WO2018195569A1

WO2018195569A1 - Detecting a collision of a manipulator device with an obstacle

Info

Publication number: WO2018195569A1
Application number: PCT/AT2018/000030
Authority: WO
Inventors: Andreas BALDINGER; Tobias FERNER; Walter WOHLKINGER; Michael Zillich
Original assignee: Blue Danube Robotics Gmbh
Priority date: 2017-04-24
Filing date: 2018-04-24
Publication date: 2018-11-01

Abstract

The invention relates to a device for detecting a collision of a manipulator device with an obstacle, comprising at least one sensor element, wherein the sensor element has a gas-filled chamber, surrounded by a flexible casing that can be deformed by a collision with an obstacle, and a flexible support structure, wherein the support structure forms a damping element which, together with the casing, dampens forces acting in the event of a collision, as well as comprising a pressure sensor for measuring the gas pressure inside the chamber and securing means for securing the at least one sensor element to the surface of the manipulator device, wherein the securing means comprise at least one bearing element, which can be secured to the surface of the manipulator device, and interlocking elements with which corresponding interlocking elements of the at least one sensor element can be interlockingly connected.

Description

^■ »» - vwu

1

Detection of a collision of a handling device with a

obstacle

The invention relates to a device for detecting a collision of a handling device with an obstacle,

comprising at least one sensor body, wherein the sensor body is a gas-filled chamber, which is of a flexible, by

Collision is surrounded by an obstacle deformable shell and has a flexible support structure, wherein the

Supporting structure forms a damping element which mechanically damps together with the shell the forces acting in a collision forces, and further comprising a pressure sensor for measuring the gas pressure inside the chamber and

Fastening means for fixing the at least one

Sensor body on the surface of the handling device.

The invention further relates to a method for producing such a device.

The invention also relates to a handling device with at least one sensor body on an ironing, a surface de handling device at least partially covering

Collision detection device of the above type, wherein the handling device has an emergency shutdown, the in

Dependence on the signals of the pressure sensor can be activated

A device of the type mentioned in the introduction is described, for example, in WO 2016/000005 A1 and serves as a tactile safety sensor for protecting persons and stationary or autonomously moved obstacles from stationary or autonomously moving handling devices, in particular industrial robots, such as e.g. Manufacturing, transportation, inspection or

Service robots and their manipulators. to Collision detection, the safety sensor or a plurality of such safety sensors attached to the handling device and / or to their manipulators. The safety sensor described in WO 2016/000005 AI essentially comprises an airtight envelope, which is a gas or

encloses air-filled chamber, and an internal barometric pressure sensor. The shape of the shell is held by a resilient support structure, with the support structure and shell together forming the body of the sensor. The

Support structure ensures dimensional stability and a

mechanical damping of the forces acting on a collision

Forces. A touch of the sensor leads to a deformation of the shell and thus to a compression of the chamber together with the support structure, which in turn leads to a measurable increase in pressure inside the shell. A pressure increase above a certain threshold leads to the stop of the to be secured

Handling device, on the surface of the sensor is attached.

In the safety sensor described in WO 2016/000005 AI, the attachment to the surface of the

Handling device by sticking, by magnetic

Fixing or with the help of fixing screws, whereby the attachment takes place directly on the handling device. However, this type of attachment is disadvantageous because the handling device or its surface must be changed surface or at the attachment points, either by applying an adhesive or by drilling holes for receiving

Mounting screws. Furthermore, the described type of attachment is associated with a lot of work.

Finally, another disadvantage is that the

Fixing in case of an adhesive bond not non-destructive can be solved and generally does not allow rapid replacement of the safety sensor.

The present invention therefore aims to overcome the above-mentioned disadvantages and to provide a device which can be easily, without great effort and quickly attached to the handling device and in the

If necessary, e.g. for maintenance purposes, can be solved by this again.

To solve this problem, the invention consists in a

Device of the type mentioned essentially in that the fastening means at least one support element

comprise, which can be fastened to the surface of the manipulator and has positive-locking elements, with which corresponding form-fitting elements of the at least one sensor body can be brought into positive connection.

Characterized in that a separate support member is provided, this may be configured with regard to an optimized connection between the support member and the sensor body or (s). In this context, the inventive allows

Training a form-fitting connection between the

Sensor body and the support element by means of matched form-locking elements. The form-fitting

On the one hand, connection permits sufficient

Holding force and on the other hand, a slight solubility of

Connection .

A preferred embodiment of the invention provides in this

Connection before, that the positive locking elements of the at least one support element and the positive locking elements of the at least one sensor body for producing a latching connection

are formed. The attachment of the sensor body requires in this case merely that the form-fitting elements of the sensor body are brought into latching connection with the form-locking elements of the support element, for which purpose at least one of the mutually cooperating form-fitting elements has a deflectable part. In particular, this can

be provided that the form-fitting elements of the sensor body and / or the form-fitting elements of the support element are formed elastically deformable or flexible. Preferably, the form-fitting elements of the sensor body can be formed elastically deformable or flexible, which, for example, succeeds in that the positive-locking elements are formed from the same material of the flexible shell of the sensor body.

The latching connection may preferably be designed such that the molding elements of the at least one support element protrude from the support element and have a widened, in particular mushroom-shaped head and the interlocking elements of the at least one sensor body have recesses into which the head can be inserted behind the recess.

Preferably, the support element is a flat element

formed, the shape of the surface shape of the

Handling device corresponds.

The support element may be placed on the surface of the manipulator, e.g. by gluing, screwing or using a

positive connection, be attached. However, this usually requires a change or damage to the handling device or its surface. A preferred embodiment therefore provides that at least two support elements are designed as shell-like, in particular curved, elements which together form at least one region of the

Handling device are enclosing attached to this. Characterized in that the at least two shell-like elements enclose the corresponding area of the manipulator, a positive connection between the at least two shells comprising the supporting element and the enclosed area of the handling device is achieved, the provision of separate

Fasteners, such as e.g. Screws, gluing etc.

makes superfluous.

To the shell-like elements after applying to the

To keep surface of the manipulator in the desired position, it is preferably provided that the shell-like

Elements are interconnected to form a contiguous, the corresponding area of the handling device enclosing support element. For this purpose, a preferred

Continuing that the shell-like elements

Connecting means for connecting to at least one

having adjacent shell-like element. The connection between adjacent shell-like elements can

for example, by screwing, clamping or by elastic connecting elements, such. Rubber rings, done.

The support element or the shell-like elements of the

Support element may or may consist of a plastic and are preferably designed to be flexible, for example, to allow a certain adaptation to the radius of curvature of the surface of the manipulator. Alternatively, the support element or its shell-like elements may be formed of a rigid material. The interlocking elements of the support element may be formed integrally with the support element.

According to a further preferred embodiment, the casing and the support structure arranged within the casing as well as the positive-locking elements of the sensor body are integral with one another educated. Characterized in that the sheath and the support structure and the interlocking elements together in one piece

are trained, this can be done in a simple way

be formed uniform body, in particular novel and adapted to the particular requirements

Rauungebilde can be created for the support structure, wherein the shell of the chamber or arranged therein

Stüttzstruktur completely surrounds. The one-piece design succeeds according to a preferred embodiment of the invention in that the shell, the support structure and the

Positive locking elements of the sensor body by a generative manufacturing process, in particular in layers, such. by selective laser sintering. generative

Manufacturing processes are also called 3D printing processes

referred to and allow the production of support structures with a high geometric complexity.

The use of generative manufacturing techniques makes it easy to design the shell and support structure

form a different one in a first and in a second area of the handling device

Degree of attenuation is provided. In particular, the structure and the strength of the support structure can in this case be selected locally in each case such that on each section of the

Surface of the handling device, the required mechanical damping is achieved. The required damping results from the safety requirements of the work process to be secured or of the handling device to be secured, such as e.g. the travel speed and the maximum allowed

Contact force.

Preferably, it is provided that the support structure

and / or the sheath is locally changed such that in one a different degree of damping is provided first and in a second region of the handling device. The variation of the degree of attenuation can be either local

Variation of the formation of the shell or by local variation of the formation of the support structure or it can be both the formation of the shell and the formation of the

Support structure can be varied locally.

The variation of the degree of damping of the sensor body consisting of support structure and shell may be preferred here

within one and the same sensor body.

The support structure is preferably constructed to be

opposite areas of the shell, in particular the arranged on the upper side of the sensor body portion of the shell and the arranged on the underside of the sensor body portion of the shell, with each other. The support structure is in this case designed so that it is the chamber of the sensor body

interspersed. In this case, the upper side of the device designates the side facing away from the securing device to be secured, and the underside designates the side of the sensor body facing the handling device to be secured. Furthermore, hereinafter referred to as "inside" all parts within the airtight envelope and "outside" all parts outside the airtight envelope.

Preferably, the support structure has a plurality of

Support elements on. The support elements can form, for example, within the chamber a space grid, which

preferably from cubes, tetrahedrons or Oktaederstümpfen

constructed or formed as a honeycomb grid.

Alternatively or additionally, the support elements may be formed by webs and / or rods passing through the chamber. Wexters a training is possible in which the support structure comprises a branching from the bottom to the top of the device towards tree structure. In this case, the tree structure comprises thick rods, for example, which branch out to the upper side of the sensor body and become finer. This allows training in which the proportion of the of

Support structure of the released cavity in the area of

Underside of the device is relatively large, whereby a weight saving is achieved, while in the upper side by the branching finer rods a well-distributed support effect is achieved.

The adjustment of the degree of damping is achieved in a particularly simple manner in that the number of support elements per unit volume of the chamber in the first region is selected to be greater than in the second region. The higher the number of support elements per unit volume of the chamber is selected, the stiffer or stronger is the support structure. The smaller the number of

Support elements per unit volume of the chamber is selected, the softer or more flexible is the support structure. By applying a generative manufacturing process, the spatial

Density of the support elements in a simple manner within one and the same chamber, i. be varied locally within one and the same body consisting of shell and supporting structure.

The support elements of the support structure may preferably

rounded connections to each other and / or the shell

have to provide better mechanical stability

guarantee. For a rounded connection, the individual support elements merge into one another via a radius. The local variation of the degree of attenuation can alternatively or additionally also by changing the physical

Material properties of the support structure made, in particular by varying the rigidity of the material. Preferably, it is provided that the support structure is made in the first region of a stiffer material than in the second

Area .

The local variation of the degree of damping can alternatively or additionally also be achieved by a corresponding change in the thickness of the support structure. In particular, it can be provided that the support structure in the first region has a greater thickness than in the second region. In this case, the thickness is understood to mean the distance between the upper side and the underside of the sensor body consisting of support structure and shell.

In an embodiment in which the variation of the degree of attenuation is achieved by a local change of the shell, can

be provided that the thickness of the shell and / or the

Strength of the shell at the top of the device in the first region is chosen to be greater than in the second region. The

Support structure can be either homogeneous

Damping properties to be performed or it can be achieved by additional local variation of the support structure, an additional local influence of the degree of damping

become. In the latter case it can be provided that the

Damping degree of the shell at the top of the device in the first region is selected to be greater than in the second region and that the degree of damping of the support structure is selected to be greater in the second region than in the first region.

In particular, a thick or solid shell, possibly in combination with a soft support structure, results in contact with: an obstacle to a rather large-scale impressions of the sensor body. Conversely, a thin or soft shell, possibly in combination with a solid support structure, leads to a more local impression of the sensor body.

A further preferred embodiment provides that the thickness of the sheath and / or the strength of the sheath at the top of the device in an edge region of the chamber is chosen to be lower than in a central region of the comb. The edge area can be a curved area here. The thickness of the shell and / or the strength of the shell can be chosen to be lower at the top of the device in a curved region of the shell than in a flat region of the shell. This ensures a consistently high sensitivity of the sensor to the edge region or in a curved

Area of the top.

The fastening according to the invention of the sensor body with the aid of positive-locking elements allows the attachment to relatively few attachment points distributed on the underside of the sensor body. In between, an attachment to the support element is not required. Due to the height of the

Form-fitting elements provides a preferred development of the invention in this case that the positive-locking elements of

Sensor body in thickened areas of the sensor body

are formed, wherein between the thickened areas

Distance regions are formed, in which the sensor body from the support member or from the surface of the handling device is spaced to form a gas-filled cavity.

Alternatively to the attachment to a thickening of the

Sensor body, the sensor body can also be molded,

have protruding connecting elements, with the aid of For connecting elements to be connected to the support element. The Veirbindungselemente can be elastic or resilient

Be formed elements.

Wexters, the sensor body may also be connected by separately formed connecting elements with the support element. Here, the connecting element is connected to both the support element and the sensor body by means of positive locking elements. The connecting elements may be formed as elastic or resilient elements.

In the height direction thus results from the bottom to

Seen top side of the sensor body, a three-layer structure with the support element as the first layer, the distance ranges as the second layer and the remaining sensor body as a third layer. Both the second layer and the third layer can be adapted in their thickness. For example, the third layer may be made thinner, resulting in a smaller volume of the sensor body and a higher one

Sensitivity allows or for a given sensor body volume allows a larger sensor area. By contrast, the second layer can be made thicker in relation to the third layer, whereby longer trailing paths can be tolerated after a stop of the handling device to be secured.

The cavities formed by the spacing regions can be empty, ie be filled only with air, or even have a supporting structure. The attenuation given by this support structure allows, in addition to the deformation of the sensor body, a further targeted reduction of the mechanical energy of a possible impact. Furthermore, the cavities can allow an air circulation and thus a jamming of the waste heat to be secured

Prevent handling device.

Furthermore, the sensor body can be designed such that it has an opening between the thickened areas, which connects the cavity with the environment. Such

Breakthroughs or holes can circulate the air

support. These openings may optionally be covered by a grid-like structure, so that touching the grid as usual leads to a deformation of the shell and thus a triggering of the sensor.

As is known per se, it is preferably provided that each chamber has its own pressure-increasing device, preferably a particular piezoelectrically driven pump or a

Blower. The pressure-increasing device is preferably arranged so that it can convey ambient air into the respective chamber. Preferably, the pressure sensor acts via a

Control circuit with the pressure-increasing device together to establish and maintain a predetermined gas pressure in the chamber.

The invention further provides a handling device in which at least one sensor body of the invention

Collision detection device a surface of

Handling device covers at least partially, wherein the handling device has an emergency shutdown, the in

Dependence on the signals of the pressure sensor can be activated.

The handling device can be designed as an industrial robot, in particular as a production, transport, inspection or service robot. The invention will be described in more detail below with reference to exemplary embodiments shown schematically in the drawing

explained. In this figure 1 shows a

Prior art collision detection apparatus in cross section, Fig. 2 a further developed

Collision detection device in which the sensor body is integrally formed, Fig. 3 is a detail view of a first embodiment of the attachment according to the invention

Sensor body on a handling device, Fig. 4 a

Detail view of a second embodiment of the attachment according to the invention of a sensor body to a handling device, Fig. 5 is a detail view of a third embodiment of the

Fixing according to the invention of a sensor body to a handling device, Fig. 6 is a detail view of a fourth

Formation of the attachment of a

Sensor body on a handling device, Fig. 7 a

9 shows a detail view of a second embodiment of the support structure, FIG. 11 one

Detail view of a fourth embodiment of the support structure, Fig. 12 is a detail view of a fifth embodiment of

Support structure, Fig. 13 is a detail view of a sixth

Formation of the support structure, Fig. 14a and 14b a

Detail view of a seventh and eighth training of the

Support structure, Fig. 15 is a detail view of a ninth

16 shows a detailed view of a sixth embodiment of the attachment according to the invention of a sensor body to a handling device, and FIG. 17 a Detailed view of a seventh embodiment of the attachment according to the invention of a sensor body to a handling device.

In Fig. 1, there is shown a collision detection device mounted on the surface 1 of a manipulator. The device comprises a plurality of sensor bodies 2, which in each case comprise an air-filled chamber 4 surrounded by a casing 3

exhibit. The shell 3 is fixed to a plastic base shell 5 and forms with it an airtight seal of the chamber 4. The base shell 5 is connected to the surface 1 of the manipulator with the interposition of spacers 6 e.g. attached by means of an adhesive connection. The by the

Spacers 6 achieved exemption generated between the bottom of the sensor body 2 and the surface 1 a

Air inlet and cable passage 7.

The pressure prevailing in the chamber 4 is adjusted by means of a pressure-increasing device 8, which draws in ambient air from the channel 7 and thereby generates an adjustable pressure in the interior of the sensor body 2 by the control device 9. The pressure-increasing device 8 is in a

Recess of the base shell 5 added. Also in the

Recess of the base shell 5 is received a pressure sensor 10 which measures the pressure prevailing in the chamber 4 air pressure. The internal pressure sensor 10 is preferably on a

Printed circuit board formed support plate 11, which can also wear a reference pressure sensor 12 on the outside.

Regarding the functioning of the

Collision detection device is referred to WO 2016/000005 AI.

A further development, which is shown schematically in FIG. 2, works analogously to the embodiment according to FIG Fig. 1, wherein the sensor body 2, however, has a arranged in the chamber 4 support structure 13, which is indicated in Fig. 2 only with a cross-hatching. Deviating from FIG. 1, the casing 3 is not fastened to a base shell, but surrounds the chamber 4 in its entirety. Furthermore, the sheath and the support structure 13 are integrally formed together and in particular manufactured by means of a generative, layered manufacturing process. The printed circuit board 11 together with the pressure sensors 10 and possibly 12 can be constructed as in the embodiment of FIG. 1. The same applies to the

Pressure-increasing device, which is not shown in Fig. 2 for clarity.

The following figures show various embodiments of the attachment of the sensor body on the handling device. Fig. 3 shows a section of a sensor body 2 with a

Support structure 13, which connects the arranged on the upper side of the sensor body 2 shell portion 14 with the arranged on the underside of the sensor body shell portion 15. On the surface 1 of the handling device is a flat

Support member 30 is arranged, which covers the area to be protected of the handling device substantially. The support element 30 has a multiplicity of positive-locking elements with which corresponding interlocking elements cooperate in a form-fitting manner, which are formed on the underside of the sensor body 2. The interlocking elements engage each other in the manner of a mushroom-in-mushroom hook and loop fastener.

Fig. 4 shows a modified embodiment, in which a cylindrical portion 31 of the handling device is shown in cross section. On the surface of the handling device, three shell-like support members 32 are arranged, which together form a cylindrical shell, which is the cylindrical portion 31 of the handling device surrounds positively. The supporting elements

32 may be interconnected in various ways, with three different types of connection being shown schematically in FIG. 4 by way of example. The shell-like support elements have at the mutually facing end regions respectively

flange-like projections, which by means of a screw 34, by a positive connection 35, such. a clamp-type latching connection, or by elastic connecting elements, such as e.g. Rubber rings 36, are interconnected.

On the shell-like support members 32 form-fitting elements 33 are formed, which protrude from the respective support member and have a widened, in particular mushroom-shaped head, in recesses of the sensor body 2, the recess

can be plugged in behind. In this way one becomes

Sensor body 2 attached to the support member 32.

In the embodiment of FIG. 5 it can be seen that the

Sensor body 2 may be formed thickened in the region of the positive locking elements, wherein between the thickened regions 35 spacing regions 34 are formed, in which the

Sensor body 2 from the support member 32 and from the surface 1 of the handling device to form a cavity 36th

is spaced. In the height direction is thus seen from the bottom to the top of the sensor body 2 a

three-layer structure with the support element as the first layer 37, the distance regions in the second layer 38 and the remaining sensor body as a third layer 39th

In the cavity 36, as shown on the right in Fig. 5, a support structure 40 may be provided which differs from the

Bottom of the sensor body 2 extends down and may be formed on the underside of the sensor body 2. The Support structure 40 may, for example, integral with the

Sensor body 2 may be formed, wherein the sensor body and the support structure 40 by means of a 3D printing process can be made in one piece.

As shown in Fig. 6, the sensor body 2 in

Distance region 34 may be formed with at least one opening 41, which supports the air circulation.

This opening can, as shown in Fig. 7, be covered with a grid-like structure 42.

The following figures show various embodiments of the support structure 13. FIG. 8 shows a support structure 13, which connects the envelope region 14 arranged on the upper side of the sensor body with the envelope region 15 arranged on the underside of the sensor body. 8 shows only a section of the support structure 13, but the support structure 13 also connects the two lateral areas (not shown) of the shell 3 with one another. The shell 3 and the

Support structure 13 consist of a flexible

Plastic material, preferably of the same material, and are by means of a generative manufacturing process,

in particular by selective laser sintering (SLS), in one

Piece has been built. The support structure 13 is in

present case of a plurality of mutually crossing at right angles bars, wherein a first group of

parallel bars 16 connects the top to the bottom and a second group of parallel bars 17 extends from one side to the other, so that there is a cubic space lattice. FIG. 9 shows a support structure 13, which connects the casing region 14 arranged at the upper side of the sensor body to the casing region 15 arranged at the underside of the sensor body and consists of parallel webs 18.

Fig. 10 shows a support structure 13, which at the

Upper side of the sensor body arranged sleeve portion 14 with the arranged on the underside of the sensor body

HÜLlenbereich 15 connects and from parallel bars 19

consists .

Fig. 11 shows a support structure 13, which at the

Sheath area 15 connects and one of the from the

Base to top branching tree structure

consists, with a trunk portion 20 branches into branches 21.

Fig. 12 shows an embodiment in which the support structure 13 is formed by X-shaped webs 22 and 23, wherein in the crossing region 24 and in the connection region 25 of the webs 22 and 23 with the shell 3 and the shell regions 14 and 15 has a radius is trained.

In the embodiments according to FIGS. 3 to 7, the degree of attenuation provided by the support structure can be varied locally, for example by varying the number of support elements (bars, bars, tree structure) per unit volume, so that either a denser or a less dense structure

arises. The local variation of the degree of attenuation but can also by changing the material thickness (thickness) or the Material stiffness of the respective support elements will be made.

The local variation of the degree of attenuation may also be due to a change in the top and bottom

measured thickness, as shown for example in Fig. 13. Fig. 13 shows an area of a

Handling device whose surface 1 is covered by a sensor body 2. The support structure 13 is in a first

Region 26 made thicker than in a second region 27th

Fig. 14 shows an embodiment in which the wall thickness and / or strength of the shell 3 is varied. In particular, a thick / solid shell 3, possibly in combination with a soft support structure 13, tends to result in contact

large-scale impressions of the sensor body (Fig. 14a).

Conversely, a thin / soft shell 3, possibly in combination with a fixed support structure 13, leads to a more local impression of the sensor (FIG. 14b).

Furthermore, as shown in FIG. 15, the wall thickness of the casing 3 in the center 28 of the sensor surface may be greater than at the edge 29 of the sensor surface.

As shown in FIG. 16, the sensor body 2 can also have integrally formed, protruding connecting elements 43 instead of a thickening of the sensor body 2, wherein the integrally formed connecting elements serve to connect the sensor body 2 to the form-locking elements 33. The connecting elements 43 can be resilient, elastically resilient structures

be educated. As shown in FIG. 17, the sensor body 2 can also be connected to the support element 32 by means of separately formed connecting elements 44. Here, the connecting element 44 is connected on the one hand to the support element 32 and on the other hand to the sensor body 2 by means of form-locking elements 33. The connecting elements 44 may be formed as resilient, resilient structures.

Claims

Claims:

1. A device for detecting a collision of a

Handling device with an obstacle, comprising at least one sensor body, wherein the sensor body a gas-filled chamber, which is surrounded by a flexible, deformable by collision with an obstacle shell and having a flexible support structure, wherein the support structure a

Damping element is formed, which mechanically damps together with the shell, the forces acting in a collision, and further comprising a pressure sensor for measuring the gas pressure inside the chamber and fastening means for attaching the at least one sensor body to the surface of the

Handling device, characterized in that the

Fixing means comprise at least one support element, which is fastened to the surface of the manipulator and has Forrnschlusselemente, with which corresponding form-fitting elements of the at least one sensor body can be brought into positive connection.

2. Apparatus according to claim 1, characterized in that the positive-locking elements of the at least one support element and the positive-locking elements of the at least one sensor body are designed for producing a latching connection.

3. A device according to claim 2, characterized in that the forming elements of the at least one support element protrude from the support member and have a widened, in particular mushroom-shaped head and the interlocking elements of the at least one sensor body recesses, in which the head is recessed inserting the recess.

4. Apparatus according to claim 1, 2 or 3, characterized in that the support element is formed as a flat element whose shape corresponds to the surface shape of the handling device.

5. Apparatus according to claim 4, characterized in that at least two support elements are designed as shell-like, in particular curved, elements which are at least a portion of the handling device enclosing attached to this.

6. Apparatus according to claim 5, characterized in that the shell-like elements have connecting means for connecting to at least one adjacent shell-like element.

7. Device according to one of claims 1 to 6, characterized in that the positive-locking elements of the sensor body are formed in thickened regions of the sensor body, wherein between the thickened regions spacing regions are formed, in which the sensor body from the support element or from the surface of the handling device below Training a gas-filled cavity is spaced.

8. Apparatus according to claim 7, characterized in that the cavity contains a support structure.

9. Apparatus according to claim 7 or 8, characterized

characterized in that the sensor body between the thickened areas has an opening which connects the cavity with the environment.

10. The device according to claim 9, characterized in that the opening is covered by a grid-like structure.

11 _ Device according to one of claims 1 to 10, characterized in that the sheath and the support structure arranged within the shell and the form-locking elements of the Serasorkörpers are integrally formed with each other.

12. The device according to claim 11, characterized in that the sheath, the support structure and the positive-locking elements of the sensor body by a generative manufacturing process, in particular in layers, such as. by selective

Laser sintering, are made.

13. The device according to one of claims 1 to 12, characterized in that the support structure and / or the sheath is locally changed such that a mutually different degree of damping is provided in a first and in a second region of the handling device.

14. Device according to one of claims 1 to 13, characterized in that the support structure opposite

Areas of the shell, especially at the top of the

Sensor body arranged portion of the shell and arranged on the underside of the sensor body portion of the shell, interconnecting.

15. Device according to one of claims 1 to 14, characterized in that each chamber has its own

Pressure-increasing device, preferably a particular piezoelectrically driven pump or a blower has.

16. The apparatus according to claim 15, characterized in that the "pressure sensor via a control circuit with the

Drkckerhöhungsvorrichtung cooperates to establish and maintain a predetermined gas pressure in the chamber.

17. Handling device with an at least one sensor body au-facing, a surface of the handling device at least partially covering collision detection device according to one of claims 1 to 16, wherein the handling device has an emergency shutdown, which is activated in response to the signals of the pressure sensor.

18. A method for producing a device according to one of claims 1 to 16, characterized in that the sheath and the support structure and the positive locking elements of

Sensor body in one piece with the help of a

generative manufacturing process, in particular in layers, e.g. be formed by selective laser sintering.