WO2018107643A1 - 一种机械振动隔离的液氦再凝聚低温制冷系统 - Google Patents

一种机械振动隔离的液氦再凝聚低温制冷系统 Download PDF

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WO2018107643A1
WO2018107643A1 PCT/CN2017/082517 CN2017082517W WO2018107643A1 WO 2018107643 A1 WO2018107643 A1 WO 2018107643A1 CN 2017082517 W CN2017082517 W CN 2017082517W WO 2018107643 A1 WO2018107643 A1 WO 2018107643A1
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cooling
temperature
liquid helium
helium
vibration isolation
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French (fr)
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吴施伟
周盛予
孙泽元
张帅
黄迪
殷立峰
高春雷
沈健
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Fudan University
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Fudan University
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B49/00—Arrangement or mounting of control or safety devices
    • F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/14—Compression machines, plants or systems characterised by the cycle used 
    • F25B2309/1428—Control of a Stirling refrigeration machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2500/00—Problems to be solved
    • F25B2500/13—Vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2700/00—Sensing or detecting of parameters; Sensors therefor
    • F25B2700/04—Refrigerant level
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2700/00—Sensing or detecting of parameters; Sensors therefor
    • F25B2700/21—Temperatures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2700/00—Sensing or detecting of parameters; Sensors therefor
    • F25B2700/21—Temperatures
    • F25B2700/2116—Temperatures of a condenser

Definitions

  • the invention belongs to the technical field of cryogenic refrigeration equipment, and particularly relates to a liquid helium recondensing cryogenic refrigeration system with mechanical vibration isolation.
  • Low temperature environment refers to an environment below -180 ° C (93.15 K), which has important applications in the fields of physics, chemistry, materials, biology, defense, and information.
  • cutting-edge precision scientific research and technical applications not only need to be close to the extremely low temperature (4.2K) environment, but also require low vibration and ultra-high vacuum environment.
  • 4.2K extremely low temperature
  • most cryogenic refrigeration equipment that meet the above requirements need to consume liquid helium with scarce resources and high cost, and the operating cost is large.
  • ZL 201610002349.8 there has been a liquid-free helium-consuming low-temperature refrigeration system with mechanical vibration isolation
  • the low-temperature refrigeration system uses a closed-loop refrigerator without liquid helium consumption to solve the problem that the traditional cryogenic equipment consumes a large amount of liquid helium; the helium heat exchange gas is used as a heat-conducting medium to effectively isolate the refrigeration while cooling and cooling. Machine vibration.
  • the working principle of the closed cycle refrigerator causes the cooling power to change periodically, and the cooling and vibration isolation technology of the helium gas heat exchange gas still has limitations such as low cooling power and large temperature fluctuation at the vibration isolation interface. These reasons lead to the absence of liquid helium.
  • the refrigeration efficiency and temperature stability of cryogenic refrigeration systems are still lower than those of cryogenic refrigeration systems that consume liquid helium. Therefore, it is of great significance to develop a cryogenic refrigeration system that has high temperature stability and achieves mechanical vibration isolation and which does not consume liquid helium.
  • the object of the present invention is to provide a cryogenic refrigeration system with mechanical vibration isolation, low temperature fluctuation, high refrigeration power, and almost no helium gas and liquid helium consumption, that is, a mechanical vibration isolation liquid helium recondensing cryogenic refrigeration system. .
  • the system operates in a low vibration environment and an ultra high vacuum environment.
  • the mechanical vibration isolation liquid helium recondensing cryogenic refrigeration system comprises: a closed cycle refrigerator system, a liquid helium recondensing refrigeration and vibration isolation system and a temperature feedback control system.
  • the closed cycle refrigerator system comprises: a cooling head, a compressor, and a helium gas conveying pipeline connecting the compressor and the cooling head;
  • the liquid helium recondensing refrigeration and vibration isolation system comprises: a cooling vibration isolation interface, The gas heat exchange gas, the liquid helium produced by recondensation, and the soft rubber for sealing the helium gas and the isolation vibration;
  • the temperature feedback control system is composed of a temperature measuring element, a heating element and a feedback temperature control circuit.
  • the cooling head of the closed cycle refrigerator extends into the cooling and vibration isolating interface, and the helium gas heat exchange gas is filled between the cooling head and the cooling vibration isolation interface as a cooling and cooling medium;
  • the soft rubber joint seals the cooling and vibration isolation interface
  • the upper end and the refrigerating head can seal the low-frequency mechanical vibration of the refrigerating head while sealing the helium exchange gas; since the temperature of the lowest temperature end of the refrigerating head is lower than 4.2K, the helium heat exchange gas recondenses into a liquid in the cooling and vibration-isolating interface. helium.
  • the liquid helium formed by re-agglomeration has a large latent heat, which greatly improves the heat exchange capacity between the cooling head and the cooling and vibration-isolating interface, thereby enabling a mechanical vibration-isolated liquid helium recondensing cryogenic refrigeration system provided by the present invention.
  • the heating element is disposed at a low temperature end of the cooling and vibration isolating interface, and the temperature measuring element is disposed at the cooling and vibration isolating interface, and the height covers a horizontal projection surface of the liquid helium formed by recondensing.
  • the temperature measuring component is used for indirect measurement of the liquid level of the recondensed liquid helium, and the feedback temperature control circuit is used for controlling the output power of the heating element.
  • the temperature feedback control system can adjust the height of the liquid level of the liquid helium to avoid the vibration introduced by the direct contact between the liquid level and the cooling head; the temperature feedback control system can also realize a wide range of temperature changes.
  • a heat radiation shield can also be disposed on the cooling and vibration isolating interface for shielding the heat leakage caused by the high temperature radiation.
  • the liquid helium recondensing refrigeration and vibration isolation system in order to make the mechanical vibration isolation liquid helium recondensing cryogenic refrigeration system provided by the present invention compatible with the high temperature baking conditions required by the user in an ultra-high vacuum environment, the liquid helium recondensing refrigeration and vibration isolation system can be adopted.
  • Materials such as stainless steel and oxygen-free copper and welding and sealing technology compatible with ultra-high vacuum.
  • types of closed cycle refrigerators include, but are not limited to, Gifford-McMahon refrigerators, Stirling refrigerators, pulse tube refrigerators, and improved refrigerators based on these principles.
  • the refrigeration power and minimum temperature of a closed cycle refrigerator differ according to the working principle and model of the refrigerator.
  • the closed cycle refrigerator and the liquid helium recondensation refrigeration and vibration isolation system used in the present invention operate almost without helium gas and liquid helium consumption. This solution solves the problem that conventional cryogenic refrigeration equipment requires the consumption of liquid helium which is scarce and expensive.
  • the invention utilizes the re-agglomeration technology to liquefy part of the helium gas heat exchange gas to generate liquid helium at the low temperature end, which greatly improves the refrigeration power and temperature stability of the system. This solution solves the problem of large temperature fluctuations of conventional closed cycle refrigerators at low temperatures.
  • the helium gas heat exchange gas refrigeration and vibration isolation interface used in the invention effectively isolates the low frequency mechanical vibration during operation of the closed cycle refrigerator, and the solution provides a low temperature and low vibration working environment.
  • the temperature feedback control system adopted by the invention can realize the liquid level control of the liquid helium, and can realize a wide range of temperature change operation.
  • the invention provides a low temperature and low vibration solution under the condition of almost no helium gas and liquid helium consumption, and can also work in an ultra-high vacuum environment, and can withstand the high temperature baking required for achieving an ultra-high vacuum environment.
  • FIG. 1 is a schematic view showing the principle of a mechanical vibration isolation liquid helium recondensing cryogenic refrigeration system according to the present invention.
  • Fig. 2 is a cross-sectional view showing an assembly of an embodiment of a cooling head member and a liquid helium recondensing and cooling vibration isolating system in a closed cycle refrigerator.
  • FIG. 3 is a schematic view of an assembly of an embodiment of a temperature feedback control system
  • the apparatus of the present invention comprises: a closed cycle refrigerator system 1, a liquid helium recondensing refrigeration and vibration isolation system 2, and a temperature feedback control system 4. among them,
  • the closed cycle refrigerator system 1 includes a closed cycle refrigeration head 6, a compressor, and a helium gas delivery pipe.
  • the liquid helium recondensation refrigeration vibration isolation system 2 includes a cooling vibration isolation interface 7, a helium heat exchange gas 8, a liquid helium 9 formed by recondensation, a heat shield 11 and a soft rubber 12.
  • the temperature feedback control system 3 includes a heating element 13, a first temperature measuring element 14, and a second temperature measuring element 15.
  • the cooling head 6 of the closed cycle refrigerator system extends into the cooling and vibration isolation interface 7, and the helium gas heat exchange gas 8 is filled between the cooling head and the cooling vibration isolation interface.
  • Cold cooling medium The soft rubber 12 is connected to the upper end of the sealing and cooling vibration isolation interface and the cooling head, which can seal the low frequency mechanical vibration of the cooling head while sealing the helium exchange gas.
  • the helium heat exchange gas will recondense to form liquid helium in the cooling and vibration isolation interface under the refrigeration effect of the closed loop refrigeration head, thereby greatly improving the refrigeration capacity and temperature stability between the cooling head and the cooling and vibration isolation interface.
  • the heat radiation shield 11 is fixed on the cooling and vibration isolating interface for shielding the heat leakage caused by the high temperature radiation.
  • the temperature feedback control system is composed of a heating element 13, a first temperature measuring element 14, a second temperature measuring element 15, and a feedback temperature control circuit.
  • the first temperature measuring element 13 and the second temperature measuring element 14 are respectively disposed at a lower end and an upper end of the horizontal projection surface of the liquid helium.
  • the height of the liquid helium in the cooling vibration isolating interface can be controlled: when there is no liquid helium in the cooling and vibration isolating interface, the first and second temperature measuring The temperature of the component is higher than the phase change point temperature of helium (about 4.2K); when the liquid level in the cooling vibration isolation interface is between the first and second temperature measuring components, the temperature of the first temperature measuring component Wait At the phase change point temperature, the temperature of the second temperature measuring element is higher than the phase change point temperature; when the liquid level of the liquid helium is higher than the second temperature measuring element, the temperatures of the first and second temperature measuring elements are equal to the temperature of the phase change point .
  • a wide range of temperature change operations can be achieved with the temperature feedback control system.
  • the closed-loop chiller system is used to solve the problem that a large amount of liquid helium is required for the conventional cryogenic refrigeration operation;
  • the helium-heat exchange gas-cooled vibration isolation interface is used to solve the low-frequency and above-mentioned low-frequency generated by the operation of the conventional refrigerator.
  • the problem of mechanical vibration; the liquid helium re-agglomeration technology solves the problem of large temperature fluctuation of the traditional closed-cycle refrigerator at low temperature;
  • the temperature feedback control system is used for feedback temperature control, which can not only control the re-agglomeration formed in the cooling and vibration isolation interface.
  • the liquid level of the liquid helium can also realize a wide range of temperature changing operation; the material of stainless steel and oxygen-free copper is used to make the cooling and vibration isolation interface in the vacuum environment, which is compatible with the high temperature baking conditions required for the ultra-high vacuum environment.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Vibration Prevention Devices (AREA)
  • Containers, Films, And Cooling For Superconductive Devices (AREA)

Abstract

一种机械振动隔离的液氦再凝聚低温制冷系统，包括闭循环制冷机系统（1）、液氦再凝聚致冷隔振系统（2）和温度反馈控制系统（3）。该系统通过液氦再凝聚致冷隔振系统（2）生成和维持液氦，隔绝了系统运行产生的低频振动，解决了闭循环制冷机温度波动大的问题。该系统通过温度反馈控制系统（3），控制再凝聚产生液氦（9）的液面高度，实现了变温调控。

Description

一种机械振动隔离的液氦再凝聚低温制冷系统 技术领域
本发明属于低温制冷设备技术领域，具体涉及一种机械振动隔离的液氦再凝聚低温制冷系统。
背景技术
低温环境指低于-180℃(93.15K)的环境，它在物理、化学、材料、生物、国防、信息等领域有重要应用。随着科技发展，前沿精密的科学研究和技术应用不但需要接近极低温(4.2K)的环境，而且还需要低振动和超高真空环境。目前绝大多数满足以上指标的低温制冷设备需要消耗资源稀缺且价格昂贵的液氦，运行成本较大。为了摆脱低温制冷设备对液氦的极度依赖，近期已有机械振动隔离的无液氦消耗低温制冷系统(ZL 201610002349.8)。这种低温制冷系统采用无液氦消耗的闭循环制冷机制冷，解决了传统低温设备消耗大量液氦的问题；采用氦气热交换气作为导热媒介，在致冷降温的同时还能有效隔绝制冷机振动。然而闭循环制冷机的工作原理导致制冷功率会周期性变化，且通过氦气热交换气的致冷隔振技术仍存在隔振界面上制冷功率低、温度波动较大等局限性。这些原因导致无液氦消耗低温制冷系统的制冷效率和温度稳定性仍低于消耗液氦的低温制冷系统。所以开发一种温度稳定性高且实现机械振动隔离的几乎不消耗液氦的低温制冷系统具有重大意义。
发明内容
本发明的目的在于提供一种机械振动隔离的、温度波动小、制冷功率高的，且几乎无氦气和液氦消耗的低温制冷系统，即一种机械振动隔离的液氦再凝聚低温制冷系统。该系统的运行能与低振动环境和超高真空环境相兼容。
本发明提供的机械振动隔离的液氦再凝聚低温制冷系统，包括：闭循环制冷机系统，液氦再凝聚致冷隔振系统和温度反馈控制系统。其中，所述闭循环制冷机系统包括：制冷头、压缩机，以及连接压缩机与制冷头的氦气输送管道；所述液氦再凝聚致冷隔振系统包括：致冷隔振界面、氦气热交换气、再凝聚产生的液氦，以及用于密封氦气和隔离振动的软橡胶等；所述温度反馈控制系统由测温元件、加热元件和反馈控温电路组成。
所述液氦再凝聚致冷隔振系统中，闭循环制冷机的制冷头伸入致冷隔振界面内，制冷头和致冷隔振界面间填充氦气热交换气体作为致冷降温媒质；所述软橡胶连接密封致冷隔振界面的 上端和制冷头，其密封氦气交换气的同时能够隔离制冷头的低频机械振动；由于制冷头最低温端的温度低于4.2K，氦气热交换气在致冷隔振界面内再凝聚形成液氦。再凝聚形成的液氦有较大的潜热，它极大地提高了制冷头和致冷隔振界面的换热能力，从而使得本发明提供的一种机械振动隔离的液氦再凝聚低温制冷系统在获得低温低振动环境的同时，有极好的制冷能力和温度稳定性。
所述温度反馈控制系统中，加热元件设置在致冷隔振界面的低温端，测温元件设置在致冷隔振界面上，高度覆盖再凝聚形成的液氦的水平投影面。所述测温元件用于间接测量再凝聚形成液氦的液面高度，反馈控温电路用于控制加热元件的输出功率。通过温度反馈控制系统可以调节液氦液面的高度，避免因液氦液面与制冷头直接接触而引入的振动；温度反馈控制系统还可以实现大范围的变温。
本发明中，在致冷隔振界面上还可设有热辐射屏蔽罩，用于屏蔽高温辐射导致的漏热。
本发明中，为使本发明提供的机械振动隔离的液氦再凝聚低温制冷系统与用户的超高真空环境所需的高温烘烤条件兼容，所述液氦再凝聚致冷隔振系统可以采用不锈钢和无氧铜等材料以及与超高真空兼容的焊接和密封技术。
本发明中，闭循环制冷机的类型包括但不限于吉福特-麦克马洪制冷机、斯特林式制冷机、脉管式制冷机以及基于这些原理的改良型制冷机等。闭循环制冷机的制冷功率和最低温度根据制冷机的工作原理和型号有所区别。
本发明具有以下有益效果：
1.本发明采用的闭循环制冷机和液氦再凝聚致冷隔振系统的运行几乎无氦气和液氦消耗。这种方案解决了传统低温制冷设备需要消耗资源稀缺、价格昂贵的液氦的问题。
2.本发明利用再凝聚技术液化部分氦气热交换气在低温端生成液氦，极大提高了系统的制冷功率和温度稳定性。这种方案解决了传统闭循环制冷机在低温时温度波动大的问题。
3.本发明采用的氦气热交换气致冷隔振界面有效的隔绝了闭循环制冷机工作时的低频机械振动，这种方案同时提供了低温和低振动的工作环境。
4.本发明采用的温度反馈控制系统可以实现液氦液面控制，还能实现大范围的变温操作。
5.本发明提供的在几乎无氦气和液氦消耗的条件下实现低温低振动的方案也可以在超高真空环境中工作，可以承受实现超高真空环境需要的高温烘烤。
附图说明
图1是本发明提出的机械振动隔离的液氦再凝聚低温制冷系统装置的原理示意图。
图2是闭循环制冷机中的制冷头部件、液氦再凝聚致冷隔振系统的实施例装配体剖面图。
图3是温度反馈控制系统的实施例装配体示意图
图中标号：1-闭循环制冷机系统，2-液氦再凝聚致冷隔振系统，3-用户的样品或设备，4-温度反馈控制系统，5-真空腔体，6-制冷头，7--致冷隔振界面，8-氦气热交换气，9-液化或再凝聚形成的液氦，10-实验样品或设备，11-热屏蔽罩，12-软橡胶，13-加热元件，14-第一测温元件，15-第二测温元件。
具体实施方式
为了使本发明的使用更加清楚明了，下面结合具体实施例，并参照附图，对本发明做进一步详细说明。
本发明装置包括：闭循环制冷机系统1，液氦再凝聚致冷隔振系统2；温度反馈控制系统4。其中，
闭循环制冷机系统1包括：闭循环制冷头6、压缩机和氦气输送管道等。液氦再凝聚致冷隔振系统2包括：致冷隔振界面7、氦气热交换气8、再凝聚形成的液氦9、热屏蔽罩11和软橡胶12等。
温度反馈控制系统3包括：加热元件13、第一测温元件14和第二测温元件15。
所述液氦再凝聚致冷隔振系统中，闭循环制冷机系统的制冷头6伸入致冷隔振界面7内，制冷头和致冷隔振界面间填充氦气热交换气8作为致冷降温媒质。所述软橡胶12连接密封致冷隔振界面的上端和制冷头，其密封氦气交换气的同时能够隔离制冷头的低频机械振动。氦气热交换气在闭循环制冷头的制冷作用下会在致冷隔振界面内再凝聚生成液氦，从而极大提高制冷头和致冷隔振界面间的制冷能力和温度稳定性。所述热辐射屏蔽罩11固定在致冷隔振界面上，用于屏蔽高温辐射导致的漏热。
所述温度反馈控制系统由加热元件13、第一测温元件14、第二测温元件15和反馈控温电路组成。其中，第一测温元件13和第二测温元件14分别设置在液氦水平投影面的下端和上端。通过测量第一和第二测温元件的温度，并结合反馈控制，可以控制致冷隔振界面内液氦的高度：当致冷隔振界面内没有液氦时，第一和第二测温元件的温度均高于氦气的相变点温度(4.2K左右)；当制冷隔振界面内的液氦液面在第一和第二测温元件之间时，第一测温元件的温度等 于相变点温度，第二测温元件的温度高于相变点温度；当液氦液面高于第二测温元件时，第一和第二测温元件的温度均等于相变点温度。此外，通过温度反馈控制系统还可以实现大范围的变温操作。
在本实施例中，采用闭循环制冷机系统解决了传统低温制冷运行需要大量液氦的问题；采用氦气热交换气致冷隔振界面解决了传统制冷机运行产生的微米级及以上的低频机械振动的问题；采用液氦再凝聚技术解决了传统闭循环制冷机在低温下温度波动大的问题；采用温度反馈控制系统进行反馈控温，不但可以控制致冷隔振界面内再凝聚形成的液氦液面高度，还可以实现大范围变温操作；采用不锈钢和无氧铜等材料制成真空环境中的致冷隔振界面，与超高真空环境所需的高温烘烤条件相兼容。
以上所述的具体实施例，对本发明的目的、技术方案和有益效果作了进一步的描述说明。所应理解的是，以上所述仅为本发明的具体实施例而已，并不限于本发明。凡是在本发明精神和原则之内，所做的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。

Claims (3)

  1. 一种机械振动隔离的液氦再凝聚低温制冷系统，其特征在于，包括：闭循环制冷机系统，液氦再凝聚致冷隔振系统和温度反馈控制系统；其中，所述闭循环制冷机系统包括：制冷头、压缩机，以及连接压缩机与制冷头的氦气输送管道；所述液氦再凝聚致冷隔振系统包括：致冷隔振界面、氦气热交换气、再凝聚产生的液氦，以及用于密封氦气和隔离振动的软橡胶；所述温度反馈控制系统由测温元件、加热元件和反馈控温电路组成；
    所述液氦再凝聚致冷隔振系统中，制冷机的制冷头伸入致冷隔振界面内，制冷头和致冷隔振界面间填充氦气热交换气体作为致冷降温媒质；所述软橡胶连接密封致冷隔振界面的上端和制冷头，其密封氦气交换气的同时能够隔离制冷头的低频机械振动；由于制冷头最低温端的温度低于4.2K，氦气热交换气在致冷隔振界面内再凝聚形成液氦。
    所述温度反馈控制系统中，加热元件设置在致冷隔振界面的低温端，测温元件设置在致冷隔振界面上，高度覆盖再凝聚形成的液氦的水平投影面；所述测温元件用于间接测量再凝聚形成液氦的液面高度，反馈控温电路用于控制加热元件的输出功率；通过温度反馈控制系统可以调节液氦液面的高度，避免因液氦液面与制冷头直接接触而引入的振动。
  2. 根据权利要求1所述的机械振动隔离的液氦再凝聚低温制冷系统，其特征在于，所述闭循环制冷机的类型包括但不限于吉福特-麦克马洪制冷机、斯特林式制冷机、脉管式制冷机以及基于这些原理的改良型制冷机等。
  3. 根据权利要求1所述的机械振动隔离的液氦再凝聚低温制冷系统，其特征在于，所述液氦再凝聚致冷隔振系统可以采用不锈钢和无氧铜材料及其相关的焊接和密封技术，从而与超高真空环境兼容。
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