WO2018101802A3 - Heating assembly - Google Patents

Heating assembly Download PDF

Info

Publication number
WO2018101802A3
WO2018101802A3 PCT/KR2017/014042 KR2017014042W WO2018101802A3 WO 2018101802 A3 WO2018101802 A3 WO 2018101802A3 KR 2017014042 W KR2017014042 W KR 2017014042W WO 2018101802 A3 WO2018101802 A3 WO 2018101802A3
Authority
WO
WIPO (PCT)
Prior art keywords
crucible
magnetic field
coil
heating assembly
periphery
Prior art date
Application number
PCT/KR2017/014042
Other languages
French (fr)
Korean (ko)
Other versions
WO2018101802A2 (en
Inventor
김정형
Original Assignee
주식회사 파인에바
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020160163083A external-priority patent/KR101888269B1/en
Priority claimed from KR1020160163084A external-priority patent/KR101888270B1/en
Priority claimed from KR1020160163082A external-priority patent/KR101888268B1/en
Priority claimed from KR1020170037876A external-priority patent/KR101973255B1/en
Application filed by 주식회사 파인에바 filed Critical 주식회사 파인에바
Priority to CN201780085257.3A priority Critical patent/CN110536975A/en
Priority to US16/466,240 priority patent/US20200063254A1/en
Publication of WO2018101802A2 publication Critical patent/WO2018101802A2/en
Publication of WO2018101802A3 publication Critical patent/WO2018101802A3/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • General Induction Heating (AREA)

Abstract

The present invention relates to a heating assembly. According to an aspect of the present invention, there is provided a heating assembly for deposition equipment, the heating assembly comprising: a crucible having a space formed therein so as to contain a deposition material and having at least one nozzle implemented so as to guide the deposition material to the outside; a coil arranged outside the crucible and configured such that, as high-frequency power is applied thereto, a coil current corresponding to the high-frequency power flows through the coil, thereby forming a dynamic magnetic field in the periphery thereof; and a magnetic field concentrating structure arranged in the periphery of the coil, wherein an induction current is formed in the outer wall of the crucible by the dynamic magnetic field, the crucible is heated by heat occurring on the basis of the induction current and an electric resistance element of the crucible, and the dynamic magnetic field formed in the periphery of the coil is concentrated by the magnetic field concentrating structure, thereby increasing the heat occurring in the crucible.
PCT/KR2017/014042 2016-12-01 2017-12-01 Heating assembly WO2018101802A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201780085257.3A CN110536975A (en) 2016-12-01 2017-12-01 Heating component
US16/466,240 US20200063254A1 (en) 2016-12-01 2017-12-01 Heating assembly

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
KR1020160163081 2016-12-01
KR1020160163083A KR101888269B1 (en) 2016-12-01 2016-12-01 Heating assembly
KR10-2016-0163084 2016-12-01
KR1020160163084A KR101888270B1 (en) 2016-12-01 2016-12-01 Heating assembly
KR1020160163082A KR101888268B1 (en) 2016-12-01 2016-12-01 Heating assembly
KR10-2016-0163081 2016-12-01
KR10-2016-0163083 2016-12-01
KR10-2016-0163082 2016-12-01
KR1020170037876A KR101973255B1 (en) 2016-12-01 2017-03-24 Heating assembly
KR10-2017-0037876 2017-03-24

Publications (2)

Publication Number Publication Date
WO2018101802A2 WO2018101802A2 (en) 2018-06-07
WO2018101802A3 true WO2018101802A3 (en) 2018-07-26

Family

ID=62242180

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2017/014042 WO2018101802A2 (en) 2016-12-01 2017-12-01 Heating assembly

Country Status (1)

Country Link
WO (1) WO2018101802A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108770173B (en) * 2018-07-27 2020-11-20 上海工程技术大学 Plasma jet generating device
KR102265055B1 (en) * 2019-06-05 2021-06-15 엘지전자 주식회사 A deposition apparatus

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012002446A (en) * 2010-06-18 2012-01-05 Nisshin Giken Kk Induction furnace
KR101213434B1 (en) * 2012-05-22 2012-12-18 문병태 Heating apparatus for coating wafer
JP2013023727A (en) * 2011-07-20 2013-02-04 Toyota Motor Corp Induction heat treatment apparatus and induction heat treatment method
KR101642452B1 (en) * 2015-01-23 2016-07-25 주식회사 파인에바 Linear Evaporation Deposition Apparatus
KR20160129204A (en) * 2015-04-29 2016-11-09 주식회사 파인에바 Linear Evaporation Deposition Apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012002446A (en) * 2010-06-18 2012-01-05 Nisshin Giken Kk Induction furnace
JP2013023727A (en) * 2011-07-20 2013-02-04 Toyota Motor Corp Induction heat treatment apparatus and induction heat treatment method
KR101213434B1 (en) * 2012-05-22 2012-12-18 문병태 Heating apparatus for coating wafer
KR101642452B1 (en) * 2015-01-23 2016-07-25 주식회사 파인에바 Linear Evaporation Deposition Apparatus
KR20160129204A (en) * 2015-04-29 2016-11-09 주식회사 파인에바 Linear Evaporation Deposition Apparatus

Also Published As

Publication number Publication date
WO2018101802A2 (en) 2018-06-07

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