JP5673998B2 - Piezoelectric sensor - Google Patents
Piezoelectric sensor Download PDFInfo
- Publication number
- JP5673998B2 JP5673998B2 JP2010147666A JP2010147666A JP5673998B2 JP 5673998 B2 JP5673998 B2 JP 5673998B2 JP 2010147666 A JP2010147666 A JP 2010147666A JP 2010147666 A JP2010147666 A JP 2010147666A JP 5673998 B2 JP5673998 B2 JP 5673998B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- piezoelectric
- heat
- generated
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000033001 locomotion Effects 0.000 claims description 18
- 238000001514 detection method Methods 0.000 claims description 9
- 239000000428 dust Substances 0.000 claims description 3
- 239000010408 film Substances 0.000 description 39
- 230000003321 amplification Effects 0.000 description 17
- 238000003199 nucleic acid amplification method Methods 0.000 description 17
- 230000000052 comparative effect Effects 0.000 description 11
- 238000010586 diagram Methods 0.000 description 6
- 239000002033 PVDF binder Substances 0.000 description 5
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 230000000241 respiratory effect Effects 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 201000006938 muscular dystrophy Diseases 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000002560 therapeutic procedure Methods 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Description
本発明は、温度キャンセル機能を有する圧電型センサに関する。 The present invention relates to a piezoelectric sensor having a temperature canceling function.
従来、被測定物の振動を測定する圧電型振動センサとして、片持ち梁型、ダイアフラム型、圧縮型、せん断型等が知られている。圧電型振動センサは、圧電体に、振動被測定物の振動により作用される圧縮や引っ張り応力に比例した電荷ないし電圧が発生することを利用して振動を検知するものである。
しかしながら、圧電型振動センサにおいては、圧電体に温度変化が生じると、この温度分布に起因する焦電効果によって余分な電気出力を生じ、これがノイズ出力となるという問題がある。そのため、圧電型振動センサを、温度変化が生じる条件下で利用することは困難であった。
Conventionally, as a piezoelectric vibration sensor for measuring the vibration of an object to be measured, a cantilever type, a diaphragm type, a compression type, a shear type, and the like are known. The piezoelectric vibration sensor detects vibration by utilizing the fact that a charge or voltage proportional to the compression or tensile stress applied to the piezoelectric body due to the vibration of the object to be measured is generated.
However, in the piezoelectric vibration sensor, when a temperature change occurs in the piezoelectric body, there is a problem that an extra electrical output is generated due to the pyroelectric effect due to this temperature distribution, which becomes a noise output. Therefore, it has been difficult to use the piezoelectric vibration sensor under conditions in which a temperature change occurs.
かかる課題を解決できる圧電型振動センサとしては、例えば特許文献１には、電極と第１の圧電体と電極と荷重体と電極と第２の圧電体と電極を順次積層して形成され、この第１の圧電体と第２の圧電体が温度変化によって電荷を発生した際、各々の圧電体の正に荷電した側に接した電極同志の組と、負に荷電した側に接した電極同志の組のうち、一方の組の電極間を短絡し、他方の組の電極間で出力を検知することを特徴とする圧電型振動センサが開示され、特許文献２には、基板と、この基板上に固定された感知部と、この感知部上に固着され、慣性質量部として作用する剛体からなる荷重体を有する振動センサユニットを中空パッケージ内に納め、上記振動センサユニットの基板のみを、中空パッケージに浮かして固定し、中空パッケージの底部を被測定物に取付けるようにした圧電型振動センサ装置において、上記中空パッケージの底部側に温度変化に伴って、パッケージに発生する応力を集中させるパッケージの厚さの１０〜５０％のノッチを設けたことを特徴とする圧電型振動センサ装置が開示される。 As a piezoelectric vibration sensor that can solve such a problem, for example, in Patent Document 1, an electrode, a first piezoelectric body, an electrode, a load body, an electrode, a second piezoelectric body, and an electrode are sequentially stacked. When the first piezoelectric body and the second piezoelectric body generate a charge due to a temperature change, a pair of electrodes in contact with the positively charged side of each piezoelectric body and an electrode in contact with the negatively charged side of each piezoelectric body A piezoelectric vibration sensor is disclosed in which one set of electrodes is short-circuited and the output is detected between the other set of electrodes. Patent Document 2 discloses a substrate and the substrate. A vibration sensor unit having a sensing unit fixed on the upper surface and a load body made of a rigid body fixed on the sensing unit and acting as an inertial mass unit is placed in a hollow package, and only the substrate of the vibration sensor unit is hollow. Float on the package and fix it. In the piezoelectric vibration sensor device in which the bottom portion of the die is attached to the object to be measured, 10 to 50% of the thickness of the package that concentrates the stress generated in the package as the temperature changes on the bottom side of the hollow package. A piezoelectric vibration sensor device having a notch is disclosed.
また、体動を検知するのに適した圧電型センサとしては、発明者が提案したブリッジ状に撓ませた圧電フィルムと、圧電フィルムの両端を結ぶ圧電フィルムより短い伸縮可能な部材とから構成され、被検体に当接する伸縮可能な部材の伸縮動に追従して、圧電フィルムの撓みが変化する体動検知センサがある（特許文献３）。 In addition, a piezoelectric sensor suitable for detecting body movement is composed of a piezoelectric film bent in a bridge shape proposed by the inventor and a member that can be expanded and contracted shorter than the piezoelectric film connecting both ends of the piezoelectric film. There is a body motion detection sensor in which the bending of a piezoelectric film changes following the expansion and contraction of an expandable member that contacts the subject (Patent Document 3).
特許文献３に記載された圧電型センサにより、体動を検出することが可能となった。しかしながら、体動という特定の動作に限定されず、一般的・汎用的な動作を検出するための簡易な構造を有する動作検出センサが求められていた。
また、一般的・汎用的な動作を検出するためには、温度変化および振動変化が同時に生じることに起因する焦電性ノイズを排除することが不可欠である。
さらには、軽量かつ小型化可能であることも解決すべき課題である。
The body motion can be detected by the piezoelectric sensor described in Patent Document 3. However, the motion detection sensor is not limited to a specific motion such as body motion, and a motion detection sensor having a simple structure for detecting general and general motions has been demanded.
In order to detect general and general-purpose operations, it is indispensable to eliminate pyroelectric noise caused by simultaneous changes in temperature and vibration.
Furthermore, the problem to be solved is that it is lightweight and can be miniaturized.
上記課題を解決するべく、本発明は、簡易な構造を有し、温度変化および振動変化が同時に生じることに起因する荷電を排除することができる圧電型センサを提供することを目的とする。 In order to solve the above-described problems, an object of the present invention is to provide a piezoelectric sensor that has a simple structure and can eliminate the charge caused by simultaneous occurrence of temperature change and vibration change.
特許文献１および２には、温度変化による電荷の発生の方向が同一になるように第１および第２の圧電体を設け、正または負に荷電する電極同士を短絡させる構成が開示されている。これは、２つの圧電体を電圧源として考え、直列接続で温度変化をキャンセルすることを目的するものである。
発明者は、圧電フィルムのように熱容量が小さい圧電素子においては、圧電素子はいつまでも電荷を提供できるわけではないことに着目し、並列接続で温度変化をキャンセルすることの着想を得た。すなわち、圧電フィルムはいつまでも電荷を提供できるわけではなく正電荷と負電荷が導線を伝わってキャンセルされるとそれ以上電荷は生成されないのである。そこで、発明者は、第１および第２の圧電体を設け、正または負に荷電する第１の圧電体の電極と、それとは逆に荷電する第２の圧電体の電極とを接続するという特許文献１および２とは逆転の発想により本発明を創作した。
Patent Documents 1 and 2 disclose a configuration in which first and second piezoelectric bodies are provided so that the directions of charge generation due to temperature changes are the same, and the positively or negatively charged electrodes are short-circuited. . This is intended to cancel temperature changes by connecting two piezoelectric bodies as voltage sources and connecting them in series.
The inventor noticed that in a piezoelectric element having a small heat capacity such as a piezoelectric film, the piezoelectric element cannot provide an electric charge indefinitely, and obtained the idea of canceling a temperature change by parallel connection. That is, the piezoelectric film cannot provide a charge indefinitely, and when the positive charge and the negative charge are canceled through the conductive wire, no further charge is generated. Therefore, the inventor provides the first and second piezoelectric bodies, and connects the electrodes of the first piezoelectric body charged positively or negatively and the electrodes of the second piezoelectric body charged oppositely. The present invention was created based on the idea of reversing from Patent Documents 1 and 2.
本発明は、以下の技術手段により構成される。
［１］可撓性のある第１の圧電素子（Ａ）と、第１の圧電素子（Ａ）と実質的に同一形状かつ実質的に同一素子容量で可撓性のある第２の圧電素子（Ｂ）と、を備え、温度キャンセル機能を有する振動検出センサであって、第１の圧電素子（Ａ）と第２の圧電素子（Ｂ）とを、一方の圧電素子の熱を付与した際に正の電荷が生じる面と他方の圧電素子の熱を付与した際に負の電荷が生じる面とが同一方向となるように配置すること、第１の圧電素子（Ａ）の熱を付与した際に正の電荷が生じる面と第２の圧電素子（Ｂ）の熱を付与した際に負の電荷が生じる面とを導電線により電気的に接続し、かつ、第１の圧電素子（Ａ）の熱を付与した際に負の電荷が生じる面と第２の圧電素子（Ｂ）の熱を付与した際に正の電荷が生じる面とを導電線により電気的に接続したこと、第１の圧電素子（Ａ）および第２の圧電素子（Ｂ）が圧電フィルムであること、並びに、第１の圧電素子（Ａ）と第２の圧電素子（Ｂ）とを同じ方向に屈曲するように対称に配置し、第１の圧電素子（Ａ）および第２の圧電素子（Ｂ）を屈曲させて生じる電荷信号を検出することを特徴とする圧電型センサ。
［２］可撓性のある第１の圧電素子（Ａ）と、第１の圧電素子（Ａ）と実質的に同一形状かつ実質的に同一素子容量で可撓性のある第２の圧電素子（Ｂ）と、を備え、振動キャンセル機能を有する温度検出センサであって、第１の圧電素子（Ａ）と第２の圧電素子（Ｂ）とを、一方の圧電素子の熱を付与した際に正の電荷が生じる面と他方の圧電素子の熱を付与した際に負の電荷が生じる面とが同一方向となるように配置すること、第１の圧電素子（Ａ）の熱を付与した際に正の電荷が生じる面と第２の圧電素子（Ｂ）の熱を付与した際に正の電荷が生じる面とを導電線により電気的に接続し、かつ、第１の圧電素子（Ａ）の熱を付与した際に負の電荷が生じる面と第２の圧電素子（Ｂ）の熱を付与した際に負の電荷が生じる面とを導電線により電気的に接続したこと、第１の圧電素子（Ａ）および第２の圧電素子（Ｂ）が圧電フィルムであること、並びに、第１の圧電素子（Ａ）と第２の圧電素子（Ｂ）とを同じ方向に屈曲するように対称に配置したことを特徴とする圧電型センサ。
［３］前記第１の圧電素子（Ａ）と前記第２の圧電素子（Ｂ）とを開閉弁の動きにあわせて同じ動きをするように配置したことを特徴とする［１］の圧電型センサ。
［４］前記開閉弁が、防塵マスクの電磁弁であることを特徴とする［３］の圧電型センサ。
The present invention is constituted by the following technical means.
[1] A flexible first piezoelectric element (A) and a flexible second piezoelectric element having substantially the same shape and substantially the same element capacity as the first piezoelectric element (A) (B), having a temperature canceling function, when the heat of one piezoelectric element is applied to the first piezoelectric element (A) and the second piezoelectric element (B) that the surface negative charge thermal positive side and the other in which charge is generated in the piezoelectric element upon applying occurs is arranged to be the same direction, imparted with heat of the first piezoelectric element (a) The surface where the positive charge is generated and the surface where the negative charge is generated when the heat of the second piezoelectric element (B) is applied are electrically connected by the conductive wire , and the first piezoelectric element (A and a surface on which positive charge is generated in the conductive wire on a surface negative charge heat upon applying the results of) and upon application of heat of the second piezoelectric element (B) Ri that are electrically connected, that the first piezoelectric element (A) and a second piezoelectric element (B) is a piezoelectric film, and a first piezoelectric element (A) and a second piezoelectric element (B ) Are symmetrically arranged so as to be bent in the same direction, and a charge signal generated by bending the first piezoelectric element (A) and the second piezoelectric element (B) is detected. .
[2] A flexible first piezoelectric element (A) and a flexible second piezoelectric element having substantially the same shape and substantially the same element capacity as the first piezoelectric element (A) (B) and having a vibration canceling function when the heat of one piezoelectric element is applied to the first piezoelectric element (A) and the second piezoelectric element (B) that the surface negative charge thermal positive side and the other in which charge is generated in the piezoelectric element upon applying occurs is arranged to be the same direction, imparted with heat of the first piezoelectric element (a) The surface where the positive charge is generated and the surface where the positive charge is generated when the heat of the second piezoelectric element (B) is applied are electrically connected by the conductive wire , and the first piezoelectric element (A the conductive line and a surface on which the negative charge is generated when a negative charge when heat was applied was the surface and applying heat of a second piezoelectric element (B) resulting in) Ri that are electrically connected, that the first piezoelectric element (A) and a second piezoelectric element (B) is a piezoelectric film, and a first piezoelectric element (A) and a second piezoelectric element (B ) Are arranged symmetrically so as to be bent in the same direction .
[3] The piezoelectric of the first piezoelectric element (A) and said second piezoelectric element and (B) according to the movement of the on-off valve, characterized in that arranged to the same motion [1] Sensor.
[4] The piezoelectric sensor according to [3] , wherein the on-off valve is an electromagnetic valve of a dust mask .
本発明によれば、簡易な構造を有し、温度変化および振動変化が同時に生じることに起因する焦電性ノイズも排除することができる圧電型センサを提供することが可能となる。
また、本発明の圧電型センサは、軽量であり小型化も可能である。
According to the present invention, it is possible to provide a piezoelectric sensor that has a simple structure and can eliminate pyroelectric noise caused by temperature change and vibration change occurring simultaneously.
Further, the piezoelectric sensor of the present invention is lightweight and can be downsized.
本発明に係る可撓性のある圧電素子（圧電フィルム）の基本特性を図１および図２を参照しながら説明する。図１は、同一形状かつ同一素子容量の圧電フィルムＡ、Ｂを、Ａは表面が上面となるように配置とし、Ｂは裏面が上面となるよう配置した状態を示す図面である。
図２（ア）に、圧電フィルムＡは表面側に熱が付与されるように配置し、圧電フィルムＢは裏面側に熱が付与されるように配置し、両圧電フィルムに同時に温度変化を与え際に生じる電荷の状態を示す。図２（ア）から、並列に配置された圧電フィルムＡ、Ｂに同じ方向から熱を付与した際には、各表面側が正に荷電し、各裏面側が負に荷電することが確認できる。
図２（イ）に、図２（ア）と同じ配置の圧電フィルムＡ、Ｂに同じ方向から振動を与えた際に生じる電荷の状態を示す。図２（イ）から、圧電フィルムＡ、Ｂに温度変化が生じた際には、圧電フィルムの配置の表裏にかかわらず、振動が与えられた側の面が正に荷電し、その反対面が負に荷電することが確認できる。
The basic characteristics of the flexible piezoelectric element (piezoelectric film) according to the present invention will be described with reference to FIGS. FIG. 1 is a view showing a state in which piezoelectric films A and B having the same shape and the same element capacity are arranged so that A is a top surface and B is a back surface.
In FIG. 2A, the piezoelectric film A is disposed so that heat is applied to the front surface side, and the piezoelectric film B is disposed so that heat is applied to the back surface side, and a temperature change is simultaneously applied to both piezoelectric films. It shows the state of the electric charge generated at the time. 2A, when heat is applied from the same direction to the piezoelectric films A and B arranged in parallel, it can be confirmed that each front surface side is positively charged and each back surface side is negatively charged.
FIG. 2 (a) shows a state of electric charges generated when vibrations are applied from the same direction to the piezoelectric films A and B having the same arrangement as in FIG. 2 (a). From FIG. 2 (a), when a temperature change occurs in the piezoelectric films A and B, the surface on which the vibration is applied is positively charged regardless of the arrangement of the piezoelectric films, and the opposite surface is It can be confirmed that it is negatively charged.
図３は、同一方向から熱および振動が印加される場合に温度変化をキャンセルし、振動のみを検出する温度キャンセル型の回路構成であり、図４は、同一方向から熱および振動が印加される場合に振動をキャンセルし、温度変化のみを検出する振動キャンセル型の回路構成である。
図３の回路において、温度変化が生じた際の荷電状態を示したのが図５（ア）であり、振動が生じた際の荷電状態を示したのが図５（イ）である。図５（ア）に示すように、温度変化により生じた電荷については、圧電素子Ａ、Ｂ間を移動するため出力が生じない。他方、図５（イ）に示すように、振動により生じた電荷については、導電線に接続された図示しない測定装置により出力が検出される。
FIG. 3 shows a temperature canceling type circuit configuration that cancels temperature changes when only heat and vibration are applied from the same direction and detects only vibration, and FIG. 4 is applied with heat and vibration from the same direction. In this case, the vibration canceling type circuit configuration in which the vibration is canceled and only the temperature change is detected.
In the circuit of FIG. 3, FIG. 5 (a) shows the charged state when the temperature change occurs, and FIG. 5 (a) shows the charged state when the vibration occurs. As shown in FIG. 5A, the electric charge generated due to the temperature change is not generated because it moves between the piezoelectric elements A and B. On the other hand, as shown in FIG. 5A, the output of the electric charges generated by the vibration is detected by a measuring device (not shown) connected to the conductive wire.
図４の回路において、温度変化が生じた際の荷電状態を示したのが図６（ア）であり、振動が生じた際の荷電状態を示したのが図６（イ）である。図６（ア）に示すように、温度変化により生じた電荷については、導電線に接続された図示しない測定装置により出力が検出される。他方、図６（イ）に示すように、振動により生じた電荷については、圧電素子Ａ、Ｂ間を移動するため出力が生じない。 In the circuit of FIG. 4, FIG. 6A shows a charged state when a temperature change occurs, and FIG. 6A shows a charged state when a vibration occurs. As shown in FIG. 6A, the output of the charge generated by the temperature change is detected by a measuring device (not shown) connected to the conductive line. On the other hand, as shown in FIG. 6 (a), the electric charges generated by vibration move between the piezoelectric elements A and B, so that no output is generated.
このように、本発明によれば、一対の同一形状かつ同一素子容量の圧電素子を用いて振動または温度のいずれか一方のみを高精度に検出することが可能となる。例えば、開閉弁付きマスクの弁の動作検出においては、振動のみならず熱も検出されるが、そのような振動と熱が同時に生じる場面への適用に本発明は好適である。
圧電素子の枚数は２枚に限定されない。同一形状かつ同一素子容量の圧電素子を偶数枚用意し、これらを組み合わせて振動または温度のいずれかを検出するようにしてもよい。
Thus, according to the present invention, it is possible to detect only one of vibration and temperature with high accuracy using a pair of piezoelectric elements having the same shape and the same element capacity. For example, in the operation detection of the valve of the mask with the on-off valve, not only vibration but also heat is detected, but the present invention is suitable for application to a scene where such vibration and heat occur simultaneously.
The number of piezoelectric elements is not limited to two. An even number of piezoelectric elements having the same shape and the same element capacity may be prepared, and these may be combined to detect either vibration or temperature.
圧電素子としては、ピエゾ効果を示すものであればその種別を問わず、例えば、PVDF（Polyvinylidene fluoride film：ポリフッ化ビリニデン）やチタン酸バリウム、チタン酸ジルコン酸鉛(PZT)などからなる圧電セラミックまたは圧電セラミック薄膜があげられる。また、Pb(Zr・Ti)O3 、PbTiO3 、（Pb,La)(ZR，Ti)O3 等の無機圧電材料の微粉末を熱可塑性樹脂や熱硬化性樹脂等の高分子材料中に分散させたものを用いてもよい。
人体への装着して用いる場合、具体的には、体動検知センサとして胴体へ着用する場合には、装着感を高めるためには軽量で柔軟性に富むものが好ましく、軽量で柔軟性に富み、加工性がよいPVDFが好ましい材としてあげられる。PVDFは応答帯域がきわめて広く、固有の共振周波数を持ちにくいという特徴も有する。なお、PVDFは高温度環境下での利用に適していないため、そのような環境下で利用する場合には圧電セラミックを使用した薄膜、厚膜を用いることとなる。
Any piezoelectric element may be used as long as it exhibits a piezo effect, such as a piezoelectric ceramic made of PVDF (Polyvinylidene fluoride film), barium titanate, lead zirconate titanate (PZT), or the like. Examples include a piezoelectric ceramic thin film. In addition, fine powder of inorganic piezoelectric material such as Pb (Zr · Ti) O 3 , PbTiO 3 , (Pb, La) (ZR, Ti) O 3 is put into a polymer material such as thermoplastic resin or thermosetting resin. A dispersed one may be used.
When worn on the human body, specifically, when worn on the torso as a body motion detection sensor, it is preferably lightweight and flexible to enhance the feeling of wearing, and lightweight and flexible. PVDF having good processability is a preferable material. PVDF also has the characteristics that the response band is extremely wide and it is difficult to have a specific resonance frequency. Since PVDF is not suitable for use in a high temperature environment, a thin film or a thick film using a piezoelectric ceramic is used when it is used in such an environment.
圧電素子の固定は、全ての圧電素子が同じ方向に屈曲するような態様であればいかなる態様で固定してもよく、例えば、点対称に配置したり線対称に並設してもよい。この際、面積の大きい方の面に対して垂直方向から力を作用させ、圧電素子を歪ませて生じる電荷信号を検出するのが好ましい。例えば、開閉弁に圧電フィルムを固定する場合には、開閉弁の動きにあわせて一対の圧電素子が同じ動きをするように開閉弁の中心線を挟んで線対称に固定することが開示される。圧電素子をそれともに可撓される薄板（弾性部材）に固定し、この薄板を介して所望箇所に設置してもよい。
また、圧電素子は、導電布テープによりシールドすることでノイズ対策を施すのが好ましい。導電布テープは電子機器の電磁波や静電気のシールド、信号ケーブルやコネクタのシールドに使用される一般的なものでよく、粘着面にも導電性があり、貼り合わせても導通があるため、確実にシールド効果を得ることができる。
The piezoelectric elements may be fixed in any manner as long as all the piezoelectric elements are bent in the same direction. For example, the piezoelectric elements may be arranged point-symmetrically or line-up symmetrically. At this time, it is preferable to detect a charge signal generated by applying a force from the vertical direction to the surface having the larger area and distorting the piezoelectric element. For example, when a piezoelectric film is fixed to the on-off valve, it is disclosed that the pair of piezoelectric elements are fixed symmetrically with respect to the center line of the on-off valve so that the pair of piezoelectric elements move in accordance with the movement of the on-off valve. . The piezoelectric element may be fixed to a thin plate (elastic member) that is flexible together, and installed at a desired location via the thin plate.
Moreover, it is preferable to take noise countermeasures by shielding the piezoelectric element with a conductive cloth tape. Conductive cloth tape can be a general one used for shielding electromagnetic waves and static electricity of electronic equipment, shielding of signal cables and connectors, and the adhesive surface is also conductive and conductive even when bonded. A shielding effect can be obtained.
本発明に係る圧電型センサは、チャージアンプやFET（電界降下トランジスタ）などの測定回路に接続され、そこで圧電素子に誘起された電荷量を電圧信号に変換する。測定回路を通すことにより、圧電素子に電荷が誘起された時だけ出力することができる。 The piezoelectric sensor according to the present invention is connected to a measurement circuit such as a charge amplifier or FET (field drop transistor), and converts the amount of charge induced in the piezoelectric element into a voltage signal. By passing through the measurement circuit, it is possible to output only when charge is induced in the piezoelectric element.
以下では、本発明の詳細を実施例で説明するが、本発明はこれらの実施例によって何ら限定されることはない。 Hereinafter, details of the present invention will be described with reference to examples, but the present invention is not limited to these examples.
実施例１は、温度キャンセル機能を有する圧電型動作センサに関する。
実施例１のセンサは、長手方向の歪に応じた信号を出力する一対の方形状の圧電フィルムにより構成され、図３および図５の回路構成を有する。実施例１では東京センサー社の圧電フィルム（ＤＴシリーズ）を使用した。この製品は、ピエゾフィルムに電極を銀インクスクリーン印刷し、薄いアクリルコーティングを施して構成されている。わずかなひずみでも数ｍＶの電圧を発生し、一般的なストレインゲージよりも６０ｄＢも大きな値を得ることができるとされている。実施例１で使用した圧電フィルムの主な仕様は次のとおりである。
Example 1 relates to a piezoelectric motion sensor having a temperature canceling function.
The sensor of Example 1 is composed of a pair of rectangular piezoelectric films that output a signal corresponding to the strain in the longitudinal direction, and has the circuit configuration of FIGS. 3 and 5. In Example 1, a piezoelectric film (DT series) manufactured by Tokyo Sensor was used. This product consists of a piezoelectric film with electrodes printed on a silver ink screen and a thin acrylic coating. It is said that a voltage of several mV is generated even with a slight strain, and a value as large as 60 dB can be obtained as compared with a general strain gauge. The main specifications of the piezoelectric film used in Example 1 are as follows.
型番：ＤＴ１−０２８Ｋ
フィルムの厚さ：２８μｍ
シート部寸法：１６ｍｍ×４１ｍｍ
電極部寸法：１２ｍｍ×３０ｍｍ
静電容量：１．３８ｎＦ
Model number: DT1-028K
Film thickness: 28μm
Sheet size: 16mm x 41mm
Electrode size: 12mm x 30mm
Capacitance: 1.38nF
図７は、実施例１に係る圧電型センサの配置構成図である。一対の圧電フィルムＡ、Ｂは、それぞれの一方の端部が板部材１に固定され、それ以外の部分は可動となっている。一対の圧電フィルムの固定された側とは反対側の端部はヒモ付きの連結部材３で固定されており、ヒモ２を引っ張ることにより両圧電フィルムに同時に振動が与えられるようになっている。一対の圧電フィルの板部材１に固定された側の端部においては、□、■の部分で導線と結線され、測定装置（四国計測工業社製呼吸センサー用アンプ）に出力が検出されるようになっている。
測定装置の増幅度は、チャージアンプの増幅度、後段のアンプの増幅度を合成して入力信号に対して１４００倍で測定した。図８に増幅度１４００倍の測定結果を示す。図８から、ヒモの引っ張りにより振動が生じたのと同期して測定装置により出力が検出されることが確認された。
FIG. 7 is an arrangement configuration diagram of the piezoelectric sensor according to the first embodiment. One end of each of the pair of piezoelectric films A and B is fixed to the plate member 1, and the other part is movable. The ends of the pair of piezoelectric films opposite to the fixed side are fixed by a connecting member 3 with a string, and by pulling the string 2, vibrations are simultaneously applied to both piezoelectric films. The ends of the pair of piezoelectric films fixed to the plate member 1 are connected to lead wires at □ and ■, so that the output is detected by the measuring device (a respiratory sensor amplifier manufactured by Shikoku Sangyo Kogyo Co., Ltd.). It has become.
The amplification factor of the measuring device was measured at 1400 times the input signal by combining the amplification factor of the charge amplifier and the amplification factor of the subsequent amplifier. FIG. 8 shows a measurement result with an amplification degree of 1400 times. From FIG. 8, it was confirmed that the output was detected by the measuring device in synchronization with the occurrence of vibration due to the pulling of the string.
実施例２は、使用した圧電フィルムを除き、実施例１と同じ構成の圧電型動作センサに関する。実施例２で使用した圧電フィルムの主な仕様は次のとおりである。 Example 2 relates to a piezoelectric motion sensor having the same configuration as that of Example 1 except for the used piezoelectric film. The main specifications of the piezoelectric film used in Example 2 are as follows.
型番：ＤＴ１−０５２Ｋ
フィルムの厚さ：５２μｍ
シート部寸法：１６ｍｍ×４１ｍｍ
電極部寸法：１２ｍｍ×３０ｍｍ
静電容量：０．７４ｎＦ
Model number: DT1-052K
Film thickness: 52 μm
Sheet size: 16mm x 41mm
Electrode size: 12mm x 30mm
Capacitance: 0.74nF
測定装置の増幅度は、チャージアンプの増幅度、後段のアンプの増幅度を合成して入力信号に対して２０００倍で測定した。図９に増幅度２０００倍の測定結果を示す。図９から、ヒモの引っ張りにより振動が生じたのと同期して測定装置により出力が検出されることが確認された。 The amplification factor of the measuring device was measured at 2000 times the input signal by combining the amplification factor of the charge amplifier and the amplification factor of the subsequent amplifier. FIG. 9 shows the measurement results with an amplification factor of 2000. From FIG. 9, it was confirmed that the output was detected by the measuring device in synchronization with the occurrence of vibration due to the pulling of the string.
実施例３では、実施例１の圧電型動作センサ（温度キャンセル型）にドライヤーで温風をブローした際の出力を測定し、温度による出力がキャンセルされることを検証した。ドライヤーは、フカイ工業製ＦＨＤ−１２０２ｉ（１２００Ｗ）を使用した。
［比較例１］
図１０は、比較例１に係る圧電型センサの配置構成図である。圧電フィルムＡ、Ｂは、実施例１と同じものを使用した。一対の圧電フィルムＡ、Ｂは、それぞれの全面が板部材１に固定され、振動の影響を受けないようになっている。
図１１は、比較例１に係る圧電型センサに温風を当てた際の測定装置により出力（増幅度１４００倍）を示すグラフである。図１１では、僅かに出力が生じているがこれは実験に使用したピエゾフィルムの面積が広く全面積に均一に温風が当たってないためにその差分が出力されているからであると推測される。この問題は、使用する状況によりピエゾフィルムの面積や形状を調整することによりさらに小さくすることが可能と考えられる。もっとも、温度キャンセル型センサで振動のみを検出する場合、振動による出力と温風の非平衡による微小な出力の出力差が大きいため、実用面での問題はないと考えられる。
In Example 3, the output when hot air was blown with a dryer to the piezoelectric motion sensor (temperature cancellation type) of Example 1 was measured, and it was verified that the output due to temperature was canceled. As the dryer, FHD-1202i (1200 W) manufactured by Fukai Industry was used.
[Comparative Example 1]
FIG. 10 is an arrangement configuration diagram of the piezoelectric sensor according to the first comparative example. Piezoelectric films A and B were the same as in Example 1. The entire surface of each of the pair of piezoelectric films A and B is fixed to the plate member 1 so as not to be affected by vibration.
FIG. 11 is a graph showing an output (amplification degree 1400 times) by a measuring device when hot air is applied to the piezoelectric sensor according to Comparative Example 1. In FIG. 11, there is a slight output, which is presumed to be because the difference is output because the area of the piezo film used in the experiment is large and the hot air is not uniformly applied to the entire area. The It is considered that this problem can be further reduced by adjusting the area and shape of the piezo film according to the use situation. However, when only the vibration is detected by the temperature canceling sensor, there is no problem in practical use because the output difference between the output due to the vibration and the minute output due to the unbalanced warm air is large.
［実施例３］
図１２は、実施例３に係る圧電型センサ（温度キャンセル型）の配置構成図である。
比較例１のセンサは、比較例１のセンサと固定態様の点においてのみ相違し、ドライヤーにより温風を当てた際に熱と振動が生じる配置となっている。
図１３は、実施例３に係る圧電型センサに温風を当てた際の測定装置により出力（増幅度１４００倍）を示すグラフである。図１３では、温風の印加と同期して測定装置により振動に起因する出力が検出されることが確認された。（図１３における温度に起因する出力は、図１１に示す出力であると考えられるところ、図１３の出力は専ら振動に起因するものであるということができる。）
[Example 3]
FIG. 12 is an arrangement configuration diagram of a piezoelectric sensor (temperature canceling type) according to the third embodiment.
The sensor of the comparative example 1 is different from the sensor of the comparative example 1 only in the fixing aspect, and is arranged such that heat and vibration are generated when hot air is applied by a dryer.
FIG. 13 is a graph showing an output (amplification degree 1400 times) by a measuring device when hot air is applied to the piezoelectric sensor according to the third embodiment. In FIG. 13, it was confirmed that the output caused by the vibration was detected by the measuring device in synchronization with the application of the hot air. (The output due to temperature in FIG. 13 is considered to be the output shown in FIG. 11, and it can be said that the output in FIG. 13 is exclusively due to vibration.)
実施例４では、実施例２の圧電型動作センサ（温度キャンセル型）にドライヤーで温風をブローした際の出力を測定し、温度による出力がキャンセルされることを検証した。
［比較例２］
比較例２に係る圧電型センサの配置構成は図１０と同じである。圧電フィルムＡ、Ｂは、実施例２と同じものを使用した。
図１４は、比較例２に係る圧電型センサに温風を当てた際の測定装置により出力（増幅度２０００倍）を示すグラフである。ここでも、図１１と同様に僅かに出力が生じているが、ピエゾフィルムの面積が広く全面積に均一に温風が当たってないための差分出力あると推測されるところ、実用面での問題はないと考えられる。
In Example 4, the output when hot air was blown with a dryer was measured on the piezoelectric motion sensor (temperature cancellation type) of Example 2, and it was verified that the output due to temperature was cancelled.
[Comparative Example 2]
The arrangement configuration of the piezoelectric sensor according to Comparative Example 2 is the same as FIG. Piezoelectric films A and B were the same as in Example 2.
FIG. 14 is a graph showing an output (amplification degree 2000 times) by a measuring device when hot air is applied to the piezoelectric sensor according to Comparative Example 2. Here, as in FIG. 11, a slight output is generated, but it is assumed that there is a differential output because the area of the piezo film is large and the hot air is not uniformly applied to the entire area. It is not considered.
［実施例４］
実施例４に係る圧電型センサの配置構成は図１２と同じである。圧電フィルムＡ、Ｂは、実施例２と同じものを使用した。図１５は、実施例４に係る圧電型センサに温風を当てた際の測定装置により出力（増幅度２０００倍）を示すグラフである。図１５では、温風の印加と同期して測定装置により振動に起因する出力が検出されることが確認された。（図１５における温度に起因する出力は、図１４に示す出力であると考えられるところ、図１５の出力は専ら振動に起因するものであるということができる。）
[Example 4]
The arrangement configuration of the piezoelectric sensor according to the fourth embodiment is the same as that shown in FIG. Piezoelectric films A and B were the same as in Example 2. FIG. 15 is a graph showing an output (amplification degree: 2000 times) by a measuring apparatus when hot air is applied to the piezoelectric sensor according to Example 4. In FIG. 15, it was confirmed that the output caused by the vibration was detected by the measuring device in synchronization with the application of the hot air. (The output due to the temperature in FIG. 15 is considered to be the output shown in FIG. 14, but it can be said that the output in FIG. 15 is exclusively due to vibration.)
本発明は、温度変化の生じる環境下での振動検出の用途であればあらゆる場面に適用可能である。具体例としては、電磁弁付きの防塵マスクのスイッチ、人口呼吸器使用者の呼吸監視、筋ジストロフィー患者の在宅人工呼吸療法、車両運転者の呼吸状態を監視する居眠り検知システム、動物の分娩タイミングの監視における利用があげられる。 The present invention can be applied to any scene as long as it is used for vibration detection in an environment where temperature changes occur. Specific examples include dust mask switches with solenoid valves, respiratory monitoring of artificial respiratory users, home ventilator therapy for muscular dystrophy patients, dozing detection systems that monitor the respiratory status of vehicle drivers, and monitoring of animal delivery timing. Can be used.
１ 固定板
２ ヒモ
３ 連結部材
1 fixing plate 2 string 3 connecting member
Claims (4)
第１の圧電素子（Ａ）と第２の圧電素子（Ｂ）とを、一方の圧電素子の熱を付与した際に正の電荷が生じる面と他方の圧電素子の熱を付与した際に負の電荷が生じる面とが同一方向となるように配置すること、
第１の圧電素子（Ａ）の熱を付与した際に正の電荷が生じる面と第２の圧電素子（Ｂ）の熱を付与した際に負の電荷が生じる面とを導電線により電気的に接続し、かつ、第１の圧電素子（Ａ）の熱を付与した際に負の電荷が生じる面と第２の圧電素子（Ｂ）の熱を付与した際に正の電荷が生じる面とを導電線により電気的に接続したこと、
第１の圧電素子（Ａ）および第２の圧電素子（Ｂ）が圧電フィルムであること、並びに、
第１の圧電素子（Ａ）と第２の圧電素子（Ｂ）とを同じ方向に屈曲するように対称に配置し、第１の圧電素子（Ａ）および第２の圧電素子（Ｂ）を屈曲させて生じる電荷信号を検出することを特徴とする圧電型センサ。 A flexible first piezoelectric element (A) and a flexible second piezoelectric element (B) having substantially the same shape and substantially the same element capacity as the first piezoelectric element (A) And a vibration detection sensor having a temperature canceling function,
When the first piezoelectric element (A) and the second piezoelectric element (B) are applied with heat applied to one piezoelectric element, a surface that generates a positive charge and when applied to the other piezoelectric element are negative. That the surface where the electric charge is generated is in the same direction ,
The surface where the positive charge is generated when the heat of the first piezoelectric element (A) is applied and the surface where the negative charge is generated when the heat of the second piezoelectric element (B) is applied are electrically connected by the conductive wire . And a surface that generates a negative charge when heat is applied to the first piezoelectric element (A) and a surface that generates a positive charge when heat is applied to the second piezoelectric element (B). Electrically connected by a conductive wire ,
The first piezoelectric element (A) and the second piezoelectric element (B) are piezoelectric films; and
The first piezoelectric element (A) and the second piezoelectric element (B) are arranged symmetrically so as to bend in the same direction, and the first piezoelectric element (A) and the second piezoelectric element (B) are bent. A piezoelectric sensor characterized by detecting a charge signal generated by the operation .
第１の圧電素子（Ａ）と第２の圧電素子（Ｂ）とを、一方の圧電素子の熱を付与した際に正の電荷が生じる面と他方の圧電素子の熱を付与した際に負の電荷が生じる面とが同一方向となるように配置すること、
第１の圧電素子（Ａ）の熱を付与した際に正の電荷が生じる面と第２の圧電素子（Ｂ）の熱を付与した際に正の電荷が生じる面とを導電線により電気的に接続し、かつ、第１の圧電素子（Ａ）の熱を付与した際に負の電荷が生じる面と第２の圧電素子（Ｂ）の熱を付与した際に負の電荷が生じる面とを導電線により電気的に接続したこと、
第１の圧電素子（Ａ）および第２の圧電素子（Ｂ）が圧電フィルムであること、並びに、
第１の圧電素子（Ａ）と第２の圧電素子（Ｂ）とを同じ方向に屈曲するように対称に配置したことを特徴とする圧電型センサ。 A flexible first piezoelectric element (A) and a flexible second piezoelectric element (B) having substantially the same shape and substantially the same element capacity as the first piezoelectric element (A) And a temperature detection sensor having a vibration canceling function,
When the first piezoelectric element (A) and the second piezoelectric element (B) are applied with heat applied to one piezoelectric element, a surface that generates a positive charge and when applied to the other piezoelectric element are negative. That the surface where the electric charge is generated is in the same direction ,
The surface where the positive charge is generated when the heat of the first piezoelectric element (A) is applied and the surface where the positive charge is generated when the heat of the second piezoelectric element (B) is applied are electrically connected by the conductive wire . And a surface on which negative charges are generated when heat is applied to the first piezoelectric element (A) and a surface on which negative charges are generated when heat is applied to the second piezoelectric element (B). Electrically connected by a conductive wire ,
The first piezoelectric element (A) and the second piezoelectric element (B) are piezoelectric films; and
A piezoelectric sensor, wherein the first piezoelectric element (A) and the second piezoelectric element (B) are arranged symmetrically so as to be bent in the same direction .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010147666A JP5673998B2 (en) | 2010-06-29 | 2010-06-29 | Piezoelectric sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010147666A JP5673998B2 (en) | 2010-06-29 | 2010-06-29 | Piezoelectric sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012013440A JP2012013440A (en) | 2012-01-19 |
| JP5673998B2 true JP5673998B2 (en) | 2015-02-18 |
Family
ID=45600074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010147666A Active JP5673998B2 (en) | 2010-06-29 | 2010-06-29 | Piezoelectric sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5673998B2 (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101493374B1 (en) * | 2013-09-16 | 2015-02-25 | 주식회사 코러스트 | Broadband functional ultrasonic patch |
| KR101759851B1 (en) * | 2013-10-08 | 2017-07-19 | 다이낑 고오교 가부시키가이샤 | Touch panel, touch input device, and electronic device |
| US10381546B2 (en) * | 2014-02-26 | 2019-08-13 | Daikin Industries, Ltd. | Bimorph-type piezoelectric film |
| JP5897055B2 (en) | 2014-03-07 | 2016-03-30 | 日本写真印刷株式会社 | Pressure sensor and touch panel |
| WO2017212523A1 (en) * | 2016-06-06 | 2017-12-14 | 株式会社村田製作所 | Antibacterial piezoelectric thread, antibacterial fabric, clothing, medical member, bioactive piezoelectric, and piezoelectric thread for substance adsorption |
| HUE059513T2 (en) | 2016-10-20 | 2022-11-28 | Grieshaber Vega Kg | Vibration sensor with integrated temperature detection |
| JP2018189554A (en) * | 2017-05-09 | 2018-11-29 | 株式会社Ｓｏｋｅｎ | Heat flow type sensor module |
| JP2018203636A (en) * | 2017-05-31 | 2018-12-27 | 株式会社村田製作所 | Antibacterial member |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2348481A1 (en) * | 1976-04-14 | 1977-11-10 | Minnesota Mining & Mfg | DETECTION DEVICE, ESPECIALLY OF TEMPERATURE OR CONSTRAINT DEVELOPING IN A POLARIZED MATERIAL |
| JPH076766B2 (en) * | 1986-12-12 | 1995-01-30 | ダイキン工業株式会社 | Angle detector |
| JPH05164645A (en) * | 1991-12-11 | 1993-06-29 | Japan Electron Control Syst Co Ltd | Pressure sensor |
| JP2985645B2 (en) * | 1994-03-07 | 1999-12-06 | 松下電器産業株式会社 | Human body detection device |
| KR0165517B1 (en) * | 1996-03-07 | 1999-05-01 | 김광호 | Vibration detecting sensor |
-
2010
- 2010-06-29 JP JP2010147666A patent/JP5673998B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012013440A (en) | 2012-01-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5673998B2 (en) | Piezoelectric sensor | |
| US20200215574A1 (en) | Portable Electronic Device Using a Tactile Vibrator | |
| US6809462B2 (en) | Electroactive polymer sensors | |
| US7301212B1 (en) | MEMS microphone | |
| US9929679B2 (en) | Electrostatic induction-type vibration power generation device and method of manufacturing the same | |
| JP7038107B2 (en) | Transducer and vibration presenter using it | |
| Cao et al. | Performance of self-powered, water-resistant bending sensor using transverse piezoelectric effect of polypropylene ferroelectret polymer | |
| JP2006226858A (en) | Fluctuation load sensor, and tactile sensor using the same | |
| US9972768B2 (en) | Actuator structure and method | |
| Tzou et al. | Pyroelectric and thermal strain effects of piezoelectric (PVDF and PZT) devices | |
| JP6624343B2 (en) | Sensors, touch panels, and electronic devices | |
| US7069795B2 (en) | Sensor using electro active curved helix and double helix | |
| WO2018181160A1 (en) | Vibration presentation device | |
| US8479583B1 (en) | Quasi-static bend sensor using electro-active materials | |
| JPS5911841B2 (en) | electret sensing device | |
| US20190198748A1 (en) | Self-sensing bending actuator | |
| JP7079704B2 (en) | Piezoelectric sensor | |
| CN114414035A (en) | Piezoelectric sensor calibration device and method and vibration sensor | |
| Kaal et al. | Design and modeling of dielectric elastomer actuators | |
| EP3474732B1 (en) | Device for monitoring patient's vital functions comprising a piezoelectric transducer and a measuring capacitor | |
| KR20170040616A (en) | Piezoelectric actuator for electrical device | |
| Böse et al. | Dielectric elastomer strain sensors with enhanced measuring sensitivity | |
| JPH1164096A (en) | Spiral-type acceleration seismograph apparatus | |
| JP2016121883A (en) | Pressure sensor | |
| JPH03259749A (en) | Piezoelectric type acceleration sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130516 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140220 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140527 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140724 Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20140724 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20141209 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20141217 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5673998 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |