WO2017221733A1 - Dispositif et procédé de stérilisation par ultraviolets et système de fabrication d'eau extrêmement pure - Google Patents

Dispositif et procédé de stérilisation par ultraviolets et système de fabrication d'eau extrêmement pure Download PDF

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Publication number
WO2017221733A1
WO2017221733A1 PCT/JP2017/021347 JP2017021347W WO2017221733A1 WO 2017221733 A1 WO2017221733 A1 WO 2017221733A1 JP 2017021347 W JP2017021347 W JP 2017021347W WO 2017221733 A1 WO2017221733 A1 WO 2017221733A1
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Prior art keywords
ultraviolet
lens
main pipe
pipe
branch pipe
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PCT/JP2017/021347
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English (en)
Japanese (ja)
Inventor
徹 天谷
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野村マイクロ・サイエンス株式会社
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Priority to KR1020187033874A priority Critical patent/KR20190020659A/ko
Priority to CN201780038673.8A priority patent/CN109415228B/zh
Publication of WO2017221733A1 publication Critical patent/WO2017221733A1/fr

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    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/30—Treatment of water, waste water, or sewage by irradiation
    • C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
    • C02F1/325—Irradiation devices or lamp constructions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J47/00—Ion-exchange processes in general; Apparatus therefor
    • B01J47/02—Column or bed processes
    • B01J47/04—Mixed-bed processes
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/30—Treatment of water, waste water, or sewage by irradiation
    • C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/58—Optical field-shaping elements

Definitions

  • the present invention relates to an ultraviolet sterilization apparatus and an ultraviolet sterilization method, and more particularly to an ultraviolet sterilization apparatus and an ultraviolet sterilization method used for sterilization of a branch portion of a flow path of a pure water production apparatus.
  • an ultrapure water production system is composed of a pretreatment unit, a primary pure water production unit, and a secondary pure water production unit.
  • the pretreatment unit generates pretreatment water by removing turbidity and colloidal material in the raw water using an agglomeration / precipitation / filtration device or the like.
  • the primary pure water production section removes most of soluble substances such as ions and fine particles in the pretreatment water by using, for example, a reverse osmosis membrane device (RO), a two-bed three-column type device, or the like.
  • RO reverse osmosis membrane device
  • the secondary pure water production department removes trace residual impurities in the primary pure water obtained in the primary pure water production department and performs precision finishing.
  • ionic organic substances are adsorbed and removed by an ion exchange resin device or the like.
  • the nonionic organic substance is decomposed into carbon dioxide and a low molecular weight organic acid by an ultraviolet oxidizer or the like, and the generated organic acid is adsorbed and removed by an ion exchange resin device or the like.
  • Organic substances to be removed in the production of ultrapure water include organic substances derived from raw water, piping in the apparatus, and organic substances derived from bacteria and microorganisms generated in each apparatus.
  • an ultraviolet oxidation apparatus for decomposing organic substances for example, an apparatus using a low-pressure ultraviolet lamp that emits ultraviolet rays having a wavelength of 180 to 190 nm or 250 to 260 nm is generally used.
  • a light-emitting diode that emits ultraviolet light having a wavelength of 360 to 400 nm and an ultraviolet oxidation apparatus using a photocatalyst have been proposed (see, for example, Patent Document 1).
  • an ultrapure water production system may have a branch pipe in the flow path of the water to be treated. There is a possibility that so-called accumulated water may be generated. When bacteria and microorganisms stay in such pooled water, they adhere to the wall surface of the pipe and multiply, eventually forming a colony and further producing a biofilm. If a biofilm is produced, it becomes difficult to remove it by washing.
  • the present invention has been made to solve the above-described problems, and is capable of effectively sterilizing accumulated water in a minute space such as a branch pipe connection portion, an ultraviolet sterilization apparatus, an ultraviolet sterilization method, and an ultrapure.
  • the purpose is to provide a water production system.
  • the ultraviolet sterilization apparatus of the present invention is watertight at a position facing the main pipe serving as the flow path of the water to be treated, the branch pipe connected to the main pipe, and the connection portion of the branch pipe of the main pipe.
  • an ultraviolet irradiation device that uses an ultraviolet light emitting diode that emits ultraviolet light having an emission peak wavelength at 230 to 290 nm as a light source.
  • the ultraviolet light emitting diode has its light emitting surface facing the lens side.
  • the lens is arranged on the back side of the lens, and the lens diffuses or converges the ultraviolet rays so that a predetermined amount of the ultraviolet rays emitted from the light source of the ultraviolet irradiation device is irradiated into the opening of the branch pipe. It has an optical characteristic.
  • the main pipe is a curved pipe, and the branch pipe is opened and connected to a bent portion of the main pipe.
  • the main pipe is a straight pipe, and the lens mounting hole is formed at a position facing the opening of the branch pipe connecting portion of the main pipe. It is preferable that it is watertightly attached.
  • the mounting hole formed in the main pipe is formed at a position where the main pipe intersects with an axis near the end of the branch pipe. It is preferable that
  • the branch pipe when the main pipe is a straight pipe, the branch pipe is connected to the main pipe with an axis near the end of the branch pipe inclined with respect to the axis of the main pipe. It is preferable.
  • a resistivity measuring cell for measuring the resistivity of the water to be treated is disposed in the branch pipe.
  • the lens has an optical characteristic of diffusing the ultraviolet rays emitted from the ultraviolet light emitting diode.
  • the lens is preferably made of quartz glass.
  • the main pipe is preferably provided in an ultrapure water production system for producing ultrapure water.
  • the ultraviolet sterilization method of the present invention includes a main pipe serving as a flow path of water to be treated, an inner wall surface of a branch pipe connected to the main pipe, and an ultraviolet ray that sterilizes the water to be treated in the main pipe and the branch pipe.
  • a sterilization method wherein a lens is watertightly attached to a position of the main pipe facing the opening of the connecting part of the branch pipe, and an ultraviolet light emitting diode having an emission peak wavelength at 230 to 290 nm is used as a light source, and is emitted from the light source.
  • the ultraviolet ray to be diffused or converged by the lens is irradiated with a predetermined amount of the ultraviolet ray emitted from the light source into the opening of the branch pipe.
  • the ultrapure water production system of the present invention includes a pretreatment unit, a primary pure water production unit, and a secondary pure water production unit, and the primary pure water production unit and the secondary pure water production unit are mixed-bed type ion exchange, respectively.
  • An ultrapure water production system including a resin device, wherein a main pipe for discharging treated water of the mixed-bed ion exchange resin device, a branch pipe connected to at least one of the main pipes, and the main pipe A lens mounted in a watertight manner at a position facing the opening of the connecting portion of the branch pipe, and an ultraviolet irradiation device using an ultraviolet light emitting diode that emits ultraviolet light having an emission peak wavelength at 230 to 290 nm as a light source,
  • the ultraviolet light emitting diode is disposed on the back side of the lens with its light emitting surface facing the lens side, and the lens has a predetermined amount of ultraviolet light emitted from the light source of the ultraviolet irradiation device.
  • the ultraviolet sterilization apparatus According to the ultraviolet sterilization apparatus, the ultraviolet sterilization method, and the ultrapure water production system of the present invention, it is possible to effectively sterilize accumulated water in a fine space such as a branch pipe connection portion.
  • FIG. 1 is a diagram schematically showing an ultraviolet sterilizer 1 according to an embodiment of the present invention.
  • the ultraviolet sterilizer 1 is provided in a water pipe 13 to be treated having a main pipe 13a that serves as a flow path of water to be treated and a branch pipe 13b that is branched from the main pipe 13a.
  • a branch pipe 13b that is branched from the main pipe 13a.
  • the bacteria 18 may stay in the accumulated water and adhere to the wall surface of the pipe and proliferate.
  • the ultraviolet sterilizer 1 decomposes and kills bacteria 18 mixed in the accumulated water by ultraviolet rays from the ultraviolet light emitting diodes, and sterilizes the water to be treated and the inner wall surface of the pipe.
  • the ultraviolet sterilization apparatus 1 includes an ultraviolet irradiation apparatus that uses an ultraviolet light emitting diode 11 that emits ultraviolet light having an emission peak wavelength of 230 to 290 nm as a light source, and a lens 12.
  • the ultraviolet irradiation device includes a power supply device 15 that drives the ultraviolet light emitting diode 11.
  • the ultraviolet light emitting diode 11 is provided on the wall surface of the main pipe 13a so that the light emission surface 11a is exposed in the main pipe 13a.
  • the ultraviolet light-emitting diode 11 is arranged so as to irradiate ultraviolet rays to the connecting portion between the main pipe 13a and the branch pipe 13b.
  • the ultraviolet light emitting diode 11 emits ultraviolet rays when power is supplied by the power supply device 15. Bacteria can be decomposed or killed by ultraviolet rays of 230 to 290 nm. Therefore, the ultraviolet light emitting diode 11 only needs to emit ultraviolet light having an emission peak wavelength at 230 to 290 nm.
  • the ultraviolet light emitting diode 11 preferably emits ultraviolet light having an emission peak wavelength in the range of 250 to 260 nm. Further, the ultraviolet light emitting diode 11 may emit ultraviolet light having a light emission peak wavelength in the vicinity of 200 nm in addition to the ultraviolet light having the above wavelength.
  • the ultraviolet light emitting diode 11 includes, for example, a semiconductor element that emits ultraviolet light and a transparent sealing resin that encloses the semiconductor element.
  • the outer surface of the transparent sealing resin constitutes the light emission surface 11a.
  • the shape of the light emission surface 11a is not particularly limited, and may be a substantially flat shape or a shape having a curvature such as a dome shape.
  • the ultraviolet light emitting diode 11 may be either a chip type or a bullet type, but if it is a bullet type, it is easy to install in the main pipe 13a.
  • the size of the ultraviolet light emitting diode 11 for example, the size of the light emitting surface 11a is about 4 to 16 mm 2 .
  • the size of the light emitting surface 11a is in the above range, it is easy to install in the main pipe 13a, and most of the light emitting surface 11a is directed to the irradiation region without diffusing the ultraviolet rays emitted from the light emitting diode 11 outside the irradiation region. Can be irradiated efficiently.
  • the ultraviolet light emitted from the ultraviolet light-emitting diode 11 has high straightness, that is, a smaller spread angle of the ultraviolet light. This is because the higher the straightness of ultraviolet rays, the greater the amount of ultraviolet rays irradiated per unit area and the higher the sterilization efficiency. In addition, the higher the straightness of the ultraviolet light emitted by the ultraviolet light emitting diode 11, the easier it is to adjust the amount of light and the irradiation area by the lens 12 described later.
  • the spread angle of the ultraviolet rays emitted from the ultraviolet light emitting diode 11 is preferably 4 to 20 °, for example, in order to efficiently irradiate the irradiation region with the ultraviolet rays.
  • the ultraviolet radiation amount of the ultraviolet light emitting diode 11 can be adjusted to an output that can obtain a light amount necessary for sterilizing bacteria in the irradiation region.
  • the amount of ultraviolet radiation of the ultraviolet light emitting diode 11 is adjusted so that the amount of ultraviolet light that kills the bacteria can be irradiated within the time when the bacteria multiply twice. To do.
  • the loss of the amount of light due to the attenuation or scattering of ultraviolet rays by water in the lens 12 and the water pipe 13 to be treated can be set to 40 to 60%.
  • the amount of ultraviolet radiation of the ultraviolet light emitting diode 11 depends on the installation location of the ultraviolet sterilizer 1, the inner diameter of the main pipe 13a and the branch pipe 13b, the flow rate of water to be treated, etc. For example, 1 mW to 30 mW.
  • the lens 12 has an optical characteristic that converges or diverges ultraviolet rays emitted from the ultraviolet light emitting diode 11. Thereby, the lens 12 irradiates the predetermined irradiation area with the predetermined amount of the ultraviolet rays emitted from the ultraviolet light emitting diode 11.
  • the irradiation region is a region where bacteria are likely to adhere, and specifically, in the opening of the connection portion of the branch pipe 13b with the main pipe 13a and in the vicinity of the opening.
  • the amount of ultraviolet light irradiated to the irradiation region by the lens 12 is a light amount that can sterilize bacteria present in the irradiation region, and is, for example, 5000 ⁇ W ⁇ sec / cm 2 to 500,000 ⁇ W ⁇ sec / cm 2 . If the amount of ultraviolet light irradiated to the irradiation region is too small, the bactericidal effect may be insufficient, and if it is too large, the piping may be deteriorated by irradiation with ultraviolet light.
  • the lens 12 is disposed on the light emitting surface 11a of the ultraviolet light emitting diode 11, and seals the light emitting surface 11a exposed in the main pipe 13a in a watertight manner.
  • the material of the lens 12 is water-resistant and transmits ultraviolet light having an emission peak wavelength at 230 to 290 nm emitted from the ultraviolet light-emitting diode 11, and is made of, for example, quartz such as natural quartz glass or synthetic quartz glass. It is glass.
  • the shape of the lens 12 is a shape having the above-mentioned optical characteristics, and can be appropriately designed according to the range and position of the irradiation region to be irradiated with ultraviolet rays and the amount of ultraviolet rays irradiated to the irradiation region.
  • the shape of the lens 12 is, for example, a lens in which both main surfaces are spherical, a lens in which one of the main surfaces is a spherical surface and the other is a plane, an aspheric lens in which one or both of the main surfaces are in a shape other than a spherical surface and a plane
  • the lens 12 is a convex lens that converges ultraviolet rays emitted from the ultraviolet light-emitting diode 11, a concave lens that emits ultraviolet rays, or the like.
  • a concave lens that radiates the ultraviolet light can be used so that the ultraviolet light emitted from the ultraviolet light emitting diode 11 is irradiated to the entire irradiation region.
  • the lens 12 is designed to have a thickness and size so that a predetermined amount of ultraviolet light emitted from the ultraviolet light emitting diode 11 is irradiated onto the irradiation region.
  • an Optan TM UVC LED manufactured by Asahi Kasei Corporation and a DUV-LED TO type manufactured by Nikkiso Co., Ltd. are suitable.
  • the output of the ultraviolet sterilizer 1 is preferably 0.1 to 100 mW in that it is suitable for sterilization of the inner wall surface of the treated water pipe 13 of the ultrapure water production system and the pure water in the treated water pipe.
  • the ultraviolet sterilization apparatus 1 is provided in the position which faces the opening of the connection part of the branch piping 13b of the to-be-processed water piping 13, for example. Specifically, an attachment hole is provided at a position facing the opening of the connection portion of the branch pipe 13b, the lens 12 is fitted and fixed in the attachment hole, and further, ultraviolet rays are irradiated through the lens 12.
  • the ultraviolet light emitting diode 11 provided in the sterilizer 1 is disposed and fixed.
  • Mounting hole is mainly a pipe 13a, the axis L b of the end portion near the branch pipe 13b is preferably formed at the intersection.
  • ultraviolet sterilizer 1 for irradiating ultraviolet rays to the axis L b direction substantially parallel branch line 13b, the irradiation area can be irradiated with ultraviolet rays of a larger dose.
  • the number of the ultraviolet sterilizers 1 installed in the treated water pipe 13 may be one or two or more.
  • the shape of each lens 12 is designed so that the ultraviolet rays are irradiated in a concentrated manner in a desired irradiation area. Since the light quantity irradiated to an irradiation area
  • these ultraviolet sterilizers 1 may be arrange
  • the main pipe 13a and the branch pipe 13b of the to-be-treated water pipe 13 are made of a material with little elution of components into ultrapure water.
  • Such materials include, for example, polyvinyl chloride (PVC), polyphenylene sulfide (PPS), polyvinylidene fluoride (PVDF), fiber reinforced plastic (FRP), tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer (PFA), Although it is stainless steel etc., it is not limited to these.
  • the branch pipe 13b is connected to a connection port provided in the main pipe 13a by a joint or the like, for example. Moreover, you may create and use the to-be-processed water piping 13 of the shape which has the main piping 13a and the branch piping 13b with the said material.
  • a valve or the like is inserted in the branch pipe 13b so that the treated water flows as necessary.
  • This valve is, for example, a sampling valve that collects sample water for measuring water quality.
  • water quality measuring devices such as a resistivity meter, a conductivity meter, and a thermometer may be inserted into the branch pipe 13b.
  • the ultraviolet sterilizer 1 of the present embodiment it is effective to install the ultraviolet sterilizer 1 of the present embodiment at a location where sample water for water quality measurement is collected or a location where the water quality is measured on the main pipe 13a.
  • Connection mode of the main pipe 13a and the branch pipe 13b for example, arranged substantially perpendicular to the axis L a of the axis L b is the main pipe 13a of the end near the branch pipe 13b, the axis L b terminus near the branch pipe 13b is arranged or the like connected by inclined with respect to the axis L a of the main pipe 13a, it is not particularly limited.
  • the inner diameters of the main pipe 13a and the branch pipe 13b are appropriately set according to the structure of the apparatus in which the main pipe 13a is installed.
  • the inner diameter of the main pipe 13a in the ultrapure water production system is, for example, 10 to 200 mm. If the inner diameter of the branch pipe 13b is smaller than the main pipe 13a, accumulated water is likely to be generated, and a great effect is obtained.
  • the inner diameter of the branch pipe 13b is, for example, 5 to 50 mm.
  • the ultraviolet sterilizer 1 of the present embodiment it is possible to effectively sterilize the accumulated water and the like at the connection portion between the main pipe 13a and the branch pipe 13b. Therefore, the growth of bacteria and microorganisms in the pool water can be prevented.
  • an ultraviolet light-emitting diode that is extremely small compared to a low-pressure ultraviolet lamp or the like is used as an ultraviolet light source, the degree of freedom of installation location and installation method is high, and a desired irradiation area can be sterilized effectively.
  • FIG. 2 is a diagram schematically showing the ultraviolet sterilizer 2 installed in the water pipe 13 to be treated in which a measurement cell of a water quality measuring instrument such as a resistivity meter is inserted into the branch pipe 13b.
  • a measurement cell of a water quality measuring instrument such as a resistivity meter
  • the treated water pipe 131 is installed in the UV sterilizer 2, the axis L c of the end near the branch pipe 131b is connected to be inclined relative to the axis L d of the main pipe 131a.
  • a resistivity meter 19 is disposed in the branch pipe 131b.
  • the resistivity meter 19 includes a measurement cell 19a that measures the resistivity in contact with the water to be treated.
  • the measurement cell 19a is inserted and arranged in the branch pipe 131b.
  • bacteria are generated and propagated in the vicinity of the measurement cell 19a, the water quality cannot be measured accurately.
  • the ultraviolet sterilizer 2 of the embodiment By installing the ultraviolet sterilizer 2 of the embodiment, such a concern can be solved.
  • the ultraviolet light sterilizer 2 uses the ultraviolet light emitting diode 11 as a light source, it can be easily downsized and consumes little power. Therefore, it is possible to efficiently and effectively sterilize the accumulated water in the fine space such as the branch pipe connection part.
  • FIG. 3 is a diagram schematically showing another example of the installation mode of the ultraviolet sterilizer 3.
  • components having the same functions as those of the ultraviolet sterilizer 1 shown in FIG. are shown in FIG. 3
  • the main piping 132a consists of L-shaped piping.
  • the branch pipe 132b is connected to a bent portion of the main pipe 132a, that is, a joint portion having two L-shaped sides.
  • Axis L d binding the vicinity of the main pipe 132a of the branch pipe 132b is parallel to the axis L e of one side of the L shape of the main pipe 132a, so that it is perpendicular to the axis L f of the other side,
  • the branch pipe 132b is connected to the main pipe 132a.
  • the branch pipe 132b is connected to the main pipe 132a It may be.
  • the to-be-treated water is supplied from the side that is orthogonal to the branch pipe 132b of the main pipe 132a and flows out from the other side of the main pipe 132a. preferable.
  • the inner diameters of the main pipe 132a and the branch pipe 132b may be substantially the same, and the inner diameter of the branch pipe 132b may be smaller than the inner diameter of the main pipe 132a.
  • the inner diameter of the branch pipe 132b is preferably 2 to 10 cm, for example, and more preferably 3 to 5 cm. In the branch pipe 132b having such an inner diameter, accumulated water is easily generated, so that a great sterilization effect by the ultraviolet sterilizer 3 can be obtained.
  • the main pipe 132a is an L-shaped pipe, but the main pipe 132a may be a curved pipe having a curvature or a straight pipe.
  • the branch pipe 132b may be provided in a cross shape at the same place with respect to the main pipe 132a.
  • the water to be treated stays in the bent portion and tends to generate accumulated water.
  • the ultraviolet sterilizer 3 of the embodiment the accumulated water is efficiently and effectively used. Can be sterilized.
  • the branch pipe 132b is, for example, a pipe after an ultrapure water quality or water pressure measuring instrument, sampling cock, etc. are installed and removed, or a pipe for installing a measuring instrument or sampling cock later.
  • a method of installing the ultraviolet sterilizer 3 in the branch pipe 132b when a screw-type connection portion is provided at the end of the branch pipe 132b, this can be used.
  • the light emitting surface 11a of the ultraviolet sterilizer 3 is accommodated, and a housing having a screw groove and a screw thread to be screwed with the screw groove and the screw thread of the screw-type connecting portion is provided, and the branch pipe 132b is provided. It is possible to connect to a screw-type connection part.
  • a plurality of ultraviolet sterilizers 3 may be installed, but one installation is preferable for ease of installation.
  • the amount of ultraviolet irradiation to the inner wall surface of the water pipe 132 to be treated is designed from the output of the ultraviolet light emitting diode 11 and the area of the inner wall surface of the water pipe 132 to be sterilized. For example, 0.01 to 10 mW / cm 2 is preferable.
  • FIG. 4 is a diagram schematically showing an ultrapure water production system 4 provided with the ultraviolet sterilizer 1 of the first embodiment.
  • the ultrapure water production system 4 includes a pretreatment unit 31, a primary pure water production unit 41, and a secondary pure water production unit 51.
  • the pretreatment unit 31 includes a flocculation / filtration / precipitation device and the like, and removes turbid components and the like in the raw water to generate pretreatment water.
  • the raw water is city water, well water, industrial water, etc., or used ultrapure water collected, treated, and used in a semiconductor manufacturing factory, but is not limited thereto.
  • the primary pure water production unit 41 removes most ionic and nonionic components in the pretreated water to generate primary pure water.
  • the primary pure water production unit 41 includes a cation exchange resin device, a two-bed / three-column type device (2B3T) 42 comprising a decarboxylation tower and an anion exchange resin device, a reverse osmosis membrane device (RO) 43, an ultraviolet oxidation device (TOC). -UV) 44, and mixed bed type ion exchange resin apparatus (MB) 45.
  • a two-stage RO device in which a reverse osmosis membrane device (RO) is arranged instead of the two-bed three-column type device (2B3T) 42 may be used.
  • the ultraviolet oxidizer 44 irradiates the water to be treated with ultraviolet light having a peak wavelength of 180 to 190 nm by using a low-pressure ultraviolet lamp or a light emitting diode to decompose organic substances.
  • the primary pure water produced by the primary pure water production unit 41 is stored in the tank 46.
  • the primary pure water in the tank 46 is supplied to the secondary pure water production section 51, where trace organic substances and trace fine particles in the primary pure water are removed.
  • the secondary pure water production unit 51 includes an ultraviolet oxidation device (TOC-UV) 52, a membrane deaeration device (MDG) 53, a non-regenerative mixed bed ion exchange resin device (Polisher) 54, and an ultrafiltration device (UF). 55 is configured.
  • the ultrapure water obtained in the secondary pure water production unit 51 is supplied to a use point (POU) 56 that is a place of use.
  • the ultrapure water obtained in the secondary pure water production unit 51 has, for example, a TOC concentration of 5 ⁇ g C / L or less and a resistivity of 17.5 M ⁇ ⁇ cm or more.
  • the ultrapure water production system 4 includes a non-regenerative mixed bed ion exchange resin device (a non-regenerative mixed bed ion exchange resin device (MB) 45 of the primary pure water production unit 41 and a secondary stage of the secondary pure water production unit 51)
  • a resistivity meter 19 is provided in the subsequent stage of the (Polisher) 54. Branching into the treated water discharge pipe (main pipe 13a) of the mixed bed type ion exchange resin apparatus (MB) 45 and the non-regenerative mixed bed ion exchange resin apparatus (Polisher) 54 treated water discharge pipe (main pipe 13a) The pipe 13b is connected. And the resistivity meter 19 is installed by inserting the measurement cell 19a in each branch piping 13b.
  • the ultrapure water production system 4 includes the ultraviolet sterilizer 1 of the above embodiment.
  • the ultraviolet sterilizer 1 is installed so that the light emission surface 11a of the ultraviolet light emitting diode 11 is located on the wall surface of the main pipe 13a facing the connection port of the branch pipe 13b.
  • the ultraviolet sterilizer 1 of the embodiment When measuring the water quality in the ultrapure water production system 4, if bacteria are generated and propagated in the vicinity of the measurement cell 19a, the water quality may not be measured accurately.
  • the ultraviolet sterilizer 1 uses the ultraviolet light emitting diode 11 as a light source, it can be easily miniaturized and consumes less power.
  • the ultraviolet sterilizer 1 uses the ultraviolet light emitting diode 11 as a light source, it can be easily miniaturized and consumes less power.
  • the ultraviolet sterilizer 1 uses the ultraviolet light emitting diode 11 as a light source, it can be easily miniaturized and consumes less power.
  • the ultraviolet sterilizer 1 uses the ultraviolet light emitting diode 11 as a light source, it can be easily miniaturized and consumes less power.
  • the ultraviolet sterilizer 1 uses the ultraviolet light emitting diode 11 as a light source, it can be easily miniaturized and consumes less power.
  • the ultraviolet sterilizer 1 uses the ultraviolet light emitting diode 11 as a light source, it can
  • the resistivity meter 19 is provided in the subsequent stage of the mixed bed type ion exchange resin apparatus (MB) 45 and the subsequent stage of the non-regenerative type mixed bed ion exchange resin apparatus (Polisher) 54.
  • the installation location of the resistivity meter 19 is not limited to this, and the resistivity meter 19 may be arranged at the subsequent stage of the ultrafiltration device 55.
  • the number of installed resistivity meters 19 in the ultrapure water production system 4 may be one or two or more.
  • the number of installed resistivity meters 19 is appropriately set as necessary.
  • the installation number of the ultraviolet sterilizer 1 can also be changed suitably as needed.
  • the mode in which the ultraviolet sterilizer 1 is installed at the location where the resistivity meter 19 is arranged is shown.
  • a conductivity meter is used as a water quality measuring device
  • reverse osmosis is performed.
  • a conductivity meter and the ultraviolet sterilizer 1 are installed in combination at the subsequent stage of the membrane device 43.
  • the thermometer and the ultraviolet sterilizer 1 are installed in combination with the rear stage of a heat exchanger (not shown) installed at the rear stage of the tank 46. .
  • the same effect as that obtained when the resistivity meter 19 and the ultraviolet sterilizer 1 are used in combination can be obtained.
  • UV oxidizer TOC-UV
  • MDG Membrane degasser
  • POU Youspo Cement

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  • Treatment Of Water By Ion Exchange (AREA)

Abstract

La présente invention concerne un dispositif de stérilisation par ultraviolets, un procédé de stérilisation par ultraviolets et un système de fabrication d'eau extrêmement pure capables de stériliser efficacement l'eau retenue dans de petits espaces dans des raccords de branchements et autres. Le dispositif de stérilisation par ultraviolets est pourvu : d'un tuyau principal 13a formant un trajet d'écoulement pour l'eau à traiter ; d'un branchement 13b relié au tuyau principal 13a ; d'une lentille 12 fixée de manière étanche à l'eau dans une position dans le tuyau principal 13 tournée vers l'ouverture d'un raccord pour le branchement 13b ; d'un dispositif de rayonnement par ultraviolets ayant une diode électroluminescente ultraviolette, qui émet des rayons ultraviolets d'une longueur d'onde de pic d'émission de 230 à 290 nm, en tant que source de lumière. La diode électroluminescente ultraviolette 11 est disposée avec la surface d'émission de lumière 11a de celle-ci tournée vers le côté de la lentille 12 sur le côté de la surface arrière de la lentille 12, la lentille 12 ayant des caractéristiques optiques pour diffuser ou converger les rayons ultraviolets de telle sorte qu'une quantité prescrite des rayons ultraviolets émis par la source lumineuse du dispositif d'irradiation ultraviolette 1 irradie l'intérieur de l'ouverture du branchement 13b.
PCT/JP2017/021347 2016-06-22 2017-06-08 Dispositif et procédé de stérilisation par ultraviolets et système de fabrication d'eau extrêmement pure WO2017221733A1 (fr)

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CN201780038673.8A CN109415228B (zh) 2016-06-22 2017-06-08 紫外线杀菌装置、紫外线杀菌方法及超纯水制造系统

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CN111829073B (zh) * 2020-06-18 2021-07-23 宁波奥克斯电气股份有限公司 一种紫外线杀菌装置、方法及空调器

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