WO2017156842A1 - 产生掩膜图案的系统和方法以及曝光系统 - Google Patents

产生掩膜图案的系统和方法以及曝光系统 Download PDF

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Publication number
WO2017156842A1
WO2017156842A1 PCT/CN2016/081258 CN2016081258W WO2017156842A1 WO 2017156842 A1 WO2017156842 A1 WO 2017156842A1 CN 2016081258 W CN2016081258 W CN 2016081258W WO 2017156842 A1 WO2017156842 A1 WO 2017156842A1
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WIPO (PCT)
Prior art keywords
mask pattern
signal
network
information
mask
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PCT/CN2016/081258
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English (en)
French (fr)
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李太亮
孙俊民
丁洪利
关红涛
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京东方科技集团股份有限公司
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Priority to US15/501,497 priority Critical patent/US10324371B2/en
Publication of WO2017156842A1 publication Critical patent/WO2017156842A1/zh

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/76—Patterning of masks by imaging
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G03F7/70525—Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G03F7/70541—Tagging, i.e. hardware or software tagging of features or components, e.g. using tagging scripts or tagging identifier codes for identification of chips, shots or wafers

Definitions

  • the present application relates to the field of mask exposure, and more particularly to a system for generating a mask pattern, a method for generating a mask pattern, and an exposure system.
  • the Internet of Things uses information sensing devices such as radio frequency identification (RFID), infrared sensors, and global positioning systems to connect any item to the Internet in accordance with agreed protocols for information exchange and communication, thereby enabling intelligent identification, location, and tracking. , monitoring and management.
  • RFID radio frequency identification
  • RFID infrared sensors
  • global positioning systems to connect any item to the Internet in accordance with agreed protocols for information exchange and communication, thereby enabling intelligent identification, location, and tracking. , monitoring and management.
  • embodiments of the present invention provide a system for generating a mask pattern, and a method for generating a mask pattern.
  • the mask pattern generating device in the exposure system needs to store a large number of mask patterns, each time It takes a lot of time for the manufacturer to perform mask confirmation during production. At the same time, the equipment needs to frequently call different masks during production, which causes a lot of manpower, material resources and wasted time.
  • a system for generating a mask pattern comprising:
  • a mask pattern providing device configured to provide a mask pattern signal through a wired or wireless network
  • a mask pattern transfer device configured to process a mask pattern signal provided by the mask pattern providing device to generate mask pattern information, and transmit the generated mask pattern information by a radio frequency identification "RFID" signal;
  • the mask pattern generating device is configured to generate and display a mask pattern corresponding to the mask pattern information based on the mask pattern information.
  • the mask pattern providing device is a local PC or a mobile device.
  • the wired network is at least one of an Internet, a local area network, a wide area network, and a telecommunication network.
  • the wireless network is at least one of a 3G network, a 4G network, an LTE network, a WiFi network, a Bluetooth network, and an NFC network.
  • the mask pattern conveying device comprises:
  • a cloud and/or a gateway configured to process a mask pattern signal provided by the mask pattern providing device
  • An RFID controller configured to transmit the RFID signal to the mask pattern generating device to supply power to the mask pattern generating device and to transmit mask pattern information.
  • the RFID signal includes mask pattern information and a power signal for supplying power to the mask pattern generating device.
  • the mask pattern generating device comprises:
  • a radio frequency module configured to read an RFID signal sent by the RFID controller
  • An energy storage module configured to store a power signal in the RFID signal
  • An information processing module configured to parse mask pattern information in the RFID signal into mask pattern data
  • a storage module configured to store and update a mask pattern corresponding to the mask pattern data
  • a display module configured to display a mask pattern updated by the storage module.
  • the mask pattern data is a binary number, an octal number or a hexadecimal number.
  • the energy storage module stores electrical energy capable of updating a mask pattern displayed by the display module.
  • the energy storage module is further configured to supply power to the information processing module, the storage module, and the display module by using the power signal.
  • the display module is an electronic ink screen.
  • an intelligent exposure system comprising the mask pattern generating apparatus of any of the preceding claims.
  • a method for generating a mask pattern including:
  • the mask pattern information transmitting device Processing, by the mask pattern information transmitting device, the mask pattern signal provided by the mask pattern providing device to generate mask pattern information, and transmitting the mask pattern information by the radio frequency identification "RFID" signal;
  • the mask pattern generating device generates a mask pattern corresponding to the mask pattern based on the mask pattern information and displays it.
  • the interaction between the mask pattern providing device (local PC or mobile device) and the mask pattern generating device is realized by using the Internet of Things technology, so that the mask pattern generating device displays a plurality of different masks through the electronic ink screen.
  • the film pattern enables a fast, low-cost exposure. It is avoided that the mask pattern generating device needs to store a large number of mask patterns, and each time the production requires an engineer to spend a large amount of time for mask confirmation, and at the same time, the device needs to frequently call different masks during production, thereby generating a large amount of manpower and material resources. And the problem of wasted time.
  • FIG. 1 is a block diagram of a system for generating a mask pattern in accordance with an embodiment of the present invention
  • FIG. 2 is a block diagram of a mask pattern generating apparatus according to an embodiment of the present invention.
  • 3A-3C are schematic diagrams of examples of mask patterns generated by a mask pattern generating device according to an embodiment of the present invention.
  • FIG. 4 is a flow chart of a mask pattern generating method in accordance with an embodiment of the present invention.
  • FIG. 1 shows a block diagram of a system 100 for generating a mask pattern in accordance with an embodiment of the present invention.
  • a display device adjusting device 100 may include a mask pattern providing device 101, a mask pattern transmitting device 102, and a mask pattern generating device 103.
  • the mask pattern providing device 101 is configured to provide a mask pattern signal through a wired or wireless network.
  • the mask pattern providing device may be a local personal computer (PC), such as a tablet PC, a desktop PC, a laptop PC, a netbook, etc., or may be a mobile device, such as a mobile phone, a smart phone, a video phone. , e-book readers, personal digital assistants (PDAs), etc.
  • PC personal computer
  • a user or an engineer can download or save a large number of different mask patterns in the mask pattern providing device 101, and transmit the mask patterns in the form of electrical signals through a wired or wireless network.
  • mask pattern information is transferred to a semiconductor substrate through an exposure process, thereby manufacturing different semiconductor products.
  • 3A-3C show examples of several mask patterns, for example, the mask pattern may be vertical stripes, horizontal stripes, diagonal stripes, dot matrix, and the like. Those skilled in the art can understand that the mask pattern is not limited to the above pattern examples.
  • the wired network may be the Internet, a local area network (LAN), a wide area network (WAN), a telecommunications network, etc., and is not limited to a particular network.
  • the wireless network may be a short-range wireless communication network, such as a wireless fidelity (Wi-Fi) direct connection network, a Wi-Fi network, a Bluetooth network, a near field communication (NFC) network, a device-to-device (DTD) network, etc., or It is a cellular network, a satellite network, etc., such as a 3G/4G/Long Term Evolution (LTE) network, and is not limited to a specific network.
  • Wi-Fi wireless fidelity
  • Wi-Fi wireless fidelity
  • Bluetooth Bluetooth
  • NFC near field communication
  • DTD device-to-device
  • LTE Long Term Evolution
  • the mask pattern transfer device 102 is configured to process the mask pattern signal provided by the mask pattern providing device 101 to generate mask pattern information, and to transmit the generated mask pattern information by radio frequency identification "RFID" signal.
  • RFID radio frequency identification
  • the mask pattern transmitting device 102 can implement processing of a large number of mask pattern signals by accessing the cloud or the gateway, and realize wireless power supply and information transmission through the RFID technology.
  • the cloud is a software platform that allows users to install and download various processing software. Various processing (for example, filtering, enhancement, sharpening, binarization, etc.) can be performed using the cloud mask pattern signal to generate information related to the mask pattern.
  • the mask pattern transfer device 102 includes: a cloud and/or a gateway configured to process a mask pattern signal provided by the mask pattern providing device 101; and an RFID controller configured to generate the mask pattern
  • the device 103 transmits an RFID signal to supply power to the mask pattern generating device 103 and to transmit mask pattern information.
  • the RFID signal includes mask pattern information and a power signal that supplies power to the mask pattern generating device 103.
  • the mask pattern transfer device 102 implements both the power supply function and the transfer information function. Therefore, the mask pattern generating device 103 operates only when the mask pattern transmitting device 102 supplies the RFID signal thereto, thereby realizing a fast, convenient, and low-cost mask pattern generating method.
  • the mask pattern generating device 103 is configured to generate and display a mask pattern corresponding to the mask pattern information based on the mask pattern information transmitted by the mask pattern transfer device 102.
  • the interaction between the mask pattern providing device 101 (for example, a local PC or a mobile device) and the mask pattern generating device 103 is realized by the Internet of Things technology, so that various mask patterns can be displayed. Further, the processing of a large amount of data is realized by accessing the cloud or the gateway, and wireless power supply (ie, power supply from the RFID controller) and information transmission are realized by the RFID technology. Thereby reducing power consumption, cost, and saving a lot of manpower, material resources and machine waste.
  • FIG. 2 shows a block diagram of a mask pattern generating device 103 in accordance with an embodiment of the present invention.
  • the mask pattern generating device 103 includes a radio frequency module 201, an energy storage module 202, an information processing module 203, a storage module 204, and a display module 205.
  • the radio frequency module 201 is configured to read an RFID signal transmitted by the RFID controller, such as an electromagnetic wave signal, and then transmit the power signal and the pattern information in the RFID signal to the energy storage module 202 and the information processing module 203, respectively.
  • the energy storage module 202 is configured to convert the portion of the RFID signal used to power the mask pattern generating device 103 into a power signal and temporarily store the information, and use the power signal to the information processing module 203, the storage module 204, and The display module 205 is powered.
  • the energy storage module 204 may take the form of a coil, such as may be a supercapacitor. Therefore, the mask pattern generating device 103 itself is not equipped with a power source, and the power supplied thereto is derived from the RFID signal transmitted from the RFID controller. Therefore, the mask pattern generating device 103 does not operate without updating the mask pattern, thereby reducing the power consumption of the device itself, while reducing the device cost since a separate power source is not required.
  • the information processing module 203 is configured to parse the mask pattern information in the RFID signal into mask pattern data.
  • the mask pattern data may be a binary number, an octal number, or a hexadecimal number, but is not limited to a specific value.
  • the storage module 204 is configured to store a mask pattern corresponding to the mask pattern data, and to update a conventional mask pattern stored previously, that is, to update a mask pattern corresponding to the pattern mask data.
  • the display module 205 is configured to display the mask pattern updated by the storage module 204 upon detecting an update in the storage module 204.
  • the energy storage module 202 stores sufficient electrical energy that is required to cause the display module 205 to update the display screen.
  • display module 205 is an electronic ink screen.
  • the electronic ink screen is a screen using electronic ink, and is a new method and technology for information display. Like most traditional inks, electronic inks and lines that change their color can be printed on a variety of surfaces, such as curved plastic, polyester film, paper or cloth. The difference from conventional paper is that the electronic ink changes color when it is powered on, and can display a changed image.
  • an image signal is provided by a local PC or a mobile device, and a selective transparent area appears on the electronic ink screen, thereby realizing display of the mask pattern and performing exposure processing.
  • the electronic ink screen consumes very little power during static display, and only needs to consume energy when updating the screen.
  • the mask pattern generating apparatus does not need to store a large number of mask patterns and uses electric power from the outside as well as a low-power electronic ink screen, thereby realizing a quick, convenient, low-cost exposure processing.
  • FIG. 400 A flowchart of a method 400 for generating a mask pattern in accordance with an embodiment of the present invention is next described with reference to FIG.
  • a mask pattern signal is provided by a mask pattern providing signal through a wired or wireless network.
  • the mask pattern information provided by the mask pattern providing device is processed by the mask pattern information transfer device to generate mask pattern information, and the mask pattern information is transmitted by the radio frequency identification "RFID" signal.
  • a mask pattern generating device generates a mask pattern corresponding to the mask pattern information based on the mask pattern information and displays it.
  • the interaction between the mask pattern providing device (for example, a local PC or a mobile device) and the mask pattern generating device is realized by the Internet of Things technology, so that various mask patterns can be displayed.
  • the processing of a large amount of data is realized by accessing the cloud or the gateway, and wireless power supply (ie, power supply from the RFID controller) and information transmission are realized by the RFID technology. Thereby reducing power consumption, cost, and saving a lot of manpower, material resources and machine waste.
  • an intelligent exposure system comprising the mask pattern generating apparatus in the embodiment as described above.
  • the intelligent exposure system invokes a mask pattern generated by the mask pattern generating device to expose the photoresist-coated substrate to fabricate semiconductor substrates having different patterns.
  • the intelligent exposure system is capable of interacting with a mask pattern providing device (for example, a local PC or a mobile device) through the Internet of Things, so that a large number of different masks are called by RFID when exposing different substrates. Patterns without having to store these large number of mask patterns inside the intelligent exposure system. Therefore, the conventional exposure system is required to require a large amount of manpower, material resources and machine waste caused by the engineers frequently calling different mask patterns stored in the exposure system and confirming them.
  • some implementations may be in the form of hardware for operation on, for example, a device or combination of devices, while other embodiments may be in the form of software and/or firmware.
  • some embodiments may include one or more items, such as a storage medium or storage medium.
  • a storage medium such as a CD-ROM, a computer disk, a flash memory, or the like, on which instructions can be stored, which, when executed by a system such as a computer system, computing platform, or other system, can cause the processor to be based on the claimed subject matter. Executing, for example, one of the above embodiments.
  • the computing platform can include one or more processing units or processors, one or more input/output devices (eg, display, keyboard, and/or mouse), and one or more memories (eg, static random access memory) , dynamic random access memory, flash memory, and/or hard drive).

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

一种产生掩膜图案的系统、产生掩膜图案的方法以及曝光系统，其中产生掩膜图案的系统包括：掩膜图案提供设备（101），配置为通过有线或无线网络提供掩膜图案信号；掩膜图案传送设备（102），配置为对掩膜图案提供设备（101）提供的掩膜图案信号进行处理，以产生掩膜图案信息，并且通过射频标识"RFID"信号传送产生的掩膜图案信息；以及掩膜图案产生设备（103），配置为基于掩膜图案信息，产生与掩膜图案信息对应的掩膜图案并显示。利用物联网技术实现了掩膜图案提供设备（101）与掩膜图案产生设备（103）之间的交互，使得掩膜图案产生设备（103）通过电子墨水屏显示多种不同掩膜图案，从而实现了快速方便、低成本的曝光方式。

Description

产生掩膜图案的系统和方法以及曝光系统
本申请要求于2016年3月18日提交的、申请号为201610158206.6的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及掩膜曝光领域，尤其涉及一种产生掩膜图案的系统、一种产生掩膜图案方法以及一种曝光系统。
背景技术
在当前玻璃基板生产线中，为了制造不同图案的玻璃基板，主要通过调用不同的掩膜(Mask)来进行曝光，即当进行栅极层曝光时需要调用与栅极层对应的掩膜，当进行多层曝光时，需要调用与多层对应的掩膜，并且不同产品的同一层由于设计不同，掩膜也不同，因此就导致曝光系统本身需要存储大量的掩膜，并且在每次进行生产时需要工程师耗费大量的时间进行掩膜确认。同时生产时曝光系统需要频繁调用不同的掩膜，这就导致了大量的人力、物力以及机时浪费。
随着通信技术的进步，物联网(Internet of things，IOT)成为新一代信息技术的重要组成部分，也是“信息化”时代的重要发展阶段。物联网通过射频识别(RFID)、红外感应器、全球定位系统等信息传感设备，按照约定的协议，将任何物品与互联网连接起来，进行信息交换和通信，从而实现智能化识别、定位、跟踪、监控和管理。
因此，如何通过网络或云端(即，物联网技术)实现本地PC或移动设备与现场设备(即曝光系统)中掩膜图案产生设备之间的交互，从而实现对现场设备中掩膜信息的读取和写入成为本领域亟待解决的技术问题。
发明内容
有鉴于此，本发明实施例提供了一种产生掩膜图案的系统、一种产生掩膜图案方法，针对曝光系统内的掩膜图案产生设备需要存储大量的掩膜图案，每次进 行生产时需要工程师耗费大量的时间进行掩膜确认，同时生产时设备需要频繁调用不同的掩膜，从而产生大量的人力、物力以及机时浪费的问题。
根据本发明实施例的一个方面，提供了一种用于产生掩膜图案的系统，包括：
掩膜图案提供设备，配置为通过有线或无线网络提供掩膜图案信号；
掩膜图案传送设备，配置为对掩膜图案提供设备提供的掩膜图案信号进行处理，以产生掩膜图案信息，并且通过射频标识“RFID”信号传送产生的掩膜图案信息；以及
掩膜图案产生设备，配置为基于掩膜图案信息，产生与所述掩膜图案信息对应的掩膜图案并显示。
优选地，所述掩膜图案提供设备是本地PC或移动设备。
优选地，所述有线网络是互联网、局域网、广域网、电信网络中的至少一个。
优选地，所述无线网络是3G网络、4G网络、LTE网络、WiFi网络、蓝牙网络和NFC网络中的至少一个。
优选地，所述掩膜图案传送设备包括：
云端和/或网关，配置为对掩膜图案提供设备提供的掩膜图案信号进行处理；以及
RFID控制器，配置为向所述掩膜图案产生设备发送所述RFID信号，以向所述掩膜图案产生设备供电并传送掩膜图案信息。
优选地，所述RFID信号包括掩膜图案信息和用于对所述掩膜图案产生设备供电的电能信号。
优选地，所述掩膜图案产生设备包括：
射频模块，配置为读取RFID控制器发送的RFID信号；
储能模块，配置为存储所述RFID信号中的电能信号；
信息处理模块，配置为将所述RFID信号中的掩膜图案信息解析成掩膜图案数据；
存储模块，配置为存储并更新与所述掩膜图案数据相对应的掩膜图案；以及
显示模块，用于显示由所述存储模块更新后的掩膜图案。
优选地，所述掩膜图案数据是二进制数、八进制数或十六进制数。
优选地，所述储能模块存储能够更新所述显示模块显示的掩膜图案的电能。
优选地，所述储能模块还配置为利用所述电能信号，对所述信息处理模块、所述存储模块以及所述显示模块供电。
优选地，所述显示模块是电子墨水屏。
根据本发明实施例的另一方面，提供了一种智能曝光系统，包括前述权利要求中任一项所述的掩膜图案产生设备。
根据本发明实施例的另一方面，提供了一种用于产生掩膜图案的方法，包括：
由掩膜图案提供设备，通过有线或无线网络提供掩膜图案信号；
由掩膜图案信息传送设备，对掩膜图案提供设备提供的掩膜图案信号进行处理，以产生掩膜图案信息，并且通过射频标识“RFID”信号传送掩膜图案信息；以及
由掩膜图案产生设备，基于掩膜图案信息，产生与所述掩膜图案对应的掩膜图案并显示。
根据本发明实施例，利用物联网技术实现了掩膜图案提供设备(本地PC或移动设备)与掩膜图案产生设备之间的交互，使得掩膜图案产生设备通过电子墨水屏显示多种不同掩膜图案，从而实现了快速方面、低成本的曝光方式。避免了掩膜图案产生设备需要存储大量的掩膜图案，每次进行生产时需要工程师耗费大量的时间进行掩膜确认，同时生产时设备需要频繁调用不同的掩膜，从而产生大量的人力、物力以及机时浪费的问题。
附图说明
通过下面结合附图说明本发明的优选实施例，将使本发明的上述及其它目的、特征和优点更加清楚，在附图中：
图1是根据本发明实施例的产生掩膜图案的系统的框图；
图2是根据本发明实施例的掩膜图案产生设备的框图；
图3A-3C是根据本发明实施例的掩膜图案产生设备产生的掩膜图案示例的示意图；以及
图4是根据本发明实施例的掩膜图案产生方法的流程图。
具体实施方式
为使本发明实施例的目的、技术方案和优点更加清楚明白，以下结合具体实施例，并参照附图，对本发明实施例进一步详细说明。显然，所描述的实施例仅仅是本发明一部分实施例，而不应限制本发明。基于本发明的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
图1示出了根据本发明实施例的产生掩膜图案的系统100的框图。如图1所示，根据本发明实施例的显示设备调整装置100可以包括掩膜图案提供设备101、掩膜图案传送设备102以及掩膜图案产生设备103。
掩膜图案提供设备101配置为通过有线或无线网络提供掩膜图案信号。在示例实施例中，掩膜图案提供设备可以是本地个人计算机(PC)，例如平板PC、台式PC、膝上型PC、上网本等，也可以是移动设备，例如移动电话、智能电话、视频电话、电子书阅读器、个人数字助手(PDA)等。用户或工程师可以在掩膜图案提供设备101中下载或保存大量不同的掩膜图案，并且将这些掩膜图案以电信号的形式通过有线或无线网络发送出去。在半导体制造工艺中，通过曝光过程将掩膜图案信息传递到半导体基板上，从而制造出不同的半导体产品。图3A-3C给出了几种掩膜图案的示例，例如，掩膜图案可以是垂直的条纹、水平的条纹、斜条纹、圆点矩阵等。本领域技术人员能够理解掩膜图案不限于上述图案示例。
在示例实施例中，有线网络可以是互联网、局域网(LAN)、广域网(WAN)、电信网络等，且不局限于特定的网络。无线网络可以是短距离无线通信网络，例如无线保真(Wi-Fi)直连网络、Wi-Fi网络、蓝牙网络、近场通信(NFC)网络、设备至设备(DTD)网络等，也可以是蜂窝网络、卫星网络等，例如3G/4G/长期演进(LTE)网络，并且不局限于特定的网络。
掩膜图案传送设备102配置为对掩膜图案提供设备101提供的掩膜图案信号进行处理，以产生掩膜图案信息，并且通过射频标识“RFID”信号传送产生的掩膜图案信息。基于物联网技术，掩膜图案传送设备102可以通过访问云端或网关来实现对大量掩膜图案信号的处理，并且通过RFID技术实现无线供电以及信息传送。云端是一种软件平台，用户可以不需要安装和下载各种处理软件的情况下， 就能够利用云端掩膜图案信号进行各种处理(例如，滤波、增强、锐化、二值化等处理)，以产生与掩膜图案有关的信息。
在示例实施例中，掩膜图案传送设备102包括：云端和/或网关，配置为对掩膜图案提供设备101提供的掩膜图案信号进行处理；以及RFID控制器，配置为向掩膜图案产生设备103发送RFID信号，以向所述掩膜图案产生设备103供电并传送掩膜图案信息。具体而言，RFID信号包括掩膜图案信息以及对掩膜图案产生设备103供电的电能信号。这样掩膜图案传送设备102实现了供电功能和传送信息功能二者。从而掩膜图案产生设备103只有在掩膜图案传送设备102向其提供RFID信号时才工作，实现了快速方便、低成本的掩膜图案生成方式。
掩膜图案产生设备103配置为基于掩膜图案传送设备102传送的掩膜图案信息，产生与掩膜图案信息对应的掩膜图案并进行显示。
在本示例实施例中，利用物联网技术实现了掩膜图案提供设备101(例如，本地PC或移动设备)与掩膜图案产生设备103之间的交互，使得能够显示多种掩膜图案。进一步地，通过访问云端或网关来实现大量数据的处理，并且通过RFID技术实现无线供电(即，从RFID控制器供电)和信息传送。从而降低的了功耗、成本，节省了大量人力、物力以及机时浪费。
图2示出了根据本发明实施例的掩膜图案产生设备103的框图。掩膜图案产生设备103包括射频模块201、储能模块202、信息处理模块203、存储模块204以及显示模块205。
射频模块201配置为读取RFID控制器发送的RFID信号，例如电磁波信号，并然后将该RFID信号中的电能信号和图案信息分别发送给储能模块202和信息处理模块203。
储能模块202配置为将RFID信号中用于对掩膜图案产生设备103供电的那部分信号转换为电能信号并暂时存储，并且利用该电能信号，对信息处理模块203、所述存储模块204以及所述显示模块205供电。在示例实施例中，储能模块204可以采用线圈的形式，例如可以是超级电容器。因此，掩膜图案产生设备103本身并不配备电源，向其供应的电力来自于RFID控制器发送的RFID信号。 因此，在不需要更新掩膜图案的情况下，掩膜图案产生设备103不工作，从而降低了设备本身的功耗，同时由于不需要单独电源而降低了设备成本。
信息处理模块203配置为将RFID信号中的掩膜图案信息解析成掩膜图案数据。在示例实施例中，掩膜图案数据可以是二进制数、八进制数或十六进制数，但不限于特定数值。
存储模块204配置为存储与掩膜图案数据相对应的掩膜图案，并且对其在先存储的常用掩膜图案进行更新，即更新与所述图案掩膜数据相对应的掩膜图案。
显示模块205配置为在检测到存储模块204中的更新时，显示由存储模块204更新后的掩膜图案。在示例实施例中，储能模块202存储能够使得显示模块205更新显示画面所需的足够电能。在示例实施例中，显示模块205是电子墨水屏。电子墨水屏即为使用电子墨水的屏幕，是一种信息显示的新方法和技术。像多数传统墨水一样，电子墨水和改变其颜色的线路可以打印到多种表面上，例如，弯曲塑料、聚酯膜、纸或布。与传统纸的差异在于电子墨水在通电时改变颜色，并且可以显示变化的图像。基于上述电子墨水屏成像原理，在RFID控制器的驱动下，由本地PC或者移动设备提供图像信号，电子墨水屏出现选择性的透明区域，从而实现掩膜图案的显示，进而进行曝光处理。另外，电子墨水屏在静态显示时功耗极低，只有在更新画面是才需要消耗能量。
根据本示例实施例的掩膜图案产生设备自身并不需要存储大量掩膜图案并使用来自外部的电力以及低耗电的电子墨水屏，从而实现了快速方便、低成本的曝光处理。
接下来参考图4来描述根据本发明实施例的一种用于产生掩膜图案的方法400的流程图。
在步骤401处，由掩膜图案提供设备，通过有线或无线网络提供掩膜图案信号。
在步骤402处，由掩膜图案信息传送设备，对掩膜图案提供设备提供的掩膜图案信号进行处理，以产生掩膜图案信息，并且通过射频标识“RFID”信号传送掩膜图案信息。
在步骤403处，由掩膜图案产生设备，基于掩膜图案信息，产生与掩膜图案信息对应的掩膜图案并显示。
在本示例实施例中，利用物联网技术实现了掩膜图案提供设备(例如，本地PC或移动设备)与掩膜图案产生设备之间的交互，使得能够显示多种掩膜图案。进一步地，通过访问云端或网关来实现大量数据的处理，并且通过RFID技术实现无线供电(即，从RFID控制器供电)和信息传送。从而降低的了功耗、成本，节省了大量人力、物力以及机时浪费。
根据本发明另一实施例，还提出了一种智能曝光系统，包括如上所述实施例中的掩膜图案产生设备。该智能曝光系统调用掩膜图案产生设备所产生的掩膜图案对涂覆有光致抗蚀剂的基板进行曝光，来制造具有不同图案的半导体基板。在本实施例中，该智能曝光系统能够通过物联网与掩膜图案提供设备(例如，本地PC或移动设备)进行交互，因此在对不同基板进行曝光时，通过RFID调用了大量不同的掩膜图案，而无需在智能曝光系统内部存储这些大量掩膜图案。因此解决了传统的曝光系统需要工程师现场频繁调用曝光系统中存储的不同掩膜图案并进行确认而引起的大量人力、物力以及机时浪费。
应注意，本申请要求保护的主题内容在范围上不限于本文描述的具体实施方式。例如，一些实施方式可以是硬件形式，用于在例如设备或设备的组合上操作，而其他实施方式可以是软件和/或固件形式。类似地，虽然在这方面要求保护的主题内容在范围上不受限，但是一些实施方式可以包括一个或多个物品，例如存储介质或存储媒介。存储介质例如CD-ROM、计算机盘、闪速存储器等，其上可以存储有指令，当由计算机系统、计算平台或其他系统之类的系统执行时，可以使处理器根据要求保护的主题内容来执行，例如上述实施方式之一。一个可能方式是计算平台可以包括一个或多个处理单元或处理器、一个或多个输入/输出设备(例如显示器、键盘和/或鼠标)、以及一个或多个存储器(例如静态随机存取存储器、动态随机存取存储器、闪速存储器、和/或硬驱)。

Claims (12)

  1. 一种用于产生掩膜图案的系统，包括：
    掩膜图案提供设备，配置为通过有线或无线网络提供掩膜图案信号；
    掩膜图案传送设备，配置为对所述掩膜图案提供设备提供的所述掩膜图案信号进行处理，以产生掩膜图案信息，并且通过射频标识“RFID”信号传送产生的掩膜图案信息；以及
    掩膜图案产生设备，配置为基于所述掩膜图案信息，产生与所述掩膜图案信息对应的掩膜图案并显示。
  2. 根据权利要求1所述的系统，其中，所述掩膜图案提供设备是本地PC或移动设备。
  3. 根据权利要求1所述的系统，其中，所述有线网络是互联网、局域网、广域网、电信网络中的至少一个。
  4. 根据权利要求1所述的系统，其中，所述无线网络是3G网络、4G网络、LTE网络、WiFi网络、蓝牙网络和NFC网络中的至少一个。
  5. 根据权利要求1所述的系统，其中，所述掩膜图案传送设备包括：
    云端和/或网关，配置为对所述掩膜图案提供设备提供的所述掩膜图案信号进行处理；以及
    RFID控制器，配置为向所述掩膜图案产生设备发送所述RFID信号，以向所述掩膜图案产生设备供电并传送所述掩膜图案信息，
    其中所述RFID信号包括所述掩膜图案信息和用于对所述掩膜图案产生设备供电的电能信号。
  6. 根据权利要求5所述的系统，其中，所述掩膜图案产生设备包括：
    射频模块，配置为读取所述RFID控制器发送的所述RFID信号；
    储能模块，配置为存储所述RFID信号中的电能信号；
    信息处理模块，配置为将所述RFID信号中的所述掩膜图案信息解析成掩膜图案数据；
    存储模块，配置为存储并更新与所述掩膜图案数据相对应的掩膜图案；以及
    显示模块，用于显示由所述存储模块更新后的掩膜图案。
  7. 根据权利要求6所述的系统，其中，所述掩膜图案数据是二进制数、八进制数或十六进制数。
  8. 根据权利要求6所述的系统，其中，所述储能模块存储能够更新所述显示模块显示的掩膜图案的电能。
  9. 根据权利要求6所述的系统，其中，所述储能模块还配置为利用所述电能信号，对所述信息处理模块、所述存储模块以及所述显示模块供电。
  10. 根据权利要求6所述的系统，其中，所述显示模块是电子墨水屏。
  11. 一种智能曝光系统，包括前述权利要求中任一项所述的掩膜图案产生设备。
  12. 一种用于产生掩膜图案的方法，包括：
    由掩膜图案提供设备，通过有线或无线网络提供掩膜图案信号；
    由掩膜图案信息传送设备，对掩膜图案提供设备提供的掩膜图案信号进行处理，以产生掩膜图案信息，并且通过射频标识“RFID”信号传送掩膜图案信息；以及
    由掩膜图案产生设备，基于掩膜图案信息，产生与所述掩膜图案信息对应的掩膜图案并显示。
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