WO2018158435A1 - Déflectomètre, motif de référence et procédé servant à définir la topographie d'un objet - Google Patents

Déflectomètre, motif de référence et procédé servant à définir la topographie d'un objet Download PDF

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Publication number
WO2018158435A1
WO2018158435A1 PCT/EP2018/055190 EP2018055190W WO2018158435A1 WO 2018158435 A1 WO2018158435 A1 WO 2018158435A1 EP 2018055190 W EP2018055190 W EP 2018055190W WO 2018158435 A1 WO2018158435 A1 WO 2018158435A1
Authority
WO
WIPO (PCT)
Prior art keywords
spirals
reference pattern
deflectometer
phase information
winding direction
Prior art date
Application number
PCT/EP2018/055190
Other languages
German (de)
English (en)
Inventor
Mathias Ziebarth
Thomas Stephan
Jan Burke
Original Assignee
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Karlsruher Institut für Technologie
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., Karlsruher Institut für Technologie filed Critical Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Publication of WO2018158435A1 publication Critical patent/WO2018158435A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
    • A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
    • A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
    • A61B3/107—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for determining the shape or measuring the curvature of the cornea

Definitions

  • a screen on which reference strips are mounted, has a hemispherical shape.
  • the stripe pattern reflected on the cornea appears to be regular, as shown in FIG. 15.
  • What conventional concepts can not afford is a complete determination of the surface normal since the tangential component can not be measured with the known fringe pattern shown in, for example, FIG.
  • distances between spiral arms of the first plurality of spirals and / or the second plurality of spirals remain radially constant.
  • the reference pattern thus described enables a simple construction of the reference pattern from two conventional spirals, for example arithmetic or archival spirals.
  • spacings between spiral arms of the first plurality of spirals and / or the second plurality of spirals increase radially.
  • the exemplary embodiment described makes it easy to generate reference patterns that provide predistortion, for example for spherical surfaces of a measurement object.
  • the spacings between the spiral arms increase in geometric progression, for example according to a geometric sequence.
  • the described embodiment describes a reference pattern with logarithmic spirals whose radius is subject to exponential growth, the exponent being given by the so-called slope k.
  • spiral arms of the first plurality of spirals and spiral arms of the second plurality of spirals intersect at an angle that is less than 180 ° and greater than 0 ° or less than 100 ° and greater than 80 °.
  • the embodiment described can be used to advantage to provide two possible independent deflection directions, i. Distortion directions to determine what a simple Top reactbetician is possible.
  • a first radius of the first plurality of spirals has a greater pitch than a second radius of the second plurality of spirals.
  • the described embodiment offers the possibility of adjustable topographical determination accuracy, with a larger lead resulting in a spiral more suitable for detecting tangential topography change whereas a lower pitch lead is more suitable for detecting radial topography changes.
  • the display is arranged relative to the object so that a reflection of the reference pattern is produced on a reflective surface of the object. The arrangement described enables a simple mapping of the reference pattern onto a surface of the object.
  • the defiectometer is designed to perform the topography determination of the object based on an integration of the plurality of gradient parameters.
  • the defectometer is designed to determine, based on the deflections of beam paths, surface normals of the reflective surface of the object.
  • the defectometer is designed to perform a topography determination of the object based on an integration of the surface normal.
  • Embodiments according to the invention provide a method for topography tuning of an object.
  • the method includes generating a reflection of a reference pattern on a surface of the object, the reference pattern having a first plurality of spirals and having a second plurality of spirals, wherein a winding direction of the first plurality of spirals is opposite to a winding direction of the second plurality of spirals , Furthermore, the method comprises detecting the reference pattern reflected by the object and providing topographical information based on the detected reflected reference pattern.
  • the described method may be extended to include any or all features and functionalities described herein in connection with a device. Exemplary embodiments describe a method and a device for determining topographic deviations on rotationally symmetrical reflecting surfaces. Such test areas may e.g. spherical and aspherical lenses and mirrors, but also e.g. the cornea of the human eye previously measured with a concentric static pattern as shown in Figs.
  • FIG. 3 shows a reference pattern with logarithmic spirals, according to embodiments of the invention.
  • FIG. 5 shows a reference pattern 500 with logarithmic spirals, according to exemplary embodiments of the invention, as can be reproduced for example on the display 110.
  • the reference pattern 500 has a first plurality of spirals with their spiral arm centers 510a-k drawn in, and a second plurality of spirals with their spiral arm centers 520a-i drawn.
  • the radii of the first plurality of spirals and the second plurality of spirals are subject to equation (2), with the parameters b and k differing between the first plurality of spirals and the second plurality of spirals.
  • phase information 800a, 800b, 900a, 900b, 1000a, 1000b, 1100a, and 1100b show phases as they would be detected if no distortion occurred on a surface, and thus may serve as reference phase information.

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Medical Informatics (AREA)
  • Animal Behavior & Ethology (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Biophysics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Ophthalmology & Optometry (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un déflectomètre servant à définir la topographie d'un objet, comprenant un affichage, qui est configuré pour reproduire un motif de référence. Le motif de référence comporte une première multitude de spirales et une deuxième multitude de spirales. Une direction d'enroulement de la première multitude de spirales est opposée à une direction d'enroulement de la deuxième multitude de spirales. En outre, le déflectomètre est configuré pour fournir, sur la base d'une réflexion du motif de référence sur l'objet, une information topographique concernant l'objet.
PCT/EP2018/055190 2017-03-02 2018-03-02 Déflectomètre, motif de référence et procédé servant à définir la topographie d'un objet WO2018158435A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102017203390.8A DE102017203390B4 (de) 2017-03-02 2017-03-02 Deflektometer und Verfahren zur Topografiebestimmung eines Objekts
DE102017203390.8 2017-03-02

Publications (1)

Publication Number Publication Date
WO2018158435A1 true WO2018158435A1 (fr) 2018-09-07

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PCT/EP2018/055190 WO2018158435A1 (fr) 2017-03-02 2018-03-02 Déflectomètre, motif de référence et procédé servant à définir la topographie d'un objet

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Country Link
DE (1) DE102017203390B4 (fr)
WO (1) WO2018158435A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113029042A (zh) * 2021-05-25 2021-06-25 四川大学 一种高温熔融态金属表面形貌动态测量装置及方法
CN113383207A (zh) * 2018-10-04 2021-09-10 杜·普雷兹·伊萨克 光学表面编码器

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US5428414A (en) * 1992-11-30 1995-06-27 Nikon Corporation Apparatus for measuring the refractive power of an optical system
EP2221609A2 (fr) * 2009-02-19 2010-08-25 Carl Zeiss OIM GmbH Procédé et dispositif d'inspection optique d'une surface sur un objet
WO2013091016A1 (fr) * 2011-12-23 2013-06-27 Canon Kabushiki Kaisha Système lumineux structuré pour une acquisition géométrique robuste

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DE10345586B4 (de) 2003-09-29 2007-03-15 BIAS - Bremer Institut für angewandte Strahltechnik GmbH Verfahren und Vorrichtung zum Bestimmen der Struktur einer Oberfläche

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Publication number Priority date Publication date Assignee Title
US5428414A (en) * 1992-11-30 1995-06-27 Nikon Corporation Apparatus for measuring the refractive power of an optical system
EP2221609A2 (fr) * 2009-02-19 2010-08-25 Carl Zeiss OIM GmbH Procédé et dispositif d'inspection optique d'une surface sur un objet
WO2013091016A1 (fr) * 2011-12-23 2013-06-27 Canon Kabushiki Kaisha Système lumineux structuré pour une acquisition géométrique robuste

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FALAGGIS, K.; TOWERS, D. P.; TOWERS, C. E.: "Algebraic solution for phase unwrapping problems in multiwavelength interferometry", APPL. OPT., vol. 53, 2014, pages 3737 - 3747, XP001590214, DOI: doi:10.1364/AO.53.003737
HIBINO, K.; HANAYAMA, R.; BURKE, J.; OREB, B. F.: "Tunable phase-extraction formulae for simultaneous shape measurement of multiple surfaces with wavelengthshifting interferometry", OPTICS EXPRESS, vol. 12, 2004, pages 5579 - 5594
KREY, S.; VAN AMSTEL; W. D.; SZWEDOWICZ, K.; CAMPOS, J.; MORENO, A.; LOUS, E. J.: "A fast optical scanning deflectometer for measuring the topography of large silicon wafers", PROC. SPIE, CURRENT DEVELOPMENTS IN LENS DESIGN AND OPTICAL ENGINEERING V, vol. 5523, 2004, pages 110 - 120
LIANG, H.; OLESCH, E.; YANG, Z.; HÄUSLER, G.: "Single-shot phase-measuring deflectometry for cornea measurement", ADVANCED OPTICAL TECHNOLOGIES, vol. 5, 2016, pages 1 - 6
LIU, Y.; OLESCH, E.; YANG, Z.; HÄUSLER, G.: "Fast and accurate deflectometry with crossed fringes", ADVANCED OPTICAL TECHNOLOGIES, vol. 3, 2014, pages 441 - 445
YUANKUN LIU ET AL: "Fast and accurate Deflectometry with Crossed Fringes", ADVANCED OPTICAL TECHNOLOGIES, vol. 3, no. 4, 1 January 2014 (2014-01-01), DE, XP055478653, ISSN: 2192-8576, DOI: 10.1515/aot-2014-0032 *
ZHAO, W.; SU, X.; LIU, Y.; ZHANG, Q.: "Testing an aspheric mirror based on phase measuring deflectometry", OPTICAL ENGINEERING, vol. 48, 2009, pages 103603

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113383207A (zh) * 2018-10-04 2021-09-10 杜·普雷兹·伊萨克 光学表面编码器
US20220051423A1 (en) * 2018-10-04 2022-02-17 Isak Du Preez Optical Surface Encoder
US11995851B2 (en) * 2018-10-04 2024-05-28 Isak Du Preez Optical surface encoder
CN113029042A (zh) * 2021-05-25 2021-06-25 四川大学 一种高温熔融态金属表面形貌动态测量装置及方法
CN113029042B (zh) * 2021-05-25 2021-08-03 四川大学 一种高温熔融态金属表面形貌动态测量装置及方法

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DE102017203390A1 (de) 2018-09-06

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