WO2017187490A1

WO2017187490A1 - Analytical device

Info

Publication number: WO2017187490A1
Application number: PCT/JP2016/062956
Authority: WO
Inventors: 孝広神宮
Original assignee: 株式会社日立ハイテクノロジーズ
Priority date: 2016-04-26
Filing date: 2016-04-26
Publication date: 2017-11-02

Abstract

This analytical device is provided with: a sample flow channel; an illuminating optical system, which supplies collimated first illuminating light to a first surface of the flow channel, and which forms a linear first illuminating region in the flow channel; and a first detection unit that detects first transmitted light generated from the flow channel when the first illuminating light is supplied.

Description

Analysis equipment

The present invention relates to an analyzer.

In existing analyzers, for example, the analysis technique described in Patent Document 1 is used. Patent Document 1 states that “when there is a relative movement between a measurement object and the measurement object, the imaging system is configured to determine one or more characteristics of the measurement object from the image of the measurement object, a) a condenser lens arranged to transmit light from the measurement object and travel along the condenser optical path, and (b) arranged to receive the light passing through the condenser lens, thereby At least one image lens for generating an image guided toward a predetermined position; and (c) arranged to receive light that has passed through the condenser lens so that the light from the measurement object passes only once. A plurality of light reflecting elements that reflect light having a predetermined characteristic along different reflection light paths and pass light having no predetermined characteristic; and (d) each of the light reflecting elements. One for each light reflected by the light reflecting element And the measurement object is positioned to receive an image of the measurement object from one of the light transmitted through the light reflecting element and the relative movement is occurring between the measurement object and the imaging system. A plurality of pixelated detectors configured to generate an output signal representative of at least one characteristic of and to generate the output signal by integrating light from at least a portion of the measurement object over time; (E) to determine at least one characteristic of the measurement object, 1) to determine which position on the measurement object to label, 2) to label the label at each different position to be labeled An imaging system comprising: a processor configured to analyze an output signal from the pixelated detector by performing matching There has been disclosed.

JP 2007-263883 A

The analysis technique described in Patent Document 1 uses a condenser lens as an essential component. However, this apparatus configuration has restrictions in layout such that the distance required for detection is restricted by the specifications of the condenser lens.

In order to solve the above-mentioned problems, the present invention adopts, for example, the configurations described in the claims. The present specification includes a plurality of means for solving the above-described problems. For example, the following description is given: “Supply the sample illumination channel and the first illumination light collimated to the first surface of the channel. And an illumination optical system that forms a linear first illumination region in the flow path, and a first detection unit that detects the first transmitted light generated from the flow path by the supply of the first illumination light. There is an "analyzer with".

According to the present invention, at least restrictions on the layout relating to the detection system can be reduced. Problems, configurations, and effects other than those described above will become apparent from the following description of embodiments.

1 is a diagram illustrating a basic configuration of an analyzer according to Embodiment 1. FIG. The figure explaining the analysis technique using the detection result of 2 directions. FIG. 10 is a diagram illustrating a configuration example of an illumination system and a detection system used in the analyzer according to the second embodiment. FIG. 10 is a diagram illustrating a configuration example of a color separation unit used in an analyzer according to a third embodiment. FIG. 10 is a diagram illustrating a configuration example of an illumination system and a detection system used in the analyzer according to the fourth embodiment. FIG. 10 is a diagram for explaining a measurement operation in the analyzer according to the fifth embodiment. The figure which shows the example of application of an analyzer (Example 6). The figure which shows the other usage example of an analyzer (Example 6). (Example 7) explaining the sample flow path equipped with the cartridge type reaction cell.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. The embodiment of the present invention is not limited to the examples described later, and various modifications are possible within the scope of the technical idea.

(1) Example 1
(1-1) Apparatus Configuration (1-1-1) Schematic Configuration FIG. 1 shows a basic configuration of the analyzer 100 according to the embodiment. The analyzer 100 is used, for example, for cell observation, cell ecology observation, PET (Positron Emission Tomography) inspection, and water quality inspection. In the analysis apparatus 100, detection processing and analysis processing according to the purpose of inspection are executed. For example, it is used for counting and classification of particles (for example, dust) and cells contained in a fluid (including not only liquid but also gas) moved or conveyed along a flow path. If the fluid to be analyzed is blood, the analyzer 100 counts and classifies red blood cells, white blood cells, and platelets.

Analyzing apparatus 100 includes a detection unit 101 and an analysis unit 102. The division between the detection unit 101 and the analysis unit 102 in FIG. 1 is convenient. Accordingly, the detection unit 101 may be configured including the analysis unit 102, or some of the components of the detection unit 101 may be provided as parts independent of the detection unit 101.

1 includes a light source 103. The detection unit 101 shown in FIG. The light source 103 is a light emitting element that outputs a single wavelength or white light, and is composed of, for example, an LED (light-emitting diode). The light source 103 is selected according to the measurement object and measurement items (number, shape, classification, etc.). Not only the type of the light source 103 but also the wavelength band output from the light source 103 is selected. For example, when only the counting of the measurement object is intended, the single wavelength light source 103 is selected. This is because it is sufficient to count the measurement target if it can be binarized by the density of the detected image. By employing the single wavelength light source 103, the apparatus price can be reduced.

The light output from the light source 103 is branched into two by the optical path branching element 104. The optical path branching element 104 is composed of, for example, a half mirror. One of the branched lights is detected by the photodiode 105. The output signal S1 of the photodiode 105 is sent to the timing adjustment unit 106. The timing adjustment unit 106 outputs timing signals S2A and S2B for adjusting analog-digital conversion timing (light path difference of illumination light, difference in photoelectric conversion characteristics in the detection unit, delay in analog signal processing, etc.) synchronized with the illumination light. . The other of the branched lights is input to the collimator 107. The collimator 107 includes a first-stage lens that widens the diameter of incident light, a second-stage lens that converts incident light into parallel light, and a cylindrical lens that converts incident parallel light into a thin line shape. In this specification, conversion of illumination light into parallel light is referred to as “collimation”, and parallel light is also referred to as “collimation light”.

The thin linear illumination light (parallel light) output from the collimator 107 is divided into two by the half mirror 108. In this embodiment, the split ratio of the half mirror 108 is 50:50. The first illumination light 109 that has passed through the half mirror 108 illuminates the sample channel 110 whose outer shape is a rectangular parallelepiped. At least the illumination region (illumination window portion) where the first illumination light 109 is incident and the detection region (detection window portion) on the opposite side of the sample channel 110 are made of a light transmitting member. The entire sample channel 110 may be made of a transparent material. The second illumination light 111 reflected by the half mirror 108 is sequentially reflected by the

total reflection mirrors

112 and 113, and the surface (first surface) on which the first illumination light 109 enters the sample channel 110. Is incident on a different surface (second surface). In the case of FIG. 1, the first surface and the second surface are surfaces orthogonal to each other.

The sample channel 110 is a cylindrical member having a hollow inside. The sample (the above-described fluid) is moved in the sample channel 110 in the direction of the arrow M1, for example. In FIG. 1, the illumination light is incident on two orthogonal surfaces of the sample channel 110, but the illumination light may be incident on only one surface of the sample channel 110. In that case, the half mirror 108 and the total reflection mirrors 112 and 113 described above are unnecessary.

The first illumination light 109 incident from the first surface and transmitted through the sample channel 110 enters the first detection unit 115 as the first projection light 114. On the other hand, the second illumination light 111 incident from the second surface and transmitted through the sample channel 110 enters the second detection unit 117 as the second projection light 116.

The

detection units

115 and 117 may be elements that convert photons into electric signals. For example, a photodiode array (including an avalanche photodiode array) or other photoelectric conversion element array is used. The array may be a plurality of elements arranged in a row (one-dimensional) or a plurality of elements arranged in a matrix (two-dimensional). Of course, the longitudinal direction of the array is parallel to the longitudinal direction of the transmitted light (projection light 114 and 116) which is a thin line.

The light receiving surfaces of the

detectors

115 and 117 have an area and shape that can receive at least all the projection lights 114 and 116. Accordingly, the length of the light receiving surfaces of the

detection units

115 and 117 in the longitudinal direction is longer than the length of one side of the sample channel 110, and the length of the light receiving surfaces of the

detection units

115 and 117 in the short side direction is the

projection light

114 and 116. Longer than the line width.

The measurement object that passes through the area (measurement area) surrounded by the illumination window and the detection window is basically projected onto the light receiving surface as a shadow. In the case of the present embodiment, the

illumination lights

109 and 111 and the projection lights 114 and 116 are both parallel lights. Accordingly, a ten-dimensional shadow of the substance to be measured is formed on the light receiving surface. Moreover, in the apparatus of Patent Document 1, it is possible to detect only the measurement object passing through the light imaging position by the condensing lens. However, in the method of this embodiment using parallel light, the cross section of the sample channel 110 (measurement region) ) Can be measured all at once. That is, there is no oversight of the measurement object. Further, in the method using parallel light as in the present embodiment, the dimension projected on the light receiving surface does not change regardless of the position of the measurement object in the measurement region. Incidentally, in the method using the condensing lens, the size of the measurement object detected varies depending on the position even in the spot corresponding to the measurement region, and the measurement object moving outside the spot cannot be detected.

The light reception timing by the first detection unit 115 and the second detection unit 117 is also adjusted according to the timing signals S2A and S2B given from the timing adjustment unit 106. That is, the light reception timing is controlled to be synchronized with the incident timing of the projection lights 114 and 116. The first detection unit 115 and the second detection unit 117 output the reception intensities of the projection lights 114 and 116 received by the respective elements (pixels) at the respective light reception timings as output signals S3A and S3B. The timing signals S2A and S2B are adjusted so that the output signals S3A and S3B are maximized, that is, the SN ratio after digital conversion is maximized, and output to the analog-

digital converters

118 and 119, respectively.

The analog-

digital converters

118 and 119 convert the output signals S3A and S3B output from each element constituting the array into digital values and output the digital values to the analysis unit 102. The analog-digital conversion timing in the analog-

digital converters

118 and 119 is adjusted by the timing signals S2A and S2B as described above. The analysis unit 102 includes a so-called computer (RAM, ROM, CPU, hard disk, input / output unit, etc.). The analysis unit 102 performs analysis processing on data detected through execution of a program by the CPU, for example. The content of the analysis process varies depending on the application of the applied analyzer. The analysis unit 102 may be a module device in which a series of processing contents is packaged.

(1-1-2) Channel Configuration As described above, in FIG. 1, a cylindrical member having a rectangular parallelepiped shape is used as the shape of the sample channel 110. The rectangular parallelepiped is used to reduce generation of unwanted light such as scattering and reflection. Further, as described above, the region where the first and

second illumination lights

109 and 111 enter the sample channel 110 uses a material that is substantially transparent to the illumination light, and other regions. The part may be opaque (for example, black).

(1-1-3) Illumination Light It is desirable that the first and

second illumination lights

109 and 111 incident on the sample channel 110 are pulsed light. By using the first and

second illumination lights

109 and 111 as pulsed light, high energy can be instantaneously supplied. On the other hand, since the pulse interval is short, the total amount of energy applied to the measurement target can be reduced. Various methods can be applied to pulse the first and

second illumination lights

109 and 111. For example, a pulse light source is employed as the light source 103. Further, for example, the light source 103 may emit continuously oscillating light, and may be substantially pulsed by an optical element disposed on the optical path. For example, a shutter is used for this type of optical element. Examples of the shutter include a mechanical shutter and an electrical shutter exemplified by a transparent ferroelectric substance.

(1-1-4) Avalanche Photodiode Array Here, an avalanche photodiode array suitable for use in the

detection units

115 and 117 will be described. An avalanche photodiode (hereinafter also referred to as “APD”), which is a basic unit of an avalanche photodiode array, is a type of photodiode (hereinafter also referred to as “PD”), and a photocurrent is increased by applying a reverse voltage. It is a high-speed and high-sensitivity PD that is doubled. An APD is a device that measures energy by counting energy (for example, the number of photons constituting light).

When the reverse voltage of the APD is higher than the breakdown voltage, magnification increase the internal electric field is increased is very high (e.g., ¹⁰ 5 to 10 ⁶ times). The operation of the APD with the doubling rate increased in this way is called Geiger mode. The pair of electrons and holes generated in the PN junction by the incidence of energy (for example, photons or charged particles) in the Geiger mode is accelerated by a high electric field. At this time, electrons generated by the incidence of energy are accelerated in the P layer and travel toward the N layer with increased kinetic energy. Electrons that have entered the N layer with kinetic energy sufficiently higher than the band cap energy of the N layer bounce off the N layer, and the electrons bounced from the N layer generate more electrons in a chain. To do. This is the principle of multiplication action.

When a predetermined unit of energy (for example, one photon or charged particle) is incident on the Geiger mode APD, a very large pulse signal is generated by the above-described multiplication action, so that photons can be counted by the pulse signal. Light is a collection of photons (photons), and photons become discrete with weak light, but APD can be measured with high sensitivity by the above-described multiplication action even with weak light. The APD outputs a current having a magnitude corresponding to the number of photons and charged particles detected per time. APD has higher sensitivity to weak light than when general PD is applied.

The APD array is a kind of device called a silicon photomultiplier (Si-PM), and is an aggregate of Geiger mode APDs that operate individually. The individual APDs constituting the pixels of the APD array output pulse signals when energy is detected as described above. The output of the APD array may be the sum of all pixels, or may be output in units of pixels. The output of the APD array is output from the output line. By using such an APD array, even weaker energy (for example, light or electrons) can be detected with high sensitivity.

(1-2) Analysis Operation and Effect The usage mode of the analysis apparatus 100 according to the present embodiment varies depending on the measurement object and usage purpose. For example, there is a usage mode in which a fluid as a sample (gas or liquid) is supplied to the sample flow path 110 in the apparatus at every inspection, and there is a usage mode in which the apparatus is installed in the sample flow path 110 in which the sample always flows. There is also. In any case, the analyzer 100 applies the

illumination light

109 and 111 converted into linear and pulsed parallel light to the first surface and the second surface of the sample channel 110 where the sample is moving. Irradiate. From the surface opposite to the first surface and the second surface, linear and pulsed parallel light (that is, projection light 114 and 116) transmitted through the sample moving in the sample channel 110 is emitted. And is incident on the

detection units

115 and 117. The electrical signals output from the

detection units

115 and 117 are subjected to data analysis in the analysis unit 102.

As described above, the analysis apparatus 100 irradiates the sample channel 110 with the parallel light, so that the shadow of the measurement object moving in the sample channel 110 can be obtained at a real size at a time. Moreover, since parallel light is used, a wide field of view of the measurement region can be easily realized. In addition, since parallel light is used, even if the measurement object passes through any position in the cross section of the sample channel 110, a shadow having an actual size is generated on the light receiving surface. That is, the depth of focus can be made infinite. By using this function, it is possible to accurately measure the number and dimensions of measurement objects (for example, micron-order dust and cells).

Further, as shown in FIG. 2, in the case of the present embodiment, the same region (measurement region) in the sample channel 110 is detected from two directions. For this reason, even when a plurality of measurement objects 201 appear to overlap in one detection direction (even when two measurement objects form one shadow in the shape of the light receiving surface of the detection unit 115), the

detection units

115 and 117 By comparing the outputs, it is possible to reliably distinguish that there are a plurality of measurement objects 201.

Here, when each signal intensity of the output data (corresponding to individual photoelectric conversion elements constituting the array) of the

detection units

115 and 117 is lower than the threshold value, the analysis unit 102 outputs the shadow 202V of the measurement target 201 when the output data is lower than the threshold value. And 202H. The analysis unit 102 counts the number of measurement objects 201 that have passed through the measurement region by counting a single shadow as one. Further, by analyzing the output data of the

detection units

115 and 117, the passing position, shape, and size (area and volume) of each measurement target 201 can be accurately specified. Further, the density can be calculated based on the measured number, and the weight of the sample can be analyzed from the density.

Generally, in order to speed up the detection of the measurement target 201, it is necessary to shine strong light to increase the S / N ratio. However, when high intensity light is used, there is a concern that the measurement target is damaged. Therefore, in this embodiment, the illumination energy can be minimized by irradiating the sample flow path 110 with

pulsed illumination light

109 and 111, and damage to the measurement object can be reduced.

In addition, when using the

pulsed illumination lights

109 and 111, it is preferable that the

detection units

115 and 117 are formed of an avalanche photodiode array with high detection sensitivity. The use of the

pulsed illumination lights

109 and 111 is effective for measuring a sample (for example, a cell or a photosensitive resist material) that needs to avoid a state change caused by energy irradiation, and the same sample is repeatedly used for the measurement. be able to. Therefore, the analyzer 100 can also be used for measuring changes over time of the same sample. Further, since it is possible to minimize the possibility of a change in character due to irradiation of the

illumination lights

109 and 111, it is possible to perform 100% inspection instead of sample inspection performed by extracting a part of the sample. In addition, in the case where a material with a known reacting wavelength, such as a photosensitive resist material, is used as a measurement target, it is possible to avoid morphological changes by selectively irradiating

illumination lights

109 and 111 that do not include the reacting wavelength. it can.

Further, in the analysis unit 102, if the transmitted light (that is, the projection light 114 and 116) is wavelength-resolved and the distribution and the change in the detection intensity of each wavelength are analyzed, the uniformity and the component change when a plurality of materials are mixed are obtained. Can be analyzed or evaluated. Further, the density change of the fluid moving through the sample channel 110 appears as a change in the refractive index of the fluid. This change in the refractive index appears as a change in the illuminance distribution of the transmitted light (that is, the projection lights 114 and 116). Therefore, if the analysis unit 102 compares the measured illuminance distribution with the template data, a change in the density of the fluid can be detected. The illuminance distribution has an inclination distribution within the imaging field.

In addition, the transmitted light (that is, the projection light 114 and 116) transmitted through the sample channel 110 may change in spectrum (color) due to optical interference with the measurement target 201, and may decrease in luminance. For example, even if the measurement object 201 is a transparent cell, a change in spectrum (color) or a decrease in luminance appears in the transmitted light (that is, the projection lights 114 and 116). Therefore, the analysis unit 102 may execute the counting process of the measurement target 201 and the substance identification process based on the change in the spectrum and the decrease in luminance. In addition, since the

shadows

202V and 202H represent actual dimensions, the actual volume of the measurement object 201 can be calculated from these dimension information. The measurement object 201 here includes a transparent body other than cells (for example, a thin transparent body).

Further, the apparatus configuration of this embodiment that handles parallel light simplifies the configuration of the detection optical system and can reduce the manufacturing cost of the apparatus. Further, since the configuration is simple, assembly and adjustment are easy, and the detection optical system is stable. Furthermore, since the analyzing apparatus 100 of the present embodiment does not use a condensing lens, there is no layout restriction regarding the detection system, and the apparatus can be downsized.

(2) Example 2
FIG. 3 shows another configuration example of the illumination system and the detection system of the analyzer 100. FIG. 3 is one example of an illumination system and a detection system of the analyzer 100 shown in FIG. The illumination system in FIG. 3 includes an illuminance adjustment unit 301, a wavelength band selection unit 302, and a polarization switching unit 303. The illuminance adjusting unit 301 adjusts and outputs the illuminance of the

incident illumination light

109 and 111. The wavelength band selector 302 selectively extracts a wavelength component suitable for sample irradiation. The polarization switching unit 303 transmits a specific polarization component included in the illumination light. The illuminance adjusting unit 301, the wavelength band selecting unit 302, and the polarization switching unit 303 are not necessarily provided, and one or more of them may be used in combination as necessary.

3 includes a magnifying optical system 304 and an analyzer 305. The magnifying optical system 304 is inserted according to the required optical resolution. The analyzer 305 selectively transmits a specific polarization component. It is not always necessary to provide all of the magnifying optical system 304 and the analyzer 305. Any one or a combination of both may be used as necessary. Note that any distance can be selected for L1 to L3 in the figure.

(3) Example 3
FIG. 4 shows another configuration example of the detection system of the analyzer 100. The configuration of the detection system shown in FIG. 4 is suitable for use in detecting phenomena such as transmittance, transmission wavelength, and thin film interference as color information through transmitted light (projection lights 114 and 116). When calculating the transmittance, the analysis unit 102 uses the illuminance information of the

illumination lights

109 and 111 given from the timing adjustment unit 106. Illuminance information of the

illumination lights

109 and 111 is calculated in the timing adjustment unit 106 that receives the output signal S1 of the photodiode 105. Note that the detection system shown in FIG. 4 is particularly effective when the measurement target is a transparent body (for example, a cell).

For the

color separation units

401 and 402, for example, wavelength separation prisms are used. The color separation unit 401 transmits the blue component of the transmitted light (projection light 114 and 116) and reflects the other color components in the direction of the color separation unit 402. The color separation unit 402 further separates the incident light into a red component and a green component and outputs them. In the case of the configuration shown in FIG. 4, three

detectors

115R, 115G, and 115B (117R, 117G, and 117B) are arranged according to the separated red, green, and blue (RGB) components. Each of the

detection units

115R, 115G, and 115B (117R, 117G, and 117B) outputs a corresponding color component intensity signal.

As described above, by arranging the

detection units

115R, 115G, and 115B (117R, 117G, and 117B) on the optical path of the transmitted light (projection lights 114 and 116), the analysis unit 102 can be used even when the measurement target is a transparent body. Phenomena such as transmittance, transmission wavelength, and thin film interference can be detected as changes in color components. Further, by using the detection result, the analysis unit 102 can execute shape determination and classification of the measurement target.

(4) Example 4
FIG. 5 shows another configuration example of the illumination system and the detection system of the analyzer 100. In the present embodiment, the case where the cross section of the sample flow path 110 is a quadrilateral or more polygonal (FIG. 5 shows a case where the cross section of the sample flow path 110 is a regular hexagon). When the cross-sectional shape is a regular hexagon, three entrance surfaces and three transmission surfaces can be secured. However, the cross-sectional shape does not have to be a regular polygon. Thus, by increasing the detection direction by setting the cross-sectional shape of the sample channel 110 to an n-gon (n is 5 or more), it is possible to increase detection information regarding the measurement target and increase the detection accuracy.

(5) Example 5
FIG. 6 shows another measurement operation example for improving the measurement accuracy. In the above-described embodiment, each measurement object is basically measured only once in the measurement region. However, in this embodiment, the same measurement object is obtained by adjusting the detection timing of the projection lights 114 and 116. Measure multiple times within the measurement area.

For example, when the detection width is W and the flow velocity is FV, the time (passing time) T required for the sample (measurement target) to pass through the measurement region is given by the following equation.
T = W / FV

In this case, the timing adjustment unit 106 sets the sampling interval ST between the

detection units

115 and 117 and the analog-

digital converters

118 and 119 to less than T / 2. This means that the same measurement object can be detected twice or more. Of course, since the projection lights 114 and 116 need to be incident on the light receiving surfaces of the

detection units

115 and 117 at the sampling timing, the timing adjustment unit 106 sets the sampling timing between the emission timings of the

illumination lights

109 and 111. Are controlled synchronously.

As in this embodiment, a measurement region (a space region through which illumination light is transmitted, the width in the direction in which the sample flows) is detected a plurality of times according to the time (that is, the flow velocity) through which the sample passes. The possibility that a plurality of measurement objects at positions that cannot be separated by measurement can be separated can be increased. For example, at a certain sampling timing, there is a higher possibility that a plurality of measurement objects may appear to be separated at another sampling timing even if they appear to be one because they are close by chance. For this reason, the measurement accuracy can be improved by employing the detection method of this embodiment.

(6) Example 6
FIG. 7 shows a usage example suitable for real-time inspection (for example, foreign substance inspection, uniformity inspection, component inspection by mixing reaction reagents). In the case of this usage example, in general, an inspection unit 701 including the analyzer 100 is attached to a branch channel 703 branched from the main channel 702 for use. A flow rate control valve 711 provided on the upstream side of the branch channel 703 adjusts the flow rate of the sample flowing into one input port of the mixing unit 712 located on the downstream side. A reaction reagent tank 714 is connected to the other input port of the mixing unit 712 via a flow rate control valve 713. The flow control valve 713 adjusts the supply amount of the reagent. In the reagent reagent tank 714, a reagent corresponding to the inspection purpose (inspection item) is stored.

The reaction channel length switching unit 715 is connected to the output port of the mixing unit 712. The reaction channel length switching unit 715 is provided so that the path length from the mixing unit 712 to the analyzer 100 can be adjusted to a path length suitable for the reaction between the sample and the reagent. A plurality of channels having different lengths are prepared inside the reaction channel length switching unit 715. In use, for example, the installer selects a flow path having a length corresponding to the combination of the sample and the reagent. In the analysis unit 102 of the analysis apparatus 100, data processing corresponding to the inspection purpose (inspection item) is executed. For example, the detected data and template data registered in advance are compared, and the substance contained in the sample is specified and the concentration is determined.

Note that the number of branch channels 703 provided in the main channel 702 is not limited to one. In addition, the inspection unit 701 may be connected to each of the plurality of branch channels 703. In this case, the same inspection may be performed in each of the plurality of inspection units 701, or different types of inspections may be performed. Further, one branch channel 703 may be further branched, and the inspection unit 701 may be connected to a plurality of branch channels 703 after branching. For example, as shown in FIG. 8, an inspection unit 701 may be connected to the

sub-branch channels

704A and 704B further branched from the branch channel 703 branched from the main channel 702. If a plurality of inspection units 701 are connected in this way, a plurality of inspections can be executed simultaneously.

7 shows a configuration in which the analysis apparatus 100 is attached to the inspection unit 701, but a configuration part (that is, the detection unit 101) excluding the analysis unit 102 from the analysis apparatus 100 may be attached to the inspection unit 701. In this case, the output of the detection unit 101 (that is, the output of the analog-digital converters 118 and 119) is notified to the analysis unit 102 connected through a network or other communication path. The network may be a wireless network or a wired network.

(7) Example 7
FIG. 9 shows an embodiment in which a cartridge-type reaction cell 901 is attached to the sample channel 110. The reaction cell 901 is mounted in the measurement region of the sample channel 110. The reaction cell 901 includes a container made of a material that transmits the

illumination lights

109 and 111 and a reagent or a member containing the reagent (for example, a thin film sheet) filled therein. On the side surface of the container, an opening for taking in the sample moving in the direction of the arrow M1 is provided. The reagent develops color by reacting with a specific component of the sample incorporated therein, emits fluorescence, or changes in concentration. The analysis unit 102 compares the assumed change with the template data, and performs identification and concentration determination of the substance contained in the sample. The reaction cell 901 may be detachable from the container, or may be fixed.

By using the reaction cell 901, various measurements can be realized by changing the type of reagent to be filled even in the case of a sample (measurement target) that is difficult to detect only by irradiation with the

illumination light

109 and 111. For example, in the case of water quality inspection, a reagent that reacts with a specific substance (chlorine, heavy metal, etc.) to be detected is filled. If a plurality of reaction cells 901 with different reagents are prepared, various tests can be performed by simply replacing the reaction cell 901 or the sample channel 110 to which the reaction cell 901 is attached according to the purpose of the test.

(8) Other Embodiments The present invention is not limited to the above-described embodiments, and includes various modifications. For example, the above-described embodiments have been described in detail for easy understanding of the present invention, and it is not necessary to provide all the configurations described. In addition, a part of one embodiment can be replaced with the configuration of another embodiment. Moreover, the structure of another Example can also be added to the structure of a certain Example. Further, with respect to a part of the configuration of each embodiment, a part of the configuration of another embodiment can be added, deleted, or replaced.

DESCRIPTION OF SYMBOLS 100 ... Analyzing apparatus 101 ... Detection unit 102 ... Analysis part 103 ... Light source 104 ... Optical path branching element 105 ... Photodiode 106 ... Timing adjustment part 107 ... Collimator 108 ...

Half mirror

109, 111, 111A ... Illumination light 110 ...

Sample flow path

112 , 113 ... Total reflection mirrors 114, 116 ...

Projection light

115, 117, 117A ...

Detection unit

118, 119 ... Analog-to-digital converter 201 ...

Measurement object

202H, 202V ... Shadow 301 ... Illuminance adjustment unit 302 ... Wavelength band selection unit 303 DESCRIPTION OF SYMBOLS ... Polarization switching part 304 ... Magnification optical system 305 ...

Analyzer

401, 402 ... Color separation unit 701 ... Inspection unit 702 ... Main flow path 703 ...

Branch flow path

704A, 704B ... Child

branch flow path

711, 713 ... Flow control valve 712 ... Mixing section 714 ... Reaction reagent tank 715 ... Anti Responding channel length switching unit 901 ... reaction cell

Claims

A sample flow path;
An illumination optical system that supplies collimated first illumination light to the first surface of the flow path and forms a linear first illumination area in the flow path;
And a first detector that detects first transmitted light generated from the flow path by the supply of the first illumination light.
The analyzer according to claim 1,
The first illumination light is pulsed light,
The first detection unit is a first avalanche photodiode array that operates in a Geiger mode.
The analyzer according to claim 2,
A second illumination optical system that supplies pulsed second illumination light collimated to a second surface intersecting the first surface and forms a linear second illumination region in the flow path; ,
A second detector for detecting second transmitted light generated by the second illumination light,
The second detection unit is a second avalanche photodiode array that operates in a Geiger mode.
The analyzer according to claim 3, wherein
A timing adjustment unit for detecting a light emission timing of the first illumination light and the second illumination light;
A first analog-to-digital converter that converts a detection signal of the first avalanche photodiode array into a digital value;
A second analog-to-digital converter that converts a detection signal of the second avalanche photodiode array into a digital value;
The first analog-digital converter and the second analog-digital converter process the detection signal based on a timing signal provided from the timing adjustment unit.
The analyzer according to claim 4, wherein
An analyzer further comprising: an analysis unit that analyzes data using detection results of the first avalanche photodiode array and the second avalanche photodiode array.
The analyzer according to claim 5, wherein
A first color separation unit that separates the first transmitted light into at least a first color component and a second color component;
An analyzer further comprising: a second color separation unit that separates the second transmitted light into at least a first color component and a second color component.
The analyzer according to claim 6,
The analyzer is a branch channel branched from the main channel.
The analyzer according to claim 7,
A reaction cell mounted in the flow path;
The reaction cell is
A container made of a material that transmits both or one of the first illumination light and the second illumination light;
An analyzer comprising a reagent that reacts with a substance to be detected.
The analyzer according to claim 8, wherein
The first detection unit and the second detection unit are configured so that the first transmitted light and the second detection unit are within the time required for the sample to pass through the first illumination region and the second illumination region, respectively. An analyzer that detects the transmitted light of 2 multiple times.
The analyzer according to claim 1,
A second illumination optical system for supplying a second illumination light collimated to a second surface intersecting the first surface and forming a linear illumination region in the flow path;
An analyzer further comprising: a second detector that detects second transmitted light generated by the second illumination light.
The analyzer according to claim 1,
A timing adjustment unit for detecting light emission of the first illumination light;
A first analog-to-digital converter that converts the detection signal of the first detection unit into a digital value;
The first analog-to-digital converter processes the detection signal based on a timing signal given from the timing adjustment unit.
The analyzer according to claim 1,
An analysis apparatus further comprising an analysis unit that analyzes data using a detection result of the first detection unit.
The analyzer according to claim 1,
An analyzer further comprising a first color separation unit that separates the first transmitted light into at least a first color component and a second color component.
The analyzer according to claim 1,
The analyzer is a branch channel branched from the main channel.
The analyzer according to claim 1,
A reaction cell mounted in the flow path;
The reaction cell includes a container that transmits the first illumination light and a reagent that reacts with a substance to be detected.
The analyzer according to claim 1,
The first detection unit detects the first transmitted light a plurality of times within a time required for the sample to pass through the first illumination region.