WO2018101802A2 - Ensemble de chauffage - Google Patents

Ensemble de chauffage Download PDF

Info

Publication number
WO2018101802A2
WO2018101802A2 PCT/KR2017/014042 KR2017014042W WO2018101802A2 WO 2018101802 A2 WO2018101802 A2 WO 2018101802A2 KR 2017014042 W KR2017014042 W KR 2017014042W WO 2018101802 A2 WO2018101802 A2 WO 2018101802A2
Authority
WO
WIPO (PCT)
Prior art keywords
crucible
coil
magnetic field
present application
region
Prior art date
Application number
PCT/KR2017/014042
Other languages
English (en)
Korean (ko)
Other versions
WO2018101802A3 (fr
Inventor
김정형
Original Assignee
주식회사 파인에바
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020160163084A external-priority patent/KR101888270B1/ko
Priority claimed from KR1020160163083A external-priority patent/KR101888269B1/ko
Priority claimed from KR1020160163082A external-priority patent/KR101888268B1/ko
Priority claimed from KR1020170037876A external-priority patent/KR101973255B1/ko
Application filed by 주식회사 파인에바 filed Critical 주식회사 파인에바
Priority to CN201780085257.3A priority Critical patent/CN110536975A/zh
Priority to US16/466,240 priority patent/US20200063254A1/en
Publication of WO2018101802A2 publication Critical patent/WO2018101802A2/fr
Publication of WO2018101802A3 publication Critical patent/WO2018101802A3/fr

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process

Definitions

  • the present invention relates to a heating assembly, and more particularly, to a heating assembly capable of focusing a magnetic field for induction heating of the crucible to control the thermal distribution of the crucible and to increase the practical efficiency of the deposition.
  • Crucible is a kind of bowl in which a space for containing the material heated by the heating means is formed therein.
  • the crucible is realized by being heated by a heating means so that it can withstand even a high temperature.
  • the amount of heat that the crucible is heated may be transferred to the material contained in the crucible. Accordingly, the material can be heated.
  • Such crucibles have been utilized in several ways for heating materials that must be heated at high temperatures. Such crucibles have been used for heating and smelting metals with high melting temperatures, for heating to blend various metal materials, and the like.
  • the crucible is a means for guiding the deposition material to the surface of the panel to change the state so as to heat and move the deposition material deposited on the surface of the panel in the production of the panel for a display device It is utilized.
  • the deposition material contained in the crucible is heated to deposit the deposition material on a deposition surface (or target surface) such as a panel, the deposition material may be properly formed on the deposition surface. Effectiveness can be important. Therefore, the demand for crucible implementation technology that can increase the effectiveness of deposition has recently increased.
  • An object of the present invention is to provide a heating assembly having a high thermal energy delivered to the deposition material placed on the crucible relative to the energy supplied to the heating means for heating the crucible.
  • Another object of the present invention is to provide a heating assembly capable of controlling the heat distribution of the crucible so that the deposition material can be uniformly formed on the surface to be deposited.
  • a space for accommodating a deposition material therein A coil disposed outside the crucible and having a high frequency power applied thereto to form a dynamic magnetic field around the coil current corresponding to the high frequency power; And a magnetic field focusing structure disposed around the coil, wherein the inductive current is formed on the outer wall by the dynamic magnetic field, and the inductive current is generated based on the inductive current and the electrical resistance element of the crucible.
  • the heating assembly for heating equipment is heated by the heat, and the magnetic field focusing structure is configured to focus the dynamic magnetic field formed around the coil, so that the heat generated in the crucible rises to provide a heating assembly for the deposition equipment.
  • the housing is formed with a space therein; A space in which a space for accommodating the deposition material is formed, and at least one nozzle for guiding the deposition material to the outside is implemented; A coil disposed outside the crucible and having a high frequency power applied thereto to form a dynamic magnetic field around the coil current corresponding to the high frequency power; And a magnetic field focusing structure disposed around the coil, wherein the crucible, the coil, and the magnetic field focusing structure are provided in an inner space of the housing, and the crucible is guided to an outer wall by the dynamic magnetic field.
  • a current is formed, heated by heat generated based on the induced current and the electrical resistance element of the crucible, and the dynamic magnetic field formed around the coil by the magnetic field focusing structure is focused so that the crucible
  • the heating assembly for deposition equipment can be provided, characterized in that the heat generated in the brush rises.
  • an induced current induced in the outer wall of the crucible so that the spatial distribution of the amount of heat provided to the deposition material contained in the crucible's inner space can be controlled to the predetermined distribution as described above.
  • the intensity distribution of can be controlled appropriately. For example, when defining a left and right direction and an up and down direction with respect to one of the four heating surfaces of the crucible, the distribution of the induced currents with respect to the one heating surface is suitably in accordance with the left and right directions. It may be controlled or appropriately controlled along the vertical direction.
  • the heat energy delivered to the deposition material placed on the crucible can be higher than the energy supplied to the heating means for heating the crucible.
  • the present invention it is possible to control the thermal distribution of the crucible so that the deposition material can be uniformly formed on the surface to be deposited.
  • FIG. 1 is a block diagram showing a configuration of a deposition apparatus according to an embodiment of the present application.
  • FIG. 2 is a diagram illustrating a crucible according to an embodiment of the present application.
  • FIG 3 is a view showing a protruding nozzle formed in a crucible according to an embodiment of the present application.
  • FIG. 4 is a view showing the shape of a coil according to an embodiment of the present application.
  • FIG. 5 is a view showing a crucible and a coil according to an embodiment of the present application.
  • FIG. 6 is a diagram illustrating an example in which a coil is implemented according to an embodiment of the present application.
  • FIG. 7 is a diagram illustrating a coil disposed near a protruding nozzle according to an embodiment of the present application.
  • FIG. 8 is a conceptual diagram illustrating a magnetic field generated by a coil according to an embodiment of the present application.
  • FIG. 9 is a conceptual diagram illustrating a magnetic field and a crucible formed in a coil according to an embodiment of the present application.
  • FIG. 10 is a view showing a ferrite placed in a magnetic field according to an embodiment of the present application.
  • FIG. 11 is a view showing a ferrite, a coil, and a magnetic field formed around the coil according to an embodiment of the present application.
  • FIG. 12 illustrates a ferrite disposed in a heating assembly according to one embodiment of the present application.
  • FIG. 13 is a distribution chart of magnetic field intensity change values according to an embodiment of the present application.
  • FIG. 14 is a cutaway side view illustrating ferrite included in an outer wall of a crucible according to an embodiment of the present application.
  • FIG. 15 is a view illustrating a shape in which ferrite is applied to a deposition apparatus according to an embodiment of the present application.
  • 16 is a schematic diagram illustrating a heat distribution of a crucible according to an embodiment of the present application.
  • FIG. 17 is a schematic diagram illustrating a heat distribution of a crucible according to an embodiment of the present application.
  • FIG. 18 is a side cutaway view showing an example of changing a shape of a crucible according to an embodiment of the present application.
  • 19 is a side cutaway view showing examples of changing a thickness of a crucible according to an embodiment of the present application.
  • FIG. 20 is a view showing a coil formed on the outside of the crucible according to the exemplary embodiment of the present application.
  • FIG. 21 is a diagram illustrating a coil formed on an outer side of a crucible according to an embodiment of the present application.
  • FIG. 22 is a conceptual diagram illustrating an example in which a coil implemented in a deposition apparatus according to an embodiment of the present application is separately driven.
  • FIG. 23 is a diagram conceptually illustrating a heat distribution of a crucible according to an embodiment of the present invention.
  • 24 is a view illustrating a ferrite inserted between coils according to an embodiment of the present application.
  • 25 is a view illustrating various shapes of ferrite according to an embodiment of the present application.
  • FIG. 26 illustrates a ferrite disposed in a form of covering a lower surface of a crucible according to an embodiment of the present application.
  • FIG. 27 is a view showing the shape of a ferrite according to an embodiment of the present application.
  • FIG. 28 is a cut side view illustrating ferrite included in an outer wall of a crucible according to an embodiment of the present application.
  • 29 is a view showing a ferrite applied to the heating assembly according to an embodiment of the present application.
  • FIG. 30 is a view showing that the ferrite is formed in a portion close to the nozzle of the crucible according to an embodiment of the present application.
  • 31 is a view illustrating a side of a crucible according to an embodiment of the present application.
  • FIG. 32 is a view of the design of the heating assembly in the Y-axis direction according to an embodiment of the present application.
  • 33 is a view of the design of the heating assembly in the Y-axis direction according to an embodiment of the present application.
  • FIG. 34 is a view of the design of the heating assembly in the Y-axis direction according to an embodiment of the present application.
  • 35 is a view of the design of the heating assembly in the Y-axis direction according to an embodiment of the present application.
  • 36 is a view illustrating a heating assembly implemented by combining the embodiments in the Z direction of the crucible according to the embodiment of the present application.
  • FIG. 37 is a view illustrating a heating assembly implemented by combining the embodiments in the X, Y, and Z directions of the crucible according to the embodiment of the present application.
  • 38 is a view showing a heat distribution of the crucible according to the embodiment of the present application.
  • 39 is a view illustrating a heat distribution of time-varying crucibles according to an embodiment of the present application.
  • FIG. 40 illustrates a heating assembly in which a heat conduction inhibiting element is formed in accordance with an embodiment of the present application.
  • 41 is a graph illustrating controlled thermal equilibrium in accordance with an embodiment of the present application.
  • FIG. 42 is a diagram illustrating a transformer, an input line, and an output line in an external space according to an embodiment of the present application.
  • FIG 43 illustrates a moving heating assembly according to an embodiment of the present application.
  • FIG 44 illustrates a transformer, a vacuum box, and a heating assembly according to an embodiment of the present application.
  • 45 is a view illustrating deposition equipment according to an embodiment of the present application.
  • 47 is a block diagram illustrating a configuration of a deposition apparatus according to an embodiment of the present application.
  • FIG. 48 is a diagram illustrating crucibles according to an embodiment of the present application.
  • 49 is a view illustrating a protruding nozzle formed on a crucible according to an embodiment of the present application.
  • 50 is a view showing the shape of a coil according to an embodiment of the present application.
  • FIG. 51 illustrates a crucible and a coil according to an embodiment of the present application.
  • FIG. 52 is a diagram illustrating an example of implementing a coil according to an embodiment of the present application.
  • FIG. 53 illustrates a coil disposed near the protruding nozzle according to the embodiment of the present application.
  • 58 is a conceptual diagram illustrating a magnetic field generated by a coil according to an embodiment of the present application.
  • 59 is a conceptual diagram illustrating a magnetic field and a crucible formed in a coil according to an embodiment of the present application.
  • 60 is a view showing a ferrite placed in a magnetic field according to an embodiment of the present application.
  • FIG. 61 illustrates a ferrite, a coil, and a magnetic field formed around a coil according to an embodiment of the present application.
  • FIG. 62 illustrates a ferrite disposed in a heating assembly according to one embodiment of the present application.
  • FIG. 63 is a distribution chart of magnetic field intensity change values according to an embodiment of the present application.
  • 64 is a cut side view illustrating ferrite included in an outer wall of a crucible according to an embodiment of the present application.
  • 65 is a view illustrating a shape in which ferrite is applied to a deposition apparatus according to an embodiment of the present application.
  • 66 is a schematic diagram illustrating a heat distribution of a crucible according to an embodiment of the present application.
  • 67 is a schematic diagram illustrating a heat distribution of a crucible according to an embodiment of the present application.
  • FIG. 68 is a side cross-sectional view illustrating an example of changing a shape of a crucible according to an embodiment of the present application.
  • 69 is a side cutaway view showing examples of changing a thickness of a crucible according to an embodiment of the present application.
  • 70 is a view illustrating a coil formed on the outside of the crucible according to the embodiment of the present application.
  • 71 is a view illustrating a coil formed on the outside of the crucible according to the embodiment of the present application.
  • 72 is a conceptual diagram illustrating an example in which a coil implemented in a deposition apparatus according to an embodiment of the present application is separately driven.
  • 73 is a view conceptually showing a heat distribution of a crucible according to an embodiment of the present invention.
  • 74 is a view illustrating a ferrite inserted between coils according to an embodiment of the present application.
  • 75 is a view illustrating various shapes of ferrite according to an embodiment of the present application.
  • FIG. 76 is a view illustrating ferrites disposed in a form that covers a bottom surface of a crucible according to an embodiment of the present application.
  • 77 is a view showing the shape of a ferrite according to an embodiment of the present application.
  • 78 is a cutaway side view illustrating ferrite included in an outer wall of a crucible according to an embodiment of the present application.
  • 79 is a view illustrating ferrite applied to a heating assembly according to an embodiment of the present application.
  • 80 is a view illustrating that ferrite is formed in a portion close to a nozzle of a crucible according to an embodiment of the present application.
  • 81 is a view illustrating a side of a crucible according to an embodiment of the present application.
  • 82 is a view of a design of a heating assembly in the Y axis direction according to an embodiment of the present application.
  • 83 is a view of a design of a heating assembly in the Y-axis direction according to an embodiment of the present application.
  • FIG. 84 is a view of the design of the heating assembly in the Y-axis direction according to an embodiment of the present application.
  • 86 is a view illustrating a heating assembly implemented by combining the embodiments in the Z direction of the crucible according to the embodiment of the present application.
  • 87 is a view illustrating a heating assembly implemented by combining the embodiments in the X, Y, and Z directions of the crucible according to the embodiment of the present application.
  • 88 is a view showing a heat distribution of the crucible according to the embodiment of the present application.
  • 89 is a view illustrating a heat distribution of time-varying crucibles according to an embodiment of the present application.
  • FIG. 90 illustrates a heating assembly in which a heat conduction inhibiting element is formed in accordance with an embodiment of the present application.
  • 91 is a graph showing controlled thermal equilibrium in accordance with an embodiment of the present application.
  • 92 is a diagram illustrating a transformer, an input line, and an output line in an external space according to an embodiment of the present application.
  • FIG. 93 illustrates a moving heating assembly according to an embodiment of the present application.
  • FIG. 94 illustrates a transformer, a vacuum box, and a heating assembly according to an embodiment of the present application.
  • 96 is a view illustrating deposition equipment according to an embodiment of the present application.
  • a space for accommodating a deposition material therein A coil disposed outside the crucible and having a high frequency power applied thereto to form a dynamic magnetic field around the coil current corresponding to the high frequency power; And a magnetic field focusing structure disposed around the coil, wherein the inductive current is formed on the outer wall by the dynamic magnetic field, and the inductive current is generated based on the inductive current and the electrical resistance element of the crucible.
  • the heating assembly for heating equipment is heated by the heat, and the magnetic field focusing structure is configured to focus the dynamic magnetic field formed around the coil, so that the heat generated in the crucible rises to provide a heating assembly for the deposition equipment.
  • the induction current formed on the outer wall of the crucible may be provided with a heating assembly for deposition equipment, characterized in that the property is changed over time.
  • the magnetic field focusing structure the amount of change in the magnetic flux density of the dynamic magnetic field increases, and the heat rising to the crucible rises based on the amount of change increasing. May be provided.
  • the magnetic field focusing structure the amount of charge per unit time of the induced current is increased, and the heat rising to the crucible is increased based on the amount of charge per unit time increased. May be provided.
  • the dynamic magnetic field increases the amount of change in magnetic flux density and the amount of charge per unit time of the induced current, and the heat rising to the crucible is based on the increased amount of change and the amount of charge per unit time. It can be provided by the heating assembly for the deposition equipment, characterized in that the rise.
  • the nozzle embodied in the crucible may be provided with a heating assembly for deposition equipment that is protruded out of the crucible.
  • the coil may be provided with a heating assembly for deposition equipment is disposed so that the first coil and the second coil included in the coil on the outside of the outer wall of the crucible.
  • the heating assembly may be provided with a heating assembly for deposition equipment, characterized in that disposed inside the housing of the deposition equipment.
  • the magnetic field focusing structure may be provided with a heating assembly for deposition equipment is disposed in the space between the coil and the inner wall of the housing.
  • the magnetic field focusing structure may be provided with a heating assembly for deposition equipment is implemented in the form of being applied.
  • the magnetic field focusing structure is implemented in a plate shape, the magnetic field focusing structure includes a first region and a second region, the thickness of the first region of the magnetic field focusing structure is larger than the thickness of the second region Characterized in the heating assembly for deposition equipment can be provided.
  • a heating assembly for deposition equipment that the degree of concentration of the dynamic magnetic field is different.
  • the region of the magnetic field focusing structure may include a first region and a second region, and a distance between the first region and the housing is greater than a distance between the second region and the housing.
  • An assembly can be provided.
  • the magnetic field focusing structure may include a first region and a second region, and the heating assembly for deposition equipment may be provided, wherein the first region and the second region are perpendicular to each other.
  • the housing is formed with a space therein; A space in which a space for accommodating the deposition material is formed, and at least one nozzle for guiding the deposition material to the outside is implemented; A coil disposed outside the crucible and having a high frequency power applied thereto to form a dynamic magnetic field around the coil current corresponding to the high frequency power; And a magnetic field focusing structure disposed around the coil, wherein the crucible, the coil, and the magnetic field focusing structure are provided in an inner space of the housing, and the crucible is guided to an outer wall by the dynamic magnetic field.
  • a current is formed, heated by heat generated based on the induced current and the electrical resistance element of the crucible, and the dynamic magnetic field formed around the coil by the magnetic field focusing structure is focused so that the crucible
  • the heating assembly for deposition equipment can be provided, characterized in that the heat generated in the brush rises.
  • Thin film manufacturing technology is a field of surface treatment technology, divided into wet and dry methods.
  • the wet method thin film manufacturing technique includes (1) an electrolytic method of oxidizing a workpiece so that the workpiece is formed on the surface of the workpiece by electrolyzing the workpiece, and (2) activating the workpiece; Wet methods, including electroless methods using sensitization processes, exist.
  • Dry film production technology includes (1) physical vapor deposition (PVD), which evaporates solid materials in a high vacuum state and forms them on the surface of the workpiece, and (2) converts gaseous materials in a high vacuum state to plasma or the like.
  • PVD physical vapor deposition
  • CVD chemical vapor deposition
  • CVD which changes and forms on the surface of a to-be-processed object
  • thermal spraying method which sprays a to-be-processed object in a liquid state to the to-be-processed surface, and coats a to-be-processed object on the surface of a processed object.
  • a deposition apparatus 10000 implemented to change the state of the treatment by heating the treatment (especially the deposition material) and to guide the treatment to be in contact with the surface of the object to be treated is provided. It can be important.
  • the deposition apparatus 10000 is a device capable of depositing a deposition material on a surface to be deposited.
  • the deposition apparatus 10000 of the present application raises the temperature of the crucible 13000 of the vapor deposition apparatus 10000 using a predetermined heating means 15000 to change the state of the deposition material contained in the crucible 13000. You can.
  • the state-deposited deposition material may be discharged to the outside of the crucible 13000.
  • Deposition apparatus 10000 may be used for the above-described thin film manufacturing techniques.
  • the deposition apparatus 10000 may be used for simple heating and not for the purpose of deposition according to the above-described thin film fabrication techniques.
  • FIG. 1 is a block diagram showing a configuration of a deposition apparatus according to an embodiment of the present application.
  • a deposition apparatus 10000 may include a housing 11000, a crucible 13000, a heating means 15000, a magnetic field focusing structure 17000 that is a heating auxiliary means, and Other components 19000 may be included.
  • a space may be formed in the housing 11000 according to the exemplary embodiment of the present application.
  • the crucible 13000, the heating means 15000, the heating assistance means, and the other component 19000 may be implemented in an inner space of the housing 11000.
  • a deposition material that is a material to be deposited may be provided in a space formed inside the crucible 13000 according to an embodiment of the present application.
  • the deposition material may be heated by receiving heat generated by the heating means 15000.
  • the heating means 15000 may heat the crucible 13000 to change the state of the deposition material placed inside the crucible 13000.
  • the heating auxiliary means may assist the heating means 15000 to efficiently heat the crucible 13000.
  • the heating aid there may be a magnetic field focusing structure 17000.
  • the other component 19000 may be a path of a conductive wire that can supply power, a power generator that provides power to the deposition apparatus 10000, and the like.
  • the description of the other components 19000 will be omitted for ease of description.
  • the present deposition apparatus 10000 will be described together with the other components 19000 only when there are special circumstances where the other components 19000 should be described to describe the deposition apparatus 10000 of the present application.
  • a crucible 13000 a heating means 15000, a magnetic field focusing structure 17000, and / or other components that may be implemented may be collectively referred to as a heating assembly. .
  • FIG. 2 (a) to (b) is a view showing a crucible according to an embodiment of the present application.
  • the crucible 13000 may include an outer wall 13100 and at least one nozzle 13200.
  • the outer wall 13100 may define a space (hereinafter, referred to as an inner space) inside the crucible 13000 as shown in FIG. 2B.
  • a deposition material for deposition may be placed in the inner space.
  • the nozzle 13200 may be a moving passage of the deposition material.
  • the deposition material placed in the internal space of the crucible 13000 may receive a sufficient amount of heat from the heating means 15000 and phase change into a gaseous and / or plasma state.
  • the phase shifted deposition material may be discharged to the outside of the crucible 13000 as shown in FIG. 2A through the nozzle 13200.
  • the nozzle 13200 may be formed in the crucible 13000 with various design specifications.
  • the intervals between the plurality of nozzles 13200 may be formed at various intervals. Intervals of the plurality of nozzles 13200 may be formed at equal intervals. Alternatively, the interval of the nozzle 13200 may be an interval that gradually narrows toward the side of the crucible surface.
  • the shape of the hole of the nozzle 13200 may have various shapes.
  • the shape of the hole of the nozzle may be implemented in various shapes, such as rectangular, oval, as well as circular shape as shown.
  • one surface on which the nozzle 13200 is formed will be referred to as an upper surface, and the opposite side of the one surface will be referred to as a lower surface, and the surfaces except for the upper and lower surfaces will be referred to as side surfaces.
  • the crucible 13000 according to the exemplary embodiment of the present application may have various shapes.
  • the crucible 13000 may have a rectangular parallelepiped shape.
  • the crucible 13000 of the present application may be implemented in various forms such as cones, spheres, hexagonal columns, cylinders, triangular columns, and the like. That is, if the form may include a deposition material, the crucible 13000 according to an embodiment of the present application may be implemented in any shape.
  • various materials may be used to implement the crucible according to an embodiment of the present application.
  • the material of the crucible is not limited to any material, but preferably, the material of the crucible 3000 of the present application may be a material having a property that current can flow well.
  • an implementation material of the crucible 13000 may be selected. That is, the material of the crucible 13000 may be selected so that the crucible 13000 can perform its function without melting the crucible 13000 even at a high temperature.
  • the crucible 13000 may have a structure capable of opening and closing the crucible 13000.
  • the nozzle 13200 may be implemented as a protruding shape (hereinafter, protruding nozzle 13300) having a predetermined length to the outside of the crucible 13000.
  • the protruding nozzle 13300 may be formed in the crucible 13000 in various shapes and materials.
  • FIG 3 is a view showing a protruding nozzle formed in a crucible according to an embodiment of the present application.
  • the protruding nozzle 13300 may be formed in a rectangular shape.
  • the shape of the protruding nozzle 13300 is not limited to the shape shown, but may be a shape of a cylinder, a triangular prism, a cone, or the like.
  • the protrusion nozzle 13300 considers an issue in which the junction of the crucible 13000 and the protrusion nozzle 13300 becomes unstable due to thermal expansion of the crucible 13000 when the crucible 13000 is heated.
  • the material of the protruding nozzle 13300 may be used. That is, the material of the protruding nozzle 13300 may be the same material as the material of the crucible 13000 so that the material does not have the same coefficient of thermal expansion.
  • the heating assembly may be designed to smoothly discharge the deposition material through the protrusion nozzle according to the exemplary embodiment of the present application.
  • the material for implementing the protruding nozzle according to the exemplary embodiment of the present application may be variously selected.
  • a material having a low adhesive property with the deposition material may be selected.
  • the adhesion property between the passage of the protruding nozzle and the deposition material is lowered, the deposition material may be smoothly discharged to the outside by moving the inner passage of the protruding nozzle without being adhered to the protruding nozzle.
  • the shape of the protrusion nozzle according to the exemplary embodiment of the present application may be variously implemented.
  • the inner passage of the protruding nozzle may be implemented to have a predetermined slope.
  • the deposition apparatus 10000 may be provided with a heating means 15000 for raising the temperature of the crucible 13000.
  • the heating means 15000 may be implemented in various forms.
  • the heating means 15000 may include (1) traditional heating means 15000, (2) ions, etc., such as a pipe capable of supplying heat vapor, and a heating device using fossil fuel.
  • the latest heating means 15000 such as a sputtering heating source for heating the target material by momentum transfer, an arc heating source for heating by an arc, and a resistance heating source for heating based on electrical resistance such as a conducting wire.
  • the coil 16000 may be preferably selected as the heating means 15000 of the present application.
  • the coil 16000 may form a dynamic magnetic field that varies in time and space based on a high frequency coil current flowing through the coil 16000.
  • the magnetic field formed around the coil 16000 may heat the crucible 13000 by inducing a current in the crucible 13000 and generating a heat amount in the crucible 13000. An operation in which the crucible 16000 is heated by the coil will be described in detail later.
  • the coil 16000 may be implemented with various materials through which current can flow.
  • a conductor may be selected as a material of the coil 16000.
  • the conductor may include a metal body, a semiconductor, a superconductor, plasma, graphite, a conductive polymer, and the like.
  • various materials of the coil may be selected without being limited to the above.
  • FIG. 4 is a view showing the shape of a coil according to an embodiment of the present application.
  • the coil 16000 may have various shapes.
  • the coil 16000 may include (1) an open shape formed by a single loop having a shape such as an annular ring or a ring, and (2) a closed shape formed by a plurality of loops in a hollow cylindrical shape.
  • the coil 16000 may be implemented in any shape as long as it can generate a magnetic field.
  • a portion of the coil 16000 in which the plurality of windings are visible is referred to as a side of the closed shape, and a portion having a hole such as a circle or a square in the coil 16000 of the closed shape is referred to as the coil 16000. I will say the top or bottom of).
  • the definition of the structure of the coil 16000 may also be applied to the open shape coil 16000.
  • the windings through which the current constituting the coil 16000 according to the exemplary embodiment of the present application may have various forms.
  • the shape of the winding may be implemented in a variety of appearances so as to have a number of shapes, such as round shape, rectangular shape.
  • the thickness of the winding may also vary depending on the purpose.
  • an empty space may be formed inside the winding of the coil 16000 according to the exemplary embodiment of the present application.
  • an empty space may be formed inside the winding of the coil 16000 such that a fluid that may serve as a coolant such as water flows.
  • the fluid flowing along the coil 16000 may have an effect of controlling the temperature so that the coil 16000 does not rise above a certain temperature.
  • the arrangement of the coil 16000 according to the exemplary embodiment of the present application may vary depending on the shape of the coil.
  • FIG. 5 is a view showing a crucible and a coil according to an embodiment of the present application.
  • the crucible 13000 when the coil 16000 is a closed shape, the crucible 13000 may be provided inside the closed shape coil 16000.
  • Coil 16000 may be disposed.
  • it may be a shape of placing the top or bottom of the closed shape coil 16000 on the top, side, and / or bottom of the crucible 13000.
  • the above-described aspect in which the closed shape coil 16000 is disposed may be applied.
  • the top or bottom of the coil 16000 may be folded. May be disposed in the table 13000.
  • the coil 16000 may be disposed corresponding to the structure and / or means formed in the crucible 13000.
  • FIG. 6 is a diagram illustrating an example in which a coil is implemented according to an embodiment of the present application.
  • the coil 16000 may be raised to a position corresponding to the protruding nozzle 13300 as illustrated.
  • the deposition material passing through the protruding nozzle 13300 does not receive sufficient heat, the deposition material may not move smoothly through the passage of the protruding nozzle 13300. Therefore, when the coil is disposed around the protruding nozzle 13300 as described above, sufficient amount of heat may be supplied to allow the coil 16000 to smoothly move the deposition material moving through the passage of the protruding nozzle 13300 to the surface to be deposited. Can be.
  • FIG. 7 is a diagram illustrating a coil disposed near a protruding nozzle according to an embodiment of the present application.
  • a coil may be disposed near a protruding nozzle of a crucible according to an embodiment of the present application.
  • the coil (hereinafter, referred to as a first coil) disposed near the protruding nozzle increases the amount of heat generated in the deriving nozzle, thereby supplying a sufficient amount of heat to the deposition material passing through the protruding nozzle.
  • the deposition material can smoothly pass through the protruding nozzle.
  • the coil is disposed close to the protruding nozzle, the attribute of increasing the amount of heat generated in the protruding nozzle will be described later in detail.
  • the coil disposed near the protruding nozzle may be separated from the coil (hereinafter, referred to as a second coil) disposed on the side of the crucible. That is, when separating the crucible as shown in FIG. 7, the first coil and the second coil may be separated separately.
  • an inner passage through which the above-described fluid may flow may be formed in the second coil, but may not be formed in the first coil. This is to facilitate separation of the first coil and the second coil.
  • the power applied to the coil disposed near the nozzle and the coil disposed on the crucible side may have the same property.
  • the power having the same property applied to the first coil and the second coil may be a power applied in parallel (hereinafter, referred to as a parallel power supply).
  • the parallel power source may be connected to a coil in a plurality of output lines output from one power supply unit, and each output line may be connected to each coil.
  • each divided output line is connected to each coil to configure the power applied to the first coil and the second coil in parallel.
  • each driven coil is referred to as a separate drive coil.
  • the separate driving coil will be described later in detail.
  • variable power source of varying electrical properties may be applied to the coil 16000 according to an embodiment of the present application.
  • a variable power supply may preferably be a high frequency AC power supply such as RF, and may be a low frequency AC power supply in some cases.
  • a current (hereinafter, referred to as a coil current) may flow in the coil 16000 according to the exemplary embodiment of the present application.
  • the electrical property of the coil current may be strength, direction, or the like. Accordingly, the coil current may change an electrical property corresponding to the AC power. Therefore, the coil current may change in intensity, direction, etc. in time corresponding to the AC power.
  • a dynamic magnetic field is formed around the coil 16000, and the dynamic magnetic field generates heat by forming an induced current in the crucible 13000, and as a result,
  • the coil 16000 may inductively heat the crucible 13000.
  • the property of the magnetic field formed by the coil 16000 and the property of the induced current formed in the crucible 13000 according to an embodiment of the present application will be described.
  • FIG. 8 is a conceptual diagram illustrating a magnetic field formed around a coil according to an embodiment of the present application.
  • the intensity value of the magnetic field 16100 and the magnetic flux density value may not exactly match according to the permeability of the space in which the magnetic field 16100 is formed.
  • the strength of the magnetic field 16100 and the magnetic flux density are in proportional relationship. Therefore, on the basis of the proportional relationship, the concept of magnetic flux density and the concept of the strength of the magnetic field are substantially the same.
  • the magnetic flux (16200) is dense may mean that the strength of the magnetic field is large, and that the strength of the magnetic field is large may mean that the magnetic flux is dense. have.
  • the intensity property of the magnetic field 16100 may be changed according to a distance relationship with the source of the magnetic field 16100.
  • the intensity of the magnetic field 16100 may be smaller as the magnetic field 16100 formed at a distance from the source.
  • the intensity of the magnetic field 16100 may decrease as the number of magnetic lines passing through a predetermined area formed at a distance from the source decreases. On the contrary, the closer the coil 16000 is, the stronger the strength of the magnetic field 16100 may be.
  • the magnetic field 16100 formed around the coil 16000 of the present application may have a dynamic property.
  • the formed magnetic field 16100 of the present application may rapidly change direction and intensity properties according to a time change in the time axis.
  • the dynamic magnetic field is a vector concept that includes directional properties as well as intensity properties. Specifically, when one direction of the coil current flowing in accordance with the variable power applied to the coil 16000 is (+), the other direction opposite to this may be referred to as (-).
  • the coil current continuously changes in the directions from (+) to (-) and (-) to (+), and at the same time, the strength of the current also changes continuously. Accordingly, as the coil current suddenly changes in the positive and negative directions of the coil current, the direction of the magnetic field 16100 may also be rapidly changed in one direction and the other direction corresponding thereto. At the same time, the strength property of the magnetic field 16100 may be determined corresponding to the strength property of the coil current.
  • a dynamic magnetic field 16100 having fluctuating directions and intensities may be formed around the coil 16000.
  • the change in intensity of a dynamic magnetic field is a quantitative concept.
  • the intensity change value of the magnetic field is an amount of change in the intensity of the magnetic field per unit time considering the direction of the magnetic field. Specifically, the change value of the magnetic fields formed in the same direction is simply the amount of change in the intensity of the magnetic field, but the change value of the magnetic fields formed in the other direction is determined according to the change amount of the magnetic field strength in consideration of the direction of the magnetic field,
  • the intensity change value attribute of the dynamic magnetic field 16100 may vary depending on the distance from the coil 16000.
  • the strength of the dynamic magnetic field 16100 is described above.
  • the magnetic field 16100 forming property may be applied.
  • the strength of the magnetic field formed at the distance may decrease. Therefore, the magnitude of change in the intensity of the magnetic field to be formed is also small, so that the intensity change value of the magnetic field is small.
  • the intensity change value of the dynamic magnetic field 16100 increases.
  • various shapes in which the coil 16000 is implemented may change an intensity change value of the dynamic magnetic field 16100.
  • the magnetic field formed according to the above-described embodiment of the present application may form an induced current in the crucible 13000.
  • induced electromotive force may be generated in the crucible 13000 by the dynamic magnetic field generated by the coil 16000.
  • the induced current may flow in the crucible 13000 according to the generated electromotive force.
  • the crucible 13000 may have a current path of induced current.
  • FIG. 9 is a conceptual diagram illustrating a magnetic field and a crucible formed in a coil according to an embodiment of the present application.
  • a current path guided to the crucible 13000 may be formed on the outer wall 13100 of the crucible 13000.
  • one form of the induced current path may be a form surrounding the outer wall 13100 of the crucible 13000.
  • a current path having a local circumference in the outer wall 13100 of the crucible 13000 may be formed.
  • the crucible 13000 may have a current path in which the above-described paths are combined at the same time, as well as a magnetic field shape in which the coil 16000 is generated without being limited to the above-described current paths. It may have various types of current paths in response to the change.
  • the property of the induced current according to an embodiment of the present application may have various properties according to the relationship between the coil 16000, the magnetic field formed in the coil 16000, and the crucible 13000, which will be described below. Do it.
  • the intensity of the induced current may mean the amount of charge moving in the crucible 13000 per unit time. That is, the meaning of the intensity of the induced current in the present specification is a quantitative concept to reveal that the concept implies the meaning of how much charge has moved.
  • the electrical property of the induced current induced in the crucible 13000 according to the exemplary embodiment of the present application may vary depending on the property of the dynamic magnetic field formed in the coil 16000.
  • the intensity property of the induced current formed may be increased.
  • the above relation (1) (2) Accordingly, as the intensity change value of the dynamic magnetic field increases, the force applied to the electrons of the crucible 13000 may increase, and the electromotive force affecting the movement of the electrons may increase. As a result, the amount of electrons that can move in the crucible 13000 increases, thereby increasing the intensity property of the induced current.
  • the electrical property of the induced current induced in the crucible 13000 according to the exemplary embodiment of the present application may vary depending on the shape of the crucible 13000.
  • the intensity of the induced current may be increased when the thickness of the curable is thick corresponding to the thickness of the curable, and the intensity of the induced current may be small when the thickness is thin.
  • the amount of electrons included in the thickness may be changed.
  • the amount of electrons when the thickness of the crucible 13000 is thick is increased as compared with the amount of electrons having a relatively thin thickness. Accordingly, as the thickness of the crucible 13000 increases, the amount of electrons that can move by the magnetic field is increased, so that the thicker the crucible 13000, the greater the intensity of the induced current.
  • the induced current according to an embodiment of the present application may form an induction magnetic field in the crucible 13000 once again according to the magnetic field formation property.
  • the induced magnetic field may form an induced current secondary to the crucible 13000 according to the induced current forming property. That is, in the crucible 13000 according to the exemplary embodiment of the present application, an event of forming an induced current and forming an induced magnetic field may occur in series.
  • calories may be generated in various ways.
  • heat may be generated by combining an inductive current induced in the crucible 13000 and an electrical resistance component of the crucible 13000.
  • the induced current and / or induced current path induced in the crucible 13000 may be converted into calories by the resistance component of the crucible 13000.
  • the amount of heat generated in the crucible 13000 increases as the intensity of the induced current increases.
  • the crucible 13000 may generate heat in the crucible 13000 according to a combination of a dynamic magnetic field formed around the coil 16000 and an electromagnetic component of the crucible 13000.
  • the amount of heat generated by the induced current and / or the dynamic magnetic field in the above-described crucible 13000 may heat the crucible 13000. Since the crucible 13000 is heated by an induction current induced by the coil 16000 and a dynamic magnetic field, the crucible heating may be referred to as induction heating.
  • Induction heating there are a number of ways as described above, but in the following according to the inductive current formed in the crucible (13000) and the resistance component of the crucible (13000) crucible (13000) ) Will only be described when induction heating.
  • a means for assisting the heating means 15000 there may be a means for assisting the heating means 15000.
  • the heating means 15000 according to an embodiment of the present application is the coil 16000
  • a magnetic field focusing structure 17000 that focuses a magnetic field formed around the coil 16000 is provided to the heating assembly as a heating aid. It may be provided.
  • the term "concentration" may be interpreted to mean that the magnetic flux of the magnetic field is concentrated in a certain area.
  • the ferrite 18000 as an example of the magnetic field focusing structure 17000 will be described.
  • the ferrite 18000 is described as an example of the magnetic field focusing structure 17000, but the present invention is not limited thereto, and any means or material capable of focusing the magnetic field may be implemented in the heating assembly as the magnetic field focusing structure 17000. It is revealed.
  • the ferrite 18000 may be implemented in various materials, types, and shapes.
  • the ferrite 18000 is an ionic compound having a spinel structure, and may be formed by combining various metal compounds with the main component of iron oxide.
  • the various metal compounds may be divalent metal ions such as Mn, Zn, Mg, Cu, Ni, Co, and the like.
  • the ferrite 18000 is not limited to the above-described components, and may be formed of a material of a component that focuses various magnetic fields.
  • the ferrite 18000 may include (1) a liquid type that may exist in a liquid phase at room temperature and (2) a solid type that may have a predetermined shape at room temperature.
  • the ferrite 18000 may have various shapes to suit the purpose, such as a plate shape, a shape having convex protrusions on at least one surface of the plate shape, a circular shape, an ellipse shape, a spherical shape, and the like.
  • the magnetic field focusing of the ferrite 18000 which is an example of the magnetic field focusing structure 17000 according to the exemplary embodiment of the present application, will be described.
  • FIG. 10 is a view showing a ferrite placed in a magnetic field according to an embodiment of the present application.
  • the ferrite 18000 placed in the magnetic field may affect the magnetic flux of the magnetic field.
  • the ferrite 18000 may act to attract the magnetic flux formed around the ferrite 18000 to the ferrite 18000 such that the magnetic flux of the magnetic field is densely formed around the ferrite 18000.
  • the influence of the magnetic flux may vary depending on the thickness of the ferrite 18000. As the thickness of the ferrite 18000 increases, magnetic fluxes that may be formed around the ferrite 18000 may increase.
  • the ferrite 18000 may be disposed in the heating assembly of the present application.
  • the ferrite 18000 disposed in the heating assembly according to the exemplary embodiment of the present application may have a magnetic field focusing property that increases the intensity change value of the dynamic magnetic field affecting the crucible 13000.
  • FIG. 11 is a view showing a ferrite, a coil, and a magnetic field formed around the coil according to an embodiment of the present application.
  • the ferrite 18000 when the ferrite 18000 according to the exemplary embodiment of the present application is disposed in the heating assembly, the ferrite 18000 has an outer wall 13100 of the magnetic flux of the dynamic magnetic field that is crucible 13000. It can be focused to form densely.
  • the dynamic magnetic flux closely formed on the outer wall 13100 of the crucible 13000 may be due to the above-described properties of the ferrite 18000.
  • the ferrite 18000 disposed on the outside of the coil 16000 may attract the magnetic flux to the crucible 13000 by attracting the magnetic flux formed inside the coil 16000.
  • the dynamic magnetic flux closely formed on the outer wall 13100 of the crucible 13000 may be a property of the magnetic field forming property in addition to the properties of the ferrite 18000.
  • the ferrite 18000 disposed outside the coil 16000 may attract the magnetic flux that is formed outside the coil 16000 according to the properties of the ferrite 18000.
  • the magnetic field velocity symmetrically formed inside the coil 16000 may be pulled into the crucible 13000 symmetrically by the magnetic field forming property that the magnetic field is symmetrically formed around the coil 16000. Accordingly, the magnetic flux of the dynamic magnetic field is densely formed on the outer wall 13100 of the crucible 13000.
  • the strength in the positive and negative directions of the dynamic magnetic field of the coil 16000 formed on the outer wall of the crucible 13000 increases simultaneously.
  • the fluctuation amplitude of the dynamic magnetic field also increases correspondingly. That is, the intensity change value of the dynamic magnetic field generated at the outer wall 13100 of the crucible 13000 is larger than when the ferrite 18000 is not disposed.
  • the heating efficiency in the present specification means the amount of heat generated in the crucible 13000 compared to the electrical energy input to the coil which is the heating means 15000 of the present application. That is, when the electrical energy input to the coil is the same, the greater the amount of heat generated in the crucible 13000, the greater the heating efficiency (or thermal efficiency).
  • the heating efficiency of the crucible 13000 in the case of arranging the ferrite 18000 in the heating assembly according to the exemplary embodiment of the present application may be higher than in the case of not arranging the ferrite 18000.
  • FIG. 12 illustrates a ferrite disposed in a heating assembly according to one embodiment of the present application.
  • FIG. 13 is a distribution chart of magnetic field intensity change values according to an embodiment of the present application.
  • the ferrite 18000 may be formed to surround the coil 16000 disposed outside the crucible 13000.
  • a ferrite 18000 having a shape corresponding to the shape of the coil 16000 disposed in the crucible 13000 may be disposed.
  • corresponding to the sides of the coil 16000 of the rectangular shape of the rectangular shape disposed on the outside of the crucible 13000, slopes facing each side are formed therein so that the inside is hollow.
  • Shaped ferrite 18000 may be disposed.
  • the heating efficiency of the crucible 13000 according to the exemplary embodiment of the present application may be increased.
  • the change value intensity distribution of the dynamic magnetic field formed in the coil according to the exemplary embodiment of the present application may be changed by the crucible disposed in the heating assembly.
  • the intensity distribution of the change value of the dynamic magnetic field formed inside the coil may be shifted toward the outer wall of the crucible.
  • the maximum magnitude of the change value of the magnetic field is As such, the arrangement of the crucibles 13000 may not significantly change.
  • the change value intensity distribution of the dynamic magnetic field formed in the coil may be changed by the ferrite 18000 disposed in the heating assembly, for example, FIG. 12 (a).
  • the ferrites 18000 are disposed as shown in FIGS. 1 through 3
  • magnetic fields may be focused on the outer walls of the crucibles by the ferrites 18000.
  • coils formed on the outer walls of the crucibles 13000 may be used.
  • the intensity in the positive and negative directions of the dynamic magnetic field of (16000) increases simultaneously.
  • the bidirectional magnetic field strength rises the fluctuation amplitude of the dynamic magnetic field also increases correspondingly. That is, the intensity change value of the magnetic field is
  • the intensity change value of the magnetic field may be larger in the outer wall than before the ferrite 18000 is disposed.
  • the induced current intensity may increase further in the crucible 13000 after the ferrite 18000 is disposed than in the crucible 13000 before the ferrite 18000 is disposed.
  • the ferrite 18000 may be implemented to enclose the upper and lower portions of the coil 16000 disposed in the crucible 13000.
  • the ferrite 18000 may be disposed to the upper part and the lower part of the closed shape coil 16000.
  • such a ferrite 18000 is not only disposed outside the crucible 13000, but also to increase the heating efficiency of the crucible 13000. It may be arranged in a form included therein.
  • FIG. 14 is a cutaway side view illustrating ferrite included in an outer wall of a crucible according to an embodiment of the present application.
  • the ferrite 18000 is formed on the outer wall 13100 of the crucible 13000, so that a dynamic magnetic field may be focused on the outer wall 13100 of the crucible 13000. As the dynamic magnetic field is focused, the heating efficiency of the crucible 13000 may be increased.
  • the ferrite 18000 according to an embodiment of the present invention may be implemented in a form applied to the crucible 13000 to increase the heating efficiency of the crucible 13000.
  • FIG. 15 is a view illustrating a shape in which ferrite is applied to the deposition apparatus 110000 according to an embodiment of the present application.
  • the ferrite 18000 according to an embodiment of the present application may be implemented in a form that is applied to the heating assembly is coated on the heating assembly configuration.
  • the ferrite 18000 may be applied to the inner surface of the outer wall of the housing 11000 surrounding the crucible 13000.
  • the ferrite 18000 may be applied to the inner surface of the outer wall of the housing 11000 surrounding the side portion of the crucible 13000.
  • the ferrite 18000 may be applied to the crucible 13000. As shown in FIG. 15B, ferrite 18000 may be applied to the side outer wall 13100 of the crucible 13000.
  • the thickness of the ferrite 18000 to be applied to the heating assembly may be variously selected depending on the design purpose of the deposition apparatus 10000.
  • the thermal efficiency of the crucible 13000 is increased, and as a result, the amount of heat transferred from the crucible 13000 to the deposition material. Can be a lot.
  • the present deposition apparatus 10000 may have an effect of efficiently using energy by arranging the ferrite 18000 to have a high heat output relative to the same input energy.
  • the deposition material 10000 may have sufficient energy to actively move the deposition material according to the high heat output, and thus the deposition apparatus 10000 may have an effect of increasing the success rate at which the deposition material is formed on the surface to be deposited.
  • the actual efficiency of the deposition means not only that the deposition material is properly formed on the surface to be deposited, but may also mean that the deposition surface is formed to have a uniform thickness or concentration.
  • the deposition apparatus 10000 for depositing a deposition material on the surface to be deposited it may be an important issue to increase the deposition efficiency in which the deposition material is deposited on the surface to be deposited.
  • the amount of heat distributed in each space of the crucible 13000 may be controlled differently.
  • the temperature of the deposition material passing through the nozzle 13200 may be increased.
  • the deposition material is smoothly discharged to the surface to be deposited through the nozzle 13200 and is formed on the surface to be deposited, so that the present deposition apparatus 10000 may have an effect of increasing the actual efficiency of the deposition.
  • the amount of heat distributed in the space of the crucible 13000 can be uniformly controlled.
  • the heat distribution allows deposition materials discharged from each nozzle formed in the crucible to move together toward the deposition surface. Accordingly, the deposition material may be uniformly formed on the surface to be deposited, so that the actual efficiency of the deposition may be increased.
  • 16 is a schematic diagram illustrating a heat distribution of a crucible according to an embodiment of the present application.
  • FIG. 17 is a schematic diagram illustrating a heat distribution of a crucible according to an embodiment of the present application.
  • an area of a side close to the upper surface of the crucible 13000 on which the nozzle 13200 is formed will be described as an N area side and a relatively far area as an F area side.
  • the heat distribution of the crucible 13000 to be achieved in the present invention may be a heat distribution having a heat distribution relatively higher than the F region side of the N region side of the crucible 13000 side.
  • the deposition material may be sufficiently supplied with heat from the N region side of the crucible 13000 to smoothly pass through the nozzle 13200 and move to the deposition surface. .
  • the heat distribution is just one example, and the heat distribution of the crucible 13000 is not limited thereto, and the heating assembly is configured such that the heat distribution in the X-axis and Y-axis directions may be variously generated in different regions. This can be implemented.
  • the heat distribution of the crucible 13000 to be achieved in the present invention may be a heat distribution having a uniform amount of heat generated in the X-axis direction of the crucible 13000 as shown in FIG. 17.
  • the amount of heat generated according to the Z-axis direction may vary.
  • the generation of calories is high at the side of the crucible in which the nozzle is formed.
  • the thermal distribution of the furnace crucible can be formed.
  • the heat distribution of the crucible is not generated in the Z axis direction. It may also be controlled by a uniform distribution of heat.
  • the outer wall 13100 of the crucible 13000 may be controlled so that the spatial distribution of the amount of heat provided to the deposition material accommodated in the inner space of the crucible 13000 may be controlled by the predetermined distribution as described above.
  • the intensity distribution of the induced current induced in can be appropriately controlled. For example, when defining left and right directions and up and down directions with respect to one of the four heating surfaces of the crucible 13000, the distribution of the induced currents for the one heating surface is the left and right directions. It may be appropriately controlled according to, or may be appropriately controlled along the vertical direction.
  • the crucible 13000 may be manufactured to control the distribution of the induced current using the shape of the outer wall 13100 of the crucible 13000.
  • the heating assembly may be manufactured so that the distribution of the induced current is controlled by using the distance between the crucible 13000 and the coil 16000.
  • the heating assembly may be manufactured such that the distribution of the induced current is controlled using the arrangement / distribution of the magnetic field focusing part.
  • the heating assembly may be manufactured so that the distribution of the induced current is controlled using independent control of the coil 16000.
  • the nozzle 13200 is illustrated as being formed upward in the drawings and the following description, this does not mean that the deposition equipment is a top-down or bottom-up equipment.
  • the shape of the crucible shown generally in the drawings below is a rectangular parallelepiped shape having a longitudinal direction, but this is merely an example as described above.
  • the embodiments described below can be applied to heating assemblies having crucibles of various shapes.
  • the crucible 13000 may be formed to have various distance relationships from the coil 16000, which is the heating means 15000 formed. Can be.
  • FIG. 18 is a side cutaway view showing an example of changing a shape of a crucible according to an embodiment of the present application.
  • the crews arranged around the crucible 13000 and the side regions of the side surfaces of the crucible 13000 may have different distance relationships.
  • Sable 13000 may be implemented. Specifically, the crucible 13000 is closer to the bottom of the crucible 13000 near the top of the crucible 13000 than the side of the crucible 13000 (hereinafter referred to as N region side), which is closer to the bottom surface opposite to the top surface on which the nozzle 13200 is formed.
  • the side surface of the tablet 13000 (hereinafter referred to as an F region side surface) may be recessed and implemented.
  • a side surface of the crucible 13000 near the bottom surface of the crucible 13000 may be formed to have a predetermined inclination.
  • the side surface of the crucible 13000 having the longest distance from the nozzle 13200 formed in the crucible 13000 is farthest from the coil 16000, and the coil formed closer to the side from the nozzle 13200.
  • the crucible 13000 may be formed to have a distance from the 16000.
  • the N region side may be controlled to have a heat distribution formed higher than the heat quantity of the F region side.
  • Magnetic field formation properties described above described above (described above, )
  • the intensity change value of the dynamic magnetic field formed on the N region side of the crucible 13000 implemented closer to the coil 16000 than the side of the F region may be increased. Therefore, the intensity of the induced current formed in the crucible 13000 corresponding to the intensity change value of the magnetic field is higher in the N region than in the F region. Therefore, as a result, referring to FIG. 16A, when the crucible 13000 is implemented as described above, the N region side close to the nozzle 13200 may be controlled to have a heat distribution formed higher than the heat quantity of the F region side. Can be.
  • the amount of heat generated in the upper end of the crucible 13000 increases, so that the temperature may be relatively higher than the lower end.
  • the deposition material emitted from the crucible 13000 may have a high active energy and may have an effect of being directed to the deposition surface through the nozzle 13200 of the crucible 13000 at a high speed.
  • the heat distribution may be controlled to be a more natural heat distribution in terms of the F region.
  • the deposition material when the deposition material moves toward the nozzle 13200 in the crucible 13000, a naturally increasing amount of heat may be supplied.
  • the deposition material may have an effect of naturally moving to the surface to be deposited as compared with when the deposition material is discontinuously supplied with heat.
  • the heat distribution in the crucible 13000 may be controlled.
  • 19 is a side cutaway view showing examples of changing a thickness of a crucible according to an embodiment of the present application.
  • the crucible 13000 according to the exemplary embodiment of the present application may be formed such that regions having different thicknesses exist.
  • the crucible 13000 may be formed to have a thickness different from a portion close to the nozzle 13200 formed in the crucible 13000 (the N region side) and a relatively far portion (the F region side).
  • the thickness of the side of the F region of the crucible 13000 may be thinly formed.
  • the outer side of the F region side surface is formed in a recessed shape into the crucible 13000, so that the thickness may be thinner than that of the N region side surface.
  • the inner wall of the side of the F region of the tablet 13000 may be formed to be dug outwardly of the crucible 13000 so that the thickness of the side of the F region may be relatively thinner than the thickness of the side of the N region.
  • the thickness of the side of the F region may be formed in a shape that is recessed outward from the inner wall from the outer wall 13100 inward from the outer wall 13100 by combining the above-described shapes.
  • the distance from the coil 16000 may also vary.
  • the thickness of the F region side surface of the crucible 13000 according to the exemplary embodiment of the present application is thinly formed in the form of a hollow from the outside to the inside of the coil 16000. The distance can also be greater.
  • the crucible 13000 When the crucible 13000 is implemented as described above according to an embodiment of the present application, the crucible 13000 has a magnetic field forming property (described above, Or according to the induced current property (described above, the thickness of the crucible 13000), the N region side surface as shown in FIG. 16A may be controlled to have a heat distribution formed higher than the heat quantity of the F region side surface.
  • a dynamic magnetic field having a large change in magnetic field strength may be formed on the N region side of the crucible 13000.
  • a relatively high induction current may flow in the thick side (N region side) of the crucible 13000. The generation of heat on the side of the N region is increased by the induction current having high intensity, so that the heat distribution of the crucible 13000 can be controlled as described above.
  • the crucible 13000 according to the exemplary embodiment of the present application has a different thickness and has a predetermined angle of inclination. It can have an area.
  • the distance to the coil 16000 of the side of the F region of the crucible 13000 may be continuously changed. Accordingly, the N region side surface may have a higher heat distribution than the F region side surface, and thus may be controlled to have a more natural heat distribution in the F region side as shown in FIG.
  • the amount of feed supplied to the deposition material passing through the N region side is increased, thereby guiding smoothly to the surface to be deposited, thereby increasing the actual efficiency of deposition.
  • the crucible 13000 is illustrated as being present inside the coil 16000 of the formed closed shape, the present invention may not be limited thereto.
  • the coil 16000 In order to control the heat distribution of the crucible 13000 in order to increase the actual efficiency of the deposition according to the exemplary embodiment of the present application, there are various methods of implementing the coil 16000. For example, there may be a method of adjusting the number of windings of the coil 16000, a method of variously implementing a distance from the crucible 13000, and the like.
  • FIG. 20 is a view showing a coil formed on the outside of the crucible according to the exemplary embodiment of the present application.
  • the number of windings of the coil 16000 may be differently disposed in the side region of the crucible 13000 according to the exemplary embodiment of the present application.
  • the crucible which exists at a distance closer to the nozzle 13200 than the coil 16000 formed in the region (region F side surface) of the crucible 13000 far from the nozzle 13200 of the crucible 13000.
  • More windings of the closed-shape coil 16000 may be disposed to affect the region (13000) of the region (N region side).
  • the crucible 13000 may be an exemplary embodiment in which the upper part or the lower part of the plurality of closed shape coils 16000 is disposed on the N region side of the crucible 13000.
  • the number of turns of the coil 16000 disposed on the side of the N region may be implemented with more coils 16000.
  • the N region side may be controlled to have a heat distribution formed higher than the heat amount of the F region side.
  • Magnetic field formation properties described above described above (described above, )
  • the intensity change value of the dynamic magnetic field formed on the side of the N region of the crucible 13000 in which the coil 16000 is disposed more than the side of the region F may be increased.
  • the intensity of the induced current formed in the crucible 13000 is also higher in the N region than in the F region.
  • the N region side close to the nozzle 13200 may be controlled to have a heat distribution formed higher than the heat amount of the F region side. Can be.
  • the amount of heat generated at the upper end of the crucible 13000 increases, so that the temperature may be relatively higher than that of the lower part.
  • the deposition material emitted from the crucible 13000 may have a high active energy at a high speed.
  • Through the nozzle 13200 of the crucible 13000 may have an effect that can be directed to the surface to be deposited.
  • the coil 16000 may have various embodiments in a positional relationship with the outer wall 13100 of the crucible 13000.
  • the coil 16000 according to an embodiment of the present application may be disposed by making the distance at which the coil 16000 is formed on the other surface smaller than the distance formed on one surface of the crucible 13000.
  • FIG. 21 is a diagram illustrating a coil formed on an outer side of a crucible according to an embodiment of the present application.
  • the distance of the coil 16000 may be different from each other in the side region of the crucible 13000 according to the exemplary embodiment of the present application.
  • the distance of the closed-shape coil 16000 that affects the region (13000) (the N region side) may be formed closer.
  • the crucible 13000 may be the upper part or the lower part of the plurality of closed shape coils 16000. It may be an embodiment formed with a distance relatively closer to the N region side of the 13000 region than the F region side.
  • the N region side may be controlled to have a heat distribution formed higher than the heat amount of the F region side.
  • Magnetic field formation properties described above described above (described above, )
  • the intensity change value of the magnetic field formed on the N region side of the crucible 13000 in which the coil 16000 is implemented may be greater than the side of the region F.
  • the intensity of the induced current formed in the crucible 13000 is also higher in the N region than in the F region. Therefore, as a result, referring to FIG. 21A, when the crucible 13000 is implemented as described above, the N region side close to the nozzle 13200 may be controlled to have a heat distribution formed higher than the heat quantity of the F region side. Can be.
  • the coil 16000 implemented in the deposition apparatus 10000 according to the exemplary embodiment of the present application may be driven separately to control the heat distribution of the crucible 13000.
  • FIG. 22 is a conceptual diagram illustrating an example in which a coil implemented in the deposition apparatus 10000 according to an embodiment of the present application is separately driven.
  • FIG. 23 is a diagram conceptually illustrating a heat distribution of a crucible according to an embodiment of the present invention.
  • the coil 16000 may be driven separately.
  • the attributes of the variable power applied to the separately driven coils 16300 and 16400 may be different.
  • the variable power source property may include a frequency and intensity property of a power source.
  • a plurality of powers having different attributes applied to the coil 16000 may be applied from a power supply device having a number corresponding to the number of power supplies.
  • a plurality of powers having different attributes applied to the coils 16300 and 16400 for each of the separately driven coils 16300 and 16400 may be applied through fewer power supplies.
  • electrical processing may be necessary, such as distributing output lines to supply power having different attributes for the coils 16300 and 16400 that are driven separately.
  • a separate drive coil according to an embodiment of the present application may have a layout example corresponding to various embodiments of the crucible.
  • coils 16300 and 16400 that are driven differently may be disposed for each region of the crucible.
  • the region of the crucible may be divided into an upper region and a lower region based on a structure in which the implemented crucible is separated.
  • a separate drive 1 coil 16300 may be disposed in the upper region of the crucible, and a separate drive 2 coil 16400 may be disposed in the lower region of the crucible. Accordingly, the properties of the magnetic field affecting each region of the crucible may be changed, and thus the amount of crucible heat generated in the upper and lower regions of the crucible may vary.
  • the separation structure of the crucible may be implemented in the crucible.
  • the region of the crucible may be divided into an upper region and a lower region based on the separated structure formed on the outer surface of the crucible.
  • the separately driven coils 16300 and 16400 may be disposed in the upper region and the lower region of the crucible, respectively.
  • the coil 16000 disposed in the crucible 13000 in order to increase the amount of heat generated in a portion close to the nozzle 13200 of the crucible 13000, the coil 16000 disposed in the crucible 13000 according to the above-described embodiment of the present application is separately driven. Can be.
  • the power frequency and intensity applied to the coil 16000 disposed in the nozzle 13200 may be relatively high.
  • the amount of heat generated by the crucible 13000 corresponding to the driving 1 16300 is driven. It can be higher than two.
  • the driving 2 coil 16400 may form a magnetic field that is relatively higher than the driving 1 around the magnetic field forming property.
  • the relatively high intensity magnetic field may increase the induced current intensity formed in the nozzle 13200 of the crucible 13000.
  • the separately driven coils 16300 and 16400 may be controlled to be the heat distribution of the crucible 13000 as shown in FIG. 23.
  • the deposition material discharged through the nozzle 13200 of the crucible 13000 may receive a sufficient amount of heat. Accordingly, the deposition material may be guided to the surface of the deposition target smoothly.
  • each of the magnetic fields generated from the separately driven coils 16300 and 16400 may interfere with, interfere with, and / or affect each other.
  • the strength of the magnetic field formed in the crucible 13000 may be weakened.
  • the intensity of the induced current formed in the crucible 13000 may be lowered, thereby causing an issue in which the heating efficiency of the crucible 13000 is lowered.
  • the separately driven coils 16300 and 16400 may be implemented so as not to influence each other.
  • 24 is a view illustrating a ferrite inserted between coils according to an embodiment of the present application.
  • a ferrite 18000 may be inserted between the separate drive coils 16300 and 16400. have. Magnetic fields that interfere with each other may be magnetic fields formed between the separate driving coils 16300 and 16400. The magnetic field formed between the separate driving coils 16300 and 16400 is formed in the direction of the other coil 16000 to affect the magnetic field formed in the other coil 16000. Therefore, the ferrite 18000 is inserted between the coils 16300 and 16400 so that a magnetic field formed between separate driving coils may be focused on the ferrite 18000.
  • the inserted ferrite 18000 may exclude mutual interference of the coils 16300 and 16400 that are separately driven.
  • the ferrite 18000 may affect the property of the magnetic field.
  • ferrite 18000 may affect the strength of the generated magnetic field.
  • the influence of the magnetic flux constituting the magnetic field may increase or decrease the number of magnetic rays passing through a predetermined area, thereby affecting the strength of the magnetic field.
  • the method includes a method of arranging the ferrite 18000 in various shapes, a method of arranging the ferrite 18000 inside the outer wall 13100 of the crucible 13000, and applying the ferrite 18000.
  • Method a method of arranging the ferrite 18000 for each region, and a method of opening a window to the ferrite 18000.
  • the ferrite 18000 may be embodied in a form having a slope.
  • the ferrite 18000 is not limited thereto, and the ferrite 18000 may exist in various forms such as a circle, an ellipse, or a sphere.
  • the ferrite 18000 may exist in various forms such as a circle, an ellipse, or a sphere.
  • the ferrite 18000 may be disposed in the crucible 13000 in various forms surrounding the coil 16000.
  • 25 is a view illustrating various shapes of ferrite according to an embodiment of the present application.
  • the ferrite 18000 may be disposed to cover a portion of the upper and / or lower conductive lines of the coil 16000 of the closed shape.
  • the ferrite 18000 may be disposed to partially open the lower portion of the closed shape coil 16000.
  • the ferrite 18000 may be disposed to partially open the upper portion of the coil 16000 of the closed shape as illustrated in FIGS. 28C and 28D.
  • the heat quantity of the N region side or the F region side of the crucible 13000 may be high.
  • the strength of the magnetic field formed on the N region side or the F region side of the implemented crucible 13000 may be increased.
  • the intensity of the induced current formed in the crucible 13000 also increases in the N region side or the F region side. Therefore, as a result, when the ferrite 18000 is disposed in the heating assembly as described above, the N region side close to the nozzle 13200 generates more heat than the F region side, or the F region side generates more heat than the N region side. To control the heat distribution.
  • the nozzle of the crucible 13000 at a high speed with a high active energy is deposited. 13200 may have an effect that can be directed to the surface to be deposited.
  • the deposition material may have an effect of supplying a sufficient amount of heat so as to shorten the phase change threshold time.
  • FIG. 26 illustrates a ferrite disposed in a form of covering a lower surface of a crucible according to an embodiment of the present application.
  • the ferrite 18000 may be disposed to completely cover the bottom surface of the crucible 13000.
  • the arrangement of the ferrite 18000 as described above may cause the heat distribution of the crucible 13000 having a large amount of heat on the lower surface of the crucible 13000 according to the magnetic field focusing property of the ferrite 18000.
  • the intensity change value of the dynamic magnetic field generated on the bottom surface of the crucible 13000 becomes relatively larger than other portions.
  • the intensity of the induced current generated on the lower surface of the crucible 13000 is increased, and the amount of heat generated according to the aforementioned induction heating property is also increased.
  • the bottom surface of the crucible 13000 on which the deposition material is deposited may be a heat distribution of the crucible 13000 in which a relatively large amount of heat is generated than the top and side surfaces of the crucible 13000.
  • the ferrite 18000 according to the exemplary embodiment of the present application may be arranged such that the amount of heat in the N region of the crucible 13000 becomes a thermal non-saturation of the crucible 13000 higher than that in the F region.
  • FIG. 27 is a view showing the shape of a ferrite according to an embodiment of the present application.
  • the ferrite 18000 may be disposed in the heating assembly with a different thickness.
  • the ferrite 18000 may have a different thickness of the ferrite 18000 for each location area corresponding to the side surface of the crucible 13000.
  • the ferrite 18000 has a thickness of the ferrite 18000 disposed at a position corresponding to the N region side rather than the thickness of the ferrite 18000 disposed at the position corresponding to the side F region of the crucible 13000. It can be placed thick.
  • the above-described arrangement of the ferrite 18000 may be a heat distribution of the crucible 13000 having a higher amount of heat at the N region side than the F region side.
  • the intensity change value of the magnetic field formed on the side of the N region may increase according to the magnetic field focusing property. Therefore, the intensity of the induced current formed in the crucible 13000 is also higher in the N region than in the F region.
  • the N region side surface of which the intensity of the induced current is large may be higher than the heat amount of the F region side surface according to the induction heating property.
  • the ferrite 18000 is As described above, the concept of varying the thickness of the ferrite 18000 may be applied to a region close to the nozzle 13200 of the crucible 13000 as described above.
  • the ferrite 18000 may be disposed to have a different distance from each location area corresponding to the side surface of the crucible 13000.
  • the ferrite 18000 may be disposed closer to the N region than the F region of the crucible 13000.
  • the ferrite 18000 may be formed with a slight inclination so as to be close to the nozzle 13200 portion of the crucible 13000 and far from the other portion.
  • the arrangement of the ferrite 18000 having the inclination according to the exemplary embodiment of the present application may be such that the heat distribution of the crucible 13000 is higher than the F region side.
  • the magnetic flux focused on the N region side rather than the F region side may be increased.
  • the intensity change value of the magnetic field formed on the side of the N region may be increased.
  • the intensity of the induced current formed in the crucible 13000 is also higher in the N region than in the F region. Therefore, referring to FIG. 16A, when the crucible 13000 is implemented as described above, the portion of the crucible 13000 having the N region side closer to the nozzle 13200 is higher than the calorific value of the F region side surface.
  • the heat distribution can be controlled.
  • the ferrite 18000 is formed to have a predetermined inclination so that the ferrite 18000 may be formed close to the nozzle 13200 of the crucible 13000.
  • the nozzle As long as the ferrite 18000 may be formed close to the portion 13200, the ferrite 18000 may be formed without being limited to any shape.
  • the ferrite 18000 disposed in the form of the crucible 13000 according to the exemplary embodiment of the present application may be implemented to be differently disposed for each region in the crucible 13000.
  • FIG. 28 is a cut side view illustrating ferrite included in an outer wall of a crucible according to an embodiment of the present application.
  • the ferrite 18000 when the ferrite 18000 according to the exemplary embodiment of the present application is disposed in the form of being inserted into the side of the crucible 13000, the ferrite 18000 may be formed to be differently formed for each region of the side surface. For example, the ferrite 18000 may be inserted into the N region side of the crucible 13000.
  • the ferrite 18000 disposed according to the exemplary embodiment of the present invention may have a heat distribution of the crucible 13000 having a higher amount of heat in the N region side than in the F region side.
  • the ferrite 18000 may increase the intensity change value of the dynamic magnetic field on the side of the N region of the crucible 13000 according to the focusing property of the magnetic field.
  • the intensity of the induced current formed in the crucible 13000 may also be higher in the N region side than in the F region side. Therefore, as illustrated in FIG. 16A, the N region side surface close to the nozzle 13200 may be controlled to be the heat distribution of the crucible 13000 formed larger than the heat quantity of the F region side surface.
  • the ferrite When the ferrite is applied according to an embodiment of the present application, it may be implemented in a form that is applied only to a portion of the heating assembly.
  • 29 is a view showing a ferrite 18000 applied to the heating assembly according to an embodiment of the present application.
  • the ferrite 18000 may include an inner surface of the outer wall of the housing 11000 and / or an outer wall 13100 of the crucible 13000. May be applied only to a portion of the area).
  • the intensity change value of the magnetic field may be increased in a portion of the crucible 13000 corresponding to the position where the ferrite 18000 is applied. Accordingly, the current intensity distribution induced in the crucible 13000 may vary, and as a result, by varying the amount of heat generated in the crucible 13000, as a result, the crucible 13000 of FIG. You will be able to control the heat distribution.
  • the ferrite 18000 according to the exemplary embodiment of the present application may be disposed in a location area corresponding to a portion of the side surface of the crucible 13000.
  • FIG. 30 is a view showing that the ferrite is formed in a portion close to the nozzle of the crucible according to an embodiment of the present application.
  • the ferrite 18000 may be disposed only in the location area corresponding to the N area of the side surface of the crucible 13000.
  • the ferrite 18000 may be disposed at a position corresponding to the N region with the inclination.
  • the ferrite 18000 when the ferrite 18000 is disposed, the ferrite 18000 may be a heat distribution of the crucible 13000 having a higher amount of heat in the N region side than in the F region side.
  • the ferrite 18000 may increase the magnetic field intensity change value of the N region side according to the focusing property of the magnetic field. Accordingly, the intensity of the induced current formed in the crucible 13000 is also higher in the N region than in the F region. Therefore, as a result, referring to FIG. 16, when the crucible 13000 is implemented as described above, the N region side close to the nozzle 13200 may be controlled to have a heat distribution formed higher than the heat amount of the F region side. Accordingly, as the heat distribution of the crucible 13000 is controlled as described above, the actual efficiency of deposition may be increased.
  • the heating assembly may have various implementations and / or arrangements for controlling the heat distribution of the crucible 13000 according to an embodiment of the present application.
  • 31 is a view illustrating a side of a crucible according to an embodiment of the present application.
  • each heating assembly may also be applied in the X-axis or Y-axis direction, such that the heating assembly may be implemented.
  • the above embodiments are applied in the Y-axis direction to describe an example in which the heating assembly is implemented.
  • a plurality of regions may be distinguished in the Y-axis direction of the crucible.
  • the region in the Y-axis direction of the crucible may be divided into N regions, hereinafter, each of the regions will be referred to as a first Y region to an Nth Y region.
  • the heating assembly may be designed based on the above-described various embodiments so that the heat distribution property is assigned to each of the first Y region to the Nth Y region.
  • the heating assembly may be designed such that the first heat distribution of the first Y region is higher than the second heat distribution of the second Y region.
  • 32 to 35 are views for designing a heating assembly in the Y axis direction according to an embodiment of the present application.
  • the crucible may be implemented to protrude relative to the side of the second Y region such that the side of the first Y region is formed closer to the coil than the side of the second Y region.
  • the thickness of the outer wall in the Y direction of the crucible is implemented differently so that the thickness of the crucible outer wall of the first Y region is thicker than the thickness of the crucible outer wall of the second Y region. Can be implemented.
  • the thickness of the outer wall of the crucible of the second Y region may be adjusted to increase the distance from the coil.
  • the coils arranged in the Y direction may be disposed with different distances from the outer wall of the crucible. Referring to FIG. 34, the coil may be disposed closer to the first Y region and farther away from the second Y region.
  • an embodiment and / or an arrangement of ferrites arranged in the Y direction may vary depending on the Y region.
  • the thickness of the ferrite disposed in the first Y region may be thicker than that of the second Y region, and as shown in FIG. May be implemented to be farther than the second Y region.
  • ferrite may be applied or disposed only to a region corresponding to the first Y region.
  • the intensity change value of the magnetic field in which the side of the first Y region of the crucible is affected more than the side of the second Y region is relatively larger according to the above-described idea.
  • the intensity of the induced current in the crucible side of the first Y region may be relatively larger than the second Y region in response to the intensity change value of the magnetic field.
  • the amount of heat generated at the side surface of the first Y region is relatively higher than that of the side surface of the second Y region, so that the heat distribution of the first heat distribution of the first Y region is higher than that of the second heat distribution of the second Y region.
  • Crucibles may be designed as much as possible.
  • the heating assembly is designed in the Y-axis direction, but is not limited thereto, the design examples may be used in the design of the heating assembly in the region of the X-axis direction.
  • the heating assembly is designed to control only the heat distribution of two regions of the plurality of Y regions, but the present invention is not limited thereto, and the above-described design is designed to design the heating assembly to control each thermal distribution of the N regions.
  • the intervals of the regions may exist in various ways at equal intervals, at different intervals, or at random intervals.
  • the deposition apparatus 10000 of the present application may be implemented in combination with all of the above-described embodiments for optimal implementation, and only some of the above-described embodiments may be implemented in combination.
  • 36 is a view illustrating a heating assembly implemented by combining the embodiments in the Z direction of the crucible according to the embodiment of the present application.
  • FIG. 37 is a view illustrating a heating assembly implemented by combining the embodiments in the X, Y, and Z directions of the crucible according to the embodiment of the present application.
  • the above-described embodiment of the crucible 13000 and the embodiment of the coil 16000 may be applied and combined in the regions Z1 to Z2, respectively.
  • a side surface of the crucible 13000 may protrude from the Z1 region, which is a side region close to the nozzle 13200 of the crucible 13000, to be closer to the coil 16000.
  • a coil 16000 having a large number of turns may be disposed at a corresponding position of the Z1 region. Accordingly, the heat generation of the crucible can be made high in the Z1 region, which is a side region close to the nozzle 13200 of the crucible 13000.
  • the deposition apparatus 10000 may be implemented by combining an embodiment in which the driving coil 16000 is separately implemented, an embodiment of the coil 16000, and an embodiment of the ferrite 18000. have.
  • the side of the crucible protrudes closer to the coil 16000 than the Z2 region, and the coil 16000 disposed in the Z1 and Z2 regions of the crucible 13000 is driven separately and disposed in the Y1 region.
  • the ferrite 18000 may be disposed over the Z1 to Z2 regions such that the ferrite 18000 is thicker than the ferrite 18000 disposed in the Z2 region. Accordingly, the heat generation of the crucible can be made high in the Z1 region, which is a side region close to the nozzle 13200 of the crucible 13000.
  • the amount of heat generated in the crucible 13000 is more generated in the longitudinal direction. Can be. Therefore, the heat amount may be generated differently in the region of the X-axis and the region of the Y-axis of the crucible 13000, so that the heat distribution of the crucible may be a non-uniform heat distribution that is lowered at both ends in the longitudinal direction. Due to the heterogeneous thermal distribution, the deposition material may not be uniformly supplied with sufficient heat. Accordingly, the deposition material may not move to be uniformly formed on the surface to be deposited, and as a result, the actual efficiency of deposition may be lowered.
  • the ferrite 18000 according to the exemplary embodiment of the present application may be controlled so that the heat distribution of the crucible 13000 may be uniform.
  • the ferrite 18000 according to the exemplary embodiment of the present application may be disposed in a portion of the region of the Y axis and the region of the Z axis of the crucible, and may be disposed in the entire region of the region of the X axis to design the heating assembly.
  • the heating assembly may be disposed in the shape of a ferrite 18000 having a window on the side of the crucible in the longitudinal direction.
  • the change in magnetic field strength affecting the lateral region in the Y direction of the crucible 13000 is smaller than in the case where there is no window. Accordingly, the induced current intensity in the side region of the crucible 13000 in the Y direction may be lower than that without the window. As a result, the amount of heat generated in the longitudinal side of the crucible 13000 is reduced, so that the side of the crucible 13000 may be controlled to have a uniform heat distribution in the Y direction as shown in FIG. 17.
  • the deposition apparatus 10000 has various implementations in which the deposition apparatus 10000 may be implemented to solve the issue of increasing the deposition success rate in which deposition materials are deposited on the deposition surface, which is an important issue of the deposition apparatus 10000 described above. Examples have been described.
  • the thermal balance of the crucible must be controlled so that the deposition material according to one embodiment of the present application can be smoothly discharged from the crucible.
  • 38 is a diagram illustrating thermal balance of a crucible lower surface according to an embodiment of the present application.
  • the thermal equilibrium of the bottom surface of the crucible can be at various values of calories.
  • the thermal equilibrium may be achieved at a calorie higher than the phase change calorie (Tv) of the deposition material, as shown in (b) and (c), or the thermal equilibrium may be reduced at It may be done.
  • the thermal equilibrium may mean that the amount of heat supplied and the amount of heat discharged are the same, so that the amount of heat over time is kept the same. Even in such a thermal equilibrium state, heat is continuously supplied to the bottom surface of the crucible, and thus the equilibrium state may be specifically referred to as a dynamic equilibrium state.
  • the thermal equilibrium of the lower surface of the crucible is higher than the phase change calorific value Tv of the deposition material as shown in (b) and (c).
  • the deposition material can continue to phase change and move. Accordingly, the phase change deposition material continues to move to the surface to be deposited, so that continuous deposition can be achieved.
  • the amount of heat excessively higher than the amount of heat (Tv) of the phase change of the deposition material may be supplied. Accordingly, (1) the deposition material is discharged from the nozzle of the crucible at an excessively high speed, so that the deposition material deposited on the surface to be deposited may not have enough time to properly settle, resulting in uniformity of deposition. Can fall. In addition, (2) the wasted energy may be increased. Therefore, it can be said that thermal equilibrium such as (c) inefficiently controlled the thermal equilibrium of the crucible lower surface.
  • the thermal equilibrium of the bottom surface of the crucible may be formed to be suitably higher than the phase change calorific value Tv of the deposition material, as in (b). According to the thermal balance control of the crucible as described above, energy can be efficiently provided to the deposition material to deposit the deposition material on the surface to be deposited.
  • the thermal balance of the top surface of the crucible may be a problem.
  • the most important issue is whether or not the deposition material supplied with sufficient heat at the top of the crucible can be smoothly discharged from the crucible nozzle and deposited on the surface to be deposited.
  • FIG. 39 illustrates thermal equilibrium between the top and bottom of a crucible according to an embodiment of the present application.
  • the amount of heat generated on the top of the crucible is (1) as the crucible is continuously heated, and the amount of heat generated on the top of the crucible is conducted to the bottom of the crucible. Accumulated and (2) the high heat amount generated on the top of the crucible can be discharged through the nozzle.
  • the lower and upper portions of the crucible may be thermally balanced with different calorie values.
  • the calorific value of the lower thermal equilibrium of the crucible may be higher than the calorific value of the thermal equilibrium previously designed appropriately.
  • the heat of the thermal equilibrium in the upper portion may be formed with a lower amount of heat than the phase change calorific value Tv of the deposition material by discharging the upper heat quantity into another space.
  • the vapor deposition material may be phase-transferred, and the phase transition of the vapor deposition material may be solidified or liquefied at the top of the crucible lower than the calorific value Tv.
  • the solidified or liquefied deposition material may block the nozzle formed on the top of the crucible, and may cause a problem that the deposition material may not be smoothly discharged through the crucible nozzle.
  • the deposition material on the bottom surface of the crucible may be sufficiently transferred to move in phase, but the heat amount of the crucible upper surface is lower than the amount of heat (Tv) of the deposition material.
  • the deposition material may solidify or liquefy. Accordingly, the solidified or liquefied deposition material may cause a problem of blocking the nozzle formed on the top of the crucible.
  • a configuration for solving the problem of clogging the nozzle of the crucible may be provided in the heating assembly.
  • FIG. 40 illustrates a heating assembly in which a heat conduction inhibiting element is formed in accordance with an embodiment of the present application.
  • 41 is a graph illustrating controlled thermal equilibrium in accordance with an embodiment of the present application.
  • a heat conduction inhibiting element may be formed in the heating assembly according to the embodiment of the present application.
  • the heat conduction suppression configuration can reduce the amount of heat transferred from the top to the bottom of the crucible. Accordingly, the amount of heat accumulated on the bottom surface of the crucible can be reduced.
  • the heat conduction inhibiting configuration may include a slit, a blocking space, a heat insulating material, and the like.
  • the heat conduction inhibiting configuration is not limited to the above configuration, and various configurations may further exist.
  • slits may be formed on an outer wall of a crucible according to an embodiment of the present application.
  • the heat generated in the upper portion of the crucible through the slit cannot be conducted to the bottom, but can be transmitted only by radiation. That is, a path through which heat accumulated in the upper portion of the crucible can be transferred to the lower portion is reduced. As the heat transferred to the bottom of the crucible is reduced, the amount of heat accumulated at the bottom of the crucible can be reduced.
  • the position of the slit formed in the crucible may be a position near the structure in which the crucible is separated.
  • the present invention is not limited thereto, and slits may be formed at various positions of the crucible. That is, a plurality of slits may be formed.
  • a plurality of slits may be formed near a separate structure of the crucible, but the plurality of slits may be positioned on the outer wall of the crucible at various intervals. Can be.
  • the slits may be designed in various shapes. As shown in the figure, the rectangular slit may be formed in the crucible, but is not limited thereto, and may be formed in various shapes such as a triangle, a circle, an ellipse, and a rhombus. In addition, the width and length of the slit may be implemented in various ways.
  • the slits may have various designs. It may be formed in the outer surface direction from the inside of the crucible, or may be formed in the inner surface direction from the outside. In addition, as shown, it may be formed at an angle perpendicular to the surface of the crucible, but is not limited thereto and may be formed at various angles.
  • a blocking space may be formed inside the outer wall of the crucible according to the exemplary embodiment of the present application.
  • the heat generated at the top of the crucible cannot be conducted to the bottom, but can be transmitted only by radiation. That is, a path through which heat accumulated in the upper portion of the crucible can be transferred to the lower portion is reduced. As the heat transferred to the bottom of the crucible is reduced, the amount of heat accumulated at the bottom of the crucible can be reduced.
  • the blocking space may be implemented in the outer wall of the crucible in various forms.
  • the crucible separating structure when the upper and lower parts of the crucible are assembled together, the crucible separating structure may be formed so that a blocking space may be formed inside the outer wall. . Accordingly, the blocking space may be implemented inside the outer wall of the crucible.
  • the blocking space may be designed in various shapes. As shown in the figure, an empty space having a rectangular shape may be formed in the crucible, but is not limited thereto, and may be formed in various shapes such as a triangle, a circle, an ellipse, and a rhombus.
  • Width and length of the blocking space can be implemented in various ways.
  • a plurality of blocking spaces may exist so that the blocking space may be properly disposed in the outer wall of the crucible.
  • a blocking space is formed on the outer wall of the crucible, which is not limited thereto.
  • a heat insulating member capable of lowering thermal conductivity may be formed on the outer wall of the crucible according to the exemplary embodiment of the present application.
  • the insulation may reduce the amount of heat conducted from the top to the bottom of the crucible in the middle. As the amount of heat conducted to the bottom of the crucible is reduced, the amount of heat accumulated at the bottom of the crucible can be reduced.
  • the heat insulating member may be formed on the outer wall of the crucible in various forms.
  • the insulating member may be formed to be inserted between an upper portion of the crucible and a lower portion of the crucible that are divided based on the separation structure.
  • the heat insulating member may be designed in various shapes. As shown in the figure, the rectangular member may be formed in a shape that is inserted into the outer wall of the crucible, but is not limited thereto, and may be formed in various shapes such as a triangle, a circle, an ellipse, and a rhombus.
  • a material having a low thermal conductivity may be selected as a material of the heat insulating member, and a material having a melting point that may exhibit a function even at a high temperature of heat of the heating assembly may be selected.
  • Width and length of the heat insulating member may be implemented in various ways.
  • the insulation member may be implemented in plural and may be appropriately disposed in the outer wall of the crucible.
  • the heating assembly may be designed to smoothly discharge heat from the lower surface of the crucible according to the embodiment of the present application.
  • a heat radiation fin, a heat sink, or the like may be disposed on the bottom surface of the crucible, or a heat radiation paint may be applied. Since the heat radiating means have a very high thermal conductivity, heat can be smoothly conducted. That is, through the heat dissipation means implemented on the lower surface of the crucible, the amount of heat accumulated in the crucible bottom may be smoothly discharged.
  • the lower surface of the crucible implements a large surface area
  • calorie discharge may be smoothly performed through the large surface area.
  • the bottom surface of the crucible may be roughly implemented.
  • the lower surface of the crucible embodied crucible may have a larger surface area than the lower surface embodied smoothly.
  • a black body may be formed on the inner surface of the housing opposite to the crucible bottom.
  • the black body may absorb radiant heat radiated to the surroundings. Accordingly, the radiant heat discharged from the bottom of the crucible through the inner surface of the housing is absorbed by the black body, and the radiant heat can be smoothly discharged through the housing.
  • the thermal balance of each crucible region may be appropriately controlled.
  • the thermal equilibrium at the bottom of the crucible can be thermally equilibrated at an appropriately higher calorie value than the phase change calorie (Tv) of the deposited material.
  • the upper calorific value of the crucible may be higher than the calorific value Tv, and thermal equilibrium may be achieved with a calorie higher than the calorific value of the lower portion of the crucible.
  • the crucible according to an embodiment of the present application is controlled to have a thermal equilibrium in which the deposition material can be smoothly discharged from the top of the crucible, as well as the effect of solving the problem of clogging the nozzle described above. .
  • the transformer and / or the current transformer may output a high frequency voltage or current whose direction and intensity change with the change of time.
  • the transformer and / or the current transformer may receive DC power, convert the AC power, and apply the converted AC power to the coil.
  • the transformer / current transformer is a necessary equipment for driving the applicant deposition equipment.
  • the transformer and the current transformer will be described as an example.
  • the current of the power applied to the coil by the transformer according to some embodiments of the present application may have a relatively high value, compared to the current of the DC power provided to the transformer. That is, the power output by the transformer may be very high current.
  • the deposition equipment according to the embodiments of the present application utilizes an induced current in which the direction and intensity change rapidly with the change of time on the outer wall of the crucible in order to heat the crucible. This is to increase the current value of the induced current.
  • the transformer may be provided with a conductive wire (hereinafter, the output line 19120) for applying the high current to the coil and a conductive wire (hereinafter, the input line 19110) for supplying an external DC power to the transformer.
  • Power output from the transformer may be provided to the coil through the output line 19120.
  • DC power input to the transformer may be provided to the transformer through the input line 19110.
  • a high current may flow through the output line 19120.
  • the high current is coupled to the resistance component of the output line 19120 to generate heat, so that a high heat generation phenomenon may occur in the output line 19120. Accordingly, a problem may occur in that the output line 19120 is destroyed when the deposition apparatus according to the embodiment of the present application is used. Therefore, in order to prevent destruction of the output line 19120, it is necessary to suppress the high heat generation phenomenon. Accordingly, in order to lower the resistance value of the output line 19120, the output line 19120 of the transformer may be reduced. Formed thick.
  • the input line 19110 need not lower the resistance value. Accordingly, the input line 19110 is not required to be thicker at a high cost, and the input line 19110 is formed relatively thinner than the output line 19120.
  • the above-described transformer may have an example disposed in various spaces. This will be described below.
  • the space according to an embodiment of the present application may be divided into an outer space and an inner space.
  • the outer space is a space that is separated from the inner space in which the surface to be deposited, the heating assembly and the like of the present application are disposed.
  • the internal space may have an environmental property of vacuum. This is to exclude impurities that may affect the process of depositing the phase change deposition material using the heating assembly on the surface to be deposited.
  • the external space that is separated from the internal space does not need to exclude impurities, and the external space is a space having a general atmospheric pressure property.
  • the heating assembly and / or the surface to be deposited move relative to each other, and the deposition operation may be performed.
  • the deposition operation refers to an operation process in which a deposition material is formed on a surface to be deposited.
  • the relative movement may be a surface to be deposited in which the heating assembly is fixed, the surface to be deposited and the heating assembly may be moved together, but the speed may be different, or the surface to be deposited is fixed. In this state, the heating assembly may move.
  • the transformer according to an embodiment of the present application may be fixedly disposed in an external space of the deposition apparatus.
  • FIG. 42 is a diagram illustrating a transformer, an input line, and an output line in an external space according to an embodiment of the present application.
  • a transformer fixed to an external space may supply AC power to a coil implemented in the internal space.
  • the transformer fixed to the external space may receive a DC power generated by a DC power generation source provided in the external space through the input line 19110.
  • the transformer may convert the input DC power into high frequency AC power.
  • the converted high frequency AC power is applied to an output line 19120 of a transformer, and the output line 19120 is connected to a coil through a partition wall or an outer wall that separates an external space from an internal space.
  • Line 19120 provides AC power to the coil.
  • FIG 43 illustrates a moving heating assembly according to an embodiment of the present application.
  • the transformer when the transformer is disposed in an external space, a problem may occur in that the output line 19120 of the transformer is destroyed. Since the transformer is fixedly disposed outside, when the heating assembly moves while the deposition operation is performed in the internal space, deformation such as extension or bending may occur in the output line 19120 connected to the coil. The above-described output line 19120 may be continuously deformed due to the continuous deposition operation, and wear may occur. As the wear continues, the output line 19120 may be destroyed.
  • a moving unit for moving the transformer disposed in the external space in response to the movement of the heating assembly may be disposed in the external space.
  • the outer wall separating the inner space and the outer space should have a structure in which the output line 19120 may be disposed from the outer space to the inner empty space.
  • the outer wall structure should be formed to maintain the vacuum environment properties of the inner space.
  • the structure has to be formed as a through structure in which the output line 19120 can be disposed from the outer space to the inner space by the external space and the internal space communicate with each other, the size of the through structure is formed thick as described above It should be selected in consideration of the output line 19120. Therefore, it is very difficult to implement a structure through which the output line 19120 can pass through the outer wall without degrading the vacuum environment property of the inner space.
  • implementing the moving part and the other drive part for driving the moving part, the power generation source, and the through structures of the outer wall in the external space may further cause cost problems.
  • the transformer of the present application is placed inside the deposition apparatus, and 2) the relative positional relationship of the crucible (heating assembly) and the transformer A vapor deposition apparatus is disclosed in which a can be fixed.
  • the transformer may be fixed to one side of the heating assembly.
  • the transformer may be installed in the deposition apparatus together with the heating assembly, and the positional relationship between the heating assembly and the transformer may be fixed. That is, when the heating assembly moves in the deposition equipment to realize the relative movement between the heating assembly and the deposition surface, the transformer may move together with the movement of the heating assembly.
  • the transformer and the heating assembly do not necessarily need to be fixed to each other.
  • the deposition equipment may be implemented such that the transformer also moves in synchronization.
  • another driving unit configured separately from the driving unit for the movement of the heating assembly may be provided in the deposition equipment.
  • the deposition equipment may further include a vacuum box for providing the transformer therein.
  • FIG 44 illustrates a transformer, a vacuum box, and a heating assembly according to an embodiment of the present application.
  • the vacuum box provided with the transformer may receive power from the driver provided with the transformer and move in synchronization with the heating assembly. Accordingly, the inner space of the box may be separated from the vacuum environment, so that even if the transformer is operated, not only the problem of damaging the vacuum environment but also the problem of breaking the coil when the heating assembly is moved may not occur.
  • 45 is a view illustrating deposition equipment according to an embodiment of the present application.
  • a deposition apparatus may include a housing, a heating assembly, and a transformer.
  • the housing may provide a space therein in which components related to deposition may be implemented. Heating assemblies, transformers, and the like.
  • the housing may have a high sealing outer wall that can distinguish the inner space and the outer space, the housing can maintain the inner space of the housing in a high vacuum environment.
  • the heating assembly may phase-deposit the deposition material by heating the deposition material placed in the crucible using a coil, and allow the phase transition deposition material to be deposited on the surface to be deposited.
  • the heating assembly may have a configuration of a heating assembly according to some embodiments of the present application described above, but is not necessarily limited thereto.
  • the transformer may be provided inside the housing, and may be fixed to one side of the heating assembly as described above.
  • the output line 19120 provided in the transformer is high rigidity, the output line 19120 may be connected to the coil with a fixed shape.
  • the output line 19120 since the transformer is fixedly present at one side of the heating assembly, the output line 19120 may also be connected to a coil such that there is no significant change in the fixed shape while the deposition material is deposited.
  • the input line 19110 provided in the transformer may be connected to an external DC power supply in the external space through a through hole formed in the outer wall of the housing extending from the transformer.
  • the input line 19110 has a relatively low power supply as compared to the output line 19120 as described above, the input line 19110 does not need to implement a thick conductor like the output line 19120. 19110) can play a role. Even if the pre-arranged conductive wires are not used as described above, a thin input line 19110 may be disposed through the through holes formed in advance. In addition, the input line 19110 may be implemented to have a long length in response to the case where the transformer moves.
  • a driving unit may be separately provided so that the transformer may also be moved in a positional relationship fixed to one side of the heating assembly.
  • a deposition apparatus may include a housing, a heating assembly, a transformer, and a vacuum box.
  • the vacuum box may form a space therein. It may also be a vacuum environment, such as a composition inside the housing.
  • the vacuum box may be provided with various driving units, conductive wires, connection members, and the like.
  • the transformer may be provided in the inner space of the vacuum box.
  • the output line 19120 of the transformer may extend through a through hole implemented in a vacuum box and be connected to a coil.
  • a high rigid bellows or arm connection member corresponding to the rigidity of the output line 19120 may be provided in the vacuum box so that the output line 19120 may be connected to the coil.
  • the connection member may be implemented to extend to a coil, and the output line 19120 may be connected to the coil through the connection member.
  • the input line 19110 of the transformer may also extend through the through hole implemented in the vacuum box and be connected to an external power source through the through hole of the outer wall of the housing.
  • a low rigid connection member corresponding to the rigidity of the input line 19110 may be provided in the vacuum box so that the input line 19110 may communicate with the external space.
  • the connecting member may be embodied in a sufficient length corresponding to the movement of the heating assembly.
  • the connecting member can move flexibly because of its low rigidity.
  • an inner space may be formed in the connection member provided in the vacuum box so that the conductive wire may be disposed therein.
  • the driving unit when the heating assembly is moved by the driving unit, the driving unit is separately provided, and the vacuum box including the transformer may also be moved in a positional relationship fixed to one side of the heating assembly.
  • a heating assembly for depositing a material on a surface to be deposited includes an outer wall defining an inner space, wherein the outer wall includes an upper portion and a lower portion, and the upper portion and the lower portion are separated from each other.
  • a heating container having a separation structure formed on the outer wall of the heating container;
  • a coil for forming an induction current on the outer wall to heat the heating vessel;
  • a power generator provided with a power supply line for supplying power to the coil;
  • a coil connecting member for electrically connecting the coil and the power generator, wherein the coil includes a first coil and a second coil, and the coil connecting member comprises a first coil connecting member and a second coil connecting.
  • a power supply line including a first power supply line and a second power supply line
  • the first coil has a first positional relationship with the heating vessel
  • the second coil is formed with the heating vessel.
  • the first coil connecting member is connected to one side of the first coil, one side of the second coil, and the first power supply line
  • the second coil connecting member is connected to the first coil. Is connected to the other side and the other side of the second coil, the electrical detachable structure between at least one of the first coil connection member and one side of the first coil, one side of the second coil, or the first power supply line Is formed, and the second coil is connected.
  • May be provided with a heating assembly it characterized in that the material and the second electrically detachable structure in at least one of between the first coil on the other side, or the other side of the second coil is formed.
  • a heating vessel including an outer wall defining an inner space in which the deposition material is placed; A coil forming an induction current on the outer wall to heat the heating vessel; A power generator for generating drive power for driving the coil; And a coil connecting member for electrically connecting the coil and the power generator, wherein the outer wall of the heating vessel includes a first region and a second region, between the first region and the second region.
  • a separation structure is formed, wherein the coil includes a first coil and a second coil, the first coil has a first positional relationship with the heating vessel, and the second coil is in a second position with the heating vessel.
  • the coil connecting member may include a first coil connecting member and a second coil connecting member, and the first coil connecting member may be provided with a heating assembly electrically connected to one side of the first coil.
  • a heating assembly may be provided, wherein an electrical detachment structure is formed between the first coil connection member and the first coil.
  • a protruding nozzle is formed in the first region of the heating vessel, the coil includes a first coil and a second coil, and the first coil is disposed close to the protruding nozzle of the heating vessel.
  • a heating assembly may be provided wherein the two coils are disposed close to the second region of the heating vessel.
  • the power generator may further include a power supply line, wherein the power supply line includes a first power supply line and a second power supply line, and the first power supply line may include a first coil connection member and a first power supply line.
  • a heating assembly can be provided which is connected to the coil.
  • the second power supply line may be connected to the second coil, and the second coil connection member may be connected to the second coil.
  • the physical assembly of the first coil connecting member and the physical shape of the second coil connecting member may be provided with a different heating assembly.
  • a heating assembly can be provided which is characterized in that it occurs substantially simultaneously.
  • a heating assembly may be provided, wherein an electrical property of the first driving power source is different from an electrical property of the second driving power source.
  • Thin film manufacturing technology is a field of surface treatment technology, divided into wet and dry methods.
  • the wet method thin film manufacturing technique includes (1) an electrolytic method of oxidizing a workpiece so that the workpiece is formed on the surface of the workpiece by electrolyzing the workpiece, and (2) activating the workpiece; Wet methods, including electroless methods using sensitization processes, exist.
  • Dry film production technology includes (1) physical vapor deposition (PVD), which evaporates solid materials in a high vacuum state and forms them on the surface of the workpiece, and (2) converts gaseous materials in a high vacuum state to plasma or the like.
  • PVD physical vapor deposition
  • CVD chemical vapor deposition
  • CVD which changes and forms on the surface of a to-be-processed object
  • thermal spraying method which sprays a to-be-processed object in a liquid state to the to-be-processed surface, and coats a to-be-processed object on the surface of a processed object.
  • the deposition apparatus (20000) is implemented to change the state of the treatment by heating the treatment (particularly, the deposition material), and to guide the treatment to be in contact with the surface of the target object. Can be important.
  • the deposition apparatus 20000 is a device capable of depositing a deposition material on a surface to be deposited.
  • the deposition apparatus 20000 of the present application raises the temperature of the crucible 23000 of the deposition apparatus 20000 using a predetermined heating means 25000 to change the state of the deposition material contained in the crucible 23000. You can.
  • the state-deposited deposition material may be discharged to the outside of the crucible 23000.
  • the deposition apparatus 20000 may be used for the above-described thin film fabrication techniques.
  • the deposition apparatus 20000 may be used for simple heating and not for the purpose of deposition according to the above-described thin film fabrication techniques.
  • 47 is a block diagram illustrating a configuration of a deposition apparatus according to an embodiment of the present application.
  • a deposition apparatus 20000 may include a housing 21000, a crucible 23000, a heating means 25000, a magnetic field focusing structure 27000 that is a heating auxiliary means, and Other components 29000 may be included.
  • a space may be formed in the housing 21000 according to an embodiment of the present application.
  • the crucible 23000, the heating means 25000, the heating assistance means, and the other components 29000 may be implemented in an internal space of the housing 21000.
  • a deposition material that is a material to be deposited may be provided in a space formed in the crucible 23000 according to an embodiment of the present application.
  • the deposition material may be heated by receiving heat generated by the heating means 25000.
  • Various kinds of materials may be selected as deposition materials placed in the internal space of the crucible 23000 according to the exemplary embodiment of the present application.
  • the deposition material may be an organic material.
  • the organic material means a compound based on carbon.
  • the organic material may include i) amino acids obtained from animals or plants, proteins, carbohydrates, penicillin, amoxicillin, and other organic matters, ii) synthetic organic materials such as plastics artificially made by humans, and It may include.
  • the present application can heat the crucible 23000 to about 200 oC so that the organic material is changed into a state that can move freely.
  • the deposition material may be a metal material.
  • the metal material may include magnesium (Mg), silver (Ag), aluminum (Al), and the like.
  • the present application can heat the crucible 23000 to at least 1000 oC so that the metal material is changed to a state in which it can move freely.
  • the heating means 25000 may heat the crucible 23000 to change the state of the deposition material placed inside the crucible 23000.
  • the heating auxiliary means may assist the heating means 25000 to efficiently heat the crucible 23000.
  • the heating aid there may be a magnetic field focusing structure 27000.
  • the other component 29000 may be a path of a conductive wire that can supply power, a power generator that provides power to the deposition apparatus 20000, and the like.
  • the description of the other components 29000 will be omitted for ease of description. Only when there are special circumstances in which the deposition apparatus 20000 of the present application is described with the other components 29000 will be described, the present deposition apparatus 20000 will be described together with the other components 29000.
  • a crucible 23000, a heating means 25000, a magnetic field focusing structure 27000, and / or other components that may be implemented may be collectively referred to as a heating assembly. .
  • the crucible 23000 may include an outer wall 23100 and at least one nozzle 23200.
  • the outer wall 23100 may define a space (hereinafter, referred to as an inner space) inside the crucible 23000 as illustrated in FIG. 48B.
  • a deposition material for deposition may be placed in the inner space.
  • the nozzle 23200 may be a movement passage of the deposition material.
  • the deposition material placed in the interior of the crucible 23000 may receive a sufficient amount of heat from the heating means 25000 to phase change into a gaseous and / or plasma state.
  • the phase shifted deposition material may be discharged to the outside of the crucible 23000 as illustrated in FIG. 48A through the nozzle 23200.
  • the nozzle 23200 may be formed in the crucible 23000 with various design specifications.
  • an interval between the plurality of nozzles 23200 may be formed at various intervals. Intervals of the plurality of nozzles 23200 may be formed at equal intervals. Alternatively, the interval of the nozzle 23200 may be an interval that gradually narrows toward the side of the crucible surface.
  • the shape of the hole of the nozzle 23200 may have various shapes.
  • the shape of the hole of the nozzle may be implemented in various shapes, such as rectangular, oval, as well as circular shape as shown.
  • one surface on which the nozzle 23200 is formed will be referred to as an upper surface, and the opposite side of the one surface will be referred to as a lower surface, and the surfaces except for the upper and lower surfaces will be referred to as side surfaces.
  • the crucible 23000 according to the exemplary embodiment of the present application may have various shapes.
  • the crucible 23000 may have a rectangular parallelepiped shape.
  • the crucible 23000 of the present application may be implemented in various forms such as cones, spheres, hexagonal columns, cylinders, triangular columns, and the like. That is, if the form may include a deposition material, the crucible 23000 according to an embodiment of the present application may be implemented in any shape.
  • various materials may be used to implement the crucible according to an embodiment of the present application.
  • the material of the crucible may not be limited to any material.
  • the material of the crucible 23000 of the present application may be a material having a property that current can flow well.
  • an implementation material of the crucible 23000 may be selected. That is, the material of the crucible 23000 may be selected so that the crucible 23000 can perform its function without melting the crucible 23000 even at a high temperature.
  • a structure capable of opening and closing the crucible 23000 may be formed in the crucible 23000 according to the exemplary embodiment of the present application.
  • the nozzle 23200 may be implemented as a protruding shape (hereinafter, protruding nozzle 23300) having a predetermined length to the outside of the crucible 23000.
  • the protruding nozzle 23300 may be formed in the crucible 23000 in various shapes and materials.
  • 49 is a view illustrating a protruding nozzle formed on a crucible according to an embodiment of the present application.
  • the protruding nozzle 23300 may be formed in a rectangular hexagonal shape.
  • the shape of the protruding nozzle 23300 is not limited to the illustrated shape, but may be a shape of a cylinder, a triangular prism, a cone, or the like.
  • the protrusion nozzle 23300 considers an issue in which the junction of the crucible 23000 and the protrusion nozzle 23300 becomes unstable due to thermal expansion of the crucible 23000 when the crucible 23000 is heated.
  • the material of the protruding nozzle 23300 may be used. That is, the material of the protruding nozzle 23300 may be the same material as the material of the crucible 23000 so that the material does not have the same coefficient of thermal expansion.
  • the heating assembly may be designed to smoothly discharge the deposition material through the protrusion nozzle according to the exemplary embodiment of the present application.
  • the material for implementing the protruding nozzle according to the exemplary embodiment of the present application may be variously selected.
  • a material having a low adhesive property with the deposition material may be selected.
  • the adhesion property between the passage of the protruding nozzle and the deposition material is lowered, the deposition material may be smoothly discharged to the outside by moving the inner passage of the protruding nozzle without being adhered to the protruding nozzle.
  • the shape of the protrusion nozzle according to the exemplary embodiment of the present application may be variously implemented.
  • the inner passage of the protruding nozzle may be implemented to have a predetermined slope.
  • the deposition apparatus 20000 may be provided with a heating means 25000 capable of raising the temperature of the crucible 23000.
  • the heating means 25000 may be implemented in various forms.
  • the heating means 25000 may include (1) conventional heating means 25000, (2) ions, etc., such as a pipe capable of supplying heat vapor, and a heating device using fossil fuel. It may be the latest heating means 25000, such as a sputtering heating source for heating the target material by the momentum transfer, the arc heating source for heating by the arc, the resistance heating source for heating based on the electrical resistance of the conducting wire and the like.
  • the coil 26000 may be preferably selected as the heating means 25000 of the present application.
  • the coil 26000 may form a dynamic magnetic field that varies in time and space based on a high frequency coil current flowing through the coil 26000.
  • the magnetic field formed around the coil 26000 may heat the crucible 23000 by inducing a current in the crucible 23000 and generating a heat amount in the crucible 23000. An operation in which the crucible 26000 is heated by the coil will be described later in detail.
  • the coil 26000 may be implemented with various materials through which current may flow.
  • a conductor may be selected as a material of the coil 26000.
  • the conductor may include a metal body, a semiconductor, a superconductor, plasma, graphite, a conductive polymer, and the like.
  • various materials of the coil may be selected without being limited to the above.
  • 50 is a view showing the shape of a coil according to an embodiment of the present application.
  • the coil 26000 may have various shapes.
  • the coil 26000 may include (1) an open shape formed of a single loop having a shape such as an annular ring or a ring, and (2) a closed shape formed of a plurality of loops having a hollow cylindrical shape inside.
  • the coil 26000 may be implemented in any shape as long as it can generate a magnetic field.
  • a portion of the coil 26000 in which the plurality of windings are visible is referred to as a side of the closed shape, and a portion having a hole such as a circle or a square in the coil 26000 of the closed shape is referred to as the coil 26000. I will say the top or bottom of).
  • the definition of the structure of the coil 26000 may be applied to the open shape coil 26000.
  • the windings through which the current constituting the coil 26000 according to the exemplary embodiment of the present application may have various forms.
  • the shape of the winding may be implemented in a variety of appearances so as to have a number of shapes, such as round shape, rectangular shape.
  • the thickness of the winding may also vary depending on the purpose.
  • an empty space may be formed inside the winding constituting the coil 26000 according to the exemplary embodiment of the present application.
  • an empty space may be formed inside the winding of the coil 26000 such that a fluid that may serve as a coolant such as water flows.
  • the fluid flowing along the coil 26000 may have an effect of controlling the temperature so that the coil 26000 does not rise above a predetermined temperature.
  • the arrangement of the coil 26000 according to the exemplary embodiment of the present application may vary depending on the shape of the coil.
  • FIG. 51 illustrates a crucible and a coil according to an embodiment of the present application.
  • the crucible 23000 may be provided inside the closed shape coil 26000.
  • Coil 26000 may be disposed.
  • the shape of the upper or lower portion of the closed shape coil 26000 may be positioned on the upper side, the side portion, and / or the lower portion of the crucible 23000.
  • the aforementioned aspect in which the closed shape coil 26000 is disposed may be applied.
  • the top or bottom of the coil is formed in a folded shape. May be disposed in the table 23000.
  • the coil 26000 may be disposed corresponding to the structure and / or means formed in the crucible 23000.
  • FIG. 52 is a diagram illustrating an example of implementing a coil according to an embodiment of the present application.
  • the coil 26000 may be raised to a position corresponding to the protruding nozzle 23300 as illustrated.
  • the deposition material passing through the protruding nozzle 23300 does not receive enough heat, the deposition material may not move smoothly through the passage of the protruding nozzle 23300. Therefore, when the coil is disposed around the protruding nozzle 23300 as described above, sufficient amount of heat may be supplied to allow the coil 26000 to smoothly move the deposition material moving through the passage of the protruding nozzle 23300 to the surface to be deposited. Can be.
  • the heating assembly 22000 may be provided with a first coil 26010 and a second coil 26020.
  • the first coil 26010 and the second coil 26020 may be separated from each other, but may be electrically or physically connected.
  • first coil 2610 and the second coil 26020 will be described as being connected to each other.
  • the number of turns of the first coil 26010 and the number of turns of the second coil 26020 may be selected such that the number of turns of the first coil 26010 and the number of turns of the second coil 26020 are different from each other.
  • the number of turns of the second coil 26020 may be greater than the number of turns of the first coil 2610.
  • Implementation forms of the first coil 26010 and the second coil 26020 may be different from each other.
  • the above-described internal passage may not be formed in at least one of the first coil 26010 and the second coil 26020. That is, an internal passage through which the above-described fluid flows may be formed in the second coil 26020, whereas the internal passage may not be formed in the first coil 2610. This is to facilitate the physical separation when the first coil 26010 and the second coil 26020 are physically separated.
  • the inner passage may be separated if the first coil 26010 and the second coil 26020 are separated.
  • materials included in the inner passage may penetrate into the deposition environment.
  • the first coil 26010 and the second coil 26020 may have a different positional relationship with the crucible 23000. That is, when the first coil 26010 has a first positional relationship with the crucible 23000, the second coil 26020 may have a second positional relationship with the crucible 23000.
  • first coil 26010 and the second coil 26020 may have a different positional relationship with the crucible 23000.
  • FIG. 53 illustrates a coil disposed near the protruding nozzle according to the embodiment of the present application.
  • a first coil 26010 may be disposed to be close to a protruding nozzle of the crucible 23000, and the second coil 26020 may be positioned at a side surface of the crucible 23000. It may be arranged to. Compared to the case where the coil is disposed far from the protruding nozzle of the crucible 23000, the first coil 26010 disposed close to the protruding nozzle may generate more heat in the protruding nozzle of the crucible 23000. can do. Since the coil is disposed close to the protruding nozzle, the amount of heat generated will be described later in detail.
  • the deposition material passing through the protruding nozzle of the crucible 23000 may be supplied with sufficient heat to smoothly pass through the protruding nozzle.
  • the deposition material may be moved again by induction heating of the first coil 2610. That is, the deposition material formed on the protruding nozzle may be changed into a state of a gas which can be smoothly moved based on the amount of heat generated in the protruding nozzle by the first coil 2610.
  • the first coil 26010 and the second coil 26020 may be electrically or physically separated.
  • the first coil 26010 when the upper portion of the crucible 23000 is moved to be separated from the crucible 23000, the first coil 26010 may be formed of the crucible 23000. It can be moved with the top. Accordingly, the first coil 26010 that is physically connected to the second coil 26020 may be moved separately from the second coil 26020. As the upper portion of the crucible 23000 is coupled to the crucible 23000 again, the separated first coil 2610 may be recombined with the second coil 26020. Electrical or physical separation / recombination of the first coil 26010 and the second coil 26020 may be easily performed by the coil connection member 26011 to be described later. This will be described later in detail.
  • the first coil 26010 and the second coil 26020 may be implemented to have different properties.
  • the first coil 26010 and the second coil 26020 may be implemented such that electrical properties of the first coil 26010 and the second coil 26020 are different from each other.
  • the first resistor and the second resistor may have different values. Since the first resistance of the first coil 26010 is smaller than the second resistance, the electrical conductivity of the first coil 26010 may be greater than the electrical conductivity of the second coil 26020.
  • the first coil 26010 may have a first inductance
  • the second coil 26020 may have a second inductance.
  • an implementation material for implementing the first coil 26010 and the second coil 26020 may be appropriately selected.
  • the first coil 26010 and the second coil 26020 may be supplied with power for induction heating from the power generator 2630.
  • the first coil 26010 and the second coil 26020 may receive power from the same power generator 2630.
  • the present application compared to the case of having a respective power supply for driving each coil 22000 may have an effect of reducing the complexity of the configuration.
  • the first coil 26010 and the second coil 26020 may be connected to the power generator 2630 in parallel.
  • the first coil 26010, the second coil 26020, and the power generator 26030 connected in parallel are referred to as parallel application modules.
  • the parallel application module will be described.
  • the first coil 26010 in the parallel application module is disposed to be located close to the protruding nozzle of the crucible 23000, and the second coil 26020 is the side of the crucible 23000. It will be described taking an example disposed so as to be located close to.
  • 54 is a circuit diagram of a parallel application module according to an embodiment of the present application.
  • FIG. 55 is a view illustrating a first coil 26010, a second coil 26020, and a power generator 2630 connected in parallel according to an embodiment of the present application.
  • the parallel application module may include a first coil 26010, a second coil 26020, a coil connection member 26011, a power generator 26030, and a power supply line 26032.
  • first coil 26010 and the second coil 26020 are as described above.
  • the coil connection member 26011 may be a connection member that physically or electrically connects at least two of the first coil 26010, the second coil 26020, or the power generator 2630.
  • the coil connection member 26011 may be disposed between the first coil 26010, the second coil 26020, or the power generator 26030.
  • the power generator 26030 may generate power for driving the first coil 26010 and the second coil 26020.
  • the power supply line may include a first power supply line 26031 and a second power supply line 26032.
  • the power generated by the power generator 2630 may be transmitted to the first coil 26010 or the second coil 26020.
  • the attributes of the power applied to the first coil 26010 and the second coil 26020 are substantially the same. can do.
  • the properties of the power applied to the first coil (26010) and the second coil (26020) are substantially the same, but the electrical properties of the first coil (26010) and the second coil (26020) may be different.
  • the resistance of the first coil 26010 is the first resistor
  • the second coil 26020 If the resistance is the second resistor, the current flowing through each of the first coil 2610 and the second coil 26020 may be different based on the respective resistors.
  • first coil 2610 the second coil 2602, and the power generator 2630 may be described in detail.
  • the first coil 26010, the second coil 26020, the coil connecting member 26601, the power generator 26030, and the power applying wire 26322 are connected to the heating assembly 22000. It can be provided practically.
  • the power supply line 26032 may include a first power supply line 26031 and a second power supply line 26032.
  • the first coil 26010, the second coil 26020, and the power generator 26030 may have an electrically parallel relationship by the first power supply line 26031 and the second power supply line 26032. .
  • the first power supply line 26031 and the second power supply line 26032 may be output from the power generator 2630.
  • the first power supply line 26031 may apply power to the first coil 26010, and the second power supply line 26032 may apply power to the second coil 26020 in parallel. It may be provided in.
  • the first power applying line 26031 may include a 1-1 power applying line 26031-1 and a 1-2 power applying line 26031-2. By branching from the first power applying line 26031, the first-first power applying line 26031-1 and the 1-2 power applying line 26031-2 may be implemented.
  • the first-first power supply line 26031-1 may be connected to one side of the first coil 26010, and the first-second power supply line 26031-2 may be connected to the other side of the first coil 26010. Can be connected.
  • the second power supply line 26032 may include a 2-1 power supply line 26032-1 and a 2-2 power supply line 26032-2.
  • the 2-1 power applying line 26032-1 and the 2-2 power applying line 26032-2 may be implemented.
  • the 2-1 power applying line 26032-1 may be connected to one side of the second coil 26020, and the 2-2 power applying line 26032-2 may be connected to the other side of the first coil 26010. Can be connected.
  • the one side means one region of the winding of the coil, and the other side means a region that is not one side of the winding of the coil.
  • the first coil 26010, the second coil 26020, and the power generator 2630 may have an electrical parallel connection relationship as illustrated in FIG. 54.
  • the parallel connection module may further include a coil connection member 26011.
  • the coil connecting member 26011 may be disposed between the coil and the power applying line 26032 so that the coil and the power applying line 26032 provided in the parallel connection module are electrically connected to each other.
  • the coil connection member 26011 may be implemented with the same material as a coil provided in the parallel connection module, but is not limited thereto.
  • the coil connection member 26011 may be formed of a material having a lower resistance than a coil. As implemented with a material having a lower resistance than the coil, the coil connection member 26011 may efficiently transmit power to the coil connected to the coil connection member 26011.
  • the structure that can be electrically separated may include a predetermined separation groove, a binding structure, and the like.
  • a separation groove may be formed between the one side of the first coil and the coil connecting member 26011 and may be separated.
  • the coil connecting member 26011 may be connected to the coil and the power applying line 26032, and may be separated from the coil and the power applying line 26032.
  • the coil connection member 26011 may be implemented in various shapes. Hereinafter, an example of various shapes will be described.
  • the coil connecting member 26011 may include a first coil connecting member 26011-1 and a second coil connecting member 26011-2.
  • the first coil connecting member 26011-1 is applied to the first coil 26010 so that the first coil connecting member 26011-1 can be electrically connected to the first coil 26010 and the power applying line 26032. May be disposed between lines 26032. That is, the coil connection member 26011 may allow one side of the first coil 26010 to be electrically connected to the 1-1 power supply line 26031-1 branched from the first power supply line 26031.
  • the second coil connecting member 26011-2 is applied to the first coil 26010 so that the first coil 26010 and the power applying line 26032 can be electrically connected to each other. May be disposed between lines 26032. That is, the coil connection member 26011 may allow the other side of the first coil 26010 to be electrically connected to the 2-1 power supply line 26032-1 branched from the second power supply line 26032. .
  • the first coil 26010, the second coil 26020, and the power generator 2630 may have an electrical parallel connection relationship as illustrated in FIG. 54.
  • the present application provides that the first coil 26010, the second coil 26020, and the power supply line 26032 are easily separated from each other physically or electrically. It can have an effect that can be easily connected.
  • the coil connection member 26011 is not present, the first coil 26010, the second coil 26020, and the power supply line 26032 are connected to each other so that the first coil 26010 and the second coil 26020 are connected.
  • the power-applying line 26032 should have a predetermined shape. That is, the first coil 26010, the second coil 26020, and the power applying line 26032 should have a unique shape such as being twisted or protruded in various directions.
  • the first coil 26010, the second coil 26020, and the power supply line 26032 having a predetermined shape may increase the complexity of the parallel application module.
  • the complexity of the configuration of the increased parallel application module may interfere with the connection of each configuration.
  • the coil connection member 26011 is provided in a parallel application module, the first coil 26010, the second coil 26020, and the power supply line 26032 need not be embodied in a unique shape, and are simple shapes. It can be implemented as.
  • the coil connecting member 26011 is disposed between the first coil 26010, the second coil 26020, and the power supply line 26032 implemented in the simple shape, and the first coil 26010 and the second coil ( 26020, or by connecting at least two or more of the power supply line (26032), components of the parallel connection module can be easily connected.
  • the components of the parallel connection module when the components of the parallel connection module are separated, they can be easily separated.
  • the first coil 26010 illustrated in FIG. 9 needs to be separated from the power supply line 26032, the first coil 26010 and the power supply line 26032 may be physically or electrically connected. By removing the coil connecting member 26011, the first coil 26010 and the power applying line 26032 can be separated.
  • the physical or electrical connection relationship of the parallel connection module as shown in FIG. 9 may allow the power supply line 26032 to have an excessive length.
  • the power applying line 26032 output from the power generator 2630 has an excessive length, a problem may occur that prevents the deposition operation of the deposition apparatus. This is because the movement of the heating assembly 22000 for the deposition operation may be restricted by the long extending power supply line 2602.
  • the present application may have a problem that the loss of power supplied through the power supply line 26032 is sharp.
  • the parallel application module may be a modification of the parallel application module.
  • the above-described physical or electrical connection of the parallel application module was to connect each of the first coil 26010 and the second coil 26020 to a power supply line 26032.
  • a modification to be described below is a first coil ( 26010 and the second coil 26020 are connected in parallel.
  • 56 is a diagram illustrating a first coil 26010, a second coil 26020, and a power generator 2630 according to an embodiment of the present application.
  • FIG. 57 is a diagram illustrating a first coil 26010, a second coil 26020, and a power generator 2630 according to an embodiment of the present application.
  • the first coil 26010, the second coil 26020, and the coil connection member 26011 may be physically or electrically connected.
  • the second coil 26020 may include a first winding and a second winding.
  • the first coil connecting member 26011-1 may be connected to a first winding and connected to one side of the first coil 26010.
  • the second coil connecting member 26011-2 may be connected to the second winding and connected to the other side of the second coil 26020. As shown in FIG. 56, at least one of the first winding or the second winding may protrude to be connected to the coil connection member 26011.
  • the coil connecting member 26011 may have a bent shape so that the coil connecting member 26011 can be connected to at least one of the first winding and the second winding.
  • the coil has the first winding and the second winding, but the first winding and the second winding may not be limited thereto.
  • the first power supply line 26031 may be connected to one side of the second coil 26020 and the second power supply line 26032 may be connected to the other side of the second coil 26020.
  • the power generated from the power generator 2630 is transmitted to the second coil 26020 through the power supply line 26632, and the power delivered to the second coil 26020 is transferred from the second coil 26020. It may be delivered to the first coil 2610.
  • the physical and electrical connection between the first coil 26010 and the second coil 26020 may not be a parallel relationship in an exact sense, but the property of the power applied to the first coil 26010 is the second coil 26020. Since it is based on the power source, it can be said that it is a broad parallel relationship.
  • the first coil 26010, the second coil 26020, and the power supply line 26032 may be electrically or physically connected.
  • a first coil connecting member 26011-1 may be connected to one side of the first coil 26010, and a second coil connecting member 26011-2 may be connected to the other side of the first coil 26010.
  • the first coil connecting member 26011-1 is connected to one side of the second coil 26020 and the first power applying line 26031, and the second coil connecting member 26011-2 is connected to the second coil 26020.
  • the second power supply line 26032 may be connected to the other side of the second coil 26020. Power generated from the power generator 2630 may be applied to the first coil 26010 and the second coil 26020.
  • the present application may have the following effects.
  • the first coil 26010 and the second coil 26020 can be easily separated.
  • the first coil 26010, the second coil 26020, and the power supply line 26032 may have a simple shape.
  • the coil that is not driven by one power generator is called "separate tool copper".
  • the "star tool copper coil” will be described later in detail.
  • variable power source of varying electrical properties may be applied to the coil 26000 according to an embodiment of the present application.
  • a variable power supply may preferably be a high frequency AC power supply such as RF, and may be a low frequency AC power supply in some cases.
  • a current (hereinafter, referred to as a coil current) may flow in the coil 26000 according to the exemplary embodiment of the present application.
  • the electrical property of the coil current may be strength, direction, or the like. Accordingly, the coil current may change an electrical property corresponding to the AC power. Therefore, the coil current may change in intensity, direction, etc. in time corresponding to the AC power.
  • a dynamic magnetic field is formed around the coil 26000, and the dynamic magnetic field generates heat by forming an induced current in the crucible 23000, and as a result,
  • the coil 26000 may inductively heat the crucible 23000.
  • the property of the magnetic field formed by the coil 26000 and the property of the induced current formed in the crucible 23000 according to an embodiment of the present application will be described.
  • 58 is a conceptual diagram illustrating a magnetic field formed around a coil according to an embodiment of the present application.
  • the intensity value of the magnetic field 26100 and the magnetic flux density value may not be exactly matched according to the permeability of the space in which the magnetic field 26100 is formed.
  • the strength of the magnetic field 26100 and the magnetic flux density are in proportion. Therefore, on the basis of the proportional relationship, the concept of magnetic flux density and the concept of the strength of the magnetic field are substantially the same.
  • the magnetic flux 26200 may mean that the magnetic field strength is large, and that the magnetic field strength is large may mean that the magnetic flux is dense. have.
  • the intensity property of the magnetic field 26100 may be changed according to the distance relationship with the source of the magnetic field 26100.
  • H strength of the magnetic field
  • k proportional constant
  • I current flowing through the source
  • r distance from the source.
  • the strength of the magnetic field 26100 may be smaller as the magnetic field 26100 formed at a distance from the source.
  • the intensity of the magnetic field 26100 may decrease as the number of magnetic lines passing through a predetermined area formed at a long distance from the source decreases. On the contrary, the closer to the coil 26000, the stronger the magnetic field 26100 may be.
  • the magnetic field 26100 formed around the coil 26000 of the present application may have a dynamic property.
  • the formed magnetic field 26100 of the present application may rapidly change direction and intensity properties according to time change in the time axis.
  • the dynamic magnetic field is a vector concept that includes directional properties as well as intensity properties. Specifically, when one direction of the coil current flowing in accordance with the variable power applied to the coil 26000 is (+), the other direction opposite thereto may be referred to as ( ⁇ ).
  • the coil current continuously changes in the directions from (+) to (-) and (-) to (+), and at the same time, the strength of the current also changes continuously. Accordingly, as the coil current suddenly changes in the positive and negative directions of the coil current, the direction of the magnetic field 26100 may also be rapidly changed in one direction and the other direction corresponding thereto. At the same time, the strength property of the magnetic field 26100 may be determined corresponding to the strength property of the coil current.
  • a dynamic magnetic field 26100 having fluctuating directions and intensities may be formed around the coil 26000.
  • the change in intensity of a dynamic magnetic field is a quantitative concept.
  • the intensity change value of the magnetic field is an amount of change in the intensity of the magnetic field per unit time considering the direction of the magnetic field. Specifically, the change value of the magnetic fields formed in the same direction is simply the amount of change in the intensity of the magnetic field, but the change value of the magnetic fields formed in the other direction is determined according to the change amount of the magnetic field strength in consideration of the direction of the magnetic field,
  • An intensity change value attribute of the dynamic magnetic field 26100 may vary depending on a distance from the coil 26000.
  • the strength of the dynamic magnetic field 26100 is described above.
  • the magnetic field 26100 forming property may be applied.
  • the strength of the magnetic field formed at the distance may decrease. Therefore, the magnitude of change in the intensity of the magnetic field to be formed is also small, so that the intensity change value of the magnetic field is small.
  • the intensity change value of the dynamic magnetic field 26100 becomes larger.
  • various shapes in which the coil 26000 is implemented may change an intensity change value of the dynamic magnetic field 26100.
  • the magnetic field formed according to the above-described embodiment of the present application may form an induced current in the crucible 23000.
  • induced electromotive force may be generated in the crucible 23000 by the dynamic magnetic field generated by the coil 26000.
  • the induced current may flow in the crucible 23000 according to the generated electromotive force.
  • a current path of an induced current may be formed in the crucible 23000.
  • 59 is a conceptual diagram illustrating a magnetic field and a crucible formed in a coil according to an embodiment of the present application.
  • a current path induced in the crucible 23000 may be formed on the outer wall 23100 of the crucible 23000.
  • one form of the induced current path may be a form surrounding the outer wall 23100 of the crucible 23000.
  • a current path having a local circumference in the outer wall 23100 of the crucible 23000 may be formed.
  • the crucible 23000 may have a current path in which the above-described paths are combined at the same time, as well as a magnetic field shape in which the coil 26000 is generated without being limited to the above-described current paths. It may have various types of current paths in response to the change.
  • the property of the induced current according to an embodiment of the present application may have various properties according to the relationship between the coil 26000, the magnetic field formed in the coil 26000, and the crucible 23000, which will be described below. Do it.
  • the intensity of the induced current may mean the amount of charge moving in the crucible 23000 per unit time. That is, the meaning of the intensity of the induced current in the present specification is a quantitative concept to reveal that the concept implies the meaning of how much charge has moved.
  • the electrical property of the induced current induced in the crucible 23000 according to the exemplary embodiment of the present application may vary depending on the property of the dynamic magnetic field formed in the coil 26000.
  • the intensity property of the induced current formed may be increased.
  • the above relation (1) (2) Accordingly, as the intensity change value of the dynamic magnetic field increases, the force applied to the electrons of the crucible 23000 may increase, and the electromotive force affecting the movement of the electrons may increase. Accordingly, the amount of electrons that can move in the crucible 23000 increases, so that the intensity property of the induced current increases.
  • the electrical property of the induced current induced in the crucible 23000 may vary depending on the shape of the crucible 23000.
  • the intensity of the induced current may be increased when the thickness of the curable is thick corresponding to the thickness of the curable, and the intensity of the induced current may be small when the thickness is thin.
  • the amount of electrons included in the thickness may be changed according to the thickness of the crucible 23000.
  • the amount of electrons when the thickness of the crucible 23000 is thick increases as compared with the amount of electrons having a relatively thin thickness. Accordingly, as the thickness of the crucible 23000 increases, the amount of electrons that can move by the formed magnetic field increases, so that the thicker the crucible 23000, the greater the intensity of the induced current.
  • the induced current according to an embodiment of the present application may form an induced magnetic field in the crucible 23000 once again according to the magnetic field forming property.
  • the induced magnetic field may form an induced current secondary to the crucible 23000 according to the induced current forming property. That is, in the crucible 23000 according to the exemplary embodiment of the present application, an event of forming an induced current and forming an induced magnetic field may occur in series.
  • calories may be generated in various ways.
  • heat may be generated by combining an inductive current induced in the crucible 23000 and an electrical resistance component of the crucible 23000.
  • the induced current and / or induced current path induced in the crucible 23000 may be converted into calories by the resistive component of the crucible 23000.
  • the amount of heat generated in the crucible 23000 increases as the intensity of the induced current increases.
  • the crucible 23000 may generate heat in the crucible 23000 according to a coupling between the dynamic magnetic field formed around the coil 26000 and the electromagnetic component of the crucible 23000.
  • the amount of heat generated by the induced current and / or the dynamic magnetic field in the above-described crucible 23000 may heat the crucible 23000. Since the crucible 23000 is heated by the induction current induced by the coil 26000 and the dynamic magnetic field, the crucible 23000 may be referred to as induction heating.
  • Induction heating there are a number of ways as described above, but in the following according to the inductive current formed in the crucible (23000) and the resistance component of the crucible (23000) ) Will only be described when induction heating.
  • the heating assembly there may be a means for assisting the heating means 25000.
  • the heating means 25000 according to an embodiment of the present application is the coil 26000
  • a magnetic field focusing structure 27000 that focuses a magnetic field formed around the coil 26000 is provided to the heating assembly as a heating aid. It may be provided.
  • the term "concentration" may be interpreted to mean that the magnetic flux of the magnetic field is concentrated in a certain area.
  • the ferrite 28000 as an example of the magnetic field focusing structure 27000 will be described.
  • the ferrite 28000 is described as an example of the magnetic field focusing structure 27000, but the present invention is not limited thereto, and any means or material capable of focusing the magnetic field may be implemented in the heating assembly as the magnetic field focusing structure 27000. It is revealed.
  • the ferrite 28000 according to an embodiment of the present application may be implemented in various materials, types, and shapes.
  • the ferrite 28000 is an ionic compound having a spinel structure, and may be formed by combining various metal compounds with the main component of iron oxide.
  • the various metal compounds may be divalent metal ions such as Mn, Zn, Mg, Cu, Ni, Co, and the like.
  • the ferrite 28000 is not limited to the above-described components, and may be formed of a material of a component that focuses various magnetic fields.
  • the ferrite 28000 may include (1) a liquid type that may exist in a liquid phase at room temperature and (2) a solid type that may have a predetermined shape at room temperature.
  • the ferrite 28000 may have various shapes to suit the purpose, such as a plate shape, a shape having convex protrusions on at least one surface of the plate shape, a circular shape, an ellipse shape, a spherical shape, and the like.
  • the magnetic field focusing of the ferrite 28000 which is an example of the magnetic field focusing structure 27000 according to the exemplary embodiment of the present application, will be described.
  • 60 is a view showing a ferrite placed in a magnetic field according to an embodiment of the present application.
  • the ferrite 28000 placed in the magnetic field may affect the magnetic flux of the magnetic field.
  • the ferrite 28000 may act to attract the magnetic flux formed around the ferrite 28000 to the ferrite 28000 such that the magnetic flux of the magnetic field is densely formed around the ferrite 28000.
  • the influence of the magnetic flux may vary depending on the thickness of the ferrite 28000. As the thickness of the ferrite 28000 is increased, the magnetic flux that may be formed around the ferrite 28000 may increase.
  • the ferrite 28000 may be disposed in the heating assembly of the present application.
  • the ferrite 28000 disposed in the heating assembly according to the exemplary embodiment of the present application may have a magnetic field focusing property that increases the intensity change value of the dynamic magnetic field affecting the crucible 23000.
  • FIG. 61 illustrates a ferrite, a coil, and a magnetic field formed around a coil according to an embodiment of the present application.
  • the ferrite 28000 when the ferrite 28000 according to the exemplary embodiment of the present application is disposed in the heating assembly, the ferrite 28000 has an outer wall 23100 of the magnetic flux of the dynamic magnetic field 23000. It can be focused to form densely.
  • the dynamic magnetic flux closely formed on the outer wall 23100 of the crucible 23000 may be due to the above-described properties of the ferrite 28000.
  • the ferrite 28000 disposed on the outside of the coil 26000 may attract the magnetic flux to the crucible 23000 by attracting the magnetic flux formed inside the coil 26000.
  • the dynamic magnetic flux closely formed on the outer wall 23100 of the crucible 23000 may be a property of the magnetic field forming property in addition to the properties of the ferrite 28000.
  • the ferrite 28000 disposed outside the coil 26000 may attract a magnetic flux that is formed outside the coil 26000 according to the properties of the ferrite 28000.
  • the magnetic field velocity symmetrically formed inside the coil 26000 may be pulled into the crucible 23000 symmetrically according to the magnetic field forming property that the magnetic field is symmetrically formed around the coil 26000. Accordingly, the magnetic flux of the dynamic magnetic field is densely formed on the outer wall 23100 of the crucible 23000.
  • the strength in the positive and negative directions of the dynamic magnetic field of the coil 26000 formed on the outer wall of the crucible 23000 increases simultaneously.
  • the fluctuation amplitude of the dynamic magnetic field also increases correspondingly. That is, the intensity change value of the dynamic magnetic field generated at the outer wall 23100 of the crucible 23000 becomes larger than when the ferrite 28000 is not disposed.
  • the heating efficiency in the present specification means the amount of heat generated in the crucible 23000 relative to the electrical energy input to the coil which is the heating means 25000 of the present application. That is, when the electrical energy input to the coil is the same, it can be said that the heating efficiency (or thermal efficiency) is larger as the amount of heat generated in the crucible 23000 is larger.
  • the heating efficiency of the crucible 23000 in the case of arranging the ferrite 28000 in the heating assembly according to the exemplary embodiment of the present application may be higher than in the case of not arranging the ferrite 28000.
  • FIG. 62 illustrates a ferrite disposed in a heating assembly according to one embodiment of the present application.
  • FIG. 63 is a distribution chart of magnetic field intensity change values according to an embodiment of the present application.
  • the ferrite 28000 may be formed to surround the coil 26000 disposed outside the crucible 23000.
  • a ferrite 28000 having a shape corresponding to the shape of the coil 26000 disposed in the crucible 23000 may be disposed.
  • Ferrite 28000 in the form may be disposed.
  • the heating efficiency of the crucible 23000 according to the exemplary embodiment of the present application may be increased.
  • the change value intensity distribution of the dynamic magnetic field formed in the coil according to an embodiment of the present application may be changed by the crucible disposed in the heating assembly.
  • the intensity distribution of the change value of the dynamic magnetic field formed inside the coil may be shifted toward the outer wall of the crucible.
  • the maximum magnitude of the change value of the magnetic field is As such, the arrangement of the crucibles 23000 may not significantly change.
  • the change value intensity distribution of the dynamic magnetic field formed in the coil can be changed by the ferrite 28000 disposed in the heating assembly, for example, the Figure 62 (a
  • the ferrites 28000 are disposed as shown in FIGS. 2 through 3
  • magnetic fields may be focused on the outer walls of the crucibles by the ferrites 28000. Accordingly, coils formed on the outer walls of the crucibles 23000 may be used.
  • the intensity in the positive and negative directions of the dynamic magnetic field of (26000) increases simultaneously.
  • the bidirectional magnetic field strength rises the fluctuation amplitude of the dynamic magnetic field also increases correspondingly. That is, the intensity change value of the magnetic field is When the low ferrite 28000 is disposed, the intensity change value of the magnetic field may be larger in the outer wall than before the ferrite 28000 is disposed.
  • the induced current intensity may be increased further in the crucible 23000 after being disposed than the crucible 23000 before the ferrite 28000 is disposed.
  • the amount of heat generated in the crucible 23000 may increase due to the above-described induction heating property.
  • the amount of heat generated by the coil 26000 in which the ferrite 28000 is disposed may be greater than that of the coil 26000 in which the ferrite 28000 is not disposed, thereby increasing the heating efficiency of the crucible 23000.
  • the ferrite 28000 may be implemented to surround the upper and lower portions of the coil 26000 disposed in the crucible 23000.
  • the ferrite 28000 may be disposed to the upper and lower portions of the closed shape coil 26000.
  • the effect of focusing on the crucible 23000 until the dynamic magnetic flux exits through the upper or lower surface of the coil 26000 is achieved. It can have As the dynamic magnetic field is focused on the crucible 23000, the heating efficiency of the crucible 23000 is increased.
  • such a ferrite 28000 is not only disposed outside the crucible 23000, but also to increase the heating efficiency of the crucible 23000. It may be arranged in a form included therein.
  • 64 is a cut side view illustrating ferrite included in an outer wall of a crucible according to an embodiment of the present application.
  • the ferrite 28000 is formed on the outer wall 23100 of the crucible 23000, so that a dynamic magnetic field may be focused on the outer wall 23100 of the crucible 23000. As the dynamic magnetic field is focused, the heating efficiency of the crucible 23000 may be increased.
  • the ferrite 28000 according to an embodiment of the present invention may be implemented in a form applied to the crucible 23000 to increase the heating efficiency of the crucible 23000.
  • 65 is a view illustrating a shape in which ferrite is applied to a deposition apparatus 20000 according to an embodiment of the present application.
  • the ferrite 28000 according to an embodiment of the present application may be implemented in a form that is applied to the heating assembly is coated on the heating assembly configuration.
  • the ferrite 28000 may be applied to the inner surface of the outer wall of the housing 21000 surrounding the crucible 23000.
  • the ferrite 28000 may be applied to the inner surface of the outer wall of the housing 21000 surrounding the side portion of the crucible 23000.
  • the ferrite 28000 may be applied to the crucible 23000. As shown in FIG. 65 (b), the ferrite 28000 may be applied to the side outer wall 23100 of the crucible 23000.
  • the thickness of the ferrite 28000 applied to the heating assembly according to an embodiment of the present application may be variously selected according to the design purpose of the deposition apparatus 20000.
  • the thermal efficiency of the crucible 23000 is increased, and as a result, the amount of heat transferred from the crucible 23000 to the deposition material. Can be a lot.
  • the present deposition apparatus 20000 may have an effect of efficiently using energy by arranging the ferrite 28000 to have a high heat output relative to the same input energy.
  • the deposition apparatus 20000 may have an effect of increasing the success rate at which the deposition material is formed on the surface to be deposited. .
  • the actual efficiency of the deposition means not only that the deposition material is properly formed on the surface to be deposited, but may also mean that the deposition surface is formed to have a uniform thickness or concentration.
  • the deposition apparatus 20000 for depositing a deposition material on the surface to be deposited it may be an important issue to increase the deposition efficiency in which the deposition material is deposited on the surface to be deposited.
  • the amount of heat distributed in each space of the crucible 23000 may be controlled differently.
  • the temperature of the deposition material passing through the nozzle 23200 may be increased.
  • the deposition material is smoothly discharged to the surface to be deposited through the nozzle 23200 and is formed on the surface to be deposited, so that the present deposition apparatus 20000 may have an effect of increasing the actual efficiency of the deposition.
  • the amount of heat distributed in the space of the crucible 23000 can be uniformly controlled.
  • the heat distribution allows deposition materials discharged from each nozzle formed in the crucible to move together toward the deposition surface. Accordingly, the deposition material may be uniformly formed on the surface to be deposited, so that the actual efficiency of the deposition may be increased.
  • 66 is a schematic diagram illustrating a heat distribution of a crucible according to an embodiment of the present application.
  • 67 is a schematic diagram illustrating a heat distribution of a crucible according to an embodiment of the present application.
  • the area of the side close to the top surface of the crucible 23000 on which the nozzle 23200 is formed will be described as the N area side and the relatively far area as the F area side.
  • the heat distribution of the crucible 23000 to be achieved in the present invention may be a heat distribution having a heat distribution relatively higher than the F region side of the N region side of the crucible 23000 side.
  • the deposition material may be sufficiently supplied with heat from the N region side of the crucible 23000 to smoothly pass through the nozzle 23200 and move to the deposition surface. .
  • the heat distribution is just one example, and the heat distribution of the crucible 23000 is not limited thereto, and the heating assembly is configured such that the heat distribution in the X-axis and Y-axis directions may be variously generated in different regions. This can be implemented.
  • the heat distribution of the crucible 23000 to be achieved in the present invention may be a heat distribution having a uniform amount of heat generated in the X-axis direction of the crucible 23000 as shown in FIG. 67.
  • the amount of heat generated according to the Z-axis direction may vary.
  • the generation of calories is high at the side of the crucible in which the nozzle is formed.
  • the thermal distribution of the furnace crucible can be formed.
  • the heat distribution of the crucible is not generated in the Z axis direction. It may also be controlled by a uniform distribution of heat.
  • the outer wall 23100 of the crucible 23000 may be controlled so that the spatial distribution of the amount of heat provided to the deposition material accommodated in the inner space of the crucible 23000 may be controlled to the predetermined distribution as described above.
  • the intensity distribution of the induced current induced in can be appropriately controlled. For example, when defining a left and right direction and an up and down direction with respect to one of the four heating surfaces of the crucible 23000, the distribution of the induced currents for the one heating surface is the left and right directions. It may be appropriately controlled according to, or may be appropriately controlled along the vertical direction.
  • the crucible 23000 may be manufactured to control the distribution of the induced current using the shape of the outer wall 23100 of the crucible 23000.
  • the heating assembly may be manufactured so that the distribution of the induced current is controlled by using the distance between the crucible 23000 and the coil 26000.
  • the heating assembly may be manufactured such that the distribution of the induced current is controlled using the arrangement / distribution of the magnetic field focusing part.
  • the heating assembly may be manufactured such that the distribution of the induced current is controlled using independent control of the coil 26000.
  • the nozzle 23200 is illustrated as being formed upward in the drawings and the following description, this does not mean that the deposition equipment is a top-down or bottom-up equipment.
  • the shape of the crucible shown generally in the drawings below is a rectangular parallelepiped shape having a longitudinal direction, but this is merely an example as described above.
  • the embodiments described below can be applied to heating assemblies having crucibles of various shapes.
  • the crucible 23000 may be formed to have various distance relations from the coil 26000, which is the formed heating means 25000. Can be.
  • FIG. 68 is a side cross-sectional view illustrating an example of changing a shape of a crucible according to an embodiment of the present application.
  • the crew 2260 disposed around the crucible 23000 and the side regions included in the side surfaces of the crucible 23000 have a different distance relationship.
  • Sable 23000 may be implemented.
  • the crucible 23000 is a crucible closer to the bottom surface opposite to the top surface on which the nozzle 23200 is formed than the side surface of the crucible 23000 close to the top of the crucible 23000 (hereinafter referred to as N region side).
  • the side of the tablet 23000 (hereinafter referred to as an F region side) may be embodied by being recessed.
  • the side surface of the crucible 23000 near the bottom surface of the crucible 23000 may be formed to have a predetermined slope.
  • the side surface of the crucible 23000 having the longest distance from the nozzle 23200 formed in the crucible 23000 is the farthest from the coil 26000, and the coil formed closer to the side from the nozzle 23200.
  • the crucible 23000 may be formed to approach the distance 26000.
  • the N region side may be controlled to have a heat distribution formed higher than the heat quantity of the F region side.
  • Magnetic field formation properties described above described above (described above, )
  • the intensity change value of the dynamic magnetic field formed on the N region side of the crucible 23000 implemented closer to the coil 26000 than the side of the F region may be increased. Therefore, the intensity of the induced current formed in the crucible 23000 corresponding to the intensity change value of the magnetic field is higher in the N region than in the F region.
  • FIG. 66 (a) as a result, when the crucible 23000 is implemented as described above, the N region side close to the nozzle 23200 may be controlled to have a heat distribution formed higher than the heat quantity of the F region side. Can be.
  • the amount of heat generated in the upper end of the crucible 23000 increases, so that the temperature may be relatively higher than the lower end.
  • the deposition material emitted from the crucible 23000 may have a high active energy and may have an effect of being directed to the deposition surface through the nozzle 23200 of the crucible 23000 at a high speed.
  • the deposition material when the deposition material moves toward the nozzle 23200 in the crucible 23000, a naturally increased amount of heat may be supplied.
  • the deposition material may have an effect of naturally moving to the surface to be deposited as compared with when the deposition material is discontinuously supplied with heat.
  • the heat distribution in the crucible 23000 may be controlled.
  • 69 is a side cutaway view showing examples of changing a thickness of a crucible according to an embodiment of the present application.
  • the crucible 23000 according to an embodiment of the present application may be formed such that regions having different thicknesses exist.
  • the crucible 23000 may be formed to have a thickness different from a portion close to the nozzle 23200 formed in the crucible 23000 (the N region side) and a relatively far portion (the F region side).
  • the thickness of the side of the F region of the crucible 23000 may be thinly formed.
  • the outer side of the F region side surface is formed in a hollow shape to the inside of the crucible 23000, so that the thickness may be thinner than that of the N region side surface.
  • An inner wall of the F region side surface of the block 23000 may be formed to be dug outwardly of the crucible 23000 so that the thickness of the F region side surface may be formed relatively thinner than the thickness of the N region side surface.
  • the thickness of the side of the F region may be formed in a shape that is recessed outward from the inner wall from the outer wall 23100 inward from the outer wall 23100 by combining the above-described shapes.
  • the distance from the coil 26000 may also vary. 69 (a) and (c), as the thickness of the side of the F region of the crucible 23000 according to the exemplary embodiment of the present application is thinly formed in an outwardly inwardly hollow shape from the coil 26000, The distance can also be greater.
  • the crucible 23000 has a magnetic field forming property (described above, Or according to the induced current property (described above, the thickness of the crucible 23000), the N region side as shown in FIG. 66 (a) may be controlled to have a heat distribution formed higher than the heat quantity of the F region side.
  • a dynamic magnetic field having a large change value of magnetic field strength may be formed on the N region side of the crucible 23000.
  • a relatively high intensity induced current may flow in the thick side portion (N region side surface) of the crucible 23000. The generation of heat on the side of the N region is increased by the induction current having high intensity, so that the heat distribution of the crucible 23000 can be controlled as described above.
  • the crucible 23000 according to the exemplary embodiment of the present application has a different thickness and has a predetermined angle of inclination. It can have an area.
  • the N region side surface may have a higher heat distribution than the F region side surface, and as shown in FIG. 66 (b), the N region side surface may be controlled to have a more natural heat distribution in the F region side surface.
  • the amount of feed supplied to the deposition material passing through the N region side is increased, thereby guiding smoothly to the surface to be deposited, thereby increasing the actual efficiency of deposition.
  • the crucible 23000 is illustrated as being present inside the coil 26000 of the formed closed shape, the present invention may not be limited thereto.
  • the coil 26000 In order to control the heat distribution of the crucible 23000 in order to increase the actual efficiency of the deposition according to the exemplary embodiment of the present application, there are various methods of implementing the coil 26000. For example, there may be a method of adjusting the number of windings of the coil 26000, a method of variously implementing a distance from the crucible 23000, and the like.
  • 70 is a view illustrating a coil formed on the outside of the crucible according to the embodiment of the present application.
  • the number of windings of the coil 26000 may be differently disposed in the side region of the crucible 23000 according to the exemplary embodiment of the present application.
  • More windings of the closed-shape coil 26000 may be disposed to affect the region (23000) of the region (N region side).
  • the crucible 23000 may be an exemplary embodiment in which the upper part or the lower part of the plurality of closed shape coils 26000 is disposed on the side of the N region of the crucible 23000.
  • the number of turns of the coil 26000 disposed on the side of the N region may be implemented with more coils 26000.
  • the N region side may be controlled to have a heat distribution formed higher than the heat amount of the F region side.
  • Magnetic field formation properties described above described above (described above, )
  • the intensity change value of the dynamic magnetic field formed on the N region side of the crucible 23000 in which the coil 26000 disposed more than the F region side may be increased.
  • the intensity of the induced current formed in the crucible 23000 is also higher in the N region than in the F region. Therefore, referring to FIG. 66 (a) as a result, when the crucible 23000 is implemented as described above, the N region side close to the nozzle 23200 may be controlled to have a heat distribution formed higher than the heat quantity of the F region side. Can be.
  • the amount of heat generated at the upper end of the crucible 23000 increases, so that the temperature may be relatively higher than that of the lower part.
  • the deposition material emitted from the crucible 23000 has a high active energy and has a high speed.
  • Through the nozzle 23200 of the crucible 23000 may have an effect that can be directed to the surface to be deposited.
  • the coil 26000 may have various embodiments in a positional relationship with the outer wall 23100 of the crucible 23000.
  • the coil 26000 according to the exemplary embodiment of the present application may be arranged by making the distance between the coil 26000 formed on the other surface smaller than the distance formed on one surface of the crucible 23000.
  • 71 is a view illustrating a coil formed on the outside of the crucible according to the embodiment of the present application.
  • the distance between the coils 26000 may be different for each side region of the crucible 23000 according to the exemplary embodiment of the present application.
  • the distance of the closed-shape coil 26000 that affects the region (23000) (the N region side) may be formed closer.
  • the crucible 23000 may be crucible of the upper part or the lower part of the plurality of closed shape coils 26000.
  • An implementation example may be formed at a relatively closer distance to the N region side of the 23000 than the F region side.
  • the N region side may be controlled to have a heat distribution formed higher than the heat amount of the F region side.
  • Magnetic field formation properties described above described above (described above, )
  • the intensity change value of the magnetic field formed on the N region side of the crucible 23000 in which the coil 26000 is implemented may be greater than the side of the region F.
  • the intensity of the induced current formed in the crucible 23000 is also higher in the N region than in the F region.
  • FIG. 71 (a) as a result, when the crucible 23000 is implemented as described above, the N region side close to the nozzle 23200 may be controlled to have a heat distribution formed higher than the heat quantity of the F region side. Can be.
  • the coil 26000 implemented in the deposition apparatus 20000 according to the exemplary embodiment of the present application may be driven separately to control the heat distribution of the crucible 23000.
  • 72 is a conceptual diagram illustrating an example in which a coil implemented in the deposition apparatus 20000 according to an embodiment of the present application is separately driven.
  • 73 is a view conceptually showing a heat distribution of a crucible according to an embodiment of the present invention.
  • the coil 26000 may be driven separately.
  • the separately driven coils 26300 and 26400 may have different attributes of the variable power applied thereto.
  • the variable power source property may include a frequency and intensity property of a power source.
  • a plurality of powers having different attributes applied to the coils 26000 may be applied from power supplies corresponding to the number of power supplies.
  • a plurality of powers having different attributes applied to the coils 26300 and 26400 for each of the separately driven coils 26300 and 26400 may be applied through fewer power supplies.
  • electrical processing may be necessary, such as distributing an output line to supply power having different properties for each of the separately driven coils 26300 and 26400.
  • a separate drive coil according to an embodiment of the present application may have a layout example corresponding to various embodiments of the crucible.
  • the coils 26300 and 26400 that are driven differently may be disposed for each region of the crucible.
  • the region of the crucible may be divided into an upper region and a lower region based on a structure in which the implemented crucible is separated. Separate driving 1 coils 26300 may be disposed in the upper region of the crucible, and separate driving 2 coils 26400 may be disposed in the lower region of the crucible. Accordingly, the properties of the magnetic field affecting each region of the crucible may be changed, and thus the amount of crucible heat generated in the upper and lower regions of the crucible may vary.
  • the separation structure of the crucible may be implemented in the crucible.
  • the region of the crucible may be divided into an upper region and a lower region based on the separated structure formed on the outer surface of the crucible.
  • the separately driven coils 26300 and 26400 may be disposed in the upper and lower regions of the crucible, respectively.
  • the coil 26000 disposed in the crucible 23000 in order to increase the amount of heat generated in a portion close to the nozzle 23200 of the crucible 23000, the coil 26000 disposed in the crucible 23000 according to the above-described embodiment of the present application is separately driven. Can be.
  • the power frequency and intensity applied to the coil 26000 disposed in the nozzle 23200 may be relatively high.
  • the amount of heat generated by the crucible 23000 corresponding to the driving 1 26300 is driven. It can be higher than two.
  • the driving 2 coil 26400 may form a magnetic field that is relatively higher than the driving 1 around the magnetic field forming property.
  • the relatively high intensity magnetic field may increase the induced current intensity formed in the nozzle 23200 of the crucible 23000.
  • the separately driven coils 26300 and 26400 may be controlled to be the heat distribution of the crucible 23000 as shown in FIG. 73.
  • the deposition material discharged through the nozzle 23200 of the crucible 23000 may receive a sufficient amount of heat. Accordingly, the deposition material may be guided to the surface of the deposition target smoothly.
  • each of the magnetic fields generated from the separately driven coils 26300, 26400 may interfere, interfere, and / or affect each other.
  • the strength of the magnetic field formed in the crucible 23000 may be weakened.
  • the intensity of the induced current formed in the crucible 23000 may be lowered, thereby causing an issue in which the heating efficiency of the crucible 23000 is lowered.
  • the separately driven coils 26300 and 26400 may be implemented so as not to influence each other.
  • 74 is a view illustrating a ferrite inserted between coils according to an embodiment of the present application.
  • a ferrite 28000 may be inserted between the separate drive coils 26300 and 26400. have. Magnetic fields that interfere with each other may be magnetic fields formed between the separate driving coils 26300 and 26400. The magnetic field formed between the separate driving coils 26300 and 26400 is formed in the direction of the other coil 26000 to affect the magnetic field formed in the other coil 26000. Therefore, the ferrite 28000 is inserted between the coils 26300 and 26400, so that a magnetic field formed between separate driving coils may be focused on the ferrite 28000.
  • the inserted ferrites 28000 may exclude mutual interference of the coils 26300 and 26400 that are separately driven.
  • the ferrite 28000 may affect the property of the magnetic field.
  • the ferrite 28000 may affect the strength of the generated magnetic field.
  • the influence of the magnetic flux constituting the magnetic field may increase or decrease the number of magnetic rays passing through a predetermined area, thereby affecting the strength of the magnetic field.
  • the method may include a method of arranging various shapes of the ferrite 28000, a method of arranging the ferrite 28000 inside the outer wall 23100 of the crucible 23000, and applying the ferrite 28000.
  • the ferrite 28000 may be embodied in a form having a slope.
  • the ferrite 28000 is not limited thereto, but the ferrite 28000 may exist in various forms such as a circle, an ellipse, or a sphere.
  • the ferrite 28000 may exist in various forms such as a circle, an ellipse, or a sphere.
  • the ferrite 28000 may be disposed in the crucible 23000 in various forms surrounding the coil 26000.
  • 75 is a view illustrating various shapes of ferrite according to an embodiment of the present application.
  • the ferrite 28000 may be disposed to cover a portion of the upper and / or lower conductive wires of the coil 26000 of the closed shape.
  • the ferrite 28000 may be disposed to partially open the lower portion of the closed shape coil 26000 as illustrated in FIGS. 75A and 75B.
  • the ferrite 28000 may be disposed to partially open the upper portion of the coil 26000 of the closed shape as illustrated in FIGS. 75C and 75D.
  • the heat quantity of the N region side or the F region side of the crucible 23000 may be high.
  • the strength of the magnetic field formed on the N region side or the F region side of the implemented crucible 23000 may be increased.
  • the intensity of the induced current formed in the crucible 23000 also increases in the N region side or the F region side. Therefore, as a result, when the ferrite 28000 is disposed in the heating assembly as described above, the N region side near the nozzle 23200 generates more heat than the F region side, or the F region side generates more heat than the N region side. It can be controlled so that the above-described heat distribution.
  • the nozzle of the crucible 23000 has a high active energy and has a high active energy. 23200) may have an effect that can be directed to the surface to be deposited.
  • the deposition material may have an effect of supplying a sufficient amount of heat so as to shorten the phase change threshold time.
  • FIG. 76 is a view illustrating ferrites disposed in a form that covers a bottom surface of a crucible according to an embodiment of the present application.
  • the ferrite 28000 may be disposed to completely cover the bottom surface of the crucible 23000.
  • the arrangement of the ferrite 28000 as described above may cause the heat distribution of the crucible 23000 having a large amount of heat on the lower surface of the crucible 23000 according to the magnetic field focusing property of the ferrite 28000.
  • the intensity change value of the dynamic magnetic field generated on the lower surface of the crucible 23000 becomes relatively larger than other portions.
  • the intensity of the induced current generated on the lower surface of the crucible 23000 increases, and the amount of heat generated according to the aforementioned induction heating property also increases.
  • the bottom surface of the crucible 23000 on which the deposition material is deposited may be a heat distribution of the crucible 23000 in which a relatively large amount of heat is generated than the top and side surfaces of the crucible 23000.
  • the ferrite 28000 according to the exemplary embodiment of the present application may be arranged such that the amount of heat in the N region of the crucible 23000 becomes a thermal non-saturation of the crucible 23000 higher than the amount of heat in the F region.
  • 77 is a view showing the shape of a ferrite according to an embodiment of the present application.
  • the ferrite 28000 may be disposed in the heating assembly with a different thickness.
  • the ferrite 28000 may have a different thickness of the ferrite 28000 for each location region corresponding to the side surface of the crucible 23000.
  • the ferrite 28000 has a thickness of the ferrite 28000 disposed at a position corresponding to the N region side rather than the thickness of the ferrite 28000 disposed at a position corresponding to the side of the region F of the crucible 23000. It can be placed thick.
  • the above-described arrangement of the ferrites 28000 may be such that the heat distribution of the crucible 23000 is higher than the F region side.
  • the intensity change value of the magnetic field formed on the side of the N region may increase according to the magnetic field focusing property. Therefore, the intensity of the induced current formed in the crucible 23000 is also higher in the N region than in the F region.
  • the N region side surface of which the intensity of induced current is large may be higher than the heat quantity of the F region side surface according to the induction heating property.
  • the concept of varying the thickness of the ferrite 28000 may be applied to a region close to the nozzle 23200 of the crucible 23000.
  • the ferrites 28000 according to the exemplary embodiment of the present application may be disposed at different distances from each location area corresponding to the side surface of the crucible 23000.
  • the ferrite 28000 may be disposed closer to the N region than the F region of the crucible 23000.
  • the ferrite 28000 may be formed with a slight inclination so as to be close to the nozzle 23200 portion of the crucible 23000 and far from the other portion.
  • the arrangement of the ferrite 28000 having the inclination according to the exemplary embodiment of the present application may be such that the heat distribution of the crucible 23000 is higher than the F region side.
  • the magnetic flux focused on the N region side rather than the F region side may be increased.
  • the intensity change value of the magnetic field formed on the side of the N region may be increased.
  • the intensity of the induced current formed in the crucible 23000 is also higher in the N region than in the F region. Therefore, referring to FIG. 62 (a), when the crucible 23000 is implemented as described above, the portion of the crucible 23000 having the N region side close to the nozzle 23200 is higher than the calorific value of the F region side surface.
  • the heat distribution can be controlled.
  • the ferrite 28000 is formed to have a predetermined inclination so that the ferrite 28000 may be formed close to the nozzle 23200 of the crucible 23000, but in addition to the embodiment in which the ferrite 28000 is implemented with the inclination, the nozzle As long as the ferrite 28000 may be formed close to the portion 23200, the ferrite 28000 may be formed without being limited to any shape.
  • the ferrite 28000 disposed in the form of the crucible 23000 according to the exemplary embodiment of the present application may be implemented to be differently disposed for each region in the crucible 23000.
  • 78 is a cutaway side view illustrating ferrite included in an outer wall of a crucible according to an embodiment of the present application.
  • the ferrite 28000 when the ferrite 28000 according to the exemplary embodiment of the present application is disposed in the form of being inserted into the side of the crucible 23000, the ferrite 28000 may be formed to be differently formed for each region of the side surface. For example, the ferrite 28000 may be inserted into the N region side of the crucible 23000.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • General Induction Heating (AREA)

Abstract

La présente invention concerne un ensemble de chauffage. Selon un aspect de la présente invention, l'invention concerne un ensemble de chauffage destiné à un équipement de dépôt, l'ensemble de chauffage comprenant : un creuset ayant un espace formé en son sein de manière à contenir un matériau de dépôt et ayant au moins une buse mise en œuvre de sorte à guider le matériau de dépôt vers l'extérieur ; une bobine disposée à l'extérieur du creuset et conçue de telle sorte que, lorsqu'une énergie haute fréquence est appliquée à celle-ci, un courant de bobine correspondant à l'énergie haute fréquence circule à travers la bobine, formant ainsi un champ magnétique dynamique dans sa périphérie ; et une structure de concentration de champ magnétique disposée dans la périphérie de la bobine, un courant d'induction étant formé dans la paroi externe du creuset par le champ magnétique dynamique, le creuset est chauffé par la chaleur générée sur la base du courant d'induction et d'un élément de résistance électrique du creuset, et le champ magnétique dynamique formé dans la périphérie de la bobine est concentré par la structure de concentration de champ magnétique, ce qui permet d'augmenter la chaleur produite dans le creuset.
PCT/KR2017/014042 2016-12-01 2017-12-01 Ensemble de chauffage WO2018101802A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201780085257.3A CN110536975A (zh) 2016-12-01 2017-12-01 加热组件
US16/466,240 US20200063254A1 (en) 2016-12-01 2017-12-01 Heating assembly

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
KR10-2016-0163084 2016-12-01
KR1020160163084A KR101888270B1 (ko) 2016-12-01 2016-12-01 가열 어셈블리
KR10-2016-0163082 2016-12-01
KR10-2016-0163081 2016-12-01
KR1020160163083A KR101888269B1 (ko) 2016-12-01 2016-12-01 가열 어셈블리
KR10-2016-0163083 2016-12-01
KR1020160163081 2016-12-01
KR1020160163082A KR101888268B1 (ko) 2016-12-01 2016-12-01 가열 어셈블리
KR10-2017-0037876 2017-03-24
KR1020170037876A KR101973255B1 (ko) 2016-12-01 2017-03-24 가열 어셈블리

Publications (2)

Publication Number Publication Date
WO2018101802A2 true WO2018101802A2 (fr) 2018-06-07
WO2018101802A3 WO2018101802A3 (fr) 2018-07-26

Family

ID=62242180

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2017/014042 WO2018101802A2 (fr) 2016-12-01 2017-12-01 Ensemble de chauffage

Country Status (1)

Country Link
WO (1) WO2018101802A2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108770173A (zh) * 2018-07-27 2018-11-06 上海工程技术大学 一种等离子体射流产生装置
CN113853446A (zh) * 2019-06-05 2021-12-28 Lg电子株式会社 沉积装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5706633B2 (ja) * 2010-06-18 2015-04-22 日新技研株式会社 誘導炉
JP5896106B2 (ja) * 2011-07-20 2016-03-30 トヨタ自動車株式会社 高周波熱処理装置及び高周波熱処理方法
KR101213434B1 (ko) * 2012-05-22 2012-12-18 문병태 웨이퍼코팅용 가열장치
KR101642452B1 (ko) * 2015-01-23 2016-07-25 주식회사 파인에바 선형 증발 증착 장치
KR101719596B1 (ko) * 2015-04-29 2017-04-05 주식회사 파인에바 선형 증발 증착 장치

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108770173A (zh) * 2018-07-27 2018-11-06 上海工程技术大学 一种等离子体射流产生装置
CN113853446A (zh) * 2019-06-05 2021-12-28 Lg电子株式会社 沉积装置
CN113853446B (zh) * 2019-06-05 2023-08-25 Lg电子株式会社 沉积装置

Also Published As

Publication number Publication date
WO2018101802A3 (fr) 2018-07-26

Similar Documents

Publication Publication Date Title
WO2020145718A1 (fr) Substrat d'affichage
WO2013141658A1 (fr) Ensemble antenne et son procédé de fabrication
WO2011162473A2 (fr) Transformateur plan
WO2019203391A1 (fr) Système de chaudière à électrodes
WO2021006415A1 (fr) Unité de formation de trajet d'arc et relais à courant continu la comprenant
WO2018101802A2 (fr) Ensemble de chauffage
WO2017069369A1 (fr) Appareil de dépôt par évaporation linéaire
WO2020197334A1 (fr) Module de filtre emi actif autonome
WO2018043922A1 (fr) Procédé de fabrication de fil chauffant à infrarouge lointain et fil chauffant à infrarouge lointain fabriqué par ce procédé
WO2021112343A1 (fr) Unité de formation de trajet d'arc et relais à courant continu la comportant
WO2011002151A2 (fr) Appareil de capture d'image à fonction de compensation de tremblement
WO2023167409A1 (fr) Unité de réduction de vibration et transformateur la comprenant
WO2021261963A1 (fr) Dispositif de génération de plasma
WO2018080027A1 (fr) Module thermoélectrique flexible et appareil thermoélectrique comprenant ledit module
WO2022191343A1 (fr) Dispositif de transmission d'énergie sans fil et système d'alimentation sans fil le comprenant
WO2023171907A1 (fr) Module de canal de fluide et dispositif d'alimentation le comprenant
WO2017213277A1 (fr) Appareil de dépôt utilisant l'évaporation descendante
WO2020080610A1 (fr) Cuiseur
WO2023191288A1 (fr) Moule pour transformateur de moule, et procédé de fabrication de transformateur de moule l'utilisant
WO2018155858A1 (fr) Module multi-bobine et récepteur d'énergie sans fil
WO2023120915A1 (fr) Module de conversion de puissance et dispositif d'alimentation en énergie le comprenant
WO2022231131A1 (fr) Table de cuisson de type à chauffage par induction
WO2023120916A1 (fr) Module de conduit et module de conversion de puissance le comprenant
WO2022086155A1 (fr) Dispositif chaudière à électrodes
WO2019235775A1 (fr) Ensemble de chauffage d'équipement de dépôt et procédé de dépôt

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 17876565

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase in:

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 17876565

Country of ref document: EP

Kind code of ref document: A2