WO2017119093A1

WO2017119093A1 - Irradiation device for heating

Info

Publication number: WO2017119093A1
Application number: PCT/JP2016/050313
Authority: WO
Inventors: 道生瀧川; 森　一富; 和宏弥政; 良夫稲沢
Original assignee: 三菱電機株式会社
Priority date: 2016-01-07
Filing date: 2016-01-07
Publication date: 2017-07-13
Also published as: JPWO2017119093A1; MY189980A; JP6042040B1

Abstract

This irradiation device for heating comprises: a high-frequency generator 1 serving as an electromagnetic wave generator for generating electromagnetic waves for heating; a plurality of antennae 3 for irradiating, onto an object to be heated 5, the electromagnetic wave for heating generated by the high-frequency generator 1; and a reaction oven 4 having an internal space for housing the object to be heated 5, and an upper surface whereof a portion is a convex portion having a curved surface shape, the reaction oven 4 having irradiation ports being mounted on the surface of the convex portion, each of the irradiation ports being from each of the antennae 3. Each of the antennae 3 are arranged into a curved surface shape on the surface of the convex portion of the reaction oven 4 in such a manner that each irradiation direction from each of the antennae 3 is oriented toward a specific point 6 on the object to be heated 5.

Description

Irradiation device for heating

The present invention relates to a heating irradiation apparatus, and more particularly to a heating irradiation apparatus that heats a substance by irradiating it with a high frequency.

A chemical reaction apparatus and a chemical reaction method are known in which heat treatment or the like is performed by a method using internal heating of a substance using high frequency. Research and development for practical application of industrial applications is being actively conducted (for example, see Patent Document 1).

Japanese Patent No. 5603134

In this type of conventional chemical reaction apparatus, when irradiating a high frequency, depending on the reaction of the substance and the state of heating, the irradiation distribution is changed or the irradiation is efficiently performed locally. There is a desire to promote chemical reactions.

Well-known high-frequency generators used in high-frequency chemical reaction equipment are electron tube oscillators typified by magnetrons used in microwave ovens. The electron tube oscillator can output a large amount of power. However, the electron tube oscillator is characterized in that it has a range in the frequency of the oscillating high frequency and that the output characteristics have a large time fluctuation. Therefore, when a plurality of electron tube oscillators are synthesized, there is a problem that the synthesis loss is large and the efficiency is lowered.

The present invention has been made to solve such problems, and in the case where a plurality of high frequencies are combined and used, a heating irradiation apparatus capable of suppressing irradiation loss and performing efficient irradiation is provided. The purpose is to get.

The present invention includes an electromagnetic wave generator that generates an electromagnetic wave for heating, a plurality of antennas that irradiate an object to be heated with the electromagnetic wave for heating generated by the electromagnetic wave generator, and a part of an upper surface that is a convex portion having a curved surface. An irradiation port of each antenna is attached to the surface of the convex portion, and a reaction furnace having an internal space for accommodating the object to be heated, the irradiation direction of each antenna being the object to be heated Each of the antennas is a heating irradiation device arranged in a curved surface on the surface of the convex portion of the reaction furnace so as to go to the specific point.

According to the heating irradiation apparatus of the present invention, by synthesizing a plurality of high frequencies, it is possible to efficiently irradiate the object to be heated in the reaction furnace that is a closed space, and to perform the reaction in a short time. Heating can be performed, and further, an effect that energy efficiency associated therewith can be achieved.

It is a block diagram which shows the structure of the irradiation apparatus for heating which concerns on Embodiment 1 of this invention. It is the figure which showed the comparative example for demonstrating the effect by the irradiation apparatus for a heating which concerns on Embodiment 1 of this invention. It is explanatory drawing explaining the effect by the irradiation apparatus for heating which concerns on Embodiment 1 of this invention. It is explanatory drawing explaining the effect by the irradiation apparatus for heating which concerns on Embodiment 1 of this invention. It is explanatory drawing explaining the effect by the irradiation apparatus for heating which concerns on Embodiment 1 of this invention using a graph. It is a block diagram which shows the structure of the irradiation apparatus for heating which concerns on Embodiment 2 of this invention. It is the figure which showed the comparative example for demonstrating the effect by the irradiation apparatus for heating which concerns on Embodiment 2 of this invention. It is explanatory drawing explaining the effect by the irradiation apparatus for heating which concerns on Embodiment 2 of this invention. It is explanatory drawing explaining the effect by the irradiation apparatus for heating which concerns on Embodiment 2 of this invention. It is the figure which showed the comparative example for demonstrating the effect by the irradiation apparatus for heating which concerns on Embodiment 2 of this invention. It is explanatory drawing explaining the effect by the irradiation apparatus for heating which concerns on Embodiment 2 of this invention using a graph. It is a block diagram which shows the structure of the irradiation apparatus for heating which concerns on Embodiment 3 of this invention. It is a block diagram which shows the structure of the irradiation apparatus for heating which concerns on Embodiment 4 of this invention. It is a block diagram which shows the structure of the irradiation apparatus for heating which concerns on Embodiment 5 of this invention. It is a block diagram which shows the structure of the irradiation apparatus for heating which concerns on Embodiment 6 of this invention.

Embodiment 1 FIG.
FIG. 1 is a configuration diagram showing a configuration of a heating irradiation apparatus according to Embodiment 1 of the present invention. As shown in FIG. 1, the heating irradiation apparatus includes a high-frequency generator 1, a high-frequency supply path 2, an antenna 3, and a reaction furnace 4.

In the heating irradiation apparatus according to Embodiment 1, the object to be heated 5 is accommodated in the internal space of the reaction furnace 4, and in this state, the high frequency generated by the high frequency generator 1 is transferred from the antenna 3 to the object to be heated 5. Irradiation is performed to heat the article 5 to be heated. The heated object 5 may be in any form of gas, liquid, and solid. In FIG. 1, the object to be heated 5 is illustrated as a rectangle along the shape of the internal space of the reaction furnace 4, but the shape of the object to be heated 5 may be arbitrary.

The high frequency generator 1 generates a high frequency heating electromagnetic wave (hereinafter simply referred to as a high frequency) for irradiating the object to be heated 5 in the reaction furnace 4. The high frequency generator 1 is composed of a frequency variable electromagnetic wave generator in which the frequency of the high frequency to be generated is variable. Here, it is assumed that microwaves are used as the high frequency generated by the high frequency generator 1. A microwave is a region of electromagnetic waves. An electromagnetic wave having a frequency range of 0.3 to 30 GHz and a wavelength range of 1 cm to 1 m in a conventional radio wave classification is called a microwave. However, the high-frequency generator 1 in the present embodiment is not limited to the microwave, and any frequency and any wavelength may be appropriately selected. The high frequency generator 1 is disposed outside the reaction furnace 4. The type of the high frequency generator 1 may be appropriately selected as long as the phase coherence is high. In FIG. 1, one high frequency generator 1 is provided for a plurality of antennas 3, but one high frequency generator 1 may be connected to each antenna 3.

The high frequency supply path 2 is connected to the high frequency generator 1 and the antenna 3. The high frequency supply path 2 transmits the high frequency generated by the high frequency generator 1 to the antenna 3 and supplies it to the antenna 3. The high frequency supply path 2 may be appropriately selected as long as it is any member that can efficiently transmit a high frequency, such as a coaxial cable or a waveguide.

The antenna 3 irradiates a heated object 5 installed in the reaction furnace 4 with a high frequency from an irradiation port. A plurality of antennas 3 are provided. In FIG. 1, five antennas 3 are provided, but the number of antennas 3 may be appropriately selected. As the antenna 3, for example, a waveguide may be used as it is, or may be appropriately selected as long as it is a device that can efficiently radiate a high frequency to a space, such as a horn antenna or a patch antenna. The directions of the high-frequency vectors emitted from the antennas 3 are all directed toward the specific point 6 set in advance. The specific point 6 may be appropriately set in the reaction furnace 4, and the position thereof is not particularly limited. However, the specific point 6 is often set at the center in the reaction furnace 4. The reason is that the article to be heated 5 is usually placed at the central portion in the reaction furnace 4. Further, the specific point 6 does not have to be a point, and may be a circular shape having an area or a band-like region. Each antenna 3 is arranged in a curved surface on the surface of the curved surface 7 in order to efficiently concentrate the high frequency on the specific point 6 of the object to be heated 5. In addition, the curved surface 7 is comprised from the spherical surface centering on the specific point 6 of the to-be-heated object 5, as shown in FIG. The arrangement intervals of the antennas 3 are equal. The arrangement interval of the antennas 3 is desirably set to one wavelength or less of the high frequency irradiated from the antenna 3. In addition, the distance between the irradiation port of the antenna 3 and the surface of the object to be heated 5 is preferably set to 5 wavelengths or less of the high frequency irradiated from the antenna 3. In FIG. 1, the antennas 3 are arranged one-dimensionally along one arc on the curved surface 7. However, the present invention is not limited to this. Depending on the size, it may be two-dimensionally or three-dimensionally arranged along the curved surface 7.

The reaction furnace 4 has an internal space in which the object to be heated 5 is accommodated, and the object to be heated 5 is heated or reacted at a high frequency in the internal space. The material of the reaction furnace 4 may be appropriately selected as long as it does not leak high frequency to the outside. Alternatively, only the internal space of the reaction furnace 4 may be surrounded by a member such as a metal wall that can shield high frequencies. In that case, as the material of the reaction furnace 4 itself, any material that cannot shield high frequency may be selected, and any material can be selected. About the shape of the reaction furnace 4, you may select suitably according to the form (for example, distinction of gas, liquid, solid) of the to-be-heated material 5 made to react, and a characteristic. Further, the reactor 4 is generally provided with a charging / discharging port for charging and discharging the article to be heated 5. In the case where the object to be heated 5 is an individual, the reaction furnace 4 may be provided with a transport device such as a belt conveyor through which the object to be heated 5 flows. When the object to be heated 5 is gas or liquid, a stirrer for stirring the object to be heated 5 in the reaction furnace 4 may be provided. Moreover, in order to heat or react the to-be-heated material 5 efficiently, the to-be-heated material 5 may contain a catalyst. These charging / discharging ports, stirrer, belt conveyor, catalyst, and the like are considered to be a general configuration of a chemical reaction apparatus, and the internal structure of the reaction furnace 4 is not limited and may be appropriately selected.
In the present embodiment, a part of the upper surface of the reaction furnace 4 is a convex part constituted by a part of the curved surface 7. The irradiation port of the antenna 3 is attached to the surface of this convex part.

Next, the operation of the heating irradiation apparatus according to the first embodiment will be described.

First, the high frequency generated by the high frequency generator 1 is fed to the antenna 3 via the high frequency supply path 2. The antenna 3 radiates the supplied high frequency from the irradiation port. In this way, the high frequency wave radiated from the antenna 3 is irradiated to the object to be heated 5 in the reaction furnace 4. A plurality of antennas 3 are arranged on a spherical curved surface 7 centered on the specific point 6 of the object to be heated 5 in order to efficiently concentrate the high frequency on the specific point 6 of the object to be heated. Therefore, all the vectors of the high-frequency radiation direction from the antenna 3 are directed to the specific point 6 of the object to be heated 5. If the phase coherence of the high frequency generated by the high frequency generator 1 is high, it is possible to spatially synthesize a plurality of high frequencies from each antenna 3 and to efficiently heat the specific point 6 of the object to be heated. Become. At this time, the arrangement interval of the antennas 3 is desirably one wavelength or less of the high frequency as described above. The reason for this is that if the arrangement interval is wide, the area where the irradiation area from the antenna 3 to the object to be heated 5 is overlapped decreases. Further, as described above, the distance between the irradiation port of the antenna 3 and the surface of the object to be heated 5 is desirably one fifth or less of the high frequency. The reason will be explained. The high frequency radiated from each antenna 3 spreads with distance. Therefore, if the distance to the object to be heated 5 is large, it is reflected at a portion where the object to be heated 5 in the reaction furnace 4 does not exist, the irradiation distribution to the object to be heated 5 is disturbed, and a loss in high frequency synthesis occurs. It is because it ends. For efficient space synthesis, it is necessary to match the output phase of the high frequency emitted from each antenna 3. In the present embodiment, by adjusting the length of the high-frequency supply path 2 as appropriate, the high-frequency output phase irradiated from each antenna 3 is matched.

2A to 2D show the effects of the first embodiment. 2A to 2D show the efficiency of the irradiation power to the specific point 6 of the heated object 5 in the reaction furnace 4 with respect to the input power. In the verification shown in FIGS. 2A to 2D, the specific point 6 is set at the center of the reaction furnace 4. In FIG. 2A, FIG. 2B, and FIG. 2C, the specific point 6 is distinguished and shown as

specific points

6A, 6B, and 6C, respectively. FIG. 2A shows a conventional system in which an electron tube oscillator capable of high output and one antenna are provided. 2B and 2C show the heating irradiation apparatus according to the first embodiment shown in FIG. 2B and 2C, the high-frequency generator 1 having high phase coherence and the five antennas 3 are provided. FIG. 2B shows a case where power is concentrated at a specific point 6 of the object to be heated 5 by adjusting the length of the high-frequency supply path 2 and setting the phase. On the other hand, FIG. 2C adjusts the length of the high frequency supply path 2 and sets the phase so that the same amount of power as in FIG. 2A in which only one antenna is provided is concentrated at the specific point 6. Shows the case. 2A to 2C, the antenna 3 is a rectangular waveguide, the center-to-center distance is 0.6 wavelength, and the height of the center antenna is 1.7 wavelengths. 2A to 2C, the total high-frequency power irradiated into the reaction furnace 4 is the same.

At this time, in FIGS. 2A to 2C, the efficiency of the irradiation power to the specific point 6 of the heated object in the reaction furnace 4 with respect to the input power was measured. The result is shown in FIG. 2D. The horizontal axis in FIG. 2D indicates

specific points

6A, 6B, and 6C, respectively. A vertical axis | shaft shows the power efficiency to the specific point of a to-be-heated material. From the bar graph of FIG. 2D, it can be seen that the power efficiency in the vicinity of the specific point 6 of the object to be heated 5 is larger in FIG. 2B than in FIG. On the other hand, FIG. 2C shows that the same power efficiency as in FIG. 2A is realized. Thus, in Embodiment 1, desired power efficiency can be realized by adjusting the length of the high-frequency supply path 2. Moreover, what is necessary is just to select the setting value of a phase suitably with the form (for example, gas, liquid, solid) of the to-be-heated material 5, and a characteristic.

As described above, the heating irradiation apparatus according to Embodiment 1 is heated by the high-frequency generator 1 as an electromagnetic wave generator that generates a heating electromagnetic wave and the heating electromagnetic wave (high-frequency) generated by the high-frequency generator 1. The plurality of antennas 3 that irradiate the object 5 and a part of the upper surface thereof are curved convex portions, the irradiation ports of the antennas 3 are attached to the surface of the convex portions, and the object to be heated 5 is accommodated. Each antenna 3 has a curved surface on the surface of the convex portion of the reaction furnace 4 so that the irradiation direction of each antenna 3 is directed to a specific point 6 of the object 5 to be heated. Is arranged. At this time, the curved surface 7 of the convex portion is composed of a part of a spherical surface centered on the specific point 6.
As described above, according to the first embodiment, the high frequency generator 1 having high phase coherence is used to spatially synthesize the high frequencies from the plurality of antennas 3 arranged in a curved surface in the reaction furnace 4. Compared with the method using the electron tube oscillator, it is possible to efficiently heat the object 5 to be heated.

Embodiment 2. FIG.
FIG. 3 is a diagram showing a configuration of a heating irradiation apparatus according to Embodiment 2 of the present invention. 3, parts that are the same as or equivalent to those in the heating irradiation apparatus according to Embodiment 1 shown in FIG. 1 are given the same reference numerals, and descriptions thereof are omitted.

Differences between the first embodiment and the second embodiment will be described.
First, the first difference will be described. In the first embodiment, the antenna 3 is arranged on the curved surface 7 in a curved shape. On the other hand, in the second embodiment, the upper surface of the reaction furnace 4 is a flat plane, and the irradiation port of each antenna 3 is arranged on the plane. Therefore, in the second embodiment, the antennas 3 are arranged linearly as shown in the cross-sectional view of FIG.
Next, the second difference will be described. In the first embodiment, the number of antennas 3 is an arbitrary number. On the other hand, in the second embodiment, the number of antennas 3 is limited to three.
Since other configurations are the same as those in the first embodiment, the description thereof is omitted here.

In the present embodiment, as shown in FIG. 3, the vector of the irradiation direction of one antenna 3 is directed toward the specific point 6 of the object 5 to be heated. Two other antennas 3 are arranged on both sides of the antenna 3. The arrangement intervals of the antennas 3 are equal. The arrangement interval of the antennas 3 is desirably set to one wavelength or less of the high frequency irradiated from the antenna 3. In addition, the distance between the irradiation port of the antenna 3 and the surface of the object to be heated 5 is preferably set to 5 wavelengths or less of the high frequency irradiated from the antenna 3.

As shown in FIG. 3, when the antennas 3 are arranged in a straight line, the number of antennas 3 is effectively three. If one antenna 3 is further arranged on both sides of the three antennas 3 in FIG. 3 for a total of five, the area where the irradiation area from the antenna 3 to the object to be heated 5 is superimposed is reduced. The increase in efficiency proportional to the number of antennas 3 cannot be expected.

4A to 4E verify the effects of the second embodiment. 4A to 4E show the efficiency of the irradiation power to the specific point 6 of the heated object 5 in the reaction furnace 4 with respect to the input power. Also in the verification of FIGS. 4A to 4E, the specific point 6 is set at the center of the reactor 4 as in the first embodiment. In FIG. 4A, FIG. 4B, FIG. 4C, and FIG. 4D, the specific points 6 are distinguished and shown as

specific points

6D, 6E, 6F, and 6G, respectively.

FIG. 4A shows a conventional system provided with an electron tube oscillator capable of high output and one antenna. 4B and 4C show the heating irradiation apparatus according to the second embodiment shown in FIG. 4B and 4C, a high-frequency generator 1 with high phase coherence and three antennas 3 arranged in a straight line are provided. In FIG. 4D, a high-frequency generator 1 with high phase coherence and five antennas 3 arranged linearly are provided. 4B and 4D show a case where power is concentrated on a specific point 6 of the object to be heated 5 by adjusting the length of the high-frequency supply path 2 and setting the phase. On the other hand, FIG. 4C adjusts the length of the high-frequency supply path 2 and sets the phase so that the same amount of power as in FIG. 4A in which only one antenna 3 is provided is concentrated at the specific point 6. This shows the case. 4A to 4D, the antenna 3 is a rectangular waveguide, the distance between the centers is 0.9 wavelength, and the height of the center antenna is 1.2 wavelengths. 4A to 4D, the total high-frequency power irradiated into the reaction furnace 4 is the same.

At this time, in FIGS. 4A to 4D, the efficiency of the irradiation power to the specific point 6 of the heated object in the reaction furnace 4 with respect to the input power was measured. The result is shown in FIG. 4E. The horizontal axis in FIG. 4E indicates

specific points

6D, 6E, 6F, and 6G, respectively. A vertical axis | shaft shows the power efficiency to the specific point of a to-be-heated material. From the bar graph of FIG. 4E, it can be seen that the specific point 6E of FIG. 4B has higher power efficiency near the specific point 6 of the heated object 5 than the specific point 6D of FIG. Will improve. On the other hand, at the specific point 6F in FIG. 4C, it is possible to achieve the same power efficiency as the specific point 6D in FIG. 4A. Further, it can be seen that the specific point 6E in FIG. 4B in which the number of antennas 3 is three is higher in efficiency than the specific point 6G in FIG. 4D in which the number of antennas 3 is five. That is, as described above, when the antennas are arranged linearly, it can be said that three antennas 3 are effective. What is necessary is just to select suitably the setting value of a phase with the form (for example, gas, liquid, solid) of the to-be-heated material 5, and a characteristic.

As described above, the heating irradiation apparatus according to the second embodiment is heated by the high frequency generator 1 as an electromagnetic wave generator that generates a heating electromagnetic wave (high frequency) and the heating electromagnetic wave generated by the high frequency generator 1. Reaction that has three antennas 3 for irradiating the object 5 and an upper surface of the antenna 3 that is flat and has an irradiation space for the object 3 and an irradiation port of the antenna 3 attached to the upper surface. The three antennas are arranged in a straight line, and the three antennas are arranged so that the irradiation direction of the electromagnetic wave for heating is directed to the specific point 6 of the object to be heated 5; The other two antennas 3 arranged on both sides of one antenna 3 are included.
As described above, in the second embodiment, the high-frequency generator 1 having high phase coherence is used to spatially synthesize the high-frequency waves from the three antennas 3 arranged linearly in the reaction furnace 4. Even in this case, the same effect as in the first embodiment can be obtained.

Embodiment 3 FIG.
FIG. 5 is a diagram showing a configuration of a heating irradiation apparatus according to Embodiment 3 of the present invention. Parts that are the same as or equivalent to those in the heating irradiation apparatus according to Embodiment 1 shown in FIG. 1 are given the same reference numerals, and descriptions thereof are omitted.

Differences between the first embodiment and the third embodiment will be described.
As shown in FIG. 5, in the third embodiment, one phase shifter 51 and one amplifier 52 are provided for each antenna 3. This point is different from the first embodiment. FIG. 5 shows the case where the configuration of the third embodiment is applied to the configuration of the first embodiment, but the configuration of the third embodiment is applied to the configuration of the second embodiment. Also good.
Since other configurations are the same as those in the first and second embodiments, the description thereof is omitted here.

The phase shifter 51 is attached in the high frequency supply path 2. The phase shifter 51 is connected to the high frequency generator 1 through a part of the high frequency supply path 2. The phase shifter 51 controls the phase amount to the antenna 3 regardless of the length of the high-frequency supply path 2. The phase shifter 51 may be appropriately selected as long as it can change the amount of phase shift, such as a voltage-controlled variable phase shifter.

The amplifier 52 is attached in the high frequency supply path 2. The amplifier 52 is provided between the phase shifter 51 and the antenna 3. The amplifier 52 is connected to the phase shifter 51 and the antenna 3 through a part of the high-frequency supply path 2. The amplifier 52 amplifies the high frequency to the antenna 3, and may be appropriately selected as long as it can amplify the high frequency, such as an amplifier constituted by a semiconductor device.

The output from the antenna 3 can be changed by the phase shifter 51 and the amplifier 52. Therefore, in the output to the article 5 to be heated, the efficiency realized by the configurations of FIGS. 2B and 2C and FIGS. 4B and 4C described above can be realized without changing the length of the high-frequency supply path 2. Is possible.

As described above, according to the third embodiment, by providing the phase shifter 51 and the amplifier 52, the same effect as in the first and second embodiments can be obtained without adjusting the length of the high-frequency supply path 2. Obtainable.

Embodiment 4 FIG.
FIG. 6 is a diagram showing a configuration of a heating irradiation apparatus according to Embodiment 4 of the present invention. The same or corresponding parts as those of the heating irradiation apparatus according to the third embodiment shown in FIG.

Differences between the third embodiment and the fourth embodiment will be described.
As can be seen from a comparison between FIG. 5 and FIG. 6, in the fourth embodiment, an amplitude / phase acquisition unit 71, an amplitude / phase monitor 72, and a high-frequency output control device 73 are added.
Other configurations and operations are the same as those in the third embodiment.

In FIG. 6, the position where the phase shifter 51 is provided is illustrated so as to change stepwise. This is because a plurality of signals connecting the high frequency output control device 73 and the phase shifter 51 are shown. For the sake of convenience, the positions of the phase shifters 51 are described in steps so as to be shifted step by step for the sake of convenience. Actually, as in FIG. 5, the phase shifters 51 are arranged in a straight line. It's okay.

One amplitude / phase acquisition unit 71 is provided for each antenna 3. The amplitude / phase acquisition unit 71 is provided between the antenna 3 and the amplifier 52. The amplitude / phase acquisition unit 71 acquires the amplitude and phase of the high frequency incident into the reaction furnace 4 and acquires the amplitude and phase of the high frequency reflected from the reaction furnace 4. Hereinafter, the high frequency incident into the reaction furnace 4 is referred to as “input wave”, and the high frequency reflected from the reaction furnace 4 is referred to as “reflected wave”. The amplitude / phase acquisition unit 71 may be appropriately selected as long as it can acquire both amplitude and phase, such as a directional coupler. Note that here, the amplitude / phase acquisition unit 71 is described as acquiring both the amplitude and phase of the input wave and the amplitude and phase of the reflected wave. Only one of the phase and the amplitude and phase of the reflected wave may be acquired.

The amplitude / phase monitor 72 monitors the amplitude / phase acquisition unit 71. Specifically, the amplitude / phase monitor 72 acquires the amplitude and phase of the input wave and reflected wave acquired by the amplitude / phase acquisition unit 71 as an amplitude value and a phase value, respectively. The amplitude / phase monitor 72 is composed of, for example, a network analyzer, but is not limited thereto, and may be appropriately selected. Only one amplitude / phase monitor 72 is provided for the plurality of amplitude / phase acquisition units 71.

The high frequency output control device 73 controls the high frequency generator 1, the phase shifter 51, and the amplifier 52 based on the amplitude value and the phase value of the input wave and the reflected wave monitored by the amplitude / phase monitor 72. In FIG. 6, signal lines that connect the high-frequency output control device 73 and the amplifier 52 are not shown for the sake of simplicity.

The high frequency output control device 73 is composed of a processor and a memory, for example, a personal computer. Each function of the high-frequency output control device 73 is realized by a processing circuit such as a CPU or a system LSI that executes a program stored in a memory. A plurality of processors and a plurality of memories may cooperate to execute each function of the high-frequency output control device 73. However, the high-frequency output control device 73 is not limited to a personal computer, and may be appropriately selected from other hardware.

Next, the operation of the heating irradiation apparatus according to the fourth embodiment will be described.
The high frequency output control device 73 stores the input wave and the amplitude value and the phase value of the reflected wave obtained by the amplitude / phase monitor 72 in a memory. The high frequency output control device 73 provides the frequency of the high frequency generator 1 and the phase shifter 51 based on the amplitude value and the phase value stored in the memory in order to provide the optimum irradiation distribution of the high frequency in the reactor 4. And the amount of amplification of the amplifier 52 are controlled. The high-frequency output control device 73 does not necessarily need to control all of the frequency of the high-frequency generator 1, the phase value of the phase shifter 51, and the amplification amount of the amplifier 52, and controls at least one of them. That's fine.

The operation will be described.
The amplitude and phase of the input wave and the reflected wave obtained by the amplitude / phase acquisition unit 71 are sent to the high frequency output control device 73 via the amplitude / phase monitor 72. If there is a change in the heating state of the article 5 to be heated, a change occurs in the input wave and the reflected wave. Therefore, for example, the high frequency output control device 73 can control the high frequency generator 1, the phase shifter 51, and the amplifier 52 by preparing a lookup table based on calculated values in advance. Note that look-up tables are prepared for the high-frequency generator 1, the phase shifter 51, and the amplifier 52, respectively. This will be described below.

In the look-up table for the high frequency generator 1, the correspondence relationship between the amplitude value and phase value of the input wave, the amplitude value and phase value of the reflected wave, and the frequency of the high frequency generator 1 is determined in advance. . Therefore, the optimum frequency of the high-frequency generator 1 can be obtained based on the amplitude value and phase value of the input wave and the amplitude value and phase value of the reflected wave according to the lookup table.

Similarly, in the look-up table for the phase shifter 51, the correspondence relationship between the amplitude value and phase value of the input wave, the amplitude value and phase value of the reflected wave, and the phase value of the phase shifter 51 is stored in advance. It has been established. Therefore, the optimum phase value of the phase shifter 51 can be obtained based on the amplitude value and phase value of the input wave and the amplitude value and phase value of the reflected wave according to the lookup table.

Similarly, in the look-up table for the amplifier 52, the correspondence relationship between the amplitude value and phase value of the input wave, the amplitude value and phase value of the reflected wave, and the amplification amount of the amplifier 52 is determined in advance. ing. Therefore, the optimum amplification amount of the amplifier 52 can be obtained based on the amplitude value and phase value of the input wave and the amplitude value and phase value of the reflected wave according to the lookup table.

Thus, the high-frequency output control device 73 controls the high-frequency generator 1, the phase shifter 51, and the amplifier 52, for example, so that the input wave and the reflected wave are larger so that the input wave is larger and the reflected wave is smaller. Can be controlled. Thereby, in the output of the high frequency to the to-be-heated object 5, the efficiency equivalent to the efficiency obtained from the structure of FIG. 2B and FIG. 2C mentioned above or the structure of FIG. 4B and FIG. Can be realized in real time.

The high-frequency output control device 73 does not need to use all of the amplitude value and phase value of the input wave and the amplitude value and phase value of the reflected wave for control, and uses at least one of these values for control. What should I do?

As described above, according to the fourth embodiment, the amplitude / phase acquisition unit 71, the amplitude / phase monitor 72, and the high-frequency output control device 73 are provided, so that real-time according to the state of the object to be heated 5. Therefore, the irradiation distribution can be controlled, and a more efficient heating effect can be obtained.

Embodiment 5 FIG.
FIG. 7 is a diagram showing a configuration of a heating irradiation apparatus according to Embodiment 5 of the present invention. The same or corresponding parts as those of the heating irradiation apparatus according to the third embodiment shown in FIG.

Differences between the third embodiment and the fifth embodiment will be described.
As can be seen from a comparison between FIG. 5 and FIG. 7, in the fifth embodiment, a temperature acquisition unit 81 that acquires the temperature of the article 5 to be heated, a temperature monitor 82 that monitors the temperature, and a high-frequency output control device 73 include Have been added.
Other configurations and operations are the same as those in the third embodiment.

In FIG. 7, the position where the phase shifter 51 is provided is illustrated so as to change stepwise. This is because a plurality of signals connecting the high-frequency output control device 73 and the phase shifter 51 are shown. For the sake of convenience, the positions of the phase shifters 51 are described in steps so as to be shifted step by step for the sake of convenience. Actually, as in FIG. 5, the phase shifters 51 are arranged in a straight line. It's okay.

FIG. 7 shows the case where the configuration according to the fifth embodiment is applied to the third embodiment, but the configuration according to the fifth embodiment is applied to the fourth embodiment. Also good. In that case, it is not necessary to provide two high-frequency output control devices 73, and the single high-frequency output control device 73 allows the amplitude value and phase value of the input wave, the amplitude value and phase value of the reflected wave, and the object to be heated. The high-frequency generator 1, the phase shifter 51, and the amplifier 52 are controlled based on at least one of the five temperatures. The high-frequency output control device 73 does not necessarily need to control all of the frequency of the high-frequency generator 1, the phase value of the phase shifter 51, and the amplification amount of the amplifier 52, and controls at least one of them. That's fine.

The temperature acquisition unit 81 is provided inside the reaction furnace 4. The temperature acquisition unit 81 measures the temperature of the object to be heated 5 in the reaction furnace 4. The temperature acquisition unit 81 may be appropriately selected as long as the temperature can be measured, such as a thermocouple or a thermography. Further, a plurality of temperature acquisition units 81 may be provided in the reaction furnace 4, and the attachment position is not particularly limited.

The temperature monitor 82 monitors the temperature acquisition unit 81. Specifically, the temperature monitor 82 acquires the temperature acquired by the temperature acquisition unit 81 as a value. The temperature monitor 82 is composed of, for example, a data logger or the like, but is not limited thereto and may be selected as appropriate. Only one temperature monitor 82 is provided for the plurality of temperature acquisition units 81.

The temperature obtained by the temperature acquisition unit 81 is sent to the high frequency output control device 73 via the temperature monitor 82. The high frequency output control device 73 controls the high frequency generator 1, the phase shifter 51, and the amplifier 52 according to the temperature distribution of the article to be heated 5 based on the temperature monitored by the temperature monitor 82. Thereby, in the output of the high frequency to the to-be-heated object 5, the efficiency equivalent to the efficiency obtained from the structure of FIG. 2B and FIG. 2C mentioned above or the structure of FIG. 4B and FIG. Can be realized in real time.

As described above, according to the fifth embodiment, by providing the temperature acquisition unit 81, the temperature monitor 82, and the high-frequency output control device 73, the irradiation distribution is real-time according to the state of the heated object 5. It becomes controllable and the more efficient heating effect is acquired.

Embodiment 6 FIG.
FIG. 8 is a diagram showing a configuration of a heating irradiation apparatus according to Embodiment 6 of the present invention. The same or corresponding parts as those in the microwave heating irradiation apparatus according to the third embodiment shown in FIG.

Differences between the third embodiment and the sixth embodiment will be described.
As can be seen by comparing FIG. 5 and FIG. 8, in the sixth embodiment, a plurality of heating irradiation apparatuses shown in the third embodiment are connected in series to construct a high-frequency heating irradiation system as a whole. This is different from the third embodiment. When the heating irradiation devices are connected in series, the reaction furnaces 4 of the respective heating irradiation devices are connected in series to form one large elongated common reaction furnace. It is assumed that the article 5 to be heated is transported through the long and large common reactor by a transport device such as a belt conveyor, and sequentially passes through each heating irradiation device.
Other configurations are the same as those in the third embodiment, and thus the description thereof is omitted here.

8, it is assumed that the object to be heated 5 is input from the left side of the common reactor, and moves in the right direction of the common reactor through a plurality of heating irradiation devices. It should be noted that the direction of input and movement may be reversed.

At this time, by changing at least one of the phase amount of the phase shifter 51 and the amplification amount of the amplifier 52 for each heating irradiation device according to the heating state and reaction state of the article to be heated 5, The output of the high frequency irradiated to the to-be-heated material 5 can be made variable for every reaction furnace 4 of the irradiation apparatus. Thereby, according to the condition of the to-be-heated material 5 between each irradiation apparatus for heating, it is possible to create a separate condition for each reaction furnace 4.

Further, at this time, since the frequency of the high-frequency generator 1 of each heating irradiation apparatus can be changed, it is possible to prevent high-frequency interference between the heating irradiation apparatuses.

As shown in FIG. 8, in this Embodiment, the high frequency generator 1, the phase shifter 51, the amplifier 52, and the antenna 3 are provided separately for every reaction furnace 4 which comprises a common reaction furnace. . Therefore, the output of the high frequency irradiated from the antenna 3 can be controlled for each reaction furnace 4 according to the reaction state of the article 5 to be heated. Thereby, in each reaction furnace 4, since irradiation distribution can be changed according to the state of the to-be-heated material 5, the to-be-heated material 5 can be efficiently heated on optimal conditions.

FIG. 8 shows a case where the configuration according to the sixth embodiment is applied to the third embodiment. However, the present invention is not limited to this case, and other embodiments, that is, the first to fifth embodiments. The configuration according to the sixth embodiment may be applied to any of the previous embodiments. Furthermore, it is not necessary that the plurality of heating irradiation devices connected in series have the same configuration. Therefore, a plurality of configurations according to any two or more of the first to fifth embodiments may be freely combined and connected in series.

When the configurations of the fourth embodiment and the fifth embodiment are used, since the high frequency output control device 73 is provided, the frequency of the high frequency generator 1, the phase amount of the phase shifter 51, and the amplifier 52 The amount of amplification can be automatically controlled by the high-frequency output control device 73 for each heating irradiation device. However, when the configuration of another embodiment is used, the frequency of the high-frequency generator 1 and the phase shifter 51 The operator manually adjusts the phase amount and the amplification amount of the amplifier 52.

As described above, according to the sixth embodiment, even if the heating irradiation apparatuses according to the first to fifth embodiments are connected in series, the same effects as those of the first to fifth embodiments can be obtained. Particularly, when the object to be heated 5 flows on a belt conveyor or the like, the irradiation distribution can be changed in each reaction furnace 4 according to the state of the object to be heated 5, which is effective. In addition, a scalable extensibility effect can be obtained.

In the present invention, within the scope of the invention, any combination of each embodiment, any component of each embodiment can be modified, or any component can be omitted in each embodiment. .

Claims

An electromagnetic wave generator for generating heating electromagnetic waves;
A plurality of antennas for irradiating an object to be heated with the heating electromagnetic wave generated by the electromagnetic wave generator;
A reaction furnace, wherein a part of the upper surface is a curved convex part, an irradiation port of each antenna is attached to the surface of the convex part, and an internal space for accommodating the object to be heated is provided. ,
Each antenna is arranged in a curved surface on the surface of the convex portion of the reactor so that the irradiation direction of each antenna is directed to a specific point of the object to be heated.
Irradiation device for heating.
The irradiation apparatus for heating according to claim 1, wherein the curved surface constituting the convex portion is constituted by a part of a spherical surface centered on the specific point.
An electromagnetic wave generator for generating electromagnetic waves for heating;
Three antennas for irradiating the object to be heated with the heating electromagnetic wave generated by the electromagnetic wave generator;
A reaction furnace having an inner surface for accommodating the object to be heated, the irradiation port of the antenna being attached to the upper surface, and an inner space for accommodating the object to be heated;
The three antennas are arranged in a straight line,
The three antennas include one antenna arranged so that the irradiation direction of the heating electromagnetic wave is directed to a specific point of the object to be heated, and the other two antennas arranged on both sides of the one antenna, including,
Irradiation device for heating.
The arrangement interval of the antennas is one wavelength or less of the heating electromagnetic wave.
The irradiation apparatus for heating according to any one of claims 1 to 3.
The distance between the antenna and the object to be heated is 5 wavelengths or less of the heating electromagnetic wave.
The irradiation apparatus for heating according to any one of claims 1 to 4.
A phase shifter that is provided for each of the antennas and controls a phase amount of the heating electromagnetic wave supplied to each of the antennas;
The heating irradiation apparatus according to any one of claims 1 to 5, further comprising: an amplifier that is provided for each of the antennas and that amplifies the heating electromagnetic wave supplied to each of the antennas.
The amplitude and phase of the heating electromagnetic wave provided to each of the antennas and irradiated from the antenna to the reaction furnace, and the amplitude and phase of the reflected wave reflected by the heating electromagnetic wave in the reaction furnace, An amplitude / phase acquisition unit that acquires at least one of
The heating that irradiates the object to be heated from the antenna by controlling the electromagnetic wave generator, the phase shifter, and the amplifier based on the amplitude and the phase acquired by the amplitude / phase acquisition unit. The heating irradiation device according to claim 6, further comprising: a first electromagnetic wave output control device that controls an output of the electromagnetic wave for operation.
A temperature acquisition unit that is provided for the reaction furnace and acquires the temperature of the object to be heated in the reaction furnace;
The heating that irradiates the object to be heated from the antenna by controlling the electromagnetic wave generator, the phase shifter, and the amplifier based on the temperature of the object to be heated acquired by the temperature acquisition unit. The heating irradiation device according to claim 6, further comprising: a second electromagnetic wave output control device that controls the output of the electromagnetic wave for operation.
A plurality of the irradiation devices for heating are connected in series,
The reactors of each of the heating irradiation devices are connected in series to constitute one continuous shared reactor,
The irradiation device for heating according to any one of claims 1 to 8.
The heating irradiation apparatus according to claim 9, wherein the output of the heating electromagnetic wave applied to the object to be heated from the antenna is variable for each of the reaction furnaces constituting the shared reaction furnace.