WO2018129862A1 - 一种晶体生长炉加热器以及蓝宝石晶体生长炉 - Google Patents

一种晶体生长炉加热器以及蓝宝石晶体生长炉 Download PDF

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Publication number
WO2018129862A1
WO2018129862A1 PCT/CN2017/088929 CN2017088929W WO2018129862A1 WO 2018129862 A1 WO2018129862 A1 WO 2018129862A1 CN 2017088929 W CN2017088929 W CN 2017088929W WO 2018129862 A1 WO2018129862 A1 WO 2018129862A1
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Prior art keywords
furnace body
furnace
water
crystal growth
cooling
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PCT/CN2017/088929
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English (en)
French (fr)
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蔺崇召
姚刚
孙占喜
李吾臣
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许昌天戈硅业科技有限公司
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Publication of WO2018129862A1 publication Critical patent/WO2018129862A1/zh

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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/16—Oxides
    • C30B29/20—Aluminium oxides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/206—Controlling or regulating the thermal history of growing the ingot

Definitions

  • the invention relates to the technical field of sapphire preparation equipment, in particular to a crystal growth furnace heater and a sapphire crystal growth furnace.
  • Sapphire, AL 2 0 3 single crystal has the characteristics of high melting point, high hardness, good thermal conductivity, wide transmission wavelength, good electrical insulation, strong acid and alkali corrosion resistance. Therefore, it is widely used as an important technical crystal material.
  • a series of high-tech technologies such as defense, military, scientific research, etc., as well as a large number of applications in the civil industry, such as light-emitting diodes, microelectronic circuits, optical sensing, optical waveguide devices and LED energy-saving fields. .
  • the object of the present invention is to provide a crystal growth furnace heater and a sapphire crystal growth furnace in order to solve the above problems.
  • the heater in the crystal growth furnace can be flexibly adjusted, and the water can be cooled by the heat exchanger. Reuse of heat for insulation inside the furnace.
  • a crystal growth furnace heater comprising an annular base cylinder, a heating ring and a motor for driving the base cylinder to move up and down
  • the heating ring is arranged on the annular base cylinder
  • the furnace cover is symmetrically provided with two motors, and the motor and the controller are connected by wires
  • the output shaft of the motor A pulling wire is wound around, and the lower end of the pulling wire passes through the furnace body and is fixedly connected to the upper end of the annular base cylinder.
  • a temperature sensor is disposed on the cable, and the temperature sensor is connected to the controller through a wire.
  • a sapphire crystal growth furnace comprising the above-described growth furnace heater.
  • the growth furnace comprises a furnace body, a crucible, a cooler and a heat exchanger, and the inner wall and the bottom wall of the furnace body are provided with a heat insulation layer, and the upper side wall of the furnace body
  • An air inlet hole for charging an inert protective gas into the furnace body is disposed, and a lower portion of the side wall of the furnace body is provided with a vent hole for vacuuming, and the raft is disposed inside the furnace body, and the top center position of the furnace body is set a through hole through which the pull rod passes, the lower end of the pull rod passes through the through hole and is placed Above the crucible, and the lower end of the pull rod is provided with a seed crystal;
  • the bottom of the crucible is provided with a cooling assembly, and the cooling assembly comprises a water-cooling disc closely attached to the bottom of the crucible and a strut for supporting the water-cooling disc.
  • the inner disc of the water-cooling disc is provided with a water-cooling tube, and the bottom of the furnace body corresponds to the strut.
  • a pipe port is arranged at the lower end, the strut is a hollow rod body, and the water inlet end and the water outlet end of the water cooling pipe pass through the inside of the strut and are placed outside the furnace body;
  • the water outlet pipe is connected with a drain pipe and a drain pipe
  • the tail end is divided into two branch pipes, one of which is connected to the inlet of the circulating water flow passage of the heat exchanger, the other one is connected to the water inlet of the cooler, and the two branch pipes are provided with flow control valves, flow control The valve is connected to the controller through a wire, and the outlet of the circulating water passage of the heat exchanger and the outlet of the cooler are collected by the pipeline and connected to the inlet end of the water-cooled pipe through the inlet pipe, and the inlet of the protective airflow passage of the heat exchanger is connected to a gas supply system, the protective gas flow outlet of the heat exchanger is connected to the air inlet hole on the furnace body;
  • the heating system comprises an annular base cylinder, a heating ring and a motor for driving the base cylinder to move up and down, the annular base cylinder cover is disposed outside the crucible, the heating ring is disposed on the inner wall of the annular base cylinder, and the heating ring passes through the electric wire and the furnace
  • the heating element power supply outside the body is connected to the controller, and two furnaces are symmetrically arranged on the furnace cover of the furnace body, and the motor and the controller are connected by wires, and a pulling wire is arranged on the output shaft of the motor, and the lower end of the pulling wire is worn.
  • the furnace body is connected to the upper end of the annular base cylinder.
  • the side wall of the furnace body is also provided with an observation window.
  • the heat insulating layer is made of zirconia.
  • the crystal growth furnace heater and the sapphire crystal growth furnace of the invention have the advantages of low energy consumption, and the heater in the crystal growth furnace can be flexibly adjusted, and does not need to completely wrap the heating element of the crucible, but by the constant movement of the heater, It can ensure that the desired growth temperature of the crucible is achieved, and the crystal growth furnace of the present invention is further provided with a heat exchanger for heat exchange between the shielding gas and the cooling circulating water, and is charged by the heat of the cooling circulating water.
  • the protective gas in the furnace heats up, and the protective gas with a certain temperature enters the furnace body, which can further improve the heat preservation effect in the furnace, and realize the reuse of the heat of the ⁇ cooling cycle water;
  • the sapphire crystal growth furnace of the invention also has an intelligently adjustable circulating water cooler, a cooling regulating pipe is provided at the water inlet end of the cooler, a temperature sensor is arranged at the water outlet end, and a shunt regulating valve is adjusted according to the feedback of the temperature sensor to control
  • the water that needs to be cooled is taken away from the DC tube or the spiral tube, so that the water flowing out of the water outlet is required to be at a temperature, which is beneficial to maintaining the stability and cooling effect of the cooling system of the sapphire crystal growth furnace.
  • FIG. 1 is a schematic structural view of a crystal growth furnace heater of the present invention
  • FIG. 2 is a schematic view showing the internal structure of a sapphire crystal growth furnace of the present invention.
  • FIG. 3 is a schematic view of the connection of the cooling pipe to the splitter and the combiner in the cooler of the present invention
  • Figure 4 is a schematic view showing the structure of a flow divider in the cooler of the present invention.
  • Figure 5 is a schematic structural view of a combiner in a cooler of the present invention.
  • Figure 6 is a schematic view showing the external structure of the cooler of the present invention.
  • furnace body 2, ⁇ , 3, cooler, 4, heat exchanger, 5, insulation layer, 6, air inlet, 7, vent, 8, pull rod, 9, Seed crystal, 10, water-cooled plate, 11, pole, 12, water-cooled tube, 13, drain, 14, flow control valve, 15, inlet pipe, 16, ring base, 17, heating ring, 18, motor, 19 , lifting line, 20, box, 21, shunt, 22, confluence, 23, DC tube, 24, spiral tube.
  • a crystal growth furnace heater includes an annular base cylinder 16, a heating ring 17, and a motor 18 for driving the base cylinder to move up and down.
  • the annular base cylinder 16 is disposed outside the crucible 2, and the heating ring 17
  • the motor is disposed on the inner wall of the annular base tube 16, and the heating ring 17 is connected to the heating element power supply and the controller outside the furnace body 1 through a wire.
  • the furnace cover 1 is symmetrically disposed with two motors 18, and the motor 18 is
  • the controller is connected by wires, and a pulling wire 19 is wound around the output shaft of the motor 18.
  • the lower end of the pulling wire 19 passes through the furnace body 1 and is fixedly connected to the upper end of the annular base pipe 16.
  • a temperature sensor is disposed on the pulling wire 19, and the temperature sensor is connected to the controller through a wire.
  • Figure 2 shows a sapphire crystal growth furnace comprising a furnace body 1, a heater 2, a heater, a cooler 3, a heat exchanger 4 and a controller, the heater is used for heating inside the furnace body 1, and the cooler 3 is used for The circulating water is cooled, and the heat exchanger 4 has a circulating water flow path and a protective air flow path for heat exchange, and the side wall of the furnace body 1 is also provided with an observation window.
  • the inner wall and the bottom wall of the furnace body 1 are provided with a heat insulating layer 5, and the heat insulating layer 5 is made of zirconia.
  • An air intake hole 6 for charging an inert protective gas into the furnace body 1 is disposed at an upper portion of the side wall of the furnace body 1.
  • the lower portion of the side wall of the furnace body 1 is provided with an exhaust hole 7 for evacuating, and the crucible 2 is disposed at Inside the furnace body 1, the top center of the furnace body 1 is provided with a through hole through which the pull rod 8 passes, the lower end of the pull rod 8 passes through the through hole and is placed above the crucible 2, and the lower end of the crystal rod 8 is pulled.
  • the tip is provided with a seed crystal 9.
  • the bottom of the crucible 2 is provided with a cooling assembly, and the cooling assembly comprises a water-cooling tray 10 closely attached to the bottom of the crucible 2 and a strut 11 for supporting the water-cooling tray 10.
  • the inner tray of the water-cooling tray 10 is provided with a water-cooling tube 12, and a furnace
  • the bottom of the body 1 is provided with a pipe mouth corresponding to the lower end of the strut 11, the strut 11 is a hollow rod body, and the water inlet end and the water outlet end of the water cooling pipe 12 pass through the inside of the strut 11 and are placed outside the furnace body 1;
  • the water outlet end of the water-cooling pipe 12 is connected with a drain pipe 13, and the tail end of the drain pipe 13 is divided into two branch pipes, one of which is connected to the inlet of the circulating water channel of the heat exchanger 4, and the other branch pipe is connected to the cooler.
  • the water inlet of the 3, and the flow control valve 14 is disposed on the two branch pipes, and the flow control valve 14 is connected to the controller through the wire, and the circulating water flow outlet of the heat exchanger 4 and the water outlet of the cooler 3 are collected through the pipeline.
  • the inlet pipe 15 is connected to the inlet end of the water-cooling pipe 12, the inlet of the protective gas flow path of the heat exchanger 4 is connected to the gas supply system, and the protective gas flow of the heat exchanger 4 is discharged.
  • the port is connected to the intake hole 6 in the furnace body 1.
  • the cooler includes a tank 20, a flow divider 21, a combiner 22, and three sets of cooling pipes arranged in parallel, a splitter 21 and a confluence.
  • the separators 22 are respectively disposed at opposite ends of the casing 20, and the flow divider 21 includes a water inlet port and a three-component flow port provided on the rear surface, each component flow port includes two water outlets, and each of the flow dividers 21
  • Each of the component flow ports is provided with a flow regulating valve, and the flow regulating valve is connected with the controller through a line control.
  • the combiner 22 includes three sets of inlet ports provided on the front surface and one water outlet provided on the rear surface, and each group includes two outlet ports.
  • the water outlet is provided with a temperature sensor at the water outlet of the combiner 22, and the temperature sensor is connected to the controller through a line control.
  • the cooling pipe includes a direct current pipe 23 and a spiral pipe 24, and the direct current pipe 23 is disposed at the spiral center of the spiral pipe 24.
  • the front end of the cooling duct is connected to the flow divider 21 through a split regulating valve, and the end is connected to the air inlet of the combiner 22.
  • the temperature sensor in the cooler is used to detect the temperature of the water discharged from the water outlet of the combiner.
  • the indicator light is green when the sensed temperature is lower than the set value, indicating that the cooling effect meets the requirements, and the sensed When the temperature value is higher than the set value, the cooling water does not reach the required temperature.
  • the diverter regulating valve needs to be adjusted to make the cooling water more fully cooled.
  • the controller on the console has two modes: manual working mode and automatic working mode.
  • the split regulating valve is intelligently adjusted according to the feedback of the temperature sensor.
  • the manual working mode can manually adjust the working condition of the split regulating valve according to the indicator light on the operating table.
  • the automatic working mode is used for normal conditions, and the manual working mode is used for manual operation mode.
  • the cooling system has an unstable cooling effect, and an unexpected situation such as internal failure or adjustment during maintenance. Feedback adjustment by sensors, automatic working mode and manual working mode can be set to cope with various situations encountered in use, which can greatly reduce the cooling water reserve of the cooling system, and greatly help the cooling system cooling work.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

一种晶体生长炉加热器以及蓝宝石晶体生长炉，生长炉加热器包括环形基筒(16)、加热环(17)以及电机(18)，加热环(17)设置在环形基筒(16)的内壁上，且加热环(17)通过导线与炉体(1)外部的加热元件电源和控制器连接，炉体(1)的炉盖上对称设置有两个电机(18)，电机(18)与控制器通过导线连接，电机(18)的输出轴上绕设有提拉线(19)，提拉线(19)的下端穿过炉体并与环形基筒(16)的上端固定连接。蓝宝石晶体生长炉为较为环保的低能耗生长炉，生长炉内的加热器可灵活调节，并且长晶炉还配有换热器(4)，换热器(4)用于保护气和冷却循环水之间的热量交换，利用冷却循环水的热量使充入炉体内的保护气升温，带有热量的保护气进入炉体内，能进一步提高炉内的保温效果，实现了坩埚冷却循环水热量的重新利用。

Description

一种晶体生长炉加热器以及蓝宝石晶体生长炉 技术领域
本发明涉及蓝宝石制备设备技术领域，具体涉及一种晶体生长炉加热器以及蓝宝石晶体生长炉。
背景技术
蓝宝石即AL203单晶体，具有熔点高、硬度高、导热性好、透过光波段宽、电绝缘性好、耐强酸强碱腐蚀等特点，因此作为重要的技术晶体材料，被广泛应用在国防、军事、科研等一系列高科技技术领域，同时在民用工业上也有大量的应用，如发光二极管、微电子电路、光学传感性、光波导器件及LED节能领域。。
随着技术进步，人工生产蓝宝石晶体的方法越来越多，但无论哪一种好方法，只有达到蓝宝石晶体的长晶温度，蓝宝石晶体才能生长，然而现有的很多长晶炉加热元件结构较为简单，若要使炉内达到2000多度的高温，保证蓝宝石晶体生长的温度，就得不停的大功率加热，对电的消耗巨大，能源浪费严重。
发明内容
本发明的目的是为解决上述技术问题的不足，提供一种晶体生长炉加热器以及蓝宝石晶体生长炉，晶体生长炉内的加热器可灵活调节，并且通过换热器可将坩埚冷却循环水的热量重新利用，用于炉体内部的保温。
本发明为解决上述技术问题的不足，所采用的技术方案是：一种晶体生长炉加热器，包括环形基筒、加热环以及用于驱动基筒上下移动的电机，加热环设置在环形基筒的内壁上，且加热环通过导线与炉体外部的加热元件电源和控制器连接，所述炉体的炉盖上对称设置有两个电机，电机与控制器通过导线连接，电机的输出轴上绕设有提拉线，提拉线的下端穿过炉体并与环形基筒的上端固定连接。
作为本发明一种晶体生长炉加热器的进一步改进：所述提拉线上设置有温度传感器，温度传感器通过导线与控制器连接。
一种蓝宝石晶体生长炉，包括上述的生长炉加热器。
作为上述一种蓝宝石晶体生长炉的进一步优化：生长炉包括炉体、坩埚、冷却器和换热器，所述炉体的内壁和底壁上均设置有隔热层，炉体的侧壁上部设置有用于向炉体内部充入惰性保护气的进气孔，炉体的侧壁下部设置有用于抽真空的排气孔，所述坩埚设置在炉体内部，炉体的顶部中心位置设置可供拉晶杆穿过的通孔，拉晶杆的下端穿过该通孔并置于 坩埚上方，且拉晶杆的下端端头设置有籽晶；
所述坩埚的底部设置有冷却组件，冷却组件包括与坩埚底部紧密贴合的水冷盘以及用于支撑水冷盘的支杆，水冷盘的内部盘设有水冷管，炉体的底部对应支杆的下端处设置有管道口，所述支杆为中空杆体，水冷管的进水端和出水端均穿过支杆内部并置于炉体外；所述水冷管的出水端连接有排水管，排水管的尾端分为两根支管，其中一根支管连接至换热器的循环水流道进口，另外一根支管连接至冷却器的进水口，且两根支管上均设置有流量控制阀，流量控制阀通过导线与控制器连接，换热器的循环水流道出口和冷却器的出水口通过管道汇集后经进水管连接至水冷管的进水端，所述换热器的保护气流道进口连接至供气系统，换热器的保护气流道出口连接至炉体上的进气孔；
所述加热系统包括环形基筒、加热环以及用于驱动基筒上下移动的电机，环形基筒罩设在坩埚的外部，加热环设置在环形基筒的内壁上，且加热环通过导线与炉体外部的加热元件电源和控制器连接，所述炉体的炉盖上对称设置有两个电机，电机与控制器通过导线连接，电机的输出轴上绕设有提拉线，提拉线的下端穿过炉体并与环形基筒的上端固定连接。
作为上述蓝宝石晶体生长炉的进一步优化：所述炉体的侧壁还开设有观察窗。
作为上述蓝宝石晶体生长炉的进一步优化：所述隔热层的材质为氧化锆。
有益效果
一、本发明的晶体生长炉加热器以及蓝宝石晶体生长炉具有低能耗的优点，晶体生长炉内的加热器可灵活调节，不需要完全包裹坩埚的加热元件，但是通过加热器的不断移动，就能够保证坩埚达到所需的长晶温度，另外本发明的晶体生长炉还配有换热器，换热器用于保护气和冷却循环水之间的热量交换，利用冷却循环水的热量使充入炉体内的保护气升温，带有一定温度的保护气进入炉体内，能进一步提高炉内的保温效果，实现了坩埚冷却循环水热量的重新利用；
二、本发明的蓝宝石晶体生长炉还具有可智能调节的循环水冷却器，冷却器的冷却管道进水端设置分流调节阀，出水端设置温度传感器，根据温度传感器的反馈调节分流调节阀，控制需要冷却的水走直流管或者螺旋管，使出水口流出的水再要求温度下，有利于维持蓝宝石晶体生长炉的冷却系统的稳定性和冷却效果。
附图说明
图1为本发明晶体生长炉加热器的结构示意图；
图2为本发明蓝宝石晶体生长炉的内部结构示意图；
图3是本发明冷却器中冷却管道与分流器和汇流器的连接意图；
图4是本发明冷却器中分流器的结构示意图；
图5是本发明冷却器中汇流器的结构示意图；
图6是本发明冷却器的外部结构示意图。
图中标记：1、炉体，2、坩埚，3、冷却器，4、换热器，5、隔热层，6、进气孔，7、排气孔，8、拉晶杆，9、籽晶,10、水冷盘，11、支杆，12、水冷管，13、排水管，14、流量控制阀，15、进水管，16、环形基筒，17、加热环，18、电机，19、提拉线，20、箱体，21、分流器，22、汇流器，23、直流管，24、螺旋管。
具体实施方式
下面结合附图和实施例对本发明作进一步描述：
如图1所示：一种晶体生长炉加热器，包括环形基筒16、加热环17以及用于驱动基筒上下移动的电机18，环形基筒16罩设在坩埚2的外部，加热环17设置在环形基筒16的内壁上，且加热环17通过导线与炉体1外部的加热元件电源和控制器连接，所述炉体1的炉盖上对称设置有两个电机18，电机18与控制器通过导线连接，电机18的输出轴上绕设有提拉线19，提拉线19的下端穿过炉体1并与环形基筒16的上端固定连接。提拉线19上设置有温度传感器，温度传感器通过导线与控制器连接。
图2所示：一种蓝宝石晶体生长炉，包括炉体1、坩埚2、加热器、冷却器3、换热器4和控制器，加热器用于炉体1内部的加热，冷却器3用于冷却循环水，换热器4具有可进行热交换的循环水流道和保护气流道，所述炉体1的侧壁还开设有观察窗。所述炉体1的内壁和底壁上均设置有隔热层5，隔热层5的材质为氧化锆。炉体1的侧壁上部设置有用于向炉体1内部充入惰性保护气的进气孔6，炉体1的侧壁下部设置有用于抽真空的排气孔7，所述坩埚2设置在炉体1内部，炉体1的顶部中心位置设置可供拉晶杆8穿过的通孔，拉晶杆8的下端穿过该通孔并置于坩埚2上方，且拉晶杆8的下端端头设置有籽晶9。所述坩埚2的底部设置有冷却组件，冷却组件包括与坩埚2底部紧密贴合的水冷盘10以及用于支撑水冷盘10的支杆11，水冷盘10的内部盘设有水冷管12，炉体1的底部对应支杆11的下端处设置有管道口，所述支杆11为中空杆体，水冷管12的进水端和出水端均穿过支杆11内部并置于炉体1外；所述水冷管12的出水端连接有排水管13，排水管13的尾端分为两根支管，其中一根支管连接至换热器4的循环水流道进口，另外一根支管连接至冷却器3的进水口，且两根支管上均设置有流量控制阀14，流量控制阀14通过导线与控制器连接，换热器4的循环水流道出口和冷却器3的出水口通过管道汇集后经进水管15连接至水冷管12的进水端，所述换热器4的保护气流道进口连接至供气系统，换热器4的保护气流道出 口连接至炉体1上的进气孔6。
如图3-6所示：为本发明中冷却器的具体结构，所述所述冷却器包括箱体20、分流器21、汇流器22和三组平行设置的冷却管道，分流器21和汇流器22分别设置在箱体20相对的两端，分流器21包括前表面设置的一个进水口和后表面设置的三组分流口，每组分流口包括两个通水口，分流器21的每一组分流口都设置一个分流调节阀，且分流调节阀与控制器通过线路控制连接，汇流器22包括前表面设置的三组汇流口和后表面设置的一个出水口，每组汇流口包括两个通水口，汇流器22的出水口处设置有温度传感器，且温度传感器与控制器通过线路控制连接，所述冷却管道包括直流管23和螺旋管24，直流管23设置在螺旋管24的螺旋中心，冷却管道的前端通过分流调节阀与分流器21连接，末端与汇流器22的汇流口连接。
冷却器中的温度传感器用于检测汇流器的出水口排出水的温度，通过设定对比值，当感应到的温度低于设定值时指示灯为绿色，说明冷却效果符合要求，感应到的温度值高于设定值时说明冷却水未达到需求的温度，需要调节分流调节阀，使冷却水得到更充分的冷却，操作台上的控制器设有手动工作模式和自动工作模式两种，自动工作模式下分流调节阀根据温度传感器的反馈进行智能调节，手动工作模式可根据操作台上的指示灯情况人工调节分流调节阀的工作情况，自动工作模式用于正常情况，手动工作模式用于冷却系统冷却效果不稳定，内部出现故障或维修时的调节等突发状况。通过传感器进行反馈调节，设置自动工作模式和手动工作模式，可应对使用中遇见的多种状况，可以大大减少冷却系统的冷却水的储备量，对冷却系统的冷却工作有很大的帮助。
以上说明对本发明而言只是说明性的，而非限制性的，本领域普通技术人员理解，在不脱离权利要求所限定的精神和范围的情况下，可作出许多修改、变化或等效，但都将落入本发明的保护范围之内。

Claims (6)

  1. 一种晶体生长炉加热器，其特征在于：所述加热系统包括环形基筒(16)、加热环(17)以及用于驱动基筒上下移动的电机(18)，加热环(17)设置在环形基筒(16)的内壁上，且加热环(17)通过导线与炉体(1)外部的加热元件电源和控制器连接，所述炉体(1)的炉盖上对称设置有两个电机(18)，电机(18)与控制器通过导线连接，电机(18)的输出轴上绕设有提拉线(19)，提拉线(19)的下端穿过炉体(1)并与环形基筒(16)的上端固定连接。
  2. 如权利要求1所述一种晶体生长炉加热器，其特征在于：所述提拉线(19)上设置有温度传感器，温度传感器通过导线与控制器连接。
  3. 一种蓝宝石晶体生长炉，其特征在于：包括权利要求1或权利要求2所述的晶体生长炉加热器。
  4. 如权利要求3所述的蓝宝石晶体生长炉，其特征在于：晶体生长炉还包括炉体(1)、坩埚(2)、冷却器(3)和换热器(4)；
    所述炉体(1)的内壁和底壁上均设置有隔热层(5)，炉体(1)的侧壁上部设置有用于向炉体(1)内部充入惰性保护气的进气孔(6)，炉体(1)的侧壁下部设置有用于抽真空的排气孔(7)，所述坩埚(2)设置在炉体(1)内部，炉体(1)的顶部中心位置设置可供拉晶杆(8)穿过的通孔，拉晶杆(8)的下端穿过该通孔并置于坩埚(2)上方，且拉晶杆(8)的下端端头设置有籽晶(9)；
    所述坩埚(2)的底部设置有冷却组件，冷却组件包括与坩埚(2)底部紧密贴合的水冷盘(10)以及用于支撑水冷盘(10)的支杆(11)，水冷盘(10)的内部盘设有水冷管(12)，炉体(1)的底部对应支杆(11)的下端处设置有管道口，所述支杆(11)为中空杆体，水冷管(12)的进水端和出水端均穿过支杆(11)内部并置于炉体(1)外；所述水冷管(12)的出水端连接有排水管(13)，排水管(13)的尾端分为两根支管，其中一根支管连接至换热器(4)的循环水流道进口，另外一根支管连接至冷却器(3)的进水口，且两根支管上均设置有流量控制阀(14)，流量控制阀(14)通过导线与控制器连接，换热器(4)的循环水流道出口和冷却器(3)的出水口通过管道汇集后经进水管(15)连接至水冷管(12)的进水端，所述换热器(4)的保护气流道进口连接至供气系统，换热器(4)的保护气流道出口连接至炉体(1)上的进气孔(6)；
    所述冷却器包括箱体(20)、分流器(21)、汇流器(22)和三组平行设置的冷却管道，分流器(21)和汇流器(22)分别设置在箱体(20)相对的两端，分流器(21)包括前表面设置的一个进水口和后表面设置的三组分流口，每组分流口包括两个通水口，分流器(21)的每 一组分流口都设置一个分流调节阀，且分流调节阀与控制器通过线路控制连接，汇流器(22)包括前表面设置的三组汇流口和后表面设置的一个出水口，每组汇流口包括两个通水口，汇流器(22)的出水口处设置有温度传感器，且温度传感器与控制器通过线路控制连接，所述冷却管道包括直流管(23)和螺旋管(24)，直流管(23)设置在螺旋管(24)的螺旋中心，冷却管道的前端通过分流调节阀与分流器(21)连接，末端与汇流器(22)的汇流口连接。
  5. 如权利要求4所述的一种蓝宝石晶体生长炉，其特征在于：所述炉体(1)的侧壁还开设有观察窗。
  6. 如权利要求4所述的一种蓝宝石晶体生长炉，其特征在于：所述隔热层(5)的材质为氧化锆。
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