Classifications

• • H—ELECTRICITY
  • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • H02K—DYNAMO-ELECTRIC MACHINES
  • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
  • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
  • H02K11/21—Devices for sensing speed or position, or actuated thereby
  • H02K11/22—Optical devices
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
  • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
  • B25J11/00—Manipulators not otherwise provided for
  • B25J11/0095—Manipulators transporting wafers
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
  • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
  • B25J9/00—Programme-controlled manipulators
  • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
  • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
  • B25J9/041—Cylindrical coordinate type
  • B25J9/042—Cylindrical coordinate type comprising an articulated arm
  • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
  • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
  • G01D11/24—Housings ; Casings for instruments
  • G01D11/245—Housings for sensors
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
  • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
  • G01D11/24—Housings ; Casings for instruments
  • G01D11/26—Windows; Cover glasses; Sealings therefor
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
  • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
  • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
• • H—ELECTRICITY
  • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • H02K—DYNAMO-ELECTRIC MACHINES
  • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
  • H02K7/10—Structural association with clutches, brakes, gears, pulleys or mechanical starters
  • H02K7/1004—Structural association with clutches, brakes, gears, pulleys or mechanical starters with pulleys
• • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
  • Y10S901/00—Robots
  • Y10S901/19—Drive system for arm
  • Y10S901/23—Electric motor

Definitions

• the exemplary and non-limiting embodiments relate generally to position sensing and, more particularly, to a robot drive position sensor having an optical encoder.
• an example embodiment is provided in an apparatus comprising a frame, where the frame is configured to be attached to a housing of a motor assembly proximate an aperture which extends through the housing; an optical sensor connected to the frame, where the optical sensor comprises a camera; and an environment separation barrier configured to be connected to the housing at the aperture, where the environment separation barrier is at least partially transparent and located relative to the camera to allow the camera to view an image inside the housing through the environment separation barrier and the aperture.
• an example method comprises providing a read-head comprising a frame and a camera connected to the frame; connecting the read- head to a housing of a motor assembly, where the frame of the read-head is connected to the housing proximate an aperture which extends through the housing; and locating an environment separation barrier at the aperture to separate a first environmental area inside the housing from a second environmental area in which the camera is located, where the environment separation barrier is at least partially transparent and located relative to the camera to allow the camera to view an image inside the housing through the environment separation barrier and the aperture .
• an example method comprises illuminating a reference member located inside a housing of a motor assembly by a light emitter of a read-head, where the read-head is located at least partially outside of the housing; viewing an image of the reference member by a camera of the read-head, where the camera is located at least partially outside of the housing, where the image is viewed by the camera though an aperture in the housing and through a transparent environment separation barrier located at the aperture, where the transparent environment separation barrier seals a first environment inside the housing from a second environment in which the sensor is located, and where the camera is located outside of the first environment and the transparent .environment separation barrier allows the camera to view the image coming from inside the housing while the camera is outside of the first environment.
• FIG. 1 is a schematic view of a substrate processing apparatus
• FIG. 2 is a diagram illustrating some of the components of the apparatus shown in Fig. 1;
• FIG. 3 is a schematic diagram illustrating some of the components shown in Figs. 1-2;
• FIG. 3A is a diagram illustrating another example embodiment of the components shown in Figs. 1-2;
• Fig. 4 is a schematic diagram illustrating some of the components shown in Fig. 3;
• Fig. 4A is a schematic diagram illustrating an example of the read-head shown in Fig. 4;
• Fig. 4B is a schematic diagram illustrating an example of multiple ones of the read-head shown in Fig. 4;
• FIG. 5 is a diagram illustrating an example type of connection arrangement in the sensor shown in Figs. 3-4;
• Fig. 6 is a diagram illustrating an example type of connection of the sensor to the housing shown in Figs. 3-4;
• Fig. 7 is a diagram similar to Fig. 4 showing another example embodiment
• Fig. 8 is a diagram similar to Fig. 4 showing another example embodiment
• FIG. 9 is a diagram similar to Fig. 4 showing another example embodiment
• Fig. 10 is a diagram similar to Fig. 4 showing another example embodiment
• FIG. 11 is a diagram similar to Fig. 4 showing another example embodiment
• Fig. 12 is a diagram similar to Fig. 4 showing another example embodiment
• Fig. 13 is a diagram similar to Fig. 4 showing another example embodiment
• Fig. 14 is a diagram similar to Fig. 4 showing another example embodiment
• Fig. 15 is a diagram similar to Fig. 4 showing another example embodiment.
• FIG. 1 there is shown a schematic top plan view of an example substrate processing apparatus 10 having a substrate transport apparatus 12.
• a substrate processing apparatus 10 having a substrate transport apparatus 12.
• the present invention will be described with reference to the embodiments shown in the drawings, it should be understood that the present invention may be embodied in many forms, of alternative embodiments. In addition, any suitable size, shape or type of materials or elements could be used.
• the substrate processing apparatus 10 includes multiple substrate processing chambers 14 and substrate cassette elevators 16 connected to a vacuum chamber 15.
• the transport apparatus 12 is located, at least partially, in the chamber 15 and is adapted to transport planar substrates, such as semiconductor wafers or flat panel displays, between and/or among the chambers 14 and elevators 16.
• the transport apparatus 12 could be used in any suitable type of substrate processing apparatus.
• a conventional vacuum environment robotic manipulator typically includes a drive unit which houses all active components of the robotic manipulator, e.g., actuators and sensors, and one or more arms, as discussed above, driven by the drive unit.
• the arm(s) are typically passive mechanisms, i.e., they do not include any active components, such, as actuators and sensors. This is primarily due to difficulties with out-gassing, power distribution and heat removal in vacuum environments .
• the substrate transport apparatus 12 (or vacuum-compatible robot system) includes a drive 18 and an arm 20.
• the drive 18 has two rotary axes.
• the arm 20 is coupled to the drive 18.
• the arm 20 includes a first link 22, a second link 24 and an end-effector 26.
• the first link 22 is attached directly to a first rotary axis of the drive 18.
• the second link 24 is coupled to the first link 22 through a first rotary joint 28.
• the end-effector 26 is coupled to the second link 24 through a second rotary joint 30.
• arm 20 has three rotary axes 90, 92, 94 formed at the drive 18 and the joints 28, 30.
• the second link 24 is driven through a belt/band drive which may include a first pulley, attached to a second rotary axis of the drive 18, a first belt/band and a second pulley, attached to the second link 24 of the arm 20.
• the end- effector 26 is constrained to point approximately in a radial direction with respect to the drive 18 through another belt/band arrangement, which may include a third pulley, pivotably coupled to the first link 22, a second belt/band and a fourth pulley, attached to the end- effector 26.
• any suitable drive, actuator, sensor or otherwise may provide features as disclosed herein; in any combination and/or as disclosed in U.S. Patent No. 9,202,733 and U.S. Patent No.
• Substrate transport apparatus 12 has a controller 54, the drive unit 18 and the arm 20, and is configured to transport substrate S. Controller 54 may have at least one processor 32, at least one memory 34 and software or computer code 36' configured to control the drive 18 and process input from the sensors. Arm 20 is shown as a SCARA type arm and driven by drive unit 18, but in alternate embodiments any suitable arm could be provided.
• substrate transport apparatus 12 is described with respect to a two link arm, any suitable number of links may be provided. Further, any suitable number of arms may be provided. Further, any combination of rotary and/or linear axis may be provided on any suitable arm.
• the drive 18 forms a robot motor assembly.
• the robot motor assembly comprising stators and rotors configured to drive shafts connected to the first link 22 and one of the pulleys in the first link.
• the drive 18 comprises a housing 38 which separates the environmental area 40 inside the drive 18 and inside the chamber 15 from the environmental area 42 outside the drive and the chamber.
• a position encoder reference member or disk is connected to each one of the rotors or shafts of the drive 18.
• Fig. 3 shows an example of this where a position encoder reference member disk 44 is shown attached to the shaft/rotor 46.
• the housing 38 of the motor assembly has an aperture 48 therethrough. The aperture 48 is aligned with the position encoder reference member disk 44.
• a position read-head 50 Attached to the housing 38 is a position read-head 50.
• the position read-head 50 is located at the aperture 48 through the housing 38 in order for the read-head 50 to sense the location or position of the position encoder reference member disk 44 as the disk 44 is rotated when the rotor/shaft 46 rotates. Output from the read-head 50 is supplied to the controller 54.
• Fig. 3A diagrammatically shows a direct- drive module of a robot, such as the example robot depicted in Fig. 1 in U.S. patent application publication No. 2014/0077637, showing the shaft 46a, a stator and rotor of a motor 47, a direct drive module housing 38a, an encoder track or reference member 44a, bearings 49 and an encoder sensor 60a.
• the position read-head 50 generally comprises a frame 56, a light emitter 58, an optical sensor 60, an environment separation barrier 62 and electronic circuitry 59.
• the sensor 60 is a plurality of optical sensors arranged as an array for viewing at least one image
• the light emitter 58 comprises a plurality of light emitters.
• FIG. 4A shows an example of this.
• the apparatus may comprises multiple read-heads 50", 50' ' ' having different light emitter and optical sensor configurations, but attached to the housing 38 to read the same reference member 44.
• the first connection 64 is provided between the sensor 60 and the frame 56 and a second connection 66 is provided between the separation barrier 62 and the frame 56.
• the sensor 60 and the separation barrier 62 may be a unitary assembly with the sensor frame with a single type of connection 68 to the housing 38.
• the connections 64, 66, 68 may be stationarily fixed or adjustable. In the example shown in Fig. 4, the connection 64 is stationarily fixed, the connection 66 is a resiliently deflectable connection, and the connection 68 is adjustable .
• the environment separation barrier 62 is a transparent window and the optical sensor 60 is a camera.
• a holder 70 is provided to hold the transparent window 62.
• the holder 70 is connected by the connection 66 to the frame 56.
• the holder 70 is biased by the connection 66 in the direction of the aperture 48 to press the transparent window 62 against the seal 72.
• the seal 72 and the window 62 seal off the aperture 48 forming an optically transparent barrier between the two environmental areas 40, 42 at the aperture 48. Because the barrier 62 is optically transparent, the camera 60 is still able to view an image from the reference member 44.
• a position encoder may be incorporated into a robot direct-drive module, such as drive 18 or one of a plurality of drive modules which are assembled to form the drive 18.
• a position encoder track such as on the disk 44, may be coupled to the driven part 46 of the direct-drive module, and a position read-head may e provided on the outside of the housing 38 of the direct-drive module, for example, as shown in the example embodiments shown in the drawings .
• the housing 38 of the direct- drive module may feature an aperture ⁇ slot) 48 located so that it provides an optical path (view) of the position encoder track from the outside of the housing of the direct-drive module.
• the aperture 48 may feature a separation barrier 62 to separate the vacuum or other non-atmospheric environment inside of the housing of the direct-drive module from the environment outside of the housing of the direct-drive module.
• the separation barrier 62 may be made of a substantially transparent material, such as glass or acrylic for example.
• the separation barrier 62 may be sealed to the housing of the direct-drive module, for example, using an 0-ring or a bonded joint, for example, or in any other suitable manner .
• the encoder track on the reference member 44 may include features that may be utilized to sense location of the encoder track.
• the features may form an incremental track and, in some case, the incremental track may be complemented by an absolute track.
• the features may form a pattern that may be decoded using image processing techniques.
• a read-head 50 may be provided on the outside of the direct-drive module so that it may sense location of the encoder track through the aperture in the housing of the direct-drive module.
• the read-head may be attached to the housing of the direct-drive module in a substantially fixed manner or it may be coupled to the housing of the direct-drive module in a movable manner to allow for adjustment of the read- head with respect to the encoder track.
• the adjustment may include the distance between the read-head and the encoder track as well as orientation (for instance, pitch, roll and yaw) of the read-head with respect to the encoder track.
• the read-head may be held in the proximity of the aperture in any suitable manner.
• the read-head may include an enclosure 56 and, an optical system (including sensor 60) .
• the read-head may further include other components, such as electronics, to control the read- head, process the data and facilitate communication.
• the optical system may be configured to detect the position of the encoder track with respect to the read-head.
• the optical system may include one or more light emitters, one or more light receiver and other optical components, such as lenses, mirrors and masks.
• the light emitter (s) and receiver (s) may be arranged to detect features on the encoder track. For instance, the receiver (s) may detect the features based on reflection of the light produced by the emitter (s) .
• the optical system may include one or more light source (s), one or more digital camera (s) and other optical components, such as lenses, mirrors and masks.
• the light source (s) may be arranged to provide illumination of the encoder track in the field of view of the digital camera (s) .
• the digital camera (s) may be arranged to take periodically pictures ⁇ images) of the encoder track.
• the pictures may be processed by the encoder read-head and/or externally to the encoder read- head, such as at the controller 54 for example, to determine the location of the encoder track with respect to the encoder read-head.
• the housing 38 of the direct- drive module may feature an aperture (slot) 48 located so that it provides an optical path (view) of the position encoder track 44 from the outside of the housing of the direct-drive module.
• a read-head 50a may be provided on the outside of the direct-drive module so that it can sense location of the encoder track 44 through the aperture in the housing of the direct-drive module.
• the encoder track 44 may include features that may be utilized to sense location of the encoder track.
• the features may form an incremental track and, in some case, the incremental track may be complemented by an absolute track.
• the features may form a pattern that may be decoded using image processing techniques.
• the read-head 50a may include an enclosure 56a, a window 62 and an optical system including 58, 60.
• the read-head 50a may further include other components, such as electronics, to control the read-head, process the data and facilitate communication.
• the window 62 may be located in the enclosure of the read-head to provide an optical path (view) between the optical system 58, 60 and the encoder track 44 through the aperture 48 in the housing 38 of the direct-drive module.
• the window 62 may be made of a substantially transparent material, such as glass or acrylic.
• the optical system may be configured to detect the position of the encoder track 44 with respect to the read-head.
• the optical system may include one or more light emitter(s), one or more light receiver (s) and other optical components, such as lenses, mirrors and masks.
• the light emitter (s) and receiver (s) may be arranged to detect features on the encoder track. For instance, the receiver (s) may detect the features based on reflection of the light produced by the emitter (s).
• the light source (s) may be arranged to provide illumination of the encoder track in the field of view of the digital camera(s).
• the digital camera(s) 60 may be arranged to take periodically pictures (images) of the encoder track. The pictures may be processed by the encoder read-head to determine the location of the encoder track with respect to the encoder read-head.
• the read-head 50a may be attached to the housing 38 of the direct-drive module so that the window 62 of the read-head is sealed with respect to the housing 38 of the direct-drive module around the aperture 48 of the direct drive module, thus separating the vacuum or other non-atmospheric environment inside of the housing of the direct-drive module from the environment outside of the direct-drive module. As a result, the components inside of the enclosure of the read-head 50a are not exposed to the vacuum or other non-atmospheric environment inside of the housing of the direct-drive module .
• the read-head may be attached to the housing of the direct-drive module in a substantially fixed manner, and the window 62 may be sealed to the housing 38 of the direct-drive module using an 0-ring or any other suitable seal. Additional examples of seal configurations are depicted diagrammatically in Figs. 8, 9 (seal compressed in the direction normal to the direction of the installation of the read-head) and 10 (0-ring compressed along the direction of the installation of the read-head) .
• Fig. 8 shows housing 38b with aperture 48b, and the read-head 50b having frame 56b, seal 72b, window 62b and optical components including light emitter 58 and sensor 60.
• Fig. 8 shows housing 38b with aperture 48b, and the read-head 50b having frame 56b, seal 72b, window 62b and optical components including light emitter 58 and sensor 60.
• FIG. 9 shows housing 38c with aperture 48c, and the read- head 50c having frame 56c, seal 72b, window 62b and optical components including light emitter 58 and sensor 60.
• Fig. 10 shows housing 38b with aperture 48b, and the read-head 50d having frame 56c, seal 72d, window 62d and optical components including light emitter 58 and sensor 60.
• the window 62 may also be shaped to provide adequate space for the seal and, at the same time, allow for desirably close proximity of the components of the sensor to the encoder track, as illustrated in Figure 11.
• Fig. 11 shows housing 38b with aperture 48b, and the read-head 50e having frame 56c, seal 72d, window 62e and optical components including light emitter 58 and sensor 60.
• the window 62 may be merely mechanically fastened, but not necessarily sealed, with respect to the enclosure 56 of the sensor, and the sealing takes place between the window 62 and the housing 38 of the direct-drive module. It should be noted that the window 62 in the examples of Figures 7-11 may not necessarily be a separate component.
• the window 62 may be conveniently formed by a component of the optical system of the read-head, such as a lens, or by any other suitable component.
• the read-head may be coupled to the housing of the direct-drive module in a movable manner to allow for adjustment of the sensor with respect to the encoder track.
• the adjustment may include the distance between the read-head and the encoder track as well as orientation (for instance, pitch, roll and yaw) of the read-head with respect to the encoder track.
• the window of the sensor may be sealed to the housing of the direct-drive module by an O-ring, a bellows, a flexure or any other suitable seal providing the sensor with sufficient movement while maintaining a seal.
• the housing of the direct- drive module may feature an aperture (slot) located so that it provides an optical path (view) of the position encoder track from the outside of the housing of the direct-drive module.
• a read-head may be provided on the outside of the direct-drive module so that it can sense location of the encoder track through the aperture in the housing of the direct-drive module.
• Fig. 12 shows housing 38 with aperture 48, and the read-head 50f having frame 56f, seal 72, window 62f, seal 72f and optical components including light emitter 58 and sensor 60.
• the encoder track may include features that may be utilized to sense location of the encoder track.
• the features may form an incremental track and, in some case, the incremental track may be complemented by an absolute track.
• the features may form a pattern that may be decoded using image processing technigues.
• the read-head may include an enclosure, a window and an optical system.
• the read-head may further include other components, such as electronics, to control the read-head, process the data and facilitate communication .
• the window may be located in the enclosure of the read-head to provide an optical path (view) between the optical system and the encoder track through the aperture in the housing of the direct-drive module.
• the window may be made of a substantially transparent material, such as glass or acrylic.
• the window may be sealed to the enclosure of the sensor, for instance, using an Q-ring or a bonded joint.
• the optical system may be configured to detect the position of the encoder track with respect to the read-head.
• the optical system may include one or more light emitters, one or more light receivers and other optical components, such as lenses, mirrors and masks.
• the light emitter (s) and receiver (s) may be arranged to detect features on the encoder track. For instance, the receiver (s) may detect the features based on reflection of the light produced by the emitter (s) .
• the optical system may include one or more light source (s), one or more digital camera (s) and other optical components, such as lenses, mirrors and masks.
• the light source (s) may be arranged to provide illumination of the encoder track in the field of view of the digital camera(s).
• the digital camera(s) may be arranged to take periodically pictures (images) of the encoder track. The pictures may be processed by the encoder read-head to determine the location of the encoder track with respect to the encoder read-head.
• the read-head may be attached to the housing of the direct-drive module so that the enclosure of the sensor is sealed with respect to the housing of the direct-drive module around the aperture of the direct drive module and around the window of the read-head, thus separating the vacuum or other non-atmospheric environment inside of the housing of the direct-drive module from the environment outside of the direct-drive module and, furthermore, separating the components inside of the enclosure of the read-head from the vacuum or other non-atmospheric environment inside of the housing of the direct-drive module. This prevents exposure of the components inside of the enclosure of the read-head from the vacuum or other non-atmospheric environment inside of the housing of the direct-drive module.
• the read-head may be attached to the housing of the direct-drive module in a substantially fixed manner, and the enclosure of the sensor may be sealed to the housing of the direct-drive module using an O-ring or any other suitable seal.
• FIGs. 14-15 Additional example embodiments where the window is sealed to the enclosure of the read-head and the enclosure of the read-head is in turn sealed to the housing of the direct-drive module are depicted diagrammatically in Figs. 14-15.
• Fig. 14 shows housing 38h with aperture 48h, and the read-head 50h having frame 56h, seals 72hl, 72h2, window 62h and optical components including light emitter 58 and sensor 60.
• Fig. 15 shows housing 38h with aperture 48h, and the read-head 50i having frame 56i, seals 72hl, 72h2, window 62h and optical components including light emitter 58 and sensor 60.
• the window in the example of Fig. 12 may not necessarily be a separate component .
• the window may be conveniently formed by a component of the optical system of the sensor, such as a lens, or by any other suitable component.
• the read-head may be coupled to the housing of the direct-drive module in a movable manner to allow for adjustment of the read-head with respect to the encoder track.
• the adjustment may include the distance between the read-head and the encoder track as well as orientation (for instance, pitch, roll and yaw) of the read-head with respect to the encoder track.
• the enclosure of the read-head may be sealed to the housing of the direct-drive module by an O-ring, a bellows, a flexure or any other suitable seal providing the read-head with sufficient movement while maintaining a seal.
• the housing of the direct- drive module may feature an aperture (slot) located so that it provides an optical path (view) of the position encoder track from the outside of the housing of the direct-drive module.
• Fig. 13 shows housing 38g with aperture 48g, and the read-head 50g having frame members 56gl, 56g2, seals 72gl, 72g2, window 62g and optical components including light emitter 58 and sensor 60 ⁇
• a sensor may be provided on the outside of the direct-drive module so that it can sense location of the encoder track through the aperture in the housing of the direct-drive module .
• the encoder track may include features that may be utilized to sense location of the encoder track.
• the features may form an incremental track and, in some case, the incremental track may be complemented by an absolute track.
• the features may form a pattern that may be decoded using image processing techniques.
• the read-head may include a first enclosure, a window and an optical system.
• the sensor may further include other components, such as electronics, to control the read-head, process the data and facilitate communicatio .
• the window may be located in the first enclosure of the read-head to provide an optical path (view) between the optical system and the encoder track through the aperture in the housing of the direct-drive module.
• the window may be mechanically fastened to the first enclosure of the read- head and sealed to a second enclosure (window seal in Fig. 13) , neither enclosure being the housing of the direct-drive module.
• the second enclosure may then seal to the housing of the direct-drive module ⁇ enclosure seal in Fig. 13) . This allows a read-head housings never intended to act as a barrier between atmosphere and non- atmosphere environments to do be utilized.
• the window may be made of a substantially transparent material, such as glass or acrylic.
• the window may be conveniently formed by a component of the optical system of the read-head, such as a lens, another optical element intended to affect light, or any other suitable component.
• the window may be sealed to the first enclosure of the read-head, for instance, using an O-ring or a bonded joint. If desired, the seal may be accomplished by the addition of a feature to the window, such as a flange. Alternatively, the seal may be accomplished by using features available on commercially available read- heads .
• the optical system may be configured to detect the position of the encoder track with respect to the read-head.
• the optical system may include one or more light emitters, one or more light receivers and other optical components, such as lenses, mirrors and masks.
• the light emitter (s) and receiver (s) may be arranged to detect features on the encoder track. For instance, the receiver (s) may detect the features based on reflection of the light produced by the emitter (s) .
• the optical system may include one or more light source (s), one or ..more digital camera (s) and other optical components, such as lenses, mirrors and masks.
• the light source (s) may be arranged to provide illumination of the encoder track in the field of view of the digital camera (s) .
• the digital camera (s) may be arranged to take periodically pictures (images) of the encoder track. The pictures may be processed by the encoder read-head to determine the location of the encoder track with respect to the encoder read-head.
• the read-head may be attached to the housing of the direct-drive module so that the second enclosure is sealed with respect to the housing of the direct-drive module.
• the second enclosure is then sealed to the window of the read-head, thus separating the vacuum or other non-atmospheric environment inside of the housing of the direct-drive module from the environment outside of the direct-drive module and, furthermore, separating the components inside of the second enclosure from the vacuum or other non-atmospheric environment inside of the housing of the direct-drive module. This prevents exposure of the components inside of the second enclosure from the vacuum or other non-atmospheric environment inside of the housing of the direct-drive module.
• the second enclosure may be coupled to the housing of the direct-drive module in a movable manner to allow for adjustment of the read-head with respect to the encoder track.
• the adjustment may include the distance between the read-head and the encoder track as well as orientation (for instance, pitch, roll and yaw) of the read-head with respect to the encoder track.
• the second enclosure may be sealed to the housing of the direct-drive module by an 0-ring, a bellows, a flexure or any other suitable seal providing the read-head with sufficient movement while maintaining a seal.
• the read-head looking radially inward, it may be arranged to look radially out, for example pointing at an internal cylindrical surface of the disk, or to look axially up or down, for example, pointing at one of the flat faces of the disk.
• a drive arrangement such as a robot drive arrangement
• an optical encoder where the disk of the optical encoder is in one environment (such as vacuum environment) and the components of the read-head of the optical encoder, including its optical system and control electronics, are in another environment (such as an atmospheric environment) and there is a substantially transparent barrier between the disk and the components of the read-head.
• the senor may be arranged to look radially out on an internal cylindrical surface of the disk, or to look axially ⁇ up or down) on one of the flat faces of the disk 44.
• This arrangement may be extended to linear applications including, for example, the example linear robots described in U.S. patent publication Nos. 2015/0214086 Al, 2016/0229296 Al and 2017/0036358 Al which are hereby incorporated by reference in their entireties.
• An example apparatus comprises a frame, where the frame is configured to be attached to a housing of a motor assembly proximate an aperture which extends through the housing; a position sensor connected to the frame, where the position sensor comprises a camera; and an environment separation barrier configured to be connected to the housing at the aperture, where the environment separation barrier is at least partially transparent and located relative to the camera to allow the camera to view an image inside the housing through the environment separation barrier and the aperture.
• the environment separation barrier may be connected directly to the housing at the aperture or may be indirectly connected to the housing, such as via the frame of the apparatus, but the environment separation barrier forms at least part of the environment closure of the aperture through the housing while also providing an optical path.
• the apparatus may comprise a seal configured to be located directly between the environment separation barrier and the housing of the motor assembly.
• the apparatus may comprise a first seal connected directly between the environment separation barrier and the frame.
• the apparatus may comprise a second seal configured to be located directly between the frame and the housing of the motor assembly.
• the apparatus may comprise a seal and a barrier holder configured to press the environment separation barrier against the seal, where the barrier holder is configured to be pressed by the frame towards the aperture.
• the apparatus may comprise a connection between the barrier holder and the frame which is resilient to allow the barrier holder to move relative to the frame, and where the connection biases the barrier holder towards the aperture when the frame is connected to the housing.
• the environment separation barrier may comprise a transparent window which directly contacts the frame and is configured to be pressed by the frame towards the aperture when the frame is connected to the housing.
• the apparatus may comprise the housing, a rotor inside the housing having a position reference member configured to be imaged by the camera and at least one seal, where the frame is connected to the housing with the at least one seal and the environment separation barrier sealing the aperture to separate a first environmental area inside the housing from a second environmental area outside the housing.
• the frame may not be exposed to the first environmental area inside the housing .
• An example method may comprise providing a read-head comprising a frame and a camera connected to the frame; connecting the read-head to a housing of a motor assembly, where the frame of the read-head is connected to the housing proximate an aperture which extends through the housing; and locating an environment separation barrier at the aperture to separate a first environmental area inside the housing from a second environmental area in which the camera is located, where the environment separation barrier is at least partially transparent and located relative to the camera to allow the camera to view an image inside the housing through the environment separation barrier and the aperture.
• the method may comprise locating a seal being directly between the environment separation barrier and the housing of the motor assembly.
• the method may comprise connecting a first seal directly between the environment separation barrier and the frame.
• the method may comprise locating a second seal directly between the frame and the housing of the motor assembly.
• the method may comprise a barrier holder biasing the environment separation barrier against a seal, where the barrier holder is pressed by the frame towards the aperture.
• the method may comprise proving a connection between the barrier holder and the frame which is resilient to allow the barrier holder to move relative to the frame, and where the connection biases the barrier holder towards the aperture when the frame is connected to the housing.
• the environment separation barrier may comprise a transparent window which directly contacts the frame and is pressed by the frame towards the aperture when the frame is connected to the housing.
• the method may comprise a rotor is inside the housing and a position reference member configured to be imaged by the camera, where the frame is connected to the housing with at least one seal and the environment separation barrier to seal the aperture to separate a first environmental area inside the housing from a second environmental area outside the housing.
• the frame may not be exposed to the first environmental area inside the housing.
• An example method may comprise illuminating a reference member located inside a housing of a motor assembly by a light emitter of a sensor, where the sensor is located outside of the housing; viewing an image of the reference member by a camera of the sensor, where the camera is located outside of the housing, where the image is viewed by the camera though an aperture in the housing and through a transparent environment separation barrier located at the aperture, where the transparent environment separation barrier seals a first environment inside the housing from a second environment in which the sensor is located, and where the camera is located outside of the first environment and the transparent environment separation barrier allows the camera to view the image coming from inside the housing while the camera is outside of the first environment.
• FIG. 4 illustrates a viewport in the housing of the direct-drive module.
• the examples of Figs. 7-11 illustrate a seal directly between the window and the housing of the direct-drive module.
• the examples of Figs. 12 and 14-15 illustrate a seal between the window and the enclosure of the read-head and another seal between the enclosure of the read-head and the housing of the direct-drive module.
• the example of Fig. 13 illustrates two enclosures.
• An example embodiment may be provided in an apparatus comprising a frame, where the frame is configured to be attached to a housing of a motor assembly proximate an aperture which extends through the housing; at least one light emitter connected to the frame; an array of optical sensors connected to the frame; and an environment separation barrier configured to be connected to the housing at the aperture, where the environment separation barrier is at least partially transparent and located relative to the array of optical sensors to allow the array of optical sensors to view an image inside the housing through the environment separation barrier and the aperture.
• An example method may be provided comprising providing a read-head comprising a frame, at least one light emitter connected to the frame, and an array of optical sensors connected to the frame; connecting the read-head to a housing of a motor assembly, where the frame of the read-head is connected to the housing proximate an aperture which extends through the housing; and locating an environment separation barrier at the aperture to separate a first environmental area inside the housing from a second environmental area in which the array of optical sensors is located, where the environment separation barrier is at least partially transparent and located relative to the array of optical sensors to allow the array of optical sensors to view an image inside the housing through the environment separation barrier and the aperture.
• An example method comprising illuminating a reference member located inside a housing of a motor assembly by at least one light emitter of a read-head, where the read-head is located At least partially outside of the housing; viewing at least one image of the reference member by an array of optical sensors of the read-head, where the array of optical sensors is located at least partially outside of the housing, where the at least one image is ⁇ viewed by the array of optical sensors though an aperture in the housing and through a transparent environment separation barrier located at the aperture, where the transparent environment separation barrier seals a first environment inside the housing from a second environment in which the array of optical sensors is located, and where the array of optical sensors is located outside of the first environment and the transparent environment separation barrier allows the array of optical sensors to view the at least one image coming from inside the housing while the camera is outside of the first environment.

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• 2017
  • 2017-03-21 KR KR1020227032688A patent/KR20220134041A/ko not_active Application Discontinuation
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  • 2017-03-21 WO PCT/US2017/023386 patent/WO2017165401A1/en active Application Filing
  • 2017-03-21 JP JP2017554577A patent/JP6985933B2/ja active Active
  • 2017-03-21 CN CN202110250264.2A patent/CN113029213A/zh active Pending
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• 2021
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