WO2018179261A1 - Sticking method and sticking device - Google Patents

Sticking method and sticking device Download PDF

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Publication number
WO2018179261A1
WO2018179261A1 PCT/JP2017/013347 JP2017013347W WO2018179261A1 WO 2018179261 A1 WO2018179261 A1 WO 2018179261A1 JP 2017013347 W JP2017013347 W JP 2017013347W WO 2018179261 A1 WO2018179261 A1 WO 2018179261A1
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WO
WIPO (PCT)
Prior art keywords
film
guide film
pasting
cover glass
stage
Prior art date
Application number
PCT/JP2017/013347
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French (fr)
Japanese (ja)
Inventor
勝寛 山口
忠司 西岡
Original Assignee
シャープ株式会社
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Publication date
Application filed by シャープ株式会社 filed Critical シャープ株式会社
Priority to PCT/JP2017/013347 priority Critical patent/WO2018179261A1/en
Publication of WO2018179261A1 publication Critical patent/WO2018179261A1/en

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/02Details
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00Electroluminescent light sources
    • H05B33/10Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00

Definitions

  • the present invention relates to a method for manufacturing a display device such as an EL device including an EL element (electroluminescence element), and particularly to a method for attaching the display device.
  • Japanese Published Patent Publication Japanese Patent Laid-Open No. 2016-42121 (Publication Date: March 31, 2016)
  • An object of the present invention is to satisfactorily adhere to a substrate having a curved surface.
  • the attaching method according to one embodiment of the present invention is a method of attaching a film to a substrate having a curved surface, the film being supported by the guide film, and the guide film being in a direction along the curved direction of the curved surface. Tension is applied.
  • FIG. 1 It is a flowchart which shows an example of the manufacturing method of EL device.
  • (A) is sectional drawing which shows the structural example in the middle of formation of the EL device of this embodiment
  • (b) is sectional drawing which shows the structural example of the EL device of this embodiment.
  • (A) is a figure which shows the guide film in planar view
  • (c) is a figure which shows the outline
  • FIG. 1 is a flowchart showing an example of an EL device manufacturing method.
  • FIG. 2A is a cross-sectional view showing a configuration example during the formation of the EL device of the present embodiment.
  • FIG. 2B is a cross-sectional view illustrating a configuration example of the EL device of the present embodiment.
  • the resin layer 12 is formed on a light-transmitting mother substrate (for example, a glass substrate) 50 (step S1).
  • the inorganic barrier film 3 is formed (step S2).
  • the TFT layer 4 including the plurality of inorganic insulating films 16, 18, 20 and the planarizing film 21 is formed (step S3).
  • the light emitting element layer for example, OLED element layer. Display body
  • the sealing layer 6 including the inorganic sealing films 26 and 28 and the organic sealing film 27 is formed (step S5).
  • the protective material 9 for example, PET film
  • the protective material 9 is affixed on the sealing layer 6 through the adhesive layer 8 (step S6).
  • the resin layer 12 is irradiated with a laser (step S7).
  • the resin layer 12 absorbs the irradiated laser, so that the lower surface of the resin layer 12 (interface with the mother substrate 50) is altered by ablation to form a release layer 13 (see FIG. 3B described later).
  • the mother substrate 50 is peeled from the resin layer 12 (step S8). Thereby, the laminated body 7 and the mother board
  • a support material 10 for example, a PET film
  • the mother substrate 50 is divided and the protective material 9 is cut to cut out a plurality of EL devices (step S10).
  • the protective material 9 on the terminal portion of the TFT layer 4 is peeled off, and the terminal is taken out (step S11).
  • the EL device 2 shown in FIG. 2B is obtained.
  • the functional film 39 is attached (Step S12), and an electronic circuit board is mounted on the terminal portion using ACF or the like (Step S13).
  • the step S12 is not limited to the attachment of the functional film 39, and widely includes, for example, attachment of the laminate 7 and other members such as attachment of a cover glass. Each step is performed by an EL device manufacturing apparatus.
  • Examples of the material for the resin layer 12 include polyimide, epoxy, and polyamide. Of these, polyimide is preferably used.
  • the inorganic barrier film 3 is a film that prevents moisture and impurities from reaching the TFT layer 4 and the light emitting element layer 5 when the EL device is used.
  • a silicon oxide film or a silicon nitride film formed by CVD is used.
  • the thickness of the inorganic barrier film 3 is, for example, 50 nm to 1500 nm.
  • the TFT layer 4 includes a semiconductor film 15, an inorganic insulating film 16 (gate insulating film) formed on the upper side of the semiconductor film 15, a gate electrode G formed on the upper side of the gate insulating film 16, and an upper side of the gate electrode G. Formed on the upper side of the inorganic insulating film 20, the source electrode S, the drain electrode D and the terminal TM, and the planarization formed on the upper side of the source electrode S and the drain electrode D. A film 21.
  • the semiconductor film 15, the inorganic insulating film 16, the gate electrode G, the inorganic insulating films 18 and 20, the source electrode S, and the drain electrode D constitute a thin layer transistor (TFT).
  • a terminal portion including a plurality of terminals TM and terminal wirings TW used for connection to an electronic circuit substrate such as an IC chip or FPC is formed at an end portion (inactive area NA) of the TFT layer 4.
  • the terminal TM is connected to various wirings of the TFT layer 4 through the terminal wiring TW.
  • the semiconductor film 15 is made of, for example, low temperature polysilicon (LPTS) or an oxide semiconductor.
  • the gate insulating film 16 can be constituted by, for example, a silicon oxide (SiOx) film, a silicon nitride (SiNx) film, or a stacked film thereof formed by a CVD method.
  • the gate electrode G, the source electrode S, the drain electrode D, and the terminal are, for example, aluminum (Al), tungsten (W), molybdenum (Mo), tantalum (Ta), chromium (Cr), titanium (Ti), copper ( It is comprised by the metal single layer film or laminated film containing at least 1 of Cu).
  • the TFT having the semiconductor film 15 as a channel is shown as a top gate structure, but a bottom gate structure may be used (for example, when the TFT channel is an oxide semiconductor).
  • the inorganic insulating films 18 and 20 can be composed of, for example, a silicon oxide (SiOx) film, a silicon nitride (SiNx) film, or a laminated film thereof formed by a CVD method.
  • the planarizing film 21 is an organic insulating film, and can be made of a photosensitive organic material that can be applied, such as polyimide or acrylic.
  • the light emitting element layer 5 (for example, an organic light emitting diode layer) is formed in the anode electrode 22 formed on the upper side of the planarizing film 21, the partition wall 23c defining the subpixel of the active area DA, and the inactive area NA. It includes a bank 23b, an EL (electroluminescence) layer 24 formed above the anode electrode 22, and a cathode electrode 25 formed above the EL layer 24. The anode electrode 22, the EL layer 24, and the cathode electrode 25 are included.
  • a light emitting element (for example, an organic light emitting diode) is configured.
  • the partition wall 23c and the bank 23b can be formed, for example, in the same process using a photosensitive organic material such as polyimide, epoxy, or acrylic.
  • the bank 23 b of the inactive area NA is formed on the inorganic insulating film 20.
  • the bank 23 b defines the edge of the organic sealing film 27.
  • the EL layer 24 is formed in a region (subpixel region) surrounded by the partition wall 23c by an evaporation method or an ink jet method.
  • the light emitting element layer 5 is an organic light emitting diode (OLED) layer
  • the EL layer 24 includes a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and an electron injection layer in order from the lower layer side. It is composed by doing.
  • the anode electrode (anode) 22 is composed of, for example, a laminate of ITO (Indium Tin Oxide) and an alloy containing Ag, and has light reflectivity.
  • the cathode electrode 25 can be made of a transparent metal such as ITO (Indium Tin Oxide) or IZO (Indium Zincum Oxide).
  • the light emitting element layer 5 is an OLED layer
  • holes and electrons are recombined in the EL layer 24 by the driving current between the anode electrode 22 and the cathode electrode 25, and the exciton generated thereby falls to the ground state. Light is emitted.
  • the light emitting element layer 5 is not limited to constituting an OLED element, and may constitute an inorganic light emitting diode or a quantum dot light emitting diode.
  • the sealing layer 6 includes a first inorganic sealing film 26 that covers the partition wall 23 c and the cathode electrode 25, an organic sealing film 27 that covers the first inorganic sealing film 26, and a second inorganic sealing film that covers the organic sealing film 27. And a stop film 28.
  • Each of the first inorganic sealing film 26 and the second inorganic sealing film 28 may be composed of, for example, a silicon oxide film, a silicon nitride film, a silicon oxynitride film, or a laminated film formed by CVD. it can.
  • the organic sealing film 27 is a light-transmitting organic insulating film that is thicker than the first inorganic sealing film 26 and the second inorganic sealing film 28, and is made of a photosensitive organic material that can be applied, such as polyimide or acrylic. can do.
  • an ink containing such an organic material is applied onto the first inorganic sealing film 26 by inkjet and then cured by UV irradiation.
  • the sealing layer 6 covers the light emitting element layer 5 and prevents penetration of foreign matters such as water and oxygen into the light emitting element layer 5.
  • the protective material 9 is affixed on the sealing layer 6 via the adhesive layer 8 and functions as a support material when the mother substrate 50 is peeled off.
  • Examples of the material of the protective material 9 include PET (polyethylene terephthalate).
  • the support material 10 is for manufacturing an EL device having excellent flexibility by being attached to the lower surface of the resin layer 12 after the mother substrate 50 is peeled off.
  • the material is, for example, polyethylene terephthalate (PET). Etc.
  • the functional film has, for example, an optical compensation function, a touch sensor function, a protection function, and the like.
  • the electronic circuit board is, for example, an IC chip or a flexible printed board mounted on the plurality of terminals TM.
  • the method for manufacturing an EL device according to an aspect of the present invention is particularly characterized in step S12 among the above steps.
  • Step 12 Attachment of a functional film, a cover glass, etc.
  • a plurality of configurations and methods can be considered for the pasting and pasting related thereto.
  • pasting (1) pasting of laminated body 7 and cover glass, (2) pasting of laminated body 7 and functional film, (3) laminated body 7, functional film and cover glass It is conceivable to attach it to an integrated product.
  • the affixing of a cover glass and a functional film, the affixing of a cover glass and an adhesive layer, etc. are also included.
  • the laminate 7 is used for the pasting after the adhesive layer 8 and the protective material 9 are removed as necessary.
  • a method of pasting for example, there are a case where it is performed in a vacuum and a case where it is performed in the atmosphere. Furthermore, there are a case where the laminate is directly attached to the cover glass and the functional film, and a case where the laminate is attached to an integrated product in which the functional film is attached to the cover glass.
  • Embodiment 1 demonstrates the case where the contact bonding layer 41 is affixed on the cover glass 40 as a base material in step 12 based on Fig.3 (a) and (b).
  • OCA Optical Clear Adhesive, adhesive tape, adhesive film
  • a laminated body 7 including the light emitting element layer 5 and a functional film 39 such as TSP (Touch Screen Panel, touch panel) are attached to the cover glass 40 through OCA.
  • the cover glass 40 is attached to the laminate 7 and the functional film 39 by bringing the cover glass 40 and the laminate 7 and the functional film 39 into close contact under vacuum.
  • TSP Touch Screen Panel, touch panel
  • FIG. 3A shows the guide film 43 in plan view.
  • the OCA 41 attached to the cover glass 40 is integrated with the guide film 43 in advance.
  • guide holes 43 (1) for fitting into tension pins 44 (1) provided in a guide film tension mechanism 44 described later are provided at both ends of the guide film 43.
  • FIG. 3B is a diagram showing an outline of the process of attaching the OCA 41 to the cover glass 40, and shows a state where the attaching device 47 (1) is viewed from the side.
  • FIG. 3B shows a case where the cover glass 40 has a curved surface and the OCA 41 is attached to the inner side surface 40 (1).
  • the attaching device 47 (1) includes a hard stage 46 made of hard rubber and guide film tension mechanisms 44 provided on both sides of the stage 46 as main components. .
  • the guide film tension mechanism 44 is for applying tension to the guide film 43.
  • the guide film 43 integrated with the OCA 41 is disposed on the upper surface of the stage 46 with the OCA 41 as the upper surface.
  • the cover glass 40, the OCA 41, the guide film 31, and the stage 46 are arranged in this order from above.
  • the upper surface of the stage 46 has a curved shape along the inner side surface 40 (1) of the cover glass 40.
  • the guide film tension mechanism 44 is moved in the direction of arrow a shown in FIG. 3B, whereby tension is applied to the guide film 43 downward (minus direction of the Z axis).
  • tension is applied to the guide film 43 that supports the OCA that is the attaching member in the direction along the bending direction of the inner side surface 40 (1) of the cover glass 40 that is the attaching surface.
  • air bubbles are applied between the inner surface 40 (1) of the cover glass 40 and the OCA 41 while applying a downward tension to the guide film 43 and increasing or decreasing the tension as appropriate.
  • the cover glass 40 and the OCA 41 are brought into contact with each other so as not to occur.
  • a flexible display such as an EL device is attached to the cover glass 40 to which the OCA 41 is attached in the same manner as the above attachment.
  • a flexible display is used instead of the OCA 41 in the pasting. Thereby, a flexible display whose surface is protected by the cover glass 40 is obtained.
  • the specific configuration of the guide film tension mechanism 44 is not particularly limited, and for example, a spring type, an air cylinder type, a motor torque type, or the like is used.
  • FIG. 3C is a diagram showing an outline of the process of attaching the OCA 41 to the cover glass 40, and shows a state where the attaching device 47 (2) is viewed from the side.
  • FIG. 3C shows a case where the cover glass 40 has a curved surface and the OCA 41 is attached to the outer side surface 40 (2).
  • the attaching device 47 (2) includes an upper stage 46 (1) (first stage) made of aluminum and a hard lower stage 46 (2) (second stage) made of hard rubber.
  • the main component is a stay) and guide film tension mechanisms 44 provided on both sides of the stage 46.
  • the guide film 43 integrated with the OCA 41 is disposed between the upper stage 46 (1) and the lower stage 46 (2) with the OCA 41 as an upper surface.
  • the upper stage 46 (1), the cover glass 40, the OCA 41, the guide film 31, and the lower stage 46 (2) are arranged in this order from the top.
  • tip part of the upper stage 46 becomes a shape curved along the inner surface 40 (1) of the cover glass 40
  • the upper surface of the lower stage 46 (2) is the outer surface of the cover glass 40 40 (2) has a curved shape.
  • the guide film tension mechanism 44 moves in the direction of the arrow b shown in FIG. 3C, so that the guide film 43 is tensioned upward (the positive direction of the Z axis).
  • tension is applied to the guide film 43 that supports the OCA that is the attaching member in the direction along the bending direction of the outer side surface 40 (2) of the cover glass 40 that is the attaching surface.
  • air bubbles are applied between the outer surface 40 (2) of the cover glass 40 and the OCA 41 while applying an upward tension to the guide film 43 and increasing or decreasing the tension as appropriate.
  • the cover glass 40 and the OCA 41 are brought into contact with each other so as not to occur. Specifically, the cover glass 40 is brought into close contact with the upper stage 46 (1), a guide film 43 integrated with the adhesive layer 41 is applied thereto, stress is applied from the end, and the lower stage 46 (2) is fitted. Paste with.
  • a flexible display such as an EL device is attached to the cover glass 40 to which the OCA 41 is attached in the same manner as the above attachment.
  • a flexible display is used instead of the OCA 41 in the pasting. Thereby, a flexible display whose surface is protected by the cover glass 40 is obtained.
  • the specific configuration of the guide film tension mechanism 44 is not particularly limited, and, for example, a spring type, an air cylinder type, a motor torque type, or the like is used as in the first embodiment.
  • the adhesive layer 41 is not limited to an adhesive tape such as OCA, but may be constituted by an adhesive layer formed by coating or an adhesive.
  • the pasting is preferably performed under vacuum, but can also be performed under other environments such as the atmosphere.
  • each stage is not limited to the above example, and various materials can be used.
  • the light emitting element layer 5 is not limited to the case where the OLED element is configured as described above, and may be an inorganic light emitting diode or a quantum dot light emitting diode. Further, a liquid crystal display element may be used.
  • Embodiment 3 demonstrates the case where OCA as the contact bonding layer 41 is affixed on the outer surface 40 (2) of the convex-shaped cover glass 40 based on Fig.4 (a)-FIG.4 (c).
  • the difference from the first embodiment is that the affixing device 47 (3) of the present embodiment can be affixed even in the air, not in a vacuum.
  • the difference from the above embodiments will be mainly described.
  • FIG. 4 (a) to 4 (c) are diagrams showing an outline of the attaching process of the present embodiment, and the process proceeds in the order of FIG. 4 (a) to FIG. 4 (c).
  • the affixing device 47 (3) of this embodiment includes a stage 46, a guide film tension mechanism 44, and a tension pin 44 (1), as in the above embodiments.
  • a guide film 43 is provided between the pair of guide film tension mechanisms 44, and tension is applied to the guide film 43 through the guide holes 43 (1) and the tension pins 44 (1). (In the direction of arrow c in FIG. 4A).
  • An OCA 41 is provided on the lower surface of the guide film 43 (the surface facing the stage 46).
  • a cover glass 40 is set on the stage 46.
  • the cover glass 40 has a convex shape
  • the stage 46 also has a shape according to the convex shape. And it installs so that the convex-shaped outer side surface 40 (2) of the cover glass 40 may oppose OCA41 with which the guide film 43 is equipped. At that time, the convex inner surface 40 (1) of the cover glass 40 is in close contact with the stage 46.
  • the guide film 43 is pulled in the horizontal direction.
  • the horizontal direction is the X-axis direction shown in FIG.
  • a tension is applied to the guide film 43 by pulling the guide film 43 with guide film tension mechanisms 44 disposed at both ends thereof.
  • the cover glass 40 and the OCA 41 are brought into contact with each other at a part (one portion of the curved surface).
  • the substantially apex portion of the convex shape of the cover glass 40 is in contact with the OCA 41.
  • tension is applied to the guide film 43 in the horizontal direction (arrow e in FIG. 4B).
  • the guide film tension mechanism 44 is moved from the horizontal direction to the cover glass so that the tension direction of the guide film 43 matches the curvature of the cover glass 40 (tangential inclination). It is moved downward while being inclined in the bending direction of 40. Specifically, the guide film tension mechanism 44 is tilted so that its tilt (angle V1 in FIG. 4C) is substantially equal to the tilt of the tangent line at the point of contact with the OCA 41 of the cover glass 40. Thereby, tension is applied to the guide film 43 in the vicinity of the guide film tension mechanism 44 in the direction inclined from the horizontal direction (arrow f in FIG. 4C).
  • the guide film tension mechanism 44 tilted, the guide film tension mechanism 44 is moved downward (arrow g in FIG. 4C). Then, as the contact location between the cover glass 46 and the OCA 41 moves and expands, the guide film tension mechanism 44 is sequentially moved downward while changing the inclination. As a result, the cover glass 46 and the OCA 41 are bonded together.
  • a flexible display such as an EL device is attached to the cover glass 40 to which the OCA 41 is attached in the same manner as the above attachment.
  • a flexible display is used instead of the OCA 41 in the pasting. Thereby, a flexible display whose surface is protected by the cover glass 40 is obtained.
  • the OCA 41 or the like can be attached to the cover glass 40 while suppressing the entrapment of bubbles not only in a vacuum but also in the atmosphere.
  • the guide film tension mechanism 44 that is moved downward while being tilted does not necessarily need to be the guide film tension mechanism 44 on both sides thereof, and may be only one guide film tension mechanism 44.
  • the position where the cover glass 40 and the OCA 41 contact is not limited to the vicinity of the apex, for example, about ⁇ 2 mm from the apex, and may be a position other than the vicinity of the apex.
  • Embodiment 4 demonstrates the case where OCA as the contact bonding layer 41 is affixed on the outer surface 40 (2) of the convex-shaped cover glass 40 based on Fig.5 (a)-FIG.5 (d).
  • the main difference from the third embodiment is that the sticking device 47 (4) of the present embodiment sticks using a desired position on the cover glass 40 as a starting point.
  • the difference from the above embodiments will be mainly described.
  • FIG. 5A to FIG. 5D are diagrams showing an outline of the attaching process of the present embodiment, and the process proceeds in the order of FIG. 5A to FIG. 5D.
  • the attachment device 47 (4) of this embodiment includes a stage 46, a guide film tension mechanism 44, and a tension pin 44 (1), as in the above embodiments.
  • a guide film 43 is provided between the pair of guide film tension mechanisms 44, and tension is applied to the guide film 43 through the guide holes 43 (1) and the tension pins 44 (1). (In the direction of arrow h in FIG. 5A).
  • An OCA 41 is provided on the lower surface of the guide film 43 (the surface facing the stage 46).
  • the specific position of the cover glass 40 is defined as a desired position P1.
  • the desired position means a position where positioning is important.
  • the predetermined portion when the terminal portion located at the end thereof needs to be attached to the predetermined portion of the cover glass 40 can be exemplified as the desired position.
  • the predetermined position can be exemplified as the desired position.
  • a cover glass 40 is set on the stage 46.
  • the cover glass 40 is installed so that the desired position P1 matches the corresponding position of the stage 46.
  • the cover glass 40 has a convex shape
  • the stage 46 also has a shape according to the convex shape.
  • it installs so that the convex-shaped outer side surface 40 (2) of the cover glass 40 may oppose OCA41 with which the guide film 43 is equipped.
  • the convex inner surface 40 (1) of the cover glass 40 is in close contact with the stage 46.
  • the guide film 43 is pulled in the horizontal direction.
  • the horizontal direction is the X-axis direction shown in FIG.
  • a tension is applied to the guide film 43 by pulling the guide film 43 with guide film tension mechanisms 44 disposed at both ends thereof.
  • the guide film 43 is tilted while the guide film 43 is being tensioned. At that time, the guide film 43 is inclined to the same inclination as the inclination of the tangent at the desired position P1 of the cover glass 40. In the example of FIG. 5 (b), the guide film 43 is applied with a diagonally upward (arrow i1) tension on one end and a diagonally downward (arrow i2) tension on the other end, while the guide film 43 is at an angle V2 from the horizontal direction. 43 is tilted.
  • the guide film 43 and the stage 46 are brought close to each other while being inclined from the horizontal direction by the angle V2.
  • the guide film 43 may be moved closer to the stage 46 (arrow j in FIG. 5B), and conversely, the stage 46 may be moved closer to the guide film 43.
  • both of them may be brought close together.
  • the guide film tension mechanism 44 is moved from the horizontal direction to the cover glass so that the tension direction of the guide film 43 matches the curvature (tangential slope) of the cover glass 40. It is moved downward while being inclined in the bending direction of 40.
  • the guide film tension mechanism 44 is arranged so that the tension direction of the guide film 43 (arrows 11 and 12 in FIG. 5D) is obliquely downward along the curve direction of the cover glass 40. , Move downward (arrow m).
  • the contact position between the cover glass 46 and the OCA 41 sequentially moves and expands from the desired position P1 of the cover glass 46, and the cover glass 46 and the OCA 41 are bonded together.
  • a flexible display such as an EL device is attached to the cover glass 40 to which the OCA 41 is attached in the same manner as the above attachment.
  • a flexible display is used instead of the OCA 41 in the pasting. Thereby, a flexible display whose surface is protected by the cover glass 40 is obtained.
  • the OCA 41 or the like is pasted on the cover glass 40 while suppressing the entrapment of bubbles, not only in the vacuum but also in the atmosphere, based on the desired installation point (desired position) and the desired installation surface. Can be attached.
  • the guide film tension mechanism 44 that is moved downward while being tilted does not necessarily need to be the guide film tension mechanism 44 on both sides thereof, and may be only one guide film tension mechanism 44.
  • the adhesive layer 41 is formed on the outer surface 40 (2) of the convex cover glass 40 based on FIGS. 6 (a) to 6 (c) and FIGS. 7 (a) to 7 (b).
  • the squeegee 48 is provided in the attaching device (5), and that the stage 46 and the cover glass 40 have a plurality of convex shapes. is there.
  • the difference from the above embodiments will be mainly described.
  • FIGS. 7 (a) to 7 (b) are diagrams showing an outline of the attaching process of the present embodiment, and FIG. 6 (a) to FIG. c) Subsequently to FIG. 6C, the process proceeds in the order of FIG. 7A and FIG. 7B.
  • the pasting device 47 (5) of this embodiment includes a stage 46, a guide film tension mechanism 44, a tension pin 44 (1), and a squeegee 48, as in the above embodiments.
  • the squeegee 48 is located above the guide film 43 supported by the guide film tension mechanism 44 (in the positive direction of the Z axis). That is, the squeegee 48 and the stage 46 are disposed to face each other with the guide film 43 interposed therebetween.
  • the stage 46 has two convex portions 46A and 46B. This is because the cover glass 40 of the present embodiment has two convex portions 40A and 40B.
  • the shape of the stage 46 corresponds to the shape of the cover glass 40, and the cover glass 40 can be stably installed on the stage 46.
  • a guide film 43 is provided between the pair of guide film tension mechanisms 44, and tension is applied to the guide film 43 through the guide holes 43 (1) and the tension pins 44 (1). (In the direction of arrow n in FIG. 6A).
  • An OCA 41 is provided on the lower surface of the guide film 43 (the surface facing the stage 46).
  • the specific position of the cover glass 40 is defined as a desired position P2.
  • a cover glass 40 is set on the stage 46.
  • the cover glass 40 and the stage 46 each have two convex portions 40A and 40B and convex portions 46A and 46B. Therefore, when the cover glass 40 is installed on the stage 46, the cover glass 40 is installed so that the convex portions 40A and 40B of the cover glass 40 extend along the convex portions 46A and 46B of the stage 46. Moreover, when installing, the desired position P2 of the cover glass 40 is installed so that the position corresponding to the stage 46 may correspond.
  • the convex outer surface 40 (2) of the cover glass 40 is attached to the OCA 41 provided in the guide film 43.
  • the convex inner surface 40 (1) of the cover glass 40 is in close contact with the stage 46.
  • the desired position P2 in this embodiment is the desired position when the guide film 43 is brought into contact with the desired position P2 of the cover glass 40 in addition to the condition of the desired position P1 in the previous embodiment. It is determined at a position where the guide film 43 does not come into contact with a convex portion different from the convex portion including P2.
  • the guide film 43 is pulled in the horizontal direction.
  • the horizontal direction is the X-axis direction shown in FIG.
  • a tension is applied to the guide film 43 by pulling the guide film 43 with guide film tension mechanisms 44 disposed at both ends thereof.
  • the squeegee 48 is brought into contact with the guide film 43 so that the positioning is in a desired position.
  • a squeegee 48 above the guide film 43 is provided.
  • the squeegee 48 is brought into contact with a position corresponding to the desired position P2 of the guide film 43. This corresponding position is a position where the guide film 43 contacts the desired position P2 on the cover glass 40 via the OCA 41 when the OCA 41 and the cover glass 40 are attached.
  • the guide film 43 is tilted while tension is applied to the guide film 43. At that time, the guide film 43 is inclined to the same inclination as the inclination of the tangent at the desired position P2 of the cover glass 40. In the example of FIG. 6 (b), the guide film 43 is tilted upward (arrow o1) at one end, and tilted downward (arrow o2) at the other end, while the guide film 43 is angled V3 from the horizontal direction. 43 is tilted.
  • the guide film 43 and the stage 46 are brought close to each other while being inclined by the angle V3 from the horizontal direction.
  • the guide film 43 may be moved closer to the stage 46 (arrow j in FIG. 6B), and conversely, the stage 46 may be moved closer to the guide film 43.
  • both of them may be brought close together.
  • the guide film 43 and the stage 46 are brought close to each other while the squeegee 48 is kept in contact with the guide film 43 in [2-1-1].
  • the [4-1] squeegee 48 is run. Specifically, the squeegee 48 moves on the surface of the guide film 43 while pressing the guide film 43 so that the adhesive layer 41 contacts the cover glass 40.
  • the direction of movement is the direction from the desired position P2 toward the end face having the longer distance from the desired position P2 among the both end faces in the X-axis direction of the cover glass 40 (example shown in FIG. 7A). Then, the negative direction of the X-axis).
  • two convex portions 40A and 40B are provided on the cover glass 40. From the convex portion including the desired position P2 (in the example shown in FIG. 7A, the convex portion 40B), The squeegee 48 is run toward one convex part (in the example shown in FIG. 7B, convex part 40A).
  • the inclination of the squeegee 48 is perpendicular to the inclination of the contact surface of the cover glass 40 with which the squeegee 48 is in contact. That is, the squeegee 48 is inclined in the normal direction of the contact surface, and the inclination angle of the squeegee 48 also changes as the angle of the contact surface changes as the squeegee 48 moves.
  • the movement of the guide film tension mechanism 44 while the squeegee 48 is moving is as follows. First, the guide film tension mechanism 44 closer to the desired position P2 maintains the inclination (arrow q2 in FIG. 6C) when the guide film 44 abuts on the desired position P2 of the cover glass 40. (Arrow r2 in FIG. 7A). On the other hand, the guide film tension mechanism 44 at the other end arbitrarily changes the inclination so that the guide film 43 does not hit the other mountain when the squeegee 48 is running. In the example shown in FIG.
  • the guide film tension mechanism 44 is appropriately tilted upward (so that the guide film 43 does not contact the convex portion 40A while the squeegee 48 moves on the convex portion 40B.
  • the angle is changed by an arrow r1) shown in FIG. At that time, the tension of the guide film 43 is kept constant.
  • the one end portion refers to an end portion of the convex portion 40A that is not continuous with the convex portion 40B, and the other end is an end portion of the convex portion 40B that is not continuous with the convex portion 40A. Point to.
  • the OCA 41 is pasted on the cover glass 40 by the movement of the guide film tension mechanism 44, as described in the previous embodiment, without using the squeegee 48.
  • the guide film tension mechanism 44 is moved downward while being inclined from the horizontal direction to the bending direction of the cover glass 40 so that the tension direction of the guide film 43 is matched with the curvature (tangential inclination) of the cover glass 40.
  • the guide film tension mechanism 44 is tilted downward such that the tension direction of the guide film 43 (arrow r2 in FIG. 7A) is along the curve direction of the cover glass 40. Lower it so that As a result, the contact location between the cover glass 46 and the OCA 41 sequentially moves and expands starting from the desired position P2 of the cover glass 46, and the cover glass 46 and the OCA 41 are bonded to each other.
  • a flexible display such as an EL device is attached to the cover glass 40 to which the OCA 41 is attached in the same manner as the above attachment.
  • a flexible display is used instead of the OCA 41 in the pasting. Thereby, a flexible display whose surface is protected by the cover glass 40 is obtained.
  • the cover glass 40 has a plurality of convex portions, not only under vacuum, but based on a desired installation point (desired position) and a desired installation surface, Even in the atmosphere, the OCA 41 or the like can be attached to the cover glass 40 while suppressing the entrapment of bubbles.
  • the material of the squeegee 48 is not particularly limited, and various materials such as rubber, plastic and metal can be used.
  • the inclination angle of the squeegee 48 is not limited to being substantially perpendicular to the contact surface (about 90 ° ⁇ 5 °), but depending on the shape of the squeegee 48, the degree of sliding of the squeegee 48 on the guide film 43, It can be set appropriately.
  • the pasting [5] can also be performed by running the squeegee 48 as described in [4-1].
  • the contact bonding layer 41 is not limited to this,
  • it is a coating liquid (adhesive coating liquid and adhesion) by an inkjet etc.
  • the adhesive layer 41 may be provided by applying an agent coating liquid). This can be suitably used when an adhesive layer is formed on a flexible display in a flat state.
  • the flexible display according to each of the embodiments is not particularly limited as long as it is a display panel having a flexible and bendable light emitting element.
  • the light emitting element includes a light emitting element whose luminance and transmittance are controlled by current and a light emitting element whose luminance and transmittance are controlled by voltage.
  • a current-controlled light emitting element an organic EL (Electro Luminescence) display provided with an OLED (Organic Light Emitting Diode) or an EL display QLED such as an inorganic EL display provided with an inorganic light emitting diode (Quantum)
  • QLED displays equipped with dot-light-emitting diodes There are QLED displays equipped with dot-light-emitting diodes.
  • examples of the voltage-controlled light emitting element include a liquid crystal display element.
  • the pasting method according to aspect 1 of the present invention includes: A method of attaching a film to a substrate having a curved surface, wherein the film is supported by a guide film, and tension is applied to the guide film in a direction along a curved direction of the curved surface.
  • the guide film is bent in a direction along the bending direction, and the film is disposed on an inner side surface in the bending of the guide film.
  • the film is attached to the outer surface of the curved surface of the base material.
  • the sticking method which concerns on aspect 4 of this invention is arrange
  • the film is attached to the substrate.
  • the surface of the first stage facing the base material and the surface of the second stage facing the base material are curved of the base material that face each other. Is curved along.
  • the pasting is performed under vacuum.
  • the attaching is performed by sequentially enlarging the contact part.
  • the one place is near the vertex of the curved surface.
  • the one place is a positioning position of the base material and the film on the curved surface.
  • the attaching is performed by changing the direction of the tension along the bending direction.
  • the attaching is performed by moving a squeegee along the curved surface in a state of being in contact with the guide film.
  • the squeegee is moved along the curved surface in a state where the guide film is in contact with the guide film from the one place to one end of the base material.
  • the sticking is carried out by moving the tape, and the sticking is carried out by changing the direction of the tension along the bending direction from the one place to the other end of the base material.
  • the base material has a plurality of convex portions formed of curved surfaces, and the single squeegee is pasted while the squeegee is moved. During this time, the guide film is tensioned in such a direction that the film does not come into contact with the other protrusions that are not attached.
  • the sticking method according to the fourteenth aspect of the present invention keeps the squeegee substantially perpendicular to the curved surface during the movement.
  • the direction of the tension is the tangential direction of the curved surface in contact with the contact.
  • the pasting is performed in the atmosphere.
  • the substrate is a cover glass of a display body.
  • the film is an adhesive film.
  • the film is a flexible display.
  • An affixing device includes a stage, a guide film, and a guide film tension mechanism, and is an affixing device that affixes a film to a base material, wherein the base material has a curved surface.
  • the film is disposed on the guide film, and the guide film tension mechanism applies tension to the guide film in a direction along the curved direction of the curved surface.

Abstract

A film (41) is supported by a guide film (43), and tension is applied to the guide film (43), said tension being applied in the curve direction of the curved surface of a base material (40).

Description

貼り付け方法及び貼り付け装置Pasting method and pasting apparatus
 本発明は、EL素子(electroluminescence element)を含むELデバイス等表示デバイスの製造方法、特には貼り付け方法等に関する。 The present invention relates to a method for manufacturing a display device such as an EL device including an EL element (electroluminescence element), and particularly to a method for attaching the display device.
 EL素子を含むフレキシブルなELデバイスを製造する場合、カバーガラスと粘着シート等、種々の貼り付けを行う必要がある。 When manufacturing a flexible EL device including an EL element, it is necessary to perform various attachments such as a cover glass and an adhesive sheet.
日本国公開特許公報「特開2016-42121号公報」(公開日:2016年3月31日)Japanese Published Patent Publication “Japanese Patent Laid-Open No. 2016-42121” (Publication Date: March 31, 2016)
 本発明は、曲面を有する基材への貼り付けを良好に行うことを課題とする。 An object of the present invention is to satisfactorily adhere to a substrate having a curved surface.
 本発明の一態様に係る貼り付け方法は、曲面を有する基材にフィルムを貼り付ける方法であって、フィルムはガイドフィルムに支持されており、ガイドフィルムは、曲面の湾曲方向に沿った方向にテンションが加えられる。 The attaching method according to one embodiment of the present invention is a method of attaching a film to a substrate having a curved surface, the film being supported by the guide film, and the guide film being in a direction along the curved direction of the curved surface. Tension is applied.
 本発明の一態様によれば、簡易な構成で、曲面を有する基材への貼り付けを良好に行うことができる。 According to one embodiment of the present invention, it is possible to satisfactorily adhere to a substrate having a curved surface with a simple configuration.
ELデバイスの製造方法の一例を示すフローチャートである。It is a flowchart which shows an example of the manufacturing method of EL device. (a)は、本実施形態のELデバイスの形成途中の構成例を示す断面図であり、(b)は、本実施形態のELデバイスの構成例を示す断面図である。(A) is sectional drawing which shows the structural example in the middle of formation of the EL device of this embodiment, (b) is sectional drawing which shows the structural example of the EL device of this embodiment. (a)は平面視でのガイドフィルムを示す図であり、(b)及び(c)はカバーガラスにOCAを貼り付ける工程の概要を示す図である。(A) is a figure which shows the guide film in planar view, (b) And (c) is a figure which shows the outline | summary of the process of sticking OCA to a cover glass. 他の実施形態の貼り付け工程の概要を示す図であり、(a)から(c)の順に工程が進行する。It is a figure which shows the outline | summary of the sticking process of other embodiment, and a process advances in order of (a) to (c). 他の実施形態の貼り付け工程の概要を示す図であり、(a)から(d)の順に工程が進行する。It is a figure which shows the outline | summary of the sticking process of other embodiment, and a process progresses in order of (a) to (d). 他の実施形態の貼り付け工程の概要を示す図であり、(a)から(c)の順に工程が進行する。It is a figure which shows the outline | summary of the sticking process of other embodiment, and a process advances in order of (a) to (c). 他の実施形態の貼り付け工程の概要を示す図であり、図6(c)に引き続いて、(a),(b)の順に工程が進行する。It is a figure which shows the outline | summary of the bonding process of other embodiment, and follows a process in order of (a) and (b) following FIG.6 (c).
 図1はELデバイスの製造方法の一例を示すフローチャートである。図2(a)は、本実施形態のELデバイスの形成途中の構成例を示す断面図である。図2(b)は、本実施形態のELデバイスの構成例を示す断面図である。 FIG. 1 is a flowchart showing an example of an EL device manufacturing method. FIG. 2A is a cross-sectional view showing a configuration example during the formation of the EL device of the present embodiment. FIG. 2B is a cross-sectional view illustrating a configuration example of the EL device of the present embodiment.
 フレキシブルなELデバイスを製造する場合、図1~図2に示すように、まず、透光性のマザー基板(例えば、ガラス基板)50上に樹脂層12を形成する(ステップS1)。次いで、無機バリア膜3を形成する(ステップS2)。次いで、複数の無機絶縁膜16・18・20および平坦化膜21を含むTFT層4を形成する(ステップS3)。次いで、発光素子層(例えば、OLED素子層。表示体。)5を形成する(ステップS4)。次いで、無機封止膜26・28および有機封止膜27を含む封止層6を形成する(ステップS5)。次いで、封止層6上に接着層8を介して保護材9(例えば、PETフィルム)を貼り付ける(ステップS6)。 When manufacturing a flexible EL device, as shown in FIGS. 1 and 2, first, the resin layer 12 is formed on a light-transmitting mother substrate (for example, a glass substrate) 50 (step S1). Next, the inorganic barrier film 3 is formed (step S2). Next, the TFT layer 4 including the plurality of inorganic insulating films 16, 18, 20 and the planarizing film 21 is formed (step S3). Subsequently, the light emitting element layer (for example, OLED element layer. Display body) 5 is formed (step S4). Next, the sealing layer 6 including the inorganic sealing films 26 and 28 and the organic sealing film 27 is formed (step S5). Subsequently, the protective material 9 (for example, PET film) is affixed on the sealing layer 6 through the adhesive layer 8 (step S6).
 次いで、樹脂層12にレーザーを照射する(ステップS7)。ここでは、照射されたレーザーを樹脂層12が吸収することで、樹脂層12の下面(マザー基板50との界面)がアブレーションによって変質し剥離層13(後述の図3(b)参照)が形成され、樹脂層12およびマザー基板50間の結合力が低下する。次いで、マザー基板50を樹脂層12から剥離する(ステップS8)。これにより、図2(a)に示す積層体7とマザー基板50とが剥離する。 Next, the resin layer 12 is irradiated with a laser (step S7). Here, the resin layer 12 absorbs the irradiated laser, so that the lower surface of the resin layer 12 (interface with the mother substrate 50) is altered by ablation to form a release layer 13 (see FIG. 3B described later). As a result, the bonding force between the resin layer 12 and the mother substrate 50 is reduced. Next, the mother substrate 50 is peeled from the resin layer 12 (step S8). Thereby, the laminated body 7 and the mother board | substrate 50 which are shown to Fig.2 (a) peel.
 次いで、図2(b)に示すように、樹脂層12の下面に、接着層11を介して支持材10(例えば、PETフィルム)を貼り付ける(ステップS9)。次いで、マザー基板50を分断するとともに保護材9をカットし、複数のELデバイスを切り出す(ステップS10)。次いで、TFT層4の端子部上の保護材9を剥離し、端子出しを行う(ステップS11)。これにより、図2(b)に示すELデバイス2を得る。次いで機能フィルム39を貼り付け(ステップS12)、ACF等を用いて端子部に電子回路基板を実装する(ステップS13)。なお、前記ステップS12は、機能フィルム39の貼り付けに限定されず、例えばカバーガラスの貼り付け等、積層体7と他の部材との貼り付けを広く含む。また、前記各ステップはELデバイスの製造装置が行う。 Next, as shown in FIG. 2B, a support material 10 (for example, a PET film) is attached to the lower surface of the resin layer 12 via the adhesive layer 11 (step S9). Next, the mother substrate 50 is divided and the protective material 9 is cut to cut out a plurality of EL devices (step S10). Next, the protective material 9 on the terminal portion of the TFT layer 4 is peeled off, and the terminal is taken out (step S11). Thereby, the EL device 2 shown in FIG. 2B is obtained. Next, the functional film 39 is attached (Step S12), and an electronic circuit board is mounted on the terminal portion using ACF or the like (Step S13). The step S12 is not limited to the attachment of the functional film 39, and widely includes, for example, attachment of the laminate 7 and other members such as attachment of a cover glass. Each step is performed by an EL device manufacturing apparatus.
 樹脂層12の材料としては、例えば、ポリイミド、エポキシ、ポリアミド等が挙げられる。中でもポリイミドが好適に用いられる。 Examples of the material for the resin layer 12 include polyimide, epoxy, and polyamide. Of these, polyimide is preferably used.
 無機バリア膜3は、ELデバイスの使用時に、水分や不純物が、TFT層4や発光素子層5に到達することを防ぐ膜であり、例えば、CVDにより形成される、酸化シリコン膜、窒化シリコン膜、あるいは酸窒化シリコン膜、またはこれらの積層膜で構成することができる。無機バリア膜3の厚さは、例えば、50nm~1500nmである。 The inorganic barrier film 3 is a film that prevents moisture and impurities from reaching the TFT layer 4 and the light emitting element layer 5 when the EL device is used. For example, a silicon oxide film or a silicon nitride film formed by CVD is used. Or a silicon oxynitride film or a laminated film thereof. The thickness of the inorganic barrier film 3 is, for example, 50 nm to 1500 nm.
 TFT層4は、半導体膜15と、半導体膜15の上側に形成される無機絶縁膜16(ゲート絶縁膜)と、ゲート絶縁膜16の上側に形成されるゲート電極Gと、ゲート電極Gの上側に形成される無機絶縁膜18・20と、無機絶縁膜20の上側に形成される、ソース電極S、ドレイン電極Dおよび端子TMと、ソース電極Sおよびドレイン電極Dの上側に形成される平坦化膜21とを含む。半導体膜15、無機絶縁膜16、ゲート電極G、無機絶縁膜18・20、ソース電極Sおよびドレイン電極Dは、薄層トランジスタ(TFT)を構成する。TFT層4の端部(非アクティブ領域NA)には、ICチップ、FPC等の電子回路基板との接続に用いられる複数の端子TMおよび端子配線TWを含む端子部が形成される。端子TMは端子配線TWを介してTFT層4の各種配線に接続される。 The TFT layer 4 includes a semiconductor film 15, an inorganic insulating film 16 (gate insulating film) formed on the upper side of the semiconductor film 15, a gate electrode G formed on the upper side of the gate insulating film 16, and an upper side of the gate electrode G. Formed on the upper side of the inorganic insulating film 20, the source electrode S, the drain electrode D and the terminal TM, and the planarization formed on the upper side of the source electrode S and the drain electrode D. A film 21. The semiconductor film 15, the inorganic insulating film 16, the gate electrode G, the inorganic insulating films 18 and 20, the source electrode S, and the drain electrode D constitute a thin layer transistor (TFT). A terminal portion including a plurality of terminals TM and terminal wirings TW used for connection to an electronic circuit substrate such as an IC chip or FPC is formed at an end portion (inactive area NA) of the TFT layer 4. The terminal TM is connected to various wirings of the TFT layer 4 through the terminal wiring TW.
 半導体膜15は、例えば低温ポリシリコン(LPTS)あるいは酸化物半導体で構成される。ゲート絶縁膜16は、例えば、CVD法によって形成された、酸化シリコン(SiOx)膜あるいは窒化シリコン(SiNx)膜またはこれらの積層膜によって構成することができる。ゲート電極G、ソース電極S、ドレイン電極D、および端子は、例えば、アルミニウム(Al)、タングステン(W)、モリブデン(Mo)、タンタル(Ta)、クロム(Cr)、チタン(Ti)、銅(Cu)の少なくとも1つを含む金属の単層膜あるいは積層膜によって構成される。なお、図2では、半導体膜15をチャネルとするTFTがトップゲート構造で示されているが、ボトムゲート構造でもよい(例えば、TFTのチャネルが酸化物半導体の場合)。 The semiconductor film 15 is made of, for example, low temperature polysilicon (LPTS) or an oxide semiconductor. The gate insulating film 16 can be constituted by, for example, a silicon oxide (SiOx) film, a silicon nitride (SiNx) film, or a stacked film thereof formed by a CVD method. The gate electrode G, the source electrode S, the drain electrode D, and the terminal are, for example, aluminum (Al), tungsten (W), molybdenum (Mo), tantalum (Ta), chromium (Cr), titanium (Ti), copper ( It is comprised by the metal single layer film or laminated film containing at least 1 of Cu). In FIG. 2, the TFT having the semiconductor film 15 as a channel is shown as a top gate structure, but a bottom gate structure may be used (for example, when the TFT channel is an oxide semiconductor).
 無機絶縁膜18・20は、例えば、CVD法によって形成された、酸化シリコン(SiOx)膜あるいは窒化シリコン(SiNx)膜またはこれらの積層膜によって構成することができる。平坦化膜21は、有機絶縁膜であり、例えば、ポリイミド、アクリル等の塗布可能な感光性有機材料によって構成することができる。 The inorganic insulating films 18 and 20 can be composed of, for example, a silicon oxide (SiOx) film, a silicon nitride (SiNx) film, or a laminated film thereof formed by a CVD method. The planarizing film 21 is an organic insulating film, and can be made of a photosensitive organic material that can be applied, such as polyimide or acrylic.
 発光素子層5(例えば、有機発光ダイオード層)は、平坦化膜21の上側に形成されるアノード電極22と、アクティブ領域DAのサブピクセルを規定する隔壁23cと、非アクティブ領域NAに形成されるバンク23bと、アノード電極22の上側に形成されるEL(エレクトロルミネッセンス)層24と、EL層24の上側に形成されるカソード電極25とを含み、アノード電極22、EL層24、およびカソード電極25によって発光素子(例えば、有機発光ダイオード)が構成される。 The light emitting element layer 5 (for example, an organic light emitting diode layer) is formed in the anode electrode 22 formed on the upper side of the planarizing film 21, the partition wall 23c defining the subpixel of the active area DA, and the inactive area NA. It includes a bank 23b, an EL (electroluminescence) layer 24 formed above the anode electrode 22, and a cathode electrode 25 formed above the EL layer 24. The anode electrode 22, the EL layer 24, and the cathode electrode 25 are included. A light emitting element (for example, an organic light emitting diode) is configured.
 隔壁23cおよびバンク23bは、ポリイミド、エポキシ、アクリル等の塗布可能な感光性有機材料を用いて、例えば同一工程で形成することができる。非アクティブ領域NAのバンク23bは無機絶縁膜20上に形成される。バンク23bは有機封止膜27のエッジを規定する。 The partition wall 23c and the bank 23b can be formed, for example, in the same process using a photosensitive organic material such as polyimide, epoxy, or acrylic. The bank 23 b of the inactive area NA is formed on the inorganic insulating film 20. The bank 23 b defines the edge of the organic sealing film 27.
 EL層24は、蒸着法あるいはインクジェット法によって、隔壁23cによって囲まれた領域(サブピクセル領域)に形成される。発光素子層5が有機発光ダイオード(OLED)層である場合、EL層24は、例えば、下層側から順に、正孔注入層、正孔輸送層、発光層、電子輸送層、電子注入層を積層することで構成される。 The EL layer 24 is formed in a region (subpixel region) surrounded by the partition wall 23c by an evaporation method or an ink jet method. When the light emitting element layer 5 is an organic light emitting diode (OLED) layer, for example, the EL layer 24 includes a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and an electron injection layer in order from the lower layer side. It is composed by doing.
 アノード電極(陽極)22は、例えばITO(Indium Tin Oxide)とAgを含む合金との積層によって構成され、光反射性を有する。カソード電極25は、ITO(Indium Tin Oxide)、IZO(Indium Zincum Oxide)等の透明金属で構成することができる。 The anode electrode (anode) 22 is composed of, for example, a laminate of ITO (Indium Tin Oxide) and an alloy containing Ag, and has light reflectivity. The cathode electrode 25 can be made of a transparent metal such as ITO (Indium Tin Oxide) or IZO (Indium Zincum Oxide).
 発光素子層5がOLED層である場合、アノード電極22およびカソード電極25間の駆動電流によって正孔と電子がEL層24内で再結合し、これによって生じたエキシトンが基底状態に落ちることによって、光が放出される。 When the light emitting element layer 5 is an OLED layer, holes and electrons are recombined in the EL layer 24 by the driving current between the anode electrode 22 and the cathode electrode 25, and the exciton generated thereby falls to the ground state. Light is emitted.
 発光素子層5は、OLED素子を構成する場合に限られず、無機発光ダイオードあるいは量子ドット発光ダイオードを構成してもよい。 The light emitting element layer 5 is not limited to constituting an OLED element, and may constitute an inorganic light emitting diode or a quantum dot light emitting diode.
 封止層6は、隔壁23cおよびカソード電極25を覆う第1無機封止膜26と、第1無機封止膜26を覆う有機封止膜27と、有機封止膜27を覆う第2無機封止膜28とを含む。 The sealing layer 6 includes a first inorganic sealing film 26 that covers the partition wall 23 c and the cathode electrode 25, an organic sealing film 27 that covers the first inorganic sealing film 26, and a second inorganic sealing film that covers the organic sealing film 27. And a stop film 28.
 第1無機封止膜26および第2無機封止膜28はそれぞれ、例えば、CVDにより形成される、酸化シリコン膜、窒化シリコン膜、あるいは酸窒化シリコン膜、またはこれらの積層膜で構成することができる。有機封止膜27は、第1無機封止膜26および第2無機封止膜28よりも厚い、透光性の有機絶縁膜であり、ポリイミド、アクリル等の塗布可能な感光性有機材料によって構成することができる。例えば、このような有機材料を含むインクを第1無機封止膜26上にインクジェット塗布した後、UV照射により硬化させる。封止層6は、発光素子層5を覆い、水、酸素等の異物の発光素子層5への浸透を防いでいる。 Each of the first inorganic sealing film 26 and the second inorganic sealing film 28 may be composed of, for example, a silicon oxide film, a silicon nitride film, a silicon oxynitride film, or a laminated film formed by CVD. it can. The organic sealing film 27 is a light-transmitting organic insulating film that is thicker than the first inorganic sealing film 26 and the second inorganic sealing film 28, and is made of a photosensitive organic material that can be applied, such as polyimide or acrylic. can do. For example, an ink containing such an organic material is applied onto the first inorganic sealing film 26 by inkjet and then cured by UV irradiation. The sealing layer 6 covers the light emitting element layer 5 and prevents penetration of foreign matters such as water and oxygen into the light emitting element layer 5.
 保護材9は、接着層8を介して封止層6上に貼り付けられ、マザー基板50を剥離した時の支持材として機能する。保護材9の材料としては、PET(ポリエチレンテレフタレート)等が挙げられる。 The protective material 9 is affixed on the sealing layer 6 via the adhesive layer 8 and functions as a support material when the mother substrate 50 is peeled off. Examples of the material of the protective material 9 include PET (polyethylene terephthalate).
 支持材10は、マザー基板50を剥離した後に樹脂層12の下面に貼り付けることで、柔軟性に優れたELデバイスを製造するためのものであり、その材料としては、例えばポリエチレンテレフタレート(PET)等が挙げられる。 The support material 10 is for manufacturing an EL device having excellent flexibility by being attached to the lower surface of the resin layer 12 after the mother substrate 50 is peeled off. The material is, for example, polyethylene terephthalate (PET). Etc.
 機能フィルムは、例えば、光学補償機能、タッチセンサ機能、保護機能等を有する。 The functional film has, for example, an optical compensation function, a touch sensor function, a protection function, and the like.
 電子回路基板は、例えば、複数の端子TM上に実装されるICチップあるいはフレキシブルプリント基板である。 The electronic circuit board is, for example, an IC chip or a flexible printed board mounted on the plurality of terminals TM.
 本発明の一態様に係るELデバイスの製造方法は、前記ステップのなかで、特にステップS12に特徴がある。 The method for manufacturing an EL device according to an aspect of the present invention is particularly characterized in step S12 among the above steps.
 (ステップ12)
 以下、前記ステップ12(機能フィルム、カバーガラス等の貼り付け)につて説明する。
(Step 12)
Hereinafter, the step 12 (attachment of a functional film, a cover glass, etc.) will be described.
 ここで、前記貼り付け及びそれに関連する貼り付けには、複数の構成や方法が考えられる。例えば、貼り付けの組み合わせとしては、(1)積層体7とカバーガラスとの貼り付け、(2)積層体7と機能フィルムとの貼り付け、(3)積層体7と、機能フィルム及びカバーガラスの一体品との貼り付け等が考えられる。また、これらの貼り付けの前工程として、カバーガラスと機能フィルムとの貼り付けや、カバーガラスと接着層との貼り付け等も含まれる。なお、積層体7は、必要に応じて接着層8や保護材9が取り除かれた後に前記貼り付けに供される。 Here, a plurality of configurations and methods can be considered for the pasting and pasting related thereto. For example, as a combination of pasting, (1) pasting of laminated body 7 and cover glass, (2) pasting of laminated body 7 and functional film, (3) laminated body 7, functional film and cover glass It is conceivable to attach it to an integrated product. Moreover, as a pre-process of these affixing, the affixing of a cover glass and a functional film, the affixing of a cover glass and an adhesive layer, etc. are also included. The laminate 7 is used for the pasting after the adhesive layer 8 and the protective material 9 are removed as necessary.
 また、貼り付けの方法としては、例えば、真空下で行う場合や、大気下で行う場合等がある。さらには、積層体を、カバーガラスや機能フィルムに直接貼り付ける場合や、機能フィルムをカバーガラスに貼り付けた一体品に、積層体を貼り付ける場合などがある。 Also, as a method of pasting, for example, there are a case where it is performed in a vacuum and a case where it is performed in the atmosphere. Furthermore, there are a case where the laminate is directly attached to the cover glass and the functional film, and a case where the laminate is attached to an integrated product in which the functional film is attached to the cover glass.
 (実施形態1)
 実施形態1では、図3(a)及び(b)に基づいて、ステップ12において、基材としてのカバーガラス40に接着層41を貼り付ける場合について説明する。この場合、まず、カバーガラス40に接着層41としてのOCA(Optical Clear Adhesive、粘着テープ、粘着性フィルム)を貼り付ける。その後、OCAを介して、前記発光素子層5を含む積層体7や、TSP(Touch Screen Panel,タッチパネル)等の機能フィルム39をカバーガラス40に貼り付ける。カバーガラス40と、積層体7や機能フィルム39等との貼り付けは、真空下で、カバーガラス40と、積層体7や機能フィルム39等とを密着させることにより行う。以下、順に説明する。
(Embodiment 1)
Embodiment 1 demonstrates the case where the contact bonding layer 41 is affixed on the cover glass 40 as a base material in step 12 based on Fig.3 (a) and (b). In this case, first, OCA (Optical Clear Adhesive, adhesive tape, adhesive film) as the adhesive layer 41 is attached to the cover glass 40. Thereafter, a laminated body 7 including the light emitting element layer 5 and a functional film 39 such as TSP (Touch Screen Panel, touch panel) are attached to the cover glass 40 through OCA. The cover glass 40 is attached to the laminate 7 and the functional film 39 by bringing the cover glass 40 and the laminate 7 and the functional film 39 into close contact under vacuum. Hereinafter, it demonstrates in order.
 図3(a)は、平面視でのガイドフィルム43を示す図である。図3(a)に示すように、カバーガラス40に貼り付けられるOCA41は、ガイドフィルム43と予め一体化されている。また、ガイドフィルム43の両端部には、後に説明するガイドフィルムテンション機構44に設けられているテンションピン44(1)にはめ込むためのガイド穴43(1)が設けられている。 FIG. 3A shows the guide film 43 in plan view. As shown in FIG. 3A, the OCA 41 attached to the cover glass 40 is integrated with the guide film 43 in advance. Further, guide holes 43 (1) for fitting into tension pins 44 (1) provided in a guide film tension mechanism 44 described later are provided at both ends of the guide film 43.
 図3(b)は、カバーガラス40にOCA41を貼り付ける工程の概要を示す図であり、貼り付け装置47(1)を横からみた様子を示している。図3(b)は、カバーガラス40が曲面を有し、その内側面40(1)にOCA41を貼り付ける場合を示している。 FIG. 3B is a diagram showing an outline of the process of attaching the OCA 41 to the cover glass 40, and shows a state where the attaching device 47 (1) is viewed from the side. FIG. 3B shows a case where the cover glass 40 has a curved surface and the OCA 41 is attached to the inner side surface 40 (1).
 図3(b)に示すように、貼り付け装置47(1)は、硬質ゴムからなる硬質のステージ46と、ステージ46の両側に設けられたガイドフィルムテンション機構44とを主な構成要素としている。このガイドフィルムテンション機構44は、ガイドフィルム43に張力を付与するためのものである。OCA41と一体化されたガイドフィルム43は、OCA41を上面としてステージ46の上面に配置される。詳しくは、上方から、カバーガラス40、OCA41、ガイドフィルム31、ステージ46の順で配置される。そして、ステージ46の上面は、カバーガラス40の内側面40(1)に沿うように湾曲した形状となっている。 As shown in FIG. 3B, the attaching device 47 (1) includes a hard stage 46 made of hard rubber and guide film tension mechanisms 44 provided on both sides of the stage 46 as main components. . The guide film tension mechanism 44 is for applying tension to the guide film 43. The guide film 43 integrated with the OCA 41 is disposed on the upper surface of the stage 46 with the OCA 41 as the upper surface. Specifically, the cover glass 40, the OCA 41, the guide film 31, and the stage 46 are arranged in this order from above. The upper surface of the stage 46 has a curved shape along the inner side surface 40 (1) of the cover glass 40.
 そして、ガイドフィルム43のガイド穴43(1)が、ガイドフィルムテンション機構44に設けられているテンションピン44(1)にはめ込まれている。ガイドフィルムテンション機構44が図3(b)に示す矢印aの方向に動くことで、ガイドフィルム43に下向き(Z軸のマイナス方向)にテンションがかけられている。 And the guide hole 43 (1) of the guide film 43 is fitted in the tension pin 44 (1) provided in the guide film tension mechanism 44. The guide film tension mechanism 44 is moved in the direction of arrow a shown in FIG. 3B, whereby tension is applied to the guide film 43 downward (minus direction of the Z axis).
 すなわち、被貼り付け面であるカバーガラス40の内側面40(1)の湾曲方向に沿った方向に、貼り付け部材であるOCAを支持するガイドフィルム43に対してテンションをかけている。 That is, tension is applied to the guide film 43 that supports the OCA that is the attaching member in the direction along the bending direction of the inner side surface 40 (1) of the cover glass 40 that is the attaching surface.
 貼り付けは、前記の通り真空下で、ガイドフィルム43へ下向きのテンションをかけながら、そのテンションを適宜強めたり弱めたりしながら、カバーガラス40の内側面40(1)とOCA41との間に気泡等が発生しないように、カバーガラス40とOCA41とを接触させることにより行う。 As described above, air bubbles are applied between the inner surface 40 (1) of the cover glass 40 and the OCA 41 while applying a downward tension to the guide film 43 and increasing or decreasing the tension as appropriate. The cover glass 40 and the OCA 41 are brought into contact with each other so as not to occur.
 次に、上述の貼り付けと同様にして、OCA41が貼り付けられたカバーガラス40にELデバイス等のフレキシブルなディスプレイを貼り付ける。具体的には、前記貼り付けにおいて、前記OCA41の代わりにフレキシブルディスプレイを用いる。これにより、カバーガラス40で表面が保護されたフレキシブルディスプレイが得られる。 Next, a flexible display such as an EL device is attached to the cover glass 40 to which the OCA 41 is attached in the same manner as the above attachment. Specifically, a flexible display is used instead of the OCA 41 in the pasting. Thereby, a flexible display whose surface is protected by the cover glass 40 is obtained.
 なお、ガイドフィルムテンション機構44の具体的な構成は特には限定されず、例えば、バネ式、エアーシリンダ式、モータートルク式などが用いられる。 The specific configuration of the guide film tension mechanism 44 is not particularly limited, and for example, a spring type, an air cylinder type, a motor torque type, or the like is used.
 (実施形態2)
 実施形態2では、図3(c)に基づいて、実施形態1と同様に、ステップ12において、カバーガラス40に接着層41を貼り付ける場合について説明する。実施形態1との相違点は、被貼り付け面が、カバーガラス40の曲面の内側面40(1)ではなく、外側面40(2)である点である。以下、実施形態1との相違点を中心に説明する。
(Embodiment 2)
In the second embodiment, a case where the adhesive layer 41 is pasted on the cover glass 40 in step 12 will be described based on FIG. The difference from the first embodiment is that the surface to be attached is not the inner side surface 40 (1) of the curved surface of the cover glass 40 but the outer side surface 40 (2). Hereinafter, the difference from the first embodiment will be mainly described.
 図3(c)は、カバーガラス40にOCA41を貼り付ける工程の概要を示す図であり、貼り付け装置47(2)を横からみた様子を示している。図3(c)は、カバーガラス40が曲面を有し、その外側面40(2)にOCA41を貼り付ける場合を示している。 FIG. 3C is a diagram showing an outline of the process of attaching the OCA 41 to the cover glass 40, and shows a state where the attaching device 47 (2) is viewed from the side. FIG. 3C shows a case where the cover glass 40 has a curved surface and the OCA 41 is attached to the outer side surface 40 (2).
 図3(c)に示すように、貼り付け装置47(2)は、アルミからなる上ステージ46(1)(第1ステージ)と、硬質ゴムからなる硬質の下ステージ46(2)(第2ステー)と、ステージ46の両側に設けられたガイドフィルムテンション機構44とを主な構成要素としている。 As shown in FIG. 3C, the attaching device 47 (2) includes an upper stage 46 (1) (first stage) made of aluminum and a hard lower stage 46 (2) (second stage) made of hard rubber. The main component is a stay) and guide film tension mechanisms 44 provided on both sides of the stage 46.
 OCA41と一体化されたガイドフィルム43は、OCA41を上面として上ステージ46(1)と下ステージ46(2)との間に配置される。詳しくは、上方から、上ステージ46(1)、カバーガラス40、OCA41、ガイドフィルム31、下ステージ46(2)の順で配置される。そして、上ステージ46の先端部は、カバーガラス40の内側面40(1)に沿うように湾曲した形状となっており、他方、下ステージ46(2)の上面は、カバーガラス40の外側面40(2)に沿うように湾曲した形状となっている。 The guide film 43 integrated with the OCA 41 is disposed between the upper stage 46 (1) and the lower stage 46 (2) with the OCA 41 as an upper surface. Specifically, the upper stage 46 (1), the cover glass 40, the OCA 41, the guide film 31, and the lower stage 46 (2) are arranged in this order from the top. And the front-end | tip part of the upper stage 46 becomes a shape curved along the inner surface 40 (1) of the cover glass 40, On the other hand, the upper surface of the lower stage 46 (2) is the outer surface of the cover glass 40 40 (2) has a curved shape.
 そして、ガイドフィルムテンション機構44が図3(c)に示す矢印bの方向に動くことで、ガイドフィルム43に上向き(Z軸のプラス方向)にテンションがかけられている。 Then, the guide film tension mechanism 44 moves in the direction of the arrow b shown in FIG. 3C, so that the guide film 43 is tensioned upward (the positive direction of the Z axis).
 すなわち、被貼り付け面であるカバーガラス40の外側面40(2)の湾曲方向に沿った方向に、貼り付け部材であるOCAを支持するガイドフィルム43に対してテンションをかけている。 That is, tension is applied to the guide film 43 that supports the OCA that is the attaching member in the direction along the bending direction of the outer side surface 40 (2) of the cover glass 40 that is the attaching surface.
 貼り付けは、前記の通り真空下で、ガイドフィルム43へ上向きのテンションをかけながら、そのテンションを適宜強めたり弱めたりしながら、カバーガラス40の外側面40(2)とOCA41との間に気泡等が発生しないように、カバーガラス40とOCA41とを接触させることにより行う。具体的には、上ステージ46(1)にカバーガラス40を密着させ、そこに、接着層41と一体化したガイドフィルム43をあてがい、端から応力を加えると共に下ステージ46(2)をはめることで貼り付けを行う。 As described above, air bubbles are applied between the outer surface 40 (2) of the cover glass 40 and the OCA 41 while applying an upward tension to the guide film 43 and increasing or decreasing the tension as appropriate. The cover glass 40 and the OCA 41 are brought into contact with each other so as not to occur. Specifically, the cover glass 40 is brought into close contact with the upper stage 46 (1), a guide film 43 integrated with the adhesive layer 41 is applied thereto, stress is applied from the end, and the lower stage 46 (2) is fitted. Paste with.
 次に、上述の貼り付けと同様にして、OCA41が貼り付けられたカバーガラス40にELデバイス等のフレキシブルなディスプレイを貼り付ける。具体的には、前記貼り付けにおいて、前記OCA41の代わりにフレキシブルディスプレイを用いる。これにより、カバーガラス40で表面が保護されたフレキシブルディスプレイが得られる。 Next, a flexible display such as an EL device is attached to the cover glass 40 to which the OCA 41 is attached in the same manner as the above attachment. Specifically, a flexible display is used instead of the OCA 41 in the pasting. Thereby, a flexible display whose surface is protected by the cover glass 40 is obtained.
 なお、ガイドフィルムテンション機構44の具体的な構成は特には限定されず、実施形態1と同様に、例えば、バネ式、エアーシリンダ式、モータートルク式などが用いられる。 It should be noted that the specific configuration of the guide film tension mechanism 44 is not particularly limited, and, for example, a spring type, an air cylinder type, a motor torque type, or the like is used as in the first embodiment.
 前記各実施形態において、接着層41は、OCA等の粘着テープに限定されず、塗布によって形成された粘着層や、接着剤で構成することも可能である。 In each of the above embodiments, the adhesive layer 41 is not limited to an adhesive tape such as OCA, but may be constituted by an adhesive layer formed by coating or an adhesive.
 また、貼り付けは、真空下で行うことが好ましいが、大気下等それ以外の環境下で行うことも可能である。 In addition, the pasting is preferably performed under vacuum, but can also be performed under other environments such as the atmosphere.
 また、ガイドフィルムへテンションをかける際は、数百g前後を基準とし、前記の通り適宜そのテンションを強めたり弱めたりしながら貼り付けを行う。 Also, when applying tension to the guide film, it is pasted while properly increasing or decreasing the tension as described above, based on around several hundred grams.
 また、各ステージの材質は前記例示に限定されず、種々の材料を用いることが可能である。 Further, the material of each stage is not limited to the above example, and various materials can be used.
 また、発光素子層5を貼り付ける場合、その発光素子層5は、前記の通り、OLED素子を構成する場合に限られず、無機発光ダイオードあるいは量子ドット発光ダイオードを構成してもよい。また、液晶表示素子を用いてもよい。 In addition, when the light emitting element layer 5 is attached, the light emitting element layer 5 is not limited to the case where the OLED element is configured as described above, and may be an inorganic light emitting diode or a quantum dot light emitting diode. Further, a liquid crystal display element may be used.
 (実施形態3)
 実施形態3では、図4(a)から図4(c)に基づいて、凸形状のカバーガラス40の外側面40(2)に接着層41としてのOCAを貼り付ける場合について説明する。実施形態1との相違点は、本実施形態の貼り付け装置47(3)は、真空下ではなく大気下でも貼り付けが可能な点である。以下、前記各実施形態との相違点を中心に説明する。
(Embodiment 3)
Embodiment 3 demonstrates the case where OCA as the contact bonding layer 41 is affixed on the outer surface 40 (2) of the convex-shaped cover glass 40 based on Fig.4 (a)-FIG.4 (c). The difference from the first embodiment is that the affixing device 47 (3) of the present embodiment can be affixed even in the air, not in a vacuum. Hereinafter, the difference from the above embodiments will be mainly described.
 図4(a)から図4(c)は、本実施形態の貼り付け工程の概要を示す図であり、図4(a)から図4(c)の順に工程が進行する。 4 (a) to 4 (c) are diagrams showing an outline of the attaching process of the present embodiment, and the process proceeds in the order of FIG. 4 (a) to FIG. 4 (c).
 本実施形態の貼り付け装置47(3)は、前記各実施形態と同様に、ステージ46、ガイドフィルムテンション機構44、テンションピン44(1)を備えている。そして、一組のガイドフィルムテンション機構44の間には、ガイドフィルム43が備えられており、ガイド穴43(1)及びテンションピン44(1)を介して、ガイドフィルム43にはテンションが加えられている(図4(a)の矢印c方向)。また、ガイドフィルム43の下面(ステージ46に対向する面)には、OCA41が備えられている。 The affixing device 47 (3) of this embodiment includes a stage 46, a guide film tension mechanism 44, and a tension pin 44 (1), as in the above embodiments. A guide film 43 is provided between the pair of guide film tension mechanisms 44, and tension is applied to the guide film 43 through the guide holes 43 (1) and the tension pins 44 (1). (In the direction of arrow c in FIG. 4A). An OCA 41 is provided on the lower surface of the guide film 43 (the surface facing the stage 46).
 次に、貼り付け工程について順に説明する。 Next, the pasting process will be described in order.
 先ず、図4(a)に示すように、[1]ステージ46にカバーガラス40を設置する。カバーガラス40は凸形状を有しており、ステージ46もその凸形状に則った形状を有している。そして、カバーガラス40の凸形状の外側面40(2)がガイドフィルム43に備えられているOCA41と対向するように設置する。その際、カバーガラス40の凸形状の内側面40(1)は、ステージ46とほぼ密着する。 First, as shown in FIG. 4A, [1] a cover glass 40 is set on the stage 46. The cover glass 40 has a convex shape, and the stage 46 also has a shape according to the convex shape. And it installs so that the convex-shaped outer side surface 40 (2) of the cover glass 40 may oppose OCA41 with which the guide film 43 is equipped. At that time, the convex inner surface 40 (1) of the cover glass 40 is in close contact with the stage 46.
 次に、[2]ガイドフィルム43を水平方向に引っ張る。水平方向とは、図4(a)に示すX軸方向であり、矢印c方向である。ガイドフィルム43を、その両端に配置されたガイドフィルムテンション機構44で引っ張ることにより、ガイドフィルム43にテンションをかける。 Next, [2] The guide film 43 is pulled in the horizontal direction. The horizontal direction is the X-axis direction shown in FIG. A tension is applied to the guide film 43 by pulling the guide film 43 with guide film tension mechanisms 44 disposed at both ends thereof.
 次に、[3]テンションをかけたまま、ガイドフィルム43とステージ46とを近づける。これは、ガイドフィルム43をステージ46の方に近づけても良いし(図4(a)の矢印d)、逆に、ステージ46をガイドフィルム43に近づけても良い。或いは、その両者を共に近づけても良い。 Next, [3] The guide film 43 and the stage 46 are brought close to each other while the tension is applied. In this case, the guide film 43 may be moved closer to the stage 46 (arrow d in FIG. 4A), and conversely, the stage 46 may be moved closer to the guide film 43. Alternatively, both of them may be brought close together.
 次に、図4(b)に示すように、[4]カバーガラス40とOCA41とを、その一部(曲面の一か所)において接触させる。図4(b)に示す例では、カバーガラス40の凸形状のほぼ頂点の部分が、OCA41と接触している。なお、この間も、ガイドフィルム43には、水平方向にテンションが加えられている(図4(b)の矢印e)。 Next, as shown in FIG. 4B, [4] the cover glass 40 and the OCA 41 are brought into contact with each other at a part (one portion of the curved surface). In the example shown in FIG. 4B, the substantially apex portion of the convex shape of the cover glass 40 is in contact with the OCA 41. During this time, tension is applied to the guide film 43 in the horizontal direction (arrow e in FIG. 4B).
 次に、図4(c)に示すように、[5]ガイドフィルム43のテンションの方向をカバーガラス40の曲率(接線の傾き)に合わせるように、ガイドフィルムテンション機構44を水平方向からカバーガラス40の湾曲方向に傾けつつ下方に移動させる。具体的には、ガイドフィルムテンション機構44を、その傾き(図4(c)の角度V1)がカバーガラス40のOCA41と接する点における接線の傾きとほぼ等しくなるように傾ける。これにより、ガイドフィルムテンション機構44近傍部のガイドフィルム43には、水平方向から傾いた方向(図4(c)の矢印f)にテンションがかかる。そして、ガイドフィルムテンション機構44を傾けたままの状態で、ガイドフィルムテンション機構44を、下方(図4(c)の矢印g)に移動させる。そして、カバーガラス46とOCA41との接触箇所の移動、拡大に伴い、順次、ガイドフィルムテンション機構44の傾きを変えつつ、下方に移動させる。これにより、カバーガラス46とOCA41とが全面的に接着される。 Next, as shown in FIG. 4C, [5] the guide film tension mechanism 44 is moved from the horizontal direction to the cover glass so that the tension direction of the guide film 43 matches the curvature of the cover glass 40 (tangential inclination). It is moved downward while being inclined in the bending direction of 40. Specifically, the guide film tension mechanism 44 is tilted so that its tilt (angle V1 in FIG. 4C) is substantially equal to the tilt of the tangent line at the point of contact with the OCA 41 of the cover glass 40. Thereby, tension is applied to the guide film 43 in the vicinity of the guide film tension mechanism 44 in the direction inclined from the horizontal direction (arrow f in FIG. 4C). Then, with the guide film tension mechanism 44 tilted, the guide film tension mechanism 44 is moved downward (arrow g in FIG. 4C). Then, as the contact location between the cover glass 46 and the OCA 41 moves and expands, the guide film tension mechanism 44 is sequentially moved downward while changing the inclination. As a result, the cover glass 46 and the OCA 41 are bonded together.
 次に、上述の貼り付けと同様にして、OCA41が貼り付けられたカバーガラス40にELデバイス等のフレキシブルなディスプレイを貼り付ける。具体的には、前記貼り付けにおいて、前記OCA41の代わりにフレキシブルディスプレイを用いる。これにより、カバーガラス40で表面が保護されたフレキシブルディスプレイが得られる。 Next, a flexible display such as an EL device is attached to the cover glass 40 to which the OCA 41 is attached in the same manner as the above attachment. Specifically, a flexible display is used instead of the OCA 41 in the pasting. Thereby, a flexible display whose surface is protected by the cover glass 40 is obtained.
 本実施形態では、真空下のみならず、大気下でも、気泡の噛み込みを抑制しながら、カバーガラス40にOCA41等を貼り付けることができる。 In the present embodiment, the OCA 41 or the like can be attached to the cover glass 40 while suppressing the entrapment of bubbles not only in a vacuum but also in the atmosphere.
 なお、傾けつつ下方移動させるガイドフィルムテンション機構44は、必ずしもその両側のガイドフィルムテンション機構44とする必要はなく、一方のみのガイドフィルムテンション機構44とすることもできる。 It should be noted that the guide film tension mechanism 44 that is moved downward while being tilted does not necessarily need to be the guide film tension mechanism 44 on both sides thereof, and may be only one guide film tension mechanism 44.
 また、カバーガラス40とOCA41等が接触する位置は頂点近傍、例えば頂点から±2mm程度に限定されるものではなく、頂点近傍以外の位置とすることもできる。 Further, the position where the cover glass 40 and the OCA 41 contact is not limited to the vicinity of the apex, for example, about ± 2 mm from the apex, and may be a position other than the vicinity of the apex.
 (実施形態4)
 実施形態4では、図5(a)から図5(d)に基づいて、凸形状のカバーガラス40の外側面40(2)に接着層41としてのOCAを貼り付ける場合について説明する。実施形態3との主な相違点は、本実施形態の貼り付け装置47(4)は、カバーガラス40上の所望の位置を始点として貼り付けを行う点である。以下、前記各実施形態との相違点を中心に説明する。
(Embodiment 4)
Embodiment 4 demonstrates the case where OCA as the contact bonding layer 41 is affixed on the outer surface 40 (2) of the convex-shaped cover glass 40 based on Fig.5 (a)-FIG.5 (d). The main difference from the third embodiment is that the sticking device 47 (4) of the present embodiment sticks using a desired position on the cover glass 40 as a starting point. Hereinafter, the difference from the above embodiments will be mainly described.
 図5(a)から図5(d)は、本実施形態の貼り付け工程の概要を示す図であり、図5(a)から図5(d)の順に工程が進行する。 FIG. 5A to FIG. 5D are diagrams showing an outline of the attaching process of the present embodiment, and the process proceeds in the order of FIG. 5A to FIG. 5D.
 本実施形態の貼り付け装置47(4)は、前記各実施形態と同様に、ステージ46、ガイドフィルムテンション機構44、テンションピン44(1)を備えている。そして、一組のガイドフィルムテンション機構44の間には、ガイドフィルム43が備えられており、ガイド穴43(1)及びテンションピン44(1)を介して、ガイドフィルム43にはテンションが加えられている(図5(a)の矢印h方向)。また、ガイドフィルム43の下面(ステージ46に対向する面)には、OCA41が備えられている。 The attachment device 47 (4) of this embodiment includes a stage 46, a guide film tension mechanism 44, and a tension pin 44 (1), as in the above embodiments. A guide film 43 is provided between the pair of guide film tension mechanisms 44, and tension is applied to the guide film 43 through the guide holes 43 (1) and the tension pins 44 (1). (In the direction of arrow h in FIG. 5A). An OCA 41 is provided on the lower surface of the guide film 43 (the surface facing the stage 46).
 次に、貼り付け工程について順に説明する。本実施形態では、カバーガラス40の特定位置が、所望の位置P1として定められている。所望の位置とは、位置決めすることが重要な位置のことを意味する。例えば、端子部を有する部材について、その一番端に位置する端子部を、カバーガラス40の所定箇所に合わせて貼り付ける必要がある場合の当該所定箇所が、所望の位置として例示できる。また、例えば、カバーガラス40に意匠が施されている場合であって、その意匠の特定位置に合わせて部材を貼り付ける必要があるときの当該所定も、所望の位置として例示できる。 Next, the pasting process will be described in order. In this embodiment, the specific position of the cover glass 40 is defined as a desired position P1. The desired position means a position where positioning is important. For example, with respect to a member having a terminal portion, the predetermined portion when the terminal portion located at the end thereof needs to be attached to the predetermined portion of the cover glass 40 can be exemplified as the desired position. Moreover, for example, when the design is applied to the cover glass 40 and the member needs to be attached in accordance with the specific position of the design, the predetermined position can be exemplified as the desired position.
 先ず、図5(a)に示すように、[1]ステージ46にカバーガラス40を設置する。その際、カバーガラス40の所望の位置P1が、ステージ46の対応する位置に合うように設置する。カバーガラス40は凸形状を有しており、ステージ46もその凸形状に則った形状を有している。そして、カバーガラス40の凸形状の外側面40(2)がガイドフィルム43に備えられているOCA41と対向するように設置する。その際、カバーガラス40の凸形状の内側面40(1)は、ステージ46とほぼ密着する。 First, as shown in FIG. 5A, [1] a cover glass 40 is set on the stage 46. At that time, the cover glass 40 is installed so that the desired position P1 matches the corresponding position of the stage 46. The cover glass 40 has a convex shape, and the stage 46 also has a shape according to the convex shape. And it installs so that the convex-shaped outer side surface 40 (2) of the cover glass 40 may oppose OCA41 with which the guide film 43 is equipped. At that time, the convex inner surface 40 (1) of the cover glass 40 is in close contact with the stage 46.
 次に、[2-1]ガイドフィルム43を水平方向に引っ張る。水平方向とは、図5(a)に示すX軸方向であり、矢印h方向である。ガイドフィルム43を、その両端に配置されたガイドフィルムテンション機構44で引っ張ることにより、ガイドフィルム43にテンションをかける。 Next, [2-1] The guide film 43 is pulled in the horizontal direction. The horizontal direction is the X-axis direction shown in FIG. A tension is applied to the guide film 43 by pulling the guide film 43 with guide film tension mechanisms 44 disposed at both ends thereof.
 次に、図5(b)に示すように、[2-2]ガイドフィルム43にテンションをかけたまま、ガイドフィルム43を傾ける。その際、カバーガラス40の所望の位置P1での接線の傾きと同じ傾きにガイドフィルム43を傾ける。図5(b)の例では、ガイドフィルム43の一端に斜め上向き(矢印i1)のテンションをかけ、他端に斜め下向き(矢印i2)のテンションをかけながら、水平方向から角度V2だけ、ガイドフィルム43を傾けている。 Next, as shown in FIG. 5B, [2-2] The guide film 43 is tilted while the guide film 43 is being tensioned. At that time, the guide film 43 is inclined to the same inclination as the inclination of the tangent at the desired position P1 of the cover glass 40. In the example of FIG. 5 (b), the guide film 43 is applied with a diagonally upward (arrow i1) tension on one end and a diagonally downward (arrow i2) tension on the other end, while the guide film 43 is at an angle V2 from the horizontal direction. 43 is tilted.
 次に、[3]テンションをかけると共に、水平方向から角度V2だけ傾けたまま、ガイドフィルム43とステージ46とを近づける。これは、ガイドフィルム43をステージ46の方に近づけても良いし(図5(b)の矢印j)、逆に、ステージ46をガイドフィルム43に近づけても良い。或いは、その両者を共に近づけても良い。 Next, while applying [3] tension, the guide film 43 and the stage 46 are brought close to each other while being inclined from the horizontal direction by the angle V2. In this case, the guide film 43 may be moved closer to the stage 46 (arrow j in FIG. 5B), and conversely, the stage 46 may be moved closer to the guide film 43. Alternatively, both of them may be brought close together.
 次に、図5(c)に示すように、[4]カバーガラス40とOCA41とを、その一部(曲面の一か所)において接触させる。図5(c)に示す例では、カバーガラス40の所望の位置P1にOCA41が当接する。その際、ガイドフィルム43には、図5(b)に示した矢印i1及びi2と同じ方向である矢印k1及びk2の方向にテンションがかけられている。 Next, as shown in FIG. 5C, [4] the cover glass 40 and the OCA 41 are brought into contact with each other at a part (one portion of the curved surface). In the example shown in FIG. 5C, the OCA 41 comes into contact with a desired position P1 of the cover glass 40. At that time, tension is applied to the guide film 43 in the directions of arrows k1 and k2, which are the same directions as the arrows i1 and i2 shown in FIG.
 次に、図5(d)に示すように、[5]ガイドフィルム43のテンションの方向をカバーガラス40の曲率(接線の傾き)に合わせるように、ガイドフィルムテンション機構44を水平方向からカバーガラス40の湾曲方向に傾けつつ下方に移動させる。 Next, as shown in FIG. 5 (d), [5] the guide film tension mechanism 44 is moved from the horizontal direction to the cover glass so that the tension direction of the guide film 43 matches the curvature (tangential slope) of the cover glass 40. It is moved downward while being inclined in the bending direction of 40.
 具体的には、ガイドフィルムテンション機構44を、ガイドフィルム43のテンションの方向(図5(d)の矢印l1、l2)が、カバーガラス40の湾曲方向に沿うような斜め下方向になるように、下方向(矢印m)に下げていく。 Specifically, the guide film tension mechanism 44 is arranged so that the tension direction of the guide film 43 ( arrows 11 and 12 in FIG. 5D) is obliquely downward along the curve direction of the cover glass 40. , Move downward (arrow m).
 これにより、カバーガラス46の所望の位置P1を起点として、カバーガラス46とOCA41との接触箇所が順次移動、拡大していき、カバーガラス46とOCA41とが全面的に接着される。 Thus, the contact position between the cover glass 46 and the OCA 41 sequentially moves and expands from the desired position P1 of the cover glass 46, and the cover glass 46 and the OCA 41 are bonded together.
 次に、上述の貼り付けと同様にして、OCA41が貼り付けられたカバーガラス40にELデバイス等のフレキシブルなディスプレイを貼り付ける。具体的には、前記貼り付けにおいて、前記OCA41の代わりにフレキシブルディスプレイを用いる。これにより、カバーガラス40で表面が保護されたフレキシブルディスプレイが得られる。 Next, a flexible display such as an EL device is attached to the cover glass 40 to which the OCA 41 is attached in the same manner as the above attachment. Specifically, a flexible display is used instead of the OCA 41 in the pasting. Thereby, a flexible display whose surface is protected by the cover glass 40 is obtained.
 本実施形態では、所望の設置点(所望の位置)や所望の設置面を基準として、真空下のみならず、大気下でも、気泡の噛み込みを抑制しながら、カバーガラス40にOCA41等を貼り付けることができる。 In the present embodiment, the OCA 41 or the like is pasted on the cover glass 40 while suppressing the entrapment of bubbles, not only in the vacuum but also in the atmosphere, based on the desired installation point (desired position) and the desired installation surface. Can be attached.
 なお、傾けつつ下方移動させるガイドフィルムテンション機構44は、必ずしもその両側のガイドフィルムテンション機構44とする必要はなく、一方のみのガイドフィルムテンション機構44とすることもできる。 It should be noted that the guide film tension mechanism 44 that is moved downward while being tilted does not necessarily need to be the guide film tension mechanism 44 on both sides thereof, and may be only one guide film tension mechanism 44.
 (実施形態5)
 実施形態5では、図6(a)から図6(c)、及び図7(a)から図7(b)に基づいて、凸形状のカバーガラス40の外側面40(2)に接着層41としてのOCAを貼り付ける場合について説明する。実施形態4との主な相違点は、貼り付け装置(5)にスキージ48が備えられている点、及び、ステージ46とカバーガラス40とが、複数個の凸形状を有している点である。以下、前記各実施形態との相違点を中心に説明する。
(Embodiment 5)
In the fifth embodiment, the adhesive layer 41 is formed on the outer surface 40 (2) of the convex cover glass 40 based on FIGS. 6 (a) to 6 (c) and FIGS. 7 (a) to 7 (b). A case where the OCA is pasted will be described. The main difference from Embodiment 4 is that the squeegee 48 is provided in the attaching device (5), and that the stage 46 and the cover glass 40 have a plurality of convex shapes. is there. Hereinafter, the difference from the above embodiments will be mainly described.
 図6(a)から図6(c)、及び図7(a)から図7(b)は、本実施形態の貼り付け工程の概要を示す図であり、図6(a)から図6(c)、図6(c)に引き続いて図7(a),図7(b)の順に工程が進行する。 6 (a) to 6 (c) and FIGS. 7 (a) to 7 (b) are diagrams showing an outline of the attaching process of the present embodiment, and FIG. 6 (a) to FIG. c) Subsequently to FIG. 6C, the process proceeds in the order of FIG. 7A and FIG. 7B.
 本実施形態の貼り付け装置47(5)は、前記各実施形態と同様に、ステージ46、ガイドフィルムテンション機構44、テンションピン44(1)を備えると共に、スキージ48を備えている。スキージ48は、ガイドフィルムテンション機構44に支持されているガイドフィルム43の上方(Z軸のプラス方向)に位置している。すなわち、スキージ48とステージ46とは、ガイドフィルム43を介して対向して配置されている。 The pasting device 47 (5) of this embodiment includes a stage 46, a guide film tension mechanism 44, a tension pin 44 (1), and a squeegee 48, as in the above embodiments. The squeegee 48 is located above the guide film 43 supported by the guide film tension mechanism 44 (in the positive direction of the Z axis). That is, the squeegee 48 and the stage 46 are disposed to face each other with the guide film 43 interposed therebetween.
 また、ステージ46は2個の凸部46A・46Bを有している。これは、本実施形態のカバーガラス40が、2個の凸部40A・40Bを有しているためである。ステージ46の形状はカバーガラス40の形状に対応しており、ステージ46上にカバーガラス40を安定して設置することが可能となっている。 Further, the stage 46 has two convex portions 46A and 46B. This is because the cover glass 40 of the present embodiment has two convex portions 40A and 40B. The shape of the stage 46 corresponds to the shape of the cover glass 40, and the cover glass 40 can be stably installed on the stage 46.
 そして、一組のガイドフィルムテンション機構44の間には、ガイドフィルム43が備えられており、ガイド穴43(1)及びテンションピン44(1)を介して、ガイドフィルム43にはテンションが加えられている(図6(a)の矢印n方向)。また、ガイドフィルム43の下面(ステージ46に対向する面)には、OCA41が備えられている。 A guide film 43 is provided between the pair of guide film tension mechanisms 44, and tension is applied to the guide film 43 through the guide holes 43 (1) and the tension pins 44 (1). (In the direction of arrow n in FIG. 6A). An OCA 41 is provided on the lower surface of the guide film 43 (the surface facing the stage 46).
 次に、貼り付け工程について順に説明する。本実施形態では、カバーガラス40の特定位置が、所望の位置P2として定められている。 Next, the pasting process will be described in order. In this embodiment, the specific position of the cover glass 40 is defined as a desired position P2.
 先ず、図6(a)に示すように、[1]ステージ46にカバーガラス40を設置する。本実施形態では、カバーガラス40及びステージ46が、各々2個の凸部40A・40B、凸部46A・46Bを有している。そこで、ステージ46にカバーガラス40を設置する際には、カバーガラス40の凸部40A・40Bが、ステージ46の凸部46A・46Bに沿うように設置し、カバーガラス40を安定させる。また、設置する際、カバーガラス40の所望の位置P2が、ステージ46の対応する位置に合うように設置する。カバーガラス40を、その凸形状が上に向く(Z軸のプラス方向)ように設置することで、カバーガラス40の凸形状の外側面40(2)がガイドフィルム43に備えられているOCA41に対向すると共に、カバーガラス40の凸形状の内側面40(1)は、ステージ46とほぼ密着する。 First, as shown in FIG. 6A, [1] a cover glass 40 is set on the stage 46. In the present embodiment, the cover glass 40 and the stage 46 each have two convex portions 40A and 40B and convex portions 46A and 46B. Therefore, when the cover glass 40 is installed on the stage 46, the cover glass 40 is installed so that the convex portions 40A and 40B of the cover glass 40 extend along the convex portions 46A and 46B of the stage 46. Moreover, when installing, the desired position P2 of the cover glass 40 is installed so that the position corresponding to the stage 46 may correspond. By installing the cover glass 40 so that the convex shape faces upward (the positive direction of the Z axis), the convex outer surface 40 (2) of the cover glass 40 is attached to the OCA 41 provided in the guide film 43. Oppositely, the convex inner surface 40 (1) of the cover glass 40 is in close contact with the stage 46.
 なお、本実施形態における所望の位置P2は、先の実施形態における所望の位置P1の条件に加えて、ガイドフィルム43をカバーガラス40の所望の位置P2に当接させた際、当該所望の位置P2を含む凸部とは異なる凸部にガイドフィルム43が当接しない位置に定められている。 The desired position P2 in this embodiment is the desired position when the guide film 43 is brought into contact with the desired position P2 of the cover glass 40 in addition to the condition of the desired position P1 in the previous embodiment. It is determined at a position where the guide film 43 does not come into contact with a convex portion different from the convex portion including P2.
 次に、[2-1]ガイドフィルム43を水平方向に引っ張る。水平方向とは、図6(a)に示すX軸方向であり、矢印n方向である。ガイドフィルム43を、その両端に配置されたガイドフィルムテンション機構44で引っ張ることにより、ガイドフィルム43にテンションをかける。 Next, [2-1] The guide film 43 is pulled in the horizontal direction. The horizontal direction is the X-axis direction shown in FIG. A tension is applied to the guide film 43 by pulling the guide film 43 with guide film tension mechanisms 44 disposed at both ends thereof.
 次に、[2-1-1]位置決めが所望の位置に合うように、スキージ48をガイドフィルム43に当接させる。本実施形態では、ガイドフィルム43の上方のスキージ48が備えられている。このスキージ48を、ガイドフィルム43の所望の位置P2に対応する位置に当接させる。この対応する位置とは、OCA41とカバーガラス40とを貼り付ける際、ガイドフィルム43がOCA41を介してカバーガラス40上の所望の位置P2と接する位置である。 [2-1-1] Next, the squeegee 48 is brought into contact with the guide film 43 so that the positioning is in a desired position. In the present embodiment, a squeegee 48 above the guide film 43 is provided. The squeegee 48 is brought into contact with a position corresponding to the desired position P2 of the guide film 43. This corresponding position is a position where the guide film 43 contacts the desired position P2 on the cover glass 40 via the OCA 41 when the OCA 41 and the cover glass 40 are attached.
 次に、図6(b)に示すように、[2-2]ガイドフィルム43にテンションをかけたまま、ガイドフィルム43を傾ける。その際、カバーガラス40の所望の位置P2での接線の傾きと同じ傾きにガイドフィルム43を傾ける。図6(b)の例では、ガイドフィルム43の一端に斜め上向き(矢印o1)のテンションをかけ、他端に斜め下向き(矢印o2)のテンションをかけながら、水平方向から角度V3だけ、ガイドフィルム43を傾けている。 Next, as shown in FIG. 6B, [2-2] The guide film 43 is tilted while tension is applied to the guide film 43. At that time, the guide film 43 is inclined to the same inclination as the inclination of the tangent at the desired position P2 of the cover glass 40. In the example of FIG. 6 (b), the guide film 43 is tilted upward (arrow o1) at one end, and tilted downward (arrow o2) at the other end, while the guide film 43 is angled V3 from the horizontal direction. 43 is tilted.
 次に、[3]テンションをかけると共に、水平方向から角度V3だけ傾けたまま、ガイドフィルム43とステージ46とを近づける。これは、ガイドフィルム43をステージ46の方に近づけても良いし(図6(b)の矢印j)、逆に、ステージ46をガイドフィルム43に近づけても良い。或いは、その両者を共に近づけても良い。本実施形態では、スキージ48を[2-1-1]においてガイドフィルム43に当接させたままの状態で、ガイドフィルム43とステージ46とを近づける。 Next, while applying [3] tension, the guide film 43 and the stage 46 are brought close to each other while being inclined by the angle V3 from the horizontal direction. In this case, the guide film 43 may be moved closer to the stage 46 (arrow j in FIG. 6B), and conversely, the stage 46 may be moved closer to the guide film 43. Alternatively, both of them may be brought close together. In the present embodiment, the guide film 43 and the stage 46 are brought close to each other while the squeegee 48 is kept in contact with the guide film 43 in [2-1-1].
 次に、図6(c)に示すように、[4]カバーガラス40とOCA41とを、その一部(曲面の一か所)において接触させる。図6(c)に示す例では、カバーガラス40の所望の位置P2にOCA41が当接する。その際、ガイドフィルム43には、図6(b)に示した矢印o1及びo2と同じ方向である矢印q1及びq2の方向にテンションがかけられている。 Next, as shown in FIG. 6C, [4] the cover glass 40 and the OCA 41 are brought into contact with each other at a part (one portion of the curved surface). In the example shown in FIG. 6C, the OCA 41 comes into contact with a desired position P <b> 2 of the cover glass 40. At that time, tension is applied to the guide film 43 in the directions of arrows q1 and q2, which are the same directions as the arrows o1 and o2 shown in FIG.
 そして、本実施形態では、スキージ48がガイドフィルム43に当接したままの状態であるため、所望の位置P2において、スキージ48、ガイドフィルム43、OCA41及びステージ46が、この順で接している。 In this embodiment, since the squeegee 48 remains in contact with the guide film 43, the squeegee 48, the guide film 43, the OCA 41, and the stage 46 are in contact in this order at a desired position P2.
 次に、図7(a)に示すように、[4-1]スキージ48を走らせる。具体的には、スキージ48は、接着層41がカバーガラス40に当接するようにガイドフィルム43を押し付けながら、ガイドフィルム43の表面を移動する。移動の方向は、所望の位置P2から、カバーガラス40のX軸方向における両端面の内、所望の位置P2からの距離が長い方の端面に向けての方向(図7(a)に示す例では、X軸のマイナス方向)である。本実施形態では、カバーガラス40に2個の凸部40A・40Bが設けられており、所望の位置P2が含まれる凸部(図7(a)に示す例では、凸部40B)から、もう一方の凸部(図7(b)に示す例では、凸部40A)に向けてスキージ48を走らせる。 Next, as shown in FIG. 7A, the [4-1] squeegee 48 is run. Specifically, the squeegee 48 moves on the surface of the guide film 43 while pressing the guide film 43 so that the adhesive layer 41 contacts the cover glass 40. The direction of movement is the direction from the desired position P2 toward the end face having the longer distance from the desired position P2 among the both end faces in the X-axis direction of the cover glass 40 (example shown in FIG. 7A). Then, the negative direction of the X-axis). In the present embodiment, two convex portions 40A and 40B are provided on the cover glass 40. From the convex portion including the desired position P2 (in the example shown in FIG. 7A, the convex portion 40B), The squeegee 48 is run toward one convex part (in the example shown in FIG. 7B, convex part 40A).
 スキージ48の傾きは、スキージ48が当接しているカバーガラス40の当接面の傾きに垂直になるようにする。すなわち、スキージ48は、当接面の法線方向に傾けられており、スキージ48の移動に伴い当接面の角度が変わるのに応じて、スキージ48の傾斜角度も変化する。 The inclination of the squeegee 48 is perpendicular to the inclination of the contact surface of the cover glass 40 with which the squeegee 48 is in contact. That is, the squeegee 48 is inclined in the normal direction of the contact surface, and the inclination angle of the squeegee 48 also changes as the angle of the contact surface changes as the squeegee 48 moves.
 スキージ48が移動している間のガイドフィルムテンション機構44の動きは下記の通りである。まず、所望の位置P2に近い方のガイドフィルムテンション機構44は、ガイドフィルム44が、カバーガラス40の所望の位置P2に当接した際の傾き(図6(c)の矢印q2)を堅持する(図7(a)の矢印r2)。一方、もう一端のガイドフィルムテンション機構44は、スキージ48が走っているときに、ガイドフィルム43がもう一方の山に当たらないように任意に傾きを変える。図7(b)に示す例では、スキージ48が凸部40B上を移動している間、ガイドフィルム43が凸部40Aに接触しないように、ガイドフィルムテンション機構44は適宜、斜め上の方向(図7(a)に示す矢印r1)で角度を変える。その際、ガイドフィルム43のテンションは一定に維持されたままである。 The movement of the guide film tension mechanism 44 while the squeegee 48 is moving is as follows. First, the guide film tension mechanism 44 closer to the desired position P2 maintains the inclination (arrow q2 in FIG. 6C) when the guide film 44 abuts on the desired position P2 of the cover glass 40. (Arrow r2 in FIG. 7A). On the other hand, the guide film tension mechanism 44 at the other end arbitrarily changes the inclination so that the guide film 43 does not hit the other mountain when the squeegee 48 is running. In the example shown in FIG. 7B, the guide film tension mechanism 44 is appropriately tilted upward (so that the guide film 43 does not contact the convex portion 40A while the squeegee 48 moves on the convex portion 40B. The angle is changed by an arrow r1) shown in FIG. At that time, the tension of the guide film 43 is kept constant.
 次に、図7(b)に示すように、[5]スキージがカバーガラス40の一方の端部まで移動した後、もう一方側、すなわち所望の位置P2からカバーガラス40の他端までの貼り付けを行う。本実施形態では、前記一方の端部は、凸部40Aの、凸部40Bに連続しない方の端部を指し、前記他端は、凸部40Bの、凸部40Aに連続しない方の端部を指す。 Next, as shown in FIG. 7B, after the [5] squeegee has moved to one end of the cover glass 40, the other side, that is, the attachment from the desired position P2 to the other end of the cover glass 40 is performed. To do. In the present embodiment, the one end portion refers to an end portion of the convex portion 40A that is not continuous with the convex portion 40B, and the other end is an end portion of the convex portion 40B that is not continuous with the convex portion 40A. Point to.
 この貼り付け[5]では、スキージ48は用いず、先の実施形態で説明したように、ガイドフィルムテンション機構44の移動により、カバーガラス40にOCA41を貼り付けていく。具体的には、ガイドフィルム43のテンションの方向をカバーガラス40の曲率(接線の傾き)に合わせるように、ガイドフィルムテンション機構44を水平方向からカバーガラス40の湾曲方向に傾けつつ下方に移動させる。図7(a)に示す例においては、ガイドフィルムテンション機構44を、ガイドフィルム43のテンションの方向(図7(a)の矢印r2)が、カバーガラス40の湾曲方向に沿うような斜め下方向になるように、下方向に下げていく。これにより、カバーガラス46の所望の位置P2を起点として、カバーガラス46とOCA41との接触箇所が順次移動、拡大していき、カバーガラス46とOCA41とが全面的に接着される。 In this pasting [5], the OCA 41 is pasted on the cover glass 40 by the movement of the guide film tension mechanism 44, as described in the previous embodiment, without using the squeegee 48. Specifically, the guide film tension mechanism 44 is moved downward while being inclined from the horizontal direction to the bending direction of the cover glass 40 so that the tension direction of the guide film 43 is matched with the curvature (tangential inclination) of the cover glass 40. . In the example shown in FIG. 7A, the guide film tension mechanism 44 is tilted downward such that the tension direction of the guide film 43 (arrow r2 in FIG. 7A) is along the curve direction of the cover glass 40. Lower it so that As a result, the contact location between the cover glass 46 and the OCA 41 sequentially moves and expands starting from the desired position P2 of the cover glass 46, and the cover glass 46 and the OCA 41 are bonded to each other.
 次に、上述の貼り付けと同様にして、OCA41が貼り付けられたカバーガラス40にELデバイス等のフレキシブルなディスプレイを貼り付ける。具体的には、前記貼り付けにおいて、前記OCA41の代わりにフレキシブルディスプレイを用いる。これにより、カバーガラス40で表面が保護されたフレキシブルディスプレイが得られる。 Next, a flexible display such as an EL device is attached to the cover glass 40 to which the OCA 41 is attached in the same manner as the above attachment. Specifically, a flexible display is used instead of the OCA 41 in the pasting. Thereby, a flexible display whose surface is protected by the cover glass 40 is obtained.
 以上のように、本実施形態では、カバーガラス40が複数個の凸部を有していても、所望の設置点(所望の位置)や所望の設置面を基準として、真空下のみならず、大気下でも、気泡の噛み込みを抑制しながら、カバーガラス40にOCA41等を貼り付けることができる。 As described above, in this embodiment, even if the cover glass 40 has a plurality of convex portions, not only under vacuum, but based on a desired installation point (desired position) and a desired installation surface, Even in the atmosphere, the OCA 41 or the like can be attached to the cover glass 40 while suppressing the entrapment of bubbles.
 なお、凸部の個数は、例示した2個に限定されることはなく、3個以上とすることもできる。 Note that the number of convex portions is not limited to the two illustrated, and may be three or more.
 また、スキージ48の材料は特には限定されず、ゴムやプラスチック、金属等種々の材料を用いることができる。 Further, the material of the squeegee 48 is not particularly limited, and various materials such as rubber, plastic and metal can be used.
 また、スキージ48の傾き角度は、当接面に対してほぼ垂直(90°±5°程度)に限定されず、スキージ48の形状や、ガイドフィルム43上でのスキージ48の滑り具合等により、適宜設定することができる。 Further, the inclination angle of the squeegee 48 is not limited to being substantially perpendicular to the contact surface (about 90 ° ± 5 °), but depending on the shape of the squeegee 48, the degree of sliding of the squeegee 48 on the guide film 43, It can be set appropriately.
 また、前記貼り付け[5]は、前記[4-1]に記載のようにスキージ48を走らせることで行うことも可能である。 The pasting [5] can also be performed by running the squeegee 48 as described in [4-1].
 また、スキージ48を用いて貼り付けを行う際にも、カバーガラス40の湾曲方向に沿う方向のテンションをガイドフィルム43に付与することが好ましい。 In addition, it is preferable to apply a tension in a direction along the curve direction of the cover glass 40 to the guide film 43 when the squeegee 48 is used for pasting.
 また、前記各実施形態では、接着層41としてOCA(粘着性フィルム)を用いることを例示したが、これに限定されることはなく、例えば、インクジェット等により、塗液(接着剤塗液や粘着剤塗液)を塗布することで、粘着層41を設けてもよい。これは、フラットな状態でのフレキシブルディスプレイに接着層を形成する際等に、好適に用いることができる。 Moreover, in each said embodiment, although using OCA (adhesive film) as the contact bonding layer 41 was illustrated, it is not limited to this, For example, it is a coating liquid (adhesive coating liquid and adhesion) by an inkjet etc. The adhesive layer 41 may be provided by applying an agent coating liquid). This can be suitably used when an adhesive layer is formed on a flexible display in a flat state.
 前記各実施形態にかかるフレキシブルディスプレイは、柔軟性を有し、屈曲可能な発光素子を備えた表示パネルであれば、特に限定されるものではない。上記発光素子は、電流によって輝度や透過率が制御される発光素子と、電圧によって輝度や透過率が制御される発光素子とがある。電流制御の発光素子としては、OLED(Organic Light Emitting Diode:有機発光ダイオード)を備えた有機EL(Electro Luminescence:エレクトロルミネッセンス)ディスプレイ、又は無機発光ダイオードを備えた無機ELディスプレイ等のELディスプレイQLED(Quantum dot Light Emitting Diode:量子ドット発光ダイオード)を備えたQLEDディスプレイ等がある。また、電圧制御の発光素子としては、液晶表示素子等がある。 The flexible display according to each of the embodiments is not particularly limited as long as it is a display panel having a flexible and bendable light emitting element. The light emitting element includes a light emitting element whose luminance and transmittance are controlled by current and a light emitting element whose luminance and transmittance are controlled by voltage. As a current-controlled light emitting element, an organic EL (Electro Luminescence) display provided with an OLED (Organic Light Emitting Diode) or an EL display QLED such as an inorganic EL display provided with an inorganic light emitting diode (Quantum) There are QLED displays equipped with dot-light-emitting diodes. In addition, examples of the voltage-controlled light emitting element include a liquid crystal display element.
 (まとめ)
 本発明の態様1に係る貼り付け方法は、
 曲面を有する基材にフィルムを貼り付ける方法であって、前記フィルムはガイドフィルムに支持されており、前記ガイドフィルムは、前記曲面の湾曲方向に沿った方向にテンションが加えられている。
(Summary)
The pasting method according to aspect 1 of the present invention includes:
A method of attaching a film to a substrate having a curved surface, wherein the film is supported by a guide film, and tension is applied to the guide film in a direction along a curved direction of the curved surface.
 本発明の態様2に係る貼り付け方法は、前記ガイドフィルムは、前記湾曲方向に沿った方向に湾曲しており、前記フィルムは、前記ガイドフィルムの湾曲における内側面に配置されている。 In the affixing method according to aspect 2 of the present invention, the guide film is bent in a direction along the bending direction, and the film is disposed on an inner side surface in the bending of the guide film.
 本発明の態様3に係る貼り付け方法は、前記基材の前記曲面の外側面に、前記フィルムが貼り付けられる。 In the attaching method according to aspect 3 of the present invention, the film is attached to the outer surface of the curved surface of the base material.
 本発明の態様4に係る貼り付け方法は、第1ステージ、前記基材、前記フィルム、前記ガイドフィルム、第2ステージの順に配置され、前記第1ステージと前記第2ステージとで挟まれることで、前記基材に前記フィルムが貼り付けられる。 The sticking method which concerns on aspect 4 of this invention is arrange | positioned in order of a 1st stage, the said base material, the said film, the said guide film, and a 2nd stage, and is pinched | interposed by the said 1st stage and the said 2nd stage. The film is attached to the substrate.
 本発明の態様5に係る貼り付け方法は、前記第1ステージの前記基材に対向する面、及び、前記第2ステージの前記基材に対向する面は、各々が対向する前記基材の湾曲に沿って湾曲している。 In the pasting method according to the fifth aspect of the present invention, the surface of the first stage facing the base material and the surface of the second stage facing the base material are curved of the base material that face each other. Is curved along.
 本発明の態様6に係る貼り付け方法は、前記貼り付けが真空下で行われる。 In the pasting method according to the sixth aspect of the present invention, the pasting is performed under vacuum.
 本発明の態様7に係る貼り付け方法は、前記フィルムを前記曲面の一か所に接触させた後、順次接触箇所を拡大することで前記貼り付けを行う。 In the attaching method according to aspect 7 of the present invention, after the film is brought into contact with one part of the curved surface, the attaching is performed by sequentially enlarging the contact part.
 本発明の態様8に係る貼り付け方法は、前記一か所が、前記曲面の頂点近傍である。 In the attaching method according to the aspect 8 of the present invention, the one place is near the vertex of the curved surface.
 本発明の態様9係る貼り付け方法は、前記一か所が、前記曲面における、前記基材と前記フィルムとの位置決め位置である。 In the attaching method according to the ninth aspect of the present invention, the one place is a positioning position of the base material and the film on the curved surface.
 本発明の態様10に係る貼り付け方法は、前記接触させた後、前記テンションの方向を、前記湾曲方向に沿って変化させることで前記貼り付けを行う。 In the attaching method according to the tenth aspect of the present invention, after the contact, the attaching is performed by changing the direction of the tension along the bending direction.
 本発明の態様11に係る貼り付け方法は、前記接触させた後、前記ガイドフィルムに当接させた状態でスキージを前記曲面に沿って移動させることで、前記貼り付けを行う。 In the attaching method according to the eleventh aspect of the present invention, after the contact, the attaching is performed by moving a squeegee along the curved surface in a state of being in contact with the guide film.
 本発明の態様12に係る貼り付け方法は、前記接触させた後、前記一か所から前記基材の一方の端部までは、前記ガイドフィルムに当接させた状態でスキージを前記曲面に沿って移動させることで、前記貼り付けを行い、前記一か所から前記基材の他方の端部までは、前記テンションの方向を、前記湾曲方向に沿って変化させることで前記貼り付けを行う。 In the attaching method according to the twelfth aspect of the present invention, after the contact, the squeegee is moved along the curved surface in a state where the guide film is in contact with the guide film from the one place to one end of the base material. The sticking is carried out by moving the tape, and the sticking is carried out by changing the direction of the tension along the bending direction from the one place to the other end of the base material.
 本発明の態様13に係る貼り付け方法は、前記基材は曲面からなる複数個の凸部を有しており、前記スキージを前記移動させながら、1個の前記凸部に貼り付けを行っている間、前記フィルムが、貼り付けが行われていない他の前記凸部に接触しない方向に、前記ガイドフィルムにテンションを加える。 In the pasting method according to aspect 13 of the present invention, the base material has a plurality of convex portions formed of curved surfaces, and the single squeegee is pasted while the squeegee is moved. During this time, the guide film is tensioned in such a direction that the film does not come into contact with the other protrusions that are not attached.
 本発明の態様14に係る貼り付け方法は、前記移動の際、前記スキージを前記曲面にほぼ垂直に保つ。 The sticking method according to the fourteenth aspect of the present invention keeps the squeegee substantially perpendicular to the curved surface during the movement.
 本発明の態様15に係る貼り付け方法は、前記接触の際、前記テンションの方向が、前記接触する前記曲面の接線方向である。 In the attaching method according to the aspect 15 of the present invention, the direction of the tension is the tangential direction of the curved surface in contact with the contact.
 本発明の態様16に係る貼り付け方法は、前記貼り付けが大気下で行われる。 In the pasting method according to the sixteenth aspect of the present invention, the pasting is performed in the atmosphere.
 本発明の態様17に係る貼り付け方法は、前記基材が、表示体のカバーガラスである。 In the attaching method according to the aspect 17 of the present invention, the substrate is a cover glass of a display body.
 本発明の態様18に係る貼り付け方法は、前記フィルムが、粘着性フィルムである。 In the attaching method according to aspect 18 of the present invention, the film is an adhesive film.
 本発明の態様19に係る貼り付け方法は、前記フィルムが、フレキシブルディスプレイである。 In the attaching method according to the nineteenth aspect of the present invention, the film is a flexible display.
 本発明の態様20に係る貼り付け装置は、ステージ、ガイドフィルム、及び、ガイドフィルムテンション機構を備え、基材にフィルムを貼り付ける貼り付け装置であって、前記基材は曲面を有しており、前記フィルムは前記ガイドフィルムに配置されており、前記ガイドフィルムテンション機構は、前記曲面の湾曲方向に沿った方向に、前記ガイドフィルムにテンションを付与する。 An affixing device according to aspect 20 of the present invention includes a stage, a guide film, and a guide film tension mechanism, and is an affixing device that affixes a film to a base material, wherein the base material has a curved surface. The film is disposed on the guide film, and the guide film tension mechanism applies tension to the guide film in a direction along the curved direction of the curved surface.
 (付記事項)
 本発明は前記した実施形態に限定されるものではなく、異なる実施形態にそれぞれ開示された技術的手段を適宜組み合わせて得られる実施形態についても本発明の技術的範囲に含まれる。さらに、各実施形態にそれぞれ開示された技術的手段を組み合わせることにより、新しい技術的特徴を形成することができる。
(Additional notes)
The present invention is not limited to the above-described embodiments, and embodiments obtained by appropriately combining technical means disclosed in different embodiments are also included in the technical scope of the present invention. Furthermore, a new technical feature can be formed by combining the technical means disclosed in each embodiment.
2     ELデバイス
4     TFT層
3     無機バリア膜
5     発光素子層(表示体)
6     封止層
7     積層体
8、11  接着層
9     保護材
10    支持材
12    樹脂層
13    剥離層
15    半導体膜
16    ゲート絶縁膜
16、18、20 無機絶縁膜
21    平坦化膜
22    アノード電極
23b   バンク
23c   隔壁
24    EL層
25    カソード電極
26    第1無機封止膜
26、28 無機封止膜
27    有機封止膜
28    第2無機封止膜
39    機能フィルム
40    カバーガラス(基材)
40(1) 内側面(被貼り付け面)
40(2) 外側面(被貼り付け面)
40A   凸部
40B   凸部
41    接着層
      (OCA:Optical Clear Adhesive、貼り付け部材、粘着性フィルム)
43    ガイドフィルム
43(1) ガイド穴
44    ガイドフィルムテンション機構
44(1) テンションピン
46    ステージ
46(1) 上ステージ(第1ステージ)
46(2) 下ステージ(第2ステージ)
46A   凸部
46B   凸部
47(1)、(2)、(3)、(4)、(5) 貼り付け装置
48    スキージ
50    マザー基板
DA    アクティブ領域
NA    非アクティブ領域
P1    所望の位置(曲面の一か所)
P2    所望の位置(曲面の一か所)
2 EL device 4 TFT layer 3 Inorganic barrier film 5 Light emitting element layer (display body)
6 Sealing layer 7 Laminate 8, 11 Adhesive layer 9 Protective material 10 Support material 12 Resin layer 13 Release layer 15 Semiconductor film 16 Gate insulating films 16, 18, 20 Inorganic insulating film 21 Planarizing film 22 Anode electrode 23 b Bank 23 c Partition 24 EL layer 25 Cathode electrode 26 First inorganic sealing film 26, 28 Inorganic sealing film 27 Organic sealing film 28 Second inorganic sealing film 39 Functional film 40 Cover glass (base material)
40 (1) Inner surface (surface to be attached)
40 (2) External side (surface to be attached)
40A Convex 40B Convex 41 Adhesive layer (OCA: Optical Clear Adhesive, adhesive member, adhesive film)
43 Guide film 43 (1) Guide hole 44 Guide film tension mechanism 44 (1) Tension pin 46 Stage 46 (1) Upper stage (first stage)
46 (2) Lower stage (second stage)
46A Convex part 46B Convex part 47 (1), (2), (3), (4), (5) Pasting device 48 Squeegee 50 Mother substrate DA Active area NA Inactive area P1 Desired position (one of curved surfaces) Place)
P2 Desired position (one part of curved surface)

Claims (20)

  1.  曲面を有する基材にフィルムを貼り付ける方法であって、
     前記フィルムはガイドフィルムに支持されており、
     前記ガイドフィルムは、前記曲面の湾曲方向に沿った方向にテンションが加えられる貼り付け方法。
    A method of attaching a film to a substrate having a curved surface,
    The film is supported by a guide film,
    The guide film is a bonding method in which tension is applied in a direction along a curved direction of the curved surface.
  2.  前記ガイドフィルムは、前記湾曲方向に沿った方向に湾曲しており、
     前記フィルムは、前記ガイドフィルムの湾曲における内側面に配置されている請求項1に記載の貼り付け方法。
    The guide film is curved in a direction along the bending direction,
    The affixing method according to claim 1, wherein the film is disposed on an inner surface of the guide film in a curve.
  3.  前記基材の前記曲面の外側面に、前記フィルムが貼り付けられる請求項1又は2に記載の貼り付け方法。 The pasting method according to claim 1 or 2, wherein the film is pasted on the outer surface of the curved surface of the base material.
  4.  第1ステージ、前記基材、前記フィルム、前記ガイドフィルム、第2ステージの順に配置され、
     前記第1ステージと前記第2ステージとで挟まれることで、前記基材に前記フィルムが貼り付けられる請求項1から3の何れか1項に記載の貼り付け方法。
    Arranged in the order of the first stage, the substrate, the film, the guide film, the second stage,
    The pasting method according to any one of claims 1 to 3, wherein the film is stuck to the base material by being sandwiched between the first stage and the second stage.
  5.  前記第1ステージの前記基材に対向する面、及び、前記第2ステージの前記基材に対向する面は、各々が対向する前記基材の湾曲に沿って湾曲している請求項4に記載の貼り付け方法。 5. The surface of the first stage facing the base material and the surface of the second stage facing the base material are each curved along the curvature of the base material facing each other. How to paste.
  6.  前記貼り付けが真空下で行われる請求項1から5の何れか1項に記載の貼り付け方法。 The pasting method according to any one of claims 1 to 5, wherein the pasting is performed under vacuum.
  7.  前記フィルムを前記曲面の一か所に接触させた後、順次接触箇所を拡大することで前記貼り付けを行う請求項1から3の何れか1項に記載の貼り付け方法。 4. The attaching method according to any one of claims 1 to 3, wherein the attaching is performed by sequentially enlarging a contact portion after the film is brought into contact with one portion of the curved surface.
  8.  前記一か所が、前記曲面の頂点近傍である請求項7に記載の貼り付け方法。 The pasting method according to claim 7, wherein the one place is near a vertex of the curved surface.
  9.  前記一か所が、前記曲面における、前記基材と前記フィルムとの位置決め位置である請求項7に記載の貼り付け方法。 The pasting method according to claim 7, wherein the one place is a positioning position of the base material and the film on the curved surface.
  10.  前記接触させた後、前記テンションの方向を、前記湾曲方向に沿って変化させることで前記貼り付けを行う請求項7から9の何れか1項に記載の貼り付け方法。 The pasting method according to any one of claims 7 to 9, wherein the pasting is performed by changing a direction of the tension along the bending direction after the contact.
  11.  前記接触させた後、前記ガイドフィルムに当接させた状態でスキージを前記曲面に沿って移動させることで、前記貼り付けを行う請求項7から9の何れか1項に記載の貼り付け方法。 The pasting method according to any one of claims 7 to 9, wherein, after the contact, the pasting is performed by moving a squeegee along the curved surface in a state of being in contact with the guide film.
  12.  前記接触させた後、前記一か所から前記基材の一方の端部までは、前記ガイドフィルムに当接させた状態でスキージを前記曲面に沿って移動させることで、前記貼り付けを行い
     前記一か所から前記基材の他方の端部までは、前記テンションの方向を、前記湾曲方向に沿って変化させることで前記貼り付けを行う請求項7から9の何れか1項に記載の貼り付け方法。
    After the contact, from one place to one end of the base material, the squeegee is moved along the curved surface in a state of being in contact with the guide film, and the pasting is performed. The sticking according to any one of claims 7 to 9, wherein the sticking is performed by changing a direction of the tension along the bending direction from one place to the other end of the base material. Attaching method.
  13.  前記基材は曲面からなる複数個の凸部を有しており、
     前記スキージを前記移動させながら、1個の前記凸部に貼り付けを行っている間、前記フィルムが、貼り付けが行われていない他の前記凸部に接触しない方向に、前記ガイドフィルムにテンションを加える請求項11又は12に記載の貼り付け方法。
    The base material has a plurality of convex portions made of a curved surface,
    While the squeegee is moved, the film is tensioned to the guide film in such a direction that the film does not come into contact with the other protrusions that are not attached while applying to the one protrusion. The pasting method according to claim 11 or 12 which adds.
  14.  前記移動の際、前記スキージを前記曲面にほぼ垂直に保つ請求項11に記載の貼り付け方法。 The pasting method according to claim 11, wherein the squeegee is kept substantially perpendicular to the curved surface during the movement.
  15.  前記接触の際、前記テンションの方向が、前記接触する前記曲面の接線方向である請求項7に記載の貼り付け方法。 The sticking method according to claim 7, wherein, in the contact, the direction of the tension is a tangential direction of the curved surface in contact.
  16.  前記貼り付けが大気下で行われる請求項7から15の何れか1項に記載の貼り付け方法。 The pasting method according to any one of claims 7 to 15, wherein the pasting is performed in the atmosphere.
  17.  前記基材が、表示体のカバーガラスである請求項1から16の何れか1項に記載の貼り付け方法。 The pasting method according to any one of claims 1 to 16, wherein the base material is a cover glass of a display body.
  18.  前記フィルムが、粘着性フィルムである請求項1から17の何れか1項に記載の貼り付け方法。 The sticking method according to any one of claims 1 to 17, wherein the film is an adhesive film.
  19.  前記フィルムが、フレキシブルディスプレイである請求項1から17の何れか1項に記載の貼り付け方法。 The pasting method according to any one of claims 1 to 17, wherein the film is a flexible display.
  20.  ステージ、ガイドフィルム、及び、ガイドフィルムテンション機構を備え、基材にフィルムを貼り付ける貼り付け装置であって、
     前記基材は曲面を有しており、
     前記フィルムは前記ガイドフィルムに配置されており、
     前記ガイドフィルムテンション機構は、前記曲面の湾曲方向に沿った方向に、前記ガイドフィルムにテンションを付与する貼り付け装置。
    A pasting device comprising a stage, a guide film, and a guide film tension mechanism, for pasting a film on a substrate,
    The substrate has a curved surface;
    The film is disposed on the guide film;
    The guide film tension mechanism is a sticking device that applies tension to the guide film in a direction along a curved direction of the curved surface.
PCT/JP2017/013347 2017-03-30 2017-03-30 Sticking method and sticking device WO2018179261A1 (en)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111681539A (en) * 2020-06-24 2020-09-18 Oppo广东移动通信有限公司 Display module, manufacturing method thereof and electronic equipment
CN111792825A (en) * 2020-07-20 2020-10-20 河北光兴半导体技术有限公司 Tensioning device, hot bending mechanism and hot bending machine
CN111792822A (en) * 2020-07-20 2020-10-20 河北光兴半导体技术有限公司 Hot bending machine
CN111792826A (en) * 2020-07-20 2020-10-20 河北光兴半导体技术有限公司 Tensioning device, hot bending mechanism and hot bending machine
CN111807687A (en) * 2020-07-20 2020-10-23 河北光兴半导体技术有限公司 Glass hot bending mechanism
CN111908775A (en) * 2020-07-20 2020-11-10 河北光兴半导体技术有限公司 Tensioning device, hot bending mechanism and hot bending machine
CN114999325A (en) * 2022-06-17 2022-09-02 昆山国显光电有限公司 Bonding apparatus and bonding method
CN115959329A (en) * 2023-02-17 2023-04-14 歌尔股份有限公司 Film sticking mechanism
CN116280428A (en) * 2023-02-17 2023-06-23 歌尔股份有限公司 Film pasting mechanism

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002110349A (en) * 2000-10-04 2002-04-12 Sony Corp Manufacturing method of organic electroluminescent display
JP2008046565A (en) * 2006-08-21 2008-02-28 Fujifilm Corp Display apparatus
WO2008126250A1 (en) * 2007-03-30 2008-10-23 Pioneer Corporation Light emitting device
WO2008149768A1 (en) * 2007-06-05 2008-12-11 Konica Minolta Holdings, Inc. Organic electroluminescence light emitting element and method for manufacturing the same
WO2010125976A1 (en) * 2009-04-30 2010-11-04 三菱電機株式会社 Display device and method for manufacturing same
WO2012070495A1 (en) * 2010-11-22 2012-05-31 電気化学工業株式会社 Flat-plate bonding jig and method of manufacturing flat-plate stacked body
JP2012108310A (en) * 2010-11-17 2012-06-07 Toshiba Mobile Display Co Ltd Non-planar display and manufacturing method thereof
JP2014102490A (en) * 2012-10-22 2014-06-05 Panasonic Corp Panel bonding method and panel bonding apparatus

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002110349A (en) * 2000-10-04 2002-04-12 Sony Corp Manufacturing method of organic electroluminescent display
JP2008046565A (en) * 2006-08-21 2008-02-28 Fujifilm Corp Display apparatus
WO2008126250A1 (en) * 2007-03-30 2008-10-23 Pioneer Corporation Light emitting device
WO2008149768A1 (en) * 2007-06-05 2008-12-11 Konica Minolta Holdings, Inc. Organic electroluminescence light emitting element and method for manufacturing the same
WO2010125976A1 (en) * 2009-04-30 2010-11-04 三菱電機株式会社 Display device and method for manufacturing same
JP2012108310A (en) * 2010-11-17 2012-06-07 Toshiba Mobile Display Co Ltd Non-planar display and manufacturing method thereof
WO2012070495A1 (en) * 2010-11-22 2012-05-31 電気化学工業株式会社 Flat-plate bonding jig and method of manufacturing flat-plate stacked body
JP2014102490A (en) * 2012-10-22 2014-06-05 Panasonic Corp Panel bonding method and panel bonding apparatus

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111681539A (en) * 2020-06-24 2020-09-18 Oppo广东移动通信有限公司 Display module, manufacturing method thereof and electronic equipment
CN111681539B (en) * 2020-06-24 2022-03-29 Oppo广东移动通信有限公司 Display module, manufacturing method thereof and electronic equipment
CN111792826A (en) * 2020-07-20 2020-10-20 河北光兴半导体技术有限公司 Tensioning device, hot bending mechanism and hot bending machine
CN111792822A (en) * 2020-07-20 2020-10-20 河北光兴半导体技术有限公司 Hot bending machine
CN111807687A (en) * 2020-07-20 2020-10-23 河北光兴半导体技术有限公司 Glass hot bending mechanism
CN111908775A (en) * 2020-07-20 2020-11-10 河北光兴半导体技术有限公司 Tensioning device, hot bending mechanism and hot bending machine
CN111792825A (en) * 2020-07-20 2020-10-20 河北光兴半导体技术有限公司 Tensioning device, hot bending mechanism and hot bending machine
CN111792825B (en) * 2020-07-20 2022-06-21 河北光兴半导体技术有限公司 Tensioning device, hot bending mechanism and hot bending machine
CN111908775B (en) * 2020-07-20 2022-07-05 河北光兴半导体技术有限公司 Tensioning device, hot bending mechanism and hot bending machine
CN111792822B (en) * 2020-07-20 2022-08-30 河北光兴半导体技术有限公司 Hot bending machine
CN114999325A (en) * 2022-06-17 2022-09-02 昆山国显光电有限公司 Bonding apparatus and bonding method
CN114999325B (en) * 2022-06-17 2023-10-31 昆山国显光电有限公司 Bonding device and bonding method
CN115959329A (en) * 2023-02-17 2023-04-14 歌尔股份有限公司 Film sticking mechanism
CN116280428A (en) * 2023-02-17 2023-06-23 歌尔股份有限公司 Film pasting mechanism

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