JP2008021493A - Microwave utilization device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microwave utilization device of which a heated object can surely enjoy an effect of heating uniformity by phase variability. <P>SOLUTION: Irradiation means 15, 16 are set in opposition to right and left wall faces 13, 14 of a heating chamber 10 housing the heated object, and two outputs of a microwave generating means 17 constituted of semiconductor elements are connected with the irradiation means 15, 16, while on the other hand, phases of the microwaves irradiated from the respective irradiation means are varied, so that electric field concentration regions formed by the pair of opposed irradiation means 15, 16 move one after another in a right and left direction of the heating chamber 10, and a heating site on the heated object is surely moved irrespective of a housing position of the heated object to promote uniform heating. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a microwave utilization device that dielectrically heats an object to be heated using microwaves.

  A typical microwave utilization apparatus of this type is a microwave oven. The magnetron installed in this microwave oven has a high output for its shape and a high operating efficiency of over 70%. On the other hand, the magnetron cannot freely control the oscillation frequency, and the oscillation frequency of the magnetron itself is affected by the impedance on the load side including the object to be heated. For this reason, the object to be heated may be unevenly heated due to the standing wave generated in the heating chamber due to the operation at an inappropriate oscillation frequency.

  There are coaxial magnetrons and the like that variably control the oscillation frequency of the magnetron, but they are not suitable for microwave oven applications due to their large shape and high price.

  On the other hand, with the recent advancement of mobile communication in recent years, the progress of vigorous microwave circuit technology, or the technological innovation of semiconductor devices themselves using new semiconductor materials such as SiC materials and GaN materials, has progressed. Wave generation means are beginning to be put into practical use in plasma processing apparatuses used for semiconductor manufacturing.

  The microwave generating means constituted by this semiconductor element can easily control the oscillation frequency variably by using a voltage controlled oscillator or a capacitance controlled oscillator as an oscillation source. Further, as a method of obtaining a large power equivalent to a magnetron, a method of arranging a plurality of amplification systems that operate in parallel and spatially synthesizing respective outputs in a heating chamber is also considered. In addition, there is an apparatus that performs optimum heating by controlling the phase relationship of microwaves radiated into the heating chamber (see, for example, Patent Documents 1 and 2).

  The apparatus of Patent Document 1 includes an oscillation source, a plurality of amplifiers that amplify the distributed output in parallel, and a radiation unit that radiates the output of each amplifier into the heating chamber, and a phase variable device is arranged in front of the amplifier. Thus, the phase amount is adjusted to move the electric field concentration place in the heating chamber to promote uniform heating.

The device of Patent Document 2 includes an oscillation source, a distributor that distributes the output of the oscillation source to power 2, an amplifier that amplifies the distribution output, and a combiner that combines the amplifier output with power and has two output terminals. (For example, 90 ° hybrid or 180 ° hybrid) and radiation means for radiating microwaves in the heating chamber connected to the two outputs of the synthesizer, and a phase variable device provided between the power distributor and the amplifier. The amount of microwaves radiated from each radiating means is changed by changing the value of the radiating means to promote uniform heating.
JP-A-55-10777 JP 56-132793 A

  However, in the conventional apparatus, only a configuration in which a plurality of radiating means are arranged on the same wall surface of the heating chamber is disclosed, and an object to be heated housed in the heating chamber is biased to one of the wall surfaces from the center of the heating chamber. When stored, there is a problem that it is difficult to promote uniform heating by phase control.

This invention is made | formed in view of this situation, and it aims at providing the microwave utilization apparatus which a to-be-heated material can enjoy the effect of the uniformity of the heating by variable phase reliably.

  In order to solve the above-described conventional problems, the microwave utilization apparatus of the present invention includes a heating chamber in which an object to be heated is stored, microwave generation means for generating a microwave to be supplied to the heating chamber, and the microwave generation A plurality of radiating means for supplying microwaves generated from the means to the heating chamber, the radiating means having a pair of radiating means arranged opposite to each other, and a phase of the microwaves respectively transmitted to the pair of radiating means Is variably controlled.

  As a result, the object to be heated is sandwiched between a pair of radiating means arranged opposite to each other, and the electric field concentration region synthesized from the pair of radiating means by variably controlling the phase of the microwave between the pair of radiating means is The object can be reliably moved in the storage space area of the object to be heated, and uniform heating of the object to be heated can be surely promoted.

  The microwave utilization apparatus of the present invention provides an apparatus in which an object to be heated can reliably enjoy the effect of heating uniformity by changing the phase of microwaves radiated from a pair of radiating means arranged opposite to the heating chamber. can do.

  1st invention supplies the microwave generated from the heating chamber in which a to-be-heated material is accommodated, the microwave generation means which generates the microwave supplied to the heating chamber, and the microwave generation means to the heating chamber A plurality of radiating means, wherein the radiating means has a pair of radiating means arranged opposite to each other, and variably controls the phase of the microwaves respectively transmitted to the pair of radiating means. The electric field concentration area synthesized from the pair of radiating means by variably controlling the phase of the microwave between the pair of radiating means is a space area for storing the object to be heated. Can be reliably moved, and uniform heating of the object to be heated can be surely promoted.

  In the second invention, in particular, the pair of radiating means of the first invention are arranged on the left and right side surfaces of the heating chamber, and thereby, against the simultaneous heating of a heated object or a plurality of heated objects having a low bulk. Thus, the electric field concentration region can be moved, and uniform heating can be promoted.

  According to a third aspect of the invention, in particular, the microwave generation means of the first aspect of the invention includes an oscillation unit, a power divider that equally divides the output of the oscillation unit into a plurality of parts, and an amplification that amplifies the output of the power divider, respectively. In which at least two transmission paths are arranged between the power distributor and the amplification section, thereby reducing the transmission loss of the phase changer. The at least two outputs for controlling the phase of the microwave generating means including the influence can be set to substantially the same amount, and the phase variable control for uniform heating can be easily and reproducibly performed.

  The fourth aspect of the invention is such that, in particular, the microwave passing through the transmission line in which the phase shifter of the third aspect of the invention is arranged is guided to the radiating means arranged oppositely, and thereby the radiating means arranged oppositely. Since the intensity of the electric field concentration region that moves by changing the phase can be output by changing the phase, it is possible to make the intensity of the electric field concentration region almost the same regardless of the moving location, so that the variable phase control for uniform heating is easily performed. be able to.

In the fifth aspect of the invention, in particular, the phase of the microwave input to each phase variable device of the third invention has a phase difference of 90 degrees, so that the phase variable range is the phase of the phase variable device. It is possible to vary the phase of a range obtained by adding 90 degrees to the variable range, alleviate the burden on the phase variable device, and reduce the shape of the phase variable device or reduce the cost.

  In the sixth invention, in particular, the variable maximum of the phase difference of the pair of radiating means of the first invention is set to at least 180 degrees or more, so that in-phase and anti-phase states can be formed. In the region, the electric field concentration formation state and the no electric field concentration state can be formed to ensure uniform heating.

  In the seventh invention, in particular, the means for changing the phase of the first invention is a voltage variable type, whereby the phase can be continuously changed by changing the voltage linearly. Uniform heating can be further promoted by continuously moving the concentration region.

  In the eighth aspect of the invention, in particular, the variable range of the voltage variable type phase of the seventh aspect of the invention is at least 90 degrees, so that a plurality of phase shifters can be connected in series for a wide range of phase variations. Efficient heating can be performed by simply arranging each transmission line.

  In the ninth aspect of the invention, in particular, the microwave generation means of the first aspect of the invention is configured to generate a frequency from 2400 MHz to 2500 MHz, thereby heating by changing the wavelength of the microwave in a variable manner. Can be more effectively performed.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, this invention is not limited by this embodiment.

(Embodiment 1)
FIG. 1 is a block diagram of the microwave utilization apparatus according to the first embodiment of the present invention, and FIG. 2 is a block diagram of the microwave generation means of FIG.

  1 to 2, a heating chamber 10 for storing an object to be heated is provided with a door (not shown) through which the object to be heated is taken in and out, and other wall surfaces are made of a metal material and supplied. The microwave is confined inside. A placement plate 12 made of a low dielectric loss material on which the object to be heated is placed at a predetermined interval from the heating chamber bottom wall surface 11 is disposed below the heating chamber 10. In addition, radiating means 15 and 16 are provided so as to face each other at the approximate center of the left and right wall surfaces 13 and 14 of the heating chamber 10.

  Below the heating chamber 10, a microwave generation means 17 configured using a semiconductor element is disposed. This microwave generation means 17 includes an oscillation unit 18 having a voltage variable type frequency variable function for generating a frequency of 2400 MHz to 2500 MHz, a Wilkinson type distributor 19 for distributing the output of the oscillation unit 18 in two, and a distributor 19 transmission lines 22 and 23 for transmitting the two outputs to the first-stage amplifying units 20 and 21, the phase-variers 24 and 25 respectively disposed in the transmission lines 22 and 23, and the outputs of the first-stage amplifying units 20 and 21. The main amplifying units 26 and 27 are respectively amplifying. The outputs of the main amplifying units 26 and 27 are transmitted through the coaxial lines 28 and 29 and guided to the radiating means 15 and 16 arranged opposite to each other.

  The transmission paths 22 and 23 have different transmission path lengths, and are configured to have different electrical lengths by 90 degrees when transmitting a frequency of 2450 MHz, which is the median value of the oscillation frequency band of the oscillating unit 18.

  The phase shifters 24 and 25 are composed of components having substantially the same specifications, and perform a predetermined phase delay with a substantially linear function according to the value of the applied voltage to be supplied. The maximum phase delay is 90 degrees or more, for example, 100 degrees.

  In addition, power combiners 30 and 31 for extracting reflected power are disposed at the two outputs of the microwave generation means 17, respectively. The drive power supply 32 generates drive power to be supplied to the oscillation unit 18, the phase shifters 24 and 25, the first stage amplification units 20 and 21, and the main amplification units 26 and 27. Further, a control means 33 for controlling the operation of the drive power supply 32 is provided.

  The power combiners 30 and 31 have a degree of coupling of about 40 dB and extract an amount of power that is about 1/10000 of the reflected power. Each power signal is rectified by a detection diode (not shown), smoothed by a capacitor (not shown), and the output signal is input to the control means 33.

  The microwave generating means 17 is provided with heat radiating means (not shown) for radiating heat generated by the semiconductor element.

  About the microwave utilization apparatus comprised as mentioned above, the operation | movement and an effect | action are demonstrated below.

  First, an object to be heated is stored in the heating chamber 10, the heating condition is input from an operation unit (not shown), and a heating start key is pressed. In response to the control output signal of the control means 33 that has received the heating start signal, the microwave generation means 17 starts its operation. The control means 33 operates the drive power supply 32 to supply power to the oscillation unit 18. At this time, the initial oscillation frequency of the oscillation unit 18 is supplied with a voltage signal set to 2450 MHz, for example, and oscillation starts. Thereafter, the drive power supply 32 is controlled to operate the first stage amplifiers 20 and 21, and then the main amplifiers 26 and 27 are operated. In the initial stage of operation, a 0 V voltage is applied to the phase shifters 24 and 25. As a result, the main amplifying units 26 and 27 each output microwave power of less than 100 W, for example, 50 W, with a phase difference of 90 degrees.

  When 100% of the microwave energy supplied into the heating chamber 10 is absorbed by the object to be heated, the reflected power from the heating chamber 10 is eliminated, but the type, shape, and amount of the object to be heated include the object to be heated. Based on the output impedance of the microwave generating means 17 and the impedance of the heating chamber 10, the reflected power that transmits the coaxial lines 28 and 29 in the reverse direction from the heating chamber 10 is generated based on the electrical characteristics of the heating chamber 10. .

  The power combiners 30 and 31 couple the coaxial lines 28 and 29 to the reflected power transmitted to the microwave generation means 17 side, and detect a signal proportional to the reflected power amount. The control means 33 selects an oscillation frequency at which the reflected power becomes a minimum value. In response to this frequency selection, the control means 33 changes the oscillation frequency of the oscillating unit 18 from the initial 2450 MHz to a lower frequency side at a 0.1 MHz pitch (for example, 1 MHz at 10 milliseconds), and at the lower limit of the frequency variable range. When the frequency reaches 2400 MHz, the frequency is increased at a 1 MHz pitch, and when it reaches 2450 MHz, the frequency is increased again to the upper limit of the frequency variable range at 2500 MHz at the 0.1 MHz pitch. A frequency at which the reflected power obtained in the frequency variation is minimized and a signal corresponding to the reflected power at that frequency are stored. Then, the frequency corresponding to the reflected power is selected in the frequency group where the reflected power is minimized, and the oscillation unit 18 is controlled so that the selected frequency oscillates, and the oscillation output is set to the heating condition input. Control to obtain the corresponding output. As a result, the main amplification units 26 and 27 each output microwave power of 200 W to 500 W with a phase difference of 90 degrees.

The microwaves are transmitted through the coaxial lines 28 and 29 and are radiated from the pair of opposed radiating means 15 and 16 into the heating chamber 10 in which the object to be heated is accommodated. In the initial stage of heating, the phase difference of the microwaves radiated from the pair of opposed radiating means 15 and 16 in the heating chamber 10 is approximately 0 degrees, and an electric field concentration region is formed at a substantially central portion in the horizontal direction of the heating chamber 10. Is done. When the object to be heated is stored in the approximate center of the heating chamber 10 due to the electric field concentration region formed in the approximate center of the heating chamber 10, the approximate center of the object to be heated is strongly heated. Further, when the object to be heated is stored in a biased manner on either the left or right wall surface from the center, the area to be heated on the center side of the heating chamber 10 is strongly heated.

  Then, the control means 33 outputs a control signal to the drive power source 32 so as to increase the voltage applied to the phase variable device 24 at an appropriate time period, for example, 2 seconds, in order to achieve uniform heating of the object to be heated. To do. At this time, the applied voltage of one phase variable device 25 is not changed. Thereafter, the voltage is increased until the applied voltage to the phase shifter 24 reaches the maximum value, and when the maximum applied voltage is reached, the voltage is decreased to the initial 0V. After that, the voltage applied to the phase shifter 24 is controlled to be 0V, and the voltage applied to the phase shifter 25 is controlled to increase gradually to the maximum applied voltage. When the maximum applied voltage is reached, the voltage is decreased and decreased to the initial 0V. . Thereafter, the voltage applied to the phase variable device 24 is increased again, and the above operation is repeated until the heating is completed. By this phase variable control, the electric field concentration region formed by the pair of opposed radiating means 15 and 16 is sequentially moved in the left-right direction of the heating chamber 10, and the heating part of the object to be heated is moved to promote uniform heating. .

  By controlling the movement of the electric field concentration region in the left-right direction of the heating chamber 10, not only the object to be heated, but also the objects to be stored on the left or right wall surface from the center in the heating chamber 10, are simultaneously heated. In this case, the electric field concentration region can be sequentially moved over the entire object to be heated, so that the heating of the object to be heated can be made uniform.

  In the series of heating control described above, the following control is further executed. As described above, when 100% of the microwave energy supplied into the heating chamber 10 is absorbed by the object to be heated, the reflected power from the heating chamber 10 is eliminated, but the type, shape, and amount of the object to be heated are limited. The electrical characteristics of the heating chamber 10 including the heated object are determined, and the coaxial lines 28 and 29 are transmitted in the reverse direction from the heating chamber 10 side based on the output impedance of the microwave generation means 17 and the impedance of the heating chamber 10. Reflected power is generated.

  The power combiners 30 and 31 couple the coaxial lines 28 and 29 with the reflected power transmitted to the microwave generation means 17 side and detect a signal proportional to the reflected power amount. When the control unit 33 detects a signal that exceeds the signal corresponding to the reflected power of the first level, the control unit 33 changes the oscillation frequency of the oscillating unit 18 to the lower frequency side by a maximum of 3 MHz at a 0.1 MHz pitch. The oscillation frequency is increased to a maximum of 3 MHz with respect to the initial frequency. In this process, when the reflected power detection signal has a frequency lower than the first level, the oscillation frequency of the oscillating unit 18 is fixed to the frequency and the heating is continued. If the reflected power detection signal does not fall below the first level, heating is continued by setting the oscillation frequency of the oscillating unit 18 to a frequency with the second least reflected power in the frequency selection at the beginning of heating.

  Even in the continuation of the heating operation at the frequency with the second least reflected power, if the reflected power detection signal at that frequency exceeds the first level, the above-described series of frequency variable control is executed.

  If a state below the desired first lepel is not obtained in a series of heating operations at a frequency with the second least reflected power, the reflected power is the highest in the initial and second frequency series of heating operations. Set the oscillation frequency to a lower frequency and continue heating.

When the reflected power detection signal reaches the second level (the reflected power is larger than the first level and corresponds to the thermal operating safety limit temperature of the semiconductor element) in the continuation of heating, the control means 33 oscillates. Control is performed so as to reduce the output of the unit 18, and heating is executed by controlling the reflected power detection signal to an output lower than the second level described above. Also in the control process based on the series of reflected power, the control for the phase shifters 24 and 25 is continuously executed in parallel, and the electric field concentration region sequentially moves with respect to the object to be heated to heat the object to be heated. Has been made uniform.

  Then, heating is controlled to end based on the detection signal of the surface temperature detection means of the article to be heated and the manually input heating time information.

(Embodiment 2)
3-4 is a block diagram of the microwave utilization apparatus of the 2nd Embodiment of this invention.
The difference between the present embodiment and the first embodiment is that the output of the microwave generating means is four and the radiation means arranged opposite to each other are two pairs. 3 to 4, components having the same configuration or substantially the same function as those of the first embodiment are denoted by the same reference numerals.

  3, in addition to the pair of opposed radiating means 15 and 16 formed on the left and right wall surfaces of the heating chamber 10, a pair of opposed radiating means 50 and 51 are provided on the upper and lower wall surfaces of the heating chamber 10, respectively. Yes.

  And the microwave generation means 52, the drive power supply 53, and the control means 54 are provided. The microwave generation means 52 is configured to have four outputs. That is, the microwave generation means 52 includes an oscillation unit 18 having a voltage variable type frequency variable function that generates a frequency of 2400 MHz to 2500 MHz, a Wilkinson type power distributor 19 that distributes the output of the oscillation unit 18 in two, Transmission paths 57 and 58 for transmitting the two outputs of the power distributor 19 to the power distributors 55 and 56 in the subsequent stage are arranged, respectively. The transmission paths 57 and 58 have different transmission path lengths as in the first embodiment, and the electrical length is 90 degrees different when transmitting the frequency of 2450 MHz, which is the median value of the oscillation frequency band of the oscillator 18. It is configured.

  In the second embodiment, power distributors 55 and 56 have a 90-degree hybrid configuration. When the 90-degree hybrid power distributors 55 and 56 are used, the two outputs are 90 degrees out of phase. Phase outputs 59 to 62 and first stage amplifiers 63 to 66 are arranged at the outputs of the power distributors 55 and 56, respectively, and main amplifiers 67 to 70 are arranged at the subsequent stages. The outputs of the main amplifiers 67 to 70 are connected to the radiating means 50, 51, 16 and 15 via the power combiners 71 to 74. With this configuration, the phase difference between the respective radiation means is 90 degrees behind the radiation means 15 and 51 and 180 degrees behind the radiation means 50 with respect to the radiation means 16.

  The power distributors 55 and 56 have a four-terminal configuration, and power absorption resistors 75 and 76 are connected to the remaining one terminal, respectively. The power absorption resistors 75 and 76 are ideally unnecessary when the frequency of transmission through the power distributors 55 and 56 is 2450 MHz, but correspond to the oscillation frequency variable range of the oscillation unit 18 from 2400 MHz to 2500 MHz. The power generated at the terminal is completely absorbed, and the power distribution performance is guaranteed.

  The microwave utilization apparatus configured as described above will be described below with a focus on differences in operation and action from the first embodiment.

  First, an object to be heated is stored in the heating chamber 10, the heating condition is input from an operation unit (not shown), and a heating start key is pressed. In response to the control output signal of the control means 54 that has received the heating start signal, the microwave generating means 52 starts operating. The control means 54 performs the selection operation of the oscillation frequency of the oscillation unit 18 in the initial stage of heating, as in the first embodiment. In this case, the total of the four outputs of the microwave generation means 52 is the same as in the first embodiment, and each output is about 25 W, half of that in the first embodiment.

The frequency selection process is the same as that of the first embodiment, except that the left and right radiating means 15 and 16 and the upper and lower radiating means 50 and 51 are divided to perform frequency selection. is there. That is, the control means 54 stores the selection of the optimum frequency for the left and right radiating means 15 and 16 and the selection of the optimum frequency for the upper and lower radiating means 50 and 51 separately.

  In the operation at the selected oscillation frequency, when the optimum frequency for the left and right radiation means 15 and 16 and the optimum frequency for the upper and lower radiation means 50 and 51 are substantially the same (frequency difference is 1 MHz), the control means 54 radiates microwaves from all of the four radiating means 15, 16, 50, 51 simultaneously into the heating chamber 10 with a predetermined phase difference. When the selected oscillation frequencies are different, the radiation from the pair of radiation means is executed alternately. In the process of two pairs of simultaneous radiation and one pair of alternate radiation, the reflected power is detected in the same manner as in the first embodiment.

  As described above, the radiation from the left-right direction and / or the up-down direction makes it possible to more effectively equalize the heating of the bulky heated object or the heated object having a large capacity.

  As described above, according to the present invention, the electric field concentration region is surely formed on the object to be heated by using the microwave generating means capable of changing the frequency and variably controlling the phase of the microwave radiated from the radiating means arranged oppositely. By adopting a device configuration that promotes uniform heating of the object to be heated, it can be used as a heating device in industrial fields such as washing equipment, drying equipment, and semiconductor manufacturing equipment as well as food heating such as commercially available microwave ovens. Can also be deployed.

Configuration diagram of microwave utilization apparatus of embodiment 1 of the present invention Configuration block diagram of microwave generation means of the microwave utilization apparatus The block diagram of the microwave utilization apparatus of Embodiment 2 of this invention Configuration block diagram of microwave generation means of the microwave utilization apparatus

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Heating chamber 15, 16 Radiation means 17 and 52 of right-and-left opposing arrangement | positioning 17, 52 Microwave generation means 18 Oscillation part (frequency variable)
19, 54, 55 Power distributor 20, 21, 63-66 First stage amplifier (amplifier)
24, 25, 59 to 62 Phase changer 26, 27, 67 to 70 Main amplifier (amplifier)
33, 54 Control means 50, 51 Radiation means arranged vertically opposite to each other

Claims (9)

A heating chamber in which an object to be heated is stored, a microwave generating means for generating a microwave to be supplied to the heating chamber, and a plurality of radiating means for supplying the microwave generated from the microwave generating means to the heating chamber; And the radiating means has a pair of radiating means arranged opposite to each other, and variably controls the phase of the microwaves respectively transmitted to the pair of radiating means. The microwave utilization apparatus according to claim 1, wherein the pair of radiating means are disposed on the left and right side surfaces of the heating chamber. The microwave generating means includes an oscillating unit, a power distributor that equally divides the output of the oscillating unit into a plurality, and an amplifying unit that amplifies the output of the power distributor, and the power distributor and the The microwave utilization device according to claim 1, wherein phase shifters are respectively disposed in at least two transmission paths between the amplification sections. 4. The microwave utilization apparatus according to claim 3, wherein the microwave that has passed through the transmission line in which the phase shifter is arranged is guided to the radiation means arranged oppositely. The microwave utilization apparatus according to claim 3, wherein the phase of the microwave input to each phase variable device has a phase difference of 90 degrees. The microwave utilization apparatus according to claim 1, wherein the variable maximum of the phase difference between the pair of radiation means is at least 180 degrees or more. The microwave utilization apparatus according to claim 1, wherein the means for varying the phase is a voltage variable type. The microwave utilization device according to claim 7, wherein the variable range of the voltage variable type phase is at least 90 degrees or more. The microwave utilization apparatus according to claim 1, wherein the microwave generation means is configured to generate a frequency from 2400 MHz to 2500 MHz.

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