WO2017111361A8 - 대기 비개방 분석을 위한 시편 이송 용기 및 시편 이송 방법 - Google Patents

대기 비개방 분석을 위한 시편 이송 용기 및 시편 이송 방법 Download PDF

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Publication number
WO2017111361A8
WO2017111361A8 PCT/KR2016/014378 KR2016014378W WO2017111361A8 WO 2017111361 A8 WO2017111361 A8 WO 2017111361A8 KR 2016014378 W KR2016014378 W KR 2016014378W WO 2017111361 A8 WO2017111361 A8 WO 2017111361A8
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WO
WIPO (PCT)
Prior art keywords
sample
sample transfer
exposure
analysis
atmosphere
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PCT/KR2016/014378
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English (en)
French (fr)
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WO2017111361A1 (ko
Inventor
강성
이상업
황동훈
Original Assignee
재단법인 포항산업과학연구원
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Publication of WO2017111361A1 publication Critical patent/WO2017111361A1/ko
Publication of WO2017111361A8 publication Critical patent/WO2017111361A8/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • G01N21/67—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using electric arcs or discharges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

대기 비개방 분석을 위한 시편 이송 용기 및 시편 이송 방법이 개시된다. 대기 비개방 분석용 시편 이송 용기는, i ) 시편 고정을 위한 시편 홀더와, ii ) 일측에 시편 홀더가 출입하는 시편 출입구를 가지는 본체와, iii ) 본체 내부에 위치하며 열린 상태에서 시편 출입구와 이어져 시편 홀더를 수용하는 개구부를 가지는 볼과, 볼을 회전시켜 시편 출입구를 열거나 닫는 회전 조작부를 포함하는 밸브 부재와, iv ) 본체에 슬라이드 가능하게 설치되고, 밸브 부재의 열린 상태에서 시편 홀더와 접하여 시편 홀더를 밀기 위한 이동 막대를 포함한다.
PCT/KR2016/014378 2015-12-24 2016-12-07 대기 비개방 분석을 위한 시편 이송 용기 및 시편 이송 방법 WO2017111361A1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2015-0186476 2015-12-24
KR1020150186476A KR101711855B1 (ko) 2015-12-24 2015-12-24 대기 비개방 분석을 위한 시편 이송 용기 및 시편 이송 방법

Publications (2)

Publication Number Publication Date
WO2017111361A1 WO2017111361A1 (ko) 2017-06-29
WO2017111361A8 true WO2017111361A8 (ko) 2017-08-31

Family

ID=58410614

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2016/014378 WO2017111361A1 (ko) 2015-12-24 2016-12-07 대기 비개방 분석을 위한 시편 이송 용기 및 시편 이송 방법

Country Status (2)

Country Link
KR (1) KR101711855B1 (ko)
WO (1) WO2017111361A1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114660315B (zh) * 2022-05-24 2022-10-14 季华实验室 样品转移装置、批量进样系统、分析设备及批量进样方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4697192B2 (ja) * 2007-06-12 2011-06-08 東京エレクトロン株式会社 位置ずれ検出装置及びこれを用いた処理システム
KR101039749B1 (ko) * 2008-10-08 2011-06-08 한국수력원자력 주식회사 고방사성 시료의 ｘ-선 회절분석용 시료 홀더장치
KR101084653B1 (ko) * 2009-02-12 2011-11-22 국민대학교산학협력단 전자주사현미경의 시료챔버
JP2010206139A (ja) * 2009-03-06 2010-09-16 Hitachi Kokusai Electric Inc 基板処理装置
JP5973136B2 (ja) * 2010-05-20 2016-08-23 株式会社キッツ 回転弁
KR101184596B1 (ko) * 2010-12-22 2012-09-21 주식회사 원익아이피에스 기판 이송 장치 및 그 동작 방법
KR101408164B1 (ko) * 2012-12-26 2014-06-17 주식회사 싸이맥스 웨이퍼 이송위치 측정 범위를 최소화하는 트랜스퍼 모듈
KR101585869B1 (ko) * 2014-02-24 2016-01-15 주식회사 아스타 진공시스템의 시편이송장치

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Publication number Publication date
KR101711855B1 (ko) 2017-03-03
WO2017111361A1 (ko) 2017-06-29

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