WO2017209253A1 - Module de balayage optique et dispositif de balayage optique - Google Patents

Module de balayage optique et dispositif de balayage optique Download PDF

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Publication number
WO2017209253A1
WO2017209253A1 PCT/JP2017/020476 JP2017020476W WO2017209253A1 WO 2017209253 A1 WO2017209253 A1 WO 2017209253A1 JP 2017020476 W JP2017020476 W JP 2017020476W WO 2017209253 A1 WO2017209253 A1 WO 2017209253A1
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WO
WIPO (PCT)
Prior art keywords
light
optical scanning
half mirror
light beam
inspection
Prior art date
Application number
PCT/JP2017/020476
Other languages
English (en)
Japanese (ja)
Inventor
和弘 青山
和幸 石原
Original Assignee
株式会社デンソー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社デンソー filed Critical 株式会社デンソー
Publication of WO2017209253A1 publication Critical patent/WO2017209253A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems

Definitions

  • the present disclosure relates to an optical scanning module and an optical scanning device that display an image by scanning a light beam.
  • An optical scanning device that displays an image by scanning light is known.
  • a light beam emitted from a light source is deflected by an optical deflector and further projected onto a surface to be scanned via a concave mirror or the like.
  • a two-dimensional image is formed.
  • the optical scanning device it is conceivable to modularize the part from the light source to the optical deflector.
  • the conventional apparatus in order to inspect the quality of the light beam emitted from the light source, it is necessary to use the output of the module, that is, the output of the optical deflector. Specifically, it is necessary to inspect the two-dimensional image projected on the surface to be scanned with the module assembled in the optical scanning device.
  • One aspect of the present disclosure is to provide a technique related to an optical scanning module that can perform inspection efficiently.
  • an optical scanning module that displays an image by scanning a light beam, and includes an optical scanning module that includes a half mirror, a deflection scanning unit, and a light extraction port.
  • the half mirror is provided on the propagation path of the light beam emitted from the light source, and transmits and reflects the light beam.
  • the deflection scanning unit deflects and scans the incident light using either one of the light beam transmitted through the half mirror and the light beam reflected by the half mirror as incident light and the other as inspection light.
  • the light extraction port extracts inspection light to the outside of the optical scanning module.
  • each component from the light source to the half mirror and the quality in the assembled state of each component are inspected. can do. For this reason, it is not necessary for the optical scanning device to be prepared to a stage where a two-dimensional image can be formed, and quality inspection can be performed.
  • optical scanning device Another aspect of the present disclosure is an optical scanning device, and the optical scanning module described above further includes an inspection sensor that inspects characteristics of inspection light.
  • symbol in the parenthesis described in the claim shows the correspondence with the specific means as described in embodiment mentioned later as one aspect, Comprising: It does not limit the technical scope of this indication. Absent.
  • the optical scanning device 1 shown in FIG. 1 includes an optical scanning module 10 and an inspection sensor 20.
  • the optical scanning module 10 includes a light source 11, a collimator lens 12, a condenser lens 13, a half mirror 14, a deflection scanning unit 15, and a light extraction port 16.
  • the light source 11 is a laser diode that emits a visible light beam.
  • the collimator lens 12 is located in the emission direction of the light beam emitted from the light source 11.
  • the collimator lens 12 converts the light beam into substantially parallel light and emits it. Since the light beam from the light source 11 is made substantially parallel light by the collimator lens 12, the distance on the optical path from the emission of the light beam to the condensing can be adjusted. That is, when the collimator lens 12 is not used, the light beam from the light source 11 diffuses and spreads according to the distance from the light source 11.
  • the diffusion of the light beam from the light source 11 can be suppressed by making the light substantially parallel through the collimator lens 12, the distance on the optical path from the emission of the light beam to the condensing can be adjusted.
  • the condensing lens 13 is positioned in the emission direction of the light beam that has been made into the substantially parallel light emitted from the collimator lens 12.
  • the light beam made into the substantially parallel light is condensed by the condenser lens 13 and emitted.
  • the half mirror 14 is located in the emission direction of the light beam condensed by the condenser lens 13. At this time, the incident surface of the half mirror 14 is installed at a predetermined angle with respect to the incident direction of the light beam.
  • the half mirror 14 transmits and reflects the incident light beam. That is, the half mirror 14 separates the light beam incident from the condenser lens 13 into transmitted light that is a light beam that passes through the half mirror and reflected light that is a light beam that reflects off the half mirror.
  • the transmitted light passes through the half mirror 14 and is emitted in the same direction as the direction incident on the half mirror 14.
  • the reflected light is reflected by the incident surface of the half mirror 14 and is emitted in a direction different from the direction incident on the half mirror 14.
  • the direction different from the direction incident on the half mirror 14 is that the incident surface of the half mirror 14 is inclined at the predetermined angle with respect to the incident direction of the light beam as described above, so that the half mirror This is the direction in which the light beam incident on 14 is reflected.
  • the deflection scanning unit 15 includes a deflection element 15a and a drive element 15b.
  • the deflection scanning unit 15 is a MEMS mirror that deflects and scans the light beam incident from the half mirror 14.
  • the deflecting element 15a is installed at a position where the light beam transmitted through the half mirror 14 is incident.
  • the deflecting element 15a is a mirror that reflects an incident light beam.
  • the drive element 15b swings and drives the deflection element 15a so as to change the direction of the incident surface of the deflection element 15a.
  • the drive element 15b deflects and scans the light beam by gradually changing the angle in the vertical direction while swinging the deflection element 15a in the horizontal direction. As a result, a two-dimensional image is formed.
  • the light extraction port 16 extracts the reflected light incident from the half mirror 14 to the outside of the optical scanning module 10.
  • the inspection sensor 20 is disposed at a position where the distance from the half mirror 14 outside the optical scanning module 10 to the inspection sensor 20 is the same as the distance from the half mirror 14 to the deflection element 15a.
  • the inspection sensor 20 is a sensor that is used to inject a light beam extracted from the light extraction port 16 to the outside of the optical scanning module 10 as inspection light and inspect the characteristics of the incident light beam.
  • the characteristic of the light beam here is a characteristic for appropriately forming a two-dimensional image when the deflecting element 15a deflects and scans the light beam.
  • the inspection light extracted to the outside through the light extraction port 16 and the transmitted light emitted to the deflection scanning unit 15 have the same characteristics. For this reason, by using the inspection light, the optical scanning module can be inspected without using the light beam deflected and scanned by the deflection scanning unit 15. That is, since the optical scanning module alone can be inspected, the inspection can be performed efficiently.
  • the deflection scanning unit since the light beam can be separated into the light beam incident on the deflection scanning unit and the light beam extracted outside the optical scanning module 10, the deflection scanning unit is installed. However, it is possible to inspect a light beam that does not pass through the deflection scanning unit. That is, it is possible to inspect light in a state before being affected by the deflection scanning unit.
  • the optical scanning module 30 of the optical scanning device 2 shown in FIG. 2 includes three light sources, and correspondingly includes three collimator lenses and three mirrors. That is, the optical scanning device 2 includes light sources 11a, 11b, and 11c, collimator lenses 12a, 12b, and 12c, and mirrors 17a, 17b, and 17c.
  • the light sources 11a, 11b, and 11c of the second embodiment are the same type of components as the light source 11 of the first embodiment, and the collimator lenses 12a, 12b, and 12c of the second embodiment are the same type of components as the collimator lens 12 of the first embodiment. is there.
  • the light sources 11a, 11b, and 11c are laser diodes that emit light beams.
  • the light sources 11a, 11b, and 11c are monochromatic light sources of red, green, and blue, respectively.
  • the output of each of the red, green and blue light sources is adjustable.
  • the collimator lenses 12a, 12b, and 12c are positioned in the emission direction of the light beams emitted from the light sources 11a, 11b, and 11c, respectively.
  • the collimator lenses 12a, 12b, and 12c receive the light beams from the light sources 11a, 11b, and 11c, the collimator lenses 12a, 12b, and 12c make the light beams substantially parallel and emit.
  • the mirror 17a reflects the light beam emitted by the collimator lens 12a.
  • the mirror 17b reflects the light beam emitted from the collimator lens 12b, transmits the light beam reflected by the mirror 17a, and emits the light beam in the same direction.
  • the mirror 17c transmits the light beam emitted from the collimator lens 12c, reflects the light beam emitted by the mirror 17b, and emits the light beams in the same direction.
  • the light beam emitted by the mirror 17 c enters the condenser lens 13.
  • the optical scanning device 2 according to the present embodiment can operate even in a configuration having three light sources. That is, in the first embodiment, there is one light source, but in the second embodiment, three light sources can be provided.
  • light of various colors can be expressed by combining three light sources of red, green, and blue. That is, in the first embodiment, when a monochromatic light source is used, monochromatic light is emitted. However, in this embodiment, light of various colors can be obtained by adjusting the output of the red, green, and blue light sources. Can be expressed.
  • components such as the condensing lens 13, the half mirror 14, the deflection scanning unit 15, and the light extraction port 16 can be shared by the three light sources. That is, separate condenser lens 13, half mirror 14, deflection scanning unit 15, and light extraction port 16 are not required for each of light sources 11a, 11b, and 11c. Thereby, it is easier than controlling the light beams emitted from the light sources 11a, 11b, and 11c separately.
  • the inspection sensor 20 is disposed outside the optical scanning module 10, but the position where the inspection sensor 20 is disposed is not limited to this. That is, it may be arranged inside the optical scanning module 10 or in the light extraction port 16.
  • the inspection sensor 20 is configured such that the distance from the half mirror 14 outside the optical scanning module 10 to the inspection sensor 20 is the same as the distance from the half mirror 14 to the deflection element 15a. It was supposed to be placed in position.
  • the position where the inspection sensor 20 is arranged is not limited to this. For example, it may be a position where the distance from the half mirror 14 is far or close to the distance from the half mirror 14 to the deflection element 15a.
  • the inspection sensor 20 is disposed at a position where the distance from the half mirror 14 to the inspection sensor 20 is farther than the distance from the half mirror 14 to the deflection element 15a, and the deviation of the direction in which the light beam is emitted is It is good also as a structure to test
  • the optical scanning device 1 includes the inspection sensor 20, but the configuration is not limited to the configuration including the inspection sensor 20.
  • an inspection sensor may be provided outside the optical scanning device.
  • the transmitted light of the half mirror 14 is emitted to the deflection scanning unit 15 and the reflected light of the half mirror 14 is emitted to the light extraction port 16.
  • the light reflected by the half mirror 14 may be emitted to the deflection scanning unit 15 and the transmitted light may be emitted to the light extraction port 16.
  • the second embodiment three light sources of red, green, and blue are used as the light source, but the type of the light source is not limited to this.
  • the number of light sources is not limited to three, and may be two or less or four or more. In this case, for example, a number of collimator lenses and mirrors corresponding to the number of light sources may be arranged.
  • the number of the light sources for each color is not limited to this.
  • the configuration may be such that one red light source and one green light source are provided, and two blue light sources are provided.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

Un module de balayage optique (10), selon la présente invention, effectue un balayage au moyen d'un faisceau lumineux pour afficher une image, ce module de balayage optique (10) comprenant un demi-miroir (14), une unité de balayage de déviation (15) et une sortie de lumière (16). Le demi-miroir (14) est disposé sur la trajectoire de propagation du faisceau lumineux émis par une source lumineuse (11), et transmet et réfléchit le faisceau lumineux. L'unité de balayage de déviation (15) présente soit le faisceau lumineux traversant le demi-miroir (14) ou le faisceau lumineux réfléchi par le demi-miroir (14) sert de lumière d'incidence tandis que l'autre sert de lumière d'inspection de manière à dévier la lumière d'incidence et à effectuer un balayage. La sortie de lumière (16) extrait la lumière d'inspection et la fournit à l'extérieur du module de balayage optique (10).
PCT/JP2017/020476 2016-06-02 2017-06-01 Module de balayage optique et dispositif de balayage optique WO2017209253A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016110838A JP2017215548A (ja) 2016-06-02 2016-06-02 光走査モジュール及び光走査装置
JP2016-110838 2016-06-02

Publications (1)

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WO2017209253A1 true WO2017209253A1 (fr) 2017-12-07

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WO (1) WO2017209253A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02203307A (ja) * 1989-01-31 1990-08-13 Ando Electric Co Ltd 発光素子と光ファイバの光軸合わせ機構
JP2012145755A (ja) * 2011-01-12 2012-08-02 Konica Minolta Advanced Layers Inc 画像表示装置
JP2014197053A (ja) * 2013-03-29 2014-10-16 船井電機株式会社 プロジェクタ装置およびヘッドアップディスプレイ装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014063063A (ja) * 2012-09-21 2014-04-10 Nippon Seiki Co Ltd 表示装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02203307A (ja) * 1989-01-31 1990-08-13 Ando Electric Co Ltd 発光素子と光ファイバの光軸合わせ機構
JP2012145755A (ja) * 2011-01-12 2012-08-02 Konica Minolta Advanced Layers Inc 画像表示装置
JP2014197053A (ja) * 2013-03-29 2014-10-16 船井電機株式会社 プロジェクタ装置およびヘッドアップディスプレイ装置

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