WO2017104485A1 - Storage device, vaporizer, substrate processing device, and method for manufacturing semiconductor device - Google Patents

Storage device, vaporizer, substrate processing device, and method for manufacturing semiconductor device Download PDF

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Publication number
WO2017104485A1
WO2017104485A1 PCT/JP2016/086222 JP2016086222W WO2017104485A1 WO 2017104485 A1 WO2017104485 A1 WO 2017104485A1 JP 2016086222 W JP2016086222 W JP 2016086222W WO 2017104485 A1 WO2017104485 A1 WO 2017104485A1
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WO
WIPO (PCT)
Prior art keywords
wall
bottom wall
side wall
pipe
liquid
Prior art date
Application number
PCT/JP2016/086222
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French (fr)
Japanese (ja)
Inventor
直子 北川
優一 和田
Original Assignee
株式会社日立国際電気
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立国際電気 filed Critical 株式会社日立国際電気
Priority to JP2017555996A priority Critical patent/JP6487574B2/en
Priority to CN201680072763.4A priority patent/CN108369911B/en
Priority to KR1020187016545A priority patent/KR102122786B1/en
Publication of WO2017104485A1 publication Critical patent/WO2017104485A1/en
Priority to US16/008,825 priority patent/US10480069B2/en

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/543—Controlling the film thickness or evaporation rate using measurement on the vapor source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45561—Gas plumbing upstream of the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
    • H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
    • H01L21/02307—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a liquid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
    • H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
    • H01L21/02343—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a liquid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment

Definitions

  • the present invention relates to a storage device for storing a liquid, a vaporizer, a substrate processing apparatus, and a method for manufacturing a semiconductor device.
  • a container serving as a storage tank for temporarily storing the liquid is provided in front of the processing chamber.
  • the storage tank has a role of controlling liquid supply to the processing chamber (see, for example, Patent Document 1).
  • High productivity is required for processing equipment.
  • One method for achieving high productivity is, for example, shortening the maintenance time of the processing apparatus.
  • an object of the present invention is to provide a processing apparatus capable of achieving high productivity and a structure for realizing the processing apparatus.
  • the peripheral side wall, the lid wall disposed on the upper end side of the side wall, connected to the lower end side of the side wall, and can be placed on the weight detector.
  • a bottom wall having a mounting surface; a storage chamber surrounded by the side wall, the lid wall, and the bottom wall; a recess communicating with the storage chamber; and a recess provided on the bottom wall; Connected to a portion in the gravitational direction, the other end is configured to extend in a direction different from the gravitational direction in the bottom wall, and a connecting tube configured to have a diameter smaller than the diameter of the recess,
  • a structure including a gas flow path provided on a wall different from the bottom wall and a liquid discharge path connected to a downstream end of the communication pipe is provided.
  • FIG. 3 is an AA arrow view of FIG. 2. It is explanatory drawing explaining the storage tank which concerns on embodiment of this invention. It is explanatory drawing explaining the controller which concerns on embodiment of this invention. It is explanatory drawing explaining the relationship between the storage tank and washing
  • FIG. 1 shows a substrate processing apparatus which is an example of a processing apparatus in which the present invention is implemented. First, an outline of a substrate processing apparatus to which the present invention is applied will be described with reference to FIG.
  • a cassette stage 23 is provided on the front side of the inside of the casing 21 as a container transfer means for transferring a cassette 22 as a substrate storage container with an external transfer device (not shown).
  • a cassette elevator 24 as an elevating means is provided, and a cassette transporter 25 as a cassette transport means is attached to the cassette elevator 24.
  • a cassette shelf 26 as a storage means for the cassette 22 is provided on the rear side of the cassette elevator 24, and a spare cassette shelf 27 as a cassette storage means is also provided above the cassette stage 23.
  • a clean unit 28 composed of a fan and a dust-proof filter is provided above the spare cassette shelf 27, and is configured to distribute clean air inside the housing 21, for example, in a region where the cassette 22 is transported.
  • a substrate processing furnace 29 is provided above the rear portion of the casing 21, and a boat 32 as a substrate holding means for holding wafers 31 as substrates in a horizontal posture in multiple stages is provided below the substrate processing furnace 29.
  • a boat elevator 33 is provided as an elevating means for inserting and withdrawing to the boat elevator, and a seal cap 35 as a lid for closing the furnace port portion of the substrate processing furnace 29 is provided at the tip of the elevating member 34 attached to the boat elevator 33.
  • the boat 32 is vertically supported by the seal cap 35, and the boat 32 holds the wafer 31 in a horizontal posture in multiple stages.
  • a transfer elevator 36 as an elevating means is provided between the dredger boat elevator 33 and the cassette shelf 26, and a wafer transfer machine 37 as a substrate transfer means is attached to the transfer elevator 36.
  • the wafer transfer device 37 has a required number (for example, five) of substrate transfer plates 40 on which a substrate is mounted, and the substrate transfer plate 40 can be moved back and forth.
  • a furnace port shutter 38 as a shielding member that has an opening / closing mechanism and closes the furnace port of the substrate processing furnace 29 is provided in the vicinity of the lower portion of the substrate processing furnace 29.
  • a clean unit 30 composed of a fan and a dustproof filter is provided on the side surface of the housing 21 facing the transfer elevator 36. Clean air sent from the clean unit 30 is transferred to the wafer transfer device 37, the boat 32, After flowing through the region including the boat elevator 33, the exhaust is exhausted to the outside of the housing 21 by an exhaust device (not shown).
  • the control unit 41 performs drive control of the cassette transfer machine 25, wafer transfer machine 37, boat elevator 33, etc., heating control of the substrate processing furnace 29, and the like.
  • the cassette 22 loaded with the wafer 31 in the vertical posture is carried into the cassette stage 23 from an external transfer device (not shown), and is rotated 90 ° on the cassette stage 23 so that the wafer 31 is in the horizontal posture. Further, the cassette 22 is transported from the cassette stage 23 to the cassette shelf 26 or the spare cassette shelf 27 by cooperation of the raising / lowering operation of the cassette elevator 24, the transverse operation, the advance / retreat operation of the cassette transporter 25, and the rotation operation.
  • the cassette shelf 26 has a transfer shelf 39 in which the cassette 22 to be transferred by the wafer transfer device 37 is stored.
  • the cassette 22 used for transferring the wafer 31 is transferred by the cassette elevator 24 and the cassette transfer device 25. It is transferred to the mounting shelf 39.
  • the wafer transfer machine 37 When the cassette 22 is transferred to the transfer shelf 39, the wafer transfer machine 37 is lowered from the transfer shelf 39 by the cooperation of the advance / retreat operation, the rotation operation, and the lifting / lowering operation of the transfer elevator 36 of the substrate transfer plate 40. The wafer 31 is transferred to the boat 32.
  • the boat 32 When a predetermined number of wafers 31 are transferred to the boat 32, the boat 32 is raised by the boat elevator 33 and the boat 32 is inserted into the substrate processing furnace 29. When the boat 32 is completely inserted, the substrate processing furnace 29 is hermetically closed by the seal cap 35.
  • the wafer 31 is heated and a processing gas is supplied into the substrate processing furnace 29 according to the selected processing recipe, and the processing chamber is supplied from the gas exhaust pipe 66 by an exhaust device (not shown).
  • the wafer 31 is processed while the atmosphere 2 is discharged (see FIG. 2).
  • a reaction tube 1 is provided inside a heater 42 that is a heating device (heating means), and a manifold 44 is connected to the lower end of the reaction tube 1 by means of, for example, stainless steel via an O-ring 46 that is an airtight member.
  • the lower end opening (furnace port portion) 44 is airtightly closed by a seal cap 35 as a lid through an O-ring 18 as an airtight member, and at least the processing chamber 2 by the reaction tube 1, the manifold 44 and the seal cap 35. Is defined.
  • a boat 32 is erected on the anchor seal cap 35 via a boat support 45, and the boat support 45 serves as a holding body for holding the boat 32.
  • Two types of gas supply pipes (a first gas supply pipe 47 and a second gas supply pipe 48) are provided as supply paths for supplying a plurality of types of processing gases, here two types of processing gases, to the soot processing chamber 2.
  • the first gas supply pipe 47 is provided with a liquid source 71, a first mass flow controller 49 that is a liquid flow rate control device (flow rate control means), a vaporizer 51, and a valve 52 that is an on-off valve in order from the upstream side.
  • a first carrier gas supply pipe 53 that supplies a carrier gas is joined downstream of the valve 52.
  • the first carrier gas supply pipe 53 is provided with a carrier gas source 72, a second mass flow controller 54 as a flow rate control device (flow rate control means), and a valve 55 as an on-off valve in this order from the upstream.
  • a first nozzle 56 is provided at the tip of the first gas supply pipe 47 from the lower part to the upper part along the inner wall of the reaction pipe 1, and a first gas is supplied to the side surface of the first nozzle 56.
  • a gas supply hole 57 is provided.
  • the first gas supply holes 57 are provided at an equal pitch from the lower part to the upper part, and have the same opening area.
  • the vaporizer 51 has a storage tank structure for storing a liquid material and a heater for heating the liquid material, as will be described later.
  • a pipe provided between the first gas supply pipe 47 and the liquid source supply source 71 upstream from the vaporizer 51 is referred to as a supply pipe 47a.
  • the downstream side of the vaporizer 51 in the first gas supply pipe 47 is a supply pipe 47b.
  • first gas supply pipe 47 the first mass flow controller 49, the vaporizer 51, the valve 52, and the nozzle 56 are collectively referred to as a first gas supply unit.
  • the carrier gas supply pipe 53, the second mass flow controller 54, and the valve 55 may be included in the first gas supply unit.
  • the liquid source source 71 and the carrier gas source 72 may be included in the first gas supply unit.
  • the second gas supply pipe 48 is provided with a reaction gas source 73, a third mass flow controller 58 as a flow rate control device (flow rate control means), and a valve 59 as an on-off valve in order from the upstream direction.
  • a second carrier gas supply pipe 61 for supplying the carrier gas is joined.
  • the second carrier gas supply pipe 61 is provided with a carrier gas source 74, a fourth mass flow controller 62 which is a flow rate control device (flow rate control means), and a valve 63 which is an on-off valve in this order from upstream.
  • a second nozzle 64 is provided at the tip of the second gas supply pipe 48 in parallel with the first nozzle 56, and a second gas supply hole 65, which is a supply hole for supplying gas, is provided on the side surface of the second nozzle 64. Is provided.
  • the second gas supply holes 65 are provided at an equal pitch from the lower part to the upper part, and have the same opening area.
  • the second gas supply pipe 48, the third mass flow controller 58, the valve 59, and the nozzle 64 are collectively referred to as a second gas supply unit.
  • the carrier gas supply pipe 61, the fourth mass flow controller 62, and the valve 63 may be included in the second gas supply unit.
  • the liquid source supplied from the liquid source source 71 merges with the first carrier gas supply pipe 53 via the liquid mass flow controller 49, the vaporizer 51, and the valve 52, and further into the processing chamber 2 via the first nozzle 56. To be supplied. In addition, when it supplies in the process chamber 2, the liquid raw material in the state vaporized by the vaporizer 51 is supplied.
  • the reaction gas supplied from the reaction gas source 73 merges with the second carrier gas supply pipe 61 via the first mass flow controller 58 and the valve 59, and is further supplied to the processing chamber 2 via the second nozzle 64.
  • the soot processing chamber 2 is connected to a vacuum pump 68 which is an exhaust device (exhaust means) via a gas exhaust pipe 66 for exhausting gas, and is evacuated.
  • the valve 67 is an open / close valve capable of opening and closing the valve to evacuate and stop the evacuation of the processing chamber 2 and further adjust the pressure by adjusting the valve opening.
  • the boat seal mechanism 35 is provided with a boat rotation mechanism 69, and the boat rotation mechanism 69 rotates the boat 32 in order to improve processing uniformity.
  • the storage tank structure 200 is used as a container for storing a liquid.
  • FIG. 4 is an explanatory diagram for explaining the detailed structure of the vaporizer 51.
  • the vaporizer 51 includes a side wall 201, a bottom wall 202, and a lid wall 203 that constitute the storage tank 200.
  • the side wall 201 is configured in a cylindrical shape (circumferential shape), for example.
  • the side wall 201 includes a side wall 201a having a cylindrical structure with the same diameter, and a side wall 201b configured such that the diameter decreases toward the bottom wall 202.
  • the side wall 201a is the side wall 201 between ⁇ and ⁇
  • the side wall 201b is the side wall 201 between ⁇ and ⁇ .
  • the side wall 201a and the side wall 201b have a continuous structure without a step.
  • the side wall 201b has a structure in which the diameter decreases toward the bottom wall 202, and is configured to have a curvature that minimizes the influence of the surface tension of the liquid.
  • the storage chamber 210 constituted by the side wall 201, the bottom wall 202, and the lid wall 203 is supplied with a liquid source from a liquid source supply pipe 204 described later, and the storage chamber 210 stores the liquid source.
  • the stored liquid raw material is referred to as a liquid raw material 216.
  • the surface of the bottom wall 202 in the gravity direction (Z direction) is configured as a mounting surface 202 a that can be mounted on the weight detector 221.
  • the placement surface 202a is configured in a planar shape, for example, so as to be placed on the weight detector 221 in a stable state.
  • the lid wall 203 is connected (fixed) to the upper end side of the side wall 201 by welding or the like so that the liquid inside does not leak.
  • the bottom wall 202 is connected (fixed) to the lower end side of the side wall 201 by welding or the like so that the liquid inside does not leak.
  • a recess 211 is provided in the bottom wall 202.
  • the recess 211 has a structure continuous to the side wall 201b and is configured to be smaller than the diameter of the side wall 201b.
  • the recess 211 is configured to have a cone shape with a diameter that gradually decreases downward.
  • a hole structure 211a to which a communication tube 212 described later is connected is provided.
  • the communication pipe 212 is also called a communication flow path.
  • a discharge pipe 213 described later is connected to the other end (downstream end) of the communication pipe 212.
  • the discharge pipe 213 is also called a liquid discharge path.
  • the diameter of the discharge pipe 213 is configured to be smaller than the diameter of the communication pipe 212.
  • the discharge pipe 213 is fixed so as to be inserted into the communication pipe 212, for example.
  • the communication pipe 212 is also called a communication structure.
  • the piping 206 that communicates with the processing furnace 29 is configured as a gas flow path through which the gas-state raw material vaporized in the storage chamber 210 flows.
  • a supply pipe 47 b is connected to the downstream side of the pipe 206.
  • the pipe 206 is provided on a wall different from the bottom wall 202. For example, it is provided on the lid wall 203. When provided in the lid wall 203, the pipe 206 is passed through a hole provided in the lid wall 203.
  • the pipe 206 is provided with a valve 207 which is a first valve. By opening and closing the valve 207, the processing chamber 2 is communicated with or shut off.
  • a pipe 208 is connected between the valve 207 and the storage chamber 210 (the lid wall 203 in FIG. 4).
  • the pipe 208 is provided with a valve 209 that is a second valve.
  • a removable pipe 218 is provided downstream of the valve 209.
  • An inert gas source 217 is connected to the pipe 218. By opening and closing the valve 209, the inert gas source 217 and the pipe 208 are communicated with each other or blocked.
  • the valve 209 may be provided in the pipe 206. In this case, the pipe 208 is omitted, and the valve 209 is also used as a joining part for joining the pipe 218 and the pipe 208 together.
  • the communication pipe 212 is provided inside the bottom wall 202.
  • the shape of the connecting pipe 212 is configured to be bent in the lateral direction so as not to penetrate the mounting surface 202a after being directed from the hole structure 211a of the concave portion 211 in the direction of gravity, and then extended in a direction different from the direction of gravity.
  • the direction different from the gravitational direction is, for example, the direction opposite to the gravitational direction and is the direction of the lid 203. By doing in this way, it becomes possible to mount the mounting surface 202a on the weight detector 221.
  • the shape of the connecting tube 212 is extended in the direction of the lid, for example, as a direction different from the direction of gravity. Direction may be used.
  • the discharge pipe 213 is provided with a valve 214 which is a third valve.
  • the discharge pipe 213 can be connected to a cleaning device and a discharge tank described later.
  • the valve 214 is closed in the substrate processing mode for processing the substrate processing, and is opened in the maintenance mode for discharging the liquid to the cleaning device and the discharge tank.
  • the following configuration is provided. That is, a relationship of “diameter of the side wall 201b> diameter of the recess 211> diameter of the communication pipe 212> diameter of the discharge pipe 213” is established. That is, the diameter of the flow path through which the liquid is discharged becomes smaller as the liquid is discharged.
  • the capillary phenomenon described later can be realized in the paths of the recess 211, the communication pipe 212, and the discharge pipe 213.
  • each of the connecting portion between the recess 211 and the connecting pipe 212 and the connecting portion between the connecting pipe 212 and the discharge pipe 213 should have a structure having no step. Furthermore, it is desirable that the structure has no branch. By adopting such a structure, it becomes possible to prevent liquid accumulation and bubbles from entering at the connecting portions of each structure. Furthermore, the pressure in the liquid discharge path can be made linear. By making the pressure linear, the liquid can be moved smoothly.
  • the liquid source supply pipe 204 is configured as a liquid supply channel for supplying the liquid source to the storage chamber 210.
  • the liquid source supply pipe 204 is provided on a wall different from the bottom wall 202. For example, it is provided on the lid wall 203. In the case of the lid wall 203, the liquid source supply pipe 204 is passed through a hole provided in the lid wall 203. One end of the liquid source supply pipe 204 is connected to the liquid source source 71 via the supply pipe 47 a, and the other end is maintained in the storage chamber 210.
  • the liquid source supply pipe 204 is provided with a valve 205. By opening and closing the valve 205, the mass flow controller 49 and the liquid source source 71 are communicated with each other or blocked.
  • a heater 215 is provided on the outer periphery of the side wall 202.
  • the heater 215 heats the storage chamber 210.
  • the liquid raw material 216 stored in the storage chamber 210 is heated and vaporized.
  • the side wall 201, the bottom wall 202, the lid wall 203, the pipe 206, the storage chamber 210, the recess 211, the communication pipe 212, and the discharge pipe 213 are collectively referred to as a storage device.
  • any one of the heater 215, the valve 207, the valve 205, the valve 214, or a combination thereof may be added to the storage device.
  • a weight detector 221 may be added.
  • the substrate processing apparatus has a controller 41 that controls the operation of each unit.
  • the controller 41 which is a control unit (control means) is configured as a computer including a CPU (Central Processing Unit) 41a, a RAM (Random Access Memory) 41b, a storage device 41c, and an I / O port 41d.
  • the RAM 41b, the storage device 41c, and the I / O port 41d are configured to exchange data with the CPU 41a via the internal bus 41e.
  • an input / output device 411 configured as a touch panel or an external storage device 412 can be connected to the controller 41.
  • a receiving unit 413 connected to the host device 75 via a network is provided. The receiving unit 413 can receive information on other devices from the host device.
  • the storage device 41c is configured by, for example, a flash memory, an HDD (Hard Disk Drive), or the like.
  • a control program for controlling the operation of the substrate processing apparatus a program recipe describing a procedure and conditions for substrate processing to be described later, a maintenance program, and the like are readably stored.
  • the process recipe is a combination of instructions so that the controller 41 can execute each procedure in a substrate processing step performed in a substrate processing mode, which will be described later, to obtain a predetermined result, and functions as a program.
  • the maintenance program refers to a control program for the apparatus in a maintenance mode to be described later.
  • the program recipe, the maintenance program, the control program, and the like are collectively referred to simply as a program.
  • the RAM 41b is configured as a memory area (work area) in which a program, data, and the like read by the CPU 41a are temporarily stored.
  • the I / O port 41d is connected to an elevating member, a heater, a mass flow controller (also referred to as MFC), a valve, and the like.
  • MFC mass flow controller
  • the control unit 41 adjusts the flow rate of the mass flow controller, valve, heater, vacuum pump, boat rotation mechanism, valve opening / closing operation, heater temperature adjustment, start and stop of the vacuum pump, adjustment of the rotation speed of the boat rotation mechanism, boat lifting / lowering
  • the raising / lowering operation control of the mechanism is performed.
  • the controller 41 is not limited to being configured as a dedicated computer, and may be configured as a general-purpose computer.
  • an external storage device storing the above-described program for example, a magnetic tape, a magnetic disk such as a flexible disk or a hard disk, an optical disk such as a CD or DVD, a magneto-optical disk such as an MO, a semiconductor memory such as a USB memory or a memory card
  • the controller 41 according to the present embodiment can be configured by preparing 412 and installing a program in a general-purpose computer using the external storage device 412.
  • the means for supplying the program to the computer is not limited to supplying the program via the external storage device 412.
  • the program may be supplied without using the external storage device 412 using communication means such as the Internet or a dedicated line.
  • the storage device 41c and the external storage device 412 are configured as computer-readable recording media. Hereinafter, these are collectively referred to simply as a recording medium. Note that in this specification, when the term “recording medium” is used, it may include only the storage device 41c alone, may include only the external storage device 412 alone, or may include both.
  • FIG. 6 is an explanatory diagram for explaining the relationship between the cleaning device 300 and the vaporizer 51.
  • the heater 215 is omitted for convenience of explanation.
  • the cleaning device 300 mainly includes a solvent tank 301, a vacuum pump 302, and a trap device 303. Furthermore, a tire 304 is provided as a moving mechanism that moves the housing of the cleaning device 300 to the vicinity of the vaporizer 51.
  • the solvent tank 301 is provided with a solvent supply system 310 for conveying the solvent to the vaporizer 51.
  • the solvent supply system 310 has a pipe 311 connected to the solvent tank 301.
  • the pipe 311 is provided with a valve 312.
  • a joining part 313 that joins with another pipe is provided.
  • a pipe 314 having a valve 315 and being connectable to the valve 209 is provided between the junction 313 and the vaporizer valve 209.
  • the solvent tank 301 is provided with a solvent discharge system 320 for returning again the solution used when the vaporizer 51 is cleaned.
  • the solvent discharge system 320 can be connected to the valve 214 of the vaporizer 51 and includes a pipe 321 provided with a valve 322.
  • a junction 323 that merges with other pipes is provided on the downstream side of the pipe 321.
  • a pipe 325 having a valve 324 is provided between the junction 323 and the solvent tank 301.
  • a particle counter 326 is provided in the pipe 325 downstream of the valve 324.
  • An inert gas supply system 330 for purging the solvent is connected to the solvent supply system 301.
  • an inert gas supply pipe 331 provided with a valve 332 is configured to be connected to the junction 313.
  • An inert gas source 333 is connected upstream of the inert gas supply pipe 331.
  • the inert gas used here may not be a material that reacts with the solvent to generate dust, and for example, nitrogen (N 2) gas is used.
  • the inert gas supply system mainly includes an inert gas supply pipe 331 and a valve 332. Note that an inert gas source 333 and a pipe 314 may be included in the inert gas supply system.
  • the solvent supply system 301 is connected to an evacuation system 340 for adjusting the pressure in each pipe.
  • a pipe 341 including a valve 342 and a junction 343 is connected to the junction 313.
  • a vacuum pump 302 is connected to a side of the pipe 342 that is different from the junction 313 side.
  • a vacuum exhaust system 340 is also connected to the solvent discharge system 320.
  • a pipe 344 provided with a valve 345 is connected to the junction 323.
  • a side of the pipe 344 that is different from the junction 323 side is connected to the junction 343 of the pipe 341 and communicates with the vacuum pump 302.
  • An exhaust / heating unit system 350 is connected to the downstream side of the trap device 303 connected to the vacuum pump 302. Specifically, a pipe 351 having a junction 353 is connected to the trap device 303. An exhaust / heating unit 352 is provided on the side of the pipe 351 different from the trap device 303. A pipe 354 having a valve 355 is provided between the junction 323 and the junction 353.
  • TEMAH tetrakisethylmethylaminohafnium
  • O3 ozone
  • TEMAH is an example of a liquid raw material.
  • the wafer 31 is loaded into the boat 32 and carried into the processing chamber 2.
  • the vaporizer 51 is connected to the liquid source source 71 as shown in FIG. After the boat 32 is carried into the processing chamber 2, four steps described later are sequentially executed.
  • Step 1 TEMAH and carrier gas (N2) are flowed in a state where the heater 42 and the heater 215 are operated.
  • the valve 52, the valve 55, and the valve 67 are opened.
  • the flow rate of TEMAH is adjusted by the mass flow controller 49 from the supply pipe 47 a and is supplied to the vaporizer 51 through the pipe 205.
  • TEMAH is stored in the storage chamber 210 and vaporized by the heater 215.
  • the vaporized gaseous TEMAH is supplied to the supply pipe 47b via the pipe 206.
  • the carrier gas (N2) whose flow rate is adjusted by the second mass flow controller 54 from the first carrier gas supply pipe 53 is mixed.
  • the mixed gas is exhausted from the gas exhaust pipe 66 while being supplied into the processing chamber 2 from the first gas supply hole 57 of the first nozzle 56.
  • the supply flow rate of TEMAH controlled by the mass flow controller 49 is 0.1 to 0.3 g / min.
  • the time for exposing the wafer 31 to TEMAH is 30 to 180 seconds.
  • the temperature of the heater 42 at this time is set so that the wafer 31 is 180 to 250 ° C.
  • the pressure in the processing chamber 2 is 50 to 100 Pa. As a result, a film containing Hf is formed on the wafer 31.
  • Step 2 the valve 52 of the first gas supply pipe 47 and the valve 55 of the first carrier supply pipe 53 are closed to stop the supply of TEMAH gas and carrier gas.
  • the valve 67 of the gas exhaust pipe 66 is kept open, the substrate processing furnace 29 is exhausted to 20 Pa or less by the vacuum pump 68, and the residual TEMAH gas is removed from the processing chamber 2.
  • an inert gas for example, N2 used as a carrier gas is supplied to the substrate processing furnace 29, the effect of eliminating residual TEMAH is further enhanced.
  • Step 3 O3 and carrier gas (N2) are flowed.
  • the valve 59 provided in the second gas supply pipe 48 and the valve 63 provided in the second carrier gas supply pipe 61 are both opened, O3 whose flow rate is adjusted by the first mass flow controller 58 from the second gas supply pipe 48,
  • the carrier gas (N2) whose flow rate is adjusted by the third mass flow controller 62 is mixed from the second carrier gas supply pipe 61, and gas is exhausted while being supplied into the processing chamber 2 from the second gas supply hole 65 of the second nozzle 64. Exhaust from tube 66.
  • the time for exposing O3 to the wafer 31 is 10 to 120 seconds.
  • the temperature of the wafer 31 at this time is 180 to 250 ° C.
  • the pressure in the processing chamber 2 is 50 to 100 Pa as in the case of supplying the TEMAH gas.
  • Step 4 In step 4, after the film is formed, the valve 59 and the valve 63 are closed, and the inside of the processing chamber 2 is evacuated by the vacuum pump 68 to eliminate O3 remaining after contributing to the film formation. At this time, if an inert gas, for example, N 2 used as a carrier gas is supplied into the processing chamber 2, the effect of further removing remaining O 3 from the processing chamber 2 is enhanced.
  • an inert gas for example, N 2 used as a carrier gas
  • steps 1 to 4 are defined as one cycle, and the HfO 2 film having a predetermined thickness can be formed on the wafer 31 by repeating this cycle a plurality of times.
  • the maintenance process of the vaporizer 51 is performed when the vaporizer 51 is started up or when the processing apparatus is maintained. In the maintenance process, the liquid in the storage chamber 210 is drained, the liquid is replaced, and cleaning is performed.
  • the vaporizer 80 illustrated in FIG. 8 is a first comparative example.
  • the vaporizer 90 shown in FIG. 9 is a second comparative example.
  • the description of the same configuration as that of the vaporizer 51 is omitted, and the description will focus on the differences.
  • the vaporizer 80 has a side wall 801, a bottom wall 802, and a lid wall 803 similarly to the vaporizer 51, but is different from the vaporizer 51 in that it does not have a recess 211, a connecting pipe 212, and a discharge pipe 213 continuous therewith. .
  • maintenance refers to, for example, liquid removal, liquid replacement, and cleaning. In order to implement them while taking down time into consideration, it is necessary to drain the liquid while it is placed on the weight detector 221.
  • the vaporizer 80 is difficult to open and close because the side wall 801 and the lid wall 803 are connected by welding or the like for safety reasons. Furthermore, it is conceivable to discharge the liquid from the liquid source supply pipe 204, but it is difficult to eliminate the liquid stored between the bottom wall 802 and the tip of the liquid source supply pipe 204 due to structural problems. . In order to exclude the liquid under such a configuration, for example, it is conceivable that the distance between the bottom wall 802 and the tip of the liquid source supply pipe 204 is remarkably shortened. The wall 802 may come into contact with the liquid raw material tube 204 or the bottom wall 802. Debris generated due to breakage becomes garbage for wafer processing and is not a realistic structure.
  • the vaporizer 90 includes a side wall 901, a bottom wall 902, and a lid wall 903, similar to the vaporizer 51, but differs in that the bottom wall 902 cannot be placed on the weight detector and is attached thereto. .
  • the vaporizer 90 has a liquid level detector 904.
  • the liquid level detector 904 detects the liquid level height of the storage chamber 210. The remaining amount of liquid is detected by detecting the height of the liquid surface.
  • a discharge pipe 905 is provided on the bottom wall 902. Since the remaining liquid level is detected by the liquid level detector 904 instead of the weight detector as in the first embodiment, there is a space below the bottom wall 903. Accordingly, it is possible to arrange the pipe 905 for discharging the liquid in the direction of gravity.
  • the discharge pipe 905 passes through the bottom wall.
  • the liquid level detector 92 it may be impossible to follow the fluctuation of the liquid, and it is difficult to accurately measure the remaining liquid amount. Furthermore, when the liquid is emptied, the detection tool of the liquid level detector hits the bottom of the storage tank, which causes dust to be generated.
  • the vaporizer 51 is mainly configured by the side wall 201, the bottom wall 202, and the lid wall 203. In order not to leak the liquid stored in the storage chamber 210 to the outside, each wall is fixed by welding or the like.
  • the liquid is drained so that no residue is generated in a state where it is mounted on the processing apparatus. Details will be described below.
  • the discharge pipe 213 and a drain liquid tank (not shown) are connected.
  • the valve 207 is closed and the valve 209 is opened.
  • the valve 205 is closed and the valve 214 is opened.
  • the inert gas supply source 217 communicates with the discharge liquid tank.
  • the inert gas supplied from the inert gas supply source 217 is supplied into the storage chamber 210 and pressurizes the remaining liquid 216.
  • the pressurized liquid is discharged from the discharge pipe 213 through the recess 211 and the communication pipe 212.
  • the storage tank structure 200 has a relationship of “diameter of the side wall 201b> diameter of the recess 211> diameter of the communication pipe 212> diameter of the discharge pipe 213”. Accordingly, the liquid 216 is raised to a position higher than the bottom wall 202 by capillary action.
  • the pressure applied to the liquid is “the pressure of the side wall 201b> the pressure of the recess 211> the communication.
  • cleaning process Next, the cleaning process will be described.
  • a cleaning process is performed using the storage chamber 210 as a target.
  • cleaning is performed in a state where the vaporizer 51 is mounted on the substrate processing apparatus in consideration of downtime.
  • the mobile cleaning unit 300 shown in FIG. 6 is connected to the vaporizer 51. Specifically, the valve 214 is closed, and the pipe 218 is removed with the valves 207 and 209 closed. Next, the valve 209 and the pipe 314 are connected, and further the valve 214 and the pipe 321 are connected. By doing in this way, piping is connected as shown in FIG. At this time, all the valves of the cleaning device 300 are closed.
  • the vacuum pump 302 is activated. Thereafter, the valve 342 is opened, and the junction 313 and the pipe 341 are communicated. At the same time, the valve 345 is opened, and the junction 323 and the pipe 341 are communicated.
  • the atmospheric pressure is, for example, 0.01 Pa or less.
  • valve 315 When the atmosphere in the pipe reaches a predetermined pressure, the valve 315 is opened and the pipe 314 is communicated with the vacuum pump 302. At the same time, the valve 322 is opened, and the piping 321 is communicated with the vacuum pump 302 in the same manner, and a leak check is performed targeting the connection portion with the vaporizer 51 and the like.
  • valve 209 and the valve 214 are opened to communicate with the vacuum pump 302, and the inside of the storage chamber 210 is evacuated.
  • valve 342 and the valve 345 are closed, and the storage chamber 210 and the vacuum pump 302 are disconnected.
  • valve 312 is opened, and the piping of the solvent supply system 310 is communicated.
  • valve 324 is opened to allow the solvent discharge system 320 to communicate.
  • a fresh solvent can be supplied from the solvent tank 301 to the storage chamber 210 via the solvent supply system 310.
  • the solvent that has cleaned the storage chamber 210 can be supplied from the storage chamber 210 to the solvent tank 301 via the solvent discharge system 320.
  • the liquid circulation pump 316 is started, and the storage chamber 210 is cleaned by circulating the solvent. During this time, the concentration of the particle component of the solvent that has passed through the pipe 325 is extracted by the particle counter 326. When the particle component becomes lower than a predetermined value, it is determined that the cleaning is completed, and the liquid circulation pump 316 is stopped.
  • the solvent remaining in the storage chamber 210 is extracted.
  • the valve 312 is closed and the valve 332 is opened.
  • the solvent tank 301 and the storage chamber 210 are shut off, and the storage chamber 210 and the inert gas supply source 333 are communicated with each other.
  • the inert gas supplied from the inert gas source 333 is supplied to the storage chamber 210 via the pipe 331 and the pipe 314.
  • the supplied inert gas discharges the residual solvent in the pipe 314 and the storage tank to the solvent tank 301 and recovers the solvent.
  • valve 324 is closed and the valve 355 is opened.
  • the exhaust / heating unit 352 and the storage chamber 210 are communicated with each other.
  • an inert gas is supplied for a predetermined time, and the residual solvent is discharged from the pipe 314, the storage chamber 210, and the like.
  • valve 332 is closed to shut off the storage chamber 210 and the inert gas source 333. Further, the valve 355 is closed. At the same time, the valve 342 and the valve 345 are opened, and the storage chamber 210, the pipe 314, and the pipe 321 are communicated with the vacuum pump 302. The vacuum pump 302 evacuates the storage chamber 210.
  • the valve 342 and the valve 345 are closed to stop the evacuation process.
  • the predetermined pressure refers to, for example, 0.01 Pa or less.
  • the storage chamber 210 and the inert gas source 333 are communicated with each other by opening the valve 332, and the storage chamber 210 is filled with an inert gas.
  • all the valves are closed, and the pipe 314 and the pipe 321 are removed from the vaporizer 51.
  • the vaporizer 51 of the second embodiment has a side wall 701, a bottom wall 702, and a lid wall 703. Further, a communication pipe 232 and a discharge pipe 233 are provided. Unlike the first embodiment, the discharge pipe 233 is embedded in the side wall 701, and the communication pipe 232 extends to a position where it can be connected to the discharge pipe 233. In the second embodiment, the heater 215 is provided as in the first embodiment.
  • the storage chamber 210 contains a raw material in a liquid state and a raw material in a vaporized state. Since the temperature is different between the position adjacent to the liquid state raw material and the position adjacent to the vaporized state raw material, in the discharge pipe 213, for example, the temperature may be different between upstream and downstream. Since the thermal expansion coefficients of liquids due to different temperatures are different, the relationship between pressures may become unstable upstream and downstream of the discharge pipe 213. Alternatively, a phenomenon such as solidification of the liquid occurs due to a decrease in temperature. Depending on the properties of the liquid raw material, these phenomena become significant, so it is desirable to make the temperature uniform.
  • the discharge pipe 233 is embedded in the side wall 701. Since the heat generated by the heater 215 is uniformly dispersed in the side wall 701, the heat effect can be made uniform between the upstream and downstream of the discharge pipe 233. More preferably, the discharge pipe 233 is provided in the same direction as the extending direction of the heater 215. Thereby, the upstream and downstream thermal effects can be made more uniform. From the above, the pressure of the liquid passing through the discharge pipe 233 does not become unstable. Furthermore, the temperature is stabilized.
  • TEMAH is used as a source (liquid raw material) and O3 gas is used as a reactant (reactive gas), and these are alternately supplied.
  • the HfO film is formed on the wafer W by way of example.
  • the present invention is not limited to this. That is, it is only necessary to use a liquid raw material as the source, and as the reactant, other types of thin films may be formed using a gas that reacts with the source and performs film processing. Furthermore, even when three or more kinds of process gases are used, the present invention can be applied as long as the film formation process is performed by alternately supplying these gases.
  • the cleaning device 300 it is not limited to the case of only discharging the liquid, and may be connected to a waste liquid device.
  • the gas flow path is provided on the lid, the present invention is not limited thereto, and may be provided on the side wall, for example.
  • the gas flow path is provided on the lid, the present invention is not limited thereto, and may be provided on the side wall, for example.
  • the film forming process in the semiconductor device is taken as an example of the process performed by the substrate processing apparatus, but the present invention is not limited to this. That is, in addition to the film formation process, a process for forming an oxide film or a nitride film, or a process for forming a film containing metal may be used. Further, the specific content of the substrate processing is not questioned and can be suitably applied not only to the film forming processing but also to other substrate processing such as annealing processing, oxidation processing, nitriding processing, diffusion processing, and lithography processing.
  • the present invention provides other substrate processing apparatuses such as annealing processing apparatuses, oxidation processing apparatuses, nitriding processing apparatuses, exposure apparatuses, coating apparatuses, drying apparatuses, heating apparatuses, and processing apparatuses using plasma. It can be suitably applied to. In the present invention, these devices may be mixed.
  • each embodiment described above has described the semiconductor manufacturing process, but is not limited thereto, a liquid raw material tank or an intermediate storage tank for storing a liquid that requires high cleanliness of the liquid in the chemical industry field, You may use for the liquid tank etc. which are incorporated in a vaporizer.
  • the liquid here is, for example, pure water, hydrogen peroxide water, ammonia water, alcohols, or organic acids.
  • a part of the configuration of an embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of an embodiment.

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Abstract

Provided are a processing device capable of attaining high productivity and the following structure for achieving the same. That is, the structure is provided with: a circumferentially shaped side wall; a cover wall disposed on the upper end side of the side wall; a bottom wall connected to the lower end side of the side wall and having a mounting surface whereon a weight detector is mountable; a retention chamber surrounded by the side wall, cover wall, and bottom wall; a recessed part provided in the bottom wall and linking to the retention chamber; a connecting pipe constituted such that one end of which is connected to a site in the gravitational direction of the recessed part and the other end extends in a direction different from the gravitational direction within the bottom wall, and constituted such that the diameter is smaller than the diameter of the recessed part; a gas flow path provided in a wall different from the bottom wall; and a liquid discharge path connected to the downstream end of the connecting pipe.

Description

貯留装置、気化器、基板処理装置および半導体装置の製造方法Storage device, vaporizer, substrate processing apparatus, and semiconductor device manufacturing method
　本発明は、液体を貯留する貯留装置、気化器、基板処理装置および半導体装置の製造方法に関する。 The present invention relates to a storage device for storing a liquid, a vaporizer, a substrate processing apparatus, and a method for manufacturing a semiconductor device.
　処理対象物を液体で処理する装置があり、そこでは処理チャンバの手前でいったん液体を貯留する貯留タンクとしての容器を有する。貯留タンクは、処理チャンバへの液体供給を制御する等の役割を有する（例えば特許文献１参照）。 There is an apparatus for processing an object to be processed with a liquid, in which a container serving as a storage tank for temporarily storing the liquid is provided in front of the processing chamber. The storage tank has a role of controlling liquid supply to the processing chamber (see, for example, Patent Document 1).
特開２００７‐２２７４７１JP2007-227471A
　処理装置では高い生産性が求められている。高い生産性を達成するための一つの方法としては、例えば処理装置のメンテナンス時間の短縮化がある。 High productivity is required for processing equipment. One method for achieving high productivity is, for example, shortening the maintenance time of the processing apparatus.
　本発明は、上記問題に鑑み、高い生産性を達成可能な処理装置やそれを実現するための構造を提供することを目的とする。 In view of the above problems, an object of the present invention is to provide a processing apparatus capable of achieving high productivity and a structure for realizing the processing apparatus.
　本発明の一態様によれば、周状に構成された側壁と、前記側壁の上端側に配された蓋壁と、前記側壁の下端側に接続されると共に、重量検知器上に載置可能な載置面を有する底壁と、前記側壁と前記蓋壁と前記底壁で囲まれた貯留室と、前記貯留室に連通すると共に、前記底壁に設けられた凹部と、一端が前記凹部のうち重力方向の部位に接続され、他端が前記底壁内にて重力方向とは異なる方向に延伸するよう構成され、径が前記凹部の径よりも小さくなるよう構成される連絡管と、前記底壁と異なる壁に設けられるガス流路と、前記連絡管の下流端に接続される液体排出路とを備える構造が提供される。 According to one aspect of the present invention, the peripheral side wall, the lid wall disposed on the upper end side of the side wall, connected to the lower end side of the side wall, and can be placed on the weight detector. A bottom wall having a mounting surface; a storage chamber surrounded by the side wall, the lid wall, and the bottom wall; a recess communicating with the storage chamber; and a recess provided on the bottom wall; Connected to a portion in the gravitational direction, the other end is configured to extend in a direction different from the gravitational direction in the bottom wall, and a connecting tube configured to have a diameter smaller than the diameter of the recess, A structure including a gas flow path provided on a wall different from the bottom wall and a liquid discharge path connected to a downstream end of the communication pipe is provided.
　本発明によれば、高い生産性を達成可能な処理装置やそれを実現するための構造を提供することができる。 According to the present invention, it is possible to provide a processing apparatus capable of achieving high productivity and a structure for realizing the processing apparatus.
本発明の実施形態に係る処理装置の概略を示す斜視図である。It is a perspective view which shows the outline of the processing apparatus which concerns on embodiment of this invention. 本発明の実施形態に係る処理装置に使用される基板処理炉の概略断面図である。It is a schematic sectional drawing of the substrate processing furnace used for the processing apparatus which concerns on embodiment of this invention. 図２のＡ－Ａ矢視図である。FIG. 3 is an AA arrow view of FIG. 2. 本発明の実施形態に係る貯留タンクを説明する説明図である。It is explanatory drawing explaining the storage tank which concerns on embodiment of this invention. 本発明の実施形態に係るコントローラを説明する説明図である。It is explanatory drawing explaining the controller which concerns on embodiment of this invention. 本発明の実施形態に係る貯留タンクと洗浄装置との関係を説明する説明図である。It is explanatory drawing explaining the relationship between the storage tank and washing | cleaning apparatus which concern on embodiment of this invention. 本発明の実施形態に係る貯留タンクを説明する説明図である。It is explanatory drawing explaining the storage tank which concerns on embodiment of this invention. 比較例を説明する説明図である。It is explanatory drawing explaining a comparative example. 比較例を説明する説明図である。It is explanatory drawing explaining a comparative example.
  以下、本発明の図面を参照しつつ本発明を実施する為の最良の形態を説明する。 Hereinafter, the best mode for carrying out the present invention will be described with reference to the drawings of the present invention.
（第一の実施形態）
  図１は、本発明が実施される処理装置の一例である基板処理装置を示すものである。先ず、図１により本発明が適用される基板処理装置の概略を説明する。 (First embodiment)
FIG. 1 shows a substrate processing apparatus which is an example of a processing apparatus in which the present invention is implemented. First, an outline of a substrate processing apparatus to which the present invention is applied will be described with reference to FIG.
  筐体２１内部の前面側には、図示しない外部搬送装置との間で基板収納容器としてのカセット２２の授受を行う容器授受手段としてのカセットステージ２３が設けられ、カセットステージ２３の後側には昇降手段としてのカセットエレベータ２４が設けられ、カセットエレベータ２４にはカセット搬送手段としてのカセット搬送機２５が取付けられている。又、カセットエレベータ２４の後側には、カセット２２の収納手段としてのカセット棚２６が設けられると共にカセットステージ２３の上方にもカセット収納手段である予備カセット棚２７が設けられている。予備カセット棚２７の上方にはファン、防塵フィルタで構成されたクリーンユニット２８が設けられ、クリーンエアを筐体２１の内部、例えばカセット２２が搬送される領域を流通させる様に構成されている。 A cassette stage 23 is provided on the front side of the inside of the casing 21 as a container transfer means for transferring a cassette 22 as a substrate storage container with an external transfer device (not shown). A cassette elevator 24 as an elevating means is provided, and a cassette transporter 25 as a cassette transport means is attached to the cassette elevator 24. Further, a cassette shelf 26 as a storage means for the cassette 22 is provided on the rear side of the cassette elevator 24, and a spare cassette shelf 27 as a cassette storage means is also provided above the cassette stage 23. A clean unit 28 composed of a fan and a dust-proof filter is provided above the spare cassette shelf 27, and is configured to distribute clean air inside the housing 21, for example, in a region where the cassette 22 is transported.
  筐体２１の後部上方には、基板処理炉２９が設けられ、基板処理炉２９の下方には基板としてのウエハ３１を水平姿勢で多段に保持する基板保持手段としてのボート３２を基板処理炉２９に挿入、引出しする昇降手段としてのボートエレベータ３３が設けられ、ボートエレベータ３３に取付けられた昇降部材３４の先端部には基板処理炉２９の炉口部を閉塞する蓋体としてのシールキャップ３５が取付けられ、シールキャップ３５にボート３２が垂直に支持され、ボート３２はウエハ３１を水平姿勢で多段に保持する。 A substrate processing furnace 29 is provided above the rear portion of the casing 21, and a boat 32 as a substrate holding means for holding wafers 31 as substrates in a horizontal posture in multiple stages is provided below the substrate processing furnace 29. A boat elevator 33 is provided as an elevating means for inserting and withdrawing to the boat elevator, and a seal cap 35 as a lid for closing the furnace port portion of the substrate processing furnace 29 is provided at the tip of the elevating member 34 attached to the boat elevator 33. The boat 32 is vertically supported by the seal cap 35, and the boat 32 holds the wafer 31 in a horizontal posture in multiple stages.
  ボートエレベータ３３とカセット棚２６との間には昇降手段としての移載エレベータ３６が設けられ、移載エレベータ３６には基板移載手段としてのウエハ移載機３７が取付けられている。ウエハ移載機３７は、基板を載置する所要枚数（例えば５枚）の基板搬送プレート４０を有し、基板搬送プレート４０は進退、回転可能となっている。 A transfer elevator 36 as an elevating means is provided between the dredger boat elevator 33 and the cassette shelf 26, and a wafer transfer machine 37 as a substrate transfer means is attached to the transfer elevator 36. The wafer transfer device 37 has a required number (for example, five) of substrate transfer plates 40 on which a substrate is mounted, and the substrate transfer plate 40 can be moved back and forth.
  又、基板処理炉２９下部近傍には、開閉機構を持ち基板処理炉２９の炉口を塞ぐ遮蔽部材としての炉口シャッタ３８が設けられている。 Moreover, a furnace port shutter 38 as a shielding member that has an opening / closing mechanism and closes the furnace port of the substrate processing furnace 29 is provided in the vicinity of the lower portion of the substrate processing furnace 29.
  移載エレベータ３６と対向する筐体２１の側面には、ファン、防塵フィルタで構成されたクリーンユニット３０が設けられ、クリーンユニット３０から送出されたクリーンエアは、ウエハ移載機３７、ボート３２、ボートエレベータ３３を含む領域を流通した後、図示しない排気装置により筐体２１の外部に排気される様になっている。 A clean unit 30 composed of a fan and a dustproof filter is provided on the side surface of the housing 21 facing the transfer elevator 36. Clean air sent from the clean unit 30 is transferred to the wafer transfer device 37, the boat 32, After flowing through the region including the boat elevator 33, the exhaust is exhausted to the outside of the housing 21 by an exhaust device (not shown).
  カセット搬送機２５、ウエハ移載機３７、ボートエレベータ３３等の駆動制御、基板処理炉２９の加熱制御等は制御部４１により行われる。 The control unit 41 performs drive control of the cassette transfer machine 25, wafer transfer machine 37, boat elevator 33, etc., heating control of the substrate processing furnace 29, and the like.
  以下、作動について説明する。 Hereinafter, the operation will be described.
  ウエハ３１が垂直姿勢で装填されたカセット２２は、図示しない外部搬送装置からカセットステージ２３に搬入され、ウエハ３１が水平姿勢となる様、カセットステージ２３で９０°回転させられる。更に、カセット２２は、カセットエレベータ２４の昇降動作、横行動作及びカセット搬送機２５の進退動作、回転動作の協働によりカセットステージ２３からカセット棚２６又は予備カセット棚２７に搬送される。 The cassette 22 loaded with the wafer 31 in the vertical posture is carried into the cassette stage 23 from an external transfer device (not shown), and is rotated 90 ° on the cassette stage 23 so that the wafer 31 is in the horizontal posture. Further, the cassette 22 is transported from the cassette stage 23 to the cassette shelf 26 or the spare cassette shelf 27 by cooperation of the raising / lowering operation of the cassette elevator 24, the transverse operation, the advance / retreat operation of the cassette transporter 25, and the rotation operation.
  カセット棚２６にはウエハ移載機３７の搬送対象となるカセット２２が収納される移載棚３９があり、ウエハ３１の移載に供されるカセット２２はカセットエレベータ２４、カセット搬送機２５により移載棚３９に移載される。 The cassette shelf 26 has a transfer shelf 39 in which the cassette 22 to be transferred by the wafer transfer device 37 is stored. The cassette 22 used for transferring the wafer 31 is transferred by the cassette elevator 24 and the cassette transfer device 25. It is transferred to the mounting shelf 39.
  カセット２２が移載棚３９に移載されると、ウエハ移載機３７は、基板搬送プレート４０の進退動作、回転動作及び移載エレベータ３６の昇降動作の協働により移載棚３９から降下状態のボート３２にウエハ３１を移載する。 When the cassette 22 is transferred to the transfer shelf 39, the wafer transfer machine 37 is lowered from the transfer shelf 39 by the cooperation of the advance / retreat operation, the rotation operation, and the lifting / lowering operation of the transfer elevator 36 of the substrate transfer plate 40. The wafer 31 is transferred to the boat 32.
  ボート３２に所定枚数のウエハ３１が移載されると、ボートエレベータ３３によりボート３２が上昇され、ボート３２が基板処理炉２９に挿入される。完全にボート３２が挿入された状態では、シールキャップ３５により基板処理炉２９が気密に閉塞される。 When a predetermined number of wafers 31 are transferred to the boat 32, the boat 32 is raised by the boat elevator 33 and the boat 32 is inserted into the substrate processing furnace 29. When the boat 32 is completely inserted, the substrate processing furnace 29 is hermetically closed by the seal cap 35.
  気密に閉塞された基板処理炉２９内では、選択された処理レシピに従い、ウエハ３１が加熱されると共に処理ガスが基板処理炉２９内に供給され、ガス排気管６６から図示しない排気装置によって処理室２の雰囲気が排出されつつ、ウエハ３１に処理がなされる（図２参照）。 In the airtightly closed substrate processing furnace 29, the wafer 31 is heated and a processing gas is supplied into the substrate processing furnace 29 according to the selected processing recipe, and the processing chamber is supplied from the gas exhaust pipe 66 by an exhaust device (not shown). The wafer 31 is processed while the atmosphere 2 is discharged (see FIG. 2).
  図２、図３により上記基板処理装置に用いられる縦型の基板処理炉２９について説明する。 2 and 3, a vertical substrate processing furnace 29 used in the substrate processing apparatus will be described.
  加熱装置（加熱手段）であるヒータ４２の内側に反応管１が設けられ、反応管１の下端には、例えばステンレス等によりマニホールド４４が気密部材であるＯリング４６を介して連設され、マニホールド４４の下端開口部（炉口部）は蓋体であるシールキャップ３５により気密部材であるＯリング１８を介して気密に閉塞され、少なくとも、反応管１、マニホールド４４及びシールキャップ３５により処理室２を画成している。 A reaction tube 1 is provided inside a heater 42 that is a heating device (heating means), and a manifold 44 is connected to the lower end of the reaction tube 1 by means of, for example, stainless steel via an O-ring 46 that is an airtight member. The lower end opening (furnace port portion) 44 is airtightly closed by a seal cap 35 as a lid through an O-ring 18 as an airtight member, and at least the processing chamber 2 by the reaction tube 1, the manifold 44 and the seal cap 35. Is defined.
  シールキャップ３５にはボート支持台４５を介してボート３２が立設され、ボート支持台４５はボート３２を保持する保持体となっている。 A boat 32 is erected on the anchor seal cap 35 via a boat support 45, and the boat support 45 serves as a holding body for holding the boat 32.
  処理室２へは複数種類、ここでは２種類の処理ガスを供給する供給経路としての２本のガス供給管（第１ガス供給管４７、第２ガス供給管４８）が設けられている。 Two types of gas supply pipes (a first gas supply pipe 47 and a second gas supply pipe 48) are provided as supply paths for supplying a plurality of types of processing gases, here two types of processing gases, to the soot processing chamber 2.
  第１ガス供給管４７には上流から順に、液体原料源７１、液体の流量制御装置（流量制御手段）である第一マスフローコントローラ４９、気化器５１、及び開閉弁であるバルブ５２が設けられる。バルブ５２の下流側には、キャリアガスを供給する第１キャリアガス供給管５３が合流される。第１キャリアガス供給管５３には上流から順に、キャリアガス源７２、流量制御装置（流量制御手段）である第２マスフローコントローラ５４、及び開閉弁であるバルブ５５が設けられている。又、第１ガス供給管４７の先端部には、反応管１の内壁に沿って下部から上部に亘り、第１ノズル５６が設けられ、第１ノズル５６の側面にはガスを供給する第１ガス供給孔５７が設けられている。第１ガス供給孔５７は、下部から上部に亘って等ピッチで設けられ、それぞれ同一の開口面積を有している。気化器５１は、後述するように液体原料を貯留する貯留タンク構造と、液体原料を加熱するヒータを有する。本実施形態の説明においては、第一ガス供給管４７のうち、気化器５１よりも上流であって、液体原料供給源７１との間に設けられた配管を供給管４７ａとする。また、第一ガス供給管４７のうち、気化器５１の下流側を供給管４７ｂとする。 The first gas supply pipe 47 is provided with a liquid source 71, a first mass flow controller 49 that is a liquid flow rate control device (flow rate control means), a vaporizer 51, and a valve 52 that is an on-off valve in order from the upstream side. A first carrier gas supply pipe 53 that supplies a carrier gas is joined downstream of the valve 52. The first carrier gas supply pipe 53 is provided with a carrier gas source 72, a second mass flow controller 54 as a flow rate control device (flow rate control means), and a valve 55 as an on-off valve in this order from the upstream. A first nozzle 56 is provided at the tip of the first gas supply pipe 47 from the lower part to the upper part along the inner wall of the reaction pipe 1, and a first gas is supplied to the side surface of the first nozzle 56. A gas supply hole 57 is provided. The first gas supply holes 57 are provided at an equal pitch from the lower part to the upper part, and have the same opening area. The vaporizer 51 has a storage tank structure for storing a liquid material and a heater for heating the liquid material, as will be described later. In the description of the present embodiment, a pipe provided between the first gas supply pipe 47 and the liquid source supply source 71 upstream from the vaporizer 51 is referred to as a supply pipe 47a. In addition, the downstream side of the vaporizer 51 in the first gas supply pipe 47 is a supply pipe 47b.
　ここで、第一ガス供給管４７、第一マスフローコントローラ４９、気化器５１、バルブ５２、ノズル５６をまとめて第一ガス供給部と呼ぶ。尚、キャリアガス供給管５３、第二マスフローコントローラ５４、バルブ５５を第一ガス供給部に含めても良い。更には、液体原料源７１、キャリアガス源７２を第一ガス供給部に含めても良い。 Here, the first gas supply pipe 47, the first mass flow controller 49, the vaporizer 51, the valve 52, and the nozzle 56 are collectively referred to as a first gas supply unit. The carrier gas supply pipe 53, the second mass flow controller 54, and the valve 55 may be included in the first gas supply unit. Furthermore, the liquid source source 71 and the carrier gas source 72 may be included in the first gas supply unit.
  第２ガス供給管４８には上流方向から順に、反応ガス源７３、流量制御装置（流量制御手段）である第三マスフローコントローラ５８、開閉弁であるバルブ５９が設けられ、バルブ５９の下流側にキャリアガスを供給する第２キャリアガス供給管６１が合流されている。第２キャリアガス供給管６１には上流から順に、キャリアガス源７４、流量制御装置（流量制御手段）である第四マスフローコントローラ６２、及び開閉弁であるバルブ６３が設けられている。第２ガス供給管４８の先端部には、第１ノズル５６と平行に第２ノズル６４が設けられ、第２ノズル６４の側面にはガスを供給する供給孔である第２ガス供給孔６５が設けられている。第２ガス供給孔６５は、下部から上部に亘って等ピッチで設けられ、それぞれ同一の開口面積を有している。 The second gas supply pipe 48 is provided with a reaction gas source 73, a third mass flow controller 58 as a flow rate control device (flow rate control means), and a valve 59 as an on-off valve in order from the upstream direction. A second carrier gas supply pipe 61 for supplying the carrier gas is joined. The second carrier gas supply pipe 61 is provided with a carrier gas source 74, a fourth mass flow controller 62 which is a flow rate control device (flow rate control means), and a valve 63 which is an on-off valve in this order from upstream. A second nozzle 64 is provided at the tip of the second gas supply pipe 48 in parallel with the first nozzle 56, and a second gas supply hole 65, which is a supply hole for supplying gas, is provided on the side surface of the second nozzle 64. Is provided. The second gas supply holes 65 are provided at an equal pitch from the lower part to the upper part, and have the same opening area.
　ここで、第二ガス供給管４８、第三マスフローコントローラ５８、バルブ５９、ノズル６４をまとめて第二ガス供給部と呼ぶ。尚、キャリアガス供給管６１、第四マスフローコントローラ６２、バルブ６３を第二ガス供給部に含めても良い。更には、反応ガス源７３、キャリアガス源７４を第二ガス供給部に含めても良い。 Here, the second gas supply pipe 48, the third mass flow controller 58, the valve 59, and the nozzle 64 are collectively referred to as a second gas supply unit. The carrier gas supply pipe 61, the fourth mass flow controller 62, and the valve 63 may be included in the second gas supply unit. Furthermore, you may include the reactive gas source 73 and the carrier gas source 74 in a 2nd gas supply part.
  液体原料源７１から供給される液体原料は、液体マスフローコントローラ４９、気化器５１、及びバルブ５２を介し、第１キャリアガス供給管５３と合流し、更に第１ノズル５６を介して処理室２内に供給される。なお、処理室２内に供給される際は、気化器５１にて気化された状態の液体原料が供給される。反応ガス源７３から供給される反応ガスは、第１マスフローコントローラ５８、バルブ５９を介し、第２キャリアガス供給管６１と合流し、更に第２ノズル６４を介して処理室２に供給される。 The liquid source supplied from the liquid source source 71 merges with the first carrier gas supply pipe 53 via the liquid mass flow controller 49, the vaporizer 51, and the valve 52, and further into the processing chamber 2 via the first nozzle 56. To be supplied. In addition, when it supplies in the process chamber 2, the liquid raw material in the state vaporized by the vaporizer 51 is supplied. The reaction gas supplied from the reaction gas source 73 merges with the second carrier gas supply pipe 61 via the first mass flow controller 58 and the valve 59, and is further supplied to the processing chamber 2 via the second nozzle 64.
  処理室２は、ガスを排気するガス排気管６６を介して排気装置（排気手段）である真空ポンプ６８に接続され、真空排気される様になっている。尚、バルブ６７は弁を開閉して処理室２の真空排気及び真空排気停止ができ、更に弁開度を調節して圧力調整可能となっている開閉弁である。 The soot processing chamber 2 is connected to a vacuum pump 68 which is an exhaust device (exhaust means) via a gas exhaust pipe 66 for exhausting gas, and is evacuated. The valve 67 is an open / close valve capable of opening and closing the valve to evacuate and stop the evacuation of the processing chamber 2 and further adjust the pressure by adjusting the valve opening.
  シールキャップ３５にはボート回転機構６９が設けられ、ボート回転機構６９は処理の均一性を向上する為にボート３２を回転する様になっている。 The boat seal mechanism 35 is provided with a boat rotation mechanism 69, and the boat rotation mechanism 69 rotates the boat 32 in order to improve processing uniformity.
（気化器）
　続いて、図４を用いて貯留タンク構造２００を有する気化器の一例である気化器５１を説明する。貯留タンク構造２００は液体を貯留する容器として用いられる。
　図４は気化器５１の詳細な構造を説明する説明図である。気化器５１は、貯留タンク２００を構成する側壁２０１、底壁２０２、蓋壁２０３を有する。側壁２０１は例えば円筒状（周状）に構成される。側壁２０１は、径が等しい筒状構造である側壁２０１ａと、底壁２０２に向かうほど径が小さくなるよう構成された側壁２０１ｂを有する。図４においては、側壁２０１ａはα－β間の側壁２０１であり、側壁２０１ｂはβ－γ間の側壁２０１を指す。 (Vaporizer)
Next, a vaporizer 51 which is an example of a vaporizer having a storage tank structure 200 will be described with reference to FIG. The storage tank structure 200 is used as a container for storing a liquid.
FIG. 4 is an explanatory diagram for explaining the detailed structure of the vaporizer 51. The vaporizer 51 includes a side wall 201, a bottom wall 202, and a lid wall 203 that constitute the storage tank 200. The side wall 201 is configured in a cylindrical shape (circumferential shape), for example. The side wall 201 includes a side wall 201a having a cylindrical structure with the same diameter, and a side wall 201b configured such that the diameter decreases toward the bottom wall 202. In FIG. 4, the side wall 201a is the side wall 201 between α and β, and the side wall 201b is the side wall 201 between β and γ.
　側壁２０１ａと側壁２０１ｂは段差のない連続した構造である。側壁２０１ｂは底壁２０２に向かうほど径が小さくなる構造であり、そこでは液体の表面張力の影響を最小とする曲率となるよう構成される。 The side wall 201a and the side wall 201b have a continuous structure without a step. The side wall 201b has a structure in which the diameter decreases toward the bottom wall 202, and is configured to have a curvature that minimizes the influence of the surface tension of the liquid.
　側壁２０１、底壁２０２のうち、液体と接触する面では、液体の表面張力を最小化するために表面積を小さくすることが望ましい。それを実現するために、液体と接触する面に対して、例えば複合電解研磨を実施する。更に、液体の種類や性質に応じて、不働態化、ガラス化、フッ素処理等を行い、液体との反応を防止する。 It is desirable to reduce the surface area of the side wall 201 and the bottom wall 202 in order to minimize the surface tension of the liquid on the surface in contact with the liquid. In order to realize this, for example, composite electropolishing is performed on the surface in contact with the liquid. Further, depending on the type and properties of the liquid, passivation, vitrification, fluorine treatment, etc. are performed to prevent reaction with the liquid.
　側壁２０１、底壁２０２、蓋壁２０３で構成された貯留室２１０には、後述する液体原料供給管２０４から液体原料が供給され、貯留室２１０は液体原料を貯留する。図４においては、貯留された液体原料を液体原料２１６と呼ぶ。 The storage chamber 210 constituted by the side wall 201, the bottom wall 202, and the lid wall 203 is supplied with a liquid source from a liquid source supply pipe 204 described later, and the storage chamber 210 stores the liquid source. In FIG. 4, the stored liquid raw material is referred to as a liquid raw material 216.
　底壁２０２のうち、重力方向（Ｚ方向）の面は、重量検知器２２１に載置可能な載置面２０２aとして構成されている。載置面２０２ａは、重量検知器２２１に安定した状態で載置されるよう、例えば平面状に構成される。重量検知器２２１にて貯留タンク構造の重量を検知することで、貯留室２１０内に貯留された液体原料２１６の重量を計測可能とする。重量を計測することで、液体の残量を計測可能とする。 The surface of the bottom wall 202 in the gravity direction (Z direction) is configured as a mounting surface 202 a that can be mounted on the weight detector 221. The placement surface 202a is configured in a planar shape, for example, so as to be placed on the weight detector 221 in a stable state. By detecting the weight of the storage tank structure with the weight detector 221, the weight of the liquid raw material 216 stored in the storage chamber 210 can be measured. By measuring the weight, the remaining amount of liquid can be measured.
　蓋壁２０３は、内部の液体が漏れないよう溶接等で側壁２０１の上端側に接続（固定）される。底壁２０２も同様に、内部の液体が漏れないよう溶接等で側壁２０１の下端側に接続（固定）される。このように固定することで、液体が入った状態での搬送時や、重量検知器２２１上に載置する際の据え付け作業時等で液体が漏れることを防ぐ。 The lid wall 203 is connected (fixed) to the upper end side of the side wall 201 by welding or the like so that the liquid inside does not leak. Similarly, the bottom wall 202 is connected (fixed) to the lower end side of the side wall 201 by welding or the like so that the liquid inside does not leak. By fixing in this way, the liquid is prevented from leaking during transportation in a state where the liquid is contained or during installation work when being placed on the weight detector 221.
　底壁２０２には、凹部２１１が設けられる。凹部２１１は側壁２０１ｂに連続した構造であると共に、側壁２０１ｂにおける径よりも小さくなるよう構成されている。凹部２１１は、下方に向かって徐々に径が小さくなる錐体形状となるよう構成される。凹部２１１の底には、後述する連絡管２１２が接続される孔構造２１１ａが設けられる。 A recess 211 is provided in the bottom wall 202. The recess 211 has a structure continuous to the side wall 201b and is configured to be smaller than the diameter of the side wall 201b. The recess 211 is configured to have a cone shape with a diameter that gradually decreases downward. At the bottom of the recess 211, a hole structure 211a to which a communication tube 212 described later is connected is provided.
　凹部２１１の孔構造２１１ａには、凹部２１１よりも径が小さい連絡管２１２の一端が接続される。連絡管２１２は連絡流路とも呼ぶ。連絡管２１２のうち、他端（下流端）には後述する排出管２１３が接続される。排出管２１３は液体排出路とも呼ぶ。排出管２１３の径は、連絡管２１２の径よりも小さくなるよう構成される。排出管２１３は、例えば連絡管２１２に差し込まれるように固定される。なお、連絡管２１２は連絡構造とも呼ぶ。 One end of a communication tube 212 having a diameter smaller than that of the recess 211 is connected to the hole structure 211 a of the recess 211. The communication pipe 212 is also called a communication flow path. A discharge pipe 213 described later is connected to the other end (downstream end) of the communication pipe 212. The discharge pipe 213 is also called a liquid discharge path. The diameter of the discharge pipe 213 is configured to be smaller than the diameter of the communication pipe 212. The discharge pipe 213 is fixed so as to be inserted into the communication pipe 212, for example. The communication pipe 212 is also called a communication structure.
　処理炉２９と連通する配管２０６は貯留室２１０内で気化されたガス状態の原料が流れるガス流路として構成される。配管２０６の下流側には供給管４７ｂが接続さる。配管２０６は底壁２０２と異なる壁に設けられる。例えば蓋壁２０３に設けられる。蓋壁２０３に設けられる場合、蓋壁２０３に設けられた穴に配管２０６を貫通させる。配管２０６には第一のバルブであるバルブ２０７が設けられる。バルブ２０７を開閉することで、処理室２との間を連通させたり遮断させたりする。 The piping 206 that communicates with the processing furnace 29 is configured as a gas flow path through which the gas-state raw material vaporized in the storage chamber 210 flows. A supply pipe 47 b is connected to the downstream side of the pipe 206. The pipe 206 is provided on a wall different from the bottom wall 202. For example, it is provided on the lid wall 203. When provided in the lid wall 203, the pipe 206 is passed through a hole provided in the lid wall 203. The pipe 206 is provided with a valve 207 which is a first valve. By opening and closing the valve 207, the processing chamber 2 is communicated with or shut off.
　配管２０６であって、バルブ２０７と貯留室２１０（図４においては蓋壁２０３）との間には配管２０８が接続されている。配管２０８には第二のバルブであるバルブ２０９が設けられる。バルブ２０９の下流には取り外し可能な配管２１８が設けられる。配管２１８には不活性ガス源２１７が接続される。バルブ２０９が開閉されることで、不活性ガス源２１７と配管２０８との間を連通させたり遮断させたりする。なお、バルブ２０９を配管２０６に設けてもよい。この場合、配管２０８は省略され、バルブ２０９は配管２１８と配管２０８とが合流するための合流部としても用いられる。 A pipe 208 is connected between the valve 207 and the storage chamber 210 (the lid wall 203 in FIG. 4). The pipe 208 is provided with a valve 209 that is a second valve. A removable pipe 218 is provided downstream of the valve 209. An inert gas source 217 is connected to the pipe 218. By opening and closing the valve 209, the inert gas source 217 and the pipe 208 are communicated with each other or blocked. Note that the valve 209 may be provided in the pipe 206. In this case, the pipe 208 is omitted, and the valve 209 is also used as a joining part for joining the pipe 218 and the pipe 208 together.
　連絡管２１２は、底壁２０２の内部に設けられる。連絡管２１２の形状は、凹部２１１の孔構造２１１ａから重力方向に向かった後、載置面２０２ａを貫通しないよう側方に折り曲げられ、その後重力方向とは異なる方向に延伸するよう構成される。ここで重力方向と異なる方向とは、例えば重力方向と反対の方向であり、蓋２０３の方向である。このようにすることで、重量検知器２２１上に載置面２０２ａを載置することが可能となる。なお、本実施形態においては、連絡管２１２の形状は重力方向とは異なる方向として例えば蓋方向に延伸されているが、液体が排出される構造であればよく、例えば重力方向から見
て横の方向でもよい。 The communication pipe 212 is provided inside the bottom wall 202. The shape of the connecting pipe 212 is configured to be bent in the lateral direction so as not to penetrate the mounting surface 202a after being directed from the hole structure 211a of the concave portion 211 in the direction of gravity, and then extended in a direction different from the direction of gravity. Here, the direction different from the gravitational direction is, for example, the direction opposite to the gravitational direction and is the direction of the lid 203. By doing in this way, it becomes possible to mount the mounting surface 202a on the weight detector 221. In the present embodiment, the shape of the connecting tube 212 is extended in the direction of the lid, for example, as a direction different from the direction of gravity. Direction may be used.
　排出管２１３には第三のバルブであるバルブ２１４が設けられる。排出管２１３は、後述する洗浄装置や排出用タンクに接続可能とする。バルブ２１４は、基板処理を処理する基板処理モードでは閉とされ、洗浄装置や排出用タンクに液体を排出するメンテナンスモードでは開とされる。 The discharge pipe 213 is provided with a valve 214 which is a third valve. The discharge pipe 213 can be connected to a cleaning device and a discharge tank described later. The valve 214 is closed in the substrate processing mode for processing the substrate processing, and is opened in the maintenance mode for discharging the liquid to the cleaning device and the discharge tank.
　ここで側壁２０１ｂ、凹部２１１、連絡管２１２、排出管２１３の径の関係を整理すると次のように構成される。即ち、「側壁２０１ｂの径＞凹部２１１の径＞連絡管２１２の径＞排出管２１３の径」という関係とする。即ち、液体が排出される方向に向かうほど、液体が排出される液体が流れる流路の径が小さくなるよう構成される。このような構成とすることで、凹部２１１、連絡管２１２、排出管２１３の経路において、後述する毛細管現象を実現することができる。 Here, when the relationship among the diameters of the side wall 201b, the concave portion 211, the connecting pipe 212, and the discharge pipe 213 is arranged, the following configuration is provided. That is, a relationship of “diameter of the side wall 201b> diameter of the recess 211> diameter of the communication pipe 212> diameter of the discharge pipe 213” is established. That is, the diameter of the flow path through which the liquid is discharged becomes smaller as the liquid is discharged. By adopting such a configuration, the capillary phenomenon described later can be realized in the paths of the recess 211, the communication pipe 212, and the discharge pipe 213.
　より良くは、凹部２１１と連絡管２１２との接続部分や、連絡管２１２と排出管２１３との接続部分のそれぞれは段差のない構造が望ましい。更には、分岐を持たない構造とすることが望ましい。このような構造とすることで、各構造の接続部分における液体溜まりや気泡の入り込みを防ぐことが可能となる。更には液体排出路の圧力をリニアにすることが可能となる。圧力をリニアにすることで、液体をスムーズに移動させることができる。 More preferably, each of the connecting portion between the recess 211 and the connecting pipe 212 and the connecting portion between the connecting pipe 212 and the discharge pipe 213 should have a structure having no step. Furthermore, it is desirable that the structure has no branch. By adopting such a structure, it becomes possible to prevent liquid accumulation and bubbles from entering at the connecting portions of each structure. Furthermore, the pressure in the liquid discharge path can be made linear. By making the pressure linear, the liquid can be moved smoothly.
　液体原料供給管２０４は液体原料を貯留室２１０に供給するための液体供給流路として構成される。液体原料供給管２０４は底壁２０２と異なる壁に設けられる。例えば蓋壁２０３に設けられる。蓋壁２０３の場合、蓋壁２０３に設けられた穴に液体原料供給管２０４を貫通させる。液体原料供給管２０４の一端は供給管４７ａを介して液体原料源７１に接続され、他端は貯留室２１０に維持される。液体原料供給管２０４にはバルブ２０５が設けられる。バルブ２０５を開閉することで、マスフローコントローラ４９や液体原料源７１との間を連通させたり遮断させたりする。 The liquid source supply pipe 204 is configured as a liquid supply channel for supplying the liquid source to the storage chamber 210. The liquid source supply pipe 204 is provided on a wall different from the bottom wall 202. For example, it is provided on the lid wall 203. In the case of the lid wall 203, the liquid source supply pipe 204 is passed through a hole provided in the lid wall 203. One end of the liquid source supply pipe 204 is connected to the liquid source source 71 via the supply pipe 47 a, and the other end is maintained in the storage chamber 210. The liquid source supply pipe 204 is provided with a valve 205. By opening and closing the valve 205, the mass flow controller 49 and the liquid source source 71 are communicated with each other or blocked.
　側壁２０２の外周にはヒータ２１５が設けられる。ヒータ２１５は貯留室２１０を加熱する。特にここでは、貯留室２１０に貯留された液体原料２１６を加熱し、気化させる。 A heater 215 is provided on the outer periphery of the side wall 202. The heater 215 heats the storage chamber 210. In particular, here, the liquid raw material 216 stored in the storage chamber 210 is heated and vaporized.
　ここで、側壁２０１、底壁２０２、蓋壁２０３、配管２０６、貯留室２１０、凹部２１１、連絡管２１２、排出管２１３をまとめて貯留装置と呼ぶ。また、貯留装置には、ヒータ２１５、バルブ２０７、バルブ２０５、バルブ２１４のいずれか、もしくはその組み合わせを加えても良い。更には重量検知器２２１を加えても良い。 Here, the side wall 201, the bottom wall 202, the lid wall 203, the pipe 206, the storage chamber 210, the recess 211, the communication pipe 212, and the discharge pipe 213 are collectively referred to as a storage device. Further, any one of the heater 215, the valve 207, the valve 205, the valve 214, or a combination thereof may be added to the storage device. Furthermore, a weight detector 221 may be added.
（制御部）
　基板処理装置は、各部の動作を制御するコントローラ４１を有している。 (Control part)
The substrate processing apparatus has a controller 41 that controls the operation of each unit.
　コントローラ４１の概略を図５に示す。制御部（制御手段）であるコントローラ４１は、ＣＰＵ（Ｃｅｎｔｒａｌ　Ｐｒｏｃｅｓｓｉｎｇ　Ｕｎｉｔ）４１ａ、ＲＡＭ（Ｒａｎｄｏｍ　Ａｃｃｅｓｓ　Ｍｅｍｏｒｙ）４１ｂ、記憶装置４１ｃ、Ｉ／Ｏポート４１ｄを備えたコンピュータとして構成されている。ＲＡＭ４１ｂ、記憶装置４１ｃ、Ｉ／Ｏポート４１ｄは、内部バス４１ｅを介して、ＣＰＵ４１ａとデータ交換可能なように構成されている。コントローラ４１には、例えばタッチパネル等として構成された入出力装置４１１や、外部記憶装置４１２が接続可能に構成されている。更に、上位装置７５にネットワークを介して接続される受信部４１３が設けられる。受信部４１３は、上位装置から他の装置の情報を受信することが可能である。 The outline of the controller 41 is shown in FIG. The controller 41 which is a control unit (control means) is configured as a computer including a CPU (Central Processing Unit) 41a, a RAM (Random Access Memory) 41b, a storage device 41c, and an I / O port 41d. The RAM 41b, the storage device 41c, and the I / O port 41d are configured to exchange data with the CPU 41a via the internal bus 41e. For example, an input / output device 411 configured as a touch panel or an external storage device 412 can be connected to the controller 41. Further, a receiving unit 413 connected to the host device 75 via a network is provided. The receiving unit 413 can receive information on other devices from the host device.
　記憶装置４１ｃは、例えばフラッシュメモリ、ＨＤＤ（Ｈａｒｄ　Ｄｉｓｋ　Ｄｒｉｖｅ）等で構成されている。記憶装置４１ｃ内には、基板処理装置の動作を制御する制御プログラムや、後述する基板処理の手順や条件などが記載されたプログラムレシピやメンテナンスプログラム等が読み出し可能に格納されている。なお、プロセスレシピは、後述する基板処理モードで実施される基板処理工程における各手順をコントローラ４１に実行させ、所定の結果を得ることが出来るように組み合わされたものであり、プログラムとして機能する。また、メンテナンスプログラムとは、後述するメンテナンスモードにおける装置の制御プログラムをいう。以下、このプログラムレシピやメンテナンスプログラム、制御プログラム等を総称して、単にプログラムともいう。なお、本明細書においてプログラムという言葉を用いた場合は、プログラムレシピ単体のみを含む場合、制御プログラム単体のみを含む場合、または、その両方を含む場合がある。また、ＲＡＭ４１ｂは、ＣＰＵ４１ａによって読み出されたプログラムやデータ等が一時的に保持されるメモリ領域（ワークエリア）として構成されている。 The storage device 41c is configured by, for example, a flash memory, an HDD (Hard Disk Drive), or the like. In the storage device 41c, a control program for controlling the operation of the substrate processing apparatus, a program recipe describing a procedure and conditions for substrate processing to be described later, a maintenance program, and the like are readably stored. The process recipe is a combination of instructions so that the controller 41 can execute each procedure in a substrate processing step performed in a substrate processing mode, which will be described later, to obtain a predetermined result, and functions as a program. The maintenance program refers to a control program for the apparatus in a maintenance mode to be described later. Hereinafter, the program recipe, the maintenance program, the control program, and the like are collectively referred to simply as a program. When the term “program” is used in this specification, it may include only a program recipe alone, may include only a control program alone, or may include both. The RAM 41b is configured as a memory area (work area) in which a program, data, and the like read by the CPU 41a are temporarily stored.
　Ｉ／Ｏポート４１ｄは、昇降部材、ヒータ、マスフローコントローラ（ＭＦＣとも呼ぶ。）、バルブ等に接続されている。 The I / O port 41d is connected to an elevating member, a heater, a mass flow controller (also referred to as MFC), a valve, and the like.
  制御部４１は、マスフローコントローラ、バルブ、ヒータ、真空ポンプ、ボート回転機構、の流量調整、バルブの開閉動作、ヒータの温度調整、真空ポンプの起動及び停止、ボート回転機構の回転速度調節、ボート昇降機構の昇降動作制御等が行われる。 The control unit 41 adjusts the flow rate of the mass flow controller, valve, heater, vacuum pump, boat rotation mechanism, valve opening / closing operation, heater temperature adjustment, start and stop of the vacuum pump, adjustment of the rotation speed of the boat rotation mechanism, boat lifting / lowering The raising / lowering operation control of the mechanism is performed.
　なお、コントローラ４１は、専用のコンピュータとして構成されている場合に限らず、汎用のコンピュータとして構成されていても良い。例えば、上述のプログラムを格納した外部記憶装置（例えば、磁気テープ、フレキシブルディスクやハードディスク等の磁気ディスク、ＣＤやＤＶＤ等の光ディスク、ＭＯなどの光磁気ディスク、ＵＳＢメモリやメモリカード等の半導体メモリ）４１２を用意し、係る外部記憶装置４１２を用いて汎用のコンピュータにプログラムをインストールすること等により、本実施形態に係るコントローラ４１を構成することができる。なお、コンピュータにプログラムを供給するための手段
は、外部記憶装置４１２を介して供給する場合に限らない。例えば、インターネットや専用回線等の通信手段を用い、外部記憶装置４１２を介さずにプログラムを供給するようにしても良い。なお、記憶装置４１ｃや外部記憶装置４１２は、コンピュータ読み取り可能な記録媒体として構成される。以下、これらを総称して、単に記録媒体ともいう。なお、本明細書において、記録媒体という言葉を用いた場合は、記憶装置４１ｃ単体のみを含む場合、外部記憶装置４１２単体のみを含む場合、または、その両方を含む場合が有る。 The controller 41 is not limited to being configured as a dedicated computer, and may be configured as a general-purpose computer. For example, an external storage device storing the above-described program (for example, a magnetic tape, a magnetic disk such as a flexible disk or a hard disk, an optical disk such as a CD or DVD, a magneto-optical disk such as an MO, a semiconductor memory such as a USB memory or a memory card) The controller 41 according to the present embodiment can be configured by preparing 412 and installing a program in a general-purpose computer using the external storage device 412. The means for supplying the program to the computer is not limited to supplying the program via the external storage device 412. For example, the program may be supplied without using the external storage device 412 using communication means such as the Internet or a dedicated line. The storage device 41c and the external storage device 412 are configured as computer-readable recording media. Hereinafter, these are collectively referred to simply as a recording medium. Note that in this specification, when the term “recording medium” is used, it may include only the storage device 41c alone, may include only the external storage device 412 alone, or may include both.
（洗浄装置）
　続いて、図６を用いて後述するクリーニング工程で使用する洗浄装置３００について説明する。図６は洗浄装置３００と気化器５１との関連を説明する説明図である。ここでは説明の便宜上ヒータ２１５を省略する。 (Cleaning device)
Next, a cleaning apparatus 300 used in a cleaning process described later will be described with reference to FIG. FIG. 6 is an explanatory diagram for explaining the relationship between the cleaning device 300 and the vaporizer 51. Here, the heater 215 is omitted for convenience of explanation.
　洗浄装置３００は、主に溶剤タンク３０１、真空ポンプ３０２、トラップ装置３０３を有する。更には、洗浄装置３００の筐体を気化器５１の近くまで移動させる移動機構としてのタイヤ３０４が設けられる。 The cleaning device 300 mainly includes a solvent tank 301, a vacuum pump 302, and a trap device 303. Furthermore, a tire 304 is provided as a moving mechanism that moves the housing of the cleaning device 300 to the vicinity of the vaporizer 51.
（溶剤供給系）
溶剤タンク３０１には、溶剤を気化器５１に搬送するための溶剤供給系３１０が設けられる。溶剤供給系３１０は、溶剤タンク３０１に接続される配管３１１を有する。配管３１１には、バルブ３１２が設けられる。配管３１１の下流端には他の配管と合流する合流部３１３が設けられる。合流部３１３と気化器のバルブ２０９の間には、バルブ３１５を有し、バルブ２０９に接続可能とされる配管３１４が設けられる。 (Solvent supply system)
The solvent tank 301 is provided with a solvent supply system 310 for conveying the solvent to the vaporizer 51. The solvent supply system 310 has a pipe 311 connected to the solvent tank 301. The pipe 311 is provided with a valve 312. At the downstream end of the pipe 311, a joining part 313 that joins with another pipe is provided. A pipe 314 having a valve 315 and being connectable to the valve 209 is provided between the junction 313 and the vaporizer valve 209.
（溶剤排出系）
　溶剤タンク３０１には、気化器５１をクリーニング処理した際に使用した溶液を再び戻すための溶剤排出系３２０が設けられる。溶剤排出系３２０は、気化器５１のバルブ２１４と接続可能とされ、バルブ３２２を備えた配管３２１を有する。配管３２１の下流側には他の配管と合流する合流部３２３が設けられる。合流部３２３と溶剤タンク３０１の間にはバルブ３２４を有する配管３２５が設けられる。配管３２５のうち、バルブ３２４の下流には、パーティクルカウンタ３２６が設けられる。 (Solvent discharge system)
The solvent tank 301 is provided with a solvent discharge system 320 for returning again the solution used when the vaporizer 51 is cleaned. The solvent discharge system 320 can be connected to the valve 214 of the vaporizer 51 and includes a pipe 321 provided with a valve 322. A junction 323 that merges with other pipes is provided on the downstream side of the pipe 321. A pipe 325 having a valve 324 is provided between the junction 323 and the solvent tank 301. A particle counter 326 is provided in the pipe 325 downstream of the valve 324.
（不活性ガス供給系）
　溶剤供給系３０１には、溶剤をパージするための不活性ガス供給系３３０が接続される。具体的には、バルブ３３２を備えた不活性ガス供給管３３１が合流部３１３に接続されるよう構成される。不活性ガス供給管３３１の上流には不活性ガス源３３３が接続される。ここで使用される不活性ガスは溶剤と反応してゴミを生成してしまう材料でなければよく、例えば窒素（Ｎ２）ガスが用いられる。不活性ガス供給系としては、主に不活性ガス供給管３３１、バルブ３３２を有する。なお、不活性ガス供給系に、不活性ガス源３３３や配管３１４を含めてもよい。 (Inert gas supply system)
An inert gas supply system 330 for purging the solvent is connected to the solvent supply system 301. Specifically, an inert gas supply pipe 331 provided with a valve 332 is configured to be connected to the junction 313. An inert gas source 333 is connected upstream of the inert gas supply pipe 331. The inert gas used here may not be a material that reacts with the solvent to generate dust, and for example, nitrogen (N 2) gas is used. The inert gas supply system mainly includes an inert gas supply pipe 331 and a valve 332. Note that an inert gas source 333 and a pipe 314 may be included in the inert gas supply system.
（真空排気系）
　溶剤供給系３０１には、各配管内の圧力等を調整するための真空排気系３４０が接続されている。具体的には、バルブ３４２、合流部３４３を備える配管３４１が合流部３１３に接続される。配管３４２のうち、合流部３１３側と異なる側には真空ポンプ３０２が接続される。 (Evacuation system)
The solvent supply system 301 is connected to an evacuation system 340 for adjusting the pressure in each pipe. Specifically, a pipe 341 including a valve 342 and a junction 343 is connected to the junction 313. A vacuum pump 302 is connected to a side of the pipe 342 that is different from the junction 313 side.
　更に、溶剤排出系３２０にも真空排気系３４０が接続される。具体的には、合流部３２３にバルブ３４５を備えた配管３４４が接続される。配管３４４のうち、合流部３２３側と異なる側は、配管３４１の合流部３４３に接続され、真空ポンプ３０２と連通される。 Furthermore, a vacuum exhaust system 340 is also connected to the solvent discharge system 320. Specifically, a pipe 344 provided with a valve 345 is connected to the junction 323. A side of the pipe 344 that is different from the junction 323 side is connected to the junction 343 of the pipe 341 and communicates with the vacuum pump 302.
（排気・加熱ユニット系）
　真空ポンプ３０２と接続されるトラップ装置３０３の下流側には、排気・加熱ユニット系３５０が接続される。具体的には、合流部３５３を有する配管３５１がトラップ装置３０３に接続される。配管３５１のうち、トラップ装置３０３と異なる側には、排気・加熱ユニット３５２が設けられる。合流部３２３と合流部３５３の間には、バルブ３５５を有する配管３５４が設けられる。 (Exhaust / heating unit system)
An exhaust / heating unit system 350 is connected to the downstream side of the trap device 303 connected to the vacuum pump 302. Specifically, a pipe 351 having a junction 353 is connected to the trap device 303. An exhaust / heating unit 352 is provided on the side of the pipe 351 different from the trap device 303. A pipe 354 having a valve 355 is provided between the junction 323 and the junction 353.
（基板処理工程）
  次に、基板を処理する例について説明する。ここでは、半導体デバイスの製造工程の一例として、ソース（原料）とリアクタント（反応ガス）を交互に処理室に供給することで膜処理を行うサイクル処理を説明する。本実施形態においては、ソースとしてのテトラキスエチルメチルアミノハフニウム（Ｈｆ［Ｎ（Ｃ２ｈ５）（ＣＨ３）］４、略称：ＴＥＭＡＨ）を用い、リアクタントとしてオゾン（Ｏ３） を用いて基板上でＨｆＯ２膜を成膜する例を記す。なお、ＴＥＭＡＨは液体原料の一例である。 (Substrate processing process)
Next, an example of processing a substrate will be described. Here, as an example of a semiconductor device manufacturing process, a cycle process in which film processing is performed by alternately supplying a source (raw material) and a reactant (reactive gas) to a processing chamber will be described. In this embodiment, tetrakisethylmethylaminohafnium (Hf [N (C2h5) (CH3)] 4, abbreviation: TEMAH) is used as a source, and ozone (O3) is used as a reactant to form an HfO2 film on the substrate. An example of film formation will be described. TEMAH is an example of a liquid raw material.
  先ず、上述した様にウエハ３１をボート３２に装填し、処理室２に搬入する。このとき、図２に記載のように、気化器５１は液体原料源７１に接続される。ボート３２を処理室２に搬入後、後述する４つのステップを順次実行する。 First, as described above, the wafer 31 is loaded into the boat 32 and carried into the processing chamber 2. At this time, the vaporizer 51 is connected to the liquid source source 71 as shown in FIG. After the boat 32 is carried into the processing chamber 2, four steps described later are sequentially executed.
  （ステップ１）
  ステップ１では、ヒータ４２とヒータ２１５を稼働させた状態で、ＴＥＭＡＨとキャリアガス（Ｎ２）を流す。まずバルブ５２、バルブ５５、バルブ６７を開ける。ＴＥＭＡＨは供給管４７ａからマスフローコントローラ４９により流量調整され、配管２０５を介して気化器５１に供給される。ＴＥＭＡＨは貯留室２１０に貯留されると共に、ヒータ２１５によって気化される。気化されたガス状のＴＥＭＡＨは、配管２０６を介して供給管４７ｂに供給される。供給管４７ｂでは、第１キャリアガス供給管５３から第２マスフローコントローラ５４により流量調整されたキャリアガス（Ｎ２）が混合される。この混合ガスを第１ノズル５６の第１ガス供給孔５７から処理室２内に供給しつつガス排気管６６から排気する。マスフローコントローラ４９で制御するＴＥＭＡＨの供給流量は０．１～０．３ｇ／ｍｉｎである。ウエハ３１にＴＥＭＡＨを晒す時間は３０～１８０秒間である。この時のヒータ４２の温度はウエハ３１が１８０～２５０℃になる様設定してある。又、処理室２内の圧力は５０～１００Ｐａである。これによりウエハ３１上にＨｆを含む膜が形成される。 (Step 1)
In Step 1, TEMAH and carrier gas (N2) are flowed in a state where the heater 42 and the heater 215 are operated. First, the valve 52, the valve 55, and the valve 67 are opened. The flow rate of TEMAH is adjusted by the mass flow controller 49 from the supply pipe 47 a and is supplied to the vaporizer 51 through the pipe 205. TEMAH is stored in the storage chamber 210 and vaporized by the heater 215. The vaporized gaseous TEMAH is supplied to the supply pipe 47b via the pipe 206. In the supply pipe 47b, the carrier gas (N2) whose flow rate is adjusted by the second mass flow controller 54 from the first carrier gas supply pipe 53 is mixed. The mixed gas is exhausted from the gas exhaust pipe 66 while being supplied into the processing chamber 2 from the first gas supply hole 57 of the first nozzle 56. The supply flow rate of TEMAH controlled by the mass flow controller 49 is 0.1 to 0.3 g / min. The time for exposing the wafer 31 to TEMAH is 30 to 180 seconds. The temperature of the heater 42 at this time is set so that the wafer 31 is 180 to 250 ° C. The pressure in the processing chamber 2 is 50 to 100 Pa. As a result, a film containing Hf is formed on the wafer 31.
  （ステップ２）
  ステップ２では、第１ガス供給管４７のバルブ５２及び第１キャリア供給管５３のバルブ５５を閉めて、ＴＥＭＡＨガスとキャリアガスの供給を止める。ガス排気管６６のバルブ６７は開いたままにし、真空ポンプ６８により、基板処理炉２９を２０Ｐａ以下に排気し、残留ＴＥＭＡＨガスを処理室２内から排除する。又、この時には不活性ガス、例えばキャリアガスとして使ったＮ2 を基板処理炉２９に供給すると、更に残留ＴＥＭＡＨを排除する効果が高まる。 (Step 2)
In step 2, the valve 52 of the first gas supply pipe 47 and the valve 55 of the first carrier supply pipe 53 are closed to stop the supply of TEMAH gas and carrier gas. The valve 67 of the gas exhaust pipe 66 is kept open, the substrate processing furnace 29 is exhausted to 20 Pa or less by the vacuum pump 68, and the residual TEMAH gas is removed from the processing chamber 2. At this time, if an inert gas, for example, N2 used as a carrier gas is supplied to the substrate processing furnace 29, the effect of eliminating residual TEMAH is further enhanced.
  （ステップ３）
  ステップ３では、Ｏ３ とキャリアガス（Ｎ２）を流す。まず第２ガス供給管４８に設けたバルブ５９、第２キャリアガス供給管６１に設けたバルブ６３を共に開けて、第２ガス供給管４８から第１マスフローコントローラ５８により流量調整されたＯ３と、第２キャリアガス供給管６１から第３マスフローコントローラ６２により流量調整されたキャリアガス（Ｎ２）とを混合し、第２ノズル６４の第２ガス供給孔６５から処理室２内に供給しつつガス排気管６６から排気する。ウエハ３１にＯ３を晒す時間は１０～１２０秒間である。この時のウエハ３１の温度はＴＥＭＡＨガスの供給時と同じく１８０～２５０℃である。又、処理室２内の圧力もＴＥＭＡＨガスの供給時と同じく、５０～１００Ｐａである。Ｏ３の供給により、ウエハ３１の下地膜上のＨｆを含む膜とＯ３とが反応して、ウエハ３１上にハフニア（ＨｆＯ２） 膜が形成される。 (Step 3)
In step 3, O3 and carrier gas (N2) are flowed. First, the valve 59 provided in the second gas supply pipe 48 and the valve 63 provided in the second carrier gas supply pipe 61 are both opened, O3 whose flow rate is adjusted by the first mass flow controller 58 from the second gas supply pipe 48, The carrier gas (N2) whose flow rate is adjusted by the third mass flow controller 62 is mixed from the second carrier gas supply pipe 61, and gas is exhausted while being supplied into the processing chamber 2 from the second gas supply hole 65 of the second nozzle 64. Exhaust from tube 66. The time for exposing O3 to the wafer 31 is 10 to 120 seconds. The temperature of the wafer 31 at this time is 180 to 250 ° C. as in the case of supplying the TEMAH gas. Also, the pressure in the processing chamber 2 is 50 to 100 Pa as in the case of supplying the TEMAH gas. By supplying O 3, the Hf-containing film on the base film of the wafer 31 reacts with O 3 to form a hafnia (HfO 2) film on the wafer 31.
  （ステップ４）
  ステップ４では、膜を形成後、バルブ５９及びバルブ６３を閉じ、真空ポンプ６８により処理室２内を真空排気し、成膜に寄与した後に残留するＯ３を排除する。又、この時には不活性ガス、例えばキャリアガスとして使ったＮ２を処理室２内に供給すると、更に残留するＯ３を処理室２から排除する効果が高まる。 (Step 4)
In step 4, after the film is formed, the valve 59 and the valve 63 are closed, and the inside of the processing chamber 2 is evacuated by the vacuum pump 68 to eliminate O3 remaining after contributing to the film formation. At this time, if an inert gas, for example, N 2 used as a carrier gas is supplied into the processing chamber 2, the effect of further removing remaining O 3 from the processing chamber 2 is enhanced.
  又、上述したステップ１～４を１サイクルとし、このサイクルを複数回繰返すことにより、ウエハ３１上に所定の膜厚のＨｆＯ２膜を形成することができる。 In addition, the above-described steps 1 to 4 are defined as one cycle, and the HfO 2 film having a predetermined thickness can be formed on the wafer 31 by repeating this cycle a plurality of times.
（メンテナンス工程）
　続いてメンテナンス工程を説明する。本実施形態におけるメンテナンス工程では、気化器５１のメンテナンス工程について説明する。 (Maintenance process)
Next, the maintenance process will be described. In the maintenance process in this embodiment, the maintenance process of the vaporizer 51 will be described.
　気化器５１のメンテナンス工程は、気化器５１の立ち上げ時や処理装置のメンテナンス時等に行う。メンテナンス工程では、貯留室２１０内の液抜き、液の入れ替え、クリーニングを行う。 The maintenance process of the vaporizer 51 is performed when the vaporizer 51 is started up or when the processing apparatus is maintained. In the maintenance process, the liquid in the storage chamber 210 is drained, the liquid is replaced, and cleaning is performed.
　以下に比較例と対比しつつ、本実施形態の気化器や貯留装置等の詳細を説明する。 Hereinafter, details of the vaporizer, the storage device, and the like of the present embodiment will be described in comparison with the comparative example.
（メンテナンス工程における比較例の説明）
　まず、図８、図９を用いて、二つの比較例を説明する。
　図８に記載の気化器８０は第一の比較例である。図９に記載の気化器９０は第二の比較例である。ここでは気化器５１と同様の構成については説明を省略し、相違点を中心に説明する。 (Description of comparative examples in the maintenance process)
First, two comparative examples will be described with reference to FIGS.
The vaporizer 80 illustrated in FIG. 8 is a first comparative example. The vaporizer 90 shown in FIG. 9 is a second comparative example. Here, the description of the same configuration as that of the vaporizer 51 is omitted, and the description will focus on the differences.
　気化器８０は、気化器５１と同様に側壁８０１、底壁８０２、蓋壁８０３を有するが、凹部２１１や、それに連続する連絡管２１２、排出管２１３を有しない点で気化器５１と相違する。 The vaporizer 80 has a side wall 801, a bottom wall 802, and a lid wall 803 similarly to the vaporizer 51, but is different from the vaporizer 51 in that it does not have a recess 211, a connecting pipe 212, and a discharge pipe 213 continuous therewith. .
　気化器８０においてメンテナンス工程を実施する場合を考える。ここでいうメンテナンスとは、例えば液抜きや液の入れ替え、クリーニングである。ダウンタイムを考慮しつつそれらを実施するには、重量検知器２２１に載置した状態で液体を抜く必要がある。 Consider a case where a maintenance process is performed in the vaporizer 80. The term “maintenance” used herein refers to, for example, liquid removal, liquid replacement, and cleaning. In order to implement them while taking down time into consideration, it is necessary to drain the liquid while it is placed on the weight detector 221.
　気化器８０は気化器５１と同様に、安全上の問題から側壁８０１と蓋壁８０３が溶接等で接続されていることから、蓋壁８０３の開閉が困難である。更には、液体原料供給管２０４から液体を排出することが考えられるが、構造上の問題から、底壁８０２と液体原料供給管２０４の先端との間に貯留される液体を排除することは難しい。このような構成の元、液体を排除するためには、例えば底壁８０２と液体原料供給管２０４の先端との間の距離を著しく短くすることが考えられるが、液体原料管２０４の先端と底壁８０２が接触し、液体原料管２０４や底壁８０２の破損につながる恐れがある。破損によって発生した破片はウエハ処理にとってゴミとなるので、現実的な構造ではない。 Like the vaporizer 51, the vaporizer 80 is difficult to open and close because the side wall 801 and the lid wall 803 are connected by welding or the like for safety reasons. Furthermore, it is conceivable to discharge the liquid from the liquid source supply pipe 204, but it is difficult to eliminate the liquid stored between the bottom wall 802 and the tip of the liquid source supply pipe 204 due to structural problems. . In order to exclude the liquid under such a configuration, for example, it is conceivable that the distance between the bottom wall 802 and the tip of the liquid source supply pipe 204 is remarkably shortened. The wall 802 may come into contact with the liquid raw material tube 204 or the bottom wall 802. Debris generated due to breakage becomes garbage for wafer processing and is not a realistic structure.
　比較例の構造の場合、上記の問題点が存在すると同時に、凹部２１１、連絡管２１２、排出管２１３が存在しないことから、貯留室２１０の液体を排出することは困難である。 In the case of the structure of the comparative example, it is difficult to discharge the liquid in the storage chamber 210 because the above-described problems exist and at the same time the recess 211, the connecting pipe 212, and the discharge pipe 213 do not exist.
　続いて第二の比較例である気化器９０を説明する。
　気化器９０は、気化器５１と同様に側壁９０１、底壁９０２、蓋壁９０３を有するが、底壁９０２が重量検出器に載置不可能な構成である点やそれに付随する点で相違する。 Next, a vaporizer 90 as a second comparative example will be described.
The vaporizer 90 includes a side wall 901, a bottom wall 902, and a lid wall 903, similar to the vaporizer 51, but differs in that the bottom wall 902 cannot be placed on the weight detector and is attached thereto. .
　以下に詳細を説明する。気化器９０は液面レベル検知器９０４を有する。液面レベル検知器９０４は貯留室２１０の液面高さを検知するものである。液面の高さを検知することで、液体の残量を検知する。底壁９０２には排出管９０５が設けられる。第一の実施形態のような重量検知器の替わりに液面レベル検知器９０４で液体残量を検知しているので、底壁９０３の下方にスペースを有する。従って、重力方向に液体を排出するための配管９０５を配することが可能となる。排出管９０５は底壁を貫通する。 Details are explained below. The vaporizer 90 has a liquid level detector 904. The liquid level detector 904 detects the liquid level height of the storage chamber 210. The remaining amount of liquid is detected by detecting the height of the liquid surface. A discharge pipe 905 is provided on the bottom wall 902. Since the remaining liquid level is detected by the liquid level detector 904 instead of the weight detector as in the first embodiment, there is a space below the bottom wall 903. Accordingly, it is possible to arrange the pipe 905 for discharging the liquid in the direction of gravity. The discharge pipe 905 passes through the bottom wall.
　ところが、液面レベル検知器９２の場合、液体の変動に追従できない場合があり、正確な残液量を計測することが難しい。更には、液体が空になった場合、液面レベル検知器の検知具が貯留タンクの底にぶつかり、それが原因でゴミが発生してしまう。 However, in the case of the liquid level detector 92, it may be impossible to follow the fluctuation of the liquid, and it is difficult to accurately measure the remaining liquid amount. Furthermore, when the liquid is emptied, the detection tool of the liquid level detector hits the bottom of the storage tank, which causes dust to be generated.
（本実施形態におけるメンテナンス工程）
　上記のように、比較例１、比較例２では種々の課題が発生する。そこで本実施形態では、図４に記載のように、凹部２１１やそれに連続する連絡管２１２、排出管２１３を設け、比較例に係る課題を解決する構造としている。以下に、本実施形態の構造を用いたメンテナンス工程の詳細を説明する。 (Maintenance process in this embodiment)
As described above, various problems occur in Comparative Example 1 and Comparative Example 2. Therefore, in the present embodiment, as shown in FIG. 4, the concave portion 211, the connecting pipe 212 and the discharge pipe 213 that are continuous with the concave portion 211 are provided, and the structure according to the comparative example is solved. Below, the detail of the maintenance process using the structure of this embodiment is demonstrated.
（液抜き工程）
　最初に、メンテナンス工程にて液抜きを図る理由を説明する。
前述のように、気化器５１は側壁２０１、底壁２０２、蓋壁２０３で主に構成されている。貯留室２１０に貯留される液体を外部に漏らさないために、それぞれの壁は溶接等で固定される。 (Liquid draining process)
First, the reason for draining liquid in the maintenance process will be described.
As described above, the vaporizer 51 is mainly configured by the side wall 201, the bottom wall 202, and the lid wall 203. In order not to leak the liquid stored in the storage chamber 210 to the outside, each wall is fixed by welding or the like.
　従来の気化器を初めて使用する場合、使用開始時に気化器からゴミが発生することがある。発明者による鋭意研究の結果、気化器内のクリーン度が所望のレベルに達していなかったり、あるいは液体原料が気化器の溶接部分と接触し、それが腐食となってしまったりすることが原因であることがわかった。ここでは出荷されたばかりの装置を例にしたが、それに限るものではなく、長期に使用した場合においても液体原料によって腐食が進み、それがゴミになることがわかった。そのため、気化器の立ち上げ時やメンテナンス時に、気化器からゴミを除去することが求められている。 When using a conventional vaporizer for the first time, dust may be generated from the vaporizer at the start of use. As a result of earnest research by the inventor, the degree of cleanliness in the vaporizer has not reached the desired level, or the liquid raw material comes into contact with the welded portion of the vaporizer, causing corrosion. I found out. Here, the device just shipped is taken as an example. However, the present invention is not limited to this, and it has been found that even when used for a long period of time, corrosion progresses due to the liquid raw material and becomes garbage. Therefore, it is required to remove dust from the vaporizer at the time of start-up and maintenance of the vaporizer.
　また、近年では、多品種の処理に対応すべく、一つの処理装置において複数の原料に対応することが求められており、そのような状況においても、ダウンタイムを増加させないよう、タンクを処理装置に搭載した状態で原料を入れ替えることが求められる。 In recent years, it has been required to handle a plurality of raw materials in a single processing apparatus in order to handle a wide variety of processing. Even in such a situation, the tank is processed so as not to increase downtime. It is required to replace the raw material while it is mounted on.
　その場合、入れ替え前に使用した液体原料の成分が貯留室２１０に残留すると、前に使用した液体原料と新たに使用する液体原料が反応し、貯留室２１０内に副生成物が発生する。発生した副生成物は配管２０６から処理室３２に運ばれ、基板に付着した場合、基板の品質の低下や歩留まりの低下が懸念される。 In this case, when the components of the liquid raw material used before the replacement remain in the storage chamber 210, the previously used liquid raw material reacts with the newly used liquid raw material, and a by-product is generated in the storage chamber 210. When the generated by-product is conveyed from the pipe 206 to the processing chamber 32 and adheres to the substrate, there is a concern that the quality of the substrate or the yield may be reduced.
　また、副生成物が発生しないよう、他の液体が貯留されたタンクと交換することが考えられるが、次のようにタンクの交換に多くの時間を要する。即ち、安全度を高めるために液体を抜いた状態でタンクを輸送する必要があるが、例えばその液体が蒸気圧の低い性質である場合、２４時間程度のパージが必要となる。従って、このような手法ではダウンタイムが増加してしまう。 Also, it is conceivable to replace the tank with another liquid so that no by-product is generated, but it takes a lot of time to replace the tank as follows. That is, in order to increase the safety level, it is necessary to transport the tank with the liquid removed. For example, when the liquid has a low vapor pressure, purging for about 24 hours is required. Therefore, such a method increases downtime.
　そこで、本実施形態においては、処理装置に搭載した状態で、残留物が発生しないよう液抜きを行う。以下に詳細を説明する。 Therefore, in this embodiment, the liquid is drained so that no residue is generated in a state where it is mounted on the processing apparatus. Details will be described below.
　液抜きを行う液抜き工程では、まず排出管２１３と図示しない排出液タンクとを接続する。次に、配管２１８が接続された状態で、バルブ２０７を閉とすると共にバルブ２０９を開とする。更に、バルブ２０５を閉とすると共に、バルブ２１４を開とする。このようにバルブ制御することで、不活性ガス供給源２１７と排出液タンクとの間が連通する。不活性ガス供給源２１７から供給された不活性ガスは貯留室２１０内に供給され、残留した液体２１６を加圧する。加圧された液体は凹部２１１、連絡管２１２を介して排出管２１３から排出される。 In the liquid draining process for draining liquid, first, the discharge pipe 213 and a drain liquid tank (not shown) are connected. Next, with the pipe 218 connected, the valve 207 is closed and the valve 209 is opened. Further, the valve 205 is closed and the valve 214 is opened. By controlling the valve in this way, the inert gas supply source 217 communicates with the discharge liquid tank. The inert gas supplied from the inert gas supply source 217 is supplied into the storage chamber 210 and pressurizes the remaining liquid 216. The pressurized liquid is discharged from the discharge pipe 213 through the recess 211 and the communication pipe 212.
　ところで前述のように、貯留タンク構造２００では「側壁２０１ｂの径＞凹部２１１の径＞連絡管２１２の径＞排出管２１３の径」の関係を有する。従って、液体２１６は毛細管現象によって底壁２０２よりも高い位置に上昇される。 As described above, the storage tank structure 200 has a relationship of “diameter of the side wall 201b> diameter of the recess 211> diameter of the communication pipe 212> diameter of the discharge pipe 213”. Accordingly, the liquid 216 is raised to a position higher than the bottom wall 202 by capillary action.
　本実施形態の場合、さらに加圧を行っているので、凹部２１１と連絡管２１２と排出管２１３に液体が充填された場合、液体にかかる圧力は「側壁２０１ｂの圧力＞凹部２１１の圧力＞連絡管２１２の圧力＞排出管２１３の圧力」となり、上流と下流とで差圧が産まれる。従って、不活性ガスによって加圧された液体は、凹部２１１を通過した後連絡管２１２によって重力方向とは異なる方向に方向転換され、さらに排出管２１３を上昇し、排出液タンクに移動される。 In the case of the present embodiment, since the pressurization is further performed, when the recess 211, the communication pipe 212, and the discharge pipe 213 are filled with the liquid, the pressure applied to the liquid is “the pressure of the side wall 201b> the pressure of the recess 211> the communication. The pressure of the pipe 212> the pressure of the discharge pipe 213 ", and a differential pressure is produced upstream and downstream. Therefore, after the liquid pressurized by the inert gas passes through the recess 211, the direction is changed in the direction different from the direction of gravity by the communication pipe 212, and further rises in the discharge pipe 213 and is moved to the discharge liquid tank.
　尚、ここで貯留室２１０内の残留液を加圧することを記載したが、凹部２１１と排出管２１３の下流とで圧力差を与えることができればよく、例えば排出管２１３の下流から液体を吸引するようにしてもよい。 In addition, although it described that pressurizing the residual liquid in the storage chamber 210 here, it should just be able to give a pressure difference with the recessed part 211 and the downstream of the discharge pipe 213, for example, a liquid is attracted | sucked from the downstream of the discharge pipe 213. You may do it.
（クリーニング工程）
　続いてクリーニング工程を説明する。クリーニング工程では、貯留室２１０をターゲットとしてクリーニング処理を行う。ここではダウンタイムを考慮し、気化器５１を基板処理装置に搭載した状態でクリーニングを行う例について説明する。 (Cleaning process)
Next, the cleaning process will be described. In the cleaning process, a cleaning process is performed using the storage chamber 210 as a target. Here, an example in which cleaning is performed in a state where the vaporizer 51 is mounted on the substrate processing apparatus in consideration of downtime will be described.
　まず、図６に記載の移動式洗浄ユニット３００を気化器５１に接続する。具体的には、バルブ２１４を閉じると共に、バルブ２０７、バルブ２０９を閉じた状態で配管２１８を取り外す。次にバルブ２０９と配管３１４を接続し、さらにバルブ２１４と配管３２１を接続する。このようにすることで、図６のように配管が接続される。このとき、洗浄装置３００の全てのバルブを閉じた状態とする。 First, the mobile cleaning unit 300 shown in FIG. 6 is connected to the vaporizer 51. Specifically, the valve 214 is closed, and the pipe 218 is removed with the valves 207 and 209 closed. Next, the valve 209 and the pipe 314 are connected, and further the valve 214 and the pipe 321 are connected. By doing in this way, piping is connected as shown in FIG. At this time, all the valves of the cleaning device 300 are closed.
　続いて、真空ポンプ３０２を起動する。
　その後、バルブ３４２を開として、合流部３１３と配管３４１とを連通させる。それと並行してバルブ３４５を開として、合流部３２３と配管３４１を連通させる。雰囲気の圧力は例えば０．０１Ｐａ以下とする。 Subsequently, the vacuum pump 302 is activated.
Thereafter, the valve 342 is opened, and the junction 313 and the pipe 341 are communicated. At the same time, the valve 345 is opened, and the junction 323 and the pipe 341 are communicated. The atmospheric pressure is, for example, 0.01 Pa or less.
　配管内の雰囲気が所定の圧力となったら、バルブ３１５を開として、配管３１４を真空ポンプ３０２に連通させる。それと並行してバルブ３２２を開として、同様に配管３２１を真空ポンプ３０２に連通させ、気化器５１との接続箇所等をターゲットとしたリークチェックを行う。 When the atmosphere in the pipe reaches a predetermined pressure, the valve 315 is opened and the pipe 314 is communicated with the vacuum pump 302. At the same time, the valve 322 is opened, and the piping 321 is communicated with the vacuum pump 302 in the same manner, and a leak check is performed targeting the connection portion with the vaporizer 51 and the like.
　リークチェックが終了し、リークが無いと判断されたらバルブ２０９とバルブ２１４を開として真空ポンプ３０２と連通させ、貯留室２１０内を真空排気する。 When the leak check is completed and it is determined that there is no leak, the valve 209 and the valve 214 are opened to communicate with the vacuum pump 302, and the inside of the storage chamber 210 is evacuated.
　貯留室２１０の圧力が所定の圧力となったら、バルブ３４２とバルブ３４５を閉として、貯留室２１０と真空ポンプ３０２との間を断絶する。 When the pressure in the storage chamber 210 reaches a predetermined pressure, the valve 342 and the valve 345 are closed, and the storage chamber 210 and the vacuum pump 302 are disconnected.
　次にバルブ３１２を開として、溶剤供給系３１０の配管を連通させる。それと並行してバルブ３２４を開として、溶剤排出系３２０を連通させる。このように連通することで、フレッシュな溶剤を、溶剤供給系３１０を介して溶剤タンク３０１から貯留室２１０に供給可能とする。それと共に、貯留室２１０をクリーニングした溶剤を、溶剤排出系３２０を介して貯留室２１０から溶剤タンク３０１に供給可能とする。 Next, the valve 312 is opened, and the piping of the solvent supply system 310 is communicated. At the same time, the valve 324 is opened to allow the solvent discharge system 320 to communicate. By communicating in this way, a fresh solvent can be supplied from the solvent tank 301 to the storage chamber 210 via the solvent supply system 310. At the same time, the solvent that has cleaned the storage chamber 210 can be supplied from the storage chamber 210 to the solvent tank 301 via the solvent discharge system 320.
　この後、液体循環ポンプ３１６を起動し、溶剤を巡回させて貯留室２１０のクリーニングを行う。この間、配管３２５を通過した溶剤のパーティクル成分の濃度をパーティクルカウンタ３２６で抽出する。パーティクル成分が所定の値よりも低くなったらクリーニングが完了したと判断し液体循環ポンプ３１６を停止する。 Thereafter, the liquid circulation pump 316 is started, and the storage chamber 210 is cleaned by circulating the solvent. During this time, the concentration of the particle component of the solvent that has passed through the pipe 325 is extracted by the particle counter 326. When the particle component becomes lower than a predetermined value, it is determined that the cleaning is completed, and the liquid circulation pump 316 is stopped.
　クリーニング処理が終了したら貯留室２１０に残留した溶剤を抜き取る。ここでは、バルブ３１２を閉じると共に、バルブ３３２を開とする。このようにすることで、溶剤タンク３０１と貯留室２１０が遮断されると共に、貯留室２１０と不活性ガス供給源３３３が連通される。不活性ガス源３３３から供給された不活性ガスは、配管３３１、配管３１４を介して貯留室２１０に供給される。供給された不活性ガスは、配管３１４や貯留タンクの残留溶剤を溶剤タンク３０１に排出し、溶剤を回収する。 When the cleaning process is completed, the solvent remaining in the storage chamber 210 is extracted. Here, the valve 312 is closed and the valve 332 is opened. By doing so, the solvent tank 301 and the storage chamber 210 are shut off, and the storage chamber 210 and the inert gas supply source 333 are communicated with each other. The inert gas supplied from the inert gas source 333 is supplied to the storage chamber 210 via the pipe 331 and the pipe 314. The supplied inert gas discharges the residual solvent in the pipe 314 and the storage tank to the solvent tank 301 and recovers the solvent.
　続いてバルブ３２４を閉にすると共に、バルブ３５５を開とする。このようにすることで、排気・加熱ユニット３５２と貯留室２１０が連通される。この状態で所定時間不活性ガスを供給し、配管３１４や貯留室２１０等から残留溶剤を排出する。 Subsequently, the valve 324 is closed and the valve 355 is opened. By doing so, the exhaust / heating unit 352 and the storage chamber 210 are communicated with each other. In this state, an inert gas is supplied for a predetermined time, and the residual solvent is discharged from the pipe 314, the storage chamber 210, and the like.
　続いて、バルブ３３２を閉として貯留室２１０と不活性ガス源３３３との間を遮断する。更に、バルブ３５５を閉とする。それと並行して、バルブ３４２とバルブ３４５を開として、貯留室２１０、配管３１４、配管３２１を真空ポンプ３０２に連通させる。真空ポンプ３０２は貯留室２１０を真空排気する。 Subsequently, the valve 332 is closed to shut off the storage chamber 210 and the inert gas source 333. Further, the valve 355 is closed. At the same time, the valve 342 and the valve 345 are opened, and the storage chamber 210, the pipe 314, and the pipe 321 are communicated with the vacuum pump 302. The vacuum pump 302 evacuates the storage chamber 210.
　貯留室２１０が所定の圧力となったら、バルブ３４２とバルブ３４５を閉として真空排気処理を停止する。ここで所定の圧力とは、例えば０．０１Ｐａ以下をいう。 When the storage chamber 210 reaches a predetermined pressure, the valve 342 and the valve 345 are closed to stop the evacuation process. Here, the predetermined pressure refers to, for example, 0.01 Pa or less.
　次に、バルブ３３２を開として貯留室２１０と不活性ガス源３３３とを連通させ、貯留室２１０に不活性ガスを充てんする。次にすべてのバルブを閉として、気化器５１から配管３１４と配管３２１を取り外す。 Next, the storage chamber 210 and the inert gas source 333 are communicated with each other by opening the valve 332, and the storage chamber 210 is filled with an inert gas. Next, all the valves are closed, and the pipe 314 and the pipe 321 are removed from the vaporizer 51.
　以上のようにすることで、短いダウンタイムで確実に残留溶剤を排出する。このようにすることで、全体としてダウンタイムを短縮することができ、結果生産性を高めることが可能となる。 By doing as described above, residual solvent is surely discharged with a short downtime. By doing in this way, downtime can be shortened as a whole, and as a result, productivity can be increased.
（第二の実施形態）
　続いて図７を用いて第二の実施形態を説明する。ここでは第一の実施形態との相違点を中心に説明する。第一の実施形態と同様の構成は同番号を付与すると共に、説明を省略する。 (Second embodiment)
Next, a second embodiment will be described with reference to FIG. Here, the difference from the first embodiment will be mainly described. Constituent elements similar to those of the first embodiment are given the same numbers, and descriptions thereof are omitted.
　第二の実施形態の気化器５１では、側壁７０１、底壁７０２、蓋壁７０３を有する。更に、連絡管２３２と排出管２３３を有する。第一の実施例と異なり、排出管２３３は側壁７０１に埋め込まれると共に、連絡管２３２は排出管２３３に接続可能な位置まで延伸している。尚、第二の実施形態では、第一の実施形態と同様ヒータ２１５を有する。 The vaporizer 51 of the second embodiment has a side wall 701, a bottom wall 702, and a lid wall 703. Further, a communication pipe 232 and a discharge pipe 233 are provided. Unlike the first embodiment, the discharge pipe 233 is embedded in the side wall 701, and the communication pipe 232 extends to a position where it can be connected to the discharge pipe 233. In the second embodiment, the heater 215 is provided as in the first embodiment.
　第一の実施形態では、排出管２１３の一部が貯留室２１０内に配されているため、排出管２１３とヒータ２１５の間には貯留室２１０の空間と側壁２０１が存在する。前述したように、貯留室２１０には液体状態の原料や気化状態の原料が存在する。液体状態の原料と隣接する箇所と、気化状態の原料と隣接する箇所では温度が異なるため、排出管２１３においても、例えば上流と下流とで温度が異なってしまう場合がある。温度が異なることによる液体の熱膨張率が異なるため排出管２１３の上流と下流とで圧力の関係が不安定になることがある。あるいは温度が低くなってしまうことによって液体が固化するなどの現象が起きる。液体原料の性質によってはそれらの現象が顕著となるため、温度を均一にすることが望ましい。 In the first embodiment, since a part of the discharge pipe 213 is disposed in the storage chamber 210, the space of the storage chamber 210 and the side wall 201 exist between the discharge pipe 213 and the heater 215. As described above, the storage chamber 210 contains a raw material in a liquid state and a raw material in a vaporized state. Since the temperature is different between the position adjacent to the liquid state raw material and the position adjacent to the vaporized state raw material, in the discharge pipe 213, for example, the temperature may be different between upstream and downstream. Since the thermal expansion coefficients of liquids due to different temperatures are different, the relationship between pressures may become unstable upstream and downstream of the discharge pipe 213. Alternatively, a phenomenon such as solidification of the liquid occurs due to a decrease in temperature. Depending on the properties of the liquid raw material, these phenomena become significant, so it is desirable to make the temperature uniform.
　そこで本実施形態においては、排出管２３３を側壁７０１に埋め込む構造とする。ヒータ２１５が発した熱は側壁７０１内で均一に分散されるため、排出管２３３の上流と下流とでは熱影響を均一にすることができる。より良くは、ヒータ２１５の延伸方向と同方向に排出管２３３を設ける。これにより、上流と下流の熱影響をより均一にすることができる。以上のことから、排出管２３３を通過する液体の圧力が不安定になることがない。更には、温度が安定化される。 Therefore, in this embodiment, the discharge pipe 233 is embedded in the side wall 701. Since the heat generated by the heater 215 is uniformly dispersed in the side wall 701, the heat effect can be made uniform between the upstream and downstream of the discharge pipe 233. More preferably, the discharge pipe 233 is provided in the same direction as the extending direction of the heater 215. Thereby, the upstream and downstream thermal effects can be made more uniform. From the above, the pressure of the liquid passing through the discharge pipe 233 does not become unstable. Furthermore, the temperature is stabilized.
　以上のようにすることで、短いダウンタイムで確実に残留溶剤を排出する。このようにすることで、全体としてダウンタイムを短縮することができ、結果生産性を高めることが可能となる。 By doing as described above, residual solvent is surely discharged with a short downtime. By doing in this way, downtime can be shortened as a whole, and as a result, productivity can be increased.
（本発明の他の実施形態）
　以上、本発明の実施形態を具体的に説明したが、本発明は上述の各実施形態に限定されるものではなく、その要旨を逸脱しない範囲で種々変更可能である。 (Other embodiments of the present invention)
As mentioned above, although embodiment of this invention was described concretely, this invention is not limited to each above-mentioned embodiment, A various change is possible in the range which does not deviate from the summary.
また、例えば、上述の各実施形態では、基板処理装置が行う成膜処理として、ソース（液体原料）としてＴＥＭＡＨを用い、リアクタント（反応ガス）としてＯ３ガスを用いて、それらを交互に供給することによってウエハＷ上にＨｆＯ膜を形成する場合を例にあげたが、本発明がこれに限定されることはない。すなわち、ソースとしては液体原料を用いていれば良く、リアクタントとしてはソースと反応して膜処理を行うガスを用いて他の種類の薄膜を形成しても構わない。さらには、３種類以上の処理ガスを用いる場合であっても、これらを交互に供給して成膜処理を行うのであれば、本発明を適用することが可能である。 Further, for example, in each of the above-described embodiments, as a film forming process performed by the substrate processing apparatus, TEMAH is used as a source (liquid raw material) and O3 gas is used as a reactant (reactive gas), and these are alternately supplied. In this example, the HfO film is formed on the wafer W by way of example. However, the present invention is not limited to this. That is, it is only necessary to use a liquid raw material as the source, and as the reactant, other types of thin films may be formed using a gas that reacts with the source and performs film processing. Furthermore, even when three or more kinds of process gases are used, the present invention can be applied as long as the film formation process is performed by alternately supplying these gases.
　また、ここでは洗浄装置３００に接続したが、液体を排出するのみの場合はそれに限るものではなく、廃液装置に接続してもよい。更には、ガス流路が蓋に設けられることを説明したが、それに限るものではなく、例えば側壁に設けても良い。更には、ガス流路が蓋に設けられることを説明したが、それに限るものではなく、例えば側壁に設けても良い。 In addition, although connected to the cleaning device 300 here, it is not limited to the case of only discharging the liquid, and may be connected to a waste liquid device. Furthermore, although it has been described that the gas flow path is provided on the lid, the present invention is not limited thereto, and may be provided on the side wall, for example. Furthermore, although it has been described that the gas flow path is provided on the lid, the present invention is not limited thereto, and may be provided on the side wall, for example.
　また、例えば、上述した各実施形態では、基板処理装置が行う処理として半導体装置における成膜処理を例にあげたが、本発明がこれに限定されることはない。すなわち、成膜処理の他、酸化膜、窒化膜を形成する処理、金属を含む膜を形成する処理であってもよい。また、基板処理の具体的内容は不問であり、成膜処理だけでなく、アニール処理、酸化処理、窒化処理、拡散処理、リソグラフィ処理等の他の基板処理にも好適に適用できる。さらに、本発明は、他の基板処理装置、例えばアニール処理装置、酸化処理装置、窒化処理装置、露光装置、塗布装置、乾燥装置、加熱装置、プラズマを利用した処理装置等の他の基板処理装置にも好適に適用できる。また、本発明は、これらの装置が混在していてもよい。 For example, in each of the above-described embodiments, the film forming process in the semiconductor device is taken as an example of the process performed by the substrate processing apparatus, but the present invention is not limited to this. That is, in addition to the film formation process, a process for forming an oxide film or a nitride film, or a process for forming a film containing metal may be used. Further, the specific content of the substrate processing is not questioned and can be suitably applied not only to the film forming processing but also to other substrate processing such as annealing processing, oxidation processing, nitriding processing, diffusion processing, and lithography processing. Furthermore, the present invention provides other substrate processing apparatuses such as annealing processing apparatuses, oxidation processing apparatuses, nitriding processing apparatuses, exposure apparatuses, coating apparatuses, drying apparatuses, heating apparatuses, and processing apparatuses using plasma. It can be suitably applied to. In the present invention, these devices may be mixed.
　また、例えば、上述した各実施形態は、半導体製造プロセスについて説明したが、それに限るものではなく、化学工業分野における液体の高清浄度を必要とする液体を貯留する液体原料タンクや中間貯蔵タンク、気化器に内蔵する液体タンク等に用いても良い。ここでいう液体とは、例えば純水、過酸化水素水、アンモニア水、アルコール類、有機酸類である。 In addition, for example, each embodiment described above has described the semiconductor manufacturing process, but is not limited thereto, a liquid raw material tank or an intermediate storage tank for storing a liquid that requires high cleanliness of the liquid in the chemical industry field, You may use for the liquid tank etc. which are incorporated in a vaporizer. The liquid here is, for example, pure water, hydrogen peroxide water, ammonia water, alcohols, or organic acids.
　また、ある実施形態の構成の一部を他の実施形態の構成に置き換えることが可能であり、また、ある実施形態の構成に他の実施形態の構成を加えることも可能である。また、各実施形態の構成の一部について、他の構成の追加、削除、置換をすることも可能である。 Further, a part of the configuration of an embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of an embodiment. Moreover, it is also possible to add, delete, or replace another configuration for a part of the configuration of each embodiment.
　なお、この出願は、２０１５年１２月１８日に出願された日本出願特願２０１５－２４７３６６を基礎として優先権の利益を主張するものであり、その開示の全てを引用によってここに取り込む。 Note that this application claims the benefit of priority based on Japanese Patent Application No. 2015-247366 filed on Dec. 18, 2015, the entire disclosure of which is incorporated herein by reference.
　本発明によれば、高い生産性を達成可能な処理装置やそれを実現するための構造を提供することができる。 According to the present invention, it is possible to provide a processing apparatus capable of achieving high productivity and a structure for realizing the processing apparatus.
２９…処理炉、３１…ウエハ（基板）、３２…ボート、４７…ガス供給管、４８…ガス供給管、５１…気化器、２００…貯留タンク構造、２０１…側壁、２０２…底壁、２０３…蓋壁、２１１…凹部、２１２…連絡管、２１３…排出管、２２１…重量検知器、２１５…ヒータ
 
 
  DESCRIPTION OF SYMBOLS 29 ... Processing furnace, 31 ... Wafer (substrate), 32 ... Boat, 47 ... Gas supply pipe, 48 ... Gas supply pipe, 51 ... Vaporizer, 200 ... Storage tank structure, 201 ... Side wall, 202 ... Bottom wall, 203 ... Lid wall, 211 ... recess, 212 ... communication pipe, 213 ... discharge pipe, 221 ... weight detector, 215 ... heater

Claims (11)

  1. 周状に構成された側壁と、前記側壁の上端側に配された蓋壁と、前記側壁の下端側に接続されると共に、重量検知器上に載置可能な載置面を有する底壁と、前記側壁と前記蓋壁と前記底壁で囲まれた貯留室と、前記貯留室に連通すると共に、前記底壁に設けられた凹部と、一端が前記凹部のうち重力方向の部位に接続され、他端が前記底壁内にて重力方向とは異なる方向に延伸するよう構成され、径が前記凹部の径よりも小さくなるよう構成される連絡管と、前記底壁と異なる壁に設けられるガス流路と、前記連絡管の下流端に接続される液体排出路とを備える貯留装置。 A circumferentially configured side wall, a lid wall disposed on the upper end side of the side wall, a bottom wall having a placement surface connected to the lower end side of the side wall and capable of being placed on the weight detector A storage chamber surrounded by the side wall, the lid wall, and the bottom wall; a recess communicating with the storage chamber; and one end connected to a portion of the recess in the direction of gravity. The other end is configured to extend in a direction different from the gravity direction in the bottom wall, and is provided on a connecting pipe configured to have a diameter smaller than the diameter of the recess, and on a wall different from the bottom wall. A storage device comprising a gas flow path and a liquid discharge path connected to a downstream end of the communication pipe.
  2. 　前記凹部の径は、前記側壁の径よりも小さくなるよう構成される請求項１に記載の貯留装置。 The storage device according to claim 1, wherein a diameter of the recess is configured to be smaller than a diameter of the side wall.
  3. 　前記連絡管と前記凹部は連続した構造である請求項１または請求項２に記載の貯留装置。　 The storage device according to claim 1 or 2, wherein the connecting pipe and the recess have a continuous structure. *
  4. 　前記連絡管は、前記底壁の内部に設けられる請求項１から請求項３のうち、いずれか一項に記載の貯留装置。 The storage device according to any one of claims 1 to 3, wherein the communication pipe is provided inside the bottom wall.
  5. 　前記貯留室の径は、前記底壁に向かうほど小さくなるよう構成される請求項１から請求項４のうち、いずれか一項に記載の貯留装置。 The storage device according to any one of claims 1 to 4, wherein a diameter of the storage chamber is configured to become smaller toward the bottom wall.
  6. 　前記液体排出路は、ポンプに接続可能なよう構成される請求項１から請求項５のうち、いずれか一項に記載の貯留装置。 The storage device according to any one of claims 1 to 5, wherein the liquid discharge path is configured to be connectable to a pump.
  7. 　前記液体排出路は、前記側壁内を貫通するよう構成される請求項１から請求項６のうち、いずれか一項に記載の貯留装置。 The storage device according to any one of claims 1 to 6, wherein the liquid discharge path is configured to penetrate through the side wall.
  8. 周状に構成された側壁と、前記側壁の上端側に配された蓋壁と、前記側壁の下端側に接続されると共に、重量検知器上に載置可能な載置面を有する底壁と、前記側壁と前記蓋壁と前記底壁で囲まれた貯留室と、前記貯留室に連通すると共に、前記底壁に設けられた凹部と、一端が前記凹部のうち重力方向の部位に接続され、他端が前記底壁内にて重力方向とは異なる方向に延伸するよう構成され、径が前記凹部の径よりも小さくなるよう構成される連絡管と、前記底壁と異なる壁に設けられるガス流路と、前記連絡管の下流端に接続される液体排出路とを備える貯留装置と、前記貯留室を加熱するヒータと、を有する気化器。 A circumferentially configured side wall, a lid wall disposed on the upper end side of the side wall, a bottom wall having a placement surface connected to the lower end side of the side wall and capable of being placed on the weight detector A storage chamber surrounded by the side wall, the lid wall, and the bottom wall; a recess communicating with the storage chamber; and one end connected to a portion of the recess in the direction of gravity. The other end is configured to extend in a direction different from the gravity direction in the bottom wall, and is provided on a connecting pipe configured to have a diameter smaller than the diameter of the recess, and on a wall different from the bottom wall. A vaporizer comprising: a storage device including a gas flow path and a liquid discharge path connected to a downstream end of the communication pipe; and a heater for heating the storage chamber.
  9. 周状に構成された側壁と、前記側壁の上端側に配された蓋壁と、前記側壁の下端側に接続されると共に、重量検知器上に載置可能な載置面を有する底壁と、前記側壁と前記蓋壁と前記底壁で囲まれた貯留室と、前記貯留室に連通すると共に、前記底壁に設けられた凹部と、一端が前記凹部のうち重力方向の部位に接続され、他端が前記底壁内にて重力方向とは異なる方向に延伸するよう構成され、径が前記凹部の径よりも小さくなるよう構成される連絡管と、前記底壁と異なる壁に設けられるガス流路と、前記連絡流路の下流端に接続される液体排出路とを備える貯留装置と、前記貯留室を加熱するヒータと、を有する気化器と、前記気化器に連通される処理室と、前記処理室内で基板を支持する基板支持部とを有する基板処理装置。 A circumferentially configured side wall, a lid wall disposed on the upper end side of the side wall, a bottom wall having a placement surface connected to the lower end side of the side wall and capable of being placed on the weight detector A storage chamber surrounded by the side wall, the lid wall, and the bottom wall; a recess communicating with the storage chamber; and one end connected to a portion of the recess in the direction of gravity. The other end is configured to extend in a direction different from the gravity direction in the bottom wall, and is provided on a connecting pipe configured to have a diameter smaller than the diameter of the recess, and on a wall different from the bottom wall. A vaporizer having a gas flow path and a liquid discharge path connected to a downstream end of the communication flow path, a heater for heating the storage chamber, and a processing chamber communicated with the vaporizer And a substrate processing apparatus for supporting the substrate in the processing chamber.
  10. 　前記処理室内で基板を処理する際は、基板処理モードとして、前記底壁が重量計測器に支持された状態で前記ガス流路が前記処理室に連通すると共に、前記液体配管が液体原料源に連通するよう構成され、前記貯留装置内をメンテナンスする際は、メンテナンスモードとして、前記底壁が重量計測器に載置された状態で前記ガス流路が前記不活性ガス源に連通すると共に前記液体排出路が廃液装置または洗浄装置のいずれかに接続されるよう構成される請求項１２に記載の基板処理装置。 When processing a substrate in the processing chamber, as a substrate processing mode, the gas flow path communicates with the processing chamber with the bottom wall supported by a weight measuring device, and the liquid pipe serves as a liquid source source. When maintaining the inside of the storage device, the gas flow path communicates with the inert gas source while the bottom wall is placed on a weight measuring device, and the liquid is maintained. The substrate processing apparatus according to claim 12, wherein the discharge path is configured to be connected to either a waste liquid apparatus or a cleaning apparatus.
  11. 　基板を処理室内の基板支持部に支持する工程と、周状に構成された側壁と、前記側壁の上端側に配された蓋壁と、前記側壁の下端側に接続されると共に、重量検知器上に載置可能な載置面を有する底壁と、前記側壁と前記蓋壁と前記底壁で囲まれた貯留室と、前記貯留室に連通すると共に、前記底壁に設けられた凹部と、一端が前記凹部のうち重力方向の部位に接続され、他端が前記底壁内にて重力方向とは異なる方向に延伸するよう構成され、径が前記凹部の径よりも小さくなるよう構成される連絡管と、前記底壁と異なる壁に設けられるガス流路と、前記連絡流路の下流端に接続される液体排出路とを備える貯留装置と、前記貯留室を加熱するヒータと、を有する気化器に原料を供給し、前記原料を気化する工程と、前記気化器に連通された処理室内に前記気化された原料を供給し、前記基板を処理する工程と、を有する半導体装置の製造方法。
     
          A step of supporting the substrate on a substrate support in the processing chamber, a circumferentially configured side wall, a lid wall disposed on the upper end side of the side wall, and a weight detector connected to the lower end side of the side wall; A bottom wall having a placement surface capable of being placed thereon; a storage chamber surrounded by the side wall, the lid wall, and the bottom wall; and a recess provided in the bottom wall and communicating with the storage chamber. The one end is connected to a portion of the recess in the direction of gravity, and the other end is configured to extend in a direction different from the direction of gravity in the bottom wall, and the diameter is configured to be smaller than the diameter of the recess. A storage pipe comprising a connecting pipe, a gas flow path provided on a wall different from the bottom wall, a liquid discharge path connected to a downstream end of the communication flow path, and a heater for heating the storage chamber. A step of supplying the raw material to the vaporizer and vaporizing the raw material, and communicating with the vaporizer Processing and supplies the vaporized raw material into the room, a method of manufacturing a semiconductor device having a step of processing the substrate.

PCT/JP2016/086222 2015-12-18 2016-12-06 Storage device, vaporizer, substrate processing device, and method for manufacturing semiconductor device WO2017104485A1 (en)

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