WO2018101802A3 - Ensemble de chauffage - Google Patents

Ensemble de chauffage Download PDF

Info

Publication number
WO2018101802A3
WO2018101802A3 PCT/KR2017/014042 KR2017014042W WO2018101802A3 WO 2018101802 A3 WO2018101802 A3 WO 2018101802A3 KR 2017014042 W KR2017014042 W KR 2017014042W WO 2018101802 A3 WO2018101802 A3 WO 2018101802A3
Authority
WO
WIPO (PCT)
Prior art keywords
crucible
magnetic field
coil
heating assembly
periphery
Prior art date
Application number
PCT/KR2017/014042
Other languages
English (en)
Korean (ko)
Other versions
WO2018101802A2 (fr
Inventor
김정형
Original Assignee
주식회사 파인에바
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020160163082A external-priority patent/KR101888268B1/ko
Priority claimed from KR1020160163083A external-priority patent/KR101888269B1/ko
Priority claimed from KR1020160163084A external-priority patent/KR101888270B1/ko
Priority claimed from KR1020170037876A external-priority patent/KR101973255B1/ko
Application filed by 주식회사 파인에바 filed Critical 주식회사 파인에바
Priority to CN201780085257.3A priority Critical patent/CN110536975A/zh
Priority to US16/466,240 priority patent/US20200063254A1/en
Publication of WO2018101802A2 publication Critical patent/WO2018101802A2/fr
Publication of WO2018101802A3 publication Critical patent/WO2018101802A3/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • General Induction Heating (AREA)

Abstract

La présente invention concerne un ensemble de chauffage. Selon un aspect de la présente invention, l'invention concerne un ensemble de chauffage destiné à un équipement de dépôt, l'ensemble de chauffage comprenant : un creuset ayant un espace formé en son sein de manière à contenir un matériau de dépôt et ayant au moins une buse mise en œuvre de sorte à guider le matériau de dépôt vers l'extérieur ; une bobine disposée à l'extérieur du creuset et conçue de telle sorte que, lorsqu'une énergie haute fréquence est appliquée à celle-ci, un courant de bobine correspondant à l'énergie haute fréquence circule à travers la bobine, formant ainsi un champ magnétique dynamique dans sa périphérie ; et une structure de concentration de champ magnétique disposée dans la périphérie de la bobine, un courant d'induction étant formé dans la paroi externe du creuset par le champ magnétique dynamique, le creuset est chauffé par la chaleur générée sur la base du courant d'induction et d'un élément de résistance électrique du creuset, et le champ magnétique dynamique formé dans la périphérie de la bobine est concentré par la structure de concentration de champ magnétique, ce qui permet d'augmenter la chaleur produite dans le creuset.
PCT/KR2017/014042 2016-12-01 2017-12-01 Ensemble de chauffage WO2018101802A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201780085257.3A CN110536975A (zh) 2016-12-01 2017-12-01 加热组件
US16/466,240 US20200063254A1 (en) 2016-12-01 2017-12-01 Heating assembly

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
KR1020160163081 2016-12-01
KR1020160163082A KR101888268B1 (ko) 2016-12-01 2016-12-01 가열 어셈블리
KR1020160163083A KR101888269B1 (ko) 2016-12-01 2016-12-01 가열 어셈블리
KR10-2016-0163083 2016-12-01
KR1020160163084A KR101888270B1 (ko) 2016-12-01 2016-12-01 가열 어셈블리
KR10-2016-0163084 2016-12-01
KR10-2016-0163082 2016-12-01
KR10-2016-0163081 2016-12-01
KR10-2017-0037876 2017-03-24
KR1020170037876A KR101973255B1 (ko) 2016-12-01 2017-03-24 가열 어셈블리

Publications (2)

Publication Number Publication Date
WO2018101802A2 WO2018101802A2 (fr) 2018-06-07
WO2018101802A3 true WO2018101802A3 (fr) 2018-07-26

Family

ID=62242180

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2017/014042 WO2018101802A2 (fr) 2016-12-01 2017-12-01 Ensemble de chauffage

Country Status (1)

Country Link
WO (1) WO2018101802A2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108770173B (zh) * 2018-07-27 2020-11-20 上海工程技术大学 一种等离子体射流产生装置
KR102265055B1 (ko) * 2019-06-05 2021-06-15 엘지전자 주식회사 증착 장치

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012002446A (ja) * 2010-06-18 2012-01-05 Nisshin Giken Kk 誘導炉
KR101213434B1 (ko) * 2012-05-22 2012-12-18 문병태 웨이퍼코팅용 가열장치
JP2013023727A (ja) * 2011-07-20 2013-02-04 Toyota Motor Corp 高周波熱処理装置及び高周波熱処理方法
KR101642452B1 (ko) * 2015-01-23 2016-07-25 주식회사 파인에바 선형 증발 증착 장치
KR20160129204A (ko) * 2015-04-29 2016-11-09 주식회사 파인에바 선형 증발 증착 장치

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012002446A (ja) * 2010-06-18 2012-01-05 Nisshin Giken Kk 誘導炉
JP2013023727A (ja) * 2011-07-20 2013-02-04 Toyota Motor Corp 高周波熱処理装置及び高周波熱処理方法
KR101213434B1 (ko) * 2012-05-22 2012-12-18 문병태 웨이퍼코팅용 가열장치
KR101642452B1 (ko) * 2015-01-23 2016-07-25 주식회사 파인에바 선형 증발 증착 장치
KR20160129204A (ko) * 2015-04-29 2016-11-09 주식회사 파인에바 선형 증발 증착 장치

Also Published As

Publication number Publication date
WO2018101802A2 (fr) 2018-06-07

Similar Documents

Publication Publication Date Title
PH12018502476A1 (en) Aerosol generating device with inductor
WO2014204558A3 (fr) Chauffage de plasma pour la production d'énergie de fusion à l'aide d'une oscillation de champ magnétique
MX2018008924A (es) Metodo para sintonizar el torque y la junta de rotula.
MX2017017181A (es) Sistemas electronicos de suministro de aerosol.
WO2018045360A3 (fr) Moteur/générateur électrique multi-tunnel amélioré
EP2530999A3 (fr) Dispositif et système de chauffage par induction
WO2015176936A3 (fr) Rotor pour machine synchrone
CA2914951A1 (fr) Suscepteur intelligent pour un systeme de chauffage inductif a actionneur en alliage a memoire de forme (sma)
JP2015084640A5 (fr)
CN106805749A (zh) 一种带降温座的电压力锅
DE112012000682A5 (de) Pulsschweißgerät zur Blechverschweißung
WO2018101802A3 (fr) Ensemble de chauffage
JP2012175110A5 (fr)
WO2015118400A3 (fr) Machine électrique rotative
WO2014118390A3 (fr) Agencement de bobine magnétique supraconductrice
MX2017012072A (es) Generador de corriente electrica por movimiento e induccion mediante imanes permanentes y bobinas resonantes.
EP3383561A4 (fr) Procédés de refroidissement d'une tôle électroconductrice pendant un traitement thermique par induction à flux transverse
US20160233750A1 (en) Rotor core heating device and rotor core shrink-fitting method
WO2018130872A8 (fr) Filtres d'harmonques faisant intervenir des bobines semi-non magnétiques
WO2015033059A3 (fr) Dispositif de recuperation d'energie cooperant avec un recipient de cuisson
WO2014060399A3 (fr) Flasque comprenant des ailettes de refroidissement intégrées pour éliminer la chaleur du stator
JP5874747B2 (ja) ロータコア加熱装置及びロータコア焼き嵌め方法
JP2018527703A (ja) インダクタおよびインダクタアッセンブリ
WO2015169308A3 (fr) Engrenage d'accouplement à frein à courants parasites à entrefer réduit
JP2015084312A5 (fr)

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 17876565

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 17876565

Country of ref document: EP

Kind code of ref document: A2