WO2017140145A1 - 基于内置液囊和固定波长的高分辨温度传感器 - Google Patents

基于内置液囊和固定波长的高分辨温度传感器 Download PDF

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WO2017140145A1
WO2017140145A1 PCT/CN2016/106682 CN2016106682W WO2017140145A1 WO 2017140145 A1 WO2017140145 A1 WO 2017140145A1 CN 2016106682 W CN2016106682 W CN 2016106682W WO 2017140145 A1 WO2017140145 A1 WO 2017140145A1
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sac
waveguide
temperature sensor
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fixed wavelength
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欧阳征标
陈治良
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Shenzhen University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/006—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of the effect of a material on microwaves or longer electromagnetic waves, e.g. measuring temperature via microwaves emitted by the object

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  • the invention relates to a high-resolution, nano-scale temperature sensor, in particular to a high-sensitivity temperature sensor based on built-in liquid capsule and single-wavelength laser detection.
  • Temperature sensors are one of the most widely used sensors in the world. From the thermometers in our lives, thermometers to large instruments and temperature control devices on integrated circuits, temperature sensors are everywhere.
  • Traditional temperature sensors such as thermal resistors, platinum resistors, and bimetal switches, have their own advantages, but are no longer suitable for use in miniature and high precision products.
  • Semiconductor temperature sensors have high sensitivity, high resolution, low power consumption, and high anti-interference ability, making them widely used in semiconductor integrated circuits.
  • Waveguides based on surface plasmons can break through the limits of diffraction limits and achieve nanoscale optical information processing and transmission.
  • the surface plasmon is a surface electromagnetic wave propagating on the metal surface formed by the free electron coupling of the electromagnetic wave and the metal surface when the electromagnetic wave is incident on the interface between the metal and the medium.
  • the sensitivity of the temperature sensor in the prior art is 70 pm / ° C or -0.65 nm / ° C, although the temperature sensor is small, but the sensitivity or resolution is not high.
  • the object of the present invention is to overcome the deficiencies of the existing temperature sensor resolution and to provide a high resolution temperature sensor that facilitates the integration of the MIM structure.
  • the invention is based on a built-in sac and a fixed wavelength high resolution temperature sensor consisting of an internal sac, a metal block, a vertical waveguide, a horizontal waveguide, two metal films and a horizontally propagating signal light;
  • the signal light is of a fixed wavelength;
  • the liquid capsule is connected to the vertical waveguide, the metal block is disposed within the vertical waveguide, and is movable;
  • the vertical waveguide is connected to the horizontal waveguide; and the signal light is at a fixed wavelength.
  • the substance in the sac is a substance having a high coefficient of thermal expansion
  • the substance having a high expansion coefficient is alcohol or mercury.
  • the shape of the cross section of the sac is rectangular, circular, polygonal, elliptical or irregular.
  • the metal is gold or silver.
  • the metal is silver.
  • the horizontal waveguide and the vertical waveguide are waveguides of a MIM structure.
  • the medium within the horizontal waveguide is air.
  • the signal light is a single wavelength laser having a wavelength of 792 nm.
  • the movable silver block is fixed at a position of 116 nm.
  • the resolution is high, the average temperature resolution reaches 0.0083 °C on average, and the highest resolution is 0.005 °C.
  • FIG. 1 is a two-dimensional structural diagram of a first embodiment of a high resolution temperature sensor of the present invention.
  • FIG. 2 is a schematic view of the three-dimensional structure shown in FIG. 1.
  • FIG 3 is a schematic view showing the two-dimensional structure of a second embodiment of the high resolution temperature sensor of the present invention.
  • FIG. 4 is a schematic view of the three-dimensional structure shown in FIG.
  • Figure 5 is a transmission spectrum diagram of signal light of different wavelengths.
  • Figure 6 is an average of the intervals of transmittance for different wavelengths.
  • Fig. 7 is a graph showing the derivative of the transmittance corresponding to temperature.
  • the present invention is based on a built-in sac and a fixed-wavelength high-resolution temperature sensor consisting of a metal film 1, a built-in sac 2, and a metal block. 3.
  • Lower, high thermal expansion coefficient, high expansion coefficient material is alcohol or mercury, preferably alcohol; metal is gold or silver, preferably silver, metal film thickness (hereinafter referred to as h 1 ) using 100nm or more The value range is preferably 100 nm thick; the thickness of the liquid capsule 2 is larger than the thickness h 1 of the silver film; the metal block 3 is disposed in the vertical waveguide 4 and can be moved, and the length m of the moving metal block 3 is 80 nm-150 nm.
  • the distance s of the block 3 from the horizontal waveguide 5 is in the range of 0 nm to 200 nm, and is determined by the position of the metal block 3, which is gold or silver, preferably silver; the vertical waveguide 4 and the horizontal waveguide 5 are connected;
  • the vertical waveguide 4 and the horizontal waveguide 5 are waveguides of the MIM structure, that is, the MIM waveguide is a metal-insulator-metal structure; the insulator is made of a non-conductive transparent material; the non-conductive transparent material is air, silicon dioxide, or silicon;
  • the waveguide 4 and the horizontal waveguide 5 are connected;
  • the width b of the vertical waveguide 4 is in the range of 30 nm to 60 nm, and the width is preferably 35 nm, and the length M of the vertical waveguide 4 is 200 nm or more, and the length is preferably 300 nm;
  • the vertical waveguide 4 The distance a from the left edge to the left edge of the metal film 6 is in the range of 350 n
  • the vertical waveguide 4 is located at the upper end of the horizontal waveguide 5; the width d of the horizontal waveguide 5 is in the range of 30 nm to 100 nm, and the width is preferably 50 nm, and the medium in the horizontal waveguide 5 is air; the lower edge of the horizontal waveguide 5 is away from the metal film 6
  • the distance c of the edge uses a range of values greater than 150 nm.
  • the present invention changes the volume of the alcohol by a change in temperature, causing it to expand to push the movable metal block 3 to move toward the horizontal waveguide 5 to change the length of the air segment in the vertical waveguide 4, and the movable metal block 3 moves downward to make it horizontal.
  • the distance of the waveguide 5 changes, and the transmittance of the signal light changes accordingly; since the movable metal block 3 moves downward, it is controlled by temperature. Therefore, the change of temperature affects the change of the transmittance of the signal light, and the change of the temperature information can be detected according to the change of the transmittance; the characteristic of the transmittance can correspond to the temperature one by one, that is, the temperature can be known from the characteristics of the transmittance Variety.
  • the expansion of silver is negligible at the same temperature change. In the present invention, the influence of temperature changes on the volume of silver is no longer considered.
  • the relationship between the position change of the metal block and the temperature can be calculated, thereby defining a proportional coefficient ⁇ indicating the moving distance of the metal block corresponding to the change of the unit temperature.
  • the present invention is based on a built-in sac and a fixed-wavelength high-resolution temperature sensor consisting of a metal film 1, a built-in sac 2, and a metal block. 3.
  • the material in the cavity has a lower specific heat capacity and is a substance with a high coefficient of thermal expansion.
  • the substance in the liquid capsule 2 is a substance having a lower specific heat capacity and a high thermal expansion coefficient, and the high expansion coefficient substance is alcohol or mercury. It is preferable to use alcohol; the metal is gold or silver, preferably silver, the thickness of the metal film h 1 is in the range of 100 nm or more, and the thickness is preferably 100 nm; the thickness of the liquid capsule 2 is larger than the thickness of the silver film h 1 ;
  • the metal block 3 is disposed in the vertical waveguide 4; To move, the length of the moving metal block 3 is in the range of 80 nm to 150 nm, and the length is preferably 125 nm.
  • the distance s of the movable metal block 3 from the horizontal waveguide 5 is in the range of 0 nm to 200 nm, and the position of the metal block 3 is It is determined that the metal block 3 is gold or silver, preferably silver; the vertical waveguide 4 is connected to the horizontal waveguide 5; the horizontal waveguide 5 and the vertical waveguide 4 are waveguides of the MIM structure, that is, the MIM waveguide is a metal-insulator-metal structure
  • the insulator is made of a non-conductive transparent material; the non-conductive transparent material is air, silicon dioxide, or silicon; the vertical waveguide 4 is located at the upper end of the horizontal waveguide 5; the medium in the horizontal waveguide 5 is air; and the vertical waveguide 4 has a width b of 30 nm.
  • the value range of -60 nm is optimal with a width of 35 nm, and the length M of the vertical waveguide 4 is 200 nm or more, and the length of 300 nm is optimal; the distance a from the left edge of the vertical waveguide 4 to the left edge of the metal film 6 is 350 nm to 450 nm.
  • the range of values is best at 400 nm.
  • the width d of the horizontal waveguide 5 is in the range of 30 nm to 100 nm, and the width is preferably 50 nm.
  • the medium in the horizontal waveguide 5 is air; the distance from the lower edge of the horizontal waveguide 5 to the edge of the metal film 6 is greater than 150 nm. range.
  • the present invention changes the volume of the alcohol by a change in temperature, causing it to expand to push the movable metal block 3 to move toward the horizontal waveguide 5 to change the length of the air segment in the vertical waveguide 4; since the movable metal block 3 moves downward due to temperature Control, so the change of temperature affects the change of the transmittance of the signal light, and the change of the temperature information can be detected according to the change of the transmittance; the characteristic of the transmittance can correspond to the temperature one by one, that is, the temperature can be known from the characteristics of the transmittance Variety.
  • the movable metal block 3 is moved downward to change the distance to the horizontal waveguide 4, and the transmittance of the signal light changes accordingly.
  • the transmittance values are sequentially different, and then they are averaged in absolute value.
  • the change value of the transmittance in each unit wavelength interval in the unit temperature interval can be obtained, and the result is shown in Fig. 6.
  • the curve in the figure represents the average value of the intervals of the transmittances of the respective wavelengths at the scanning interval of 0.025 °C.
  • the transmittance of each wavelength of the horizontal waveguide 5 can be obtained when the temperature changes are certain, and then the transmittance values of the corresponding wavelengths are sequentially different and then the absolute values are summed and averaged, so that each temperature interval is fixed.
  • the average of the differences in wavelength transmittance From the figure, when the wavelength is 792 nm, the transmittance interval has a maximum value of 0.067207.
  • the horizontally propagated signal light 200 is a single wavelength laser, and the horizontal waveguide signal light is At a single source of 792 nm, the change in temperature affects the change in the transmittance of the signal light, and the change in temperature information can be detected based on the change in transmittance.
  • the average resolution of the temperature sensor designed by this detection method is set to 0.0083 ° C by setting the transmittance change of the detector to a single wavelength transmittance of 2%. After the temperature sensor increases the volume of the sac 2, the movable metal block 3 is more sensitive to temperature. After the volume of the sac 2 is doubled, the resolution of the temperature sensor is also doubled to 0.00415 °C. As shown in FIG.
  • the temperature resolution of the temperature sensor at this position can be calculated as 0.005 ° C, which is the resolution of the temperature sensor at a fixed temperature point.
  • the measurement of the vicinity of a fixed temperature point allows the movable metal block 3 to be fixed at 116 nm, so that a high sensitivity or high resolution measurement at a fixed temperature point can be achieved.

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Abstract

一种基于内置液囊和固定波长的高分辨率温度传感器，由一个液囊（2）、金属块（3）、一个竖直波导（4）、一个水平波导（5）、两个金属膜（1，6）和一个水平传播的信号光（200）组成，液囊（2）和竖直波导（4）连接，金属块（3）设置竖直波导（4）内，且可以移动；竖直波导（4）和水平波导（5）连接，信号光（200）采用固定波长。结构紧凑、体积小、分辨率高，便于集成。

Description

基于内置液囊和固定波长的高分辨温度传感器 技术领域
本发明涉及一种高分辨率，纳米尺度的温度传感器，尤其涉及一种基于内置液囊和单一波长激光探测的高灵敏度温度传感器。
背景技术
温度传感器是实际应用中最广泛的传感器之一，从我们生活中的寒暑表，体温计到大型仪器以及集成电路上的温控设备，温度传感器无处不在。传统温度传感器，例如热电阻、铂电阻，双金属开关等虽然有着各自的优点，但在微型和高精度产品中却不再适用。半导体温度传感器灵敏度或分辨率高、体积小、功耗低、抗干扰能力强等优点使得其在半导体集成电路中应用非常广泛。
基于表面等离子激元的波导却能突破衍射极限的限制，实现纳米尺度的光信息处理和传输。表面等离子激元是当电磁波入射到金属与介质分界面时，电磁波和金属表面的自由电子耦合形成的一种在金属表面传播的表面电磁波。
目前，根据表面等离子激元的性质，提出了基于表面等离子体结构的器件，例如滤波器、环形器、逻辑门、光开关等。这些器件在结构上都比较简单，非常便于光路集成。
现有技术中的温度传感器灵敏度为70pm/℃或-0.65nm/℃，虽然温度传感器体积很小，但是灵敏度或分辨率并不高。
发明内容
本发明的目的是克服现有温度传感器分辨率的不足，提供一种便于集成的MIM结构的高分辨率温度传感器。
本发明的目的通过下述技术方案予以实现。
本发明基于内置液囊和固定波长的高分辨率温度传感器，它由一个内置液囊、金属块、一个竖直波导、一个水平波导、两个金属膜和一个水平传播的信号光组成；所述信号光采用固定波长；所述液囊和所述竖直波导连接，所述金属块设置竖直波导内，且可以移动；所述竖直波导和水平波导连接；所述信号光采用固定波长。
所述液囊内物质为高热膨胀系数的物质；
所述高膨胀系数的物质为酒精或者水银。
所述液囊截面的形状为矩形、圆形、多边形、椭圆形或者不规则形状。
所述金属为金或银。
所述金属为银。
所述水平波导和竖直波导为MIM结构的波导。
所述水平波导内的介质为空气。
所述信号光为单一波长激光，其波长为792nm的激光。
所述可移动银块固定位置为116nm。
本发明与现有技术相比的有益效果是：
1.具有结构紧凑，体积小，非常便于集成。
2.分辨率高，温度平均分辨率平均达到0.0083℃，最高分辨率为0.005℃。
附图说明
图1是本发明高分辨率温度传感器第一种实施例二维结构示意图。
图中：金属膜1 内置液囊2 金属块3 竖直波导4 水平波导5 金属膜6 水平传播的信号光200
图2是图1所示的三维结构示意图。
图3是本发明高分辨率温度传感器第二种实施例二维结构示意图。
图中：金属膜1 内置液囊2 金属块3 竖直波导4 水平波导5 金属膜6 水平传播的信号光200
图4是图3所示的三维结构示意图。
图5是不同波长信号光的透射频谱图。
图6是不同波长透射率的间隔的平均值。
图7是透射率对应温度的导数曲线图。
具体实施方式
下面结合附图与实施例对本发明作进一步的描述。
如图1和2(图2中省略了结构上面的封装介质)所示，本发明基于内置液囊和固定波长的高分辨率温度传感器，它由金属膜1、一个内置液囊2、金属块3、一个竖直波导4、一个水平波导5、金属膜1、6(没有被刻蚀的金属膜)和一个水平传播的信号光200(波导表面形成表面等离子激元)组成；信号光采用固定波长；液囊2和竖直波导4连接，液囊2(温度敏感腔)截面为圆形腔，半径为R，其截 面积采用502655nm2，厚度为1μm，该液囊2内的物质为比热容较低的，且为高热膨胀系数的物质，高膨胀系数物质为酒精或水银，最好采用酒精；金属采用金或银，最佳为银，金属膜厚度(以下用h1表示)采用100nm以上取值范围，以100nm厚度为最佳；液囊2的厚度大于银膜的厚度h1；金属块3设置竖直波导4内，且可以移动，移动金属块3长度m采用80nm-150nm取值范围，以125nm长度为最佳，可移动金属块3距离水平波导5的距离s采用0nm-200nm距离范围，且由金属块3的位置确定，该金属块3为金或银，最佳为银；竖直波导4和水平波导5连接；竖直波导4和水平波导5为MIM结构的波导，即MIM波导为金属-绝缘体-金属结构；绝缘体采用不导电透明物质；所述不导电透明物质为空气、二氧化硅、或硅；竖直波导4和水平波导5连接；竖直波导4宽度b采用30nm-60nm取值范围，以35nm宽度为最佳，竖直波导4长度M采用200nm以上，以300nm长度为最佳；竖直波导4的左边缘到金属膜6左边缘的距离a采用350nm-450nm取值范围，以400nm为最佳。竖直波导4位于水平波导5的上端；水平波导5宽度d采用30nm-100nm取值范围，以50nm宽度为最佳，水平波导5内的介质为空气；水平波导5的下边缘距离金属膜6的边缘的距离c采用大于150nm的取值范围。
本发明通过温度的变化来改变酒精的体积，使其膨胀推动可移动金属块3向水平波导5移动来改变竖直波导4内空气段的长度，可移动金属块3向下移动使得其到水平波导5距离发生变化，信号光的透过率也就随之发生变化；由于可移动金属块3往下移动受温度的控 制，所以温度的变化影响信号光的透射率的变化，根据透射率的变化即可探测温度信息的变化；透射率的特征可以与温度一一对应，即从透射率的特征即可知道温度的变化。当温度又降回初始温度时，在外界大气压的作用下，金属块3又会回到初始压力平衡的位置，方便下一次探测。
本发明液囊2内的酒精体积膨胀系数为αethanol＝1.1×10-3/℃，在室温(20℃)时密度为ρ＝0.789g/cm3。银的线膨胀系数为αAg＝19.5×10-6/℃。相比于酒精的膨胀系数，在相同温度变化下，银的膨胀可以忽略不计。在本发明中，即不再考虑温度变化对银的体积的影响。根据液囊的体积和可移动金属块的截面积可以计算出金属块的位置变化与温度的关系，由此定义一个比例系数σ表示单位温度的变化对应的金属块移动距离
Figure PCTCN2016106682-appb-000001
此式也可以作为衡量该结构的温度敏感性。根据此式可以得出圆形吸收腔的截面积及可移动金属块的宽度对金属块的位置变化影响比较大，综合考虑选择S＝502655nm2，b＝35nm。则σ＝157nm/℃，此结果为金属块的移动量与温度的关系。
如图3和4(图4中省略了结构上面的封装介质)所示，本发明基于内置液囊和固定波长的高分辨率温度传感器，它由金属膜1、一 个内置液囊2、金属块3、一个竖直波导4、一个水平波导5、金属膜6(没有被刻蚀的金属膜1、6)和一个水平传播的信号光200(波导表面形成表面等离子激元)组成；所述信号光采用固定波长；液囊2和竖直波导4连接，液囊2(温度敏感腔)截面积为六边形腔，边长为r，其截面积为502655nm2，厚度为1μm，该温度敏感腔内的物质比热容比较低，且为高热膨胀系数的物质，液囊2(温度敏感腔)内的物质为比热容较低的，且为高热膨胀系数的物质，高膨胀系数物质为酒精或水银，最好采用酒精；金属采用金或银，最佳为银，金属膜厚度h1采用100nm以上取值范围，以100nm厚度为最佳；液囊2的厚度大于银膜h1的厚度；可移动金属块3设置竖直波导4内；且可以移动，移动金属块3长度m采用80nm-150nm取值范围，以125nm长度为最佳，可移动金属块3距离水平波导5的距离s采用0nm-200nm距离范围，且由金属块3的位置确定，该金属块3为金或银，最佳为银；竖直波导4和水平波导5连接；水平波导5和竖直波导4为MIM结构的波导，即MIM波导为金属-绝缘体-金属结构；绝缘体采用不导电透明物质；不导电透明物质为空气、二氧化硅、或硅；竖直波导4位于水平波导5的上端；水平波导5内的介质为空气；竖直波导4宽度b采用30nm-60nm取值范围，以35nm宽度为最佳，竖直波导4长度M采用200nm以上，以300nm长度为最佳；竖直波导4的左边缘到金属膜6左边缘的距离a采用350nm-450nm取值范围，以400nm为最佳。水平波导5宽度d采用30nm-100nm取值范围，以50nm宽度为最佳，水平波导5内的介质为空气；水平波导5 的下边缘距离金属膜6的边缘的距离c采用大于150nm的取值范围。
本发明通过温度的变化来改变酒精的体积，使其膨胀推动可移动金属块3向水平波导5移动来改变竖直波导4内空气段的长度；由于可移动金属块3往下移动受温度的控制，所以温度的变化影响信号光的透射率的变化，根据透射率的变化即可探测温度信息的变化；透射率的特征可以与温度一一对应，即从透射率的特征即可知道温度的变化。当温度又降回初始温度时，在外界大气压的作用下，金属块3又会回到初始压力平衡的位置，方便下一次探测。
可移动金属块3往下移动使其到水平波导4距离发生变化，信号光的透过率也就随之发生变化。如图5所示，本发明结构在s的值不同时波长为700nm-1000nm的各个波长的光的透过率。银块的初始位置为初始温度(如20℃)时的位置，其值s＝160nm；利用仿真软件扫描可以得到温度变化一定时，水平波导5各个波长的透过率，然后再让相应波长的透过率值依次相差，然后对其做绝对值平均。这样就可以得到每个波长的在单位温度间隔内透射率的变化值，其结果如图6所示，图中曲线代表扫描间隔为0.025℃时各个波长透射率的间隔的平均值。利用仿真软件扫描可以得到温度变化一定时，水平波导5各个波长的透过率，然后再让相应波长的透过率值依次相差然后绝对值求和取平均，这样就得到了温度间隔固定时各个波长透射率的差的平均值。从图中可以得到波长为792nm时，透射率间隔有最大值为0.067207。
水平传播的信号光200为单一波长激光，该水平波导信号光为 792nm的单一光源，温度的变化影响信号光的透射率的变化，根据透射率的变化即可探测温度信息的变化。设定探测器对于单一波长透射率的分辨率能力为2％的透射率变化量，则用这种探测方式设计的温度传感器的平均分辨率达到0.0083℃。温度传感器在增加液囊2的体积后，可移动金属块3对温度更加敏感。在液囊2体积增加一倍后，温度传感器的分辨率的值也会提高一倍，达到0.00415℃。如图7所示，同样对入射信号光为792nm的情况下，扫描其在不同温度下的透射率，扫描温度间隔为0.01℃，即可移动金属块3的移动间隔为1.57nm。扫描结果如图7中黑色点状曲线所示。然后对曲线进行微分求出dt/dT,即透射率对温度的导数曲线图。所求曲线如图7中黑色不加点曲线所示。在处理图像时，将相应温度点对应可移动金属块3的位置也标注在横轴上，以便于查找透射率变化最大的位置。根据黑色不加点曲线可以得到s＝116nm的位置有最大的透射率变化率。根据扫描间隔可以计算出温度传感器在该位置的温度分辨率为0.005℃，此为固定温度点该温度传感器的分辨率。
在实际应用中针对某一个固定温度点附近进行测量，可以将可移动金属块3固定在116nm处，这样既可以实现固定温度点高灵敏度或高分辨率的测量。
尽管本专利已介绍了一些具体的实例，只要不脱离本专利权利要求所规定的精神，各种更改对本领域技术人员来说是显而易见的。

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  1. 一种基于内置液囊和固定波长的高分辨率温度传感器，其特征在于：它由一个内置液囊、金属块、一个竖直波导、一个水平波导、两个金属膜和一个水平传播的信号光组成；所述液囊和所述竖直波导连接，所述金属块设置竖直波导内，且可以移动；所述竖直波导和水平波导连接；所述信号光采用固定波长。
  2. 按照权利要求1所述的基于内置液囊和固定波长的高分辨率温度传感器，其特征在于：所述液囊内物质为高热膨胀系数的物质。
  3. 按照权利要求2所述的基于内置液囊和固定波长的高分辨率温度传感器，其特征在于：所述高膨胀系数的物质为酒精或者水银。
  4. 按照权利要求1所述的基于内置液囊和固定波长的高分辨率温度传感器，其特征在于：所述液囊截面的形状为矩形、圆形、多边形、椭圆形或者不规则形状。
  5. 按照权利要求1所述的基于内置液囊和固定波长的高分辨率温度传感器，其特征在于：所述金属为金或者银。
  6. 按照权利要求5所述的基于内置液囊和固定波长的高分辨率温度传感器，其特征在于：所述金属为银。
  7. 按照权利要求1所述的基于内置液囊和固定波长的高分辨率温度传感器，其特征在于：所述水平波导和竖直波导为MIM结构的波导。
  8. 按照权利要求1所述的基于内置液囊和固定波长的高分辨率温度传感器，其特征在于：所述水平波导内的介质为空气。
  9. 按照权利要求1所述的基于内置液囊和固定波长的高分辨率温 度传感器，其特征在于：所述信号光为单一波长激光，其波长为792nm的激光。
  10. 按照权利要求1所述的基于内置液囊和固定波长的高分辨率温度传感器，其特征在于：所述可移动金属块的固定位置为116nm。
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