WO2018181641A1 - Transducer and vibration presenting device in which same is used - Google Patents

Transducer and vibration presenting device in which same is used Download PDF

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Publication number
WO2018181641A1
WO2018181641A1 PCT/JP2018/013080 JP2018013080W WO2018181641A1 WO 2018181641 A1 WO2018181641 A1 WO 2018181641A1 JP 2018013080 W JP2018013080 W JP 2018013080W WO 2018181641 A1 WO2018181641 A1 WO 2018181641A1
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WO
WIPO (PCT)
Prior art keywords
sheet
electrode
piezoelectric
dielectric
protective
Prior art date
Application number
PCT/JP2018/013080
Other languages
French (fr)
Japanese (ja)
Inventor
克彦 中野
高橋　渉
Original Assignee
住友理工株式会社
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Publication date
Application filed by 住友理工株式会社 filed Critical 住友理工株式会社
Priority to JP2019510086A priority Critical patent/JP7038107B2/en
Publication of WO2018181641A1 publication Critical patent/WO2018181641A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/02—Forming enclosures or casings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals

Definitions

  • the present invention relates to a transducer and a vibration presentation device using the transducer.
  • JP-A-5-172839 discloses a piezoelectric film, two mesh-like electrodes arranged on both sides of the piezoelectric film, and two support plates made of plate-like rigid bodies on both outer sides of each electrode.
  • a piezoelectric vibration sensor comprising: Japanese Patent No. 4922482 discloses a piezoelectric fabric formed on a fabric using a string-shaped piezoelectric fiber including a string-shaped piezoelectric material and an electrode film formed on the surface of the piezoelectric material as warp and weft. A device is disclosed.
  • Japanese Patent No. 6025854 discloses a piezoelectric element in which two conductive fibers and one piezoelectric fiber have contact points with each other and are formed in a woven shape with three fibers.
  • a piezoelectric or electrostatic transducer has a pair of electrodes.
  • the electrode is formed of a flexible material while having a sheet shape without through holes, there is a problem that the cost of the electrode is increased.
  • the cost of the electrode material can be reduced.
  • a transducer includes a piezoelectric sheet or a dielectric sheet, electrode sheets disposed on both surfaces thereof, and a protective sheet made of an insulating material covering both outer surfaces thereof.
  • the piezoelectric sheet or dielectric sheet and the electrode sheet are bonded or integrally formed, and further, the electrode sheet and the protective sheet are bonded or integrally formed.
  • the first transducer includes a first electrode sheet having a plurality of first through holes, a second electrode sheet having a plurality of second through holes, and arranged to face the first electrode sheet; A piezoelectric sheet or dielectric sheet disposed between at least the first inner surface of the first electrode sheet and the second inner surface of the second electrode sheet, and the first outer surface side of the first electrode sheet. A first protective sheet and a second protective sheet covering the second outer surface side of the second electrode sheet.
  • the first electrode sheet includes the first through hole
  • the second electrode sheet includes the second through hole. That is, the first electrode sheet and the second electrode sheet are not configured to have the electrode material on the entire surface, but are configured to have no electrode material in part. Therefore, the first electrode sheet and the second electrode sheet can reduce the cost by reducing the electrode material.
  • first protective sheet is bonded to the piezoelectric sheet or the dielectric sheet through the first through hole of the first electrode sheet, or the second protective sheet is the second electrode sheet. It adheres to the piezoelectric sheet or the dielectric sheet through the second through hole.
  • the adhesion of the first protective sheet to the piezoelectric sheet or the dielectric sheet can be achieved by utilizing the fact that the first electrode sheet has the first through hole.
  • the first electrode sheet interposed between the first protective sheet and the piezoelectric sheet or dielectric sheet is attached to the first protective sheet by bonding the first protective sheet to the piezoelectric sheet or dielectric sheet. It becomes integral with the piezoelectric sheet or dielectric sheet. Therefore, the above configuration is applied as compared with the case where an adhesive layer is required between the piezoelectric sheet or dielectric sheet and the first electrode sheet and between the first electrode sheet and the first protective sheet. By doing so, the number of adhesive layers can be reduced. As a result, it is possible to reduce costs by reducing the number of manufacturing steps.
  • the second protective sheet can be adhered to the piezoelectric sheet or the dielectric sheet by utilizing the fact that the second electrode sheet has the second through hole.
  • the second electrode sheet interposed between the second protective sheet and the piezoelectric sheet or dielectric sheet is attached to the second protective sheet by adhering the second protective sheet to the piezoelectric sheet or dielectric sheet. It becomes integral with the piezoelectric sheet or dielectric sheet. Therefore, the above configuration is applied compared to the case where an adhesive layer is required between the piezoelectric sheet or dielectric sheet and the second electrode sheet and between the second electrode sheet and the second protective sheet. By doing so, the number of adhesive layers can be reduced. As a result, it is possible to reduce costs by reducing the number of manufacturing steps.
  • a second transducer includes a first electrode sheet having a plurality of first through holes, a piezoelectric sheet or dielectric sheet disposed at least on the first inner surface side of the first electrode sheet, and the first A first protective sheet covering a first outer surface side of one electrode sheet, wherein the first protective sheet is the piezoelectric sheet or the dielectric sheet via the first through hole of the first electrode sheet. Adhere to. Thereby, there exists an effect by the 1st electrode sheet and the 1st protection sheet in the 1st transducer mentioned above.
  • the vibration presentation device includes a piezoelectric or electrostatic actuator, a first elastic body stacked on the actuator, and a second elastic body stacked on the opposite side of the actuator from the first elastic body.
  • a piezoelectric or dielectric sensor disposed around the actuator, and an actuator laminate formed by the actuator, the first elastic body, and the second elastic body in a state of being compressed in the laminating direction; and A cover that holds the first elastic body and the second elastic body in a state where the first elastic body and the second elastic body are compressed more than the actuator, and the pressing force is applied when the pressing force in the stacking direction is applied to the cover from the outside.
  • One of the actuator and the sensor is the transducer described above. Thereby, cost reduction can be achieved in the vibration presenting apparatus.
  • FIG. 2 is a cross-sectional view taken along the line II-II in FIG.
  • FIG. 3 is a sectional view taken along line III-III in FIG. 1.
  • FIG. 3 is an exploded view of constituent members of the transducer 1 shown in FIG. 2. It is an exploded view of the structural member of the transducer 1 shown in FIG. It is a top view of transducer 100 of a second embodiment. It is VII-VII sectional drawing of FIG. It is sectional drawing of the transducer 200 of 3rd embodiment. It is an exploded view of the structural member of the transducer 200 shown in FIG. It is sectional drawing of the transducer 300 of 4th embodiment.
  • the transducer 1 is a piezoelectric transducer or a dielectric transducer.
  • the transducer 1 is an actuator that generates vibration, sound, or the like, or a sensor that detects an external pushing force or the like using the piezoelectric effect of a piezoelectric body.
  • the transducer 1 functions as a piezoelectric actuator, a voltage is applied to the electrodes, whereby the piezoelectric body is deformed, and vibration is generated along with the deformation of the piezoelectric body.
  • the transducer 1 functions as a piezoelectric sensor, a voltage is generated between the electrodes due to deformation of the piezoelectric body due to an input such as an external pushing force, and the voltage is detected. Detects external pushing force.
  • the transducer 1 is an actuator that generates a vibration or a sound or a sensor that detects a pushing force from the outside by using a change in capacitance between electrodes.
  • the transducer 1 functions as an electrostatic actuator, when a voltage is applied to the electrodes, the dielectric is deformed according to the potential between the electrodes, and vibration is generated as the dielectric is deformed.
  • the transducer 1 functions as an electrostatic sensor, the dielectric is deformed due to an external pushing force, vibration, sound, or the like, so that a voltage corresponding to the capacitance between the electrodes is obtained. By detecting it, the pushing force from the outside is detected.
  • the transducer 1 (1-2. Configuration of transducer 1)
  • the transducer 1 When the transducer 1 is a piezoelectric type, the transducer 1 includes a first electrode sheet 11, a second electrode sheet 12, a piezoelectric body sheet 13, a first protective sheet 14, and a second protective sheet 15. Moreover, the transducer 1 is provided with the 1st electrode sheet 11, the 2nd electrode sheet 12, the dielectric material sheet 13, the 1st protective sheet 14, and the 2nd protective sheet 15 in the case of an electrostatic type.
  • the first electrode sheet 11 and the second electrode sheet 12 are conductive cloths.
  • the first electrode sheet 11 and the second electrode sheet 12 have flexibility and elasticity while having conductivity.
  • the first electrode sheet 11 and the second electrode sheet 12 are a woven fabric or a non-woven fabric formed of conductive fibers.
  • the conductive fiber is formed by coating the surface of a flexible fiber with a conductive material.
  • the conductive fiber is formed, for example, by plating copper, nickel or the like on the surface of a resin fiber such as polyethylene.
  • the 1st electrode sheet 11 is provided with a plurality of 1st penetration holes 11a (shown in Drawing 1, Drawing 3, and Drawing 5) by forming cloth with a fiber.
  • the second electrode sheet 12 includes a plurality of second through holes 12a (shown in FIGS. 2 and 4).
  • the first electrode sheet 11 and the second electrode sheet 12 are conductive woven fabrics will be described as an example, but a conductive nonwoven fabric can also be applied.
  • the first electrode sheet 11 is formed by weaving conductive fibers as warp and weft. A region surrounded by the warp and weft is the first through hole 11a. The same applies to the second through hole 12a.
  • the first electrode sheet 11 and the second electrode sheet 12 are formed to have the same size and are arranged to face each other.
  • the surface facing the second electrode sheet 12 is referred to as a first inner surface
  • the surface opposite to the second electrode sheet 12 is referred to as a first outer surface.
  • the surface on the side facing the 1st electrode sheet 11 is called a 2nd inner surface
  • the surface on the opposite side to the 1st electrode sheet 11 is called a 2nd outer surface.
  • the piezoelectric sheet 13 or the dielectric sheet 13 is formed of an elastically deformable piezoelectric material or dielectric material.
  • the piezoelectric sheet 13 or the dielectric sheet 13 has a sheet shape and is formed in the same outer shape as that of the first electrode sheet 11.
  • the piezoelectric sheet 13 or the dielectric sheet 13 has a structure that expands and contracts in the thickness direction and expands and contracts in the plane direction along with expansion and contraction in the thickness direction.
  • the piezoelectric sheet 13 or the dielectric sheet 13 is disposed between the first inner surface of the first electrode sheet 11 and the second inner surface of the second electrode sheet 12.
  • the piezoelectric sheet 13 and the dielectric sheet 13 are not bonded to the first electrode sheet 11 and the second electrode sheet 12, but are in contact with each other.
  • the first protective sheet 14 and the second protective sheet 15 are made of an insulating material.
  • the first protective sheet 14 and the second protective sheet 15 are formed of the same material as the dielectric sheet 13. That is, the first protective sheet 14 and the second protective sheet 15 are made of an elastomer.
  • the first protective sheet 14 covers the first outer surface side of the first electrode sheet 11.
  • the surface on the first electrode sheet 11 side is a surface that can be bonded.
  • an adhesive may be applied to the surface of the first protective sheet 14.
  • the adhesive includes an adhesive directly applied to the first protective sheet 14 and a heat-weldable material (thermoplastic material) disposed on the surface side of the first protective sheet 14.
  • the surface of the first protective sheet 14 may be formed of a heat-weldable material (thermoplastic material).
  • the first protective sheet 14 itself may be made of a heat-weldable material.
  • the 1st protective sheet 14 adhere attaches on the 1st outer surface of the 1st electrode sheet 11, as shown in FIG.
  • the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 through the first through hole 11a of the first electrode sheet 11 as shown in FIG. That is, the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 while being inserted through the first through hole 11a.
  • the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13, so that the first electrode sheet 11 is engaged with the first protective sheet 14 in a state of being locked to the first protective sheet 14. It is sandwiched between the body sheet 13 and the dielectric sheet 13.
  • the first protective sheet 14 When the adhesive is applied to the first protective sheet 14, the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by pressurizing the first protective sheet 14.
  • a heat-weldable material thermoplastic material
  • the heat-weldable material is melted by heating and pressing the heat-weldable material. Then, the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by solidifying.
  • the first protective sheet 14 When the first protective sheet 14 is formed of a heat-weldable material (thermoplastic material), the first protective sheet 14 is melted by pressurizing the first protective sheet 14 while being heated. It enters into one through hole 11a. Thereafter, the first protective sheet 14 is solidified, so that the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13.
  • thermoplastic material thermoplastic material
  • the second protective sheet 15 covers the second outer surface side of the second electrode sheet 12.
  • the surface on the second electrode sheet 12 side is a surface that can be bonded.
  • an adhesive may be applied to the surface of the second protective sheet 15.
  • the adhesive includes an adhesive directly applied to the second protective sheet 15 and a heat-weldable material (thermoplastic material) disposed on the surface side of the second protective sheet 15.
  • the surface of the second protective sheet 15 may be formed of a heat-weldable material (thermoplastic material).
  • the second protective sheet 15 itself may be formed of a heat-weldable material.
  • the 2nd protective sheet 15 adhere attaches on the 2nd outer surface of the 2nd electrode sheet 12, as shown in FIG.
  • the second protective sheet 15 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 through the second through hole 12a of the second electrode sheet 12, as shown in FIG. That is, the second protective sheet 15 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 while being inserted through the second through hole 12a.
  • the second protective sheet 15 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13, so that the second electrode sheet 12 is engaged with the second protective sheet 15 in a state of being locked to the second protective sheet 15. It is sandwiched between the body sheet 13 and the dielectric sheet 13.
  • the second protective sheet 15 When an adhesive is applied to the second protective sheet 15, the second protective sheet 15 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by pressurizing the second protective sheet 15.
  • a heat-weldable material thermoplastic material
  • the heat-weldable material is melted by heating and pressurizing the heat-weldable material. Then, the second protective sheet 15 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by solidifying.
  • the second protective sheet 15 is formed of a heat-weldable material (thermoplastic material)
  • the second protective sheet 15 is melted by pressurizing the second protective sheet 15 while being heated. It enters the two through holes 12a. Thereafter, the second protective sheet 15 is solidified, so that the second protective sheet 15 adheres to the piezoelectric sheet 13 or the dielectric sheet 13.
  • the first electrode sheet 11, the second electrode sheet 12, the piezoelectric sheet 13 or the dielectric sheet 13, the first protective sheet 14, and the second protective sheet 15 are elastically deformable and have flexibility and stretchability. Have. The relationship of the elastic modulus in the thickness direction of each member will be described.
  • the elastic coefficient of the piezoelectric sheet 13 or the dielectric sheet 13 is larger than the elastic coefficients of the first electrode sheet 11 and the second electrode sheet 12. Further, the elastic coefficient of the piezoelectric sheet 13 or the dielectric sheet 13 is larger than the elastic coefficients of the first protective sheet 14 and the second protective sheet 15.
  • the first electrode sheet 11 and the second electrode sheet 12 have the same elastic modulus.
  • the first protective sheet 14 and the second protective sheet 15 have the same elastic modulus.
  • the first electrode sheet 11 and the first protective sheet 14 may have any elasticity.
  • the elastic modulus of the second electrode sheet 12 and the second protective sheet 15 does not matter.
  • the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 through the first through hole 11a of the first electrode sheet 11.
  • the elastic coefficient of the first protective sheet 14 is smaller than the elastic coefficient of the piezoelectric sheet 13 or the dielectric sheet 13. For this reason, the first protective sheet 14 is greatly deformed because both are bonded, and the piezoelectric sheet 13 or the dielectric sheet 13 is suppressed from being largely deformed.
  • the elastic coefficient of the first electrode sheet 11 is smaller than that of the piezoelectric sheet 13 or the dielectric sheet 13. Therefore, in a state where the first electrode sheet 11 is pressed against the piezoelectric sheet 13 or the dielectric sheet 13, the first electrode sheet 11 is relatively easily deformed, and the piezoelectric sheet 13 or the dielectric sheet 13 is relatively deformed. Hard to do.
  • the second protective sheet 15 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 through the second through hole 12 a of the second electrode sheet 12.
  • the elastic coefficient of the second protective sheet 15 is smaller than the elastic coefficient of the piezoelectric sheet 13 or the dielectric sheet 13. For this reason, the second protective sheet 15 is greatly deformed because the two are bonded, and the piezoelectric sheet 13 or the dielectric sheet 13 is suppressed from being largely deformed.
  • the elastic coefficient of the second electrode sheet 12 is smaller than that of the piezoelectric sheet 13 or the dielectric sheet 13. Therefore, in a state where the second electrode sheet 12 is pressed against the piezoelectric sheet 13 or the dielectric sheet 13, the second electrode sheet 12 is relatively easily deformed, and the piezoelectric sheet 13 or the dielectric sheet 13 is relatively deformed. Hard to do.
  • the piezoelectric sheet 13 or the dielectric sheet 13 is not greatly deformed in the thickness direction. . Therefore, in the initial state, the thickness of the piezoelectric sheet 13 or the dielectric sheet 13 can be prevented from greatly differing depending on the position.
  • the transducer 1 can have stable characteristics.
  • the first electrode sheet 11 and the first protective sheet 14 are laminated on the one surface of the piezoelectric sheet 13 or the dielectric sheet 13 in the order of the first electrode sheet 11 and the first protective sheet 14.
  • the second electrode sheet 12 and the second protective sheet 15 are laminated on the other surface of the piezoelectric sheet 13 or the dielectric sheet 13 in the order of the second electrode sheet 12 and the second protective sheet 15.
  • the laminate is compressed by hot pressing. Then, by pressing the first protective sheet 14 toward the piezoelectric sheet 13 or the dielectric sheet 13, the first protective sheet 14 is deformed and enters the first through hole 11 a of the first electrode sheet 11. The surface of the first protective sheet 14 is bonded to the first electrode sheet 11 and is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by thermal welding. At the same time, by pressing the second protective sheet 15 toward the piezoelectric sheet 13 or the dielectric sheet 13, the second protective sheet 15 is deformed and enters the second through hole 12 a of the second electrode sheet 12. The surface of the second protective sheet 15 is bonded to the second electrode sheet 12 and is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by heat welding. Finally, when the transducer 1 is a piezoelectric type, a polling process is performed.
  • transducer 1 When the transducer 1 functions as a piezoelectric actuator, applying a periodic voltage to the first electrode sheet 11 and the second electrode sheet 12 causes the piezoelectric sheet 13 to have a thickness direction and a surface direction according to the voltage. Extends and contracts. The vibration caused by the expansion / contraction deformation of the piezoelectric sheet 13 is the vibration output as the actuator.
  • the dielectric sheet 13 expands and contracts in the thickness direction by applying a periodic voltage to the first electrode sheet 11 and the second electrode sheet 12. .
  • the dielectric sheet 13 is compressed and deformed.
  • the thickness of the dielectric sheet 13 is reduced, and the size of the dielectric sheet 13 in the surface direction is increased.
  • the dielectric sheet 13 returns to the original thickness. That is, the thickness of the dielectric sheet 13 increases and the size of the dielectric sheet 13 in the surface direction decreases.
  • the piezoelectric sheet 13 expands and contracts in the thickness direction due to the application of an external force, so that the gap between the first electrode sheet 11 and the second electrode sheet 12 is increased. Voltage is generated. With this voltage, it can be detected that the piezoelectric sheet 13 has been deformed in the thickness direction, and that an external force has been applied.
  • the dielectric sheet 13 expands and contracts in the thickness direction due to the application of an external force, so that the first electrode sheet 11 and the second electrode sheet 12 The capacitance between them changes.
  • the output voltage corresponding to the capacitance between the electrodes can be detected.
  • the output voltage can detect that the dielectric sheet 13 is deformed in the thickness direction, and can detect that an external force is applied.
  • the first electrode sheet 11 includes the first through holes 11a
  • the second electrode sheet 12 includes the second through holes 12a. That is, the first electrode sheet 11 and the second electrode sheet 12 are not configured to have the electrode material on the entire surface, but are configured to have no electrode material in part. Therefore, the first electrode sheet 11 and the second electrode sheet 12 can reduce the cost by reducing the electrode material.
  • the first protective sheet 14 is adhered to the piezoelectric sheet 13 or the dielectric sheet 13 by utilizing the fact that the first electrode sheet 11 has the first through hole 11a. It has gained.
  • the first electrode sheet 11 interposed between the first protective sheet 14 and the piezoelectric sheet 13 or the dielectric sheet 13 by bonding the first protective sheet 14 to the piezoelectric sheet 13 or the dielectric sheet 13. Is integrated with the first protective sheet 14 and is integrated with the piezoelectric sheet 13 or the dielectric sheet 13. Therefore, compared to the case where the adhesive layer is necessary both between the piezoelectric sheet 13 or the dielectric sheet 13 and the first electrode sheet 11 and between the first electrode sheet 11 and the first protective sheet 14.
  • the number of adhesive layers can be reduced. As a result, it is possible to reduce costs by reducing the number of manufacturing steps.
  • the second protective sheet 15 can be adhered to the piezoelectric sheet 13 or the dielectric sheet 13 by utilizing the fact that the second electrode sheet 12 has the second through hole 12a.
  • the second electrode sheet 12 interposed between the second protective sheet 15 and the piezoelectric sheet 13 or the dielectric sheet 13 by bonding the second protective sheet 15 to the piezoelectric sheet 13 or the dielectric sheet 13. Is integrated with the second protective sheet 15 and integrated with the piezoelectric sheet 13 or the dielectric sheet 13. Therefore, compared with the case where the adhesive layer is necessary both between the piezoelectric sheet 13 or the dielectric sheet 13 and the second electrode sheet 12 and between the second electrode sheet 12 and the second protective sheet 15.
  • the number of adhesive layers can be reduced. As a result, it is possible to reduce costs by reducing the number of manufacturing steps.
  • the first protective sheet 14 may be formed of a heat-weldable material (thermoplastic material) and may be bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by applying heat.
  • the second protective sheet 15 may be formed of a heat-weldable material (thermoplastic material) and may be bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by applying heat.
  • Some adhesives contain volatile organic compounds (VOC).
  • VOC volatile organic compounds
  • adhesion can be performed without using an adhesive or solvent containing VOC. Therefore, it is possible to suppress the discharge of VOC.
  • manufacturing costs can be reduced by not using a dedicated material such as an adhesive.
  • the transducer 100 of the second embodiment includes a first electrode sheet 111, a second electrode sheet 112, a piezoelectric sheet 13 or a dielectric sheet 13, a first protective sheet 14, and first Two protective sheets 15 are provided.
  • the first electrode sheet 111 and the second electrode sheet 112 are not conductive cloth but thin film punching metal having flexibility and stretchability.
  • the first electrode sheet 111 includes a plurality of first through holes 111a
  • the second electrode sheet 112 includes a plurality of second through holes 112a.
  • the first through-hole 111a and the second through-hole 112a are rectangular, but are not limited to a rectangle and may be circular or other shapes.
  • the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 through the first through hole 111a of the first electrode sheet 111.
  • the second protective sheet 15 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 through the second through hole 112 a of the second electrode sheet 112.
  • the transducer 200 of the third embodiment includes a first electrode sheet 11, a second electrode sheet 12, a first piezoelectric sheet 213a or a first dielectric sheet 213a, and a second piezoelectric sheet. 213b or the second dielectric sheet 213b, the first protective sheet 14, and the second protective sheet 15.
  • the first piezoelectric sheet 213 a or the first dielectric sheet 213 a is integrally formed on the first inner surface side of the first electrode sheet 11.
  • the first piezoelectric sheet 213 a or the first dielectric sheet 213 a does not exist on the first outer surface side of the first electrode sheet 11.
  • the first piezoelectric sheet 213a or the first dielectric sheet 213a is formed by adhering to the surface of the conductive fiber located on the first inner surface side of the first electrode sheet 11 by dipping, spraying, coating or the like.
  • the 1st piezoelectric material sheet 213a or the 1st dielectric material sheet 213a has a through-hole similarly to the 1st electrode sheet 11.
  • the second piezoelectric sheet 213b or the second dielectric sheet 213b is integrally formed on the second inner surface side of the second electrode sheet 12.
  • the second piezoelectric sheet 213b or the second dielectric sheet 213b does not exist on the second outer surface side of the second electrode sheet 12.
  • the second piezoelectric sheet 213b or the second dielectric sheet 213b is formed by adhering to the surface of the conductive fiber located on the second inner surface side of the second electrode sheet 12 by dipping, spraying, coating or the like. Is done.
  • the 2nd piezoelectric material sheet 213b or the 2nd dielectric material sheet 213b has a through-hole similarly to the 2nd electrode sheet 12.
  • the first protective sheet 14 is adhered to the first outer surface of the first electrode sheet 11. Further, the first protective sheet 14 includes the first piezoelectric sheet 213b or the first piezoelectric sheet 213b or the first dielectric sheet 213a through the first through-hole 11a of the first electrode sheet 11 and the first dielectric sheet 213a. Adhere to the second dielectric sheet 213b.
  • the second protective sheet 15 is adhered to the second outer surface of the second electrode sheet 12. Furthermore, the second protective sheet 15 includes the first piezoelectric sheet 213a or the second piezoelectric sheet 213a or the second dielectric sheet 213b through the second through hole 12a of the second electrode sheet 12 and the through hole of the second dielectric sheet 213b. It adheres to the first dielectric sheet 213a.
  • the transducer 200 when the transducer 200 is a piezoelectric type, the first piezoelectric sheet 213a and the second piezoelectric sheet 213b exist between the first electrode sheet 11 and the second electrode sheet 12, and the first piezoelectric sheet The piezoelectric effect is exhibited by both 213a and the second piezoelectric sheet 213b.
  • the transducer 200 is an electrostatic type, a first dielectric sheet 213a and a second dielectric sheet 213b exist between the first electrode sheet 11 and the second electrode sheet 12, and the first dielectric sheet 213a and The electrostatic capacity is changed by both of the second dielectric sheets 213b.
  • the first piezoelectric sheet 213a or the first dielectric sheet 213a is an integral member with the first electrode sheet 11
  • the second piezoelectric sheet 213b or the second dielectric sheet 213b is the second electrode. It becomes an integral member with the sheet 12. Accordingly, since the piezoelectric sheet or the dielectric sheet does not exist alone, the number of parts is reduced.
  • the transducer 300 of the fourth embodiment includes a first electrode sheet 11, a second electrode sheet 12, a first piezoelectric sheet 313a or a first dielectric sheet 313a, and a second piezoelectric sheet. 313b or the second dielectric sheet 313b, the first protective sheet 14, and the second protective sheet 15.
  • the first piezoelectric sheet 313 a or the first dielectric sheet 313 a is integrally formed on the first inner surface side and the first outer surface side of the first electrode sheet 11. That is, the first piezoelectric sheet 313a or the first dielectric sheet 313a includes a first inner sheet portion 313a1 and a first outer sheet portion 313a2.
  • the first piezoelectric sheet 313a or the first dielectric sheet 313a is formed by adhering to all the surfaces of the conductive fibers of the first electrode sheet 11 by dipping, spraying, coating, or the like.
  • the first piezoelectric sheet 313 a or the first dielectric sheet 313 a has a through hole as in the first electrode sheet 11.
  • the second piezoelectric sheet 313b or the second dielectric sheet 313b is integrally formed on the second inner surface side and the second outer surface side of the second electrode sheet 12. That is, the second piezoelectric sheet 313b or the second dielectric sheet 313b includes a second inner sheet portion 313b1 and a second outer sheet portion 313b2. Similarly, the second piezoelectric sheet 313b or the second dielectric sheet 313b is formed by adhering to all surfaces of the conductive fibers of the second electrode sheet 12 by dipping, spraying, coating, or the like. And the 2nd piezoelectric material sheet 313b or the 2nd dielectric material sheet 313b has a through-hole similarly to the 2nd electrode sheet 12. FIG.
  • the first protective sheet 14 is adhered to the first outer sheet portion 313a2 of the first piezoelectric sheet 313a or the first dielectric sheet 313a. Further, the first protective sheet 14 is connected to the second piezoelectric sheet 313b via the first through hole 11a of the first electrode sheet 11 (corresponding to the through hole of the first piezoelectric sheet 313a or the first dielectric sheet 313a). Alternatively, the second dielectric sheet 313b is bonded to the second inner sheet portion 313b1.
  • the second protective sheet 15 is adhered to the second outer sheet portion 313b2 in the second piezoelectric sheet 313b or the second dielectric sheet 313b. Further, the second protective sheet 15 passes through the second through hole 12a of the second electrode sheet 12 (corresponding to the through hole of the second piezoelectric sheet 313b or the second dielectric sheet 313b), and the first piezoelectric sheet 313a. Or it adhere
  • the first inner sheet portion 313a1 and the second inner sheet portion 313b1 exist between the first electrode sheet 11 and the second electrode sheet 12, and the first inner sheet portion 313a1 and the second inner sheet portion 313b1.
  • the transducer 400 of the fifth embodiment includes a first electrode sheet 11, a second electrode sheet 12, a piezoelectric sheet 413 or a dielectric sheet 413, a first protective sheet 14, Two protective sheets 15 are provided.
  • the piezoelectric sheet 413 or the dielectric sheet 413 is integrally formed on the first inner surface side of the first electrode sheet 11.
  • the piezoelectric sheet 413 or the dielectric sheet 413 does not exist on the first outer surface side of the first electrode sheet 11.
  • the piezoelectric sheet 413 or the dielectric sheet 413 is formed by adhering to the surface of the conductive fiber located on the first inner surface side of the first electrode sheet 11 by dipping, spraying, coating or the like.
  • the piezoelectric material sheet 413 or the dielectric material sheet 413 has a through-hole similarly to the 1st electrode sheet 11.
  • the first protective sheet 14 is adhered to the first outer surface of the first electrode sheet 11. Further, the first protective sheet 14 is bonded to the piezoelectric sheet 413 or the dielectric sheet 413.
  • the second protective sheet 15 is adhered to the second outer surface of the second electrode sheet 12. Further, the second protective sheet 15 is bonded to the piezoelectric sheet 413 or the dielectric sheet 413 through the second through hole 12 a of the second electrode sheet 12.
  • the piezoelectric material or the dielectric material is not attached to the second electrode sheet 12. Therefore, the adhesion of the piezoelectric material or the dielectric material is only on the first electrode sheet 11. Therefore, the manufacturing cost can be reduced.
  • the transducer 500 of the sixth embodiment includes a first electrode sheet 11, a second electrode sheet 12, a piezoelectric sheet 513 or a dielectric sheet 513, a first protective sheet 14, Two protective sheets 15 are provided.
  • the piezoelectric sheet 513 or the dielectric sheet 513 is integrally formed on the first inner surface side and the first outer surface side of the first electrode sheet 11. That is, the piezoelectric sheet 513 or the dielectric sheet 513 includes an inner sheet portion 513a and an outer sheet portion 513b.
  • the piezoelectric sheet 513 or the dielectric sheet 513 is formed by adhering to all the surfaces of the conductive fibers of the first electrode sheet 11 by dipping, spraying, coating, or the like. And the piezoelectric material sheet 513 or the dielectric material sheet 513 has a through-hole like the 1st electrode sheet 11.
  • the first protective sheet 14 is adhered to the outer sheet portion 513b of the piezoelectric sheet 513 or the dielectric sheet 513.
  • the second protective sheet 15 is adhered to the second outer surface of the second electrode sheet 12. Furthermore, the second protective sheet 15 is bonded to the inner sheet portion 513 a of the piezoelectric sheet 513 or the dielectric sheet 513 through the second through hole 12 a of the second electrode sheet 12.
  • the transducer 1 described above includes the first electrode sheet 11, the second electrode sheet 12, the piezoelectric sheet 13 or the dielectric sheet 13, the first protective sheet 14, and the second protective sheet 15.
  • the transducer 1 is not limited to this configuration, and the transducer 1 includes the first electrode sheet 11, the piezoelectric sheet 13 or the dielectric sheet 13, and the first protective sheet 14, and includes the second electrode sheet 12 and the second protective sheet 15 described above. It can also be set as the structure which is not provided.
  • the transducer 1 can replace the second electrode sheet 12 with a conductive material having no through hole.
  • the conductive material can be replaced with a plate material, a shaft, a pipe, or the like formed of a metal or a conductive material other than metal. Even in this case, the effects of the first electrode sheet 11 and the first protective sheet 14 are exhibited.
  • the present invention can be similarly applied to the transducers 100, 200, 300, 400, and 500 of other embodiments.
  • transducer 1 etc. A vibration presentation device 600 using the above-described transducers 1, 100, 200, 300, 400, 500 (hereinafter referred to as “transducer 1 etc.”) will be described with reference to FIGS.
  • the thickness of each member is exaggerated for easy understanding. Therefore, actually, the thickness of the vibration presentation device 600 in the vertical direction in FIGS. 16 and 17 is very thin.
  • the vibration presenting device 600 has a function as a sensor that detects a pressing force from the outside, and also has a function as an actuator that presents vibration. For example, when a pressing force is applied by a human finger or the like, the vibration presentation device 600 detects the pressing force and then presents a tactile vibration to the finger.
  • the vibration presentation device 600 includes an actuator 610, a first conduction unit 620, a second conduction unit 630, a first elastic body 640, a second elastic body 650, a sensor 660, and a third elastic body. 601, a cover 670, a conducting wire 680, and a control device 690.
  • At least one of the actuator 610 and the sensor 660 applies the transducer 1 described above. That is, only the actuator 610, only the sensor 660, or both the actuator 610 and the sensor 660 apply the transducer 1 or the like. In the present embodiment, both the actuator 610 and the sensor 660 apply the transducer 1 or the like.
  • the actuator 610 includes a plurality of actuator units 610a, 610b, and 610c.
  • the actuator 610 includes three actuator units 610a, 610b, and 610c, and is formed by stacking three actuator units 610a, 610b, and 610c.
  • the actuator 610 may include only one actuator unit 610a.
  • Each actuator unit 610a, 610b, 610c has a plurality of transducers 1 and the like stacked thereon. Moreover, as shown in FIG. 19, in each actuator unit 610a, 610b, 610c, the 1st electrode sheet 11 and the 2nd electrode sheet 12 are offset in the left-right direction (longitudinal direction). Specifically, a part of the first electrode sheet 11 and a part of the second electrode sheet 12 are arranged to face each other. In the 1st electrode sheet 11 and the 2nd electrode sheet 12, the remaining one part which does not mutually oppose is located in the other side on the basis of the opposing part.
  • the first electrode sheet 11 and the second electrode sheet 12 are opposed to each other at the central portion in the left-right direction, whereas the first electrode sheet 11 is present at the left portion, whereas the second electrode sheet is present. 12 does not exist, and in the right side portion, the second electrode sheet 12 exists, whereas the first electrode sheet 11 does not exist.
  • the length in the longitudinal direction of the piezoelectric sheet 13 or the dielectric sheet 13 is a range in which the first electrode sheet 11 and the second electrode sheet 12 face each other, only the first electrode sheet 11. It is formed to have a length facing the existing range and the entire range where only the second electrode sheet 12 exists.
  • the first protective sheet 14 covers the entire surface of the first electrode sheet 11 and the exposed portion of the piezoelectric sheet 13 or the dielectric sheet 13.
  • the second protective sheet 15 covers the plurality of second electrode sheets 12 and the exposed portions of the piezoelectric sheet 13 or the dielectric sheet 13 over the entire surface.
  • Each actuator unit 610a, 610b, 610c has an actuator body 616 located at the center in the left-right direction in FIG. 18, a first terminal 617 located on the left side in FIG. 18, and a second terminal 618 located on the right side in FIG. With.
  • the first terminal 617 is a positive potential terminal in the actuator body 616
  • the second terminal 618 is a ground potential terminal in the actuator body 616.
  • the first terminal 617 and the second terminal 618 extend to opposite sides with respect to the actuator body 616.
  • the 1st electrode sheet 11 is provided with the 1st counter electrode part 611a located in the center part of a horizontal direction, and the 1st terminal electrode part 611b extended from the 1st counter electrode part 611a.
  • the 2nd electrode sheet 12 is provided with the 2nd counter electrode part 612a located in the center part of a horizontal direction, and the 2nd terminal electrode part 612c extended from the 2nd counter electrode part 612a.
  • the first counter electrode portion 611a and the second counter electrode portion 612a are opposed to each other.
  • the direction in which the first terminal electrode portion 611b extends from the first counter electrode portion 611a and the direction in which the second terminal electrode portion 612c extends from the second counter electrode portion 612a are opposite directions.
  • the piezoelectric sheet 13 and the dielectric sheet 13 include a piezoelectric body 613a or a dielectric body 613a, a first extending part 613b, and a second extending part 613c.
  • the piezoelectric body 613a or the dielectric body 613a is interposed between the first counter electrode portion 611a and the second counter electrode portion 612a.
  • the first extending portion 613b extends from the piezoelectric body 613a or the dielectric body 613a and is interposed between the plurality of first terminal electrode portions 611b.
  • the second extending portion 613c extends from the piezoelectric body 613a or the dielectric body 613a and is interposed between the plurality of second terminal electrode portions 612c.
  • the first terminal electrode portion 611 b exists outside the actuator body 616, but the first extending portion 613 b that is a part of the piezoelectric sheet 13 and the dielectric sheet 13 is provided outside the actuator body 616.
  • the first terminal electrode portion 611b and the first extension portion 613b are stacked. Therefore, the total thickness of the first terminal electrode portion 611b and the first extending portion 613b is only a thickness of the second electrode sheet 12 that is smaller than that of the actuator body 616. Therefore, it can suppress that a big deformation force arises in the boundary vicinity of the 1st terminal electrode part 611b and the 1st counter electrode part 611a. As a result, the component part of the conductive path connected to the first counter electrode part 611a can have high durability. The same applies to the second terminal electrode portion 612c.
  • the first protection sheet 14 includes a first protection body 614a, a first protection_first terminal protection unit 614b, and a first protection_second terminal protection unit 614c.
  • the first protective body 614a covers the first counter electrode portion 611a.
  • the first protection_first terminal protection part 614b covers the first terminal electrode part 611b.
  • the first protection_second terminal protection part 614c covers the second terminal electrode part 612c.
  • the second protection sheet 15 includes a second protection body 615a, a second protection_first terminal protection unit 615b, and a second protection_second terminal protection unit 615c.
  • the second protective body 615a covers the first counter electrode portion 611a.
  • the second protection_first terminal protection part 615b covers the first terminal electrode part 611b.
  • the second protection_second terminal protection part 615c covers the second terminal electrode part 612c.
  • the first conductive portion 620 is formed into a sheet shape from an elastically deformable material (for example, an elastomer), and is bent into an L shape.
  • the first conductive portion 620 may be formed by blending a conductive filler in the elastomer, or may be a conductive cloth similarly to the first electrode sheet 11.
  • One side of the L-shape of the first conduction part 620 is formed in a direction intersecting (for example, orthogonal to) the planar surface of the actuator body 616.
  • One side of the L shape of the first conduction part 620 is in contact with the end face of the first terminal 617.
  • one side of the L shape of the first conduction part 620 is in contact with the end of the first terminal electrode part 611b and the end of the first extension part 613b. Accordingly, the first conduction portion 620 is electrically connected to the ends of the plurality of first terminal electrode portions 611b.
  • the other side of the L-shape of the first conducting part 620 extends in a direction away from the actuator body 616 and is formed in parallel with the planar surface direction of the actuator body 616.
  • the other side of the L shape of the first conduction part 620 is electrically connected to the conducting wire 680.
  • the second conduction part 630 is formed into a sheet shape from an elastically deformable material (for example, an elastomer) and is bent into an L shape.
  • electrical_connection part 630 is shape
  • One side of the L-shape of the second conducting portion 630 is formed in a direction intersecting (orthogonal to) the planar surface of the actuator body 616. Then, one side of the L shape of the second conducting portion 630 is in contact with the end surface of the second terminal 618. Specifically, one side of the L shape of the second conducting portion 630 is in contact with the end of the second terminal electrode portion 612c and the end of the second extending portion 613c. Accordingly, the second conduction portion 630 is electrically connected to the ends of the plurality of second terminal electrode portions 612c.
  • the other side of the L-shape of the second conducting portion 630 extends in a direction away from the actuator body 616 and is formed in parallel with the planar surface direction of the actuator body 616.
  • the other side of the L shape of the second conducting portion 630 is electrically connected to the conducting wire 680.
  • the first conductive portion 620 can easily form a conductive path between the plurality of first terminal electrode portions 611b.
  • the second conductive portion 630 can easily form a conductive path between the plurality of second terminal electrode portions 612c.
  • electrical_connection part 630 are elastically deformable, it can track the deformation
  • the first elastic body 640 is disposed in contact with one planar surface (upper surface in FIG. 16) of the actuator body 616.
  • the second elastic body 650 is disposed in contact with the other planar surface of the actuator body 616 (the lower surface in FIG. 16), that is, the opposite side of the actuator body 616 from the first elastic body 640. That is, the first elastic body 640 and the second elastic body 650 are respectively disposed on both end surfaces (upper and lower surfaces in FIG. 16) facing away from the planar surface orthogonal direction of the actuator body 616.
  • the first elastic body 640 has both end surfaces facing away from each other in the planar surface direction of the actuator body 616 (surfaces where the first terminal 617 and the second terminal 618 are not present (the left and right sides in FIG. Surface)).
  • the first elastic body 640 includes one planar surface of the first terminal 617 (upper surface in FIG. 16) and one planar surface of the second terminal 618 (upper surface in FIG. 16). ) Is placed in contact with.
  • the second elastic body 650 is disposed in contact with the other planar surface of the first terminal 617 (the lower surface in FIG. 16) and the other planar surface of the second terminal 618 (the lower surface in FIG. 16).
  • the first elastic body 640 is disposed in contact with all the L-shaped outer surfaces of the first conducting portion 620 and all the L-shaped outer surfaces of the second conducting portion 630.
  • the first elastic body 640 and the second elastic body 650 are made of materials having small elastic moduli E (640) and E (650) and small loss coefficients tan ⁇ (640) and tan ⁇ (650) .
  • the first elastic body 640 and the second elastic body 650 are preferably made of a soft material having low damping characteristics.
  • the first elastic body 640 and the second elastic body 650 have elastic moduli E (640) and E (650) smaller than the elastic moduli E1 (616) in the stacking direction of the actuator main body 616 (planar surface orthogonal direction).
  • the elastic modulus E (640) of the first elastic body 640 is smaller than the elastic modulus E2 (616) in the surface direction of the actuator body 616.
  • Sensor 660 applies transducer 1 or the like.
  • the sensor 660 is disposed around the actuator 610.
  • the sensor 660 is stacked on an actuator stack (610, 640, 650) formed by the actuator 610, the first elastic body 640, and the second elastic body 650.
  • the sensor 660 is stacked on the opposite side of the second elastic body 650 from the actuator 610.
  • the sensor 660 may be arranged in parallel with the actuator 610 in a direction orthogonal to the stacking direction of the actuators 610.
  • the third elastic body 601 is laminated on the actuator laminated body (610, 640, 650) and the sensor 660, and is arranged on the opposite side of the actuator laminated body (610, 640, 650) in the sensor 660.
  • the third elastic body 601 is made of the same material as the first elastic body 640 and the second elastic body 650. Therefore, the elastic modulus E (601) and the loss coefficient tan ⁇ (601) of the third elastic body 601 are the elastic modulus E (640) and the loss coefficient tan ⁇ (640) of the first elastic body 640 and the elasticity of the second elastic body 650. It is the same as the rate E (650) and the loss factor tan ⁇ (650) .
  • the sensor 660 extends from the sensor main body 660a and the sensor main body 660a disposed between the actuator laminate (610, 640, 650) and the third elastic body 601. And a sensor terminal portion 660b that is bent so as to wrap around to the opposite side of the sensor main body portion 660a in the third elastic body 601.
  • the sensor main body 660a corresponds to the transducer 1 and the like, and the sensor terminal 660b is electrically connected to the first electrode sheet 11 and the second electrode sheet 12 in the sensor main body 660a.
  • the sensor terminal portion 660b is located between the third elastic body 601 and the conducting wire 680.
  • the cover 670 surrounds the actuator 610, the first conduction part 620, the second conduction part 630, the first elastic body 640, the second elastic body 650, the sensor 660, and the third elastic body 601.
  • Various materials such as metal and resin are applied to the cover 670.
  • the cover 670 transmits the pressing force to the sensor 660 when a pressing force in the stacking direction of the actuator stack (610, 640, 650) is applied from the outside. Further, the cover 670 vibrates due to the vibration generated by the actuator 610 and imparts vibration to a human finger that imparts a pressing force to the cover 670.
  • the cover 670 includes a first cover 671 as a pedestal and a second cover 672 as a member attached to the first cover 671 and applied with a pushing force.
  • the first cover 671 and the second cover 672 include the actuator main body 616, the first elastic body 640, the second elastic body 650, the sensor 660, and the third elastic body 601 in the stacking direction of the actuator stack (610, 640, 650). It is held in a compressed state (vertical direction in FIG. 16). In this state, the first elastic body 640, the second elastic body 650, and the third elastic body 601 are in the actuator body in the stacking direction of the actuator stack (610, 640, 650) from the relationship of the elastic modulus E of each member.
  • the third elastic body 601 and the first cover 671 are illustrated as non-contact due to the presence of the sensor terminal portion 660b, but in reality, the sensor terminal portion 660b is thin, The three elastic bodies 601 and the first cover 671 are in contact with each other in a pressed state.
  • the first cover 671 holds the actuator body 616 and the first elastic body 640 in a compressed state in the surface direction of the actuator body 616 (left and right direction in FIG. 17). In this state, the first elastic body 640 is compressed more than the actuator body 616 in the surface direction of the actuator body 616 due to the elastic modulus E of each member.
  • the conducting wire 680 is disposed on the same plane of the first cover 671 located on the inner surface of the cover 670.
  • the conducting wire 680 is formed on the first cover 671 by printing, but a cable wire or the like can also be used.
  • the control device 690 drives the actuator 610 to generate vibration. Note that the control device 690 is disposed outside the cover 670, but may be disposed inside the cover 670.
  • the vibration presentation device 600 Since the vibration presenting device 600 is composed of the transducer 1 and the like, the cost can be reduced.
  • the vibration presentation device 600 includes a sensor 660 and an actuator 610. Therefore, the vibration presentation device 600 has very good responsiveness from detection of the pushing force to presentation of vibration. And the vibration presentation apparatus 600 can present a big vibration, without providing the sensor 660 and the actuator 610 which detect pushing force, without enlarging.
  • the actuator 610 and the sensor 660 are stacked in the direction in which the pushing force is applied. Therefore, the detection position of the pushing force and the vibration application position are the same position. Therefore, when a human finger applies a pressing force to the cover 670, vibration can be directly applied to the finger itself.
  • the vibration presentation device 600 may be configured not to include the third elastic body 601.

Abstract

Provided are a transducer in which it is possible to lessen an adhesive layer while reducing an electrode material, and a vibration presenting device in which said transducer is used. A transducer (1) comprising a first electrode sheet (11) provided with a plurality of first through-holes (11a), a second electrode sheet (12) provided with a plurality of second through-holes (12a), a piezoelectric sheet (13) or dielectric sheet (13) disposed between a first inner surface of the first electrode sheet (11) and a second inner surface of the second electrode sheet (12), a first protective sheet (14) that covers a first outer-surface side of the first electrode sheet (11), and a second protective sheet (15) that covers a second outer-surface side of the second electrode sheet (12). The first protective sheet (14) adheres to the piezoelectric sheet (13) or dielectric sheet (13) via the first through-holes (11a) in the first electrode sheet (11).

Description

トランスデューサ及びそれを用いた振動提示装置Transducer and vibration presentation apparatus using the same
　本発明は、トランスデューサ及びそれを用いた振動提示装置に関するものである。 The present invention relates to a transducer and a vibration presentation device using the transducer.
　特開平５－１７２８３９号公報には、圧電フィルムと、当該圧電フィルムの両面に配置されるメッシュ状の２枚の電極と、各電極の両外側に板状の剛体からなる２枚の支持板とを備える圧電型振動センサが開示されている。特許第４９２２４８２号公報には、紐状の圧電性材料と当該圧電性材料の表面に形成した電極膜とを備える紐状の圧電ファイバを縦糸及び横糸として用いて、織物に形成された圧電性織物デバイスが開示されている。特許第６０２５８５４号公報には、２本の導電性繊維及び１本の圧電性繊維が互いに接点を有しつつ、３本の繊維により織物状に形成された圧電素子が開示されている。 JP-A-5-172839 discloses a piezoelectric film, two mesh-like electrodes arranged on both sides of the piezoelectric film, and two support plates made of plate-like rigid bodies on both outer sides of each electrode. There is disclosed a piezoelectric vibration sensor comprising: Japanese Patent No. 4922482 discloses a piezoelectric fabric formed on a fabric using a string-shaped piezoelectric fiber including a string-shaped piezoelectric material and an electrode film formed on the surface of the piezoelectric material as warp and weft. A device is disclosed. Japanese Patent No. 6025854 discloses a piezoelectric element in which two conductive fibers and one piezoelectric fiber have contact points with each other and are formed in a woven shape with three fibers.
　圧電型又は静電型のトランスデューサは、一対の電極を有する。電極が、貫通孔の存在しないシート状としつつ、柔軟性を有する材料により形成する場合には、電極のコストが高くなるという問題がある。特開平５－１７２８３９号公報に記載のように電極シートをメッシュ状に形成することで、電極材料の低コスト化を図ることが可能となる。 A piezoelectric or electrostatic transducer has a pair of electrodes. In the case where the electrode is formed of a flexible material while having a sheet shape without through holes, there is a problem that the cost of the electrode is increased. By forming the electrode sheet in a mesh shape as described in JP-A-5-172839, the cost of the electrode material can be reduced.
　ところで、トランスデューサは、圧電体シート又は誘電体シートと、その両面に配置された電極シートと、さらにその両外面を被覆する絶縁材からなる保護シートとを備えるものがある。圧電体シート又は誘電体シートと、電極シートとが、接着されるか、若しくは、一体成形され、さらに、電極シートと保護シートとが、接着されるか、若しくは、一体成形される。このように、接着又は一体成形が、圧電体シート又は誘電体シートの片面側に、複数存在する。そこで、接着層を少なくすることにより、製造工数を低減することが求められる。 By the way, a transducer includes a piezoelectric sheet or a dielectric sheet, electrode sheets disposed on both surfaces thereof, and a protective sheet made of an insulating material covering both outer surfaces thereof. The piezoelectric sheet or dielectric sheet and the electrode sheet are bonded or integrally formed, and further, the electrode sheet and the protective sheet are bonded or integrally formed. Thus, there are a plurality of adhesions or integral moldings on one side of the piezoelectric sheet or dielectric sheet. Therefore, it is required to reduce the number of manufacturing steps by reducing the adhesive layer.
　本発明は、電極材料を減少させつつ、接着層を少なくすることができるトランスデューサ及びそれを用いた振動提示装置を提供することを目的とする。 It is an object of the present invention to provide a transducer capable of reducing the adhesive layer while reducing the electrode material, and a vibration presentation device using the transducer.
　（１．第一のトランスデューサ）
　本発明に係る第一のトランスデューサは、複数の第一貫通孔を備える第一電極シートと、複数の第二貫通孔を備え、前記第一電極シートに対向して配置される第二電極シートと、少なくとも前記第一電極シートの第一内面と前記第二電極シートの第二内面との間に配置された圧電体シート又は誘電体シートと、前記第一電極シートの第一外面側を被覆する第一保護シートと、前記第二電極シートの第二外面側を被覆する第二保護シートとを備える。 (1. First transducer)
The first transducer according to the present invention includes a first electrode sheet having a plurality of first through holes, a second electrode sheet having a plurality of second through holes, and arranged to face the first electrode sheet; A piezoelectric sheet or dielectric sheet disposed between at least the first inner surface of the first electrode sheet and the second inner surface of the second electrode sheet, and the first outer surface side of the first electrode sheet. A first protective sheet and a second protective sheet covering the second outer surface side of the second electrode sheet.
　上記のとおり、第一電極シートが、第一貫通孔を備え、第二電極シートが、第二貫通孔を備える。つまり、第一電極シート及び第二電極シートが、全面に電極材料を有する構成ではなく、一部に電極材料を有しない構成となる。そのため、第一電極シート及び第二電極シートが、電極材料を減少させることにより、低コスト化を図ることができる。 As described above, the first electrode sheet includes the first through hole, and the second electrode sheet includes the second through hole. That is, the first electrode sheet and the second electrode sheet are not configured to have the electrode material on the entire surface, but are configured to have no electrode material in part. Therefore, the first electrode sheet and the second electrode sheet can reduce the cost by reducing the electrode material.
　さらに、前記第一保護シートが、前記第一電極シートの前記第一貫通孔を介して前記圧電体シート又は前記誘電体シートに接着する、若しくは、前記第二保護シートが、前記第二電極シートの前記第二貫通孔を介して前記圧電体シート又は前記誘電体シートに接着する。 Further, the first protective sheet is bonded to the piezoelectric sheet or the dielectric sheet through the first through hole of the first electrode sheet, or the second protective sheet is the second electrode sheet. It adheres to the piezoelectric sheet or the dielectric sheet through the second through hole.
　第一保護シートを圧電体シート又は誘電体シートに接着させることは、第一電極シートが第一貫通孔を有することを利用することにより為し得ている。この場合、第一保護シートが圧電体シート又は誘電体シートに接着することで、第一保護シートと圧電体シート又は誘電体シートとの間に介在する第一電極シートは、第一保護シートに一体となると共に、圧電体シート又は誘電体シートに一体となる。従って、接着層が、圧電体シート又は誘電体シートと第一電極シートとの間、及び、第一電極シートと第一保護シートとの間の両方ともに必要な場合に比べると、上記構成を適用することで接着層の数を低減できる。その結果、製造工数を低減できることで、低コスト化を図ることができる。 The adhesion of the first protective sheet to the piezoelectric sheet or the dielectric sheet can be achieved by utilizing the fact that the first electrode sheet has the first through hole. In this case, the first electrode sheet interposed between the first protective sheet and the piezoelectric sheet or dielectric sheet is attached to the first protective sheet by bonding the first protective sheet to the piezoelectric sheet or dielectric sheet. It becomes integral with the piezoelectric sheet or dielectric sheet. Therefore, the above configuration is applied as compared with the case where an adhesive layer is required between the piezoelectric sheet or dielectric sheet and the first electrode sheet and between the first electrode sheet and the first protective sheet. By doing so, the number of adhesive layers can be reduced. As a result, it is possible to reduce costs by reducing the number of manufacturing steps.
　また、第二保護シートを圧電体シート又は誘電体シートに接着させることは、第二電極シートが第二貫通孔を有することを利用することにより為し得ている。この場合、第二保護シートが圧電体シート又は誘電体シートに接着することで、第二保護シートと圧電体シート又は誘電体シートとの間に介在する第二電極シートは、第二保護シートに一体となると共に、圧電体シート又は誘電体シートに一体となる。従って、接着層が、圧電体シート又は誘電体シートと第二電極シートとの間、及び、第二電極シートと第二保護シートとの間の両方ともに必要な場合に比べると、上記構成を適用することで接着層の数を低減できる。その結果、製造工数を低減できることで、低コスト化を図ることができる。 Further, the second protective sheet can be adhered to the piezoelectric sheet or the dielectric sheet by utilizing the fact that the second electrode sheet has the second through hole. In this case, the second electrode sheet interposed between the second protective sheet and the piezoelectric sheet or dielectric sheet is attached to the second protective sheet by adhering the second protective sheet to the piezoelectric sheet or dielectric sheet. It becomes integral with the piezoelectric sheet or dielectric sheet. Therefore, the above configuration is applied compared to the case where an adhesive layer is required between the piezoelectric sheet or dielectric sheet and the second electrode sheet and between the second electrode sheet and the second protective sheet. By doing so, the number of adhesive layers can be reduced. As a result, it is possible to reduce costs by reducing the number of manufacturing steps.
　（２．第二のトランスデューサ）
　本発明に係る第二のトランスデューサは、複数の第一貫通孔を備える第一電極シートと、少なくとも前記第一電極シートの第一内面側に配置された圧電体シート又は誘電体シートと、前記第一電極シートの第一外面側を被覆する第一保護シートと、を備え、前記第一保護シートが、前記第一電極シートの前記第一貫通孔を介して前記圧電体シート又は前記誘電体シートに接着する。これにより、上述した第一のトランスデューサにおける第一電極シート及び第一保護シートによる効果を奏する。 (2. Second transducer)
A second transducer according to the present invention includes a first electrode sheet having a plurality of first through holes, a piezoelectric sheet or dielectric sheet disposed at least on the first inner surface side of the first electrode sheet, and the first A first protective sheet covering a first outer surface side of one electrode sheet, wherein the first protective sheet is the piezoelectric sheet or the dielectric sheet via the first through hole of the first electrode sheet. Adhere to. Thereby, there exists an effect by the 1st electrode sheet and the 1st protection sheet in the 1st transducer mentioned above.
　（３．振動提示装置）
　本発明に係る振動提示装置は、圧電型又は静電型のアクチュエータと、前記アクチュエータに積層される第一弾性体と、前記アクチュエータの前記第一弾性体と反対側に積層される第二弾性体と、前記アクチュエータの周囲に配置される圧電型又は誘電型のセンサと、前記アクチュエータ、前記第一弾性体、前記第二弾性体により形成されるアクチュエータ積層体を積層方向に圧縮した状態で、且つ、前記第一弾性体及び前記第二弾性体を前記アクチュエータより大きく圧縮させた状態で保持するカバーであり、外部から前記カバーに前記積層方向の押込力が付与された場合に前記押込力を前記センサに伝達すると共に、前記アクチュエータが発生した振動により振動する前記カバーと、を備える。そして、前記アクチュエータ及び前記センサの何れか一方は、上述したトランスデューサである。これにより、振動提示装置において、低コスト化を図ることができる。 (3. Vibration presentation device)
The vibration presentation device according to the present invention includes a piezoelectric or electrostatic actuator, a first elastic body stacked on the actuator, and a second elastic body stacked on the opposite side of the actuator from the first elastic body. A piezoelectric or dielectric sensor disposed around the actuator, and an actuator laminate formed by the actuator, the first elastic body, and the second elastic body in a state of being compressed in the laminating direction; and A cover that holds the first elastic body and the second elastic body in a state where the first elastic body and the second elastic body are compressed more than the actuator, and the pressing force is applied when the pressing force in the stacking direction is applied to the cover from the outside. And a cover that transmits to the sensor and vibrates due to vibration generated by the actuator. One of the actuator and the sensor is the transducer described above. Thereby, cost reduction can be achieved in the vibration presenting apparatus.
第一実施形態のトランスデューサ１の平面図である。It is a top view of transducer 1 of a first embodiment. 図１のII－II断面図である。FIG. 2 is a cross-sectional view taken along the line II-II in FIG. 図１のIII－III断面図である。FIG. 3 is a sectional view taken along line III-III in FIG. 1. 図２に示すトランスデューサ１の構成部材の分解図である。FIG. 3 is an exploded view of constituent members of the transducer 1 shown in FIG. 2. 図３に示すトランスデューサ１の構成部材の分解図である。It is an exploded view of the structural member of the transducer 1 shown in FIG. 第二実施形態のトランスデューサ１００の平面図である。It is a top view of transducer 100 of a second embodiment. 図６のVII－VII断面図である。It is VII-VII sectional drawing of FIG. 第三実施形態のトランスデューサ２００の断面図である。It is sectional drawing of the transducer 200 of 3rd embodiment. 図８に示すトランスデューサ２００の構成部材の分解図である。It is an exploded view of the structural member of the transducer 200 shown in FIG. 第四実施形態のトランスデューサ３００の断面図である。It is sectional drawing of the transducer 300 of 4th embodiment. 図１０に示すトランスデューサ３００の構成部材の分解図である。It is an exploded view of the structural member of the transducer 300 shown in FIG. 第五実施形態のトランスデューサ４００の断面図である。It is sectional drawing of the transducer 400 of 5th embodiment. 図１２に示すトランスデューサ４００の構成部材の分解図である。It is an exploded view of the structural member of the transducer 400 shown in FIG. 第六実施形態のトランスデューサ５００の断面図である。It is sectional drawing of the transducer 500 of 6th embodiment. 図１４に示すトランスデューサ５００の構成部材の分解図である。It is an exploded view of the structural member of the transducer 500 shown in FIG. 第七実施形態の振動提示装置６００の断面図である。It is sectional drawing of the vibration presentation apparatus 600 of 7th embodiment. 図１６のXVII－XVII断面図である。It is XVII-XVII sectional drawing of FIG. ３つのアクチュエータユニット６１０ａ，６１０ｂ，６１０ｃの分解斜視図である。It is a disassembled perspective view of three actuator units 610a, 610b, and 610c. 個々のアクチュエータユニット６１０ａ，６１０ｂ，６１０ｃの分解斜視図である。It is a disassembled perspective view of each actuator unit 610a, 610b, 610c.
　（１．第一実施形態）
　（１－１．トランスデューサ１の概要）
　トランスデューサ１は、圧電型のトランスデューサ又は誘電型のトランスデューサである。トランスデューサ１は、圧電型の場合には、圧電体の圧電効果を利用して、振動や音などを発生させるアクチュエータ、又は、外部からの押込力などを検出するセンサである。トランスデューサ１が圧電型のアクチュエータとして機能する場合には、電極に電圧が印加されることにより、圧電体が変形し、圧電体の変形に伴って振動が発生する。トランスデューサ１が圧電型のセンサとして機能する場合には、外部からの押込力などの入力に起因して圧電体が変形することにより、電極間に電圧が発生し、当該電圧を検出することで、外部からの押込力などを検出する。 (1. First embodiment)
(1-1. Overview of transducer 1)
The transducer 1 is a piezoelectric transducer or a dielectric transducer. In the case of a piezoelectric type, the transducer 1 is an actuator that generates vibration, sound, or the like, or a sensor that detects an external pushing force or the like using the piezoelectric effect of a piezoelectric body. When the transducer 1 functions as a piezoelectric actuator, a voltage is applied to the electrodes, whereby the piezoelectric body is deformed, and vibration is generated along with the deformation of the piezoelectric body. When the transducer 1 functions as a piezoelectric sensor, a voltage is generated between the electrodes due to deformation of the piezoelectric body due to an input such as an external pushing force, and the voltage is detected. Detects external pushing force.
　トランスデューサ１は、静電型の場合には、電極間の静電容量の変化を利用して、振動や音などを発生させるアクチュエータ、又は、外部からの押込力などを検出するセンサである。トランスデューサ１が静電型のアクチュエータとして機能する場合には、電極に電圧が印加されることにより、電極間の電位に応じて誘電体が変形し、誘電体の変形に伴って振動が発生する。トランスデューサ１が静電型のセンサとして機能する場合には、外部からの押込力や振動や音などの入力に起因して誘電体が変形することにより、電極間の静電容量に応じた電圧を検出することで、外部からの押込力などを検出する。 In the case of an electrostatic type, the transducer 1 is an actuator that generates a vibration or a sound or a sensor that detects a pushing force from the outside by using a change in capacitance between electrodes. When the transducer 1 functions as an electrostatic actuator, when a voltage is applied to the electrodes, the dielectric is deformed according to the potential between the electrodes, and vibration is generated as the dielectric is deformed. When the transducer 1 functions as an electrostatic sensor, the dielectric is deformed due to an external pushing force, vibration, sound, or the like, so that a voltage corresponding to the capacitance between the electrodes is obtained. By detecting it, the pushing force from the outside is detected.
　（１－２．トランスデューサ１の構成）
　トランスデューサ１について、図１－図５を参照して説明する。トランスデューサ１は、圧電型の場合には、第一電極シート１１、第二電極シート１２、圧電体シート１３、第一保護シート１４、及び、第二保護シート１５を備える。また、トランスデューサ１は、静電型の場合には、第一電極シート１１、第二電極シート１２、誘電体シート１３、第一保護シート１４、及び、第二保護シート１５を備える。 (1-2. Configuration of transducer 1)
The transducer 1 will be described with reference to FIGS. When the transducer 1 is a piezoelectric type, the transducer 1 includes a first electrode sheet 11, a second electrode sheet 12, a piezoelectric body sheet 13, a first protective sheet 14, and a second protective sheet 15. Moreover, the transducer 1 is provided with the 1st electrode sheet 11, the 2nd electrode sheet 12, the dielectric material sheet 13, the 1st protective sheet 14, and the 2nd protective sheet 15 in the case of an electrostatic type.
　第一電極シート１１及び第二電極シート１２は、導電性の布である。第一電極シート１１及び第二電極シート１２は、導電性を有しつつ、柔軟性及び伸縮性を有する。第一電極シート１１及び第二電極シート１２は、導電性繊維により形成された織物又は不織布である。ここで、導電性繊維は、柔軟性を有する繊維の表面を導電材料により被覆することにより形成される。導電性繊維は、例えば、ポリエチレン等の樹脂繊維の表面に、銅やニッケルなどをメッキすることにより形成される。 The first electrode sheet 11 and the second electrode sheet 12 are conductive cloths. The first electrode sheet 11 and the second electrode sheet 12 have flexibility and elasticity while having conductivity. The first electrode sheet 11 and the second electrode sheet 12 are a woven fabric or a non-woven fabric formed of conductive fibers. Here, the conductive fiber is formed by coating the surface of a flexible fiber with a conductive material. The conductive fiber is formed, for example, by plating copper, nickel or the like on the surface of a resin fiber such as polyethylene.
　第一電極シート１１は、繊維により布を形成されることで、複数の第一貫通孔１１ａ（図１、図３及び図５に示す）を備える。同様に、第二電極シート１２は、複数の第二貫通孔１２ａ（図２及び図４に示す）を備える。 The 1st electrode sheet 11 is provided with a plurality of 1st penetration holes 11a (shown in Drawing 1, Drawing 3, and Drawing 5) by forming cloth with a fiber. Similarly, the second electrode sheet 12 includes a plurality of second through holes 12a (shown in FIGS. 2 and 4).
　以下には、第一電極シート１１及び第二電極シート１２は、導電性織物である場合を例に挙げるが、導電性不織布を適用することもできる。第一電極シート１１は、例えば、図１に示すように、導電性織物の場合には、導電性繊維を縦糸と横糸として織ることにより形成されている。縦糸と横糸により囲まれる領域が、第一貫通孔１１ａとなる。第二貫通孔１２ａも同様である。 Hereinafter, a case where the first electrode sheet 11 and the second electrode sheet 12 are conductive woven fabrics will be described as an example, but a conductive nonwoven fabric can also be applied. For example, as shown in FIG. 1, the first electrode sheet 11 is formed by weaving conductive fibers as warp and weft. A region surrounded by the warp and weft is the first through hole 11a. The same applies to the second through hole 12a.
　第一電極シート１１と第二電極シート１２は、同程度の大きさに形成されており、対向して配置されている。ここで、第一電極シート１１において、第二電極シート１２に対向する側の面を第一内面と称し、第二電極シート１２と反対側の面を第一外面と称する。また、第二電極シート１２において、第一電極シート１１に対向する側の面を第二内面と称し、第一電極シート１１と反対側の面を第二外面と称する。 The first electrode sheet 11 and the second electrode sheet 12 are formed to have the same size and are arranged to face each other. Here, in the first electrode sheet 11, the surface facing the second electrode sheet 12 is referred to as a first inner surface, and the surface opposite to the second electrode sheet 12 is referred to as a first outer surface. Moreover, in the 2nd electrode sheet 12, the surface on the side facing the 1st electrode sheet 11 is called a 2nd inner surface, and the surface on the opposite side to the 1st electrode sheet 11 is called a 2nd outer surface.
　圧電体シート１３又は誘電体シート１３は、弾性変形可能な圧電材料又は誘電材料により形成される。圧電体シート１３又は誘電体シート１３は、シート状で、第一電極シート１１の外形と同様の外形に形成されている。圧電体シート１３又は誘電体シート１３は、厚み方向に伸縮すると共に、厚み方向の伸縮に伴って面方向に伸縮する構造を有する。圧電体シート１３又は誘電体シート１３は、第一電極シート１１の第一内面と第二電極シート１２の第二内面との間に配置されている。圧電体シート１３及び誘電体シート１３は、第一電極シート１１及び第二電極シート１２に対して非接着であるが、接触している。 The piezoelectric sheet 13 or the dielectric sheet 13 is formed of an elastically deformable piezoelectric material or dielectric material. The piezoelectric sheet 13 or the dielectric sheet 13 has a sheet shape and is formed in the same outer shape as that of the first electrode sheet 11. The piezoelectric sheet 13 or the dielectric sheet 13 has a structure that expands and contracts in the thickness direction and expands and contracts in the plane direction along with expansion and contraction in the thickness direction. The piezoelectric sheet 13 or the dielectric sheet 13 is disposed between the first inner surface of the first electrode sheet 11 and the second inner surface of the second electrode sheet 12. The piezoelectric sheet 13 and the dielectric sheet 13 are not bonded to the first electrode sheet 11 and the second electrode sheet 12, but are in contact with each other.
　第一保護シート１４及び第二保護シート１５は、絶縁性を有する材料が適用される。本実施形態においては、第一保護シート１４及び第二保護シート１５は、誘電体シート１３と同様の材料により形成されている。つまり、第一保護シート１４及び第二保護シート１５は、エラストマーにより形成されている。 The first protective sheet 14 and the second protective sheet 15 are made of an insulating material. In the present embodiment, the first protective sheet 14 and the second protective sheet 15 are formed of the same material as the dielectric sheet 13. That is, the first protective sheet 14 and the second protective sheet 15 are made of an elastomer.
　第一保護シート１４は、第一電極シート１１の第一外面側を被覆する。第一保護シート１４において、第一電極シート１１側の面は、接着可能な面である。例えば、第一保護シート１４の面に接着剤が塗布されるようにしてもよい。接着剤には、第一保護シート１４に直接塗布する接着剤、第一保護シート１４の当該面側に配置した熱溶着可能な材料（熱可塑性材料）を含む。 The first protective sheet 14 covers the first outer surface side of the first electrode sheet 11. In the first protective sheet 14, the surface on the first electrode sheet 11 side is a surface that can be bonded. For example, an adhesive may be applied to the surface of the first protective sheet 14. The adhesive includes an adhesive directly applied to the first protective sheet 14 and a heat-weldable material (thermoplastic material) disposed on the surface side of the first protective sheet 14.
　また、第一保護シート１４の少なくとも当該面が熱溶着可能な材料（熱可塑性材料）により形成されるようにしてもよい。もちろん、第一保護シート１４そのものが、熱溶着可能な材料により形成されるようにしてもよい。そして、第一保護シート１４は、図２に示すように、第一電極シート１１の第一外面に接着する。 Further, at least the surface of the first protective sheet 14 may be formed of a heat-weldable material (thermoplastic material). Of course, the first protective sheet 14 itself may be made of a heat-weldable material. And the 1st protective sheet 14 adhere | attaches on the 1st outer surface of the 1st electrode sheet 11, as shown in FIG.
　さらに、第一保護シート１４は、図３に示すように、第一電極シート１１の第一貫通孔１１ａを介して圧電体シート１３又は誘電体シート１３に接着する。つまり、第一保護シート１４は、第一貫通孔１１ａに挿通された状態で、圧電体シート１３又は誘電体シート１３に接着する。そして、第一保護シート１４が圧電体シート１３又は誘電体シート１３に接着することで、第一電極シート１１は、第一保護シート１４に係止された状態で、第一保護シート１４と圧電体シート１３又は誘電体シート１３との間に挟まれる。 Furthermore, the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 through the first through hole 11a of the first electrode sheet 11 as shown in FIG. That is, the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 while being inserted through the first through hole 11a. The first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13, so that the first electrode sheet 11 is engaged with the first protective sheet 14 in a state of being locked to the first protective sheet 14. It is sandwiched between the body sheet 13 and the dielectric sheet 13.
　第一保護シート１４に接着剤が塗布されている場合には、第一保護シート１４を加圧することにより、第一保護シート１４が圧電体シート１３又は誘電体シート１３に接着する。第一保護シート１４の当該面側に接着剤として熱溶着可能な材料（熱可塑性材料）を配置する場合には、熱溶着可能な材料を加熱且つ加圧することにより、熱溶着可能な材料が溶融して固化することにより、第一保護シート１４と圧電体シート１３又は誘電体シート１３とを接着する。 When the adhesive is applied to the first protective sheet 14, the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by pressurizing the first protective sheet 14. When a heat-weldable material (thermoplastic material) is disposed on the surface side of the first protective sheet 14 as an adhesive, the heat-weldable material is melted by heating and pressing the heat-weldable material. Then, the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by solidifying.
　第一保護シート１４が熱溶着可能な材料（熱可塑性材料）により形成されている場合には、第一保護シート１４を加熱しながら加圧することで、第一保護シート１４が溶融して、第一貫通孔１１ａに入り込む。その後、第一保護シート１４が固化することで、第一保護シート１４は、圧電体シート１３又は誘電体シート１３に接着する。 When the first protective sheet 14 is formed of a heat-weldable material (thermoplastic material), the first protective sheet 14 is melted by pressurizing the first protective sheet 14 while being heated. It enters into one through hole 11a. Thereafter, the first protective sheet 14 is solidified, so that the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13.
　第二保護シート１５は、第二電極シート１２の第二外面側を被覆する。第二保護シート１５において、第二電極シート１２側の面は、接着可能な面である。例えば、第二保護シート１５の面に接着剤が塗布されるようにしてもよい。接着剤には、第二保護シート１５に直接塗布する接着剤、第二保護シート１５の当該面側に配置した熱溶着可能な材料（熱可塑性材料）を含む。 The second protective sheet 15 covers the second outer surface side of the second electrode sheet 12. In the second protective sheet 15, the surface on the second electrode sheet 12 side is a surface that can be bonded. For example, an adhesive may be applied to the surface of the second protective sheet 15. The adhesive includes an adhesive directly applied to the second protective sheet 15 and a heat-weldable material (thermoplastic material) disposed on the surface side of the second protective sheet 15.
　また、第二保護シート１５の少なくとも当該面が熱溶着可能な材料（熱可塑性材料）により形成されるようにしてもよい。もちろん、第二保護シート１５そのものが、熱溶着可能な材料により形成されるようにしてもよい。そして、第二保護シート１５は、図３に示すように、第二電極シート１２の第二外面に接着する。 Further, at least the surface of the second protective sheet 15 may be formed of a heat-weldable material (thermoplastic material). Of course, the second protective sheet 15 itself may be formed of a heat-weldable material. And the 2nd protective sheet 15 adhere | attaches on the 2nd outer surface of the 2nd electrode sheet 12, as shown in FIG.
　さらに、第二保護シート１５は、図２に示すように、第二電極シート１２の第二貫通孔１２ａを介して圧電体シート１３又は誘電体シート１３に接着する。つまり、第二保護シート１５は、第二貫通孔１２ａに挿通された状態で、圧電体シート１３又は誘電体シート１３に接着する。そして、第二保護シート１５が圧電体シート１３又は誘電体シート１３に接着することで、第二電極シート１２は、第二保護シート１５に係止された状態で、第二保護シート１５と圧電体シート１３又は誘電体シート１３との間に挟まれる。 Furthermore, the second protective sheet 15 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 through the second through hole 12a of the second electrode sheet 12, as shown in FIG. That is, the second protective sheet 15 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 while being inserted through the second through hole 12a. The second protective sheet 15 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13, so that the second electrode sheet 12 is engaged with the second protective sheet 15 in a state of being locked to the second protective sheet 15. It is sandwiched between the body sheet 13 and the dielectric sheet 13.
　第二保護シート１５に接着剤が塗布されている場合には、第二保護シート１５を加圧することにより、第二保護シート１５が圧電体シート１３又は誘電体シート１３に接着する。第二保護シート１５の当該面側に接着剤として熱溶着可能な材料（熱可塑性材料）を配置する場合には、熱溶着可能な材料を加熱且つ加圧することにより、熱溶着可能な材料が溶融して固化することにより、第二保護シート１５と圧電体シート１３又は誘電体シート１３とを接着する。 When an adhesive is applied to the second protective sheet 15, the second protective sheet 15 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by pressurizing the second protective sheet 15. When a heat-weldable material (thermoplastic material) is disposed as an adhesive on the surface side of the second protective sheet 15, the heat-weldable material is melted by heating and pressurizing the heat-weldable material. Then, the second protective sheet 15 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by solidifying.
　第二保護シート１５が熱溶着可能な材料（熱可塑性材料）により形成されている場合には、第二保護シート１５を加熱しながら加圧することで、第二保護シート１５が溶融して、第二貫通孔１２ａに入り込む。その後、第二保護シート１５が固化することで、第二保護シート１５は、圧電体シート１３又は誘電体シート１３に接着する。 When the second protective sheet 15 is formed of a heat-weldable material (thermoplastic material), the second protective sheet 15 is melted by pressurizing the second protective sheet 15 while being heated. It enters the two through holes 12a. Thereafter, the second protective sheet 15 is solidified, so that the second protective sheet 15 adheres to the piezoelectric sheet 13 or the dielectric sheet 13.
　（１－３．弾性係数）
　第一電極シート１１、第二電極シート１２、圧電体シート１３又は誘電体シート１３、第一保護シート１４、及び、第二保護シート１５は、弾性変形可能であって、柔軟性及び伸縮性を有する。各部材の厚み方向の弾性係数の関係について説明する。 (1-3. Elastic modulus)
The first electrode sheet 11, the second electrode sheet 12, the piezoelectric sheet 13 or the dielectric sheet 13, the first protective sheet 14, and the second protective sheet 15 are elastically deformable and have flexibility and stretchability. Have. The relationship of the elastic modulus in the thickness direction of each member will be described.
　圧電体シート１３又は誘電体シート１３の弾性係数は、第一電極シート１１及び第二電極シート１２の弾性係数より大きい。さらに、圧電体シート１３又は誘電体シート１３の弾性係数は、第一保護シート１４及び第二保護シート１５の弾性係数より大きい。第一電極シート１１と第二電極シート１２とは、同一の弾性係数を有する。第一保護シート１４と第二保護シート１５とは、同一の弾性係数を有する。ここで、第一電極シート１１と第一保護シート１４とにおいて、弾性係数の大小は問わない。同様に、第二電極シート１２と第二保護シート１５とにおいて、弾性係数の大小は問わない。 The elastic coefficient of the piezoelectric sheet 13 or the dielectric sheet 13 is larger than the elastic coefficients of the first electrode sheet 11 and the second electrode sheet 12. Further, the elastic coefficient of the piezoelectric sheet 13 or the dielectric sheet 13 is larger than the elastic coefficients of the first protective sheet 14 and the second protective sheet 15. The first electrode sheet 11 and the second electrode sheet 12 have the same elastic modulus. The first protective sheet 14 and the second protective sheet 15 have the same elastic modulus. Here, the first electrode sheet 11 and the first protective sheet 14 may have any elasticity. Similarly, the elastic modulus of the second electrode sheet 12 and the second protective sheet 15 does not matter.
　上述したように、第一保護シート１４は、第一電極シート１１の第一貫通孔１１ａを介して圧電体シート１３又は誘電体シート１３に接着される。このとき、第一保護シート１４の弾性係数は、圧電体シート１３又は誘電体シート１３の弾性係数より小さい。そのため、両者が接着するために、第一保護シート１４が大きく変形するのに対して、圧電体シート１３又は誘電体シート１３が大きく変形することが抑制される。 As described above, the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 through the first through hole 11a of the first electrode sheet 11. At this time, the elastic coefficient of the first protective sheet 14 is smaller than the elastic coefficient of the piezoelectric sheet 13 or the dielectric sheet 13. For this reason, the first protective sheet 14 is greatly deformed because both are bonded, and the piezoelectric sheet 13 or the dielectric sheet 13 is suppressed from being largely deformed.
　また、第一電極シート１１の弾性係数は、圧電体シート１３又は誘電体シート１３の弾性係数より小さい。そのため、第一電極シート１１が圧電体シート１３又は誘電体シート１３に押し付けられる状態において、第一電極シート１１が相対的に変形しやすく、圧電体シート１３又は誘電体シート１３は相対的に変形しにくい。 The elastic coefficient of the first electrode sheet 11 is smaller than that of the piezoelectric sheet 13 or the dielectric sheet 13. Therefore, in a state where the first electrode sheet 11 is pressed against the piezoelectric sheet 13 or the dielectric sheet 13, the first electrode sheet 11 is relatively easily deformed, and the piezoelectric sheet 13 or the dielectric sheet 13 is relatively deformed. Hard to do.
　また、第二保護シート１５は、第二電極シート１２の第二貫通孔１２ａを介して圧電体シート１３又は誘電体シート１３に接着される。このとき、第二保護シート１５の弾性係数は、圧電体シート１３又は誘電体シート１３の弾性係数より小さい。そのため、両者が接着するために、第二保護シート１５が大きく変形するのに対して、圧電体シート１３又は誘電体シート１３が大きく変形することが抑制される。 Further, the second protective sheet 15 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 through the second through hole 12 a of the second electrode sheet 12. At this time, the elastic coefficient of the second protective sheet 15 is smaller than the elastic coefficient of the piezoelectric sheet 13 or the dielectric sheet 13. For this reason, the second protective sheet 15 is greatly deformed because the two are bonded, and the piezoelectric sheet 13 or the dielectric sheet 13 is suppressed from being largely deformed.
　また、第二電極シート１２の弾性係数は、圧電体シート１３又は誘電体シート１３の弾性係数より小さい。そのため、第二電極シート１２が圧電体シート１３又は誘電体シート１３に押し付けられる状態において、第二電極シート１２が相対的に変形しやすく、圧電体シート１３又は誘電体シート１３は相対的に変形しにくい。 The elastic coefficient of the second electrode sheet 12 is smaller than that of the piezoelectric sheet 13 or the dielectric sheet 13. Therefore, in a state where the second electrode sheet 12 is pressed against the piezoelectric sheet 13 or the dielectric sheet 13, the second electrode sheet 12 is relatively easily deformed, and the piezoelectric sheet 13 or the dielectric sheet 13 is relatively deformed. Hard to do.
　従って、第一保護シート１４及び第二保護シート１５が、圧電体シート１３又は誘電体シート１３に接着した状態において、圧電体シート１３又は誘電体シート１３は、厚み方向に大きく変形することはない。従って、初期状態において、圧電体シート１３又は誘電体シート１３は、位置によって厚みが大きく異ならないようにすることができる。トランスデューサ１は、安定した特性を有することができる。 Therefore, in a state where the first protective sheet 14 and the second protective sheet 15 are bonded to the piezoelectric sheet 13 or the dielectric sheet 13, the piezoelectric sheet 13 or the dielectric sheet 13 is not greatly deformed in the thickness direction. . Therefore, in the initial state, the thickness of the piezoelectric sheet 13 or the dielectric sheet 13 can be prevented from greatly differing depending on the position. The transducer 1 can have stable characteristics.
　（１－４．トランスデューサ１の製造方法）
　トランスデューサ１の製造方法について説明する。図４及び図５に示すように、トランスデューサ１を構成する各部材、すなわち、第一電極シート１１、第二電極シート１２、圧電体シート１３又は誘電体シート１３、第一保護シート１４、及び、第二保護シート１５をそれぞれ準備する。 (1-4. Manufacturing method of transducer 1)
A method for manufacturing the transducer 1 will be described. 4 and 5, each member constituting the transducer 1, that is, the first electrode sheet 11, the second electrode sheet 12, the piezoelectric sheet 13 or the dielectric sheet 13, the first protective sheet 14, and Each of the second protective sheets 15 is prepared.
　続いて、圧電体シート１３又は誘電体シート１３の一方の面に、第一電極シート１１及び第一保護シート１４を、第一電極シート１１、第一保護シート１４の順で積層する。一方、圧電体シート１３又は誘電体シート１３の他方の面に、第二電極シート１２及び第二保護シート１５を、第二電極シート１２、第二保護シート１５の順で積層する。 Subsequently, the first electrode sheet 11 and the first protective sheet 14 are laminated on the one surface of the piezoelectric sheet 13 or the dielectric sheet 13 in the order of the first electrode sheet 11 and the first protective sheet 14. On the other hand, the second electrode sheet 12 and the second protective sheet 15 are laminated on the other surface of the piezoelectric sheet 13 or the dielectric sheet 13 in the order of the second electrode sheet 12 and the second protective sheet 15.
　続いて、ホットプレスにより、積層体を圧縮する。そうすると、第一保護シート１４を圧電体シート１３又は誘電体シート１３に向かって押し付けることで、第一保護シート１４が変形して、第一電極シート１１の第一貫通孔１１ａに入り込む。そして、第一保護シート１４の表面が、熱溶着により、第一電極シート１１に接着すると共に、圧電体シート１３又は誘電体シート１３に接着する。同時に、第二保護シート１５を圧電体シート１３又は誘電体シート１３に向かって押し付けることで、第二保護シート１５が変形して、第二電極シート１２の第二貫通孔１２ａに入り込む。そして、第二保護シート１５の表面が、熱溶着により、第二電極シート１２に接着すると共に、圧電体シート１３又は誘電体シート１３に接着する。最後に、トランスデューサ１が圧電型の場合には、ポーリング処理を行う。 Subsequently, the laminate is compressed by hot pressing. Then, by pressing the first protective sheet 14 toward the piezoelectric sheet 13 or the dielectric sheet 13, the first protective sheet 14 is deformed and enters the first through hole 11 a of the first electrode sheet 11. The surface of the first protective sheet 14 is bonded to the first electrode sheet 11 and is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by thermal welding. At the same time, by pressing the second protective sheet 15 toward the piezoelectric sheet 13 or the dielectric sheet 13, the second protective sheet 15 is deformed and enters the second through hole 12 a of the second electrode sheet 12. The surface of the second protective sheet 15 is bonded to the second electrode sheet 12 and is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by heat welding. Finally, when the transducer 1 is a piezoelectric type, a polling process is performed.
　（１－５．トランスデューサの動作）
　トランスデューサ１が圧電型のアクチュエータとして機能する場合に、第一電極シート１１及び第二電極シート１２に周期的な電圧を印加することで、圧電体シート１３が、電圧に応じて厚み方向及び面方向に伸縮する。圧電体シート１３の伸縮変形による振動が、アクチュエータとして出力される振動となる。 (1-5. Operation of transducer)
When the transducer 1 functions as a piezoelectric actuator, applying a periodic voltage to the first electrode sheet 11 and the second electrode sheet 12 causes the piezoelectric sheet 13 to have a thickness direction and a surface direction according to the voltage. Extends and contracts. The vibration caused by the expansion / contraction deformation of the piezoelectric sheet 13 is the vibration output as the actuator.
　また、トランスデューサ１が静電型のアクチュエータとして機能する場合には、第一電極シート１１及び第二電極シート１２に周期的な電圧を印加することで、誘電体シート１３が厚み方向及に伸縮する。第一電極シート１１と第二電極シート１２に蓄積される電荷が増加すると、誘電体シート１３が圧縮変形する。誘電体シート１３の厚みが小さくなり、誘電体シート１３の面方向の大きさが大きくなる。反対に、第一電極シート１１と第二電極シート１２に蓄積される電荷が減少すると、誘電体シート１３が元の厚みに戻る。つまり、誘電体シート１３の厚みが大きくなり、誘電体シート１３の面方向の大きさが小さくなる。 Further, when the transducer 1 functions as an electrostatic actuator, the dielectric sheet 13 expands and contracts in the thickness direction by applying a periodic voltage to the first electrode sheet 11 and the second electrode sheet 12. . When the charges accumulated in the first electrode sheet 11 and the second electrode sheet 12 increase, the dielectric sheet 13 is compressed and deformed. The thickness of the dielectric sheet 13 is reduced, and the size of the dielectric sheet 13 in the surface direction is increased. On the contrary, when the electric charges accumulated in the first electrode sheet 11 and the second electrode sheet 12 decrease, the dielectric sheet 13 returns to the original thickness. That is, the thickness of the dielectric sheet 13 increases and the size of the dielectric sheet 13 in the surface direction decreases.
　また、トランスデューサ１が圧電型のセンサとして機能する場合には、外力の付与により圧電体シート１３が厚み方向に伸縮変形することに伴って、第一電極シート１１と第二電極シート１２の間に電圧が発生する。当該電圧により、圧電体シート１３が厚み方向に変形したことを検出し、外力が付与されたことを検出できる。 Further, when the transducer 1 functions as a piezoelectric sensor, the piezoelectric sheet 13 expands and contracts in the thickness direction due to the application of an external force, so that the gap between the first electrode sheet 11 and the second electrode sheet 12 is increased. Voltage is generated. With this voltage, it can be detected that the piezoelectric sheet 13 has been deformed in the thickness direction, and that an external force has been applied.
　また、トランスデューサ１が静電型のセンサとして機能する場合には、外力の付与により誘電体シート１３が厚み方向に伸縮変形することに伴って、第一電極シート１１と第二電極シート１２との間の静電容量が変化する。第一電極シート１１と第二電極シート１２との間に所定の周期的な電圧を印加することで、電極間の静電容量に応じた出力電圧を検出できる。当該出力電圧により、誘電体シート１３が厚み方向に変形したことを検出し、外力が付与されたことを検出できる。 Further, when the transducer 1 functions as an electrostatic sensor, the dielectric sheet 13 expands and contracts in the thickness direction due to the application of an external force, so that the first electrode sheet 11 and the second electrode sheet 12 The capacitance between them changes. By applying a predetermined periodic voltage between the first electrode sheet 11 and the second electrode sheet 12, the output voltage corresponding to the capacitance between the electrodes can be detected. The output voltage can detect that the dielectric sheet 13 is deformed in the thickness direction, and can detect that an external force is applied.
　（１－６．効果）
　上記のとおり、第一電極シート１１が、第一貫通孔１１ａを備え、第二電極シート１２が、第二貫通孔１２ａを備える。つまり、第一電極シート１１及び第二電極シート１２が、全面に電極材料を有する構成ではなく、一部に電極材料を有しない構成となる。そのため、第一電極シート１１及び第二電極シート１２が、電極材料を減少させることにより、低コスト化を図ることができる。 (1-6. Effect)
As described above, the first electrode sheet 11 includes the first through holes 11a, and the second electrode sheet 12 includes the second through holes 12a. That is, the first electrode sheet 11 and the second electrode sheet 12 are not configured to have the electrode material on the entire surface, but are configured to have no electrode material in part. Therefore, the first electrode sheet 11 and the second electrode sheet 12 can reduce the cost by reducing the electrode material.
　さらに、トランスデューサ１によれば、第一保護シート１４を圧電体シート１３又は誘電体シート１３に接着させることは、第一電極シート１１が第一貫通孔１１ａを有することを利用することにより為し得ている。この場合、第一保護シート１４が圧電体シート１３又は誘電体シート１３に接着することで、第一保護シート１４と圧電体シート１３又は誘電体シート１３との間に介在する第一電極シート１１は、第一保護シート１４に一体となると共に、圧電体シート１３又は誘電体シート１３に一体となる。従って、接着層が、圧電体シート１３又は誘電体シート１３と第一電極シート１１との間、及び、第一電極シート１１と第一保護シート１４との間の両方ともに必要な場合に比べると、上記構成を適用することで接着層の数を低減できる。その結果、製造工数を低減できることで、低コスト化を図ることができる。 Further, according to the transducer 1, the first protective sheet 14 is adhered to the piezoelectric sheet 13 or the dielectric sheet 13 by utilizing the fact that the first electrode sheet 11 has the first through hole 11a. It has gained. In this case, the first electrode sheet 11 interposed between the first protective sheet 14 and the piezoelectric sheet 13 or the dielectric sheet 13 by bonding the first protective sheet 14 to the piezoelectric sheet 13 or the dielectric sheet 13. Is integrated with the first protective sheet 14 and is integrated with the piezoelectric sheet 13 or the dielectric sheet 13. Therefore, compared to the case where the adhesive layer is necessary both between the piezoelectric sheet 13 or the dielectric sheet 13 and the first electrode sheet 11 and between the first electrode sheet 11 and the first protective sheet 14. By applying the above configuration, the number of adhesive layers can be reduced. As a result, it is possible to reduce costs by reducing the number of manufacturing steps.
　また、第二保護シート１５を圧電体シート１３又は誘電体シート１３に接着させることは、第二電極シート１２が第二貫通孔１２ａを有することを利用することにより為し得ている。この場合、第二保護シート１５が圧電体シート１３又は誘電体シート１３に接着することで、第二保護シート１５と圧電体シート１３又は誘電体シート１３との間に介在する第二電極シート１２は、第二保護シート１５に一体となると共に、圧電体シート１３又は誘電体シート１３に一体となる。従って、接着層が、圧電体シート１３又は誘電体シート１３と第二電極シート１２との間、及び、第二電極シート１２と第二保護シート１５との間の両方ともに必要な場合に比べると、上記構成を適用することで接着層の数を低減できる。その結果、製造工数を低減できることで、低コスト化を図ることができる。 Further, the second protective sheet 15 can be adhered to the piezoelectric sheet 13 or the dielectric sheet 13 by utilizing the fact that the second electrode sheet 12 has the second through hole 12a. In this case, the second electrode sheet 12 interposed between the second protective sheet 15 and the piezoelectric sheet 13 or the dielectric sheet 13 by bonding the second protective sheet 15 to the piezoelectric sheet 13 or the dielectric sheet 13. Is integrated with the second protective sheet 15 and integrated with the piezoelectric sheet 13 or the dielectric sheet 13. Therefore, compared with the case where the adhesive layer is necessary both between the piezoelectric sheet 13 or the dielectric sheet 13 and the second electrode sheet 12 and between the second electrode sheet 12 and the second protective sheet 15. By applying the above configuration, the number of adhesive layers can be reduced. As a result, it is possible to reduce costs by reducing the number of manufacturing steps.
　第一保護シート１４は、熱溶着可能な材料（熱可塑性材料）により形成され、熱が加えられることにより圧電体シート１３又は誘電体シート１３に接着されるようにしてもよい。同様に、第二保護シート１５は、熱溶着可能な材料（熱可塑性材料）により形成され、熱が加えられることにより圧電体シート１３又は誘電体シート１３に接着されるようにしてもよい。 The first protective sheet 14 may be formed of a heat-weldable material (thermoplastic material) and may be bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by applying heat. Similarly, the second protective sheet 15 may be formed of a heat-weldable material (thermoplastic material) and may be bonded to the piezoelectric sheet 13 or the dielectric sheet 13 by applying heat.
　接着剤は、揮発性有機化合物（ＶＯＣ）を含むものが存在する。そして、近年、環境対策として、ＶＯＣの排出の抑制が求められている。そのため、ＶＯＣを含む接着剤や溶剤などを用いないことが求められている。上記のように、熱溶着可能な材料を用いて接着することにより、ＶＯＣを含む接着剤や溶剤を用いることなく、接着が可能となる。従って、ＶＯＣの排出の抑制を図ることができる。さらに、保護シート１４，１５そのものが熱溶着可能な材料とすることで、接着剤等の専用材料を用いないことにより、製造コストを低減することもできる。 Some adhesives contain volatile organic compounds (VOC). In recent years, suppression of VOC emissions has been demanded as an environmental measure. Therefore, it is required not to use an adhesive or a solvent containing VOC. As described above, by using a heat-weldable material, adhesion can be performed without using an adhesive or solvent containing VOC. Therefore, it is possible to suppress the discharge of VOC. Furthermore, by making the protective sheets 14 and 15 themselves heat-weldable materials, manufacturing costs can be reduced by not using a dedicated material such as an adhesive.
　（２．第二実施形態）
　第二実施形態のトランスデューサ１００は、図６及び図７に示すように、第一電極シート１１１、第二電極シート１１２、圧電体シート１３又は誘電体シート１３、第一保護シート１４、及び、第二保護シート１５を備える。第一電極シート１１１及び第二電極シート１１２は、導電性布ではなく、柔軟性及び伸縮性を有する薄膜のパンチングメタルである。第一電極シート１１１は、複数の第一貫通孔１１１ａを備え、第二電極シート１１２は、複数の第二貫通孔１１２ａを備える。第一貫通孔１１１ａ及び第二貫通孔１１２ａは、矩形としているが、矩形に限られず円形や他の形状でもよい。 (2. Second embodiment)
As shown in FIGS. 6 and 7, the transducer 100 of the second embodiment includes a first electrode sheet 111, a second electrode sheet 112, a piezoelectric sheet 13 or a dielectric sheet 13, a first protective sheet 14, and first Two protective sheets 15 are provided. The first electrode sheet 111 and the second electrode sheet 112 are not conductive cloth but thin film punching metal having flexibility and stretchability. The first electrode sheet 111 includes a plurality of first through holes 111a, and the second electrode sheet 112 includes a plurality of second through holes 112a. The first through-hole 111a and the second through-hole 112a are rectangular, but are not limited to a rectangle and may be circular or other shapes.
　この場合も、第一保護シート１４が、第一電極シート１１１の第一貫通孔１１１ａを介して、圧電体シート１３又は誘電体シート１３に接着される。また、第二保護シート１５が、第二電極シート１１２の第二貫通孔１１２ａを介して、圧電体シート１３又は誘電体シート１３に接着される。 Also in this case, the first protective sheet 14 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 through the first through hole 111a of the first electrode sheet 111. Further, the second protective sheet 15 is bonded to the piezoelectric sheet 13 or the dielectric sheet 13 through the second through hole 112 a of the second electrode sheet 112.
　（３．第三実施形態）
　第三実施形態のトランスデューサ２００は、図８及び図９に示すように、第一電極シート１１、第二電極シート１２、第一圧電体シート２１３ａ又は第一誘電体シート２１３ａ、第二圧電体シート２１３ｂ又は第二誘電体シート２１３ｂ、第一保護シート１４、及び、第二保護シート１５を備える。 (3. Third embodiment)
As shown in FIGS. 8 and 9, the transducer 200 of the third embodiment includes a first electrode sheet 11, a second electrode sheet 12, a first piezoelectric sheet 213a or a first dielectric sheet 213a, and a second piezoelectric sheet. 213b or the second dielectric sheet 213b, the first protective sheet 14, and the second protective sheet 15.
　第一圧電体シート２１３ａ又は第一誘電体シート２１３ａは、第一電極シート１１の第一内面側に一体的に形成されている。第一圧電体シート２１３ａ又は第一誘電体シート２１３ａは、第一電極シート１１の第一外面側には存在しない。第一圧電体シート２１３ａ又は第一誘電体シート２１３ａは、ディップ、スプレー、コーティングなどにより、第一電極シート１１の第一内面側に位置する導電性繊維の表面に付着することにより形成される。そして、第一圧電体シート２１３ａ又は第一誘電体シート２１３ａは、第一電極シート１１と同様に貫通孔を有する。 The first piezoelectric sheet 213 a or the first dielectric sheet 213 a is integrally formed on the first inner surface side of the first electrode sheet 11. The first piezoelectric sheet 213 a or the first dielectric sheet 213 a does not exist on the first outer surface side of the first electrode sheet 11. The first piezoelectric sheet 213a or the first dielectric sheet 213a is formed by adhering to the surface of the conductive fiber located on the first inner surface side of the first electrode sheet 11 by dipping, spraying, coating or the like. And the 1st piezoelectric material sheet 213a or the 1st dielectric material sheet 213a has a through-hole similarly to the 1st electrode sheet 11. FIG.
　第二圧電体シート２１３ｂ又は第二誘電体シート２１３ｂは、第二電極シート１２の第二内面側に一体的に形成されている。なお、第二圧電体シート２１３ｂ又は第二誘電体シート２１３ｂは、第二電極シート１２の第二外面側には存在しない。第二圧電体シート２１３ｂ又は第二誘電体シート２１３ｂは、同様に、ディップ、スプレー、コーティングなどにより、第二電極シート１２の第二内面側に位置する導電性繊維の表面に付着することにより形成される。そして、第二圧電体シート２１３ｂ又は第二誘電体シート２１３ｂは、第二電極シート１２と同様に貫通孔を有する。 The second piezoelectric sheet 213b or the second dielectric sheet 213b is integrally formed on the second inner surface side of the second electrode sheet 12. The second piezoelectric sheet 213b or the second dielectric sheet 213b does not exist on the second outer surface side of the second electrode sheet 12. Similarly, the second piezoelectric sheet 213b or the second dielectric sheet 213b is formed by adhering to the surface of the conductive fiber located on the second inner surface side of the second electrode sheet 12 by dipping, spraying, coating or the like. Is done. And the 2nd piezoelectric material sheet 213b or the 2nd dielectric material sheet 213b has a through-hole similarly to the 2nd electrode sheet 12. FIG.
　第一保護シート１４は、第一電極シート１１の第一外面に接着する。さらに、第一保護シート１４は、第一電極シート１１の第一貫通孔１１ａ、並びに、第一圧電体シート２１３ａ又は第一誘電体シート２１３ａの貫通孔を介して、第二圧電体シート２１３ｂ又は第二誘電体シート２１３ｂに接着する。 The first protective sheet 14 is adhered to the first outer surface of the first electrode sheet 11. Further, the first protective sheet 14 includes the first piezoelectric sheet 213b or the first piezoelectric sheet 213b or the first dielectric sheet 213a through the first through-hole 11a of the first electrode sheet 11 and the first dielectric sheet 213a. Adhere to the second dielectric sheet 213b.
　また、第二保護シート１５は、第二電極シート１２の第二外面に接着する。さらに、第二保護シート１５は、第二電極シート１２の第二貫通孔１２ａ、並びに、第二圧電体シート２１３ｂ又は第二誘電体シート２１３ｂの貫通孔を介して、第一圧電体シート２１３ａ又は第一誘電体シート２１３ａに接着する。 Further, the second protective sheet 15 is adhered to the second outer surface of the second electrode sheet 12. Furthermore, the second protective sheet 15 includes the first piezoelectric sheet 213a or the second piezoelectric sheet 213a or the second dielectric sheet 213b through the second through hole 12a of the second electrode sheet 12 and the through hole of the second dielectric sheet 213b. It adheres to the first dielectric sheet 213a.
　この場合、トランスデューサ２００が圧電型の場合、第一電極シート１１と第二電極シート１２との間には、第一圧電体シート２１３ａ及び第二圧電体シート２１３ｂが存在し、第一圧電体シート２１３ａ及び第二圧電体シート２１３ｂの両方によって圧電効果が発揮される。トランスデューサ２００が静電型の場合、第一電極シート１１と第二電極シート１２との間には、第一誘電体シート２１３ａ及び第二誘電体シート２１３ｂが存在し、第一誘電体シート２１３ａ及び第二誘電体シート２１３ｂの両方によって静電容量が変化する。 In this case, when the transducer 200 is a piezoelectric type, the first piezoelectric sheet 213a and the second piezoelectric sheet 213b exist between the first electrode sheet 11 and the second electrode sheet 12, and the first piezoelectric sheet The piezoelectric effect is exhibited by both 213a and the second piezoelectric sheet 213b. When the transducer 200 is an electrostatic type, a first dielectric sheet 213a and a second dielectric sheet 213b exist between the first electrode sheet 11 and the second electrode sheet 12, and the first dielectric sheet 213a and The electrostatic capacity is changed by both of the second dielectric sheets 213b.
　第三実施形態においては、第一圧電体シート２１３ａ又は第一誘電体シート２１３ａは、第一電極シート１１と一体部材となり、第二圧電体シート２１３ｂ又は第二誘電体シート２１３ｂは、第二電極シート１２と一体部材となる。従って、圧電体シート又は誘電体シート単体として存在しないため、部品点数が少なくなる。 In the third embodiment, the first piezoelectric sheet 213a or the first dielectric sheet 213a is an integral member with the first electrode sheet 11, and the second piezoelectric sheet 213b or the second dielectric sheet 213b is the second electrode. It becomes an integral member with the sheet 12. Accordingly, since the piezoelectric sheet or the dielectric sheet does not exist alone, the number of parts is reduced.
　（４．第四実施形態）
　第四実施形態のトランスデューサ３００は、図１０及び図１１に示すように、第一電極シート１１、第二電極シート１２、第一圧電体シート３１３ａ又は第一誘電体シート３１３ａ、第二圧電体シート３１３ｂ又は第二誘電体シート３１３ｂ、第一保護シート１４、及び、第二保護シート１５を備える。 (4. Fourth embodiment)
As shown in FIGS. 10 and 11, the transducer 300 of the fourth embodiment includes a first electrode sheet 11, a second electrode sheet 12, a first piezoelectric sheet 313a or a first dielectric sheet 313a, and a second piezoelectric sheet. 313b or the second dielectric sheet 313b, the first protective sheet 14, and the second protective sheet 15.
　第一圧電体シート３１３ａ又は第一誘電体シート３１３ａは、第一電極シート１１の第一内面側及び第一外面側に一体的に形成されている。つまり、第一圧電体シート３１３ａ又は第一誘電体シート３１３ａは、第一内側シート部３１３ａ１と第一外側シート部３１３ａ２とを備える。第一圧電体シート３１３ａ又は第一誘電体シート３１３ａは、ディップ、スプレー、コーティングなどにより、第一電極シート１１の導電性繊維の全ての表面に付着することにより形成される。そして、第一圧電体シート３１３ａ又は第一誘電体シート３１３ａは、第一電極シート１１と同様に貫通孔を有する。 The first piezoelectric sheet 313 a or the first dielectric sheet 313 a is integrally formed on the first inner surface side and the first outer surface side of the first electrode sheet 11. That is, the first piezoelectric sheet 313a or the first dielectric sheet 313a includes a first inner sheet portion 313a1 and a first outer sheet portion 313a2. The first piezoelectric sheet 313a or the first dielectric sheet 313a is formed by adhering to all the surfaces of the conductive fibers of the first electrode sheet 11 by dipping, spraying, coating, or the like. The first piezoelectric sheet 313 a or the first dielectric sheet 313 a has a through hole as in the first electrode sheet 11.
　第二圧電体シート３１３ｂ又は第二誘電体シート３１３ｂは、第二電極シート１２の第二内面側及び第二外面側に一体的に形成されている。つまり、第二圧電体シート３１３ｂ又は第二誘電体シート３１３ｂは、第二内側シート部３１３ｂ１と第二外側シート部３１３ｂ２とを備える。第二圧電体シート３１３ｂ又は第二誘電体シート３１３ｂは、同様に、ディップ、スプレー、コーティングなどにより、第二電極シート１２の導電性繊維の全ての表面に付着することにより形成される。そして、第二圧電体シート３１３ｂ又は第二誘電体シート３１３ｂは、第二電極シート１２と同様に貫通孔を有する。 The second piezoelectric sheet 313b or the second dielectric sheet 313b is integrally formed on the second inner surface side and the second outer surface side of the second electrode sheet 12. That is, the second piezoelectric sheet 313b or the second dielectric sheet 313b includes a second inner sheet portion 313b1 and a second outer sheet portion 313b2. Similarly, the second piezoelectric sheet 313b or the second dielectric sheet 313b is formed by adhering to all surfaces of the conductive fibers of the second electrode sheet 12 by dipping, spraying, coating, or the like. And the 2nd piezoelectric material sheet 313b or the 2nd dielectric material sheet 313b has a through-hole similarly to the 2nd electrode sheet 12. FIG.
　第一保護シート１４は、第一圧電体シート３１３ａ又は第一誘電体シート３１３ａにおける第一外側シート部３１３ａ２に接着する。さらに、第一保護シート１４は、第一電極シート１１の第一貫通孔１１ａ（第一圧電体シート３１３ａ又は第一誘電体シート３１３ａの貫通孔に対応）を介して、第二圧電体シート３１３ｂ又は第二誘電体シート３１３ｂの第二内側シート部３１３ｂ１に接着する。 The first protective sheet 14 is adhered to the first outer sheet portion 313a2 of the first piezoelectric sheet 313a or the first dielectric sheet 313a. Further, the first protective sheet 14 is connected to the second piezoelectric sheet 313b via the first through hole 11a of the first electrode sheet 11 (corresponding to the through hole of the first piezoelectric sheet 313a or the first dielectric sheet 313a). Alternatively, the second dielectric sheet 313b is bonded to the second inner sheet portion 313b1.
　また、第二保護シート１５は、第二圧電体シート３１３ｂ又は第二誘電体シート３１３ｂにおける第二外側シート部３１３ｂ２に接着する。さらに、第二保護シート１５は、第二電極シート１２の第二貫通孔１２ａ（第二圧電体シート３１３ｂ又は第二誘電体シート３１３ｂの貫通孔に対応）を介して、第一圧電体シート３１３ａ又は第一誘電体シート３１３ａの第一内側シート部３１３ａ１に接着する。 Further, the second protective sheet 15 is adhered to the second outer sheet portion 313b2 in the second piezoelectric sheet 313b or the second dielectric sheet 313b. Further, the second protective sheet 15 passes through the second through hole 12a of the second electrode sheet 12 (corresponding to the through hole of the second piezoelectric sheet 313b or the second dielectric sheet 313b), and the first piezoelectric sheet 313a. Or it adhere | attaches on the 1st inner side sheet | seat part 313a1 of the 1st dielectric material sheet 313a.
　この場合、第一電極シート１１と第二電極シート１２との間には、第一内側シート部３１３ａ１及び第二内側シート部３１３ｂ１が存在し、第一内側シート部３１３ａ１及び第二内側シート部３１３ｂ１によって圧電効果が発揮される、又は、静電容量が変化する。 In this case, the first inner sheet portion 313a1 and the second inner sheet portion 313b1 exist between the first electrode sheet 11 and the second electrode sheet 12, and the first inner sheet portion 313a1 and the second inner sheet portion 313b1. Causes the piezoelectric effect or changes the capacitance.
　（５．第五実施形態）
　第五実施形態のトランスデューサ４００は、図１２及び図１３に示すように、第一電極シート１１、第二電極シート１２、圧電体シート４１３又は誘電体シート４１３、第一保護シート１４、及び、第二保護シート１５を備える。 (5. Fifth embodiment)
As shown in FIGS. 12 and 13, the transducer 400 of the fifth embodiment includes a first electrode sheet 11, a second electrode sheet 12, a piezoelectric sheet 413 or a dielectric sheet 413, a first protective sheet 14, Two protective sheets 15 are provided.
　圧電体シート４１３又は誘電体シート４１３は、第一電極シート１１の第一内面側に一体的に形成されている。圧電体シート４１３又は誘電体シート４１３は、第一電極シート１１の第一外面側には存在しない。圧電体シート４１３又は誘電体シート４１３は、ディップ、スプレー、コーティングなどにより、第一電極シート１１の第一内面側に位置する導電性繊維の表面に付着することにより形成される。そして、圧電体シート４１３又は誘電体シート４１３は、第一電極シート１１と同様に貫通孔を有する。 The piezoelectric sheet 413 or the dielectric sheet 413 is integrally formed on the first inner surface side of the first electrode sheet 11. The piezoelectric sheet 413 or the dielectric sheet 413 does not exist on the first outer surface side of the first electrode sheet 11. The piezoelectric sheet 413 or the dielectric sheet 413 is formed by adhering to the surface of the conductive fiber located on the first inner surface side of the first electrode sheet 11 by dipping, spraying, coating or the like. And the piezoelectric material sheet 413 or the dielectric material sheet 413 has a through-hole similarly to the 1st electrode sheet 11. FIG.
　第一保護シート１４は、第一電極シート１１の第一外面に接着する。さらに、第一保護シート１４は、圧電体シート４１３又は誘電体シート４１３に接着する。第二保護シート１５は、第二電極シート１２の第二外面に接着する。さらに、第二保護シート１５は、第二電極シート１２の第二貫通孔１２ａを介して、圧電体シート４１３又は誘電体シート４１３に接着する。 The first protective sheet 14 is adhered to the first outer surface of the first electrode sheet 11. Further, the first protective sheet 14 is bonded to the piezoelectric sheet 413 or the dielectric sheet 413. The second protective sheet 15 is adhered to the second outer surface of the second electrode sheet 12. Further, the second protective sheet 15 is bonded to the piezoelectric sheet 413 or the dielectric sheet 413 through the second through hole 12 a of the second electrode sheet 12.
　この場合、第二電極シート１２には、圧電体材料又は誘電体材料が付着されていない。そのため、圧電体材料又は誘電体材料の付着は、第一電極シート１１のみとなる。従って、製造コストの低減を図ることができる。 In this case, the piezoelectric material or the dielectric material is not attached to the second electrode sheet 12. Therefore, the adhesion of the piezoelectric material or the dielectric material is only on the first electrode sheet 11. Therefore, the manufacturing cost can be reduced.
　（６．第六実施形態）
　第六実施形態のトランスデューサ５００は、図１４及び図１５に示すように、第一電極シート１１、第二電極シート１２、圧電体シート５１３又は誘電体シート５１３、第一保護シート１４、及び、第二保護シート１５を備える。 (6. Sixth embodiment)
As shown in FIGS. 14 and 15, the transducer 500 of the sixth embodiment includes a first electrode sheet 11, a second electrode sheet 12, a piezoelectric sheet 513 or a dielectric sheet 513, a first protective sheet 14, Two protective sheets 15 are provided.
　圧電体シート５１３又は誘電体シート５１３は、第一電極シート１１の第一内面側及び第一外面側に一体的に形成されている。つまり、圧電体シート５１３又は誘電体シート５１３は、内側シート部５１３ａと外側シート部５１３ｂとを備える。圧電体シート５１３又は誘電体シート５１３は、ディップ、スプレー、コーティングなどにより、第一電極シート１１の導電性繊維の全ての表面に付着することにより形成される。そして、圧電体シート５１３又は誘電体シート５１３は、第一電極シート１１と同様に貫通孔を有する。 The piezoelectric sheet 513 or the dielectric sheet 513 is integrally formed on the first inner surface side and the first outer surface side of the first electrode sheet 11. That is, the piezoelectric sheet 513 or the dielectric sheet 513 includes an inner sheet portion 513a and an outer sheet portion 513b. The piezoelectric sheet 513 or the dielectric sheet 513 is formed by adhering to all the surfaces of the conductive fibers of the first electrode sheet 11 by dipping, spraying, coating, or the like. And the piezoelectric material sheet 513 or the dielectric material sheet 513 has a through-hole like the 1st electrode sheet 11.
　第一保護シート１４は、圧電体シート５１３又は誘電体シート５１３の外側シート部５１３ｂに接着する。第二保護シート１５は、第二電極シート１２の第二外面に接着する。さらに、第二保護シート１５は、第二電極シート１２の第二貫通孔１２ａを介して、圧電体シート５１３又は誘電体シート５１３の内側シート部５１３ａに接着する。 The first protective sheet 14 is adhered to the outer sheet portion 513b of the piezoelectric sheet 513 or the dielectric sheet 513. The second protective sheet 15 is adhered to the second outer surface of the second electrode sheet 12. Furthermore, the second protective sheet 15 is bonded to the inner sheet portion 513 a of the piezoelectric sheet 513 or the dielectric sheet 513 through the second through hole 12 a of the second electrode sheet 12.
　（７．変形形態）
　上述したトランスデューサ１は、第一電極シート１１、第二電極シート１２、圧電体シート１３又は誘電体シート１３、第一保護シート１４、及び、第二保護シート１５を備えるものとした。この構成に限られず、トランスデューサ１は、第一電極シート１１、圧電体シート１３又は誘電体シート１３、第一保護シート１４を備える構成とし、上述した第二電極シート１２及び第二保護シート１５を備えない構成とすることもできる。この場合、トランスデューサ１は、第二電極シート１２を、貫通孔を有しない導電性材料に置換することもできる。例えば、当該導電性材料は、金属又は金属以外の導電性材料により形成された板材、シャフト、パイプ等に置換することもできる。この場合においても、第一電極シート１１と第一保護シート１４による効果を奏する。また、他の実施形態のトランスデューサ１００，２００，３００，４００，５００にも同様に適用できる。 (7. Variations)
The transducer 1 described above includes the first electrode sheet 11, the second electrode sheet 12, the piezoelectric sheet 13 or the dielectric sheet 13, the first protective sheet 14, and the second protective sheet 15. The transducer 1 is not limited to this configuration, and the transducer 1 includes the first electrode sheet 11, the piezoelectric sheet 13 or the dielectric sheet 13, and the first protective sheet 14, and includes the second electrode sheet 12 and the second protective sheet 15 described above. It can also be set as the structure which is not provided. In this case, the transducer 1 can replace the second electrode sheet 12 with a conductive material having no through hole. For example, the conductive material can be replaced with a plate material, a shaft, a pipe, or the like formed of a metal or a conductive material other than metal. Even in this case, the effects of the first electrode sheet 11 and the first protective sheet 14 are exhibited. Further, the present invention can be similarly applied to the transducers 100, 200, 300, 400, and 500 of other embodiments.
　（８．第七実施形態）
　上述したトランスデューサ１、１００，２００，３００，４００，５００（以下、「トランスデューサ１など」と称する）を用いた振動提示装置６００について、図１６－図１９を参照して説明する。ここで、図１６－図１９は、分かりやすくするために、各部材の厚みを誇張して図示している。そのため、実際には、振動提示装置６００の図１６及び図１７の上下方向の厚みは、非常に薄く形成されている。 (8. Seventh embodiment)
A vibration presentation device 600 using the above-described transducers 1, 100, 200, 300, 400, 500 (hereinafter referred to as “transducer 1 etc.”) will be described with reference to FIGS. Here, in FIGS. 16 to 19, the thickness of each member is exaggerated for easy understanding. Therefore, actually, the thickness of the vibration presentation device 600 in the vertical direction in FIGS. 16 and 17 is very thin.
　振動提示装置６００は、外部からの押込力を検出するセンサとしての機能を有すると共に、振動を提示するアクチュエータとしての機能を有する。振動提示装置６００は、例えば、人間の指などによって押込力が付与された場合に当該押込力を検出し、その後に指に対して触覚振動を提示する。 The vibration presenting device 600 has a function as a sensor that detects a pressing force from the outside, and also has a function as an actuator that presents vibration. For example, when a pressing force is applied by a human finger or the like, the vibration presentation device 600 detects the pressing force and then presents a tactile vibration to the finger.
　振動提示装置６００は、図１６及び図１７に示すように、アクチュエータ６１０、第一導通部６２０、第二導通部６３０、第一弾性体６４０、第二弾性体６５０、センサ６６０、第三弾性体６０１、カバー６７０、導線６８０、及び、制御装置６９０を備える。 As shown in FIGS. 16 and 17, the vibration presentation device 600 includes an actuator 610, a first conduction unit 620, a second conduction unit 630, a first elastic body 640, a second elastic body 650, a sensor 660, and a third elastic body. 601, a cover 670, a conducting wire 680, and a control device 690.
　アクチュエータ６１０及びセンサ６６０の少なくとも何れか一方が、上述したトランスデューサ１などを適用する。つまり、アクチュエータ６１０のみ、センサ６６０のみ、又は、アクチュエータ６１０とセンサ６６０の両者が、トランスデューサ１などを適用する。本実施形態においては、アクチュエータ６１０とセンサ６６０の両者が、トランスデューサ１などを適用する。 At least one of the actuator 610 and the sensor 660 applies the transducer 1 described above. That is, only the actuator 610, only the sensor 660, or both the actuator 610 and the sensor 660 apply the transducer 1 or the like. In the present embodiment, both the actuator 610 and the sensor 660 apply the transducer 1 or the like.
　アクチュエータ６１０は、複数のアクチュエータユニット６１０ａ，６１０ｂ，６１０ｃを備える。本実施形態においては、アクチュエータ６１０は、図１８に示すように、３つのアクチュエータユニット６１０ａ，６１０ｂ，６１０ｃを備えており、３つのアクチュエータユニット６１０ａ，６１０ｂ，６１０ｃを積層してなる。ただし、アクチュエータ６１０は、１つのアクチュエータユニット６１０ａのみを備えるようにしてもよい。 The actuator 610 includes a plurality of actuator units 610a, 610b, and 610c. In the present embodiment, as shown in FIG. 18, the actuator 610 includes three actuator units 610a, 610b, and 610c, and is formed by stacking three actuator units 610a, 610b, and 610c. However, the actuator 610 may include only one actuator unit 610a.
　各アクチュエータユニット６１０ａ，６１０ｂ，６１０ｃは、複数のトランスデューサ１などを積層している。また、図１９に示すように、各アクチュエータユニット６１０ａ，６１０ｂ，６１０ｃにおいて、第一電極シート１１と第二電極シート１２とが、左右方向（長手方向）にオフセットされている。詳細には、第一電極シート１１の一部と第二電極シート１２の一部とが、対向するように配置されている。第一電極シート１１と第二電極シート１２において、相互に対向しない残りの一部は、対向する部分を基準として反対側に位置する。 Each actuator unit 610a, 610b, 610c has a plurality of transducers 1 and the like stacked thereon. Moreover, as shown in FIG. 19, in each actuator unit 610a, 610b, 610c, the 1st electrode sheet 11 and the 2nd electrode sheet 12 are offset in the left-right direction (longitudinal direction). Specifically, a part of the first electrode sheet 11 and a part of the second electrode sheet 12 are arranged to face each other. In the 1st electrode sheet 11 and the 2nd electrode sheet 12, the remaining one part which does not mutually oppose is located in the other side on the basis of the opposing part.
　つまり、図１９において、左右方向の中央部分では、第一電極シート１１と第二電極シート１２が対向しており、左側部分では、第一電極シート１１が存在するのに対して第二電極シート１２は存在せず、右側部分では、第二電極シート１２が存在するのに対して第一電極シート１１は存在しない。 That is, in FIG. 19, the first electrode sheet 11 and the second electrode sheet 12 are opposed to each other at the central portion in the left-right direction, whereas the first electrode sheet 11 is present at the left portion, whereas the second electrode sheet is present. 12 does not exist, and in the right side portion, the second electrode sheet 12 exists, whereas the first electrode sheet 11 does not exist.
　圧電体シート１３又は誘電体シート１３の長手方向の長さ（図１９の左右方向の幅）は、第一電極シート１１と第二電極シート１２とが対向する範囲、第一電極シート１１のみが存在する範囲、及び、第二電極シート１２のみが存在する範囲の全てに対向する長さに形成されている。 The length in the longitudinal direction of the piezoelectric sheet 13 or the dielectric sheet 13 (the width in the left-right direction in FIG. 19) is a range in which the first electrode sheet 11 and the second electrode sheet 12 face each other, only the first electrode sheet 11. It is formed to have a length facing the existing range and the entire range where only the second electrode sheet 12 exists.
　第一保護シート１４は、第一電極シート１１と、圧電体シート１３又は誘電体シート１３の露出部分を、全面に亘って被覆する。第二保護シート１５は、複数の第二電極シート１２と、圧電体シート１３又は誘電体シート１３の露出部分を、全面に亘って被覆する。 The first protective sheet 14 covers the entire surface of the first electrode sheet 11 and the exposed portion of the piezoelectric sheet 13 or the dielectric sheet 13. The second protective sheet 15 covers the plurality of second electrode sheets 12 and the exposed portions of the piezoelectric sheet 13 or the dielectric sheet 13 over the entire surface.
　続いて、図１８を参照して、各アクチュエータユニット６１０ａ，６１０ｂ，６１０ｃについて説明する。各アクチュエータユニット６１０ａ，６１０ｂ，６１０ｃは、図１８の左右方向の中央部分に位置するアクチュエータ本体６１６と、図１８の左側に位置する第一端子６１７と、図１８の右側に位置する第二端子６１８とを備える。第一端子６１７は、アクチュエータ本体６１６における正極電位の端子であり、第二端子６１８は、アクチュエータ本体６１６におけるグランド電位の端子である。ここで、第一端子６１７と第二端子６１８とは、アクチュエータ本体６１６を基準として反対側に延在する。 Subsequently, the actuator units 610a, 610b, and 610c will be described with reference to FIG. Each actuator unit 610a, 610b, 610c has an actuator body 616 located at the center in the left-right direction in FIG. 18, a first terminal 617 located on the left side in FIG. 18, and a second terminal 618 located on the right side in FIG. With. The first terminal 617 is a positive potential terminal in the actuator body 616, and the second terminal 618 is a ground potential terminal in the actuator body 616. Here, the first terminal 617 and the second terminal 618 extend to opposite sides with respect to the actuator body 616.
　ここで、第一電極シート１１は、左右方向の中央部分に位置する第一対向電極部６１１ａと、第一対向電極部６１１ａから延在する第一端子電極部６１１ｂとを備える。第二電極シート１２は、左右方向の中央部分に位置する第二対向電極部６１２ａと、第二対向電極部６１２ａから延在する第二端子電極部６１２ｃとを備える。第一対向電極部６１１ａと第二対向電極部６１２ａとが、対向している。第一端子電極部６１１ｂが第一対向電極部６１１ａから延在する方向と、第二端子電極部６１２ｃが第二対向電極部６１２ａから延在する方向とは、反対方向である。 Here, the 1st electrode sheet 11 is provided with the 1st counter electrode part 611a located in the center part of a horizontal direction, and the 1st terminal electrode part 611b extended from the 1st counter electrode part 611a. The 2nd electrode sheet 12 is provided with the 2nd counter electrode part 612a located in the center part of a horizontal direction, and the 2nd terminal electrode part 612c extended from the 2nd counter electrode part 612a. The first counter electrode portion 611a and the second counter electrode portion 612a are opposed to each other. The direction in which the first terminal electrode portion 611b extends from the first counter electrode portion 611a and the direction in which the second terminal electrode portion 612c extends from the second counter electrode portion 612a are opposite directions.
　圧電体シート１３及び誘電体シート１３は、圧電体本体６１３ａ又は誘電体本体６１３ａと、第一延在部６１３ｂと、第二延在部６１３ｃとを備える。圧電体本体６１３ａ又は誘電体本体６１３ａは、第一対向電極部６１１ａと第二対向電極部６１２ａとの間に介在される。第一延在部６１３ｂは、圧電体本体６１３ａ又は誘電体本体６１３ａから延在すると共に、複数の第一端子電極部６１１ｂの間に介在される。第二延在部６１３ｃは、圧電体本体６１３ａ又は誘電体本体６１３ａから延在すると共に、複数の第二端子電極部６１２ｃの間に介在される。 The piezoelectric sheet 13 and the dielectric sheet 13 include a piezoelectric body 613a or a dielectric body 613a, a first extending part 613b, and a second extending part 613c. The piezoelectric body 613a or the dielectric body 613a is interposed between the first counter electrode portion 611a and the second counter electrode portion 612a. The first extending portion 613b extends from the piezoelectric body 613a or the dielectric body 613a and is interposed between the plurality of first terminal electrode portions 611b. The second extending portion 613c extends from the piezoelectric body 613a or the dielectric body 613a and is interposed between the plurality of second terminal electrode portions 612c.
　このように、第一端子電極部６１１ｂのみをアクチュエータ本体６１６の外部に存在させるのではなく、圧電体シート１３及び誘電体シート１３の一部である第一延在部６１３ｂをアクチュエータ本体６１６の外部に存在させることとし、第一端子電極部６１１ｂと第一延在部６１３ｂとを積層している。従って、第一端子電極部６１１ｂと第一延在部６１３ｂとの合計厚みは、アクチュエータ本体６１６に比べて第二電極シート１２の厚み分が薄くなるだけである。そのため、第一端子電極部６１１ｂと第一対向電極部６１１ａとの境界付近に大きな変形力が生じることを抑制できる。その結果、第一対向電極部６１１ａに接続される導電経路の構成部位が高い耐久性を有することができる。第二端子電極部６１２ｃについても同様である。 In this way, not only the first terminal electrode portion 611 b exists outside the actuator body 616, but the first extending portion 613 b that is a part of the piezoelectric sheet 13 and the dielectric sheet 13 is provided outside the actuator body 616. The first terminal electrode portion 611b and the first extension portion 613b are stacked. Therefore, the total thickness of the first terminal electrode portion 611b and the first extending portion 613b is only a thickness of the second electrode sheet 12 that is smaller than that of the actuator body 616. Therefore, it can suppress that a big deformation force arises in the boundary vicinity of the 1st terminal electrode part 611b and the 1st counter electrode part 611a. As a result, the component part of the conductive path connected to the first counter electrode part 611a can have high durability. The same applies to the second terminal electrode portion 612c.
　さらに、第一保護シート１４は、第一保護本体６１４ａと、第一保護＿第一端子保護部６１４ｂと、第一保護＿第二端子保護部６１４ｃとを備える。第一保護本体６１４ａは、第一対向電極部６１１ａを被覆する。第一保護＿第一端子保護部６１４ｂは、第一端子電極部６１１ｂを被覆する。第一保護＿第二端子保護部６１４ｃは、第二端子電極部６１２ｃを被覆する。 Furthermore, the first protection sheet 14 includes a first protection body 614a, a first protection_first terminal protection unit 614b, and a first protection_second terminal protection unit 614c. The first protective body 614a covers the first counter electrode portion 611a. The first protection_first terminal protection part 614b covers the first terminal electrode part 611b. The first protection_second terminal protection part 614c covers the second terminal electrode part 612c.
　第二保護シート１５は、第二保護本体６１５ａと、第二保護＿第一端子保護部６１５ｂと、第二保護＿第二端子保護部６１５ｃとを備える。第二保護本体６１５ａは、第一対向電極部６１１ａを被覆する。第二保護＿第一端子保護部６１５ｂは、第一端子電極部６１１ｂを被覆する。第二保護＿第二端子保護部６１５ｃは、第二端子電極部６１２ｃを被覆する。 The second protection sheet 15 includes a second protection body 615a, a second protection_first terminal protection unit 615b, and a second protection_second terminal protection unit 615c. The second protective body 615a covers the first counter electrode portion 611a. The second protection_first terminal protection part 615b covers the first terminal electrode part 611b. The second protection_second terminal protection part 615c covers the second terminal electrode part 612c.
　図１６及び図１７に示すように、第一導通部６２０は、弾性変形可能な材料（例えば、エラストマー）によりシート状に形成され、Ｌ字型に屈曲形成されている。第一導通部６２０は、エラストマー中に導電性フィラーを配合させることにより成形されてもよいし、第一電極シート１１と同様に導電性布としてもよい。 16 and 17, the first conductive portion 620 is formed into a sheet shape from an elastically deformable material (for example, an elastomer), and is bent into an L shape. The first conductive portion 620 may be formed by blending a conductive filler in the elastomer, or may be a conductive cloth similarly to the first electrode sheet 11.
　第一導通部６２０のＬ字の一方の辺は、アクチュエータ本体６１６の平面状の面に交差する（例えば直交する）方向に形成されている。そして、第一導通部６２０のＬ字の一方の辺は、第一端子６１７の端面に接触している。詳細には、第一導通部６２０のＬ字の一方の辺は、第一端子電極部６１１ｂの端及び第一延在部６１３ｂの端に接触している。従って、第一導通部６２０は、複数の第一端子電極部６１１ｂの端に電気的に接続されている。 One side of the L-shape of the first conduction part 620 is formed in a direction intersecting (for example, orthogonal to) the planar surface of the actuator body 616. One side of the L shape of the first conduction part 620 is in contact with the end face of the first terminal 617. Specifically, one side of the L shape of the first conduction part 620 is in contact with the end of the first terminal electrode part 611b and the end of the first extension part 613b. Accordingly, the first conduction portion 620 is electrically connected to the ends of the plurality of first terminal electrode portions 611b.
　第一導通部６２０のＬ字の他方の辺は、アクチュエータ本体６１６から遠ざかる方向へ延在し、且つ、アクチュエータ本体６１６の平面状の面方向に平行に形成される。第一導通部６２０のＬ字の他方の辺は、導線６８０に電気的に接続される。 The other side of the L-shape of the first conducting part 620 extends in a direction away from the actuator body 616 and is formed in parallel with the planar surface direction of the actuator body 616. The other side of the L shape of the first conduction part 620 is electrically connected to the conducting wire 680.
　第二導通部６３０は、第一導通部６２０と同様に、弾性変形可能な材料（例えば、エラストマー）によりシート状に形成され、Ｌ字型に屈曲形成されている。第二導通部６３０は、エラストマー中に導電性フィラーを配合させることにより成形されている。 Similarly to the first conduction part 620, the second conduction part 630 is formed into a sheet shape from an elastically deformable material (for example, an elastomer) and is bent into an L shape. The 2nd conduction | electrical_connection part 630 is shape | molded by mix | blending a conductive filler in an elastomer.
　第二導通部６３０のＬ字の一方の辺は、アクチュエータ本体６１６の平面状の面に交差する（直交する）方向に形成されている。そして、第二導通部６３０のＬ字の一方の辺は、第二端子６１８の端面に接触している。詳細には、第二導通部６３０のＬ字の一方の辺は、第二端子電極部６１２ｃの端及び第二延在部６１３ｃの端に接触している。従って、第二導通部６３０は、複数の第二端子電極部６１２ｃの端に電気的に接続されている。 One side of the L-shape of the second conducting portion 630 is formed in a direction intersecting (orthogonal to) the planar surface of the actuator body 616. Then, one side of the L shape of the second conducting portion 630 is in contact with the end surface of the second terminal 618. Specifically, one side of the L shape of the second conducting portion 630 is in contact with the end of the second terminal electrode portion 612c and the end of the second extending portion 613c. Accordingly, the second conduction portion 630 is electrically connected to the ends of the plurality of second terminal electrode portions 612c.
　第二導通部６３０のＬ字の他方の辺は、アクチュエータ本体６１６から遠ざかる方向へ延在し、且つ、アクチュエータ本体６１６の平面状の面方向に平行に形成される。第二導通部６３０のＬ字の他方の辺は、導線６８０に電気的に接続される。 The other side of the L-shape of the second conducting portion 630 extends in a direction away from the actuator body 616 and is formed in parallel with the planar surface direction of the actuator body 616. The other side of the L shape of the second conducting portion 630 is electrically connected to the conducting wire 680.
　第一導通部６２０により、複数の第一端子電極部６１１ｂとの間で導電経路を容易に形成できる。同様に、第二導通部６３０により、複数の第二端子電極部６１２ｃとの間で導電経路を容易に形成できる。また、第一導通部６２０及び第二導通部６３０は、弾性変形可能であるため、第一端子６１７及び第二端子６１８の変形に追従することができる。従って、第一端子６１７及び第二端子６１８が変形したとしても、第一端子電極部６１１ｂ及び第二端子電極部６１２ｃとの間で導電経路を容易に形成できる。 The first conductive portion 620 can easily form a conductive path between the plurality of first terminal electrode portions 611b. Similarly, the second conductive portion 630 can easily form a conductive path between the plurality of second terminal electrode portions 612c. Moreover, since the 1st conduction | electrical_connection part 620 and the 2nd conduction | electrical_connection part 630 are elastically deformable, it can track the deformation | transformation of the 1st terminal 617 and the 2nd terminal 618. FIG. Therefore, even if the first terminal 617 and the second terminal 618 are deformed, a conductive path can be easily formed between the first terminal electrode portion 611b and the second terminal electrode portion 612c.
　第一弾性体６４０は、アクチュエータ本体６１６の平面状の一方面（図１６の上面）に接触して配置される。第二弾性体６５０は、アクチュエータ本体６１６の平面状の他方面（図１６の下面）、すなわちアクチュエータ本体６１６の第一弾性体６４０とは反対側に接触して配置される。つまり、第一弾性体６４０及び第二弾性体６５０が、アクチュエータ本体６１６の平面状の面直交方向に背向する両端面（図１６の上下面）にそれぞれ配置される。 The first elastic body 640 is disposed in contact with one planar surface (upper surface in FIG. 16) of the actuator body 616. The second elastic body 650 is disposed in contact with the other planar surface of the actuator body 616 (the lower surface in FIG. 16), that is, the opposite side of the actuator body 616 from the first elastic body 640. That is, the first elastic body 640 and the second elastic body 650 are respectively disposed on both end surfaces (upper and lower surfaces in FIG. 16) facing away from the planar surface orthogonal direction of the actuator body 616.
　さらに、図１７に示すように、第一弾性体６４０は、アクチュエータ本体６１６の平面状の面方向に背向する両端面（第一端子６１７及び第二端子６１８が存在しない面（図１７の左右面））に接触して配置される。さらに、図１６に示すように、第一弾性体６４０は、第一端子６１７の平面状の一方面（図１６の上面）、及び、第二端子６１８の平面状の一方面（図１６の上面）に接触して配置される。第二弾性体６５０は、第一端子６１７の平面状の他方面（図１６の下面）、及び、第二端子６１８の平面状の他方面（図１６の下面）に接触して配置される。さらに、第一弾性体６４０は、第一導通部６２０のＬ字状の外面全て、及び、第二導通部６３０のＬ字状の外面全てに接触して配置される。 Further, as shown in FIG. 17, the first elastic body 640 has both end surfaces facing away from each other in the planar surface direction of the actuator body 616 (surfaces where the first terminal 617 and the second terminal 618 are not present (the left and right sides in FIG. Surface)). Further, as shown in FIG. 16, the first elastic body 640 includes one planar surface of the first terminal 617 (upper surface in FIG. 16) and one planar surface of the second terminal 618 (upper surface in FIG. 16). ) Is placed in contact with. The second elastic body 650 is disposed in contact with the other planar surface of the first terminal 617 (the lower surface in FIG. 16) and the other planar surface of the second terminal 618 (the lower surface in FIG. 16). Further, the first elastic body 640 is disposed in contact with all the L-shaped outer surfaces of the first conducting portion 620 and all the L-shaped outer surfaces of the second conducting portion 630.
　第一弾性体６４０及び第二弾性体６５０には、小さな弾性率Ｅ（６４０），Ｅ（６５０）を有すると共に、小さな損失係数ｔａｎδ（６４０），ｔａｎδ（６５０）を有する材料が用いられる。言い換えると、第一弾性体６４０及び第二弾性体６５０は、柔らかく、且つ、減衰特性が低い材料が好適である。特に、第一弾性体６４０及び第二弾性体６５０は、アクチュエータ本体６１６の積層方向（平面状の面直交方向）の弾性率Ｅ１（６１６）より小さな弾性率Ｅ（６４０），Ｅ（６５０）を有する。さらに、第一弾性体６４０の弾性率Ｅ（６４０）は、アクチュエータ本体６１６の面方向の弾性率Ｅ２（６１６）より小さい。 The first elastic body 640 and the second elastic body 650 are made of materials having small elastic moduli E (640) and E (650) and small loss coefficients tan δ (640) and tan δ (650) . In other words, the first elastic body 640 and the second elastic body 650 are preferably made of a soft material having low damping characteristics. In particular, the first elastic body 640 and the second elastic body 650 have elastic moduli E (640) and E (650) smaller than the elastic moduli E1 (616) in the stacking direction of the actuator main body 616 (planar surface orthogonal direction). Have. Further, the elastic modulus E (640) of the first elastic body 640 is smaller than the elastic modulus E2 (616) in the surface direction of the actuator body 616.
　センサ６６０は、トランスデューサ１などを適用する。センサ６６０は、アクチュエータ６１０の周囲に配置される。本実施形態においては、センサ６６０は、アクチュエータ６１０、第一弾性体６４０及び第二弾性体６５０により形成されるアクチュエータ積層体（６１０，６４０，６５０）に積層される。特に、センサ６６０は、第二弾性体６５０のアクチュエータ６１０とは反対側に積層される。上記の他に、センサ６６０は、アクチュエータ６１０の積層方向に直交する方向に、アクチュエータ６１０と並列配置されるようにしてもよい。 Sensor 660 applies transducer 1 or the like. The sensor 660 is disposed around the actuator 610. In the present embodiment, the sensor 660 is stacked on an actuator stack (610, 640, 650) formed by the actuator 610, the first elastic body 640, and the second elastic body 650. In particular, the sensor 660 is stacked on the opposite side of the second elastic body 650 from the actuator 610. In addition to the above, the sensor 660 may be arranged in parallel with the actuator 610 in a direction orthogonal to the stacking direction of the actuators 610.
　第三弾性体６０１は、アクチュエータ積層体（６１０，６４０，６５０）及びセンサ６６０に積層され、センサ６６０におけるアクチュエータ積層体（６１０，６４０，６５０）と反対側に配置される。第三弾性体６０１は、第一弾性体６４０及び第二弾性体６５０と同一材料により形成される。従って、第三弾性体６０１の弾性率Ｅ（６０１）及び損失係数ｔａｎδ（６０１）は、第一弾性体６４０の弾性率Ｅ（６４０）及び損失係数ｔａｎδ（６４０）、第二弾性体６５０の弾性率Ｅ（６５０）及び損失係数ｔａｎδ（６５０）と同一である。 The third elastic body 601 is laminated on the actuator laminated body (610, 640, 650) and the sensor 660, and is arranged on the opposite side of the actuator laminated body (610, 640, 650) in the sensor 660. The third elastic body 601 is made of the same material as the first elastic body 640 and the second elastic body 650. Therefore, the elastic modulus E (601) and the loss coefficient tan δ (601) of the third elastic body 601 are the elastic modulus E (640) and the loss coefficient tan δ (640) of the first elastic body 640 and the elasticity of the second elastic body 650. It is the same as the rate E (650) and the loss factor tan δ (650) .
　ここで、センサ６６０は、図１７に示すように、アクチュエータ積層体（６１０，６４０，６５０）と第三弾性体６０１の間に配置されるセンサ本体部６６０ａと、センサ本体部６６０ａから延在し、第三弾性体６０１におけるセンサ本体部６６０ａの反対側に回り込むように折り曲げ形成されているセンサ端子部６６０ｂとを備える。センサ本体部６６０ａが、トランスデューサ１などに相当し、センサ端子部６６０ｂは、センサ本体部６６０ａにおける第一電極シート１１及び第二電極シート１２に電気的に接続される。センサ端子部６６０ｂは、第三弾性体６０１と導線６８０との間に位置する。 Here, as shown in FIG. 17, the sensor 660 extends from the sensor main body 660a and the sensor main body 660a disposed between the actuator laminate (610, 640, 650) and the third elastic body 601. And a sensor terminal portion 660b that is bent so as to wrap around to the opposite side of the sensor main body portion 660a in the third elastic body 601. The sensor main body 660a corresponds to the transducer 1 and the like, and the sensor terminal 660b is electrically connected to the first electrode sheet 11 and the second electrode sheet 12 in the sensor main body 660a. The sensor terminal portion 660b is located between the third elastic body 601 and the conducting wire 680.
　カバー６７０は、アクチュエータ６１０、第一導通部６２０、第二導通部６３０、第一弾性体６４０、第二弾性体６５０、センサ６６０及び第三弾性体６０１を囲む。カバー６７０には、例えば、金属、樹脂など、種々の材料が適用される。カバー６７０は、外部からアクチュエータ積層体（６１０，６４０，６５０）の積層方向への押込力が付与された場合に、当該押込力をセンサ６６０に伝達する。さらに、カバー６７０は、アクチュエータ６１０が発生した振動により振動し、カバー６７０に押込力を付与した人間の指に対して振動を付与する。 The cover 670 surrounds the actuator 610, the first conduction part 620, the second conduction part 630, the first elastic body 640, the second elastic body 650, the sensor 660, and the third elastic body 601. Various materials such as metal and resin are applied to the cover 670. The cover 670 transmits the pressing force to the sensor 660 when a pressing force in the stacking direction of the actuator stack (610, 640, 650) is applied from the outside. Further, the cover 670 vibrates due to the vibration generated by the actuator 610 and imparts vibration to a human finger that imparts a pressing force to the cover 670.
　カバー６７０は、台座としての第一カバー６７１と、第一カバー６７１に取り付けられ押込力が付与される部材としての第二カバー６７２とを備える。第一カバー６７１及び第二カバー６７２は、アクチュエータ本体６１６、第一弾性体６４０、第二弾性体６５０、センサ６６０及び第三弾性体６０１を、アクチュエータ積層体（６１０，６４０，６５０）の積層方向（図１６の上下方向）に圧縮した状態で保持する。この状態において、各部材の弾性率Ｅの関係から、アクチュエータ積層体（６１０，６４０，６５０）の積層方向において、第一弾性体６４０、第二弾性体６５０及び第三弾性体６０１が、アクチュエータ本体６１６及びセンサ６６０より大きく圧縮された状態となる。ここで、図１７においては、センサ端子部６６０ｂの存在により、第三弾性体６０１と第一カバー６７１とが非接触として図示しているが、実際には、センサ端子部６６０ｂは薄いため、第三弾性体６０１と第一カバー６７１とは押圧された状態で接触している。 The cover 670 includes a first cover 671 as a pedestal and a second cover 672 as a member attached to the first cover 671 and applied with a pushing force. The first cover 671 and the second cover 672 include the actuator main body 616, the first elastic body 640, the second elastic body 650, the sensor 660, and the third elastic body 601 in the stacking direction of the actuator stack (610, 640, 650). It is held in a compressed state (vertical direction in FIG. 16). In this state, the first elastic body 640, the second elastic body 650, and the third elastic body 601 are in the actuator body in the stacking direction of the actuator stack (610, 640, 650) from the relationship of the elastic modulus E of each member. 616 and the sensor 660 are compressed to be larger. Here, in FIG. 17, the third elastic body 601 and the first cover 671 are illustrated as non-contact due to the presence of the sensor terminal portion 660b, but in reality, the sensor terminal portion 660b is thin, The three elastic bodies 601 and the first cover 671 are in contact with each other in a pressed state.
　さらには、第一カバー６７１は、アクチュエータ本体６１６及び第一弾性体６４０を、アクチュエータ本体６１６の面方向（図１７の左右方向）に圧縮した状態で保持する。この状態において、各部材の弾性率Ｅの関係から、アクチュエータ本体６１６の面方向において、第一弾性体６４０は、アクチュエータ本体６１６より大きく圧縮された状態となる。 Furthermore, the first cover 671 holds the actuator body 616 and the first elastic body 640 in a compressed state in the surface direction of the actuator body 616 (left and right direction in FIG. 17). In this state, the first elastic body 640 is compressed more than the actuator body 616 in the surface direction of the actuator body 616 due to the elastic modulus E of each member.
　導線６８０は、カバー６７０の内側面に位置する第一カバー６７１の同一平面上に配置されている。本実施形態においては、導線６８０は、第一カバー６７１に印刷により形成されているが、ケーブル線などを用いることもできる。制御装置６９０は、センサ６６０がカバー６７０に付与された押込力を検出した場合に、アクチュエータ６１０を駆動して振動を発生させる。なお、制御装置６９０は、カバー６７０の外部に配置されているが、カバー６７０の内部に配置するようにしてもよい。 The conducting wire 680 is disposed on the same plane of the first cover 671 located on the inner surface of the cover 670. In the present embodiment, the conducting wire 680 is formed on the first cover 671 by printing, but a cable wire or the like can also be used. When the sensor 660 detects the pressing force applied to the cover 670, the control device 690 drives the actuator 610 to generate vibration. Note that the control device 690 is disposed outside the cover 670, but may be disposed inside the cover 670.
　振動提示装置６００は、トランスデューサ１などにより構成されるため、低コスト化を図ることができる。また、振動提示装置６００は、センサ６６０及びアクチュエータ６１０を備える。従って、振動提示装置６００は、押込力の検出から振動の提示までの応答性が非常に良好となる。そして、振動提示装置６００は、押込力を検出するセンサ６６０とアクチュエータ６１０とを備えつつ、大型化することなく大きな振動を提示することができる。 Since the vibration presenting device 600 is composed of the transducer 1 and the like, the cost can be reduced. The vibration presentation device 600 includes a sensor 660 and an actuator 610. Therefore, the vibration presentation device 600 has very good responsiveness from detection of the pushing force to presentation of vibration. And the vibration presentation apparatus 600 can present a big vibration, without providing the sensor 660 and the actuator 610 which detect pushing force, without enlarging.
　さらに、アクチュエータ６１０とセンサ６６０とが、押込力が付与される方向に積層されている。従って、押込力の検出位置と振動の付与位置とが、同一位置となる。従って、人間の指がカバー６７０に押込力を付与した場合に、当該指そのものに直接的に振動を付与することができる。 Furthermore, the actuator 610 and the sensor 660 are stacked in the direction in which the pushing force is applied. Therefore, the detection position of the pushing force and the vibration application position are the same position. Therefore, when a human finger applies a pressing force to the cover 670, vibration can be directly applied to the finger itself.
　また、センサ６６０が第二弾性体６５０と第三弾性体６０１により挟まれることで、センサ６６０は、伸縮動作を規制されない。そのため、カバー６７０に付与された押込力に対するセンサ６６０の感度が増幅する。従って、付与される押込力が小さい場合であっても、センサ６６０が押込力を検出することができる。ただし、振動提示装置６００は、第三弾性体６０１を備えない構成とすることもできる。 Further, since the sensor 660 is sandwiched between the second elastic body 650 and the third elastic body 601, the sensor 660 is not restricted from extending and contracting. Therefore, the sensitivity of sensor 660 with respect to the pushing force applied to cover 670 is amplified. Therefore, even if the applied pushing force is small, the sensor 660 can detect the pushing force. However, the vibration presentation device 600 may be configured not to include the third elastic body 601.
１，１００，２００，３００，４００，５００：トランスデューサ、　１１，１１１：第一電極シート、　１１ａ，１１１ａ：第一貫通孔、　１２，１１２：第二電極シート、　１２ａ，１１２ａ：第二貫通孔、　１３，４１３，５１３：圧電体シート，誘電体シート、　１４：第一保護シート、　１５：第二保護シート、　２１３ａ，３１３ａ：第一圧電体シート，第一誘電体シート、　２１３ｂ，３１３ｂ：第二圧電体シート，第二誘電体シート、　３１３ａ１：第一内側シート部、　３１３ａ２：第一外側シート部、　３１３ｂ１：第二内側シート部、　３１３ｂ２：第二外側シート部、　５１３ａ：内側シート部、
　５１３ｂ：外側シート部、　６００：振動提示装置、　６０１：第三弾性体、　６１０：アクチュエータ、　６１０ａ，６１０ｂ，６１０ｃ：アクチュエータユニット、　６１１ａ：第一対向電極部、　６１１ｂ：第一端子電極部、　６１２ａ：第二対向電極部、　６１２ｃ：第二端子電極部、　６１３ａ：圧電体本体，誘電体本体、　６１３ｂ：第一延在部、　６１３ｃ：第二延在部、　６１４ａ：第一保護本体、　６１４ｂ：第一保護＿第一端子保護部、　６１４ｃ：第一保護＿第二端子保護部、　６１５ａ：第二保護本体、　６１５ｂ：第二保護＿第一端子保護部、　６１５ｃ：第二保護＿第二端子保護部、　６１６：アクチュエータ本体、　６１７：第一端子、　６１８：第二端子、　６２０：第一導通部、　６３０：第二導通部、　６４０：第一弾性体、　６５０：第二弾性体、　６６０：センサ、　６６０ａ：センサ本体部、　６６０ｂ：センサ端子部、　６７０：カバー、
　６７１：第一カバー、　６７２：第二カバー、　６８０：導線、　６９０：制御装置 1, 100, 200, 300, 400, 500: transducer, 11, 111: first electrode sheet, 11a, 111a: first through hole, 12, 112: second electrode sheet, 12a, 112a: second through hole, 13, 413, 513: piezoelectric sheet, dielectric sheet, 14: first protective sheet, 15: second protective sheet, 213a, 313a: first piezoelectric sheet, first dielectric sheet, 213b, 313b: second Piezoelectric sheet, second dielectric sheet, 313a1: first inner sheet part, 313a2: first outer sheet part, 313b1: second inner sheet part, 313b2: second outer sheet part, 513a: inner sheet part,
513b: Outer sheet part, 600: Vibration presentation device, 601: Third elastic body, 610: Actuator, 610a, 610b, 610c: Actuator unit, 611a: First counter electrode part, 611b: First terminal electrode part, 612a: 612c: second terminal electrode part, 613a: piezoelectric body, dielectric body, 613b: first extension part, 613c: second extension part, 614a: first protection body, 614b: first One protection_first terminal protection unit, 614c: first protection_second terminal protection unit, 615a: second protection body, 615b: second protection_first terminal protection unit, 615c: second protection_second terminal protection , 616: Actuator body, 617: First terminal, 618: Second terminal, 620: First conduction part, 630: Second conduction part, 640: First elastic body, 650: Two elastic bodies, 660: sensor, 660a: sensor body, 660b: sensor terminal portions, 670: cover,
671: first cover, 672: second cover, 680: conducting wire, 690: control device

Claims (12)

  1. 　複数の第一貫通孔を備える第一電極シートと、
    　複数の第二貫通孔を備え、前記第一電極シートに対向して配置される第二電極シートと、
    　少なくとも前記第一電極シートの第一内面と前記第二電極シートの第二内面との間に配置された圧電体シート又は誘電体シートと、
    　前記第一電極シートの第一外面側を被覆する第一保護シートと、
    　前記第二電極シートの第二外面側を被覆する第二保護シートと、
    　を備え、
    　前記第一保護シートが、前記第一電極シートの前記第一貫通孔を介して前記圧電体シート又は前記誘電体シートに接着する、
    　若しくは、
    　前記第二保護シートが、前記第二電極シートの前記第二貫通孔を介して前記圧電体シート又は前記誘電体シートに接着する、トランスデューサ。     A first electrode sheet comprising a plurality of first through holes;
    A second electrode sheet comprising a plurality of second through-holes and disposed to face the first electrode sheet;
    A piezoelectric or dielectric sheet disposed at least between the first inner surface of the first electrode sheet and the second inner surface of the second electrode sheet;
    A first protective sheet covering the first outer surface side of the first electrode sheet;
    A second protective sheet covering the second outer surface side of the second electrode sheet;
    With
    The first protective sheet is bonded to the piezoelectric sheet or the dielectric sheet through the first through hole of the first electrode sheet.
    Or
    The transducer, wherein the second protective sheet adheres to the piezoelectric sheet or the dielectric sheet through the second through hole of the second electrode sheet.
  2. 　前記圧電体シート又は前記誘電体シートは、前記第一電極シート及び前記第二電極シートに非接着で、前記第一電極シートの前記第一内面と前記第二電極シートの前記第二内面との間に配置され、
    　前記第一保護シートは、前記第一電極シートの前記第一貫通孔を介して前記圧電体シート又は前記誘電体シートに接着し、且つ、前記第一電極シートの前記第一外面に接着し、
    　前記第二保護シートは、前記第二電極シートの前記第二貫通孔を介して前記圧電体シート又は前記誘電体シートに接着し、且つ、前記第二電極シートの前記第二外面に接着する、請求項１に記載のトランスデューサ。     The piezoelectric sheet or the dielectric sheet is non-adhered to the first electrode sheet and the second electrode sheet, and is formed between the first inner surface of the first electrode sheet and the second inner surface of the second electrode sheet. Placed between
    The first protective sheet is bonded to the piezoelectric sheet or the dielectric sheet through the first through hole of the first electrode sheet, and is bonded to the first outer surface of the first electrode sheet,
    The second protective sheet is bonded to the piezoelectric sheet or the dielectric sheet through the second through hole of the second electrode sheet, and is bonded to the second outer surface of the second electrode sheet. The transducer according to claim 1.
  3. 　前記圧電体シート又は前記誘電体シートは、
    　前記第一電極シートの前記第一内面側に一体的に形成された第一圧電体シート又は第一誘電体シートと、
    　前記第二電極シートの前記第二内面側に一体的に形成され、前記第一圧電体シート又は前記誘電体シートに接触して配置された第二圧電体シート又は第二誘電体シートと、
    　を備え、
    　前記第一保護シートは、前記第一電極シートの前記第一貫通孔を介して前記第二圧電体シート又は前記第二誘電体シートに接着し、且つ、前記第一電極シートの前記第一外面に接着し、
    　前記第二保護シートは、前記第二電極シートの前記第二貫通孔を介して前記第一圧電体シート又は前記第一誘電体シートに接着し、且つ、前記第二電極シートの前記第二外面に接着する、請求項１に記載のトランスデューサ。     The piezoelectric sheet or the dielectric sheet is
    A first piezoelectric sheet or a first dielectric sheet integrally formed on the first inner surface side of the first electrode sheet;
    A second piezoelectric sheet or a second dielectric sheet formed integrally with the second inner surface of the second electrode sheet and disposed in contact with the first piezoelectric sheet or the dielectric sheet;
    With
    The first protective sheet adheres to the second piezoelectric sheet or the second dielectric sheet through the first through hole of the first electrode sheet, and the first outer surface of the first electrode sheet Glue to
    The second protective sheet adheres to the first piezoelectric sheet or the first dielectric sheet through the second through hole of the second electrode sheet, and the second outer surface of the second electrode sheet The transducer of claim 1, wherein the transducer adheres to.
  4. 　前記圧電体シート又は前記誘電体シートは、
    　前記第一電極シートの前記第一内面側及び前記第一外面側に一体的に形成された第一圧電体シート又は第一誘電体シートと、
    　前記第二電極シートの前記第二内面側及び前記第二外面側に一体的に形成され、前記第一圧電体シート又は前記誘電体シートに接触して配置された第二圧電体シート又は第二誘電体シートと、
    　を備え、
    　前記第一保護シートは、前記第一電極シートの前記第一貫通孔を介して前記第二圧電体シート又は前記第二誘電体シートに接着し、且つ、前記第一圧電体シート又は前記第一誘電体シートに接着し、
    　前記第二保護シートは、前記第二電極シートの前記第二貫通孔を介して前記第一圧電体シート又は前記第一誘電体シートに接着し、且つ、前記第二圧電体シート又は前記第二誘電体シートに接着する、請求項１に記載のトランスデューサ。     The piezoelectric sheet or the dielectric sheet is
    A first piezoelectric sheet or a first dielectric sheet integrally formed on the first inner surface side and the first outer surface side of the first electrode sheet;
    The second piezoelectric sheet or the second piezoelectric sheet formed integrally with the second inner surface side and the second outer surface side of the second electrode sheet and disposed in contact with the first piezoelectric sheet or the dielectric sheet. A dielectric sheet;
    With
    The first protective sheet is bonded to the second piezoelectric sheet or the second dielectric sheet through the first through hole of the first electrode sheet, and the first piezoelectric sheet or the first Adhere to the dielectric sheet,
    The second protective sheet adheres to the first piezoelectric sheet or the first dielectric sheet through the second through hole of the second electrode sheet, and the second piezoelectric sheet or the second dielectric sheet. The transducer of claim 1, wherein the transducer is adhered to a dielectric sheet.
  5. 　前記圧電体シート又は前記誘電体シートは、前記第一電極シートの前記第一内面側に一体的に形成され、
    　前記第一保護シートは、前記第一電極シートの前記第一外面に接着し、
    　前記第二保護シートは、前記第二電極シートの前記第二貫通孔を介して前記圧電体シート又は前記誘電体シートに接着し、且つ、前記第二電極シートの前記第二外面に接着する、請求項１に記載のトランスデューサ。     The piezoelectric sheet or the dielectric sheet is integrally formed on the first inner surface side of the first electrode sheet,
    The first protective sheet is bonded to the first outer surface of the first electrode sheet,
    The second protective sheet is bonded to the piezoelectric sheet or the dielectric sheet through the second through hole of the second electrode sheet, and is bonded to the second outer surface of the second electrode sheet. The transducer according to claim 1.
  6. 　前記圧電体シート又は前記誘電体シートは、前記第一電極シートの前記第一内面側及び前記第一外面側に一体的に形成され、
    　前記第一保護シートは、前記圧電体シート又は前記誘電体シートに接着し、
    　前記第二保護シートは、前記第二電極シートの前記第二貫通孔を介して前記圧電体シート又は前記誘電体シートに接着し、且つ、前記第二電極シートの前記第二外面に接着する、請求項１に記載のトランスデューサ。     The piezoelectric sheet or the dielectric sheet is integrally formed on the first inner surface side and the first outer surface side of the first electrode sheet,
    The first protective sheet is adhered to the piezoelectric sheet or the dielectric sheet,
    The second protective sheet is bonded to the piezoelectric sheet or the dielectric sheet through the second through hole of the second electrode sheet, and is bonded to the second outer surface of the second electrode sheet. The transducer according to claim 1.
  7. 　前記第一電極シート及び前記第二電極シートは、導電性布である、請求項１－６の何れか一項に記載のトランスデューサ。 The transducer according to any one of claims 1 to 6, wherein the first electrode sheet and the second electrode sheet are conductive cloths.
  8. 　前記圧電体シート又は前記誘電体シートの弾性係数は、前記第一電極シート及び前記第二電極シートの弾性係数より大きく、
    　前記圧電体シート又は前記誘電体シートの弾性係数は、前記第一保護シート及び前記第二保護シートの弾性係数より大きい、請求項１－７の何れか一項に記載のトランスデューサ。     The elastic coefficient of the piezoelectric sheet or the dielectric sheet is larger than the elastic coefficients of the first electrode sheet and the second electrode sheet,
    The transducer according to any one of claims 1 to 7, wherein an elastic coefficient of the piezoelectric sheet or the dielectric sheet is larger than an elastic coefficient of the first protective sheet and the second protective sheet.
  9. 　前記第一保護シートは、熱溶着可能な材料により形成され、熱が加えられることにより前記圧電体シート又は前記誘電体シートに接着する、
    　若しくは、
    　前記第二保護シートは、熱溶着可能な材料により形成され、熱が加えられることにより前記圧電体シート又は前記誘電体シートに接着する、請求項１－８の何れか一項に記載のトランスデューサ。     The first protective sheet is formed of a heat-weldable material and adheres to the piezoelectric sheet or the dielectric sheet by applying heat.
    Or
    The transducer according to any one of claims 1 to 8, wherein the second protective sheet is formed of a heat-weldable material and adheres to the piezoelectric sheet or the dielectric sheet when heat is applied.
  10. 　複数の第一貫通孔を備える第一電極シートと、
    　少なくとも前記第一電極シートの第一内面側に配置された圧電体シート又は誘電体シートと、
    　前記第一電極シートの第一外面側を被覆する第一保護シートと、
    　を備え、
    　前記第一保護シートが、前記第一電極シートの前記第一貫通孔を介して前記圧電体シート又は前記誘電体シートに接着する、トランスデューサ。     A first electrode sheet comprising a plurality of first through holes;
    A piezoelectric sheet or a dielectric sheet disposed at least on the first inner surface side of the first electrode sheet;
    A first protective sheet covering the first outer surface side of the first electrode sheet;
    With
    The transducer, wherein the first protective sheet adheres to the piezoelectric sheet or the dielectric sheet through the first through hole of the first electrode sheet.
  11. 　圧電型又は静電型のアクチュエータと、
    　前記アクチュエータに積層される第一弾性体と、
    　前記アクチュエータの前記第一弾性体と反対側に積層される第二弾性体と、
    　前記アクチュエータの周囲に配置される圧電型又は誘電型のセンサと、
    　前記アクチュエータ、前記第一弾性体、前記第二弾性体により形成されるアクチュエータ積層体を積層方向に圧縮した状態で、且つ、前記第一弾性体及び前記第二弾性体を前記アクチュエータより大きく圧縮させた状態で保持するカバーであり、外部から前記カバーに前記積層方向の押込力が付与された場合に前記押込力を前記センサに伝達すると共に、前記アクチュエータが発生した振動により振動する前記カバーと、
    　を備え、
    　前記アクチュエータ及び前記センサの何れか一方は、請求項１－１０の何れか一項に記載のトランスデューサである、振動提示装置。     A piezoelectric or electrostatic actuator;
    A first elastic body laminated on the actuator;
    A second elastic body laminated on the opposite side of the first elastic body of the actuator;
    A piezoelectric or dielectric sensor disposed around the actuator;
    The actuator laminate formed by the actuator, the first elastic body, and the second elastic body is compressed in the stacking direction, and the first elastic body and the second elastic body are compressed more than the actuator. A cover that is held in a state in which the pressing force in the stacking direction is applied to the cover from the outside, and the pressing force is transmitted to the sensor and vibrates due to vibration generated by the actuator; and
    With
    The vibration presentation device, wherein one of the actuator and the sensor is the transducer according to any one of claims 1-10.
  12. 　前記センサは、前記アクチュエータ積層体に積層され、
    　前記振動提示装置は、前記アクチュエータ積層体及び前記センサに積層され、前記センサにおける前記アクチュエータ積層体と反対側に配置される第三弾性体をさらに備え、
    　前記カバーは、前記第三弾性体を前記センサより大きく圧縮させた状態で保持する、請求項１１に記載の振動提示装置。     The sensor is stacked on the actuator stack,
    The vibration presentation device further includes a third elastic body that is stacked on the actuator stacked body and the sensor, and is disposed on the opposite side of the actuator stacked body in the sensor,
    The vibration presenting apparatus according to claim 11, wherein the cover holds the third elastic body in a state where the third elastic body is compressed to be larger than the sensor.
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