JP2020085826A - Fluorescent x-ray analysis system, fluorescent x-ray analyzer and fluorescent x-ray analysis method - Google Patents

Abstract

To provide a fluorescent X-ray analysis system, a fluorescent X-ray analyzer and a fluorescent X-ray analysis method which are capable of specifying a measurement position of a sample while realizing high-accuracy measurement.SOLUTION: An imaging part 20 is arranged on the opposite side from an X-ray source 7 and a detector 8 with a sample mount 2 laid between them, and acquires a first to fourth images before measurement. The first image is the entire image of an opening 4, the second image is the entire image of surface SA, and the third image is the entire image of a rear face SB. The fourth image is the entire image of the rear face SB in the state where the sample S is mounted on the sample mount 2 such that a measurement position is exposed from the opening 4. An information processor 14 specifies the position of the opening 4 on the surface SA in the state where the sample S is mounted on the sample mount 2 such that the measurement position is exposed from the opening 4 on the basis of the first to fourth images acquired by the imaging part 20, and creates a composite image formed by composing the entire image of the surface SA and a contour image of the opening 4 on the basis of the specified position of the opening 4.SELECTED DRAWING: Figure 1

Description

The present invention relates to a fluorescent X-ray analysis system, a fluorescent X-ray analysis device, and a fluorescent X-ray analysis method.

The fluorescent X-ray analysis is to analyze the constituent elements of the sample by irradiating the sample with X-rays and measuring the fluorescent X-rays emitted from the sample. In order to facilitate the identification of measurement results, an X-ray fluorescence analyzer configured to acquire image data of the entire sample and measurement points of the sample and manage the acquired image data and the measurement results in association with each other. It has been proposed (see, for example, JP 2009-25241 A (Patent Document 1)). In such a fluorescent X-ray analyzer, the imaging device is configured to image the measurement position of the sample through the opening formed in the sample stage in order to acquire the image data of the measurement position of the sample.

JP, 2009-25241, A

In recent years, there has been an increasing demand for higher sensitivity in fluorescent X-ray analysis, and accordingly, there is an increasing demand for improvement in measurement accuracy of an X-ray fluorescence analyzer. As one of the countermeasures, in the fluorescent X-ray analyzer, each of the X-ray source that irradiates the measurement position with X-rays and the detector that detects the fluorescent X-rays generated at the measurement position, It is being arranged closer to the opening).

However, when the X-ray source and the detector are arranged close to the opening, a part of the opening may overlap with the X-ray source and the detector in a plan view of the sample stage viewed from the imaging device side. In such a case, it is difficult for the imaging device to observe the measurement position of the sample because the imaging device is prevented from capturing the measurement position of the sample.

Further, in the above device configuration, even if the image of the measurement position of the sample can be acquired by the imaging device, depending on the sample, even when the image of the measurement position acquired is referred to, any part of the entire sample was measured. There is a concern that it is not possible to easily identify whether it is the one.

In addition, in Patent Document 1, the imaging device is configured to acquire image data of the entire sample in addition to image data of the measurement position of the sample, and both the image data of the entire sample and the image data of the measurement position of the sample are obtained. The identifier is managed in association with the measurement result of the measuring device. According to this, although it becomes easy to distinguish the measurement result among a plurality of samples, there is a concern that it is still difficult to specify the measurement position for each sample. For example, when a plurality of measurement points are provided for one sample, the image data of the entire sample corresponding to the image data of each measurement point are common to each other, and it is easy to identify the measurement position. Not.

The present invention has been made to solve such a problem, and an object thereof is to provide a fluorescent X-ray analysis system capable of specifying a measurement position of a sample while realizing highly accurate measurement, An object of the present invention is to provide a fluorescent X-ray analysis device and a fluorescent X-ray analysis method.

According to one aspect of the present invention, an X-ray fluorescence analysis system is configured to analyze a constituent element of a surface of a sample having a front surface and a back surface opposite to the front surface. The fluorescent X-ray analysis system irradiates the surface of the sample with X-rays and controls the fluorescent X-ray analysis device that measures the fluorescent X-rays generated from the surface and the fluorescent X-ray analysis device. And an information processing device for processing the information of. The X-ray fluorescence analyzer has an opening formed therein and a sample table on which a sample is placed so that the measurement position on the surface is exposed from the opening during measurement, and an X-ray that irradiates the measurement position through the opening with X-rays. The source, the detector for detecting the fluorescent X-rays generated from the measurement position, and the sample stand are arranged on the opposite side of the X-ray source and the detector so as to acquire the first to fourth images before the measurement. And an imaging unit configured as described above. The first image is a whole image of the opening in a state where the sample is not placed on the sample table. The second image is an entire image of the front surface in a state where the sample is placed on the sample table so that the back surface is exposed from the opening. The third image is an entire image of the back surface in a state where the sample is placed on the sample table so that the front surface is exposed from the opening. The fourth image is an entire image of the back surface in a state where the sample is placed on the sample table so that the measurement position is exposed from the opening. The information processing device, based on the first to fourth images acquired by the imaging unit, the position of the opening on the surface in the state where the sample is placed on the sample table so that the measurement position is exposed from the opening. And is configured to generate a combined image in which the entire image of the surface and the outline image of the opening are combined based on the specified position of the opening in the surface.

According to the fluorescent X-ray analysis system described above, the image pickup unit is arranged on the opposite side of the X-ray source and the detector with the sample stand interposed therebetween, so that the X-ray source and the detector can be arranged without considering the arrangement of the image pickup unit. , Can be placed closer to the opening of the sample table. Therefore, the sensitivity of the fluorescent X-ray analysis can be increased. In addition, a whole image of the front and back surfaces of the sample and the opening is acquired by the imaging unit, and image processing is performed on these image data to generate a composite image indicating the position of the opening on the surface of the sample on software. You can According to this, since the measurement position of the sample can be observed based on the generated composite image before the measurement, the measurement position can be adjusted. Further, according to the generated composite image, when managing the measurement result of the fluorescent X-ray analysis, it is possible to easily specify which part of the surface of the sample has been measured. As a result, it is possible to provide a fluorescent X-ray analysis system capable of specifying the measurement position of the sample while realizing highly accurate measurement.

Preferably, the information processing device (1) generates a contour image of the opening from the first image, and generates position information indicating the position of the opening on the sample table based on the contour image of the opening, ( 2) A contour image of the front surface is generated from the second image, (3) A contour image of the back surface is generated from the third image, and (4) A fourth contour image is generated based on the contour image of the back surface and the positional information of the opening. The positional relationship between the back surface and the opening in the image is derived, and (5) based on the positional relationship between the back surface and the opening and the symmetry between the front surface contour image and the back surface contour image, Specify the position.

According to this, the information processing device can generate a composite image indicating the position of the opening on the front surface of the sample, based on the entire image of the front surface and the back surface of the sample and the opening acquired by the imaging unit.

Preferably, the information processing device (1) generates a contour image of the opening from the first image, and generates position information indicating the position of the opening on the sample table based on the contour image of the opening, ( 2) A front surface characteristic portion is extracted from the second image, (3) A back surface characteristic portion is extracted from the third image, and (4) A fourth surface portion is extracted based on the back surface characteristic portion and the opening position information. The positional relationship between the back surface and the opening in the image is derived, and (5) based on the positional relationship between the back surface and the opening and the symmetry between the characteristic portion of the front surface and the characteristic portion of the back surface, Specify the position.

According to this, the information processing device can generate a composite image indicating the position of the opening on the front surface of the sample, based on the entire image of the front surface and the back surface of the sample and the opening acquired by the imaging unit.

Preferably, the X-ray fluorescence analysis system further includes a display device that displays an image according to the information transmitted from the information processing device. The display device displays the composite image before the measurement. According to this, since the user can observe the measurement position of the sample based on the generated composite image before the measurement, the measurement position can be adjusted.

Preferably, the display device displays the measurement result by the fluorescent X-ray analysis device and the composite image side by side during the measurement. According to this, during measurement, the user can easily grasp which part of the entire sample is being measured.

Preferably, the information processing device has a storage unit, and stores the result of measurement by the fluorescent X-ray analysis device in association with the image data of the composite image in the storage unit. According to this, when managing the measurement result of the fluorescent X-ray analysis, it becomes possible to easily specify which part of the surface of the sample was measured.

Preferably, the information processing device has a first conversion table in which the entire images of the surfaces of a plurality of types of samples are associated with the sample names. The information processing device refers to the first conversion table to add the sample name corresponding to the second image acquired by the imaging unit to the image data of the composite image.

According to this, the convenience of the user when managing the measurement result of the fluorescent X-ray analysis can be enhanced.

Preferably, the information processing device has a second conversion table in which a plurality of measurement positions and measurement position names are associated with each other for each sample. The information processing device refers to the second conversion table to add the measurement position name corresponding to the measurement position exposed from the opening to the image data of the composite image.

According to this, the convenience of the user when managing the measurement result of the fluorescent X-ray analysis can be enhanced.

According to another aspect of the present invention, there is provided a fluorescent X-ray analysis device for analyzing constituent elements on a surface of a sample having a front surface and a back surface opposite to the front surface, the sample table, an X-ray source, and a detector. , And an imaging unit. An opening is formed in the sample table, and the sample is placed so that the measurement position on the surface is exposed from the opening during measurement. The X-ray source irradiates the measurement position with X-rays through the opening. The detector detects the fluorescent X-ray generated from the measurement position. The imaging unit is arranged on the opposite side of the X-ray source and the detector with the sample table in between, and is configured to acquire the first to fourth images before measurement. The first image is a whole image of the opening in a state where the sample is not placed on the sample table. The second image is an entire image of the front surface in a state where the sample is placed on the sample table so that the back surface is exposed from the opening. The third image is an entire image of the back surface in a state where the sample is placed on the sample table so that the front surface is exposed from the opening. The fourth image is an entire image of the back surface in a state where the sample is placed on the sample table so that the measurement position is exposed from the opening.

According to the fluorescent X-ray analyzer, the image pickup unit is arranged on the opposite side of the X-ray source and the detector with the sample stand interposed therebetween, so that the X-ray source and the detector can be arranged without considering the arrangement of the image pickup unit. , Can be placed closer to the opening 4 of the sample table. Therefore, the sensitivity of the fluorescent X-ray analysis can be increased. Also, by acquiring the entire image of the front and back surfaces of the sample and the opening by the imaging unit, image processing of these image data is performed, and a composite image showing the position of the opening on the surface of the sample is generated by software. can do.

According to another aspect of the present invention, there is provided a fluorescent X-ray analysis method for analyzing constituent elements on a front surface of a sample having a front surface and a back surface opposite to the front surface, wherein first to fourth images are captured before measurement. The step of performing. The first image is an overall image of the opening in a state where the sample is not placed on the sample table having the opening. The second image is an entire image of the front surface in a state where the sample is placed on the sample table so that the back surface is exposed from the opening. The third image is an entire image of the back surface in a state where the sample is placed on the sample table so that the front surface is exposed from the opening. The fourth image is an entire image of the back surface in a state where the sample is placed on the sample table so that the measurement position on the front surface is exposed from the opening. The fluorescent X-ray analysis method is based on the first to fourth images acquired in the imaging step, and the opening on the surface in the state where the sample is placed on the sample table so that the measurement position is exposed from the opening. Specifying the position of the part, and generating a combined image that combines the entire image of the surface and the outline image of the opening based on the specified position of the opening, and displaying the combined image on a display device. Is further provided.

According to the X-ray fluorescence analysis method described above, the entire image of the front surface, the back surface, and the opening of the sample is acquired by the imaging unit, and the image data is subjected to image processing to synthesize the position of the opening on the surface of the sample. The image can be generated in software. According to this, since the measurement position of the sample can be observed based on the generated composite image before the measurement, the measurement position can be adjusted. Further, according to the generated composite image, when managing the measurement result of the fluorescent X-ray analysis, it is possible to easily specify which part of the surface of the sample has been measured. Further, since the image pickup unit can be arranged on the opposite side of the X-ray source and the detector with the sample stage interposed therebetween, the X-ray source and the detector can be arranged in the opening of the sample stage without considering the arrangement of the image pickup unit. Can be placed closer to. Therefore, the sensitivity of the fluorescent X-ray analysis can be increased. As a result, it is possible to provide a fluorescent X-ray analysis system capable of specifying the measurement position of the sample while realizing highly accurate measurement.

Preferably, the fluorescent X-ray analysis method irradiates the measurement position with X-rays through the opening at the time of measurement, and detects the fluorescent X-rays generated from the measurement position, and the measurement result by the detection step and the image data of the combined image. And a step of storing and are associated with each other.

In this way, when managing the measurement result of the fluorescent X-ray analysis, it becomes possible to easily specify which part of the surface of the sample has been measured.

Preferably, in the step of generating the composite image, (1) a contour image of the opening is generated from the first image, and position information indicating a position of the opening on the sample table is generated based on the contour image of the opening. (2) Generate a front face contour image from the second image, (3) Generate a back face contour image from the third image, and (4) Based on the back face contour image and position information of the opening. Then, the positional relationship between the back surface and the opening portion in the fourth image is derived, and (5) the front surface based on the positional relationship between the back surface and the opening portion and the symmetry between the front surface contour image and the back surface contour image. The position of the opening in is specified.

By doing so, a composite image showing the position of the opening on the surface of the sample can be generated based on the entire image of the front surface and the back surface of the sample and the opening acquired by the imaging unit.

Preferably, in the step of generating the composite image, (1) a contour image of the opening is generated from the first image, and position information indicating a position of the opening on the sample table is generated based on the contour image of the opening. Then, (2) a front surface characteristic portion is extracted from the second image, (3) a back surface characteristic portion is extracted from the third image, and (4) based on position information of the back surface characteristic portion and the opening. , And the positional relationship between the back surface and the opening portion in the fourth image is derived, and (5) based on the positional relationship between the back surface and the opening portion and the symmetry between the front surface characteristic portion and the back surface characteristic portion, Identify the position of the opening.

According to this, the information processing device can generate a composite image indicating the position of the opening on the front surface of the sample, based on the entire image of the front surface and the back surface of the sample and the opening acquired by the imaging unit.

According to the present invention, it is possible to provide an X-ray fluorescence analysis system, an X-ray fluorescence analysis apparatus, and an X-ray fluorescence analysis method capable of specifying the measurement position of a sample while realizing highly accurate measurement. ..

It is a figure which shows roughly the whole structure of the fluorescent X-ray-analysis system provided with the fluorescent X-ray-analysis apparatus which concerns on embodiment of this invention. It is a figure which shows schematically the structure of the information processing apparatus shown in FIG. It is a figure which shows roughly the whole structure of a general fluorescent X-ray-analysis apparatus. It is a figure which shows the positional relationship of the imaging part and the sample in the fluorescent X-ray analysis apparatus which concerns on this Embodiment. It is a block diagram showing the composition of the image processing function in an information processor. It is a figure which shows the structural example of a sample name conversion table. It is a figure which shows the structural example of a measurement position name conversion table. It is a figure which shows the structural example of product image DB. 6 is a flowchart for explaining image processing in the data processing unit. 6 is a flowchart for explaining image processing in the data processing unit. 11 is a flowchart for explaining the process of step S16 of FIG. It is a figure which shows an example of the whole image of an opening part. It is a figure which shows the 1st example of a surface image (FIG. 13(A)), and the surface outline image (FIG. 13(B)) produced|generated from the said image. It is a figure which shows the 1st example (FIG.14(A)) of a back surface image, and the outline image (FIG.14(B)) of the back surface produced from the said image. A first example of the backside image (FIG. 15A), a backside contour image (FIG. 15B) generated from the image data, and a frontside contour image and an opening contour image (FIG. 15C) are displayed. FIG. It is a figure which shows the composite image of the surface image of a sample, and the outline image of an opening part. It is a figure which shows the example of a display of the display apparatus during measurement. It is a figure which shows the 2nd example of a surface image (FIG. 18(A) and the characteristic image of the surface generated from the said image (FIG. 18(B)). It is a figure which shows the 2nd example (FIG. 19(A)) of a back surface image, and the characteristic image (FIG. 19(B)) of the back surface produced from the said image. A second example of the back surface image (FIG. 21(A), back surface characteristic image (FIG. 21(B)) generated from the image data, and front surface characteristic image and opening contour image (FIG. 21(C)) FIG. It is a figure which shows the composite image of the surface image of a sample, and the outline image of an opening part.

Embodiments of the present invention will be described below in detail with reference to the drawings. In the following, the same or corresponding parts in the drawings will be denoted by the same reference numerals, and the description thereof will not be repeated in principle.

[System configuration]
FIG. 1 is a diagram schematically showing an overall configuration of a fluorescent X-ray analysis system including an X-ray fluorescence analyzer according to an embodiment of the present invention.

Referring to FIG. 1, a fluorescent X-ray analysis system 100 includes a fluorescent X-ray analysis device 10, an information processing device 14, and a display device 16.

The fluorescent X-ray analyzer 10 is an energy dispersive X-ray Fluorescence Spectrometer (EDX) fluorescent X-ray analyzer that measures the concentration of elements contained in the sample S, and includes a sample chamber 1 and a measurement chamber 5. Composed by. The space inside the sample chamber 1 and the measurement chamber 5 is airtightly surrounded by the housing 3, and the inside can be kept in a vacuum if necessary.

The sample chamber 1 has a sample table 2 at the bottom. A circular opening 4 is formed in the sample table 2. The sample S is placed on the sample table 2 so as to cover the opening 4. The sample S has a front surface SA having a measurement position and a back surface SB located on the opposite side of the front surface SA. At the time of measurement, the sample S is placed on the sample table 2 so that the measurement position of the surface SA is exposed from the opening 4.

The measurement chamber 5 is provided with an X-ray tube 7 and a detector 8 on its wall surface 6. The X-ray tube 7 irradiates the sample S with primary X-rays. The X-ray tube 7 has a filament that emits thermoelectrons and a target that converts the thermoelectrons into predetermined primary X-rays and emits them. The primary X-ray emitted from the X-ray tube 7 is applied to the measurement position of the sample S through the opening 4. The secondary X-rays (fluorescent X-rays) emitted from the sample S enter the detector 8 and the energy and intensity of the fluorescent X-rays are measured. The X-ray tube 7 corresponds to an example of “X-ray source”, and the detector 8 corresponds to an example of “detector”.

A shutter 9, a primary X-ray filter 11, and a collimator 13 are installed in the measurement chamber 5. The shutter 9, the primary X-ray filter 11, and the collimator 13 are configured to be slidable in a direction perpendicular to the paper surface of FIG. 1 by a drive mechanism 12.

The shutter 9 is made of an X-ray absorbing material such as lead, and can be inserted into the optical path of the primary X-ray to shield the primary X-ray when necessary.

The primary X-ray filter 11 is formed of a metal foil selected according to the purpose and attenuates the background component of the primary X-ray emitted from the X-ray tube 7 to obtain the required characteristic X-ray. To improve the S/N ratio. In an actual device, a plurality of primary X-ray filters 11 formed of different kinds of metals are used, and the primary X-ray filter 11 selected according to the purpose is driven by the drive mechanism 12 to generate the primary X-ray filters 11. It is inserted in the optical path of the line.

The collimator 13 is an aperture having a circular opening in the center, and determines the size of the beam of the primary X-ray that irradiates the sample S. The collimator 13 is formed of an X-ray absorbing material such as lead or brass. In an actual device, a plurality of collimators 13 having different opening diameters are arranged side by side in a direction perpendicular to the paper surface of FIG. 1, and the collimator 13 selected according to the purpose is driven by the drive mechanism 12 to generate the primary X-rays. It is inserted on the beam line.

An imaging unit 20 is installed above the sample chamber 1. Specifically, the imaging unit 20 is arranged on the opposite side of the X-ray tube 7 and the detector 8 with the sample table 2 interposed therebetween. Therefore, at the time of measurement, the imaging unit 20 is arranged so as to face the back surface SB of the sample S. The image pickup unit 20 is configured to include an image pickup device divided into a plurality of pixels, such as a CMOS (Complementary Metal Oxide Semiconductor) or a CCD (Charge Coupled Device).

The image capturing section 20 can capture an entire image of the sample S placed on the sample table 2. In the example of FIG. 1, the imaging unit 20 is arranged so as to be located right above the sample S so that the sample S is imaged from directly above, but the sample S is imaged obliquely. It may be arranged so as to be offset from directly above S. The image data of the imaging unit 20 is transmitted to the information processing device 14.

The information processing device 14 is mainly configured by a CPU (Central Processing Unit) which is an arithmetic processing unit. As the information processing device 14, for example, a personal computer or the like can be used. The X-ray tube 7, the detector 8, the imaging unit 20, and the display device 16 are connected to the information processing device 14.

The information processing device 14 controls the measurement by the fluorescent X-ray analysis device 10 based on the measurement condition input by the input unit 42 described later. Specifically, the information processing device 14 controls the tube voltage, the tube current, the irradiation time, and the like in the X-ray tube 7, and drives each of the shutter 9, the primary X-ray filter 11, and the collimator 13.

The information processing device 14 also acquires the secondary X-ray detected by the detector 8 and the image data of the imaging unit 20. The information processing device 14 performs a quantitative analysis of each element based on the spectrum of the secondary X-ray detected by the detector 8. The information processing device 14 manages the image data of the imaging unit 20 in association with the measurement result and the analysis result by the fluorescent X-ray analysis device 10.

The information processing device 14 further controls the image capturing by the image capturing unit 20 and performs image processing described below to generate an image representing the measurement position on the surface SA of the sample S based on the image data from the image capturing unit 20. To generate.

The display device 16 displays an image according to the data transmitted from the information processing device 14. The display device 16 is composed of, for example, an LCD (Liquid Crystal Display) or an organic EL (Electro Luminescence). The display device 16 can display the image of the sample S captured by the image capturing unit 20 and the image generated by the information processing device 14. The display device 16 can also display the analysis result by the information processing device 14 together with identification information (product name, product number, measurement position, etc.) for identifying the sample S.

[Configuration of information processing device]
FIG. 2 is a diagram schematically showing the configuration of the information processing device 14 shown in FIG.

Referring to FIG. 2, information processing device 14 includes CPU 30 and a storage unit that stores programs and data, and is configured to operate according to the programs. The storage unit includes a ROM (Read Only Memory) 32, a RAM (Random Access Memory) 34, and an HDD (Hard Disk Drive) 38.

The ROM 32 can store the program executed by the CPU 30. The RAM 34 can temporarily store data used during execution of the program in the CPU 30, and can function as a temporary data memory used as a work area. The HDD 38 is a non-volatile storage device, and can store the measurement result by the fluorescent X-ray analysis device 10, the image data acquired by the imaging unit 20, and the information generated by the image processing of the image data. In addition to the HDD 38 or instead of the HDD 38, a semiconductor storage device such as a flash memory may be adopted.

The information processing device 14 further includes a communication interface 40, an I/O (Input/Output) interface 36, and an input unit 42. The communication interface 40 is an interface for the information processing device 14 to communicate with an external device including the fluorescent X-ray analysis device 10.

The I/O interface 36 is an interface for input to the information processing device 14 or output from the information processing device 14. As shown in FIG. 2, the I/O interface 36 is connected to the input unit 42, the display device 16 and the imaging unit 20. The input unit 42 receives an input including an instruction from the user to the information processing device 14. The input unit 42 includes a keyboard, a mouse, a touch panel integrally configured with the display screen of the display device 16, and the like, and receives measurement conditions of the sample S, an imaging instruction to the imaging unit 20, and the like.

When setting the measurement conditions, the display device 16 can display, for example, an input screen for the measurement conditions and the entire image of the sample S. During the measurement, the display device 16 can display the spectrum of the secondary X-ray detected by the detector 8 together with the image showing the measurement position of the sample S. Further, after the measurement, the display device 16 can display the analysis result by the information processing device 14 together with the image showing the measurement position of the sample S.

[Image processing in information processing device]
Next, image processing in the information processing device 14 shown in FIG. 2 will be described.

First, the configuration of a general X-ray fluorescence analyzer and its problems will be described.
FIG. 3 is a diagram schematically showing the configuration of a general fluorescent X-ray analyzer. As shown in FIG. 3, in a general X-ray fluorescence analyzer, an imaging unit 20 is installed below the measurement chamber 5 in order to observe the measurement position of the sample S before or during measurement. That is, the imaging unit 20 is arranged so as to face the surface SA of the sample S, and is configured to image the measurement position of the sample S through the opening 4 formed in the sample table 2.

Before the measurement, the user who performs the fluorescent X-ray analysis displays the image acquired by the imaging unit 20 on the display device 16, and adjusts the measurement position of the sample S while observing the image. Further, when managing the measurement result of the fluorescent X-ray, the image data of the measurement position is used as an identifier and stored and managed in association with the measurement result.

On the other hand, in recent years, there has been an increasing demand for higher sensitivity in fluorescent X-ray analysis, and accordingly, there is an increasing demand for improvement in measurement accuracy of the fluorescent X-ray analyzer. Therefore, in the fluorescent X-ray analyzer, the optical paths of the primary X-rays and the secondary X-rays are shortened by disposing the X-ray tube 7 and the detector 8 close to the opening 4. There is. According to this, it is possible to suppress a decrease in the intensity of the primary X-rays that reach the measurement position of the sample S from the X-ray tube 7 and the intensity of the secondary X-rays that reach the detector 8 from the measurement position.

However, when the X-ray tube 7 and the detector 8 are arranged close to the opening 4, a part of the opening 4 becomes the X-ray tube 7 and the detector 8 in a plan view of the sample table 2 viewed from the imaging unit 20 side. They may overlap. In such a case, since the imaging unit 20 is prevented from imaging the measurement position of the sample S, there is a concern that the measurement position of the sample S cannot be observed.

Further, in the apparatus configuration shown in FIG. 3, although the image of the measurement position of the sample S can be acquired by the imaging unit 20, the entire image of the sample S cannot be grasped from the image of the measurement position. Therefore, depending on the sample S, even if the image data stored in association with the measurement result is referred to, it is feared that which part of the sample S was not easily specified.

Therefore, in the fluorescent X-ray analysis system 100 according to the present embodiment, as shown in FIG. 1, the imaging unit 20 is installed on the opposite side of the X-ray tube 7 and the detector 8 with the sample stage 2 interposed therebetween. The configuration. FIG. 4 is a diagram showing a positional relationship between the image pickup unit 20 and the sample S in the X-ray fluorescence analyzer 10 according to the present embodiment. As shown in FIG. 4, at the time of measurement, the sample S is placed on the sample table 2 such that the surface SA is exposed from the opening 4. Therefore, the back surface SB of the sample S is located above the front surface SA.

The imaging unit 20 is arranged above the back surface SB of the sample S so as to face the back surface SB. A region RGN in the drawing indicates the image pickup range of the image pickup unit 20. The imaging range RGN of the imaging unit 20 includes the entire back surface SB of the sample S and a part of the sample table 2 around the back surface SB.

By arranging the image pickup unit 20 on the opposite side of the X-ray tube 7 and the detector 8 with the sample table 2 sandwiched in this way, the image pickup unit 20 is not blocked by the X-ray tube 7 and the detector 8 and S can be imaged. In other words, the X-ray tube 7 and the detector 8 can be arranged closer to the opening 4 without considering the arrangement of the imaging unit 20. Therefore, the sensitivity of the fluorescent X-ray analysis can be increased.

On the other hand, according to FIG. 4, the imaging unit 20 images the back surface SB of the sample S, and cannot image the measurement position of the front surface SA as in FIG. Therefore, it becomes difficult to adjust the measurement position before the measurement. Moreover, the image data cannot be used as an identifier for identifying the measurement results.

Therefore, in the information processing device 14, as described below, the image capturing unit 20 acquires images of the front surface SA and the back surface SB of the sample S and the image of the opening 4, and performs image processing on these image data, An image showing the measurement position on the surface SA of the sample S is generated by software. According to this, since the measurement position of the sample S can be observed based on the generated image before the measurement, the measurement position can be adjusted. Further, since the generated image also shows the whole image of the sample S, it is possible to easily specify which part of the surface SA of the sample S was measured when managing the measurement result of the fluorescent X-ray analysis. It will be possible.

FIG. 5 is a block diagram showing the configuration of the image processing function of the information processing device 14.
With reference to FIG. 5, the information processing device 14 has a data processing unit 50, a product image DB (database) 60, an opening information DB 62, a sample name conversion table 64, and a measurement position name conversion function as image processing functions. And a table 66. These functional configurations are realized by the CPU 30 executing the image processing program in the information processing device 14 shown in FIG.

The data processing unit 50 is a unit that performs image processing on the image data sent from the imaging unit 20, and includes an image acquisition unit 52, an extraction unit 54, a synthesis unit 56, and a classification unit 58.

The image acquisition unit 52 acquires image data generated by the imaging unit 20 imaging the front surface SA and the back surface SB of the sample S. In the following description, the entire image of the front surface SA of the sample S is also referred to as a “front image”, and the entire image of the back surface SB of the sample S is also referred to as a “rear surface image”. The image acquisition unit 52 also acquires the image data of the opening 4 generated by the imaging unit 20 imaging the sample table 2 on which the sample S is not placed.

The extraction unit 54 extracts the contour of the surface SA by applying a known image processing technique to the surface image of the sample S acquired by the image acquisition unit 52. The extraction unit 54 generates a binary image (hereinafter also referred to as a contour image) in which the pixel values of the pixels on the boundary (contour) line of the surface image are “1” and the pixel values of the other pixels are “0”. To do.

The extraction unit 54 also extracts the contour of the back surface SB by applying a known image processing technique to the back surface image of the sample S acquired by the image acquisition unit 52, and generates a contour image of the back surface SB. As a known image processing technique, for example, a contour line extraction method of detecting edges of RGB data in image data and connecting the edges to form a contour line, or another contour line extraction method may be performed.

The extraction unit 54 further extracts the contour of the opening 4 by applying a known image processing technique to the image of the opening 4 acquired by the image acquisition unit 52, and generates a contour image of the opening 4. .. The extraction unit 54 generates position information indicating the position of the opening 4 in the imaging range RGN (see FIG. 4) of the imaging unit 20 based on the generated contour image of the opening 4.

As will be described later, the position of the opening 4 is such that the imaging region RGN of the imaging unit 20 is on a two-dimensional coordinate plane defined by a first axis (X axis) and a second axis (Y axis) that are orthogonal to each other. Assuming that the coordinates can be specified by the coordinate value (unit is pixel) of this two-dimensional coordinate plane. When the opening 4 has a circular shape, the position information of the opening 4 includes, for example, the coordinate value (X0, Y0) of the center P of the opening 4 and the radius r of the opening 4.

The combining unit 56 combines a plurality of images to generate a combined image. Specifically, the combining unit 56 combines the surface image of the sample S acquired by the image acquiring unit 52 and the contour image of the opening 4 by using a known image processing technique to generate a combined image. In order to generate this composite image, the composition unit 56 determines the front surface SA and the opening based on the contour image of the front surface SA, the back surface SB and the opening 4 extracted by the extraction unit 54 and the position information of the opening 4. The relative positional relationship with 4 is specified. The combining unit 56 sends the image data of the generated combined image to the display device 16. A composite image is displayed on the display device 16.

The product image DB 60 stores the image data acquired by the image acquisition unit 52, the image data of the contour image generated by the extraction unit 54, and the image data of the combined image generated by the combining unit 56.

The classification unit 58 classifies the image data stored in the product image DB 60 by sample name. The classification unit 58 also classifies the image data classified by sample name by measurement position name in the sample. These classifications are performed by referring to the sample name conversion table 64 and the measurement position name conversion table 66 stored in advance in the HDD 38 of the information processing device 14.

The sample name conversion table 64 is a table for converting a product image into a sample name. FIG. 6 shows a configuration example of the sample name conversion table 64. In the example of FIG. 6, in the sample name conversion table 64, the product image and the sample name are associated with each other on a one-to-one basis. The product images A1, A2, A3,... Are surface images of the samples S1, S2, S3,... The classification unit 58 selects a product image that matches the surface image indicated by the image data from the sample name conversion table 64, and adds the sample name of the selected product image to the image data.

The measurement position name conversion table 66 is a table for converting a measurement position into a measurement position name. FIG. 7 shows a configuration example of the measurement position name conversion table 66. In the example of FIG. 7, the measurement position name conversion table 66 has a one-to-one correspondence between measurement positions and measurement position names for each sample. Specifically, a total of 6 measurement positions are set on the sample S1. Each measurement position is represented by a two-dimensional coordinate plane defined by the X axis and the Y axis with a reference point Q0 preset on the surface SA of the sample S1 as the origin. Measurement position names B1 to B6 are respectively associated with these six setting positions. The measurement position name given to the image data may be a number or a symbol, or may be a name such as “tip part” or “center part”.

Returning to FIG. 5, the product image DB 60 stores the image data classified by the classification unit 58. The product image DB 60 has a plurality of folders set for each sample. Each folder stores, for example, a plurality of image data such as a front surface image, a back surface image, a front surface contour image, a back surface contour image, and a composite image of the corresponding sample. FIG. 8 shows a configuration example of the product image DB 60. In the example of FIG. 8, the front surface image and the back surface image captured by the imaging unit 20, and the front surface and the back surface contour image generated by the extraction unit 54 are stored for each sample.

The opening information DB 62 stores the position information of the opening 4 generated by the extraction unit 54 (for example, the coordinate value (X0, Y0) of the center of the opening 4 and the radius r of the opening 4).

Next, the procedure of image processing in the data processing unit 50 shown in FIG. 5 will be described with reference to FIGS. 9 and 10. The image processing according to this embodiment is composed of the following processes (1) to (6).

(1) Position recognition of the opening 4 (S01, S02, S20 and FIG. 12)
First, in step S20, the sample chamber 1 is in a state in which the sample S is not placed on the sample table 2. In this state, the opening 4 is imaged by the imaging unit 20 in step S01. The data processing unit 50 acquires image data of the opening 4 from the image capturing unit 20. The entire image of the opening 4 corresponds to the “first image”.

Next, in step S02, the data processing unit 50 extracts the contour of the opening 4 by applying a known image processing technique to the image data of the opening 4, and generates a contour image of the opening 4. The data processing unit 50 generates position information of the opening 4 in the imaging range RGN of the imaging unit 20 based on the contour image of the opening 4.

FIG. 12 shows an example of the entire image of the opening 4. In FIG. 12, the rectangular imaging region RGN of the imaging unit 20 is represented by a two-dimensional coordinate plane defined by the X axis and the Y axis with one corner (the lower left corner in the example of FIG. 12) as the origin. The data processing unit 50 calculates the coordinate value (X0, Y0) and the radius r of the center P of the opening 4 on the two-dimensional coordinate plane based on the contour image of the opening 4. The calculated position information of the opening 4 is stored in the opening information DB 62.

(2) Extraction of the contour of the surface SA of the sample S (S03, S04, S21 and FIG. 13)
Next, in step S21, the sample S is placed on the sample table 2. In step S21, the sample S is placed so that the back surface SB is exposed from the opening 4. Therefore, the surface SA of the sample S faces the imaging unit 20. In this state, the surface SA of the sample S is imaged by the imaging unit 20 in step S03. The data processing unit 50 acquires image data of the surface image of the sample S from the imaging unit 20. The entire image of the surface SA corresponds to the "second image".

In step S04, the data processing unit 50 extracts a contour of the surface SA of the sample S by performing a known image processing technique on the image data of the surface image, and generates a contour image of the surface SA. FIG. 13A shows an example of the surface image, and FIG. 13B shows a contour image of the surface SA generated from the image. In FIG. 13B, the contour image of the surface SA is shown by a broken line.

(3) Outline extraction of the back surface SB of the sample S (S05, S06, S22 and FIG. 14)
Next, in step S22, the sample S placed on the sample table 2 is inverted, and the sample S is placed so that the surface SA is exposed from the opening 4. Therefore, the back surface SB faces the imaging unit 20. In this state, the back surface SB of the sample S is imaged by the imaging unit 20 in step S05. The data processing unit 50 acquires the image data of the back surface image of the sample S from the imaging unit 20. The entire image of the back surface SB corresponds to the “third image”.

In step S06, the data processing unit 50 applies a known image processing technique to the image data of the back surface image to extract the contour of the back surface SB of the sample S and generate a contour image of the back surface SB. FIG. 14A shows an example of the back surface image, and FIG. 14B shows a contour image of the back surface SB generated from the image. In FIG. 14B, the contour image of the back surface SB is shown by a broken line.

In step S07, the data processing unit 50 adds the sample name of the sample S to the image data of the front surface image of the sample S, the contour image of the front surface SA, the back surface image of the sample S, and the contour image of the back surface SB. The image is stored in the image DB 60 (see FIG. 8). Note that the image processing shown in FIG. 9 is performed before the measurement of the sample S, and the obtained image data is stored in the product image DB 60, so that it is not necessary to perform it for each measurement.

Here, comparing FIG. 13B and FIG. 14B, the contour image of the front surface SA and the contour image of the back surface SB have symmetry. Therefore, with respect to an arbitrary point on the contour line of the front surface SA, it is possible to specify one point on the contour line of the back surface SB opposite to this point. For example, FIG. 13B shows five vertices Q0 to Q4 on the contour line of the surface SA. In FIG. 14B, five vertices Q0 to Q4 are shown on the contour line of the back surface SB, corresponding to the five vertices Q0 to Q4.

According to this, by specifying an arbitrary point in the area surrounded by the contour of the surface SA, that is, an arbitrary point existing on the surface SA by the positional relationship with the vertices Q0 to Q4, this positional relationship Using, it is possible to specify a point that is present on the back surface SB facing the arbitrary point.

In the present embodiment, the data processing unit 50 uses this technique, and in the state where the sample S is placed so that the measurement position of the surface SA is exposed from the opening 4 (see FIG. 4), the imaging unit 20. The position of the opening 4 on the front surface SA of the sample S is specified based on the positional relationship between the back surface image acquired in step 1 and the opening 4. Then, the data processing unit 50 generates a surface image (that is, a composite image) showing the specified position of the opening 4 on software.

(4) Adjustment of measurement position (S07, S08, S23 and FIGS. 13 and 14)
Referring to FIG. 10, when measuring sample S, first in step S23, sample S is placed on sample table 2 with back surface SB of sample S facing imaging section 20. In this state, the back surface SB of the sample S is imaged by the imaging unit 20. The data processing unit 50 acquires the image data of the back surface image of the sample S from the imaging unit 20 in step S11.

Next, in step S12, the data processing unit 50 accesses the product image DB 60 (see FIG. 8) and searches for a back surface image that matches the back surface image acquired in step S11. In step S12, even if the acquired back side image is tilted with respect to the back side image stored in the product image DB 60, a process for rotating the back side image can be performed to search for a matching back side image. .. Then, by referring to the product image DB 60, the front surface image corresponding to the retrieved back surface image can be specified.

Next, in step S24, the measurement position of the sample S is adjusted by sliding the sample S on the sample table 2 with the back surface SB of the sample S facing the imaging unit 20.

When the data processing unit 50 acquires the image data of the back surface image of the sample S from the imaging unit 20 in step S13, the process proceeds to step S14, and the positional information of the opening 4 generated in steps S02, S04, and S06, respectively, Also, based on the contour images of the front surface SA and the back surface SB, a composite image in which the front surface image of the sample S and the contour image of the opening 4 are combined is generated.

FIG. 11 is a flowchart for explaining the process of step S14 of FIG. With reference to FIG. 11, first, in step S141, the data processing unit 50 performs a known image processing technique on the image data of the back surface image acquired from the imaging unit 20 to extract the contour of the back surface SB of the sample S. Then, the contour image of the back surface SB is generated. FIG. 15A shows an example of the back surface image, and FIG. 15B shows a contour image of the back surface SB generated from the image data. In FIG. 15B, the contour image of the back surface SB is shown by a broken line.

Next, in step S142, the data processing unit 50 specifies the position of the opening 4 on the back surface SB by superimposing the contour image of the opening 4 on the contour image of the back surface SB in the imaging region RGN of the imaging unit 20. To do. In step S152, the data processing unit 50 calculates the coordinate values of the five vertices Q0 to Q4 on the contour line of the back surface SB on the two-dimensional coordinate plane that represents the imaging region RGN. The data processing unit 50 specifies the positional relationship between the calculated coordinate values of the vertices Q0 to Q4 and the coordinate value (X0, Y0) of the center P of the opening 4.

Next, the data processing unit 50 proceeds to step S143 to identify the position of the opening 4 on the surface SA of the sample S. In step S143, the data processing unit 50 determines the front surface SA based on the positional relationship between the back surface SB and the opening 4 identified in step S142 and the symmetry between the contour image of the front surface SA and the contour image of the back surface SB. The position of the opening 4 at is specified.

FIG. 15C shows a contour image of the surface SA of the sample S and a contour image of the opening 4. In FIG. 15C, the contour image of the surface SA and the opening 4 is shown by a broken line. The vertices Q0 to Q4 on the contour line of the front surface SA shown in FIG. 15C correspond to the vertices Q0 to Q4 on the contour line of the back surface SB in FIG. 15B, respectively. The center P of the opening 4 existing on the surface SA can be specified from the positional relationship between the vertices Q0 to Q4 specified in step S142 and the center P of the opening 4.

Subsequently, the data processing unit 50 proceeds to step S144, and based on the positional relationship between the surface SA and the opening 4 specified in step S143, the surface image acquired in step S03 and the opening 4 generated in step S02. A composite image is generated by synthesizing the contour image with the. FIG. 16 shows a composite image of the surface image of the sample S and the contour image of the opening 4. The composite image of FIG. 16 is displayed on the display device 16.

According to this, the user refers to the composite image displayed on the display device 16 to measure which part of the surface SA of the sample S is exposed from the opening 4, that is, which part of the surface SA is measured. You can check if it is the position. Therefore, the user can adjust the desired measurement position on the surface SA to be exposed from the opening 4 by sliding the sample S on the sample table 2 while referring to the combined image.

(5) Display of composite image during measurement (S15 and FIGS. 16 and 17)
Next, when the fluorescent X-ray spectroscopic measurement of the sample S is started (at the time of YES determination in step S15), the data processing unit 50 causes, in step S16, the surface image of the sample S and the opening 4 generated in step S14. A composite image (see FIG. 16) with the contour image of FIG.

FIG. 17 shows a display example of the display device 16 during measurement. In the example of FIG. 17, on the display screen of the display device 16, identification information for identifying the sample S (sample name and measurement position name, etc.) and fluorescent X-ray spectroscopic measurement are arranged side by side with the composite image shown in FIG. The measurement result of is displayed. The measurement result may include, for example, the spectrum of the secondary X-ray detected by the detector 8 and the analysis result by the information processing device 14. In the example of FIG. 17, as analysis results, quantitative values for each element to be analyzed, 3σ (σ is standard deviation), and determination results are shown. The determination result is, for example, “NG” when the quantitative value of the element to be analyzed exceeds the first control standard value, and the quantitative value is lower than the second control standard value lower than the first control standard value. Is set to “OK”. When the quantitative value is equal to or more than the second management reference value and is less than or equal to the first management reference value, the determination result is “gray zone”.

(6) Storage of Measurement Result and Composite Image Next, the data processing unit 50 gives a sample name to the image data of the composite image of the surface image of the sample S and the contour image of the opening 4 in step S17. .. Specifically, the data processing unit 50 selects a product image that matches the surface image indicated by the image data from the sample name conversion table 64 (see FIG. 6), and uses the sample name of the selected product image as the image data. Give.

Then, in step S18, the data processing unit 50 gives the measurement position name to the image data of the combined image. Specifically, the data processing unit 50 selects a measurement position that matches the measurement position indicated by the image data from the measurement position name conversion table 66 (see FIG. 7) and displays the measurement position name of the selected measurement position as an image. Append to data.

Next, the data processing unit 50 stores the image data of the combined image with the sample name and the measurement position name in the product image DB 60 (see FIG. 8). The data processing unit 50 can further store, in the HDD 38, data obtained by collecting the measurement result of the fluorescent X-ray analysis and the image data. According to this, the user can easily specify which part of the surface SA of the sample S was measured by referring to the composite image when managing the measurement result of the fluorescent X-ray analysis.

As described above, according to the fluorescent X-ray analysis system according to the embodiment of the present invention, the imaging unit 20 is arranged on the opposite side of the X-ray tube 7 and the detector 8 with the sample stage 2 interposed therebetween, and The line tube 7 and the detector 8 can be arranged closer to the opening 4 of the sample table 2 without considering the arrangement of the imaging unit 20. Therefore, the sensitivity of the fluorescent X-ray analysis can be increased.

In the X-ray fluorescence analysis system according to the embodiment of the present invention, the image capturing unit 20 further acquires an image of the front surface SA and the back surface SB of the sample S and an image of the opening 4, and performs image processing on these image data. By generating an image showing the measurement position on the surface SA of the sample S on the software, the measurement position of the sample S can be observed based on the generated image before the measurement, so that the measurement position can be adjusted. Further, since the generated image also shows the whole image of the sample S, it is possible to easily specify which part of the surface SA of the sample S was measured when managing the measurement result of the fluorescent X-ray analysis. It will be possible.

[Modification]
The image processing described in the above-described embodiment can be applied to a sample whose contour is asymmetric in at least one direction of the X axis and the Y axis, but is symmetrical in two directions of the X axis and the Y axis. It is difficult to apply to samples (for example, rectangular or circular samples). In the following, as a modification of the above-described embodiment, image processing that can be applied to a sample that is symmetrical in two directions of the X axis and the Y axis will be described.

The image processing according to this modification example includes the following processes (1) to (6).
(1) Position recognition of the opening 4 (2) Extraction of the characteristic portion of the front surface SA of the sample S (3) Extraction of the characteristic portion of the back surface SB of the sample S (4) Adjustment of measurement position (5) Composite image during measurement Display (6) Saving of measurement result and composite image Since (1), (5), and (6) of the processes of (1) to (6) above are the same as the image processing according to the above-described embodiment. , Description will not be repeated. The processes (2), (3), and (4) will be described with reference to FIGS. 18 to 20.

(2) Extraction of the characteristic portion of the surface SA of the sample S (FIG. 18)
With reference to FIG. 18, the sample S is placed on the sample table 2 so that the back surface SB is exposed from the opening 4. In this state, the imaging unit 20 images the surface SA of the sample S. FIG. 18A shows an example of the surface image. The data processing unit 50 acquires the surface image data of the sample S from the imaging unit 20. The entire image of the surface SA corresponds to the "second image".

The data processing unit 50 extracts a characteristic portion of the surface SA of the sample S by applying a known image processing technique to the image data of the surface image, and generates a characteristic image of the surface SA. FIG. 18B shows a characteristic image of the surface SA. In the example of FIG. 18, a straight line (hereinafter also referred to as a characteristic line) LA is extracted from the surface image by performing Hough transform on the surface image. The image data of the characteristic image of the surface SA is stored in the product image DB (see FIG. 8) with the sample name of the sample S attached.

(3) Extraction of the characteristic portion of the back surface SB of the sample S (FIG. 19)
With reference to FIG. 19, the sample S is placed on the sample table 2 so that the surface SA is exposed from the opening 4. In this state, the back surface SB of the sample S is imaged by the imaging unit 20. FIG. 19A shows an example of the back side image. The data processing unit 50 acquires the data of the back surface image of the sample S from the imaging unit 20. The entire image of the back surface SB corresponds to the “third image”.

The data processing unit 50 extracts a characteristic portion of the back surface SB of the sample S by applying a known image processing technique to the image data of the back surface image, and generates a characteristic image of the back surface SB. FIG. 19B shows a characteristic image of the back surface SB. In the example of FIG. 19, the straight line (feature line) LB is extracted from the back side image by performing Hough conversion on the back side image. The image data of the characteristic image of the back surface SB is stored in the product image DB (see FIG. 8) with the sample name of the sample S attached.

In this modified example, with respect to an arbitrary point on the characteristic line LA of the front surface SA, one point on the characteristic line LB of the back surface SB facing this point can be specified. According to this, by identifying an arbitrary point existing on the front surface SA by a positional relationship with the characteristic line LA, a point existing on the back surface SB facing the arbitrary point by using this positional relationship. Can be specified.

(4) Adjustment of measurement position (Fig. 20, Fig. 21)
When measuring the sample S, first, the sample S is placed on the sample table 2 with the back surface SB facing the imaging unit 20. In this state, the back surface SB of the sample S is imaged by the imaging unit 20. When acquiring the image data of the back surface image of the sample S from the imaging unit 20, the data processing unit 50 accesses the product image DB 60 (see FIG. 8) and searches for the back surface image that matches the acquired back surface image. Even if the acquired back side image is tilted with respect to the back side image stored in the product image DB 60, by performing the process of rotating the back side image, the matching back side image can be searched. Then, by referring to the product image DB 60, the front surface image corresponding to the retrieved back surface image can be specified.

Next, the measurement position of the sample S is adjusted by sliding the sample S on the sample table 2 with the back surface SB of the sample S facing the imaging unit 20. Specifically, the data processing unit 50 acquires the image data of the back surface image of the sample S from the imaging unit 20. The entire image of the back surface SB corresponds to the “fourth image”. The data processing unit 50 applies a known image processing technique to the acquired image data to extract the characteristic line LB of the back surface SB of the sample S to generate a characteristic image of the back surface SB. FIG. 20B shows a characteristic image of the back surface SB generated from the back surface image of FIG. 20A.

The data processing unit 50 specifies the position of the opening 4 on the back surface SB by superimposing the contour image of the opening 4 on the characteristic image of the back surface SB in the imaging region RGN of the imaging unit 20. The data processing unit 50 calculates the coordinate value of the characteristic line LB of the back surface SB on the two-dimensional coordinate plane that represents the imaging region RGN. The data processing unit 50 specifies the positional relationship between the calculated coordinate value of the characteristic line LB and the coordinate value (X0, Y0) of the center P of the opening 4.

Next, the data processing unit 50 specifies the position of the opening 4 on the surface SA of the sample S. The data processing unit 50, based on the specified positional relationship between the back surface SB and the opening portion 4 and the symmetry between the characteristic line LA of the front surface SA and the characteristic line LB of the back surface SB, determines the opening portion 4 of the front surface SA. Specify the position.

FIG. 20C shows a characteristic image of the surface SA of the sample S and a contour image of the opening 4. In FIG. 15C, the contour image of the opening 4 is shown by a broken line. The center P of the opening 4 existing on the surface SA can be specified from the positional relationship between the characteristic line LB specified in FIG. 20B and the center P of the opening 4.

Subsequently, the data processing unit 50 generates a combined image by combining the surface image and the contour image of the opening 4 based on the specified positional relationship between the surface SA and the opening 4. FIG. 21 shows a composite image of the surface image of the sample S and the contour image of the opening 4. The combined image of FIG. 21 is displayed on the display device 16.

Also in this modification, the user refers to the composite image displayed on the display device 16 to determine which part of the surface SA of the sample S is exposed from the opening 4, that is, which part of the surface SA. It is possible to confirm whether is the measurement position. Therefore, the user can adjust the desired measurement position on the surface SA to be exposed from the opening 4 by sliding the sample S on the sample table 2 while referring to the combined image.

The embodiments disclosed this time are to be considered as illustrative in all points and not restrictive. The scope of the present invention is shown not by the above description but by the claims, and is intended to include meanings equivalent to the claims and all modifications within the scope.

DESCRIPTION OF SYMBOLS 1 sample chamber, 2 sample stage, 3 housing, 4 opening part, 5 measurement chamber, 6 wall surface, 7 X-ray tube, 8 detector, 9 shutter, 10 fluorescent X-ray analyzer, 11 primary X-ray filter, 12 Drive mechanism, 13 collimator, 14 information processing device, 16 display device, 20 imaging unit, 30 CPU, 32 ROM, 34 RAM, 36 I/O interface, 38 HDD, 40 communication interface, 42 input unit, 50 data processing unit, 52 image acquisition unit, 54 extraction unit, 56 synthesis unit, 58 classification unit, 60 product image DB, 62 opening information DB, 64 sample name conversion table, 66 measurement position name conversion table, 100 fluorescent X-ray analysis system, S sample , SA front side, SB back side.

Claims (13)

A fluorescent X-ray analysis system for analyzing constituent elements of the surface of a sample having a front surface and a back surface opposite to the front surface,
An X-ray fluorescence analyzer for irradiating the surface of the sample with X-rays and measuring the fluorescent X-rays generated from the surface;
An information processing device that controls the fluorescent X-ray analysis device and processes information from the fluorescent X-ray analysis device,
The fluorescent X-ray analyzer is
An opening is formed, and a sample table on which the sample is placed so that the measurement position on the surface is exposed from the opening during measurement,
An X-ray source for irradiating the measurement position with X-rays through the opening;
A detector for detecting fluorescent X-rays generated from the measurement position,
An imaging unit arranged on the opposite side of the X-ray source and the detector with the sample stage interposed therebetween, and configured to acquire first to fourth images before measurement;
The first image is an overall image of the opening in a state where the sample is not placed on the sample table,
The second image is an entire image of the front surface in a state in which the sample is placed on the sample table so that the back surface is exposed from the opening,
The third image is an entire image of the back surface in a state where the sample is placed on the sample table so that the front surface is exposed from the opening,
The fourth image is an overall image of the back surface in a state in which the sample is placed on the sample table so that the measurement position is exposed from the opening,
The information processing device is in a state in which the sample is placed on the sample table so that the measurement position is exposed from the opening based on the first to fourth images acquired by the imaging unit. , Specifying the position of the opening on the surface and generating a composite image that combines the entire image of the surface and the contour image of the opening based on the specified position of the opening on the surface An X-ray fluorescence analysis system configured as described in 1. The information processing device,
A contour image of the opening is generated from the first image, and position information indicating a position of the opening on the sample table is generated based on the contour image of the opening.
Generating a contour image of the surface from the second image,
Generating a contour image of the back surface from the third image,
Deriving the positional relationship between the back surface and the opening in the fourth image based on the contour image of the back surface and the position information of the opening,
The fluorescence according to claim 1, wherein the position of the opening on the front surface is specified based on the positional relationship between the back surface and the opening, and the symmetry between the contour image of the front surface and the contour image of the back surface. X-ray analysis system. The information processing device,
A contour image of the opening is generated from the first image, and position information indicating a position of the opening on the sample table is generated based on the contour image of the opening.
Extracting a characteristic portion of the surface from the second image,
Extracting the characteristic portion of the back surface from the third image,
Deriving the positional relationship between the back surface and the opening in the fourth image based on the positional information of the characteristic portion of the back surface and the opening,
The fluorescence according to claim 1, wherein the position of the opening on the front surface is specified based on the positional relationship between the back surface and the opening and the symmetry between the characteristic portion on the front surface and the characteristic portion on the back surface. X-ray analysis system. Further comprising a display device for displaying an image according to the information transmitted from the information processing device,
The X-ray fluorescence analysis system according to any one of claims 1 to 3, wherein the display device displays the composite image before measurement. The fluorescent X-ray analysis system according to claim 4, wherein the display device displays the measurement result by the fluorescent X-ray analysis device and the composite image side by side during measurement. The information processing apparatus has a storage unit, and stores the measurement result by the fluorescent X-ray analysis apparatus in the storage unit in association with the image data of the composite image. X-ray fluorescence analysis system according to the item. The information processing apparatus has a first conversion table in which whole images of the surfaces of a plurality of types of samples and sample names are associated with each other, and the imaging is performed by referring to the first conversion table. The fluorescent X-ray analysis system according to claim 6, wherein the sample name corresponding to the second image acquired by the section is added to the image data of the composite image. The information processing device has a second conversion table in which a plurality of measurement positions and measurement position names are associated with each other for each sample, and by referring to the second conversion table, the opening The fluorescent X-ray analysis system according to claim 6, wherein a measurement position name corresponding to the measurement position exposed from the part is added to the image data of the composite image. A fluorescent X-ray analyzer for analyzing constituent elements of the surface of a sample having a front surface and a back surface opposite to the front surface,
An opening is formed, and a sample table on which the sample is placed so that the measurement position on the surface is exposed from the opening during measurement,
An X-ray source for irradiating the measurement position with X-rays through the opening;
A detector for detecting fluorescent X-rays generated from the measurement position,
An imaging unit arranged on the opposite side of the X-ray source and the detector with the sample stage interposed therebetween, and configured to acquire first to fourth images before measurement;
The first image is an overall image of the opening in a state where the sample is not placed on the sample table,
The second image is an entire image of the front surface in a state in which the sample is placed on the sample table so that the back surface is exposed from the opening,
The third image is an entire image of the back surface in a state where the sample is placed on the sample table so that the front surface is exposed from the opening,
The fourth image is an X-ray fluorescence analyzer, which is an entire image of the back surface in a state where the sample is placed on the sample table so that the measurement position is exposed from the opening. A fluorescent X-ray analysis method for analyzing constituent elements of the surface of a sample having a front surface and a back surface opposite to the front surface,
Comprising the steps of capturing the first to fourth images before measurement,
The first image is an overall image of the opening in a state in which the sample is not placed on a sample table having an opening,
The second image is an entire image of the front surface in a state in which the sample is placed on the sample table so that the back surface is exposed from the opening,
The third image is an entire image of the back surface in a state where the sample is placed on the sample table so that the front surface is exposed from the opening,
The fourth image is an entire image of the back surface in a state where the sample is placed on the sample table so that a measurement position on the front surface is exposed from the opening,
Based on the first to fourth images acquired in the imaging step, the surface of the sample in a state where the sample is placed on the sample table so that the measurement position is exposed from the opening. Along with identifying the position of the opening, based on the identified position of the opening, generating a composite image that combines the entire image of the surface and the contour image of the opening,
And a step of displaying the composite image on a display device. Irradiating the measurement position with X-rays through the opening during measurement, and detecting fluorescent X-rays generated from the measurement position;
The fluorescent X-ray analysis method according to claim 10, further comprising a step of storing the measurement result obtained by the detecting step and the image data of the composite image in association with each other. In the step of generating the composite image,
A contour image of the opening is generated from the first image, and position information indicating a position of the opening on the sample table is generated based on the contour image of the opening.
Generating a contour image of the surface from the second image,
Generating a contour image of the back surface from the third image,
Deriving the positional relationship between the back surface and the opening in the fourth image based on the contour image of the back surface and the position information of the opening,
The fluorescence according to claim 9, wherein the position of the opening on the front surface is specified based on the positional relationship between the back surface and the opening and the symmetry between the contour image of the front surface and the contour image of the back surface. X-ray analysis method. In the step of generating the composite image,
A contour image of the opening is generated from the first image, and position information indicating a position of the opening on the sample table is generated based on the contour image of the opening.
Extracting a characteristic portion of the surface from the second image,
Extracting the characteristic portion of the back surface from the third image,
Deriving the positional relationship between the back surface and the opening in the fourth image based on the positional information of the characteristic portion of the back surface and the opening,
A fluorescent X-ray analysis method for identifying the position of the opening on the front surface based on the positional relationship between the back surface and the opening and the symmetry between the characteristic portion on the front surface and the characteristic portion on the back surface.

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