WO2018076187A1 - 液体控温系统及膜层剥离设备 - Google Patents

液体控温系统及膜层剥离设备 Download PDF

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Publication number
WO2018076187A1
WO2018076187A1 PCT/CN2016/103310 CN2016103310W WO2018076187A1 WO 2018076187 A1 WO2018076187 A1 WO 2018076187A1 CN 2016103310 W CN2016103310 W CN 2016103310W WO 2018076187 A1 WO2018076187 A1 WO 2018076187A1
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Prior art keywords
liquid
nozzle
chamber
temperature control
control system
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PCT/CN2016/103310
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English (en)
French (fr)
Inventor
刘方
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Shenzhen Royole Technologies Co Ltd
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Shenzhen Royole Technologies Co Ltd
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Priority to CN201680036290.2A priority Critical patent/CN107820638A/zh
Priority to PCT/CN2016/103310 priority patent/WO2018076187A1/zh
Publication of WO2018076187A1 publication Critical patent/WO2018076187A1/zh
Anticipated expiration legal-status Critical
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0404—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Definitions

  • the invention relates to the technical field of semiconductor manufacturing and processing, and in particular to a liquid temperature control system and a film peeling device.
  • the temperature of the cavity of the photoresist stripping device and the piping system connected thereto can be ensured by spraying a liquid of a certain temperature, but the sprayed liquid is easily caused by being easily volatilized. Larger waste, therefore, how to provide an energy-saving liquid spray temperature control program has become a problem to be solved.
  • the present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention is required to provide a liquid temperature control system and a film peeling apparatus.
  • a liquid temperature control system is used for a film peeling apparatus, comprising: a storage portion for holding a liquid, and a shower system, wherein the cavity is formed with a chamber, a bottom of the chamber is connected to the storage portion, the spray system includes a first nozzle, the first nozzle is disposed at a bottom of the chamber, and the spray system is connected to the storage portion and is used for The liquid is sprayed through the first nozzle to the bottom of the chamber, the bottom of the chamber is for receiving the liquid sprayed by the first nozzle and returning the liquid to the storage unit.
  • the first nozzle is disposed at the bottom of the chamber, the position from the storage portion is relatively close, which facilitates the recovery of the liquid, and at the same time, after the liquid is sprayed to the bottom of the chamber, It is easy to directly recycle to the storage part, thereby reducing the volatilization of the liquid, thereby reducing the waste caused by the volatilization of the liquid, thereby achieving the purpose of energy saving.
  • the liquid temperature control system includes a cover disposed within the chamber and housing the first nozzle.
  • the first nozzle is provided with a first spray slit along a length direction of the first nozzle.
  • the first squirt is toward the bottom of the chamber.
  • the number of the first nozzles is two, and the two first nozzles are disposed in parallel.
  • the distance between the first nozzle and the bottom surface of the chamber ranges from 3 cm to 10 cm.
  • the distance between the first nozzle and the bottom surface of the chamber is 5 cm.
  • the shower system includes a first valve member and a first connecting pipe, the first connecting pipe connecting the first nozzle and the storage portion, and the first valve member is disposed And on the first connecting line, and used to open or close the first connecting line.
  • the shower system includes a drive device for driving the liquid from the reservoir into the first nozzle for spraying.
  • the liquid temperature control system includes a drain tube that communicates with the chamber and is located at the top of the chamber.
  • the sprinkler system includes a second spout, the second spout is disposed at a top of the chamber, and the second spout is coupled to the reservoir.
  • the shower system includes a second valve member and a second connecting pipe, the second connecting pipe connects the second nozzle and the storage portion, and the second valve member is disposed And on the second connecting line, and used to open or close the second connecting line.
  • a film peeling apparatus includes the liquid temperature control system according to any of the above embodiments.
  • the first nozzle is disposed at the bottom of the chamber, the position from the storage portion is relatively close, which facilitates the recovery of the liquid, and at the same time, after the liquid is sprayed to the bottom of the chamber, It is easy to directly recycle to the storage part, thereby reducing the volatilization of the liquid, thereby reducing the waste caused by the volatilization of the liquid, thereby achieving the purpose of energy saving.
  • FIG. 1 is a schematic structural view of a liquid temperature control system according to an embodiment of the present invention.
  • FIG. 2 is a partial block diagram of a liquid temperature control system according to an embodiment of the present invention.
  • first and second are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated.
  • features defining “first” or “second” may include one or more of the described features either explicitly or implicitly.
  • the meaning of "a plurality” is two or more unless specifically and specifically defined otherwise.
  • connection In the description of the present invention, it should be noted that the terms “installation”, “connected”, and “connected” are to be understood broadly, and may be fixed or detachable, for example, unless otherwise explicitly defined and defined. Connected, or connected in one piece. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium, which can be the internal communication of two elements or the interaction of two elements. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood on a case-by-case basis.
  • the liquid temperature control system 10 of the embodiment of the present invention is used for a film peeling apparatus.
  • the liquid temperature control system 10 includes a reservoir 12, a cavity 14 and a shower system 16.
  • the storage portion 12 is for holding a liquid.
  • the cavity 14 is formed with a chamber 141.
  • the bottom 142 of the chamber 141 is connected to the reservoir 12.
  • the sprinkler system 16 includes a first spout 161.
  • the first nozzle 161 is disposed at the bottom 142 of the chamber 141.
  • the sprinkler system 16 is coupled to the reservoir 12 and is used to spray liquid through the first nozzle 161 to the bottom 142 of the chamber 141.
  • the bottom 142 of the chamber 141 is for receiving the liquid ejected from the first nozzle 161 and returning the liquid to the storage portion 12.
  • the first nozzle 161 is disposed at the bottom 142 of the chamber 141, the position closer to the storage portion 12 is closer to facilitate the recovery of the liquid, and at the same time, the liquid is sprayed to the chamber. After the bottom 142 of the chamber 141, it is easy to directly recover to the storage portion 12, thereby reducing the volatilization of the liquid, thereby reducing the waste caused by the volatilization of the liquid, thereby achieving the purpose of energy saving.
  • the storage portion 12 has a rectangular parallelepiped shape, and a storage chamber (not shown) is formed inside, and the liquid is stored in the storage chamber.
  • the reservoir 12 may be a medicated tank, and the liquid is a volatile liquid, such as a stripping liquid, so that the stripping liquid can be sprayed directly through the first nozzle 161 to maintain the temperature of the system.
  • a volatile liquid such as a stripping liquid
  • the liquid contained in the reservoir 12 may be other organic volatile liquids, such as organic solutions containing alcohols. Therefore, it is not limited to the stripping liquid in the example of the present invention.
  • the liquid temperature control system 10 when the liquid temperature control system 10 is in operation, the liquid having a certain temperature enters the shower system 16 from the storage portion 12, and then is sprayed to the bottom portion 142 of the chamber 141 via the first nozzle 161, so that Liquid The body is sprayed in the form of a mist to maintain the temperature stability of the liquid temperature control system 10. Then, the sprayed misty liquid condenses and collects at the bottom 142 of the chamber 141, and then flows back into the storage portion 12, thus circulating, thereby completing the heat retaining process of the liquid temperature control system 10. At the same time, the spray pressure of the first nozzle 161 during the entire spraying process is small.
  • the liquid can be operated at a temperature ranging from 50 degrees to 70 degrees.
  • the liquid temperature control system 10 includes a cover 11.
  • the lid body 11 is disposed in the chamber 141 and houses the first nozzle 161.
  • the atomized liquid can be returned to the chamber 141 relatively quickly.
  • the bottom 142 avoids waste of the atomized liquid moving too much, thereby saving costs.
  • the lid body 11 has a rectangular parallelepiped shape, and the lid body 11 accommodates the first nozzle tube 161 along the longitudinal direction of the first nozzle tube 161.
  • the cover 11 has a large coverage area and a good covering effect.
  • the distance between the cover 11 and the first nozzle 161 can be adjusted, and the size of the cover 11 can also be adjusted, and can be set according to specific conditions, for example, when the liquid used has a lower volatilization temperature.
  • the distance between the side wall of the cover 11 and the first nozzle 161 can be appropriately shortened to prevent the highly volatile liquid from moving up too much, or by increasing the size of the cover 11 The coverage area of the cover 11 is increased.
  • the first nozzle 161 is provided with a first spray slit 162 along the length of the first nozzle 161.
  • the liquid is ejected from the first spray slit 162, so that the liquid after the ejecting is easy to be atomized, and the covering area is large, thereby having a better heat transfer effect, thereby ensuring the temperature stability of the entire system.
  • the first spray slit 162 is opened on the side of the first nozzle 161.
  • the first squirt 162 faces the bottom 142 of the chamber 141.
  • the number of the first nozzles 161 is two, and the two first nozzles 161 are disposed in parallel.
  • the provision of two nozzles ensures that the amount of liquid ejected by the sprinkler system 16 is sufficient, thus ensuring the temperature control effect of the system, and at the same time, the two nozzles are arranged in parallel such that the liquid ejected by the sprinkler system 16 The direction is relatively uniform, which avoids local temperature unevenness of the system.
  • the two first nozzles 161 are respectively housed in the two covers 11.
  • the two covers 11 can be arranged in parallel.
  • the distance h1 between the first nozzle 161 and the bottom surface 143 of the chamber 141 ranges from 3 cm to 10 cm.
  • the distance between the nozzle and the bottom surface 143 of the chamber 141 is moderate, which not only ensures the spraying effect of the shower system 16, but also avoids waste of liquid.
  • the distance h1 between the first nozzle 161 and the bottom surface 143 of the chamber 141 is 5 cm.
  • the distance between the nozzle and the bottom surface 143 of the chamber 141 is moderate, and the spray system 16 has a better spray effect, which not only ensures the stability of the entire system temperature, but also effectively avoids waste of liquid.
  • the sprinkler system 16 includes a first valve member 163 and a first connecting conduit 164.
  • the first connecting line 164 is connected to the first nozzle 161 and the storage portion 12.
  • the first valve member 163 is disposed on the first connecting line 164 and is used to open or close the first connecting line 164.
  • the spraying of the first nozzle 161 of the sprinkler system 16 can be controlled by the first valve member 163, which improves the operability of the sprinkler system 16.
  • the first valve member 163 is a pneumatic valve. As such, the first valve member 163 is easy to handle.
  • the sprinkler system 16 includes a drive 165.
  • the driving device 165 is used to drive the liquid from the storage portion 12 into the first nozzle 161 for spraying.
  • power can be provided by the drive unit 165 to maintain continuous spraying of the spray system 16 to ensure the sustainability of the heat retention process of the liquid temperature control system 10.
  • the drive device 165 is a drive pump. As such, the driving force of the driving device 165 is large.
  • the liquid temperature control system 10 includes a drain tube 13.
  • the discharge pipe 13 communicates with the chamber 141 and is located at the top of the chamber 141.
  • the exhaust liquid in the chamber 141 can be discharged through the discharge pipe 13, and the discharge pipe 13 is disposed at the top of the chamber 141, so that it is far from the position of the first nozzle 161, and can be effectively prevented from being ejected by the shower system 16.
  • the atomized liquid is excessively discharged from the discharge pipe 13 to cause waste.
  • the sprinkler system 16 includes a second spout 166.
  • a second nozzle 166 is disposed at the top of the chamber 141.
  • the second nozzle 166 is connected to the storage portion 12.
  • the second nozzle 166 can both increase the use of the sprinkler system 16 and increase the flexibility of the sprinkler system 16.
  • the object to be peeled off may be contained in the chamber 141, for example, a substrate to which the photoresist is to be peeled off.
  • the peeling liquid can be ejected through the second nozzle 166 to perform a peeling treatment on the object to be peeled off, for example, to perform photoresist peeling.
  • the stripping liquid is ejected from the second nozzle 166 located at the top of the chamber 141, so that the covering area is large, and the stripping liquid can be sufficiently covered by the stripping agent to be covered.
  • the second nozzle 166 is provided with a plurality of nozzles 1661 along the longitudinal direction of the second nozzle 166, and the liquid is sprayed from the plurality of nozzles 1661.
  • the plurality of nozzles 1661 are disposed such that the spray of the second nozzle 166 is relatively uniform and the coverage area is large.
  • the plurality of nozzles 1611 are disposed in parallel, and the distance h2 between each of the nozzles 1661 and the bottom surface 143 of the chamber 141 is 80 cm.
  • the coverage area of the liquid sprayed by the second nozzle 166 Larger.
  • the number of second nozzles 166 is two, and the two second nozzles 166 are disposed in parallel.
  • the two second nozzles 166 ensure that the amount of liquid sprayed is large and has a large coverage area.
  • the sprinkler system 16 includes a second valve member 167 and a second connecting conduit 168.
  • the second connecting line 168 is connected to the second nozzle 166 and the storage portion 12.
  • the second valve member 167 is disposed on the second connecting line 168 and is used to open or close the second connecting line 168.
  • the spraying of the second nozzle 166 of the sprinkler system 16 can be controlled by the second valve member 167, thus improving the overall operability of the sprinkler system 16.
  • the second valve member 167 is a pneumatic valve. As such, the second valve member 167 is easy to handle.
  • the liquid temperature control system 10 includes a control device 15 for controlling the opening and closing of the first valve member 163 and the second valve member 167.
  • the control device 15 controls the first valve member 163 to automatically open, and controls the second valve member 167 to be in the closed state, and then the driving device 165 starts driving.
  • the liquid enters the first nozzle 161 from the reservoir 12 for spraying to maintain the temperature of the liquid temperature control system 10 stable.
  • the film peeling apparatus 100 of the embodiment of the present invention includes the liquid temperature control system 10 of any of the above embodiments.
  • the first nozzle 161 is disposed at the bottom 142 of the chamber 141, the position from the storage portion 12 is relatively close, which facilitates the recovery of the liquid, and at the same time, the liquid is sprayed to the cavity.
  • the bottom 142 of the chamber 141 it is easy to directly recover to the storage portion 12, thereby reducing the volatilization of the liquid, thereby reducing the waste caused by the volatilization of the liquid, thereby achieving the purpose of energy saving.
  • the storage portion 12 can be a medicine tank
  • the stored liquid is a stripping liquid
  • the driving device 165 can simultaneously drive the liquid to enter the first nozzle 161 or the second nozzle 166 from the storage portion 12. Spray.
  • the control device 15 controls the first valve member 163 to automatically close and control the second valve.
  • the member 167 is opened, and then the driving device 165 starts to drive the stripping liquid from the storage portion 12 into the second nozzle 161 for spraying, and sprays the stripping liquid onto the substrate to dissolve and remove the photoresist.
  • the liquid temperature control system 10 starts to operate, the control device 15 controls the first valve member 163 to automatically open, and controls the second valve member 167 to be in a closed state, and then the driving device 165 starts.
  • the driving stripping liquid enters the first nozzle 161 from the storage portion 12 to perform spraying to maintain the temperature stability of the liquid temperature control system 10.
  • the first feature "on” or “under” the second feature may include direct contact of the first and second features, and may also include first and second features, unless otherwise specifically defined and defined. Not directly in contact but through it Additional feature contact between them.
  • the first feature “above”, “above” and “above” the second feature includes the first feature directly above and above the second feature, or merely indicating that the first feature level is higher than the second feature.
  • the first feature “below”, “below” and “below” the second feature includes the first feature directly below and below the second feature, or merely the first feature level being less than the second feature.

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  • General Physics & Mathematics (AREA)
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  • Spray Control Apparatus (AREA)

Abstract

一种液体控温系统(10)及膜层剥离设备(100)，液体控温系统(10)用于膜层剥离设备(100)，其包括储存部(12)、腔体(14)及喷淋系统(16)，储存部(12)用于盛放液体，腔体(14)形成有腔室(141)，腔室(141)的底部(142)连接储存部(12)，喷淋系统(16)包括第一喷管(161)，第一喷管(161)设置在腔室(141)的底部(142)，喷淋系统(16)连接储存部(12)并用于将液体经第一喷管(161)喷淋至腔室(141)的底部(142)，腔室(141)的底部(142)用于接收第一喷管(161)喷出的液体并将液体回流至储存部(12)。由于第一喷管(161)设置在腔室(141)的底部(142)，离储存部(12)的位置较近，利于液体的回收，同时，在这样使得液体喷淋至腔室(141)的底部(142)后，易于直接回收至储存部(12)，从而可减少液体的挥发，即可降低由于液体的挥发而造成的浪费，从而达到了节能的目的。膜层剥离设备(100)包括上述的液体控温系统(10)。

Description

液体控温系统及膜层剥离设备 技术领域
本发明涉及半导体制造加工技术领域，尤其是涉及一种液体控温系统及膜层剥离设备。
背景技术
在相关技术中，在不生产的情况下，可通过喷淋一定温度的液体来保证光阻剥离设备的腔体及与其连接的管路系统的温度，但喷淋的液体由于易于挥发而容易造成较大的浪费，因此，如何提供一种节能的液体喷淋的控温方案成为待解决的问题。
发明内容
本发明旨在至少解决现有技术中存在的技术问题之一。为此，本发明需要提供一种液体控温系统及膜层剥离设备。
本发明实施方式的液体控温系统，用于膜层剥离设备，其包括储存部、腔体及喷淋系统，所述储存部用于盛放液体，所述腔体形成有腔室，所述腔室的底部连接所述储存部，所述喷淋系统包括第一喷管，所述第一喷管设置在所述腔室的底部，所述喷淋系统连接所述储存部并用于将所述液体经所述第一喷管喷淋至所述腔室的底部，所述腔室的底部用于接收所述第一喷管喷出的所述液体并将所述液体回流至所述储存部。
在本发明实施方式的液体控温系统中，由于第一喷管设置在腔室的底部，离储存部的位置较近，利于液体的回收，同时，在液体喷淋至腔室的底部后，易于直接回收至储存部，从而可减少液体的挥发，即可降低由于液体的挥发而造成的浪费，从而达到了节能的目的。
在一个实施方式中，所述液体控温系统包括盖体，所述盖体设置在所述腔室内并收容所述第一喷管。
在一个实施方式中，所述第一喷管沿所述第一喷管的长度方向开设有第一喷缝。
在一个实施方式中，所述第一喷缝朝向所述腔室的底部。
在一个实施方式中，所述第一喷管的数量为两个，所述两个第一喷管平行间隔设置。
在一个实施方式中，所述第一喷管与所述腔室的底面之间的距离的范围为3cm～10cm。
在一个实施方式中，所述第一喷管与所述腔室的底面之间的距离为5cm。
在一个实施方式中，所述喷淋系统包括第一阀件及第一连接管路，所述第一连接管路连接所述第一喷管及所述储存部，所述第一阀件设置在所述第一连接管路上，并用于打开或关闭所述第一连接管路。
在一个实施方式中，所述喷淋系统包括驱动装置，所述驱动装置用于驱动所述液体由所述储存部进入所述第一喷管以进行喷淋。
在一个实施方式中，所述液体控温系统包括排放管，所述排放管连通所述腔室并位于所述腔室的顶部。
在一个实施方式中，所述喷淋系统包括第二喷管，所述第二喷管设置在所述腔室的顶部，所述第二喷管连接所述储存部。
在一个实施方式中，所述喷淋系统包括第二阀件及第二连接管路，所述第二连接管路连接所述第二喷管及所述储存部，所述第二阀件设置在所述第二连接管路上，并用以打开或关闭所述第二连接管路。
本发明实施方式的膜层剥离设备包括上述任一实施方式所述的液体控温系统。
在本发明实施方式的膜层剥离设备中，由于第一喷管设置在腔室的底部，离储存部的位置较近，利于液体的回收，同时，在液体喷淋至腔室的底部后，易于直接回收至储存部，从而可减少液体的挥发，即可降低由于液体的挥发而造成的浪费，从而达到了节能的目的。
本发明实施方式的附加方面和优点将在下面的描述中部分给出，部分将从下面的描述中变得明显，或通过本发明的实践了解到。
附图说明
本发明的上述和/或附加的方面和优点从结合下面附图对实施方式的描述中将变得明显和容易理解，其中：
图1是本发明实施方式的液体控温系统的结构示意图。
图2是本发明实施方式的液体控温系统的部分模块示意图。
具体实施方式
下面详细描述本发明的实施方式，所述实施方式的示例在附图中示出，其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施方式是示例性的，仅用于解释本发明，而不能理解为对本发明的限制。
在本发明的描述中，需要理解的是，术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、“顺时针”、“逆时针”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个所述特征。在本发明的描述中，“多个”的含义是两个或两个以上，除非另有明确具体的限定。
在本发明的描述中，需要说明的是，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接。可以是机械连接，也可以是电连接。可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本发明中的具体含义。
请一并参阅图1～图2，本发明实施方式的液体控温系统10用于膜层剥离设备。液体控温系统10包括储存部12、腔体14及喷淋系统16。储存部12用于盛放液体。腔体14形成有腔室141。腔室141的底部142连接储存部12。喷淋系统16包括第一喷管161。第一喷管161设置在腔室141的底部142。喷淋系统16连接储存部12并用于将液体经第一喷管161喷淋至腔室141的底部142。腔室141的底部142用于接收第一喷管161喷出的液体并将液体回流至储存部12。
在本发明实施方式的液体控温系统10中，由于第一喷管161设置在腔室141的底部142，离储存部12的位置较近，利于液体的回收，同时，在液体喷淋至腔室141的底部142后，易于直接回收至储存部12，从而可减少液体的挥发，即可降低由于液体的挥发而造成的浪费，从而达到了节能的目的。
在本发明实施方式中，储存部12呈长方体状，内部形成有储存腔室(图未示出)，液体盛放在储存腔室内。
在本发明示例中，储存部12可为药槽，液体为易挥发液体，例如为剥离液，这样可直接通过第一喷管161喷出剥离液，以维持系统的温度。
在其他示例中，储存部12内盛放的液体可为其他有机易挥发液体，例如含醇类的有机溶液等。因此，并不仅限于本发明示例中的剥离液。
在本发明实施方式中，当液体控温系统10进行工作时，具有一定温度的液体由储存部12进入喷淋系统16，然后经由第一喷管161喷淋至腔室141的底部142，这样液 体以雾状的形式喷洒出来，以维持液体控温系统10温度的稳定。然后，喷出的雾状液体冷凝下来并聚集在腔室141的底部142，再回流至储存部12内，如此循环，从而完成液体控温系统10的热保持过程。同时第一喷管161在整个喷淋过程中的喷淋压力较小。
在本发明示例中，液体的工作温度范围可在50度～70度。
在一个实施方式中，液体控温系统10包括盖体11。盖体11设置在腔室141内并收容第一喷管161。
如此，当液体由第一喷管161喷淋出，并成雾状时，由于第一喷管161收容在盖体11中，这样一方面可使得雾化的液体较为快速地回流至腔室141的底部142，另一方面可避免雾化的液体过多地往上走而造成浪费，从而节约了成本。
在本发明实施方式中，盖体11呈长方体状，盖体11沿第一喷管161的长度方向收容第一喷管161。如此，盖体11的覆盖面积较大，覆盖效果较好。
需要说明的是，盖体11与第一喷管161之间的距离可调节，并且盖体11的尺寸大小也可调节，具体可根据具体情况进行设置，例如当使用的液体的挥发温度较低时，可适当缩短盖体11的侧壁与第一喷管161之间的距离，以防止挥发性较大的液体过多地往上走，或者也可通过增大盖体11的尺寸，以增大盖体11的覆盖面积。
在一个实施方式中，第一喷管161沿第一喷管161的长度方向开设有第一喷缝162。
如此，液体为从第一喷缝162喷出，这样喷出后的液体易于雾化，且覆盖面积较大，从而具有较好的热传递效果，从而保证了整个系统的温度的稳定性。
具体地，在本发明实施方式中，第一喷缝162开设在第一喷管161的侧面。
在一个实施方式中，第一喷缝162朝向腔室141的底部142。
如此，在保证液体热传递效果的同时，可避免液体过多地远离腔室141的底部142而导致液体的浪费。
在一个实施方式中，第一喷管161的数量为两个，两个第一喷管161平行间隔设置。
如此，设置两个喷管可保证喷淋系统16喷出的液体的量较为充足，这样保证了系统的控温效果，同时，两个喷管平行间隔设置使得由喷淋系统16喷出的液体方向较为均匀，这样可避免系统的局部温度不均匀。
具体地，在本发明实施方式中，两个第一喷管161分别收容在两个盖体11内。两个盖体11可平行间隔设置。
在一个实施方式中，第一喷管161与腔室141的底面143之间的距离h1的范围为3cm～10cm。
如此，喷管与腔室141的底面143之间的距离适中，既可以保证喷淋系统16的喷淋效果，由可避免液体的浪费。
在一个实施方式中，第一喷管161与腔室141的底面143之间的距离h1为5cm。
如此，喷管与腔室141的底面143之间的距离适中，并且喷淋系统16的喷淋效果较好，既可保证整个系统温度的稳定性，又有效避免了液体的浪费。
在一个实施方式中，喷淋系统16包括第一阀件163及第一连接管路164。第一连接管路164连接第一喷管161及储存部12。第一阀件163设置在第一连接管路164上，并用于打开或关闭第一连接管路164。
如此，可通过第一阀件163控制喷淋系统16的第一喷管161的喷淋，这样提高了喷淋系统16的可操作性。
在一个实施方式中，第一阀件163为气动阀门。如此，第一阀件163易于操作。
在一个实施方式中，喷淋系统16包括驱动装置165。驱动装置165用于驱动液体由储存部12进入第一喷管161以进行喷淋。
如此，可通过驱动装置165提供动力以保持喷淋系统16的持续喷淋，从而保证液体控温系统10的热保持过程的可持续性。
在一个实施方式中，驱动装置165为驱动泵。如此，驱动装置165的驱动力较大。
在一个实施方式中，液体控温系统10包括排放管13。排放管13连通腔室141并位于腔室141的顶部。
如此，腔室141内的废气液可经由排放管13排出，并且排放管13设置在腔室141的顶部，这样离第一喷管161的位置较远，可有效避免由喷淋系统16喷出的雾化液体过多地由排放管13排出而导致浪费。
在一个实施方式中，喷淋系统16包括第二喷管166。第二喷管166设置在腔室141的顶部。第二喷管166连接储存部12。
如此，第二喷管166既可以增加喷淋系统16的使用功能，又提高了喷淋系统16的灵活性。
例如，当使用的液体为剥离液时，可在腔室141内盛放被剥离物，例如需剥离光阻的基板。此时，剥离液可经由第二喷管166喷出，以对被剥离物进行剥离处理，例如进行光阻剥离。剥离液由位于腔室141的顶部的第二喷管166喷出，这样覆盖面积较大，可保证剥离液对被剥离物覆盖进行充分的剥离处理。
在一个实施方式中，第二喷管166沿第二喷管166的长度方向设置有多个喷嘴1661，液体由多个喷嘴1661喷淋出来。
如此，多个喷嘴1661的设置使得第二喷管166的喷淋较为均匀，且覆盖面积较大。
具体地，在本发明实施方式中，多个喷嘴1611平行设置，每个喷嘴1661与腔室141的底面143之间的距离h2为80cm。这样，由第二喷管166喷淋下来的液体的覆盖面积 较大。
在一个实施方式中，第二喷管166的数量为两个，两个第二喷管166平行间隔设置。
如此，两个第二喷管166保证了喷淋出的液体的量较大且具有较大的覆盖面积。
在一个实施方式中，喷淋系统16包括第二阀件167及第二连接管路168。第二连接管路168连接第二喷管166及储存部12。第二阀件167设置在第二连接管路168上，并用以打开或关闭第二连接管路168。
如此，可通过第二阀件167控制喷淋系统16的第二喷管166的喷淋，这样整体提高了喷淋系统16的可操作性。
在一个实施方式中，第二阀件167为气动阀门。如此，第二阀件167易于操作。
在一个实施方式中，液体控温系统10包括控制装置15，控制装置15用于控制第一阀件163及第二阀件167的打开及关闭。
具体地，在本发明实施方式中，当液体控温系统10进入工作状态时，控制装置15控制第一阀件163自动打开，并控制第二阀件167处于关闭状态，然后驱动装置165开始驱动液体由储存部12进入第一喷管161以进行喷淋，以维持液体控温系统10温度的稳定。
本发明实施方式的膜层剥离设备100包括上述任一实施方式的液体控温系统10。
在本发明实施方式的膜层剥离设备100中，由于第一喷管161设置在腔室141的底部142，离储存部12的位置较近，利于液体的回收，同时，在液体喷淋至腔室141的底部142后，易于直接回收至储存部12，从而可减少液体的挥发，即可降低由于液体的挥发而造成的浪费，从而达到了节能的目的。
具体地，在本发明实施方式中，储存部12可为药槽，储存的液体为剥离液，驱动装置165可同时用于驱动液体由储存部12进入第一喷管161或第二喷管166进行喷淋。当膜层剥离设备100处于工作状态时，首先将需剥离光阻的基板(图未示出)放入腔室141内，然后控制装置15控制第一阀件163自动关闭，并控制第二阀件167打开，然后驱动装置165开始驱动剥离液由储存部12进入第二喷管161以进行喷淋，并将剥离液喷淋至基板上，以溶解去除光阻。
当膜层剥离设备100处于未工作状态时，此时液体控温系统10开始工作，控制装置15控制第一阀件163自动打开，并控制第二阀件167处于关闭状态，然后驱动装置165开始驱动剥离液由储存部12进入第一喷管161以进行喷淋，以维持液体控温系统10温度的稳定。
在本发明中，除非另有明确的规定和限定，第一特征在第二特征之“上”或之“下”可以包括第一和第二特征直接接触，也可以包括第一和第二特征不是直接接触而是通过它 们之间的另外的特征接触。而且，第一特征在第二特征“之上”、“上方”和“上面”包括第一特征在第二特征正上方和斜上方，或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”包括第一特征在第二特征正下方和斜下方，或仅仅表示第一特征水平高度小于第二特征。
下文的公开提供了许多不同的实施方式或例子用来实现本发明的不同结构。为了简化本发明的公开，下文中对特定例子的部件和设置进行描述。当然，它们仅仅为示例，并且目的不在于限制本发明。此外，本发明可以在不同例子中重复参考数字和/或参考字母，这种重复是为了简化和清楚的目的，其本身不指示所讨论各种实施方式和/或设置之间的关系。此外，本发明提供了的各种特定的工艺和材料的例子，但是本领域普通技术人员可以意识到其他工艺的应用和/或其他材料的使用。
在本说明书的描述中，参考术语“一个实施方式”、“一些实施方式”、“示意性实施方式”、“示例”、“具体示例”、或“一些示例”等的描述意指结合实施方式或示例描述的具体特征、结构、材料或者特点包含于本发明的至少一个实施方式或示例中。在本说明书中，对上述术语的示意性表述不一定指的是相同的实施方式或示例。而且，描述的具体特征、结构、材料或者特点可以在任何的一个或多个实施方式或示例中以合适的方式结合。
尽管已经示出和描述了本发明的实施方式，本领域的普通技术人员可以理解：在不脱离本发明的原理和宗旨的情况下可以对这些实施方式进行多种变化、修改、替换和变型，本发明的范围由权利要求及其等同物限定。

Claims (13)

  1. 一种液体控温系统，用于膜层剥离设备，其特征在于，包括：
    储存部，用于盛放液体；
    腔体，所述腔体形成有腔室，所述腔室的底部连接所述储存部；
    喷淋系统，所述喷淋系统包括第一喷管，所述第一喷管设置在所述腔室的底部，所述喷淋系统连接所述储存部并用于将所述液体经所述第一喷管喷淋至所述腔室的底部，所述腔室的底部用于接收所述第一喷管喷出的所述液体并将所述液体回流至所述储存部。
  2. 如权利要求1所述的液体控温系统，其特征在于，所述液体控温系统包括盖体，所述盖体设置在所述腔室内并收容所述第一喷管。
  3. 如权利要求1所述的液体控温系统，其特征在于，所述第一喷管沿所述第一喷管的长度方向开设有第一喷缝。
  4. 如权利要求3所述的液体控温系统，其特征在于，所述第一喷缝朝向所述腔室的底部。
  5. 如权利要求1所述的液体控温系统，其特征在于，所述第一喷管的数量为两个，所述两个第一喷管平行间隔设置。
  6. 如权利要求1所述的液体控温系统，其特征在于，所述第一喷管与所述腔室的底面之间的距离的范围为3cm～10cm。
  7. 如权利要求1所述的液体控温系统，其特征在于，所述第一喷管与所述腔室的底面之间的距离为5cm。
  8. 如权利要求1所述的液体控温系统，其特征在于，所述喷淋系统包括第一阀件及第一连接管路，所述第一连接管路连接所述第一喷管及所述储存部，所述第一阀件设置在所述第一连接管路上，并用于打开或关闭所述第一连接管路。
  9. 如权利要求1所述的液体控温系统，其特征在于，所述喷淋系统包括驱动装置， 所述驱动装置用于驱动所述液体由所述储存部进入所述第一喷管以进行喷淋。
  10. 如权利要求1所述的液体控温系统，其特征在于，所述液体控温系统包括排放管，所述排放管连通所述腔室并位于所述腔室的顶部。
  11. 如权利要求1所述的液体控温系统，其特征在于，所述喷淋系统包括第二喷管，所述第二喷管设置在所述腔室的顶部，所述第二喷管连接所述储存部。
  12. 如权利要求11所述的液体控温系统，其特征在于，所述喷淋系统包括第二阀件及第二连接管路，所述第二连接管路连接所述第二喷管及所述储存部，所述第二阀件设置在所述第二连接管路上，并用以打开或关闭所述第二连接管路。
  13. 一种膜层剥离设备，其特征在于，包括如权利要求1～12任一项所述的液体控温系统。
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