WO2018012282A1 - Inspection device - Google Patents

Inspection device Download PDF

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Publication number
WO2018012282A1
WO2018012282A1 PCT/JP2017/023640 JP2017023640W WO2018012282A1 WO 2018012282 A1 WO2018012282 A1 WO 2018012282A1 JP 2017023640 W JP2017023640 W JP 2017023640W WO 2018012282 A1 WO2018012282 A1 WO 2018012282A1
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WO
WIPO (PCT)
Prior art keywords
detection
unit
inspection apparatus
noise
wave
Prior art date
Application number
PCT/JP2017/023640
Other languages
French (fr)
Japanese (ja)
Inventor
倫秋 池田
Original Assignee
株式会社システムスクエア
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社システムスクエア filed Critical 株式会社システムスクエア
Priority to JP2018527502A priority Critical patent/JPWO2018012282A1/en
Publication of WO2018012282A1 publication Critical patent/WO2018012282A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/10—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the material being confined in a container, e.g. in a luggage X-ray scanners
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/18—Investigating the presence of flaws defects or foreign matter

Definitions

  • the present invention relates to an inspection apparatus that inspects a foreign object by irradiating a target with a detection wave.
  • an X-ray inspection apparatus capable of inspecting a product non-destructively can inspect foreign matters and the like that cannot be seen from the outside by detecting X-rays transmitted through the object.
  • Patent Document 1 discloses an X-ray inspection apparatus that performs foreign object inspection by irradiating X-rays while transporting a workpiece, which is an inspection object, with a transport belt.
  • Patent Document 2 discloses a package that can acquire an image of a package in which contents such as food are wrapped in a translucent packaging sheet, and can determine whether or not a foreign object is caught in the seal portion. An inspection device is disclosed.
  • the seal portion of the package includes a center seal portion in which a sheet material is closed in a cylindrical shape, and a end seal portion in which a cylindrical opening end is sealed.
  • the center seal portion is provided in the central portion of the package, and therefore, when attempting to inspect the biting of foreign matter in the center seal portion, it overlaps with the package portion containing the contents. Therefore, it is difficult to separate the foreign matter in the packaging portion and the foreign matter in the center seal portion from the image projected by the X-ray inspection.
  • An object of the present invention is to provide an inspection device capable of accurately inspecting a foreign matter at a center seal portion in a package.
  • the present invention is an inspection apparatus for inspecting a package body having a packaging portion in which a sheet material is formed into a cylindrical shape and a center seal portion provided in a closing portion of the packaging portion, An irradiation unit that irradiates a detection wave toward the body and a detection unit that detects a detection wave that passes through the package, and the detection unit includes a first detection portion that detects the detection wave that passes through the center seal portion. And the first detection part has a detection region in which the detection wave emitted from the irradiation part is not blocked by the packaging part.
  • the detection wave irradiated from the irradiation part reaches the center seal part without being blocked by the packaging part, and the detection wave transmitted through the center seal part is detected by the first detection part of the detection part. be able to.
  • the foreign material of a center seal part can be test
  • a center seal part may be disposed between the irradiation part and the first detection part.
  • a center seal part is arrange
  • the irradiation source of the detection wave in the irradiation unit may be arranged at the same height as the base of the center seal part or at the tip side of the center seal part from the base. Therefore, it can avoid that a packaging part is included in the irradiation area
  • the detection unit has a second detection part that detects a detection wave that passes through the packaging part, and the detection wave emitted from the irradiation part is blocked by the center seal part in the second detection part. May have no detection area. Thereby, the detection wave irradiated from the irradiation part reaches the packaging part without being blocked by the center seal part, and the detection wave transmitted through the packaging part can be detected by the second detection part of the detection part.
  • the position of the first detection portion in the extending direction of the center seal portion may be different from the position of the second detection portion. Therefore, it is possible to prevent any one of the first detection portion and the second detection portion from interfering with the other detection region.
  • the detection unit may include a line sensor in which a plurality of detection elements are arranged in a straight line, and the first detection portion and the second detection portion may be included in the line sensor.
  • a single line sensor can perform foreign matter inspection of both the center seal portion and the packaging portion.
  • the inspection apparatus of the present invention may further include a signal processing unit that processes a signal based on the detection wave detected by the detection unit, and a determination unit that determines the presence or absence of a foreign substance based on the signal processed by the signal processing unit. Good. Thereby, the presence or absence of a foreign object can be determined based on the detection wave detected by the detection unit.
  • the inspection apparatus of the present invention may further include a noise detection unit provided so that a detection wave from the irradiation unit does not enter, and the signal processing unit is a noise detection unit from a signal based on the detection wave detected by the detection unit. It is preferable to obtain a signal in which noise is canceled by subtracting a signal based on the detected detection wave. In this way, a signal with an excellent S / N ratio can be obtained.
  • the noise detection unit may be arranged at a position where the detection wave from the irradiation unit is not irradiated. Moreover, you may further provide the shielding member which shields so that the detection wave from an irradiation part may inject into a noise detection part. Noise cancellation may be performed on an analog signal, or may be performed after an analog signal of a detection wave is converted into a digital signal by an AD converter.
  • the detection unit may include a line sensor in which a plurality of detection elements are arranged in a straight line.
  • This line sensor has an imaging timing each time an inspection wave that has passed through a package conveyed in a conveyance direction orthogonal to the linear arrangement direction of detection elements moves in the conveyance direction by the width of the detection element in the conveyance direction. It is preferable to detect at the first exposure amount and detect at the second exposure amount different from the imaging timing at the noise detection timing shifted in phase from the imaging timing. Accordingly, the signal processing unit detects at the imaging timing. It is preferable to obtain a signal in which noise is canceled by subtracting the signal based on the detection wave detected at the noise detection timing from the signal based on the detection wave. In this way, a signal with an excellent S / N ratio can be obtained.
  • the signal processing unit may subtract the signal based on the detection wave detected by the noise detection element from the signal based on the detection wave detected by the imaging detection element. It is better to obtain a signal with canceled noise. In this way, a signal with an excellent S / N ratio can be obtained.
  • the inspection apparatus of the present invention may further include a display unit that displays an image based on the detection wave detected by the detection unit. Thereby, the state of the foreign matter can be grasped from the image displayed on the display unit.
  • an inspection apparatus capable of accurately inspecting the foreign matter at the center seal portion in the package.
  • (A) And (b) is a schematic diagram which illustrates the structure of the inspection apparatus which concerns on 1st Embodiment.
  • (A)-(c) is a schematic diagram explaining arrangement
  • (A)-(c) is a schematic diagram which illustrates the structure of the inspection apparatus which concerns on 2nd Embodiment. It is a schematic diagram which illustrates the structure of the inspection apparatus which concerns on 3rd Embodiment. It is a figure which shows typically the timing of the imaging and noise detection in the test
  • FIG. 1A and 1B are schematic views illustrating the configuration of an inspection apparatus according to this embodiment.
  • FIG. 1A shows a perspective view
  • FIG. 1B shows a cross-sectional view seen from the direction in which the center seal portion extends.
  • the inspection apparatus 1 according to the present embodiment is an apparatus that inspects the package 100 with a detection wave.
  • the detection waves include X-rays, ultraviolet rays, visible rays, infrared rays, terahertz waves, and the like.
  • an X-ray inspection apparatus that uses X-rays as detection waves is taken as an example.
  • the package 100 includes a packaging part 110 in which a sheet material is formed into a cylindrical shape, and a center seal part 120 provided at a closing part of the packaging part 110.
  • a sheet material a laminated film in which CPP (Cast Polypropylene), PE (Polyethylene), aluminum-deposited PET (Polyethylene terephthalate), or the like is laminated is used.
  • the package 100 is obtained by making such a sheet material into a cylindrical shape and thermocompression-bonding the closing portion.
  • the part that accommodates the contents in the cylindrical shape is the packaging part 110
  • the part that is closed and thermocompression bonded at the center part of the packaging part 110 is the center seal part 120.
  • the direction in which the center seal portion 120 of the package 100 extends is the length direction D1, and the direction perpendicular to the length direction D1 and where the package portion 110 and the center seal portion 120 do not overlap is the width direction D2.
  • a direction orthogonal to the length direction D1 and the width direction D2 is referred to as a height direction D3.
  • the package 100 may be cut in a predetermined size in the length direction D1 or may be continuous in the length direction D1.
  • the inspection apparatus 1 includes an irradiation unit 10 that irradiates an X-ray that is an example of a detection wave toward the package 100, and a detection unit 20 that detects X-rays that pass through the package 100.
  • the irradiation unit 10 and the detection unit 20 are arranged so as to face the width direction D2 with the packaging body 100 therebetween.
  • the irradiation unit 10 includes an X-ray source (X-ray irradiation source) 12 provided in the housing 11 and a slit 13 for narrowing X-rays emitted from the X-ray source 12.
  • X-rays emitted from the X-ray source 12 are narrowed down to a predetermined range by the slit 13 and irradiated toward the package 100.
  • the detection unit 20 is a part that detects X-rays irradiated from the irradiation unit 10 and transmitted through the package 100.
  • the detection unit 20 includes a line sensor in which a plurality of detection elements (for example, CMOS sensors) are arranged in a straight line.
  • the line sensor is arranged in the height direction, and the detection region by the detection unit 20 is set as the height direction D3.
  • the package 100 is continuously test
  • the relative movement of the irradiation part 10 and the detection part 20, and the package 100 is normally implement
  • the detection unit 20 includes a first detection portion 21 that detects X-rays that pass through the center seal portion 120.
  • the detection unit 20 may include a second detection portion 22 that detects X-rays that pass through the packaging unit 110.
  • the first detection portion 21 is included in the line sensor LS1, and the second detection portion 22 is included in the line sensor LS2.
  • Each of the line sensor LS1 and the line sensor LS2 is arranged such that a plurality of detection elements are arranged in the height direction D3.
  • the first detection portion 21 has a detection region in which the X-rays irradiated from the irradiation unit 10 are not blocked by the packaging unit 110. Further, the second detection portion 22 has a detection region where the X-ray irradiated from the irradiation unit 10 is not blocked by the center seal unit 120.
  • the X-ray source 12 in the irradiation unit 10 is disposed at the same height as the base of the center seal part 120, or at the tip side of the center seal part 120 from the base. ing.
  • the X-ray source 12 is the same height as the reference line L or the packaging part 110 with respect to the reference line L. Located on the opposite side.
  • the reference line L is, for example, a line in the width direction D2 along the transport surface of the transport device.
  • the X-ray source 12 is disposed at the same height as the position of the transport surface or below the transport surface.
  • the irradiation region S ⁇ b> 1 closer to the center seal portion 120 than the reference line L does not include the packaging unit 110. Therefore, in the first detection portion 21 that detects X-rays in the irradiation region S1, the center seal portion 120 and the packaging portion 110 do not overlap each other, and the center detection portion 21 is not affected by the packaging portion 110 in the first detection portion 21. X-rays that pass through only 120 can be detected.
  • the irradiation region S2 closer to the packaging unit 110 than the reference line L includes a region that does not include the center seal portion 120. Therefore, in the second detection portion 22 that detects X-rays in the irradiation region S2, the center seal portion 120 and the packaging portion 110 do not overlap with each other, and only the packaging portion 110 is transmitted without being affected by the center seal portion 120. Lines can be detected.
  • the center seal portion 120 is not included in the entire irradiation region S2.
  • the farther the X-ray source 12 is from the reference line L on the side of the center seal portion 120 than the reference line L the more center seal portions 120 are included in the irradiation region S2.
  • a region including the center seal portion 120 in the detection region of the second detection portion 22 may be excluded by signal processing.
  • the first detection portion 21 is disposed in the vicinity of the center seal portion 120.
  • the second detection portion 22 is disposed in the vicinity of the packaging unit 110. If X-rays that pass through the object are detected in the vicinity of the object, it is difficult to be affected by disturbances and highly accurate foreign object detection can be performed.
  • FIGS. 2A to 2C are schematic views for explaining the arrangement of the irradiation unit and the detection unit.
  • 2A to 2C illustrate a case where the center seal portion 120 is provided on the upper side of the packaging portion 110.
  • FIG. 2A to 2C show a package 100 having an end seal portion 130 in addition to the center seal portion 120.
  • FIG. The end seal part 130 is a part obtained by thermocompression bonding of the open end of the cylindrical packaging part 110 in the width direction D2.
  • the irradiation unit 10 and the detection unit 20 are arranged to face each other in the width direction D2 of the package 100.
  • a center seal part 120 is disposed between the first detection part 21 and the irradiation part 10 in the detection part 20, and a packaging part 110 is disposed between the second detection part 22 and the irradiation part 10.
  • the position of the first detection portion 21 in the length direction D1 of the package 100 is different from the position of the second detection portion 22.
  • the first detection portion 21 is not included in the X-ray irradiation region S2 irradiated from the irradiation unit 10
  • the second detection portion 22 is not included in the irradiation region S1. Therefore, it is possible to prevent any one of the first detection portion 21 and the second detection portion 22 from interfering with the other detection region.
  • the position of the first detection portion 21 in the length direction D1 of the package 100 matches the position of the second detection portion 22.
  • the position of the first detection portion 21 in the height direction D3 is different from the position of the second detection portion 22.
  • the position of the first detection portion 21 in the length direction D1 of the package 100 is the position of the second detection portion 22. Even if it corresponds, either one of the first detection portion 21 and the second detection portion 22 does not interfere with the other detection region.
  • FIG. 3 is a block configuration diagram of the inspection apparatus according to the present embodiment.
  • the inspection apparatus 1 includes a control unit 200 that controls the irradiation unit 10 and the detection unit 20.
  • the control unit 200 controls the driver 15 to adjust the intensity of X-rays emitted from the irradiation unit 10.
  • the control unit 200 includes a signal processing unit 201 and a determination unit 202.
  • a memory 210 and a display unit 220 are connected to the control unit 200.
  • the signals based on the X-rays detected by the first detection portion 21 and the second detection portion 22 are accumulated in the memory 210 and sent to the signal processing unit 201 of the control unit 200 at a desired timing.
  • the signal processing unit 201 processes the signal sent from the memory 210 to form an image signal. That is, a predetermined amount of signals (line signals) based on X-rays captured by the line sensor are combined to form a two-dimensional image.
  • the two-dimensional image is output to the display unit 220 that is a monitor.
  • the determination unit 202 performs a process of determining the presence or absence of foreign matter based on the signal output from the signal processing unit 201. For example, when a signal exceeding a predetermined threshold is detected by the signal processing unit 201, there is a possibility of foreign matter.
  • the determination unit 202 performs processing such as a continuous area of a signal that may be a foreign substance, pattern matching, and the like, and determines whether or not it is a foreign substance.
  • the determination result is output to the display unit 220.
  • the X-rays irradiated from the irradiation unit 10 reach the center seal unit 120 without being blocked by the packaging unit 110, and thus the X-rays transmitted through the center seal unit 120. Can be detected by the first detection portion 21.
  • sticker part 120 can be test
  • FIGS. 4A to 4C are schematic views showing a configuration example of an inspection apparatus according to the second embodiment.
  • the configuration example shown in FIG. 4A is an example in which the detection unit 20 includes one line sensor LS10.
  • One line sensor LS10 includes a first detection portion 21 and a second detection portion 22. That is, the detection area of one line sensor LS10 is divided into the first detection portion 21 and the second detection portion 22 and used. According to such a configuration, the foreign matter inspection of both the center seal part 120 and the packaging part 110 can be performed by one line sensor LS10.
  • the detection unit 20 includes three line sensors LS1, LS2, and LS3.
  • the X-ray source 12 of the irradiation unit 10 is arranged away from the reference line L.
  • the line sensor LS1 is disposed in the vicinity of the center seal portion 120 and detects X-rays transmitted through the center seal portion 120.
  • the line sensor LS2 is disposed in the vicinity of the packaging unit 110 and in the height direction D3.
  • the line sensor LS3 is disposed in the vicinity of the packaging unit 110 and in the width direction D2.
  • X-rays irradiated from the irradiation unit 10 are irradiated toward the package 100 from a position away from the reference line L.
  • the X-ray irradiation area covers a wide range from the center seal part 120 to the packaging part 110.
  • sticker part 120 in the line sensor LS1 can be detected, and the X-rays which permeate
  • the line sensors LS2 and LS3 are arranged in an L shape along the packaging part 110, X-rays transmitted through a wide range of the packaging part 110 can be detected.
  • 4C is an example in which the detection unit 20 includes one line sensor LS20.
  • the X-ray source 12 of the irradiation unit 10 is arranged away from the reference line L.
  • the line sensor LS20 is disposed obliquely with respect to each of the height direction D3 and the width direction D2.
  • One line sensor LS20 includes a first detection portion 21 and a second detection portion 22.
  • the package 100 is irradiated with X-rays obliquely from a position away from the reference line L.
  • sticker part 120 is detected by the 1st detection part 21 of line sensor LS20, and the X-ray which permeate
  • the inspection apparatus realizes high-accuracy inspection by canceling noise included in the detection data of the detection unit 20 in the inspection apparatus of the first embodiment or the second embodiment.
  • parts that have already been described are assigned the same reference numerals and description thereof is omitted.
  • the inspection apparatus includes a second detection unit 20 ⁇ / b> A in addition to the configuration of the inspection apparatus of the first embodiment or the second embodiment.
  • 20 A of 2nd detection parts are provided in the position adjacent to the detection part 20 along the conveyance direction Dt so that the X-ray from the irradiation part 10 may not inject into a detection element.
  • “so that X-rays from the irradiation unit 10 do not enter the detection element” means, for example, that the second detection unit 20A is outside the range of the X-ray irradiation region by the irradiation unit 10 (that is, the region where X-rays are not irradiated). ).
  • the shielding member which shields an X-ray so that the X-ray from the irradiation part 10 may not inject into a detection element irrespective of the arrangement position of 2nd detection part 20A inside or outside an X-ray irradiation area
  • the accuracy of noise cancellation increases as the second detection unit 20A is closer to the detection unit 20. For this reason, it is preferable that the second detection unit 20 ⁇ / b> A is disposed at a position close to the detection unit 20.
  • the second detection unit 20A Since the second detection unit 20A is in a position where the X-rays from the irradiation unit 10 are not irradiated, the X-rays detected by the second detection unit 20A are not the X-rays from the irradiation unit 10 transmitted through the package 100. It is considered that the noise is caused by scattering or disturbance.
  • the signal based on the X-ray detected by the second detection unit 20A is accumulated in the memory 210 and sent to the signal processing unit 201 of the control unit 200 at a desired timing.
  • the signal processing unit 201 processes the signal sent from the memory 210 to form an image signal.
  • the signal processing unit 201 subtracts the signal based on the X-ray detected by the second detection unit 20A from the signal based on the X-ray detected by the detection unit 20 to obtain a line signal in which noise is canceled. Then, a predetermined amount of line signals from which noise has been canceled is combined to form a two-dimensional image.
  • the two-dimensional image is output to the display unit 220 that is a monitor.
  • the inspection apparatus can obtain a two-dimensional image with reduced noise.
  • noise cancellation may be performed on the analog signals output from the detection unit 20 and the second detection unit 20A, or may be performed after the analog signal is converted into a digital signal by an AD converter.
  • the inspection apparatus according to the fourth embodiment realizes highly accurate inspection by canceling noise included in the detection data of the detection unit 20.
  • parts that have already been described are assigned the same reference numerals and description thereof is omitted.
  • the inspection apparatus according to the fourth embodiment has the same configuration as the inspection apparatus of the first embodiment or the second embodiment.
  • the line sensor LS of the detection unit 20 generates an X-ray dose of 100 at an imaging timing each time the detection unit 20 moves by the width W of the detection element.
  • % Exposure amount, and the X-ray dose is different from the imaging timing (for example, 0%) at the noise detection timing that is out of phase from the imaging timing by half the width W of the detection element in the transport direction.
  • the exposure amount at the imaging timing and the noise detection timing is not limited to the above, and the exposure amount may be different between the two. Note that the phase difference between the noise detection timing and the imaging timing may be other than half the width W of the detection element in the transport direction.
  • Signals based on the X-rays detected by the detection unit 20 are accumulated in the memory 210, and are controlled at a desired timing.
  • the signal processing unit 201 processes the signal sent from the memory 210 to form an image signal. At this time, the signal processing unit 201 sets a line signal in which noise is canceled by subtracting a signal based on the X-ray detected at the noise detection timing from a signal based on the X-ray detected at the imaging timing.
  • the imaging timing and the noise detection timing have a phase difference corresponding to one half of the width of the detection element in the transport direction, when noise is canceled, calculation based on this phase difference is performed. It is better to cancel the noise.
  • the noise corresponding to the Nth line may be an average of signals based on X-rays detected at two noise detection timings shifted by a half phase from the Nth line.
  • the signal processing unit 201 combines a predetermined amount of signal line signals from which noise has been canceled as described above to form a two-dimensional image.
  • the two-dimensional image is output to the display unit 220 that is a monitor.
  • the inspection apparatus according to the fifth embodiment realizes high-accuracy inspection by canceling noise included in the detection data of the detection unit 20, as in the inspection apparatuses according to the third and fourth embodiments. .
  • parts that have already been described are assigned the same reference numerals and description thereof is omitted.
  • the line sensor LS included in the detection unit 20 includes an imaging detection element 23 and a noise detection element 24.
  • Others have the same configuration as the inspection apparatus of the first embodiment or the second embodiment.
  • noise detection is performed such that a part of the plurality of detection elements arranged in a straight line in the line sensor of the detection unit 20 is shielded so that X-rays do not strike. It is assumed that the element 24 (a portion indicated by shading in the drawing).
  • the element excluding the noise detection element 24 is the imaging detection element 23.
  • the imaging detection element 23 and the noise detection element 24 may be alternately arranged in a linear arrangement direction (a direction orthogonal to the conveyance direction).
  • the ratio (in area or number of elements) between the imaging detection element 23 and the noise detection element 24 may be, for example, 1: 1, but is not necessarily limited thereto.
  • a signal based on the X-rays detected by the detection unit 20 (that is, a signal based on the X-rays detected by the imaging detection element 23 and a signal based on the X-rays detected by the noise detection element 24) is accumulated in the memory 210 and is stored in a desired manner. It is sent to the signal processing unit 201 of the control unit 200 at timing. The signal processing unit 201 processes the signal sent from the memory 210 to form an image signal. At this time, the signal processing unit 201 subtracts the signal based on the X-ray detected by the noise detection element 24 from the signal based on the X-ray detected by the imaging detection element 23 to obtain a line signal in which noise is canceled.
  • the imaging detection element 23 and the noise detection element 24 have different positions in the arrangement direction of the detection elements of the line sensor. Therefore, when canceling noise, an operation based on the difference between the positions is performed. It is better to cancel the noise.
  • the noise corresponding to a certain imaging detection element 23 may be an average of signals based on X-rays detected by two noise detection elements 24 adjacent to the imaging detection element 23.
  • the signal processing unit 201 combines a predetermined amount of signal line signals from which noise has been canceled as described above to form a two-dimensional image.
  • the two-dimensional image is output to the display unit 220 that is a monitor. With such a configuration, the inspection apparatus of the fifth embodiment can obtain a two-dimensional image with reduced noise.
  • FIG. 8 is a schematic diagram illustrating an application example of the inspection apparatus according to the present embodiment.
  • the inspection apparatus 1 according to the present embodiment is provided in a portion where the sheet material ST is formed in a cylindrical shape and the center seal portion 120 is thermocompression bonded.
  • the sheet material ST is bent into a cylindrical shape while being fed in the transport direction Dt, and both side end portions STS facing each other are closed.
  • both side end portions STS overlapped between the pair of heating rollers HR are fed, the both side end portions STS are thermocompression-bonded to form the center seal portion 120.
  • a guide plate GP is provided on the downstream side in the conveying direction Dt of the heating roller HR.
  • the center seal part 120 that has been subjected to thermocompression bonding is sent along the guide plate GP, whereby the center seal part 120 is gradually tilted and eventually pressed along the surface of the packaging part 110.
  • the center seal portion 120 is continuously formed in the transport direction Dt of the sheet material ST, and the package 100 is formed.
  • the inspection apparatus 1 according to the present embodiment is provided between a position where the center seal portion 120 is formed by the pair of heating rollers HR and a position where the center seal portion 120 is tilted by the guide plate GP.
  • the center seal part 120 is raised with respect to the packaging part 110.
  • the irradiation unit 10 and the detection unit 20 are arranged to face each other in the width direction D2 with the center seal portion 120 therebetween.
  • the center seal portion 120 can be irradiated with X-rays in the width direction D2 before being tilted. Accordingly, X-rays that pass through the center seal portion 120 without overlapping with the packaging portion 110 can be detected, and foreign matter in the center seal portion 120 can be inspected.
  • the package 100 When forming the center seal part 120 by thermocompression bonding, the package 100 is continuously sent in the length direction D1. At this time, even if a foreign object is caught in the center seal portion 120, the foreign object can be accurately detected by the inspection apparatus 1 according to the present embodiment.
  • the inspection apparatus 1 According to the inspection apparatus 1 according to the present embodiment, it is possible to accurately inspect the foreign matter at the center seal portion in the package.

Abstract

Provided is an inspection device capable of accurately inspecting a foreign matter on a center sealing portion in a package. The present invention is an inspection device (1) for inspecting a package (100) having a package portion (110) obtained by forming a sheet material into a tubular shape, and a center sealing portion (120) provided at a closing part of the package portion. The inspection device comprises: an irradiation unit (10) for irradiating the package with a detection wave; and a detection unit (20) for detecting the detection wave transmitted through the package, the inspection device being characterized in that the detection unit has a first detection part (21) for detecting the detection wave transmitted through the center sealing portion, and the first detection part has a detection region in which the detection wave irradiated from the irradiation unit is not blocked by the package portion (110).

Description

検査装置Inspection device
　本発明は、対象物に検出波を照射して異物等の検査を行う検査装置に関する。 The present invention relates to an inspection apparatus that inspects a foreign object by irradiating a target with a detection wave.
　製品の製造から梱包、出荷に至るまで、各工程では検査対象となる異物等の種類（材料、大きさなど）や判定に適した検査方法によって製品の検査を行っている。このうち製品を非破壊で検査できるＸ線検査装置では、対象物を透過したＸ線を検出することで、外側からは見えない内部の異物等を検査することができる。 From product manufacture to packaging and shipment, in each process, products are inspected by the inspection method suitable for the type (material, size, etc.) of foreign matter to be inspected and the determination. Among these, an X-ray inspection apparatus capable of inspecting a product non-destructively can inspect foreign matters and the like that cannot be seen from the outside by detecting X-rays transmitted through the object.
　特許文献１には、検査対象物であるワークを搬送ベルトで搬送しながらＸ線を照射して異物検査を行うＸ線検査装置が開示されている。また、特許文献２には、食品などの内容物が透光性の包装シートで包まれた包装体の画像を取得し、シール部に異物が噛み込まれているか否かを判別できる包装体の検査装置が開示されている。 Patent Document 1 discloses an X-ray inspection apparatus that performs foreign object inspection by irradiating X-rays while transporting a workpiece, which is an inspection object, with a transport belt. Patent Document 2 discloses a package that can acquire an image of a package in which contents such as food are wrapped in a translucent packaging sheet, and can determine whether or not a foreign object is caught in the seal portion. An inspection device is disclosed.
特開２０１４－２１９２６７号公報JP 2014-219267 A 特開２０１３－００７５９７号公報JP 2013-007597 A
　包装体に内容物を収容して出荷する製品の異物検査では、内容物が収容された状態での異物の検査に加え、包装体に対する異物の検査も必要である。このような包装体の異物検査では、包装体のシール部への異物の噛み込みを的確に検査することが要求される。包装体のシール部には、シート材を筒状にして閉じ合わされた部分を熱圧着したセンターシール部と、筒状の開口端をシールしたエンドシール部とがある。 In the foreign substance inspection of products shipped with the contents contained in the package, in addition to the inspection of foreign substances in the state in which the contents are accommodated, the inspection of foreign substances on the package is also necessary. In such a foreign matter inspection of the package, it is required to accurately inspect the foreign matter biting into the seal portion of the package. The seal portion of the package includes a center seal portion in which a sheet material is closed in a cylindrical shape, and a end seal portion in which a cylindrical opening end is sealed.
　このシール部のうち、センターシール部は包装体の中央部に設けられているため、センターシール部の異物の噛み込みを検査しようとした場合、内容物を収容する包装部と重なることになる。したがって、Ｘ線検査によって映し出された画像から、包装部の異物とセンターシール部の異物とを切り分けることが困難となる。 Of these seal portions, the center seal portion is provided in the central portion of the package, and therefore, when attempting to inspect the biting of foreign matter in the center seal portion, it overlaps with the package portion containing the contents. Therefore, it is difficult to separate the foreign matter in the packaging portion and the foreign matter in the center seal portion from the image projected by the X-ray inspection.
　本発明は、包装体におけるセンターシール部の異物を的確に検査することができる検査装置を提供することを目的とする。 An object of the present invention is to provide an inspection device capable of accurately inspecting a foreign matter at a center seal portion in a package.
　上記課題を解決するため、本発明は、シート材を筒状にした包装部と、包装部の閉じ合わせ部に設けられたセンターシール部とを有する包装体を検査する検査装置であって、包装体に向けて検出波を照射する照射部と、包装体を透過する検出波を検出する検出部と、を備え、検出部は、センターシール部を透過する検出波を検出する第１検出部分を有し、第１検出部分は、照射部から照射された検出波が包装部で遮られない検出領域を有することを特徴とする。 In order to solve the above-mentioned problems, the present invention is an inspection apparatus for inspecting a package body having a packaging portion in which a sheet material is formed into a cylindrical shape and a center seal portion provided in a closing portion of the packaging portion, An irradiation unit that irradiates a detection wave toward the body and a detection unit that detects a detection wave that passes through the package, and the detection unit includes a first detection portion that detects the detection wave that passes through the center seal portion. And the first detection part has a detection region in which the detection wave emitted from the irradiation part is not blocked by the packaging part.
　このような構成によれば、照射部から照射された検出波が包装部で遮られずにセンターシール部に到達し、センターシール部を透過した検出波を検出部の第１検出部分で検出することができる。これにより、包装部や包装部内の収容物に影響を受けずにセンターシール部の異物を検査することができる。 According to such a structure, the detection wave irradiated from the irradiation part reaches the center seal part without being blocked by the packaging part, and the detection wave transmitted through the center seal part is detected by the first detection part of the detection part. be able to. Thereby, the foreign material of a center seal part can be test | inspected, without being influenced by the packaging part and the accommodation in a packaging part.
　本発明の検査装置において、照射部と第１検出部分との間にセンターシール部が配置されていてもよい。これにより、照射部と第１検出部分とを結ぶ検出波の照射領域にセンターシール部が配置され、検出波によってセンターシール部の異物を検査することができる。 In the inspection apparatus of the present invention, a center seal part may be disposed between the irradiation part and the first detection part. Thereby, a center seal part is arrange | positioned in the irradiation area | region of the detection wave which connects an irradiation part and a 1st detection part, and the foreign material of a center seal part can be test | inspected with a detection wave.
　本発明の検査装置において、照射部における検出波の照射源は、センターシール部の付け根と同じ高さ、または付け根よりもセンターシール部の先端側に配置されていてもよい。これにより、照射部と第１検出部分とを結ぶ検出波の照射領域に包装部が含まれることを回避することができる。 In the inspection apparatus of the present invention, the irradiation source of the detection wave in the irradiation unit may be arranged at the same height as the base of the center seal part or at the tip side of the center seal part from the base. Thereby, it can avoid that a packaging part is included in the irradiation area | region of the detection wave which connects an irradiation part and a 1st detection part.
　本発明の検査装置において、検出部は、包装部を透過する検出波を検出する第２検出部分を有し、第２検出部分は、照射部から照射された検出波がセンターシール部で遮られない検出領域を有していてもよい。これにより、照射部から照射された検出波がセンターシール部で遮られずに包装部に到達し、包装部を透過した検出波を検出部の第２検出部分で検出することができる。 In the inspection apparatus of the present invention, the detection unit has a second detection part that detects a detection wave that passes through the packaging part, and the detection wave emitted from the irradiation part is blocked by the center seal part in the second detection part. May have no detection area. Thereby, the detection wave irradiated from the irradiation part reaches the packaging part without being blocked by the center seal part, and the detection wave transmitted through the packaging part can be detected by the second detection part of the detection part.
　本発明の検査装置において、センターシール部の延びる方向における第１検出部分の位置は、第２検出部分の位置と相違していてもよい。これにより、第１検出部分および第２検出部分のいずれか一方が他方の検出領域の邪魔になることを防ぐことができる。 In the inspection apparatus of the present invention, the position of the first detection portion in the extending direction of the center seal portion may be different from the position of the second detection portion. Thereby, it is possible to prevent any one of the first detection portion and the second detection portion from interfering with the other detection region.
　本発明の検査装置において、検出部は、直線状に複数の検出素子が並ぶラインセンサを有し、第１検出部分および第２検出部分はラインセンサに含まれていてもよい。１つのラインセンサによってセンターシール部および包装部の両方の異物検査を行うことができる。 In the inspection apparatus of the present invention, the detection unit may include a line sensor in which a plurality of detection elements are arranged in a straight line, and the first detection portion and the second detection portion may be included in the line sensor. A single line sensor can perform foreign matter inspection of both the center seal portion and the packaging portion.
　本発明の検査装置において、検出部で検出した検出波に基づく信号を処理する信号処理部と、信号処理部で処理した信号に基づき異物の有無を判定する判定部と、をさらに備えていてもよい。これにより、検出部で検出した検出波に基づいて異物の有無を判定することができる。 The inspection apparatus of the present invention may further include a signal processing unit that processes a signal based on the detection wave detected by the detection unit, and a determination unit that determines the presence or absence of a foreign substance based on the signal processed by the signal processing unit. Good. Thereby, the presence or absence of a foreign object can be determined based on the detection wave detected by the detection unit.
　本発明の検査装置は、照射部からの検出波が入射しないように設けられたノイズ検出部をさらに備えるとよく、信号処理部は、検出部で検出した検出波に基づく信号からノイズ検出部で検出した検出波に基づく信号を差し引くことによりノイズをキャンセルした信号を得るとよい。このようにすれば、Ｓ／Ｎ比の優れた信号を得ることができる。ノイズ検出部は、照射部からの検出波が照射されない位置に配置されるとよい。また、ノイズ検出部に照射部からの検出波が入射しないよう遮蔽する遮蔽部材をさらに備えてもよい。なお、ノイズのキャンセルはアナログ信号に対して行ってもよいし、検出波のアナログ信号をＡＤ変換機によりデジタル信号としてから行ってもよい。 The inspection apparatus of the present invention may further include a noise detection unit provided so that a detection wave from the irradiation unit does not enter, and the signal processing unit is a noise detection unit from a signal based on the detection wave detected by the detection unit. It is preferable to obtain a signal in which noise is canceled by subtracting a signal based on the detected detection wave. In this way, a signal with an excellent S / N ratio can be obtained. The noise detection unit may be arranged at a position where the detection wave from the irradiation unit is not irradiated. Moreover, you may further provide the shielding member which shields so that the detection wave from an irradiation part may inject into a noise detection part. Noise cancellation may be performed on an analog signal, or may be performed after an analog signal of a detection wave is converted into a digital signal by an AD converter.
　本発明の検査装置において、検出部は、直線状に複数の検出素子が並ぶラインセンサを有するとよい。このラインセンサは、検出素子の直線状の配列方向に直交する搬送方向に搬送される包装体を透過した検査波を、搬送方向における検出素子の幅分だけ搬送方向に移動する都度の撮像タイミングで第１の露光量で検出し、撮像タイミングから位相がずれたノイズ検出タイミングで、撮像タイミングとは異なる第２の露光量で検出するとよく、これに伴い、信号処理部は、撮像タイミングで検出した検出波に基づく信号からノイズ検出タイミングで検出した検出波に基づく信号を差し引くことによりノイズをキャンセルした信号を得るとよい。このようにすれば、Ｓ／Ｎ比の優れた信号を得ることができる。 In the inspection apparatus of the present invention, the detection unit may include a line sensor in which a plurality of detection elements are arranged in a straight line. This line sensor has an imaging timing each time an inspection wave that has passed through a package conveyed in a conveyance direction orthogonal to the linear arrangement direction of detection elements moves in the conveyance direction by the width of the detection element in the conveyance direction. It is preferable to detect at the first exposure amount and detect at the second exposure amount different from the imaging timing at the noise detection timing shifted in phase from the imaging timing. Accordingly, the signal processing unit detects at the imaging timing. It is preferable to obtain a signal in which noise is canceled by subtracting the signal based on the detection wave detected at the noise detection timing from the signal based on the detection wave. In this way, a signal with an excellent S / N ratio can be obtained.
　本発明の検査装置において、ラインセンサを構成する検出素子少なくとも一部は、検出波が遮蔽されたノイズ検出素子であり、ラインセンサを構成する検出素子の少なくとも他の一部は、検出波が遮蔽されない撮像用検出素子であるように構成するとよく、これに伴い、信号処理部は、撮像用検出素子で検出した検出波に基づく信号からノイズ検出素子で検出した検出波に基づく信号を差し引くことによりノイズをキャンセルした信号を得るとよい。このようにすれば、Ｓ／Ｎ比の優れた信号を得ることができる。 In the inspection apparatus of the present invention, at least a part of the detection elements constituting the line sensor is a noise detection element in which the detection wave is shielded, and at least another part of the detection elements constituting the line sensor is shielded by the detection wave. In this case, the signal processing unit may subtract the signal based on the detection wave detected by the noise detection element from the signal based on the detection wave detected by the imaging detection element. It is better to obtain a signal with canceled noise. In this way, a signal with an excellent S / N ratio can be obtained.
　本発明の検査装置において、検出部で検出した検出波に基づく画像を表示する表示部をさらに備えていてもよい。これにより、表示部に表示される画像によって異物の状態を把握することができる。 The inspection apparatus of the present invention may further include a display unit that displays an image based on the detection wave detected by the detection unit. Thereby, the state of the foreign matter can be grasped from the image displayed on the display unit.
　本発明によれば、包装体におけるセンターシール部の異物を的確に検査することができる検査装置を提供することが可能になる。 According to the present invention, it is possible to provide an inspection apparatus capable of accurately inspecting the foreign matter at the center seal portion in the package.
（ａ）および（ｂ）は、第１実施形態に係る検査装置の構成を例示する模式図である。(A) And (b) is a schematic diagram which illustrates the structure of the inspection apparatus which concerns on 1st Embodiment. （ａ）～（ｃ）は、照射部および検出部の配置を説明する模式図である。(A)-(c) is a schematic diagram explaining arrangement | positioning of an irradiation part and a detection part. 本実施形態に係る検査装置のブロック構成図である。It is a block block diagram of the inspection apparatus which concerns on this embodiment. （ａ）～（ｃ）は、第２実施形態に係る検査装置の構成を例示する模式図である。(A)-(c) is a schematic diagram which illustrates the structure of the inspection apparatus which concerns on 2nd Embodiment. 第３実施形態に係る検査装置の構成を例示する模式図である。It is a schematic diagram which illustrates the structure of the inspection apparatus which concerns on 3rd Embodiment. 第４実施形態に係る検査装置における撮像及びノイズ検出のタイミングを模式的に示す図である。It is a figure which shows typically the timing of the imaging and noise detection in the test | inspection apparatus which concerns on 4th Embodiment. 第５実施形態に係る検査装置で用いられるラインセンサの構造を示す模式図である。It is a schematic diagram which shows the structure of the line sensor used with the inspection apparatus which concerns on 5th Embodiment. 本実施形態に係る検査装置の適用例を示す模式図である。It is a schematic diagram which shows the example of application of the test | inspection apparatus which concerns on this embodiment.
（第１実施形態）
　以下、本発明の実施形態を図面に基づいて説明する。なお、以下の説明では、同一の部材には同一の符号を付し、一度説明した部材については適宜その説明を省略する。 (First embodiment)
Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, the same members are denoted by the same reference numerals, and the description of the members once described is omitted as appropriate.
（装置構成）
　図１（ａ）および（ｂ）は、本実施形態に係る検査装置の構成を例示する模式図である。
　図１（ａ）には斜視図が示され、図１（ｂ）にはセンターシール部の延びる方向から見た断面図が示される。
　本実施形態に係る検査装置１は、検出波によって包装体１００を検査する装置である。検出波には、Ｘ線、紫外線、可視光線、赤外線、テラヘルツ波などが含まれる。本実施形態では、検出波としてＸ線を使用するＸ線検査装置を例とする。包装体１００は、シート材を筒状にした包装部１１０と、包装部１１０の閉じ合わせ部に設けられたセンターシール部１２０とを有する。シート材としては、ＣＰＰ（Cast Polypropylene）、ＰＥ（Polyethylene）、アルミ蒸着ＰＥＴ（Polyethylene terephthalate）などを積層したラミネートフィルムなどが用いられる。 (Device configuration)
1A and 1B are schematic views illustrating the configuration of an inspection apparatus according to this embodiment.
FIG. 1A shows a perspective view, and FIG. 1B shows a cross-sectional view seen from the direction in which the center seal portion extends.
The inspection apparatus 1 according to the present embodiment is an apparatus that inspects the package 100 with a detection wave. The detection waves include X-rays, ultraviolet rays, visible rays, infrared rays, terahertz waves, and the like. In this embodiment, an X-ray inspection apparatus that uses X-rays as detection waves is taken as an example. The package 100 includes a packaging part 110 in which a sheet material is formed into a cylindrical shape, and a center seal part 120 provided at a closing part of the packaging part 110. As the sheet material, a laminated film in which CPP (Cast Polypropylene), PE (Polyethylene), aluminum-deposited PET (Polyethylene terephthalate), or the like is laminated is used.
　包装体１００は、このようなシート材を筒状にして、閉じ合わせ部分を熱圧着したものである。この包装体１００において、筒状の内部に収容物を収容する部分が包装部１１０、包装部１１０の中央部において閉じ合わせて熱圧着した部分がセンターシール部１２０である。 The package 100 is obtained by making such a sheet material into a cylindrical shape and thermocompression-bonding the closing portion. In this package 100, the part that accommodates the contents in the cylindrical shape is the packaging part 110, and the part that is closed and thermocompression bonded at the center part of the packaging part 110 is the center seal part 120.
　なお、本実施形態において、包装体１００のセンターシール部１２０が延びる方向を長さ方向Ｄ１、長さ方向Ｄ１と直交し包装部１１０とセンターシール部１２０とが重ならない方向を幅方向Ｄ２、長さ方向Ｄ１および幅方向Ｄ２と直交する方向を高さ方向Ｄ３と言うことにする。包装体１００は、長さ方向Ｄ１に所定の大きさで切断されていても、長さ方向Ｄ１に連続しているものであってもよい。 In the present embodiment, the direction in which the center seal portion 120 of the package 100 extends is the length direction D1, and the direction perpendicular to the length direction D1 and where the package portion 110 and the center seal portion 120 do not overlap is the width direction D2. A direction orthogonal to the length direction D1 and the width direction D2 is referred to as a height direction D3. The package 100 may be cut in a predetermined size in the length direction D1 or may be continuous in the length direction D1.
　検査装置１は、包装体１００に向けて検出波の例であるＸ線を照射する照射部１０と、包装体１００を透過するＸ線を検出する検出部２０と、を備える。照射部１０および検出部２０は、包装体１００を間にして幅方向Ｄ２に対向するように配置される。 The inspection apparatus 1 includes an irradiation unit 10 that irradiates an X-ray that is an example of a detection wave toward the package 100, and a detection unit 20 that detects X-rays that pass through the package 100. The irradiation unit 10 and the detection unit 20 are arranged so as to face the width direction D2 with the packaging body 100 therebetween.
　照射部１０は、筐体１１内に設けられるＸ線源（Ｘ線の照射源）１２と、Ｘ線源１２から放出されるＸ線を絞るスリット１３とを有する。Ｘ線源１２から放出されたＸ線は、スリット１３によって所定の範囲に絞られ、包装体１００に向けて照射される。 The irradiation unit 10 includes an X-ray source (X-ray irradiation source) 12 provided in the housing 11 and a slit 13 for narrowing X-rays emitted from the X-ray source 12. X-rays emitted from the X-ray source 12 are narrowed down to a predetermined range by the slit 13 and irradiated toward the package 100.
　検出部２０は、照射部１０から照射され、包装体１００を透過するＸ線を検出する部分である。検出部２０は、複数の検出素子（例えば、ＣＭＯＳセンサ）が直線状に並ぶラインセンサを含む。本実施形態では、ラインセンサを高さ方向に配置して検出部２０による検出領域を高さ方向Ｄ３とする。そして、照射部１０および検出部２０と包装体１００とを長さ方向Ｄ１に相対的に移動させることで、包装体１００を長さ方向Ｄ１に連続的に検査する。なお、照射部１０および検出部２０と包装体１００との相対的な移動は、通常、搬送装置などで包装体１００を長さ方向Ｄ１に移動させることにより実現される。 The detection unit 20 is a part that detects X-rays irradiated from the irradiation unit 10 and transmitted through the package 100. The detection unit 20 includes a line sensor in which a plurality of detection elements (for example, CMOS sensors) are arranged in a straight line. In the present embodiment, the line sensor is arranged in the height direction, and the detection region by the detection unit 20 is set as the height direction D3. And the package 100 is continuously test | inspected to the length direction D1 by moving the irradiation part 10, the detection part 20, and the package 100 relatively to the length direction D1. In addition, the relative movement of the irradiation part 10 and the detection part 20, and the package 100 is normally implement | achieved by moving the package 100 to the length direction D1 with a conveying apparatus etc.
　本実施形態において、検出部２０は、センターシール部１２０を透過するＸ線を検出する第１検出部分２１を有する。検出部２０は、包装部１１０を透過するＸ線を検出する第２検出部分２２を有していてもよい。 In the present embodiment, the detection unit 20 includes a first detection portion 21 that detects X-rays that pass through the center seal portion 120. The detection unit 20 may include a second detection portion 22 that detects X-rays that pass through the packaging unit 110.
　第１検出部分２１はラインセンサＬＳ１に含まれ、第２検出部分２２はラインセンサＬＳ２に含まれる。ラインセンサＬＳ１およびラインセンサＬＳ２のそれぞれは、複数の検出素子が高さ方向Ｄ３に並ぶように配置される。 The first detection portion 21 is included in the line sensor LS1, and the second detection portion 22 is included in the line sensor LS2. Each of the line sensor LS1 and the line sensor LS2 is arranged such that a plurality of detection elements are arranged in the height direction D3.
　第１検出部分２１は、照射部１０から照射されたＸ線が包装部１１０で遮られない検出領域を有する。また、第２検出部分２２は、照射部１０から照射されたＸ線がセンターシール部１２０で遮られない検出領域を有する。 The first detection portion 21 has a detection region in which the X-rays irradiated from the irradiation unit 10 are not blocked by the packaging unit 110. Further, the second detection portion 22 has a detection region where the X-ray irradiated from the irradiation unit 10 is not blocked by the center seal unit 120.
　本実施形態では、図１（ｂ）に示すように、照射部１０におけるＸ線源１２が、センターシール部１２０の付け根と同じ高さ、または付け根よりもセンターシール部１２０の先端側に配置されている。例えば、センターシール部１２０の付け根の位置における幅方向Ｄ２の線を基準線Ｌとした場合、Ｘ線源１２は、基準線Ｌと同じ高さ、または基準線Ｌに対して包装部１１０とは反対側に配置される。 In the present embodiment, as shown in FIG. 1B, the X-ray source 12 in the irradiation unit 10 is disposed at the same height as the base of the center seal part 120, or at the tip side of the center seal part 120 from the base. ing. For example, when the line in the width direction D2 at the base position of the center seal part 120 is the reference line L, the X-ray source 12 is the same height as the reference line L or the packaging part 110 with respect to the reference line L. Located on the opposite side.
　包装体１００が搬送装置などで搬送される場合、基準線Ｌは例えば搬送装置の搬送面に沿った幅方向Ｄ２の線となる。この場合、Ｘ線源１２は、搬送面の位置と同じ高さか、搬送面よりも下側に配置される。このようなＸ線源１２の配置によって、照射部１０と第１検出部分２１とを結ぶＸ線の照射領域に包装部１１０が含まれることを回避することができる。 When the package 100 is transported by a transport device or the like, the reference line L is, for example, a line in the width direction D2 along the transport surface of the transport device. In this case, the X-ray source 12 is disposed at the same height as the position of the transport surface or below the transport surface. By such an arrangement of the X-ray source 12, it can be avoided that the packaging unit 110 is included in the X-ray irradiation region connecting the irradiation unit 10 and the first detection portion 21.
　つまり、Ｘ線源１２から検出部２０までのＸ線の照射領域のうち、基準線Ｌよりもセンターシール部１２０側の照射領域Ｓ１には包装部１１０が含まれない。したがって、照射領域Ｓ１のＸ線を検出する第１検出部分２１において、センターシール部１２０と包装部１１０とが重ならず、第１検出部分２１では包装部１１０に影響を受けずにセンターシール部１２０のみを透過するＸ線を検出することができる。 That is, in the X-ray irradiation region from the X-ray source 12 to the detection unit 20, the irradiation region S <b> 1 closer to the center seal portion 120 than the reference line L does not include the packaging unit 110. Therefore, in the first detection portion 21 that detects X-rays in the irradiation region S1, the center seal portion 120 and the packaging portion 110 do not overlap each other, and the center detection portion 21 is not affected by the packaging portion 110 in the first detection portion 21. X-rays that pass through only 120 can be detected.
　一方、Ｘ線源１２から検出部２０までのＸ線の照射領域のうち、基準線Ｌよりも包装部１１０側の照射領域Ｓ２にはセンターシール部１２０が含まれない領域が構成される。したがって、照射領域Ｓ２のＸ線を検出する第２検出部分２２において、センターシール部１２０と包装部１１０とが重ならず、センターシール部１２０に影響を受けずに包装部１１０のみを透過するＸ線を検出することができる。 On the other hand, in the X-ray irradiation region from the X-ray source 12 to the detection unit 20, the irradiation region S2 closer to the packaging unit 110 than the reference line L includes a region that does not include the center seal portion 120. Therefore, in the second detection portion 22 that detects X-rays in the irradiation region S2, the center seal portion 120 and the packaging portion 110 do not overlap with each other, and only the packaging portion 110 is transmitted without being affected by the center seal portion 120. Lines can be detected.
　ここで、Ｘ線源１２が基準線Ｌの延長上に配置されていると、照射領域Ｓ２の全てにおいてセンターシール部１２０が含まれない。しかし、Ｘ線源１２が基準線Ｌよりもセンターシール部１２０側で基準線Ｌから離れるほど、照射領域Ｓ２にセンターシール部１２０が多く含まれることになる。この場合、第２検出部分２２の検出領域のうち、センターシール部１２０を含む領域を、信号処理で除外すればよい。 Here, when the X-ray source 12 is arranged on the extension of the reference line L, the center seal portion 120 is not included in the entire irradiation region S2. However, the farther the X-ray source 12 is from the reference line L on the side of the center seal portion 120 than the reference line L, the more center seal portions 120 are included in the irradiation region S2. In this case, a region including the center seal portion 120 in the detection region of the second detection portion 22 may be excluded by signal processing.
　また、第１検出部分２１はセンターシール部１２０の近傍に配置されていることが望ましい。同様に、第２検出部分２２は包装部１１０の近傍に配置されていることが望ましい。対象物を透過するＸ線を対象物の近傍で検出すれば外乱の影響を受けにくく、精度の高い異物検出を行うことができる。 Also, it is desirable that the first detection portion 21 is disposed in the vicinity of the center seal portion 120. Similarly, it is desirable that the second detection portion 22 is disposed in the vicinity of the packaging unit 110. If X-rays that pass through the object are detected in the vicinity of the object, it is difficult to be affected by disturbances and highly accurate foreign object detection can be performed.
　図２（ａ）～（ｃ）は、照射部および検出部の配置を説明する模式図である。
　なお、図２（ａ）～（ｃ）では、センターシール部１２０が包装部１１０の上側に設けられている場合を例示している。また、図２（ａ）～（ｃ）では、センターシール部１２０に加え、エンドシール部１３０を有する包装体１００が示されている。エンドシール部１３０は、筒状の包装部１１０の開口端を幅方向Ｄ２に熱圧着した部分である。 2A to 2C are schematic views for explaining the arrangement of the irradiation unit and the detection unit.
2A to 2C illustrate a case where the center seal portion 120 is provided on the upper side of the packaging portion 110. FIG. 2A to 2C show a package 100 having an end seal portion 130 in addition to the center seal portion 120. FIG. The end seal part 130 is a part obtained by thermocompression bonding of the open end of the cylindrical packaging part 110 in the width direction D2.
　図２（ａ）に示すように、照射部１０と検出部２０とは、包装体１００の幅方向Ｄ２に互いに対向するよう配置される。検出部２０のうち第１検出部分２１と照射部１０との間にはセンターシール部１２０が配置され、第２検出部分２２と照射部１０との間には包装部１１０が配置される。 2A, the irradiation unit 10 and the detection unit 20 are arranged to face each other in the width direction D2 of the package 100. A center seal part 120 is disposed between the first detection part 21 and the irradiation part 10 in the detection part 20, and a packaging part 110 is disposed between the second detection part 22 and the irradiation part 10.
　図２（ｂ）に示す例では、包装体１００の長さ方向Ｄ１における第１検出部分２１の位置が、第２検出部分２２の位置と相違している。これにより、照射部１０から照射されるＸ線の照射領域Ｓ２には第１検出部分２１が含まれず、照射領域Ｓ１には第２検出部分２２が含まれない。したがって、第１検出部分２１および第２検出部分２２のいずれか一方が他方の検出領域の邪魔になることを防ぐことができる。 2B, the position of the first detection portion 21 in the length direction D1 of the package 100 is different from the position of the second detection portion 22. In the example shown in FIG. Accordingly, the first detection portion 21 is not included in the X-ray irradiation region S2 irradiated from the irradiation unit 10, and the second detection portion 22 is not included in the irradiation region S1. Therefore, it is possible to prevent any one of the first detection portion 21 and the second detection portion 22 from interfering with the other detection region.
　図２（ｃ）に示す例では、包装体１００の長さ方向Ｄ１における第１検出部分２１の位置が、第２検出部分２２の位置と一致している。なお、高さ方向Ｄ３における第１検出部分２１の位置は、第２検出部分２２の位置とは相違している。照射部１０のＸ線源１２の位置が、基準線Ｌの延長上に配置されている場合、包装体１００の長さ方向Ｄ１における第１検出部分２１の位置が、第２検出部分２２の位置と一致していても、第１検出部分２１および第２検出部分２２のいずれか一方が他方の検出領域の邪魔になることはない。 2C, the position of the first detection portion 21 in the length direction D1 of the package 100 matches the position of the second detection portion 22. In the example shown in FIG. Note that the position of the first detection portion 21 in the height direction D3 is different from the position of the second detection portion 22. When the position of the X-ray source 12 of the irradiation unit 10 is arranged on the extension of the reference line L, the position of the first detection portion 21 in the length direction D1 of the package 100 is the position of the second detection portion 22. Even if it corresponds, either one of the first detection portion 21 and the second detection portion 22 does not interfere with the other detection region.
　図３は、本実施形態に係る検査装置のブロック構成図である。
　検査装置１は、照射部１０および検出部２０を制御する制御部２００を備える。制御部２００は、ドライバ１５を制御して照射部１０から照射されるＸ線の強度を調整する。制御部２００は、信号処理部２０１および判定部２０２を有する。制御部２００には、メモリ２１０および表示部２２０が接続される。 FIG. 3 is a block configuration diagram of the inspection apparatus according to the present embodiment.
The inspection apparatus 1 includes a control unit 200 that controls the irradiation unit 10 and the detection unit 20. The control unit 200 controls the driver 15 to adjust the intensity of X-rays emitted from the irradiation unit 10. The control unit 200 includes a signal processing unit 201 and a determination unit 202. A memory 210 and a display unit 220 are connected to the control unit 200.
　第１検出部分２１および第２検出部分２２で検出したＸ線に基づく信号はメモリ２１０に蓄積され、所望のタイミングで制御部２００の信号処理部２０１に送られる。信号処理部２０１は、メモリ２１０から送られた信号を処理して画像信号を構成する。すなわち、ラインセンサで取り込んだＸ線に基づく信号（ライン信号）を所定量結合して２次元画像とする。２次元画像はモニタである表示部２２０に出力される。 The signals based on the X-rays detected by the first detection portion 21 and the second detection portion 22 are accumulated in the memory 210 and sent to the signal processing unit 201 of the control unit 200 at a desired timing. The signal processing unit 201 processes the signal sent from the memory 210 to form an image signal. That is, a predetermined amount of signals (line signals) based on X-rays captured by the line sensor are combined to form a two-dimensional image. The two-dimensional image is output to the display unit 220 that is a monitor.
　また、判定部２０２は、信号処理部２０１から出力された信号に基づいて異物の有無を判定する処理を行う。例えば、信号処理部２０１で所定の閾値を超える信号が検出された場合には、異物の可能性がある。判定部２０２は、異物の可能性のある信号の連続する面積や、パターンマッチングなどの処理を行い、異物であるか否かの判定を行う。判定結果は表示部２２０に出力される。 Also, the determination unit 202 performs a process of determining the presence or absence of foreign matter based on the signal output from the signal processing unit 201. For example, when a signal exceeding a predetermined threshold is detected by the signal processing unit 201, there is a possibility of foreign matter. The determination unit 202 performs processing such as a continuous area of a signal that may be a foreign substance, pattern matching, and the like, and determines whether or not it is a foreign substance. The determination result is output to the display unit 220.
　このような本実施形態に係る検査装置１では、照射部１０から照射されたＸ線が包装部１１０で遮られずにセンターシール部１２０に到達することから、センターシール部１２０を透過したＸ線を第１検出部分２１で検出することができる。これにより、包装部１１０や包装部１１０内の収容物に影響を受けずにセンターシール部１２０の異物を的確に検査することができる。 In such an inspection apparatus 1 according to the present embodiment, the X-rays irradiated from the irradiation unit 10 reach the center seal unit 120 without being blocked by the packaging unit 110, and thus the X-rays transmitted through the center seal unit 120. Can be detected by the first detection portion 21. Thereby, the foreign material of the center seal | sticker part 120 can be test | inspected exactly, without being influenced by the packaging part 110 or the accommodation in the packaging part 110. FIG.
（第２実施形態）
　図４（ａ）～（ｃ）は、第２実施形態に係る検査装置の構成例を示す模式図である。
　図４（ａ）に示す構成例では、検出部２０に１つのラインセンサＬＳ１０が含まれる例である。１つのラインセンサＬＳ１０には第１検出部分２１および第２検出部分２２が含まれる。すなわち、１つのラインセンサＬＳ１０の検出領域を第１検出部分２１と第２検出部分２２とで分けて使用している。このような構成によれば、１つのラインセンサＬＳ１０によってセンターシール部１２０および包装部１１０の両方の異物検査を行うことができる。 (Second Embodiment)
FIGS. 4A to 4C are schematic views showing a configuration example of an inspection apparatus according to the second embodiment.
The configuration example shown in FIG. 4A is an example in which the detection unit 20 includes one line sensor LS10. One line sensor LS10 includes a first detection portion 21 and a second detection portion 22. That is, the detection area of one line sensor LS10 is divided into the first detection portion 21 and the second detection portion 22 and used. According to such a configuration, the foreign matter inspection of both the center seal part 120 and the packaging part 110 can be performed by one line sensor LS10.
　図４（ｂ）に示す構成例では、検出部２０に３つのラインセンサＬＳ１、ＬＳ２およびＬＳ３が含まれる例である。また、この構成例では、照射部１０のＸ線源１２が基準線Ｌから離れて配置されている。 4B is an example in which the detection unit 20 includes three line sensors LS1, LS2, and LS3. In this configuration example, the X-ray source 12 of the irradiation unit 10 is arranged away from the reference line L.
　ラインセンサＬＳ１はセンターシール部１２０の近傍に配置され、センターシール部１２０を透過するＸ線を検出する。ラインセンサＬＳ２は包装部１１０の近傍であって高さ方向Ｄ３に配置される。ラインセンサＬＳ３は包装部１１０の近傍であって幅方向Ｄ２に配置される。 The line sensor LS1 is disposed in the vicinity of the center seal portion 120 and detects X-rays transmitted through the center seal portion 120. The line sensor LS2 is disposed in the vicinity of the packaging unit 110 and in the height direction D3. The line sensor LS3 is disposed in the vicinity of the packaging unit 110 and in the width direction D2.
　照射部１０から照射されるＸ線は、基準線Ｌから離れた位置より包装体１００に向けて照射される。Ｘ線の照射領域はセンターシール部１２０から包装部１１０の広い範囲をカバーしている。これにより、ラインセンサＬＳ１ではセンターシール部１２０を透過したＸ線を検出し、ラインセンサＬＳ２およびＬＳ３では包装部１１０を透過したＸ線を検出することができる。特に、ラインセンサＬＳ２およびＬＳ３は包装部１１０に沿ってＬ字型に配置されているため、包装部１１０の広い範囲で透過するＸ線を検出することができる。 X-rays irradiated from the irradiation unit 10 are irradiated toward the package 100 from a position away from the reference line L. The X-ray irradiation area covers a wide range from the center seal part 120 to the packaging part 110. Thereby, the X-ray which permeate | transmitted the center seal | sticker part 120 in the line sensor LS1 can be detected, and the X-rays which permeate | transmitted the packaging part 110 can be detected in the line sensors LS2 and LS3. In particular, since the line sensors LS2 and LS3 are arranged in an L shape along the packaging part 110, X-rays transmitted through a wide range of the packaging part 110 can be detected.
　図４（ｃ）に示す構成例では、検出部２０に１つのラインセンサＬＳ２０が含まれる例である。また、この構成例では、照射部１０のＸ線源１２が基準線Ｌから離れて配置されている。 4C is an example in which the detection unit 20 includes one line sensor LS20. In this configuration example, the X-ray source 12 of the irradiation unit 10 is arranged away from the reference line L.
　ラインセンサＬＳ２０は、高さ方向Ｄ３および幅方向Ｄ２のそれぞれに対して斜めに配置される。１つのラインセンサＬＳ２０には第１検出部分２１および第２検出部分２２が含まれる。この構成例では、基準線Ｌから離れた位置より包装体１００に斜めにＸ線が照射される。そして、センターシール部１２０を透過したＸ線はラインセンサＬＳ２０の第１検出部分２１で検出され、包装部１１０を透過したＸ線はラインセンサＬＳ２０の第２検出部分２２で検出される。 The line sensor LS20 is disposed obliquely with respect to each of the height direction D3 and the width direction D2. One line sensor LS20 includes a first detection portion 21 and a second detection portion 22. In this configuration example, the package 100 is irradiated with X-rays obliquely from a position away from the reference line L. And the X-ray which permeate | transmitted the center seal | sticker part 120 is detected by the 1st detection part 21 of line sensor LS20, and the X-ray which permeate | transmitted the packaging part 110 is detected by the 2nd detection part 22 of line sensor LS20.
　ラインセンサＬＳ２０を斜めに配置することで、Ｘ線が包装部１１０を斜めに透過して第２検出部分２２まで到達する。これにより、包装部１１０を透過するＸ線の透過長が、包装部１１０の幅方向Ｄ２に透過する場合に比べて短くなり、検出精度を高めることができる。 配置 By arranging the line sensor LS20 diagonally, X-rays pass through the packaging part 110 diagonally and reach the second detection part 22. Thereby, the transmission length of the X-ray which permeate | transmits the packaging part 110 becomes short compared with the case where it permeate | transmits in the width direction D2 of the packaging part 110, and can improve a detection precision.
（第３実施形態）
　第３実施形態に係る検査装置は、第１実施形態や第２実施形態の検査装置において、検出部２０の検出データに含まれるノイズをキャンセルすることにより、精度の高い検査を実現する。なお、以下の説明では、既に説明した部分については、同一符号を付してその説明を省略する。 (Third embodiment)
The inspection apparatus according to the third embodiment realizes high-accuracy inspection by canceling noise included in the detection data of the detection unit 20 in the inspection apparatus of the first embodiment or the second embodiment. In the following description, parts that have already been described are assigned the same reference numerals and description thereof is omitted.
　第３実施形態に係る検査装置は、図５に示すように、第１実施形態又は第２実施形態の検査装置の構成に加え、第２検出部２０Ａを備える。第２検出部２０Ａは、搬送方向Ｄｔに沿って検出部２０に隣接する位置に、照射部１０からのＸ線が検出素子に入射しないように設けられる。ここで、「照射部１０からのＸ線が検出素子に入射しないように」とは、例えば、第２検出部２０Ａを照射部１０によるＸ線照射領域の範囲外（つまりＸ線が照射されない領域）に、配置するとよい。あるいは、第２検出部２０Ａの配置位置がＸ線照射領域の内外いずれに関わらず、照射部１０からのＸ線が検出素子に入射しないようにＸ線を遮蔽する遮蔽部材を設けてもよい。なお、ノイズキャンセルの精度は、第２検出部２０Ａが検出部２０に近いほど高まる。このため、第２検出部２０Ａは検出部２０に近い位置に配置されることが好ましい。第２検出部２０Ａには照射部１０からのＸ線が照射されない位置にあるので、第２検出部２０Ａが検出するＸ線は、照射部１０からのＸ線が包装体１００を透過したものではなく、散乱や外乱等に起因するノイズと考えられる。 As shown in FIG. 5, the inspection apparatus according to the third embodiment includes a second detection unit 20 </ b> A in addition to the configuration of the inspection apparatus of the first embodiment or the second embodiment. 20 A of 2nd detection parts are provided in the position adjacent to the detection part 20 along the conveyance direction Dt so that the X-ray from the irradiation part 10 may not inject into a detection element. Here, “so that X-rays from the irradiation unit 10 do not enter the detection element” means, for example, that the second detection unit 20A is outside the range of the X-ray irradiation region by the irradiation unit 10 (that is, the region where X-rays are not irradiated). ). Or you may provide the shielding member which shields an X-ray so that the X-ray from the irradiation part 10 may not inject into a detection element irrespective of the arrangement position of 2nd detection part 20A inside or outside an X-ray irradiation area | region. The accuracy of noise cancellation increases as the second detection unit 20A is closer to the detection unit 20. For this reason, it is preferable that the second detection unit 20 </ b> A is disposed at a position close to the detection unit 20. Since the second detection unit 20A is in a position where the X-rays from the irradiation unit 10 are not irradiated, the X-rays detected by the second detection unit 20A are not the X-rays from the irradiation unit 10 transmitted through the package 100. It is considered that the noise is caused by scattering or disturbance.
　第２検出部２０Ａで検出したＸ線に基づく信号はメモリ２１０に蓄積され、所望のタイミングで制御部２００の信号処理部２０１に送られる。信号処理部２０１は、メモリ２１０から送られた信号を処理して画像信号を構成する。このとき、信号処理部２０１は、検出部２０で検出したＸ線に基づく信号から、第２検出部２０Ａで検出したＸ線に基づく信号を差し引くことによりノイズをキャンセルしたライン信号とする。そして、ノイズをキャンセルしたライン信号を所定量結合して２次元画像とする。２次元画像はモニタである表示部２２０に出力される。このような構成により、第３実施形態の検査装置では、ノイズを低減した２次元画像を得ることが可能となる。なお、なお、ノイズのキャンセルは検出部２０及び第２検出部２０Ａが出力するアナログ信号に対して行ってもよいし、アナログ信号をＡＤ変換機によりデジタル信号としてから行ってもよい。 The signal based on the X-ray detected by the second detection unit 20A is accumulated in the memory 210 and sent to the signal processing unit 201 of the control unit 200 at a desired timing. The signal processing unit 201 processes the signal sent from the memory 210 to form an image signal. At this time, the signal processing unit 201 subtracts the signal based on the X-ray detected by the second detection unit 20A from the signal based on the X-ray detected by the detection unit 20 to obtain a line signal in which noise is canceled. Then, a predetermined amount of line signals from which noise has been canceled is combined to form a two-dimensional image. The two-dimensional image is output to the display unit 220 that is a monitor. With such a configuration, the inspection apparatus according to the third embodiment can obtain a two-dimensional image with reduced noise. Note that noise cancellation may be performed on the analog signals output from the detection unit 20 and the second detection unit 20A, or may be performed after the analog signal is converted into a digital signal by an AD converter.
（第４実施形態）
　第４実施形態に係る検査装置は、第３実施形態に係る検査装置と同様に、検出部２０の検出データに含まれるノイズをキャンセルすることにより、精度の高い検査を実現する。なお、以下の説明では、既に説明した部分については、同一符号を付してその説明を省略する。 (Fourth embodiment)
Similar to the inspection apparatus according to the third embodiment, the inspection apparatus according to the fourth embodiment realizes highly accurate inspection by canceling noise included in the detection data of the detection unit 20. In the following description, parts that have already been described are assigned the same reference numerals and description thereof is omitted.
　第４実施形態に係る検査装置は、第１実施形態又は第２実施形態の検査装置と同様の構成を有する。図６に示したように、第４実施形態に係る検査装置では、検出部２０のラインセンサＬＳは、搬送方向における検出素子の幅Ｗ分だけ移動する都度の撮像タイミングでＸ線の線量を１００％の露光量で検出し、搬送方向における検出素子の幅Ｗの２分の１だけ撮像タイミングから位相がずれたノイズ検出タイミングでＸ線の線量を撮像タイミングとは異なる露光量（例えば０％）で検出する。なお、撮像タイミング及びノイズ検出タイミングでの露光量は上記に限定されず、両者で露光量が異なっていればよい。なおノイズ検出タイミングと撮像タイミングとの位相差は、搬送方向における検出素子の幅Ｗの２分の１以外でも構わない。 The inspection apparatus according to the fourth embodiment has the same configuration as the inspection apparatus of the first embodiment or the second embodiment. As shown in FIG. 6, in the inspection apparatus according to the fourth embodiment, the line sensor LS of the detection unit 20 generates an X-ray dose of 100 at an imaging timing each time the detection unit 20 moves by the width W of the detection element. % Exposure amount, and the X-ray dose is different from the imaging timing (for example, 0%) at the noise detection timing that is out of phase from the imaging timing by half the width W of the detection element in the transport direction. Detect with. The exposure amount at the imaging timing and the noise detection timing is not limited to the above, and the exposure amount may be different between the two. Note that the phase difference between the noise detection timing and the imaging timing may be other than half the width W of the detection element in the transport direction.
　検出部２０で検出したＸ線に基づく信号（すなわち、撮像タイミングで検出したＸ線に基づく信号及びノイズ検出タイミングで検出したＸ線に基づく信号）はメモリ２１０に蓄積され、所望のタイミングで制御部２００の信号処理部２０１に送られる。信号処理部２０１は、メモリ２１０から送られた信号を処理して画像信号を構成する。このとき、信号処理部２０１は、撮像タイミングで検出したＸ線に基づく信号からノイズ検出タイミングで検出したＸ線に基づく信号を差し引くことによりノイズをキャンセルしたライン信号とする。上述したように、撮像タイミングとノイズ検出タイミングとは、搬送方向における検出素子の幅の２分の１に相当する位相差があるため、ノイズをキャンセルする際にはこの位相差を踏まえた演算によりノイズをキャンセルするとよい。例えば、Ｎ番目のラインに対応するノイズはＮ番目のラインから前後２分の１位相ずれた２つのノイズ検出タイミングで検出したＸ線に基づく信号の平均とするとよい。信号処理部２０１は、上記のようにしてノイズをキャンセルした信号ライン信号を所定量結合して２次元画像とする。２次元画像はモニタである表示部２２０に出力される。このような構成により、第４実施形態の検査装置では、ノイズを低減した２次元画像を得ることが可能となる。 Signals based on the X-rays detected by the detection unit 20 (that is, signals based on the X-rays detected at the imaging timing and signals based on the X-rays detected at the noise detection timing) are accumulated in the memory 210, and are controlled at a desired timing. 200 signal processing units 201. The signal processing unit 201 processes the signal sent from the memory 210 to form an image signal. At this time, the signal processing unit 201 sets a line signal in which noise is canceled by subtracting a signal based on the X-ray detected at the noise detection timing from a signal based on the X-ray detected at the imaging timing. As described above, since the imaging timing and the noise detection timing have a phase difference corresponding to one half of the width of the detection element in the transport direction, when noise is canceled, calculation based on this phase difference is performed. It is better to cancel the noise. For example, the noise corresponding to the Nth line may be an average of signals based on X-rays detected at two noise detection timings shifted by a half phase from the Nth line. The signal processing unit 201 combines a predetermined amount of signal line signals from which noise has been canceled as described above to form a two-dimensional image. The two-dimensional image is output to the display unit 220 that is a monitor. With such a configuration, the inspection apparatus according to the fourth embodiment can obtain a two-dimensional image with reduced noise.
（第５実施形態）
　第５実施形態に係る検査装置は、第３実施形態及び第４実施形態に係る検査装置と同様に、検出部２０の検出データに含まれるノイズをキャンセルすることにより、精度の高い検査を実現する。なお、以下の説明では、既に説明した部分については、同一符号を付してその説明を省略する。 (Fifth embodiment)
The inspection apparatus according to the fifth embodiment realizes high-accuracy inspection by canceling noise included in the detection data of the detection unit 20, as in the inspection apparatuses according to the third and fourth embodiments. . In the following description, parts that have already been described are assigned the same reference numerals and description thereof is omitted.
　第５実施形態に係る検査装置は、図７に示したように、検出部２０が有するラインセンサＬＳが、撮像用検出素子２３と、ノイズ検出素子２４とを備える。その他は第１実施形態又は第２実施形態の検査装置と同様の構成を有する。図７に示したように、第５実施形態に係る検査装置では、検出部２０のラインセンサにおける直線状に並んだ複数の検出素子の一部をＸ線が当たらないように遮蔽されたノイズ検出素子２４（図中で網掛けにより示された箇所）とする。ラインセンサの検出素子のうちノイズ検出素子２４を除いたものが撮像用検出素子２３となる。撮像用検出素子２３とノイズ検出素子２４とは、直線状の配列方向（搬送方向と直交する方向）において、交互に配置されるとよい。なお、撮像用検出素子２３とノイズ検出素子２４との（面積又は素子数における）比率は、例えば１対１とするとよいが、必ずしもこれに限定されない。 In the inspection apparatus according to the fifth embodiment, as illustrated in FIG. 7, the line sensor LS included in the detection unit 20 includes an imaging detection element 23 and a noise detection element 24. Others have the same configuration as the inspection apparatus of the first embodiment or the second embodiment. As shown in FIG. 7, in the inspection apparatus according to the fifth embodiment, noise detection is performed such that a part of the plurality of detection elements arranged in a straight line in the line sensor of the detection unit 20 is shielded so that X-rays do not strike. It is assumed that the element 24 (a portion indicated by shading in the drawing). Among the detection elements of the line sensor, the element excluding the noise detection element 24 is the imaging detection element 23. The imaging detection element 23 and the noise detection element 24 may be alternately arranged in a linear arrangement direction (a direction orthogonal to the conveyance direction). The ratio (in area or number of elements) between the imaging detection element 23 and the noise detection element 24 may be, for example, 1: 1, but is not necessarily limited thereto.
　検出部２０で検出したＸ線に基づく信号（すなわち、撮像用検出素子２３で検出したＸ線に基づく信号及びノイズ検出素子２４で検出したＸ線に基づく信号）はメモリ２１０に蓄積され、所望のタイミングで制御部２００の信号処理部２０１に送られる。信号処理部２０１は、メモリ２１０から送られた信号を処理して画像信号を構成する。このとき、信号処理部２０１は、撮像用検出素子２３で検出したＸ線に基づく信号からノイズ検出素子２４で検出したＸ線に基づく信号を差し引くことによりノイズをキャンセルしたライン信号とする。上述したように、撮像用検出素子２３とノイズ検出素子２４とは、ラインセンサの検出素子の配列方向における位置が異なっているため、ノイズをキャンセルする際にはこの位置の差を踏まえた演算によりノイズをキャンセルするとよい。例えば、ある撮像用検出素子２３に対応するノイズは当該撮像用検出素子２３に隣接する２つのノイズ検出素子２４で検出したＸ線に基づく信号の平均とするとよい。信号処理部２０１は、上記のようにしてノイズをキャンセルした信号ライン信号を所定量結合して２次元画像とする。２次元画像はモニタである表示部２２０に出力される。このような構成により、第５実施形態の検査装置では、ノイズを低減した２次元画像を得ることが可能となる。 A signal based on the X-rays detected by the detection unit 20 (that is, a signal based on the X-rays detected by the imaging detection element 23 and a signal based on the X-rays detected by the noise detection element 24) is accumulated in the memory 210 and is stored in a desired manner. It is sent to the signal processing unit 201 of the control unit 200 at timing. The signal processing unit 201 processes the signal sent from the memory 210 to form an image signal. At this time, the signal processing unit 201 subtracts the signal based on the X-ray detected by the noise detection element 24 from the signal based on the X-ray detected by the imaging detection element 23 to obtain a line signal in which noise is canceled. As described above, the imaging detection element 23 and the noise detection element 24 have different positions in the arrangement direction of the detection elements of the line sensor. Therefore, when canceling noise, an operation based on the difference between the positions is performed. It is better to cancel the noise. For example, the noise corresponding to a certain imaging detection element 23 may be an average of signals based on X-rays detected by two noise detection elements 24 adjacent to the imaging detection element 23. The signal processing unit 201 combines a predetermined amount of signal line signals from which noise has been canceled as described above to form a two-dimensional image. The two-dimensional image is output to the display unit 220 that is a monitor. With such a configuration, the inspection apparatus of the fifth embodiment can obtain a two-dimensional image with reduced noise.
（適用例）
　図８は、本実施形態に係る検査装置の適用例を示す模式図である。
　図８に示す適用例では、シート材ＳＴを筒状にしてセンターシール部１２０を熱圧着する部分に本実施形態に係る検査装置１が設けられている。 (Application example)
FIG. 8 is a schematic diagram illustrating an application example of the inspection apparatus according to the present embodiment.
In the application example shown in FIG. 8, the inspection apparatus 1 according to the present embodiment is provided in a portion where the sheet material ST is formed in a cylindrical shape and the center seal portion 120 is thermocompression bonded.
　シート材ＳＴを筒状にして包装体１００を形成するには、シート材ＳＴを搬送方向Ｄｔに送りながら筒状に湾曲させ、互いに向かい合った両側端部ＳＴＳを閉じ合わせる。一対の加熱ローラＨＲの間に重ね合わされた両側端部ＳＴＳが送り込まれることで両側端部ＳＴＳは熱圧着され、センターシール部１２０となる。 In order to form the package 100 by making the sheet material ST into a cylindrical shape, the sheet material ST is bent into a cylindrical shape while being fed in the transport direction Dt, and both side end portions STS facing each other are closed. When both side end portions STS overlapped between the pair of heating rollers HR are fed, the both side end portions STS are thermocompression-bonded to form the center seal portion 120.
　加熱ローラＨＲの搬送方向Ｄｔの下流側にはガイドプレートＧＰが設けられる。熱圧着されたセンターシール部１２０がガイドプレートＧＰに沿って送られることで、センターシール部１２０は徐々に倒されて、やがて包装部１１０の表面に沿って押し付けられる。 A guide plate GP is provided on the downstream side in the conveying direction Dt of the heating roller HR. The center seal part 120 that has been subjected to thermocompression bonding is sent along the guide plate GP, whereby the center seal part 120 is gradually tilted and eventually pressed along the surface of the packaging part 110.
　このようにしてシート材ＳＴの搬送方向Ｄｔに連続的にセンターシール部１２０が形成され、包装体１００が形成されていく。本実施形態に係る検査装置１は、一対の加熱ローラＨＲによってセンターシール部１２０が形成される位置から、ガイドプレートＧＰによってセンターシール部１２０が倒される位置までの間に設けられる。 Thus, the center seal portion 120 is continuously formed in the transport direction Dt of the sheet material ST, and the package 100 is formed. The inspection apparatus 1 according to the present embodiment is provided between a position where the center seal portion 120 is formed by the pair of heating rollers HR and a position where the center seal portion 120 is tilted by the guide plate GP.
　一対の加熱ローラＨＲとガイドプレートＧＰとの間では、センターシール部１２０が包装部１１０に対して立ち上がった状態である。この位置において、センターシール部１２０を間にして照射部１０と検出部２０とを幅方向Ｄ２に対向するよう配置する。これにより、センターシール部１２０が形成された後、倒される前にセンターシール部１２０に対して幅方向Ｄ２にＸ線を照射することができる。したがって、包装部１１０と重なることなくセンターシール部１２０を透過するＸ線を検出して、センターシール部１２０の異物を検査することができる。 Between the pair of heating rollers HR and the guide plate GP, the center seal part 120 is raised with respect to the packaging part 110. At this position, the irradiation unit 10 and the detection unit 20 are arranged to face each other in the width direction D2 with the center seal portion 120 therebetween. Thereby, after the center seal portion 120 is formed, the center seal portion 120 can be irradiated with X-rays in the width direction D2 before being tilted. Accordingly, X-rays that pass through the center seal portion 120 without overlapping with the packaging portion 110 can be detected, and foreign matter in the center seal portion 120 can be inspected.
　センターシール部１２０を熱圧着で形成する際には長さ方向Ｄ１に包装体１００が連続的に送られる。この際、センターシール部１２０に異物を噛み込むことがあっても、本実施形態に係る検査装置１によってその異物を的確に検出することが可能となる。 When forming the center seal part 120 by thermocompression bonding, the package 100 is continuously sent in the length direction D1. At this time, even if a foreign object is caught in the center seal portion 120, the foreign object can be accurately detected by the inspection apparatus 1 according to the present embodiment.
　以上説明したように、本実施形態に係る検査装置１によれば、包装体におけるセンターシール部の異物を的確に検査することが可能となる。 As described above, according to the inspection apparatus 1 according to the present embodiment, it is possible to accurately inspect the foreign matter at the center seal portion in the package.
　なお、上記に本実施形態およびその変形例および適用例を説明したが、本発明はこれらの例に限定されるものではない。例えば、上記実施形態では、Ｘ線源１２が基準線Ｌと同じ高さ、または基準線Ｌに対して包装部１１０とは反対側に配置される例を示したが、Ｘ線源１２を基準線Ｌよりも僅かに包装部１１０側に配置してもよい。また、前述の各実施形態またはその変形例および適用例に対して、当業者が適宜、構成要素の追加、削除、設計変更を行ったものや、各実施形態の特徴を適宜組み合わせたものも、本発明の要旨を備えている限り、本発明の範囲に包含される。 In addition, although this embodiment and its modification example and application example were demonstrated above, this invention is not limited to these examples. For example, in the above-described embodiment, the example in which the X-ray source 12 is disposed at the same height as the reference line L or on the side opposite to the packaging unit 110 with respect to the reference line L is shown. You may arrange | position to the packaging part 110 side slightly from the line L. FIG. In addition, for each of the above-described embodiments or modifications and application examples thereof, those in which those skilled in the art appropriately added, deleted, and changed the design, and those appropriately combined the features of each embodiment, As long as the gist of the present invention is provided, it is included in the scope of the present invention.
１…検査装置
１０…照射部
１１…筐体
１２…Ｘ線源
１３…スリット
１５…ドライバ
２０…検出部
２１…第１検出部分
２２…第２検出部分
１００…包装体
１１０…包装部
１２０…センターシール部
１３０…エンドシール部
２００…制御部
２０１…信号処理部
２０２…判定部
２１０…メモリ
２２０…表示部
Ｄ１…長さ方向
Ｄ２…幅方向
Ｄ３…高さ方向
Ｄｔ…搬送方向
ＧＰ…ガイドプレート
ＨＲ…加熱ローラ
Ｌ…基準線
ＬＳ１，ＬＳ２，ＬＳ３，ＬＳ１０，ＬＳ２０…ラインセンサ
Ｓ１，Ｓ２…照射領域
ＳＴ…シート材 DESCRIPTION OF SYMBOLS 1 ... Inspection apparatus 10 ... Irradiation part 11 ... Case 12 ... X-ray source 13 ... Slit 15 ... Driver 20 ... Detection part 21 ... 1st detection part 22 ... 2nd detection part 100 ... Packaging body 110 ... Packaging part 120 ... Center Seal unit 130 ... End seal unit 200 ... Control unit 201 ... Signal processing unit 202 ... Determination unit 210 ... Memory 220 ... Display unit D1 ... Length direction D2 ... Width direction D3 ... Height direction Dt ... Conveying direction GP ... Guide plate HR ... heating roller L ... reference lines LS1, LS2, LS3, LS10, LS20 ... line sensors S1, S2 ... irradiation area ST ... sheet material

Claims (13)

  1. 　シート材を筒状にした包装部と、前記包装部の閉じ合わせ部に設けられたセンターシール部とを有する包装体を検査する検査装置であって、
    　前記包装体に向けて検出波を照射する照射部と、
    　前記包装体を透過する前記検出波を検出する検出部と、
    　を備え、
    　前記検出部は、前記センターシール部を透過する前記検出波を検出する第１検出部分を有し、
    　前記第１検出部分は、前記照射部から照射された前記検出波が前記包装部で遮られない検出領域を有することを特徴とする検査装置。     An inspection apparatus for inspecting a package having a packaging portion in which a sheet material is formed into a cylinder, and a center seal portion provided in a closing portion of the packaging portion,
    An irradiation unit for irradiating a detection wave toward the package;
    A detection unit for detecting the detection wave transmitted through the package;
    With
    The detection part has a first detection part for detecting the detection wave that passes through the center seal part,
    The inspection apparatus according to claim 1, wherein the first detection portion has a detection region where the detection wave irradiated from the irradiation unit is not blocked by the packaging unit.
  2. 　前記照射部と前記第１検出部分との間に前記センターシール部が配置される、請求項１に記載の検査装置。 The inspection apparatus according to claim 1, wherein the center seal portion is disposed between the irradiation portion and the first detection portion.
  3. 　前記照射部における前記検出波の照射源は、前記センターシール部の付け根よりも前記センターシール部の先端側に配置される、請求項１または２に記載の検査装置。 The inspection apparatus according to claim 1 or 2, wherein the irradiation source of the detection wave in the irradiation unit is arranged on a distal end side of the center seal portion with respect to a base of the center seal portion.
  4. 　前記検出部は、前記包装部を透過する前記検出波を検出する第２検出部分を有し、
    　前記第２検出部分は、前記照射部から照射された前記検出波が前記センターシール部で遮られない検出領域を有する、請求項１～３のいずれか１つに記載の検査装置。     The detection part has a second detection part for detecting the detection wave that passes through the packaging part,
    The inspection apparatus according to any one of claims 1 to 3, wherein the second detection portion has a detection region where the detection wave irradiated from the irradiation unit is not blocked by the center seal portion.
  5. 　前記センターシール部の延びる方向における前記第１検出部分の位置は、前記第２検出部分の位置と相違する、請求項４に記載の検査装置。 The inspection apparatus according to claim 4, wherein a position of the first detection portion in a direction in which the center seal portion extends is different from a position of the second detection portion.
  6. 　前記検出部は、直線状に複数の検出素子が並ぶラインセンサを有し、
    　前記第１検出部分および前記第２検出部分は前記ラインセンサに含まれる、請求項４に記載の検査装置。     The detection unit includes a line sensor in which a plurality of detection elements are arranged in a straight line,
    The inspection apparatus according to claim 4, wherein the first detection portion and the second detection portion are included in the line sensor.
  7. 　前記検出部で検出した前記検出波に基づく信号を処理する信号処理部と、
    　前記信号処理部で処理した信号に基づき異物の有無を判定する判定部と、をさらに備えた請求項１～６のいずれか１つに記載の検査装置。     A signal processing unit for processing a signal based on the detection wave detected by the detection unit;
    The inspection apparatus according to any one of claims 1 to 6, further comprising a determination unit that determines the presence or absence of a foreign substance based on a signal processed by the signal processing unit.
  8. 　前記照射部からの検出波が入射しないように設けられたノイズ検出部をさらに備え、
    　前記信号処理部は、前記検出部で検出した前記検出波に基づく信号から前記ノイズ検出部で検出した前記検出波に基づく信号を差し引くことによりノイズをキャンセルした信号を得ることを特徴とする請求項７に記載の検査装置。     A noise detection unit provided so that a detection wave from the irradiation unit is not incident;
    The signal processing unit obtains a signal in which noise is canceled by subtracting a signal based on the detection wave detected by the noise detection unit from a signal based on the detection wave detected by the detection unit. 7. The inspection apparatus according to 7.
  9. 　前記ノイズ検出部は、前記照射部からの検出波が照射されない位置に配置されることを特徴とする請求項８に記載の検査装置。 The inspection apparatus according to claim 8, wherein the noise detection unit is disposed at a position where the detection wave from the irradiation unit is not irradiated.
  10. 　前記ノイズ検出部に前記照射部からの検出波が入射しないよう遮蔽する遮蔽部材をさらに備えることを特徴とする請求項８または９に記載の検査装置。 The inspection apparatus according to claim 8, further comprising a shielding member that shields the detection wave from the irradiation unit from entering the noise detection unit.
  11. 　前記検出部は、直線状に複数の検出素子が並ぶラインセンサを有し、
    　前記ラインセンサは、前記検出素子の直線状の配列方向に直交する搬送方向に搬送される前記包装体を透過した検査波を、搬送方向における前記検出素子の幅分だけ搬送方向に移動する都度の撮像タイミングで第１の露光量で検出し、前記撮像タイミングから位相がずれたノイズ検出タイミングで、撮像タイミングとは異なる第２の露光量で検出し、
    　前記信号処理部は、前記撮像タイミングで検出した前記検出波に基づく信号から前記ノイズ検出タイミングで検出した前記検出波に基づく信号を差し引くことによりノイズをキャンセルした信号を得ることを特徴とする請求項７に記載の検査装置。     The detection unit includes a line sensor in which a plurality of detection elements are arranged in a straight line,
    Each time the line sensor moves the inspection wave that has passed through the package conveyed in the conveyance direction orthogonal to the linear arrangement direction of the detection elements in the conveyance direction by the width of the detection element in the conveyance direction. Detect with the first exposure amount at the imaging timing, detect with the second exposure amount different from the imaging timing at the noise detection timing shifted in phase from the imaging timing,
    The signal processing unit obtains a signal in which noise is canceled by subtracting a signal based on the detection wave detected at the noise detection timing from a signal based on the detection wave detected at the imaging timing. 7. The inspection apparatus according to 7.
  12. 　前記検出部は、直線状に複数の検出素子が並ぶラインセンサを有し、
    　前記ラインセンサを構成する前記検出素子少なくとも一部は、検出波が遮蔽されたノイズ検出素子であり、前記ラインセンサを構成する前記検出素子の少なくとも他の一部は、検出波が遮蔽されない撮像用検出素子であり、
    　前記信号処理部は、前記撮像用検出素子で検出した前記検出波に基づく信号から前記ノイズ検出素子で検出した前記検出波に基づく信号を差し引くことによりノイズをキャンセルした信号を得ることを特徴とする請求項７に記載の検査装置。     The detection unit includes a line sensor in which a plurality of detection elements are arranged in a straight line,
    At least a part of the detection elements constituting the line sensor is a noise detection element in which a detection wave is shielded, and at least another part of the detection elements constituting the line sensor is for imaging in which the detection wave is not shielded. A sensing element,
    The signal processing unit obtains a signal in which noise is canceled by subtracting a signal based on the detection wave detected by the noise detection element from a signal based on the detection wave detected by the imaging detection element. The inspection apparatus according to claim 7.
  13. 　前記検出部で検出した前記検出波に基づく画像を表示する表示部をさらに備えた請求項１～１０のいずれか１つに記載の検査装置。 11. The inspection apparatus according to claim 1, further comprising a display unit that displays an image based on the detection wave detected by the detection unit.
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