WO2017209253A1 - Optical scanning module and optical scanning device - Google Patents

Optical scanning module and optical scanning device Download PDF

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Publication number
WO2017209253A1
WO2017209253A1 PCT/JP2017/020476 JP2017020476W WO2017209253A1 WO 2017209253 A1 WO2017209253 A1 WO 2017209253A1 JP 2017020476 W JP2017020476 W JP 2017020476W WO 2017209253 A1 WO2017209253 A1 WO 2017209253A1
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Prior art keywords
light
optical scanning
half mirror
light beam
inspection
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PCT/JP2017/020476
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French (fr)
Japanese (ja)
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和弘 青山
和幸 石原
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株式会社デンソー
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Publication of WO2017209253A1 publication Critical patent/WO2017209253A1/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems

Definitions

  • the present disclosure relates to an optical scanning module and an optical scanning device that display an image by scanning a light beam.
  • An optical scanning device that displays an image by scanning light is known.
  • a light beam emitted from a light source is deflected by an optical deflector and further projected onto a surface to be scanned via a concave mirror or the like.
  • a two-dimensional image is formed.
  • the optical scanning device it is conceivable to modularize the part from the light source to the optical deflector.
  • the conventional apparatus in order to inspect the quality of the light beam emitted from the light source, it is necessary to use the output of the module, that is, the output of the optical deflector. Specifically, it is necessary to inspect the two-dimensional image projected on the surface to be scanned with the module assembled in the optical scanning device.
  • One aspect of the present disclosure is to provide a technique related to an optical scanning module that can perform inspection efficiently.
  • an optical scanning module that displays an image by scanning a light beam, and includes an optical scanning module that includes a half mirror, a deflection scanning unit, and a light extraction port.
  • the half mirror is provided on the propagation path of the light beam emitted from the light source, and transmits and reflects the light beam.
  • the deflection scanning unit deflects and scans the incident light using either one of the light beam transmitted through the half mirror and the light beam reflected by the half mirror as incident light and the other as inspection light.
  • the light extraction port extracts inspection light to the outside of the optical scanning module.
  • each component from the light source to the half mirror and the quality in the assembled state of each component are inspected. can do. For this reason, it is not necessary for the optical scanning device to be prepared to a stage where a two-dimensional image can be formed, and quality inspection can be performed.
  • optical scanning device Another aspect of the present disclosure is an optical scanning device, and the optical scanning module described above further includes an inspection sensor that inspects characteristics of inspection light.
  • symbol in the parenthesis described in the claim shows the correspondence with the specific means as described in embodiment mentioned later as one aspect, Comprising: It does not limit the technical scope of this indication. Absent.
  • the optical scanning device 1 shown in FIG. 1 includes an optical scanning module 10 and an inspection sensor 20.
  • the optical scanning module 10 includes a light source 11, a collimator lens 12, a condenser lens 13, a half mirror 14, a deflection scanning unit 15, and a light extraction port 16.
  • the light source 11 is a laser diode that emits a visible light beam.
  • the collimator lens 12 is located in the emission direction of the light beam emitted from the light source 11.
  • the collimator lens 12 converts the light beam into substantially parallel light and emits it. Since the light beam from the light source 11 is made substantially parallel light by the collimator lens 12, the distance on the optical path from the emission of the light beam to the condensing can be adjusted. That is, when the collimator lens 12 is not used, the light beam from the light source 11 diffuses and spreads according to the distance from the light source 11.
  • the diffusion of the light beam from the light source 11 can be suppressed by making the light substantially parallel through the collimator lens 12, the distance on the optical path from the emission of the light beam to the condensing can be adjusted.
  • the condensing lens 13 is positioned in the emission direction of the light beam that has been made into the substantially parallel light emitted from the collimator lens 12.
  • the light beam made into the substantially parallel light is condensed by the condenser lens 13 and emitted.
  • the half mirror 14 is located in the emission direction of the light beam condensed by the condenser lens 13. At this time, the incident surface of the half mirror 14 is installed at a predetermined angle with respect to the incident direction of the light beam.
  • the half mirror 14 transmits and reflects the incident light beam. That is, the half mirror 14 separates the light beam incident from the condenser lens 13 into transmitted light that is a light beam that passes through the half mirror and reflected light that is a light beam that reflects off the half mirror.
  • the transmitted light passes through the half mirror 14 and is emitted in the same direction as the direction incident on the half mirror 14.
  • the reflected light is reflected by the incident surface of the half mirror 14 and is emitted in a direction different from the direction incident on the half mirror 14.
  • the direction different from the direction incident on the half mirror 14 is that the incident surface of the half mirror 14 is inclined at the predetermined angle with respect to the incident direction of the light beam as described above, so that the half mirror This is the direction in which the light beam incident on 14 is reflected.
  • the deflection scanning unit 15 includes a deflection element 15a and a drive element 15b.
  • the deflection scanning unit 15 is a MEMS mirror that deflects and scans the light beam incident from the half mirror 14.
  • the deflecting element 15a is installed at a position where the light beam transmitted through the half mirror 14 is incident.
  • the deflecting element 15a is a mirror that reflects an incident light beam.
  • the drive element 15b swings and drives the deflection element 15a so as to change the direction of the incident surface of the deflection element 15a.
  • the drive element 15b deflects and scans the light beam by gradually changing the angle in the vertical direction while swinging the deflection element 15a in the horizontal direction. As a result, a two-dimensional image is formed.
  • the light extraction port 16 extracts the reflected light incident from the half mirror 14 to the outside of the optical scanning module 10.
  • the inspection sensor 20 is disposed at a position where the distance from the half mirror 14 outside the optical scanning module 10 to the inspection sensor 20 is the same as the distance from the half mirror 14 to the deflection element 15a.
  • the inspection sensor 20 is a sensor that is used to inject a light beam extracted from the light extraction port 16 to the outside of the optical scanning module 10 as inspection light and inspect the characteristics of the incident light beam.
  • the characteristic of the light beam here is a characteristic for appropriately forming a two-dimensional image when the deflecting element 15a deflects and scans the light beam.
  • the inspection light extracted to the outside through the light extraction port 16 and the transmitted light emitted to the deflection scanning unit 15 have the same characteristics. For this reason, by using the inspection light, the optical scanning module can be inspected without using the light beam deflected and scanned by the deflection scanning unit 15. That is, since the optical scanning module alone can be inspected, the inspection can be performed efficiently.
  • the deflection scanning unit since the light beam can be separated into the light beam incident on the deflection scanning unit and the light beam extracted outside the optical scanning module 10, the deflection scanning unit is installed. However, it is possible to inspect a light beam that does not pass through the deflection scanning unit. That is, it is possible to inspect light in a state before being affected by the deflection scanning unit.
  • the optical scanning module 30 of the optical scanning device 2 shown in FIG. 2 includes three light sources, and correspondingly includes three collimator lenses and three mirrors. That is, the optical scanning device 2 includes light sources 11a, 11b, and 11c, collimator lenses 12a, 12b, and 12c, and mirrors 17a, 17b, and 17c.
  • the light sources 11a, 11b, and 11c of the second embodiment are the same type of components as the light source 11 of the first embodiment, and the collimator lenses 12a, 12b, and 12c of the second embodiment are the same type of components as the collimator lens 12 of the first embodiment. is there.
  • the light sources 11a, 11b, and 11c are laser diodes that emit light beams.
  • the light sources 11a, 11b, and 11c are monochromatic light sources of red, green, and blue, respectively.
  • the output of each of the red, green and blue light sources is adjustable.
  • the collimator lenses 12a, 12b, and 12c are positioned in the emission direction of the light beams emitted from the light sources 11a, 11b, and 11c, respectively.
  • the collimator lenses 12a, 12b, and 12c receive the light beams from the light sources 11a, 11b, and 11c, the collimator lenses 12a, 12b, and 12c make the light beams substantially parallel and emit.
  • the mirror 17a reflects the light beam emitted by the collimator lens 12a.
  • the mirror 17b reflects the light beam emitted from the collimator lens 12b, transmits the light beam reflected by the mirror 17a, and emits the light beam in the same direction.
  • the mirror 17c transmits the light beam emitted from the collimator lens 12c, reflects the light beam emitted by the mirror 17b, and emits the light beams in the same direction.
  • the light beam emitted by the mirror 17 c enters the condenser lens 13.
  • the optical scanning device 2 according to the present embodiment can operate even in a configuration having three light sources. That is, in the first embodiment, there is one light source, but in the second embodiment, three light sources can be provided.
  • light of various colors can be expressed by combining three light sources of red, green, and blue. That is, in the first embodiment, when a monochromatic light source is used, monochromatic light is emitted. However, in this embodiment, light of various colors can be obtained by adjusting the output of the red, green, and blue light sources. Can be expressed.
  • components such as the condensing lens 13, the half mirror 14, the deflection scanning unit 15, and the light extraction port 16 can be shared by the three light sources. That is, separate condenser lens 13, half mirror 14, deflection scanning unit 15, and light extraction port 16 are not required for each of light sources 11a, 11b, and 11c. Thereby, it is easier than controlling the light beams emitted from the light sources 11a, 11b, and 11c separately.
  • the inspection sensor 20 is disposed outside the optical scanning module 10, but the position where the inspection sensor 20 is disposed is not limited to this. That is, it may be arranged inside the optical scanning module 10 or in the light extraction port 16.
  • the inspection sensor 20 is configured such that the distance from the half mirror 14 outside the optical scanning module 10 to the inspection sensor 20 is the same as the distance from the half mirror 14 to the deflection element 15a. It was supposed to be placed in position.
  • the position where the inspection sensor 20 is arranged is not limited to this. For example, it may be a position where the distance from the half mirror 14 is far or close to the distance from the half mirror 14 to the deflection element 15a.
  • the inspection sensor 20 is disposed at a position where the distance from the half mirror 14 to the inspection sensor 20 is farther than the distance from the half mirror 14 to the deflection element 15a, and the deviation of the direction in which the light beam is emitted is It is good also as a structure to test
  • the optical scanning device 1 includes the inspection sensor 20, but the configuration is not limited to the configuration including the inspection sensor 20.
  • an inspection sensor may be provided outside the optical scanning device.
  • the transmitted light of the half mirror 14 is emitted to the deflection scanning unit 15 and the reflected light of the half mirror 14 is emitted to the light extraction port 16.
  • the light reflected by the half mirror 14 may be emitted to the deflection scanning unit 15 and the transmitted light may be emitted to the light extraction port 16.
  • the second embodiment three light sources of red, green, and blue are used as the light source, but the type of the light source is not limited to this.
  • the number of light sources is not limited to three, and may be two or less or four or more. In this case, for example, a number of collimator lenses and mirrors corresponding to the number of light sources may be arranged.
  • the number of the light sources for each color is not limited to this.
  • the configuration may be such that one red light source and one green light source are provided, and two blue light sources are provided.

Abstract

An optical scanning module (10) according to the present invention carries out scanning with a light beam to display an image, the optical scanning module (10) including a half mirror (14), a deflection scanning unit (15), and a light outlet (16). The half mirror (14) is provided on the propagation path of the light beam output from a light source (11), and transmits and reflects the light beam. The deflection scanning unit (15) has either the light beam passing through the half mirror (14) or the light beam reflected by the half mirror (14) serve as incidence light while the other serves as inspection light so as to deflect the incidence light and perform scanning. The light outlet (16) extracts the inspection light and outputs the same to the outside of the optical scanning module (10).

Description

光走査モジュール及び光走査装置Optical scanning module and optical scanning device 関連出願への相互参照Cross-reference to related applications
　本国際出願は、２０１６年６月２日に日本国特許庁に出願された日本国特許出願第２０１６－１１０８３８号に基づく優先権を主張するものであり、日本国特許出願第２０１６－１１０８３８号の全内容を本国際出願に参照により援用する。 This international application claims priority based on Japanese Patent Application No. 2016-110838 filed with the Japan Patent Office on June 2, 2016. The entire contents are incorporated by reference into this international application.
　本開示は、光ビームを走査して画像を表示する光走査モジュール及び光走査装置に関する。 The present disclosure relates to an optical scanning module and an optical scanning device that display an image by scanning a light beam.
　光を走査することで画像を表示する光走査装置が知られている。例えば、特許文献１に記載の光走査装置（以下、従来装置）では、光源から出射された光束を、光偏向器により偏向し、更に、凹面ミラー等を介して被走査面に投射することで、２次元像を形成している。 An optical scanning device that displays an image by scanning light is known. For example, in the optical scanning device described in Patent Document 1 (hereinafter referred to as a conventional device), a light beam emitted from a light source is deflected by an optical deflector and further projected onto a surface to be scanned via a concave mirror or the like. A two-dimensional image is formed.
特開２０１３－４１１８２号公報JP 2013-41182 A
　ところで、光走査装置では、光源から光偏向器に至る部分を、モジュール化することが考えられる。従来装置の構成でモジュール化した場合、光源から出射された光束の品質を検査するには、モジュールの出力、即ち、光偏向器の出力を利用する必要がある。具体的には、モジュールを光走査装置に組み付けた状態にし、被走査面に投射される２次元像を検査する必要があった。 By the way, in the optical scanning device, it is conceivable to modularize the part from the light source to the optical deflector. When the conventional apparatus is modularized, in order to inspect the quality of the light beam emitted from the light source, it is necessary to use the output of the module, that is, the output of the optical deflector. Specifically, it is necessary to inspect the two-dimensional image projected on the surface to be scanned with the module assembled in the optical scanning device.
　しかし発明者の詳細な検討の結果、検査結果が不良であった場合、モジュールに問題があるのか、モジュールから被走査面に至る光路を形成する構成部品に問題があるのかを判断することができず、検査の効率が悪いという課題が見出された。本開示の一局面は、効率よく検査を行うことができる光走査モジュールに関する技術を提供することにある。 However, as a result of detailed examination by the inventor, if the inspection result is defective, it can be determined whether there is a problem with the module or a component forming the optical path from the module to the scanned surface. Therefore, the problem that inspection efficiency is poor was found. One aspect of the present disclosure is to provide a technique related to an optical scanning module that can perform inspection efficiently.
　本開示の一態様は、光ビームを走査して画像を表示する光走査モジュールであって、ハーフミラー、偏向走査部及び光取り出し口を備える光走査モジュールである。ハーフミラーは光源から出射された光ビームの伝搬経路上に設けられ、光ビームを透過及び反射する。偏向走査部は、ハーフミラーを透過した光ビーム及びハーフミラーで反射した光ビームのうちいずれか一方を入射光とし、いずれか他方を検査光として、入射光を偏向走査する。光取り出し口は、検査光を当該光走査モジュールの外部に取り出す。 One aspect of the present disclosure is an optical scanning module that displays an image by scanning a light beam, and includes an optical scanning module that includes a half mirror, a deflection scanning unit, and a light extraction port. The half mirror is provided on the propagation path of the light beam emitted from the light source, and transmits and reflects the light beam. The deflection scanning unit deflects and scans the incident light using either one of the light beam transmitted through the half mirror and the light beam reflected by the half mirror as incident light and the other as inspection light. The light extraction port extracts inspection light to the outside of the optical scanning module.
　このような構成によれば、光取り出し口から光走査モジュールの外部に取り出した検査光を検査することで、光源からハーフミラーに至るまでの各部品及び各部品を組み立てた状態での品質を検査することができる。このため、光走査装置が２次元像を形成できるような段階まで作成されていることを必要とせず、品質の検査を行うことができる。 According to such a configuration, by inspecting the inspection light extracted from the light extraction port to the outside of the optical scanning module, each component from the light source to the half mirror and the quality in the assembled state of each component are inspected. can do. For this reason, it is not necessary for the optical scanning device to be prepared to a stage where a two-dimensional image can be formed, and quality inspection can be performed.
　また、本開示の別の態様は、光走査装置であって、前述の光走査モジュールに、更に検査光の特性を検査する検査センサを備える。
　なお、請求の範囲に記載した括弧内の符号は、一つの態様として後述する実施形態に記載の具体的手段との対応関係を示すものであって、本開示の技術的範囲を限定するものではない。 Another aspect of the present disclosure is an optical scanning device, and the optical scanning module described above further includes an inspection sensor that inspects characteristics of inspection light.
In addition, the code | symbol in the parenthesis described in the claim shows the correspondence with the specific means as described in embodiment mentioned later as one aspect, Comprising: It does not limit the technical scope of this indication. Absent.
実施形態における光走査装置の構成を示す図である。It is a figure which shows the structure of the optical scanning device in embodiment. 他の実施形態における光走査装置の構成を示す図である。It is a figure which shows the structure of the optical scanning device in other embodiment.
　以下、本開示の例示的な実施形態について図面を参照しながら説明する。
　［１．第１実施形態］
　［１－１．構成］
　図１に示す光走査装置１は光走査モジュール１０及び検査センサ２０を備える。光走査モジュール１０は、光源１１、コリメータレンズ１２、集光レンズ１３、ハーフミラー１４、偏向走査部１５、光取り出し口１６を備える。 Hereinafter, exemplary embodiments of the present disclosure will be described with reference to the drawings.
[1. First Embodiment]
[1-1. Constitution]
The optical scanning device 1 shown in FIG. 1 includes an optical scanning module 10 and an inspection sensor 20. The optical scanning module 10 includes a light source 11, a collimator lens 12, a condenser lens 13, a half mirror 14, a deflection scanning unit 15, and a light extraction port 16.
　光源１１は、可視光の光ビームを出射するレーザダイオードである。
　コリメータレンズ１２は、光源１１により出射される光ビームの出射方向に位置する。コリメータレンズ１２は、光源１１からの光ビームを入射すると、当該光ビームを略平行光にし、出射する。コリメータレンズ１２により、光源１１からの光ビームは略平行光にされるため、光ビームの出射から集光までの光路上の距離を調整することができる。すなわち、コリメータレンズ１２を介さない場合には、光源１１からの光ビームは拡散し、光源１１からの距離に応じて広がる。一方でコリメータレンズ１２を介して略平行光にすることで光源１１からの光ビームの拡散を抑えることができるため、光ビームの出射から集光までの光路上の距離を調整することができる。 The light source 11 is a laser diode that emits a visible light beam.
The collimator lens 12 is located in the emission direction of the light beam emitted from the light source 11. When the collimator lens 12 receives the light beam from the light source 11, the collimator lens 12 converts the light beam into substantially parallel light and emits it. Since the light beam from the light source 11 is made substantially parallel light by the collimator lens 12, the distance on the optical path from the emission of the light beam to the condensing can be adjusted. That is, when the collimator lens 12 is not used, the light beam from the light source 11 diffuses and spreads according to the distance from the light source 11. On the other hand, since the diffusion of the light beam from the light source 11 can be suppressed by making the light substantially parallel through the collimator lens 12, the distance on the optical path from the emission of the light beam to the condensing can be adjusted.
　集光レンズ１３は、コリメータレンズ１２により出射される当該略平行光にされた光ビームの出射方向に位置する。当該略平行光にされた光ビームは、集光レンズ１３により集光され、出射される。 The condensing lens 13 is positioned in the emission direction of the light beam that has been made into the substantially parallel light emitted from the collimator lens 12. The light beam made into the substantially parallel light is condensed by the condenser lens 13 and emitted.
　ハーフミラー１４は、集光レンズ１３により集光された光ビームの出射方向に位置する。このとき、ハーフミラー１４の入射面は、光ビームの入射方向に対して、所定の角度だけ傾いて設置される。ハーフミラー１４は、入射した光ビームを、透過及び反射する。すなわち、ハーフミラー１４は、集光レンズ１３から入射された光ビームを、ハーフミラーを透過する光ビームである透過光と、ハーフミラーを反射する光ビームである反射光とに分離する。透過光は、ハーフミラー１４を透過し、ハーフミラー１４に入射した方向と同一方向に出射される。反射光は、ハーフミラー１４の入射面で反射し、ハーフミラー１４に入射した方向と異なる方向に出射される。ここでいう、ハーフミラー１４に入射した方向と異なる方向とは、前述のとおりハーフミラー１４の入射面が光ビームの入射方向に対して上記所定の角度だけ傾いて設置されることにより、ハーフミラー１４に入射した光ビームが反射する方向である。 The half mirror 14 is located in the emission direction of the light beam condensed by the condenser lens 13. At this time, the incident surface of the half mirror 14 is installed at a predetermined angle with respect to the incident direction of the light beam. The half mirror 14 transmits and reflects the incident light beam. That is, the half mirror 14 separates the light beam incident from the condenser lens 13 into transmitted light that is a light beam that passes through the half mirror and reflected light that is a light beam that reflects off the half mirror. The transmitted light passes through the half mirror 14 and is emitted in the same direction as the direction incident on the half mirror 14. The reflected light is reflected by the incident surface of the half mirror 14 and is emitted in a direction different from the direction incident on the half mirror 14. Here, the direction different from the direction incident on the half mirror 14 is that the incident surface of the half mirror 14 is inclined at the predetermined angle with respect to the incident direction of the light beam as described above, so that the half mirror This is the direction in which the light beam incident on 14 is reflected.
　偏向走査部１５は、偏向素子１５ａ及び駆動素子１５ｂを備える。例えば、偏向走査部１５は、ハーフミラー１４から入射した光ビームを偏向走査するＭＥＭＳミラーである。
　偏向素子１５ａは、ハーフミラー１４を透過した光ビームを入射する位置に設置される。偏向素子１５ａは、入射した光ビームを反射させる鏡である。 The deflection scanning unit 15 includes a deflection element 15a and a drive element 15b. For example, the deflection scanning unit 15 is a MEMS mirror that deflects and scans the light beam incident from the half mirror 14.
The deflecting element 15a is installed at a position where the light beam transmitted through the half mirror 14 is incident. The deflecting element 15a is a mirror that reflects an incident light beam.
　駆動素子１５ｂは、偏向素子１５ａの入射面の向きを変化させるように偏向素子１５ａを揺動駆動させる。駆動素子１５ｂは偏向素子１５ａを水平方向に揺動させながら、垂直方向の角度を徐々に変えて、光ビームを偏向走査する。これにより２次元的な画像が形成される。 The drive element 15b swings and drives the deflection element 15a so as to change the direction of the incident surface of the deflection element 15a. The drive element 15b deflects and scans the light beam by gradually changing the angle in the vertical direction while swinging the deflection element 15a in the horizontal direction. As a result, a two-dimensional image is formed.
　光取り出し口１６は、ハーフミラー１４から入射した反射光を光走査モジュール１０の外部に取り出す。
　検査センサ２０は、光走査モジュール１０の外部のハーフミラー１４から検査センサ２０までの距離がハーフミラー１４から偏向素子１５ａまでの距離と同じになるような位置に配置される。検査センサ２０は、光取り出し口１６から光走査モジュール１０の外部に取り出された光ビームを検査光として入射し、入射した光ビームの特性を検査するために用いられるセンサである。ここでいう光ビームの特性とは、偏向素子１５ａが光ビームを偏向走査した際に適切に２次元的な画像が形成するための特性のことである。 The light extraction port 16 extracts the reflected light incident from the half mirror 14 to the outside of the optical scanning module 10.
The inspection sensor 20 is disposed at a position where the distance from the half mirror 14 outside the optical scanning module 10 to the inspection sensor 20 is the same as the distance from the half mirror 14 to the deflection element 15a. The inspection sensor 20 is a sensor that is used to inject a light beam extracted from the light extraction port 16 to the outside of the optical scanning module 10 as inspection light and inspect the characteristics of the incident light beam. The characteristic of the light beam here is a characteristic for appropriately forming a two-dimensional image when the deflecting element 15a deflects and scans the light beam.
　［１－２．効果］
　以上詳述した第１実施形態によれば、以下の効果が得られる。
　本実施形態の光走査装置１によると、光取り出し口１６を介して外部に取り出される検査光と偏向走査部１５に出射される透過光とは同じ特性を有している。このため、検査光を用いることによって、偏向走査部１５により偏向走査された光ビームを用いることなく、光走査モジュールの検査を行うことができる。すなわち、光走査モジュール単体での検査を行うことができるため、効率よく検査を行うことができる。 [1-2. effect]
According to the first embodiment described in detail above, the following effects can be obtained.
According to the optical scanning device 1 of the present embodiment, the inspection light extracted to the outside through the light extraction port 16 and the transmitted light emitted to the deflection scanning unit 15 have the same characteristics. For this reason, by using the inspection light, the optical scanning module can be inspected without using the light beam deflected and scanned by the deflection scanning unit 15. That is, since the optical scanning module alone can be inspected, the inspection can be performed efficiently.
　本実施形態の光走査装置１によると、光ビームを偏向走査部に入射する光ビームと、光走査モジュール１０の外部に取り出す光ビームとに分離することができるため、偏向走査部を設置した状態でも偏向走査部を介していない光ビームの検査を行うことができる。すなわち、偏向走査部の影響を受ける前の状態の光の検査を行うことができる。 According to the optical scanning device 1 of the present embodiment, since the light beam can be separated into the light beam incident on the deflection scanning unit and the light beam extracted outside the optical scanning module 10, the deflection scanning unit is installed. However, it is possible to inspect a light beam that does not pass through the deflection scanning unit. That is, it is possible to inspect light in a state before being affected by the deflection scanning unit.
　［２．第２実施形態］
　［２－１．構成］
　第２実施形態は、基本的な構成は第１実施形態と同様であるため、共通する構成については説明を省略し、相違点を中心に説明する。なお、第１実施形態と同じ符号は、同一の構成を示すものであって、先行する説明を参照する。 [2. Second Embodiment]
[2-1. Constitution]
Since the basic configuration of the second embodiment is the same as that of the first embodiment, the description of the common configuration will be omitted, and the description will focus on the differences. Note that the same reference numerals as those in the first embodiment indicate the same configuration, and the preceding description is referred to.
　図２に示す光走査装置２の光走査モジュール３０は光源を３つ備え、それに対応してコリメータレンズ及びミラーをそれぞれ３つ備える点で第１実施形態と異なる。すなわち、光走査装置２は、光源１１ａ、１１ｂ、１１ｃ、コリメータレンズ１２ａ、１２ｂ、１２ｃ、ミラー１７ａ、１７ｂ、１７ｃを備える。なお、第２実施形態の光源１１ａ、１１ｂ、１１ｃは第１実施形態の光源１１と、第２実施形態のコリメータレンズ１２ａ、１２ｂ、１２ｃは第１実施形態のコリメータレンズ１２と同種の構成要素である。 2 is different from the first embodiment in that the optical scanning module 30 of the optical scanning device 2 shown in FIG. 2 includes three light sources, and correspondingly includes three collimator lenses and three mirrors. That is, the optical scanning device 2 includes light sources 11a, 11b, and 11c, collimator lenses 12a, 12b, and 12c, and mirrors 17a, 17b, and 17c. The light sources 11a, 11b, and 11c of the second embodiment are the same type of components as the light source 11 of the first embodiment, and the collimator lenses 12a, 12b, and 12c of the second embodiment are the same type of components as the collimator lens 12 of the first embodiment. is there.
　光源１１ａ、１１ｂ、１１ｃは、光ビームを出射するレーザダイオードである。ここで、光源１１ａ、１１ｂ、１１ｃは、それぞれ赤、緑、青の単色光源である。赤、緑、青の光源それぞれの出力は調整可能である。 The light sources 11a, 11b, and 11c are laser diodes that emit light beams. Here, the light sources 11a, 11b, and 11c are monochromatic light sources of red, green, and blue, respectively. The output of each of the red, green and blue light sources is adjustable.
　コリメータレンズ１２ａ、１２ｂ、１２ｃはそれぞれ、光源１１ａ、１１ｂ、１１ｃにより出射される光ビームの出射方向に位置する。コリメータレンズ１２ａ、１２ｂ、１２ｃは、光源１１ａ、１１ｂ、１１ｃからの光ビームを入射すると、当該光ビームを略平行光にし、出射する。 The collimator lenses 12a, 12b, and 12c are positioned in the emission direction of the light beams emitted from the light sources 11a, 11b, and 11c, respectively. When the collimator lenses 12a, 12b, and 12c receive the light beams from the light sources 11a, 11b, and 11c, the collimator lenses 12a, 12b, and 12c make the light beams substantially parallel and emit.
　ミラー１７ａは、コリメータレンズ１２ａにより出射された光ビームを反射する。
　ミラー１７ｂは、コリメータレンズ１２ｂから出射された光ビームを反射し、ミラー１７ａにより反射された光ビームを透過し、それらの光ビームを同一方向に出射する。 The mirror 17a reflects the light beam emitted by the collimator lens 12a.
The mirror 17b reflects the light beam emitted from the collimator lens 12b, transmits the light beam reflected by the mirror 17a, and emits the light beam in the same direction.
　ミラー１７ｃは、コリメータレンズ１２ｃから出射された光ビームを透過し、ミラー１７ｂにより出射された光ビームを反射し、それらの光ビームを同一方向に出射する。
　ミラー１７ｃにより出射された光ビームは、集光レンズ１３に入射する。 The mirror 17c transmits the light beam emitted from the collimator lens 12c, reflects the light beam emitted by the mirror 17b, and emits the light beams in the same direction.
The light beam emitted by the mirror 17 c enters the condenser lens 13.
　集光レンズ１３以降の構成は第１実施形態と同様である。
　［２－２．効果］
　以上詳述した第２実施形態によれば、第１実施形態の効果に加え、以下の効果が得られる。 The configuration after the condenser lens 13 is the same as that of the first embodiment.
[2-2. effect]
According to the second embodiment described in detail above, the following effects are obtained in addition to the effects of the first embodiment.
　本実施形態の光走査装置２によれば、３つの光源を有する構成である場合においても動作することができる。すなわち、第１実施形態では、光源は１つであったが、第２実施形態では、光源を３つ備えることができる。 The optical scanning device 2 according to the present embodiment can operate even in a configuration having three light sources. That is, in the first embodiment, there is one light source, but in the second embodiment, three light sources can be provided.
　本実施形態の光走査装置２によれば、赤、緑、青の光源を３つ組み合わせることで種々の色の光を表現することができる。すなわち第１実施形態では、単色の光源を用いた場合には単色の光が出射されるが、本実施形態では、赤、緑、青の光源の出力を調整することで種々の色の光を表現することができる。 According to the optical scanning device 2 of the present embodiment, light of various colors can be expressed by combining three light sources of red, green, and blue. That is, in the first embodiment, when a monochromatic light source is used, monochromatic light is emitted. However, in this embodiment, light of various colors can be obtained by adjusting the output of the red, green, and blue light sources. Can be expressed.
　本実施形態の光走査装置２によれば、集光レンズ１３、ハーフミラー１４、偏向走査部１５、光取り出し口１６などの構成要素を３つの光源に対して共通化することができる。すなわち、各光源１１ａ、１１ｂ、１１ｃに対してそれぞれに対して別々の集光レンズ１３、ハーフミラー１４、偏向走査部１５、光取り出し口１６が必要ない。これにより、各光源１１ａ、１１ｂ、１１ｃから出射された光ビームの制御をそれぞれ別に行う場合に比べて容易である。 According to the optical scanning device 2 of the present embodiment, components such as the condensing lens 13, the half mirror 14, the deflection scanning unit 15, and the light extraction port 16 can be shared by the three light sources. That is, separate condenser lens 13, half mirror 14, deflection scanning unit 15, and light extraction port 16 are not required for each of light sources 11a, 11b, and 11c. Thereby, it is easier than controlling the light beams emitted from the light sources 11a, 11b, and 11c separately.
　［３．他の実施形態］
　以上、本開示の実施形態について説明したが、本開示は、上記実施形態に限定されることなく、種々の形態を採り得ることは言うまでもない。 [3. Other Embodiments]
As mentioned above, although embodiment of this indication was described, it cannot be overemphasized that this indication can take various forms, without being limited to the above-mentioned embodiment.
　（３ａ）上記各実施形態では、検査センサ２０は光走査モジュール１０の外部に配置されるが検査センサ２０の配置される位置はこれに限定されるものではない。すなわち、光走査モジュール１０の内部や光取り出し口１６に配置されてもよい。 (3a) In each of the above embodiments, the inspection sensor 20 is disposed outside the optical scanning module 10, but the position where the inspection sensor 20 is disposed is not limited to this. That is, it may be arranged inside the optical scanning module 10 or in the light extraction port 16.
　（３ｂ）また、上記各実施形態では、検査センサ２０は、光走査モジュール１０の外部のハーフミラー１４から検査センサ２０までの距離がハーフミラー１４から偏向素子１５ａまでの距離と同じになるような位置に配置されるとした。しかし、検査センサ２０の配置される位置はこれに限定されるものではない。例えば、ハーフミラー１４から偏向素子１５ａまでの距離に対してハーフミラー１４からの距離が遠くなる位置でも、近くなる位置でもよい。この場合において、ハーフミラー１４から偏向素子１５ａまでの距離に対してハーフミラー１４から検査センサ２０までの距離が遠くなる位置に検査センサ２０を配置し、光ビームの出射される方向のずれを、より詳細に検査する構成としてもよい。 (3b) In each of the above embodiments, the inspection sensor 20 is configured such that the distance from the half mirror 14 outside the optical scanning module 10 to the inspection sensor 20 is the same as the distance from the half mirror 14 to the deflection element 15a. It was supposed to be placed in position. However, the position where the inspection sensor 20 is arranged is not limited to this. For example, it may be a position where the distance from the half mirror 14 is far or close to the distance from the half mirror 14 to the deflection element 15a. In this case, the inspection sensor 20 is disposed at a position where the distance from the half mirror 14 to the inspection sensor 20 is farther than the distance from the half mirror 14 to the deflection element 15a, and the deviation of the direction in which the light beam is emitted is It is good also as a structure to test | inspect in more detail.
　（３ｃ）また、上記各実施形態では、光走査装置１は検査センサ２０を備えるとしたが、検査センサ２０を備える構成に限定されるものではない。例えば、光走査装置の外側に検査センサを設ける構成としてもよい。 (3c) In the above embodiments, the optical scanning device 1 includes the inspection sensor 20, but the configuration is not limited to the configuration including the inspection sensor 20. For example, an inspection sensor may be provided outside the optical scanning device.
　（３ｄ）上記各実施形態では、ハーフミラー１４の透過光を偏向走査部１５に、ハーフミラー１４の反射光を光取り出し口１６に出射するが、ハーフミラー１４の透過光及び反射光の出射先はこれに限定されるものではない。すなわち、ハーフミラー１４により反射した光を偏向走査部１５に、透過した光を光取り出し口１６に出射する構成としてもよい。 (3d) In each of the embodiments described above, the transmitted light of the half mirror 14 is emitted to the deflection scanning unit 15 and the reflected light of the half mirror 14 is emitted to the light extraction port 16. Is not limited to this. That is, the light reflected by the half mirror 14 may be emitted to the deflection scanning unit 15 and the transmitted light may be emitted to the light extraction port 16.
　（３ｅ）上記第２実施形態では、光源は赤、緑、青の３つの光源を用いているが、光源の種類は、これに限定されるものではない。また、光源の数は３つに限定されるものではなく、２つ以下又は４つ以上としてもよい。この場合には、例えば光源の数に応じた数のコリメータレンズ、ミラーを配置してもよい。また、上記第２実施形態では、各色１つずつの光源により構成されるが、各色ごとの光源の数はこれに限定されるものではない。例えば、赤、緑の光源が１つずつ、青の光源が２つといった構成としてもよい。 (3e) In the second embodiment, three light sources of red, green, and blue are used as the light source, but the type of the light source is not limited to this. Further, the number of light sources is not limited to three, and may be two or less or four or more. In this case, for example, a number of collimator lenses and mirrors corresponding to the number of light sources may be arranged. Moreover, in the said 2nd Embodiment, although comprised by the light source of one color of each color, the number of the light sources for each color is not limited to this. For example, the configuration may be such that one red light source and one green light source are provided, and two blue light sources are provided.
　（３ｆ）上記実施形態における１つの構成要素が有する機能を複数の構成要素として分散させたり、複数の構成要素が有する機能を１つの構成要素に統合したりしてもよい。また、上記実施形態の構成の一部を省略してもよい。また、上記実施形態の構成の少なくとも一部を、他の上記実施形態の構成に対して付加、置換等してもよい。なお、請求の範囲に記載の文言から特定される技術思想に含まれるあらゆる態様が本開示の実施形態である。 (3f) The functions of one constituent element in the above embodiment may be distributed as a plurality of constituent elements, or the functions of a plurality of constituent elements may be integrated into one constituent element. Moreover, you may abbreviate | omit a part of structure of the said embodiment. In addition, at least a part of the configuration of the above embodiment may be added to or replaced with the configuration of the other embodiment. In addition, all the aspects included in the technical idea specified from the wording described in the claims are embodiments of the present disclosure.

Claims (3)

  1. 　光ビームを走査して画像を表示する光走査モジュール（１０、３０）であって、
    　光源（１１、１１ａ、１１ｂ、１１ｃ）から出射された光ビームの伝搬経路上に設けられ、前記光ビームを透過及び反射するハーフミラー（１４）と、
    　前記ハーフミラーを透過した光ビーム及び前記ハーフミラーで反射した光ビームのうちいずれか一方を入射光とし、いずれか他方を検査光として、前記入射光を偏向走査する偏向走査部（１５）と、
    　前記検査光を当該光走査モジュールの外部に取り出す光取り出し口（１６）と、
    　を備える光走査モジュール。     An optical scanning module (10, 30) for scanning an optical beam to display an image,
    A half mirror (14) provided on the propagation path of the light beam emitted from the light source (11, 11a, 11b, 11c) and transmitting and reflecting the light beam;
    A deflection scanning unit (15) for deflecting and scanning the incident light, with either one of the light beam transmitted through the half mirror and the light beam reflected by the half mirror as incident light and the other as inspection light;
    A light extraction port (16) for extracting the inspection light to the outside of the optical scanning module;
    An optical scanning module comprising:
  2. 　光ビームを走査して画像を表示する光走査装置（１、２）であって、
    　光源（１１、１１ａ、１１ｂ、１１ｃ）から出射された光ビームの伝搬経路上に設けられ、前記光ビームを透過及び反射するハーフミラー（１４）と、
    　前記ハーフミラーを透過した光ビーム及び前記ハーフミラーで反射した光ビームのうちいずれか一方を入射光とし、いずれか他方を検査光として、前記入射光を偏向走査する偏向走査部（１５）と、
    　前記検査光の特性を検査する検査センサ（２０）と、
    　を備える光走査装置。     An optical scanning device (1, 2) for scanning an optical beam to display an image,
    A half mirror (14) provided on the propagation path of the light beam emitted from the light source (11, 11a, 11b, 11c) and transmitting and reflecting the light beam;
    A deflection scanning unit (15) for deflecting and scanning the incident light, with either one of the light beam transmitted through the half mirror and the light beam reflected by the half mirror as incident light and the other as inspection light;
    An inspection sensor (20) for inspecting the characteristics of the inspection light;
    An optical scanning device comprising:
  3. 　請求項２に記載の光走査装置であって、
    　前記検査センサと前記ハーフミラーとの距離が前記偏向走査部と前記ハーフミラーとの距離と同じになるように前記検査センサの位置が配置されている、光走査装置。     The optical scanning device according to claim 2,
    An optical scanning device in which a position of the inspection sensor is arranged so that a distance between the inspection sensor and the half mirror is the same as a distance between the deflection scanning unit and the half mirror.
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Publication number Priority date Publication date Assignee Title
JPH02203307A (en) * 1989-01-31 1990-08-13 Ando Electric Co Ltd Mechanism for aligning optical axes of light emitting element and optical fiber
JP2012145755A (en) * 2011-01-12 2012-08-02 Konica Minolta Advanced Layers Inc Image display device
JP2014197053A (en) * 2013-03-29 2014-10-16 船井電機株式会社 Projector device and head-up display device

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