WO2018023968A1 - 光开关和光交换系统 - Google Patents

光开关和光交换系统 Download PDF

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Publication number
WO2018023968A1
WO2018023968A1 PCT/CN2017/075308 CN2017075308W WO2018023968A1 WO 2018023968 A1 WO2018023968 A1 WO 2018023968A1 CN 2017075308 W CN2017075308 W CN 2017075308W WO 2018023968 A1 WO2018023968 A1 WO 2018023968A1
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Prior art keywords
waveguide
movable
optical switch
optical
optically
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PCT/CN2017/075308
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English (en)
French (fr)
Inventor
涂鑫
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华为技术有限公司
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Priority to EP17836153.1A priority Critical patent/EP3486700B1/en
Publication of WO2018023968A1 publication Critical patent/WO2018023968A1/zh
Priority to US16/262,585 priority patent/US10705295B2/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3536—Optical coupling means having switching means involving evanescent coupling variation, e.g. by a moving element such as a membrane which changes the effective refractive index
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12145—Switch

Definitions

  • the present application relates to the field of optical communications and, more particularly, to an optical switch and optical switching system.
  • the optical switch is a key component for implementing an all-optical switching system. It can implement all-optical layer routing, wavelength selection, optical cross-connection, and self-healing protection.
  • the current optical switches mainly include traditional mechanical structure optical switches, MicroElectrical-Mechanical System (MEMS) optical switches, liquid crystal optical switches, waveguide optical switches, and semiconductor optical amplifier optical switches.
  • MEMS MicroElectrical-Mechanical System
  • MEMS optical switches are usually based on electrostatically actuated micro-mirror structures with low insertion loss, low crosstalk, high extinction ratio, good scalability, and simple control.
  • the scale can reach more than 1000 ports, but due to micro-mirrors.
  • the rotation speed is slow, and the switching speed of such optical switches is usually only on the order of milliseconds, which cannot meet the requirements of the future microsecond switching speed.
  • Silicon-based waveguide optical switches are easy to implement large-scale optical switch matrices because of their compatibility with mature Complementary Metal Oxide Semiconductor (CMOS) processes and low cost and high integration.
  • CMOS Complementary Metal Oxide Semiconductor
  • the thermal light effect of the silicon material can make the switching speed of the optical switch reach the order of microseconds, but the thermo-optic effect of the silicon material is weak, resulting in a small change in refractive index, so it needs to be embedded in the Mach-Zehnder interferometers.
  • MZI MZI
  • Large-scale optical switch matrices are cascaded by optical switches, while MZI-structured optical switches have significant losses in both open and closed states, and the losses increase rapidly as the size of the optical switch matrix increases. The problem of large insertion loss in the silicon-based waveguide type optical switch limits its application.
  • the application provides an optical switch and an optical switching system, which have fast switching speed and low loss.
  • the present application provides an optical switch disposed on a substrate, the optical switch including a first waveguide, a second waveguide, and a first movable waveguide, the first waveguide being opposite to the
  • the substrate is immovable, the first waveguide has a first input port IP1 and a first output port OP1; the second waveguide is immovable relative to the substrate, and the second waveguide has a second output port OP2,
  • the first waveguide and the second waveguide are located in a first plane, and the first waveguide and the second waveguide do not intersect; the first movable waveguide may be opposite to the substrate Moving; wherein, when the first movable waveguide is in the first position, (1) the first movable waveguide is optically decoupled from the first waveguide, and the first movable waveguide and the first Two waveguide optical decoupling, (2) IP1 and OP1 are optically conductive and IP1 and OP2 are optically blocked; when the first movable waveguide is in the second position, (1) the first movable
  • the optical switch may be referred to as a "Through" state when the first movable waveguide is in the first position, and the optical switch may be referred to as a "Drop" state when the first movable waveguide is in the second position.
  • the first movable waveguide of the optical switch of the first aspect of the present application may be a MEMS optical waveguide.
  • the first plane in the optical switch of the first aspect of the present application may be a plane parallel to the substrate.
  • the optical switch of the first aspect of the present application includes two non-intersecting waveguides fixed on the substrate and one first movable waveguide movable relative to the substrate so that no loss is introduced due to the crossover, and the optical switch In both states, it is not necessary to pass both the coupler and the curved waveguide, but only through the coupler or only through the curved waveguide, further reducing losses.
  • the first movable waveguide is not located in the first plane, and the first movable waveguide may move vertically or may be vertical with respect to the first plane Deformation occurs in the direction of the first plane.
  • the first movable waveguide moves vertically or in a direction perpendicular to the first plane, so that the switching speed of the optical switch is faster.
  • the first movable waveguide is located in the first plane, and the first movable waveguide may be perpendicular to the first A plane of rotation of the shaft rotates center.
  • the first movable waveguide is located in the same plane as the two fixed waveguides, or is located in the same layer, and the manufacturing process is greatly reduced in difficulty.
  • the first movable waveguide includes a first input portion and a first output portion, when the first movable waveguide is in the second position, the first The first input portion of the movable waveguide and the first waveguide form a first coupler, and the first output portion and the second waveguide of the first movable waveguide form a second coupler.
  • IP1 and OP1 are optically blocked; and, due to the second coupler, IP1 and OP2 are optically conductive.
  • the first coupler may be configured to change a curvature of the first waveguide in the first coupler by less than 10° along a transmission direction of the optical signal, where the first coupler is in the first coupler
  • the curvature of the first input portion of a movable waveguide varies by less than 10°.
  • the first input portion of the first movable waveguide and the first waveguide are coupled as far as possible on the straight waveguide, thereby reducing the loss of the optical signal at the coupler.
  • the optical switch is a 1 ⁇ 2 optical switch
  • the first movable waveguide further includes a connecting portion, configured to connect the first input portion and the first An output portion
  • the optical switch further comprising a supporting member for connecting with the connecting portion such that an intermediate portion of the first movable waveguide is fixed with respect to the substrate, the first movable waveguide Both ends of the beam can move vertically relative to the first plane.
  • the support member makes the first movable waveguide stronger and easier to control by the actuator.
  • the optical switch is a 2 ⁇ 2 optical switch
  • the second waveguide further has a second input port IP2
  • the optical switch further includes a second movable waveguide.
  • the first movable waveguide and the second movable waveguide are crossed, and when the second movable waveguide is in the third position, (1) the second movable waveguide and the first waveguide optical Decoupling, and the second movable waveguide is optically decoupled from the second waveguide, (2) IP2 and OP2 is optically conductive and IP2 is optically blocked from OP1; when the second movable waveguide is in the fourth position, (1) the second movable waveguide is optically coupled to the first waveguide, and the second The movable waveguide is optically coupled to the second waveguide, (2) IP2 and OP2 are optically blocked and IP2 and OP1 are optically conducted through the second movable waveguide.
  • the second movable waveguide may include a second input portion and a second output portion, the second input of the second movable waveguide when the second movable waveguide is in the fourth position And the second waveguide forms a third coupler, and the second output portion of the second movable waveguide and the first waveguide form a fourth coupler.
  • IP2 and OP2 are optically blocked; and, due to the fourth coupler, IP2 is optically conductive with OP1.
  • the first movable waveguide includes a first input portion and a first output portion
  • the second movable waveguide includes a second input portion
  • the optical switch further includes a cross type connecting portion for connecting the first input portion, the first output portion, the second input portion, and the second output portion
  • the optical switch further includes a supporting member for connecting with the connecting portion such that an intermediate portion of the first movable waveguide and an intermediate portion of the second movable waveguide are fixed with respect to the substrate, Both ends of the first movable waveguide and both ends of the second movable waveguide may move vertically with respect to the first plane.
  • the support member makes the first movable waveguide and the second movable waveguide stronger and easier to control by the actuator.
  • the support member is a member made of a silicon film into a mesh shape.
  • the mesh structure makes the support member rigid, light in weight and easy to process.
  • the first waveguide and the second waveguide are both curved waveguides, and the curved waveguide is an arc-shaped optical waveguide or a curvature-graded optical waveguide.
  • the arc-shaped optical waveguide or the curvature-graded optical waveguide can reduce the loss of the optical signal when it is transmitted in the optical waveguide.
  • the first movable waveguide in the optical switch of the first aspect of the present application may be a direct optical waveguide.
  • the optical switch further includes at least one actuator, a position of the first movable waveguide is controlled by the at least one actuator, the at least one actuation And the first movable waveguide is connected by a cantilever beam.
  • the cantilever beam can be a spring.
  • the first input portion and the first output portion are tapered optical waveguides.
  • the tapered optical waveguide forms an adiabatic grading coupler, and the adiabatic grading coupler can realize a wide spectral range transmission, make the optical signal more stable, and can increase the process tolerance of the coupler and improve the light. The performance of the switch.
  • the first input portion and the first output portion are ridge optical waveguides.
  • the ridge-shaped optical waveguide can reduce the transmission loss of the optical signal on the one hand, and enhance the mechanical performance of the structure on the other hand, thereby improving the performance of the optical switch.
  • the optical switch further includes an optical power monitor, where the optical power monitor is configured to monitor the first waveguide, the second waveguide, and the IP1, the OP1, and the OP2. At least one of the optical powers.
  • the optical switch in the presently possible implementation can estimate the position of the first movable waveguide according to the power of the optical signal by monitoring the power of the optical signal in each component, thereby more precisely controlling the position of the first movable waveguide.
  • the present application provides an optical switching system, wherein the optical switching system is an M ⁇ N optical switch matrix, including M ⁇ N optical switches of the first aspect, where the optical switch is The second waveguide also has a second input port IP2, each of the optical switches is denoted as SC ij , wherein i takes values 1, 2, ..., M, j takes values 1, 2, ..., N, said M ⁇ N optical switches are set to: (1) IP1 i, j and OP2 i, j-1 optically conductive, (2) IP2 i, j and OP1 i-1, j optically conductive, i takes values 2 to M , j takes the value 2 to N.
  • the at least one path between the IP1 i,1 and the OP1 M,j includes only one optical switch in which the first movable waveguide is in the first position, and the value of i is 1 to M, j takes values from 1 to N.
  • the optical switch is an optical switch that further includes a second movable waveguide in the first aspect , and at least one path exists between IP2 1,j and OP2 i,N An optical switch including the second movable waveguide in a third position.
  • the second aspect of the optical switching system can achieve microsecond switching speed, with low insertion loss, large port count and low cost.
  • optically coupling the waveguide X and the waveguide Y means that the waveguide X and the waveguide Y are close to each other, so that the light fields in the two waveguides interact to realize the transfer of light energy between the two waveguides.
  • the optically decoupled waveguide X and the waveguide Y mean that the waveguide X and the waveguide Y are distant from each other such that the light fields in the two waveguides do not interact, so that no transmission of light energy occurs between the two waveguides.
  • optically conducting input port A and output port B refers to a path in which an optical signal is established between input port A and output port B.
  • input port A and output port B are optically turned on, a small amount of light may be output in the form of crosstalk from other output ports other than output port B, or there may be a small amount of crosstalk. The light will be transmitted from the input port other than input port A to output port B.
  • the crosstalk should be as small as possible.
  • optical blocking of input port A and output port B refers to a path in which there is no optical signal between the output of input port A and output port B.
  • input port A and output port B are optically blocked, there may be a small amount of crosstalk in the form of light transmitted from input port A to output port B, and such crosstalk should be as small as possible.
  • 1 and 2 are schematic views of a conventional optical switch in an off state and an on state, respectively.
  • FIG. 3 is a schematic diagram of optical path switching of an optical switch matrix of a CrossBar architecture.
  • FIG. 4 is a schematic block diagram of a structure of an optical switch according to an embodiment of the present application.
  • FIG. 5 is a schematic block diagram of the optical switch in an off state according to an embodiment of the present invention
  • FIG. 6 is a schematic block diagram of the optical switch in an open state according to an embodiment of the present application.
  • FIG. 7 is a schematic block diagram showing the structure of an optical switch according to another embodiment of the present application.
  • FIG. 8 is a schematic block diagram showing the structure of an optical switch according to another embodiment of the present application.
  • FIG. 9 is a schematic block diagram showing the structure of an optical switch according to another embodiment of the present application.
  • FIG. 10 is a schematic block diagram showing the structure of an optical switch according to another embodiment of the present application.
  • FIG. 11 is a schematic block diagram showing the structure of an optical switch according to another embodiment of the present application.
  • Figure 12 is a schematic block diagram showing the structure of a coupler of one embodiment of the present application.
  • Figure 13 is a schematic block diagram showing the structure of a coupler of another embodiment of the present application.
  • FIG. 14 is a schematic block diagram of an optical switch in an off state according to another embodiment of the present application.
  • FIG. 15 is a schematic block diagram showing an optical switch in an open state according to another embodiment of the present application.
  • FIG. 16 is a schematic block diagram of an optical switch in an off state according to another embodiment of the present application.
  • FIG. 17 is a schematic block diagram showing an optical switch in an open state according to another embodiment of the present application.
  • Figure 18 is a schematic block diagram showing the structure of an optical switching system according to an embodiment of the present application.
  • FIG. 19 is a schematic block diagram showing the structure of an optical switch according to another embodiment of the present application.
  • FIG. 1 and 2 are schematic diagrams showing two states of a to-off state and a drop state of an optical switch 100 in the optical switch matrix, respectively.
  • the optical switch 100 in the optical switch matrix is based on a silicon-based optical waveguide, including two upper and lower optical waveguides, and the lower optical waveguide includes two fixed optical waveguides (Through Waveguide 120 and Drop Waveguide 130) that are fixed on the substrate 110.
  • the upper optical waveguide includes a transit optical waveguide 140 that is vertically movable with respect to the substrate 110, and the optical waveguide 140 is electrostatically actuated.
  • the optical switch 100 when the optical switch 100 is in the Through state, no voltage is applied to the actuator, and the vertical spacing between the rotating optical waveguide 140 and the two fixed optical waveguides is large, no optical coupling occurs, and the input light is along the Through.
  • the waveguide 120 transmits and intersects perpendicularly with the Drop waveguide 130, and the output light is output from the Through Waveguide 120.
  • the loss is on the order of 0.01 dB.
  • the actuator applies a voltage, and the rotating optical waveguide 140 moves vertically downward, and the vertical distance from the two fixed optical waveguides becomes smaller, and both of them are optical.
  • the input light is first coupled from the Through Waveguide to the Transitional Optical Waveguide 140 through a first adiabatic coupler, and coupled from the Transitional Optical Waveguide 140 to the Dropguide 130 through a second adiabatic coupler, and the output light is output from the Dropguide 130.
  • the optical switch 100 When the optical switch 100 is in the "Drop" state, the loss is on the order of 1 dB. Due to the use of silicon light technology, the device size is significantly reduced compared to conventional MEMS micromirrors, and the switching speed is on the order of 1 microsecond.
  • FIG. 3 is a schematic diagram of optical path switching of the MEMS optical switch matrix of the CrossBar architecture.
  • the optical switch matrix is composed of M ⁇ N optical switches, forming a matrix of M rows and N columns, and M ⁇ N optical switches are respectively located at intersections of each row and each column, and N optical switches of each row.
  • the first output port OP1 of one of the optical switches is connected to the first input port IP1 of the adjacent optical switch, and the first input port IP1 of the N optical switches of each row is not connected to the first output port OP1 of the other optical switch.
  • the first input port IP1 of the connected optical switch is an input port of the optical switch matrix, and the optical switch of the first output port OP1 of the N optical switches of each row is not connected to the first input port IP1 of the other optical switch.
  • the first output port OP1 is a through port of the optical switch matrix, and the second output port OP2 of one of the M optical switches of each column is connected to the second input port IP2 of the adjacent optical switch.
  • the second output port OP2 of the optical switch in which the second output port OP2 of each of the M optical switches of each column is not connected to the second input port IP2 of the other optical switch is a Drop port of the optical switch matrix.
  • the two intersecting optical waveguides located in the lower layer of the optical switch shown in Figures 1 and 2 introduce losses at the intersection.
  • the optical switch needs to go through multiple times at the two adiabatic couplers in the "Drop" state. The mode is transformed and needs to go through a curved waveguide, resulting in a large loss.
  • the embodiment of the present application provides a microsecond-level, low insertion loss optical switch 300.
  • the optical switch 300 is disposed on a substrate 310.
  • the optical switch 300 includes a first waveguide 320, a second waveguide 330, and a first movable waveguide 340.
  • the first waveguide 320 is opposite to the The substrate 310 is immovable, the first waveguide 320 has a first input port IP1 and a first output port OP1; the second waveguide 330 is immovable relative to the substrate 310, and the second waveguide 330 has a Two output ports OP2, the first waveguide 320 and the second waveguide 330 are located in a first plane, and the first waveguide 320 and the second waveguide 330 do not intersect; the first movable waveguide 340 is opposite The substrate 310 can be moved.
  • the first movable waveguide 340 when the first movable waveguide 340 is in the first position, (1) the first movable waveguide 340 is optically decoupled from the first waveguide 320, and the first movable waveguide 340 is The second waveguide 330 is optically decoupled, (2) IP1 and OP1 are optically turned on and IP1 and OP2 are optically blocked; when the first movable waveguide 340 is in the second position, (1) the first movable The waveguide 340 is optically coupled to the first waveguide 320, and the first movable waveguide 340 is optically coupled to the second waveguide 330, (2) IP1 and OP1 are optically blocked and IP1 and OP2 pass the first The moving waveguide 340 is optically turned on.
  • the first movable waveguide of the embodiment of the present application may be a MEMS optical waveguide.
  • the optical switch when the first movable waveguide 340 is in the first position, the optical switch is in a Through state, and when the first movable waveguide 340 is in the second position, the optical switch is in a Drop state.
  • the first plane in the embodiment of the present application may be a plane parallel to the substrate 310.
  • the optical switch of the embodiment of the present application includes two non-intersecting waveguides fixed on the substrate and one first movable waveguide movable relative to the substrate, so that no loss is introduced due to the crossover, and the optical switch is in two In this state, it is not necessary to pass both the coupler and the curved waveguide, but only through the coupler or only through the curved waveguide, and further reduce the loss.
  • optically coupling the waveguide X and the waveguide Y means that the waveguide X and the waveguide Y are close to each other, so that the light fields in the two waveguides interact to realize the transfer of light energy between the two waveguides.
  • the optically decoupled waveguide X and the waveguide Y mean that the waveguide X and the waveguide Y are distant from each other such that the light fields in the two waveguides do not interact, so that no transmission of light energy occurs between the two waveguides.
  • optically conducting input port A and output port B refers to a path in which an optical signal is established between input port A and output port B.
  • input port A and output port B are optically turned on, a small amount of light may be output in the form of crosstalk from other output ports other than output port B, or there may be a small amount of crosstalk. The light will be transmitted from the input port other than input port A to output port B.
  • the crosstalk should be as small as possible.
  • optical blocking of input port A and output port B refers to a path in which there is no optical signal between the output of input port A and output port B.
  • input port A and output port B are optically blocked, there may be a small amount of crosstalk in the form of light transmitted from input port A to output port B, and such crosstalk should be as small as possible.
  • the first movable waveguide 340 is optically decoupled from the first waveguide 320, and the first movable waveguide 340 is optically decoupled from the second waveguide 330, which may be when the first movable waveguide 340 is in the first position.
  • the results achieved at the same time are not achieved in two steps.
  • the first movable waveguide 340 is optically coupled to the first waveguide 320 and is first
  • the optical coupling between the movable waveguide 340 and the second waveguide 330 can also be the same, and will not be described again.
  • the size, shape of the substrate 310, the first waveguide 320, the second waveguide 330, and the first movable waveguide 340 shown in FIG. 4, and the positions and directions of the IP1, OP1, and OP2 are all schematic.
  • the embodiments of the present application are not limited.
  • the embodiment of Figures 5 through 19 of the present application is omitted for simplicity, and the substrate 310 is omitted.
  • the first waveguide 320 and the second waveguide 330 are fixed waveguides, or non-movable waveguides; the first movable waveguide 340 and the second movable waveguide 360, which will be mentioned later, are movable waveguides.
  • the first movable waveguide 340 may not be located in the first plane, and the first movable waveguide 340 may be vertically moved relative to the first plane or may be vertical Deformation occurs in the direction of the first plane.
  • the first movable waveguide moves vertically or deforms in a direction perpendicular to the first plane, so that the switching speed of the optical switch is faster.
  • the first movable waveguide 340 of the optical switch such as that shown in FIG. 4 is not located in the first plane in which the first waveguide 320 and the second waveguide 330 are located, but is located in a second plane parallel to the first plane.
  • 4 is a top plan view of the optical switch.
  • 5 and 6 are perspective views of the optical switch, in which the first waveguide 320 and the second waveguide 330 of the optical switch shown in the figure are both curved waveguides, and the first movable waveguide 340 is a straight waveguide. It should be understood that the shapes of the first waveguide 320, the second waveguide 330, and the first movable waveguide 340 are not limited thereto.
  • FIG. 5 is a schematic illustration of the optical switch in a Through state.
  • the optical switch is in the first state, that is, the first movable waveguide 340 is in the first position.
  • the distance between the first movable waveguide 340 and the first waveguide 320 and the second waveguide 330 is d1
  • the first The moving waveguide 340 is optically decoupled from the first waveguide 320 and the second waveguide 330.
  • IP1 and OP1 are optically conductive and IP1 and OP2 are optically blocked.
  • the input light is input from the first input port IP1 of the first waveguide 320, transmitted in the first waveguide 320, and the output light is output from the first output port OP1 of the first waveguide 320.
  • Figure 6 is a schematic illustration of the optical switch in a "Drop” state.
  • the optical switch is in a "Drop” state, that is, the first movable waveguide 340 is in the second position.
  • the distance between the first movable waveguide 340 and the first waveguide 320 and the second waveguide 330 is d2, where d1 is greater than D2, the first movable waveguide 340 is optically coupled to the first waveguide 320 and the second waveguide 330.
  • IP1 and OP1 are optically blocked and IP1 and OP2 are optically conducted through the first movable waveguide 340.
  • the input light is input from the first input port IP1 of the first waveguide 320.
  • the optical signal is coupled into the first movable waveguide 340 for transmission, and again due to the first movable
  • the waveguide 340 is optically coupled to the second waveguide 330, the optical signal is coupled to the second waveguide 330 for transmission, and finally the output light is output from the second output port OP2 of the second waveguide 330.
  • the first movable waveguide 340 in the embodiment of the present application may include a first input portion 341 and a first output portion 342.
  • the first input portion 341 and the first waveguide 320 of the first movable waveguide 340 form a first coupler
  • the waveguide 330 forms a second coupler. Due to the first coupler, IP1 and OP1 are optically blocked; and, due to the second coupler, IP1 and OP2 are optically conductive.
  • the input light is input from the first input port IP1 of the first waveguide 320, and the optical signal is coupled by the first coupler to the first input portion 341 of the first movable waveguide 340 for transmission from the first movable device at the second coupler
  • the first output 342 of the waveguide 340 is coupled into the second waveguide 330 for transmission, and finally the output light is output from the second output port OP2 of the second waveguide 330.
  • the first coupler may be configured to: within a transmission direction of the optical signal, a change in curvature of the first waveguide in the first coupler is less than a first threshold, in the first coupler The change in the curvature of the first input portion of the first movable waveguide is less than a second threshold. That is, the first input portion 341 of the first movable waveguide 340 and the first waveguide 320 are coupled as much as possible on the straight waveguide, whereby the loss of the optical signal at the coupler can be reduced.
  • First threshold and The second threshold may be equal or unequal.
  • the value may be 5°, 10°, 15° or 20°.
  • the specific value may be determined according to the system requirements, the waveguide performance, the mode of the optical signal, the power, etc. This is not limited.
  • the second coupler can be similarly designed, which is not limited by the embodiment of the present application.
  • the optical switch may further include at least one actuator, and the position of the first movable waveguide is controlled by the at least one actuator, the at least one The actuator and the first movable waveguide are connected by a cantilever beam.
  • the cantilever beam may be a spring, or may be a member of other elastic materials, or may be a connecting member that does not have elasticity. This embodiment of the present application is not limited thereto.
  • the actuator may be energized by an electric field, a magnetic field, a light field or a thermal field, etc., and the actuator drives the first movable waveguide to move under the above excitation.
  • the actuators may be parallel plate electrostatic actuators or comb electrostatic actuators (as shown in FIG. 9), and may be other types of actuators, which are not limited in this embodiment of the present application. The position and number of actuator settings are not limited.
  • the optical switch shown in FIG. 7 when the actuator is not applied with a voltage, there is no electrostatic attraction between the upper and lower electrodes in the actuator, and the vertical spacing between the upper movable waveguide and the lower fixed waveguide is large (for example, D1), the optical switch is in an off state, and the optical signal of the lower fixed waveguide is not coupled to the first movable waveguide of the upper layer, and is directly output from the port of the lower fixed waveguide.
  • the actuator is applied with a voltage, an electrostatic attraction force is generated between the upper and lower electrodes in the actuator, and displacement occurs.
  • the actuator drives the first movable waveguide of the upper layer to move to a position where the vertical distance from the fixed waveguide of the lower layer is small (for example, d2), the optical switch is in an open state, and the optical signal of the lower fixed waveguide is coupled to the first layer of the upper layer.
  • the movable waveguide transmits and then couples from the upper movable waveguide to the port output of the lower fixed waveguide.
  • the actuator pushes the entire first movable waveguide 340 to move vertically with respect to the first plane.
  • the position and the number of actuators are set as shown in FIG. 7, and actuators are respectively provided at both ends of the first movable waveguide 340.
  • the actuator may also be disposed at other locations, such as in the middle of the first movable waveguide 340, to urge the entire first movable waveguide 340 to move vertically relative to the first plane.
  • the first movable waveguide 340 may further include a connecting portion 343 for connecting the first input portion 341 and the first output portion 342, and the optical switch 300 further includes a support. a member 350 for connecting with the connecting portion 343 such that an intermediate portion of the first movable waveguide 340 is fixed with respect to the substrate 310, and both ends of the first movable waveguide 340 may be opposite to The first plane moves vertically.
  • the actuator pushes both ends of the first movable waveguide 340 to move vertically with respect to the first plane, while the intermediate portion of the first movable waveguide 340 remains stationary, so that the first movable waveguide 340 is perpendicular to the The deformation occurs in the direction of the first plane.
  • the support member makes the first movable waveguide stronger and easier to control by the actuator.
  • the support member 350 may be a member made of a silicon film as a mesh as shown in FIG.
  • the mesh structure makes the support member 350 rigid, lightweight, and easy to process.
  • the position and the number of the support members 350 can be flexibly set according to requirements.
  • a support member as shown in FIG. 8 can be disposed at an intermediate position of the first movable waveguide 340, or can be set at a corresponding position as shown in FIG.
  • the two supporting members, the specific form of the supporting member in the embodiment of the present application is not limited.
  • optical switch of 1 ⁇ 2 (1 input port 2 output port) of the embodiment of the present application has been described in detail above.
  • the optical switch of 2 ⁇ 2 (2 input port 2 output ports) of the embodiment of the present application is mainly described below. .
  • the second waveguide 330 further has a second input port IP2
  • the optical switch further includes a second movable waveguide 360, the first movable waveguide 340 and the second The moving waveguide 360 is crossed when the second movable waveguide 360 is In the third position, (1) the second movable waveguide 360 is optically decoupled from the first waveguide 320, and the second movable waveguide 360 is optically decoupled from the second waveguide 330, (2) IP2 and OP2 are optically conductive and IP2 and OP1 are optically blocked; when the second movable waveguide 360 is in the fourth position, (1) the second movable waveguide 360 is optically coupled to the first waveguide 320 And the second movable waveguide 360 is optically coupled to the second waveguide 330, (2) IP2 and OP2 are optically blocked, and IP2 and OP1 are optically conducted through the second movable waveguide 360
  • the second movable waveguide 360 may include a second input portion 361 and a second output portion 362, and the optical signal transmits and optical signals in a path from the first input portion 341 to the first output portion 342.
  • the transmission in the path from the second input portion 361 to the second output portion 362 is crossed, and when the second movable waveguide 360 is in the third position, IP2 and OP2 are optically conductive and IP2 and OP1 are optical Blocking; when the second movable waveguide 360 is in the fourth position, the second input portion 361 and the second waveguide 330 of the second movable waveguide 360 form a third coupler, the first The second output portion 361 of the second movable waveguide 360 and the first waveguide 320 form a fourth coupler. Due to the third coupler, IP2 and OP2 are optically blocked; and, due to the fourth coupler, IP2 is optically conductive with OP1.
  • the first movable waveguide 340 and the second movable waveguide 360 of the 2 ⁇ 2 optical switch may be vertically intersected or may not be vertical, which is not limited in this embodiment of the present application.
  • the distance between the first movable waveguide 340 and the first waveguide 320 and the second waveguide 330 when the optical switch is in the off state that is, the first movable waveguide 340 is in the first position and the second movable waveguide 360 is in the third position.
  • the first movable waveguide 340 is optically decoupled from the first waveguide 320 and the second waveguide 330; likewise, the second movable waveguide 360 is optically decoupled from the first waveguide 320 and the second waveguide 330.
  • IP1 and OP1 are optically conductive and IP1 and OP2 are optically blocked, IP2 and OP2 are optically conductive and IP2 and OP1 are optically blocked.
  • the input light 1 is input from the first input port IP1 of the first waveguide 320, transmitted in the first waveguide 320, and the output light 1 is output from the first output port OP2 of the first waveguide 320.
  • the input light 2 is input from the second input port IP2 of the second waveguide 330, transmitted in the second waveguide 330, and the output light 2 is output from the second output port OP2 of the second waveguide 330.
  • the distance between the first movable waveguide 340 and the first waveguide 320 and the second waveguide 330 when the optical switch is in the "Drop" state that is, the first movable waveguide 340 is in the second position and the second movable waveguide 360 is in the fourth position. More recently, the first movable waveguide 340 is optically coupled to the first waveguide 320 and the second waveguide 330; likewise, the second movable waveguide 360 is optically coupled to the first waveguide 320 and the second waveguide 330.
  • IP1 and OP1 are optically blocked and IP1 and OP2 are optically conducted through the first movable waveguide 340, IP2 and OP2 are optically blocked, and IP2 and OP1 are optically conducted through the second movable waveguide 360.
  • the input light 1 is input from the first input port IP1 of the first waveguide 320. Since the first movable waveguide 340 is optically coupled to the first waveguide 320, the optical signal 1 is coupled to the first movable waveguide 340 for transmission, and again due to the first The movable waveguide 340 is optically coupled to the second waveguide 330, the optical signal 1 is coupled to the second waveguide 330 for transmission, and finally the output light 1 is output from the second output port OP2 of the second waveguide 330.
  • input light 2 is input from a second input port IP2 of the second waveguide 330, and output light 2 is output from a first output port OP1 of the first waveguide 320.
  • IP2 and OP2 are optically blocked due to the third coupler, and IP2 and OP1 are optically turned on due to the fourth coupler, and are not described herein again.
  • the optical switch in the 2 ⁇ 2 optical switch shown in FIG. 10 and FIG. 11 may further include a cross-type connecting portion 370 for connecting the first input portion 341, the first output portion 342, and the The second input portion 361, the second output portion 362, the optical switch further includes a support member 350 for connecting with the connecting portion 370 such that the intermediate portion of the first movable waveguide 340 and the The intermediate portion of the second movable waveguide 360 is fixed with respect to the substrate 310, and both ends of the first movable waveguide 340 and both ends of the second movable waveguide 360 may be opposite to the first A plane moves vertically.
  • the actuator pushes both ends of the first movable waveguide 340 and both ends of the second movable waveguide 360 to move vertically with respect to the first plane, and the middle portion of the first movable waveguide 340 and The intermediate portion of the second movable waveguide 360 remains stationary such that the first movable waveguide 340 and the second movable waveguide 360 are deformed in a direction perpendicular to the first plane.
  • the 2 ⁇ 2 optical switch may not include the supporting component, which is not limited in this embodiment of the present application.
  • the coupler in the embodiment of the present application may be a directional coupler or an adiabatic grading coupler.
  • a directional coupler the widths of the first movable waveguide and the fixed waveguide at the coupling portion are generally equal.
  • an adiabatic grading coupler typically the height or width of the upper waveguide, or the spacing between the upper waveguide and the lower waveguide, may be gradual along the direction of transmission of the optical signal.
  • the upper waveguide gradually changes from the width w1 height h1 to the width w2 height h2 along the transmission direction of the optical signal, where w1 ⁇ w2, h1 > h2.
  • the upper waveguide is a tapered waveguide, and may correspond to the first input portion 341, the first output portion 342, the second input portion 361, and the second output portion 362.
  • the lower layer waveguide is a strip-shaped waveguide corresponding to the corresponding portions of the first waveguide 320 and the second waveguide 330.
  • the shape of the upper waveguide and the lower waveguide can be further improved.
  • the improved upper and lower waveguides may be ridged optical waveguides as shown in FIG.
  • the ridge-shaped optical waveguide can reduce the transmission loss of the optical signal on the one hand, and enhance the mechanical properties of the structure on the other hand, thereby improving the performance of the optical switch.
  • the first movable waveguide 340 is located in the first plane, and the first movable waveguide 340 may be perpendicular to the first plane.
  • the rotation axis of the first plane rotates center.
  • the first movable waveguide and the two fixed waveguides are located in the same plane, or are located in the same layer, and the manufacturing process is greatly reduced.
  • FIG. 14 is a "Through" state of the optical switch
  • FIG. 15 is a Dp state of the optical switch.
  • the first movable waveguide 340 may be in a first plane optically decoupled from the first waveguide 320 and the second waveguide 330 under the control of the actuator, in a first plane Rotating to a second position optically coupled to the first waveguide 320 and the second waveguide 330.
  • the intermediate portion of the first movable waveguide 340 may have a supporting member for fixing the first movable waveguide 340 to ensure the reliability of the optical switch, and the supporting member should be a rotating shaft, so that the first movable waveguide 340 can rotate The axis rotates for the central axis.
  • FIG. 16 and FIG. 17 are schematic diagrams showing the closed state and the open state of the 2 ⁇ 2 optical switch in which the first movable waveguide 340 and the second movable waveguide 360 are moved, respectively.
  • the first movable waveguide 340 and the second movable waveguide 360 rely on a voltage difference between the two fixed waveguides as a driving force for rotation.
  • the first waveguide 320 and the second waveguide 330 are respectively grounded, and the first movable waveguide 340 and the second movable waveguide 360 are applied with a voltage V, and the first movable waveguide 340 and the second movable unit are separated due to the voltage difference.
  • the waveguide 360 rotates with the support member 350 as a rotation axis, and both ends of the first movable waveguide 340 and the two ends of the second movable waveguide 360 are respectively close to the corresponding portions of the first waveguide 320 and the second waveguide 330 to form a coupler, thereby Switch the optical switch to the on state.
  • the transmission path of the optical signal is similar to that described in the foregoing, and will be further described herein.
  • the first waveguide 320 and the second waveguide 330 may be curved waveguides, and the curved waveguides are arc-shaped optical waveguides or curvature-graded optical waveguides, thereby reducing optical signals in the optical waveguides. Loss during transmission.
  • the first waveguide 320 and the second waveguide may also be optical waveguides of other shapes, which are not limited in this embodiment of the present application.
  • the first movable waveguide 340 may be a straight waveguide or a nearly linear waveguide, which is not limited in this embodiment of the present application.
  • the optical switch may further include an optical power monitor for monitoring at least one of the first waveguide, the second waveguide, IP1, OP1, and OP2.
  • Optical power can estimate the position of the first movable waveguide 340 according to the power of the optical signal by monitoring the power of the optical signal in each component, thereby more precisely controlling the position of the first movable waveguide 340.
  • the present application further provides an optical switching system, which is an M ⁇ N optical switch matrix, including M ⁇ N optical switches, and each optical switch may be FIG. 4 to
  • the optical switches shown in FIG. 9 or FIG. 14 and FIG. 15 (the second waveguides 230 of these optical switches also have the second input port IP2) may also be 2 ⁇ as shown in FIG. 10, FIG. 11 and FIG. 16 and FIG. 2 optical switch.
  • Each of the optical switches is denoted as SC ij , wherein i takes values 1, 2, ..., M, j takes values 1, 2, ..., N, and the M ⁇ N optical switches are set as: (1) IP1 i, j and OP2 i, j-1 optically conductive, (2) IP2 i, j and OP1 i-1, j optically conductive, i takes values 2 to M, j takes values 2 to N.
  • At least one path between IP1 i,1 and OP1 M,j includes only one optical switch in which the first movable waveguide is in the first position.
  • the optical switch in the matrix is a 2 ⁇ 2 optical switch as shown in FIGS. 10, 11 and 16 and 17
  • the first movable waveguide is in the optical position of the first position
  • at least one path between IP1 i,1 and OP1 M,j includes only one first waveguide
  • connection relationship of the optical switches of the M ⁇ N optical switch matrix can be as shown in FIG. 18.
  • there is at least one path between IP2 2,1 and OP1 M,N eg, SC 21 to SC 22 to SC 2N to SC 3N to SC MN ) including only one first movable waveguide in a first position
  • the switch SC 2N or the optical path, includes only one first waveguide (the first waveguide of the SC 2N ).
  • optical switch SC 11 including only one second movable waveguide in a third position, or It is said that only one second waveguide (the second waveguide of SC 11 ) is included in the optical path.
  • the optical switching system of the embodiment of the present application can achieve a microsecond switching speed, and has the advantages of low insertion loss, large port number, and low cost.
  • optical switch based on the embodiment of the present application can be connected to form an optical switching system having other deformed connection relationships.
  • the direction of the input port and the output port of the optical switching system in FIG. 18 can be changed by making a corresponding change in the connection relationship of the optical switch, and details are not described herein.
  • the first waveguide and the second waveguide of the optical switch shown in the foregoing are all curved waveguides, and the first waveguide and the second waveguide may also be optical waveguides of other shapes, for example, the straight waveguide shown in FIG. As shown in FIG. 19, the first waveguide 320 and the second waveguide 330 are two straight waveguides that do not intersect each other.
  • the first movable waveguide 340 may be a waveguide having a curved portion and a straight portion as shown in FIG.
  • the first movable waveguide 340 may not be located in the first plane, and the first movable waveguide 340 may move vertically with respect to the first plane or may deform in a direction perpendicular to the first plane, thereby respectively
  • the first waveguide 320 and the second waveguide 330 are optically decoupled or optically coupled to control the off state and the on state of the optical switch.
  • FIG. 1 A specific example of the actuator, the spring connecting the actuator and the movable waveguide, and the first coupler and the second coupler formed when the movable waveguide and the fixed waveguide are optically coupled are shown in FIG. It should be understood that all the above components are Examples are not limiting.
  • first waveguide 320 and the second waveguide 330 are two straight waveguides that do not intersect each other.
  • the first movable waveguide 340 may be located in the first plane, and the first movable waveguide 340 may be translated in the first plane.
  • the specific principle of the optical switch is similar to the foregoing description, and details are not described herein again. .
  • the 1 x 2 optical switch shown in Fig. 19 can obtain a 2 x 2 optical switch based on a similar expansion method mentioned in the foregoing.
  • the size of the sequence numbers of the foregoing processes does not mean the order of execution sequence, and the order of execution of each process should be determined by its function and internal logic, and should not be applied to the embodiment of the present application.
  • the implementation process constitutes any limitation.
  • the disclosed systems, devices, and methods may be implemented in other manners.
  • the device embodiments described above are merely illustrative.
  • the division of the unit is only a logical function division.
  • there may be another division manner for example, multiple units or components may be combined or Can be integrated into another system, or some features can be ignored or not executed.
  • the mutual coupling or direct coupling or communication connection shown or discussed may be an indirect coupling or communication connection through some interface, device or unit, and may be in an electrical, mechanical or other form.
  • the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, may be located in one place, or may be distributed to multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of the embodiment.
  • each functional unit in each embodiment of the present application may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.
  • the functions may be stored in a computer readable storage medium if implemented in the form of a software functional unit and sold or used as a standalone product.
  • the technical solution of the present application which is essential or contributes to the prior art, or a part of the technical solution, may be embodied in the form of a software product, which is stored in a storage medium, including
  • the instructions are used to cause a computer device (which may be a personal computer, server, or network device, etc.) to perform all or part of the steps of the methods described in various embodiments of the present application.
  • the foregoing storage medium includes: a USB flash drive, a mobile hard disk, and a read-only memory (Read-Only Memory, ROM, random access memory (RAM), disk or optical disk, and other media that can store program code.

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Abstract

一种光开关和光交换系统。该光开关包括第一波导(320)、第二波导(330)和第一可动波导(340)，第一波导(320)和第二波导(330)相对于衬底(310)不可移动。第一波导(320)与第二波导(330)位于第一平面内，且第一波导(320)与第二波导(330)不相交。第一可动波导(340)相对于衬底(310)可以移动。当第一可动波导(340)处于第一位置时，第一可动波导(340)与第一波导(320)和第二波导(330)光学解耦，光开关处于关状态。当第一可动波导(340)处于第二位置时，第一可动波导(340)与第一波导(320)和第二波导(330)光学耦合，光开关处于开状态。该光开关不会因为交叉引入损耗。

Description

光开关和光交换系统
本申请要求于2016年8月1日提交中国专利局、申请号为201610620912.8、发明名称为“光开关和光交换系统”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及光通信领域，并且更具体地，涉及一种光开关和光交换系统。
背景技术
随着密集波分复用(Dense Wavelength Division Multiplexing，DWDM)技术的发展,光纤通信链路中信息传输的速度和容量日益增长，对光通信网络(例如城域网、数据中心等)中信息交换速度和容量的需求也随之增长。全光交换系统成为光通信网络的发展趋势。光开关是实现全光交换系统的关键器件，它可以实现全光层的路由选择、波长选择、光交叉连接、自愈保护等功能。目前的光开关主要包括传统的机械结构光开关、微电子机械系统(MicroElectrical-Mechanical System，MEMS)光开关、液晶光开关、波导型光开关和半导体光放大器光开关等。
传统的MEMS光开关通常基于静电致动的微反射镜结构，具有插入损耗低、串扰小、消光比高、可扩展性好和控制简单等优点，规模可达1000端口以上，但由于微反射镜旋转速度慢，这类光开关的切换速度通常只能达到毫秒量级，无法满足未来微秒级开关速度的需求。硅基波导型光开关由于其工艺与成熟的互补金属氧化物半导体(Complementary Metal Oxide Semiconductor，CMOS)工艺兼容，具有成本低、集成度高等优点，易于实现大规模光开关矩阵。利用硅材料的热光效应可以使光开关切换速度达到微秒量级，但硅材料的热光效应较弱，导致折射率变化较小，因此需要嵌入到马赫增德尔干涉仪(Mach-Zehnder interferometers，MZI)结构中才能实现1×2或者2×2的光开关。大规模的光开关矩阵由光开关级联而成，而MZI结构的光开关在开和关两个状态都有较显著的损耗，且损耗会随着光开关矩阵的规模增大而迅速增长。硅基波导型光开关存在的插入损耗大的问题，限制了其应用。
因此，实现微秒级切换速度、低插入损耗、大端口数和低成本的光开关矩阵是未来发展全光交换技术的重要部分。
发明内容
本申请提供一种光开关和光交换系统，该光开关和光交换系统的切换速度快并且损耗低。
第一方面，本申请提供了一种光开关，所述光开关设置于衬底上，所述光开关包括第一波导、第二波导和第一可动波导，所述第一波导相对于所述衬底不可移动，所述第一波导具有第一输入端口IP1和第一输出端口OP1；所述第二波导相对于所述衬底不可移动，所述第二波导具有第二输出端口OP2，所述第一波导与所述第二波导位于第一平面内，且所述第一波导与所述第二波导不相交；所述第一可动波导相对于所述衬底可以 移动；其中，当所述第一可动波导处于第一位置时，(1)所述第一可动波导与所述第一波导光学解耦，并且所述第一可动波导与所述第二波导光学解耦，(2)IP1与OP1光学导通并且IP1与OP2光学阻断；当所述第一可动波导处于第二位置时，(1)所述第一可动波导与所述第一波导光学耦合，并且所述第一可动波导与所述第二波导光学耦合，(2)IP1与OP1光学阻断并且IP1与OP2通过所述第一可动波导光学导通。
其中，第一可动波导处于第一位置时光开关可以称为关(Through)状态，第一可动波导处于第二位置时光开关可以称为开(Drop)状态。
可选地，本申请第一方面的光开关的第一可动波导可以是MEMS光波导。
可选地，本申请第一方面的光开关中所述第一平面可以是与所述衬底平行的平面。
本申请的第一方面的光开关包括2个固定在衬底上的不存在交叉的波导和1个相对于衬底可移动的第一可动波导，从而不会因为交叉引入损耗，并且光开关在两种状态下均不需既经过耦合器又经过弯曲波导，而是仅经过耦合器或者仅经过弯曲波导，又进一步减小了损耗。
在第一方面的一种可能的实现方式中，所述第一可动波导不位于所述第一平面内，所述第一可动波导相对于所述第一平面可以垂直移动或可以在垂直于所述第一平面的方向上发生形变。在本可能的实现方式中，第一可动波导垂直移动或在垂直于第一平面的方向上发生形变速度快，使得光开关的切换速度较快。
在第一方面的另一种可能的实现方式中，所述第一可动波导位于所述第一平面内，所述第一可动波导可以在所述第一平面内以垂直于所述第一平面的转动轴为中心转动。本可能的实现方式中，第一可动波导与2个固定的波导位于同一平面内，或者说位于同一层，制作工艺难度大大降低。
在第一方面的另一种可能的实现方式中，所述第一可动波导包括第一输入部和第一输出部，当所述第一可动波导处于第二位置时，所述第一可动波导的所述第一输入部和所述第一波导形成第一耦合器，所述第一可动波导的所述第一输出部和所述第二波导形成第二耦合器。
由于所述第一耦合器，IP1与OP1光学阻断；并且，由于所述第二耦合器，IP1与OP2光学导通。
其中，所述第一耦合器可以设置为：沿着光信号的传输方向，所述第一耦合器内所述第一波导的弯曲度变化小于10°，所述第一耦合器内所述第一可动波导的所述第一输入部的弯曲度变化小于10°。本可能的实现方式中，第一可动波导的第一输入部和第一波导尽量在直波导上进行耦合，由此可以减小耦合器处光信号的损耗。
在第一方面的另一种可能的实现方式中，所述光开关为1×2光开关，所述第一可动波导还包括连接部，用于连接所述第一输入部和所述第一输出部，所述光开关还包括支撑部件，用于与所述连接部连接以使得所述第一可动波导的中间部分相对于所述衬底是固定的，所述第一可动波导的两端可以相对于所述第一平面垂直移动。本可能的实现方式中，支撑部件使得第一可动波导更坚固，更易于由致动器控制。
在第一方面的另一种可能的实现方式中，所述光开关为2×2光开关，所述第二波导还具有第二输入端口IP2，所述光开关还包括第二可动波导，所述第一可动波导和所述第二可动波导是交叉的，当所述第二可动波导处于第三位置时，(1)所述第二可动波导与所述第一波导光学解耦，并且所述第二可动波导与所述第二波导光学解耦，(2)IP2与 OP2光学导通并且IP2与OP1光学阻断；当所述第二可动波导处于第四位置时，(1)所述第二可动波导与所述第一波导光学耦合，并且所述第二可动波导与所述第二波导光学耦合，(2)IP2与OP2光学阻断并且IP2与OP1通过所述第二可动波导光学导通。
具体而言，所述第二可动波导可以包括第二输入部和第二输出部，当所述第二可动波导处于第四位置时，所述第二可动波导的所述第二输入部和所述第二波导形成第三耦合器，所述第二可动波导的所述第二输出部和所述第一波导形成第四耦合器。
由于所述第三耦合器，IP2与OP2光学阻断；并且，由于所述第四耦合器，IP2与OP1光学导通。
在第一方面的一种可能的实现方式中，2×2光开关中，所述第一可动波导包括第一输入部和第一输出部，所述第二可动波导包括第二输入部和第二输出部，所述光开关还包括交叉型的连接部，用于连接所述第一输入部、所述第一输出部、所述第二输入部和所述第二输出部，所述光开关还包括支撑部件，用于与所述连接部连接以使得所述第一可动波导的中间部分和所述第二可动波导的中间部分相对于所述衬底是固定的，所述第一可动波导的两端和所述第二可动波导的两端可以相对于所述第一平面垂直移动。本可能的实现方式中，支撑部件使得第一可动波导和第二可动波导更坚固，更易于由致动器控制。
在第一方面的一种可能的实现方式中，所述支撑部件是由硅薄膜制作成网状的部件。本可能的实现方式中，网状结构使得支撑部件刚度好，质量轻，容易加工。
在第一方面的一种可能的实现方式中，所述第一波导和所述第二波导均为弯曲波导，所述弯曲波导为圆弧型的光波导或曲率渐变型的光波导。本可能的实现方式中，圆弧型的光波导或曲率渐变型的光波导可以降低光信号在光波导中传输时的损耗。
在第一方面的一种可能的实现方式中，本申请第一方面的光开关中第一可动波导可以是直光波导。
在第一方面的一种可能的实现方式中，所述光开关还包括至少一个致动器，所述第一可动波导的位置由所述至少一个致动器控制，所述至少一个致动器与所述第一可动波导之间通过悬臂梁连接。该悬臂梁可以是弹簧。
在第一方面的一种可能的实现方式中，所述第一输入部和所述第一输出部为锥形光波导。本可能的实现方式中，锥形光波导形成绝热渐变耦合器，绝热渐变耦合器可以实现较宽的光谱范围的传输，使光信号更稳定，还可以增大耦合器的工艺容差，提高光开关的性能。
在第一方面的一种可能的实现方式中，所述第一输入部和所述第一输出部为脊形光波导。本可能的实现方式中，脊形的光波导一方面可以降低光信号的传输损耗，另一方面可以增强结构的机械性能，从而提高光开关的性能。
在第一方面的一种可能的实现方式中，所述光开关还包括光功率监控器，所述光功率监控器用于监控所述第一波导、所述第二波导、IP1、OP1和OP2中的至少一种的光功率。本可能的实现方式中的光开关通过监控各元件中光信号的功率，可以根据光信号的功率估计第一可动波导的位置，从而更精确的控制第一可动波导的位置。
第二方面，本申请提供了一种光交换系统，其特征在于，所述光交换系统为M×N光开关矩阵，包括M×N个第一方面的光开关，所述光开关的所述第二波导还具有第二输入端口IP2，每个所述光开关记为SCij，其中，i取值1,2,…,M，j取值1,2,…,N，所述 M×N个光开关被设置为：(1)IP1i,j与OP2i,j-1光学导通，(2)IP2i,j与OP1i-1,j光学导通，i取值2至M，j取值2至N。
在第二方面的一种可能的实现方式中，在IP1i,1和OP1M,j之间存在至少一条路径仅包括一个所述第一可动波导处于第一位置的光开关，i取值1至M，j取值1至N。
在第二方面的一种可能的实现方式中，所述光开关为第一方面中还包括第二可动波导的光开关，在IP21,j和OP2i,N之间存在至少一条路径仅包括一个所述第二可动波导处于第三位置的光开关。
第二方面的光交换系统可以实现微秒级切换速度，具有低插入损耗、大端口数和低成本等优势。
应理解，波导X和波导Y光学耦合(optically coupled)是指波导X与波导Y相互靠近，使两个波导中的光场发生相互作用，从而在两个波导之间实现光能量的传递。波导X和波导Y光学解耦(optically decoupled)是指波导X与波导Y相互远离，使两个波导中的光场不发生相互作用，从而使两个波导之间不发生光能量的传递。当然不可避免地，波导X和波导Y光学解耦时，两个波导中的光场还可能存在微弱的相互作用，以致可能会有少量的光能量以串扰的形式在两个波导之间传递，这样的串扰应该越小越好。
还应理解，输入端口A与输出端口B光学导通是指在输入端口A和输出端口B之间建立了光信号的通路。当然不可避免地，当输入端口A与输出端口B光学导通时，可能会有少量的光以串扰的形式会从输出端口B以外的其他输出端口输出，或者，可能会有少量的串扰的形式的光会从输入端口A以外的其他输入端口传输到输出端口B，这样的串扰应该越小越好。
还应理解，输入端口A与输出端口B光学阻断是指输入端口A和输出端口B输出之间不存在光信号的通路。当然不可避免地，当输入端口A与输出端口B光学阻断时，可能会有少量串扰的形式的光从输入端口A传输到输出端口B，同样这样的串扰应该越小越好。
附图说明
图1和图2分别为现有的光开关在关状态和开状态时的示意图。
图3为CrossBar架构的光开关矩阵的光路切换的示意图。
图4为本申请一个实施例的光开关的结构的俯视的示意性框图。
图5为本申请一个实施例的光开关处于关状态的立体的示意性框图；图6为本申请一个实施例的光开关处于开状态的立体的示意性框图。
图7为本申请另一个实施例的光开关的结构的示意性框图。
图8为本申请另一个实施例的光开关的结构的示意性框图。
图9为本申请另一个实施例的光开关的结构的示意性框图。
图10为本申请另一个实施例的光开关的结构的示意性框图。
图11为本申请另一个实施例的光开关的结构的示意性框图。
图12为本申请一个实施例的耦合器的结构的示意性框图。
图13为本申请另一个实施例的耦合器的结构的示意性框图。
图14为本申请另一个实施例的光开关处于关状态的示意性框图；图15为本申请另一个实施例的光开关处于开状态的示意性框图。
图16为本申请另一个实施例的光开关处于关状态的示意性框图；图17为本申请另一个实施例的光开关处于开状态的示意性框图。
图18为本申请一个实施例的光交换系统的结构的示意性框图。
图19为本申请另一个实施例的光开关的结构的示意性框图。
具体实施方式
下面将结合附图，对本申请中的技术方案进行描述。
前文中提到要实现微秒级切换速度、低插入损耗、大端口数和低成本的光开关矩阵，现有技术中提供了一种基于CrossBar架构的MEMS光开关矩阵。
图1和图2分别为该光开关矩阵中一个光开关100的关(Through)状态和开(Drop)状态两种状态的示意图。该光开关矩阵中的光开关100基于硅基光波导，包括上下两层光波导，下层光波导包含固定在衬底110上的交叉的2个固定光波导(Through波导120与Drop波导130)，上层光波导包含1个相对于衬底110可垂直移动的转轨光波导140，转轨光波导140采用静电致动。
如图1所示，光开关100在关(Through)状态时，致动器未施加电压，转轨光波导140与2个固定光波导的垂直间距较大，不发生光学耦合，输入光沿着Through波导120传输并且与Drop波导130垂直相交，输出光从Through波导120输出。光开关100处于关(Through)状态时，损耗为0.01dB量级。如图2所示，光开关100在开(Drop)状态时，致动器施加电压，转轨光波导140垂直向下移动，与2个固定光波导的垂直间距变小，与两者均发生光学耦合，形成两个在垂直方向耦合的绝热耦合器(Adiabatic couplers)。输入光先通过第一个绝热耦合器从Through波导耦合到转轨光波导140，再通过第二个绝热耦合器从转轨光波导140耦合到Drop波导130，输出光从Drop波导130输出。光开关100处于开(Drop)状态时，损耗为1dB量级。由于采用硅光技术，其器件尺寸比传统的MEMS微镜大幅度降低，切换速度达到1微秒量级。
图3为该CrossBar架构的MEMS光开关矩阵的光路切换的示意图。如图3所示，该光开关矩阵由M×N个光开关构成，形成M行N列矩阵，M×N个光开关分别位于每行和每列的交叉处，每行的N个光开关中的一个光开关的第一输出端口OP1与相邻的光开关的第一输入端口IP1相连接，每行的N个光开关中第一输入端口IP1不与其他光开关的第一输出端口OP1相连接的光开关的第一输入端口IP1为光开关矩阵的一个输入端口，每行的N个光开关中第一输出端口OP1不与其他光开关的第一输入端口IP1相连接的光开关的第一输出端口OP1为光开关矩阵的一个关(Through)端口，每列的M个光开关中的一个光开关的第二输出端口OP2与相邻的光开关的第二输入端口IP2相连接，每列的M个光开关中第二输出端口OP2不与其他光开关的第二输入端口IP2相连接的光开关的第二输出端口OP2为光开关矩阵的一个开(Drop)端口。
在图3所示的光开关矩阵的每条光路上，最多只有一个光开关处于损耗较大的开(Drop)状态，其余光开关均处于损耗很小的关(Through)状态。由此，在端口数较大时，该基于CrossBar架构的MEMS光开关矩阵的损耗比其他类型的硅基光开关的损耗要小得多，兼具了成本低、切换速度快、插入损耗低和端口数大等优点。
然而，一方面，图1和图2示出的光开关中位于下层的2个交叉的光波导在交叉处会引入损耗。另一方面，光开关在开(Drop)状态时在两个绝热耦合器处需要经过多次 模式变换，并且需要经过弯曲波导，导致损耗较大。
针对上述问题，本申请实施例提供了一种微秒级、低插损的光开关300。如图4所示，所述光开关300设置于衬底310上，所述光开关300包括第一波导320、第二波导330和第一可动波导340，所述第一波导320相对于所述衬底310不可移动，所述第一波导320具有第一输入端口IP1和第一输出端口OP1；所述第二波导330相对于所述衬底310不可移动，所述第二波导330具有第二输出端口OP2，所述第一波导320与所述第二波导330位于第一平面内，且所述第一波导320与所述第二波导330不相交；所述第一可动波导340相对于所述衬底310可以移动。
其中，当所述第一可动波导340处于第一位置时，(1)所述第一可动波导340与所述第一波导320光学解耦，并且所述第一可动波导340与所述第二波导330光学解耦，(2)IP1与OP1光学导通并且IP1与OP2光学阻断；当所述第一可动波导340处于第二位置时，(1)所述第一可动波导340与所述第一波导320光学耦合，并且所述第一可动波导340与所述第二波导330光学耦合，(2)IP1与OP1光学阻断并且IP1与OP2通过所述第一可动波导340光学导通。
可选地，本申请实施例的第一可动波导可以是MEMS光波导。
可选地，可以认为，第一可动波导340处于第一位置时光开关为关(Through)状态，第一可动波导340处于第二位置时光开关为开(Drop)状态。
可选地，本申请实施例的中所述第一平面可以是与所述衬底310平行的平面。
本申请实施例的光开关包括2个固定在衬底上的不存在交叉的波导和1个相对于衬底可移动的第一可动波导，从而不会因为交叉引入损耗，并且光开关在两种状态下均不需既经过耦合器又经过弯曲波导，而是仅经过耦合器或者仅经过弯曲波导，又进一步减小了损耗。
应理解，波导X和波导Y光学耦合(optically coupled)是指波导X与波导Y相互靠近，使两个波导中的光场发生相互作用，从而在两个波导之间实现光能量的传递。波导X和波导Y光学解耦(optically decoupled)是指波导X与波导Y相互远离，使两个波导中的光场不发生相互作用，从而使两个波导之间不发生光能量的传递。当然不可避免地，波导X和波导Y光学解耦时，两个波导中的光场还可能存在微弱的相互作用，以致可能会有少量的光能量以串扰的形式在两个波导之间传递，这样的串扰应该越小越好。
还应理解，输入端口A与输出端口B光学导通是指在输入端口A和输出端口B之间建立了光信号的通路。当然不可避免地，当输入端口A与输出端口B光学导通时，可能会有少量的光以串扰的形式会从输出端口B以外的其他输出端口输出，或者，可能会有少量的串扰的形式的光会从输入端口A以外的其他输入端口传输到输出端口B，这样的串扰应该越小越好。
还应理解，输入端口A与输出端口B光学阻断是指输入端口A和输出端口B输出之间不存在光信号的通路。当然不可避免地，当输入端口A与输出端口B光学阻断时，可能会有少量串扰的形式的光从输入端口A传输到输出端口B，同样这样的串扰应该越小越好。
可选地，第一可动波导340与第一波导320光学解耦，并且第一可动波导340与第二波导330光学解耦，可以是在调控第一可动波导340处于第一位置时同时达到的结果，不是分为两个步骤分别实现的。第一可动波导340与第一波导320光学耦合，并且第一 可动波导340与第二波导330光学耦合也可以是同理，不再赘述。
还应理解，图4示出的衬底310、第一波导320、第二波导330和第一可动波导340的尺寸、形状，以及IP1、OP1和OP2的位置和方向均为示意性的，不对本申请实施例造成限定。本申请的图5至图19的实施例为了简洁，省去衬底310未画出。第一波导320、第二波导330为固定波导，或者称不可移动的波导；第一可动波导340和下文将提到的第二可动波导360为可动波导。
可选地，在一个实施例中，所述第一可动波导340可以不位于所述第一平面内，所述第一可动波导340相对于所述第一平面可以垂直移动或可以在垂直于所述第一平面的方向上发生形变。第一可动波导垂直移动或在垂直于第一平面的方向上发生形变速度快，使得光开关的切换速度较快。
具体而言，例如图4示出的光开关的第一可动波导340不位于第一波导320和第二波导330所在的第一平面内，而是位于平行于第一平面的第二平面。图4是光开关的俯视图。图5和图6是光开关的立体图，其中图中示出的光开关的第一波导320和第二波导330均为弯曲波导，第一可动波导340为直波导。应理解，第一波导320、第二波导330和第一可动波导340的形状并不限于此。
图5是光开关在关(Through)状态的示意图。光开关在关(Through)状态即第一可动波导340处于第一位置，此时，如图5第一可动波导340与第一波导320和第二波导330的距离为d1，第一可动波导340与第一波导320和第二波导330光学解耦。IP1与OP1光学导通并且IP1与OP2光学阻断。输入光从第一波导320的第一输入端口IP1输入，在第一波导320内传输，输出光从第一波导320的第一输出端口OP1输出。
图6是光开关在开(Drop)状态的示意图。光开关在开(Drop)状态即第一可动波导340处于第二位置，此时，如图6第一可动波导340与第一波导320和第二波导330的距离为d2，其中d1大于d2，第一可动波导340与第一波导320和第二波导330光学耦合。IP1与OP1光学阻断并且IP1与OP2通过第一可动波导340光学导通。输入光从第一波导320的第一输入端口IP1输入，由于第一可动波导340与第一波导320光学耦合，光信号被耦合至第一可动波导340内传输，又由于第一可动波导340与第二波导330光学耦合，光信号又被耦合至第二波导330内传输，最后输出光从第二波导330的第二输出端口OP2输出。
具体而言，如图6所示，本申请实施例中第一可动波导340可以包括第一输入部341和第一输出部342，当所述第一可动波导340处于第二位置时，所述第一可动波导340的所述第一输入部341和所述第一波导320形成第一耦合器，所述第一可动波导340的所述第一输出部342和所述第二波导330形成第二耦合器。由于所述第一耦合器，IP1与OP1光学阻断；并且，由于所述第二耦合器，IP1与OP2光学导通。输入光从第一波导320的第一输入端口IP1输入，光信号被第一耦合器耦合至第一可动波导340的第一输入部341内传输，在第二耦合器处从第一可动波导340的第一输出部342被耦合至第二波导330内传输，最后输出光从第二波导330的第二输出端口OP2输出。
可选地，所述第一耦合器可以设置为：沿着光信号的传输方向，所述第一耦合器内所述第一波导的弯曲度变化小于第一阈值，所述第一耦合器内所述第一可动波导的所述第一输入部的弯曲度变化小于第二阈值。即第一可动波导340的第一输入部341和第一波导320尽量在直波导上进行耦合，由此可以减小耦合器处光信号的损耗。第一阈值和 第二阈值可以相等也可以不相等，其取值可以为5°、10°、15°或20°，具体数值可以根据系统要求、波导性能和光信号的模式、功率等确定，本申请实施例对此不作限定。同样地，第二耦合器也可以进行类似地设计，本申请实施例对此不作限定。
在本申请实施例中，如图7所示，所述光开关还可以包括至少一个致动器，所述第一可动波导的位置由所述至少一个致动器控制，所述至少一个致动器与所述第一可动波导之间通过悬臂梁连接。该悬臂梁可以为弹簧，也可以为其他弹性材料部件，还可以是不具有弹性的连接部件，本申请实施例对此也不作限定。
致动器可以是由电场、磁场、光场或热场等激励的，致动器在上述激励下带动第一可动波导运动。致动器可以是平行板静电致动器或者梳状静电致动器(如图9所示)，还可以是其它种类的致动器，本申请实施例对此不作限定。致动器设置的位置和个数也不限定。
图7所示的光开关，当致动器未施加电压时，致动器中的上下电极之间没有静电吸引力，上层的第一可动波导和下层的固定波导垂直间距较大(例如为d1)，光开关处于关状态，下层的固定波导的光信号不会耦合到上层的第一可动波导中，直接从下层固定波导的端口输出。当致动器被施加电压，致动器中的上下电极之间产生静电吸引力，并发生位移。致动器带动上层的第一可动波导运动到与下层的固定波导的垂直间距较小(例如为d2)的位置，光开关处于开状态，下层的固定波导的光信号耦合到上层的第一可动波导中传输，再从上层的第一可动波导中耦合回到下层的固定波导的端口输出。
可选地，如图7所示，第一可动波导340上可以没有支撑部件，致动器推动整个第一可动波导340相对于第一平面垂直移动。此时，致动器设置的位置和个数可以如图7所示的，在第一可动波导340的两端分别设置致动器。致动器也可以设置在其他位置，例如设置在第一可动波导340的中间，以推动整个第一可动波导340相对于第一平面垂直移动。
可选地，如图8所示，第一可动波导340还可以包括连接部343，用于连接所述第一输入部341和所述第一输出部342，所述光开关300还包括支撑部件350，用于与所述连接部343连接以使得所述第一可动波导340的中间部分相对于所述衬底310是固定的，所述第一可动波导340的两端可以相对于所述第一平面垂直移动。由此，致动器推动第一可动波导340的两端相对于第一平面垂直移动，而第一可动波导340的中间部分保持不动，使得第一可动波导340在垂直于所述第一平面的方向上发生形变。支撑部件使得第一可动波导更坚固，更易于由致动器控制。
应理解，本申请各实施例中，支撑部件350可以是如图9所示的由硅薄膜制作成网状的部件。网状结构使得支撑部件350刚度好，质量轻，容易加工。支撑部件350的位置和个数可以根据需求灵活设置，例如可以在第一可动波导340的中间位置设置如图8所示的一个支撑部件，也可以如图9所示的在相应的位置设置两个支撑部件，本申请实施例对支撑部件的具体形式不作限定。
上文对本申请实施例的1×2(1个输入端口2输出端口)的光开关进行了详细描述，下面着重描述本申请实施例的2×2(2个输入端口2输出端口)的光开关。
在上文描述的1×2光开关的结构的基础上，可以得到2×2光开关。如图10和图11所示，所述第二波导330还具有第二输入端口IP2，所述光开关还包括第二可动波导360，所述第一可动波导340和所述第二可动波导360是交叉的，当所述第二可动波导360处 于第三位置时，(1)所述第二可动波导360与所述第一波导320光学解耦，并且所述第二可动波导360与所述第二波导330光学解耦，(2)IP2与OP2光学导通并且IP2与OP1光学阻断；当所述第二可动波导360处于第四位置时，(1)所述第二可动波导360与所述第一波导320光学耦合，并且所述第二可动波导360与所述第二波导330光学耦合，(2)IP2与OP2光学阻断并且IP2与OP1通过所述第二可动波导360光学导通。
具体而言，所述第二可动波导360可以包括第二输入部361和第二输出部362，光信号在所述第一输入部341到所述第一输出部342的路径中传输和光信号在所述第二输入部361到所述第二输出部362的路径中传输是交叉的，当所述第二可动波导360处于第三位置时，IP2与OP2光学导通并且IP2与OP1光学阻断；当所述第二可动波导360处于第四位置时，所述第二可动波导360的所述第二输入部361和所述第二波导330形成第三耦合器，所述第二可动波导360的所述第二输出部361和所述第一波导320形成第四耦合器。由于所述第三耦合器，IP2与OP2光学阻断；并且，由于所述第四耦合器，IP2与OP1光学导通。
该2×2光开关中第一可动波导340和第二可动波导360可以是垂直交叉的，也可以不是垂直的，本申请实施例对此不作限定。
光开关在关(Through)状态即第一可动波导340处于第一位置且第二可动波导360处于第三位置时，第一可动波导340与第一波导320和第二波导330的距离较远，第一可动波导340与第一波导320和第二波导330光学解耦；同样地，第二可动波导360与第一波导320和第二波导330光学解耦。IP1与OP1光学导通并且IP1与OP2光学阻断，IP2与OP2光学导通并且IP2与OP1光学阻断。输入光1从第一波导320的第一输入端口IP1输入，在第一波导320内传输，输出光1从第一波导320的第一输出端口OP2输出。输入光2从第二波导330的第二输入端口IP2输入，在第二波导330内传输，输出光2从第二波导330的第二输出端口OP2输出。
光开关在开(Drop)状态即第一可动波导340处于第二位置且第二可动波导360处于第四位置时，第一可动波导340与第一波导320和第二波导330的距离较近，第一可动波导340与第一波导320和第二波导330光学耦合；同样地，第二可动波导360与第一波导320和第二波导330光学耦合。IP1与OP1光学阻断并且IP1与OP2通过第一可动波导340光学导通，IP2与OP2光学阻断并且IP2与OP1通过第二可动波导360光学导通。输入光1从第一波导320的第一输入端口IP1输入，由于第一可动波导340与第一波导320光学耦合，光信号1被耦合至第一可动波导340内传输，又由于第一可动波导340与第二波导330光学耦合，光信号1又被耦合至第二波导330内传输，最后输出光1从第二波导330的第二输出端口OP2输出。类似地，输入光2从第二波导330的第二输入端口IP2输入，输出光2从第一波导320的第一输出端口OP1输出。并且与1×2光开关类似地，IP2与OP2是由于所述第三耦合器光学阻断的，并且IP2与OP1是由于所述第四耦合器光学导通的，此处不再赘述。
可选地，如图10和图11所示2×2光开关中光开关还可以包括交叉型的连接部370，用于连接所述第一输入部341、所述第一输出部342、所述第二输入部361、所述第二输出部362，所述光开关还包括支撑部件350，用于与所述连接部370连接以使得所述第一可动波导340的中间部分和所述第二可动波导360的中间部分相对于所述衬底310是固定的，所述第一可动波导340的两端和所述第二可动波导360的两端可以相对于所述第 一平面垂直移动。同理，由此，致动器推动第一可动波导340的两端和所述第二可动波导360的两端相对于第一平面垂直移动，而第一可动波导340的中间部分和所述第二可动波导360的中间部分保持不动，使得第一可动波导340和所述第二可动波导360在垂直于所述第一平面的方向上发生形变。
可选地，2×2光开关也可以不包括支撑部件，本申请实施例对此不作限定。
本申请实施例中的耦合器(包括第一耦合器至第四耦合器)可以是方向耦合器或者绝热渐变耦合器。对于方向耦合器，第一可动波导和固定波导在耦合部分的宽度通常是相等的。对于绝热渐变耦合器，通常上层波导的高度或宽度，或上层波导与下层波导之间的间距可以是沿着光信号的传输方向渐变的。例如，图12所示的耦合器，沿着光信号的传输方向，上层波导由宽度w1高度h1逐渐变化为宽度w2高度h2，其中w1<w2，h1>h2。即上层波导为锥形的波导，可以对应于前文的第一输入部341、第一输出部342、第二输入部361和第二输出部362。下层波导为条形的波导，对应于前文的第一波导320和第二波导330的相应部分。绝热渐变耦合器可以实现较宽的光谱范围的传输，使光信号更稳定，还可以增大耦合器的工艺容差，提高光开关的性能。
在绝热渐变耦合器的基础上，还可以进一步改进上层波导和下层波导的形状。改进的上层波导和下层波导可以是如图13所示的脊形的光波导。脊形的光波导一方面可以降低光信号的传输损耗，另一方面可以增强结构的机械性能，从而提高光开关的性能。
可选地，在本申请的另一个实施例中，所述第一可动波导340位于所述第一平面内，所述第一可动波导340可以在所述第一平面内以垂直于所述第一平面的转动轴为中心转动。本申请实施例中，第一可动波导与2个固定的波导位于同一平面内，或者说位于同一层，制作工艺难度大大降低。
具体可以如图14和图15所示，图14为光开关的关(Through)状态，图15为光开关的开(Drop)状态。关(Through)状态到开(Drop)状态，第一可动波导340可以在致动器的控制下由与第一波导320和第二波导330光学解耦的第一位置，在第一平面内转动到与第一波导320和第二波导330光学耦合的第二位置。第一可动波导340的中间部分可以有支撑部件对第一可动波导340进行固定，以保证光开关的可靠性，并且该支撑部件应为转动轴，使得第一可动波导340能够以转动轴为中心轴发生转动。
图16和图17分别为第一可动波导340和第二可动波导360的移动方式为转动的2×2光开关的关状态和开状态的示意图。第一可动波导340和第二可动波导360依靠与两个固定的波导之间的电压差作为转动的驱动力。具体可以如图17，第一波导320和第二波导330分别接地，第一可动波导340和第二可动波导360上加电压V，由于电压差第一可动波导340和第二可动波导360以支撑部件350为转动轴转动，第一可动波导340的两端和第二可动波导360的两端分别与第一波导320和第二波导330的相应部分靠近形成耦合器，从而使光开关切换到开状态。光信号的传输路径与前文中的描述类似，此处再进行赘述。
在本申请各实施例中，第一波导320和第二波导330可以为弯曲波导，所述弯曲波导为圆弧型的光波导或曲率渐变型的光波导，由此可以降低光信号在光波导中传输时的损耗。第一波导320和第二波导还可以为其他形状的光波导，本申请实施例对此不作限定。当第一波导320和第二波导330为弯曲波导时，第一可动波导340可以为直波导或接近直线型的波导，本申请实施例对此不作限定。
在本申请各实施例中，所述光开关还可以包括光功率监控器，所述光功率监控器用于监控所述第一波导、所述第二波导、IP1、OP1和OP2中的至少一种的光功率。本申请实施例的光开关通过监控各元件中光信号的功率，可以根据光信号的功率估计第一可动波导340的位置，从而更精确的控制第一可动波导340的位置。
基于本申请实施例的光开关，本申请还提供了一种光交换系统，所述光交换系统为M×N光开关矩阵，包括M×N个光开关，每个光开关可以是图4至图9或图14和图15所示的光开关(这些光开关的第二波导230还具有第二输入端口IP2)，还可以是图10、图11以及图16和图17所示的2×2光开关。每个所述光开关记为SCij，其中，i取值1,2,…,M，j取值1,2,…,N，所述M×N个光开关被设置为：(1)IP1i,j与OP2i,j-1光学导通，(2)IP2i,j与OP1i-1,j光学导通，i取值2至M，j取值2至N。
其中，在IP1i,1和OP1M,j之间存在至少一条路径仅包括一个所述第一可动波导处于第一位置的光开关。或者说，在IP1i,1和OP1M,j之间存在至少一条路径仅包括一个第一波导。
当矩阵中的光开关为如图10、图11以及图16和图17所示的2×2光开关时，在IP1i,1和OP1M,j之间存在至少一条路径仅包括一个所述第一可动波导处于第一位置的光开关，并且在IP21,j和OP2i,N之间存在至少一条路径仅包括一个所述第二可动波导处于第三位置的光开关。或者说，在IP1i,1和OP1M,j之间存在至少一条路径仅包括一个第一波导，并且在IP21,j和OP2i,N之间存在至少一条路径仅包括一个第二波导，i取值1至M，j取值1至N。
具体地，M×N光开关矩阵的各光开关的连接关系可以如图18所示。例如，在IP22,1和OP1M,N之间存在至少一条路径(例如SC21至SC22至SC2N至SC3N至SCMN)中仅包括一个第一可动波导处于第一位置的光开关SC2N，或者说光路中仅包括一个第一波导(SC2N的第一波导)。
再如，在IP21,1和OP21,N之间存在至少一条路径(例如SC11至SC12至SC1N)中仅包括一个第二可动波导处于第三位置的光开关SC11，或者说光路中仅包括一个第二波导(SC11的第二波导)。
本申请实施例的光交换系统可以实现微秒级切换速度，具有低插入损耗、大端口数和低成本等优势。
应注意的是，基于本申请实施例的光开关，可以连接形成具有其他变形的连接关系的光交换系统。例如变换图18中的光交换系统的输入端口和输出端口的方向，可以通过将光开关的连接关系作出相应的变化来实现，此处不进行赘述。
前文各图示出的光开关的中第一波导和第二波导均为弯曲波导，第一波导和第二波导也可以为其他形状的光波导，例如可以为图19所示的直波导。如图19所示，第一波导320和第二波导330为相互不相交的两个直波导。第一可动波导340可以为如图19所示的具有弯曲部分和直型部分的波导。第一可动波导340可以不位于所述第一平面内，第一可动波导340相对于所述第一平面可以垂直移动或可以在垂直于所述第一平面的方向上发生形变，从而分别与第一波导320和第二波导330光学解耦或光学耦合，以控制光开关的关状态和开状态。
图19中以具体的一种例子示出了致动器、连接致动器和可动波导的弹簧以及可动波导和固定波导光学耦合时形成的第一耦合器和第二耦合器。应理解，以上各部件均为 示例而非限定。
除此以外，第一波导320和第二波导330为相互不相交的两个直波导。第一可动波导340可以位于所述第一平面内，所述第一可动波导340可以在所述第一平面内平动，光开关的具体原理与前文的描述类似，此处不再赘述。
由图19示出的1×2光开关基于前文中提到的类似的扩展方式可以得到2×2光开关。该2×2光开关以及与之类似的固定波导为直波导的光开关在形成光开关矩阵时，需额外增加弯曲的光波导接合以形成CrossBar结构。
应理解，本文中涉及的第一、第二、第三、第四以及各种数字编号仅为描述方便进行的区分，并不用来限制本申请实施例的范围。
应理解，本文中术语“和/或”，仅仅是一种描述关联对象的关联关系，表示可以存在三种关系，例如，A和/或B，可以表示：单独存在A，同时存在A和B，单独存在B这三种情况。另外，本文中字符“/”，一般表示前后关联对象是一种“或”的关系。
应理解，在本申请的各种实施例中，上述各过程的序号的大小并不意味着执行顺序的先后，各过程的执行顺序应以其功能和内在逻辑确定，而不应对本申请实施例的实施过程构成任何限定。
本领域普通技术人员可以意识到，结合本文中所公开的实施例描述的各示例的单元及算法步骤，能够以电子硬件、或者计算机软件和电子硬件的结合来实现。这些功能究竟以硬件还是软件方式来执行，取决于技术方案的特定应用和设计约束条件。专业技术人员可以对每个特定的应用来使用不同方法来实现所描述的功能，但是这种实现不应认为超出本申请的范围。
所属领域的技术人员可以清楚地了解到，为描述的方便和简洁，上述描述的系统、装置和单元的具体工作过程，可以参考前述方法实施例中的对应过程，在此不再赘述。
在本申请所提供的几个实施例中，应该理解到，所揭露的系统、装置和方法，可以通过其它的方式实现。例如，以上所描述的装置实施例仅仅是示意性的，例如，所述单元的划分，仅仅为一种逻辑功能划分，实际实现时可以有另外的划分方式，例如多个单元或组件可以结合或者可以集成到另一个系统，或一些特征可以忽略，或不执行。另一点，所显示或讨论的相互之间的耦合或直接耦合或通信连接可以是通过一些接口，装置或单元的间接耦合或通信连接，可以是电性，机械或其它的形式。
所述作为分离部件说明的单元可以是或者也可以不是物理上分开的，作为单元显示的部件可以是或者也可以不是物理单元，即可以位于一个地方，或者也可以分布到多个网络单元上。可以根据实际的需要选择其中的部分或者全部单元来实现本实施例方案的目的。
另外，在本申请各个实施例中的各功能单元可以集成在一个处理单元中，也可以是各个单元单独物理存在，也可以两个或两个以上单元集成在一个单元中。
所述功能如果以软件功能单元的形式实现并作为独立的产品销售或使用时，可以存储在一个计算机可读取存储介质中。基于这样的理解，本申请的技术方案本质上或者说对现有技术做出贡献的部分或者该技术方案的部分可以以软件产品的形式体现出来，该计算机软件产品存储在一个存储介质中，包括若干指令用以使得一台计算机设备(可以是个人计算机，服务器，或者网络设备等)执行本申请各个实施例所述方法的全部或部分步骤。而前述的存储介质包括：U盘、移动硬盘、只读存储器(Read-Only Memory， ROM)、随机存取存储器(Random Access Memory，RAM)、磁碟或者光盘等各种可以存储程序代码的介质。
以上所述，仅为本申请的具体实施方式，但本申请的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本申请揭露的技术范围内，可轻易想到变化或替换，都应涵盖在本申请的保护范围之内。因此，本申请的保护范围应以所述权利要求的保护范围为准。

Claims (13)

  1. 一种光开关，其特征在于，所述光开关设置于衬底上，所述光开关包括第一波导、第二波导和第一可动波导，
    所述第一波导相对于所述衬底不可移动，所述第一波导具有第一输入端口IP1和第一输出端口OP1；
    所述第二波导相对于所述衬底不可移动，所述第二波导具有第二输出端口OP2，所述第一波导与所述第二波导位于第一平面内，且所述第一波导与所述第二波导不相交；
    所述第一可动波导相对于所述衬底可以移动；
    其中，当所述第一可动波导处于第一位置时，(1)所述第一可动波导与所述第一波导光学解耦，并且所述第一可动波导与所述第二波导光学解耦，(2)IP1与OP1光学导通并且IP1与OP2光学阻断；
    当所述第一可动波导处于第二位置时，(1)所述第一可动波导与所述第一波导光学耦合，并且所述第一可动波导与所述第二波导光学耦合，(2)IP1与OP1光学阻断并且IP1与OP2通过所述第一可动波导光学导通。
  2. 根据权利要求1所述的光开关，其特征在于，所述第一可动波导不位于所述第一平面内，所述第一可动波导相对于所述第一平面可以垂直移动或可以在垂直于所述第一平面的方向上发生形变。
  3. 根据权利要求1所述的光开关，其特征在于，所述第一可动波导位于所述第一平面内，所述第一可动波导可以在所述第一平面内以垂直于所述第一平面的转动轴为中心转动。
  4. 根据权利要求1至3中任一项所述的光开关，其特征在于，所述第一可动波导包括第一输入部和第一输出部，当所述第一可动波导处于第二位置时，所述第一可动波导的所述第一输入部和所述第一波导形成第一耦合器，所述第一可动波导的所述第一输出部和所述第二波导形成第二耦合器。
  5. 根据权利要求4所述的光开关，其特征在于，所述第一可动波导还包括连接部，用于连接所述第一输入部和所述第一输出部，所述光开关还包括支撑部件，用于与所述连接部连接以使得所述第一可动波导的中间部分相对于所述衬底是固定的，所述第一可动波导的两端可以相对于所述第一平面垂直移动。
  6. 根据权利要求1至4中任一项所述的光开关，其特征在于，所述第二波导还具有第二输入端口IP2，所述光开关还包括第二可动波导，所述第一可动波导和所述第二可动波导是交叉的，
    当所述第二可动波导处于第三位置时，(1)所述第二可动波导与所述第一波导光学解耦，并且所述第二可动波导与所述第二波导光学解耦，(2)IP2与OP2光学导通并且IP2与OP1光学阻断；
    当所述第二可动波导处于第四位置时，(1)所述第二可动波导与所述第一波导光学耦合，并且所述第二可动波导与所述第二波导光学耦合，(2)IP2与OP2光学阻断并且IP2与OP1通过所述第二可动波导光学导通。
  7. 根据权利要求6所述的光开关，其特征在于，所述第一可动波导包括第一输入部和第一输出部，所述第二可动波导包括第二输入部和第二输出部，所述光开关还包括交叉型的连接部，用于连接所述第一输入部、所述第一输出部、所述第二输入部和所述第 二输出部，所述光开关还包括支撑部件，用于与所述连接部连接以使得所述第一可动波导的中间部分和所述第二可动波导的中间部分相对于所述衬底是固定的，所述第一可动波导的两端和所述第二可动波导的两端可以相对于所述第一平面垂直移动。
  8. 根据权利要求5或7所述的光开关，其特征在于，所述支撑部件是由硅薄膜制作成网状的部件。
  9. 根据权利要求1至8中任一项所述的光开关，其特征在于，所述第一波导和所述第二波导均为弯曲波导，所述弯曲波导为圆弧型的光波导或曲率渐变型的光波导。
  10. 根据权利要求1至9中任一项所述的光开关，其特征在于，所述光开关还包括至少一个致动器，所述第一可动波导的位置由所述至少一个致动器控制，所述至少一个致动器与所述第一可动波导之间通过悬臂梁连接。
  11. 根据权利要求1至10中任一项所述的光开关，其特征在于，所述光开关还包括光功率监控器，所述光功率监控器用于监控所述第一波导、所述第二波导、IP1、OP1和OP2中的至少一种的光功率。
  12. 一种光交换系统，其特征在于，所述光交换系统为M×N光开关矩阵，包括M×N个根据权利要求1所述的光开关，所述光开关的所述第二波导还具有第二输入端口IP2，每个所述光开关记为SCij，其中，i取值1,2,…,M，j取值1,2,…,N，所述M×N个光开关被设置为：(1)IP1i,j与OP2i,j-1光学导通，(2)IP2i,j与OP1i-1,j光学导通，i取值2至M，j取值2至N。
  13. 根据权利要求12所述的光交换系统，其特征在于，在IP1i,1和OP1M,j之间存在至少一条路径仅包括一个所述第一可动波导处于第一位置的光开关，i取值1至M，j取值1至N。
PCT/CN2017/075308 2016-08-01 2017-03-01 光开关和光交换系统 WO2018023968A1 (zh)

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