WO2017183755A1 - Sample inspection device - Google Patents

Sample inspection device Download PDF

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Publication number
WO2017183755A1
WO2017183755A1 PCT/KR2016/004535 KR2016004535W WO2017183755A1 WO 2017183755 A1 WO2017183755 A1 WO 2017183755A1 KR 2016004535 W KR2016004535 W KR 2016004535W WO 2017183755 A1 WO2017183755 A1 WO 2017183755A1
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WO
WIPO (PCT)
Prior art keywords
sample
lens
rotation
angle
predetermined
Prior art date
Application number
PCT/KR2016/004535
Other languages
French (fr)
Korean (ko)
Inventor
김장주
문창기
Original Assignee
서울대학교 산학협력단
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 서울대학교 산학협력단 filed Critical 서울대학교 산학협력단
Priority to CN201680084836.1A priority Critical patent/CN109073552B/en
Publication of WO2017183755A1 publication Critical patent/WO2017183755A1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03Cuvette constructions
    • G01N21/0303Optical path conditioning in cuvettes, e.g. windows; adapted optical elements or systems; path modifying or adjustment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/02Details
    • G01N3/04Chucks
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/02Diffusing elements; Afocal elements

Definitions

  • the present invention relates to a sample inspection apparatus, and more particularly, a sample is in close contact with a lens unit, light is irradiated to the sample, and excitation light generated in the sample is widely diffused by the lens unit, and the diffused excitation
  • a sample inspection apparatus can be performed very simply and reliably.
  • the intensity or distribution of the excitation light generated by irradiating a light such as ultraviolet light (UV light) to the sample using a predetermined light source and exciting the sample may be performed on a sample.
  • a light such as ultraviolet light (UV light)
  • the present invention has been made to solve the above-described problems, an object of the present invention, the sample is in close contact with the lens portion, the excitation light generated in the sample is widely spread by the lens portion, and the diffused excitation light According to the present invention, it is possible to selectively capture and analyze a specific angle, thereby providing a simple sample injection apparatus, and providing a sample inspection apparatus capable of very simple and reliable inspection of a sample.
  • the power unit for providing a rotational force;
  • a rotation stage having a predetermined area and configured to be rotatable on an XY plane about a predetermined rotation center axis extending in a Z axis direction connected to the power unit;
  • a lens unit disposed on the rotation stage and configured to be rotatable with the rotation stage about the rotation center axis, the lens unit being disposed on one side of the rotation stage;
  • the sample holder may include a rotation shaft extending in the Y axis direction and connected to the rotation stage, and one end connected to the rotation stage through the rotation shaft, and pivotally connected on an XZ plane about the rotation axis.
  • a light source unit disposed in the rotating body, wherein the rotating body has a mounting surface on which a predetermined sample can be placed at a position facing the lens unit, and the rotating body rotates about the rotating shaft.
  • the angle between the mounting surface and the incident surface is configured to be variable, wherein the angle fixing portion is positioned the sample holder The angle between the mounting surface and the incident surface to maintain a predetermined angle, and the irradiation light generated by the light source unit is fixed to the sample between the mounting surface and the incident surface at a predetermined angle.
  • excitation light generated by excitation of the sample is emitted through the lens portion.
  • the lens unit is composed of a semi-circular lens having a predetermined thickness in the Z-axis direction, the incidence surface is formed upright on the front surface of the X-axis direction, and a semi-circular curved surface is formed on the rear surface in the X-axis direction.
  • the rotating body includes a rotating beam having one end connected to the rotating shaft and the other end of the rotating beam and having a space therein so that the light source is mounted therein, wherein the mounting surface is It is formed at a position facing the lens portion in the rear of the X axis direction of the housing.
  • the angle between the mounting surface and the incident surface is 0 °, and the sample seated on the mounting surface and the incident surface of the lens portion are in close contact with each other.
  • the pivoting beam and the housing are bent at a predetermined angle to each other, so that the light source unit irradiates light on the sample in a diagonally downward direction while the pivoting beam is upright.
  • the rotating body includes a fixing means for positioning the sample placed on the mounting surface, the fixing means is disposed on the upper surface of the mounting surface, the rotating small axis extending in the Y-axis direction, Including a rotation fixing pin to rotate on the XZ plane around the rotation axis, the rotation fixing pin is configured to cover the upper part of the sample to fix the position when the sample is placed on the mounting surface.
  • the angle fixing portion is disposed in front of the sample holder in the X-axis direction, and is configured to be rotatable with respect to the base jig, and the base jig fixed on the rotation stage, to fix the position of the sample holder. It includes a rotating jig.
  • the pivot jig is rotated around a support shaft disposed on both sides of the base in the Y axis direction and extending in the X axis direction, and the pivot jig is centered on the support shaft while the sample holder is upright.
  • the pivoting jig supports the X-axis front surface of the sample holder to fix the sample holder.
  • the rotation stage is provided on the base stage connected to the power unit, an upper cover covering the upper surface of the lens unit, and on both sides of the sample holder in the Y-axis direction and upright on the base stage and the base It connects the stage and the upper cover and has a connecting portion that the rear surface is in contact with the incident surface of the lens portion.
  • the base stage has a circular shape, and an upper surface of the base stage is divided into a semicircular lens surface and a base surface having different heights, and the lens surface has a height lower than that of the base surface.
  • a stepped surface is formed between the lens surface and the base surface, the lens portion is disposed on the lens surface, and the light irradiation portion and the angle fixing portion are disposed on the base surface.
  • the stepped surface and the incident surface of the lens portion are disposed on the same surface and constitute one surface.
  • a fluid groove is formed on the outside of the angle fixing portion and has a predetermined depth so that a predetermined liquid material is filled therein.
  • the sample has a transmission portion made of a material having a predetermined area and a light transmissive so that a predetermined inspection sample is placed, the refractive index of the transmission portion is configured to be the same as the refractive index of the lens portion.
  • the sample comprises a liquid solvent applied on the test sample placed on the transmission part to closely contact the incident surface between the test sample and the transmission part and the lens part, wherein the refractive index of the liquid solvent is the refractive index of the lens part. It is configured in the same way.
  • the light passing portion disposed in the rear of the lens portion in the X-axis direction and having a predetermined slit to pass the light transmitted through the lens portion;
  • an analysis device in which light passing through the passage is incident to perform analysis. It further includes.
  • the angle adjusting unit for adjusting the rotation angle, and the initial angle of the rotation stage further includes.
  • the inspection of the sample can be made very simple and reliable.
  • the excitation light generated in the sample is widely spread by the lens unit, and the captured excitation light can be selectively captured and analyzed according to a specific angle, so that accurate analysis can be performed. have.
  • the irradiated light and the excitation light irradiated from the light source unit can be prevented from being exposed to the harmful light without leaking to the outside.
  • FIG. 1 is a view showing the appearance of a sample inspection apparatus according to an embodiment of the present invention.
  • FIG. 2 is a view showing a shape in which the door of the casing of the sample inspection apparatus according to an embodiment of the present invention is opened.
  • FIG. 3 is a view showing the structure of the internal device of the sample inspection apparatus according to the present invention.
  • FIG. 4 is a view of the internal device of FIG. 3 viewed from above in the Z-axis direction.
  • FIG. 5 is a view of the internal device of FIG. 3 seen in the Y-axis direction.
  • FIG. 6 is a view of the internal device of FIG. 2 as viewed in the X-axis direction.
  • FIG. 7 is a view showing that the sample is mounted in the sample holder when the sample holder of the sample inspection device of the present invention is in the open mode.
  • FIG 8 to 10 are views showing the operation of the sample inspection device according to the present invention.
  • FIG. 11 is a view showing a sample inspection method according to an embodiment of the present invention.
  • 12A and 12B are diagrams showing an example of a test result.
  • the power unit for providing a rotational force
  • a rotation stage having a predetermined area and configured to be rotatable on an XY plane about a predetermined rotation center axis extending in a Z axis direction connected to the power unit
  • a lens unit disposed on the rotation stage and configured to be rotatable with the rotation stage about the rotation center axis, the lens unit being disposed on one side of the rotation stage
  • a sample holder disposed on the rotation stage and configured to be rotatable with the rotation stage about the rotation center axis, disposed on an opposite side of the lens portion with the rotation center axis therebetween, and rotatably connected to the rotation stage.
  • the sample holder may include a rotation shaft extending in the Y axis direction and connected to the rotation stage, and one end connected to the rotation stage through the rotation shaft, and pivotally connected on an XZ plane about the rotation axis.
  • a light source unit disposed in the rotating body, wherein the rotating body has a mounting surface on which a predetermined sample can be placed at a position facing the lens unit, and the rotating body rotates about the rotating shaft.
  • the angle between the mounting surface and the incident surface is configured to be variable, wherein the angle fixing portion is positioned the sample holder The angle between the mounting surface and the incident surface to maintain a predetermined angle, and the irradiation light generated by the light source unit is fixed to the sample between the mounting surface and the incident surface at a predetermined angle.
  • excitation light generated by excitation of the sample is emitted through the lens portion.
  • FIG. 1 is a view showing the appearance of a sample inspection device 1 according to an embodiment of the present invention
  • Figure 2 is a door 30 of the casing 20 of the sample inspection device 1 according to an embodiment of the present invention
  • Fig. 3 is a view showing an open shape
  • Fig. 3 is a view showing the structure of the device inside the sample inspection device 1 according to the present invention
  • Figs. 4 to 6 respectively show the internal device of Fig. 3 in the Z-axis direction. It is the figure seen from the upper direction, the Y-axis direction lateral direction, and the X-axis direction omnidirectional.
  • the sample inspection apparatus 1 includes a power unit 100, a rotation stage 200, a lens unit 300, a sample holder 400, an angle fixing unit 500, a light passing unit 600, It may be configured to include an angle adjusting unit 700 and the analysis device (800).
  • the devices are disposed on a predetermined base plate 10, it may be covered with a predetermined casing (20).
  • the casing 20 may have a structure in which the door 30 is opened and closed.
  • the power unit 100 receives a predetermined power to provide rotational force. Accordingly, the power unit 100 is fixedly disposed on the base plate 10, and may be connected to a predetermined power supply device to receive a predetermined power.
  • the power unit 100 is disposed on a predetermined power unit 110 such as a motor, a side casing 120 covering an outer side of the power unit 110, and an upper portion of the power unit 110. It may have an upper casing 130 to cover.
  • the power unit 110 may have a predetermined shaft to rotate the rotation stage 200.
  • the rotation stage 200 is a member having a predetermined area on the XY plane, and is configured to rotate on the XY plane about a predetermined rotation center axis extending in the Z axis direction.
  • the rotating stage 200 has a base stage 210, an upper cover 220, and a connecting portion 230.
  • the base stage 210 may be formed of a member of a predetermined disc shape that is connected to the power unit 100 and rotatably configured. Specifically, it may be connected to the shaft of the power unit 100 to rotate.
  • An upper surface of the base stage 210 is divided into a lens surface 214 and a base surface 112.
  • the lens surface 214 and the base surface 112 each have a semicircular shape that divides the area of the upper surface of the base stage 210 by approximately 1/2.
  • the height of the lens surface 214 is higher than the height of the base surface 112, so that the lens surface 214 and the base surface 112 are divided around the predetermined step surface 216.
  • the stepped surface 216 is formed to coincide with or parallel to the diameter passing through the center point of the disc shaped base stage 210.
  • a recessed groove 213 having a predetermined depth and recessed may be formed on the base surface 112.
  • the recessed grooves 213 may be formed at both sides of the Y-axis direction of the angle fixing part 500 to be described later, so that the liquid substances flowing out of the sample to be described later may be appropriately collected without spreading to the outside.
  • the upper cover 220 may be positioned above the lens surface 214 and may have a semi-circular shape as a shape of the lens surface 214.
  • a lens unit 300 to be described below is disposed between the upper cover 220 and the base surface 112.
  • connection part 230 connects the base stage 210 and the upper cover 220 to each other in the vertical direction. Specifically, the lower end of the connecting portion 230 is connected to the base stage 210, the upper end is connected to the upper cover 220. Two connection units 230 are provided, and specific arrangement of each connection unit 230 will be described later.
  • the lens unit 300 is disposed on the rotation stage 200 and configured to be rotatable with the rotation stage 200.
  • the lens unit 300 may have a semicircular shape having a predetermined thickness. That is, a semi-circular lens curved surface having a predetermined thickness in the Z-axis direction and having a predetermined plane in the X-axis direction is formed upright, and a semi-circular lens curved surface is formed at the rear in the X-axis direction. It may be composed of a lens.
  • the lens unit 300 is disposed on the lens surface 214 on the base stage 210.
  • the incident surface 310 is disposed to be parallel to the stepped surface 216. That is, as shown in FIG. 4, the incident surface 310 is located on the stepped surface 216, and may form one surface side by side. Therefore, the lens unit 300 is disposed concentrically with the base stage 210. Meanwhile, the diameter of the semicircle drawn by the lens unit 300 may be smaller than the diameter of the semicircle drawn by the lens surface 214.
  • the upper surface of the lens unit 300 is disposed in contact with the lower surface of the upper cover 220. Therefore, the lens unit 300 is positioned between the base stage 210 and the upper cover 220. In addition, both side portions of the incident surface 310 abut each of the connection portion 230. Accordingly, the connection part 230 is fixed in contact with the bottom surface 216 and the incident surface 310 at the same time.
  • the lower surface of the lens unit 300 is covered by the base surface 112
  • the upper surface of the lens unit 300 is covered by the upper cover 220
  • both side portions of the incident surface 310 It is covered by the connecting portion 230.
  • the base stage 210, the upper cover 220, and the connection part 230 fix the lens part 300, and the lens part 300 of the incident surface 310 positioned forward in the X-axis direction.
  • the center portion and the lens curved surface 320 positioned rearward in the X-axis direction may be exposed.
  • the sample holder 400 is a device on which a predetermined sample is mounted and irradiates light onto the sample.
  • the sample holder 400 may be disposed on the rotation stage 200 and disposed on the base surface 112. That is, when the stepped surface 216 divides the base stage 210 into 1/2, the lens unit 300 is disposed on one side with the stepped surface 216 interposed therebetween, and the sample holder 400 on the opposite side. ) May be arranged.
  • the sample holder 400 includes a rotation shaft 410, a rotation body 420, and a light source 430.
  • the rotation shaft 410 is configured as an axis extending in the Y axis direction and is connected to the rotation stage 200. Specifically, it may be composed of a predetermined beam connected across the two connecting portions 230. Of course, since the rotating shaft 410 is sufficient to be configured to rotate the rotating body 420, it is also possible to implement an embodiment consisting of a predetermined projecting beam provided on the rotating body 420 or the connecting portion 230.
  • the rotating body 420 has a light source unit 430 disposed therein, and one end of the rotating body 420 is disposed between the connecting units 230, and is connected to the rotating stage 200 through the rotating shaft 410 and rotates the rotating shaft 410. It is a member configured to be rotatable on the XZ plane about the center.
  • the light source unit 430 may be a predetermined light emitting device, and for example, may be configured as a predetermined LED light emitting device that emits light of a specific wavelength such as UV light. However, it is not necessarily limited thereto.
  • the rotating body 420 includes a rotating beam 440, a housing 450, and a mounting surface 460.
  • the rotating beam 440 is a portion of which one end is connected to the rotating shaft 410, and is composed of a predetermined beam connected to the rotating shaft 410 and rotatable.
  • the housing 450 is a portion in which a predetermined space is formed to mount the light source unit 430 therein.
  • the housing 450 is connected to the other end of the rotating beam 440 and rotates together according to the rotation of the rotating beam 440.
  • the rotating beam 440 and the housing 450 may preferably have a configuration that is bent at a predetermined angle from each other.
  • the housing 450 has a light opening 452 at the rear in the X axis direction.
  • the light opening part 452 is a part which is spatially open, or is provided with a member such as a window having a predetermined light transmissive material, through which light can pass. Therefore, the irradiation light generated by the light source unit 430 mounted in the housing 450 may be irradiated to the sample.
  • the mounting surface 460 is a surface formed at a position facing the lens unit 300 and is provided at the rear of the housing 450.
  • the mounting surface 460 may be configured to accommodate a predetermined sample, and the mounting surface 460 may be provided with a predetermined groove for receiving and fixing the sample.
  • a groove corresponding to the external shape of the cartridge or the rectangular glass may be formed to mount the cartridge or the rectangular glass.
  • the mounting surface 460 communicates with the light opening 452 of the housing 450, so that the sample is received on the mounting surface 460, and the front portion of the sample is disposed by the light opening. It is configured to face 430 has a configuration that the light generated by the light source unit 430 can be irradiated to the sample.
  • the rotation body 420 may further include a fixing means 470 for positioning the sample placed on the mounting surface 460.
  • the fixing means 470 may be disposed above the mounting surface 460, and may include a rotating shaft 472 and a rotating fixing pin 474.
  • one end of the pivot fixing pin 474 may be rotatably connected to the pivot shaft 472 disposed on the mounting surface 460 and extending in the Y-axis direction. Therefore, the pivot pin 474 may rotate on the XZ plane about the pivot axis 472.
  • a predetermined fixing protrusion may be provided on the other side of the rotation fixing pin 474 to cover a portion of the upper surface of the sample placed on the mounting surface 460 to fix the sample.
  • the inclination angle of the mounting surface 460 may also vary.
  • the mounting surface 460 may be in a state where the mounting surface 460 is opened with a predetermined angle between the incident surface 310 according to the rotation of the rotation body 420, or in close contact with the incident surface 310.
  • the angle between the mounting surfaces 460 may be 0 degrees.
  • the sample holder 400 has an open mode and a closing mode.
  • the rotation body 420 rotates outward with respect to the lens unit 300 with the rotation axis 410 as the center so that the incident surface 310 and the mounting surface 460 are spaced apart from each other so that the incident surface ( 310 and the mounting surface 460 have a predetermined angle, and the mounting surface 460 is exposed upward. Accordingly, the sample can be mounted on the mounting surface 460.
  • the angle between the incident surface 310 and the mounting surface 460 becomes 0 °.
  • the rotating beam 440 is upright, the mounting surface 460 and the incident surface 310 is in close contact with each other. More precisely, it can be understood that the sample seated on the mounting surface 460 is in close contact with the incident surface 310.
  • the angle fixing part 500 is disposed in front of the sample holder 400 in the X axis direction, and is a member for maintaining a constant tilt angle of the sample holder 400.
  • the angle fixing part 500 may be disposed on the base surface 112 of the base stage 210, and may include a base jig 510 and a rotation jig 520.
  • the base jig 510 is fixed on the base surface 112 of the base stage 210 and positioned in front of the sample holder 400 in the X axis direction.
  • a predetermined groove may be formed at both sides of the base jig 510 in the Y axis direction so that the rotation jig 520 may be connected.
  • the rotation jig 520 is disposed at both sides of the base jig 510 in the Y-axis direction and is rotatably connected to the base jig 510 through a predetermined support shaft 514.
  • the support shaft 514 extends in the X-axis direction, and the rotation jig 520 is configured to be rotatable on the XZ plane. Accordingly, the rotation jig 520 is laid on the base surface 112 to face the base surface 112, and rotates about the support shaft 514 to the base surface 112 and 90. It has a longitudinal angle between degrees and is upright. Of course, the angle between the base surface 112 and the base surface 112 in the longitudinal mode is not necessarily limited to 90 degrees, but it is sufficient to have a suitable angle between them.
  • the pivot beam 440 When the sample holder 400 is closed, the pivot beam 440 is in an upright state.
  • the pivoting jig 520 is rotated about the support shaft 514 to be in the longitudinal mode in the horizontal mode, the rear surface of the pivoting jig 520 contacts the front surface of the pivoting beam 440. Accordingly, the front surface of the pivoting beam 440 is supported to maintain the attitude of the pivoting beam 440, and the pivoting beam 440 is maintained in the closed mode.
  • the rotation jig 520 may have a suitable length and arrangement so that the sample holder 400 can maintain a precisely upright state in a closed state. That is, the X-axis rear surface of the rotation jig 520 may have a length and arrangement suitable to closely contact the front surface of the sample holder 400 in a state where the sample holder 400 is upright.
  • the light passing part 600 is a member disposed behind the lens part 300 in the X-axis direction, and predetermined to selectively pass only light at a predetermined position among the light transmitted through the lens part 300. It may have a slit 610 and a lens 620.
  • the light passing part 600 may be formed of a predetermined structure fixed on the base plate.
  • the angle adjusting unit 700 is configured as a device capable of adjusting the rotation angle, rotation angle range, rotation speed and initial angle of the rotation stage 200.
  • the angle adjusting unit 700 may be configured to be connected to the power unit 100, and may adjust an initial angle of the rotating stage 200 by rotating a predetermined adjustment pin.
  • the adjustment pin may be connected to the rotation stage 200 through a predetermined gear.
  • the analyzer 800 may be positioned opposite to the lens unit 300 with the light passing part 600 therebetween. Therefore, the light passing through the light passing part 600 may be configured to be incident in the analysis device 800.
  • the analysis apparatus 800 may analyze and process various signals using the light passing through the light passing part 600 to derive a predetermined test result. Therefore, the analysis device 800 may be configured to include a predetermined computing device, a database, a signal processing device, a display device, an input device, and the like.
  • the power unit 100, the rotation stage 200, the lens unit 300, the sample holder 400, the angle fixing unit 500, the light passing unit 600, and the analysis device 800 may have a predetermined base. It is installed on the plate 10 and, in addition, the entire apparatus can be housed in a predetermined casing 20.
  • the casing 20 is configured in an open structure to open the door 30 provided in the casing 20 to inject a sample or to replace or repair each device.
  • the casing 20 may be provided with a predetermined output device and input device.
  • other members other than the light-emitting and light transmitting members may be applied and colored in black. That is, the lens unit 300, a portion of the sample holder 400, and the remaining portions except for the slit 610 and the lens of the light passing part 600 are coated and colored in black, so that unnecessary reflection light and external light are applied. And the like can be prevented from entering the analysis apparatus 800. Accordingly, the inner surface of the casing 20, the inner surface of the door 30 and the outer surface of each member may be made black.
  • FIGS. 8 to 10 are sample inspection apparatuses according to the present invention.
  • the sample P is injected onto the mounting surface 460 of the sample holder 400. That is, as shown in FIG. 7, in the open mode, the mounting surface 460 is exposed upward, and the sample P may be injected onto the mounting surface 460.
  • the fixing means 470 can be rotated as shown by arrow Q of FIG. 8 to fix the sample on the mounting surface 460.
  • the sample P may be a predetermined glass into which a cartridge, a liquid sample, or the like is introduced, and may be fixed by the fixing means 470 after being appropriately loaded on the mounting surface 460.
  • the sample P has a transmissive portion (G) made of a material having a predetermined area and a light transmissive, such as glass, so that a predetermined test sample (F) is placed, the The refractive index may be the same as the refractive index of the lens unit 300.
  • the sample is a liquid solvent that is applied on the test sample placed on the transmission part (G) to close contact between the test sample (F) and the transmission part (G) and the incident surface 310 of the lens unit 300. It may include.
  • the refractive index of the liquid solvent may be the same as the refractive index of the lens unit 300.
  • the sample holder 400 When the input of the sample P is completed as described above, the sample holder 400 is rotated as shown by the arrow R in FIG. 8 to switch to the closing mode described above. That is, the sample holder 400 is rotated so that the sample injected into the mounting surface 460 comes into close contact with the incident surface 310.
  • the angle fixing part 500 is switched from the horizontal mode to the vertical mode.
  • Mode switching of the angle fixing unit 500 may be made as shown by arrow W of FIG. That is, the pivoting jig 520 is rotated to support the front surface of the sample holder 400. Accordingly, the mounting surface 460 and the sample of the sample holder 400 may maintain a state in close contact with the incident surface 310.
  • the sample P contains a liquid test sample or the like
  • the liquid substance may fall and flow.
  • the recessed grooves 213 are formed on the base surface 112 so that the spilled liquid material is formed to be high, thereby preventing the liquid material from flowing to other places and contaminating the device.
  • the irradiation light L1 when power is applied to the light source unit 430, the irradiation light L1 is generated by the light source unit 430.
  • the irradiation light L1 may be incident in the downward direction from the diagonal upward direction with respect to the sample.
  • An incident angle of the irradiation light L1 may be determined according to an angle between the pivot beam 440 and the housing 450, and preferably 45 °, but is not limited thereto.
  • the liquid test sample contained in the sample is excited by the irradiation light L1 to generate excitation light L2 and L3.
  • the excitation light L2 and L3 are diffused through the lens unit 300.
  • the light passing part 600 having the predetermined slit 610 is positioned behind the lens part 300, only the excitation light L2 having a predetermined incident angle is selectively disposed at the rear of the analyzer 800. Will be entered.
  • the sample holder 400, the sample, the lens unit 300, and the light passing part 600 are arranged in a line on a straight line, only the linear excitation light L2 is incident on the analyzer 800. Done. Therefore, it is possible to prevent the irradiated light, reflected light, etc. unnecessary for the inspection to enter the analysis device 800, the accurate inspection can be made.
  • the refractive indexes of the transmission part, the liquid solvent and the lens part 300 of the sample are the same, and since the transmission part and the lens part 300 are in close contact with each other, the excitation light is not unnecessarily refracted, and the linear excitation light is analyzed. It is possible to enter into the 800.
  • the power unit 100 when the predetermined operation button is operated, the power unit 100 generates a rotational force, and the rotation stage 200 rotates as shown by arrow T in FIG. 4.
  • the rotation stage 200 rotates, the orientation angles of the sample P and the lens unit 300 vary, and the orientation of the lens unit 300 is changed as shown by arrow S of FIG. 10. Therefore, the excitation light L3 having a different angle of incidence may be positioned on a straight line connecting the sample, the lens unit 300, and the light passing unit 600 to enter the analysis apparatus 800.
  • the excitation light L2 does not enter the analysis device 800, and as described above, as the inside of the casing 20 is black, the excitation light L2 may be absorbed without being reflected and noise may be removed.
  • the inspection of the sample can be made very simple and reliable.
  • the sample is in close contact with the lens unit 300, the excitation light generated in the sample is widely spread by the lens unit 300, and the diffused excitation light can be selectively captured and analyzed according to a specific angle. Accurate analysis can be achieved.
  • the irradiation light and the excitation light irradiated from the light source unit 430 do not leak to the outside, thereby preventing the user from being exposed to harmful light.
  • the light emitted from the light source unit 430 is short wavelength light such as UV, it may be harmful to the human body, but in the present invention, since the light is not exposed by the casing in the use process, a safe inspection may be performed.
  • FIG 11 is a view showing a sample inspection method according to an embodiment of the present invention
  • Figure 12 is a view showing an example of the inspection results.
  • the lens unit 300 and the sample P may be rotated as shown by the arrow R so that light of a specific angle may be selectively incident on the analysis device 800. Therefore, the light pattern according to the angle can be obtained and utilized in the inspection. This can be said to have the same effect as that the analysis device 800 is disposed over the entire rotation angle range of the lens unit 300.
  • analyzing the excitation light incident on the analyzer at a specific angle may result in a result as shown in FIG. 12A according to the intensity of the incident excitation light. That is, the excitation light incident at a specific angle may have various wavelengths, and the intensity of the incident light may also appear together.
  • the inspection result may be derived by analyzing the incident light. For example, when the inspection result is analyzed based on the incident light having a wavelength of 520 nm, the inspection result may appear as shown in FIG.

Abstract

The present invention relates to a sample inspection device and, more particularly, to a sample inspection device into which sample introduction is simple and which can implement sample inspection in an extremely simple and reliable manner, as the sample closely contacts a lens unit, excited light generated from the sample is widely diffused by the lens unit, and the diffused excited light is selectively captured and analyzed according to a specific angle.

Description

샘플 검사 장치Sample inspection device
본 발명은 샘플 검사 장치에 관한 것으로서, 보다 상세하게는, 렌즈부에 대해 샘플이 밀착하고, 샘플에 광을 조사하고, 샘플에서 생성된 여기광이 렌즈부에 의해서 넓게 확산되며, 상기 확산된 여기광을 특정 각도에 따라서 선택적으로 포착하는 분석방법에서, 샘플의 투입이 간단하게 이루어지며, 샘플의 검사가 매우 간단하면서 신뢰성 있게 이루어질 수 있는 샘플 검사 장치에 관한 것이다.The present invention relates to a sample inspection apparatus, and more particularly, a sample is in close contact with a lens unit, light is irradiated to the sample, and excitation light generated in the sample is widely diffused by the lens unit, and the diffused excitation In an analytical method for selectively capturing light according to a specific angle, a sample is simply introduced, and a sample inspection apparatus can be performed very simply and reliably.
소정의 검사 시료, 박막, 미생물 등을 포함한 샘플을 검사할 때, 소정의 광원을 이용하여 샘플에 대해 자외선(UV 광) 등의 광선을 조사하고, 해당 샘플이 여기됨으로써 생성된 여기광의 세기 또는 분포를 분석함으로써, 샘플에 대한 검사를 수행하는 경우가 있다.When inspecting a sample including a predetermined test sample, a thin film, microorganisms, etc., the intensity or distribution of the excitation light generated by irradiating a light such as ultraviolet light (UV light) to the sample using a predetermined light source and exciting the sample In some cases, inspection may be performed on a sample.
이러한 샘플 검사 장치 및 방법의 경우, 상기 광원의 조사광을 소정의 분석 샘플에 대해 정확히 입사시킬 필요가 있다. 만일, 불필요한 외부 광, 반사 광, 해당 광원이 아닌 다른 조사광이 분석샘플에 불필요하게 입사할 경우, 또는 샘플에 조사되는 광의 면적이 너무 큰 경우에 샘플의 검사 정확도가 매우 떨어질 수 있다.측정을 진행하는 중 외에는 조사광의 외부누출을 막아 인체에 유해하지 않은 장치가 필요하다.In the case of such a sample inspection apparatus and method, it is necessary to make the irradiation light of the said light source accurately enter into a predetermined analysis sample. If unnecessary external light, reflected light, or irradiated light other than the corresponding light source enters the analysis sample unnecessarily, or the area of the light irradiated onto the sample is too large, the inspection accuracy of the sample may be very poor. It is necessary to have a device that is not harmful to the human body by preventing external leakage of irradiated light except during the operation.
또한, 샘플에서 생성된 여기광은 부착된 렌즈를 통해 확산되어 퍼지게 되므로, 이와 같이 확산된 여기광의 분포를 용이하게 포착하여 분석을 수행할 수 있는 장치 또한 필요하게 된다.In addition, since the excitation light generated in the sample is diffused and spread through the attached lens, there is also a need for a device capable of easily capturing the distribution of the diffused excitation light and performing the analysis.
본 발명은 전술한 문제점을 해결하기 위해 안출된 것으로서, 본 발명의 목적은, 렌즈부에 대해 샘플이 밀착하고, 샘플에서 생성된 여기광이 렌즈부에 의해서 넓게 확산되며, 상기 확산된 여기광을 특정 각도에 따라서 선택적으로 포착하여 분석 가능함에 따라서, 샘플의 투입이 간단하게 이루어지며, 샘플의 검사가 매우 간단하면서 신뢰성 있게 이루어질 수 있는 샘플 검사 장치를 제공하는 데 있다.The present invention has been made to solve the above-described problems, an object of the present invention, the sample is in close contact with the lens portion, the excitation light generated in the sample is widely spread by the lens portion, and the diffused excitation light According to the present invention, it is possible to selectively capture and analyze a specific angle, thereby providing a simple sample injection apparatus, and providing a sample inspection apparatus capable of very simple and reliable inspection of a sample.
상술한 목적을 달성하기 위하여, 본 발명에 의한 샘플 검사 장치는, 회전력을 제공하는 동력부; 소정의 면적을 갖고 상기 동력부와 연결되어 Z 축 방향으로 연장되는 소정의 회전 중심축을 중심으로 XY 평면 상에서 회전 가능하게 구성되는 회전 스테이지; 상기 회전 스테이지 상에 배치되어 상기 회전 중심축을 중심으로 상기 회전 스테이지와 함께 회전 가능하게 구성되되, 상기 회전 스테이지 상의 일 측에 배치되는 렌즈부; 상기 회전 스테이지 상에 배치되어 상기 회전 중심축을 중심으로 상기 회전 스테이지와 함께 회전 가능하게 구성되되, 상기 회전 중심축을 사이에 두고 상기 렌즈부의 반대측에 배치되며 상기 회전 스테이지에 대해서 회동 가능하게 연결되는 시료 홀더; 및 In order to achieve the above object, the sample inspection apparatus according to the present invention, the power unit for providing a rotational force; A rotation stage having a predetermined area and configured to be rotatable on an XY plane about a predetermined rotation center axis extending in a Z axis direction connected to the power unit; A lens unit disposed on the rotation stage and configured to be rotatable with the rotation stage about the rotation center axis, the lens unit being disposed on one side of the rotation stage; A sample holder disposed on the rotation stage and configured to be rotatable with the rotation stage about the rotation center axis, disposed on an opposite side of the lens portion with the rotation center axis therebetween, and rotatably connected to the rotation stage. ; And
상기 회전 스테이지 상에 배치되며 상기 시료 홀더의 각도를 위치 고정시킬 수 있게 구성된 각도 고정부;를 포함하며, 상기 렌즈부는, 상기 시료 홀더와 마주보는 측에 소정의 평면으로 구성되는 입사면을 가지며, 상기 시료 홀더는, Y 축 방향으로 연장되며 상기 회전 스테이지에 연결되는 회동축, 상기 회동축을 통해 일 단이 상기 회전 스테이지에 연결되되 상기 회동축을 중심으로 XZ 평면 상에서 회동 가능하게 연결되는 회동 바디, 및 상기 회동 바디 내에 배치되는 광원부를 포함하고, 상기 회동 바디는 상기 렌즈부와 마주보는 위치에 소정의 샘플이 놓일 수 있는 탑재면을 갖되, 상기 회동 바디가 상기 회동축을 중심으로 회동함에 따라서 상기 탑재면과 상기 입사면 사이의 사이각이 가변하도록 구성되며, 상기 각도 고정부는 상기 시료 홀더를 위치 고정시켜서 상기 탑재면과 상기 입사면 사이의 사이각이 소정 각도를 유지하도록 하고, 상기 탑재면과 상기 입사면 사이의 사이각이 소정 각도로 고정된 상태에서 상기 광원부에서 생성된 조사광이 상기 샘플에 조사되면, 상기 샘플이 여기되어 생성된 여기광이 상기 렌즈부를 통과하여 방출된다.An angle fixing part disposed on the rotating stage and configured to fix the angle of the sample holder, wherein the lens part has an incident surface formed in a predetermined plane on a side facing the sample holder, The sample holder may include a rotation shaft extending in the Y axis direction and connected to the rotation stage, and one end connected to the rotation stage through the rotation shaft, and pivotally connected on an XZ plane about the rotation axis. And a light source unit disposed in the rotating body, wherein the rotating body has a mounting surface on which a predetermined sample can be placed at a position facing the lens unit, and the rotating body rotates about the rotating shaft. The angle between the mounting surface and the incident surface is configured to be variable, wherein the angle fixing portion is positioned the sample holder The angle between the mounting surface and the incident surface to maintain a predetermined angle, and the irradiation light generated by the light source unit is fixed to the sample between the mounting surface and the incident surface at a predetermined angle. When irradiated onto the sample, excitation light generated by excitation of the sample is emitted through the lens portion.
바람직하게는, 상기 렌즈부는, Z 축 방향으로 소정의 두께를 갖고, X 축 방향 전면에 상기 입사면이 직립하게 형성되며, X 축 방향 후면에 반원형 곡면이 형성되는 반원형 렌즈로 구성된다.Preferably, the lens unit is composed of a semi-circular lens having a predetermined thickness in the Z-axis direction, the incidence surface is formed upright on the front surface of the X-axis direction, and a semi-circular curved surface is formed on the rear surface in the X-axis direction.
바람직하게는, 상기 회동 바디는, 일 단이 상기 회동축에 연결되는 회동 빔, 상기 회동 빔의 타단에 연결되되 상기 광원부가 내부에 실장되도록 내부에 공간을 갖는 하우징을 포함하되, 상기 탑재면은 상기 하우징의 X 축 방향 후방에 상기 렌즈부와 마주보는 위치에 형성된다.Preferably, the rotating body includes a rotating beam having one end connected to the rotating shaft and the other end of the rotating beam and having a space therein so that the light source is mounted therein, wherein the mounting surface is It is formed at a position facing the lens portion in the rear of the X axis direction of the housing.
바람직하게는, 상기 회동 빔이 직립하면 상기 탑재면과 상기 입사면 사이의 사이각이 0° 가 되며 상기 탑재면 상에 안착된 샘플과 상기 렌즈부의 상기 입사면이 서로 밀착하게 구성된다.Preferably, when the pivoting beam is upright, the angle between the mounting surface and the incident surface is 0 °, and the sample seated on the mounting surface and the incident surface of the lens portion are in close contact with each other.
바람직하게는, 상기 회동 빔과 상기 하우징은 서로 소정의 사이각을 갖고 절곡되어, 상기 광원부는 상기 회동 빔이 직립한 상태에서 대각선 하방향으로 상기 샘플에 대해 광을 조사한다.Preferably, the pivoting beam and the housing are bent at a predetermined angle to each other, so that the light source unit irradiates light on the sample in a diagonally downward direction while the pivoting beam is upright.
바람직하게는, 상기 회동 바디는, 상기 탑재면 상에 놓인 샘플을 위치 고정시키도록 하는 고정 수단을 포함하며, 상기 고정 수단은 상기 탑재면의 상부에 배치되되, Y 축 방향으로 연장되는 회동 소축, 상기 회동 소축을 중심으로 XZ 평면 상에서 회동하는 회동 고정핀을 포함하여, 상기 탑재면 상에 상기 샘플이 놓이면 상기 회동 고정핀이 상기 샘플의 상단을 일부 덮어 위치 고정시키게 구성된다.Preferably, the rotating body includes a fixing means for positioning the sample placed on the mounting surface, the fixing means is disposed on the upper surface of the mounting surface, the rotating small axis extending in the Y-axis direction, Including a rotation fixing pin to rotate on the XZ plane around the rotation axis, the rotation fixing pin is configured to cover the upper part of the sample to fix the position when the sample is placed on the mounting surface.
바람직하게는, 상기 각도 고정부는 X 축 방향으로 상기 시료 홀더의 전방에 배치되며, 상기 회전 스테이지 상에 고정되는 베이스 지그, 및 상기 베이스 지그에 대해서 회동 가능하게 구성되어, 상기 시료 홀더를 위치 고정시키는 회동 지그를 포함한다. Preferably, the angle fixing portion is disposed in front of the sample holder in the X-axis direction, and is configured to be rotatable with respect to the base jig, and the base jig fixed on the rotation stage, to fix the position of the sample holder. It includes a rotating jig.
바람직하게는, 상기 회동 지그는, Y 축 방향으로 상기 베이스의 양 측에 배치되며 X 축 방향으로 연장되는 지지축을 중심으로 회동하며, 상기 시료 홀더가 직립한 상태에서 상기 회동 지그가 상기 지지축을 중심으로 상방향으로 회동하면 상기 회동 지그가 상기 시료 홀더의 X 축 방향 전면을 지지하여 상기 시료 홀더를 위치 고정시키게 구성된다.Preferably, the pivot jig is rotated around a support shaft disposed on both sides of the base in the Y axis direction and extending in the X axis direction, and the pivot jig is centered on the support shaft while the sample holder is upright. When rotated upwards, the pivoting jig supports the X-axis front surface of the sample holder to fix the sample holder.
바람직하게는, 상기 회전 스테이지는, 상기 동력부와 연결되는 베이스 스테이지, 상기 렌즈부의 상면을 커버하는 상부 커버, 및 Y 축 방향으로 상기 시료 홀더의 양 측에 마련되어 상기 베이스 스테이지 상에 직립하고 상기 베이스 스테이지와 상기 상부 커버를 연결하며 후면이 상기 렌즈부의 입사면과 맞닿는 연결부를 갖는다.Preferably, the rotation stage is provided on the base stage connected to the power unit, an upper cover covering the upper surface of the lens unit, and on both sides of the sample holder in the Y-axis direction and upright on the base stage and the base It connects the stage and the upper cover and has a connecting portion that the rear surface is in contact with the incident surface of the lens portion.
바람직하게는, 상기 베이스 스테이지는 원형 형상을 갖되, 상기 베이스 스테이지의 상면은, 서로 상이한 높이를 갖는 반원 형상의 렌즈면, 및 베이스면으로 구분되며, 상기 렌즈면은 상기 베이스면보다 낮은 높이를 가져서 상기 렌즈면과 상기 베이스면 사이에 단차면이 형성되며, 상기 렌즈면 상에는 상기 렌즈부가 배치되고, 상기 베이스면 상에는 상기 광조사부, 및 각도 고정부가 배치된다.Preferably, the base stage has a circular shape, and an upper surface of the base stage is divided into a semicircular lens surface and a base surface having different heights, and the lens surface has a height lower than that of the base surface. A stepped surface is formed between the lens surface and the base surface, the lens portion is disposed on the lens surface, and the light irradiation portion and the angle fixing portion are disposed on the base surface.
바람직하게는, 상기 단차면과 상기 렌즈부의 입사면은 서로 동일면상에 위치하여 일 면을 구성한다.Preferably, the stepped surface and the incident surface of the lens portion are disposed on the same surface and constitute one surface.
바람직하게는, 상기 베이스면 상에는, 상기 각도 고정부의 외측에 형성되며 소정의 깊이를 가져서 소정의 액상 물질이 내부에 충진되도록 하는 유체 홈이 형성된다.Preferably, on the base surface, a fluid groove is formed on the outside of the angle fixing portion and has a predetermined depth so that a predetermined liquid material is filled therein.
바람직하게는, 상기 샘플은, 소정의 검사 시료가 놓이도록 소정의 면적을 가지며 광투과성을 갖는 재질로 구성되는 투과부를 갖되, 상기 투과부의 굴절율은 상기 렌즈부의 굴절율과 동일하게 구성된다.Preferably, the sample has a transmission portion made of a material having a predetermined area and a light transmissive so that a predetermined inspection sample is placed, the refractive index of the transmission portion is configured to be the same as the refractive index of the lens portion.
바람직하게는, 상기 샘플은, 상기 투과부 상에 놓인 검사 시료 상에 도포되어 상기 검사 시료 및 투과부와 상기 렌즈부의 입사면 사이를 밀착시키는 액상 용제를 포함하되, 상기 액상 용제의 굴절율은 상기 렌즈부의 굴절율과 동일하게 구성된다.Preferably, the sample comprises a liquid solvent applied on the test sample placed on the transmission part to closely contact the incident surface between the test sample and the transmission part and the lens part, wherein the refractive index of the liquid solvent is the refractive index of the lens part. It is configured in the same way.
바람직하게는, X 축 방향으로 상기 렌즈부의 후방에 배치되며 상기 렌즈부를 통해 투과된 광이 통과할 수 있도록 소정의 슬릿을 갖는 광 통과부; 및 상기 통과부를 통과한 광이 입사되어 분석을 수행하는 분석 장치; 를 더 포함한다.Preferably, the light passing portion disposed in the rear of the lens portion in the X-axis direction and having a predetermined slit to pass the light transmitted through the lens portion; And an analysis device in which light passing through the passage is incident to perform analysis. It further includes.
바람직하게는, 상기 회전 스테이지의 회전 각도, 및 초기 각도를 조정할 수 있는 각도 조절부;를 더 포함한다.Preferably, the angle adjusting unit for adjusting the rotation angle, and the initial angle of the rotation stage; further includes.
본 발명에 따른 샘플 검사 장치에 의하면, 샘플의 검사가 매우 간단하면서 신뢰성 있게 이루어질 수 있다. 특히, 렌즈부에 대해 샘플이 밀착하고, 샘플에서 생성된 여기광이 렌즈부에 의해서 넓게 확산되며, 상기 확산된 여기광을 특정 각도에 따라서 선택적으로 포착하여 분석 가능함에 따라서, 정확한 분석이 이루어질 수 있다.According to the sample inspection device according to the present invention, the inspection of the sample can be made very simple and reliable. In particular, since the sample is in close contact with the lens unit, the excitation light generated in the sample is widely spread by the lens unit, and the captured excitation light can be selectively captured and analyzed according to a specific angle, so that accurate analysis can be performed. have.
또한, 장치 전체가 케이싱에 의해 커버되므로, 광원부에서 조사되는 조사광, 및 여기광이 외부로 유출되지 아니하여 사용자가 유해광에 노출되는 것을 방지할 수 있다.In addition, since the entire apparatus is covered by the casing, the irradiated light and the excitation light irradiated from the light source unit can be prevented from being exposed to the harmful light without leaking to the outside.
도 1 은 본 발명의 일 실시예에 따른 샘플 검사 장치의 외형을 나타낸 도면이다.1 is a view showing the appearance of a sample inspection apparatus according to an embodiment of the present invention.
도 2 는 본 발명의 일 실시예에 따른 샘플 검사 장치의 케이싱의 도어를 개방한 형상을 나타낸 도면이다.2 is a view showing a shape in which the door of the casing of the sample inspection apparatus according to an embodiment of the present invention is opened.
도 3 은 본 발명에 따른 샘플 검사 장치의 내부 장치의 구조를 나타낸 도면이다.3 is a view showing the structure of the internal device of the sample inspection apparatus according to the present invention.
도 4 는 도 3 의 내부 장치를 Z 축 방향 상방향에서 바라본 도면이다.4 is a view of the internal device of FIG. 3 viewed from above in the Z-axis direction.
도 5 는 도 3 의 내부 장치를 Y 축 방향 측방향에서 바라본 도면이다.FIG. 5 is a view of the internal device of FIG. 3 seen in the Y-axis direction.
도 6 은 도 2 의 내부 장치를 X 축 방향 전방향에서 바라본 도면이다.FIG. 6 is a view of the internal device of FIG. 2 as viewed in the X-axis direction.
도 7 은 본 발명의 샘플 검사 장치의 시료 홀더가 오픈 모드일 때 시료 홀더 내에 샘플이 탑재되는 것을 나타낸 도면이다.7 is a view showing that the sample is mounted in the sample holder when the sample holder of the sample inspection device of the present invention is in the open mode.
도 8 내지 10 은 본 발명에 따른 샘플 검사 장치의 작동을 나타낸 도면이다.8 to 10 are views showing the operation of the sample inspection device according to the present invention.
도 11 은 본 발명의 일 실시예에 따른 샘플 검사 방식을 나타낸 도면이다.11 is a view showing a sample inspection method according to an embodiment of the present invention.
도 12a 및 도 12b 는 검사 결과의 일 예를 나타낸 도면이다.12A and 12B are diagrams showing an example of a test result.
일 실시예에 의한 본 발명에 의한 샘플 검사 장치는, 회전력을 제공하는 동력부; 소정의 면적을 갖고 상기 동력부와 연결되어 Z 축 방향으로 연장되는 소정의 회전 중심축을 중심으로 XY 평면 상에서 회전 가능하게 구성되는 회전 스테이지; 상기 회전 스테이지 상에 배치되어 상기 회전 중심축을 중심으로 상기 회전 스테이지와 함께 회전 가능하게 구성되되, 상기 회전 스테이지 상의 일 측에 배치되는 렌즈부; 상기 회전 스테이지 상에 배치되어 상기 회전 중심축을 중심으로 상기 회전 스테이지와 함께 회전 가능하게 구성되되, 상기 회전 중심축을 사이에 두고 상기 렌즈부의 반대측에 배치되며 상기 회전 스테이지에 대해서 회동 가능하게 연결되는 시료 홀더; 및 Sample inspection apparatus according to the present invention according to an embodiment, the power unit for providing a rotational force; A rotation stage having a predetermined area and configured to be rotatable on an XY plane about a predetermined rotation center axis extending in a Z axis direction connected to the power unit; A lens unit disposed on the rotation stage and configured to be rotatable with the rotation stage about the rotation center axis, the lens unit being disposed on one side of the rotation stage; A sample holder disposed on the rotation stage and configured to be rotatable with the rotation stage about the rotation center axis, disposed on an opposite side of the lens portion with the rotation center axis therebetween, and rotatably connected to the rotation stage. ; And
상기 회전 스테이지 상에 배치되며 상기 시료 홀더의 각도를 위치 고정시킬 수 있게 구성된 각도 고정부;를 포함하며, 상기 렌즈부는, 상기 시료 홀더와 마주보는 측에 소정의 평면으로 구성되는 입사면을 가지며, 상기 시료 홀더는, Y 축 방향으로 연장되며 상기 회전 스테이지에 연결되는 회동축, 상기 회동축을 통해 일 단이 상기 회전 스테이지에 연결되되 상기 회동축을 중심으로 XZ 평면 상에서 회동 가능하게 연결되는 회동 바디, 및 상기 회동 바디 내에 배치되는 광원부를 포함하고, 상기 회동 바디는 상기 렌즈부와 마주보는 위치에 소정의 샘플이 놓일 수 있는 탑재면을 갖되, 상기 회동 바디가 상기 회동축을 중심으로 회동함에 따라서 상기 탑재면과 상기 입사면 사이의 사이각이 가변하도록 구성되며, 상기 각도 고정부는 상기 시료 홀더를 위치 고정시켜서 상기 탑재면과 상기 입사면 사이의 사이각이 소정 각도를 유지하도록 하고, 상기 탑재면과 상기 입사면 사이의 사이각이 소정 각도로 고정된 상태에서 상기 광원부에서 생성된 조사광이 상기 샘플에 조사되면, 상기 샘플이 여기되어 생성된 여기광이 상기 렌즈부를 통과하여 방출된다.An angle fixing part disposed on the rotating stage and configured to fix the angle of the sample holder, wherein the lens part has an incident surface formed in a predetermined plane on a side facing the sample holder, The sample holder may include a rotation shaft extending in the Y axis direction and connected to the rotation stage, and one end connected to the rotation stage through the rotation shaft, and pivotally connected on an XZ plane about the rotation axis. And a light source unit disposed in the rotating body, wherein the rotating body has a mounting surface on which a predetermined sample can be placed at a position facing the lens unit, and the rotating body rotates about the rotating shaft. The angle between the mounting surface and the incident surface is configured to be variable, wherein the angle fixing portion is positioned the sample holder The angle between the mounting surface and the incident surface to maintain a predetermined angle, and the irradiation light generated by the light source unit is fixed to the sample between the mounting surface and the incident surface at a predetermined angle. When irradiated onto the sample, excitation light generated by excitation of the sample is emitted through the lens portion.
이하, 첨부된 도면을 참조하여, 본 발명에 따른 바람직한 실시예에 대하여 설명한다. 본 실시예는 제한적인 것으로 의도된 것이 아니다.Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings. This embodiment is not intended to be limiting.
본 발명의 이점 및 특징, 그리고 그것들을 달성하는 방법은 첨부되는 도면과 함께 상세하게 후술되어 있는 실시예들을 참조하면 명확해질 것이다. 그러나 본 발명은 이하에서 개시되는 실시예들에 한정되는 것이 아니라 서로 다른 다양한 형태로 구현될 수 있으며, 단지 본 실시예들은 본 발명의 개시가 완전하도록 하고, 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자에게 발명의 범주를 완전하게 알려주기 위해 제공되는 것이며, 본 발명은 청구항의 범주에 의해 정의될 뿐이다. 명세서 전체에 걸쳐 동일 참조 부호는 동일 구성 요소를 지칭한다.Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various different forms, and only the embodiments make the disclosure of the present invention complete, and the general knowledge in the art to which the present invention belongs. It is provided to fully inform the person having the scope of the invention, which is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.
본 명세서에서 사용된 용어는 실시예들을 설명하기 위한 것이며 본 발명을 제한하고자 하는 것은 아니다. 본 명세서에서, 단수형은 문구에서 특별히 언급하지 않는 한 복수형도 포함한다. 명세서에서 사용되는 "포함한다(comprises)" 및/또는 "포함하는(comprising)"은 언급된 구성요소, 단계, 동작 및/또는 부재는 하나 이상의 다른 구성요소, 단계, 동작 및/또는 부재의 존재 또는 추가를 배제하지 않는다.The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. In this specification, the singular also includes the plural unless specifically stated otherwise in the phrase. As used herein, "comprises" and / or "comprising" refers to the presence of one or more other components, steps, actions and / or members. Or does not exclude additions.
다른 정의가 없다면, 본 명세서에서 사용되는 모든 용어(기술 및 과학적 용어를 포함)는 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자에게 공통적으로 이해될 수 있는 의미로 사용될 수 있을 것이다. 또 일반적으로 사용되는 사전에 정의되어 있는 용어들은 명백하게 특별히 정의되어 있지 않은 한 이상적으로 또는 과도하게 해석되지 않는다.Unless otherwise defined, all terms (including technical and scientific terms) used in the present specification may be used in a sense that can be commonly understood by those skilled in the art. In addition, the terms defined in the commonly used dictionaries are not ideally or excessively interpreted unless they are specifically defined clearly.
도 1 은 본 발명의 일 실시예에 따른 샘플 검사 장치(1)의 외형을 나타낸 도면이고, 도 2 는 본 발명의 일 실시예에 따른 샘플 검사 장치(1)의 케이싱(20)의 도어(30)를 개방한 형상을 나타낸 도면이며, 도 3 은 본 발명에 따른 샘플 검사 장치(1)의 내부의 장치의 구조를 나타낸 도면이고, 도 4 내지 도 6 은 각각 도 3 의 내부 장치를 Z 축 방향 상방향, Y 축 방향 측방향, 및 X 축 방향 전방향에서 바라본 도면이다.1 is a view showing the appearance of a sample inspection device 1 according to an embodiment of the present invention, Figure 2 is a door 30 of the casing 20 of the sample inspection device 1 according to an embodiment of the present invention Fig. 3 is a view showing an open shape, and Fig. 3 is a view showing the structure of the device inside the sample inspection device 1 according to the present invention, and Figs. 4 to 6 respectively show the internal device of Fig. 3 in the Z-axis direction. It is the figure seen from the upper direction, the Y-axis direction lateral direction, and the X-axis direction omnidirectional.
여기서, X 축 방향, Y 축 방향, 및 Z 축 방향은 각각 도 3 에 도시된 방향을 기준으로 설명하기로 한다.Here, the X-axis direction, the Y-axis direction, and the Z-axis direction will be described with reference to the directions shown in FIG. 3, respectively.
본 발명에 따른 샘플 검사 장치(1)는, 동력부(100), 회전 스테이지(200), 렌즈부(300), 시료 홀더(400), 각도 고정부(500), 광 통과부(600), 각도 조절부(700) 및 분석 장치(800)를 포함하여 구성될 수 있다. 한편, 상기 장치들은 소정의 베이스판(10) 상에 배치되며, 소정의 케이싱(20)으로 덮일 수 있다. 아울러, 상기 케이싱(20)은 도어(30)가 개폐되는 구조를 가질 수 있다.The sample inspection apparatus 1 according to the present invention includes a power unit 100, a rotation stage 200, a lens unit 300, a sample holder 400, an angle fixing unit 500, a light passing unit 600, It may be configured to include an angle adjusting unit 700 and the analysis device (800). On the other hand, the devices are disposed on a predetermined base plate 10, it may be covered with a predetermined casing (20). In addition, the casing 20 may have a structure in which the door 30 is opened and closed.
먼저 동력부(100)에 대해서 설명한다.First, the power unit 100 will be described.
동력부(100)는 소정의 전력을 인가받아 회전력을 제공한다. 이에 따라서, 동력부(100)는 상기 베이스판(10) 상에 고정되어 배치되며, 소정의 전력을 인가받을 수 있도록 소정의 전원 장치와 연결될 수 있다.The power unit 100 receives a predetermined power to provide rotational force. Accordingly, the power unit 100 is fixedly disposed on the base plate 10, and may be connected to a predetermined power supply device to receive a predetermined power.
동력부(100)는 모터와 같은 소정의 동력장치(110), 동력장치(110)의 외측을 커버하는 측부 케이싱(120), 및 동력장치(110)의 상부에 배치되어 동력장치(110)를 커버하는 상부 케이싱(130)을 가질 수 있다. 동력장치(110)는 회전 스테이지(200)를 회전시킬 수 있도록 소정의 샤프트를 가질 수 있다. The power unit 100 is disposed on a predetermined power unit 110 such as a motor, a side casing 120 covering an outer side of the power unit 110, and an upper portion of the power unit 110. It may have an upper casing 130 to cover. The power unit 110 may have a predetermined shaft to rotate the rotation stage 200.
다음으로 회전 스테이지(200)에 대해서 설명한다.Next, the rotation stage 200 will be described.
회전 스테이지(200)는 XY 평면 상으로 소정의 면적을 갖는 부재로서, Z 축 방향으로 연장되는 소정의 회전 중심축을 중심으로 하여 XY 평면 상에서 회전할 수 있도록 구성된다. The rotation stage 200 is a member having a predetermined area on the XY plane, and is configured to rotate on the XY plane about a predetermined rotation center axis extending in the Z axis direction.
구체적으로는, 회전 스테이지(200)는 베이스 스테이지(210), 상부 커버(220), 및 연결부(230)를 갖는다. Specifically, the rotating stage 200 has a base stage 210, an upper cover 220, and a connecting portion 230.
베이스 스테이지(210)는 상기 동력부(100)와 연결되어 회전 가능하게 구성되는 소정의 원반 형태의 부재로 구성될 수 있다. 구체적으로는, 상기 동력부(100)의 샤프트와 연결되어 회전할 수 있다.The base stage 210 may be formed of a member of a predetermined disc shape that is connected to the power unit 100 and rotatably configured. Specifically, it may be connected to the shaft of the power unit 100 to rotate.
베이스 스테이지(210)의 상면은 렌즈면(214), 및 베이스면(112)으로 구분된다. 렌즈면(214)과 베이스면(112)은 각각 베이스 스테이지(210)의 상면의 면적을 대략 1/2 씩 분할하는 반원 형태를 갖는다. 이때, 렌즈면(214)의 높이가 베이스면(112)의 높이보다 높아서, 상기 렌즈면(214)과 베이스면(112)은 소정의 단차면(216)을 중심으로 하여 구분된다. 따라서, 상기 단차면(216)은 상기 원반 형태의 베이스 스테이지(210)의 중심점을 통과하는 직경과 일치하거나, 또는 나란하게 형성된다.An upper surface of the base stage 210 is divided into a lens surface 214 and a base surface 112. The lens surface 214 and the base surface 112 each have a semicircular shape that divides the area of the upper surface of the base stage 210 by approximately 1/2. In this case, the height of the lens surface 214 is higher than the height of the base surface 112, so that the lens surface 214 and the base surface 112 are divided around the predetermined step surface 216. Accordingly, the stepped surface 216 is formed to coincide with or parallel to the diameter passing through the center point of the disc shaped base stage 210.
한편, 상기 베이스면(112) 상에는 소정의 깊이를 가지며 함몰되는 함몰 홈(213)이 형성될 수 있다. 상기 함몰 홈(213)은 후술하는 각도 고정부(500)의 Y 축 방향 양 측에 각각 형성되어, 후술하는 샘플에서 유출된 액상의 물질이 외부로 퍼지지 않고 모여 적절히 처리되도록 할 수 있다.Meanwhile, a recessed groove 213 having a predetermined depth and recessed may be formed on the base surface 112. The recessed grooves 213 may be formed at both sides of the Y-axis direction of the angle fixing part 500 to be described later, so that the liquid substances flowing out of the sample to be described later may be appropriately collected without spreading to the outside.
상부 커버(220)는 상기 렌즈면(214) 상부에 위치하며, 렌즈면(214)의 형상과 같이 전체적으로 반원 형상을 가질 수 있다. 상부 커버(220)와 상기 베이스면(112) 사이에 후술하는 렌즈부(300)가 배치된다. The upper cover 220 may be positioned above the lens surface 214 and may have a semi-circular shape as a shape of the lens surface 214. A lens unit 300 to be described below is disposed between the upper cover 220 and the base surface 112.
연결부(230)는 베이스 스테이지(210)와 상부 커버(220)를 상하 방향으로 서로 연결한다. 구체적으로는, 연결부(230)의 하단은 상기 베이스 스테이지(210)와 연결되며, 상단은 상기 상부 커버(220)와 연결된다. 연결부(230)는 2 개 마련되며, 각각의 연결부(230)의 구체적인 배치는 후술하기로 한다.The connection part 230 connects the base stage 210 and the upper cover 220 to each other in the vertical direction. Specifically, the lower end of the connecting portion 230 is connected to the base stage 210, the upper end is connected to the upper cover 220. Two connection units 230 are provided, and specific arrangement of each connection unit 230 will be described later.
이어서 렌즈부(300)에 대해서 설명한다.Next, the lens unit 300 will be described.
렌즈부(300)는 상기 회전 스테이지(200) 상에 배치되어 회전 스테이지(200)와 함께 회전 가능하게 구성된다. The lens unit 300 is disposed on the rotation stage 200 and configured to be rotatable with the rotation stage 200.
구체적으로는, 렌즈부(300)는 소정의 두께를 갖는 반원형 형태를 가질 수 있다. 즉, Z 축 방향으로 소정의 두께를 갖고, X 축 방향 전방에는 평면으로 구성된 입사면(310)이 직립하게 형성되며, X 축 방향 후방에는 반원형의 렌즈 곡면이 형성되어 소정의 두께를 갖는 반원형의 렌즈로 구성될 수 있다.Specifically, the lens unit 300 may have a semicircular shape having a predetermined thickness. That is, a semi-circular lens curved surface having a predetermined thickness in the Z-axis direction and having a predetermined plane in the X-axis direction is formed upright, and a semi-circular lens curved surface is formed at the rear in the X-axis direction. It may be composed of a lens.
렌즈부(300)는 상기 베이스 스테이지(210) 상의 렌즈면(214) 상에 배치된다. 이때, 상기 입사면(310)이 상기 단차면(216)과 나란하도록 배치된다. 즉, 도 4 에 도시된 바와 같이, 입사면(310)은 단차면(216) 상에 위치하며, 나란하게 일 면을 구성할 수 있다. 따라서, 렌즈부(300)는 베이스 스테이지(210)와 동심으로 배치된다. 한편, 렌즈부(300)가 그리는 반원의 직경은 렌즈면(214)이 그리는 반원의 직경보다 작을 수 있다.The lens unit 300 is disposed on the lens surface 214 on the base stage 210. In this case, the incident surface 310 is disposed to be parallel to the stepped surface 216. That is, as shown in FIG. 4, the incident surface 310 is located on the stepped surface 216, and may form one surface side by side. Therefore, the lens unit 300 is disposed concentrically with the base stage 210. Meanwhile, the diameter of the semicircle drawn by the lens unit 300 may be smaller than the diameter of the semicircle drawn by the lens surface 214.
렌즈부(300)의 상면은 상부 커버(220)의 하면과 맞닿게 배치된다. 따라서, 렌즈부(300)는 상기 베이스 스테이지(210)와 상부 커버(220) 사이에 위치한다. 아울러, 상기 입사면(310)의 양 측부 부분은 상기 연결부(230)와 각각 맞닿는다. 이에 따라서, 상기 연결부(230)는 상기 단차면(216)이면 및 입사면(310)에 동시에 접하여 고정된다.The upper surface of the lens unit 300 is disposed in contact with the lower surface of the upper cover 220. Therefore, the lens unit 300 is positioned between the base stage 210 and the upper cover 220. In addition, both side portions of the incident surface 310 abut each of the connection portion 230. Accordingly, the connection part 230 is fixed in contact with the bottom surface 216 and the incident surface 310 at the same time.
따라서, 렌즈부(300)의 하면은 상기 베이스면(112)에 의해서 커버되며, 렌즈부(300)의 상면은 상부 커버(220)에 의해서 커버되고, 상기 입사면(310)의 양 측부 부분은 상기 연결부(230)에 의해서 커버된다. 상기 베이스 스테이지(210), 상부 커버(220), 및 연결부(230)는 상기 렌즈부(300)를 고정시키며, 상기 렌즈부(300)는 X 축 방향으로 전방에 위치하는 입사면(310)의 중심 부분, 및 X 축 방향으로 후방에 위치하는 렌즈 곡면(320)이 노출될 수 있다. Therefore, the lower surface of the lens unit 300 is covered by the base surface 112, the upper surface of the lens unit 300 is covered by the upper cover 220, both side portions of the incident surface 310 It is covered by the connecting portion 230. The base stage 210, the upper cover 220, and the connection part 230 fix the lens part 300, and the lens part 300 of the incident surface 310 positioned forward in the X-axis direction. The center portion and the lens curved surface 320 positioned rearward in the X-axis direction may be exposed.
다음으로 시료 홀더(400)에 대해서 설명한다.Next, the sample holder 400 will be described.
시료 홀더(400)는 소정의 샘플이 탑재되고, 상기 샘플에 광을 조사하는 장치이다.The sample holder 400 is a device on which a predetermined sample is mounted and irradiates light onto the sample.
시료 홀더(400)는 회전 스테이지(200) 상에 배치되되 상기 베이스면(112) 상에 배치될 수 있다. 즉, 상기 단차면(216)이 베이스 스테이지(210)를 1/2 로 분할한다고 하면, 상기 단차면(216)을 사이에 두고 일 측에는 렌즈부(300)가 배치되며, 반대측에는 시료 홀더(400)가 배치될 수 있다. The sample holder 400 may be disposed on the rotation stage 200 and disposed on the base surface 112. That is, when the stepped surface 216 divides the base stage 210 into 1/2, the lens unit 300 is disposed on one side with the stepped surface 216 interposed therebetween, and the sample holder 400 on the opposite side. ) May be arranged.
시료 홀더(400)는 회동 축(410), 회동 바디(420), 및 광원부(430)를 포함하여 구성된다.The sample holder 400 includes a rotation shaft 410, a rotation body 420, and a light source 430.
회동 축(410)은 Y 축 방향으로 연장되는 축으로 구성되며, 상기 회전 스테이지(200)에 연결된다. 구체적으로는 상기 2 개의 연결부(230) 사이를 가로질러 연결되는 소정의 빔으로 구성될 수 있다. 물론, 회동 축(410)은 회동 바디(420)를 회동시키는 축으로 구성되면 충분하므로, 회동 바디(420) 또는 연결부(230)에 구비된 소정의 돌출 빔으로 구성되는 실시 형태도 가능하다.The rotation shaft 410 is configured as an axis extending in the Y axis direction and is connected to the rotation stage 200. Specifically, it may be composed of a predetermined beam connected across the two connecting portions 230. Of course, since the rotating shaft 410 is sufficient to be configured to rotate the rotating body 420, it is also possible to implement an embodiment consisting of a predetermined projecting beam provided on the rotating body 420 or the connecting portion 230.
회동 바디(420)는 내부에 광원부(430)가 배치되며 일 단이 상기 연결부(230) 사이에 위치하여 상기 회동 축(410)을 통해 회전 스테이지(200)에 연결되며 상기 회동 축(410)을 중심으로 XZ 평면 상에서 회동 가능하게 구성되는 부재이다.The rotating body 420 has a light source unit 430 disposed therein, and one end of the rotating body 420 is disposed between the connecting units 230, and is connected to the rotating stage 200 through the rotating shaft 410 and rotates the rotating shaft 410. It is a member configured to be rotatable on the XZ plane about the center.
광원부(430)는 소정의 발광 소자일 수 있으며, 일 예로 UV 광과 같은 특정 파장의 광을 조사하는 소정의 LED 발광 소자로 구성될 수 있다. 그러나, 반드시 이에 한정하지는 아니한다.The light source unit 430 may be a predetermined light emitting device, and for example, may be configured as a predetermined LED light emitting device that emits light of a specific wavelength such as UV light. However, it is not necessarily limited thereto.
회동 바디(420)는 회동 빔(440), 하우징(450), 및 탑재면(460)을 포함하여 구성된다.The rotating body 420 includes a rotating beam 440, a housing 450, and a mounting surface 460.
상기 회동 빔(440)은 일 단이 상기 회동 축(410)에 연결되는 부분으로서, 상기 회동 축(410)에 연결되어 회동 가능한 소정의 빔으로 구성된다.The rotating beam 440 is a portion of which one end is connected to the rotating shaft 410, and is composed of a predetermined beam connected to the rotating shaft 410 and rotatable.
상기 하우징(450)은 내부에 광원부(430)를 실장하도록 내부에 소정의 공간이 형성된 부분이다. 상기 하우징(450)은 상기 회동 빔(440)의 타단에 연결되어 회동 빔(440)의 회동에 따라서 함께 회동한다. 회동 빔(440)과 하우징(450)은 바람직하게는 서로 소정의 사이각을 갖고 절곡되는 구성을 가질 수 있다.The housing 450 is a portion in which a predetermined space is formed to mount the light source unit 430 therein. The housing 450 is connected to the other end of the rotating beam 440 and rotates together according to the rotation of the rotating beam 440. The rotating beam 440 and the housing 450 may preferably have a configuration that is bent at a predetermined angle from each other.
하우징(450)은 X 축 방향으로 후방에 광 개방부(452)를 갖는다. 광 개방부(452)는 공간적으로 개방되거나, 또는 소정의 광투과성 재질을 갖는 창(窓)과 같은 부재가 구비되어 광이 통과할 수 있는 부분이다. 따라서, 상기 하우징(450) 내에 실장된 광원부(430)에서 생성된 조사광이 샘플에 조사될 수 있도록 구성된다.The housing 450 has a light opening 452 at the rear in the X axis direction. The light opening part 452 is a part which is spatially open, or is provided with a member such as a window having a predetermined light transmissive material, through which light can pass. Therefore, the irradiation light generated by the light source unit 430 mounted in the housing 450 may be irradiated to the sample.
탑재면(460)은 상기 렌즈부(300)와 서로 마주보는 위치에 형성된 면으로서, 상기 하우징(450)의 후방에 마련된다. 상기 탑재면(460)에는 소정의 샘플이 수납될 수 있도록 구성되며, 탑재면(460)에는 샘플이 수납되어 고정될 수 있도록 하는 소정의 홈이 형성될 수 있다. 예컨대, 상기 샘플이 소정의 액상의 시료가 담긴 카트리지, 또는 소정의 사각형 글라스일 경우, 카트리지, 또는 사각형 글라스의 외형에 대응하는 홈이 형성되어 상기 카트리지, 또는 사각형 글라스가 탑재될 수 있다.The mounting surface 460 is a surface formed at a position facing the lens unit 300 and is provided at the rear of the housing 450. The mounting surface 460 may be configured to accommodate a predetermined sample, and the mounting surface 460 may be provided with a predetermined groove for receiving and fixing the sample. For example, when the sample is a cartridge containing a predetermined liquid sample or a predetermined rectangular glass, a groove corresponding to the external shape of the cartridge or the rectangular glass may be formed to mount the cartridge or the rectangular glass.
상기 탑재면(460)은 상기 하우징(450)의 광 개방부(452)와 연통하여, 상기 탑재면(460) 상에 상기 샘플이 수납되되, 상기 샘플의 전방부는 상기 광 개방부에 의해서 상기 광원부(430)와 마주보게 구성되어 상기 광원부(430)에서 생성된 광이 상기 샘플에 조사될 수 있는 구성을 갖는다.The mounting surface 460 communicates with the light opening 452 of the housing 450, so that the sample is received on the mounting surface 460, and the front portion of the sample is disposed by the light opening. It is configured to face 430 has a configuration that the light generated by the light source unit 430 can be irradiated to the sample.
한편, 회동 바디(420)는 탑재면(460) 상에 놓인 샘플을 위치 고정시키는 고정 수단(470)을 더 포함할 수 있다. 상기 고정 수단(470)은, 상기 탑재면(460)의 상부에 배치되되, 회동 소축(472)과, 회동 고정핀(474)을 포함하여 구성될 수 있다.On the other hand, the rotation body 420 may further include a fixing means 470 for positioning the sample placed on the mounting surface 460. The fixing means 470 may be disposed above the mounting surface 460, and may include a rotating shaft 472 and a rotating fixing pin 474.
구체적으로는, 상기 탑재면(460)의 상부에 배치되며 Y 축 방향으로 연장되는 회동 소축(472)에 상기 회동 고정핀(474)의 일 단이 회동가능하게 연결되는 구성을 가질 수 있다. 따라서, 상기 회동 고정핀(474)은 상기 회동 소축(472)을 중심으로 하여 XZ 평면 상에서 회동할 수 있다. 이때, 상기 회동 고정핀(474)의 타측에는 소정의 고정 돌부가 마련되어 상기 탑재면(460) 상에 놓인 샘플의 상면 일부를 덮어 상기 샘플을 위치 고정시킬 수 있다. Specifically, one end of the pivot fixing pin 474 may be rotatably connected to the pivot shaft 472 disposed on the mounting surface 460 and extending in the Y-axis direction. Therefore, the pivot pin 474 may rotate on the XZ plane about the pivot axis 472. In this case, a predetermined fixing protrusion may be provided on the other side of the rotation fixing pin 474 to cover a portion of the upper surface of the sample placed on the mounting surface 460 to fix the sample.
상기 회동 바디(420)가 회동함에 따라서 상기 탑재면(460)의 기울임각 또한 가변될 수 있다. 상기 탑재면(460)은 회동 바디(420)의 회동에 따라서 상기 입사면(310)과 소정의 사이각을 갖고 벌어진 상태가 되거나, 또는 상기 입사면(310)에 밀착하여 입사면(310)과 탑재면(460) 사이의 사이각이 0° 인 상태가 될 수도 있다. As the pivoting body 420 rotates, the inclination angle of the mounting surface 460 may also vary. The mounting surface 460 may be in a state where the mounting surface 460 is opened with a predetermined angle between the incident surface 310 according to the rotation of the rotation body 420, or in close contact with the incident surface 310. The angle between the mounting surfaces 460 may be 0 degrees.
즉, 시료 홀더(400)는 오픈 모드와 클로징 모드를 갖는다. 오픈 모드에서는 회동 축(410)을 중심으로 하여 회동 바디(420)가 상기 렌즈부(300)에 대해서 외측으로 회동하여 상기 입사면(310)과 탑재면(460)이 서로 이격되어 상기 입사면(310)과 탑재면(460)이 소정의 사이각을 갖고, 탑재면(460)이 상방향으로 노출된 상태이다. 이에 따라서, 탑재면(460) 상에 상기 샘플을 탑재시킬 수 있다.That is, the sample holder 400 has an open mode and a closing mode. In the open mode, the rotation body 420 rotates outward with respect to the lens unit 300 with the rotation axis 410 as the center so that the incident surface 310 and the mounting surface 460 are spaced apart from each other so that the incident surface ( 310 and the mounting surface 460 have a predetermined angle, and the mounting surface 460 is exposed upward. Accordingly, the sample can be mounted on the mounting surface 460.
클로징 모드에서는 상기 입사면(310)과 탑재면(460) 사이의 사이각이 0° 가 된다. 이때, 상기 회동 빔(440)이 직립하게 되며, 탑재면(460)과 입사면(310)이 서로 밀착하게 된다. 보다 정확하게는, 탑재면(460)에 안착된 샘플이 입사면(310)에 밀착하는 것으로 이해될 수 있다.In the closing mode, the angle between the incident surface 310 and the mounting surface 460 becomes 0 °. At this time, the rotating beam 440 is upright, the mounting surface 460 and the incident surface 310 is in close contact with each other. More precisely, it can be understood that the sample seated on the mounting surface 460 is in close contact with the incident surface 310.
이하에서는 각도 고정부(500)에 대해서 설명한다.Hereinafter, the angle fixing part 500 will be described.
각도 고정부(500)는 X 축 방향으로 상기 시료 홀더(400)의 전방에 배치되며, 상기 시료 홀더(400)의 기울임 각도를 일정하게 유지시킬 수 있도록 하는 부재이다.The angle fixing part 500 is disposed in front of the sample holder 400 in the X axis direction, and is a member for maintaining a constant tilt angle of the sample holder 400.
상기 각도 고정부(500)는 상기 베이스 스테이지(210)의 베이스면(112) 상에 배치되며, 베이스 지그(510), 및 회동 지그(520)를 포함하여 구성될 수 있다. The angle fixing part 500 may be disposed on the base surface 112 of the base stage 210, and may include a base jig 510 and a rotation jig 520.
베이스 지그(510)는 상기 베이스 스테이지(210)의 베이스면(112) 상에 고정되되, X 축 방향으로 상기 시료 홀더(400)의 전방에 위치한다. 베이스 지그(510)의 Y 축 방향 양 측에는 회동 지그(520)가 연결될 수 있도록 소정의 홈이 형성될 수 있다.The base jig 510 is fixed on the base surface 112 of the base stage 210 and positioned in front of the sample holder 400 in the X axis direction. A predetermined groove may be formed at both sides of the base jig 510 in the Y axis direction so that the rotation jig 520 may be connected.
상기 회동 지그(520)는 Y 축 방향으로 상기 베이스 지그(510)의 양 측에 배치되며, 상기 베이스 지그(510)와 소정의 지지축(514)을 통해 회동 가능하게 연결된다. 상기 지지축(514)은 X 축 방향으로 연장되어, 상기 회동 지그(520)는 XZ 평면 상에서 회동 가능하게 구성된다. 따라서, 상기 회동 지그(520)는 상기 베이스면(112) 상에 누워서 상기 베이스면(112)과 면하는 가로 모드와, 상기 지지축(514)을 중심으로 회동하여 상기 베이스면(112)과 90° 사이각을 가지며 직립한 상태가 되는 세로 모드를 갖는다. 물론, 반드시 세로 모드에서 베이스면(112)과의 사이각이 90° 인 것에 한정하는 것은 아니며, 적절한 사이각을 갖는 것으로 충분하다.The rotation jig 520 is disposed at both sides of the base jig 510 in the Y-axis direction and is rotatably connected to the base jig 510 through a predetermined support shaft 514. The support shaft 514 extends in the X-axis direction, and the rotation jig 520 is configured to be rotatable on the XZ plane. Accordingly, the rotation jig 520 is laid on the base surface 112 to face the base surface 112, and rotates about the support shaft 514 to the base surface 112 and 90. It has a longitudinal angle between degrees and is upright. Of course, the angle between the base surface 112 and the base surface 112 in the longitudinal mode is not necessarily limited to 90 degrees, but it is sufficient to have a suitable angle between them.
상기 각도 고정부(500)에 의한 상기 시료 홀더(400)의 위치 고정에 대해서 설명하면 아래와 같다.The position fixing of the sample holder 400 by the angle fixing part 500 will be described below.
상기 시료 홀더(400)가 닫힌 상태가 되면 상기 회동 빔(440)이 직립한 상태가 된다. 이때, 상기 회동 지그(520)를 상기 지지축(514)을 중심으로 하여 회동시켜서 가로 모드에서 세로 모드가 되도록 하면 상기 회동 지그(520)의 후면이 상기 회동 빔(440)의 전면에 닿게 된다. 이에 따라서, 상기 회동 빔(440)의 전면을 지지하여 회동 빔(440)의 자세를 유지하고, 회동 빔(440)이 닫힌 모드를 유지하도록 하게 된다. 바람직하게는, 상기 회동 지그(520)는, 상기 시료 홀더(400)가 닫힌 상태에서 정확히 직립한 상태를 유지할 수 있도록 적합한 길이 및 배치를 가질 수 있다. 즉, 상기 회동 지그(520)의 X 축 방향 후면이 상기 시료 홀더(400)가 직립한 상태에서 상기 시료 홀더(400)의 전면에 밀착하기 적합한 길이 및 배치를 가질 수 있다. When the sample holder 400 is closed, the pivot beam 440 is in an upright state. In this case, when the pivoting jig 520 is rotated about the support shaft 514 to be in the longitudinal mode in the horizontal mode, the rear surface of the pivoting jig 520 contacts the front surface of the pivoting beam 440. Accordingly, the front surface of the pivoting beam 440 is supported to maintain the attitude of the pivoting beam 440, and the pivoting beam 440 is maintained in the closed mode. Preferably, the rotation jig 520 may have a suitable length and arrangement so that the sample holder 400 can maintain a precisely upright state in a closed state. That is, the X-axis rear surface of the rotation jig 520 may have a length and arrangement suitable to closely contact the front surface of the sample holder 400 in a state where the sample holder 400 is upright.
광 통과부(600)는 X 축 방향으로 상기 렌즈부(300)의 후방에 배치되는 부재로서, 상기 렌즈부(300)를 통해 투과된 광 중 소정의 위치의 광만을 선택적으로 통과시키도록 소정의 슬릿(610), 및 렌즈(620)를 가질 수 있다. 광 통과부(600)는 상기 베이스 판 상에 고정되는 소정의 구조물로 구성될 수 있다.The light passing part 600 is a member disposed behind the lens part 300 in the X-axis direction, and predetermined to selectively pass only light at a predetermined position among the light transmitted through the lens part 300. It may have a slit 610 and a lens 620. The light passing part 600 may be formed of a predetermined structure fixed on the base plate.
각도 조절부(700)는 상기 회전 스테이지(200)의 회전 각도, 회전 각도 범위, 회전 속도 및 초기 각도 등을 조정 가능한 장치로 구성된다. 각도 조절부(700)는 상기 동력부(100)와 연계되어 구성될 수 있으며, 소정의 조절 핀을 회전시켜서 상기 회전 스테이지(200)의 초기 각도 등을 조절할 수 있다. 예컨대, 상기 조절 핀은 소정의 톱니바퀴 등을 통해 상기 회전 스테이지(200)와 연결될 수 있다.The angle adjusting unit 700 is configured as a device capable of adjusting the rotation angle, rotation angle range, rotation speed and initial angle of the rotation stage 200. The angle adjusting unit 700 may be configured to be connected to the power unit 100, and may adjust an initial angle of the rotating stage 200 by rotating a predetermined adjustment pin. For example, the adjustment pin may be connected to the rotation stage 200 through a predetermined gear.
분석 장치(800)는 도 1 내지 도 6 에는 도시되지 아니하였으나, 상기 광 통과부(600)를 사이에 두고 상기 렌즈부(300)의 반대편에 위치할 수 있다. 따라서, 광 통과부(600)를 통과한 광이 분석 장치(800) 내에 입사할 수 있게 구성될 수 있다. 분석 장치(800)에서는 광 통과부(600)를 통과한 광을 이용하여 각종 신호를 분석, 처리하여 소정의 검사 결과를 도출할 수 있다. 따라서, 분석 장치(800)는 소정의 연산 장치, 데이터 베이스, 신호 처리 장치, 표시 장치, 입력 장치 등을 포함하여 구성될 수 있다.Although not shown in FIGS. 1 to 6, the analyzer 800 may be positioned opposite to the lens unit 300 with the light passing part 600 therebetween. Therefore, the light passing through the light passing part 600 may be configured to be incident in the analysis device 800. The analysis apparatus 800 may analyze and process various signals using the light passing through the light passing part 600 to derive a predetermined test result. Therefore, the analysis device 800 may be configured to include a predetermined computing device, a database, a signal processing device, a display device, an input device, and the like.
상기한 동력부(100), 회전 스테이지(200), 렌즈부(300), 시료 홀더(400), 각도 고정부(500), 광 통과부(600), 및 분석 장치(800)는 소정의 베이스판(10) 상에 설치되며, 아울러, 전체 장치는 소정의 케이싱(20) 내에 수납될 수 있다. 상기 케이싱(20)은 오픈 구조로 구성되어 케이싱(20)에 구비된 도어(30)를 열고 샘플을 투입하거나 또는 각각의 장치를 교환, 수리할 수 있다. 아울러, 케이싱(20)에는 소정의 출력 장치 및 입력 장치가 구비될 수 있다.The power unit 100, the rotation stage 200, the lens unit 300, the sample holder 400, the angle fixing unit 500, the light passing unit 600, and the analysis device 800 may have a predetermined base. It is installed on the plate 10 and, in addition, the entire apparatus can be housed in a predetermined casing 20. The casing 20 is configured in an open structure to open the door 30 provided in the casing 20 to inject a sample or to replace or repair each device. In addition, the casing 20 may be provided with a predetermined output device and input device.
아울러, 검사에 사용되는 광 외의 다른 광을 배제하여 검사 신뢰성을 보다 향상시키도록, 발광, 및 광 투과되는 부재 외의 다른 부재는 검은색으로 도포, 채색될 수 있다. 즉, 상기 렌즈부(300), 시료 홀더(400)의 일 부분, 및 광 통과부(600)의 슬릿(610)과 렌즈 등을 제외한 나머지 부분은 검은색으로 도포, 채색되어 불필요한 반사광, 외부광 등이 분석 장치(800) 내에 입사되는 것을 방지할 수 있다. 이에 따라서, 케이싱(20)의 내면, 도어(30)의 내면 및 각 부재의 외면을 모두 검은색으로 이루어질 수 있다.In addition, in order to further improve inspection reliability by excluding light other than the light used for inspection, other members other than the light-emitting and light transmitting members may be applied and colored in black. That is, the lens unit 300, a portion of the sample holder 400, and the remaining portions except for the slit 610 and the lens of the light passing part 600 are coated and colored in black, so that unnecessary reflection light and external light are applied. And the like can be prevented from entering the analysis apparatus 800. Accordingly, the inner surface of the casing 20, the inner surface of the door 30 and the outer surface of each member may be made black.
이하에서는 본 발명에 따른 샘플 검사 장치(1)의 작동에 대해서 설명한다.Hereinafter, the operation of the sample inspection device 1 according to the present invention will be described.
도 7 은 본 발명의 샘플 검사 장치(1)의 시료 홀더(400)가 오픈 모드일 때 시료 홀더(400) 내에 샘플이 탑재되는 것을 나타낸 도면이고, 도 8 내지 10 은 본 발명에 따른 샘플 검사 장치(1)의 작동을 나타낸 도면이다. 다만, 도 1 내지 도 6 의 표시 부분도 참고하도록 한다.7 is a view showing that the sample is mounted in the sample holder 400 when the sample holder 400 of the sample inspection apparatus 1 of the present invention is in an open mode, and FIGS. 8 to 10 are sample inspection apparatuses according to the present invention. A diagram showing the operation of (1). However, reference may be made to the display portion of FIGS. 1 to 6.
먼저, 도 7 과 같이, 위에서 설명한 시료 홀더(400)의 오픈 모드에서, 상기 시료 홀더(400)의 탑재면(460) 상에 샘플(P)을 투입시킨다. 즉, 도 7 에 도시된 바와 같이, 오픈 모드에서 상기 탑재면(460)이 상방향으로 노출되며, 상기 탑재면(460) 상에 샘플(P)을 투입시킬 수 있다. 아울러, 탑재면(460) 상에 샘플을 투입시킨 이후, 상기 고정 수단(470)을 도 8 의 화살표 Q 와 같이 회동시켜서 상기 탑재면(460) 상에 샘플을 고정시킬 수 있다.First, as shown in FIG. 7, in the open mode of the sample holder 400 described above, the sample P is injected onto the mounting surface 460 of the sample holder 400. That is, as shown in FIG. 7, in the open mode, the mounting surface 460 is exposed upward, and the sample P may be injected onto the mounting surface 460. In addition, after the sample is put on the mounting surface 460, the fixing means 470 can be rotated as shown by arrow Q of FIG. 8 to fix the sample on the mounting surface 460.
상기 설명한 바와 같이, 샘플(P)은 카트리지, 또는 액상의 시료 등이 투입된 소정의 글라스일 수 있으며, 탑재면(460) 상에 적절히 투입된 후, 상기 고정 수단(470)에 의해서 고정될 수 있다.As described above, the sample P may be a predetermined glass into which a cartridge, a liquid sample, or the like is introduced, and may be fixed by the fixing means 470 after being appropriately loaded on the mounting surface 460.
일 예에 의하면, 상기 샘플(P)은 소정의 검사 시료(F)가 놓이도록 소정의 면적을 가지며 글라스와 같이 광투과성을 갖는 재질로 구성되는 투과부(G)를 갖되, 상기 투과부(G)의 굴절율은 상기 렌즈부(300)의 굴절율과 동일할 수 있다. 아울러, 상기 샘플은, 상기 투과부(G) 상에 놓인 검사 시료 상에 도포되어 상기 검사 시료(F) 및 투과부(G)와 상기 렌즈부(300)의 입사면(310) 사이를 밀착시키는 액상 용제를 포함할 수 있다. 바람직하게는, 상기 액상 용제의 굴절율은 상기 렌즈부(300)의 굴절율과 동일할 수 있다. According to one example, the sample P has a transmissive portion (G) made of a material having a predetermined area and a light transmissive, such as glass, so that a predetermined test sample (F) is placed, the The refractive index may be the same as the refractive index of the lens unit 300. In addition, the sample is a liquid solvent that is applied on the test sample placed on the transmission part (G) to close contact between the test sample (F) and the transmission part (G) and the incident surface 310 of the lens unit 300. It may include. Preferably, the refractive index of the liquid solvent may be the same as the refractive index of the lens unit 300.
상기와 같이 샘플(P)의 투입이 완료되면, 도 8 의 화살표 R 과 같이 상기 시료 홀더(400)를 회동시켜서 상기 설명한 클로징 모드로 전환한다. 즉, 탑재면(460)에 투입된 샘플이 입사면(310)에 밀착하도록 시료 홀더(400)를 회동시킨다.When the input of the sample P is completed as described above, the sample holder 400 is rotated as shown by the arrow R in FIG. 8 to switch to the closing mode described above. That is, the sample holder 400 is rotated so that the sample injected into the mounting surface 460 comes into close contact with the incident surface 310.
이때, 상기 시료 홀더(400)를 상기 설명한 클로징 모드로 전환시킨 후, 상기 각도 고정부(500)를 가로 모드에서 세로 모드로 전환시킨다. 이러한 각도 고정부(500)의 모드 전환은 도 5 의 화살표 W 와 같이 이루어질 수 있다. 즉, 상기 회동 지그(520)를 회동시켜서 상기 시료 홀더(400)의 전면을 지지하도록 한다. 이에 따라서, 상기 시료 홀더(400)의 탑재면(460), 및 샘플은 상기 입사면(310)에 밀착한 상태를 유지할 수 있다.In this case, after the sample holder 400 is switched to the above-described closing mode, the angle fixing part 500 is switched from the horizontal mode to the vertical mode. Mode switching of the angle fixing unit 500 may be made as shown by arrow W of FIG. That is, the pivoting jig 520 is rotated to support the front surface of the sample holder 400. Accordingly, the mounting surface 460 and the sample of the sample holder 400 may maintain a state in close contact with the incident surface 310.
이때, 상기 샘플(P)에 액상의 검사 시료 등이 포함되었을 경우, 액체 물질이 낙하하여 흐를 수 있다. 이때, 위에서 설명한 바와 같이, 베이스면(112) 상에 함몰 홈(213)이 형성되어 유출된 액체 물질이 고이게 구성됨으로써, 액체 물질이 다른 곳으로 흘러 장치가 오염되는 것을 방지할 수 있다.In this case, when the sample P contains a liquid test sample or the like, the liquid substance may fall and flow. At this time, as described above, the recessed grooves 213 are formed on the base surface 112 so that the spilled liquid material is formed to be high, thereby preventing the liquid material from flowing to other places and contaminating the device.
이어서, 도 9 와 같이, 상기 광원부(430)에 전원이 인가되면 상기 광원부(430)에서 조사광 L1 이 생성된다. 상기 설명한 바와 같은 회동 바디(420)의 구성에 따라서, 조사광 L1 은 상기 샘플에 대해 대각선 상방향에서 하방향으로 입사될 수 있다. 상기 조사광 L1 의 입사 각도는 상기 회동 빔(440)과 하우징(450) 사이의 사이각에 따라서 정해질 수 있으며, 바람직하게는 45° 일 수 있으나, 이에 반드시 한정하는 것은 아니다.Next, as shown in FIG. 9, when power is applied to the light source unit 430, the irradiation light L1 is generated by the light source unit 430. According to the configuration of the rotating body 420 as described above, the irradiation light L1 may be incident in the downward direction from the diagonal upward direction with respect to the sample. An incident angle of the irradiation light L1 may be determined according to an angle between the pivot beam 440 and the housing 450, and preferably 45 °, but is not limited thereto.
상기 조사광 L1 이 상기 샘플에 조사되면, 상기 샘플에 포함된 액상의 검사 시료가 조사광 L1 에 의해서 여기되어 여기광 L2, L3 을 생성하게 된다. 상기 여기광L2, L3 은 상기 렌즈부(300)를 통과하여 확산되게 된다.When the irradiation light L1 is irradiated to the sample, the liquid test sample contained in the sample is excited by the irradiation light L1 to generate excitation light L2 and L3. The excitation light L2 and L3 are diffused through the lens unit 300.
이때, 상기와 같이 소정의 슬릿(610)을 갖는 광 통과부(600)가 상기 렌즈부(300)의 후방에 위치함으로써, 소정의 입사각을 갖는 여기광 L2 만이 선택적으로 후방의 분석 장치(800)에 입사하게 된다. 도 8 에 의하면, 상기 시료 홀더(400), 샘플, 렌즈부(300), 광 통과부(600)가 일 직선상에 일렬로 배치되므로, 상기 일직선상의 여기광 L2 만이 분석 장치(800)에 입사하게 된다. 따라서, 검사에 불필요한 조사광, 반사광 등이 분석 장치(800)로 입사하는 것을 방지하여 정확한 검사가 이루어질 수 있다. 이때, 상기와 같이, 샘플의 투과부, 액상 용제 및 렌즈부(300)의 굴절율은 동일하며, 투과부와 렌즈부(300)가 밀착하므로 여기광이 불필요하게 굴절되지 아니하고 일 직선상의 여기광이 분석 장치(800) 내에 입사할 수 있게 된다.At this time, since the light passing part 600 having the predetermined slit 610 is positioned behind the lens part 300, only the excitation light L2 having a predetermined incident angle is selectively disposed at the rear of the analyzer 800. Will be entered. According to FIG. 8, since the sample holder 400, the sample, the lens unit 300, and the light passing part 600 are arranged in a line on a straight line, only the linear excitation light L2 is incident on the analyzer 800. Done. Therefore, it is possible to prevent the irradiated light, reflected light, etc. unnecessary for the inspection to enter the analysis device 800, the accurate inspection can be made. At this time, as described above, the refractive indexes of the transmission part, the liquid solvent and the lens part 300 of the sample are the same, and since the transmission part and the lens part 300 are in close contact with each other, the excitation light is not unnecessarily refracted, and the linear excitation light is analyzed. It is possible to enter into the 800.
이어서, 소정의 조작 버튼을 조작하면, 상기 동력부(100)가 회전력을 발생시켜서, 도 4 의 화살표 T 와 같이 상기 회전 스테이지(200)가 회전하게 된다. 회전 스테이지(200)가 회전함에 따라서, 상기 샘플(P) 및 렌즈부(300)의 지향각이 가변하며, 도 10 의 화살표 S 와 같이 렌즈부(300)의 배향이 바뀌게 된다. 따라서 다른 입사각을 갖는 여기광 L3 이 상기 샘플, 렌즈부(300), 광 통과부(600)를 잇는 일 직선상에 위치하여 분석 장치(800)에 입사할 수 있다. 이때, 여기광 L2 는 분석 장치(800)에 입사하지 아니하며, 상기 설명한 바와 같이, 케이싱(20) 내부가 흑색으로 구성됨에 따라서, 반사되지 않고 흡수되어 노이즈가 제거될 수 있다.Subsequently, when the predetermined operation button is operated, the power unit 100 generates a rotational force, and the rotation stage 200 rotates as shown by arrow T in FIG. 4. As the rotation stage 200 rotates, the orientation angles of the sample P and the lens unit 300 vary, and the orientation of the lens unit 300 is changed as shown by arrow S of FIG. 10. Therefore, the excitation light L3 having a different angle of incidence may be positioned on a straight line connecting the sample, the lens unit 300, and the light passing unit 600 to enter the analysis apparatus 800. At this time, the excitation light L2 does not enter the analysis device 800, and as described above, as the inside of the casing 20 is black, the excitation light L2 may be absorbed without being reflected and noise may be removed.
본 발명에 따라서, 샘플의 검사가 매우 간단하면서 신뢰성 있게 이루어질 수 있다. 특히, 렌즈부(300)에 대해 샘플이 밀착하고, 샘플에서 생성된 여기광이 렌즈부(300)에 의해서 넓게 확산되며, 상기 확산된 여기광을 특정 각도에 따라서 선택적으로 포착하여 분석 가능함에 따라서, 정확한 분석이 이루어질 수 있다.According to the invention, the inspection of the sample can be made very simple and reliable. In particular, the sample is in close contact with the lens unit 300, the excitation light generated in the sample is widely spread by the lens unit 300, and the diffused excitation light can be selectively captured and analyzed according to a specific angle. Accurate analysis can be achieved.
또한, 장치 전체가 케이싱(20)에 의해 커버되므로, 광원부(430)에서 조사되는 조사광, 및 여기광이 외부로 유출되지 아니하여 사용자가 유해광에 노출되는 것을 방지할 수 있다. 특히, 광원부(430)에서 조사되는 광이 UV 등의 단파장 광일 경우, 인체에 유해할 수 있으나, 본 발명에서는 사용 과정에서 케이싱에 의해서 광이 노출되지 아니하므로 안전한 검사를 수행할 수 있다.In addition, since the entire apparatus is covered by the casing 20, the irradiation light and the excitation light irradiated from the light source unit 430 do not leak to the outside, thereby preventing the user from being exposed to harmful light. In particular, when the light emitted from the light source unit 430 is short wavelength light such as UV, it may be harmful to the human body, but in the present invention, since the light is not exposed by the casing in the use process, a safe inspection may be performed.
도 11 은 본 발명의 일 실시예에 따른 샘플 검사 방식을 나타낸 도면이며, 도 12 는 검사 결과의 일 예를 나타낸 도면이다.11 is a view showing a sample inspection method according to an embodiment of the present invention, Figure 12 is a view showing an example of the inspection results.
도 11 과 같이, 본 발명에 따라서, 렌즈부(300) 및 샘플(P)이 화살표 R 과 같이 회전하여 특정 각도의 광이 선택적으로 분석 장치(800)에 입사될 수 있다. 따라서, 각도에 따른 광 패턴이 획득되어 검사에 활용될 수 있다. 이는, 마치 렌즈부(300)의 전 회전 각도 범위에 걸쳐서 분석 장치(800)가 배치된 것과 같은 효과를 갖는다고 할 수 있다.As shown in FIG. 11, according to the present invention, the lens unit 300 and the sample P may be rotated as shown by the arrow R so that light of a specific angle may be selectively incident on the analysis device 800. Therefore, the light pattern according to the angle can be obtained and utilized in the inspection. This can be said to have the same effect as that the analysis device 800 is disposed over the entire rotation angle range of the lens unit 300.
예컨대, 특정 각도에서 분석 장치에 입사되는 여기광을 분석하면, 입사된 여기광의 세기에 따라서 도 12 (a) 와 같은 결과가 도출될 수 있다. 즉, 특정 각도에서 입사되는 여기광은 다양한 파장을 갖되, 상기 입사광의 세기 또한 함께 나타날 수 있다. 상기 입사광을 분석하여 검사 결과를 도출할 수 있으며, 예컨대 520 nm 의 파장을 갖는 입사광을 기준으로 검사 결과를 분석하면, 도 12(b)와 같이 검사 결과가 나타날 수 있다. For example, analyzing the excitation light incident on the analyzer at a specific angle may result in a result as shown in FIG. 12A according to the intensity of the incident excitation light. That is, the excitation light incident at a specific angle may have various wavelengths, and the intensity of the incident light may also appear together. The inspection result may be derived by analyzing the incident light. For example, when the inspection result is analyzed based on the incident light having a wavelength of 520 nm, the inspection result may appear as shown in FIG.
이상에서는 바람직한 실시예에 대하여 도시하고 설명하였지만, 본 발명은 상술한 특정의 실시예에 한정되지 아니하며, 청구범위에서 청구하는 본 발명의 요지를 벗어남이 없이 당해 발명이 속하는 기술분야에서 통상의 지식을 가진 자에 의해 다양한 변형실시가 가능한 것은 물론이고, 이러한 변형실시들은 본 발명의 기술적 사상이나 전망으로부터 개별적으로 이해되어서는 안될 것이다.Although the preferred embodiments have been illustrated and described above, the invention is not limited to the specific embodiments described above, and does not depart from the gist of the invention as claimed in the claims. Various modifications may be made by the person having the above, and these modifications should not be individually understood from the technical spirit or the prospect of the present invention.

Claims (16)

  1. 회전력을 제공하는 동력부(100);Power unit 100 to provide a rotational force;
    소정의 면적을 갖고 상기 동력부(100)와 연결되어 Z 축 방향으로 연장되는 소정의 회전 중심축을 중심으로 XY 평면 상에서 회전 가능하게 구성되는 회전 스테이지(200);A rotation stage 200 having a predetermined area and configured to be rotatable on an XY plane about a predetermined rotation center axis extending in the Z axis direction connected to the power unit 100;
    상기 회전 스테이지(200) 상에 배치되어 상기 회전 중심축을 중심으로 상기 회전 스테이지(200)와 함께 회전 가능하게 구성되되, 상기 회전 스테이지(200) 상의 일 측에 배치되는 렌즈부(300);A lens unit 300 disposed on the rotation stage 200 and configured to be rotatable with the rotation stage 200 about the rotation center axis, and disposed on one side of the rotation stage 200;
    상기 회전 스테이지(200) 상에 배치되어 상기 회전 중심축을 중심으로 상기 회전 스테이지(200)와 함께 회전 가능하게 구성되되, 상기 회전 중심축을 사이에 두고 상기 렌즈부(300)의 반대측에 배치되며 상기 회전 스테이지(200)에 대해서 회동 가능하게 연결되고 시료를 고정시키는 시료 홀더(400); 및 Disposed on the rotation stage 200 and configured to be rotatable with the rotation stage 200 about the rotation center axis, disposed on an opposite side of the lens unit 300 with the rotation center axis therebetween and being rotated. A sample holder 400 rotatably connected to the stage 200 and fixing the sample; And
    상기 회전 스테이지(200) 상에 배치되며 상기 시료 홀더(400)의 각도를 위치 고정시킬 수 있게 구성된 각도 고정부(500);를 포함하며,And an angle fixing part 500 disposed on the rotating stage 200 and configured to fix the angle of the sample holder 400.
    상기 렌즈부(300)는, The lens unit 300,
    상기 시료 홀더(400)와 마주보는 측에 소정의 평면으로 구성되는 입사면(310)을 가지며, It has an incident surface 310 composed of a predetermined plane on the side facing the sample holder 400,
    상기 시료 홀더(400)는,The sample holder 400,
    Y 축 방향으로 연장되며 상기 회전 스테이지(200)에 연결되는 회동 축(410),A rotation shaft 410 extending in the Y-axis direction and connected to the rotation stage 200;
    상기 회동 축(410)을 통해 일 단이 상기 회전 스테이지(200)에 연결되되 상기 회동 축(410)을 중심으로 XZ 평면 상에서 회동 가능하게 연결되는 회동 바디(420), 및Rotating body 420, one end of which is connected to the rotary stage 200 through the rotating shaft 410, the pivot body 420 is pivotally connected on the XZ plane around the rotating shaft 410, and
    상기 회동 바디(420) 내에 배치되는 광원부(430)를 포함하고,It includes a light source unit 430 disposed in the rotation body 420,
    상기 회동 바디(420)는 상기 렌즈부(300)와 마주보는 위치에 소정의 샘플이 놓일 수 있는 탑재면(460)을 갖되, 상기 회동 바디(420)가 상기 회동 축(410)을 중심으로 회동함에 따라서 상기 탑재면(460)과 상기 입사면(310) 사이의 사이각이 가변하도록 구성되며,The rotating body 420 has a mounting surface 460 on which a predetermined sample can be placed at a position facing the lens unit 300, and the rotating body 420 rotates about the rotating shaft 410. As the angle between the mounting surface 460 and the incident surface 310 is configured to vary,
    상기 각도 고정부(500)는 상기 시료 홀더(400)를 위치 고정시켜서 상기 탑재면(460)과 상기 입사면(310) 사이의 사이각이 소정 각도를 유지하도록 하고,The angle fixing part 500 fixes the sample holder 400 so that the angle between the mounting surface 460 and the incident surface 310 maintains a predetermined angle.
    상기 탑재면(460)과 상기 입사면(310) 사이의 사이각이 소정 각도로 고정된 상태에서 상기 광원부(430)에서 생성된 조사광이 상기 샘플에 조사되면, 상기 샘플이 여기되어 생성된 여기광이 상기 렌즈부(300)를 통과하여 방출되는 샘플 검사 장치(1).When the irradiation light generated by the light source unit 430 is irradiated onto the sample while the angle between the mounting surface 460 and the incident surface 310 is fixed at a predetermined angle, the sample is excited and generated. A sample inspection device (1) in which light is emitted through the lens unit (300).
  2. 제1항에 있어서,The method of claim 1,
    상기 렌즈부(300)는,The lens unit 300,
    Z 축 방향으로 소정의 두께를 갖고,Has a predetermined thickness in the Z axis direction,
    X 축 방향 전면에 상기 입사면(310)이 직립하게 형성되며,The incident surface 310 is formed upright on the entire X-axis direction,
    X 축 방향 후면에 반원형 곡면이 형성되는 반원형 렌즈로 구성되는 샘플 검사 장치(1).A sample inspection device (1) consisting of a semicircular lens having a semicircular curved surface formed on a rear surface in the X axis direction.
  3. 제1항에 있어서,The method of claim 1,
    상기 회동 바디(420)는,The rotating body 420,
    일 단이 상기 회동 축(410)에 연결되는 회동 빔(440), A rotating beam 440 having one end connected to the rotating shaft 410,
    상기 회동 빔(440)의 타단에 연결되되 상기 광원부(430)가 내부에 실장되도록 내부에 공간을 갖는 하우징(450), 및A housing 450 connected to the other end of the pivot beam 440 and having a space therein such that the light source unit 430 is mounted therein; and
    상기 탑재면(460)은 상기 하우징(450)의 X 축 방향 후방에 상기 렌즈부(300)와 마주보는 위치에 형성되는 샘플 검사 장치(1).The mounting surface (460) is a sample inspection device (1) is formed in a position facing the lens portion 300 in the rear of the X-axis direction of the housing (450).
  4. 제3항에 있어서,The method of claim 3,
    상기 회동 빔(440)이 직립하면 상기 탑재면(460)과 상기 입사면(310) 사이의 사이각이 0° 가 되며 상기 탑재면(460) 상에 안착된 샘플과 상기 렌즈부(300)의 상기 입사면(310)이 서로 밀착하게 구성되는 샘플 검사 장치(1).When the rotating beam 440 is upright, the angle between the mounting surface 460 and the incident surface 310 becomes 0 °, and the sample seated on the mounting surface 460 and the lens unit 300 are positioned. A sample inspection device (1) wherein the incident surface 310 is in close contact with each other.
  5. 제4항에 있어서,The method of claim 4, wherein
    상기 회동 빔(440)과 상기 하우징(450)은 서로 소정의 사이각을 갖고 절곡되어,The rotating beam 440 and the housing 450 are bent at a predetermined angle to each other,
    상기 광원부(430)는 상기 회동 빔(440)이 직립한 상태에서 대각선 하방향으로 상기 샘플에 대해 광을 조사하는 샘플 검사 장치(1).The light source unit (430) is a sample inspection device (1) for irradiating light to the sample in a diagonal downward direction in the state in which the rotating beam (440) upright.
  6. 제3항에 있어서,The method of claim 3,
    상기 회동 바디(420)는,The rotating body 420,
    상기 탑재면(460) 상에 놓인 샘플을 위치 고정시키도록 하는 고정 수단(470)을 포함하며,A fixing means 470 for positioning the sample lying on the mounting surface 460,
    상기 고정 수단(470)은 상기 탑재면(460)의 상부에 배치되되,The fixing means 470 is disposed on the mounting surface 460,
    Y 축 방향으로 연장되는 회동 소축(472),A rotating shaft 472 extending in the Y-axis direction,
    상기 회동 소축(472)을 중심으로 XZ 평면 상에서 회동하는 회동 고정핀(474)을 포함하여,Including a rotation fixing pin 474 that rotates on the XZ plane around the rotation axis (472),
    상기 탑재면(460) 상에 상기 샘플이 놓이면 상기 회동 고정핀(474)이 상기 샘플의 상단을 일부 덮어 위치 고정시키게 구성되는 샘플 검사 장치(1).And the pivot fixing pin (474) partially covers the top of the sample to fix the position when the sample is placed on the mounting surface (460).
  7. 제1항에 있어서,The method of claim 1,
    상기 각도 고정부(500)는 X 축 방향으로 상기 시료 홀더(400)의 전방에 배치되며,The angle fixing part 500 is disposed in front of the sample holder 400 in the X axis direction,
    상기 회전 스테이지(200) 상에 고정되는 베이스 지그(510), 및A base jig 510 fixed to the rotation stage 200, and
    상기 베이스 지그(510)에 대해서 회동 가능하게 구성되어, 상기 시료 홀더(400)를 위치 고정시키는 회동 지그(520)를 포함하는 샘플 검사 장치(1).A sample inspection device (1) comprising a pivoting jig (520) configured to be rotatable with respect to the base jig (510) to fix the position of the sample holder (400).
  8. 제7항에 있어서,The method of claim 7, wherein
    상기 회동 지그(520)는,The rotation jig 520,
    Y 축 방향으로 상기 베이스의 양 측에 배치되며 X 축 방향으로 연장되는 지지축(514)을 중심으로 회동하며,Rotating around a support shaft 514 disposed on both sides of the base in the Y-axis direction and extending in the X-axis direction,
    상기 시료 홀더(400)가 직립한 상태에서 상기 회동 지그(520)가 상기 지지축(514)을 중심으로 상방향으로 회동하면 상기 회동 지그(520)가 상기 시료 홀더(400)의 X 축 방향 전면을 지지하여 상기 시료 홀더(400)를 위치 고정시키게 구성되는 샘플 검사 장치(1).When the pivoting jig 520 rotates upward with respect to the support shaft 514 while the sample holder 400 is upright, the pivoting jig 520 is front in the X-axis direction of the sample holder 400. A sample inspection device (1) configured to support and hold the sample holder (400) in position.
  9. 제1항에 있어서,The method of claim 1,
    상기 회전 스테이지(200)는,The rotation stage 200,
    상기 동력부(100)와 연결되는 베이스 스테이지(210),A base stage 210 connected to the power unit 100,
    상기 렌즈부(300)의 상면을 커버하는 상부 커버(220), 및An upper cover 220 covering an upper surface of the lens unit 300, and
    Y 축 방향으로 상기 시료 홀더(400)의 양 측에 마련되어 상기 베이스 스테이지(210) 상에 직립하고 상기 베이스 스테이지(210)와 상기 상부 커버(220)를 연결하며 후면이 상기 렌즈부(300)의 입사면(310)과 맞닿는 연결부(230)를 갖는 샘플 검사 장치(1).It is provided on both sides of the sample holder 400 in the Y-axis direction and upright on the base stage 210 and connects the base stage 210 and the upper cover 220, the rear side of the lens unit 300 A sample inspection device (1) having a connection portion (230) in contact with the incident surface (310).
  10. 제9항에 있어서,The method of claim 9,
    상기 베이스 스테이지(210)는 원형 형상을 갖되,The base stage 210 has a circular shape,
    상기 베이스 스테이지(210)의 상면은, 서로 상이한 높이를 갖는 반원 형상의 렌즈면(214), 및 베이스면(112)으로 구분되며, 상기 렌즈면(214)은 상기 베이스면(112)보다 낮은 높이를 가져서 상기 렌즈면(214)과 상기 베이스면(112) 사이에 단차면(216)이 형성되며,The upper surface of the base stage 210 is divided into a semicircular lens surface 214 and a base surface 112 having different heights, and the lens surface 214 is lower than the base surface 112. Has a stepped surface 216 formed between the lens surface 214 and the base surface 112,
    상기 렌즈면(214) 상에는 상기 렌즈부(300)가 배치되고,The lens unit 300 is disposed on the lens surface 214,
    상기 베이스면(112) 상에는 상기 광조사부, 및 각도 고정부(500)가 배치되는 샘플 검사 장치(1).And a light irradiation part and an angle fixing part (500) are arranged on the base surface (112).
  11. 제10항에 있어서,The method of claim 10,
    상기 단차면(216)과 상기 렌즈부(300)의 입사면(310)은 서로 동일면상에 위치하여 일 면을 구성하는 샘플 검사 장치(1).The sample inspection device (1), wherein the stepped surface (216) and the incident surface (310) of the lens unit (300) are positioned on the same surface and constitute one surface.
  12. 제10항에 있어서,The method of claim 10,
    상기 베이스면(112) 상에는,On the base surface 112,
    상기 각도 고정부(500)의 외측에 형성되며 소정의 깊이를 가져서 소정의 액상 물질이 내부에 충진되도록 하는 유체 홈이 형성되는 샘플 검사 장치(1).A sample inspection device (1) is formed on the outside of the angle fixing part 500 is formed with a fluid groove having a predetermined depth to fill a predetermined liquid material therein.
  13. 제1항에 있어서,The method of claim 1,
    상기 샘플은,The sample is
    소정의 검사 시료가 놓이도록 소정의 면적을 가지며 광투과성을 갖는 재질로 구성되는 투과부를 갖되,It has a transmissive portion made of a material having a predetermined area and a light transmissive so that a predetermined inspection sample is placed,
    상기 투과부의 굴절율은 상기 렌즈부(300)의 굴절율과 동일한 샘플 검사 장치(1).The sample inspection apparatus (1) of which the refractive index of the said transmission part is the same as the refractive index of the said lens part (300).
  14. 제13항에 있어서,The method of claim 13,
    상기 샘플은,The sample is
    상기 투과부 상에 놓인 검사 시료 상에 도포되어 상기 검사 시료 및 투과부와 상기 렌즈부(300)의 입사면(310) 사이를 밀착시키는 액상 용제를 포함하되,It includes a liquid solvent that is applied on the test sample placed on the transmissive portion and in close contact between the test sample and the transmissive portion and the incident surface 310 of the lens unit 300,
    상기 액상 용제의 굴절율은 상기 렌즈부(300)의 굴절율과 동일한 샘플 검사 장치(1). The sample inspection apparatus (1) of which the refractive index of the said liquid solvent is the same as the refractive index of the said lens part 300.
  15. 제1항에 있어서,The method of claim 1,
    X 축 방향으로 상기 렌즈부(300)의 후방에 배치되며 상기 렌즈부(300)를 통해 투과된 광이 통과할 수 있도록 소정의 슬릿(610)을 갖는 광 통과부(600); 및A light passing part 600 disposed behind the lens part 300 in an X axis direction and having a predetermined slit 610 to allow light transmitted through the lens part 300 to pass therethrough; And
    상기 통과부를 통과한 광이 입사되어 분석을 수행하는 분석 장치(800); 를 더 포함하는 샘플 검사 장치(1).An analyzer 800 configured to perform analysis by incident light passing through the passage part; Sample inspection device (1) further comprising.
  16. 제1항에 있어서,The method of claim 1,
    상기 회전 스테이지(200)의 회전 각도, 및 초기 각도를 조정할 수 있는 각도 조절부(700);를 더 포함하는 샘플 검사 장치(1).Sample inspection apparatus (1) further comprises; an angle adjusting unit (700) for adjusting the rotation angle, and the initial angle of the rotation stage (200).
PCT/KR2016/004535 2016-04-21 2016-04-29 Sample inspection device WO2017183755A1 (en)

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