WO2017199648A1 - 位置センサ - Google Patents

位置センサ Download PDF

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Publication number
WO2017199648A1
WO2017199648A1 PCT/JP2017/014898 JP2017014898W WO2017199648A1 WO 2017199648 A1 WO2017199648 A1 WO 2017199648A1 JP 2017014898 W JP2017014898 W JP 2017014898W WO 2017199648 A1 WO2017199648 A1 WO 2017199648A1
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WO
WIPO (PCT)
Prior art keywords
gap
detection
magnetic
support substrate
correction coefficient
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2017/014898
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English (en)
French (fr)
Japanese (ja)
Inventor
孝昌 金原
青山　正紀
佑樹 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
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Denso Corp
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Filing date
Publication date
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Publication of WO2017199648A1 publication Critical patent/WO2017199648A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage

Definitions

  • the present disclosure relates to a position sensor that detects a position of a detection target.
  • the position sensor includes a sensor main body in which a magnetic plate having a width with respect to the length direction of the magnet that differs depending on the position in the length direction is provided on one surface of the magnet magnetized in the thickness direction. .
  • the position sensor also includes a magnetic transducer that moves along the longitudinal direction with a certain gap above the magnetic plate of the sensor body.
  • the magnetic field emitted from the magnet is shielded by the magnetic plates having different widths, the magnetic field strength on the surface of the magnetic plate varies depending on the position in the length direction of the magnet. Therefore, the position of the magnetic conversion element relative to the magnet can be detected by detecting the output from the moving magnetic conversion element.
  • This disclosure is intended to provide a position sensor capable of correcting an error in position detection of a detection target.
  • a position sensor includes a support substrate having a front surface and a back surface, and a magnetic flux generation unit that generates a magnetic flux in a direction orthogonal to the surface of the support substrate and is fixed to the surface of the support substrate. Yes.
  • the position sensor is provided in a magnetic flux transmission range on the back surface of the support substrate, and includes a magnetic element that outputs a detection signal corresponding to the strength of the magnetic flux.
  • the position sensor includes a correction unit that inputs a detection signal and corrects the detection signal based on a change in sensitivity of the magnetic element.
  • the detection target is located away from the back surface of the support substrate and is made of a magnetic material.
  • the front end portion of the back surface of the support substrate moves the space corresponding to the transmission range from the reference position in the surface direction.
  • the strength of the magnetic flux changes according to the amount of movement that the tip moves from the reference position.
  • the position sensor since the position sensor includes the correction unit, the detection signal can be corrected based on the sensitivity of the magnetic element. Therefore, it is possible to correct an error in detecting the position of the detection target.
  • FIG. 1 is a side view of a position sensor according to the first embodiment of the present disclosure.
  • FIG. 2 is a diagram illustrating the output of the magnetic element with respect to the detection target movement amount, and the output of the magnetic element when the gap becomes large
  • FIG. 3 is a diagram illustrating an output after signal processing with respect to the detection target movement amount
  • FIG. 4 is a diagram showing the content of dividing the output of the magnetic element into a plurality of sections in the second embodiment.
  • FIG. 5 is a diagram for explaining calculation of the inclination correction coefficient and the offset correction coefficient in the second embodiment.
  • FIG. 6 is a side view of the position sensor according to the third embodiment.
  • FIG. 7 is a diagram showing the output of the magnetic element before correction by the saturation correction coefficient, and the output of the magnetic element after correction by the saturation correction coefficient
  • FIG. 8 is a diagram illustrating an output after signal processing using a saturation correction coefficient.
  • the position sensor 1 detects the position of the detection target.
  • the position sensor 1 includes a support substrate 10, a magnet 20, a plurality of magnetic elements 31 to 35, a gap detection element 40, and a signal processing unit 50.
  • the support substrate 10 is a plate-like component having a front surface 11 and a back surface 12.
  • the support substrate 10 is a circuit board on which pads and wiring patterns (not shown) are formed.
  • a substrate such as a printed circuit board that transmits magnetic flux is used.
  • the magnet 20 is a component for applying a magnetic flux that changes depending on the presence or absence of the detection target 100 to each of the magnetic elements 31 to 35.
  • the magnet 20 is fixed to the surface 11 so that the magnetic flux is directed in a direction perpendicular to the surface 11 of the support substrate 10.
  • the N pole of the magnet 20 is directed to the surface 11 side of the support substrate 10. Thereby, the direction of the magnetic flux is changed from the front surface 11 side to the back surface 12 side of the support substrate 10.
  • the detection object 100 is made of a plate-like magnetic material.
  • the detection target 100 is located away from the back surface 12 of the support substrate 10. Further, the detection target 100 moves from the reference position in the surface direction of the back surface 12 of the support substrate 10. Specifically, the front end portion 110 of the detection target 100 in the surface direction of the back surface 12 of the support substrate 10 moves the space portion 200 corresponding to the transmission range of the magnetic flux in the space above the back surface 12 in the surface direction. To do.
  • Each of the magnetic elements 31 to 35 outputs a detection signal corresponding to the strength of the magnetic flux that changes according to the amount of movement of the tip portion 110 of the detection target 100 from the reference position.
  • the detection signal is, for example, a voltage having a magnitude corresponding to the strength of the magnetic flux.
  • a Hall element or the like that detects magnetic strength is used.
  • each of the magnetic elements 31 to 35 is mounted in a magnetic flux transmission range in the back surface 12 of the support substrate 10. Specifically, the magnetic elements 31 to 35 are arranged on a straight line along the moving direction of the detection target 100 and are arranged apart from each other. In the present embodiment, five magnetic elements 31 to 35 are provided on the support substrate 10. All the magnetic elements 31 to 35 have the same function and configuration.
  • the gap detection element 40 is an element that detects a gap with the detection target 100.
  • the gap detection element 40 is an element that detects a change in sensitivity of each of the magnetic elements 31 to 35.
  • the gap detection element 40 outputs a gap signal corresponding to the size of the gap.
  • the gap signal is, for example, a voltage having a magnitude corresponding to the gap.
  • the gap detection element 40 is mounted in the magnetic flux transmission range in the back surface 12 of the support substrate 10 in order to always detect the gap with the detection target 100 regardless of the movement of the detection target 100.
  • the detection target 100 is mounted on the back surface 12 of the support substrate 10 so as to always face.
  • a Hall element or the like that detects the strength of magnetism is used. That is, each of the magnetic elements 31 to 35 and the gap detection element 40 are elements having the same configuration.
  • the signal processing unit 50 receives detection signals from the magnetic elements 31 to 35, and corrects the detection signals based on changes in sensitivity of the magnetic elements 31 to 35. For this reason, the signal processing unit 50 has a correction function of inputting a gap signal from the gap detection element 40 and correcting the detection signal using the gap signal.
  • the signal processing unit 50 is configured as an IC chip, for example.
  • the signal processing unit 50 is mounted on the back surface 12 of the support substrate 10 at a location that is not affected by the magnet 20.
  • the signal processing unit 50 may be mounted on the surface 11 of the support substrate 10.
  • the above is the configuration of the position sensor 1.
  • the position sensor 1 includes a housing that accommodates each of the above components, a terminal for electrical connection with other devices, and the like.
  • the strength of magnetic flux varies depending on the position of the detection target 100 in the space 200. Specifically, when the detection target 100 is positioned in a direction orthogonal to the surface 11 of the support substrate 10, the magnetic flux of the magnet 20 is attracted to the detection target 100 that is a magnetic body, and thus the magnetic flux becomes stronger. On the other hand, when the detection target 100 is not positioned in a direction orthogonal to the surface 11 of the support substrate 10, the strength of the magnetic flux of the magnet 20 does not change. That is, it becomes weaker than the magnetic flux when the detection target 100 is located.
  • each of the magnetic elements 31 to 35 outputs a detection signal corresponding to the position of the distal end portion 110 of the detection target 100.
  • the output of the magnetic element 31 is V1
  • the output of the magnetic element 32 is V2
  • the output of the magnetic element 33 is V3
  • the output of the magnetic element 34 is V4
  • the output of the magnetic element 35 is V5.
  • switching thresholds are set for the outputs V1 to V5. This is because the output becomes a constant value when the strength of the magnetic flux received by each of the magnetic elements 31 to 35 is maximized or minimized. Therefore, the range in which the output changes according to the change in magnetic flux is set by the switching threshold.
  • the switching threshold is not a fixed value, but is set so as to fluctuate corresponding to the maximum value and the minimum value of each output.
  • the switching threshold is stored in advance in the signal processing unit 50.
  • the signal processing unit 50 uses the output V1 of the magnetic element 31 as a detection signal.
  • the signal processing unit 50 uses the output V2 of the magnetic element 32 as a detection signal. The signal processing unit 50 switches such detection signals.
  • the signal processing unit 50 inputs a gap signal from the gap detection element 40.
  • the initial value is a reference value for the gap size.
  • the signal processing unit 50 sets an initial value based on a gap signal, for example, when the position sensor 1 is turned on, when position detection is started, or when certain specific conditions are met. What is necessary is just to decide suitably when initial value is acquired.
  • the gap becomes larger than the initial value shown in FIG.
  • the sensitivity of each magnetic element 31 to 35 is lowered. Therefore, as shown in FIG. 2, the maximum values of the outputs V1 to V5 of the magnetic elements 31 to 35 are small. Similarly, the output of the gap detection element 40 is also reduced.
  • the sensitivity of each of the magnetic elements 31 to 35 increases and the output of the gap detection element 40 also increases.
  • the gap between the position sensor 1 and the detection target 100 is not always constant. That is, since the gap changes according to the state of the position sensor 1 and the detection target 100, the signal processing unit 50 corrects the sensitivity of each of the magnetic elements 31 to 35.
  • the signal processing unit 50 receives the gap signal and acquires the initial value of the gap signal. Then, the signal processing unit 50 acquires a ratio between the initial value of the gap signal and the gap value accompanying the movement of the detection target 100 as a gap correction coefficient. Thereby, for example, the ratio of the gap value shown in FIG. 2 to the initial value of the gap shown in FIG. 2 can be known.
  • the signal processing unit 50 corrects the sensitivity of the output by multiplying the output of each of the magnetic elements 31 to 35 by a gap correction coefficient. Further, the signal processing unit 50 corrects the switching threshold by multiplying the switching threshold by a gap correction coefficient. As a result, when the gap becomes large, the signal processing unit 50 increases the output sensitivity by the gap correction coefficient and also changes the switching threshold. On the other hand, when the gap becomes small, the signal processing unit 50 lowers the output sensitivity by the gap correction coefficient and also changes the switching threshold.
  • the switching threshold value on the maximum value side of each of the outputs V1 to V5 varies depending on the change of the gap. It will be lower. For this reason, an error occurs in the position of the detection target 100.
  • the signal processing unit 50 performs the correction using the gap correction coefficient
  • the outputs V1 to V5 change in proportion to the movement amount of the detection target 100 regardless of the change in the gap. Can be signal processed. Also, the linearity of the outputs V1 to V5 can be ensured. Therefore, the position detection error of the detection target 100 can be corrected.
  • the position sensor 1 is applied to, for example, detection of a moving position in the axial direction of a rotating body such as an automobile drive shaft, camshaft, and gear, shift position detection, and position detection of a piston, a valve, and the like.
  • a rotating body such as an automobile drive shaft, camshaft, and gear
  • shift position detection and position detection of a piston, a valve, and the like.
  • the position sensor 1 may be applied to applications other than automobiles.
  • the magnet 20 corresponds to the magnetic flux generation part.
  • the gap detection element 40 and the signal processing unit 50 correspond to a correction unit, and the gap detection element 40 corresponds to a magnetic element for gap detection.
  • the signal processing unit 50 has a function of correcting the linearity of the outputs V1 to V5 of the magnetic elements 31 to 35. For this reason, the signal processing unit 50 has an inclination correction coefficient and an offset correction coefficient in advance. These coefficients are calculated as follows.
  • the range of the output value of the detection signal of the magnetic element 31 assumed by the movement of the detection target 100 is divided into a plurality by the division threshold.
  • the upper and lower switching thresholds are divided into three sections A to C by two division thresholds.
  • an inclination correction coefficient for correcting the inclination of a straight line connecting the minimum value and the maximum value of the output value of the detection signal in the section A to the inclination of the target output is acquired. That is, the inclination correction coefficient is a parameter for adjusting the sensitivity of the section A. Further, in the section A, an offset correction coefficient is acquired that matches the start point and the end point of the output value corrected by the inclination correction coefficient with the target output. In the sections B and C, the inclination correction coefficient and the offset correction coefficient are acquired.
  • the inclination correction coefficient and the offset correction coefficient are acquired for each of the magnetic elements 32 to 35. Then, the inclination correction coefficient and the offset correction coefficient are stored in the signal processing unit 50.
  • the acquisition of each correction coefficient is performed when the position sensor 1 is manufactured, for example. Further, by storing the target output in advance in the signal processing unit 50, the signal processing unit 50 may perform a process of acquiring each correction coefficient when the detection target 100 is set in the position sensor 1.
  • the signal processing unit 50 multiplies the output value by the inclination correction coefficient corresponding to the detection signal input from each of the magnetic elements 31 to 35, and corrects the output value by adding the offset correction coefficient. . In this way, the sensitivity of the detection signal is corrected.
  • the signal processing unit 50 corresponds to a correction unit.
  • the signal processing unit 50 has a function of correcting the sensitivity of each of the magnetic elements 31 to 35. Have.
  • the gaps x1 to x5 between the magnetic elements 31 to 35 and the detection target 100 are all different sizes.
  • the saturation values of the outputs V1 to V5 of the magnetic elements 31 to 35 are V1 ⁇ V2 ⁇ V3 ⁇ V4 ⁇ V5. Therefore, as shown in FIG. 8, the outputs V1 to V5 with respect to the amount of movement of the detection target 100 are non-linear outputs indicated by dotted lines.
  • the signal processing unit 50 has a saturation correction coefficient. This coefficient is calculated as follows. First, the position sensor 1 is set for the detection target 100. Further, the saturation values on the upper and lower sides of the magnetic elements 31 to 35 with respect to the detection target 100 are acquired. Then, one of the upper saturation values is set as a reference value. For example, the saturation value of the output V3 of the magnetic element 33 is set as the reference value. The upper saturation values of the outputs V1 to V5 are Vu1 to Vu5. Therefore, the upper saturation value of the output V3 is Vu3.
  • the saturation correction coefficient ai is calculated for each of the magnetic elements 31 to 35 from the ratio of the saturation values Vu1 to Vu5 of each of the magnetic elements 31 to 35 and the reference value Vu3. That is, the saturation correction coefficient ai is a parameter for adjusting the sensitivity of each of the magnetic elements 31 to 35.
  • the saturation correction coefficient ai is calculated from the saturation values Vf1 to Vf5 on the upper side of the outputs V1 to V5.
  • the saturation correction coefficient ai is acquired before the position of the detection target 100 is detected.
  • the saturation correction coefficient ai may be calculated when the position sensor 1 is manufactured and stored in the signal processing unit 50.
  • the signal processing unit 50 corrects the outputs V1 to V5 using the saturation correction coefficient ai corresponding to the detection signals input to the magnetic elements 31 to 35.
  • the signal processing unit 50 uses the outputs V1 to V5 that are fluctuation values instead of the saturation values Vu1 to Vu5.
  • the signal processing unit 50 corresponds to a correction unit.
  • the magnet 20 is used to generate magnetic flux, but this is an example of the configuration.
  • magnetic flux generation means such as an electromagnet may be used.
  • the detection target 100 is configured in a plate shape, but this is an example of a shape. Therefore, the detection target 100 is not limited to a plate shape, and may have another shape.
  • the position sensor 1 includes the plurality of magnetic elements 31 to 35, but it is not necessary to include the plurality of magnetic elements 31 to 35. Even one magnetic element can be configured as the position sensor 1.
  • the support substrate 10 is provided with five magnetic elements 31 to 35, but the number of magnetic elements 31 to 35 is an example. Therefore, the number of magnetic elements 31 to 35 is not limited to five.
  • the gap detection element 40 is used to detect the gap.
  • any one of the magnetic elements 31 to 35 may be configured to function as the gap detection element 40. . That is, the position sensor 1 may not include the gap detection element 40 as in the configuration illustrated in FIG. 6 of the third embodiment.
  • the signal processing unit 50 acquires the output of the magnetic element 31 facing the detection target 100 as a gap signal corresponding to the size of the gap with the detection target 100.
  • the signal processing unit 50 obtains a ratio between the initial value of the gap signal and the gap value accompanying the movement of the detection target as a gap correction coefficient, and corrects the sensitivity of the detection signal using the gap correction coefficient.
  • the initial value of the gap signal is the output after the output of the magnetic element 31 reaches the maximum value.
  • the signal processing unit 50 can correct the sensitivity of the outputs of the magnetic elements 32 to 35 using the output of the magnetic element 31.
  • the sensitivity can be corrected according to the gap without using the gap detecting element 40. This makes it possible to correct the sensitivity even in a configuration in which it is difficult to arrange the gap detection element 40. Further, the position sensor 1 can be reduced in size.
  • this configuration may be combined with the second and third embodiments.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
PCT/JP2017/014898 2016-05-17 2017-04-12 位置センサ Ceased WO2017199648A1 (ja)

Applications Claiming Priority (2)

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JP2016098495A JP6536478B2 (ja) 2016-05-17 2016-05-17 位置センサ
JP2016-098495 2016-05-17

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116147471A (zh) * 2023-03-06 2023-05-23 大陆汽车电子（连云港）有限公司 用于确定传感器的芯片位置偏差的方法及电子设备

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3663722B1 (de) * 2018-12-03 2021-05-26 Sick Ag Verfahren zur automatischen kalibrierung eines magnetischen sensors und magnetischer sensor
EP4621355A1 (en) * 2022-11-16 2025-09-24 Denso Corporation Position detection device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63236901A (ja) * 1987-03-25 1988-10-03 Nec Corp 位置センサ
JPH0374318U (enExample) * 1989-11-24 1991-07-25
JP2012515914A (ja) * 2009-01-27 2012-07-12 レニショウ パブリック リミテッド カンパニー 磁気エンコーダ装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63236901A (ja) * 1987-03-25 1988-10-03 Nec Corp 位置センサ
JPH0374318U (enExample) * 1989-11-24 1991-07-25
JP2012515914A (ja) * 2009-01-27 2012-07-12 レニショウ パブリック リミテッド カンパニー 磁気エンコーダ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116147471A (zh) * 2023-03-06 2023-05-23 大陆汽车电子（连云港）有限公司 用于确定传感器的芯片位置偏差的方法及电子设备

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JP2017207319A (ja) 2017-11-24
JP6536478B2 (ja) 2019-07-03

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