WO2017195723A1 - Dispositif de charge de particules - Google Patents

Dispositif de charge de particules Download PDF

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Publication number
WO2017195723A1
WO2017195723A1 PCT/JP2017/017364 JP2017017364W WO2017195723A1 WO 2017195723 A1 WO2017195723 A1 WO 2017195723A1 JP 2017017364 W JP2017017364 W JP 2017017364W WO 2017195723 A1 WO2017195723 A1 WO 2017195723A1
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WO
WIPO (PCT)
Prior art keywords
particles
gas
charged
unit
charging device
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Application number
PCT/JP2017/017364
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English (en)
Japanese (ja)
Inventor
洋 関
良弘 上野
奥田　浩史
博 桜井
Original Assignee
株式会社島津製作所
国立研究開発法人産業技術総合研究所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 株式会社島津製作所, 国立研究開発法人産業技術総合研究所 filed Critical 株式会社島津製作所
Priority to JP2018516997A priority Critical patent/JP6702412B2/ja
Publication of WO2017195723A1 publication Critical patent/WO2017195723A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/38—Particle charging or ionising stations, e.g. using electric discharge, radioactive radiation or flames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T19/00—Devices providing for corona discharge
    • H01T19/02—Corona rings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere

Definitions

  • the present invention relates to a particle charging device for charging fine particles in a gas, and more particularly to a particle charging device using a diffusion charging method.
  • the diffusion charging method is generally used.
  • appropriate carrier gas molecules are ionized by corona discharge or the like, and the generated gas ions are brought into contact with the particles to be charged. Is charged.
  • the charging method using the discharge for generating the gas ions is roughly classified into a bipolar charging method for generating positive and negative charged particles using the bipolar discharge, and a positive electrode using the single electrode discharge.
  • a unipolar charging system that generates unipolar charged particles of either a negative polarity or a negative polarity.
  • the bipolar charging method there is an advantage that charges of an equilibrium charge distribution which is electrically stable are usually given to the charged particles, and there is little occurrence of multivalent charge of 2 or more.
  • the charging efficiency is particularly low for particles having a small particle size. Particles that are not charged in the charging device are not subject to classification based on electric mobility or collection using electrostatic force, and therefore there is a problem that analysis sensitivity is lowered when charging efficiency is low.
  • the unipolar charging method has an advantage that sufficiently high charging efficiency can be obtained even for particles having a small particle diameter, compared to the bipolar charging method.
  • large-sized particles have a large surface area and are more likely to come into contact with ions than small-sized particles. Since the electric mobility of a charged particle is approximately inversely proportional to the cross-sectional area of the charged particle and proportional to the electric charge, the electric mobility of a large particle charged with a multivalent charge and a small particle with a smaller valence are smaller. May be almost the same, and even if it is attempted to classify charged particles in a state in which they are mixed according to the electric mobility, the difference in particle diameter cannot be distinguished. As a result, even if it is attempted to collect particles having a specific particle size by using classification, there is a risk that contamination with particles other than the target particle size will increase.
  • a particle charging device used for electrostatic classification / collecting devices for gas phase nanoparticles it is possible to improve the collection efficiency of particles due to high charging efficiency and to use multivalent charging to prevent mixing of different diameter particles.
  • multivalent charging there is a demand for both suppression of the above, that is, to make the valence of the nanoparticles uniform.
  • the charging efficiency and the suppression of the multivalent charging are in a trade-off relationship, and it is difficult to satisfy the above demand.
  • the present invention has been made in order to solve the above-mentioned problems, and the object of the present invention is to provide particles capable of efficiently taking out monovalent charged particles while maintaining high charge efficiency and suppressing multivalent charge. It is to provide a charging device.
  • the present invention provides a particle charging device for charging particles in a gas.
  • a housing having an introduction part for introducing a carrier gas containing particles to be charged into the inside and a lead-out part for taking out charged particles to the outside;
  • an ion generator that supplies, as primary ions, predetermined gas ions generated by a unipolar charging method in the casing and forward in the traveling direction of the carrier gas introduced into the casing from the inlet;
  • the charged particles in the mixed region are moved in the direction of the deriving unit between the deriving unit and the mixed region in the casing where the primary ions and the charge target particles in the carrier gas are in contact with each other.
  • An electric field forming unit including an electrode and a voltage applying unit for applying a predetermined voltage to the electrode for forming an electric field having a potential gradient; It is characterized by having.
  • the particles to be charged are introduced into the casing continuously or intermittently through the introducing portion together with a carrier gas such as the atmosphere.
  • the ion generation unit generates gas ions by ionizing gas molecules contained in the carrier gas, or a carrier gas flow in which gas ions generated by ionizing another gas are introduced from the introduction unit proceeds. Supply to the area to be.
  • the ion generator is not particularly limited as long as it generates gas ions by a monopolar charging method, but typically, surface discharge including dielectric barrier discharge, corona discharge, arc discharge, spark discharge, atmospheric pressure glow What ionizes a predetermined gas molecule by discharge, such as discharge, can be used.
  • the gas ions are present in the space ahead of the carrier gas in the traveling direction. For this reason, the particles to be charged contained in the carrier gas come into contact with the primary ions and are charged by exchanging charges with the primary ions.
  • an electric field having a potential gradient that moves particles charged in the mixed region in the direction of the deriving unit is between the mixed region in which the primary ions and the charge target particles are in contact with each other by the electric field forming unit. Is formed.
  • the uncharged particles that have reached the mixed region are not affected by the electric field, but are immediately affected by the electric field when charged. Therefore, the charged particles in the mixed region, that is, charged particles, are accelerated in the direction of the lead-out portion by the action of the electric field and leave the mixed region. Then, the charged particles ride on the carrier gas flow flowing in the housing from the introducing portion toward the deriving portion, and are taken out of the housing by the deriving portion.
  • the primary ions are also attracted toward the deriving unit.
  • primary ions are much smaller in size than particles (charged particles), their behavior is not easily affected by the carrier gas flow. Therefore, the force acting on the primary ions is dominated by the electrostatic force received from the electric field, and after passing through the mixed region, the primary ions travel toward the stronger electrode and collide with the electrode and disappear. Therefore, the spatial concentration of the primary ions in the path from the charged particles leaving the mixed region to the deriving unit is low, and the primary ions are hardly extracted outside the casing through the deriving unit.
  • the particles give and receive charge each time they come into contact with the primary ions, if the particles stay in the mixed region where the primary ions are present at a high concentration, the particles are likely to be charged multivalently by coming into contact with the primary ions multiple times. .
  • the particle charging device when the particles are monovalently charged in the mixing region, they are immediately accelerated and leave the mixing region, so that contact with a plurality of primary ions hardly occurs, and multivalent charging is reduced. can do.
  • the ion generation unit generates primary ions by the unipolar charging method, the charging efficiency is higher than that of the bipolar charging method. Thereby, in the particle charging device according to the present invention, the charged particles that are monovalently charged can be efficiently taken out from the deriving unit.
  • the particle charging device can take various modes. That is, the particle charging device according to the first aspect of the present invention includes: The introduction part and the lead-out part are arranged to face each other on a substantially straight line,
  • the electric field forming section includes a plurality of ring electrodes arranged around a linear axis connecting the introduction section and the lead-out section, and a voltage application section that applies different DC voltages to the plurality of ring electrodes. It can be set as the structure containing these.
  • a cylindrical or truncated conical electrode made of a resistor is used, and a predetermined DC voltage is applied to both ends of the cylindrical or truncated conical electrode. Also good.
  • the introduction direction of the carrier gas to the casing through the introduction portion that is, the movement direction of the charge target particles riding on the carrier gas flow and the acceleration direction of the charged particles by the electric field are the same direction. Therefore, the movement of the charged particles is smooth. For this reason, the monovalently charged particles in the mixed region quickly leave the mixed region, and multivalent charging is less likely to occur.
  • the housing may have a substantially cylindrical wall surface centered on the shaft, and further include an auxiliary gas introduction portion and an auxiliary gas discharge portion for supplying auxiliary gas in the axial direction along the inner periphery of the wall surface.
  • the flow of the carrier gas introduced into the housing from the introduction portion and the flow of the auxiliary gas introduced from the auxiliary gas introduction portion into the housing are in the same direction, and the particles introduced on the carrier gas
  • the particle charging device comprises:
  • the housing further includes a gas outlet portion disposed substantially opposite to the introduction portion, and the outlet portion is provided at a position deviating from a straight line connecting the introduction portion and the gas outlet portion,
  • the electric field forming unit may be configured to form an electric field that moves particles charged in the mixing region in the direction of the deriving unit while separating the particles charged from the introducing unit to the gas deriving unit. it can.
  • the particles that are not charged in the casing are not affected by the electric field formed by the electric field forming unit, and thus travel almost straight and are discharged from the gas outlet unit.
  • the charged particles are separated from most of the carrier gas flow by the influence of the electric field, and are taken out from the lead-out portion together with a part of the carrier gas to the outside of the casing. Therefore, according to this configuration, uncharged particles and charged charged particles can be separated and extracted.
  • uncharged particles can be returned to the inlet of the same particle charging device or introduced into another particle charging device to charge the particles contained in the carrier gas without leakage as much as possible. It can be taken out as particles.
  • the particle charging device suppresses multivalent charging by rapidly moving particles that are monovalently charged from a mixed region with primary ions while efficiently charging the particles by monopolar charging. Can do. Thereby, monovalent charged particles can be taken out efficiently.
  • the block diagram of the principal part of the particle charging device by one Example of this invention The block diagram of the principal part of the particle charging device by other Examples of this invention.
  • the block diagram of the principal part of the particle charging device by other Example of this invention The block diagram of the principal part of the particle charging device by other Example of this invention.
  • FIG. 1 is a configuration diagram of a main part of the particle charging apparatus of the present embodiment.
  • an aerosol introducing portion (corresponding to an introducing portion in the present invention) 2 and an aerosol extracting portion (corresponding to a leading portion in the present invention) are provided on both end surfaces of a substantially cylindrical housing 1 whose both end surfaces are closed. ) 3 is provided in a substantially straight line, and a sheath gas introduction part (auxiliary gas introduction part in the present invention) 4 is provided on the outer peripheral side of the aerosol introduction part 2 and a sheath gas is discharged on the outer peripheral side of the aerosol extraction part 3.
  • Part (auxiliary gas lead-out part in the present invention) 5 is provided.
  • An ion generation element (corresponding to an ion generation section in the present invention) 6 for generating primary ions is disposed immediately after the outlet of the aerosol introduction section 2 opened in the internal space of the casing 1, and the ion generation element 6 and the casing Between the inlet of the aerosol extraction part 3 opened to the space inside the body 1, with the axis C connecting the central axis of the aerosol introduction part 2 and the central axis of the aerosol extraction part 3 as the center, in the extending direction of the axis C A plurality of (seven in this example) ring-shaped electrodes 7 are arranged along.
  • the ion generating element 6 is not particularly limited as long as it performs unipolar charging, but for example, a surface-discharge microplasma device or a corona discharge electrode described in Non-Patent Document 1 or the like. For example, various discharges may be used.
  • a predetermined voltage is applied from the ionization voltage generation unit 11 to the ion generation element 6 under the control of the control unit 10.
  • the applied voltage at this time varies depending on the charging method of the ion generating element 6.
  • a pulsed voltage may be applied from either a positive or negative unipolar power supply depending on the polarity of charging.
  • an AC voltage on which a large DC bias voltage having a positive or negative polarity is superimposed may be applied.
  • a direct current electric field having a downward potential gradient with respect to the charged particles is formed from the aerosol introduction part 2 side toward the aerosol extraction part 3 side, that is, from left to right in FIG.
  • a predetermined DC voltage is applied to the plurality of ring electrodes 7 and the aerosol extraction unit 3 from the transfer voltage generation unit 12.
  • the voltage generated by the DC power source is divided by a ladder resistor and applied to each ring electrode 7 and the aerosol extraction unit 3.
  • the transfer voltage generation unit 12 is not limited to this configuration. Absent.
  • Carrier gas such as the atmosphere containing particles to be charged is supplied from the aerosol introduction unit 2 into the housing 1 at a predetermined flow rate, while, for example, the same sheath gas as the carrier gas is supplied from the sheath gas introduction unit 4 into the housing 1. Is done. Since the aerosol introduction part 2 has a tapered shape that gently spreads, the carrier gas has a wider sectional area and a lower flow rate. Further, since the flow of the sheath gas is formed on the outer peripheral side (portion close to the cylindrical wall surface) in the housing 1, the carrier gas is difficult to spread on the outer peripheral side. For this reason, the carrier gas discharged from the outlet end of the aerosol introduction part 2 opened in the housing 1 does not spread so much and gradually proceeds in the housing 1 toward the aerosol extraction part 3.
  • the ion generation element 6 When a predetermined voltage is applied from the ionization voltage generation unit 11 to the ion generation element 6, the ion generation element 6 ionizes gas molecules contained in the carrier gas and generates gas ions as primary ions. At this time, since the ion generating element 6 ionizes the gas molecules by unipolar charging, a large amount of gas ions having the same polarity can be generated. Therefore, in the vicinity of the outlet end of the aerosol introduction part 2, a mixed region 8 in which primary ions used for charging particles are present at a high concentration is formed. Since the particles contained in the carrier gas pass through the mixing region 8, they are charged in contact with the gas ions.
  • the potential gradient due to the DC electric field formed by the voltage applied from the transfer voltage generator 12 to the ring electrode 7 extends to the mixing region 8. Therefore, as soon as the particles are monovalently charged in the mixed region 8, an electric field acts on the charged particles and is accelerated in the direction toward the aerosol extraction unit 3.
  • a plurality of ring electrodes 7 are used to form a DC electric field for accelerating charged particles.
  • cylindrical (or truncated cone) electrodes made of resistors are used.
  • a DC electric field having a potential gradient similar to that of the above embodiment can also be formed by applying a DC voltage having a potential difference to both ends thereof.
  • the ion generating element 6 was arrange
  • FIG. 2 is a configuration diagram of a main part of a particle charging apparatus according to another embodiment, and the same components as those in the above embodiment are denoted by the same reference numerals.
  • an ion generating element 20 that ionizes a predetermined gas by an applied voltage from the ionization voltage generating unit 22 is provided outside the housing 1, and gas ions generated by the ion generating element 20 are supplied to the ion supply pipe 21. Is supplied to the inside of the housing 1. Obviously, even with such a configuration, the same effects as in the above-described embodiment can be obtained.
  • FIG. 3 is a configuration diagram of a main part of a particle charging device according to still another embodiment of the present invention. Constituent elements that are the same as in the above embodiment are given the same reference numerals.
  • the aerosol introduction part 2 and the aerosol extraction part 3 are arranged so as to face each other in a straight line.
  • a gas discharge part 30 is provided on the aerosol introduction part 2 and in a straight line, Apart from this, an aerosol takeout part 31 is provided at a position greatly deviating from a straight line connecting the aerosol introduction part 2 and the gas discharge part 30.
  • a plurality of ring electrodes 32 are formed in order to form a DC electric field that guides the monovalent charged particles charged in the mixing region 8 in the housing 1 to the aerosol extraction unit 31. Is arranged.
  • the ring electrode 32 is provided with an opening through which a carrier gas flow can pass.
  • An electric field having a potential gradient for accelerating charged particles downward in FIG. 3 is formed in a space surrounded by the ring-shaped electrode 32 by a voltage applied to the ring-shaped electrode 32 from a transfer voltage generator (not shown). . That is, the particles contained in the carrier gas are charged in contact with the gas ions in the mixing region 8, and immediately after being charged, the particles are accelerated in the direction of the gas discharge unit 30 by the electric field formed by the ring electrode 7. Then, when entering the space surrounded by the ring-shaped electrode 32, this time it is accelerated downward and toward the aerosol extraction part 31.
  • the carrier gas goes straight because it is not affected by the electric field, and most of the carrier gas is discharged to the outside of the housing 1 through the gas discharge unit 30. That is, the charged particles are separated from the carrier gas flow, and are taken out of the housing 1 through the aerosol takeout portion 31 together with a small amount of carrier gas.
  • non-charged particles are not affected by the electric field as in the case of the carrier gas, they are discharged through the gas discharge unit 30 together with most of the carrier gas. Thereby, in the particle charging device of this embodiment, monovalent charged particles and uncharged particles can be separated and taken out.

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  • Chemical & Material Sciences (AREA)
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  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
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Abstract

Selon la présente invention, une unité d'entrée (2), au moyen de laquelle un gaz porteur contenant des particules à charger est introduit à l'intérieur d'un boîtier (1), et une unité de sortie (3), au moyen de laquelle des particules chargées sont extraites, sont disposées de sorte à s'opposer l'une à l'autre sur une ligne droite. Un élément générateur d'ions (6) est disposé à proximité de la sortie de l'unité d'entrée (2). Des électrodes annulaires (7) sont disposées entre cet élément (6) et l'unité de sortie (3), formant un champ électrique à courant continu de telle sorte que des particules chargées soient accélérées vers l'unité de sortie (3). Des particules contenues dans le gaz porteur entrent en contact avec les ions gazeux générés par l'élément générateur d'ions (6) et sont chargées par ces derniers pour devenir des particules chargées monovalentes et, immédiatement après avoir été chargées, sont affectées par le champ électrique à courant continu et sont accélérées vers l'unité de sortie (3). De cette manière, les particules chargées monovalentes quittent immédiatement une région mixte (8) dans lequel des ions de gaz sont présents à une concentration élevée de telle sorte que l'occasion d'entrer à nouveau en contact avec un ion de gaz soit mince, et une charge multivalente est supprimée. De plus, puisque l'élément générateur d'ions (6) réalise une seule charge d'électrode, l'efficacité de charge est satisfaisante. Ceci permet d'extraire de manière efficace des particules chargées monovalentes.
PCT/JP2017/017364 2016-05-13 2017-05-08 Dispositif de charge de particules WO2017195723A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2018516997A JP6702412B2 (ja) 2016-05-13 2017-05-08 粒子荷電装置

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JP2016096647 2016-05-13
JP2016-096647 2016-05-13

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WO2017195723A1 true WO2017195723A1 (fr) 2017-11-16

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020179502A1 (fr) * 2019-03-01 2020-09-10 日本碍子株式会社 Élément de détection de particules fines et détecteur de particules fines

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005174619A (ja) * 2003-12-09 2005-06-30 Hitachi Ltd イオン移動度分光計及びイオン移動度分光法
JP2007534126A (ja) * 2004-04-20 2007-11-22 マイクロマス ユーケー リミテッド 質量分析計
JP2010518378A (ja) * 2007-02-01 2010-05-27 サイオネックス コーポレイション 質量分光計のための微分移動度分光計プレフィルタ
JP2011159422A (ja) * 2010-01-29 2011-08-18 Shimadzu Corp 質量分析装置
WO2016079780A1 (fr) * 2014-11-17 2016-05-26 株式会社島津製作所 Dispositif d'analyse à mobilité ionique

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005174619A (ja) * 2003-12-09 2005-06-30 Hitachi Ltd イオン移動度分光計及びイオン移動度分光法
JP2007534126A (ja) * 2004-04-20 2007-11-22 マイクロマス ユーケー リミテッド 質量分析計
JP2010518378A (ja) * 2007-02-01 2010-05-27 サイオネックス コーポレイション 質量分光計のための微分移動度分光計プレフィルタ
JP2011159422A (ja) * 2010-01-29 2011-08-18 Shimadzu Corp 質量分析装置
WO2016079780A1 (fr) * 2014-11-17 2016-05-26 株式会社島津製作所 Dispositif d'analyse à mobilité ionique

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020179502A1 (fr) * 2019-03-01 2020-09-10 日本碍子株式会社 Élément de détection de particules fines et détecteur de particules fines

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JPWO2017195723A1 (ja) 2019-03-28

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