WO2018110260A1 - Radiation detection device - Google Patents

Radiation detection device Download PDF

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Publication number
WO2018110260A1
WO2018110260A1 PCT/JP2017/042409 JP2017042409W WO2018110260A1 WO 2018110260 A1 WO2018110260 A1 WO 2018110260A1 JP 2017042409 W JP2017042409 W JP 2017042409W WO 2018110260 A1 WO2018110260 A1 WO 2018110260A1
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WO
WIPO (PCT)
Prior art keywords
radiation
optical element
mirror
sample
ray
Prior art date
Application number
PCT/JP2017/042409
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French (fr)
Japanese (ja)
Inventor
好隆 夏目
友晴 長谷
Original Assignee
株式会社堀場製作所
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Application filed by 株式会社堀場製作所 filed Critical 株式会社堀場製作所
Priority to JP2018556535A priority Critical patent/JP6944952B2/en
Publication of WO2018110260A1 publication Critical patent/WO2018110260A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence

Definitions

  • the present invention relates to a radiation detection apparatus.
  • a radiation detector is used to analyze a sample.
  • the radiation detection apparatus irradiates a sample with radiation such as X-rays or electron beams, and the characteristic X-rays generated at that time are detected by a detector. From the spectral distribution of characteristic X-rays detected by the radiation detection device, it is possible to identify the element contained in the sample and calculate the concentration of this element.
  • a radiation detection apparatus there is an X-ray analysis apparatus provided with an imaging unit in order to confirm an X-ray irradiation position on a sample (see, for example, Patent Document 1).
  • a mirror is arranged above the sample with the reflecting surface facing the sample side, and the imaging unit acquires an image obtained by imaging the sample from above by the reflected light from the mirror. . Therefore, in the apparatus disclosed in Patent Document 1, the irradiation position of X-rays irradiated from above the sample can be confirmed by an optical image obtained by imaging the sample from above.
  • an X-ray guide member and a mirror for guiding X-rays to the sample are arranged at the same position above the sample. ing. Further, in order to arrange the X-ray guide member and the mirror at the same position, an insertion portion (for example, a notch portion) for inserting the X-ray guide member into the mirror is provided. Therefore, since the field of view by the mirror is limited at the place where the insertion portion is provided, the sample may not be sufficiently observed by the optical image acquired by the imaging unit. In this case, the X-ray irradiation position on the sample can be confirmed with high accuracy. There is a possibility that it cannot be done.
  • the present invention has been made in view of such circumstances, and an object thereof is to provide a radiation detection apparatus capable of accurately confirming a sample via a mirror.
  • a radiation detection apparatus includes a radiation optical element that narrows down radiation applied to a sample, a detection unit that detects radiation generated by irradiation of the sample with radiation, and a mirror disposed to face the sample And a holding unit that holds the radiation optical element and the mirror, the holding unit is moved in two intersecting directions within a plane that intersects the irradiation direction of the radiation applied to the sample.
  • the holding unit further includes a plurality of the radiation optical elements having different radiation emission diameters, and the mirror and the radiation optical element having the smallest emission diameter are arranged in one of the two directions. It is characterized by being held side by side in the direction.
  • the holding unit holds the radiation optical element having a small emission diameter at a position where the distance along the two directions from the mirror is short. .
  • a radiation detection apparatus includes a radiation optical element that narrows down radiation applied to a sample, a detection unit that detects radiation generated by irradiation of the sample with radiation, and a mirror disposed to face the sample And a holding unit that holds the radiation optical element and the mirror, the holding unit is moved in two intersecting directions within a plane that intersects the irradiation direction of the radiation applied to the sample.
  • a driving unit; and the holding unit holds a plurality of the radiation optical elements having different irradiation diameters of the radiation on the surface of the sample, the mirror and the radiation optical element having the smallest irradiation diameter. It is characterized by being held side by side in one of the two directions.
  • the radiation optical element is a cylinder, and has a shape in which an inner diameter of a central portion in an axial length direction is larger than inner diameters of both end portions, The radiation optical element having the smallest inner diameter at one end that emits radiation is arranged and held in one of the two directions together with the mirror.
  • the holding unit may be configured so that the radiation optical element having the minimum distance from the emission end that emits the radiation to the sample is in one of the two directions together with the mirror. It is characterized by being held side by side.
  • the holding unit holds the radiation optical element having a small irradiation diameter at a position where the distance from the mirror along the two directions is short. To do.
  • the radiation detection apparatus is characterized in that a plurality of the radiation optical elements are arranged side by side in each of the two directions.
  • the radiation optical element is a cylindrical body, and the holding unit holds the radiation optical element having a short axial length in a position close to the detection unit. It is characterized by being.
  • the radiation detection apparatus is characterized in that the mirror is disposed so as to guide an optical image of the sample to an observation unit disposed at a predetermined position.
  • the radiation optical element is a cylindrical body arranged with the radiation direction of the radiation as an axial length direction, and the holding portion is formed in a plate shape,
  • the holding portion has a plurality of long holes drilled in the thickness direction, and the long holes are provided side by side in the other direction, with one of the two directions as the long axis direction,
  • the holding part holds the radiation optical element inserted through the long hole, and the holding part has a mirror holding part extending in the axial length direction of the radiation optical element, and the mirror
  • the mirror is attached to the extended end portion of the holding portion in a state where the reflecting surface is parallel to the other direction and inclined with respect to the axial length direction of the radiation optical element.
  • the radiation optical element having a diameter or the radiation optical element having the smallest irradiation diameter is Characterized in that the serial mirror is disposed at a position closer to the one direction.
  • a plurality of radiation optical elements that emit radiation irradiated to a sample with different exit diameters are held by a holding unit together with a mirror that is disposed to face the sample.
  • the holding unit is movable in two intersecting directions within a plane intersecting the radiation irradiation direction. Since the mirror and the radiation optical element can be moved by the movement of the holding portion, it is not necessary to arrange the mirror and the radiation optical element at the same position, and it is not necessary to provide a notch in the mirror as in the prior art. Therefore, since the field of view by the mirror is not limited, the sample can be visually recognized through the mirror. Further, the alignment of the sample with respect to the mirror can be performed while confirming the sample through the mirror.
  • the holding portion can move in two directions, the radiation optical element can be easily and accurately aligned with the sample.
  • the mirror and the radiation optical element having the smallest emission diameter are held in the holding unit side by side in one of the two directions. Therefore, when aligning the radiation optical element having the smallest emission diameter with respect to the sample aligned with the mirror, the holding unit only needs to be moved in one direction, so that the alignment can be performed with higher accuracy. Is possible.
  • the radiation optical element having the smallest emission diameter is most susceptible to dimensional errors and assembly errors in the holding unit and the driving unit.
  • the configuration in which the radiation optical element with the smallest emission diameter can be aligned by moving the holding portion in one direction can reduce the influence of the dimensional error and the assembly error that the radiation optical element with the smallest emission diameter receives in one direction. It is possible to reduce only the error caused by movement.
  • a radiation optical element having a small emission diameter is disposed at a position where the distance from the mirror along the two directions is short.
  • the radiation optical element has a smaller emission diameter, the influence of dimensional errors and assembly errors in the holding unit and the driving unit cannot be ignored. Further, the influence of the dimensional error and the assembly error becomes larger as the moving distance at the time of alignment becomes longer. Therefore, by arranging the radiation optical element having a small emission diameter at a position where the distance to be moved at the time of alignment to a predetermined position is short, the movement distance at the time of alignment can be shortened, so that the alignment is performed with high accuracy. It becomes possible.
  • a plurality of radiation optical elements having different irradiation diameters on the sample surface of the radiation applied to the sample are held by the holding unit together with the mirror disposed opposite to the sample. Since the mirror and the radiation optical element can be moved by the movement of the holding portion, it is not necessary to arrange the mirror and the radiation optical element at the same position, and it is not necessary to provide a notch in the mirror as in the prior art. Therefore, since the field of view by the mirror is not limited, the sample can be visually recognized through the mirror. Further, the alignment of the sample with respect to the mirror can be performed while confirming the sample through the mirror. Furthermore, since the holding portion can move in two directions, the radiation optical element can be easily and accurately aligned with the sample.
  • the mirror and the radiation optical element having the smallest irradiation diameter on the sample surface are arranged in one of the two directions and are held by the holding unit. Therefore, when aligning the radiation optical element with the smallest irradiation diameter on the sample surface with respect to the sample aligned with the mirror, it is only necessary to move the holding part in one direction, so it is more accurate. It is possible to perform alignment well.
  • the radiation optical element with the smallest irradiation diameter is most susceptible to dimensional errors and assembly errors in the holding unit and the driving unit. Therefore, the configuration that can be aligned by moving the holding part in one direction reduces the effects of dimensional errors and assembly errors on the radiation optical element with the smallest irradiation diameter only to errors caused by movement in one direction. Is possible.
  • the radiation optical element is a cylindrical body having a shape in which the inner diameter of the central portion in the axial length direction is larger than the inner diameters of both end portions.
  • a radiation optical element having the smallest inner diameter at one end for emitting radiation is held side by side in one of the two directions together with the mirror. Therefore, when aligning the radiation optical element having the smallest inner diameter at the one end with respect to the sample aligned with the mirror, the holding unit only needs to be moved in one direction. It is possible to combine.
  • the radiation optical element having the minimum distance from the emission end that emits radiation to the sample is arranged and held in one of the two directions together with the mirror. Therefore, with respect to the sample aligned with the mirror, when aligning the radiation optical element having the minimum distance from the emission end to the sample, it is only necessary to move the holding unit in one direction. It is possible to perform alignment with high accuracy.
  • a radiation optical element having a small irradiation diameter on the sample surface is disposed at a position where the distance along the two directions from the mirror is short.
  • the radiation optical element As the irradiation diameter is smaller, the influence of dimensional errors and assembly errors in the holding unit and the driving unit cannot be ignored. Further, the influence of the dimensional error and the assembly error becomes larger as the moving distance at the time of alignment becomes longer. Therefore, by arranging the radiation optical element having a small irradiation diameter at a position where the distance to be moved at the time of alignment to a predetermined position is short, the movement distance at the time of alignment can be shortened, so that the alignment is performed with high accuracy. It becomes possible.
  • a plurality of radiation optical elements are arranged along two directions in which the holding unit can move. Therefore, it is possible to accurately and easily perform alignment for moving the holding unit and arranging the radiation optical element at a predetermined position.
  • the radiation optical element is a cylinder, and the radiation optical element having a short length in the axial direction is disposed at a position close to the detection unit. Therefore, even when the holding unit is moved, the radiation optical element can be arranged so as not to contact the detection unit.
  • the mirror guides the optical image of the sample to the observation unit arranged at a predetermined position. Therefore, since the sample can be observed from the position of the mirror, the sample can be observed with high accuracy.
  • a plurality of long holes are formed in the thickness direction in the plate-like holding portion, and the cylindrical radiation optical element is inserted into the long hole and held by the holding portion. Therefore, the radiation optical element can be attached to the holding portion by inserting the radiation optical element through the long hole of the holding portion.
  • the holding part has a mirror holding part extending in the axial length direction of the radiation optical element, and a mirror is attached to an extended end of the mirror holding part. The mirror is mounted in a state where the reflecting surface is parallel to the parallel arrangement direction of the long holes and tilted with respect to the axial length direction of the radiation optical element, and the optical image of the sample is appropriately applied to the observation part at a predetermined position It is possible to lead to.
  • the radiation optical element having the smallest emission diameter or the radiation optical element having the smallest irradiation diameter is arranged at a position close to the mirror, the radiation optical element having the smallest emission diameter or irradiation diameter is arranged at a predetermined position. Positioning can be performed easily and accurately.
  • the sample can be confirmed with high accuracy through a mirror.
  • the radiation optical element can be accurately aligned with the sample.
  • FIG. 2 is a schematic diagram illustrating a configuration of an optical element unit according to Embodiment 1.
  • FIG. 2 is a schematic diagram illustrating a configuration of an optical element unit according to Embodiment 1.
  • FIG. 2 is a schematic diagram illustrating a configuration of an optical element unit according to Embodiment 1.
  • FIG. It is a schematic diagram which shows the X-ray analyzer in operation. It is a schematic diagram which shows the X-ray analyzer in operation. It is a schematic diagram which shows the X-ray analyzer in operation. It is a schematic diagram which shows the X-ray analyzer in operation. It is a top view of an optical element unit when the X-ray analyzer is operating. 6 is a top view of an optical element unit according to Embodiment 2.
  • FIG. 2 is a schematic diagram illustrating a configuration of an optical element unit according to Embodiment 1.
  • FIG. 2 is a schematic diagram illustrating a configuration of an optical element unit according to Embodiment 1.
  • FIG. It
  • FIG. 6 is a perspective view of an optical element unit according to Embodiment 3.
  • FIG. It is sectional drawing of the X-ray optical element which concerns on Embodiment 3.
  • FIG. 5 is a schematic diagram of a part of the X-ray analyzer according to the third embodiment.
  • FIG. 1 is a block diagram showing a schematic configuration of an X-ray analyzer.
  • the X-ray analyzer is disposed between a sample box 2 in which a sample 20 to be analyzed is stored, an X-ray tube 3 that generates X-rays to be irradiated on the sample 20, and the X-ray tube 3 and the sample box 2.
  • a vacuum box 1 is provided.
  • the X-ray tube 3 is attached to the upper surface of the vacuum box 1 via the communication part 30.
  • the vacuum box 1 is attached to the upper surface of the sample box 2 through a communication portion provided with an X-ray transmission window 22 that allows X-rays to pass through satisfactorily.
  • the vacuum box 1 and the sample box 2 are made of metal such as copper or aluminum.
  • the X-ray transmission window 22 is made of a material that easily transmits X-rays and transmits light.
  • a sample stage 21 is installed at a predetermined position in the sample box 2, and the sample 20 is placed on the sample stage 21.
  • an optical element unit 10 as will be described later is arranged at a predetermined position.
  • X-rays generated by the X-ray tube 3 enter the vacuum box 1 through the communication portion 30, pass through the optical element unit 10 in the vacuum box 1, and further pass through the X-ray transmission window 22.
  • the light enters the sample box 2 and is irradiated onto the sample 20 on the sample stage 21.
  • the sample stage 21 is driven by the sample stage drive unit 66 in two directions orthogonal to each other within the plane orthogonal to the X-ray irradiation direction (vertical direction in FIG. 1) and the irradiation direction (for example, horizontal direction and depth in FIG. 1). Direction).
  • the sample stage drive unit 66 may be provided inside the sample box 2 or may be provided outside the sample box 2.
  • An X-ray detector 4 for detecting characteristic X-rays (fluorescent X-rays) generated from the sample 20 when the sample 20 is irradiated with X-rays as described above is attached to the vacuum box 1.
  • the X-ray detector 4 is attached to the vacuum box 1 with the fluorescent X-ray detection surface facing the X-ray transmission window 22.
  • an observation unit 5 such as a CCD (Charge Coupled Device) camera or an optical microscope is attached to the vacuum box 1.
  • the optical element unit 10 in the vacuum box 1 has a mirror 12, and the observation unit 5 is arranged to face the mirror 12.
  • the observation unit 5 is provided to acquire an optical image of the sample 20 in the sample box 2 reflected by the mirror 12.
  • a light source (not shown) is provided at an appropriate location inside the vacuum box 1 or the sample box 2 to illuminate the sample 20.
  • the light source is, for example, an LED (light emitting diode), and can be provided, for example, on the inner surface (lower surface) of the upper wall of the sample box 2 or may be provided inside the vacuum box 1.
  • the observation part 5 can also be arrange
  • FIGS. 2A and 2B are schematic views showing the configuration of the optical element unit 10 according to Embodiment 1.
  • FIG. FIG. 2A is a perspective view of the optical element unit 10
  • FIG. 2B is a top view of the optical element unit 10.
  • the optical element unit 10 irradiates the sample 20 with X-rays generated by the X-ray tube 3 with a reduced beam diameter.
  • the optical element unit 10 is configured by mounting a plurality of X-ray optical elements 11a to 11d (hereinafter sometimes collectively referred to as X-ray optical elements 11) on an optical element switching stage 10a. In the configuration shown in FIGS. 2A and 2B, four X-ray optical elements 11 are mounted, but the configuration is not limited to this.
  • the X-ray optical element 11 converges the X-rays generated in the X-ray tube 3 and incident into the vacuum box 1.
  • the X-ray optical element 11 is an X-ray conduit (capillary) formed of glass, for example, in a cylindrical shape (tubular shape).
  • the X-ray optical element 11 guides an X-ray incident from one end while reflecting the X-ray on the inner surface, and emits it from the other end. .
  • Each of the X-ray optical elements 11a to 11d has, for example, the same outer diameter and different inner diameters. With this configuration, the diameter of the X-rays emitted from the X-ray optical elements 11a to 11d on the sample surface ( Spot diameters can be made different.
  • the inner diameter (X-ray emission diameter) of the X-ray optical element 11 can be selected as appropriate.
  • the inner diameters of the X-ray optical elements 11a to 11d are 10 ⁇ m, 100 ⁇ m, 500 ⁇ m, 1 .2 mm.
  • the X-ray optical element 11 shown in FIGS. 2A and 2B is formed of a so-called monocapillary, but a polycapillary formed by bundling a plurality of ultrafine X-ray conduits can also be used.
  • the optical element switching stage (holding part) 10a is formed in a rectangular plate shape, and an insertion hole 10b for inserting the X-ray optical element 11 is formed in the thickness direction.
  • two insertion holes 10b which are long holes having an elliptical cross section, are provided with the left-right direction (X direction in FIG. 2B) of the upper surface of the optical element switching stage 10a as the major axis direction.
  • the two insertion holes 10b are arranged side by side in a direction (Y direction in FIG. 2B) orthogonal to the left-right direction.
  • the insertion hole 10b is not limited to a configuration having an elliptical cross section, and may have a configuration having an oval cross section or a rectangular cross section.
  • the X-ray optical element 11 is inserted into the insertion hole 10b, and a hook (not shown) provided on one end side of the X-ray optical element 11 is provided on the optical element switching stage 10a (insertion hole 10b). It is attached to the optical element switching stage 10a by being locked to (not shown). With such a configuration, the optical element switching stage 10a holds the X-ray optical element 11 inserted through the insertion hole 10b.
  • the optical element switching stage 10a holds the X-ray optical element 11 inserted through the insertion hole 10b.
  • two X-ray optical elements 11 are inserted through each insertion hole 10b, but the number of X-ray optical elements 11 inserted through each insertion hole 10b is two. Not limited to. In the example shown in FIG.
  • the X-ray optical element 11a having the smallest inner diameter is inserted into the lower insertion hole 10b at the left position close to the mirror 12, and the inner diameter is the second position at the right position.
  • a small X-ray optical element 11b is inserted.
  • the X-ray optical element 11c having the third smallest inner diameter is inserted into the upper insertion hole 10b at a position on the left side near the mirror 12, and the X-ray optical element 11d with the largest inner diameter is inserted into the right position.
  • a mirror 12 is attached to the optical element switching stage 10a.
  • a mirror holder 12a is extended in the axial length direction of the X-ray optical element 11, and the mirror 12 is attached to the extended end of the mirror holder 12a.
  • the mirror holder 12a has an insertion hole at a position aligned with the insertion hole 10b to which the X-ray optical element 11a is attached along the left end side of the lower surface of the optical element switching stage 10a.
  • 10b extends from a region slightly longer than the width in the Y-axis direction.
  • the mirror 12 is, for example, a circular plate-like plane mirror, and has the same diameter as the length of the mirror holder 12a in the Y direction. That is, the mirror 12 has a slightly longer diameter than the width of the insertion hole 10b in the Y-axis direction (width in the short axis direction).
  • the reflection surface of the mirror 12 is parallel to the left end side (Y direction) of the lower surface of the optical element switching stage 10 a and is inclined by 45 degrees ⁇ several degrees with respect to the axial length direction of the X-ray optical element 11. It is attached in the state. As long as the mirror 12 can be held in such a state, the mirror holder 12a may have any shape.
  • the reflecting surface of the mirror 12 is preferably polished so that light can be efficiently reflected.
  • the optical element unit 10 having such a configuration has the optical element switching stage 10a on the upper side, the protruding end of the X-ray optical element 11 on the lower side, and the reflection surface of the mirror 12 facing the observation unit 5, Housed in a vacuum box 1.
  • the mirror 12 is disposed at a position close to the X-ray transmission window 22.
  • the observation unit 5 and the X-ray detector 4 are shown to face each other with the optical element unit 10 interposed therebetween. .
  • FIG. 1 shows that in practice, as shown in FIG.
  • each X-ray optical element 11 has an X-ray optical element 11 having a short axial length disposed at a position close to the X-ray detector 4.
  • the X-ray optical element 11 when the X-ray optical element 11 is formed longer as the inner diameter is smaller, the X-ray optical element 11 having a larger inner diameter and a shorter inner diameter is disposed at a position close to the X-ray detector 4. Thereby, even if it is a case where the optical element unit 10 is moved to the X-ray detector 4 side, it can avoid that each X-ray optical element 11 contacts the X-ray detector 4.
  • the mirror 12 reflects the optical image of the sample 20 by the light source to the observation unit 5 arranged to face the mirror 12.
  • the mirror 12 has a reflection surface of 45 degrees ⁇ several degrees with the optical axis of the observation unit 5, and the extending direction of the mirror holder 12 a (the axial length direction of the X-ray optical element 11). It is arranged in a state of 45 degrees ⁇ several degrees.
  • the configuration is not limited to this configuration as long as the observation unit 5 can acquire the optical image of the sample 20.
  • the optical element switching stage 10a (optical element unit 10) is switched by the switching stage driving unit 65 in two directions orthogonal to each other in a plane orthogonal to the X-ray irradiation direction (vertical direction in FIG. 1). It is comprised so that it can move to the X direction and Y direction in FIG. 2B.
  • the switching stage drive unit 65 is configured using, for example, a stepping motor. With the configuration described above, in the optical element unit 10 of Embodiment 1, one of the two directions in which the optical element switching stage 10a can be moved by the switching stage driving unit 65 (specifically, the X direction in FIG. 2B). , The X-ray optical element 11a having the smallest inner diameter and the mirror 12 are arranged side by side. That is, the X-ray optical element 11a having the smallest inner diameter and the mirror 12 are coaxial in the X direction.
  • the optical element switching stage 10a By moving the optical element switching stage 10a by the switching stage driving unit 65, the position of each X-ray optical element 11 and the mirror 12 is switched, and the X-ray is transmitted via the X-ray optical element 11 arranged at a predetermined position. X-rays generated in the tube 3 are delivered to the sample 20.
  • X-rays generated in the tube 3 are delivered to the sample 20.
  • the distance from the X-ray transmission window 22 to the surface of the sample 20 is the same due to the different inner diameters (outgoing diameters) of the X-ray optical elements 11a to 11d, X-rays having a beam diameter corresponding to the inner diameter are applied to the sample. 20 can be irradiated.
  • X-rays emitted from the X-ray optical element 11 arranged at a predetermined position pass through the X-ray transmission window 22 and are irradiated on the upper surface of the sample 20, and X-ray irradiation generates fluorescent X-rays from the sample 20. .
  • X-ray fluorescence generated from the sample 20 reaches the X-ray detector 4 through the X-ray transmission window 22 and is detected by the X-ray detector 4.
  • the X-ray detector 4 is a device that detects fluorescent X-rays generated by irradiating the sample 20 with X-rays, and outputs a signal proportional to the energy of the detected fluorescent X-rays.
  • the X-ray detector 4 is connected to a signal processing unit 62 that processes a signal output from the X-ray detector 4.
  • the signal processing unit 62 counts each value signal output from the X-ray detector 4 and performs a process of generating the relationship between the fluorescent X-ray energy and the count number, that is, the fluorescent X-ray spectrum.
  • An analysis unit 63 is connected to the signal processing unit 62.
  • the signal processing unit 62 outputs data indicating the generated spectrum to the analysis unit 63.
  • the analysis unit 63 includes a calculation unit that performs calculation and a memory that stores data.
  • the analysis unit 63 performs qualitative analysis or quantitative analysis of the elements contained in the sample 20 based on the spectrum indicated by the data input from the signal processing unit 62.
  • the observation unit 5 can acquire an optical image obtained by viewing the sample 20 from above by acquiring a reflected light image of the sample 20 by the mirror 12.
  • a display unit 64 such as a liquid crystal display is connected to the observation unit 5.
  • the display unit 64 displays the image of the sample 20 acquired by the observation unit 5.
  • the user can observe the sample 20 by visually recognizing the image of the sample 20 displayed on the display unit 64.
  • the observation part 5 is an optical microscope
  • a user can also observe the sample 20 except for the eyepiece of an optical microscope.
  • the X-ray tube 3, the signal processing unit 62, the analysis unit 63, the display unit 64, the switching stage driving unit 65 and the sample stage driving unit 66 are connected to the control unit 61.
  • the control unit 61 is composed of a computer including a calculation unit and a memory.
  • the control unit 61 controls operations of the X-ray tube 3, the signal processing unit 62, the analysis unit 63, the display unit 64, the switching stage driving unit 65 and the sample stage driving unit 66.
  • the control unit 61 may be configured to receive an instruction from the user and control the operation of each unit of the X-ray analyzer according to the received instruction.
  • the display unit 64 may display the spectrum generated by the signal processing unit 62 or the analysis result by the analysis unit 63.
  • the control part 61 and the analysis part 63 may be comprised with the same computer.
  • FIGS. 3A to 4B are schematic views showing the X-ray analyzer in operation.
  • 3A and 3B show an X-ray analyzer when the observation portion 20a on the upper surface of the sample 20 is observed by the observation unit 5 via the mirror 12.
  • FIG. FIG. 3A is a schematic diagram of the X-ray analyzer
  • FIG. 3B is a top view of the optical element unit 10 and the sample 20.
  • FIG. 4A and 4B show an X-ray analyzer in the case where an X-ray optical element 11a is used to irradiate the observation spot 20a on the upper surface of the sample 20 with X-rays.
  • FIG. 4A is a schematic diagram of the X-ray analyzer
  • FIG. 4B is a top view of the optical element unit 10 and the sample 20.
  • the user After the user places the sample 20 on the sample stage 21 in the sample box 2, the user switches the optical element switching stage 10a (optical element unit) by the switching stage driving unit 65 so that the mirror 12 is placed at a predetermined reference position. 10) is moved.
  • the predetermined reference position is a position above the X-ray irradiation position generated by the X-ray tube 3 and applied to the sample 20 via the X-ray optical element 11. This is the position where the optical image of the sample 20 to be observed is in focus.
  • the user After placing the mirror 12 at the reference position, the user starts to acquire an image by the observation unit 5. The user aligns the observation location 20 a with respect to the mirror 12 while viewing the image acquired by the observation unit 5.
  • the user moves the sample stage 21 by the sample stage driving unit 66 so that the observation location 20a of the sample 20 is arranged at a predetermined position of the visual field by the mirror 12 (for example, the center of the visual field).
  • the optical image of the sample 20 that reaches the observation unit 5 by the mirror 12 is indicated by a dashed arrow.
  • standard position can be performed, seeing the image acquired by the observation part 5.
  • the user moves the optical element unit 10 by the switching stage drive unit 65, thereby placing the X-ray optical element 11 desired to be used above the observation point 20a.
  • the switching stage driving unit 65 moves the optical element unit 10 in the state shown in FIG. 3B to the left side in the X direction to obtain the state shown in FIG. 4B.
  • the switching stage driving unit 65 may move the optical element unit 10 to the left in the X direction until the X-ray optical element 11b is disposed above the observation location 20a.
  • the switching stage driving unit 65 moves the optical element unit 10 until the X-ray optical element 11a is arranged above the observation location 20a.
  • the distance to be moved specifically, the number of movements (number of pulses) performed by the stepping motor constituting the switching stage driving unit 65 is known in advance. Therefore, the movement of the optical element unit 10 in the X direction by the switching stage driving unit 65 can be automatically performed.
  • the user After disposing the X-ray optical element 11a used for X-ray analysis above the observation location 20a, the user starts X-ray analysis for the observation location 20a. Specifically, X-rays are generated by the X-ray tube 3, the generated X-rays are irradiated onto the sample 20 via the X-ray optical element 11a, and the X-ray detector 4 converts the fluorescent X-rays generated from the sample 20 into the X-ray detector 4. To detect. In FIG. 4A, X-rays irradiated from the X-ray tube 3 to the sample 20 and fluorescent X-rays reaching the X-ray detector 4 from the sample 20 are indicated by arrows.
  • the X-ray analyzer includes an exhaust unit (not shown) that evacuates the vacuum box 1.
  • the exhaust unit may be configured so that the inside of the sample box 2 can be evacuated together with the vacuum box 1.
  • the mirror 12 and the X-ray optical element 11 are movable, and therefore it is not necessary to arrange the mirror 12 and the X-ray optical element 11 on the same axis above the sample 20. Therefore, in Embodiment 1, since it is not necessary to provide a notch in the mirror 12 as in the prior art, the field of view through the mirror 12 is not limited, and the sample 20 can be accurately confirmed through the mirror 12. Further, since the optical element unit 10 can move along two directions of the X direction and the Y direction, the position of the X-ray optical element 11 with respect to the sample 20 and the position of the X-ray optical element 11 with respect to the X-ray tube 3 can be adjusted. It is easy and can be performed with high accuracy. Since the X-ray optical element 11 can be arranged at an optimal position with respect to the sample 20 and the X-ray tube 3, the accuracy in X-ray analysis is also improved.
  • FIG. 5 is a top view of the optical element unit when the X-ray analyzer is in operation.
  • the switching stage driving unit 65 moves the optical element unit 10 in the state shown in FIG. 3B to the left side in the X direction to the state shown in FIG. It moves to the lower side in the Y direction in 4B to obtain the state shown in FIG.
  • the distance by which the switching stage driving unit 65 moves the optical element unit 10 in the Y direction is known in advance, the distance by which the switching stage driving unit 65 moves the optical element unit 10 in the Y direction, specifically The number of movements (number of pulses) performed by the stepping motor constituting the switching stage drive unit 65 is known in advance. Therefore, the movement of the optical element unit 10 in the Y direction by the switching stage driving unit 65 can also be automatically performed.
  • an X-ray optical element 11 a is disposed at a position close to the mirror 12, and an X-ray optical element 10 d is disposed at a position far from the mirror 12.
  • An X-ray optical element 11 having a smaller beam diameter is more susceptible to dimensional errors and assembly errors in the optical element unit 10. Further, the shorter the moving distance for alignment, the smaller the influence of dimensional errors and assembly errors in the optical element unit 10. Therefore, the X-ray optical element 11 having a smaller beam diameter is preferably arranged at a position closer to the mirror 12 in order to shorten the moving distance when aligning the sample 20 and the X-ray tube 3. Specifically, the X-ray optical element 11 having a small beam diameter is disposed at a position where the distance to which the optical element unit 10 is moved when the X-ray optical element 11 is aligned with the observation location 20a.
  • the X-ray optical element 11 may be configured by a collimator in addition to the X-ray conduit.
  • the X-ray analyzer that detects fluorescent X-rays generated from the sample 20 by irradiating the sample 20 with X-rays has been described.
  • the radiation detection apparatus according to the present invention is not limited to such an X-ray analysis apparatus.
  • transmitted X-rays, scattered X-rays generated from the sample 20 by irradiating the sample 20 with radiation such as X-rays or electron beams
  • the present invention can also be applied to an apparatus that detects radiation such as secondary electrons and reflected electrons.
  • FIG. 6 is a top view of the optical element unit according to the second embodiment.
  • three X-ray optical elements 11a, 11b, and 11c are arranged side by side in the Y direction.
  • the mirror 12 has a diameter slightly larger than the outer diameter of the X-ray optical element 11, and when viewed from above, along the left end side of the optical element switching stage 10a.
  • the X-ray optical element 11a is arranged side by side in the X direction. That is, the mirror 12 and the X-ray optical element 11a are coaxial in the X direction.
  • Other configurations of the optical element unit 10 and the configuration of the X-ray analyzer are the same as those in the first embodiment.
  • the X-ray optical element 11a having the smallest beam diameter is arranged side by side with the mirror 12 in the X direction. Therefore, when the X-ray optical element 11a is aligned with the observation location 20a after the observation location 20a of the sample 20 is aligned with the mirror 12, the optical element unit 10 is moved only in the X direction. Good. Therefore, it is possible to easily and accurately align the observation location 20a and the X-ray optical element 11a.
  • the X-ray optical element 11c having the maximum beam diameter is arranged at a position far from the mirror 12, but the optical element unit 10 can be moved in two directions, so that the X-ray optical element 11c is aligned with the observation location 20a. Can be easily and accurately performed.
  • the same effect as that of the first embodiment can be obtained.
  • the sample 20 can be accurately observed through the mirror 12.
  • the position of the X-ray optical element 11 with respect to the sample 20 and the position of the X-ray optical element 11 with respect to the X-ray tube 3 can be easily adjusted with high accuracy. Since the X-ray optical element 11 can be arranged at an optimal position with respect to the sample 20 and the X-ray tube 3, the accuracy in X-ray analysis is also improved.
  • the X-ray optical element 11 may be configured by a collimator.
  • two X-ray optical elements 11 may be arranged side by side in each of the X direction and the Y direction, or one X direction Y, as shown in FIG. Three may be arranged side by side in the direction.
  • three X-ray optical elements 11 in the X direction and two X-ray optical elements 11 in the Y direction may be arranged side by side, or two X-ray optical elements 11 in the X direction and three X-ray optical elements 11 in the Y direction may be arranged. It is good also as a structure arrange
  • the X-ray optical element 11a and the mirror 12 having the smallest inner diameter may be arranged side by side in the X direction when viewed from above.
  • the X-ray optical element 11a having the smallest inner diameter and the mirror 12 are arranged on the same axis in the X direction when viewed from above.
  • the position of the mirror 12 and the position of the X-ray optical element 11a are not necessarily on the same axis, and the position of the observation position of the sample 20 observed by the observation unit 5 via the mirror 12 (via the mirror 12).
  • the position of the field of view of the observation unit 5) and the X-ray spot position emitted from the X-ray optical element 11a to the sample 20 may be on the same axis.
  • FIG. 7 is a perspective view of the optical element unit 10 according to the third embodiment.
  • the X-ray analyzer according to Embodiment 3 has the same configuration as that of Embodiment 1 except that the shapes of the X-ray optical elements 14a to 14d of the optical element unit 10 are different from those of the X-ray optical elements 11a to 11d of Embodiment 1.
  • a plurality of X-ray optical elements 14a to 14d are mounted on the optical element switching stage 10a.
  • the number of X-ray optical elements 14 to be mounted is not limited to four shown in FIG.
  • the X-ray optical element 14 converges the X-rays generated in the X-ray tube 3 and entered into the vacuum box 1 to irradiate the sample 20.
  • FIG. 8 is a cross-sectional view of the X-ray optical element 14 according to the third embodiment.
  • the irradiation direction of the X-rays irradiated from the X-ray tube 3 is indicated by arrows, and an incident end where X-rays are incident and an emission end (one end) that emits X-rays are respectively shown.
  • the X-ray optical element 14 is shown in the vertical direction.
  • FIG. 9 is a schematic diagram of a part of the X-ray analysis apparatus according to the third embodiment, and shows the positional relationship of the X-ray optical element 14 with respect to the sample 20 placed on the sample stage 21.
  • the X-ray optical element 14 of Embodiment 3 is an X-ray conduit (capillary) formed of, for example, glass in a tubular shape (tubular).
  • the X-ray optical element 14 of Embodiment 3 is a cylindrical body having a shape in which the inner diameter d2 at the center in the axial length direction is larger than the inner diameters d1 and d3 at both ends.
  • the inner diameters d1 and d3 at both ends of the X-ray optical element 14 may be the same length or different lengths.
  • Each of the X-ray optical elements 14a to 14d is formed in a shape having a different degree of curvature of the peripheral surface and a length in the axial length direction, and has an inner diameter d3 at the incident end (upper end in FIG. 8) where the X-rays enter, The inner diameter d2 of the portion differs from the inner diameter d1 of the emitting end (lower end in FIG. 8) for emitting X-rays. Further, the X-ray optical elements 14a to 14d are formed such that the smaller the inner diameter d1 of the emission end, the longer the length in the axial direction.
  • the irradiation diameter (spot diameter) of the X-rays emitted from each of the X-ray optical elements 14a to 14d on the sample surface is different.
  • the X-ray optical elements 14a to 14d have different distances from the emission end to the focal point where the emitted X-rays converge. It is desirable that the X-rays emitted from the X-ray optical element 14 are applied to the observation location 20a of the sample 20 at the focal position. Therefore, since the sample 20 is arranged so that the observation point 20a is arranged at the focal position of each X-ray optical element 14a to 14d, each X-ray optical element 14a to 14d is connected to the observation point 20a from the emission end.
  • the distance WD (Working Distance) is different.
  • the inner diameter, the degree of curvature, and the length in the axial length direction of each of the entrance and exit ends of the X-ray optical elements 14a to 14d can be appropriately selected.
  • the X-ray optical element 14 is inserted into the insertion hole 10b provided in the optical element switching stage 10a and attached to the optical element switching stage 10a.
  • the right (front) insertion hole 10 b has an X-ray optical element 14 a having a minimum inner diameter d 1 at the exit end and a longest length in the axial direction at a position on the left side near the mirror 12. Is inserted, and the X-ray optical element 14b having the second smallest inner diameter d1 at the emission end and the second longest is inserted at the right position.
  • the X-ray optical element 14c having the third smallest inner diameter d1 at the emission end and the third longest X-ray optical element 14c is inserted into the left side (back side) insertion hole 10b at a position on the left side close to the mirror 12.
  • the X-ray optical element 14d having the shortest inner diameter d1 at the emission end is inserted.
  • the X-ray optical elements 14a to 14d are arranged at positions closer to the mirror 12 in ascending order of the inner diameter d1 of the emission end.
  • the X-ray optical elements 14a to 14d are arranged at positions closer to the mirror 12 in order of increasing distance WD.
  • the optical element unit 10 of the third embodiment having such a configuration is housed in the vacuum box 1 in the same state as that of the first embodiment. Further, the X-ray analyzer in which the optical element unit 10 of Embodiment 3 is housed in the vacuum box 1 irradiates the sample 20 with X-rays by the same procedure and processing as in Embodiment 1, and generates fluorescence X generated from the sample 20. Detect lines. Therefore, also in Embodiment 3, the same effect as in Embodiment 1 can be obtained. For example, in the optical element unit 10 of Embodiment 3, the optical element switching stage 10a can be moved by the switching stage driving unit 65 along one direction (specifically, the X direction in FIG. 2B).
  • the X-ray optical elements 14a and 14b having a small inner diameter d1 at the emission end are arranged side by side with the mirror 12. Therefore, after aligning the observation portion 20a of the sample 20 with respect to the mirror 12, the X-ray optical elements 14a and 14b are aligned with respect to the observation portion 20a by moving the optical element unit 10 only in the X direction. be able to. Further, since the optical element unit 10 can move in two directions, the alignment of the X-ray optical elements 14c and 14d with respect to the observation location 20a can be easily and accurately performed.
  • each X-ray optical element 14 is arranged with X-ray optical elements 14 c and 14 d having a short length in the axial length direction at a position close to the X-ray detector 4.
  • the X-ray optical element 14 of Embodiment 3 can also be applied to the optical element unit 10 of the X-ray analyzer of Embodiment 2 described above. As shown in FIG. 6, one X-ray optical element 14 may be arranged side by side in the X direction and three in the Y direction. When the X-ray optical element 14 is viewed from above, the X-ray optical element 14a and the mirror 12 having the shortest inner diameter d1 at the emission end and the shortest distance WD to the spot position (the observation position 20a of the sample 20) are viewed from above. Need only be arranged side by side in the X direction.
  • Optical element unit 12 Mirror 20 Sample 65 Switching stage drive part 10a Optical element switching stage (holding part) 11a to 11d X-ray optical element (radiation optical element) 12a Mirror holder (mirror holding part) 14a to 14d X-ray optical element (radiation optical element)

Abstract

Provided is a radiation detection device whereby a sample can be confirmed with good precision via mirror. A radiation detection device is provided with radiation optical elements (11a-11d) for throttling radiation radiated to a sample, a detection part for detecting radiation generated by irradiation of the sample by radiation, a mirror (12) disposed facing the sample, and a retaining part (10a) for retaining the radiation optical elements (11a-11d) and the mirror (12). The retaining part (10a) can move in two intersecting directions in a plane intersecting with the irradiation direction of radiation radiated to the sample. The retaining part (10a) also retains a plurality of radiation optical elements (11a, 11d) having different emission diameters of radiation, and retains the mirror (12) and the radiation optical element (11a) having the smallest emission diameter so as to be aligned in one of the two directions in which movement is possible.

Description

放射線検出装置Radiation detector
　本発明は、放射線検出装置に関する。 The present invention relates to a radiation detection apparatus.
　試料の分析を行うために放射線検出装置が利用されている。放射線検出装置は、試料に対してＸ線又は電子線等の放射線を照射し、その際に生じる特性Ｘ線を検出器にて検出する。放射線検出装置が検出した特性Ｘ線のスペクトル分布等から、試料に含まれる元素の特定及びこの元素の濃度の算出等を行うことができる。
　放射線検出装置には、試料に対するＸ線の照射位置を確認するために撮像ユニットが設けられたＸ線分析装置がある（例えば、特許文献１参照）。特許文献１に開示された装置では、試料の上方に、反射面を試料側に向けてミラーが配置されており、撮像ユニットは、ミラーによる反射光によって、試料を上方から撮像した画像を取得する。よって、特許文献１に開示された装置では、試料の上方から照射されるＸ線の照射位置を、試料を上方から撮像した光学画像で確認できる。 A radiation detector is used to analyze a sample. The radiation detection apparatus irradiates a sample with radiation such as X-rays or electron beams, and the characteristic X-rays generated at that time are detected by a detector. From the spectral distribution of characteristic X-rays detected by the radiation detection device, it is possible to identify the element contained in the sample and calculate the concentration of this element.
As a radiation detection apparatus, there is an X-ray analysis apparatus provided with an imaging unit in order to confirm an X-ray irradiation position on a sample (see, for example, Patent Document 1). In the apparatus disclosed in Patent Document 1, a mirror is arranged above the sample with the reflecting surface facing the sample side, and the imaging unit acquires an image obtained by imaging the sample from above by the reflected light from the mirror. . Therefore, in the apparatus disclosed in Patent Document 1, the irradiation position of X-rays irradiated from above the sample can be confirmed by an optical image obtained by imaging the sample from above.
特許第３９９６８２１号公報Japanese Patent No. 3,996,821
　特許文献１に開示された装置では、Ｘ線の照射軸と同軸の光学画像を取得するために、Ｘ線を試料までガイドするＸ線ガイド部材とミラーとが試料の上方の同じ位置に配置されている。また、Ｘ線ガイド部材とミラーとを同じ位置に配置するために、ミラーに、Ｘ線ガイド部材を挿通させるための挿通部（例えば切欠き部）が設けられている。従って、挿通部が設けられた箇所ではミラーによる視野が制限されるので、撮像ユニットで取得した光学画像によって試料を十分観察できない場合が生じ、この場合、試料に対するＸ線の照射位置を精度良く確認できない虞がある。 In the apparatus disclosed in Patent Document 1, in order to obtain an optical image coaxial with the X-ray irradiation axis, an X-ray guide member and a mirror for guiding X-rays to the sample are arranged at the same position above the sample. ing. Further, in order to arrange the X-ray guide member and the mirror at the same position, an insertion portion (for example, a notch portion) for inserting the X-ray guide member into the mirror is provided. Therefore, since the field of view by the mirror is limited at the place where the insertion portion is provided, the sample may not be sufficiently observed by the optical image acquired by the imaging unit. In this case, the X-ray irradiation position on the sample can be confirmed with high accuracy. There is a possibility that it cannot be done.
　本発明は、斯かる事情に鑑みてなされたものであって、その目的とするところは、ミラーを介して試料を精度良く確認することが可能な放射線検出装置を提供することにある。 The present invention has been made in view of such circumstances, and an object thereof is to provide a radiation detection apparatus capable of accurately confirming a sample via a mirror.
　本発明の一態様に係る放射線検出装置は、試料に照射される放射線を絞る放射線光学素子と、前記試料への放射線の照射によって生じる放射線を検出する検出部と、前記試料に対向配置されたミラーと、前記放射線光学素子及びミラーを保持する保持部とを備える放射線検出装置において、前記保持部を、前記試料に照射される放射線の照射方向に交差する面内で、交差する二方向に移動させる駆動部を更に備え、前記保持部は、前記放射線の出射径が異なる複数の前記放射線光学素子を保持しており、前記ミラー及び最小の出射径の前記放射線光学素子を前記二方向のうちの一方向に並べて保持していることを特徴とする。 A radiation detection apparatus according to an aspect of the present invention includes a radiation optical element that narrows down radiation applied to a sample, a detection unit that detects radiation generated by irradiation of the sample with radiation, and a mirror disposed to face the sample And a holding unit that holds the radiation optical element and the mirror, the holding unit is moved in two intersecting directions within a plane that intersects the irradiation direction of the radiation applied to the sample. The holding unit further includes a plurality of the radiation optical elements having different radiation emission diameters, and the mirror and the radiation optical element having the smallest emission diameter are arranged in one of the two directions. It is characterized by being held side by side in the direction.
　本発明の一態様に係る放射線検出装置は、前記保持部は、出射径が小さい前記放射線光学素子を、前記ミラーから前記二方向に沿った距離が短い位置で保持していることを特徴とする。 In the radiation detection apparatus according to one aspect of the present invention, the holding unit holds the radiation optical element having a small emission diameter at a position where the distance along the two directions from the mirror is short. .
　本発明の一態様に係る放射線検出装置は、試料に照射される放射線を絞る放射線光学素子と、前記試料への放射線の照射によって生じる放射線を検出する検出部と、前記試料に対向配置されたミラーと、前記放射線光学素子及びミラーを保持する保持部とを備える放射線検出装置において、前記保持部を、前記試料に照射される放射線の照射方向に交差する面内で、交差する二方向に移動させる駆動部を更に備え、前記保持部は、前記試料の表面での前記放射線の照射径が異なる複数の前記放射線光学素子を保持しており、前記ミラー及び前記照射径が最小の前記放射線光学素子を前記二方向のうちの一方向に並べて保持していることを特徴とする。 A radiation detection apparatus according to an aspect of the present invention includes a radiation optical element that narrows down radiation applied to a sample, a detection unit that detects radiation generated by irradiation of the sample with radiation, and a mirror disposed to face the sample And a holding unit that holds the radiation optical element and the mirror, the holding unit is moved in two intersecting directions within a plane that intersects the irradiation direction of the radiation applied to the sample. A driving unit; and the holding unit holds a plurality of the radiation optical elements having different irradiation diameters of the radiation on the surface of the sample, the mirror and the radiation optical element having the smallest irradiation diameter. It is characterized by being held side by side in one of the two directions.
　本発明の一態様に係る放射線検出装置は、前記放射線光学素子は、筒体であり、軸長方向の中央部の内径が両端部の内径よりも大きい形状を有し、前記保持部は、前記放射線を出射する一端部の内径が最小の前記放射線光学素子を前記ミラーと共に前記二方向のうちの一方向に並べて保持していることを特徴とする。 In the radiation detection apparatus according to one aspect of the present invention, the radiation optical element is a cylinder, and has a shape in which an inner diameter of a central portion in an axial length direction is larger than inner diameters of both end portions, The radiation optical element having the smallest inner diameter at one end that emits radiation is arranged and held in one of the two directions together with the mirror.
　本発明の一態様に係る放射線検出装置は、前記保持部は、前記放射線を出射する出射端から前記試料までの距離が最小の前記放射線光学素子を前記ミラーと共に前記二方向のうちの一方向に並べて保持していることを特徴とする。 In the radiation detection apparatus according to an aspect of the present invention, the holding unit may be configured so that the radiation optical element having the minimum distance from the emission end that emits the radiation to the sample is in one of the two directions together with the mirror. It is characterized by being held side by side.
　本発明の一態様に係る放射線検出装置は、前記保持部は、前記照射径が小さい前記放射線光学素子を、前記ミラーから前記二方向に沿った距離が短い位置で保持していることを特徴とする。 In the radiation detection apparatus according to an aspect of the present invention, the holding unit holds the radiation optical element having a small irradiation diameter at a position where the distance from the mirror along the two directions is short. To do.
　本発明の一態様に係る放射線検出装置は、前記放射線光学素子は、前記二方向のそれぞれに複数ずつ並んで配置されていることを特徴とする。 The radiation detection apparatus according to an aspect of the present invention is characterized in that a plurality of the radiation optical elements are arranged side by side in each of the two directions.
　本発明の一態様に係る放射線検出装置は、前記放射線光学素子は筒体であり、前記保持部は、軸長方向の長さが短い前記放射線光学素子を前記検出部に近い位置で保持していることを特徴とする。 In the radiation detection apparatus according to one aspect of the present invention, the radiation optical element is a cylindrical body, and the holding unit holds the radiation optical element having a short axial length in a position close to the detection unit. It is characterized by being.
　本発明の一態様に係る放射線検出装置は、前記ミラーは、前記試料の光像を、所定位置に配置された観察部へ導くように配置されていることを特徴とする。 The radiation detection apparatus according to an aspect of the present invention is characterized in that the mirror is disposed so as to guide an optical image of the sample to an observation unit disposed at a predetermined position.
　本発明の一態様に係る放射線検出装置は、前記放射線光学素子は、前記放射線の照射方向を軸長方向として配置された筒体であり、前記保持部は、板状に形成されており、前記保持部は、厚み方向に穿設された複数の長孔を有しており、前記長孔は、前記二方向のうちの一方向を長軸方向として、他方向に並べて設けられており、前記保持部は、前記長孔に挿通された前記放射線光学素子を保持しており、前記保持部は、前記放射線光学素子の軸長方向に延設されたミラー保持部を有しており、前記ミラー保持部の延設端部には、前記ミラーが、反射面を前記他方向に平行で、かつ、前記放射線光学素子の軸長方向に対して傾いた状態で取り付けられており、前記最小の出射径の放射線光学素子又は前記照射径が最小の放射線光学素子は、前記ミラーから前記一方向に近い位置に配置されていることを特徴とする。 In the radiation detection apparatus according to one aspect of the present invention, the radiation optical element is a cylindrical body arranged with the radiation direction of the radiation as an axial length direction, and the holding portion is formed in a plate shape, The holding portion has a plurality of long holes drilled in the thickness direction, and the long holes are provided side by side in the other direction, with one of the two directions as the long axis direction, The holding part holds the radiation optical element inserted through the long hole, and the holding part has a mirror holding part extending in the axial length direction of the radiation optical element, and the mirror The mirror is attached to the extended end portion of the holding portion in a state where the reflecting surface is parallel to the other direction and inclined with respect to the axial length direction of the radiation optical element. The radiation optical element having a diameter or the radiation optical element having the smallest irradiation diameter is Characterized in that the serial mirror is disposed at a position closer to the one direction.
　本発明の一態様においては、試料に照射される放射線を異なる出射径で出射する複数の放射線光学素子が、試料に対向配置されたミラーと共に保持部にて保持されている。保持部は、放射線の照射方向に交差する面内で、交差する二方向に移動可能である。保持部の移動によってミラー及び放射線光学素子を移動させることができるので、ミラー及び放射線光学素子を同じ位置に配置する必要がなく、従来のようにミラーに切欠きを設ける必要がない。よって、ミラーによる視野が制限されないので、ミラーを介して試料を精度良く視認できる。また、ミラーに対する試料の位置合せを、ミラーを介して試料を確認しながら行うことができる。更に、保持部が二方向に移動できることにより、試料に対する放射線光学素子の位置合せを容易にかつ精度良く行うことができる。また、ミラーと最小の出射径の放射線光学素子とが、前記二方向のうちの一方向に並べて保持部に保持されている。よって、ミラーに対して位置合せされた試料に対して、最小の出射径の放射線光学素子を位置合せする際には一方向にのみ保持部を移動させればよいので、より精度良く位置合わせを行うことが可能である。最小の出射径の放射線光学素子は、保持部及び駆動部における寸法誤差及び組立誤差の影響を最も受け易い。従って、一方向に保持部を移動させることによって最小の出射径の放射線光学素子を位置合せできる構成により、最小の出射径の放射線光学素子が受ける寸法誤差及び組立誤差の影響を、一方向への移動で生じる誤差のみに軽減することが可能となる。 In one aspect of the present invention, a plurality of radiation optical elements that emit radiation irradiated to a sample with different exit diameters are held by a holding unit together with a mirror that is disposed to face the sample. The holding unit is movable in two intersecting directions within a plane intersecting the radiation irradiation direction. Since the mirror and the radiation optical element can be moved by the movement of the holding portion, it is not necessary to arrange the mirror and the radiation optical element at the same position, and it is not necessary to provide a notch in the mirror as in the prior art. Therefore, since the field of view by the mirror is not limited, the sample can be visually recognized through the mirror. Further, the alignment of the sample with respect to the mirror can be performed while confirming the sample through the mirror. Furthermore, since the holding portion can move in two directions, the radiation optical element can be easily and accurately aligned with the sample. In addition, the mirror and the radiation optical element having the smallest emission diameter are held in the holding unit side by side in one of the two directions. Therefore, when aligning the radiation optical element having the smallest emission diameter with respect to the sample aligned with the mirror, the holding unit only needs to be moved in one direction, so that the alignment can be performed with higher accuracy. Is possible. The radiation optical element having the smallest emission diameter is most susceptible to dimensional errors and assembly errors in the holding unit and the driving unit. Accordingly, the configuration in which the radiation optical element with the smallest emission diameter can be aligned by moving the holding portion in one direction can reduce the influence of the dimensional error and the assembly error that the radiation optical element with the smallest emission diameter receives in one direction. It is possible to reduce only the error caused by movement.
　本発明の一態様においては、ミラーから前記二方向に沿った距離が短い位置に、出射径が小さい放射線光学素子が配置される。放射線光学素子は、出射径が小さいほど、保持部及び駆動部における寸法誤差及び組立誤差の影響を無視できない。また、寸法誤差及び組立誤差の影響は、位置合せの際の移動距離が長いほど大きくなる。よって、出射径が小さい放射線光学素子を、所定位置への位置合せの際に移動させる距離が短い位置に配置することにより、位置合せの際の移動距離を短くできるので、位置合せを精度良く行うことが可能となる。 In one aspect of the present invention, a radiation optical element having a small emission diameter is disposed at a position where the distance from the mirror along the two directions is short. As the radiation optical element has a smaller emission diameter, the influence of dimensional errors and assembly errors in the holding unit and the driving unit cannot be ignored. Further, the influence of the dimensional error and the assembly error becomes larger as the moving distance at the time of alignment becomes longer. Therefore, by arranging the radiation optical element having a small emission diameter at a position where the distance to be moved at the time of alignment to a predetermined position is short, the movement distance at the time of alignment can be shortened, so that the alignment is performed with high accuracy. It becomes possible.
　本発明の一態様においては、試料に照射される放射線の試料表面での照射径が異なる複数の放射線光学素子が、試料に対向配置されたミラーと共に保持部にて保持されている。保持部の移動によってミラー及び放射線光学素子を移動させることができるので、ミラー及び放射線光学素子を同じ位置に配置する必要がなく、従来のようにミラーに切欠きを設ける必要がない。よって、ミラーによる視野が制限されないので、ミラーを介して試料を精度良く視認できる。また、ミラーに対する試料の位置合せを、ミラーを介して試料を確認しながら行うことができる。更に、保持部が二方向に移動できることにより、試料に対する放射線光学素子の位置合せを容易にかつ精度良く行うことができる。また、ミラーと試料表面での照射径が最小の放射線光学素子とが、前記二方向のうちの一方向に並べて保持部に保持されている。よって、ミラーに対して位置合せされた試料に対して、試料表面での照射径が最小の放射線光学素子を位置合せする際には一方向にのみ保持部を移動させればよいので、より精度良く位置合わせを行うことが可能である。照射径が最小の放射線光学素子は、保持部及び駆動部における寸法誤差及び組立誤差の影響を最も受け易い。従って、一方向に保持部を移動させることによって位置合せできる構成により、照射径が最小の放射線光学素子が受ける寸法誤差及び組立誤差の影響を、一方向への移動で生じる誤差のみに軽減することが可能となる。 In one aspect of the present invention, a plurality of radiation optical elements having different irradiation diameters on the sample surface of the radiation applied to the sample are held by the holding unit together with the mirror disposed opposite to the sample. Since the mirror and the radiation optical element can be moved by the movement of the holding portion, it is not necessary to arrange the mirror and the radiation optical element at the same position, and it is not necessary to provide a notch in the mirror as in the prior art. Therefore, since the field of view by the mirror is not limited, the sample can be visually recognized through the mirror. Further, the alignment of the sample with respect to the mirror can be performed while confirming the sample through the mirror. Furthermore, since the holding portion can move in two directions, the radiation optical element can be easily and accurately aligned with the sample. Further, the mirror and the radiation optical element having the smallest irradiation diameter on the sample surface are arranged in one of the two directions and are held by the holding unit. Therefore, when aligning the radiation optical element with the smallest irradiation diameter on the sample surface with respect to the sample aligned with the mirror, it is only necessary to move the holding part in one direction, so it is more accurate. It is possible to perform alignment well. The radiation optical element with the smallest irradiation diameter is most susceptible to dimensional errors and assembly errors in the holding unit and the driving unit. Therefore, the configuration that can be aligned by moving the holding part in one direction reduces the effects of dimensional errors and assembly errors on the radiation optical element with the smallest irradiation diameter only to errors caused by movement in one direction. Is possible.
　本発明の一態様においては、放射線光学素子は、軸長方向の中央部の内径が両端部の内径よりも大きい形状の筒体である。放射線を出射する一端部の内径が最小の放射線光学素子がミラーと共に前記二方向のうちの一方向に並べて保持されている。よって、ミラーに対して位置合せされた試料に対して、前記一端部の内径が最小の放射線光学素子を位置合せする際には一方向にのみ保持部を移動させればよいので、精度良く位置合わせを行うことが可能である。 In one aspect of the present invention, the radiation optical element is a cylindrical body having a shape in which the inner diameter of the central portion in the axial length direction is larger than the inner diameters of both end portions. A radiation optical element having the smallest inner diameter at one end for emitting radiation is held side by side in one of the two directions together with the mirror. Therefore, when aligning the radiation optical element having the smallest inner diameter at the one end with respect to the sample aligned with the mirror, the holding unit only needs to be moved in one direction. It is possible to combine.
　本発明の一態様においては、放射線を出射する出射端から試料までの距離が最小の放射線光学素子がミラーと共に前記二方向のうちの一方向に並べて保持されている。よって、ミラーに対して位置合せされた試料に対して、前記出射端から試料までの距離が最小の放射線光学素子を位置合せする際には一方向にのみ保持部を移動させればよいので、精度良く位置合わせを行うことが可能である。 In one aspect of the present invention, the radiation optical element having the minimum distance from the emission end that emits radiation to the sample is arranged and held in one of the two directions together with the mirror. Therefore, with respect to the sample aligned with the mirror, when aligning the radiation optical element having the minimum distance from the emission end to the sample, it is only necessary to move the holding unit in one direction. It is possible to perform alignment with high accuracy.
　本発明の一態様においては、ミラーから前記二方向に沿った距離が短い位置に、試料表面での照射径が小さい放射線光学素子が配置される。放射線光学素子は、照射径が小さいほど、保持部及び駆動部における寸法誤差及び組立誤差の影響を無視できない。また、寸法誤差及び組立誤差の影響は、位置合せの際の移動距離が長いほど大きくなる。よって、照射径が小さい放射線光学素子を、所定位置への位置合せの際に移動させる距離が短い位置に配置することにより、位置合せの際の移動距離を短くできるので、位置合せを精度良く行うことが可能となる。 In one aspect of the present invention, a radiation optical element having a small irradiation diameter on the sample surface is disposed at a position where the distance along the two directions from the mirror is short. In the radiation optical element, as the irradiation diameter is smaller, the influence of dimensional errors and assembly errors in the holding unit and the driving unit cannot be ignored. Further, the influence of the dimensional error and the assembly error becomes larger as the moving distance at the time of alignment becomes longer. Therefore, by arranging the radiation optical element having a small irradiation diameter at a position where the distance to be moved at the time of alignment to a predetermined position is short, the movement distance at the time of alignment can be shortened, so that the alignment is performed with high accuracy. It becomes possible.
　本発明の一態様においては、保持部が移動可能な二方向に沿ってそれぞれ複数の放射線光学素子が配置されている。よって、保持部を移動させて放射線光学素子を所定位置に配置させる位置合わせを精度良くかつ容易に行うことが可能となる。 In one aspect of the present invention, a plurality of radiation optical elements are arranged along two directions in which the holding unit can move. Therefore, it is possible to accurately and easily perform alignment for moving the holding unit and arranging the radiation optical element at a predetermined position.
　本発明の一態様においては、放射線光学素子は筒体であり、軸長方向の長さが短い放射線光学素子が、検出部に近い位置に配置されている。よって、保持部を移動させた場合であっても、検出部に接触しないように放射線光学素子を配置することが可能である。 In one embodiment of the present invention, the radiation optical element is a cylinder, and the radiation optical element having a short length in the axial direction is disposed at a position close to the detection unit. Therefore, even when the holding unit is moved, the radiation optical element can be arranged so as not to contact the detection unit.
　本発明の一態様においては、ミラーは、試料の光像を、所定位置に配置された観察部へ導く。よって、ミラーの位置から試料を観察できるので、試料を精度良く観察することが可能となる。 In one aspect of the present invention, the mirror guides the optical image of the sample to the observation unit arranged at a predetermined position. Therefore, since the sample can be observed from the position of the mirror, the sample can be observed with high accuracy.
　本発明の一態様においては、板状の保持部に厚み方向に複数の長孔が穿設されており、筒体の放射線光学素子が、長孔に挿通されて保持部に保持される。よって、保持部の長孔に放射線光学素子を挿通させることにより、放射線光学素子の保持部への取付が可能である。また保持部は放射線光学素子の軸長方向にミラー保持部が延設されており、ミラー保持部の延設端部にミラーが取り付けられている。ミラーは、反射面が前記長孔の並設方向に平行で、かつ、放射線光学素子の軸長方向に対して傾いた状態で取り付けられており、試料の光像を所定位置の観察部に適切に導くことが可能である。また、最小の出射径の放射線光学素子又は照射径が最小の放射線光学素子がミラーから近い位置に配置されているので、出射径又は照射径が最小の放射線光学素子を所定位置に配置させるための位置合せを容易にかつ精度良く行うことが可能となる。 In one aspect of the present invention, a plurality of long holes are formed in the thickness direction in the plate-like holding portion, and the cylindrical radiation optical element is inserted into the long hole and held by the holding portion. Therefore, the radiation optical element can be attached to the holding portion by inserting the radiation optical element through the long hole of the holding portion. Moreover, the holding part has a mirror holding part extending in the axial length direction of the radiation optical element, and a mirror is attached to an extended end of the mirror holding part. The mirror is mounted in a state where the reflecting surface is parallel to the parallel arrangement direction of the long holes and tilted with respect to the axial length direction of the radiation optical element, and the optical image of the sample is appropriately applied to the observation part at a predetermined position It is possible to lead to. In addition, since the radiation optical element having the smallest emission diameter or the radiation optical element having the smallest irradiation diameter is arranged at a position close to the mirror, the radiation optical element having the smallest emission diameter or irradiation diameter is arranged at a predetermined position. Positioning can be performed easily and accurately.
　本発明の一態様にあっては、ミラーを介して試料を精度良く確認することができる。また、試料に対する放射線光学素子の位置合せを精度良く行うことができる。 In one embodiment of the present invention, the sample can be confirmed with high accuracy through a mirror. In addition, the radiation optical element can be accurately aligned with the sample.
Ｘ線分析装置の概略構成を示すブロック図である。It is a block diagram which shows schematic structure of an X-ray analyzer. 実施形態１に係る光学素子ユニットの構成を示す模式図である。2 is a schematic diagram illustrating a configuration of an optical element unit according to Embodiment 1. FIG. 実施形態１に係る光学素子ユニットの構成を示す模式図である。2 is a schematic diagram illustrating a configuration of an optical element unit according to Embodiment 1. FIG. 動作中のＸ線分析装置を示す模式図である。It is a schematic diagram which shows the X-ray analyzer in operation. 動作中のＸ線分析装置を示す模式図である。It is a schematic diagram which shows the X-ray analyzer in operation. 動作中のＸ線分析装置を示す模式図である。It is a schematic diagram which shows the X-ray analyzer in operation. 動作中のＸ線分析装置を示す模式図である。It is a schematic diagram which shows the X-ray analyzer in operation. Ｘ線分析装置が動作中である場合の光学素子ユニットの上面図である。It is a top view of an optical element unit when the X-ray analyzer is operating. 実施形態２に係る光学素子ユニットの上面図である。6 is a top view of an optical element unit according to Embodiment 2. FIG. 実施形態３に係る光学素子ユニットの斜視図である。6 is a perspective view of an optical element unit according to Embodiment 3. FIG. 実施形態３に係るＸ線光学素子の断面図である。It is sectional drawing of the X-ray optical element which concerns on Embodiment 3. FIG. 実施形態３のＸ線分析装置の一部の模式図である。FIG. 5 is a schematic diagram of a part of the X-ray analyzer according to the third embodiment.
　以下、本発明をその実施の形態を示す図面に基づき具体的に説明する。以下の実施形態では、Ｘ線を用いて試料の分析を行うＸ線分析装置を例に、本発明に係る放射線検出装置について説明する。 Hereinafter, the present invention will be specifically described with reference to the drawings illustrating embodiments thereof. In the following embodiments, a radiation detection apparatus according to the present invention will be described using an X-ray analysis apparatus that analyzes a sample using X-rays as an example.
（実施形態１）
　図１は、Ｘ線分析装置の概略構成を示すブロック図である。Ｘ線分析装置は、分析対象の試料２０が収納される試料箱２と、試料２０に照射するＸ線を発生させるＸ線管３と、Ｘ線管３及び試料箱２の間に配置される真空箱１とを備えている。
　Ｘ線管３は真空箱１の上面に連通部３０を介して取り付けられている。真空箱１は試料箱２の上面に、Ｘ線を良好に透過させるＸ線透過窓２２が設けられた連通部を介して取り付けられている。真空箱１及び試料箱２は銅又はアルミニウム等の金属製である。Ｘ線透過窓２２はＸ線を透過し易い材料によって形成されており、光も透過させる。 (Embodiment 1)
FIG. 1 is a block diagram showing a schematic configuration of an X-ray analyzer. The X-ray analyzer is disposed between a sample box 2 in which a sample 20 to be analyzed is stored, an X-ray tube 3 that generates X-rays to be irradiated on the sample 20, and the X-ray tube 3 and the sample box 2. A vacuum box 1 is provided.
The X-ray tube 3 is attached to the upper surface of the vacuum box 1 via the communication part 30. The vacuum box 1 is attached to the upper surface of the sample box 2 through a communication portion provided with an X-ray transmission window 22 that allows X-rays to pass through satisfactorily. The vacuum box 1 and the sample box 2 are made of metal such as copper or aluminum. The X-ray transmission window 22 is made of a material that easily transmits X-rays and transmits light.
　試料箱２内には所定位置に試料ステージ２１が設置されており、試料ステージ２１上に試料２０が載置される。真空箱１内には所定位置に、後述するような光学素子ユニット１０が配置されている。このような構成により、Ｘ線管３で発生されたＸ線は、連通部３０を通って真空箱１内に入射し、真空箱１内の光学素子ユニット１０を通り、更にＸ線透過窓２２を通って試料箱２内に入射し、試料ステージ２１上の試料２０に照射される。
　試料ステージ２１は、試料ステージ駆動部６６によって、Ｘ線の照射方向（図１では上下方向）と、照射方向に直交する面内で、互いに直交する二方向（例えば、図１では左右方向及び奥行き方向）とに移動できるように構成されている。試料ステージ駆動部６６は試料箱２の内部に設けられていてもよいし、試料箱２の外部に設けられていてもよい。 A sample stage 21 is installed at a predetermined position in the sample box 2, and the sample 20 is placed on the sample stage 21. In the vacuum box 1, an optical element unit 10 as will be described later is arranged at a predetermined position. With such a configuration, X-rays generated by the X-ray tube 3 enter the vacuum box 1 through the communication portion 30, pass through the optical element unit 10 in the vacuum box 1, and further pass through the X-ray transmission window 22. Then, the light enters the sample box 2 and is irradiated onto the sample 20 on the sample stage 21.
The sample stage 21 is driven by the sample stage drive unit 66 in two directions orthogonal to each other within the plane orthogonal to the X-ray irradiation direction (vertical direction in FIG. 1) and the irradiation direction (for example, horizontal direction and depth in FIG. 1). Direction). The sample stage drive unit 66 may be provided inside the sample box 2 or may be provided outside the sample box 2.
　真空箱１には、前述のようにＸ線が試料２０に照射されることによって試料２０から発生する特性Ｘ線（蛍光Ｘ線）を検出するＸ線検出器４が取り付けられている。図１に示す例では、Ｘ線検出器４は、蛍光Ｘ線の検出面をＸ線透過窓２２に向けた状態で真空箱１に取り付けられている。
　また真空箱１には、ＣＣＤ（Charge Coupled Device ）カメラ又は光学顕微鏡等の観察部５が取り付けられている。後述するように真空箱１内の光学素子ユニット１０はミラー１２を有しており、観察部５はミラー１２に対向するように配置されている。観察部５は、ミラー１２によって反射される、試料箱２内の試料２０の光像を取得するために設けられている。真空箱１又は試料箱２の内部の適宜箇所には、試料２０を照明するために、図示しない光源が設けられている。光源は、例えばＬＥＤ（発光ダイオード）であり、例えば試料箱２の上壁の内面（下面）に設けることができ、真空箱１の内部に設けられていてもよい。なお、観察部５の観察面を真空箱１の外面に接触させた状態で観察部５を真空箱１の外側に配置することもでき、この場合、観察面が接触する真空箱１の箇所が、光を透過させる透過膜にて構成されている。 An X-ray detector 4 for detecting characteristic X-rays (fluorescent X-rays) generated from the sample 20 when the sample 20 is irradiated with X-rays as described above is attached to the vacuum box 1. In the example shown in FIG. 1, the X-ray detector 4 is attached to the vacuum box 1 with the fluorescent X-ray detection surface facing the X-ray transmission window 22.
Further, an observation unit 5 such as a CCD (Charge Coupled Device) camera or an optical microscope is attached to the vacuum box 1. As will be described later, the optical element unit 10 in the vacuum box 1 has a mirror 12, and the observation unit 5 is arranged to face the mirror 12. The observation unit 5 is provided to acquire an optical image of the sample 20 in the sample box 2 reflected by the mirror 12. A light source (not shown) is provided at an appropriate location inside the vacuum box 1 or the sample box 2 to illuminate the sample 20. The light source is, for example, an LED (light emitting diode), and can be provided, for example, on the inner surface (lower surface) of the upper wall of the sample box 2 or may be provided inside the vacuum box 1. In addition, the observation part 5 can also be arrange | positioned in the outer side of the vacuum box 1 in the state which made the observation surface of the observation part 5 contact the outer surface of the vacuum box 1, In this case, the location of the vacuum box 1 to which an observation surface contacts , And a transmissive film that transmits light.
　図２Ａ及び図２Ｂは、実施形態１に係る光学素子ユニット１０の構成を示す模式図である。図２Ａは光学素子ユニット１０の斜視図であり、図２Ｂは光学素子ユニット１０の上面図である。光学素子ユニット１０は、Ｘ線管３にて発生されたＸ線を、ビーム径を絞って試料２０に対して照射するものである。光学素子ユニット１０は、光学素子切替ステージ１０ａに、複数のＸ線光学素子１１ａ～１１ｄ（以下では、まとめてＸ線光学素子１１ということもある）が装着されて構成されている。図２Ａ及び図２Ｂに示す構成では、４つのＸ線光学素子１１が装着されているが、この構成に限らない。 2A and 2B are schematic views showing the configuration of the optical element unit 10 according to Embodiment 1. FIG. FIG. 2A is a perspective view of the optical element unit 10, and FIG. 2B is a top view of the optical element unit 10. The optical element unit 10 irradiates the sample 20 with X-rays generated by the X-ray tube 3 with a reduced beam diameter. The optical element unit 10 is configured by mounting a plurality of X-ray optical elements 11a to 11d (hereinafter sometimes collectively referred to as X-ray optical elements 11) on an optical element switching stage 10a. In the configuration shown in FIGS. 2A and 2B, four X-ray optical elements 11 are mounted, but the configuration is not limited to this.
　Ｘ線光学素子１１は、Ｘ線管３にて発生されて真空箱１内に入射されたＸ線を収束させる。Ｘ線光学素子１１は、例えばガラスによって筒状（管状）に形成されたＸ線導管（キャピラリ）であり、一端から入射されたＸ線を内面で反射させながら導光し、他端から出射する。Ｘ線光学素子１１ａ～１１ｄのそれぞれは、例えば同じ外径及び異なる内径を有しており、この構成により、Ｘ線光学素子１１ａ～１１ｄのそれぞれから出射するＸ線のサンプル表面上での径（スポット径）を異ならせることができる。Ｘ線光学素子１１の内径（Ｘ線の出射径）は適宜選択でき、図２Ａ及び図２Ｂに示す例では、例えば、Ｘ線光学素子１１ａ～１１ｄの内径をそれぞれ、１０μｍ、１００μｍ、５００μｍ、１．２ｍｍとしてある。
　図２Ａ及び図２Ｂに示すＸ線光学素子１１は、所謂、モノキャピラリで構成されているが、極細のＸ線導管を複数本束ねて構成されたポリキャピラリを用いることもできる。 The X-ray optical element 11 converges the X-rays generated in the X-ray tube 3 and incident into the vacuum box 1. The X-ray optical element 11 is an X-ray conduit (capillary) formed of glass, for example, in a cylindrical shape (tubular shape). The X-ray optical element 11 guides an X-ray incident from one end while reflecting the X-ray on the inner surface, and emits it from the other end. . Each of the X-ray optical elements 11a to 11d has, for example, the same outer diameter and different inner diameters. With this configuration, the diameter of the X-rays emitted from the X-ray optical elements 11a to 11d on the sample surface ( Spot diameters can be made different. The inner diameter (X-ray emission diameter) of the X-ray optical element 11 can be selected as appropriate. In the example shown in FIGS. 2A and 2B, for example, the inner diameters of the X-ray optical elements 11a to 11d are 10 μm, 100 μm, 500 μm, 1 .2 mm.
The X-ray optical element 11 shown in FIGS. 2A and 2B is formed of a so-called monocapillary, but a polycapillary formed by bundling a plurality of ultrafine X-ray conduits can also be used.
　光学素子切替ステージ（保持部）１０ａは、矩形板状に形成されており、Ｘ線光学素子１１を挿通させるための挿通孔１０ｂが厚み方向に穿設されている。図２Ａ及び図２Ｂに示す例では、光学素子切替ステージ１０ａの上面の左右方向（図２Ｂ中のＸ方向）を長軸方向として、楕円形断面を有する長孔である挿通孔１０ｂが２つ設けられており、２つの挿通孔１０ｂは、前記左右方向に直交する方向（図２Ｂ中のＹ方向）に並べて配置されている。挿通孔１０ｂは、楕円形断面を有する構成に限らず、長円形断面又は矩形断面を有する構成でもよい。 The optical element switching stage (holding part) 10a is formed in a rectangular plate shape, and an insertion hole 10b for inserting the X-ray optical element 11 is formed in the thickness direction. In the example shown in FIGS. 2A and 2B, two insertion holes 10b, which are long holes having an elliptical cross section, are provided with the left-right direction (X direction in FIG. 2B) of the upper surface of the optical element switching stage 10a as the major axis direction. The two insertion holes 10b are arranged side by side in a direction (Y direction in FIG. 2B) orthogonal to the left-right direction. The insertion hole 10b is not limited to a configuration having an elliptical cross section, and may have a configuration having an oval cross section or a rectangular cross section.
　Ｘ線光学素子１１は、挿通孔１０ｂに挿通されて、Ｘ線光学素子１１の一端側に設けられたフック（図示せず）が、光学素子切替ステージ１０ａ（挿通孔１０ｂ）に設けられたフック（図示せず）に係止することにより、光学素子切替ステージ１０ａに取り付けられている。このような構成により、光学素子切替ステージ１０ａは、挿通孔１０ｂに挿通されたＸ線光学素子１１を保持している。図２Ａ及び図２Ｂに示す例では、それぞれの挿通孔１０ｂにＸ線光学素子１１が２つずつ挿通されているが、それぞれの挿通孔１０ｂに挿通されるＸ線光学素子１１の数は２つに限らない。
　なお、図２Ｂに示す例では、下側の挿通孔１０ｂには、ミラー１２に近い左側の位置に、内径が最小のＸ線光学素子１１ａが挿通され、右側の位置に、内径が２番目に小さいＸ線光学素子１１ｂが挿通されている。また、上側の挿通孔１０ｂには、ミラー１２に近い左側の位置に、内径が３番目に小さいＸ線光学素子１１ｃが挿通され、右側の位置に、内径が最大のＸ線光学素子１１ｄが挿通されている。 The X-ray optical element 11 is inserted into the insertion hole 10b, and a hook (not shown) provided on one end side of the X-ray optical element 11 is provided on the optical element switching stage 10a (insertion hole 10b). It is attached to the optical element switching stage 10a by being locked to (not shown). With such a configuration, the optical element switching stage 10a holds the X-ray optical element 11 inserted through the insertion hole 10b. In the example shown in FIGS. 2A and 2B, two X-ray optical elements 11 are inserted through each insertion hole 10b, but the number of X-ray optical elements 11 inserted through each insertion hole 10b is two. Not limited to.
In the example shown in FIG. 2B, the X-ray optical element 11a having the smallest inner diameter is inserted into the lower insertion hole 10b at the left position close to the mirror 12, and the inner diameter is the second position at the right position. A small X-ray optical element 11b is inserted. The X-ray optical element 11c having the third smallest inner diameter is inserted into the upper insertion hole 10b at a position on the left side near the mirror 12, and the X-ray optical element 11d with the largest inner diameter is inserted into the right position. Has been.
　光学素子切替ステージ１０ａにはＸ線光学素子１１のほかにミラー１２が取り付けられている。光学素子切替ステージ１０ａには、Ｘ線光学素子１１の軸長方向にミラーホルダー１２ａが延設されており、ミラーホルダー１２ａの延設端にミラー１２が取り付けられている。図２Ａ及び図２Ｂに示す例では、ミラーホルダー１２ａは、光学素子切替ステージ１０ａの下面の左端辺に沿って、Ｘ線光学素子１１ａが取り付けられる挿通孔１０ｂとＸ方向に並ぶ位置に、挿通孔１０ｂのＹ軸方向における幅よりも若干長い領域から延設されている。ミラー１２は、例えば円形板状の平面ミラーであり、ミラーホルダー１２ａのＹ方向における長さと同じ直径を有している。即ち、ミラー１２は、挿通孔１０ｂのＹ軸方向における幅（短軸方向の幅）よりも若干長い直径を有する。また、ミラー１２は、その反射面が、光学素子切替ステージ１０ａの下面の左端辺（Ｙ方向）に平行であり、かつ、Ｘ線光学素子１１の軸長方向に対して４５度±数度傾いた状態で取り付けられている。なお、ミラー１２をこのような状態で保持できる構成であれば、ミラーホルダー１２ａはどのような形状でもよい。また、ミラー１２の反射面は光を効率よく反射できるように研磨仕上げされていることが望ましい。 In addition to the X-ray optical element 11, a mirror 12 is attached to the optical element switching stage 10a. On the optical element switching stage 10a, a mirror holder 12a is extended in the axial length direction of the X-ray optical element 11, and the mirror 12 is attached to the extended end of the mirror holder 12a. In the example shown in FIGS. 2A and 2B, the mirror holder 12a has an insertion hole at a position aligned with the insertion hole 10b to which the X-ray optical element 11a is attached along the left end side of the lower surface of the optical element switching stage 10a. 10b extends from a region slightly longer than the width in the Y-axis direction. The mirror 12 is, for example, a circular plate-like plane mirror, and has the same diameter as the length of the mirror holder 12a in the Y direction. That is, the mirror 12 has a slightly longer diameter than the width of the insertion hole 10b in the Y-axis direction (width in the short axis direction). The reflection surface of the mirror 12 is parallel to the left end side (Y direction) of the lower surface of the optical element switching stage 10 a and is inclined by 45 degrees ± several degrees with respect to the axial length direction of the X-ray optical element 11. It is attached in the state. As long as the mirror 12 can be held in such a state, the mirror holder 12a may have any shape. The reflecting surface of the mirror 12 is preferably polished so that light can be efficiently reflected.
　このような構成の光学素子ユニット１０が、光学素子切替ステージ１０ａを上側に、Ｘ線光学素子１１の突出端を下側にして、更に、ミラー１２の反射面を観察部５に対向させて、真空箱１内に収納されている。光学素子ユニット１０が真空箱１内に収納された場合、ミラー１２は、Ｘ線透過窓２２に近い位置に配置される。なお、図１では、真空箱１内に光学素子ユニット１０が収納された場合、光学素子ユニット１０を隔てて観察部５とＸ線検出器４とが対向配置されているように示されている。しかし、実際には、図２Ｂに示すように、観察部５とＸ線検出器４とは、観察部５による観察方向とＸ線検出器４による検出方向とが９０度をなすように配置されている。また、各Ｘ線光学素子１１は、Ｘ線検出器４に近い位置に、軸長方向の長さが短いＸ線光学素子１１が配置される。例えば、Ｘ線光学素子１１が、内径が小さいほど長く形成されている場合、内径が大きく短いＸ線光学素子１１が、Ｘ線検出器４に近い位置に配置される。これにより、光学素子ユニット１０をＸ線検出器４側に移動させた場合であっても、各Ｘ線光学素子１１がＸ線検出器４に接触することを回避できる。 The optical element unit 10 having such a configuration has the optical element switching stage 10a on the upper side, the protruding end of the X-ray optical element 11 on the lower side, and the reflection surface of the mirror 12 facing the observation unit 5, Housed in a vacuum box 1. When the optical element unit 10 is housed in the vacuum box 1, the mirror 12 is disposed at a position close to the X-ray transmission window 22. In FIG. 1, when the optical element unit 10 is housed in the vacuum box 1, the observation unit 5 and the X-ray detector 4 are shown to face each other with the optical element unit 10 interposed therebetween. . However, in practice, as shown in FIG. 2B, the observation unit 5 and the X-ray detector 4 are arranged such that the observation direction by the observation unit 5 and the detection direction by the X-ray detector 4 form 90 degrees. ing. In addition, each X-ray optical element 11 has an X-ray optical element 11 having a short axial length disposed at a position close to the X-ray detector 4. For example, when the X-ray optical element 11 is formed longer as the inner diameter is smaller, the X-ray optical element 11 having a larger inner diameter and a shorter inner diameter is disposed at a position close to the X-ray detector 4. Thereby, even if it is a case where the optical element unit 10 is moved to the X-ray detector 4 side, it can avoid that each X-ray optical element 11 contacts the X-ray detector 4. FIG.
　ミラー１２は、光源による試料２０の光像を、ミラー１２に対向配置された観察部５へ反射させる。図１に示す例では、ミラー１２は、反射面が観察部５の光軸と４５度±数度をなし、また、ミラーホルダー１２ａの延設方向（Ｘ線光学素子１１の軸長方向）と４５度±数度をなした状態で配置されている。しかし、観察部５が試料２０の光像を取得できる構成であれば、この構成に限らない。 The mirror 12 reflects the optical image of the sample 20 by the light source to the observation unit 5 arranged to face the mirror 12. In the example shown in FIG. 1, the mirror 12 has a reflection surface of 45 degrees ± several degrees with the optical axis of the observation unit 5, and the extending direction of the mirror holder 12 a (the axial length direction of the X-ray optical element 11). It is arranged in a state of 45 degrees ± several degrees. However, the configuration is not limited to this configuration as long as the observation unit 5 can acquire the optical image of the sample 20.
　光学素子切替ステージ１０ａ（光学素子ユニット１０）は、切替ステージ駆動部６５によって、Ｘ線の照射方向（図１における上下方向）に直交する面内で、互いに直交する二方向、具体的には、図２Ｂ中のＸ方向及びＹ方向に移動できるように構成されている。切替ステージ駆動部６５は、例えばステッピングモータを用いて構成されている。
　上述した構成により、実施形態１の光学素子ユニット１０では、切替ステージ駆動部６５によって光学素子切替ステージ１０ａが移動可能な二方向のうちの一方向（具体的には、図２Ｂ中のＸ方向）に沿って、内径が最小のＸ線光学素子１１ａとミラー１２とが並べて配置されることになる。即ち、内径が最小のＸ線光学素子１１ａとミラー１２とがＸ方向で同軸である。 The optical element switching stage 10a (optical element unit 10) is switched by the switching stage driving unit 65 in two directions orthogonal to each other in a plane orthogonal to the X-ray irradiation direction (vertical direction in FIG. 1). It is comprised so that it can move to the X direction and Y direction in FIG. 2B. The switching stage drive unit 65 is configured using, for example, a stepping motor.
With the configuration described above, in the optical element unit 10 of Embodiment 1, one of the two directions in which the optical element switching stage 10a can be moved by the switching stage driving unit 65 (specifically, the X direction in FIG. 2B). , The X-ray optical element 11a having the smallest inner diameter and the mirror 12 are arranged side by side. That is, the X-ray optical element 11a having the smallest inner diameter and the mirror 12 are coaxial in the X direction.
　切替ステージ駆動部６５によって光学素子切替ステージ１０ａを移動させることにより、各Ｘ線光学素子１１とミラー１２との位置が切り替えられ、所定位置に配置されたＸ線光学素子１１を介して、Ｘ線管３で発生したＸ線が試料２０へ届けられる。なお、Ｘ線光学素子１１ａ～１１ｄの内径（出射径）が異なることにより、Ｘ線透過窓２２から試料２０の表面までの距離が同じである場合、内径に応じたビーム径のＸ線を試料２０に照射することができる。
　所定位置に配置されたＸ線光学素子１１から出射されたＸ線は、Ｘ線透過窓２２を通過して試料２０の上面に照射され、Ｘ線の照射によって試料２０から蛍光Ｘ線が発生する。試料２０から発生した蛍光Ｘ線はＸ線透過窓２２を通してＸ線検出器４へ到達し、Ｘ線検出器４にて検出される。 By moving the optical element switching stage 10a by the switching stage driving unit 65, the position of each X-ray optical element 11 and the mirror 12 is switched, and the X-ray is transmitted via the X-ray optical element 11 arranged at a predetermined position. X-rays generated in the tube 3 are delivered to the sample 20. When the distance from the X-ray transmission window 22 to the surface of the sample 20 is the same due to the different inner diameters (outgoing diameters) of the X-ray optical elements 11a to 11d, X-rays having a beam diameter corresponding to the inner diameter are applied to the sample. 20 can be irradiated.
X-rays emitted from the X-ray optical element 11 arranged at a predetermined position pass through the X-ray transmission window 22 and are irradiated on the upper surface of the sample 20, and X-ray irradiation generates fluorescent X-rays from the sample 20. . X-ray fluorescence generated from the sample 20 reaches the X-ray detector 4 through the X-ray transmission window 22 and is detected by the X-ray detector 4.
　Ｘ線検出器４は、Ｘ線を試料２０に照射することにより発生する蛍光Ｘ線を検出する装置であり、検出した蛍光Ｘ線のエネルギーに比例した信号を出力する。Ｘ線検出器４には、Ｘ線検出器４が出力した信号を処理する信号処理部６２が接続されている。信号処理部６２は、Ｘ線検出器４が出力した各値の信号をカウントし、蛍光Ｘ線のエネルギーとカウント数との関係、即ち蛍光Ｘ線のスペクトルを生成する処理を行う。信号処理部６２には分析部６３が接続されている。信号処理部６２は、生成したスペクトルを示すデータを分析部６３へ出力する。分析部６３は、演算を行う演算部及びデータを記憶するメモリを含んで構成されている。分析部６３は、信号処理部６２から入力されたデータが示すスペクトルに基づいて、試料２０に含まれる元素の定性分析又は定量分析を行う。 The X-ray detector 4 is a device that detects fluorescent X-rays generated by irradiating the sample 20 with X-rays, and outputs a signal proportional to the energy of the detected fluorescent X-rays. The X-ray detector 4 is connected to a signal processing unit 62 that processes a signal output from the X-ray detector 4. The signal processing unit 62 counts each value signal output from the X-ray detector 4 and performs a process of generating the relationship between the fluorescent X-ray energy and the count number, that is, the fluorescent X-ray spectrum. An analysis unit 63 is connected to the signal processing unit 62. The signal processing unit 62 outputs data indicating the generated spectrum to the analysis unit 63. The analysis unit 63 includes a calculation unit that performs calculation and a memory that stores data. The analysis unit 63 performs qualitative analysis or quantitative analysis of the elements contained in the sample 20 based on the spectrum indicated by the data input from the signal processing unit 62.
　観察部５は、ミラー１２による試料２０の反射光像を取得することによって、試料２０を上方から見た光学画像を取得できる。観察部５には、液晶ディスプレイ等の表示部６４が接続されている。表示部６４は、観察部５によって取得された試料２０の画像を表示する。使用者は、表示部６４に表示された試料２０の画像を視認することにより、試料２０を観察することができる。なお、観察部５が光学顕微鏡である場合、使用者が光学顕微鏡の接眼レンズをのぞいて試料２０を観察することもできる。 The observation unit 5 can acquire an optical image obtained by viewing the sample 20 from above by acquiring a reflected light image of the sample 20 by the mirror 12. A display unit 64 such as a liquid crystal display is connected to the observation unit 5. The display unit 64 displays the image of the sample 20 acquired by the observation unit 5. The user can observe the sample 20 by visually recognizing the image of the sample 20 displayed on the display unit 64. In addition, when the observation part 5 is an optical microscope, a user can also observe the sample 20 except for the eyepiece of an optical microscope.
　Ｘ線管３、信号処理部６２、分析部６３、表示部６４、切替ステージ駆動部６５及び試料ステージ駆動部６６は、制御部６１に接続されている。制御部６１は、演算部及びメモリを含んだコンピュータで構成されている。制御部６１は、Ｘ線管３、信号処理部６２、分析部６３、表示部６４、切替ステージ駆動部６５及び試料ステージ駆動部６６の動作を制御する。制御部６１は、使用者からの指示を受け付け、受け付けた指示に応じてＸ線分析装置の各部の動作を制御する構成であってもよい。表示部６４は、信号処理部６２が生成したスペクトル又は分析部６３による分析結果を表示してもよい。また、制御部６１及び分析部６３は同一のコンピュータで構成されていてもよい。 The X-ray tube 3, the signal processing unit 62, the analysis unit 63, the display unit 64, the switching stage driving unit 65 and the sample stage driving unit 66 are connected to the control unit 61. The control unit 61 is composed of a computer including a calculation unit and a memory. The control unit 61 controls operations of the X-ray tube 3, the signal processing unit 62, the analysis unit 63, the display unit 64, the switching stage driving unit 65 and the sample stage driving unit 66. The control unit 61 may be configured to receive an instruction from the user and control the operation of each unit of the X-ray analyzer according to the received instruction. The display unit 64 may display the spectrum generated by the signal processing unit 62 or the analysis result by the analysis unit 63. Moreover, the control part 61 and the analysis part 63 may be comprised with the same computer.
　以下に、上述した構成のＸ線分析装置を用いて、試料２０の上面における任意の観察箇所２０ａの分析を行う際の手順について説明する。
　図３Ａ乃至図４Ｂは、動作中のＸ線分析装置を示す模式図である。図３Ａ及び図３Ｂには、試料２０の上面における観察箇所２０ａをミラー１２を介して観察部５によって観察している場合のＸ線分析装置を示している。図３ＡはＸ線分析装置の模式図であり、図３Ｂは光学素子ユニット１０及び試料２０の上面図である。図４Ａ及び図４Ｂには、試料２０の上面における観察箇所２０ａにＸ線光学素子１１ａを用いてＸ線を照射している場合のＸ線分析装置を示している。図４ＡはＸ線分析装置の模式図であり、図４Ｂは光学素子ユニット１０及び試料２０の上面図である。 Below, the procedure at the time of analyzing the arbitrary observation location 20a in the upper surface of the sample 20 using the X-ray analyzer of the structure mentioned above is demonstrated.
3A to 4B are schematic views showing the X-ray analyzer in operation. 3A and 3B show an X-ray analyzer when the observation portion 20a on the upper surface of the sample 20 is observed by the observation unit 5 via the mirror 12. FIG. FIG. 3A is a schematic diagram of the X-ray analyzer, and FIG. 3B is a top view of the optical element unit 10 and the sample 20. 4A and 4B show an X-ray analyzer in the case where an X-ray optical element 11a is used to irradiate the observation spot 20a on the upper surface of the sample 20 with X-rays. FIG. 4A is a schematic diagram of the X-ray analyzer, and FIG. 4B is a top view of the optical element unit 10 and the sample 20.
　使用者は、試料箱２内の試料ステージ２１に試料２０を載置した後、ミラー１２が所定の基準位置に配置されるように、切替ステージ駆動部６５によって光学素子切替ステージ１０ａ（光学素子ユニット１０）を移動させる。所定の基準位置とは、Ｘ線管３で発生されてＸ線光学素子１１を介して試料２０に照射されるＸ線の照射位置の上方の位置であり、ミラー１２を介して観察部５で観察される試料２０の光像の焦点が合う位置である。
　ミラー１２を基準位置に配置した後、使用者は、観察部５による画像の取得を開始する。使用者は、観察部５によって取得された画像を見ながら、ミラー１２に対して観察箇所２０ａの位置合せを行う。具体的には、使用者は、ミラー１２による視野の所定位置（例えば、視野の中央）に、試料２０の観察箇所２０ａが配置されるように、試料ステージ駆動部６６によって試料ステージ２１を移動させる。図３Ａ中には、ミラー１２によって観察部５に到達する試料２０の光像を破線の矢符で示している。これにより、基準位置に配置されたミラー１２に対する観察箇所２０ａの位置合せを、観察部５によって取得された画像を見ながら行うことができる。 After the user places the sample 20 on the sample stage 21 in the sample box 2, the user switches the optical element switching stage 10a (optical element unit) by the switching stage driving unit 65 so that the mirror 12 is placed at a predetermined reference position. 10) is moved. The predetermined reference position is a position above the X-ray irradiation position generated by the X-ray tube 3 and applied to the sample 20 via the X-ray optical element 11. This is the position where the optical image of the sample 20 to be observed is in focus.
After placing the mirror 12 at the reference position, the user starts to acquire an image by the observation unit 5. The user aligns the observation location 20 a with respect to the mirror 12 while viewing the image acquired by the observation unit 5. Specifically, the user moves the sample stage 21 by the sample stage driving unit 66 so that the observation location 20a of the sample 20 is arranged at a predetermined position of the visual field by the mirror 12 (for example, the center of the visual field). . In FIG. 3A, the optical image of the sample 20 that reaches the observation unit 5 by the mirror 12 is indicated by a dashed arrow. Thereby, alignment of the observation spot 20a with respect to the mirror 12 arrange | positioned in a reference | standard position can be performed, seeing the image acquired by the observation part 5. FIG.
　ミラー１２に対する観察箇所２０ａの位置合せを行った後、使用者は、切替ステージ駆動部６５によって光学素子ユニット１０を移動させることにより、使用したいＸ線光学素子１１を、観察箇所２０ａの上方に配置させる。具体的には、Ｘ線光学素子１１ａを用いる場合、切替ステージ駆動部６５は、図３Ｂに示した状態の光学素子ユニット１０をＸ方向左側に移動させ、図４Ｂに示す状態にする。なお、Ｘ線光学素子１１ｂを用いる場合、切替ステージ駆動部６５は、観察箇所２０ａの上方にＸ線光学素子１１ｂが配置されるまで、光学素子ユニット１０をＸ方向左側に移動させればよい。
　ミラー１２とＸ線光学素子１１ａとのＸ方向における距離は予め分かっているので、観察箇所２０ａの上方にＸ線光学素子１１ａが配置されるまでに切替ステージ駆動部６５が光学素子ユニット１０を移動させる距離、具体的には、切替ステージ駆動部６５を構成するステッピングモータが行う移動回数（パルスの個数）は予め分かる。よって、切替ステージ駆動部６５による光学素子ユニット１０のＸ方向における移動は自動的に行うことができる。 After positioning the observation point 20a with respect to the mirror 12, the user moves the optical element unit 10 by the switching stage drive unit 65, thereby placing the X-ray optical element 11 desired to be used above the observation point 20a. Let Specifically, when the X-ray optical element 11a is used, the switching stage driving unit 65 moves the optical element unit 10 in the state shown in FIG. 3B to the left side in the X direction to obtain the state shown in FIG. 4B. When the X-ray optical element 11b is used, the switching stage driving unit 65 may move the optical element unit 10 to the left in the X direction until the X-ray optical element 11b is disposed above the observation location 20a.
Since the distance in the X direction between the mirror 12 and the X-ray optical element 11a is known in advance, the switching stage driving unit 65 moves the optical element unit 10 until the X-ray optical element 11a is arranged above the observation location 20a. The distance to be moved, specifically, the number of movements (number of pulses) performed by the stepping motor constituting the switching stage driving unit 65 is known in advance. Therefore, the movement of the optical element unit 10 in the X direction by the switching stage driving unit 65 can be automatically performed.
　観察箇所２０ａの上方に、Ｘ線分析に用いるＸ線光学素子１１ａを配置した後、使用者は、観察箇所２０ａに対するＸ線分析を開始する。具体的には、Ｘ線管３によってＸ線が発生され、発生したＸ線がＸ線光学素子１１ａを介して試料２０に照射され、試料２０から発生した蛍光Ｘ線をＸ線検出器４が検出する。図４Ａ中には、Ｘ線管３から試料２０に照射されるＸ線と、試料２０からＸ線検出器４に到達する蛍光Ｘ線とを矢符で示している。
　なお、Ｘ線分析が行われる場合、観察部５による画像の取得が停止され、真空箱１が真空状態に保持される。試料箱２の内部は、真空箱１と共に真空状態に保持されてもよいし、大気圧状態のままでもよい。Ｘ線分析装置は、真空箱１の内部を真空にする図示しない排気部を備えている。なお、排気部は、真空箱１と共に試料箱２の内部も真空にできるように構成してあってもよい。 After disposing the X-ray optical element 11a used for X-ray analysis above the observation location 20a, the user starts X-ray analysis for the observation location 20a. Specifically, X-rays are generated by the X-ray tube 3, the generated X-rays are irradiated onto the sample 20 via the X-ray optical element 11a, and the X-ray detector 4 converts the fluorescent X-rays generated from the sample 20 into the X-ray detector 4. To detect. In FIG. 4A, X-rays irradiated from the X-ray tube 3 to the sample 20 and fluorescent X-rays reaching the X-ray detector 4 from the sample 20 are indicated by arrows.
In addition, when X-ray analysis is performed, acquisition of the image by the observation part 5 is stopped, and the vacuum box 1 is hold | maintained in a vacuum state. The inside of the sample box 2 may be kept in a vacuum state together with the vacuum box 1 or may remain in an atmospheric pressure state. The X-ray analyzer includes an exhaust unit (not shown) that evacuates the vacuum box 1. The exhaust unit may be configured so that the inside of the sample box 2 can be evacuated together with the vacuum box 1.
　実施形態１のＸ線分析装置では、ミラー１２及びＸ線光学素子１１が移動可能であるので、ミラー１２及びＸ線光学素子１１を試料２０の上方の同軸上に配置する必要がない。よって、実施形態１では、従来のようにミラー１２に切欠き部を設ける必要がないので、ミラー１２を介した視野が制限されず、ミラー１２を介して試料２０を精度良く確認できる。
　また、光学素子ユニット１０がＸ方向及びＹ方向の二方向に沿って移動できるので、試料２０に対するＸ線光学素子１１の位置と、Ｘ線管３に対するＸ線光学素子１１の位置との調整が容易であり、かつ精度良く行うことができる。試料２０及びＸ線管３に対する最適な位置にＸ線光学素子１１を配置することができるので、Ｘ線分析における精度も向上する。  In the X-ray analysis apparatus according to the first embodiment, the mirror 12 and the X-ray optical element 11 are movable, and therefore it is not necessary to arrange the mirror 12 and the X-ray optical element 11 on the same axis above the sample 20. Therefore, in Embodiment 1, since it is not necessary to provide a notch in the mirror 12 as in the prior art, the field of view through the mirror 12 is not limited, and the sample 20 can be accurately confirmed through the mirror 12.
Further, since the optical element unit 10 can move along two directions of the X direction and the Y direction, the position of the X-ray optical element 11 with respect to the sample 20 and the position of the X-ray optical element 11 with respect to the X-ray tube 3 can be adjusted. It is easy and can be performed with high accuracy. Since the X-ray optical element 11 can be arranged at an optimal position with respect to the sample 20 and the X-ray tube 3, the accuracy in X-ray analysis is also improved.
　実施形態１のＸ線分析装置において、Ｘ線分析にＸ線光学素子１１ｃを用いる場合、使用者は、ミラー１２に対する観察箇所２０ａの位置合せを行った後に、切替ステージ駆動部６５によって光学素子ユニット１０を移動させ、Ｘ線光学素子１１ｃを観察箇所２０ａの上方に配置させる。
　図５は、Ｘ線分析装置が動作中である場合の光学素子ユニットの上面図である。Ｘ線光学素子１１ｃを用いる場合、切替ステージ駆動部６５は、図３Ｂに示した状態の光学素子ユニット１０をＸ方向左側に移動させて図４Ｂに示す状態にした後、光学素子ユニット１０を図４Ｂ中のＹ方向下側に移動させて図５に示す状態にする。Ｘ線光学素子１１ａ，１１ｂとＸ線光学素子１１ｃ，１１ｄとのＹ方向における距離は予め分かっているので、切替ステージ駆動部６５が光学素子ユニット１０をＹ方向に移動させる距離、具体的には、切替ステージ駆動部６５を構成するステッピングモータが行う移動回数（パルスの個数）は予め分かる。よって、切替ステージ駆動部６５による光学素子ユニット１０のＹ方向における移動も自動的に行うことができる。 In the X-ray analysis apparatus according to the first embodiment, when the X-ray optical element 11c is used for X-ray analysis, the user aligns the observation point 20a with the mirror 12 and then uses the switching stage driving unit 65 to change the optical element unit. 10 is moved, and the X-ray optical element 11c is arranged above the observation point 20a.
FIG. 5 is a top view of the optical element unit when the X-ray analyzer is in operation. When the X-ray optical element 11c is used, the switching stage driving unit 65 moves the optical element unit 10 in the state shown in FIG. 3B to the left side in the X direction to the state shown in FIG. It moves to the lower side in the Y direction in 4B to obtain the state shown in FIG. Since the distance in the Y direction between the X-ray optical elements 11a and 11b and the X-ray optical elements 11c and 11d is known in advance, the distance by which the switching stage driving unit 65 moves the optical element unit 10 in the Y direction, specifically The number of movements (number of pulses) performed by the stepping motor constituting the switching stage drive unit 65 is known in advance. Therefore, the movement of the optical element unit 10 in the Y direction by the switching stage driving unit 65 can also be automatically performed.
　実施形態１の光学素子ユニット１０では、ミラー１２に近い位置にＸ線光学素子１１ａが配置され、ミラー１２から遠い位置にＸ線光学素子１０ｄが配置されている。ビーム径が小さいＸ線光学素子１１ほど、光学素子ユニット１０における寸法誤差や組立誤差の影響を受け易い。また、位置合せを行う際の移動距離が短いほど、光学素子ユニット１０における寸法誤差や組立誤差の影響が少ない。よって、ビーム径が小さいＸ線光学素子１１ほど、試料２０及びＸ線管３に対する位置合せを行う際の移動距離を短くするために、ミラー１２に近い位置に配置されることが好ましい。具体的には、観察箇所２０ａに対してＸ線光学素子１１の位置合せを行う際に光学素子ユニット１０を移動させる距離が短い位置に、ビーム径が小さいＸ線光学素子１１を配置させる。 In the optical element unit 10 of the first embodiment, an X-ray optical element 11 a is disposed at a position close to the mirror 12, and an X-ray optical element 10 d is disposed at a position far from the mirror 12. An X-ray optical element 11 having a smaller beam diameter is more susceptible to dimensional errors and assembly errors in the optical element unit 10. Further, the shorter the moving distance for alignment, the smaller the influence of dimensional errors and assembly errors in the optical element unit 10. Therefore, the X-ray optical element 11 having a smaller beam diameter is preferably arranged at a position closer to the mirror 12 in order to shorten the moving distance when aligning the sample 20 and the X-ray tube 3. Specifically, the X-ray optical element 11 having a small beam diameter is disposed at a position where the distance to which the optical element unit 10 is moved when the X-ray optical element 11 is aligned with the observation location 20a.
　実施形態１のＸ線分析装置において、Ｘ線光学素子１１は、Ｘ線導管のほかに、コリメータによって構成されてもよい。
　上述の実施形態１では、試料２０にＸ線を照射することによって試料２０から生じる蛍光Ｘ線を検出するＸ線分析装置について説明した。本発明に係る放射線検出装置は、このようなＸ線分析装置に限らず、例えば、試料２０にＸ線又は電子線等の放射線を照射することによって試料２０から生じる透過Ｘ線、散乱Ｘ線、二次電子、反射電子等の放射線を検出する装置にも適用できる。 In the X-ray analysis apparatus of the first embodiment, the X-ray optical element 11 may be configured by a collimator in addition to the X-ray conduit.
In the first embodiment described above, the X-ray analyzer that detects fluorescent X-rays generated from the sample 20 by irradiating the sample 20 with X-rays has been described. The radiation detection apparatus according to the present invention is not limited to such an X-ray analysis apparatus. For example, transmitted X-rays, scattered X-rays generated from the sample 20 by irradiating the sample 20 with radiation such as X-rays or electron beams, The present invention can also be applied to an apparatus that detects radiation such as secondary electrons and reflected electrons.
（実施形態２）
　実施形態１のＸ線分析装置における光学素子ユニット１０の変形例について説明する。図６は、実施形態２に係る光学素子ユニットの上面図である。
　図６に示す光学素子ユニット１０では、３つのＸ線光学素子１１ａ，１１ｂ，１１ｃがＹ方向に並んで配置されている。図６に示す光学素子ユニット１０では、ミラー１２は、Ｘ線光学素子１１の外径よりも少し大きい直径を有しており、上から見た場合に、光学素子切替ステージ１０ａの左端辺に沿って、Ｘ線光学素子１１ａとＸ方向に並んで配置されている。即ち、ミラー１２とＸ線光学素子１１ａとがＸ方向で同軸である。光学素子ユニット１０の他の構成及びＸ線分析装置の構成は実施形態１と同様である。 (Embodiment 2)
A modification of the optical element unit 10 in the X-ray analyzer of Embodiment 1 will be described. FIG. 6 is a top view of the optical element unit according to the second embodiment.
In the optical element unit 10 shown in FIG. 6, three X-ray optical elements 11a, 11b, and 11c are arranged side by side in the Y direction. In the optical element unit 10 shown in FIG. 6, the mirror 12 has a diameter slightly larger than the outer diameter of the X-ray optical element 11, and when viewed from above, along the left end side of the optical element switching stage 10a. The X-ray optical element 11a is arranged side by side in the X direction. That is, the mirror 12 and the X-ray optical element 11a are coaxial in the X direction. Other configurations of the optical element unit 10 and the configuration of the X-ray analyzer are the same as those in the first embodiment.
　図６に示す光学素子ユニット１０においても、ビーム径が最小のＸ線光学素子１１ａがミラー１２とＸ方向に並んで配置されている。よって、ミラー１２に対して試料２０の観察箇所２０ａを位置合せした後に、観察箇所２０ａに対してＸ線光学素子１１ａを位置合せする際に、光学素子ユニット１０をＸ方向にのみ移動させればよい。よって、観察箇所２０ａとＸ線光学素子１１ａとの位置合せを容易にかつ精度良く行うことができる。また、ビーム径が最大のＸ線光学素子１１ｃは、ミラー１２から遠い位置に配置されているが、光学素子ユニット１０が二方向に移動できるので、観察箇所２０ａに対するＸ線光学素子１１ｃの位置合せも容易にかつ精度良く行うことができる。 Also in the optical element unit 10 shown in FIG. 6, the X-ray optical element 11a having the smallest beam diameter is arranged side by side with the mirror 12 in the X direction. Therefore, when the X-ray optical element 11a is aligned with the observation location 20a after the observation location 20a of the sample 20 is aligned with the mirror 12, the optical element unit 10 is moved only in the X direction. Good. Therefore, it is possible to easily and accurately align the observation location 20a and the X-ray optical element 11a. The X-ray optical element 11c having the maximum beam diameter is arranged at a position far from the mirror 12, but the optical element unit 10 can be moved in two directions, so that the X-ray optical element 11c is aligned with the observation location 20a. Can be easily and accurately performed.
　実施形態２のＸ線分析装置においても、実施形態１と同様の効果が得られる。具体的には、ミラー１２を介して試料２０を精度良く観察することができる。また、試料２０に対するＸ線光学素子１１の位置と、Ｘ線管３に対するＸ線光学素子１１の位置との調整が容易であり、かつ精度良く行うことができる。試料２０及びＸ線管３に対する最適な位置にＸ線光学素子１１を配置することができるので、Ｘ線分析における精度も向上する。
　また、実施形態２のＸ線分析装置においても、Ｘ線光学素子１１はコリメータによって構成されてもよい。 In the X-ray analysis apparatus of the second embodiment, the same effect as that of the first embodiment can be obtained. Specifically, the sample 20 can be accurately observed through the mirror 12. In addition, the position of the X-ray optical element 11 with respect to the sample 20 and the position of the X-ray optical element 11 with respect to the X-ray tube 3 can be easily adjusted with high accuracy. Since the X-ray optical element 11 can be arranged at an optimal position with respect to the sample 20 and the X-ray tube 3, the accuracy in X-ray analysis is also improved.
Also in the X-ray analysis apparatus of the second embodiment, the X-ray optical element 11 may be configured by a collimator.
　Ｘ線光学素子１１は、実施形態１に示したように、Ｘ方向及びＹ方向のそれぞれに２つずつ並んで配置されてもよいし、図６に示したようにＸ方向に１つ、Ｙ方向に３つ並んで配置されてもよい。また、例えば、Ｘ方向に３つ、Ｙ方向に２つのＸ線光学素子１１が並んで配置される構成としてもよいし、Ｘ方向に２つ、Ｙ方向に３つのＸ線光学素子１１が並んで配置される構成としてもよい。内径が最小のＸ線光学素子１１ａとミラー１２とが、上から見た場合にＸ方向に並んで配置されていればよい。 As shown in the first embodiment, two X-ray optical elements 11 may be arranged side by side in each of the X direction and the Y direction, or one X direction Y, as shown in FIG. Three may be arranged side by side in the direction. Alternatively, for example, three X-ray optical elements 11 in the X direction and two X-ray optical elements 11 in the Y direction may be arranged side by side, or two X-ray optical elements 11 in the X direction and three X-ray optical elements 11 in the Y direction may be arranged. It is good also as a structure arrange | positioned by. The X-ray optical element 11a and the mirror 12 having the smallest inner diameter may be arranged side by side in the X direction when viewed from above.
　上述の実施形態１，２では、例えば図２Ｂに示すように、内径が最小のＸ線光学素子１１ａとミラー１２とが、上から見た場合にＸ方向に同一軸上に配置されている。ミラー１２の位置とＸ線光学素子１１ａの位置とは必ずしも同一軸上である必要はなく、ミラー１２を介して観察部５にて観察される試料２０の観察箇所の位置（ミラー１２を介した観察部５の視野の位置）と、Ｘ線光学素子１１ａから試料２０に出射される、Ｘ線のスポット位置とが同一軸上であればよい。 In the first and second embodiments described above, for example, as shown in FIG. 2B, the X-ray optical element 11a having the smallest inner diameter and the mirror 12 are arranged on the same axis in the X direction when viewed from above. The position of the mirror 12 and the position of the X-ray optical element 11a are not necessarily on the same axis, and the position of the observation position of the sample 20 observed by the observation unit 5 via the mirror 12 (via the mirror 12). The position of the field of view of the observation unit 5) and the X-ray spot position emitted from the X-ray optical element 11a to the sample 20 may be on the same axis.
（実施形態３）
　実施形態１のＸ線分析装置における光学素子ユニット１０の変形例について説明する。図７は、実施形態３に係る光学素子ユニット１０の斜視図である。
　実施形態３に係るＸ線分析装置は、光学素子ユニット１０のＸ線光学素子１４ａ～１４ｄの形状が実施形態１のＸ線光学素子１１ａ～１１ｄと異なる点以外は、実施形態１と同様の構成を有する。よって、Ｘ線分析装置及び光学素子ユニット１０において、実施形態１と同一の構成については同一の符号を付して説明を省略する。 (Embodiment 3)
A modification of the optical element unit 10 in the X-ray analyzer of Embodiment 1 will be described. FIG. 7 is a perspective view of the optical element unit 10 according to the third embodiment.
The X-ray analyzer according to Embodiment 3 has the same configuration as that of Embodiment 1 except that the shapes of the X-ray optical elements 14a to 14d of the optical element unit 10 are different from those of the X-ray optical elements 11a to 11d of Embodiment 1. Have Therefore, in the X-ray analysis apparatus and the optical element unit 10, the same components as those in the first embodiment are denoted by the same reference numerals and description thereof is omitted.
　実施形態３の光学素子ユニット１０においても、光学素子切替ステージ１０ａに複数のＸ線光学素子１４ａ～１４ｄ（以下では、まとめてＸ線光学素子１４ということもある）が装着される。なお、装着されるＸ線光学素子１４の数は、図７に示す４つに限らない。また、実施形態３においても、Ｘ線光学素子１４は、Ｘ線管３にて発生されて真空箱１内に入射されたＸ線を収束させて試料２０に照射する。 Also in the optical element unit 10 of the third embodiment, a plurality of X-ray optical elements 14a to 14d (hereinafter sometimes collectively referred to as X-ray optical elements 14) are mounted on the optical element switching stage 10a. The number of X-ray optical elements 14 to be mounted is not limited to four shown in FIG. Also in the third embodiment, the X-ray optical element 14 converges the X-rays generated in the X-ray tube 3 and entered into the vacuum box 1 to irradiate the sample 20.
　図８は、実施形態３に係るＸ線光学素子１４の断面図である。図８には、Ｘ線管３から照射されるＸ線の照射方向を矢符で示しており、Ｘ線が入射される入射端と、Ｘ線を出射する出射端（一端部）とをそれぞれ上下方向にしてＸ線光学素子１４を示している。図９は実施形態３のＸ線分析装置の一部の模式図であり、試料ステージ２１に載置された試料２０に対するＸ線光学素子１４の位置関係を示す。実施形態３のＸ線光学素子１４は、実施形態１のＸ線光学素子１１と同様に、例えばガラスによって筒状（管状）に形成されたＸ線導管（キャピラリ）である。実施形態３のＸ線光学素子１４は、軸長方向の中央部の内径ｄ２が両端部の内径ｄ１，ｄ３よりも大きい形状を有する筒体である。なお、Ｘ線光学素子１４の両端部の内径ｄ１及びｄ３は同じ長さであっても異なる長さであってもよい。 FIG. 8 is a cross-sectional view of the X-ray optical element 14 according to the third embodiment. In FIG. 8, the irradiation direction of the X-rays irradiated from the X-ray tube 3 is indicated by arrows, and an incident end where X-rays are incident and an emission end (one end) that emits X-rays are respectively shown. The X-ray optical element 14 is shown in the vertical direction. FIG. 9 is a schematic diagram of a part of the X-ray analysis apparatus according to the third embodiment, and shows the positional relationship of the X-ray optical element 14 with respect to the sample 20 placed on the sample stage 21. Similar to the X-ray optical element 11 of Embodiment 1, the X-ray optical element 14 of Embodiment 3 is an X-ray conduit (capillary) formed of, for example, glass in a tubular shape (tubular). The X-ray optical element 14 of Embodiment 3 is a cylindrical body having a shape in which the inner diameter d2 at the center in the axial length direction is larger than the inner diameters d1 and d3 at both ends. The inner diameters d1 and d3 at both ends of the X-ray optical element 14 may be the same length or different lengths.
　Ｘ線光学素子１４ａ～１４ｄのそれぞれは、周面の湾曲度合及び軸長方向の長さが異なる形状に形成されており、Ｘ線が入射する入射端（図８では上端）の内径ｄ３、中央部の内径ｄ２、Ｘ線を出射する出射端（図８では下端）の内径ｄ１がそれぞれ異なる。また、Ｘ線光学素子１４ａ～１４ｄは、出射端の内径ｄ１が小さいほど、軸長方向の長さが長く形成されている。このような形状の差異により、Ｘ線光学素子１４ａ～１４ｄのそれぞれから出射されるＸ線のサンプル表面上での照射径（スポット径）が異なる。また、Ｘ線光学素子１４ａ～１４ｄは、出射端から、出射されたＸ線が収束する焦点までの距離がそれぞれ異なる。Ｘ線光学素子１４から出射されたＸ線は、焦点の位置で試料２０の観察箇所２０ａに照射されることが望ましい。よって、それぞれのＸ線光学素子１４ａ～１４ｄの焦点の位置に観察箇所２０ａが配置されるように試料２０が配置されるので、それぞれのＸ線光学素子１４ａ～１４ｄは、出射端から観察箇所２０ａまでの距離ＷＤ（Working Distance）が異なる。なお、出射端の内径ｄ１が小さいほど距離ＷＤは短くなる。Ｘ線光学素子１４ａ～１４ｄのそれぞれの入射端及び出射端の内径、湾曲度合及び軸長方向の長さは適宜選択できる。 Each of the X-ray optical elements 14a to 14d is formed in a shape having a different degree of curvature of the peripheral surface and a length in the axial length direction, and has an inner diameter d3 at the incident end (upper end in FIG. 8) where the X-rays enter, The inner diameter d2 of the portion differs from the inner diameter d1 of the emitting end (lower end in FIG. 8) for emitting X-rays. Further, the X-ray optical elements 14a to 14d are formed such that the smaller the inner diameter d1 of the emission end, the longer the length in the axial direction. Due to the difference in shape, the irradiation diameter (spot diameter) of the X-rays emitted from each of the X-ray optical elements 14a to 14d on the sample surface is different. The X-ray optical elements 14a to 14d have different distances from the emission end to the focal point where the emitted X-rays converge. It is desirable that the X-rays emitted from the X-ray optical element 14 are applied to the observation location 20a of the sample 20 at the focal position. Therefore, since the sample 20 is arranged so that the observation point 20a is arranged at the focal position of each X-ray optical element 14a to 14d, each X-ray optical element 14a to 14d is connected to the observation point 20a from the emission end. The distance WD (Working Distance) is different. The smaller the inner diameter d1 of the emitting end, the shorter the distance WD. The inner diameter, the degree of curvature, and the length in the axial length direction of each of the entrance and exit ends of the X-ray optical elements 14a to 14d can be appropriately selected.
　実施形態３の光学素子ユニット１０においても、Ｘ線光学素子１４は、光学素子切替ステージ１０ａに設けられた挿通孔１０ｂに挿通されて光学素子切替ステージ１０ａに取り付けられる。図７に示す例では、右側（手前側）の挿通孔１０ｂには、ミラー１２に近い左側の位置に、出射端の内径ｄ１が最小で軸長方向の長さが最長のＸ線光学素子１４ａが挿通され、右側の位置に、出射端の内径ｄ１が２番目に小さく２番目に長いＸ線光学素子１４ｂが挿通されている。また、左側（奥側）の挿通孔１０ｂには、ミラー１２に近い左側の位置に、出射端の内径ｄ１が３番目に小さく３番目に長いＸ線光学素子１４ｃが挿通され、右側の位置に、出射端の内径ｄ１が最大で最も短いＸ線光学素子１４ｄが挿通されている。このように、Ｘ線光学素子１４ａ～１４ｄは、出射端の内径ｄ１が小さい順にミラー１２から近い位置に配置される。その結果、Ｘ線光学素子１４ａ～１４ｄは、距離ＷＤが短い順にミラー１２から近い位置に配置される。 Also in the optical element unit 10 of the third embodiment, the X-ray optical element 14 is inserted into the insertion hole 10b provided in the optical element switching stage 10a and attached to the optical element switching stage 10a. In the example shown in FIG. 7, the right (front) insertion hole 10 b has an X-ray optical element 14 a having a minimum inner diameter d 1 at the exit end and a longest length in the axial direction at a position on the left side near the mirror 12. Is inserted, and the X-ray optical element 14b having the second smallest inner diameter d1 at the emission end and the second longest is inserted at the right position. Further, the X-ray optical element 14c having the third smallest inner diameter d1 at the emission end and the third longest X-ray optical element 14c is inserted into the left side (back side) insertion hole 10b at a position on the left side close to the mirror 12. The X-ray optical element 14d having the shortest inner diameter d1 at the emission end is inserted. Thus, the X-ray optical elements 14a to 14d are arranged at positions closer to the mirror 12 in ascending order of the inner diameter d1 of the emission end. As a result, the X-ray optical elements 14a to 14d are arranged at positions closer to the mirror 12 in order of increasing distance WD.
　このような構成の実施形態３の光学素子ユニット１０は、実施形態１と同様の状態で真空箱１内に収納される。また、実施形態３の光学素子ユニット１０が真空箱１に収納されたＸ線分析装置は、実施形態１と同様の手順及び処理によって、試料２０にＸ線を照射し、試料２０から生じる蛍光Ｘ線を検出する。よって、実施形態３においても、実施形態１と同様の効果が得られる。例えば、実施形態３の光学素子ユニット１０において、切替ステージ駆動部６５によって光学素子切替ステージ１０ａが移動可能な二方向のうちの一方向（具体的には、図２Ｂ中のＸ方向）に沿って、出射端の内径ｄ１が小さいＸ線光学素子１４ａ，１４ｂがミラー１２と並べて配置される。よって、ミラー１２に対して試料２０の観察箇所２０ａを位置合せした後に、光学素子ユニット１０をＸ方向にのみ移動させることにより、観察箇所２０ａに対してＸ線光学素子１４ａ，１４ｂを位置合せすることができる。また、光学素子ユニット１０が二方向に移動できるので、観察箇所２０ａに対するＸ線光学素子１４ｃ，１４ｄの位置合せも容易にかつ精度良く行うことができる。また、各Ｘ線光学素子１４は、Ｘ線検出器４に近い位置に、軸長方向の長さが短いＸ線光学素子１４ｃ，１４ｄが配置される。これにより、光学素子ユニット１０をＸ線検出器４側に移動させた場合であっても、各Ｘ線光学素子１１がＸ線検出器４に接触することを回避できる。 The optical element unit 10 of the third embodiment having such a configuration is housed in the vacuum box 1 in the same state as that of the first embodiment. Further, the X-ray analyzer in which the optical element unit 10 of Embodiment 3 is housed in the vacuum box 1 irradiates the sample 20 with X-rays by the same procedure and processing as in Embodiment 1, and generates fluorescence X generated from the sample 20. Detect lines. Therefore, also in Embodiment 3, the same effect as in Embodiment 1 can be obtained. For example, in the optical element unit 10 of Embodiment 3, the optical element switching stage 10a can be moved by the switching stage driving unit 65 along one direction (specifically, the X direction in FIG. 2B). The X-ray optical elements 14a and 14b having a small inner diameter d1 at the emission end are arranged side by side with the mirror 12. Therefore, after aligning the observation portion 20a of the sample 20 with respect to the mirror 12, the X-ray optical elements 14a and 14b are aligned with respect to the observation portion 20a by moving the optical element unit 10 only in the X direction. be able to. Further, since the optical element unit 10 can move in two directions, the alignment of the X-ray optical elements 14c and 14d with respect to the observation location 20a can be easily and accurately performed. In addition, each X-ray optical element 14 is arranged with X-ray optical elements 14 c and 14 d having a short length in the axial length direction at a position close to the X-ray detector 4. Thereby, even if it is a case where the optical element unit 10 is moved to the X-ray detector 4 side, it can avoid that each X-ray optical element 11 contacts the X-ray detector 4. FIG.
　実施形態３のＸ線光学素子１４は、上述した実施形態２のＸ線分析装置の光学素子ユニット１０にも適用できる。Ｘ線光学素子１４は、図６に示したようにＸ方向に１つ、Ｙ方向に３つ並んで配置されてもよい。Ｘ線光学素子１４は、出射端の内径ｄ１が最小であり、スポット位置（試料２０の観察箇所２０ａ）までの距離ＷＤが最短のＸ線光学素子１４ａとミラー１２とが、上から見た場合にＸ方向に並んで配置されていればよい。 The X-ray optical element 14 of Embodiment 3 can also be applied to the optical element unit 10 of the X-ray analyzer of Embodiment 2 described above. As shown in FIG. 6, one X-ray optical element 14 may be arranged side by side in the X direction and three in the Y direction. When the X-ray optical element 14 is viewed from above, the X-ray optical element 14a and the mirror 12 having the shortest inner diameter d1 at the emission end and the shortest distance WD to the spot position (the observation position 20a of the sample 20) are viewed from above. Need only be arranged side by side in the X direction.
　今回開示された実施の形態はすべての点で例示であって、制限的なものでは無いと考えられるべきである。本発明の範囲は、上記した意味では無く、請求の範囲によって示され、請求の範囲と均等の意味及び範囲内でのすべての変更が含まれることが意図される。 It should be considered that the embodiment disclosed this time is illustrative in all respects and not restrictive. The scope of the present invention is defined not by the above-described meaning but by the scope of claims, and is intended to include all modifications within the meaning and scope equivalent to the scope of claims.
　３　Ｘ線管
　４　Ｘ線検出器（検出部）
　５　観察部
　１０　光学素子ユニット
　１２　ミラー
　２０　試料
　６５　切替ステージ駆動部
　１０ａ　光学素子切替ステージ（保持部）
　１１ａ～１１ｄ　Ｘ線光学素子（放射線光学素子）
　１２ａ　ミラーホルダー（ミラー保持部）
　１４ａ～１４ｄ　Ｘ線光学素子（放射線光学素子）
 
  3 X-ray tube 4 X-ray detector (detection unit)
DESCRIPTION OF SYMBOLS 5 Observation part 10 Optical element unit 12 Mirror 20 Sample 65 Switching stage drive part 10a Optical element switching stage (holding part)
11a to 11d X-ray optical element (radiation optical element)
12a Mirror holder (mirror holding part)
14a to 14d X-ray optical element (radiation optical element)

Claims (10)

  1. 　試料に照射される放射線を絞る放射線光学素子と、前記試料への放射線の照射によって生じる放射線を検出する検出部と、前記試料に対向配置されたミラーと、前記放射線光学素子及びミラーを保持する保持部とを備える放射線検出装置において、
    　前記保持部を、前記試料に照射される放射線の照射方向に交差する面内で、交差する二方向に移動させる駆動部を更に備え、
    　前記保持部は、前記放射線の出射径が異なる複数の前記放射線光学素子を保持しており、前記ミラー及び最小の出射径の前記放射線光学素子を前記二方向のうちの一方向に並べて保持している
    　ことを特徴とする放射線検出装置。     A radiation optical element that narrows down the radiation applied to the sample, a detection unit that detects radiation generated by the irradiation of the sample with radiation, a mirror disposed opposite to the sample, and a holder that holds the radiation optical element and the mirror A radiation detection apparatus comprising:
    A drive unit that moves the holding unit in two intersecting directions within a plane that intersects the irradiation direction of the radiation irradiated on the sample;
    The holding unit holds a plurality of the radiation optical elements having different radiation emission diameters, and holds the mirror and the radiation optical element having the smallest emission diameter side by side in one of the two directions. A radiation detection apparatus characterized by comprising:
  2. 　前記保持部は、出射径が小さい前記放射線光学素子を、前記ミラーから前記二方向に沿った距離が短い位置で保持していることを特徴とする請求項１に記載の放射線検出装置。 2. The radiation detection apparatus according to claim 1, wherein the holding unit holds the radiation optical element having a small emission diameter at a position where the distance along the two directions from the mirror is short.
  3. 　試料に照射される放射線を絞る放射線光学素子と、前記試料への放射線の照射によって生じる放射線を検出する検出部と、前記試料に対向配置されたミラーと、前記放射線光学素子及びミラーを保持する保持部とを備える放射線検出装置において、
    　前記保持部を、前記試料に照射される放射線の照射方向に交差する面内で、交差する二方向に移動させる駆動部を更に備え、
    　前記保持部は、前記試料の表面での前記放射線の照射径が異なる複数の前記放射線光学素子を保持しており、前記ミラー及び前記照射径が最小の前記放射線光学素子を前記二方向のうちの一方向に並べて保持している
    　ことを特徴とする放射線検出装置。     A radiation optical element that narrows down the radiation applied to the sample, a detection unit that detects radiation generated by the irradiation of the sample with radiation, a mirror disposed opposite to the sample, and a holder that holds the radiation optical element and the mirror A radiation detection apparatus comprising:
    A drive unit that moves the holding unit in two intersecting directions within a plane that intersects the irradiation direction of the radiation irradiated on the sample;
    The holding unit holds a plurality of the radiation optical elements having different irradiation diameters of the radiation on the surface of the sample, and the mirror and the radiation optical element having the smallest irradiation diameter are arranged in the two directions. A radiation detector characterized by being held side by side in one direction.
  4. 　前記放射線光学素子は、筒体であり、軸長方向の中央部の内径が両端部の内径よりも大きい形状を有し、
    　前記保持部は、前記放射線を出射する一端部の内径が最小の前記放射線光学素子を前記ミラーと共に前記二方向のうちの一方向に並べて保持している
    　ことを特徴とする請求項３に記載の放射線検出装置。     The radiation optical element is a cylinder, and has a shape in which the inner diameter of the central portion in the axial length direction is larger than the inner diameters of both end portions,
    The said holding | maintenance part arrange | positions and hold | maintains the said radiation optical element with the smallest internal diameter of the one end part which emits the said radiation with the said mirror in one direction of the said two directions. Radiation detection device.
  5. 　前記保持部は、前記放射線を出射する出射端から前記試料までの距離が最小の前記放射線光学素子を前記ミラーと共に前記二方向のうちの一方向に並べて保持している
    　ことを特徴とする請求項３に記載の放射線検出装置。     The holding unit holds the radiation optical element having a minimum distance from the emission end that emits the radiation to the sample along with the mirror in one of the two directions. 3. The radiation detection apparatus according to 3.
  6. 　前記保持部は、前記照射径が小さい前記放射線光学素子を、前記ミラーから前記二方向に沿った距離が短い位置で保持していることを特徴とする請求項３から５までのいずれかひとつに記載の放射線検出装置。 The said holding | maintenance part hold | maintains the said radiation optical element with the said small irradiation diameter in the position where the distance along the said 2 direction from the said mirror is short, It is any one of Claim 3-5 characterized by the above-mentioned. The radiation detection apparatus described.
  7. 　前記放射線光学素子は、前記二方向のそれぞれに複数ずつ並んで配置されていることを特徴とする請求項１から６までのいずれかひとつに記載の放射線検出装置。 The radiation detecting device according to any one of claims 1 to 6, wherein a plurality of the radiation optical elements are arranged side by side in each of the two directions.
  8. 　前記放射線光学素子は筒体であり、
    　前記保持部は、軸長方向の長さが短い前記放射線光学素子を前記検出部に近い位置で保持している
    　ことを特徴とする請求項１から７までのいずれかひとつに記載の放射線検出装置。     The radiation optical element is a cylinder,
    The radiation detection apparatus according to any one of claims 1 to 7, wherein the holding unit holds the radiation optical element having a short axial length in a position close to the detection unit. .
  9. 　前記ミラーは、前記試料の光像を、所定位置に配置された観察部へ導くように配置されていることを特徴とする請求項１から８までのいずれかひとつに記載の放射線検出装置。 The radiation detection apparatus according to any one of claims 1 to 8, wherein the mirror is arranged to guide an optical image of the sample to an observation unit arranged at a predetermined position.
  10. 　前記放射線光学素子は、前記放射線の照射方向を軸長方向として配置された筒体であり、
    　前記保持部は、板状に形成されており、
    　前記保持部は、厚み方向に穿設された複数の長孔を有しており、
    　前記長孔は、前記二方向のうちの一方向を長軸方向として、他方向に並べて設けられており、
    　前記保持部は、前記長孔に挿通された前記放射線光学素子を保持しており、
    　前記保持部は、前記放射線光学素子の軸長方向に延設されたミラー保持部を有しており、
    　前記ミラー保持部の延設端部には、前記ミラーが、反射面を前記他方向に平行で、かつ、前記放射線光学素子の軸長方向に対して傾いた状態で取り付けられており、
    　前記最小の出射径の放射線光学素子又は前記照射径が最小の放射線光学素子は、前記ミラーから前記一方向に近い位置に配置されている
    　ことを特徴とする請求項１から９までのいずれかひとつに記載の放射線検出装置。
     
          The radiation optical element is a cylindrical body arranged with the irradiation direction of the radiation as an axial length direction,
    The holding portion is formed in a plate shape,
    The holding portion has a plurality of long holes drilled in the thickness direction,
    The long hole is provided side by side in the other direction, with one of the two directions as the major axis direction,
    The holding unit holds the radiation optical element inserted through the long hole,
    The holding part has a mirror holding part extended in the axial length direction of the radiation optical element,
    The mirror is attached to the extended end of the mirror holding portion in a state where the reflecting surface is parallel to the other direction and inclined with respect to the axial length direction of the radiation optical element,
    The radiation optical element having the smallest emission diameter or the radiation optical element having the smallest irradiation diameter is disposed at a position close to the one direction from the mirror. The radiation detection apparatus according to 1.

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