mode-locking technology is an effective way to achieve ultra-fast pulse output of fiber lasers, and the key technology of passive mode-locking is the need for saturable absorption in fiber laser resonators.
  • researchers have used a variety of saturable absorption effects to obtain passive mode-locked ultrafast pulse outputs in fiber lasers.
  • SESAM semiconductor saturable absorption mirrors
  • the technical problem to be solved by the present invention is to provide a heterojunction saturable absorption mirror, a preparation method thereof, and a pulsed fiber laser to solve the problem that the commercial SESAM used in the prior art is expensive, complicated in manufacturing process, and low in reliability. defect.
  • the present invention is achieved by a heterojunction saturable absorption mirror comprising a substrate, a gold film layer overlying the substrate, and an atom overlying the gold film layer Layer two-dimensional material film;
  • the atomic-level two-dimensional material film comprises an atomic-level two-dimensional material slow-saturated absorber heterojunction film, an isolating material and an atomic-level two-dimensional material fast saturable absorber heterojunction film.
  • the atomic level two-dimensional material heterojunction saturable absorption mirror further comprises a package protection layer, the package protection layer covering the atomic layer two-dimensional material film; the package protection layer is hexagonal boron nitride .
  • the gold film layer has a thickness of 30 to 300 nm.
  • the atomic level two-dimensional material slow saturable absorber heterojunction film includes at least one of molybdenum disulfide, molybdenum diselenide, zirconium diselenide, zirconium disulfide, tin disulfide, and tin diselenide.
  • molybdenum disulfide molybdenum diselenide
  • zirconium diselenide zirconium disulfide
  • tin disulfide zirconium disulfide
  • tin diselenide tin diselenide
  • the atomic-level two-dimensional material fast saturable absorber heterojunction film comprises graphene, tungsten disulfide, tungsten diselenide, tungsten disulfide, molybdenum disulfide, antimony disulfide, antimony diselenide At least one of bismuth selenide, bismuth disulfide, and indium selenide.
  • the invention also provides a preparation method of a heterojunction saturable absorption mirror, comprising the following steps:
  • the surface of the gold target is ionized to generate a plasma of gold, and the plasma of the gold is deposited on the substrate by magnetron sputtering deposition to form a gold film layer; by controlling deposition time and/or deposition temperature Bringing the gold film layer to a desired thickness;
  • An atomic-level two-dimensional material is transferred onto the gold film layer to form an atomic-level two-dimensional material film, and a heterojunction saturable absorption mirror is obtained.
  • preparation method further includes:
  • the heterojunction saturable absorption mirror is encapsulated using hexagonal boron nitride to obtain a package protective layer.
  • the present invention also provides a pulsed fiber laser comprising a sequentially connected semiconductor pump laser, an optical wavelength division multiplexer, a gain fiber, an optical coupler, an optical isolator, an optical circulator, and the like
  • the heterojunction saturable absorption mirror, and the optical circulator is connected to the optical wavelength division multiplexer to form an annular cavity structure; wherein the optical isolator is used to isolate the mode-locked laser, and only the lock is allowed a post-mode laser is unidirectionally outputted within the pulsed fiber laser;
  • the pump light generated by the semiconductor pump laser is coupled to the gain fiber through the optical wavelength division multiplexer to generate a laser pulse required for mode locking and amplify the laser pulse;
  • the optical coupler outputs a portion of the amplified laser pulse to the outside of the cavity and another portion to the optical circulator, and the laser pulse entering the optical circulator is coupled into the heterojunction.
  • the saturation absorption mirror performs mode locking, and the mode-locked laser pulse is returned to the optical wavelength division multiplexer via the optical circulator, and then amplified by the gain fiber and then outputted by the optical coupler. laser.
  • the pulsed fiber laser further includes a polarization controller located between the optical isolator and the optical circulator for controlling a polarization state of laser light in the annular cavity.
  • the present invention also provides a pulsed fiber laser comprising a sequentially connected semiconductor pump laser, an optical wavelength division multiplexer, a Bragg grating, a gain fiber, and the heterojunction saturable absorption mirror described above ;
  • the pump light generated by the semiconductor pump laser is coupled by an optical wavelength division multiplexer into a Bragg grating, which is transmitted through the Bragg grating and then enters the gain fiber to generate a laser pulse.
  • the heterojunction saturable absorption mirror locks the laser pulse.
  • the laser pulse after the mode-locking is returned to the gain fiber along the original path for amplification, and the amplified laser pulse is transmitted through the Bragg grating and then output by the optical wavelength division multiplexing laser.
  • the present invention has the beneficial effects that the heterojunction saturable absorption mirror provided by the embodiment of the present invention is alternately superposed by different two-dimensional atomic level materials to form a two-dimensional material heterojunction at the atomic level.
  • this new type of saturable absorption mirror can combine the excellent characteristics of the two-dimensional layered material itself, and realize the regulation of the band gap of the saturated absorbing material by using the heterojunction structure.
  • the specific two-dimensional material alternately superimposed structure can realize The fast and slow saturable absorber cascades to control the nonlinear characteristics (satutable modulation depth, saturated light intensity, etc.) of the saturable absorber.
  • FIG. 1 is a schematic structural view of a heterojunction saturable absorption mirror according to a first embodiment of the present invention
  • FIG. 2 is a schematic structural diagram of a pulsed fiber laser according to a third embodiment of the present invention.
  • FIG. 3 is a schematic structural diagram of a pulsed fiber laser according to a fourth embodiment of the present invention.
  • a first embodiment of the present invention provides a heterojunction saturable absorption mirror 100 comprising a substrate 101, a gold film layer 102 overlying the substrate 101, and an atomic level two-dimensional layer overlying the gold film layer 102.
  • the atomic level two-dimensional material film comprises an atomic level two-dimensional material slow saturable absorber heterojunction film 103, an isolating material 104 and an atomic level two-dimensional material fast saturable absorber heterojunction film 105.
  • the atomic-level two-dimensional material film refers to a two-dimensional material film having a thickness of a single atomic layer, which is alternately superposed by using different two-dimensional atomic level materials.
  • a two-dimensional heterojunction saturable absorption mirror is formed at the atomic level. This new saturable absorption mirror can combine the excellent properties of the two-dimensional layered material itself, and the heterojunction structure can be used to control the band gap of the saturated absorbing material.
  • the specific two-dimensional material alternately superimposed structure can realize the cascade of fast and slow saturable absorbers, and realize the regulation of the nonlinear characteristics (satutable modulation depth, saturated light intensity, etc.) of the saturable absorber.
  • the substrate 101 is silicon or silicon carbide.
  • the spacer material 104 is a single layer or a plurality of layers of hexagonal boron nitride.
  • Hexagonal boron nitride is a wide-bandgap semiconductor material, which is used as an isolation material between an atomic-level two-dimensional material slow-saturated absorber heterojunction film and an atomic-level two-dimensional material fast-saturated absorber heterojunction film. Avoid the interaction of the two materials.
  • the atomic level two-dimensional material heterojunction saturable absorption mirror 100 further includes a package protection layer 106 overlying the atomic level two-dimensional material film; the package protection layer 106 is hexagonal boron nitride.
  • the function of the encapsulation protective layer 106 is to encapsulate the outermost layer of the heterojunction saturable absorption mirror 100 with an atomic layer of hexagonal boron nitride, so that the heterojunction saturable absorption mirror 100 is isolated from the air, thereby preventing it from being trapped in the air. Oxygen oxidation.
  • the gold film layer has a thickness of 30 to 300 nm.
  • the atomic level two-dimensional material film includes graphene and transition metal sulfide.
  • the transition metal sulfide includes tungsten disulfide, tungsten diselenide, molybdenum disulfide, molybdenum diselenide, tungsten dithide, molybdenum dichloride, antimony disulfide, antimony diselenide, zirconium diselenide, and At least one of zirconium sulfide, bismuth selenide, antimony disulfide, tin disulfide, and tin diselenide.
  • the atomic level two-dimensional material slow saturable absorber heterojunction film comprises the atomic level two-dimensional material slow saturable absorber heterojunction film including molybdenum disulfide, molybdenum diselenide, zirconium diselide At least one of zirconium disulfide, tin disulfide, and tin diselenide.
  • the atomic-level two-dimensional material fast saturable absorber heterojunction film includes graphene, tungsten disulfide, tungsten diselenide, tungsten disulfide, molybdenum disulfide, antimony disulfide, antimony diselenide, and selenium. At least one of bismuth oxide, bismuth disulfide, and indium selenide.
  • the constituent structures of the heterojunction saturable absorption mirror provided by the first embodiment of the present invention are simple in material, low in cost, and capable of wide-band modulation of light.
  • a second embodiment of the present invention provides a method for preparing an atomic level two-dimensional material heterojunction saturable absorption mirror, comprising the following steps:
  • S2 ionizing the surface of the gold target to generate a plasma of gold, depositing the plasma of the gold on the substrate by magnetron sputtering deposition to form a gold film layer; by controlling deposition time and/or a deposition temperature to bring the gold film layer to a desired thickness;
  • a method for preparing a heterojunction saturable absorption mirror (satutable absorber) according to a second embodiment of the present invention, first placing a gold target and a substrate in a vacuum chamber, and using a magnetron sputtering deposition method to surface the gold target A plasma is formed after ionization, and the plasma is deposited on the substrate to form a gold film.
  • the thickness of the deposited gold film is controlled by controlling the deposition time and/or the deposition temperature; transferring a single layer (or multiple layers) of the two-dimensional material onto the gold-plated substrate to prepare an atom Hierarchical two-dimensional material heterojunction and fast and slow saturable absorber cascade" saturable absorption mirror.
  • the transfer of the two-dimensional material onto the gold film layer is mainly carried out using an organic high molecular polymer such as polymethyl methacrylate (PMMA).
  • PMMA polymethyl methacrylate
  • the transfer process is as follows: 1) Preparation of two-dimensional materials (including fast absorbers and slow absorbers) of the desired atomic level using chemical vapor deposition on a sapphire/silicon substrate; 2) sapphire/silicon grown with material The surface of the substrate is covered with a suitable thickness of PMMA and placed in a drying oven to cure the PMMA into a film; 3) the substrate coated with the PMMA film is placed in a suitable concentration of NaOH solution to separate the PMMA film from the substrate (this) The atomic-scale two-dimensional material is transferred to the PMMA surface); 4) the PMMA film coated with the material is placed in an acetone solution to dissolve the PMMA; 5) the two-dimensional material of the atomic layer (including the fast absorber and the slow absorber) Transfer to the target substrate; 6) Isolation between the fast
  • the preparation method further includes
  • S4 The heterojunction saturable absorption mirror is encapsulated using hexagonal boron nitride to obtain a package protective layer.
  • the saturable absorber is packaged using a single layer (or multiple layers of hexagonal boron nitride) according to a specific structure alternately transferred.
  • the second embodiment of the present invention prepares a "atomic layer two-dimensional material heterojunction and a fast and slow saturable absorber cascade" saturable absorption with adjustable band gap of the optical band of the saturable absorber by different two-dimensional material alternate structures. Mirror to achieve modulation of visible to mid-infrared light.
  • a third embodiment of the present invention provides a pulsed fiber laser 200 including a sequentially connected semiconductor pump laser 1, an optical wavelength division multiplexer 2, a gain fiber 3, and an optical coupler 4.
  • the optical isolator 5, the optical circulator 7 and the heterojunction saturable absorption mirror 8 described above, and the optical circulator 7 is connected to the optical wavelength division multiplexer 2 to form an annular cavity structure; wherein the optical isolator 5 is used After isolating the mode-locked laser, only the mode-locked laser is allowed to output in one direction in the pulsed fiber laser 200;
  • the pump light generated by the semiconductor pump laser 1 is coupled via the optical wavelength division multiplexer 2 into the gain fiber 3 to generate a laser pulse required for mode locking and amplify the laser pulse;
  • the optical coupler 4 outputs a part of the amplified laser pulse to the outside of the cavity and another part to the optical circulator 7, and the laser pulse entering the optical circulator 7 is coupled to the heterojunction saturable absorption mirror 8 for performing.
  • the mode-locked laser pulse is returned to the optical wavelength division multiplexer 2 via the optical circulator 7, and then subjected to mode-locking amplification by the gain fiber 3, and then the pulsed laser is output through the optical coupler 4.
  • the pulsed fiber laser 200 provided by the third embodiment of the present invention includes the heterojunction saturable absorption mirror described above, and the "atomic level two-dimensional material heterojunction and fast and slow saturable absorber cascade" saturable absorption mirror
  • the working principle is as a high reflection mirror of the pulsed fiber laser 200, when the laser in the pulsed fiber laser 200 is saturated by the "atomic level two-dimensional material heterojunction and fast and slow saturable absorber cascade" saturable absorption mirror When reflected, the laser can be modulated by a "atomic level two-dimensional material heterojunction and a fast and slow saturable absorber cascade" saturable absorption mirror.
  • the atomic-level two-dimensional material fast absorber heterojunction is mainly used to realize the self-starting and pulse compression of the fiber laser
  • the atomic-level two-dimensional material slow absorber heterojunction is mainly used to suppress the noise in the cavity and improve the fiber laser cavity.
  • the "atomic level two-dimensional material heterojunction and fast and slow saturable absorber cascade" saturable absorption mirror has high reliability, strong modulation capability, high environmental compatibility, wide application range, low cost, and broadband for light. Modulation and other advantages, as a mirror of light, can be used as a key device for pulsed laser generation in laser systems.
  • the optical wavelength division multiplexer 2 couples the pump light generated by the semiconductor pump laser 1 into the gain fiber 3; the gain fiber 3 generates laser light required for mode locking and The mode-locking pulse is amplified; the heterojunction saturable absorption mirror 8 molds the laser, and the mode-locked laser is returned to the optical wavelength division multiplexer 2 via the optical circulator 7 and then passed through the gain fiber 3 After amplification, the pulsed laser light is output through the optical coupler 4.
  • the optical circulator 7 couples the laser light generated by the gain fiber 3 into the heterojunction saturable absorption mirror 8 of the "atomic level two-dimensional material heterojunction and fast and slow saturable absorber cascade", heterogeneous
  • the junction saturable absorption mirror 8 molds and reflects the laser light.
  • the mode-locked laser light is returned through the original optical path and amplified by the gain fiber 3; the amplified laser light is output through the optical coupler 4.
  • the pulsed fiber laser 200 further includes a polarization controller 6 connected between the optical isolator 5 and the optical circulator 7; the polarization controller 6 is used to control the polarization of the laser in the annular cavity status.
  • a fourth embodiment of the present invention provides another pulsed fiber laser 300 comprising a sequentially connected semiconductor pump laser 11, an optical wavelength division multiplexer 12, a Bragg grating 13, and a gain fiber 14. And the heterojunction saturable absorption mirror 15 described above; the pump light generated by the semiconductor pump laser 11 is coupled to the Bragg grating 13 via the optical wavelength division multiplexer 12, and then enters the gain fiber 14 to generate laser light, which is heterogeneous.
  • the junction saturable absorption mirror 15 molds the laser, and the mode-locked laser returns along the original path, and the pulsed laser is output via the optical wavelength division multiplexing laser 12.
  • a fourth embodiment of the present invention provides another pulsed fiber laser 300 comprising a sequentially connected semiconductor pump laser 11, an optical wavelength division multiplexer 12, a Bragg grating 13, and a gain fiber 14. And the heterojunction saturable absorption mirror 15 described above;
  • the pump light generated by the semiconductor pump laser 300 is coupled to the Bragg grating 13 via the optical wavelength division multiplexer 12, transmitted through the Bragg grating 13, and then enters the gain fiber 14 to generate a laser pulse, and the heterojunction saturable absorption mirror 15 pairs
  • the laser pulse is subjected to mode locking, and the mode-locked laser pulse is returned to the gain fiber 14 along the original path for amplification, and the amplified laser pulse is transmitted through the Bragg grating 13 and output by the optical wavelength division multiplexing laser 12.

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  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
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Abstract

A heterojunction saturable absorption mirror (100) and a preparation method therefor, and a pulse fiber laser. The heterojunction saturable absorption mirror (100) comprises a substrate (101), a gold film layer (102) covering the substrate (101), and an atomic hierarchical two-dimensional material film covering the gold film layer (102). The atomic hierarchical two-dimensional material film comprises an atomic hierarchical two-dimensional material slow saturable absorber heterojunction thin film (103), an isolation material (104) and an atomic hierarchical two-dimensional material fast saturable absorber heterojunction thin film (105) which are successively arranged. The heterojunction saturable absorption mirror (100) forms an atomic hierarchical two-dimensional heterojunction saturable absorption mirror (100) by means of alternately stacking different two-dimensional atomic hierarchical materials, and in combination with excellent characteristics of a two-dimensional laminated material itself, the regulation and control over the nonlinear characteristic of a saturable absorber is realized.

Description

一种异质结可饱和吸收镜及其制备方法、脉冲光纤激光器Heterojunction saturable absorption mirror and preparation method thereof, pulsed fiber laser 技术领域Technical field
本发明属于激光技术领域,尤其涉及一种 异质结可饱和吸收镜及其制备方法、 脉冲光纤激光器。 The invention belongs to the field of laser technology, and in particular relates to a heterojunction saturable absorption mirror, a preparation method thereof and a pulsed fiber laser.
背景技术Background technique
利用被动锁模技术是光纤激光器实现超快脉冲输出的一种有效途径,而被动锁模的关键技术是光纤激光器谐振腔中需要具备可饱和吸收效应。目前,研究人员已经利用多种可饱和吸收效应在光纤激光器中获得被动锁模超快脉冲输出。一般来说,为了克服光纤激光锁模环境不稳定的缺点,研究人员通常采用半导体可饱和吸收镜(SESAM)来实现光纤激光器锁模超快脉冲输出。The use of passive mode-locking technology is an effective way to achieve ultra-fast pulse output of fiber lasers, and the key technology of passive mode-locking is the need for saturable absorption in fiber laser resonators. At present, researchers have used a variety of saturable absorption effects to obtain passive mode-locked ultrafast pulse outputs in fiber lasers. In general, in order to overcome the shortcomings of fiber laser mode-locking environment instability, researchers often use semiconductor saturable absorption mirrors (SESAM) to achieve fiber laser mode-locked ultra-fast pulse output.
然而,由于商用SESAM价格昂贵、制作工艺复杂、可饱和吸收带宽窄、一般仅支持皮秒级别的脉冲输出,并且损伤阈值也较低,所以也不适用于全方位研究超快光纤激光器的动力学特性。因此,研制出成本低廉、工艺简单、高性能的可饱和吸收体一直是超快激光物理领域追求的目标。However, commercial SESAM is expensive, complicated in fabrication process, narrow in saturation absorption bandwidth, generally supports only picosecond pulse output, and has a low damage threshold, so it is not suitable for omnidirectional research on the dynamics of ultrafast fiber lasers. characteristic. Therefore, the development of a low-cost, simple process, high-performance saturable absorber has always been the goal pursued in the field of ultrafast laser physics.
技术问题technical problem
本发明所要解决的技术问题在于,提供一种异质结可饱和吸收镜及其制备方法、脉冲光纤激光器,以解决现有技术中所采用的商用SESAM价格昂贵、制作工艺复杂、可靠性低的缺陷。The technical problem to be solved by the present invention is to provide a heterojunction saturable absorption mirror, a preparation method thereof, and a pulsed fiber laser to solve the problem that the commercial SESAM used in the prior art is expensive, complicated in manufacturing process, and low in reliability. defect.
技术解决方案Technical solution
本发明是这样实现的,一种异质结可饱和吸收镜,所述异质结可饱和吸收镜包括基底、覆盖在所述基底上的金膜层及覆盖在所述金膜层上的原子层级二维材料薄膜;The present invention is achieved by a heterojunction saturable absorption mirror comprising a substrate, a gold film layer overlying the substrate, and an atom overlying the gold film layer Layer two-dimensional material film;
所述原子层级二维材料薄膜包括依次设置的原子层级二维材料慢可饱和吸收体异质结薄膜、隔离材料及原子层级二维材料快可饱和吸收体异质结薄膜。The atomic-level two-dimensional material film comprises an atomic-level two-dimensional material slow-saturated absorber heterojunction film, an isolating material and an atomic-level two-dimensional material fast saturable absorber heterojunction film.
进一步地,所述原子层级二维材料异质结可饱和吸收镜还包括封装保护层,所述封装保护层覆盖在所述原子层级二维材料薄膜上;所述封装保护层为六角氮化硼。Further, the atomic level two-dimensional material heterojunction saturable absorption mirror further comprises a package protection layer, the package protection layer covering the atomic layer two-dimensional material film; the package protection layer is hexagonal boron nitride .
进一步地,所述金膜层的厚度为30-300 nm。Further, the gold film layer has a thickness of 30 to 300 nm.
进一步地,所述原子层级二维材料慢可饱和吸收体异质结薄膜包括二硫化钼、二硒化钼、二硒化锆、二硫化锆、二硫化锡、二硒化锡中的至少一种。Further, the atomic level two-dimensional material slow saturable absorber heterojunction film includes at least one of molybdenum disulfide, molybdenum diselenide, zirconium diselenide, zirconium disulfide, tin disulfide, and tin diselenide. Kind.
进一步地,所述原子层级二维材料快可饱和吸收体异质结薄膜包括石墨烯,二硫化钨、二硒化钨、二碲化钨、二碲化钼、二硫化铪、二硒化铪、二硒化铼、二硫化铼和硒化铟中的至少一种。Further, the atomic-level two-dimensional material fast saturable absorber heterojunction film comprises graphene, tungsten disulfide, tungsten diselenide, tungsten disulfide, molybdenum disulfide, antimony disulfide, antimony diselenide At least one of bismuth selenide, bismuth disulfide, and indium selenide.
本发明还提供了一种异质结可饱和吸收镜的制备方法,包括以下步骤:The invention also provides a preparation method of a heterojunction saturable absorption mirror, comprising the following steps:
将基底及金靶材置于真空室中;Placing the substrate and the gold target in a vacuum chamber;
将所述金靶材表面电离化以产生金的等离子体,利用磁控溅射沉积法将所述金的等离子体沉积在所述基底上形成金膜层;通过控制沉积时间及/或沉积温度使所述金膜层达到所需厚度;The surface of the gold target is ionized to generate a plasma of gold, and the plasma of the gold is deposited on the substrate by magnetron sputtering deposition to form a gold film layer; by controlling deposition time and/or deposition temperature Bringing the gold film layer to a desired thickness;
将原子层级二维材料转移到所述金膜层上形成原子层级二维材料薄膜,获得异质结可饱和吸收镜。An atomic-level two-dimensional material is transferred onto the gold film layer to form an atomic-level two-dimensional material film, and a heterojunction saturable absorption mirror is obtained.
进一步地,所述制备方法还包括:Further, the preparation method further includes:
使用六角氮化硼对所述异质结可饱和吸收镜进行封装,获得封装保护层。The heterojunction saturable absorption mirror is encapsulated using hexagonal boron nitride to obtain a package protective layer.
本发明还提供了一种脉冲光纤激光器,所述脉冲光纤激光器包括顺次连接的半导体泵浦激光器、光学波分复用器、增益光纤、光学耦合器、光隔离器、光学环形器及上述所述的异质结可饱和吸收镜,且所述光学环形器与所述光学波分复用器连接,形成环形腔结构;其中,所述光隔离器用于隔离锁模后的激光,仅允许锁模后的激光在所述脉冲光纤激光器内单向输出;The present invention also provides a pulsed fiber laser comprising a sequentially connected semiconductor pump laser, an optical wavelength division multiplexer, a gain fiber, an optical coupler, an optical isolator, an optical circulator, and the like The heterojunction saturable absorption mirror, and the optical circulator is connected to the optical wavelength division multiplexer to form an annular cavity structure; wherein the optical isolator is used to isolate the mode-locked laser, and only the lock is allowed a post-mode laser is unidirectionally outputted within the pulsed fiber laser;
所述半导体泵浦激光器产生的泵浦光经所述光学波分复用器耦合后进入所述增益光纤产生锁模所需要的激光脉冲并对所述激光脉冲进行放大;The pump light generated by the semiconductor pump laser is coupled to the gain fiber through the optical wavelength division multiplexer to generate a laser pulse required for mode locking and amplify the laser pulse;
所述光学耦合器将放大后的所述激光脉冲的一部分输出到腔外而将另一部分输出至所述光学环形器,进入所述光学环形器的激光脉冲被耦合后进入所述异质结可饱和吸收镜进行锁模,锁模后的激光脉冲再经所述光学环形器返回至所述光学波分复用器,然后经所述增益光纤锁模放大后再通过所述光学耦合器输出脉冲激光。The optical coupler outputs a portion of the amplified laser pulse to the outside of the cavity and another portion to the optical circulator, and the laser pulse entering the optical circulator is coupled into the heterojunction. The saturation absorption mirror performs mode locking, and the mode-locked laser pulse is returned to the optical wavelength division multiplexer via the optical circulator, and then amplified by the gain fiber and then outputted by the optical coupler. laser.
进一步地,所述脉冲光纤激光器还包括偏振控制器,其位于所述光隔离器与所述光学环形器之间,用于控制所述环形腔内的激光的偏振状态。Further, the pulsed fiber laser further includes a polarization controller located between the optical isolator and the optical circulator for controlling a polarization state of laser light in the annular cavity.
本发明还提供了一种脉冲光纤激光器,所述脉冲光纤激光器包括顺次连接的半导体泵浦激光器、光学波分复用器、布拉格光栅、增益光纤及上述所述的异质结可饱和吸收镜;The present invention also provides a pulsed fiber laser comprising a sequentially connected semiconductor pump laser, an optical wavelength division multiplexer, a Bragg grating, a gain fiber, and the heterojunction saturable absorption mirror described above ;
半导体泵浦激光器产生的泵浦光经光学波分复用器耦合后进入布拉格光栅,经布拉格光栅透射后再进入增益光纤产生激光脉冲,异质结可饱和吸收镜对所述激光脉冲进行锁模,锁模后的激光脉冲沿原路返回至增益光纤进行放大,放大后的激光脉冲再通过布拉格光栅透射后由光学波分复用激光器输出。The pump light generated by the semiconductor pump laser is coupled by an optical wavelength division multiplexer into a Bragg grating, which is transmitted through the Bragg grating and then enters the gain fiber to generate a laser pulse. The heterojunction saturable absorption mirror locks the laser pulse. The laser pulse after the mode-locking is returned to the gain fiber along the original path for amplification, and the amplified laser pulse is transmitted through the Bragg grating and then output by the optical wavelength division multiplexing laser.
有益效果Beneficial effect
本发明与现有技术相比,有益效果在于:本发明实施例提供的异质结可饱和吸收镜,利用不同二维原子层级材料交替叠加,形成原子层级的二维材料异质结可饱和吸收镜,这种新型可饱和吸收镜可结合二维层状材料本身的优异特性,使用异质结结构实现对饱和吸收材料能带带隙的调控;同时,特定的二维材料交替叠加结构能够实现快慢可饱和吸收体级联,实现对可饱和吸收体非线性特性(可饱和调制深度,饱和光强等)的调控。Compared with the prior art, the present invention has the beneficial effects that the heterojunction saturable absorption mirror provided by the embodiment of the present invention is alternately superposed by different two-dimensional atomic level materials to form a two-dimensional material heterojunction at the atomic level. Mirror, this new type of saturable absorption mirror can combine the excellent characteristics of the two-dimensional layered material itself, and realize the regulation of the band gap of the saturated absorbing material by using the heterojunction structure. At the same time, the specific two-dimensional material alternately superimposed structure can realize The fast and slow saturable absorber cascades to control the nonlinear characteristics (satutable modulation depth, saturated light intensity, etc.) of the saturable absorber.
附图说明DRAWINGS
图1是本发明第一实施例提供的异质结可饱和吸收镜的结构示意图;1 is a schematic structural view of a heterojunction saturable absorption mirror according to a first embodiment of the present invention;
图2是本发明第三实施例提供的脉冲光纤激光器的结构示意图;2 is a schematic structural diagram of a pulsed fiber laser according to a third embodiment of the present invention;
图3是本发明第四实施例提供的脉冲光纤激光器的结构示意图。FIG. 3 is a schematic structural diagram of a pulsed fiber laser according to a fourth embodiment of the present invention.
本发明的实施方式Embodiments of the invention
为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It is understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
参见图1,本发明第一实施例提供了一种异质结可饱和吸收镜100,包括基底101、覆盖在基底101上的金膜层102及覆盖在金膜层102上的原子层级二维材料薄膜;Referring to FIG. 1, a first embodiment of the present invention provides a heterojunction saturable absorption mirror 100 comprising a substrate 101, a gold film layer 102 overlying the substrate 101, and an atomic level two-dimensional layer overlying the gold film layer 102. Material film
所述原子层级二维材料薄膜包括依次设置的原子层级二维材料慢可饱和吸收体异质结薄膜103、隔离材料104及原子层级二维材料快可饱和吸收体异质结薄膜105。The atomic level two-dimensional material film comprises an atomic level two-dimensional material slow saturable absorber heterojunction film 103, an isolating material 104 and an atomic level two-dimensional material fast saturable absorber heterojunction film 105.
本发明第一实施例提供的异质结可饱和吸收镜100中,所述原子层级二维材料薄膜是指厚度为单个原子层的二维材料薄膜,通过利用不同二维原子层级材料交替叠加,形成原子层级的二维材料异质结可饱和吸收镜,这种新型可饱和吸收镜可结合二维层状材料本身的优异特性,使用异质结结构实现对饱和吸收材料能带带隙的调控;同时,特定的二维材料交替叠加结构能够实现快慢可饱和吸收体级联,实现对可饱和吸收体非线性特性(可饱和调制深度,饱和光强等)的调控。In the heterojunction saturable absorption mirror 100 provided by the first embodiment of the present invention, the atomic-level two-dimensional material film refers to a two-dimensional material film having a thickness of a single atomic layer, which is alternately superposed by using different two-dimensional atomic level materials. A two-dimensional heterojunction saturable absorption mirror is formed at the atomic level. This new saturable absorption mirror can combine the excellent properties of the two-dimensional layered material itself, and the heterojunction structure can be used to control the band gap of the saturated absorbing material. At the same time, the specific two-dimensional material alternately superimposed structure can realize the cascade of fast and slow saturable absorbers, and realize the regulation of the nonlinear characteristics (satutable modulation depth, saturated light intensity, etc.) of the saturable absorber.
具体地,基底101为硅或碳化硅。隔离材料104为单层或多层六角氮化硼。六角氮化硼是宽带隙的半导体材料,将其作为隔离材料置于原子层级二维材料慢可饱和吸收体异质结薄膜和原子层级二维材料快可饱和吸收体异质结薄膜之间,避免两种材料相互影响。Specifically, the substrate 101 is silicon or silicon carbide. The spacer material 104 is a single layer or a plurality of layers of hexagonal boron nitride. Hexagonal boron nitride is a wide-bandgap semiconductor material, which is used as an isolation material between an atomic-level two-dimensional material slow-saturated absorber heterojunction film and an atomic-level two-dimensional material fast-saturated absorber heterojunction film. Avoid the interaction of the two materials.
具体地,原子层级二维材料异质结可饱和吸收镜100还包括封装保护层106,封装保护层106覆盖在所述原子层级二维材料薄膜上;封装保护层106为六角氮化硼。封装保护层106的作用是使用原子层的六角氮化硼对异质结可饱和吸收镜100的最外层进行封装,使异质结可饱和吸收镜100与空气隔离,从而避免其被空气中的氧气氧化。Specifically, the atomic level two-dimensional material heterojunction saturable absorption mirror 100 further includes a package protection layer 106 overlying the atomic level two-dimensional material film; the package protection layer 106 is hexagonal boron nitride. The function of the encapsulation protective layer 106 is to encapsulate the outermost layer of the heterojunction saturable absorption mirror 100 with an atomic layer of hexagonal boron nitride, so that the heterojunction saturable absorption mirror 100 is isolated from the air, thereby preventing it from being trapped in the air. Oxygen oxidation.
具体地,所述金膜层的厚度为30-300 nm。Specifically, the gold film layer has a thickness of 30 to 300 nm.
具体地,所述原子层级二维材料薄膜包括石墨烯和过渡金属硫化物。所述过渡金属硫化物包括二硫化钨、二硒化钨、二硫化钼、二硒化钼、二碲化钨、二碲化钼、二硫化铪、二硒化铪、二硒化锆、二硫化锆、二硒化铼、二硫化铼、二硫化锡及二硒化锡中的至少一种。Specifically, the atomic level two-dimensional material film includes graphene and transition metal sulfide. The transition metal sulfide includes tungsten disulfide, tungsten diselenide, molybdenum disulfide, molybdenum diselenide, tungsten dithide, molybdenum dichloride, antimony disulfide, antimony diselenide, zirconium diselenide, and At least one of zirconium sulfide, bismuth selenide, antimony disulfide, tin disulfide, and tin diselenide.
具体地,所述原子层级二维材料慢可饱和吸收体异质结薄膜包括所述原子层级二维材料慢可饱和吸收体异质结薄膜包括二硫化钼、二硒化钼、二硒化锆、二硫化锆、二硫化锡、二硒化锡中的至少一种。所述原子层级二维材料快可饱和吸收体异质结薄膜包括石墨烯,二硫化钨、二硒化钨、二碲化钨、二碲化钼、二硫化铪、二硒化铪、二硒化铼、二硫化铼和硒化铟中的至少一种。Specifically, the atomic level two-dimensional material slow saturable absorber heterojunction film comprises the atomic level two-dimensional material slow saturable absorber heterojunction film including molybdenum disulfide, molybdenum diselenide, zirconium diselide At least one of zirconium disulfide, tin disulfide, and tin diselenide. The atomic-level two-dimensional material fast saturable absorber heterojunction film includes graphene, tungsten disulfide, tungsten diselenide, tungsten disulfide, molybdenum disulfide, antimony disulfide, antimony diselenide, and selenium. At least one of bismuth oxide, bismuth disulfide, and indium selenide.
本发明第一实施例提供的异质结可饱和吸收镜的各组成结构所用材料简单,成本低廉,可对光进行宽带调制。The constituent structures of the heterojunction saturable absorption mirror provided by the first embodiment of the present invention are simple in material, low in cost, and capable of wide-band modulation of light.
本发明第二实施例提供了一种原子层级二维材料异质结可饱和吸收镜的制备方法,包括以下步骤:A second embodiment of the present invention provides a method for preparing an atomic level two-dimensional material heterojunction saturable absorption mirror, comprising the following steps:
S1:将基底及金靶材置于真空室中;S1: placing the substrate and the gold target in a vacuum chamber;
S2:将所述金靶材表面电离化以产生金的等离子体,利用磁控溅射沉积法将所述金的等离子体沉积在所述基底上形成金膜层;通过控制沉积时间及/或沉积温度使所述金膜层达到所需厚度;S2: ionizing the surface of the gold target to generate a plasma of gold, depositing the plasma of the gold on the substrate by magnetron sputtering deposition to form a gold film layer; by controlling deposition time and/or a deposition temperature to bring the gold film layer to a desired thickness;
S3:将原子层级二维材料转移到所述金膜层上形成原子层级二维材料薄膜,获得异质结可饱和吸收镜。S3: transferring an atomic-level two-dimensional material onto the gold film layer to form an atomic-level two-dimensional material film, and obtaining a heterojunction saturable absorption mirror.
本发明第二实施例提供的异质结可饱和吸收镜(可饱和吸收体)的制备方法,先将金靶材及基底置于真空室中,采用磁控溅射沉积法将金靶材表面电离后形成等离子体,并使所述等离子体沉积到基底上,形成金膜。在沉积过程中,通过控制沉积时间及/或沉积温度控制沉积的金膜的厚度;将单层(或多层)的二维材料转移到所述的镀有金膜的基底上制备得到“原子层级二维材料异质结及快慢可饱和吸收体级联”可饱和吸收镜。A method for preparing a heterojunction saturable absorption mirror (satutable absorber) according to a second embodiment of the present invention, first placing a gold target and a substrate in a vacuum chamber, and using a magnetron sputtering deposition method to surface the gold target A plasma is formed after ionization, and the plasma is deposited on the substrate to form a gold film. In the deposition process, the thickness of the deposited gold film is controlled by controlling the deposition time and/or the deposition temperature; transferring a single layer (or multiple layers) of the two-dimensional material onto the gold-plated substrate to prepare an atom Hierarchical two-dimensional material heterojunction and fast and slow saturable absorber cascade" saturable absorption mirror.
具体地,所述将二维材料转移到所述金膜层上,主要是使用有机高分子聚合物(如聚甲基丙烯酸甲酯,PMMA)进行。所述转移的过程如下:1)在蓝宝石/硅基底上使用化学气相沉积法制备所需原子层级的二维材料(包括快吸收体和慢吸收体);2)在生长有材料的蓝宝石/硅等基底表面覆盖一层合适厚度的PMMA并置入烘干箱内使PMMA固化成膜;3)将表面覆有PMMA薄膜的基底置于合适浓度的NaOH溶液中,使PMMA薄膜与基底脱离(此时原子级的二维材料转移到了PMMA表面);4)将表面覆有材料的PMMA薄膜置于丙酮溶液中溶解PMMA;5)将原子层的二维材料(包括快吸收体和慢吸收体)转移到目标基底;6)快慢吸收体之间使用原子级六角氮化硼进行隔离。Specifically, the transfer of the two-dimensional material onto the gold film layer is mainly carried out using an organic high molecular polymer such as polymethyl methacrylate (PMMA). The transfer process is as follows: 1) Preparation of two-dimensional materials (including fast absorbers and slow absorbers) of the desired atomic level using chemical vapor deposition on a sapphire/silicon substrate; 2) sapphire/silicon grown with material The surface of the substrate is covered with a suitable thickness of PMMA and placed in a drying oven to cure the PMMA into a film; 3) the substrate coated with the PMMA film is placed in a suitable concentration of NaOH solution to separate the PMMA film from the substrate (this) The atomic-scale two-dimensional material is transferred to the PMMA surface); 4) the PMMA film coated with the material is placed in an acetone solution to dissolve the PMMA; 5) the two-dimensional material of the atomic layer (including the fast absorber and the slow absorber) Transfer to the target substrate; 6) Isolation between the fast and slow absorbers using atomic-grade hexagonal boron nitride.
具体地,所述制备方法还包括Specifically, the preparation method further includes
S4:使用六角氮化硼对所述异质结可饱和吸收镜进行封装,获得封装保护层。S4: The heterojunction saturable absorption mirror is encapsulated using hexagonal boron nitride to obtain a package protective layer.
具体地,根据特定的结构交替转移,可饱和吸收体使用单层(或多层)的六角氮化硼进行封装。Specifically, the saturable absorber is packaged using a single layer (or multiple layers of hexagonal boron nitride) according to a specific structure alternately transferred.
本发明第二实施例通过不同的二维材料交替结构,制备出可饱和吸收体光学能带带隙可调控的“原子层级二维材料异质结及快慢可饱和吸收体级联”可饱和吸收镜,从而实现对可见光到中红外光的调制。The second embodiment of the present invention prepares a "atomic layer two-dimensional material heterojunction and a fast and slow saturable absorber cascade" saturable absorption with adjustable band gap of the optical band of the saturable absorber by different two-dimensional material alternate structures. Mirror to achieve modulation of visible to mid-infrared light.
参见图2,本发明实施例第三提供了一种脉冲光纤激光器,脉冲光纤激光器200包括顺次连接的半导体泵浦激光器1、光学波分复用器2、增益光纤3、光学耦合器4、光隔离器5、光学环形器7及上述所述的异质结可饱和吸收镜8,且光学环形器7与光学波分复用器2连接,形成环形腔结构;其中,光隔离器5用于隔离锁模后的激光,仅允许锁模后的激光在脉冲光纤激光器200内单向输出;Referring to FIG. 2, a third embodiment of the present invention provides a pulsed fiber laser 200 including a sequentially connected semiconductor pump laser 1, an optical wavelength division multiplexer 2, a gain fiber 3, and an optical coupler 4. The optical isolator 5, the optical circulator 7 and the heterojunction saturable absorption mirror 8 described above, and the optical circulator 7 is connected to the optical wavelength division multiplexer 2 to form an annular cavity structure; wherein the optical isolator 5 is used After isolating the mode-locked laser, only the mode-locked laser is allowed to output in one direction in the pulsed fiber laser 200;
半导体泵浦激光器1产生的泵浦光经光学波分复用器2耦合后进入增益光纤3产生锁模所需要的激光脉冲并对所述激光脉冲进行放大;The pump light generated by the semiconductor pump laser 1 is coupled via the optical wavelength division multiplexer 2 into the gain fiber 3 to generate a laser pulse required for mode locking and amplify the laser pulse;
光学耦合器4将放大后的所述激光脉冲的一部分输出到腔外而将另一部分输出至光学环形器7,进入光学环形器7的激光脉冲被耦合后进入异质结可饱和吸收镜8进行锁模,锁模后的激光脉冲再经光学环形器7返回至光学波分复用器2,然后经增益光纤3锁模放大后再通过光学耦合器4输出脉冲激光。The optical coupler 4 outputs a part of the amplified laser pulse to the outside of the cavity and another part to the optical circulator 7, and the laser pulse entering the optical circulator 7 is coupled to the heterojunction saturable absorption mirror 8 for performing. After the mode-locking, the mode-locked laser pulse is returned to the optical wavelength division multiplexer 2 via the optical circulator 7, and then subjected to mode-locking amplification by the gain fiber 3, and then the pulsed laser is output through the optical coupler 4.
本发明第三实施例提供的脉冲光纤激光器200中包括上述所述的异质结可饱和吸收镜,这种“原子层级二维材料异质结及快慢可饱和吸收体级联”可饱和吸收镜的工作原理是,将其作为脉冲光纤激光器200的一个高反射镜,当脉冲光纤激光器200中的激光被该“原子层级二维材料异质结及快慢可饱和吸收体级联”可饱和吸收镜反射时,激光可被“原子层级二维材料异质结及快慢可饱和吸收体级联”可饱和吸收镜调制。具体地,原子层级二维材料快吸收体异质结主要用于实现光纤激光器自启动和脉冲压缩,原子层级二维材料慢吸收体异质结主要用于抑制腔内的噪声,提高光纤激光器腔内的脉冲稳定性。这种“原子层级二维材料异质结及快慢可饱和吸收体级联”可饱和吸收镜具有可靠性高,调制能力强,环境兼容性高,应用范围广,成本低廉,可对光进行宽带调制等优点,同时作为光的反射镜,可用于激光系统中脉冲激光产生的关键器件。The pulsed fiber laser 200 provided by the third embodiment of the present invention includes the heterojunction saturable absorption mirror described above, and the "atomic level two-dimensional material heterojunction and fast and slow saturable absorber cascade" saturable absorption mirror The working principle is as a high reflection mirror of the pulsed fiber laser 200, when the laser in the pulsed fiber laser 200 is saturated by the "atomic level two-dimensional material heterojunction and fast and slow saturable absorber cascade" saturable absorption mirror When reflected, the laser can be modulated by a "atomic level two-dimensional material heterojunction and a fast and slow saturable absorber cascade" saturable absorption mirror. Specifically, the atomic-level two-dimensional material fast absorber heterojunction is mainly used to realize the self-starting and pulse compression of the fiber laser, and the atomic-level two-dimensional material slow absorber heterojunction is mainly used to suppress the noise in the cavity and improve the fiber laser cavity. Impulse stability within. The "atomic level two-dimensional material heterojunction and fast and slow saturable absorber cascade" saturable absorption mirror has high reliability, strong modulation capability, high environmental compatibility, wide application range, low cost, and broadband for light. Modulation and other advantages, as a mirror of light, can be used as a key device for pulsed laser generation in laser systems.
在本发明第三实施例提供的脉冲光纤激光器200中,光学波分复用器2将半导体泵浦激光器1产生的泵浦光耦合进入增益光纤3;增益光纤3产生锁模所需要的激光并对锁模脉冲进行放大;异质结可饱和吸收镜8对所述激光进行锁模,锁模后的激光再经光学环形器7返回至光学波分复用器2,然后经增益光纤3的放大后通过光学耦合器4输出脉冲激光。In the pulsed fiber laser 200 provided by the third embodiment of the present invention, the optical wavelength division multiplexer 2 couples the pump light generated by the semiconductor pump laser 1 into the gain fiber 3; the gain fiber 3 generates laser light required for mode locking and The mode-locking pulse is amplified; the heterojunction saturable absorption mirror 8 molds the laser, and the mode-locked laser is returned to the optical wavelength division multiplexer 2 via the optical circulator 7 and then passed through the gain fiber 3 After amplification, the pulsed laser light is output through the optical coupler 4.
具体地,光学环形器7将增益光纤3产生的激光进行耦合后进入所述“原子层级二维材料异质结及快慢可饱和吸收体级联”的异质结可饱和吸收镜8,异质结可饱和吸收镜8对所述激光进行锁模并反射。经过异质结可饱和吸收镜8的反射,锁模后的激光经原光路返回并经过增益光纤3进行放大;经放大后的激光通过所述光学耦合器4输出。Specifically, the optical circulator 7 couples the laser light generated by the gain fiber 3 into the heterojunction saturable absorption mirror 8 of the "atomic level two-dimensional material heterojunction and fast and slow saturable absorber cascade", heterogeneous The junction saturable absorption mirror 8 molds and reflects the laser light. After the reflection of the heterojunction saturable absorption mirror 8, the mode-locked laser light is returned through the original optical path and amplified by the gain fiber 3; the amplified laser light is output through the optical coupler 4.
具体地,所述脉冲光纤激光器200还包括偏振控制器6,偏振控制器6连接于光隔离器5与光学环形器7之间;偏振控制器6用于控制所述环形腔内的激光的偏振状态。Specifically, the pulsed fiber laser 200 further includes a polarization controller 6 connected between the optical isolator 5 and the optical circulator 7; the polarization controller 6 is used to control the polarization of the laser in the annular cavity status.
参见图3,本发明第四实施例提供了另一种脉冲光纤激光器300,脉冲光纤激光器300包括顺次连接的半导体泵浦激光器11、光学波分复用器12、布拉格光栅13、增益光纤14及上述所述的异质结可饱和吸收镜15;半导体泵浦激光器11产生的泵浦光经光学波分复用器12耦合后进入布拉格光栅13后,再进入增益光纤14产生激光,异质结可饱和吸收镜15对所述激光进行锁模,锁模后的激光沿原路返回,经光学波分复用激光器12输出脉冲激光。Referring to FIG. 3, a fourth embodiment of the present invention provides another pulsed fiber laser 300 comprising a sequentially connected semiconductor pump laser 11, an optical wavelength division multiplexer 12, a Bragg grating 13, and a gain fiber 14. And the heterojunction saturable absorption mirror 15 described above; the pump light generated by the semiconductor pump laser 11 is coupled to the Bragg grating 13 via the optical wavelength division multiplexer 12, and then enters the gain fiber 14 to generate laser light, which is heterogeneous. The junction saturable absorption mirror 15 molds the laser, and the mode-locked laser returns along the original path, and the pulsed laser is output via the optical wavelength division multiplexing laser 12.
参见图3,本发明第四实施例提供了另一种脉冲光纤激光器300,脉冲光纤激光器300包括顺次连接的半导体泵浦激光器11、光学波分复用器12、布拉格光栅13、增益光纤14及上述所述的异质结可饱和吸收镜15;Referring to FIG. 3, a fourth embodiment of the present invention provides another pulsed fiber laser 300 comprising a sequentially connected semiconductor pump laser 11, an optical wavelength division multiplexer 12, a Bragg grating 13, and a gain fiber 14. And the heterojunction saturable absorption mirror 15 described above;
半导体泵浦激光器300产生的泵浦光经光学波分复用器12耦合后进入布拉格光栅13,经布拉格光栅13透射后再进入增益光纤14产生激光脉冲,异质结可饱和吸收镜15对所述激光脉冲进行锁模,锁模后的激光脉冲沿原路返回至增益光纤14进行放大,放大后的激光脉冲再通过布拉格光栅13透射后由光学波分复用激光器12输出。The pump light generated by the semiconductor pump laser 300 is coupled to the Bragg grating 13 via the optical wavelength division multiplexer 12, transmitted through the Bragg grating 13, and then enters the gain fiber 14 to generate a laser pulse, and the heterojunction saturable absorption mirror 15 pairs The laser pulse is subjected to mode locking, and the mode-locked laser pulse is returned to the gain fiber 14 along the original path for amplification, and the amplified laser pulse is transmitted through the Bragg grating 13 and output by the optical wavelength division multiplexing laser 12.
以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。The above is only the preferred embodiment of the present invention, and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection of the present invention. Within the scope.

Claims (10)

  1. 一种异质结可饱和吸收镜,其特征在于,所述异质结可饱和吸收镜包括基底、覆盖在所述基底上的金膜层及覆盖在所述金膜层上的原子层级二维材料薄膜;A heterojunction saturable absorption mirror, characterized in that the heterojunction saturable absorption mirror comprises a substrate, a gold film layer covering the substrate, and an atomic level two-dimensional layer covering the gold film layer Material film
    所述原子层级二维材料薄膜包括依次设置的原子层级二维材料慢可饱和吸收体异质结薄膜、隔离材料及原子层级二维材料快可饱和吸收体异质结薄膜。The atomic-level two-dimensional material film comprises an atomic-level two-dimensional material slow-saturated absorber heterojunction film, an isolating material and an atomic-level two-dimensional material fast saturable absorber heterojunction film.
  2. 如权利要求1所述的异质结可饱和吸收镜,其特征在于,所述原子层级二维材料异质结可饱和吸收镜还包括封装保护层,所述封装保护层覆盖在所述原子层级二维材料薄膜上;所述封装保护层为六角氮化硼。The heterojunction saturable absorption mirror according to claim 1, wherein said atomic level two-dimensional material heterojunction saturable absorption mirror further comprises a package protection layer, said package protection layer covering said atomic level On the two-dimensional material film; the protective layer of the package is hexagonal boron nitride.
  3. 如权利要求1所述的异质结可饱和吸收镜,其特征在于,所述金膜层的厚度为30-300 nm。The heterojunction saturable absorption mirror according to claim 1, wherein the gold film layer has a thickness of 30 to 300 nm.
  4. 如权利要求1所述的异质结可饱和吸收镜,其特征在于,所述原子层级二维材料慢可饱和吸收体异质结薄膜包括二硫化钼、二硒化钼、二硒化锆、二硫化锆、二硫化锡、二硒化锡中的至少一种。The heterojunction saturable absorption mirror according to claim 1, wherein the atomic level two-dimensional material slow saturable absorber heterojunction film comprises molybdenum disulfide, molybdenum diselenide, zirconium diselenide, At least one of zirconium disulfide, tin disulfide, and tin diselenide.
  5. 如权利要求1所述的异质结可饱和吸收镜,其特征在于,所述原子层级二维材料快可饱和吸收体异质结薄膜包括石墨烯,二硫化钨、二硒化钨、二碲化钨、二碲化钼、二硫化铪、二硒化铪、二硒化铼、二硫化铼和硒化铟中的至少一种。The heterojunction saturable absorption mirror according to claim 1, wherein the atomic level two-dimensional material fast saturable absorber heterojunction film comprises graphene, tungsten disulfide, tungsten diselenide, diterpene At least one of tungsten, germanium dihalide, antimony disulfide, antimony diselenide, antimony diselenide, antimony disulfide, and indium selenide.
  6. 一种异质结可饱和吸收镜的制备方法,其特征在于,包括以下步骤:A method for preparing a heterojunction saturable absorption mirror, comprising the steps of:
    将基底及金靶材置于真空室中;Placing the substrate and the gold target in a vacuum chamber;
    将所述金靶材表面电离化以产生金的等离子体,利用磁控溅射沉积法将所述金的等离子体沉积在所述基底上形成金膜层;通过控制沉积时间及/或沉积温度使所述金膜层达到所需厚度;The surface of the gold target is ionized to generate a plasma of gold, and the plasma of the gold is deposited on the substrate by magnetron sputtering deposition to form a gold film layer; by controlling deposition time and/or deposition temperature Bringing the gold film layer to a desired thickness;
    将原子层级二维材料转移到所述金膜层上形成原子层级二维材料薄膜,获得异质结可饱和吸收镜。An atomic-level two-dimensional material is transferred onto the gold film layer to form an atomic-level two-dimensional material film, and a heterojunction saturable absorption mirror is obtained.
  7. 如权利要求6所述的异质结可饱和吸收镜的制备方法,其特征在于,所述制备方法还包括:The method for preparing a heterojunction saturable absorption mirror according to claim 6, wherein the preparation method further comprises:
    使用六角氮化硼对所述异质结可饱和吸收镜进行封装,获得封装保护层。The heterojunction saturable absorption mirror is encapsulated using hexagonal boron nitride to obtain a package protective layer.
  8. 一种脉冲光纤激光器,其特征在于,所述脉冲光纤激光器包括顺次连接的半导体泵浦激光器、光学波分复用器、增益光纤、光学耦合器、光隔离器、光学环形器及权利要求1至5任意一项所述的异质结可饱和吸收镜,且所述光学环形器与所述光学波分复用器连接,形成环形腔结构;其中,所述光隔离器用于隔离锁模后的激光,仅允许锁模后的激光在所述脉冲光纤激光器内单向输出;A pulsed fiber laser, characterized in that the pulsed fiber laser comprises a sequentially connected semiconductor pump laser, an optical wavelength division multiplexer, a gain fiber, an optical coupler, an optical isolator, an optical circulator and claim 1 The heterojunction saturable absorption mirror according to any one of 5, wherein the optical circulator is connected to the optical wavelength division multiplexer to form an annular cavity structure; wherein the optical isolator is used for isolating the mode-locking The laser only allows the laser after mode locking to be output in one direction in the pulsed fiber laser;
    所述半导体泵浦激光器产生的泵浦光经所述光学波分复用器耦合后进入所述增益光纤产生锁模所需要的激光脉冲并对所述激光脉冲进行放大;The pump light generated by the semiconductor pump laser is coupled to the gain fiber through the optical wavelength division multiplexer to generate a laser pulse required for mode locking and amplify the laser pulse;
    所述光学耦合器将放大后的所述激光脉冲的一部分输出到腔外而将另一部分输出至所述光学环形器,进入所述光学环形器的激光脉冲被耦合后进入所述异质结可饱和吸收镜进行锁模,锁模后的激光脉冲再经所述光学环形器返回至所述光学波分复用器,然后经所述增益光纤锁模放大后再通过所述光学耦合器输出脉冲激光。The optical coupler outputs a portion of the amplified laser pulse to the outside of the cavity and another portion to the optical circulator, and the laser pulse entering the optical circulator is coupled into the heterojunction. The saturation absorption mirror performs mode locking, and the mode-locked laser pulse is returned to the optical wavelength division multiplexer via the optical circulator, and then amplified by the gain fiber and then outputted by the optical coupler. laser.
  9. 如权利要求8所述的脉冲光纤激光器,其特征在于,所述脉冲光纤激光器还包括偏振控制器,其位于所述光隔离器与所述光学环形器之间,用于控制所述环形腔内的激光的偏振状态。A pulsed fiber laser according to claim 8 wherein said pulsed fiber laser further comprises a polarization controller located between said optical isolator and said optical circulator for controlling said annular cavity The polarization state of the laser.
  10. 一种脉冲光纤激光器,其特征在于,所述脉冲光纤激光器包括顺次连接的半导体泵浦激光器、光学波分复用器、布拉格光栅、增益光纤及权利要求1至5任意一项所述的异质结可饱和吸收镜;A pulsed fiber laser, comprising: a sequentially connected semiconductor pump laser, an optical wavelength division multiplexer, a Bragg grating, a gain fiber, and the different one of claims 1 to 5. a saturable saturable absorption mirror;
    半导体泵浦激光器产生的泵浦光经光学波分复用器耦合后进入布拉格光栅,经布拉格光栅透射后再进入增益光纤产生激光脉冲,异质结可饱和吸收镜对所述激光脉冲进行锁模,锁模后的激光脉冲沿原路返回至增益光纤进行放大,放大后的激光脉冲再通过布拉格光栅透射后由光学波分复用激光器输出。The pump light generated by the semiconductor pump laser is coupled by an optical wavelength division multiplexer into a Bragg grating, which is transmitted through the Bragg grating and then enters the gain fiber to generate a laser pulse. The heterojunction saturable absorption mirror locks the laser pulse. The laser pulse after the mode-locking is returned to the gain fiber along the original path for amplification, and the amplified laser pulse is transmitted through the Bragg grating and then output by the optical wavelength division multiplexing laser.
PCT/CN2017/083438 2017-05-08 2017-05-08 Heterojunction saturable absorption mirror and preparation method therefor, and pulse fiber laser WO2018205087A1 (en)

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