WO2017152401A1

WO2017152401A1 - Optical amplifier

Info

Publication number: WO2017152401A1
Application number: PCT/CN2016/076014
Authority: WO
Inventors: 赵家霖; 满江伟; 付生猛; 张红广
Original assignee: 华为技术有限公司
Priority date: 2016-03-09
Filing date: 2016-03-09
Publication date: 2017-09-14
Also published as: CN108701968B; CN108701968A

Abstract

An optical amplifier, relating to the field of optical communications and used for amplifying an optical signal and filtering out noise introduced when a semiconductor optical amplifier (SOA) amplifies signal light. The optical amplifier comprises an oppositely arranged base substrate (1) and cover layer (2), wherein the base substrate (1) comprises a first surface (101) and a second surface (102) opposite each other; an optical amplification layer (3) arranged between the base substrate (1) and the cover layer (2) and corresponding to a first sub-region (1011) of the first surface (101); a first optical grating (4) arranged between the base substrate (1) and the cover layer (2) and corresponding to a second sub-region (1012) of the first surface (101); a second optical grating (5) arranged in the plane where the first optical grating (4) is located and corresponding to a third sub-region (1013) of the first surface (101), wherein the first optical grating (4) and the second optical grating (5) are both chirped gratings; wavelength intervals of reflectivity stop bands of the first optical grating (4) and the second optical grating (5) do not overlap; a contact layer (6) is in contact with the cover layer (2); a first electrode (7) is in contact with the contact layer (6) and corresponds to the first sub-region (1011); and a second electrode (8) is in contact with the second surface (102) of the base substrate (1).

Description

Optical amplifier

Technical field

The present invention relates to the field of optical communications, and more particularly to an optical amplifier.

Background technique

Semiconductor optical amplifier (English: Semiconductor Optical Amplifier, SOA for short) has the advantages of small size, high gain and large gain bandwidth, so it has a wide range of applications in optical fiber communication systems.

For example, an optical line terminal (English: Optical Line Terminal, OLT for short) is used to amplify downlink and uplink signal light to meet time division wavelength division multiplexing-passive optical network (English: Time-and Wavelength- The high power budget required in the Division Multiplexed Passive Optical Network, referred to as TWDM-PON. In addition, when a photodiode (English: Photodiode, PD for short) is used as an optical receiver in a fiber-optic communication system, SOA can be used to amplify the signal light before the PD to improve the sensitivity of the system. In these applications, the spontaneous emission in the SOA causes the signal light to be amplified in the SOA while introducing the amplified spontaneous emission (Amplified Spontaneous Emission, ASE for short) noise, degrading the signal-to-noise ratio characteristic of the signal light, and increasing the system error. Code rate.

Currently, in order to filter out ASE noise, a bandpass optical filter is usually placed outside the SOA. As shown in Figure 1, a prism is placed between the filter and the SOA. After the signal light is amplified by the SOA, it enters the filter to filter out the ASE noise, and then is coupled to the PD for photoelectric conversion.

However, the provision of a prism between the SOA and the filter increases the cost of the device and the difficulty of packaging. In addition, if the coupling between the SOA and the filter is not good, it will cause a large signal light loss, which affects the reliability of the entire module.

Summary of the invention

Embodiments of the present invention provide an optical amplifier that avoids affecting the signal-to-noise ratio characteristic of signal light as much as possible while amplifying signal light, and at the same time saves production cost.

In order to achieve the above object, embodiments of the present invention adopt the following technical solutions:

In a first aspect, an optical amplifier is disclosed, comprising:

An oppositely disposed substrate substrate and a cover layer; the substrate substrate including opposing first and second surfaces.

a light amplifying layer disposed between the substrate substrate and the cover layer and corresponding to the first sub-region of the first surface;

a first grating disposed between the substrate substrate and the cover layer and corresponding to the second sub-region of the first surface;

a second grating disposed on a plane of the first grating and corresponding to a third sub-region of the first surface; the third sub-region and the first sub-region and the second sub-region Forming the first surface;

a contact layer disposed on a side of the cover layer away from the substrate substrate and in contact with the cover layer;

a first electrode disposed on a side of the contact layer away from the substrate, in contact with the contact layer, and corresponding to the first sub-region;

a second electrode in contact with the second surface of the base substrate;

Wherein the first grating and the second grating are both chirped gratings, and the wavelength intervals of the reflection stop bands of the first grating and the second grating do not overlap when the first electrode and the first electrode A current is injected between the two electrodes, and the optical amplifying layer can amplify the input signal light. It should be noted that the relative positions of the optical amplifying layer and the first grating and the second grating are not limited, and only the first grating and the second grating are ensured to be in one plane, and the optical amplifying layer can be combined with the first grating and the second grating. In a plane, it is not in a plane.

In the prior art, a filter is used to filter out the noise introduced by the SOA amplified signal light, but a prism is introduced to realize optical coupling, which increases the production cost and the packaging difficulty of the device. In the present application, the SOA is integrated with two gratings, and the wavelength intervals of the reflection stop bands of the two gratings do not overlap, which can form a narrow passband bandwidth, filter noise, and improve the signal to noise ratio. And the two gratings are simple 啁啾 gratings, which saves production cost and reduces the packaging difficulty of the device.

In conjunction with the first aspect, in a first possible implementation of the first aspect,

a first waveguide layer disposed between the light amplifying layer and the first surface and corresponding to the first sub-region;

a second waveguide layer disposed between the cover layer and the light amplifying layer and corresponding to the first sub-region;

The third waveguide layer is disposed between the first grating and the first surface, and corresponds to a region composed of the second sub-region and the third sub-region. That is, the third waveguide layer is in contact with the other side of the grating face of the first grating and the other side of the grating face of the second grating. Wherein, for the grating in which the score is set, the grating surface, that is, the grating, is provided with the surface of the score.

In this way, the signal light can be propagated inside the device (between the cover layer and the substrate), and after being amplified by the optical amplifying layer, the first grating and the second grating are filtered to remove noise, and are not emitted from the substrate or the cover layer.

In conjunction with the first possible implementation of the first aspect, in a second possible implementation manner of the first aspect, the wavelength interval of the reflective barrier of the first grating and the second grating is separated by a preset interval, The wavelength of the signal light is within a wavelength range of the predetermined interval.

The wavelength of the signal light is within the passband bandwidth formed by the reflection stop bands of the two chirped gratings. The passband bandwidth is formed to allow the signal light to pass, but the noise outside the passband bandwidth cannot pass, and the ASE can be effectively filtered out. noise.

In conjunction with the second possible implementation of the first aspect, in a third possible implementation of the first aspect,

The grating period of the first grating

The grating period of the second grating

And n ₁ Λ ₁₀ |D ₁ |+n ₂ Λ ₂₀ |D ₂ |+Δλ≈2|n ₁ Λ ₁₀ -n ₂ Λ ₂₀ |;

Wherein the Λ ₁₀ is a central period of the first grating, the D ₁ is a rate of change of a grating period of the first grating (referred to as a 啁啾 coefficient); and the Λ ₂₀ is the second grating a central period, the D ₂ is a rate of change of a grating period of the second grating; the -L/2 ≤ z ≤ L/2, the L is a length of the grating, and the n ₁ is the a refractive index of a grating, wherein n ₂ is a refractive index of the second grating, and the Δλ is a range wavelength range of the predetermined interval.

In this way, the parameters of the first grating and the second grating, such as the grating period, the center period, and the refractive index of the grating, can be set according to the above formula, and then a transmission channel having a wavelength range of Δλ can be determined, and thus the signal light can be The transmission channel passes, but the noise outside the passband bandwidth cannot pass, and the noise introduced when the signal light is amplified by the optical amplifying layer can be effectively filtered out.

In conjunction with any one of the first to third possible implementations of the first aspect, in a fourth possible implementation of the first aspect, the optical amplifier further includes:

a third electrode disposed on a side of the contact layer away from the substrate substrate, in contact with the contact layer, and corresponding to the second sub-region;

a fourth electrode disposed on a side of the contact layer away from the substrate substrate, in contact with the contact layer, and corresponding to the third sub-region;

When a current is injected between the third electrode and/or the fourth electrode and the second electrode, a wavelength interval of a reflection stop band of the first grating and the second grating may change.

When a current is injected between the third electrode and/or the fourth electrode and the second electrode, a refractive index of the waveguide of the first grating and the second grating changes, and a wavelength interval of the reflective stop band is also The wavelength range of the preset interval formed by the first grating and the second grating also changes, and the wavelength range of the transmitted light of the two gratings is changed, and can be adapted to different wavelength ranges. Signal light. In addition, by injecting different currents into different electrodes, it is possible to control different variations in the bandwidth of the reflection stop band of the grating, thereby more flexibly adapting to signal light of different wavelength ranges.

In conjunction with the fourth possible implementation of the first aspect, in a fifth possible implementation manner of the first aspect, the method further includes:

a buffer layer disposed between the first surface and the first waveguide layer and in contact with the first waveguide layer and the third waveguide layer.

In conjunction with any one of the first to fifth possible implementations of the first aspect, in a sixth possible implementation of the first aspect, the contact layer, the cover layer, The first waveguide layer, the light amplifying layer, the second waveguide layer, the buffer layer, and the base substrate are each disposed to be aligned at one end to form a first end surface (ie, a left end surface); the contact The layer, the cover layer, the second grating, the third waveguide layer, the buffer layer, and the substrate are disposed to be aligned at one end to form a second end surface (ie, a right end surface);

Also included are two anti-reflection coating layers that are in contact with the first end surface and the second end surface, respectively. In addition, the signal light is incident from the first end face.

By providing the two anti-reflection films, the signal light does not resonate in the cavity formed by the left and right surfaces of the optical amplifier, and the laser output is not formed.

In conjunction with the first aspect, or any one of the first to sixth possible implementations of the first aspect, in a sixth possible implementation of the first aspect, the buffer layer, the first waveguide The layer, the second waveguide layer and the third waveguide layer are all passive materials;

Wherein, the photon energy of the signal light is not within the energy range of the forbidden band width of the passive material, that is, the signal light is not absorbed by the buffer layer, the first waveguide layer, the second waveguide layer, and the third waveguide layer, The loss of signal light propagating in the waveguide layer is small. Further, the buffer layer, the first waveguide layer, the second waveguide layer, and the third waveguide layer do not have an optical amplification function.

In conjunction with the third possible implementation of the first aspect, in an eighth possible implementation of the first aspect,

The D ₁ = D ₂ = -12 × 10 ^-3 , the k = 100 cm ^-1 , the L = 1600 μm, the Λ ₁₀ = 237.8 nm, and the Λ ₂₀ = 241.3 nm.

In a specific implementation, the foregoing parameters of the first grating and the second grating may be set in such a manner that a better band pass filtering effect can be obtained.

In a second aspect, a method of fabricating an optical amplifier is disclosed, including:

Forming a buffer layer on the first surface of the base substrate;

Forming a first waveguide layer on the buffer layer, and forming a light amplifying layer on the first waveguide layer, and forming a second waveguide layer on the light amplifying layer;

The first waveguide layer, the optical amplifying layer, the second waveguide layer, and the first a portion of the second sub-region of a surface and a third sub-region of the first surface corresponding to etching, retaining the first waveguide layer, the optical amplifying layer, and the second waveguide layer and the first surface The corresponding portion of the first sub-region;

Forming a third waveguide layer on the buffer layer corresponding to the second sub-region and the third sub-region;

And etching a first grating and a second grating on the third waveguide layer; forming a cover layer corresponding to the first surface, and forming a contact layer on the cover layer;

Forming a first electrode on a surface of the contact layer, corresponding to the first sub-region;

Forming a second electrode on the second surface of the base substrate; the first surface being opposite to the second surface.

With reference to the second aspect, in a first possible implementation manner of the second aspect, the method further includes:

Forming a third electrode on the contact layer, the third electrode corresponding to the second sub-region;

A fourth electrode is formed on the contact layer, the fourth electrode corresponding to the third sub-region.

An anti-reflection film layer is disposed on the first end surface and the second end surface formed by the above process flow, and is respectively in contact with the first end surface and the second end surface;

It should be noted that the contact layer, the cover layer, the first waveguide layer, the light amplifying layer, the second waveguide layer, the buffer layer, and the base substrate are all disposed at one end ( The left end is aligned to form a first end surface, that is, a left end surface; the contact layer, the cover layer, the second grating, the third waveguide layer, the buffer layer, and the base substrate are disposed at one end ( The right end is aligned to form a second end face, that is, a right end face.

In conjunction with the second aspect or the first possible implementation of the first aspect, in a second possible implementation of the second aspect,

The material of the base substrate, the buffer layer, and the cover layer is InP.

The materials of the first waveguide layer, the second waveguide layer, the third waveguide layer, the optical amplifying layer, the first grating, and the second grating are all InGaAsP.

DRAWINGS

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the description of the prior art will be briefly described below. Obviously, the drawings in the following description are only It is a certain embodiment of the present invention, and other drawings can be obtained from those skilled in the art without any creative work.

Figure 1 is a schematic diagram of a conventional SOA noise filtering;

2 is a schematic structural diagram of a grating according to an embodiment of the present invention;

3 is a schematic structural diagram of a chirped grating according to an embodiment of the present invention;

4 is a structural block diagram of an optical amplifier according to an embodiment of the present invention;

FIG. 5 is a schematic diagram of filtering of an optical amplifier according to an embodiment of the present invention; FIG.

FIG. 6 is a block diagram showing another structure of an optical amplifier according to an embodiment of the present invention;

FIG. 7 is a band pass transmission response curve according to an embodiment of the present invention.

detailed description

The technical solutions in the embodiments of the present invention are clearly and completely described in the following with reference to the accompanying drawings in the embodiments of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, but not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative efforts are within the scope of the present invention.

In order to facilitate the understanding of the technical solution of the present invention, the present invention is first explained for explanation.

1) grating, the grating in the waveguide is generally made by periodically etching away part of the material on the surface of the semiconductor material, and the etched portion is epitaxially grown to cover another material to produce a periodic refractive index. Variety. Referring to FIG. 2, the scribing of the general grating is equally spaced, and the length of each scoring center is Λ, which is called a grating period.

2) 啁啾 grating, that is, a grating whose grating period changes. Referring to Figure 3, there is a chirped grating with a continuous reduction in grating period.

3) The 啁啾 coefficient refers to the rate of change of the grating period of the chirped grating.

The present invention provides an optical amplifier, as shown in FIG. 4, the optical amplifier includes: a substrate substrate 1, a cover layer 2, a light amplifying layer 3, a first grating 4, a second grating 5, a contact layer 6, and a first Electrode 7 and second electrode 8.

Specifically, the structure of each layer is described in detail with reference to FIG. 4:

The base substrate 1 is disposed opposite to the cover layer 2; the base substrate includes opposing first and

second surfaces

101, 102.

The light amplifying layer 3 is disposed between the base substrate 1 and the cover layer 2, and corresponds to the first sub-region of the first surface 101 1011;

The first grating 4 is disposed between the base substrate 1 and the cover layer 2 and corresponds to the second sub-region 1012 of the first surface 101. Here, the relative positions of the first grating 4 and the light amplifying layer 3 are not limited, and the illustration only shows a case where the opposite side of the grating face of the first grating is identical to the upper surface of the light amplifying layer. flat. Here, for the scribing type grating, a grating surface, that is, a grating, is provided with a surface of the score.

a second grating 5 disposed on a plane of the first grating 4 and corresponding to the third sub-region 1013 of the first surface 101; the third sub-region 1013 and the first sub-region 1011 and The second sub-region 1012 constitutes the first surface 101. The second grating 5 is disposed on a plane where the first grating 4 is located, that is, a side opposite to the grating surface of the second grating 5 is on the same plane as a side opposite to the grating surface of the first grating 4.

The first grating 4 and the second grating 5 are both chirped gratings.

The contact layer 6 is disposed on a side of the cover layer 2 away from the base substrate 1 and is in contact with the cover layer 2 .

The first electrode 7 is disposed on a side of the contact layer 6 away from the substrate 1 and is in contact with the contact layer 6 and corresponds to the first sub-region 1011.

The second electrode 8 is in contact with the second surface 102 of the base substrate 1.

In a specific implementation, referring to FIG. 4, signal light is incident from the left side of the light amplifying layer 3, and when a current is injected between the first electrode 7 and the second electrode 8, the signal light passing through the light amplifying layer 3 is amplified. In addition, the wavelength interval of the first grating 4 and the reflective stop band of the second grating 5 does not overlap, and the reflection of the first grating component and the second grating component The wavelength interval of the stop band is separated by a preset interval. Further, the wavelength of the signal light is within a wavelength range of the preset interval.

That is to say, by designing the range of the reflection stop band of the first grating 4 and the second grating 5, a narrow passband bandwidth can be formed, and the signal light can pass, but the noise outside the passband bandwidth (ie, the signal light is optically amplified). The ASE noise introduced by layer 3 cannot pass, and the ASE noise introduced by the signal light through the optical amplifying layer 3 can be more effectively filtered out. For example, referring to FIG. 5, the reflection stop band of the first grating 4 is a curve a, and the reflection stop band curve of the second grating 5 is a curve b. The two do not overlap, and the formed pass band is narrow, and the pass band of the signal light can be The pass band between the curve a and the curve b passes, and the noise cannot pass, thereby achieving the effect of filtering noise.

It should be noted that the material of the base substrate 1 and the cover layer 2 is InP (indium phosphide), and the material of the first grating 4 and the second grating 5 is InGaAsP (indium gallium arsenide).

In a specific implementation, the parameters of the first grating and the second grating may be set according to the following formula, such as: a grating period, a center period, and refractive indices of the first grating and the second grating, thereby determining a transmission of a wavelength range of Δλ. The channel, and thus the signal light, can pass through the transmission channel, but the noise cannot pass, and the noise introduced when the signal light is amplified by the optical amplifying layer can be effectively filtered out.

The grating period of the first grating

The grating period of the second grating

Wherein the Λ ₁₀ is a central period of the first grating, the D ₁ is a rate of change of a grating period of the first grating; the Λ ₂₀ is a central period of the second grating, the D ₂ is a rate of change of a grating period of the second grating; the -L/2 ≤ z ≤ L/2, the L is a length of the grating,

Medium L is the length of the first grating,

The middle L is the length of the second grating, the n ₁ is the refractive index of the first grating, the n ₂ is the refractive index of the second grating, and the Δλ is the wavelength range of the preset interval.

It should be noted that the center period of the grating is 1/2 of the length of the entire grating. The corresponding grating period. Further, in the above formula, z represents the coordinate on the coordinate axis Z, and the coordinate axis Z is on the surface of the first grating where the score is not provided, and is parallel to the first surface 101.

In addition, the coupling coefficient k of the grating can be adjusted by setting the structure of the waveguide layer and the depth of the grating notch. When the coupling coefficient k is increased, the noise loss becomes large, thereby improving the performance of the optical amplifier.

An embodiment of the present invention further provides an optical amplifier. As shown in FIG. 6, the optical amplifier includes a base substrate 1, a cover layer 2, a light amplifying layer 3, a first grating 4, a second grating 5, and a contact layer 6. The first electrode 7 and the second electrode 8 may further include: a first waveguide layer 9, a second waveguide layer 10, a third waveguide layer 11, a buffer layer 12, a third electrode 13, a fourth electrode 14, and an anti-reflection Film 15 and antireflection film 16.

Specifically, the structure of each layer is described in detail with reference to FIG. 5:

The first waveguide layer 9 is disposed between the light amplifying layer 3 and the first surface 101 and corresponds to the first sub-region 1011.

a second waveguide layer 10 disposed between the cover layer 2 and the light amplifying layer 3 and corresponding to the first sub-region 1011;

The third waveguide layer 11 is disposed between the first grating 4 and the first surface 101 and corresponds to a region composed of the second sub-region 1012 and the third sub-region 1013. That is to say, it is in contact with the surface of the first grating 4 which is not provided with a score, and the surface of the second grating 5 which is not provided with a score.

In this way, the signal light can be propagated inside the device (between the cover layer 2 and the substrate 1), amplified by the optical amplifying layer 3, and then enters the first grating 4 and the second grating 5 to filter out noise, substantially without the substrate. The substrate 2 or the cover layer 1 is emitted to reduce the loss of signal light.

The buffer layer 12 is disposed between the first surface 101 and the first waveguide layer 9 and the third waveguide layer 11. The buffer layer 12 is in contact with the first surface 101, the first waveguide layer 9, and the third waveguide layer 11.

Further, the third electrode 13 is disposed on a side of the contact layer 6 away from the base substrate 1 , is in contact with the contact layer 6 , and corresponds to the second sub-region 1012 .

The fourth electrode 14 is disposed on a side of the contact layer 6 away from the base substrate 1 , is in contact with the contact layer 6 , and corresponds to the third sub-region 1013 .

In a specific implementation, a current may be injected between the third electrode 13 and the second electrode 8 by using a power source, and/or a current may be injected between the fourth electrode 14 and the second electrode 8 to change the first grating 4 and/or the second. The refractive index of the grating 5, and further the wavelength interval of the reflection stop bands of the first grating 4 and the second grating 5 also change, and the wavelength of the predetermined interval changes. The current injected between the third electrode 13 and the second electrode 8 and the current injected between the fourth electrode 14 and the second electrode 8 may be the same or different, and are not limited herein. By injecting different currents into different electrodes, it is possible to control different changes in the reflection resistance of the grating, thereby more flexibly adapting to signal light of different wavelength ranges.

Here, by changing the refractive index of the first grating 4 and the second grating 5 by injecting a current into the optical amplifier, the wavelength intervals of the reflection stop bands of the first grating 4 and the second grating 5 are changed, Thus, the wavelength range of the preset interval formed by the first grating 4 and the second grating 5 also changes, and the wavelength range of the band passband formed by the two gratings is also changed, and can be adapted to signals of different wavelength ranges. Light.

In addition, it should be noted that, referring to FIG. 6, the contact layer 6, the cover layer 2, the first waveguide layer 9, the optical amplifying layer 3, the second waveguide layer 10, and the buffer layer 12 and the left end of the base substrate 1 are aligned to form a first end surface, that is, a left end surface. The contact layer 6, the cover layer 2, the third waveguide layer 11, the second grating 5, the buffer layer 12, and the right end of the base substrate 1 are aligned to form a second end surface, that is, a right end surface .

The optical amplifier further includes two anti-reflection coating layers: an anti-reflection film 15 and an anti-reflection film 16, which are in contact with the first end surface and the second end surface, respectively.

In a specific implementation, the signal light is incident on the first end surface and amplified by the optical amplifying layer 3 .

It should be noted that the buffer layer 12, the first waveguide layer 9, the second waveguide layer 10, and the third waveguide layer 11 are all passive materials.

Wherein, the photon energy of the signal light is not within the energy range of the forbidden band width of the passive material, that is, the signal light is not absorbed by the first waveguide layer, the second waveguide layer, and the third waveguide layer, so the signal light is The loss of propagation of the waveguide layer is small. Further, the first waveguide layer, the second waveguide layer, and the third waveguide layer do not have an optical amplification function.

In a specific implementation, the parameters of the first grating 4 and the second grating 5 can be set as follows, and the band-pass transmission response curve shown in FIG. 7 can be obtained.

Specifically, the D ₁ = D ₂ = -12 × 10 ^-3 , the k = 100 cm ^-1 , the L = 1600 μm, the Λ ₁₀ = 237.8 nm, and the Λ ₂₀ = 241.3 nm.

The optical amplifier provided by the invention integrates SOA with two gratings, and the wavelength intervals of the reflection stop bands of the two gratings do not overlap, which can form a narrow passband bandwidth, filter noise, and improve signal to noise ratio. . In the prior art, the noise introduced by the SOA to amplify the signal light is filtered by the filter, but the prism is introduced to realize the optical coupling, which increases the production cost and the packaging difficulty of the device. In the invention, the two gratings are all simple chirped gratings, which saves production cost and reduces the packaging difficulty of the device, but can effectively filter out the noise introduced when the SOA amplifies the signal light.

The above is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily think of changes or substitutions within the technical scope of the present invention. It should be covered by the scope of the present invention. Therefore, the scope of the invention should be determined by the scope of the claims.

Claims

An optical amplifier, comprising:

a substrate substrate and a cover layer disposed oppositely; the substrate substrate includes opposing first and second surfaces;

a light amplifying layer disposed between the substrate substrate and the cover layer and corresponding to the first sub-region of the first surface;

a first grating disposed between the substrate substrate and the cover layer and corresponding to the second sub-region of the first surface;

a second grating disposed on a plane of the first grating and corresponding to a third sub-region of the first surface; the third sub-region and the first sub-region and the second sub-region Forming the first surface;

a contact layer disposed on a side of the cover layer away from the substrate substrate and in contact with the cover layer;

a first electrode disposed on a side of the contact layer away from the substrate, in contact with the contact layer, and corresponding to the first sub-region;

a second electrode in contact with the second surface of the base substrate;

Wherein the first grating and the second grating are both chirped gratings, and the wavelength intervals of the reflection stop bands of the first grating and the second grating do not overlap when the first electrode and the first electrode A current is injected between the two electrodes, and the optical amplifying layer can amplify the input signal light.
The optical amplifier of claim 1 further comprising:

a first waveguide layer disposed between the light amplifying layer and the first surface and corresponding to the first sub-region;

a second waveguide layer disposed between the cover layer and the light amplifying layer and corresponding to the first sub-region;

The third waveguide layer is disposed between the first grating and the first surface, and corresponds to a region composed of the second sub-region and the third sub-region.
The optical amplifier according to claim 2, wherein a wavelength interval of the reflection stop band of the first grating and the second grating is separated by a predetermined interval, the signal light The wavelength is within the wavelength range of the predetermined interval.
The optical amplifier according to claim 3, wherein

The grating period of the first grating
The grating period of the second grating
And n 1 Λ 10 |D 1 |+n 2 Λ 20 |D 2 |+Δλ≈2|n 1 Λ 10 -n 2 Λ 20 |;

Wherein the Λ 10 is a central period of the first grating, the D 1 is a rate of change of a grating period of the first grating; the Λ 20 is a central period of the second grating, the D 2 is a rate of change of a grating period of the second grating; the -L/2≤z≤L/2, the L is a length of the grating, and the n 1 is a refractive index of the first grating, The n 2 is a refractive index of the second grating, and the Δλ is a wavelength range of the preset interval.
The optical amplifier according to any one of claims 2 to 4, further comprising:

a third electrode disposed on a side of the contact layer away from the substrate substrate, in contact with the contact layer, and corresponding to the second sub-region;

a fourth electrode disposed on a side of the contact layer away from the substrate substrate, in contact with the contact layer, and corresponding to the third sub-region;

When a current is injected between the third electrode and/or the fourth electrode and the second electrode, a wavelength interval of a reflection stop band of the first grating and the second grating changes.
The optical amplifier according to claim 5, further comprising:

a buffer layer disposed between the first surface and the first waveguide layer and in contact with the first surface, the first waveguide layer, and the third waveguide layer.
The optical amplifier according to any one of claims 2 to 6, wherein the contact layer, the cover layer, the first waveguide layer, the optical amplifying layer, the second waveguide layer, and the The buffer layer and the substrate substrate are each disposed to be aligned at one end to form a first end surface; the contact layer, the cover layer, the second grating, the third waveguide layer, the buffer layer, and the The base substrate is disposed to be aligned at one end to form a second end surface;

The method further includes two anti-reflection coating layers respectively contacting the first end surface and the second end surface, The signal light is incident by the first end surface.
The optical amplifier according to any one of claims 1 to 7, wherein the buffer layer, the first waveguide layer, the second waveguide layer, and the third waveguide layer are all passive materials;

Wherein, the photon energy of the signal light is not within the energy range of the forbidden band width of the passive material.