WO2017209319A1 - Système de mesure de coefficient d'absorption de lumière d'aérosol ayant un volume de mesure étendu - Google Patents

Système de mesure de coefficient d'absorption de lumière d'aérosol ayant un volume de mesure étendu Download PDF

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Publication number
WO2017209319A1
WO2017209319A1 PCT/KR2016/005739 KR2016005739W WO2017209319A1 WO 2017209319 A1 WO2017209319 A1 WO 2017209319A1 KR 2016005739 W KR2016005739 W KR 2016005739W WO 2017209319 A1 WO2017209319 A1 WO 2017209319A1
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Prior art keywords
light
unit
path
absorption coefficient
measurement
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PCT/KR2016/005739
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English (en)
Korean (ko)
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이정훈
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한국기술교육대학교 산학협력단
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Publication of WO2017209319A1 publication Critical patent/WO2017209319A1/fr

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/3103Atomic absorption analysis
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N31/00Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
    • G01N31/22Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using chemical indicators
    • G01N31/223Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using chemical indicators for investigating presence of specific gases or aerosols
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10Beam splitting or combining systems
    • G02B27/14Beam splitting or combining systems operating by reflection only
    • G02B27/141Beam splitting or combining systems operating by reflection only using dichroic mirrors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/06Illumination; Optics
    • G01N2201/061Sources
    • G01N2201/06113Coherent sources; lasers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/06Illumination; Optics
    • G01N2201/066Modifiable path; multiple paths in one sample
    • G01N2201/0662Comparing measurements on two or more paths in one sample

Definitions

  • the present invention relates to a light absorption coefficient measuring system and a measuring method, and more particularly, to a light absorption coefficient measuring system and measuring method of aerosol extended measurement.
  • aerosol refers to small particles in the solid or liquid phase suspended in the atmosphere, scatter and absorb light, affect the temperature, and act as clogged tuberculosis to form clouds or precipitation in the atmosphere. Through the reaction, it acts as a factor that affects the weather and climate, such as being involved in air pollution.
  • the light absorption coefficient of the aerosol existing in the atmosphere can be utilized as a data for determining global warming, accurate measurement of the light absorption coefficient using aerosol as a sample is required.
  • the problem to be solved by the present invention is to provide a system for measuring the light absorption coefficient of the aerosol is expanded measurement volume that can easily and accurately obtain the light absorption coefficient of the aerosol.
  • Another object of the present invention is to provide a method for measuring the light absorption coefficient of an aerosol, in which a measurement volume capable of easily and accurately obtaining the light absorption coefficient of an aerosol is expanded.
  • the light absorption coefficient measuring system of an aerosol includes a light source unit, an interference light forming unit, a heating unit, a measuring unit, and a calculating unit.
  • the light source unit generates light.
  • the interference light forming unit divides the light generated from the light source into a first light corresponding to a probe beam and a second light corresponding to a reference beam, and guides the light passing through the receiving part to receive an aerosol as a measurement object.
  • Has a first path and the second light has a second path that is different from the first path to form interference light such that a predetermined path difference occurs between the first light and the second light.
  • the heating unit heats any one of the first light and the second light passing through the accommodation unit.
  • the measurement unit obtains measurement values corresponding to the amount of light of the interference light formed by the interference light forming unit.
  • the calculation unit calculates a light absorption coefficient of the measurement object by using the measured values measured by the measurement unit, the heating unit is a laser device for forming the laser light, wherein the laser beam is heated by the laser light Changing the light path such that the path of the laser light and the path of the second light passing through the interior of the receiving portion cross at an angle of 1 ° or less so as to increase the measurement volume of the aerosol that is different to the heating range of the 2 light. It includes a light path changing unit.
  • the interference light forming unit, the optical path changing unit transmits the first light into the receiving unit so that the laser light heats the first light, and transmits the laser light into the receiving unit.
  • a first path changing unit for reflecting and the first light passing through the receiving part by the first path changing unit and passing through the receiving part toward the measuring part, and by the first path changing unit It may include a second path change renovation that reflects the laser light passing through the accommodation portion in a direction different from the measurement unit, the first path changing unit and the second path changing unit, The laser light passing between the first path changing unit and the second path changing unit and the first light may be disposed to have a path that crosses at an angle of 1 ° or less.
  • the laser light has a wavelength in the first wavelength range
  • the second light has a wavelength in the second wavelength range
  • the first path changing unit and the second path changing unit is the light of the first wavelength range. The light may be reflected and the light in the second wavelength range may be transmitted.
  • the first wavelength range is in the range of 495 nm to 570 nm
  • the second wavelength range is in the range of 620 nm to 750 nm
  • the first path changing unit and the second path changing unit are dichroic mirrors. Can be.
  • the interference light forming unit receives light generated from the light source unit to reflect at least a part of the first light to form the first light and transmit at least a part of the second light, and transmits the second light.
  • a beam splitter for reflecting light and a retroreflector for receiving the first light reflected from the beam splitter and the second light transmitted and reflected by the beam splitter and reflecting toward the beam splitter may include.
  • the beam splitter may be formed on a beam splitter body and a first surface of the beam splitter body, and receive light generated from the light source unit to reflect the first light and transmit the second light. And a second layer formed on a first layer and a second surface opposite to the first surface of the beam splitter body, and reflecting the second light transmitted through the first layer toward the retroreflector.
  • it may further include a polarization control unit for adjusting the polarization state of the interference light by receiving the interference light formed by the interference light forming unit.
  • the measuring unit may receive the beam splitting unit for receiving the interference light into a third light of the first polarization component and a fourth light of the second polarization component and the third light separated from the beam separation unit. It may include a light receiving element.
  • a pinhole may be disposed on the front portion of the light receiving element.
  • the calculation unit obtains a measurement value corresponding to the first light amount of the first polarization component before heating of the heating unit, and increases the voltage applied to the polarization control unit from 0 until the measurement value converges. And setting the intermediate value of the measured value when the voltage is 0 and the measured value when the measured value converges as a reference value and heating corresponding to the first light amount of the first polarization component after heating of the heating part.
  • the post-measurement value may be obtained, and the light absorption coefficient of the measurement object may be calculated based on the difference between the post-heating measurement value and the reference value.
  • the calculation processing unit may calibrate the light absorption coefficient by using the previously measured difference value of the reference measurement object having a known reference light absorption coefficient and the reference light absorption coefficient.
  • the light is divided into a first light corresponding to the probe beam and a second light corresponding to the reference beam to provide an interior of the accommodating part including an aerosol as an object to be measured.
  • Adjusting the optical path by the interference light forming unit to form a light source receiving the interference light formed by the interference light forming unit to obtain a measurement value corresponding to the first light amount of the first polarization component; Calculating a reference value based on the measured value; and heating the first light passing through the accommodation part by adjusting an optical path.
  • the method may further include adjusting a polarization state of the interference light formed by the interference light forming unit.
  • the calculating of the reference value may include increasing the voltage applied to the polarization control unit from 0 until the measured value converges, and the measured value and the measured value when the voltage is 0 converged. And setting the intermediate value of the measured value as a reference value.
  • the heating of the heating unit may further include generating a laser light by the laser device to increase a measurement volume of the aerosol that is different from a heating range of the first light heated by the laser light.
  • the optical path changing unit may change the optical path so that the path of the laser light passing through the receiving part and the path of the first light cross at an angle of 1 ° or less.
  • the step of changing the light path of the light path changing unit the first path changing unit transmits the first light into the receiving portion, so that the laser light heats the first light, Reflecting the inside of the accommodating part and transmitting the first light passing through the accommodating part through the accommodating part toward the measuring part, and the accommodating part by the first path changing unit. And reflecting the laser light reflected therein and passing through the receiving part in a direction different from that of the measuring part, wherein the first path changing unit and the second path changing unit include: the first path changing unit and the; The laser light passing through the second path changing unit and the first light may be disposed to have a path that crosses at an angle of 1 ° or less.
  • the measuring unit may acquire a post-heating measurement value corresponding to the first light amount of the first polarization component and based on a difference between the post-heating measurement value and the reference value.
  • the method may include calculating a light absorption coefficient of the measurement object.
  • the method may include calibrating the light absorption coefficient of the measurement object using the reference light absorption coefficient of the reference measurement object.
  • the light absorption coefficient is calculated by using the difference from the measured values corresponding to the amount of light of the light after dividing the light by adjusting the optical path to generate a path difference and dividing the interference light again.
  • the measurement volume is extended by crossing the path of the laser beam for heating the sample with the path of the probe beam passing through the interior of the receiving part including the sample to 1 ° or less, thereby increasing the light absorption coefficient of the sample such as an aerosol. It can be measured more easily.
  • the light except for the light generated from the light source unit is blocked, and by receiving the light in the effective range, it is possible to easily obtain a measurement value without noise.
  • FIG. 1 is a block diagram showing a light absorption coefficient measuring system according to an embodiment of the present invention.
  • FIG. 2 is a conceptual diagram illustrating an example of an interference light forming unit of the light absorption coefficient measuring system of FIG. 1.
  • FIG. 3 is a block diagram illustrating an example of a polarization control unit, a measurement unit, and a calculation unit of the light absorption coefficient measurement system of FIG. 1 in detail.
  • FIG. 4 is a graph comparing a signal measured after heating the probe beam using the heating unit of FIG. 1 and a signal measured after heating the probe beam using the conventional heating unit.
  • first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another.
  • the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.
  • FIG. 1 is a block diagram showing a light absorption coefficient measuring system according to an embodiment of the present invention.
  • the light absorption coefficient measuring system 100 includes a light source unit 110, an interference light forming unit 120, a light source unit 130, a polarization control unit 140, and a measurement unit. 150 and the calculation unit 160.
  • the light source unit 110 generates light.
  • the light source unit 110 may include a laser light source.
  • the light source unit 110 may include a light source for irradiating He-Ne laser light of approximately 632 nm.
  • the light irradiated from the light source unit 110 may be polarized at a predetermined angle.
  • the predetermined polarized angle may be approximately 45 degrees. Accordingly, the light splitting from the beam splitter 122 (see FIG. 2) of the interference light forming unit 120 to be described later may form each path with an appropriate amount of light.
  • the interference light forming unit 120 divides the light generated from the light source unit 110 into a first light and a second light to guide the object to pass through the measurement object.
  • the light path is adjusted such that the first light has a first path and the second light has a second path different from the first path so that a predetermined path difference occurs between the first light and the second light.
  • FIG. 2 is a conceptual diagram illustrating an example of an interference light forming unit of the light absorption coefficient measuring system of FIG. 1.
  • the interference light forming unit 120 may include a beam splitter 122 and a retroreflector 124.
  • the beam splitter 122 may receive the light generated from the light source unit 110 to reflect at least part of the light to form the first light L1 and transmit at least part of the light to form the second light L2. have. In addition, the beam splitter 122 may reflect the transmitted second light L2 toward the retroreflector.
  • one of the first light L1 and the second light L1 may correspond to a reference beam that is not heated by the heater 130, which will be described later. It may correspond to a probe beam heated by the heating unit 130.
  • the beam splitter 122 may include a beam splitter body 122a, a first layer 122b, and a second layer 122c.
  • the first layer 122b is formed on at least a portion of the first surface of the beam splitter body 122a and receives the light generated from the light source unit 110 to reflect the first light L1.
  • the second light L2 is transmitted.
  • the first layer 122b may be, for example, a polarizing beam splitter coating layer for beam splitting, and a rear surface of the first layer 122b may be a reflecting surface to form the optical path shown in FIG. 2. have.
  • the first layer 122b may be formed by coating a material for polarizing the laser, for example, a material containing dielectric and partially light-transmitting inconel, chrome, or the like.
  • the split ratio may be 10:90, 30:70, 50:50, etc., depending on the characteristics of the coating, and polarized laser light generated from the light source unit 110, for example, s-polarized light (s polarized light to be split into first light L1 that is -polarized light and second light L2 that is p-polarized light, and alternatively, first light L1 that is p-polarized light, It can also polarize so that it may be divided into s-polarized second light L2.
  • the second layer 122c is formed on at least a portion of the second surface that is opposite to the first surface of the beam splitter body 122a, and the second light L2 transmitted through the first layer 122b. It is reflected toward the retroreflector 124 which will be described later.
  • the second layer 122c may be, for example, a reflective coating layer coated with a reflective material for reflection.
  • the second layer 122c may be formed at a position shifted from the first layer 122b so as to form an optical path as shown in FIG. 2.
  • the retro-reflector 124 receives the first light L1 reflected from the beam splitter 122 and the second light L2 transmitted and reflected by the beam splitter 122. 122).
  • the laser light generated from the light source unit 110 is divided into the first light (L1) and the second light (L2) to the retro After being reflected by the reflector 124, paths are formed relatively outward and inward, respectively.
  • the first light L1 is sequentially reflected by the second layer 122c and the first layer 122b, and the second light L1 passes through the first layer 122b,
  • the first light L1 and the second light L2 meet and interfere with each other, and the interference light IL due to the interference is emitted to the outside of the beam splitter 122.
  • the heating unit 130 heats one of the first light L1 and the second light L2 passing through the measurement object 10.
  • the measurement object 10 is a sample for measuring the light absorption coefficient.
  • the measurement object 10 may be an aerosol that collectively refers to a solid or liquid particulate matter suspended in the air.
  • aerosols can be collected, for example, through a collecting device such as a filter in the atmosphere.
  • the measurement object 10 may be accommodated in the accommodating part 170, and the accommodating part 170 may have an inlet and an outlet formed to allow the measured object to enter and exit the object.
  • the first light L1 may correspond to a probe beam heated by the heating unit 130
  • the second light L2 may correspond to the heating unit ( 130 may correspond to a reference beam that is not heated.
  • the heating unit 130 may include a laser device 132 for heating, and may be, for example, a diode pumped solid state (DPSS) laser having an output of approximately 1W.
  • the laser device 132 may irradiate a laser light corresponding to the wavelength of the light to be measured, for example, may employ a laser of the wavelength to measure the absorption of the visible light region, the laser light The green wavelength laser can be adopted.
  • an infrared laser may be employed to measure absorption in the infrared region.
  • the heating unit 130 may heat the probe beam passing through the measurement object 10 accommodated in the receiving unit 170 by using the laser light generated by the laser device 132.
  • the heating unit 130 may include an optical path changing unit for effectively heating the probe beam by using the laser light formed in the laser device 132.
  • the light path changing unit may include a first path changing unit 134a and a second path changing unit 134b.
  • the first path changing unit 134a may transmit the probe beam into the accommodating part and reflect the laser light into the accommodating part so that the laser light heats the probe beam.
  • the path changing unit 134b transmits the second light passing through the receiving part by the first path changing unit 134a and passing through the receiving part toward the measuring part, and the second path changing unit 134a.
  • the laser beam reflected into the accommodating part and passed through the accommodating part may be reflected in a direction different from that of the measuring part.
  • the first path changing unit 134a and the second path changing unit 134b may be a dichroic mirror made of many thin layers of materials having different refractive indices.
  • the dichroic mirror employed may be a dichroic mirror that reflects light in a range of 495 to 570 nm corresponding to green of visible light and transmits light in a range of 620 to 750 nm corresponding to red.
  • the first path changing unit 134a and the second path changing unit 134b reflect the laser light having a green light range, and the first light having a red series wavelength of 632 nm generated from the light source unit 110. L1) and the second light can be transmitted.
  • the first path changing unit 134a transmits the first light L1, which is a probe beam, to change the light path toward the inside of the accommodation unit 170.
  • the laser beam directed from the laser device 132 to the first path changing unit 134a is reflected to the inside of the accommodating part 170 to which the first light L1 is directed.
  • the unit 134b is disposed to correspond to the first path changing unit 134a so as to be spaced apart from each other, so that the first light L1 passing through the accommodating part 170 is directed toward the interference light forming part 120.
  • the light is transmitted to form interference light with the second light L2, and a path is formed to cross the first light L1 and the receiving part 170 by the first path changing unit 134a. Reflects the laser light, so that the laser light passes around the first light L1 passing through the accommodating part 170. After heating the object to be measured 10, it is possible to prevent the head parts of the measurement.
  • the first route changing unit 134a and the second route changing unit 134b are installed as shown in FIG. 2, so that the first route changing unit 134a and the second route changing unit 134b.
  • the first light L1 which is the laser beam and the probe beam, passing between
  • the laser light generated by the laser device 132 has a path substantially coinciding with an optical path through which the first light L1 passes through the receiving part 170. Therefore, the laser light 132 is not a point.
  • the measurement volume of the aerosol heated in a line along the light path of the first light L1 is increased to effectively calculate the light absorption coefficient of the aerosol.
  • the aerosol around the probe beam absorbs the laser light to change the refractive index, thereby changing the optical path of the probe beam.
  • the change in the optical path is measured by the interference pattern changed by the measuring unit 150 to be described later and the change in the amount of light.
  • the light absorption coefficient of the aerosol may be calculated by the calculation unit 160, which will be described later, using the change in the measured value corresponding to the change in the amount of light.
  • the heating unit 130 may periodically modulate the intensity of the laser light.
  • the heating unit 130 may include a modulator 136 for periodically changing the intensity of the laser light.
  • the heating unit 130 may be a function generator.
  • the function generator 136 is formed by periodically changing the intensity of the laser light using a Transistor Transistor Logic (TTL) signal, rather than periodically changing the intensity of the laser light using a conventional mechanical chopper. It may be a device for blocking acoustic wave noise.
  • TTL Transistor Transistor Logic
  • the polarization control unit 140 has interference light IL of the first light L1 and the second light L2 whose optical path is controlled by the interference light forming unit 120. ) To adjust the polarization state of the interference light IL.
  • the measurement unit 150 receives the interference light IL whose polarization state is adjusted by the polarization control unit 140, and thus, the first measurement value and the first polarization corresponding to the first light amount of the first polarization component. A second measured value corresponding to the second amount of light of the second polarization component different from the component is obtained.
  • the calculation unit 160 selects one of the first polarization component and the second polarization component to calculate a light absorption coefficient of the measurement object based on a measurement value corresponding to the amount of light of the selected polarization component.
  • FIG. 3 is a block diagram illustrating an example of a polarization control unit, a measurement unit, and a calculation unit of the light absorption coefficient measurement system of FIG. 1 in detail.
  • the polarization control unit 140 may change the polarization state of the interference light IL, and thus change the measured value according to the amount of light measured by the measurement unit 150 to be described later.
  • the polarization state may be expressed by decomposing two reference components perpendicular to the traveling direction of the interference light IL, and for example, the interference light IL may be expressed as a reference component of a P-polarized component and an S-polarized component. Can be decomposed into
  • the polarization control unit 140 receives the feedback signal FS by the calculation unit 160 which will be described later, and changes the voltage applied to the polarization control unit 140, thereby preventing the interference light (
  • the polarization state of the IL that is, the polarization components (eg, the P-polarized component and the S-polarized component) of the interference light IL
  • a measured value according to the amount of light measured by the measurement unit 150 is obtained. Can change.
  • the polarization control unit 140 may employ, for example, a liquid crystal variable retarder to control various polarization states.
  • the liquid crystal variable retarder may change the polarization state of the interference light IL by changing the molecular arrangement of the liquid crystal, thereby changing the measured value according to the amount of light measured by the measuring unit 150 to be described later.
  • the measurement unit 150 may include a beam separation unit 152, a first light receiving element 154 and a second light receiving element 156.
  • the beam separation unit 152 is provided with the interference light IL whose polarization state is controlled by the polarization control unit 140, so that the third light L3 of the first polarization component and the second polarization component It separates into 4th light L4. That is, the beam separation unit 152 converts the interference light IL into, for example, a third light L3 corresponding to the P-polarized component and a fourth light L4 corresponding to the S-polarized component. It may be a splitting beam splitter. As described above, the polarization control unit 140 changes the amount of light of the third light L3 and the fourth light L4 by rotating the interference light IL by a predetermined angle about the path direction. Can be formed.
  • the first light receiving element 154 receives the third light L3 separated from the beam separation unit 152, and the second light receiving element 156 is separated from the beam separation unit 152.
  • the fourth light L4 is received.
  • the first and second light receiving elements 154 and 156 convert the received third light L3 and the fourth light L4 into electrical signals, thereby converting the first polarization component and the second polarization component. A measured value corresponding to the amount of light can be obtained.
  • the light receiving elements 154 and 156 may include, for example, a photo diode, and the measured values may be voltage values.
  • the pinholes 154a and 156a may be configured to prevent noise from occurring on the front surfaces of the first and second light receivers 154 and 156 and to selectively receive a light in a valid range.
  • laser line filters 154b and 156b may be disposed.
  • the pinholes 154a and 156a selectively receive light in a valid range of light received by the light receiving element, and have a hole capable of blocking light other than the light generated from the light source unit 110. Can be adopted.
  • a filter capable of selectively passing light having a specific wavelength that is, He-Ne light having approximately 632 nm may be used.
  • the measurement unit may further include a signal amplifier 158.
  • the signal amplifier 158 amplifies and transmits the measured value measured by the light receiving elements to the calculator 160.
  • the signal amplifier 158 transmits a feedback signal FS to the modulator 136 based on the obtained measured value, adjusts the period of the intensity of the laser light, and whether the heating unit 130 is heated or not. It is possible to obtain a measured value according to.
  • the signal amplifier 158 may be a lock-in amplifier.
  • the calculation unit 160 may include a calculation processing unit 162.
  • the calculation processing unit 162 obtains a measurement value corresponding to the amount of light of the first polarization component by a user or an algorithm before heating the heating unit 130 (see FIG. 1), and the polarization control unit 140
  • the voltage to be applied is increased from 0 until the measured value converges, and the middle value of the measured value when the voltage is 0 and the measured value when the measured value converges is set as a reference value, and the heating unit ( After the heating of 130), a post-heating measurement value corresponding to the third light amount of the first polarization component is obtained, and the light absorption coefficient of the measurement object is calculated based on the difference between the post-heating measurement value and the reference value. Can be.
  • the calculation processing unit 162 before the heating of the heating unit 130 the voltage of the polarization control unit 140 from 0 until the measured value measured through the light receiving element converges While increasing, the measured values of the third light L3 corresponding to the S-polarized component are obtained, the median of the measured values is set as a reference value, and the S-polarized component after heating of the heating unit 130 is obtained.
  • the light absorption coefficient of the measurement target may be calculated by obtaining a post-heating measurement value, which is a measurement value of the corresponding third light L3, from the difference with the intermediate value.
  • the calculator may include a feedback processor (not shown).
  • the feedback processor may transmit a feedback signal to the polarization controller 140 to allow the polarization controller 140 to adjust the polarization state of the interference light.
  • the feedback processor and the calculation processor 162 may be included in a computer that controls the light absorption coefficient measurement system 100.
  • at least one of the feedback processor and the calculation processor 162 may be provided as a separate device from the computer.
  • the calculation processing unit 162 may calibrate the light absorption coefficient by using the difference of the measurement object having a known reference light absorption coefficient and the reference light absorption coefficient.
  • the measurement is first performed through the light absorption coefficient measuring system 100 using a predetermined sample having a known light absorption coefficient (reference light absorption coefficient).
  • the difference obtained as a result is set as the reference light absorption coefficient.
  • the difference obtained as a result may be calibrated based on the difference of the sample having the reference light absorption coefficient.
  • the sample to be measured has a light absorption coefficient of 0.5. can see.
  • the optical path is adjusted so that a path difference is generated to generate interference light, and the difference from the measured values corresponding to the amount of light of the light after splitting the interference light again.
  • the light except the light generated from the light source unit is blocked, and by receiving the light in the effective range, it is possible to easily obtain a measurement value without noise to more accurately measure the light absorption coefficient of the sample can do.
  • FIG. 4 is a graph comparing a signal measured after heating the probe beam using the heating unit of FIG. 1 and a signal measured after heating the probe beam using the conventional heating unit.
  • Graph A of FIG. 4 is a graph measuring signal intensity for 2 hours when the point where the optical path of the laser beam coincides with the optical path of the probe beam using a heating unit of the prior art
  • the graph B is a graph of the present invention It is a graph which measured the intensity of the signal when the optical path of a laser beam crosses the optical path of a probe beam by 1 degrees or less using the heating part, ie, when heating with a line, for 2 hours.
  • a sample having a reference light absorption coefficient of 1 is measured with the heating unit 130 according to an embodiment of the present invention.
  • the signal of about 100mV can be obtained.
  • the scale of the measurable signal is expanded, and thus, the reference light absorption coefficient has a
  • the measurement range of the sample and the range in which it can be calibrated are also extended, so that it is possible to more stably measure the light absorption coefficient of the thin aerosol of aerosol, which is difficult to measure in the conventional light absorption coefficient system.

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Abstract

L'invention concerne un système pour mesurer le coefficient d'absorption de lumière d'un échantillon d'aérosol ayant un volume de mesure étendu, qui comprend une unité de source de lumière, une unité de formation de lumière uniforme, une unité de chauffage, une unité de commande de polarisation, une unité de mesure et une unité de calcul. L'unité de formation de lumière uniforme divise la lumière générée par l'unité de source de lumière en une première lumière et une seconde lumière et guide les lumières de telle sorte qu'elles passent à travers un objet à mesurer, tout en réalisant une commande de telle sorte qu'une différence de trajet est créée entre les première et seconde lumières. L'unité de chauffage chauffe l'une quelconque des lumières en utilisant un dispositif laser, une première unité de changement de trajet et une seconde unité de changement de trajet. L'unité de mesure obtient des valeurs de mesure correspondant aux quantités de lumière de composantes de polarisation. L'unité de calcul calcule le coefficient d'absorption de lumière de l'objet à mesurer, sur la base des valeurs de mesure. En conséquence, le coefficient d'absorption de lumière de l'aérosol peut être mesuré plus facilement et avec précision.
PCT/KR2016/005739 2016-05-30 2016-05-31 Système de mesure de coefficient d'absorption de lumière d'aérosol ayant un volume de mesure étendu WO2017209319A1 (fr)

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KR10-2016-0066596 2016-05-30

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WO2022070136A1 (fr) * 2020-10-02 2022-04-07 3M Innovative Properties Company Système de mesure comprenant un réflecteur

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005049328A (ja) * 2003-07-29 2005-02-24 Northrop Grumman Corp 化学的および生物学的エーロゾルの遠隔検出および分析
KR20060050572A (ko) * 2004-08-24 2006-05-19 시스템 인스트루먼츠 컴퍼니 리미티드 시료의 광흡수특성을 측정하기 위한 방법 및 장치
KR20120003817A (ko) * 2010-07-05 2012-01-11 식크 매이핵 게엠베하 가스 분석용 광전자 장치 및 방법
KR101502236B1 (ko) * 2013-10-25 2015-03-12 한양대학교 산학협력단 3 차원 다색 형광 공초점 현미경 및 이를 사용하는 시편의 깊이의 정보를 생성하는 방법
KR101602068B1 (ko) * 2014-12-02 2016-03-09 한국기술교육대학교 산학협력단 편광 및 간섭을 이용한 에어로졸의 광흡수계수 측정시스템

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005049328A (ja) * 2003-07-29 2005-02-24 Northrop Grumman Corp 化学的および生物学的エーロゾルの遠隔検出および分析
KR20060050572A (ko) * 2004-08-24 2006-05-19 시스템 인스트루먼츠 컴퍼니 리미티드 시료의 광흡수특성을 측정하기 위한 방법 및 장치
KR20120003817A (ko) * 2010-07-05 2012-01-11 식크 매이핵 게엠베하 가스 분석용 광전자 장치 및 방법
KR101502236B1 (ko) * 2013-10-25 2015-03-12 한양대학교 산학협력단 3 차원 다색 형광 공초점 현미경 및 이를 사용하는 시편의 깊이의 정보를 생성하는 방법
KR101602068B1 (ko) * 2014-12-02 2016-03-09 한국기술교육대학교 산학협력단 편광 및 간섭을 이용한 에어로졸의 광흡수계수 측정시스템

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