WO2017104039A1 - Teaching system, teaching method, and robot - Google Patents

Teaching system, teaching method, and robot Download PDF

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Publication number
WO2017104039A1
WO2017104039A1 PCT/JP2015/085319 JP2015085319W WO2017104039A1 WO 2017104039 A1 WO2017104039 A1 WO 2017104039A1 JP 2015085319 W JP2015085319 W JP 2015085319W WO 2017104039 A1 WO2017104039 A1 WO 2017104039A1
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WO
WIPO (PCT)
Prior art keywords
teaching
robot
hand
temporary
axis
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PCT/JP2015/085319
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French (fr)
Japanese (ja)
Inventor
小淵　信一
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株式会社安川電機
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Priority to PCT/JP2015/085319 priority Critical patent/WO2017104039A1/en
Publication of WO2017104039A1 publication Critical patent/WO2017104039A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Definitions

  • the disclosed embodiment relates to a teaching system, a teaching method, and a robot.
  • the teaching data when the other robot accesses the aligner device is corrected based on the deviation of the position and orientation of the substrate detected by the aligner device (for example, see Patent Document 1).
  • An object of one embodiment is to provide a teaching system, a teaching method, and a robot capable of efficiently teaching a plurality of robots with a simple configuration.
  • the teaching system includes a first robot, a second robot, and a correction unit.
  • the first robot has the first hand in which the present teaching corresponding to the actual operation is completed.
  • the second robot has completed the temporary teaching, which is coarser than the main teaching, and has the second hand.
  • the correction unit corrects the teaching data of the temporary teaching of the second robot based on the detection result of the second hand that has moved to a predetermined inspection position according to the temporary teaching by the first hand.
  • FIG. 1 is a schematic top view showing an outline of the teaching system.
  • FIG. 2 is a perspective view of the robot.
  • FIG. 3 is a schematic top view of the hand.
  • FIG. 4 is a block diagram of the teaching system.
  • FIG. 5A is an explanatory diagram illustrating a procedure for detecting a shift in the Z-axis direction.
  • FIG. 5B is an explanatory diagram illustrating a procedure for detecting a shift in the X-axis direction.
  • FIG. 6A is a first explanatory diagram showing a procedure for detecting a deviation in the Y-axis direction.
  • FIG. 6B is a second explanatory diagram illustrating a procedure for detecting a shift in the Y-axis direction.
  • FIG. 5A is an explanatory diagram illustrating a procedure for detecting a shift in the Z-axis direction.
  • FIG. 5B is an explanatory diagram illustrating a procedure for detecting a shift in the Y-axis direction.
  • FIG. 7A is an explanatory diagram 1 illustrating a procedure for detecting a shift around the X axis.
  • FIG. 7B is a second explanatory diagram illustrating a procedure for detecting a deviation around the X axis.
  • FIG. 7C is an explanatory diagram 3 showing a procedure for detecting a shift around the X axis.
  • FIG. 8A is a first explanatory diagram illustrating a procedure for detecting a deviation around the Y axis.
  • FIG. 8B is a second explanatory diagram illustrating a procedure for detecting a shift around the Y axis.
  • FIG. 8C is an explanatory diagram 3 showing a procedure for detecting a deviation around the Y axis.
  • FIG. 8A is a first explanatory diagram illustrating a procedure for detecting a deviation around the Y axis.
  • FIG. 8B is a second explanatory diagram illustrating a procedure for detecting a shift around the Y
  • FIG. 9A is an explanatory diagram 1 illustrating a procedure for detecting a shift around the Z-axis.
  • FIG. 9B is a second explanatory diagram illustrating a procedure for detecting a shift around the Z-axis.
  • FIG. 9C is an explanatory diagram 3 showing a procedure for detecting a shift around the Z-axis.
  • FIG. 10 is a block diagram illustrating a modification of the controller.
  • FIG. 11A is an explanatory diagram showing a procedure for teaching n robots.
  • FIG. 11B is an explanatory diagram showing a procedure for teaching a robot installed in a plurality of transfer chambers.
  • FIG. 12 is a flowchart showing a teaching procedure executed by the teaching system.
  • FIG. 13 is a flowchart showing a teaching procedure executed by a teaching system including n robots.
  • FIG. 1 is a schematic top view showing an outline of the teaching system 1.
  • the Z axis with the vertical upward direction as the positive direction the Z axis with the vertical upward direction as the positive direction
  • the X axis as the direction along the long side of the transfer chamber 50
  • the direction along the short side of the transfer chamber 50 are shown.
  • a three-dimensional orthogonal coordinate system with the Y axis is shown. Such an orthogonal coordinate system may be shown in other drawings used in the following description.
  • the teaching system 1 includes a transfer chamber 50, an aligner device 51, and a robot 10.
  • FIG. 1 exemplifies a case where two robots 10 are installed, and character strings such as “ ⁇ 1” and “ ⁇ 2” are added to the end of the reference numerals to distinguish each robot 10. is doing. In the following description, the same description will be made when a plurality of devices are distinguished.
  • the transfer chamber 50 is a so-called EFEM (Equipment Front End Module), and is a locally cleaned case that allows a clean downflow airflow to flow inside. Further, the transfer chamber 50 has, for example, a rectangular shape having a long side in the X-axis direction in the figure, and a cassette (not shown) for storing a substrate and a substrate processing chamber (not shown) are provided on the long side. Is provided. Note that a substrate processing chamber may also be provided on the short side (the side along the Y axis in the figure) or on the inner side of the short side.
  • EFEM Equipment Front End Module
  • the aligner device 51 is a device that detects and arranges the orientation of the substrate transported by the robot 10, and rotates the substrate placed by the robot 10 around the rotation axis. Then, the two robots 10 (first robot 10-1 and second robot 10-2) shown in FIG. 1 are respectively arranged at positions where the hand can access the aligner device 51.
  • the detailed configuration of the robot 10 will be described later with reference to FIGS.
  • “temporary teaching” of the robot 10 is performed using a robot simulation device or the like.
  • the “temporary teaching” is a coarse-accuracy teaching that is performed prior to “main teaching” described later.
  • the teaching data corresponding to “temporary teaching” will be referred to as “temporary teaching data”, and the teaching data corresponding to “main teaching” will be referred to as “main teaching data”, respectively.
  • the robot simulation apparatus displays an image reproducing the operation of the robot 10 on the display unit so that the robot 10 and the surrounding environment of the robot 10 can be visually recognized, and the robot 10 is based on the input operation of the operator.
  • generates the teaching data of this.
  • the robot 10 that has completed the “temporary teaching” is placed in the transfer chamber 50, and the operation of “main teaching” is performed to correct the temporary teaching data while operating the robot 10 in an actual operating environment.
  • the “main teaching” operation refers to an operation including a manual operation in which, for example, a precise jig is arranged and the robot 10 is taught with an accurate conveyance position by visual confirmation or the like. By performing the present teaching, the robot 10 can accurately perform actual operations, that is, work operations such as substrate transfer.
  • the size of the transfer chamber 50, the installation position and the installation direction of the robot 10 are generally different from the ideal environment in provisional teaching in an actual environment. This is because the actual environment deviates from the ideal environment due to the effects of manufacturing errors of the transfer chamber 50 and installation errors of the robot 10. Therefore, even if the hand reaches the target position of the aligner device 51 or the like accurately in the temporary teaching, in the actual environment, the hand arrival position is deviated from the target position.
  • the hand of the second robot 10-2 that has not completed the teaching is detected from the hand of the first robot 10-1 that has completed the teaching. Then, based on the detection result, the temporary teaching data of the second robot 10-2 for which the present teaching has not been completed is corrected. Furthermore, the provisional teaching data whose correction has been completed is handled as the present teaching data.
  • the hand of the second robot 10-2 is moved to the inspection position based on the temporary teaching (step S10).
  • the inspection position is a target position 51 ⁇ / b> C set on an extension line of the rotation center in the aligner device 51.
  • the hand of the second robot 10-2 is detected by the hand of the first robot 10-1 that has completed this teaching (step S20).
  • the teaching system 1 can detect a deviation in the X-axis direction, a deviation in the Y-axis direction, and a deviation in the Z-axis direction with respect to the target position 51C of the second robot 10-2.
  • an optical axis 200 of a sensor provided in the first robot 10-1 is shown for reference. Details of such a sensor will be described later with reference to FIG.
  • the teaching system 1 can also detect the deviation of the rotation angle around the X axis, the deviation of the rotation angle around the Y axis, and the deviation of the rotation angle around the Z axis of the second robot 10-2. Details of these detection procedures will be described later with reference to FIG. 5A and the like.
  • the teaching system 1 corrects the temporary teaching data of the second robot 10-2 based on the detection result in step S20 (step S30).
  • the corrected temporary teaching data is handled as the main teaching data.
  • the teaching operation is performed on the first robot 10 (the first robot 10-1 in FIG. 1). If this is done, the above temporary teaching correction procedure is automatically executed for the other robot 10 (second robot 10-2 in FIG. 1), and the main teaching of the other robot 10 is automatically completed. Can be made.
  • FIG. 1 shows the case where the aligner device 51 is arranged at a position accessible by both of the two robots 10 (the first robot 10-1 and the second robot 10-2)
  • the aligner device 51 is shown. May not actually be arranged. That is, it is sufficient to simply set the target position 51C shown in FIG. 1 as three-dimensional coordinates in advance. That is, a space (inspection space) to be used when the first robot 10-1 detects the hand of the second robot 10-2 may be secured, and a target position may be set in the space.
  • FIG. 2 is a perspective view of the robot 10.
  • the robot 10 includes a main body 10 a, a lifting shaft 10 b, a first arm 11, a second arm 12, and a hand 13.
  • the robot 10 provided with the one hand 13 is illustrated in FIG. 2, it is good also as providing the two or more hands 13 coaxially about 3rd axis
  • the robot 10 may include two or more sets of the first arm 11, the second arm 12, and one or more hands 13.
  • the main body 10a is fixed to the floor surface of the transfer chamber 50 (see FIG. 1) and incorporates an elevating mechanism (not shown) for elevating the elevating shaft 10b.
  • the elevating shaft 10b supports the base end portion of the first arm 11 so as to be pivotable about the first axis A1, and moves up and down along the first axis A1.
  • the lifting shaft 10b itself may be rotated around the first axis A1.
  • the first arm 11 supports the proximal end portion of the second arm 12 at the distal end portion so as to be rotatable around the second axis A2.
  • the second arm 12 supports the proximal end portion of the hand 13 at the distal end portion so as to be pivotable about the third axis A3.
  • the robot 10 is a three-link horizontal articulated robot including the first arm 11, the second arm 12 and the hand 13. Moreover, since the robot 10 has the lifting mechanism as described above, it can access an arbitrary position in the transfer chamber 50.
  • the intersection of the first axis A1 and the bottom surface of the main body 10a is referred to as an installation position A1B of the robot 10.
  • the detected displacement includes a displacement in the X-axis direction, the Y-axis direction, and the Z-axis direction.
  • a deviation angle from an ideal direction (for example, the Z axis) of the installation direction of the robot 10 (for example, the direction of the first axis A1) is detected.
  • the detected shift includes a shift around the X axis ( ⁇ X shown in FIG. 2), a shift around the Y axis (also ⁇ Y), and a shift around the Z axis (also ⁇ Z).
  • the robot 10 including two arms (the first arm 11 and the second arm 12) is illustrated, but the number of arms may be one or three or more.
  • FIG. 3 is a schematic top view of the hand 13.
  • the hand 13 includes a base portion 13a and a fork portion 13b.
  • the base end side of the base portion 13a is supported by the second arm 12 (see FIG. 2) so as to be rotatable around the third axis A3.
  • the fork portion 13b is provided on the distal end side of the base portion 13a, and the distal end side is divided into two forks.
  • one of the two branches is referred to as a first branch portion 13ba and the other is referred to as a second branch portion 13bb.
  • substrate 100 is provided in each front end side of 1st branch part 13ba and 2nd branch part 13bb.
  • the sensor 13c is, for example, an optical sensor, and one is a light projecting unit 13ca and the other is a light receiving unit 13cb.
  • the light receiving unit 13cb detects light emitted from the light projecting unit 13ca.
  • the sensor 13c detects whether or not the light is blocked by an obstacle.
  • the sensor 13c is a so-called mapping sensor, and is often already provided in the hand 13, so there is no need to install a new sensor. Therefore, the cost associated with the installation of a new sensor can be reduced.
  • the sensor 13c is sufficient if the hand 13 of the first robot 10-1 is provided when teaching the two robots 10. That is, the sensor 13c is not necessary for the hand 13 of the second robot 10-2.
  • the position corresponding to the center of the substrate 100 held by the hand 13 is a reference position 13 ⁇ / b> C of the hand 13.
  • a line connecting the third axis A3 and the reference position 13C is a hand center line 13CL indicating the direction of the hand 13.
  • the hand center line 13CL is sufficient if it indicates the direction of the hand 13.
  • a line connecting an arbitrary position on the hand 13 set in place of the third axis A3 and an arbitrary reference position 13C on the hand 13 may be set as the hand center line 13CL.
  • the hand 13 includes a gripping mechanism that grips the substrate 100.
  • the hand 13 may include a holding mechanism such as a suction mechanism instead of the gripping mechanism.
  • FIG. 4 is a block diagram of the teaching system 1.
  • the teaching system 1 includes two robots 10 and two controllers 20 each for controlling the operation of each robot 10. Note that the operation control of the two robots 10 may be performed by one controller 20.
  • the first robot 10-1 is connected to the first controller 20-1.
  • the second robot 10-2 is connected to the second controller 20-2.
  • the first controller 20-1 is connected to the second controller 20-2.
  • FIG. 4 for the sake of easy understanding, the minimum configuration in the control unit 21 of the first controller 20-1 and the second controller 20-2 and the minimum information stored in the storage unit 22 are shown. Each is shown. However, the controller 20 having the same configuration may be used as the first controller 20-1 and the second controller 20-2. This will be described later with reference to FIG.
  • the first controller 20-1 includes a control unit 21 and a storage unit 22.
  • the control unit 21 includes a detection instruction unit 21a, an operation control unit 21b, and an acquisition unit 21c.
  • the storage unit 22 stores the present teaching data 22a.
  • the first controller 20-1 is, for example, a computer having a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), a HDD (Hard Disk Drive), an input / output port, and the like. Circuit.
  • CPU Central Processing Unit
  • ROM Read Only Memory
  • RAM Random Access Memory
  • HDD Hard Disk Drive
  • the CPU of the computer functions as the detection instruction unit 21a, the operation control unit 21b, and the acquisition unit 21c, for example, by reading and executing a program stored in the ROM.
  • At least one or all of the detection instruction unit 21a, the operation control unit 21b, and the acquisition unit 21c of the control unit 21 are configured by hardware such as ASIC (Application Specific Integrated Circuit) or FPGA (Field Programmable Gate Array). You can also.
  • ASIC Application Specific Integrated Circuit
  • FPGA Field Programmable Gate Array
  • the storage unit 22 corresponds to, for example, a RAM or an HDD.
  • the RAM and HDD can store the teaching data 22a.
  • the first controller 20-1 may acquire the above-described program and various types of information via another computer or a portable recording medium connected via a wired or wireless network.
  • the control unit 21 controls the operation of the first robot 10-1 based on the teaching data 22a. Further, the control unit 21 causes the first robot 10-1 to perform an operation of detecting the hand 13 of the second robot 10-2 with the hand 13 of the first robot 10-1.
  • the detection instruction unit 21a instructs the operation control unit 21b to cause the first robot 10-1 to detect the hand 13 of the second robot 10-2.
  • the detection instruction unit 21a can detect the direction and position of the hand 13 of the second robot 10-2 without the hand 13 of the first robot 10-1 contacting the second robot 10-2. Instruct to move.
  • the operation control unit 21b operates the first robot 10-1 by instructing an actuator (not shown) corresponding to each axis in the first robot 10-1 based on the main teaching data 22a of the storage unit 22. . Further, the motion control unit 21b improves the motion accuracy of the first robot 10-1 by performing feedback control using an encoder value in the actuator.
  • the acquisition unit 21c acquires the position information of the hand 13 of the second robot 10-2 based on the output value of the sensor 13c (see FIG. 3) of the first robot 10-1. In addition, the acquisition unit 21c transmits the acquired position information to the second controller 20-2.
  • the main teaching data 22a is teaching data generated through the above-described main teaching operation.
  • the teaching data 22 a is information including a “job” that is a program that defines the operation of the robot 10 including the movement trajectory of the hand 13.
  • the configuration of the second controller 20-2 will be described.
  • the same components as those of the first controller 20-1 are denoted by the same reference numerals, and the description thereof will be omitted or only a brief description will be given.
  • the second controller 20-2 includes a control unit 21 and a storage unit 22.
  • the control unit 21 includes a correction unit 21d and an operation control unit 21b.
  • the storage unit 22 stores the main teaching data 22a and the temporary teaching data 22b.
  • the correction unit 21d corrects the temporary teaching data 22b based on the information received from the first controller 20-1. Then, the correction unit 21d stores the corrected temporary teaching data 22b in the storage unit 22 as the main teaching data 22a.
  • the correcting unit 21d detects the position and posture of the detected hand 13 and the ideal position and posture based on the position information of the hand 13 of the second robot 10-2 received from the first controller 20-1. The deviation from is calculated. Then, the correcting unit 21d generates the main teaching data 22a by correcting the temporary teaching data 22b so that the calculated deviation amount becomes zero.
  • the operation controller 21b of the second controller 20-2 uses the second robot 10- based on the temporary teaching data 22b. 2 is controlled.
  • the operation controller 21b of the second controller 20-2 controls the operation of the second robot 10-2 based on the main teaching data 22a after the main teaching data 22a is generated.
  • the hand 13 of the first robot 10-1 shown in FIG. 1 is called the first hand 13-1
  • the hand 13 of the second robot 10-2 is called the second hand 13-2. I will do it.
  • the position of the optical axis of the sensor 13c (see FIG. 3) in the first hand 13-1 is appropriately indicated as the optical axis 200.
  • FIGS. 5A to 9C it is assumed that the second hand 13-2 has been moved to the target position 51C shown in FIG. 1 based on the temporary teaching data 22b (see FIG. 4).
  • FIG. 5A is an explanatory diagram illustrating a procedure for detecting a shift in the Z-axis direction
  • FIG. 5B is an explanatory diagram illustrating a procedure for detecting a shift in the X-axis direction.
  • the optical axis 200 first overlaps the fork portion 13b (see FIG. 3) of the second hand 13-2 in the X-axis direction, and the first hand 13-1 Move to a position where the two hands 13-2 do not interfere (for example, see FIG. 5B). Then, as shown in FIG. 5A, the first hand 13-1 moves from this position in the direction 501 in the negative direction of the Z axis.
  • the Z coordinate of the second hand 13-2 can be detected. Specifically, when the first hand 13-1 moves in the direction 501, the second hand 13-2 exists in a range where the optical axis 200 is blocked by the second hand 13-2. Therefore, either the both ends of the range, the midpoint of the range, or the like can be used as the Z coordinate of the second hand 13-2.
  • the correction unit 21d (see FIG. 4) corrects the temporary teaching data 22b by using the deviation in the Z-axis direction thus calculated.
  • FIG. 5A shows a case where the first hand 13-1 moves from the positive side of the Z axis to the negative direction of the Z axis from the second hand 13-2.
  • the second hand 13-2 may move in the positive direction of the Z axis from the negative direction side of the Z axis.
  • the optical axis 200 first overlaps the fork portion 13b (see FIG. 3) of the second hand 13-2 in the X-axis direction and the Z-axis direction, and Y It moves to a position where it does not interfere with the second hand 13-2 in the axial direction. Then, as shown in FIG. 5B, the first hand 13-1 moves from this position in a direction 502 toward the negative direction of the X axis.
  • the X coordinate of the second hand 13-2 can be detected. Specifically, when the first hand 13-1 moves in the direction 502, the position where the optical axis 200 is changed from the state where it is blocked by the second hand 13-2 to the state where it is not blocked is the second hand. This is the tip of 13-2. Since the size of each part of the second hand 13-2 is known, the reference position 13C (see FIG. 3) of the second hand 13-2 can be obtained from the position of the tip.
  • the correction unit 21d (see FIG. 4) corrects the temporary teaching data 22b using the X-axis direction deviation calculated in this way.
  • FIG. 5B shows the case where the first hand 13-1 detects the first branch portion 13ba of the second hand 13-2
  • the second branch portion 13bb may be detected.
  • the position of the first hand 13-1 in the Z-axis direction may be determined based on the Z coordinate of the second hand 13-2 acquired by the procedure described with reference to FIG. 5A.
  • 5B shows the case where the first hand 13-1 moves in a direction away from the second hand 13-2, but may move in a direction approaching the second hand 13-2.
  • the position where the optical axis 200 is blocked for the first time by the second hand 13-2 is the position of the tip of the second hand 13-2.
  • FIGS. 6A and 6B are explanatory diagrams 1 and 2 showing a procedure for detecting a deviation in the Y-axis direction.
  • FIG. 6A when the reference position 13C of the second hand 13-2 is aligned with the target position 51C (see FIG. 1), that is, when there is no deviation from the reference position 13C, The outer shape 13A is indicated by a broken line for reference.
  • the first hand 13-1 first moves to a position where it does not interfere with the second hand 13-2 and the optical axis 200 is blocked by the second hand 13-2.
  • the first hand 13-1 takes a posture in which the angle formed by the hand center line 13CL of the first hand 13-1 and the X axis is an angle ⁇ . Then, the first hand 13-1 moves in the direction 503 along the hand center line 13CL shown in FIG.
  • the first hand 13-1 when the first hand 13-1 moves in the direction 503, the first hand 13-1 when the optical axis 200 changes from the state blocked by the second hand 13-2 to the state not blocked.
  • the upper point be a point 602.
  • a point corresponding to the outer shape 13A indicated by a broken line is a point 601.
  • a line passing through the point 602 and parallel to the optical axis 200 is defined as a line 602L
  • a line passing through the point 601 and parallel to the line 602L is defined as a line 601L.
  • a point 603 is an intersection of a line 601L passing through the point 602 and the line 601L, a right triangle having points 601, 602, and 603 as vertices can be obtained. it can.
  • the position of the point 601 is known because it can be obtained from the target position 51C and the size of each part of the second hand 13-2. If the distance between the point 602 and the point 603 is L1, L1 can be obtained from the detection result of the second hand 13-2 by the first hand 13-1. This is because L1 is the distance between the line 601L and the line 602L, and the position of the line 601L is known, and the position of the line 602L is also obtained from the detection result.
  • Y1 L1 / sin ⁇ ”.
  • the correction unit 21d (see FIG. 4) corrects the temporary teaching data 22b using the deviation in the Y-axis direction thus calculated.
  • FIG. 6A shows the case where the first hand 13-1 detects the first branch portion 13ba of the second hand 13-2, the second branch portion 13bb may be detected.
  • FIG. 6A shows the case where the first hand 13-1 moves away from the second hand 13-2. However, the first hand 13-1 moves closer to the second hand 13-2. It is good as well.
  • FIGS. 7A, 7B, and 7C are explanatory diagrams 1, 2, and 3 showing a procedure for detecting a shift around the X axis.
  • 7A to 7C show a case where the second hand 13-2 is inclined from the XY plane around a line parallel to the X axis.
  • the optical axis 200 overlaps the first branch portion 13ba of the second hand 13-2 in the X-axis direction, and the second hand 13 in the Y-axis direction.
  • -2 Move to a position where it does not interfere with -2.
  • the first hand 13-1 moves from this position in a direction 501 in the negative direction of the Z axis.
  • the Z coordinate of the predetermined point 701 in the first branch portion 13ba is detected in the same procedure as in FIG. 5A.
  • the first hand 13-1 detects the Z coordinate of the predetermined point 702 in the second branch portion 13bb of the second hand 13-2.
  • FIG. 7C shows the positional relationship between the point 701 and the point 702 when viewed from the positive direction of the X axis.
  • the distance Z1 between the point 701 and the point 702 in the Z direction is a difference between the Z coordinate of the point 701 and the Z coordinate of the point 702.
  • ⁇ X1 exceeds a predetermined threshold, a warning may be given using a display unit (not shown).
  • FIG. 7A and 7B show the case where the first hand 13-1 moves from the positive side of the Z axis to the negative direction of the Z axis with respect to the second hand 13-2. 13-1 may move in the positive direction of the Z axis from the negative direction side of the Z axis with respect to the second hand 13-2. Moreover, it is good also as performing the detection procedure of FIG. 7A after the detection procedure of FIG. 7B.
  • FIGS. 8A, 8B, and 8C are explanatory diagrams 1, 2, and 3 showing a procedure for detecting a shift around the Y axis.
  • 8A to 8C show a case where the second hand 13-2 is tilted from the XY plane around a line parallel to the Y axis.
  • the first hand 13-1 first has a position where the optical axis 200 overlaps the second hand 13-2 in the X-axis direction and does not interfere with the second hand 13-2 in the Y-axis direction. Move to. Then, as shown in FIG. 8A, the first hand 13-1 moves in the direction 501 from the position toward the negative direction of the Z axis.
  • the Z coordinate of the predetermined point 801 in the second hand 13-2 is detected in the same procedure as in FIG. 5A.
  • FIG. 8A a locus 801L in which the optical axis 200 moves along the Z axis is shown for reference.
  • the first hand 13-1 moves by X1 in the positive direction of the X axis as compared with the case shown in FIG. 8A.
  • the robot moves in the direction 501 from the position toward the negative direction of the Z axis.
  • the Z coordinate of the predetermined point 802 in the second hand 13-2 is detected as in the case of FIG. 8A.
  • FIG. 8B a locus 802L in which the optical axis 200 moves along the Z-axis and a locus 801L shown in FIG. 8A are shown for reference.
  • FIG. 8C shows the positional relationship between the point 801 and the point 802 when viewed from the negative direction of the Y-axis.
  • the distance Z2 between the point 801 and the point 802 in the Z direction is the difference between the Z coordinate of the point 801 and the Z coordinate of the point 802.
  • FIG. 8A and 8B show the case where the first hand 13-1 moves from the positive side of the Z axis to the negative direction of the Z axis from the second hand 13-2. 13-1 may move in the positive direction of the Z axis from the negative direction side of the Z axis with respect to the second hand 13-2. Moreover, it is good also as performing the detection procedure of FIG. 8A after the detection procedure of FIG. 8B.
  • FIGS. 9A, 9B, and 9C are explanatory diagrams 1, 2, and 3 showing a procedure for detecting a shift around the Z axis.
  • FIGS. 9A to 9C show a case where the second hand 13-2, which should originally be parallel to the X axis and the hand center line 13CL, is rotationally displaced by ⁇ Z1 around the Z axis.
  • the optical axis 200 overlaps the first branch portion 13ba of the second hand 13-2 in the X-axis direction, and the second hand 13 in the Y-axis direction.
  • -2 Move to a position where it does not interfere with -2.
  • the first hand 13-1 moves from this position in the direction 502 toward the negative direction of the X axis.
  • the X coordinate of the point 901 at the tip of the first branch portion 13ba is detected in the same procedure as in FIG. 5B.
  • the first hand 13-1 detects the X coordinate of the point 902 at the tip of the second branch portion 13bb of the second hand 13-2.
  • FIG. 9C shows the positional relationship between the point 901 and the point 902 when viewed from the positive direction of the Z-axis.
  • the distance X2 between the point 901 and the point 902 in the X direction is the difference between the X coordinate of the point 901 and the X coordinate of the point 902.
  • the distance L3 between the point 901 and the point 902 is known because it can be obtained from the size of each part of the second hand 13-2. *
  • ⁇ Z1 arcsin (X2 / L3)”.
  • the correction unit 21d (see FIG. 4) corrects the temporary teaching data 22b using the deviation around the Z axis calculated in this way.
  • FIG. 10 is a block diagram illustrating a modified example of the controller 20.
  • FIG. 10 shows a case where one controller 20 controls the operation of one robot 10, but one controller 20 may control the operation of two or more robots 10. .
  • controllers 20 having different numbers of robots 10 that perform operation control may be mixed.
  • the same reference numerals are given to the same components as those of the first controller 20-1 and the second controller 20-2 shown in FIG. 4, and the description will be omitted or only a brief description will be given.
  • the nth controller 20-n is connected to the nth robot 10-n.
  • the nth controller 20-n is connected to the n ⁇ 1th controller and the n + 1th controller, respectively.
  • the configurations of the (n ⁇ 1) th controller and the (n + 1) th controller are the same as those of the nth controller 20-n.
  • the control unit 21 includes a correction unit 21d, a detection instruction unit 21a, an operation control unit 21b, and an acquisition unit 21c.
  • the storage unit 22 stores temporary teaching data 22b and main teaching data 22a.
  • the correction unit 21d generates the main teaching data 22a by correcting the temporary teaching data 22b based on the position information received from the acquisition unit 21c of the (n-1) th controller.
  • the operation controller 21b of the n-th controller 20-n controls the operation of the n-th robot 10-n based on the temporary teaching data 22b (see FIG. 10). (See the dashed arrow shown). That is, the operation control unit 21b operates the n-th robot 10-n as the second robot 10-2 illustrated in FIG.
  • the operation control unit 21b of the nth controller 20-n controls the operation of the nth robot 10-n based on the present teaching data 22a. That is, the n-th robot 10-n is operated as the first robot 10-1 shown in FIG.
  • the n-th robot 10-n includes the sensor 13c (see FIG. 3), similarly to the first robot 10-1 shown in FIG. Of the n robots 10, the sensor 13 c may be omitted for the robot 10 that finally receives the temporary teaching data 22 b.
  • FIG. 11A is an explanatory diagram showing a procedure for teaching n robots 10
  • FIG. 11B is an explanatory diagram showing a procedure for teaching robots 10 installed in a plurality of transfer chambers 50.
  • n robots (n is an integer of 2 or more) are taught one after another, even if the first robot 10-1 completes the operation of this teaching, other robots For 10 the work of this teaching is not necessary.
  • an aligner device 51-1 that can be accessed by both the n-1th robot 10- (n-1) and the nth robot 10-n is provided.
  • the aligner device 51- (n-1) may not actually be arranged.
  • the target position 51C shown in FIG. 1 is simply determined in advance as three-dimensional coordinates. That is, a space (inspection space) to be used when the n-1th robot 10- (n-1) detects the hand 13 of the nth robot 10-n is secured, and the target position 51C is determined in this space. Just keep it. Therefore, in the following description, “inspection space 50” is used instead of “aligner device 50”.
  • the first robot 10-1 that has completed the work of the present teaching detects the hand 13 of the second robot 10-2 in the inspection space 51-1, thereby completing the present teaching of the second robot 10-2.
  • the second robot 10-2 detects the hand 13 of the third robot 10-3 in the inspection space 51-2, thereby completing the present teaching of the third robot 10-3.
  • each robot 10 shown in FIG. 11A may be installed in a different transfer chamber 50.
  • the first transfer chamber 50-1 and the second transfer chamber 50-2 are illustrated as being separated from each other, but in actuality, they are installed so as to be in contact with each other.
  • the first robot 10-1 and the second robot 10-2 are installed in the first transfer chamber 50-1, and the third robot 10 is installed in the second transfer chamber 50-2. -3 and the fourth robot 10-4 are installed.
  • an inspection space 51-1 is set in the first transfer chamber 50-1
  • an inspection space 51-3 is set in the second transfer chamber 50-2.
  • the inspection space 51-2 is set so as to extend over the first transfer chamber 50-1 and the second transfer chamber 50-2.
  • the inspection space 51-4 is also set so as to extend over the second transfer chamber 50-2 and the third transfer chamber 50-3.
  • the first robot 10-1 that has completed the teaching operation detects the hand 13 of the second robot 10-2 in the inspection space 51-1, thereby completing the teaching of the second robot 10-2.
  • the second robot 10-2 having completed the present teaching detects the hand 13 of the third robot 10-3 in the inspection space 51-2, thereby completing the present teaching of the third robot 10-3.
  • the third robot 10-3 that has completed the teaching detects the hand 13 of the fourth robot 10-4 in the inspection space 51-3, thereby completing the present teaching of the fourth robot 10-4. Thereafter, by repeating the same procedure, the teaching of all the robots 10 can be completed regardless of the number of transfer chambers 50.
  • the robot 10-2 in the first transfer chamber 50-1 detects the hand 13 of the robot 10-3 in the second transfer chamber 50-2 in the inspection space 51-2. It is possible to detect a relative installation direction or a deviation of the installation position between the 50-1 and the second transfer chamber 50-2.
  • FIG. 12 is a flowchart showing a teaching procedure executed by the teaching system 1.
  • the teaching system 1 moves the hand 13 of the second robot 10-2 to the examination space 51 (step S101). Subsequently, the teaching system 1 detects the hand 13 of the second robot 10-2 with the hand 13 of the first robot 10-1 (step S102).
  • the correction unit 21d (see FIG. 4) of the teaching system 1 corrects the temporary teaching data 22b (see FIG. 4) of the second robot 10-2 based on the detection result of step S102 (step S103).
  • the teaching data 22a is generated and the process is terminated.
  • FIG. 13 is a flowchart showing a teaching procedure executed by the teaching system 1 including n robots 10.
  • the contents described in FIG. 12 will be described in a simplified manner.
  • the teaching system 1 detects the hand 13 of the second robot 10-2 with the hand 13 of the first robot 10-1 (step S201). Subsequently, the correction unit 21d (see FIG. 10) of the teaching system 1 corrects the temporary teaching data 22b (see FIG. 10) of the second robot 10-2 based on the detection result of step S201 (step S202). 2 Complete the teaching of the robot 10-2.
  • the teaching system 1 determines whether or not there is a robot 10 whose tentative teaching data 22b has not been corrected (step S203). If there is no uncorrected robot 10 (No in step S203), the processing is terminated. To do. On the other hand, when there is an uncorrected robot 10 (step S203, Yes), the corrected second robot 10-2 is regarded as the first robot 10-1 (step S204). Further, the uncorrected robot 10 (the robot 10 to be corrected next) is regarded as the second robot 10-2 (step S205), and the processes after step S201 are repeated.
  • the teaching system 1 includes the first robot 10-1, the second robot 10-2, and the correction unit 21d.
  • the first robot 10-1 has the present teaching corresponding to the actual operation, and has the first hand 13-1.
  • the second robot 10-2 has completed the temporary teaching, which is coarser than the present teaching, and has the second hand 13-2.
  • the correcting unit 21d Based on the detection result of the second hand 13-2 moved to the predetermined inspection position 51C according to the temporary teaching by the first hand 13-1, the correcting unit 21d performs the teaching data 22b of the temporary teaching of the second robot 10-2. Correct.
  • the main teaching of the second robot 10-2 can be completed without performing the main teaching operation including the manual operation on the second robot 10-2. Therefore, it is possible to efficiently teach a plurality of robots 10 with a simple configuration.
  • the temporary teaching data 22b of the second robot 10-2 is corrected based on the detection result of the hand 13 of the second robot 10-2 by the first robot 10-1 has been described.
  • a warning may be issued by displaying the detection result on a display unit such as a display.
  • Such a warning is effective when the robot 10 once this teaching is completed causes a positional deviation or an orientation deviation due to secular change.
  • the teaching operation is performed again for the first robot 10-1 using a precisely arranged jig or the like, and the second robot 10-2 is shown in FIG. What is necessary is just to perform the procedure similar to a procedure.

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Abstract

A teaching system is provided with a first robot, a second robot, and a correcting section. The first robot has completed real teaching, which corresponds to actual movements, and has a first hand. The second robot has completed provisional teaching, which is less precise than the real teaching, and has a second hand. The correcting section corrects the teaching data for the provisional teaching of the second robot on the basis of the results of detecting the second hand, which has moved to a specified inspection position according to the provisional teaching, using the first hand. The first robot and the second robot are horizontal multi-joint robots with raising/lowering mechanisms.

Description

教示システム、教示方法およびロボットTeaching system, teaching method, and robot
　開示の実施形態は、教示システム、教示方法およびロボットに関する。 The disclosed embodiment relates to a teaching system, a teaching method, and a robot.
　従来、基板搬送ロボットなどのロボットを教示する際に、シミュレーションプログラムなどを用いた仮想環境で仮教示が完了したロボットを実環境に設置したうえで、仮教示の内容を補正して実環境に適合させる本教示を行うことが知られている。 Conventionally, when teaching a robot such as a substrate transfer robot, a robot for which temporary teaching has been completed in a virtual environment using a simulation program or the like is installed in the real environment, and then the content of the temporary teaching is corrected to conform to the real environment. It is known to perform this teaching.
　また、基板の向きを検知して整えるアライナ装置を介して２台のロボットが基板を受け渡すロボットシステムも知られている。 Also known is a robot system in which two robots deliver a substrate via an aligner that detects and arranges the orientation of the substrate.
　かかるロボットシステムでは、一方のロボットが基板をアライナ装置に載置すると、アライナ装置が検出した基板の位置や向きのずれに基づいて他方のロボットがアライナ装置にアクセスする際の教示データを補正する（たとえば、特許文献１参照）。 In such a robot system, when one robot places the substrate on the aligner device, the teaching data when the other robot accesses the aligner device is corrected based on the deviation of the position and orientation of the substrate detected by the aligner device ( For example, see Patent Document 1).
特開２０１３－１６８５７９号公報JP 2013-168579 A
　しかしながら、上記した従来技術は、アライナ装置によって検出された基板の位置や向きのずれについての情報を必須としており、仮に、これらの情報を取得できない場合には、教示データの補正を行うことはできない。 However, the above-described prior art requires information on the position and orientation deviation of the substrate detected by the aligner device, and if the information cannot be acquired, the teaching data cannot be corrected. .
　実施形態の一態様は、簡易な構成で複数のロボットを効率的に教示することができる教示システム、教示方法およびロボットを提供することを目的とする。 An object of one embodiment is to provide a teaching system, a teaching method, and a robot capable of efficiently teaching a plurality of robots with a simple configuration.
　実施形態の一態様に係る教示システムは、第１ロボットと、第２ロボットと、補正部とを備える。第１ロボットは、実際の動作に対応する本教示が完了しており、第１ハンドを有する。第２ロボットは、前記本教示よりも精度が粗い仮教示が完了しており、第２ハンドを有する。補正部は、前記仮教示に従って所定の被検査位置に移動した前記第２ハンドを前記第１ハンドで検出した結果に基づき、前記第２ロボットの前記仮教示の教示データを補正する。 The teaching system according to an aspect of the embodiment includes a first robot, a second robot, and a correction unit. The first robot has the first hand in which the present teaching corresponding to the actual operation is completed. The second robot has completed the temporary teaching, which is coarser than the main teaching, and has the second hand. The correction unit corrects the teaching data of the temporary teaching of the second robot based on the detection result of the second hand that has moved to a predetermined inspection position according to the temporary teaching by the first hand.
　実施形態の一態様によれば、簡易な構成で複数のロボットを効率的に教示することが可能となる教示システム、教示方法およびロボットを提供することができる。 According to an aspect of the embodiment, it is possible to provide a teaching system, a teaching method, and a robot that can efficiently teach a plurality of robots with a simple configuration.
図１は、教示システムの概要を示す上面模式図である。FIG. 1 is a schematic top view showing an outline of the teaching system. 図２は、ロボットの斜視図である。FIG. 2 is a perspective view of the robot. 図３は、ハンドの上面模式図である。FIG. 3 is a schematic top view of the hand. 図４は、教示システムのブロック図である。FIG. 4 is a block diagram of the teaching system. 図５Ａは、Ｚ軸方向のずれを検出する手順を示す説明図である。FIG. 5A is an explanatory diagram illustrating a procedure for detecting a shift in the Z-axis direction. 図５Ｂは、Ｘ軸方向のずれを検出する手順を示す説明図である。FIG. 5B is an explanatory diagram illustrating a procedure for detecting a shift in the X-axis direction. 図６Ａは、Ｙ軸方向のずれを検出する手順を示す説明図その１である。FIG. 6A is a first explanatory diagram showing a procedure for detecting a deviation in the Y-axis direction. 図６Ｂは、Ｙ軸方向のずれを検出する手順を示す説明図その２である。FIG. 6B is a second explanatory diagram illustrating a procedure for detecting a shift in the Y-axis direction. 図７Ａは、Ｘ軸まわりのずれを検出する手順を示す説明図その１である。FIG. 7A is an explanatory diagram 1 illustrating a procedure for detecting a shift around the X axis. 図７Ｂは、Ｘ軸まわりのずれを検出する手順を示す説明図その２である。FIG. 7B is a second explanatory diagram illustrating a procedure for detecting a deviation around the X axis. 図７Ｃは、Ｘ軸まわりのずれを検出する手順を示す説明図その３である。FIG. 7C is an explanatory diagram 3 showing a procedure for detecting a shift around the X axis. 図８Ａは、Ｙ軸まわりのずれを検出する手順を示す説明図その１である。FIG. 8A is a first explanatory diagram illustrating a procedure for detecting a deviation around the Y axis. 図８Ｂは、Ｙ軸まわりのずれを検出する手順を示す説明図その２である。FIG. 8B is a second explanatory diagram illustrating a procedure for detecting a shift around the Y axis. 図８Ｃは、Ｙ軸まわりのずれを検出する手順を示す説明図その３である。FIG. 8C is an explanatory diagram 3 showing a procedure for detecting a deviation around the Y axis. 図９Ａは、Ｚ軸まわりのずれを検出する手順を示す説明図その１である。FIG. 9A is an explanatory diagram 1 illustrating a procedure for detecting a shift around the Z-axis. 図９Ｂは、Ｚ軸まわりのずれを検出する手順を示す説明図その２である。FIG. 9B is a second explanatory diagram illustrating a procedure for detecting a shift around the Z-axis. 図９Ｃは、Ｚ軸まわりのずれを検出する手順を示す説明図その３である。FIG. 9C is an explanatory diagram 3 showing a procedure for detecting a shift around the Z-axis. 図１０は、コントローラの変形例を示すブロック図である。FIG. 10 is a block diagram illustrating a modification of the controller. 図１１Ａは、ｎ台のロボットを教示する手順を示す説明図である。FIG. 11A is an explanatory diagram showing a procedure for teaching n robots. 図１１Ｂは、複数の搬送室に設置されたロボットを教示する手順を示す説明図である。FIG. 11B is an explanatory diagram showing a procedure for teaching a robot installed in a plurality of transfer chambers. 図１２は、教示システムが実行する教示手順を示すフローチャートである。FIG. 12 is a flowchart showing a teaching procedure executed by the teaching system. 図１３は、ｎ台のロボットを含む教示システムが実行する教示手順を示すフローチャートである。FIG. 13 is a flowchart showing a teaching procedure executed by a teaching system including n robots.
　以下、添付図面を参照して、本願の開示する教示システム、教示方法およびロボットを詳細に説明する。なお、以下では、半導体基板などの基板を搬送するいわゆる水平多関節ロボットの教示を行う場合について説明するが、いわゆるシリアルリンクロボットなどの他の種類のロボットの教示にも本手法を広く適用することができる。また、以下に示す実施形態によりこの発明が限定されるものではない。 Hereinafter, a teaching system, a teaching method, and a robot disclosed in the present application will be described in detail with reference to the accompanying drawings. In the following, a case of teaching a so-called horizontal articulated robot that transports a substrate such as a semiconductor substrate will be described. However, the present method is widely applied to teaching other types of robots such as a so-called serial link robot. Can do. Moreover, this invention is not limited by embodiment shown below.
　また、以下に示す実施形態では、「平行」や、「垂直」、「中心」といった表現を用いる場合があるが、厳密にこれらの状態を満たすことを要しない。すなわち、上記した各表現は、製造精度、設置精度、処理精度、検出精度などのずれを許容するものとする。 In the embodiment described below, expressions such as “parallel”, “vertical”, and “center” may be used, but it is not necessary to strictly satisfy these conditions. That is, each expression described above allows for deviations in manufacturing accuracy, installation accuracy, processing accuracy, detection accuracy, and the like.
　まず、実施形態に係る教示システム１の概要について図１を用いて説明する。図１は、教示システム１の概要を示す上面模式図である。なお、図１には、説明をわかりやすくするために、鉛直上向きを正方向とするＺ軸、搬送室５０の長辺に沿った向きをＸ軸、搬送室５０の短辺に沿った向きをＹ軸とする３次元の直交座標系を示している。かかる直交座標系は、以下の説明で用いる他の図面においても示す場合がある。 First, the outline of the teaching system 1 according to the embodiment will be described with reference to FIG. FIG. 1 is a schematic top view showing an outline of the teaching system 1. In FIG. 1, in order to make the explanation easy to understand, the Z axis with the vertical upward direction as the positive direction, the X axis as the direction along the long side of the transfer chamber 50, and the direction along the short side of the transfer chamber 50 are shown. A three-dimensional orthogonal coordinate system with the Y axis is shown. Such an orthogonal coordinate system may be shown in other drawings used in the following description.
　図１に示すように、教示システム１は、搬送室５０と、アライナ装置５１と、ロボット１０とを備える。なお、図１には、２台のロボット１０を設置する場合を例示しており、それぞれのロボット１０を区別するために、符号の末尾に「－１」、「－２」といった文字列を付記している。なお、以下の説明においても、複数の装置を区別する場合には、同様の記載を行うこととする。 As shown in FIG. 1, the teaching system 1 includes a transfer chamber 50, an aligner device 51, and a robot 10. FIG. 1 exemplifies a case where two robots 10 are installed, and character strings such as “−1” and “−2” are added to the end of the reference numerals to distinguish each robot 10. is doing. In the following description, the same description will be made when a plurality of devices are distinguished.
　搬送室５０は、いわゆるＥＦＥＭ（Equipment　Front　End　Module）であり、清浄なダウンフローの気流を内部に流す局所クリーン化された筐体である。また、搬送室５０は、たとえば、同図のＸ軸方向を長辺とする矩形状であり、かかる長辺には、基板を格納するカセット（図示せず）や、基板の処理室（図示せず）が設けられる。なお、短辺（同図のＹ軸に沿う辺）や、短辺の内側にも、基板の処理室が設けられる場合もある。 The transfer chamber 50 is a so-called EFEM (Equipment Front End Module), and is a locally cleaned case that allows a clean downflow airflow to flow inside. Further, the transfer chamber 50 has, for example, a rectangular shape having a long side in the X-axis direction in the figure, and a cassette (not shown) for storing a substrate and a substrate processing chamber (not shown) are provided on the long side. Is provided. Note that a substrate processing chamber may also be provided on the short side (the side along the Y axis in the figure) or on the inner side of the short side.
　アライナ装置５１は、ロボット１０によって搬送される基板の向きを検知して整える装置であり、ロボット１０によって載置された基板を回転軸まわりに回転させる。そして、図１に示す２台のロボット１０（第１ロボット１０－１および第２ロボット１０－２）は、アライナ装置５１に対してハンドがアクセス可能な位置にそれぞれ配置される。なお、ロボット１０の詳細な構成については、図２および図３を用いて後述する。 The aligner device 51 is a device that detects and arranges the orientation of the substrate transported by the robot 10, and rotates the substrate placed by the robot 10 around the rotation axis. Then, the two robots 10 (first robot 10-1 and second robot 10-2) shown in FIG. 1 are respectively arranged at positions where the hand can access the aligner device 51. The detailed configuration of the robot 10 will be described later with reference to FIGS.
　ここで、ロボット１０に対してアライナ装置５１などの位置を教示する場合、まずは、ロボットシミュレーション装置などを用いてロボット１０の「仮教示」が行われる。「仮教示」とは、後述する「本教示」に先立って行われる粗い精度の教示である。なお、以下では、「仮教示」に対応する教示データを「仮教示データ」と、「本教示」に対応する教示データを「本教示データ」と、それぞれ呼ぶこととする。 Here, when teaching the position of the aligner device 51 or the like to the robot 10, first, “temporary teaching” of the robot 10 is performed using a robot simulation device or the like. The “temporary teaching” is a coarse-accuracy teaching that is performed prior to “main teaching” described later. Hereinafter, the teaching data corresponding to “temporary teaching” will be referred to as “temporary teaching data”, and the teaching data corresponding to “main teaching” will be referred to as “main teaching data”, respectively.
　また、ロボットシミュレーション装置とは、ロボット１０の動作を再現した画像を表示部に表示させることで、ロボット１０とロボット１０の周囲環境とを視認可能としつつ、作業者の入力操作に基づいてロボット１０の教示データを生成する装置のことを指す。 The robot simulation apparatus displays an image reproducing the operation of the robot 10 on the display unit so that the robot 10 and the surrounding environment of the robot 10 can be visually recognized, and the robot 10 is based on the input operation of the operator. The apparatus which produces | generates the teaching data of this.
　かかる「仮教示」が完了すると、「仮教示」が完了したロボット１０を搬送室５０に設置し、実際の動作環境でロボット１０を動作させつつ、仮教示データを補正する「本教示」の作業が行われる。ここで、「本教示」の作業とは、たとえば、精密な治具を配置し、目視確認などによってロボット１０に正確な搬送位置などを教示する手作業を含んだ作業のことを指す。かかる本教示を行うことで、ロボット１０は、実際の動作、すなわち、基板の搬送などの作業動作を正確に行うことができる。 When the “temporary teaching” is completed, the robot 10 that has completed the “temporary teaching” is placed in the transfer chamber 50, and the operation of “main teaching” is performed to correct the temporary teaching data while operating the robot 10 in an actual operating environment. Is done. Here, the “main teaching” operation refers to an operation including a manual operation in which, for example, a precise jig is arranged and the robot 10 is taught with an accurate conveyance position by visual confirmation or the like. By performing the present teaching, the robot 10 can accurately perform actual operations, that is, work operations such as substrate transfer.
　しかしながら、搬送室５０の大きさ、ロボット１０の設置位置や設置向きは、実際の環境では、仮教示における理想的な環境とは異なることが一般的である。実際の環境は、搬送室５０の製造誤差や、ロボット１０の設置誤差の影響のため、理想的な環境からのずれがあるからである。したがって、仮教示ではアライナ装置５１などの目的位置に正確にハンドが到達するようにしていたとしても、実際の環境では、ハンドの到達位置が目的位置からずれてしまう。 However, the size of the transfer chamber 50, the installation position and the installation direction of the robot 10 are generally different from the ideal environment in provisional teaching in an actual environment. This is because the actual environment deviates from the ideal environment due to the effects of manufacturing errors of the transfer chamber 50 and installation errors of the robot 10. Therefore, even if the hand reaches the target position of the aligner device 51 or the like accurately in the temporary teaching, in the actual environment, the hand arrival position is deviated from the target position.
　このため、従来は、それぞれのロボット１０に対して上記した本教示の作業を行う必要があり、教示作業に関する作業負荷が高いという問題があった。たとえば、図１のように２台のロボット１０がある場合、従来は、ロボット１０－１に対して仮教示および本教示を行うとともに、ロボット１０－２に対しても仮教示および本教示を行っていた。 For this reason, conventionally, it has been necessary to perform the above-described teaching operation for each robot 10, and there is a problem that the work load related to the teaching operation is high. For example, when there are two robots 10 as shown in FIG. 1, conventionally, the temporary teaching and the main teaching are performed for the robot 10-1, and the temporary teaching and the main teaching are also performed for the robot 10-2. It was.
　そこで、実施形態に係る教示システム１では、本教示が完了した第１ロボット１０－１のハンドで、本教示が完了していない第２ロボット１０－２のハンドを検出することとした。そして、検出結果に基づいて本教示が完了していない第２ロボット１０－２の仮教示データを補正することとした。さらに、補正が完了した仮教示データを本教示データとして取り扱うこととした。 Therefore, in the teaching system 1 according to the embodiment, the hand of the second robot 10-2 that has not completed the teaching is detected from the hand of the first robot 10-1 that has completed the teaching. Then, based on the detection result, the temporary teaching data of the second robot 10-2 for which the present teaching has not been completed is corrected. Furthermore, the provisional teaching data whose correction has been completed is handled as the present teaching data.
　具体的には、図１に示すように、第２ロボット１０－２のハンドを仮教示に基づいて被検査位置へ移動する（ステップＳ１０）。たとえば、被検査位置とは、アライナ装置５１における回転中心の延長線上に設定される目標位置５１Ｃである。 Specifically, as shown in FIG. 1, the hand of the second robot 10-2 is moved to the inspection position based on the temporary teaching (step S10). For example, the inspection position is a target position 51 </ b> C set on an extension line of the rotation center in the aligner device 51.
　次に、本教示が完了した第１ロボット１０－１のハンドで第２ロボット１０－２のハンドを検出する（ステップＳ２０）。たとえば、教示システム１は、第２ロボット１０－２の目標位置５１Ｃに対するＸ軸方向のずれ、Ｙ軸方向のずれおよびＺ軸方向のずれを検出することができる。なお、図１には、第１ロボット１０－１に設けられるセンサの光軸２００を参考のため示している。かかるセンサの詳細については図３を用いて後述する。 Next, the hand of the second robot 10-2 is detected by the hand of the first robot 10-1 that has completed this teaching (step S20). For example, the teaching system 1 can detect a deviation in the X-axis direction, a deviation in the Y-axis direction, and a deviation in the Z-axis direction with respect to the target position 51C of the second robot 10-2. In FIG. 1, an optical axis 200 of a sensor provided in the first robot 10-1 is shown for reference. Details of such a sensor will be described later with reference to FIG.
　また、教示システム１は、第２ロボット１０－２のＸ軸まわりの回転角のずれ、Ｙ軸まわりの回転角のずれおよびＺ軸まわりの回転角のずれについても検出することができる。なお、これらの検出手順の詳細については、図５Ａ等を用いて後述することとする。 In addition, the teaching system 1 can also detect the deviation of the rotation angle around the X axis, the deviation of the rotation angle around the Y axis, and the deviation of the rotation angle around the Z axis of the second robot 10-2. Details of these detection procedures will be described later with reference to FIG. 5A and the like.
　つづいて、教示システム１では、ステップＳ２０における検出結果に基づいて第２ロボット１０－２の仮教示データを補正する（ステップＳ３０）。そして、補正後の仮教示データを本教示データとして取り扱う。 Subsequently, the teaching system 1 corrects the temporary teaching data of the second robot 10-2 based on the detection result in step S20 (step S30). The corrected temporary teaching data is handled as the main teaching data.
　このように、教示システム１では、２台以上のロボット１０がある場合であっても、最初の１台のロボット１０（図１では、第１ロボット１０－１）に対して本教示の作業を行えば、その他のロボット１０（図１では、第２ロボット１０－２）に対しては、上記した仮教示の補正手順が自動的に実行され、その他のロボット１０の本教示を自動的に完了させることができる。 As described above, in the teaching system 1, even when there are two or more robots 10, the teaching operation is performed on the first robot 10 (the first robot 10-1 in FIG. 1). If this is done, the above temporary teaching correction procedure is automatically executed for the other robot 10 (second robot 10-2 in FIG. 1), and the main teaching of the other robot 10 is automatically completed. Can be made.
　すなわち、教示システム１では、その他のロボット１０に対して本教示に関する手作業を行う必要がない。したがって、教示システム１によれば、簡易な構成で複数のロボット１０を効率的に教示することができる。 That is, in the teaching system 1, it is not necessary to perform manual work related to the present teaching on the other robots 10. Therefore, according to the teaching system 1, a plurality of robots 10 can be efficiently taught with a simple configuration.
　なお、図１では、アライナ装置５１を、２台のロボット１０（第１ロボット１０－１および第２ロボット１０－２）の双方がアクセス可能な位置に配置する場合を示したが、アライナ装置５１を実際には配置しなくてもよい。すなわち、図１に示した目標位置５１Ｃを、単に３次元の座標として予め定めておけば足りる。つまり、第１ロボット１０－１が第２ロボット１０－２のハンドを検知する際に使用する空間（検査空間）を確保し、かかる空間内に目標位置を定めておけばよい。 Although FIG. 1 shows the case where the aligner device 51 is arranged at a position accessible by both of the two robots 10 (the first robot 10-1 and the second robot 10-2), the aligner device 51 is shown. May not actually be arranged. That is, it is sufficient to simply set the target position 51C shown in FIG. 1 as three-dimensional coordinates in advance. That is, a space (inspection space) to be used when the first robot 10-1 detects the hand of the second robot 10-2 may be secured, and a target position may be set in the space.
　次に、ロボット１０の構成について図２を用いて説明する。図２は、ロボット１０の斜視図である。同図に示すように、ロボット１０は、本体部１０ａと、昇降軸１０ｂと、第１アーム１１と、第２アーム１２と、ハンド１３とを備える。なお、図２には、１つのハンド１３を備えるロボット１０を例示しているが、第３軸Ａ３について同軸に２つ以上のハンド１３を設けることとしてもよい。また、ロボット１０が、第１アーム１１、第２アーム１２および１つまたは複数のハンド１３を２組以上備えることとしてもよい。 Next, the configuration of the robot 10 will be described with reference to FIG. FIG. 2 is a perspective view of the robot 10. As shown in the figure, the robot 10 includes a main body 10 a, a lifting shaft 10 b, a first arm 11, a second arm 12, and a hand 13. In addition, although the robot 10 provided with the one hand 13 is illustrated in FIG. 2, it is good also as providing the two or more hands 13 coaxially about 3rd axis | shaft A3. The robot 10 may include two or more sets of the first arm 11, the second arm 12, and one or more hands 13.
　本体部１０ａは、搬送室５０（図１参照）の床面等に固定され、昇降軸１０ｂを昇降させる昇降機構（図示せず）を内蔵する。昇降軸１０ｂは、第１アーム１１の基端部を第１軸Ａ１まわりに旋回可能に支持するとともに、第１軸Ａ１に沿って昇降する。なお、昇降軸１０ｂ自体を第１軸Ａ１まわりに回転させることとしてもよい。 The main body 10a is fixed to the floor surface of the transfer chamber 50 (see FIG. 1) and incorporates an elevating mechanism (not shown) for elevating the elevating shaft 10b. The elevating shaft 10b supports the base end portion of the first arm 11 so as to be pivotable about the first axis A1, and moves up and down along the first axis A1. The lifting shaft 10b itself may be rotated around the first axis A1.
　第１アーム１１は、第２アーム１２の基端部を第２軸Ａ２まわりに旋回可能に先端部で支持する。第２アーム１２は、ハンド１３の基端部を第３軸Ａ３まわりに旋回可能に先端部で支持する。 The first arm 11 supports the proximal end portion of the second arm 12 at the distal end portion so as to be rotatable around the second axis A2. The second arm 12 supports the proximal end portion of the hand 13 at the distal end portion so as to be pivotable about the third axis A3.
　このように、ロボット１０は、第１アーム１１、第２アーム１２およびハンド１３の３リンクの水平多関節ロボットである。また、ロボット１０は、上記したように、昇降機構を有しているので、搬送室５０内の任意の位置にアクセスすることができる。 As described above, the robot 10 is a three-link horizontal articulated robot including the first arm 11, the second arm 12 and the hand 13. Moreover, since the robot 10 has the lifting mechanism as described above, it can access an arbitrary position in the transfer chamber 50.
　また、図２に示すように、たとえば、第１軸Ａ１と、本体部１０ａの底面との交点を、ロボット１０の設置位置Ａ１Ｂと呼ぶこととする。図１に示した教示システム１では、設置位置Ａ１Ｂの理想的な位置からのずれを検出する。検出されるずれとしては、Ｘ軸方向、Ｙ軸方向およびＺ軸方向のずれがある。 Further, as shown in FIG. 2, for example, the intersection of the first axis A1 and the bottom surface of the main body 10a is referred to as an installation position A1B of the robot 10. In the teaching system 1 shown in FIG. 1, a deviation from the ideal position of the installation position A1B is detected. The detected displacement includes a displacement in the X-axis direction, the Y-axis direction, and the Z-axis direction.
　また、図１に示した教示システム１では、ロボット１０の設置向き（たとえば、第１軸Ａ１の向き）の理想的な向き（たとえば、Ｚ軸）からのずれ角を検出する。検出されるずれとしては、Ｘ軸まわりのずれ（図２に示すθＸ）、Ｙ軸まわりのずれ（同じくθＹ）およびＺ軸まわりのずれ（同じくθＺ）がある。 Further, in the teaching system 1 shown in FIG. 1, a deviation angle from an ideal direction (for example, the Z axis) of the installation direction of the robot 10 (for example, the direction of the first axis A1) is detected. The detected shift includes a shift around the X axis (θX shown in FIG. 2), a shift around the Y axis (also θY), and a shift around the Z axis (also θZ).
　なお、図２では、２つのアーム（第１アーム１１および第２アーム１２）を備えたロボット１０を例示したが、アームの個数は１つでもよく、３つ以上であってもよい。 In FIG. 2, the robot 10 including two arms (the first arm 11 and the second arm 12) is illustrated, but the number of arms may be one or three or more.
　次に、図２に示したハンド１３について図３を用いてさらに詳細に説明する。図３は、ハンド１３の上面模式図である。 Next, the hand 13 shown in FIG. 2 will be described in more detail with reference to FIG. FIG. 3 is a schematic top view of the hand 13.
　図３に示すように、ハンド１３は、基部１３ａと、フォーク部１３ｂとを備える。基部１３ａの基端側は、第３軸Ａ３まわりに旋回可能に第２アーム１２（図２参照）によって支持される。フォーク部１３ｂは、基部１３ａの先端側に設けられ、先端側が二股にわかれている。以下では、かかる二股にわかれた一方を第１枝部１３ｂａ、他方を第２枝部１３ｂｂと記載する。 As shown in FIG. 3, the hand 13 includes a base portion 13a and a fork portion 13b. The base end side of the base portion 13a is supported by the second arm 12 (see FIG. 2) so as to be rotatable around the third axis A3. The fork portion 13b is provided on the distal end side of the base portion 13a, and the distal end side is divided into two forks. Hereinafter, one of the two branches is referred to as a first branch portion 13ba and the other is referred to as a second branch portion 13bb.
　そして、第１枝部１３ｂａおよび第２枝部１３ｂｂの各先端側には、基板１００の収納状態の検査に用いられるセンサ１３ｃが設けられる。ここで、センサ１３ｃは、たとえば、光学センサであり、一方が投光部１３ｃａ、他方が受光部１３ｃｂである。受光部１３ｃｂは、投光部１３ｃａが発した光を検出する。センサ１３ｃは、かかる光が障害物によって遮られるか否かを検知する。 And the sensor 13c used for the test | inspection of the accommodation state of the board | substrate 100 is provided in each front end side of 1st branch part 13ba and 2nd branch part 13bb. Here, the sensor 13c is, for example, an optical sensor, and one is a light projecting unit 13ca and the other is a light receiving unit 13cb. The light receiving unit 13cb detects light emitted from the light projecting unit 13ca. The sensor 13c detects whether or not the light is blocked by an obstacle.
　なお、センサ１３ｃは、いわゆるマッピングセンサであり、ハンド１３に既に設けられている場合も多いことから、新たなセンサを設置する必要がない。したがって、新たなセンサの設置に伴うコストを削減することができる。 Note that the sensor 13c is a so-called mapping sensor, and is often already provided in the hand 13, so there is no need to install a new sensor. Therefore, the cost associated with the installation of a new sensor can be reduced.
　また、かかるセンサ１３ｃは、図１に示したように、２台のロボット１０の教示を行う場合には、第１ロボット１０－１のハンド１３が備えていれば足りる。すなわち、第２ロボット１０－２のハンド１３には、センサ１３ｃは不要である。 Further, as shown in FIG. 1, the sensor 13c is sufficient if the hand 13 of the first robot 10-1 is provided when teaching the two robots 10. That is, the sensor 13c is not necessary for the hand 13 of the second robot 10-2.
　また、図３に示すように、ハンド１３によって保持される基板１００の中心に対応する位置は、ハンド１３の基準位置１３Ｃである。そして、たとえば、第３軸Ａ３と基準位置１３Ｃとを結ぶ線が、ハンド１３の向きを示すハンド中心線１３ＣＬである。 Further, as shown in FIG. 3, the position corresponding to the center of the substrate 100 held by the hand 13 is a reference position 13 </ b> C of the hand 13. For example, a line connecting the third axis A3 and the reference position 13C is a hand center line 13CL indicating the direction of the hand 13.
　なお、ハンド中心線１３ＣＬは、ハンド１３の向きを示すものであれば足りる。たとえば、第３軸Ａ３のかわりに設定されるハンド１３上の任意の位置と、ハンド１３上の任意の基準位置１３Ｃとを結ぶ線をハンド中心線１３ＣＬとすることとしてもよい。ここで、ハンド１３は、基板１００を把持する把持機構を備えるものとする。また、ハンド１３は、把持機構のかわりに吸着機構などの保持機構を備えることとしてもよい。 The hand center line 13CL is sufficient if it indicates the direction of the hand 13. For example, a line connecting an arbitrary position on the hand 13 set in place of the third axis A3 and an arbitrary reference position 13C on the hand 13 may be set as the hand center line 13CL. Here, it is assumed that the hand 13 includes a gripping mechanism that grips the substrate 100. The hand 13 may include a holding mechanism such as a suction mechanism instead of the gripping mechanism.
　次に、教示システム１の構成について図４を用いて説明する。図４は、教示システム１のブロック図である。なお、同図には、図１に示したように、教示システム１が、２台のロボット１０と、各ロボット１０の動作制御をそれぞれ行う２台のコントローラ２０とを備える場合を示している。なお、１台のコントローラ２０で、２台のロボット１０の動作制御を行うこととしてもよい。 Next, the configuration of the teaching system 1 will be described with reference to FIG. FIG. 4 is a block diagram of the teaching system 1. In FIG. 1, as shown in FIG. 1, the teaching system 1 includes two robots 10 and two controllers 20 each for controlling the operation of each robot 10. Note that the operation control of the two robots 10 may be performed by one controller 20.
　図４に示すように、第１ロボット１０－１は、第１コントローラ２０－１に接続されている。また、第２ロボット１０－２は、第２コントローラ２０－２に接続されている。また、第１コントローラ２０－１は、第２コントローラ２０－２に接続されている。 As shown in FIG. 4, the first robot 10-1 is connected to the first controller 20-1. The second robot 10-2 is connected to the second controller 20-2. The first controller 20-1 is connected to the second controller 20-2.
　なお、図４では、説明をわかりやすくするために、第１コントローラ２０－１および第２コントローラ２０－２の制御部２１内の最小限の構成、記憶部２２に記憶される最小限の情報をそれぞれ示している。しかし、第１コントローラ２０－１および第２コントローラ２０－２として同一の構成のコントローラ２０を用いることとしてもよい。この点については、図１０を用いて後述する。 In FIG. 4, for the sake of easy understanding, the minimum configuration in the control unit 21 of the first controller 20-1 and the second controller 20-2 and the minimum information stored in the storage unit 22 are shown. Each is shown. However, the controller 20 having the same configuration may be used as the first controller 20-1 and the second controller 20-2. This will be described later with reference to FIG.
　まず、第１コントローラ２０－１の構成について説明する。図４に示すように、第１コントローラ２０－１は、制御部２１と、記憶部２２とを備える。制御部２１は、検出指示部２１ａと、動作制御部２１ｂと、取得部２１ｃとを備える。また、記憶部２２は、本教示データ２２ａを記憶する。 First, the configuration of the first controller 20-1 will be described. As shown in FIG. 4, the first controller 20-1 includes a control unit 21 and a storage unit 22. The control unit 21 includes a detection instruction unit 21a, an operation control unit 21b, and an acquisition unit 21c. The storage unit 22 stores the present teaching data 22a.
　ここで、第１コントローラ２０－１は、たとえば、ＣＰＵ（Central　Processing　Unit）、ＲＯＭ（Read　Only　Memory）、ＲＡＭ（Random　Access　Memory）、ＨＤＤ（Hard　Disk　Drive）、入出力ポートなどを有するコンピュータや各種の回路を含む。 Here, the first controller 20-1 is, for example, a computer having a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), a HDD (Hard Disk Drive), an input / output port, and the like. Circuit.
　コンピュータのＣＰＵは、たとえば、ＲＯＭに記憶されたプログラムを読み出して実行することによって、検出指示部２１ａ、動作制御部２１ｂおよび取得部２１ｃとして機能する。 The CPU of the computer functions as the detection instruction unit 21a, the operation control unit 21b, and the acquisition unit 21c, for example, by reading and executing a program stored in the ROM.
　また、制御部２１の検出指示部２１ａ、動作制御部２１ｂおよび取得部２１ｃの少なくともいずれか一つまたは全部をＡＳＩＣ（Application　Specific　Integrated　Circuit）やＦＰＧＡ（Field　Programmable　Gate　Array）等のハードウェアで構成することもできる。 In addition, at least one or all of the detection instruction unit 21a, the operation control unit 21b, and the acquisition unit 21c of the control unit 21 are configured by hardware such as ASIC (Application Specific Integrated Circuit) or FPGA (Field Programmable Gate Array). You can also.
　また、記憶部２２は、たとえば、ＲＡＭやＨＤＤに対応する。ＲＡＭやＨＤＤは、本教示データ２２ａを記憶することができる。なお、第１コントローラ２０－１は、有線や無線のネットワークで接続された他のコンピュータや可搬型記録媒体を介して上記したプログラムや各種情報を取得することとしてもよい。 The storage unit 22 corresponds to, for example, a RAM or an HDD. The RAM and HDD can store the teaching data 22a. Note that the first controller 20-1 may acquire the above-described program and various types of information via another computer or a portable recording medium connected via a wired or wireless network.
　制御部２１は、本教示データ２２ａに基づいて第１ロボット１０－１の動作制御を行う。また、制御部２１は、第１ロボット１０－１のハンド１３で、第２ロボット１０－２のハンド１３を検出する動作を、第１ロボット１０－１に行わせる。 The control unit 21 controls the operation of the first robot 10-1 based on the teaching data 22a. Further, the control unit 21 causes the first robot 10-1 to perform an operation of detecting the hand 13 of the second robot 10-2 with the hand 13 of the first robot 10-1.
　検出指示部２１ａは、第１ロボット１０－１に、第２ロボット１０－２のハンド１３を検出させる指示を、動作制御部２１ｂに対して行う。たとえば、検出指示部２１ａは、第１ロボット１０－１のハンド１３が、第２ロボット１０－２に接触せず、かつ、第２ロボット１０－２のハンド１３の向きや位置を検出可能な範囲で移動するように指示する。 The detection instruction unit 21a instructs the operation control unit 21b to cause the first robot 10-1 to detect the hand 13 of the second robot 10-2. For example, the detection instruction unit 21a can detect the direction and position of the hand 13 of the second robot 10-2 without the hand 13 of the first robot 10-1 contacting the second robot 10-2. Instruct to move.
　動作制御部２１ｂは、記憶部２２の本教示データ２２ａに基づいて第１ロボット１０－１における各軸に対応するアクチュエータ（図示せず）に指示することで、第１ロボット１０－１を動作させる。また、動作制御部２１ｂは、アクチュエータにおけるエンコーダ値を用いてフィードバック制御を行うなどして第１ロボット１０－１の動作精度を向上させる。 The operation control unit 21b operates the first robot 10-1 by instructing an actuator (not shown) corresponding to each axis in the first robot 10-1 based on the main teaching data 22a of the storage unit 22. . Further, the motion control unit 21b improves the motion accuracy of the first robot 10-1 by performing feedback control using an encoder value in the actuator.
　取得部２１ｃは、第１ロボット１０－１のセンサ１３ｃ（図３参照）の出力値に基づき、第２ロボット１０－２のハンド１３の位置情報を取得する。また、取得部２１ｃは、取得した位置情報を第２コントローラ２０－２へ送信する。 The acquisition unit 21c acquires the position information of the hand 13 of the second robot 10-2 based on the output value of the sensor 13c (see FIG. 3) of the first robot 10-1. In addition, the acquisition unit 21c transmits the acquired position information to the second controller 20-2.
　本教示データ２２ａは、上記した本教示の作業を経て生成された教示データである。なお、本教示データ２２ａは、ハンド１３の移動軌跡をはじめとするロボット１０の動作を規定するプログラムである「ジョブ」を含んだ情報である。 The main teaching data 22a is teaching data generated through the above-described main teaching operation. The teaching data 22 a is information including a “job” that is a program that defines the operation of the robot 10 including the movement trajectory of the hand 13.
　次に、第２コントローラ２０－２の構成について説明する。なお、第１コントローラ２０－１と同様の構成には同一の符号を付し、説明を省略するか簡単な説明にとどめることとする。 Next, the configuration of the second controller 20-2 will be described. The same components as those of the first controller 20-1 are denoted by the same reference numerals, and the description thereof will be omitted or only a brief description will be given.
　図４に示すように、第２コントローラ２０－２は、制御部２１と、記憶部２２とを備える。制御部２１は、補正部２１ｄと、動作制御部２１ｂとを備える。また、記憶部２２は、本教示データ２２ａと、仮教示データ２２ｂとを記憶する。 As shown in FIG. 4, the second controller 20-2 includes a control unit 21 and a storage unit 22. The control unit 21 includes a correction unit 21d and an operation control unit 21b. The storage unit 22 stores the main teaching data 22a and the temporary teaching data 22b.
　補正部２１ｄは、第１コントローラ２０－１から受け取った情報に基づき、仮教示データ２２ｂを補正する。そして、補正部２１ｄは、補正後の仮教示データ２２ｂを、本教示データ２２ａとして記憶部２２に記憶させる。 The correction unit 21d corrects the temporary teaching data 22b based on the information received from the first controller 20-1. Then, the correction unit 21d stores the corrected temporary teaching data 22b in the storage unit 22 as the main teaching data 22a.
　具体的には、補正部２１ｄは、第１コントローラ２０－１から受け取った第２ロボット１０－２のハンド１３の位置情報に基づき、検出したハンド１３の位置および姿勢と、理想的な位置および姿勢とのずれを算出する。そして、補正部２１ｄは、算出したずれ量が０となるように、仮教示データ２２ｂを補正することで、本教示データ２２ａを生成する。 Specifically, the correcting unit 21d detects the position and posture of the detected hand 13 and the ideal position and posture based on the position information of the hand 13 of the second robot 10-2 received from the first controller 20-1. The deviation from is calculated. Then, the correcting unit 21d generates the main teaching data 22a by correcting the temporary teaching data 22b so that the calculated deviation amount becomes zero.
　なお、第２コントローラ２０－２の動作制御部２１ｂは、第１ロボット１０－１が第２ロボット１０－２のハンド１３を検出する際には、仮教示データ２２ｂに基づいて第２ロボット１０－２の動作制御を行う。また、第２コントローラ２０－２の動作制御部２１ｂは、本教示データ２２ａが生成された後には、本教示データ２２ａに基づいて第２ロボット１０－２の動作制御を行う。 When the first robot 10-1 detects the hand 13 of the second robot 10-2, the operation controller 21b of the second controller 20-2 uses the second robot 10- based on the temporary teaching data 22b. 2 is controlled. The operation controller 21b of the second controller 20-2 controls the operation of the second robot 10-2 based on the main teaching data 22a after the main teaching data 22a is generated.
　次に、具体的な検出手順について、図５Ａ～図９Ｃを用いて説明する。なお、以下の説明では、図１に示した第１ロボット１０－１のハンド１３を第１ハンド１３－１と、第２ロボット１０－２のハンド１３を第２ハンド１３－２と、それぞれ呼ぶこととする。 Next, a specific detection procedure will be described with reference to FIGS. 5A to 9C. In the following description, the hand 13 of the first robot 10-1 shown in FIG. 1 is called the first hand 13-1, and the hand 13 of the second robot 10-2 is called the second hand 13-2. I will do it.
　また、図５Ａ～図９Ｃでは、第１ハンド１３－１におけるセンサ１３ｃ（図３参照）の光軸の位置を、光軸２００として適宜示すこととする。また、図５Ａ～図９Ｃでは、第２ハンド１３－２が、仮教示データ２２ｂ（図４参照）に基づき、図１に示した目標位置５１Ｃへ移動済みの状態を示すこととする。 5A to 9C, the position of the optical axis of the sensor 13c (see FIG. 3) in the first hand 13-1 is appropriately indicated as the optical axis 200. In FIGS. 5A to 9C, it is assumed that the second hand 13-2 has been moved to the target position 51C shown in FIG. 1 based on the temporary teaching data 22b (see FIG. 4).
　図５Ａは、Ｚ軸方向のずれを検出する手順を示す説明図であり、図５Ｂは、Ｘ軸方向のずれを検出する手順を示す説明図である。 FIG. 5A is an explanatory diagram illustrating a procedure for detecting a shift in the Z-axis direction, and FIG. 5B is an explanatory diagram illustrating a procedure for detecting a shift in the X-axis direction.
　まず、Ｚ軸方向のずれを検出する手順について説明する。図５Ａに示すように、第１ハンド１３－１は、まず、Ｘ軸方向について光軸２００が第２ハンド１３－２のフォーク部１３ｂ（図３参照）に重なり、かつ、Ｙ軸方向について第２ハンド１３－２と干渉しない位置（たとえば、図５Ｂ参照）へ移動する。そして、図５Ａに示すように、第１ハンド１３－１は、かかる位置からＺ軸の負方向へ向かう向き５０１へ移動する。 First, a procedure for detecting a deviation in the Z-axis direction will be described. As shown in FIG. 5A, in the first hand 13-1, the optical axis 200 first overlaps the fork portion 13b (see FIG. 3) of the second hand 13-2 in the X-axis direction, and the first hand 13-1 Move to a position where the two hands 13-2 do not interfere (for example, see FIG. 5B). Then, as shown in FIG. 5A, the first hand 13-1 moves from this position in the direction 501 in the negative direction of the Z axis.
　かかる動作によって、第２ハンド１３－２のＺ座標を検出することができる。具体的には、第１ハンド１３－１が向き５０１へ移動する際に、光軸２００が第２ハンド１３－２によって遮られる範囲に第２ハンド１３－２が存在していることになる。したがって、かかる範囲の両端のいずれかや、かかる範囲の中点などを、第２ハンド１３－２のＺ座標とすることができる。 With this operation, the Z coordinate of the second hand 13-2 can be detected. Specifically, when the first hand 13-1 moves in the direction 501, the second hand 13-2 exists in a range where the optical axis 200 is blocked by the second hand 13-2. Therefore, either the both ends of the range, the midpoint of the range, or the like can be used as the Z coordinate of the second hand 13-2.
　そして、第２ハンド１３－２のＺ座標と、目標位置５１ＣのＺ座標との差分が、第２ハンド１３－２のＺ軸方向のずれとなる。上記した補正部２１ｄ（図４参照）は、このようにして算出したＺ軸方向のずれを用いて仮教示データ２２ｂを補正することになる。 Then, the difference between the Z coordinate of the second hand 13-2 and the Z coordinate of the target position 51C is a shift in the Z-axis direction of the second hand 13-2. The correction unit 21d (see FIG. 4) corrects the temporary teaching data 22b by using the deviation in the Z-axis direction thus calculated.
　なお、図５Ａでは、第１ハンド１３－１が、第２ハンド１３－２よりもＺ軸の正方向側から、Ｚ軸の負方向へ移動する場合を示したが、第１ハンド１３－１が、第２ハンド１３－２よりもＺ軸の負方向側から、Ｚ軸の正方向へ移動するようにしてもよい。 FIG. 5A shows a case where the first hand 13-1 moves from the positive side of the Z axis to the negative direction of the Z axis from the second hand 13-2. However, the second hand 13-2 may move in the positive direction of the Z axis from the negative direction side of the Z axis.
　次に、Ｘ軸方向のずれを検出する手順について説明する。図５Ｂに示すように、第１ハンド１３－１は、まず、Ｘ軸方向およびＺ軸方向について光軸２００が第２ハンド１３－２のフォーク部１３ｂ（図３参照）に重なり、かつ、Ｙ軸方向について第２ハンド１３－２と干渉しない位置へ移動する。そして、図５Ｂに示すように、第１ハンド１３－１は、かかる位置からＸ軸の負方向へ向かう向き５０２へ移動する。 Next, a procedure for detecting a deviation in the X-axis direction will be described. As shown in FIG. 5B, in the first hand 13-1, the optical axis 200 first overlaps the fork portion 13b (see FIG. 3) of the second hand 13-2 in the X-axis direction and the Z-axis direction, and Y It moves to a position where it does not interfere with the second hand 13-2 in the axial direction. Then, as shown in FIG. 5B, the first hand 13-1 moves from this position in a direction 502 toward the negative direction of the X axis.
　かかる動作によって、第２ハンド１３－２のＸ座標を検出することができる。具体的には、第１ハンド１３－１が向き５０２へ移動する際に、光軸２００が第２ハンド１３－２によって遮られた状態から、遮られない状態へ変化した位置が、第２ハンド１３－２の先端の位置となる。第２ハンド１３－２の各部のサイズは既知であるので、かかる先端の位置から、第２ハンド１３－２の基準位置１３Ｃ（図３参照）を求めることができる。 With this operation, the X coordinate of the second hand 13-2 can be detected. Specifically, when the first hand 13-1 moves in the direction 502, the position where the optical axis 200 is changed from the state where it is blocked by the second hand 13-2 to the state where it is not blocked is the second hand. This is the tip of 13-2. Since the size of each part of the second hand 13-2 is known, the reference position 13C (see FIG. 3) of the second hand 13-2 can be obtained from the position of the tip.
　そして、第２ハンド１３－２における基準位置１３ＣのＸ座標と、目標位置５１ＣのＸ座標との差分が、第２ハンド１３－２のＸ軸方向のずれとなる。上記した補正部２１ｄ（図４参照）は、このようにして算出したＸ軸方向のずれを用いて仮教示データ２２ｂを補正することになる。 Then, the difference between the X coordinate of the reference position 13C in the second hand 13-2 and the X coordinate of the target position 51C is a shift in the X axis direction of the second hand 13-2. The correction unit 21d (see FIG. 4) corrects the temporary teaching data 22b using the X-axis direction deviation calculated in this way.
　なお、図５Ｂでは、第１ハンド１３－１が第２ハンド１３－２の第１枝部１３ｂａを検出する場合を示したが、第２枝部１３ｂｂを検出することとしてもよい。また、第１ハンド１３－１のＺ軸方向の位置については、図５Ａを用いて説明した手順で取得した第２ハンド１３－２のＺ座標に基づいて決定することとしてもよい。 Although FIG. 5B shows the case where the first hand 13-1 detects the first branch portion 13ba of the second hand 13-2, the second branch portion 13bb may be detected. Further, the position of the first hand 13-1 in the Z-axis direction may be determined based on the Z coordinate of the second hand 13-2 acquired by the procedure described with reference to FIG. 5A.
　また、図５Ｂでは、第１ハンド１３－１が第２ハンド１３－２から遠ざかる向きに移動する場合を示したが、第２ハンド１３－２に近づく向きに移動することとしてもよい。なお、この場合、光軸２００が第２ハンド１３－２によってはじめて遮られた位置が、第２ハンド１３－２の先端の位置となる。 5B shows the case where the first hand 13-1 moves in a direction away from the second hand 13-2, but may move in a direction approaching the second hand 13-2. In this case, the position where the optical axis 200 is blocked for the first time by the second hand 13-2 is the position of the tip of the second hand 13-2.
　次に、Ｙ軸方向のずれを検出する手順について図６Ａおよび図６Ｂを用いて説明する。図６Ａおよび図６Ｂは、Ｙ軸方向のずれを検出する手順を示す説明図その１およびその２である。なお、図６Ａには、目標位置５１Ｃ（図１参照）に、第２ハンド１３－２の基準位置１３Ｃをあわせた場合、すなわち、基準位置１３Ｃに対するずれがない場合の第２ハンド１３－２の外形１３Ａを参考のため、破線で示している。 Next, a procedure for detecting a deviation in the Y-axis direction will be described with reference to FIGS. 6A and 6B. 6A and 6B are explanatory diagrams 1 and 2 showing a procedure for detecting a deviation in the Y-axis direction. In FIG. 6A, when the reference position 13C of the second hand 13-2 is aligned with the target position 51C (see FIG. 1), that is, when there is no deviation from the reference position 13C, The outer shape 13A is indicated by a broken line for reference.
　図６Ａに示すように、第１ハンド１３－１は、まず、第２ハンド１３－２に干渉せず、かつ、光軸２００が第２ハンド１３－２によって遮られる位置へ移動する。ここで、第１ハンド１３－１は、第１ハンド１３－１のハンド中心線１３ＣＬと、Ｘ軸とのなす角度が角度αとなる姿勢をとる。そして、第１ハンド１３－１は、角度αを保ったまま、同図に示すハンド中心線１３ＣＬに沿った向き５０３へ移動する。 As shown in FIG. 6A, the first hand 13-1 first moves to a position where it does not interfere with the second hand 13-2 and the optical axis 200 is blocked by the second hand 13-2. Here, the first hand 13-1 takes a posture in which the angle formed by the hand center line 13CL of the first hand 13-1 and the X axis is an angle α. Then, the first hand 13-1 moves in the direction 503 along the hand center line 13CL shown in FIG.
　ここで、第１ハンド１３－１が向き５０３へ移動する際に、光軸２００が第２ハンド１３－２によって遮られた状態から、遮られない状態へ変化した場合の第１ハンド１３－１上の点を点６０２とする。また、破線で示した外形１３Ａの対応する点を点６０１とする。また、点６０２を通り光軸２００と平行な線を線６０２Ｌとし、点６０１を通り線６０２Ｌと平行な線を線６０１Ｌとする。 Here, when the first hand 13-1 moves in the direction 503, the first hand 13-1 when the optical axis 200 changes from the state blocked by the second hand 13-2 to the state not blocked. Let the upper point be a point 602. In addition, a point corresponding to the outer shape 13A indicated by a broken line is a point 601. A line passing through the point 602 and parallel to the optical axis 200 is defined as a line 602L, and a line passing through the point 601 and parallel to the line 602L is defined as a line 601L.
　また、図６Ｂに示すように、点６０２を通り線６０１Ｌと垂直な線と、線６０１Ｌとの交点を点６０３とすると、点６０１、点６０２および点６０３を頂点とする直角三角形を得ることができる。 Also, as shown in FIG. 6B, if a point 603 is an intersection of a line 601L passing through the point 602 and the line 601L, a right triangle having points 601, 602, and 603 as vertices can be obtained. it can.
　ここで、点６０１の位置は、目標位置５１Ｃおよび第２ハンド１３－２の各部のサイズから求めることができるので、既知である。また、点６０２と点６０３との距離をＬ１とすると、Ｌ１は、第１ハンド１３－１による第２ハンド１３－２の検知結果から得ることができる。これは、Ｌ１は、線６０１Ｌと線６０２Ｌとの距離ともいえ、線６０１Ｌの位置が既知であり、線６０２Ｌの位置も検知結果から得られるためである。 Here, the position of the point 601 is known because it can be obtained from the target position 51C and the size of each part of the second hand 13-2. If the distance between the point 602 and the point 603 is L1, L1 can be obtained from the detection result of the second hand 13-2 by the first hand 13-1. This is because L1 is the distance between the line 601L and the line 602L, and the position of the line 601L is known, and the position of the line 602L is also obtained from the detection result.
　また、角度αについても既知であるので、点６０１と点６０２との距離、すなわち、Ｙ軸方向のずれをＹ１とすると、「Ｙ１＝Ｌ１／ｓｉｎα」なる計算式で、Ｙ１を求めることができる。上記した補正部２１ｄ（図４参照）は、このようにして算出したＹ軸方向のずれを用いて仮教示データ２２ｂを補正することになる。 Further, since the angle α is also known, if the distance between the points 601 and 602, that is, the displacement in the Y-axis direction is Y1, Y1 can be obtained by a calculation formula “Y1 = L1 / sin α”. . The correction unit 21d (see FIG. 4) corrects the temporary teaching data 22b using the deviation in the Y-axis direction thus calculated.
　なお、図６Ａでは、第１ハンド１３－１が第２ハンド１３－２の第１枝部１３ｂａを検出する場合を示したが、第２枝部１３ｂｂを検出することとしてもよい。また、図６Ａでは、第１ハンド１３－１が第２ハンド１３－２から遠ざかる向きに移動する場合を示したが、第１ハンド１３－１が第２ハンド１３－２に近づく向きに移動することとしてもよい。 Although FIG. 6A shows the case where the first hand 13-1 detects the first branch portion 13ba of the second hand 13-2, the second branch portion 13bb may be detected. FIG. 6A shows the case where the first hand 13-1 moves away from the second hand 13-2. However, the first hand 13-1 moves closer to the second hand 13-2. It is good as well.
　次に、Ｘ軸まわりのずれを検出する手順について、図７Ａ、図７Ｂおよび図７Ｃを用いて説明する。図７Ａ、図７Ｂおよび図７Ｃは、Ｘ軸まわりのずれを検出する手順を示す説明図その１、その２およびその３である。なお、図７Ａ～図７Ｃでは、第２ハンド１３－２が、Ｘ軸と平行な線まわりにＸＹ平面から傾いた場合を示している。 Next, a procedure for detecting a deviation around the X axis will be described with reference to FIGS. 7A, 7B, and 7C. 7A, 7B, and 7C are explanatory diagrams 1, 2, and 3 showing a procedure for detecting a shift around the X axis. 7A to 7C show a case where the second hand 13-2 is inclined from the XY plane around a line parallel to the X axis.
　図７Ａに示すように、第１ハンド１３－１は、まず、Ｘ軸方向について光軸２００が第２ハンド１３－２の第１枝部１３ｂａに重なり、かつ、Ｙ軸方向について第２ハンド１３－２と干渉しない位置へ移動する。そして、図７Ａに示すように、第１ハンド１３－１は、かかる位置からＺ軸の負方向へ向かう向き５０１へ移動する。かかる動作によって、図５Ａと同様の手順で、第１枝部１３ｂａにおける所定の点７０１のＺ座標を検出する。 As shown in FIG. 7A, in the first hand 13-1, first, the optical axis 200 overlaps the first branch portion 13ba of the second hand 13-2 in the X-axis direction, and the second hand 13 in the Y-axis direction. -2 Move to a position where it does not interfere with -2. Then, as shown in FIG. 7A, the first hand 13-1 moves from this position in a direction 501 in the negative direction of the Z axis. With this operation, the Z coordinate of the predetermined point 701 in the first branch portion 13ba is detected in the same procedure as in FIG. 5A.
　また、図７Ｂに示すように、第１ハンド１３－１は、第２ハンド１３－２の第２枝部１３ｂｂにおける所定の点７０２のＺ座標を検出する。 Further, as shown in FIG. 7B, the first hand 13-1 detects the Z coordinate of the predetermined point 702 in the second branch portion 13bb of the second hand 13-2.
　図７Ｃには、Ｘ軸の正方向からみた場合における点７０１と、点７０２との位置関係を示している。図７Ｃに示すように、点７０１と、点７０２とのＺ方向の距離Ｚ１は、点７０１のＺ座標と、点７０２のＺ座標との差分である。また、点７０１と点７０２との距離Ｌ２は、第２ハンド１３－２の各部のサイズから求めることができるので、既知である。したがって、Ｘ軸まわりのずれ角をθＸ１とすると、「θＸ１＝ａｒｃｓｉｎ（Ｚ１／Ｌ２）」なる計算式で、θＸ１を求めることができる。なお、θＸ１が所定の閾値を超えている場合には、図示しない表示部などを用いて警告することとすればよい。 FIG. 7C shows the positional relationship between the point 701 and the point 702 when viewed from the positive direction of the X axis. As shown in FIG. 7C, the distance Z1 between the point 701 and the point 702 in the Z direction is a difference between the Z coordinate of the point 701 and the Z coordinate of the point 702. Further, the distance L2 between the points 701 and 702 is known because it can be obtained from the size of each part of the second hand 13-2. Therefore, if the deviation angle about the X axis is θX1, θX1 can be obtained by the calculation formula “θX1 = arcsin (Z1 / L2)”. When θX1 exceeds a predetermined threshold, a warning may be given using a display unit (not shown).
　なお、図７Ａおよび図７Ｂでは、第１ハンド１３－１が、第２ハンド１３－２よりもＺ軸の正方向側から、Ｚ軸の負方向へ移動する場合を示したが、第１ハンド１３－１が、第２ハンド１３－２よりもＺ軸の負方向側から、Ｚ軸の正方向へ移動するようにしてもよい。また、図７Ｂの検出手順の後に、図７Ａの検出手順を実行することとしてもよい。 7A and 7B show the case where the first hand 13-1 moves from the positive side of the Z axis to the negative direction of the Z axis with respect to the second hand 13-2. 13-1 may move in the positive direction of the Z axis from the negative direction side of the Z axis with respect to the second hand 13-2. Moreover, it is good also as performing the detection procedure of FIG. 7A after the detection procedure of FIG. 7B.
　次に、Ｙ軸まわりのずれを検出する手順について、図８Ａ、図８Ｂおよび図８Ｃを用いて説明する。図８Ａ、図８Ｂおよび図８Ｃは、Ｙ軸まわりのずれを検出する手順を示す説明図その１、その２およびその３である。なお、図８Ａ～８Ｃでは、第２ハンド１３－２が、Ｙ軸と平行な線まわりにＸＹ平面から傾いた場合を示している。 Next, a procedure for detecting a deviation around the Y axis will be described with reference to FIGS. 8A, 8B, and 8C. 8A, 8B, and 8C are explanatory diagrams 1, 2, and 3 showing a procedure for detecting a shift around the Y axis. 8A to 8C show a case where the second hand 13-2 is tilted from the XY plane around a line parallel to the Y axis.
　図８Ａに示すように、第１ハンド１３－１は、まず、Ｘ軸方向について光軸２００が第２ハンド１３－２に重なり、かつ、Ｙ軸方向について第２ハンド１３－２と干渉しない位置へ移動する。そして、図８Ａに示すように、第１ハンド１３－１は、かかる位置からＺ軸の負方向へ向かう向き５０１へ移動する。 As shown in FIG. 8A, the first hand 13-1 first has a position where the optical axis 200 overlaps the second hand 13-2 in the X-axis direction and does not interfere with the second hand 13-2 in the Y-axis direction. Move to. Then, as shown in FIG. 8A, the first hand 13-1 moves in the direction 501 from the position toward the negative direction of the Z axis.
　かかる動作によって、図５Ａと同様の手順で、第２ハンド１３－２における所定の点８０１のＺ座標を検出する。なお、図８Ａには、光軸２００がＺ軸に沿って移動する軌跡８０１Ｌを、参考のため示している。 With this operation, the Z coordinate of the predetermined point 801 in the second hand 13-2 is detected in the same procedure as in FIG. 5A. In FIG. 8A, a locus 801L in which the optical axis 200 moves along the Z axis is shown for reference.
　つづいて、図８Ｂに示すように、第１ハンド１３－１は、図８Ａに示した場合よりもＸ軸の正方向へＸ１だけ移動する。そして、図８Ａの場合と同様に、かかる位置からＺ軸の負方向へ向かう向き５０１へ移動する。 Subsequently, as shown in FIG. 8B, the first hand 13-1 moves by X1 in the positive direction of the X axis as compared with the case shown in FIG. 8A. Then, similarly to the case of FIG. 8A, the robot moves in the direction 501 from the position toward the negative direction of the Z axis.
　かかる動作によって、図８Ａの場合と同様に、第２ハンド１３－２における所定の点８０２のＺ座標を検出する。なお、図８Ｂには、光軸２００がＺ軸に沿って移動する軌跡８０２Ｌと、図８Ａに示した軌跡８０１Ｌとを参考のため示している。 By this operation, the Z coordinate of the predetermined point 802 in the second hand 13-2 is detected as in the case of FIG. 8A. In FIG. 8B, a locus 802L in which the optical axis 200 moves along the Z-axis and a locus 801L shown in FIG. 8A are shown for reference.
　図８Ｃには、Ｙ軸の負方向からみた場合における点８０１と、点８０２との位置関係を示している。図８Ｃに示すように、点８０１と、点８０２とのＺ方向の距離Ｚ２は、点８０１のＺ座標と、点８０２のＺ座標との差分である。また、点８０１と、点８０２とのＸ方向の距離Ｘ１は、上記したように既知である。したがって、Ｙ軸まわりのずれ角をθＹ１とすると、「θＹ１＝ａｒｃｔａｎ（Ｚ２／Ｘ１）」なる計算式で、θＹ１を求めることができる。なお、θＹ１が所定の閾値を超えている場合には、図示しない表示部などを用いて警告することとすればよい。 FIG. 8C shows the positional relationship between the point 801 and the point 802 when viewed from the negative direction of the Y-axis. As shown in FIG. 8C, the distance Z2 between the point 801 and the point 802 in the Z direction is the difference between the Z coordinate of the point 801 and the Z coordinate of the point 802. Further, the distance X1 between the point 801 and the point 802 in the X direction is known as described above. Therefore, if the deviation angle around the Y-axis is θY1, θY1 can be obtained by the calculation formula “θY1 = arctan (Z2 / X1)”. If θY1 exceeds a predetermined threshold, a warning may be given using a display unit (not shown).
　なお、図８Ａおよび図８Ｂでは、第１ハンド１３－１が、第２ハンド１３－２よりもＺ軸の正方向側から、Ｚ軸の負方向へ移動する場合を示したが、第１ハンド１３－１が、第２ハンド１３－２よりもＺ軸の負方向側から、Ｚ軸の正方向へ移動するようにしてもよい。また、図８Ｂの検出手順の後に、図８Ａの検出手順を実行することとしてもよい。 8A and 8B show the case where the first hand 13-1 moves from the positive side of the Z axis to the negative direction of the Z axis from the second hand 13-2. 13-1 may move in the positive direction of the Z axis from the negative direction side of the Z axis with respect to the second hand 13-2. Moreover, it is good also as performing the detection procedure of FIG. 8A after the detection procedure of FIG. 8B.
　次に、Ｚ軸まわりのずれを検出する手順について、図９Ａ、図９Ｂおよび図９Ｃを用いて説明する。図９Ａ、図９Ｂおよび図９Ｃは、Ｚ軸まわりのずれを検出する手順を示す説明図その１、その２およびその３である。なお、図９Ａ～９Ｃでは、本来はＸ軸とハンド中心線１３ＣＬが平行であるはずの第２ハンド１３－２が、Ｚ軸まわりにθＺ１だけ回転ずれを起こした場合を示している。 Next, a procedure for detecting a deviation around the Z-axis will be described with reference to FIGS. 9A, 9B, and 9C. 9A, 9B, and 9C are explanatory diagrams 1, 2, and 3 showing a procedure for detecting a shift around the Z axis. FIGS. 9A to 9C show a case where the second hand 13-2, which should originally be parallel to the X axis and the hand center line 13CL, is rotationally displaced by θZ1 around the Z axis.
　図９Ａに示すように、第１ハンド１３－１は、まず、Ｘ軸方向について光軸２００が第２ハンド１３－２の第１枝部１３ｂａに重なり、かつ、Ｙ軸方向について第２ハンド１３－２と干渉しない位置へ移動する。そして、図９Ａに示すように、第１ハンド１３－１は、かかる位置からＸ軸の負方向へ向かう向き５０２へ移動する。かかる動作によって、図５Ｂと同様の手順で、第１枝部１３ｂａの先端の点９０１のＸ座標を検出する。 As shown in FIG. 9A, in the first hand 13-1, first, the optical axis 200 overlaps the first branch portion 13ba of the second hand 13-2 in the X-axis direction, and the second hand 13 in the Y-axis direction. -2 Move to a position where it does not interfere with -2. Then, as shown in FIG. 9A, the first hand 13-1 moves from this position in the direction 502 toward the negative direction of the X axis. With this operation, the X coordinate of the point 901 at the tip of the first branch portion 13ba is detected in the same procedure as in FIG. 5B.
　また、図９Ｂに示すように、第１ハンド１３－１は、第２ハンド１３－２の第２枝部１３ｂｂにおける先端の点９０２のＸ座標を検出する。 Further, as shown in FIG. 9B, the first hand 13-1 detects the X coordinate of the point 902 at the tip of the second branch portion 13bb of the second hand 13-2.
　図９Ｃには、Ｚ軸の正方向からみた場合における点９０１と、点９０２との位置関係を示している。図９Ｃに示すように、点９０１と、点９０２とのＸ方向の距離Ｘ２は、点９０１のＸ座標と、点９０２のＸ座標との差分である。また、点９０１と点９０２との距離Ｌ３は、第２ハンド１３－２の各部のサイズから求めることができるので、既知である。　　　 FIG. 9C shows the positional relationship between the point 901 and the point 902 when viewed from the positive direction of the Z-axis. As shown in FIG. 9C, the distance X2 between the point 901 and the point 902 in the X direction is the difference between the X coordinate of the point 901 and the X coordinate of the point 902. The distance L3 between the point 901 and the point 902 is known because it can be obtained from the size of each part of the second hand 13-2. *
　したがって、Ｚ軸まわりのずれ角をθＺ１とすると、「θＺ１＝ａｒｃｓｉｎ（Ｘ２／Ｌ３）」なる計算式で、θＺ１を求めることができる。上記した補正部２１ｄ（図４参照）は、このようにして算出したＺ軸まわりのずれを用いて仮教示データ２２ｂを補正することになる。 Therefore, if the deviation angle around the Z-axis is θZ1, θZ1 can be obtained by the calculation formula “θZ1 = arcsin (X2 / L3)”. The correction unit 21d (see FIG. 4) corrects the temporary teaching data 22b using the deviation around the Z axis calculated in this way.
　なお、図５Ａ～図９Ｃを用いて説明したＸ軸方向、Ｙ軸方向、Ｚ軸方向、Ｘ軸まわり、Ｙ軸まわりおよびＺ軸まわりのずれの検出は、適宜組み合わせて実行することができる。 It should be noted that the detection of deviations in the X-axis direction, the Y-axis direction, the Z-axis direction, the X-axis direction, the Y-axis direction, and the Z-axis direction described with reference to FIGS. 5A to 9C can be executed in appropriate combination.
　次に、ｎ台（ｎは２以上の整数）のロボット１０およびコントローラ２０を用いる場合に、コントローラ２０として同一のコントローラ２０を用いる場合について図１０を用いて説明する。図１０は、コントローラ２０の変形例を示すブロック図である。なお、図１０では、１台のコントローラ２０が１台のロボット１０の動作制御を行う場合を示しているが、１台のコントローラ２０が２台以上のロボット１０の動作制御を行うこととしてもよい。この場合、動作制御を行うロボット１０の台数が異なるコントローラ２０を混在させてもよい。また、図４に示した第１コントローラ２０－１や第２コントローラ２０－２と同様の構成には同一の符号を付し、説明を省略するか簡単な説明にとどめることとする。 Next, the case where the same controller 20 is used as the controller 20 when the n robots (n is an integer of 2 or more) and the controller 20 are used will be described with reference to FIG. FIG. 10 is a block diagram illustrating a modified example of the controller 20. Note that FIG. 10 shows a case where one controller 20 controls the operation of one robot 10, but one controller 20 may control the operation of two or more robots 10. . In this case, controllers 20 having different numbers of robots 10 that perform operation control may be mixed. Further, the same reference numerals are given to the same components as those of the first controller 20-1 and the second controller 20-2 shown in FIG. 4, and the description will be omitted or only a brief description will be given.
　図１０に示すように、第ｎコントローラ２０－ｎは、第ｎロボット１０－ｎに接続されている。また、第ｎコントローラ２０－ｎは、第ｎ－１コントローラおよび第ｎ＋１コントローラにそれぞれ接続されている。ここで、第ｎ－１コントローラおよび第ｎ＋１コントローラの構成は、第ｎコントローラ２０－ｎと同様である。 As shown in FIG. 10, the nth controller 20-n is connected to the nth robot 10-n. The nth controller 20-n is connected to the n−1th controller and the n + 1th controller, respectively. Here, the configurations of the (n−1) th controller and the (n + 1) th controller are the same as those of the nth controller 20-n.
　制御部２１は、補正部２１ｄと、検出指示部２１ａと、動作制御部２１ｂと、取得部２１ｃとを備える。また、記憶部２２は、仮教示データ２２ｂと、本教示データ２２ａとを記憶する。補正部２１ｄは、第ｎ－１コントローラの取得部２１ｃから受け取った位置情報に基づいて仮教示データ２２ｂを補正することで本教示データ２２ａを生成する。 The control unit 21 includes a correction unit 21d, a detection instruction unit 21a, an operation control unit 21b, and an acquisition unit 21c. The storage unit 22 stores temporary teaching data 22b and main teaching data 22a. The correction unit 21d generates the main teaching data 22a by correcting the temporary teaching data 22b based on the position information received from the acquisition unit 21c of the (n-1) th controller.
　第ｎコントローラ２０－ｎの動作制御部２１ｂは、第ｎロボット１０－ｎが検出対象である場合には、仮教示データ２２ｂに基づいて第ｎロボット１０－ｎの動作制御を行う（図１０に示した破線の矢印参照）。すなわち、動作制御部２１ｂは、第ｎロボット１０－ｎを、図１に示した第２ロボット１０－２として動作させる。 When the n-th robot 10-n is a detection target, the operation controller 21b of the n-th controller 20-n controls the operation of the n-th robot 10-n based on the temporary teaching data 22b (see FIG. 10). (See the dashed arrow shown). That is, the operation control unit 21b operates the n-th robot 10-n as the second robot 10-2 illustrated in FIG.
　また、本教示データ２２ａが生成された後には、第ｎコントローラ２０－ｎの動作制御部２１ｂは、本教示データ２２ａに基づいて第ｎロボット１０－ｎの動作制御を行う。すなわち、第ｎロボット１０－ｎを、図１に示した第１ロボット１０－１として動作させる。 In addition, after the present teaching data 22a is generated, the operation control unit 21b of the nth controller 20-n controls the operation of the nth robot 10-n based on the present teaching data 22a. That is, the n-th robot 10-n is operated as the first robot 10-1 shown in FIG.
　ここで、第ｎロボット１０－ｎは、図１に示した第１ロボット１０－１と同様に、センサ１３ｃ（図３参照）を備えるものとする。なお、ｎ台のロボット１０のうち、最後に仮教示データ２２ｂの補正を受けるロボット１０については、センサ１３ｃを省略することとしてもよい。 Here, it is assumed that the n-th robot 10-n includes the sensor 13c (see FIG. 3), similarly to the first robot 10-1 shown in FIG. Of the n robots 10, the sensor 13 c may be omitted for the robot 10 that finally receives the temporary teaching data 22 b.
　次に、ｎ台のロボット１０を、次々に教示していく手順について図１１Ａおよび図１１Ｂを用いて説明する。図１１Ａは、ｎ台のロボット１０を教示する手順を示す説明図であり、図１１Ｂは、複数の搬送室５０に設置されたロボット１０を教示する手順を示す説明図である。 Next, a procedure for teaching n robots 10 one after another will be described with reference to FIGS. 11A and 11B. FIG. 11A is an explanatory diagram showing a procedure for teaching n robots 10, and FIG. 11B is an explanatory diagram showing a procedure for teaching robots 10 installed in a plurality of transfer chambers 50.
　図１１Ａに示すように、ｎ台（ｎは２以上の整数）のロボット１０を次々に教示していく場合、第１ロボット１０－１さえ本教示の作業が完了していれば、他のロボット１０に対して本教示の作業は不要である。 As shown in FIG. 11A, in the case where n robots (n is an integer of 2 or more) are taught one after another, even if the first robot 10-1 completes the operation of this teaching, other robots For 10 the work of this teaching is not necessary.
　具体的には、第ｎ－１ロボット１０－（ｎ－１）および第ｎロボット１０－ｎが双方ともアクセス可能なアライナ装置５１－１を、それぞれ設ける。ここで、既に説明したように、アライナ装置５１－（ｎ－１）を実際には配置しなくてもよい。 Specifically, an aligner device 51-1 that can be accessed by both the n-1th robot 10- (n-1) and the nth robot 10-n is provided. Here, as already described, the aligner device 51- (n-1) may not actually be arranged.
　すなわち、図１に示した目標位置５１Ｃを、単に３次元の座標として予め定めておけば足りる。つまり、第ｎ－１ロボット１０－（ｎ－１）が第ｎロボット１０－ｎのハンド１３を検知する際に使用する空間（検査空間）を確保し、かかる空間内に目標位置５１Ｃを定めておけばよい。このため、以下では、「アライナ装置５０」の代わりに「検査空間５０」という記載とする。 That is, it is sufficient if the target position 51C shown in FIG. 1 is simply determined in advance as three-dimensional coordinates. That is, a space (inspection space) to be used when the n-1th robot 10- (n-1) detects the hand 13 of the nth robot 10-n is secured, and the target position 51C is determined in this space. Just keep it. Therefore, in the following description, “inspection space 50” is used instead of “aligner device 50”.
　そして、本教示の作業が完了している第１ロボット１０－１が、第２ロボット１０－２のハンド１３を検査空間５１－１で検出することで第２ロボット１０－２の本教示を完了させ、つづいて、第２ロボット１０－２が、第３ロボット１０－３のハンド１３を検査空間５１－２で検出することで第３ロボット１０－３の本教示を完了させる。かかる手順を第ｎロボット１０－ｎまで繰り返すことで、すべてのロボット１０の本教示を完了させることができる。 Then, the first robot 10-1 that has completed the work of the present teaching detects the hand 13 of the second robot 10-2 in the inspection space 51-1, thereby completing the present teaching of the second robot 10-2. Subsequently, the second robot 10-2 detects the hand 13 of the third robot 10-3 in the inspection space 51-2, thereby completing the present teaching of the third robot 10-3. By repeating this procedure up to the n-th robot 10-n, the teaching of all the robots 10 can be completed.
　ところで、図１１Ｂに示すように、図１１Ａに示した各ロボット１０は、異なる搬送室５０にそれぞれ設置されていてもよい。なお、図１１Ｂでは、第１搬送室５０－１と、第２搬送室５０－２とが離れているように図示しているが、実際には、双方が接するように設置される。 Incidentally, as shown in FIG. 11B, each robot 10 shown in FIG. 11A may be installed in a different transfer chamber 50. In FIG. 11B, the first transfer chamber 50-1 and the second transfer chamber 50-2 are illustrated as being separated from each other, but in actuality, they are installed so as to be in contact with each other.
　図１１Ｂに示すように、第１搬送室５０－１には、第１ロボット１０－１および第２ロボット１０－２が設置されており、第２搬送室５０－２には、第３ロボット１０－３および第４ロボット１０－４が設置されている。 As shown in FIG. 11B, the first robot 10-1 and the second robot 10-2 are installed in the first transfer chamber 50-1, and the third robot 10 is installed in the second transfer chamber 50-2. -3 and the fourth robot 10-4 are installed.
　また、第１搬送室５０－１には検査空間５１－１が設定されており、第２搬送室５０－２には検査空間５１－３が設定されている。そして、第１搬送室５０－１および第２搬送室５０－２にまたがるように検査空間５１－２が設定されている。なお、検査空間５１－４についても、第２搬送室５０－２および第３搬送室５０－３にまたがるように設定されている。 Also, an inspection space 51-1 is set in the first transfer chamber 50-1, and an inspection space 51-3 is set in the second transfer chamber 50-2. The inspection space 51-2 is set so as to extend over the first transfer chamber 50-1 and the second transfer chamber 50-2. The inspection space 51-4 is also set so as to extend over the second transfer chamber 50-2 and the third transfer chamber 50-3.
　まず、本教示の作業が完了している第１ロボット１０－１が、第２ロボット１０－２のハンド１３を検査空間５１－１で検出することで第２ロボット１０－２の本教示を完了させる。次に、本教示が完了した第２ロボット１０－２が、検査空間５１－２で第３ロボット１０－３のハンド１３を検出することで第３ロボット１０－３の本教示を完了させる。 First, the first robot 10-1 that has completed the teaching operation detects the hand 13 of the second robot 10-2 in the inspection space 51-1, thereby completing the teaching of the second robot 10-2. Let Next, the second robot 10-2 having completed the present teaching detects the hand 13 of the third robot 10-3 in the inspection space 51-2, thereby completing the present teaching of the third robot 10-3.
　そして、教示が完了した第３ロボット１０－３が、検査空間５１－３で第４ロボット１０－４のハンド１３を検出することで第４ロボット１０－４の本教示を完了させる。以下、同様の手順を繰り返すことで、搬送室５０の数によらず、すべてのロボット１０の本教示を完了させることができる。 Then, the third robot 10-3 that has completed the teaching detects the hand 13 of the fourth robot 10-4 in the inspection space 51-3, thereby completing the present teaching of the fourth robot 10-4. Thereafter, by repeating the same procedure, the teaching of all the robots 10 can be completed regardless of the number of transfer chambers 50.
　なお、搬送室５０ごとに図１に示した手順で搬送室５０内のロボット１０の本教示を完了させておき、各搬送室５０を隣接して設置した後に、搬送室５０間の相対的な設置向きや設置位置のずれを検出することとしてもよい。 In addition, after the teaching of the robot 10 in the transfer chamber 50 is completed for each transfer chamber 50 according to the procedure shown in FIG. It is good also as detecting the shift | offset | difference of installation direction or an installation position.
　この場合、たとえば、第１搬送室５０－１のロボット１０－２が、検査空間５１－２で第２搬送室５０－２のロボット１０－３のハンド１３を検出することで、第１搬送室５０－１と第２搬送室５０－２との相対的な設置向きや設置位置のずれを検出することができる。 In this case, for example, the robot 10-2 in the first transfer chamber 50-1 detects the hand 13 of the robot 10-3 in the second transfer chamber 50-2 in the inspection space 51-2. It is possible to detect a relative installation direction or a deviation of the installation position between the 50-1 and the second transfer chamber 50-2.
　次に、教示システム１が実行する教示手順について図１２を用いて説明する。図１２は、教示システム１が実行する教示手順を示すフローチャートである。図１２に示すように、教示システム１は、第２ロボット１０－２のハンド１３を検査空間５１へ移動させる（ステップＳ１０１）。つづいて、教示システム１は、第１ロボット１０－１のハンド１３で第２ロボット１０－２のハンド１３を検出する（ステップＳ１０２）。 Next, the teaching procedure executed by the teaching system 1 will be described with reference to FIG. FIG. 12 is a flowchart showing a teaching procedure executed by the teaching system 1. As shown in FIG. 12, the teaching system 1 moves the hand 13 of the second robot 10-2 to the examination space 51 (step S101). Subsequently, the teaching system 1 detects the hand 13 of the second robot 10-2 with the hand 13 of the first robot 10-1 (step S102).
　つづいて、教示システム１の補正部２１ｄ（図４参照）は、ステップＳ１０２の検出結果に基づいて第２ロボット１０－２の仮教示データ２２ｂ（図４参照）を補正し（ステップＳ１０３）、本教示データ２２ａを生成して処理を終了する。 Subsequently, the correction unit 21d (see FIG. 4) of the teaching system 1 corrects the temporary teaching data 22b (see FIG. 4) of the second robot 10-2 based on the detection result of step S102 (step S103). The teaching data 22a is generated and the process is terminated.
　次に、ｎ台のロボット１０を含む教示システム１が実行する教示手順について図１３を用いて説明する。図１３は、ｎ台のロボット１０を含む教示システム１が実行する教示手順を示すフローチャートである。なお、図１３では、図１２で説明した内容については簡略化して説明することとする。 Next, a teaching procedure executed by the teaching system 1 including n robots 10 will be described with reference to FIG. FIG. 13 is a flowchart showing a teaching procedure executed by the teaching system 1 including n robots 10. In FIG. 13, the contents described in FIG. 12 will be described in a simplified manner.
　図１３に示すように、教示システム１は、第１ロボット１０－１のハンド１３で第２ロボット１０－２のハンド１３を検出する（ステップＳ２０１）。つづいて、教示システム１の補正部２１ｄ（図１０参照）は、ステップＳ２０１の検出結果に基づいて第２ロボット１０－２の仮教示データ２２ｂ（図１０参照）を補正し（ステップＳ２０２）、第２ロボット１０－２の本教示を完了させる。 As shown in FIG. 13, the teaching system 1 detects the hand 13 of the second robot 10-2 with the hand 13 of the first robot 10-1 (step S201). Subsequently, the correction unit 21d (see FIG. 10) of the teaching system 1 corrects the temporary teaching data 22b (see FIG. 10) of the second robot 10-2 based on the detection result of step S201 (step S202). 2 Complete the teaching of the robot 10-2.
　そして、教示システム１は、仮教示データ２２ｂが未補正のロボット１０があるか否かを判定し（ステップＳ２０３）、未補正のロボット１０がない場合には（ステップＳ２０３，Ｎｏ）、処理を終了する。一方、未補正のロボット１０がある場合には（ステップＳ２０３，Ｙｅｓ）、補正が完了した第２ロボット１０－２を第１ロボット１０－１とみなす（ステップＳ２０４）。また、未補正のロボット１０（次に補正すべきロボット１０）を、第２ロボット１０－２とみなし（ステップＳ２０５）、ステップＳ２０１以降の処理を繰り返す。 Then, the teaching system 1 determines whether or not there is a robot 10 whose tentative teaching data 22b has not been corrected (step S203). If there is no uncorrected robot 10 (No in step S203), the processing is terminated. To do. On the other hand, when there is an uncorrected robot 10 (step S203, Yes), the corrected second robot 10-2 is regarded as the first robot 10-1 (step S204). Further, the uncorrected robot 10 (the robot 10 to be corrected next) is regarded as the second robot 10-2 (step S205), and the processes after step S201 are repeated.
　上述してきたように、本実施形態に係る教示システム１は、第１ロボット１０－１と、第２ロボット１０－２と、補正部２１ｄとを備える。第１ロボット１０－１は、実際の動作に対応する本教示が完了しており、第１ハンド１３－１を有する。第２ロボット１０－２は、本教示よりも精度が粗い仮教示が完了しており、第２ハンド１３－２を有する。補正部２１ｄは、仮教示に従って所定の被検査位置５１Ｃに移動した第２ハンド１３－２を第１ハンド１３－１で検出した結果に基づき、第２ロボット１０－２の仮教示の教示データ２２ｂを補正する。 As described above, the teaching system 1 according to the present embodiment includes the first robot 10-1, the second robot 10-2, and the correction unit 21d. The first robot 10-1 has the present teaching corresponding to the actual operation, and has the first hand 13-1. The second robot 10-2 has completed the temporary teaching, which is coarser than the present teaching, and has the second hand 13-2. Based on the detection result of the second hand 13-2 moved to the predetermined inspection position 51C according to the temporary teaching by the first hand 13-1, the correcting unit 21d performs the teaching data 22b of the temporary teaching of the second robot 10-2. Correct.
　したがって、本実施形態に係る教示システム１によれば、第２ロボット１０－２に対して手作業を含んだ本教示の作業を行うことなく、第２ロボット１０－２の本教示を完了することができるので、簡易な構成で複数のロボット１０を効率的に教示することが可能となる。 Therefore, according to the teaching system 1 according to the present embodiment, the main teaching of the second robot 10-2 can be completed without performing the main teaching operation including the manual operation on the second robot 10-2. Therefore, it is possible to efficiently teach a plurality of robots 10 with a simple configuration.
　なお、上記した実施形態では、第１ロボット１０－１による第２ロボット１０－２のハンド１３の検出結果に基づいて第２ロボット１０－２の仮教示データ２２ｂを補正する場合について説明した。しかしながら、仮教示データ２２ｂを補正する代わりに、かかる検出結果をディスプレイなどの表示部に表示することで、警告することとしてもよい。 In the above-described embodiment, the case where the temporary teaching data 22b of the second robot 10-2 is corrected based on the detection result of the hand 13 of the second robot 10-2 by the first robot 10-1 has been described. However, instead of correcting the temporary teaching data 22b, a warning may be issued by displaying the detection result on a display unit such as a display.
　かかる警告は、いったん本教示が完了したロボット１０が、経年変化によって位置ずれや向きずれを起こした場合に有効である。具体的には、第１ロボット１０－１に対しては精密に配置した治具などを用いて再度、本教示の作業を行い、第２ロボット１０－２に対しては、図１に示した手順と同様の手順を実行すればよい。 Such a warning is effective when the robot 10 once this teaching is completed causes a positional deviation or an orientation deviation due to secular change. Specifically, the teaching operation is performed again for the first robot 10-1 using a precisely arranged jig or the like, and the second robot 10-2 is shown in FIG. What is necessary is just to perform the procedure similar to a procedure.
　そして、所定の閾値よりも大きい位置ずれや向きずれを検出した場合には、第２ロボット１０－２の再配置や交換といったメンテナンスが必要である旨の警告を行うこととすればよい。これにより、メンテナンスを要するような不具合を正確かつ効率的に報知することができる。 When a positional deviation or orientation deviation larger than a predetermined threshold is detected, a warning that maintenance such as rearrangement or replacement of the second robot 10-2 is necessary may be performed. Thereby, it is possible to accurately and efficiently notify the trouble that requires maintenance.
　さらなる効果や変形例は、当業者によって容易に導き出すことができる。このため、本発明のより広範な態様は、以上のように表しかつ記述した特定の詳細および代表的な実施形態に限定されるものではない。したがって、添付の特許請求の範囲およびその均等物によって定義される総括的な発明の概念の精神または範囲から逸脱することなく、様々な変更が可能である。 Further effects and modifications can be easily derived by those skilled in the art. Thus, the broader aspects of the present invention are not limited to the specific details and representative embodiments shown and described above. Accordingly, various modifications can be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents.
　　　１　　　教示システム
　　１０　　　ロボット
　　１０ａ　　本体部
　　１０ｂ　　昇降軸
　　１１　　　第１アーム
　　１２　　　第２アーム
　　１３　　　ハンド
　　１３ａ　　基部
　　１３ｂ　　フォーク部
　　１３ｃ　　センサ
　　１３Ｃ　　基準位置
　　１３ＣＬ　ハンド中心線
　　２０　　　コントローラ
　　２１　　　制御部
　　２１ａ　　検出指示部
　　２１ｂ　　動作制御部
　　２１ｃ　　取得部
　　２１ｄ　　補正部
　　２２　　　記憶部
　　２２ａ　　本教示データ
　　２２ｂ　　仮教示データ
　　５０　　　搬送室
　　５１　　　アライナ装置（検査空間）
　　５１Ｃ　　目標位置
　１００　　　基板
　２００　　　光軸 DESCRIPTION OF SYMBOLS 1 Teaching system 10 Robot 10a Main body part 10b Elevating shaft 11 First arm 12 Second arm 13 Hand 13a Base 13b Fork part 13c Sensor 13C Reference position 13CL Hand center line 20 Controller 21 Control part 21a Detection instruction part 21b Operation control part 21c Acquisition Section 21d Correction section 22 Storage section 22a Main teaching data 22b Temporary teaching data 50 Transfer chamber 51 Aligner device (inspection space)
51C Target position 100 Substrate 200 Optical axis

Claims (9)

  1. 　実際の動作に対応する本教示が完了しており、第１ハンドを有する第１ロボットと、
    　前記本教示よりも精度が粗い仮教示が完了しており、第２ハンドを有する第２ロボットと、
    　前記仮教示に従って所定の被検査位置に移動した前記第２ハンドを前記第１ハンドで検出した結果に基づき、前記第２ロボットの前記仮教示の教示データを補正する補正部と
    　を備えることを特徴とする教示システム。     The present teaching corresponding to the actual movement is completed, a first robot having a first hand;
    A temporary teaching that is coarser in accuracy than the main teaching is completed, and a second robot having a second hand;
    A correction unit that corrects the teaching data of the temporary teaching of the second robot based on a result of detection by the first hand of the second hand moved to a predetermined inspection position according to the temporary teaching. Teaching system.
  2. 　前記第１ロボットおよび前記第２ロボットは、
    　昇降機構を有する水平多関節ロボットであること
    　を特徴とする請求項１に記載の教示システム。     The first robot and the second robot are:
    The teaching system according to claim 1, wherein the teaching system is a horizontal articulated robot having an elevating mechanism.
  3. 　前記第１ハンドは、
    　先端側が二股にわかれており、各先端部分に一対のセンサを有しており、該一対のセンサによって前記第２ハンドを検出すること
    　を特徴とする請求項２に記載の教示システム。     The first hand is
    3. The teaching system according to claim 2, wherein the distal end side is divided into two forks, and each distal end portion has a pair of sensors, and the pair of sensors detects the second hand.
  4. 　前記第１ハンドは、
    　前記第２ハンドの位置を検出し、
    　前記補正部は、
    　前記第１ハンドによって検出された前記第２ハンドの位置と、前記被検査位置とのずれに基づいて前記第２ロボットの理想的な設置位置に対するずれを検出し、検出したずれに基づいて前記仮教示の教示データを補正すること
    　を特徴とする請求項１、２または３に記載の教示システム。     The first hand is
    Detecting the position of the second hand;
    The correction unit is
    A deviation from the ideal installation position of the second robot is detected based on a deviation between the position of the second hand detected by the first hand and the position to be inspected, and the temporary movement is detected based on the detected deviation. The teaching system according to claim 1, wherein the teaching data of teaching is corrected.
  5. 　前記第１ハンドは、
    　前記第２ハンドの姿勢を検出し、
    　前記補正部は、
    　前記第１ハンドによって検出された前記第２ハンドの姿勢と、水平面とのずれに基づいて前記第２ロボットの理想的な設置向きに対するずれを検出し、検出したずれに基づいて前記仮教示の教示データを補正すること
    　を特徴とする請求項１～４のいずれか一つに記載の教示システム。     The first hand is
    Detecting the posture of the second hand;
    The correction unit is
    Based on a deviation between the posture of the second hand detected by the first hand and a horizontal plane, a deviation with respect to an ideal installation direction of the second robot is detected, and the teaching of the provisional teaching is taught based on the detected deviation. The teaching system according to any one of claims 1 to 4, wherein the data is corrected.
  6. 　前記補正部は、
    　前記補正部によって前記仮教示が補正された前記第２ロボットを、前記第１ロボットとみなし、未だ前記仮教示が補正されていない前記第２ロボットの前記仮教示の教示データを補正すること
    　を特徴とする請求項１～５のいずれか一つに記載の教示システム。     The correction unit is
    The second robot whose temporary teaching has been corrected by the correction unit is regarded as the first robot, and the temporary teaching teaching data of the second robot whose temporary teaching has not yet been corrected is corrected. The teaching system according to any one of claims 1 to 5.
  7. 　前記第１ロボットまたは前記第２ロボットは、
    　それぞれ異なる搬送室に設置され、
    　前記補正部は、
    　搬送室間の設置ずれを補正すること
    　を特徴とする請求項１～６のいずれか一つに記載の教示システム。     The first robot or the second robot is
    Installed in different transfer rooms,
    The correction unit is
    The teaching system according to any one of claims 1 to 6, wherein an installation deviation between the transfer chambers is corrected.
  8. 　実際の動作に対応する本教示が完了しており、第１ハンドを有する第１ロボットと、
    　前記本教示よりも精度が粗い仮教示が完了しており、第２ハンドを有する第２ロボットと
    　を用い、
    　前記仮教示に従って所定の被検査位置に移動した前記第２ハンドを前記第１ハンドで検出した結果に基づき、前記第２ロボットの前記仮教示の教示データを補正する工程
    　を含むことを特徴とする教示方法。     The present teaching corresponding to the actual movement is completed, a first robot having a first hand;
    The temporary teaching, which is coarser than the main teaching, is completed, and a second robot having a second hand is used,
    Correcting the teaching data of the temporary teaching of the second robot based on the result of detecting the second hand moved to a predetermined position to be inspected according to the temporary teaching by the first hand. Teaching method.
  9. 　ハンドの移動軌跡について実際の動作に対応する本教示よりも精度が粗い仮教示が完了しており、
    　前記仮教示に従って所定の被検査位置に移動した前記ハンドを、前記本教示が完了した他のロボットのハンドで検出した結果に基づき、前記仮教示の教示データが補正されること
    　を特徴とするロボット。     The temporary teaching, which is coarser than the actual teaching corresponding to the actual movement of the movement trajectory of the hand, has been completed.
    The teaching data of the temporary teaching is corrected based on a result of detecting the hand moved to a predetermined inspection position according to the temporary teaching with a hand of another robot that has completed the teaching. .
PCT/JP2015/085319 2015-12-17 2015-12-17 Teaching system, teaching method, and robot WO2017104039A1 (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08185218A (en) * 1994-12-27 1996-07-16 Nissan Motor Co Ltd Method and device for teaching simultaneous operations of plural robots
JP2005118951A (en) * 2003-10-17 2005-05-12 Yaskawa Electric Corp Calibration method
WO2009145082A1 (en) * 2008-05-27 2009-12-03 ローツェ株式会社 Carrier device, position-teaching method, and sensor jig
JP2010153687A (en) * 2008-12-26 2010-07-08 Yaskawa Electric Corp Substrate transport robot and substrate transport apparatus
JP2013168579A (en) * 2012-02-16 2013-08-29 Yaskawa Electric Corp Conveyance system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08185218A (en) * 1994-12-27 1996-07-16 Nissan Motor Co Ltd Method and device for teaching simultaneous operations of plural robots
JP2005118951A (en) * 2003-10-17 2005-05-12 Yaskawa Electric Corp Calibration method
WO2009145082A1 (en) * 2008-05-27 2009-12-03 ローツェ株式会社 Carrier device, position-teaching method, and sensor jig
JP2010153687A (en) * 2008-12-26 2010-07-08 Yaskawa Electric Corp Substrate transport robot and substrate transport apparatus
JP2013168579A (en) * 2012-02-16 2013-08-29 Yaskawa Electric Corp Conveyance system

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