WO2018181641A1 - Transducteur et dispositif de présentation de vibrations dans lequel ledit transducteur est utilisé - Google Patents

Transducteur et dispositif de présentation de vibrations dans lequel ledit transducteur est utilisé Download PDF

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Publication number
WO2018181641A1
WO2018181641A1 PCT/JP2018/013080 JP2018013080W WO2018181641A1 WO 2018181641 A1 WO2018181641 A1 WO 2018181641A1 JP 2018013080 W JP2018013080 W JP 2018013080W WO 2018181641 A1 WO2018181641 A1 WO 2018181641A1
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WIPO (PCT)
Prior art keywords
sheet
electrode
piezoelectric
dielectric
protective
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Application number
PCT/JP2018/013080
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English (en)
Japanese (ja)
Inventor
克彦 中野
高橋　渉
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住友理工株式会社
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Priority to JP2019510086A priority Critical patent/JP7038107B2/ja
Publication of WO2018181641A1 publication Critical patent/WO2018181641A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/02—Forming enclosures or casings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals

Definitions

  • the present invention relates to a transducer and a vibration presentation device using the transducer.
  • JP-A-5-172839 discloses a piezoelectric film, two mesh-like electrodes arranged on both sides of the piezoelectric film, and two support plates made of plate-like rigid bodies on both outer sides of each electrode.
  • a piezoelectric vibration sensor comprising: Japanese Patent No. 4922482 discloses a piezoelectric fabric formed on a fabric using a string-shaped piezoelectric fiber including a string-shaped piezoelectric material and an electrode film formed on the surface of the piezoelectric material as warp and weft. A device is disclosed.
  • Japanese Patent No. 6025854 discloses a piezoelectric element in which two conductive fibers and one piezoelectric fiber have contact points with each other and are formed in a woven shape with three fibers.
  • a piezoelectric or electrostatic transducer has a pair of electrodes.
  • the electrode is formed of a flexible material while having a sheet shape without through holes, there is a problem that the cost of the electrode is increased.
  • the cost of the electrode material can be reduced.
  • a transducer includes a piezoelectric sheet or a dielectric sheet, electrode sheets disposed on both surfaces thereof, and a protective sheet made of an insulating material covering both outer surfaces thereof.
  • the piezoelectric sheet or dielectric sheet and the electrode sheet are bonded or integrally formed, and further, the electrode sheet and the protective sheet are bonded or integrally formed.
  • the first transducer includes a first electrode sheet having a plurality of first through holes, a second electrode sheet having a plurality of second through holes, and arranged to face the first electrode sheet; A piezoelectric sheet or dielectric sheet disposed between at least the first inner surface of the first electrode sheet and the second inner surface of the second electrode sheet, and the first outer surface side of the first electrode sheet. A first protective sheet and a second protective sheet covering the second outer surface side of the second electrode sheet.
  • the first electrode sheet includes the first through hole
  • the second electrode sheet includes the second through hole. That is, the first electrode sheet and the second electrode sheet are not configured to have the electrode material on the entire surface, but are configured to have no electrode material in part. Therefore, the first electrode sheet and the second electrode sheet can reduce the cost by reducing the electrode material.
  • first protective sheet is bonded to the piezoelectric sheet or the dielectric sheet through the first through hole of the first electrode sheet, or the second protective sheet is the second electrode sheet. It adheres to the piezoelectric sheet or the dielectric sheet through the second through hole.
  • the adhesion of the first protective sheet to the piezoelectric sheet or the dielectric sheet can be achieved by utilizing the fact that the first electrode sheet has the first through hole.
  • the first electrode sheet interposed between the first protective sheet and the piezoelectric sheet or dielectric sheet is attached to the first protective sheet by bonding the first protective sheet to the piezoelectric sheet or dielectric sheet. It becomes integral with the piezoelectric sheet or dielectric sheet. Therefore, the above configuration is applied as compared with the case where an adhesive layer is required between the piezoelectric sheet or dielectric sheet and the first electrode sheet and between the first electrode sheet and the first protective sheet. By doing so, the number of adhesive layers can be reduced. As a result, it is possible to reduce costs by reducing the number of manufacturing steps.
  • the second protective sheet can be adhered to the piezoelectric sheet or the dielectric sheet by utilizing the fact that the second electrode sheet has the second through hole.
  • the second electrode sheet interposed between the second protective sheet and the piezoelectric sheet or dielectric sheet is attached to the second protective sheet by adhering the second protective sheet to the piezoelectric sheet or dielectric sheet. It becomes integral with the piezoelectric sheet or dielectric sheet. Therefore, the above configuration is applied compared to the case where an adhesive layer is required between the piezoelectric sheet or dielectric sheet and the second electrode sheet and between the second electrode sheet and the second protective sheet. By doing so, the number of adhesive layers can be reduced. As a result, it is possible to reduce costs by reducing the number of manufacturing steps.
  • a second transducer includes a first electrode sheet having a plurality of first through holes, a piezoelectric sheet or dielectric sheet disposed at least on the first inner surface side of the first electrode sheet, and the first A first protective sheet covering a first outer surface side of one electrode sheet, wherein the first protective sheet is the piezoelectric sheet or the dielectric sheet via the first through hole of the first electrode sheet. Adhere to. Thereby, there exists an effect by the 1st electrode sheet and the 1st protection sheet in the 1st transducer mentioned above.
  • the vibration presentation device includes a piezoelectric or electrostatic actuator, a first elastic body stacked on the actuator, and a second elastic body stacked on the opposite side of the actuator from the first elastic body.
  • a piezoelectric or dielectric sensor disposed around the actuator, and an actuator laminate formed by the actuator, the first elastic body, and the second elastic body in a state of being compressed in the laminating direction; and A cover that holds the first elastic body and the second elastic body in a state where the first elastic body and the second elastic body are compressed more than the actuator, and the pressing force is applied when the pressing force in the stacking direction is applied to the cover from the outside.
  • One of the actuator and the sensor is the transducer described above. Thereby, cost reduction can be achieved in the vibration presenting apparatus.
  • FIG. 2 is a cross-sectional view taken along the line II-II in FIG.
  • FIG. 3 is a sectional view taken along line III-III in FIG. 1.
  • FIG. 3 is an exploded view of constituent members of the transducer 1 shown in FIG. 2. It is an exploded view of the structural member of the transducer 1 shown in FIG. It is a top view of transducer 100 of a second embodiment. It is VII-VII sectional drawing of FIG. It is sectional drawing of the transducer 200 of 3rd embodiment. It is an exploded view of the structural member of the transducer 200 shown in FIG. It is sectional drawing of the transducer 300 of 4th embodiment.
  • the transducer 1 is a piezoelectric transducer or a dielectric transducer.
  • the transducer 1 is an actuator that generates vibration, sound, or the like, or a sensor that detects an external pushing force or the like using the piezoelectric effect of a piezoelectric body.
  • the transducer 1 functions as a piezoelectric actuator, a voltage is applied to the electrodes, whereby the piezoelectric body is deformed, and vibration is generated along with the deformation of the piezoelectric body.
  • the transducer 1 functions as a piezoelectric sensor, a voltage is generated between the electrodes due to deformation of the piezoelectric body due to an input such as an external pushing force, and the voltage is detected. Detects external pushing force.
  • the transducer 1 is an actuator that generates a vibration or a sound or a sensor that detects a pushing force from the outside by using a change in capacitance between electrodes.
  • the transducer 1 functions as an electrostatic actuator, when a voltage is applied to the electrodes, the dielectric is deformed according to the potential between the electrodes, and vibration is generated as the dielectric is deformed.
  • the transducer 1 functions as an electrostatic sensor, the dielectric is deformed due to an external pushing force, vibration, sound, or the like, so that a voltage corresponding to the capacitance between the electrodes is obtained. By detecting it, the pushing force from the outside is detected.
  • the transducer 1 (1-2. Configuration of transducer 1)
  • the transducer 1 When the transducer 1 is a piezoelectric type, the transducer 1 includes a first electrode sheet 11, a second electrode sheet 12, a piezoelectric body sheet 13, a first protective sheet 14, and a second protective sheet 15. Moreover, the transducer 1 is provided with the 1st electrode sheet 11, the 2nd electrode sheet 12, the dielectric material sheet 13, the 1st protective sheet 14, and the 2nd protective sheet 15 in the case of an electrostatic type.
  • the first electrode sheet 11 and the second electrode sheet 12 are conductive cloths.
  • the first electrode sheet 11 and the second electrode sheet 12 have flexibility and elasticity while having conductivity.
  • the first electrode sheet 11 and the second electrode sheet 12 are a woven fabric or a non-woven fabric formed of conductive fibers.
  • the conductive fiber is formed by coating the surface of a flexible fiber with a conductive material.
  • the conductive fiber is formed, for example, by plating copper, nickel or the like on the surface of a resin fiber such as polyethylene.
  • the 1st electrode sheet 11 is provided with a plurality of 1st penetration holes 11a (shown in Drawing 1, Drawing 3, and Drawing 5) by forming cloth with a fiber.
  • the second electrode sheet 12 includes a plurality of second through holes 12a (shown in FIGS. 2 and 4).
  • the first electrode sheet 11 and the second electrode sheet 12 are conductive woven fabrics will be described as an example, but a conductive nonwoven fabric can also be applied.
  • the first electrode sheet 11 is formed by weaving conductive fibers as warp and weft. A region surrounded by the warp and weft is the first through hole 11a. The same applies to the second through hole 12a.
  • the first electrode sheet 11 and the second electrode sheet 12 are formed to have the same size and are arranged to face each other.
  • the surface facing the second electrode sheet 12 is referred to as a first inner surface
  • the surface opposite to the second electrode sheet 12 is referred to as a first outer surface.
  • the surface on the side facing the 1st electrode sheet 11 is called a 2nd inner surface
  • the surface on the opposite side to the 1st electrode sheet 11 is called a 2nd outer surface.
  • the piezoelectric sheet 13 or the dielectric sheet 13 is formed of an elastically deformable piezoelectric material or dielectric material.
  • the piezoelectric sheet 13 or the dielectric sheet 13 has a sheet shape and is formed in the same outer shape as that of the first electrode sheet 11.
  • the piezoelectric sheet 13 or the dielectric sheet 13 has a structure that expands and contracts in the thickness direction and expands and contracts in the plane direction along with expansion and contraction in the thickness direction.
  • the piezoelectric sheet 13 or the dielectric sheet 13 is disposed between the first inner surface of the first electrode sheet 11 and the second inner surface of the second electrode sheet 12.
  • the piezoelectric sheet 13 and the dielectric sheet 13 are not bonded to the first electrode sheet 11 and the second electrode sheet 12, but are in contact with each other.
  • the first protective sheet 14 and the second protective sheet 15 are made of an insulating material.
  • the first protective sheet 14 and the second protective sheet 15 are formed of the same material as the dielectric sheet 13. That is, the first protective sheet 14 and the second protective sheet 15 are made of an elastomer.
  • the first protective sheet 14 covers the first outer surface side of the first electrode sheet 11.
  • the surface on the first electrode sheet 11 side is a surface that can be bonded.
  • an adhesive may be applied to the surface of the first protective sheet 14.
  • the adhesive includes an adhesive directly applied to the first protective sheet 14 and a heat-weldable material (thermoplastic material) disposed on the surface side of the first protective sheet 14.
  • the surface of the first protective sheet 14 may be formed of a heat-weldable material (thermoplastic material).
  • the first protective sheet 14 itself may be made of a heat-weldable material.
  • the 1st protective sheet 14 adhere attaches on the 1st outer surface of the 1st electrode sheet 11, as shown in FIG.
  • the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 through the first through hole 11a of the first electrode sheet 11 as shown in FIG. That is, the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 while being inserted through the first through hole 11a.
  • the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13, so that the first electrode sheet 11 is engaged with the first protective sheet 14 in a state of being locked to the first protective sheet 14. It is sandwiched between the body sheet 13 and the dielectric sheet 13.
  • the first protective sheet 14 When the adhesive is applied to the first protective sheet 14, the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by pressurizing the first protective sheet 14.
  • a heat-weldable material thermoplastic material
  • the heat-weldable material is melted by heating and pressing the heat-weldable material. Then, the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by solidifying.
  • the first protective sheet 14 When the first protective sheet 14 is formed of a heat-weldable material (thermoplastic material), the first protective sheet 14 is melted by pressurizing the first protective sheet 14 while being heated. It enters into one through hole 11a. Thereafter, the first protective sheet 14 is solidified, so that the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13.
  • thermoplastic material thermoplastic material
  • the second protective sheet 15 covers the second outer surface side of the second electrode sheet 12.
  • the surface on the second electrode sheet 12 side is a surface that can be bonded.
  • an adhesive may be applied to the surface of the second protective sheet 15.
  • the adhesive includes an adhesive directly applied to the second protective sheet 15 and a heat-weldable material (thermoplastic material) disposed on the surface side of the second protective sheet 15.
  • the surface of the second protective sheet 15 may be formed of a heat-weldable material (thermoplastic material).
  • the second protective sheet 15 itself may be formed of a heat-weldable material.
  • the 2nd protective sheet 15 adhere attaches on the 2nd outer surface of the 2nd electrode sheet 12, as shown in FIG.
  • the second protective sheet 15 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 through the second through hole 12a of the second electrode sheet 12, as shown in FIG. That is, the second protective sheet 15 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 while being inserted through the second through hole 12a.
  • the second protective sheet 15 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13, so that the second electrode sheet 12 is engaged with the second protective sheet 15 in a state of being locked to the second protective sheet 15. It is sandwiched between the body sheet 13 and the dielectric sheet 13.
  • the second protective sheet 15 When an adhesive is applied to the second protective sheet 15, the second protective sheet 15 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by pressurizing the second protective sheet 15.
  • a heat-weldable material thermoplastic material
  • the heat-weldable material is melted by heating and pressurizing the heat-weldable material. Then, the second protective sheet 15 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by solidifying.
  • the second protective sheet 15 is formed of a heat-weldable material (thermoplastic material)
  • the second protective sheet 15 is melted by pressurizing the second protective sheet 15 while being heated. It enters the two through holes 12a. Thereafter, the second protective sheet 15 is solidified, so that the second protective sheet 15 adheres to the piezoelectric sheet 13 or the dielectric sheet 13.
  • the first electrode sheet 11, the second electrode sheet 12, the piezoelectric sheet 13 or the dielectric sheet 13, the first protective sheet 14, and the second protective sheet 15 are elastically deformable and have flexibility and stretchability. Have. The relationship of the elastic modulus in the thickness direction of each member will be described.
  • the elastic coefficient of the piezoelectric sheet 13 or the dielectric sheet 13 is larger than the elastic coefficients of the first electrode sheet 11 and the second electrode sheet 12. Further, the elastic coefficient of the piezoelectric sheet 13 or the dielectric sheet 13 is larger than the elastic coefficients of the first protective sheet 14 and the second protective sheet 15.
  • the first electrode sheet 11 and the second electrode sheet 12 have the same elastic modulus.
  • the first protective sheet 14 and the second protective sheet 15 have the same elastic modulus.
  • the first electrode sheet 11 and the first protective sheet 14 may have any elasticity.
  • the elastic modulus of the second electrode sheet 12 and the second protective sheet 15 does not matter.
  • the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 through the first through hole 11a of the first electrode sheet 11.
  • the elastic coefficient of the first protective sheet 14 is smaller than the elastic coefficient of the piezoelectric sheet 13 or the dielectric sheet 13. For this reason, the first protective sheet 14 is greatly deformed because both are bonded, and the piezoelectric sheet 13 or the dielectric sheet 13 is suppressed from being largely deformed.
  • the elastic coefficient of the first electrode sheet 11 is smaller than that of the piezoelectric sheet 13 or the dielectric sheet 13. Therefore, in a state where the first electrode sheet 11 is pressed against the piezoelectric sheet 13 or the dielectric sheet 13, the first electrode sheet 11 is relatively easily deformed, and the piezoelectric sheet 13 or the dielectric sheet 13 is relatively deformed. Hard to do.
  • the second protective sheet 15 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 through the second through hole 12 a of the second electrode sheet 12.
  • the elastic coefficient of the second protective sheet 15 is smaller than the elastic coefficient of the piezoelectric sheet 13 or the dielectric sheet 13. For this reason, the second protective sheet 15 is greatly deformed because the two are bonded, and the piezoelectric sheet 13 or the dielectric sheet 13 is suppressed from being largely deformed.
  • the elastic coefficient of the second electrode sheet 12 is smaller than that of the piezoelectric sheet 13 or the dielectric sheet 13. Therefore, in a state where the second electrode sheet 12 is pressed against the piezoelectric sheet 13 or the dielectric sheet 13, the second electrode sheet 12 is relatively easily deformed, and the piezoelectric sheet 13 or the dielectric sheet 13 is relatively deformed. Hard to do.
  • the piezoelectric sheet 13 or the dielectric sheet 13 is not greatly deformed in the thickness direction. . Therefore, in the initial state, the thickness of the piezoelectric sheet 13 or the dielectric sheet 13 can be prevented from greatly differing depending on the position.
  • the transducer 1 can have stable characteristics.
  • the first electrode sheet 11 and the first protective sheet 14 are laminated on the one surface of the piezoelectric sheet 13 or the dielectric sheet 13 in the order of the first electrode sheet 11 and the first protective sheet 14.
  • the second electrode sheet 12 and the second protective sheet 15 are laminated on the other surface of the piezoelectric sheet 13 or the dielectric sheet 13 in the order of the second electrode sheet 12 and the second protective sheet 15.
  • the laminate is compressed by hot pressing. Then, by pressing the first protective sheet 14 toward the piezoelectric sheet 13 or the dielectric sheet 13, the first protective sheet 14 is deformed and enters the first through hole 11 a of the first electrode sheet 11. The surface of the first protective sheet 14 is bonded to the first electrode sheet 11 and is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by thermal welding. At the same time, by pressing the second protective sheet 15 toward the piezoelectric sheet 13 or the dielectric sheet 13, the second protective sheet 15 is deformed and enters the second through hole 12 a of the second electrode sheet 12. The surface of the second protective sheet 15 is bonded to the second electrode sheet 12 and is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by heat welding. Finally, when the transducer 1 is a piezoelectric type, a polling process is performed.
  • transducer 1 When the transducer 1 functions as a piezoelectric actuator, applying a periodic voltage to the first electrode sheet 11 and the second electrode sheet 12 causes the piezoelectric sheet 13 to have a thickness direction and a surface direction according to the voltage. Extends and contracts. The vibration caused by the expansion / contraction deformation of the piezoelectric sheet 13 is the vibration output as the actuator.
  • the dielectric sheet 13 expands and contracts in the thickness direction by applying a periodic voltage to the first electrode sheet 11 and the second electrode sheet 12. .
  • the dielectric sheet 13 is compressed and deformed.
  • the thickness of the dielectric sheet 13 is reduced, and the size of the dielectric sheet 13 in the surface direction is increased.
  • the dielectric sheet 13 returns to the original thickness. That is, the thickness of the dielectric sheet 13 increases and the size of the dielectric sheet 13 in the surface direction decreases.
  • the piezoelectric sheet 13 expands and contracts in the thickness direction due to the application of an external force, so that the gap between the first electrode sheet 11 and the second electrode sheet 12 is increased. Voltage is generated. With this voltage, it can be detected that the piezoelectric sheet 13 has been deformed in the thickness direction, and that an external force has been applied.
  • the dielectric sheet 13 expands and contracts in the thickness direction due to the application of an external force, so that the first electrode sheet 11 and the second electrode sheet 12 The capacitance between them changes.
  • the output voltage corresponding to the capacitance between the electrodes can be detected.
  • the output voltage can detect that the dielectric sheet 13 is deformed in the thickness direction, and can detect that an external force is applied.
  • the first electrode sheet 11 includes the first through holes 11a
  • the second electrode sheet 12 includes the second through holes 12a. That is, the first electrode sheet 11 and the second electrode sheet 12 are not configured to have the electrode material on the entire surface, but are configured to have no electrode material in part. Therefore, the first electrode sheet 11 and the second electrode sheet 12 can reduce the cost by reducing the electrode material.
  • the first protective sheet 14 is adhered to the piezoelectric sheet 13 or the dielectric sheet 13 by utilizing the fact that the first electrode sheet 11 has the first through hole 11a. It has gained.
  • the first electrode sheet 11 interposed between the first protective sheet 14 and the piezoelectric sheet 13 or the dielectric sheet 13 by bonding the first protective sheet 14 to the piezoelectric sheet 13 or the dielectric sheet 13. Is integrated with the first protective sheet 14 and is integrated with the piezoelectric sheet 13 or the dielectric sheet 13. Therefore, compared to the case where the adhesive layer is necessary both between the piezoelectric sheet 13 or the dielectric sheet 13 and the first electrode sheet 11 and between the first electrode sheet 11 and the first protective sheet 14.
  • the number of adhesive layers can be reduced. As a result, it is possible to reduce costs by reducing the number of manufacturing steps.
  • the second protective sheet 15 can be adhered to the piezoelectric sheet 13 or the dielectric sheet 13 by utilizing the fact that the second electrode sheet 12 has the second through hole 12a.
  • the second electrode sheet 12 interposed between the second protective sheet 15 and the piezoelectric sheet 13 or the dielectric sheet 13 by bonding the second protective sheet 15 to the piezoelectric sheet 13 or the dielectric sheet 13. Is integrated with the second protective sheet 15 and integrated with the piezoelectric sheet 13 or the dielectric sheet 13. Therefore, compared with the case where the adhesive layer is necessary both between the piezoelectric sheet 13 or the dielectric sheet 13 and the second electrode sheet 12 and between the second electrode sheet 12 and the second protective sheet 15.
  • the number of adhesive layers can be reduced. As a result, it is possible to reduce costs by reducing the number of manufacturing steps.
  • the first protective sheet 14 may be formed of a heat-weldable material (thermoplastic material) and may be bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by applying heat.
  • the second protective sheet 15 may be formed of a heat-weldable material (thermoplastic material) and may be bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by applying heat.
  • Some adhesives contain volatile organic compounds (VOC).
  • VOC volatile organic compounds
  • adhesion can be performed without using an adhesive or solvent containing VOC. Therefore, it is possible to suppress the discharge of VOC.
  • manufacturing costs can be reduced by not using a dedicated material such as an adhesive.
  • the transducer 100 of the second embodiment includes a first electrode sheet 111, a second electrode sheet 112, a piezoelectric sheet 13 or a dielectric sheet 13, a first protective sheet 14, and first Two protective sheets 15 are provided.
  • the first electrode sheet 111 and the second electrode sheet 112 are not conductive cloth but thin film punching metal having flexibility and stretchability.
  • the first electrode sheet 111 includes a plurality of first through holes 111a
  • the second electrode sheet 112 includes a plurality of second through holes 112a.
  • the first through-hole 111a and the second through-hole 112a are rectangular, but are not limited to a rectangle and may be circular or other shapes.
  • the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 through the first through hole 111a of the first electrode sheet 111.
  • the second protective sheet 15 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 through the second through hole 112 a of the second electrode sheet 112.
  • the transducer 200 of the third embodiment includes a first electrode sheet 11, a second electrode sheet 12, a first piezoelectric sheet 213a or a first dielectric sheet 213a, and a second piezoelectric sheet. 213b or the second dielectric sheet 213b, the first protective sheet 14, and the second protective sheet 15.
  • the first piezoelectric sheet 213 a or the first dielectric sheet 213 a is integrally formed on the first inner surface side of the first electrode sheet 11.
  • the first piezoelectric sheet 213 a or the first dielectric sheet 213 a does not exist on the first outer surface side of the first electrode sheet 11.
  • the first piezoelectric sheet 213a or the first dielectric sheet 213a is formed by adhering to the surface of the conductive fiber located on the first inner surface side of the first electrode sheet 11 by dipping, spraying, coating or the like.
  • the 1st piezoelectric material sheet 213a or the 1st dielectric material sheet 213a has a through-hole similarly to the 1st electrode sheet 11.
  • the second piezoelectric sheet 213b or the second dielectric sheet 213b is integrally formed on the second inner surface side of the second electrode sheet 12.
  • the second piezoelectric sheet 213b or the second dielectric sheet 213b does not exist on the second outer surface side of the second electrode sheet 12.
  • the second piezoelectric sheet 213b or the second dielectric sheet 213b is formed by adhering to the surface of the conductive fiber located on the second inner surface side of the second electrode sheet 12 by dipping, spraying, coating or the like. Is done.
  • the 2nd piezoelectric material sheet 213b or the 2nd dielectric material sheet 213b has a through-hole similarly to the 2nd electrode sheet 12.
  • the first protective sheet 14 is adhered to the first outer surface of the first electrode sheet 11. Further, the first protective sheet 14 includes the first piezoelectric sheet 213b or the first piezoelectric sheet 213b or the first dielectric sheet 213a through the first through-hole 11a of the first electrode sheet 11 and the first dielectric sheet 213a. Adhere to the second dielectric sheet 213b.
  • the second protective sheet 15 is adhered to the second outer surface of the second electrode sheet 12. Furthermore, the second protective sheet 15 includes the first piezoelectric sheet 213a or the second piezoelectric sheet 213a or the second dielectric sheet 213b through the second through hole 12a of the second electrode sheet 12 and the through hole of the second dielectric sheet 213b. It adheres to the first dielectric sheet 213a.
  • the transducer 200 when the transducer 200 is a piezoelectric type, the first piezoelectric sheet 213a and the second piezoelectric sheet 213b exist between the first electrode sheet 11 and the second electrode sheet 12, and the first piezoelectric sheet The piezoelectric effect is exhibited by both 213a and the second piezoelectric sheet 213b.
  • the transducer 200 is an electrostatic type, a first dielectric sheet 213a and a second dielectric sheet 213b exist between the first electrode sheet 11 and the second electrode sheet 12, and the first dielectric sheet 213a and The electrostatic capacity is changed by both of the second dielectric sheets 213b.
  • the first piezoelectric sheet 213a or the first dielectric sheet 213a is an integral member with the first electrode sheet 11
  • the second piezoelectric sheet 213b or the second dielectric sheet 213b is the second electrode. It becomes an integral member with the sheet 12. Accordingly, since the piezoelectric sheet or the dielectric sheet does not exist alone, the number of parts is reduced.
  • the transducer 300 of the fourth embodiment includes a first electrode sheet 11, a second electrode sheet 12, a first piezoelectric sheet 313a or a first dielectric sheet 313a, and a second piezoelectric sheet. 313b or the second dielectric sheet 313b, the first protective sheet 14, and the second protective sheet 15.
  • the first piezoelectric sheet 313 a or the first dielectric sheet 313 a is integrally formed on the first inner surface side and the first outer surface side of the first electrode sheet 11. That is, the first piezoelectric sheet 313a or the first dielectric sheet 313a includes a first inner sheet portion 313a1 and a first outer sheet portion 313a2.
  • the first piezoelectric sheet 313a or the first dielectric sheet 313a is formed by adhering to all the surfaces of the conductive fibers of the first electrode sheet 11 by dipping, spraying, coating, or the like.
  • the first piezoelectric sheet 313 a or the first dielectric sheet 313 a has a through hole as in the first electrode sheet 11.
  • the second piezoelectric sheet 313b or the second dielectric sheet 313b is integrally formed on the second inner surface side and the second outer surface side of the second electrode sheet 12. That is, the second piezoelectric sheet 313b or the second dielectric sheet 313b includes a second inner sheet portion 313b1 and a second outer sheet portion 313b2. Similarly, the second piezoelectric sheet 313b or the second dielectric sheet 313b is formed by adhering to all surfaces of the conductive fibers of the second electrode sheet 12 by dipping, spraying, coating, or the like. And the 2nd piezoelectric material sheet 313b or the 2nd dielectric material sheet 313b has a through-hole similarly to the 2nd electrode sheet 12. FIG.
  • the first protective sheet 14 is adhered to the first outer sheet portion 313a2 of the first piezoelectric sheet 313a or the first dielectric sheet 313a. Further, the first protective sheet 14 is connected to the second piezoelectric sheet 313b via the first through hole 11a of the first electrode sheet 11 (corresponding to the through hole of the first piezoelectric sheet 313a or the first dielectric sheet 313a). Alternatively, the second dielectric sheet 313b is bonded to the second inner sheet portion 313b1.
  • the second protective sheet 15 is adhered to the second outer sheet portion 313b2 in the second piezoelectric sheet 313b or the second dielectric sheet 313b. Further, the second protective sheet 15 passes through the second through hole 12a of the second electrode sheet 12 (corresponding to the through hole of the second piezoelectric sheet 313b or the second dielectric sheet 313b), and the first piezoelectric sheet 313a. Or it adhere
  • the first inner sheet portion 313a1 and the second inner sheet portion 313b1 exist between the first electrode sheet 11 and the second electrode sheet 12, and the first inner sheet portion 313a1 and the second inner sheet portion 313b1.
  • the transducer 400 of the fifth embodiment includes a first electrode sheet 11, a second electrode sheet 12, a piezoelectric sheet 413 or a dielectric sheet 413, a first protective sheet 14, Two protective sheets 15 are provided.
  • the piezoelectric sheet 413 or the dielectric sheet 413 is integrally formed on the first inner surface side of the first electrode sheet 11.
  • the piezoelectric sheet 413 or the dielectric sheet 413 does not exist on the first outer surface side of the first electrode sheet 11.
  • the piezoelectric sheet 413 or the dielectric sheet 413 is formed by adhering to the surface of the conductive fiber located on the first inner surface side of the first electrode sheet 11 by dipping, spraying, coating or the like.
  • the piezoelectric material sheet 413 or the dielectric material sheet 413 has a through-hole similarly to the 1st electrode sheet 11.
  • the first protective sheet 14 is adhered to the first outer surface of the first electrode sheet 11. Further, the first protective sheet 14 is bonded to the piezoelectric sheet 413 or the dielectric sheet 413.
  • the second protective sheet 15 is adhered to the second outer surface of the second electrode sheet 12. Further, the second protective sheet 15 is bonded to the piezoelectric sheet 413 or the dielectric sheet 413 through the second through hole 12 a of the second electrode sheet 12.
  • the piezoelectric material or the dielectric material is not attached to the second electrode sheet 12. Therefore, the adhesion of the piezoelectric material or the dielectric material is only on the first electrode sheet 11. Therefore, the manufacturing cost can be reduced.
  • the transducer 500 of the sixth embodiment includes a first electrode sheet 11, a second electrode sheet 12, a piezoelectric sheet 513 or a dielectric sheet 513, a first protective sheet 14, Two protective sheets 15 are provided.
  • the piezoelectric sheet 513 or the dielectric sheet 513 is integrally formed on the first inner surface side and the first outer surface side of the first electrode sheet 11. That is, the piezoelectric sheet 513 or the dielectric sheet 513 includes an inner sheet portion 513a and an outer sheet portion 513b.
  • the piezoelectric sheet 513 or the dielectric sheet 513 is formed by adhering to all the surfaces of the conductive fibers of the first electrode sheet 11 by dipping, spraying, coating, or the like. And the piezoelectric material sheet 513 or the dielectric material sheet 513 has a through-hole like the 1st electrode sheet 11.
  • the first protective sheet 14 is adhered to the outer sheet portion 513b of the piezoelectric sheet 513 or the dielectric sheet 513.
  • the second protective sheet 15 is adhered to the second outer surface of the second electrode sheet 12. Furthermore, the second protective sheet 15 is bonded to the inner sheet portion 513 a of the piezoelectric sheet 513 or the dielectric sheet 513 through the second through hole 12 a of the second electrode sheet 12.
  • the transducer 1 described above includes the first electrode sheet 11, the second electrode sheet 12, the piezoelectric sheet 13 or the dielectric sheet 13, the first protective sheet 14, and the second protective sheet 15.
  • the transducer 1 is not limited to this configuration, and the transducer 1 includes the first electrode sheet 11, the piezoelectric sheet 13 or the dielectric sheet 13, and the first protective sheet 14, and includes the second electrode sheet 12 and the second protective sheet 15 described above. It can also be set as the structure which is not provided.
  • the transducer 1 can replace the second electrode sheet 12 with a conductive material having no through hole.
  • the conductive material can be replaced with a plate material, a shaft, a pipe, or the like formed of a metal or a conductive material other than metal. Even in this case, the effects of the first electrode sheet 11 and the first protective sheet 14 are exhibited.
  • the present invention can be similarly applied to the transducers 100, 200, 300, 400, and 500 of other embodiments.
  • transducer 1 etc. A vibration presentation device 600 using the above-described transducers 1, 100, 200, 300, 400, 500 (hereinafter referred to as “transducer 1 etc.”) will be described with reference to FIGS.
  • the thickness of each member is exaggerated for easy understanding. Therefore, actually, the thickness of the vibration presentation device 600 in the vertical direction in FIGS. 16 and 17 is very thin.
  • the vibration presenting device 600 has a function as a sensor that detects a pressing force from the outside, and also has a function as an actuator that presents vibration. For example, when a pressing force is applied by a human finger or the like, the vibration presentation device 600 detects the pressing force and then presents a tactile vibration to the finger.
  • the vibration presentation device 600 includes an actuator 610, a first conduction unit 620, a second conduction unit 630, a first elastic body 640, a second elastic body 650, a sensor 660, and a third elastic body. 601, a cover 670, a conducting wire 680, and a control device 690.
  • At least one of the actuator 610 and the sensor 660 applies the transducer 1 described above. That is, only the actuator 610, only the sensor 660, or both the actuator 610 and the sensor 660 apply the transducer 1 or the like. In the present embodiment, both the actuator 610 and the sensor 660 apply the transducer 1 or the like.
  • the actuator 610 includes a plurality of actuator units 610a, 610b, and 610c.
  • the actuator 610 includes three actuator units 610a, 610b, and 610c, and is formed by stacking three actuator units 610a, 610b, and 610c.
  • the actuator 610 may include only one actuator unit 610a.
  • Each actuator unit 610a, 610b, 610c has a plurality of transducers 1 and the like stacked thereon. Moreover, as shown in FIG. 19, in each actuator unit 610a, 610b, 610c, the 1st electrode sheet 11 and the 2nd electrode sheet 12 are offset in the left-right direction (longitudinal direction). Specifically, a part of the first electrode sheet 11 and a part of the second electrode sheet 12 are arranged to face each other. In the 1st electrode sheet 11 and the 2nd electrode sheet 12, the remaining one part which does not mutually oppose is located in the other side on the basis of the opposing part.
  • the first electrode sheet 11 and the second electrode sheet 12 are opposed to each other at the central portion in the left-right direction, whereas the first electrode sheet 11 is present at the left portion, whereas the second electrode sheet is present. 12 does not exist, and in the right side portion, the second electrode sheet 12 exists, whereas the first electrode sheet 11 does not exist.
  • the length in the longitudinal direction of the piezoelectric sheet 13 or the dielectric sheet 13 is a range in which the first electrode sheet 11 and the second electrode sheet 12 face each other, only the first electrode sheet 11. It is formed to have a length facing the existing range and the entire range where only the second electrode sheet 12 exists.
  • the first protective sheet 14 covers the entire surface of the first electrode sheet 11 and the exposed portion of the piezoelectric sheet 13 or the dielectric sheet 13.
  • the second protective sheet 15 covers the plurality of second electrode sheets 12 and the exposed portions of the piezoelectric sheet 13 or the dielectric sheet 13 over the entire surface.
  • Each actuator unit 610a, 610b, 610c has an actuator body 616 located at the center in the left-right direction in FIG. 18, a first terminal 617 located on the left side in FIG. 18, and a second terminal 618 located on the right side in FIG. With.
  • the first terminal 617 is a positive potential terminal in the actuator body 616
  • the second terminal 618 is a ground potential terminal in the actuator body 616.
  • the first terminal 617 and the second terminal 618 extend to opposite sides with respect to the actuator body 616.
  • the 1st electrode sheet 11 is provided with the 1st counter electrode part 611a located in the center part of a horizontal direction, and the 1st terminal electrode part 611b extended from the 1st counter electrode part 611a.
  • the 2nd electrode sheet 12 is provided with the 2nd counter electrode part 612a located in the center part of a horizontal direction, and the 2nd terminal electrode part 612c extended from the 2nd counter electrode part 612a.
  • the first counter electrode portion 611a and the second counter electrode portion 612a are opposed to each other.
  • the direction in which the first terminal electrode portion 611b extends from the first counter electrode portion 611a and the direction in which the second terminal electrode portion 612c extends from the second counter electrode portion 612a are opposite directions.
  • the piezoelectric sheet 13 and the dielectric sheet 13 include a piezoelectric body 613a or a dielectric body 613a, a first extending part 613b, and a second extending part 613c.
  • the piezoelectric body 613a or the dielectric body 613a is interposed between the first counter electrode portion 611a and the second counter electrode portion 612a.
  • the first extending portion 613b extends from the piezoelectric body 613a or the dielectric body 613a and is interposed between the plurality of first terminal electrode portions 611b.
  • the second extending portion 613c extends from the piezoelectric body 613a or the dielectric body 613a and is interposed between the plurality of second terminal electrode portions 612c.
  • the first terminal electrode portion 611 b exists outside the actuator body 616, but the first extending portion 613 b that is a part of the piezoelectric sheet 13 and the dielectric sheet 13 is provided outside the actuator body 616.
  • the first terminal electrode portion 611b and the first extension portion 613b are stacked. Therefore, the total thickness of the first terminal electrode portion 611b and the first extending portion 613b is only a thickness of the second electrode sheet 12 that is smaller than that of the actuator body 616. Therefore, it can suppress that a big deformation force arises in the boundary vicinity of the 1st terminal electrode part 611b and the 1st counter electrode part 611a. As a result, the component part of the conductive path connected to the first counter electrode part 611a can have high durability. The same applies to the second terminal electrode portion 612c.
  • the first protection sheet 14 includes a first protection body 614a, a first protection_first terminal protection unit 614b, and a first protection_second terminal protection unit 614c.
  • the first protective body 614a covers the first counter electrode portion 611a.
  • the first protection_first terminal protection part 614b covers the first terminal electrode part 611b.
  • the first protection_second terminal protection part 614c covers the second terminal electrode part 612c.
  • the second protection sheet 15 includes a second protection body 615a, a second protection_first terminal protection unit 615b, and a second protection_second terminal protection unit 615c.
  • the second protective body 615a covers the first counter electrode portion 611a.
  • the second protection_first terminal protection part 615b covers the first terminal electrode part 611b.
  • the second protection_second terminal protection part 615c covers the second terminal electrode part 612c.
  • the first conductive portion 620 is formed into a sheet shape from an elastically deformable material (for example, an elastomer), and is bent into an L shape.
  • the first conductive portion 620 may be formed by blending a conductive filler in the elastomer, or may be a conductive cloth similarly to the first electrode sheet 11.
  • One side of the L-shape of the first conduction part 620 is formed in a direction intersecting (for example, orthogonal to) the planar surface of the actuator body 616.
  • One side of the L shape of the first conduction part 620 is in contact with the end face of the first terminal 617.
  • one side of the L shape of the first conduction part 620 is in contact with the end of the first terminal electrode part 611b and the end of the first extension part 613b. Accordingly, the first conduction portion 620 is electrically connected to the ends of the plurality of first terminal electrode portions 611b.
  • the other side of the L-shape of the first conducting part 620 extends in a direction away from the actuator body 616 and is formed in parallel with the planar surface direction of the actuator body 616.
  • the other side of the L shape of the first conduction part 620 is electrically connected to the conducting wire 680.
  • the second conduction part 630 is formed into a sheet shape from an elastically deformable material (for example, an elastomer) and is bent into an L shape.
  • electrical_connection part 630 is shape
  • One side of the L-shape of the second conducting portion 630 is formed in a direction intersecting (orthogonal to) the planar surface of the actuator body 616. Then, one side of the L shape of the second conducting portion 630 is in contact with the end surface of the second terminal 618. Specifically, one side of the L shape of the second conducting portion 630 is in contact with the end of the second terminal electrode portion 612c and the end of the second extending portion 613c. Accordingly, the second conduction portion 630 is electrically connected to the ends of the plurality of second terminal electrode portions 612c.
  • the other side of the L-shape of the second conducting portion 630 extends in a direction away from the actuator body 616 and is formed in parallel with the planar surface direction of the actuator body 616.
  • the other side of the L shape of the second conducting portion 630 is electrically connected to the conducting wire 680.
  • the first conductive portion 620 can easily form a conductive path between the plurality of first terminal electrode portions 611b.
  • the second conductive portion 630 can easily form a conductive path between the plurality of second terminal electrode portions 612c.
  • electrical_connection part 630 are elastically deformable, it can track the deformation
  • the first elastic body 640 is disposed in contact with one planar surface (upper surface in FIG. 16) of the actuator body 616.
  • the second elastic body 650 is disposed in contact with the other planar surface of the actuator body 616 (the lower surface in FIG. 16), that is, the opposite side of the actuator body 616 from the first elastic body 640. That is, the first elastic body 640 and the second elastic body 650 are respectively disposed on both end surfaces (upper and lower surfaces in FIG. 16) facing away from the planar surface orthogonal direction of the actuator body 616.
  • the first elastic body 640 has both end surfaces facing away from each other in the planar surface direction of the actuator body 616 (surfaces where the first terminal 617 and the second terminal 618 are not present (the left and right sides in FIG. Surface)).
  • the first elastic body 640 includes one planar surface of the first terminal 617 (upper surface in FIG. 16) and one planar surface of the second terminal 618 (upper surface in FIG. 16). ) Is placed in contact with.
  • the second elastic body 650 is disposed in contact with the other planar surface of the first terminal 617 (the lower surface in FIG. 16) and the other planar surface of the second terminal 618 (the lower surface in FIG. 16).
  • the first elastic body 640 is disposed in contact with all the L-shaped outer surfaces of the first conducting portion 620 and all the L-shaped outer surfaces of the second conducting portion 630.
  • the first elastic body 640 and the second elastic body 650 are made of materials having small elastic moduli E (640) and E (650) and small loss coefficients tan ⁇ (640) and tan ⁇ (650) .
  • the first elastic body 640 and the second elastic body 650 are preferably made of a soft material having low damping characteristics.
  • the first elastic body 640 and the second elastic body 650 have elastic moduli E (640) and E (650) smaller than the elastic moduli E1 (616) in the stacking direction of the actuator main body 616 (planar surface orthogonal direction).
  • the elastic modulus E (640) of the first elastic body 640 is smaller than the elastic modulus E2 (616) in the surface direction of the actuator body 616.
  • Sensor 660 applies transducer 1 or the like.
  • the sensor 660 is disposed around the actuator 610.
  • the sensor 660 is stacked on an actuator stack (610, 640, 650) formed by the actuator 610, the first elastic body 640, and the second elastic body 650.
  • the sensor 660 is stacked on the opposite side of the second elastic body 650 from the actuator 610.
  • the sensor 660 may be arranged in parallel with the actuator 610 in a direction orthogonal to the stacking direction of the actuators 610.
  • the third elastic body 601 is laminated on the actuator laminated body (610, 640, 650) and the sensor 660, and is arranged on the opposite side of the actuator laminated body (610, 640, 650) in the sensor 660.
  • the third elastic body 601 is made of the same material as the first elastic body 640 and the second elastic body 650. Therefore, the elastic modulus E (601) and the loss coefficient tan ⁇ (601) of the third elastic body 601 are the elastic modulus E (640) and the loss coefficient tan ⁇ (640) of the first elastic body 640 and the elasticity of the second elastic body 650. It is the same as the rate E (650) and the loss factor tan ⁇ (650) .
  • the sensor 660 extends from the sensor main body 660a and the sensor main body 660a disposed between the actuator laminate (610, 640, 650) and the third elastic body 601. And a sensor terminal portion 660b that is bent so as to wrap around to the opposite side of the sensor main body portion 660a in the third elastic body 601.
  • the sensor main body 660a corresponds to the transducer 1 and the like, and the sensor terminal 660b is electrically connected to the first electrode sheet 11 and the second electrode sheet 12 in the sensor main body 660a.
  • the sensor terminal portion 660b is located between the third elastic body 601 and the conducting wire 680.
  • the cover 670 surrounds the actuator 610, the first conduction part 620, the second conduction part 630, the first elastic body 640, the second elastic body 650, the sensor 660, and the third elastic body 601.
  • Various materials such as metal and resin are applied to the cover 670.
  • the cover 670 transmits the pressing force to the sensor 660 when a pressing force in the stacking direction of the actuator stack (610, 640, 650) is applied from the outside. Further, the cover 670 vibrates due to the vibration generated by the actuator 610 and imparts vibration to a human finger that imparts a pressing force to the cover 670.
  • the cover 670 includes a first cover 671 as a pedestal and a second cover 672 as a member attached to the first cover 671 and applied with a pushing force.
  • the first cover 671 and the second cover 672 include the actuator main body 616, the first elastic body 640, the second elastic body 650, the sensor 660, and the third elastic body 601 in the stacking direction of the actuator stack (610, 640, 650). It is held in a compressed state (vertical direction in FIG. 16). In this state, the first elastic body 640, the second elastic body 650, and the third elastic body 601 are in the actuator body in the stacking direction of the actuator stack (610, 640, 650) from the relationship of the elastic modulus E of each member.
  • the third elastic body 601 and the first cover 671 are illustrated as non-contact due to the presence of the sensor terminal portion 660b, but in reality, the sensor terminal portion 660b is thin, The three elastic bodies 601 and the first cover 671 are in contact with each other in a pressed state.
  • the first cover 671 holds the actuator body 616 and the first elastic body 640 in a compressed state in the surface direction of the actuator body 616 (left and right direction in FIG. 17). In this state, the first elastic body 640 is compressed more than the actuator body 616 in the surface direction of the actuator body 616 due to the elastic modulus E of each member.
  • the conducting wire 680 is disposed on the same plane of the first cover 671 located on the inner surface of the cover 670.
  • the conducting wire 680 is formed on the first cover 671 by printing, but a cable wire or the like can also be used.
  • the control device 690 drives the actuator 610 to generate vibration. Note that the control device 690 is disposed outside the cover 670, but may be disposed inside the cover 670.
  • the vibration presentation device 600 Since the vibration presenting device 600 is composed of the transducer 1 and the like, the cost can be reduced.
  • the vibration presentation device 600 includes a sensor 660 and an actuator 610. Therefore, the vibration presentation device 600 has very good responsiveness from detection of the pushing force to presentation of vibration. And the vibration presentation apparatus 600 can present a big vibration, without providing the sensor 660 and the actuator 610 which detect pushing force, without enlarging.
  • the actuator 610 and the sensor 660 are stacked in the direction in which the pushing force is applied. Therefore, the detection position of the pushing force and the vibration application position are the same position. Therefore, when a human finger applies a pressing force to the cover 670, vibration can be directly applied to the finger itself.
  • the vibration presentation device 600 may be configured not to include the third elastic body 601.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

L'invention concerne un transducteur au moyen duquel il est possible de réduire une couche adhésive tout en réduisant un matériau d'électrode, et un dispositif de présentation de vibrations dans lequel ledit transducteur est utilisé. Un transducteur (1) selon l'invention comprend une première feuille d'électrode (11) pourvue d'une pluralité de premiers trous traversants (11a), une seconde feuille d'électrode (12) pourvue d'une pluralité de seconds trous traversants (12a), une feuille piézoélectrique (13) ou une feuille diélectrique (13) disposée entre une première surface interne de la première feuille d'électrode (11) et une seconde surface interne de la seconde feuille d'électrode (12), une première feuille de protection (14) qui recouvre un premier côté de surface externe de la première feuille d'électrode (11), et une seconde feuille de protection (15) qui recouvre un second côté de surface externe de la seconde feuille d'électrode (12). La première feuille de protection (14) adhère à la feuille piézoélectrique (13) ou à la feuille diélectrique (13) par l'intermédiaire des premiers trous traversants (11a) ménagés dans la première feuille d'électrode (11).
PCT/JP2018/013080 2017-03-30 2018-03-29 Transducteur et dispositif de présentation de vibrations dans lequel ledit transducteur est utilisé WO2018181641A1 (fr)

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US20210318188A1 (en) * 2019-01-24 2021-10-14 Panasonic Intellectual Property Management Co., Ltd. Pressure-sensitive element
US11740141B2 (en) * 2019-01-24 2023-08-29 Panasonic Intellectual Property Management Co., Ltd. Pressure-sensitive element
EP3783917A4 (fr) * 2019-03-28 2021-06-23 Sumitomo Riko Company Limited Transducteur électrostatique et unité de transducteur électrostatique
WO2020194670A1 (fr) * 2019-03-28 2020-10-01 住友理工株式会社 Transducteur électrostatique et procédé de fabrication correspondant
JP6644961B1 (ja) * 2019-03-28 2020-02-12 住友理工株式会社 静電型トランスデューサおよびその製造方法
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WO2020196863A1 (fr) * 2019-03-28 2020-10-01 住友理工株式会社 Transducteur électrostatique et unité de transducteur électrostatique
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JP7293898B2 (ja) 2019-06-18 2023-06-20 Tdk株式会社 圧電素子
JP7313550B2 (ja) 2019-09-24 2023-07-24 アップル インコーポレイテッド 電子デバイス用の伸縮可能な信号経路構造体
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