WO2017101165A1 - 基于设备实时状态的物料调度方法及系统 - Google Patents

基于设备实时状态的物料调度方法及系统 Download PDF

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WO2017101165A1
WO2017101165A1 PCT/CN2015/099867 CN2015099867W WO2017101165A1 WO 2017101165 A1 WO2017101165 A1 WO 2017101165A1 CN 2015099867 W CN2015099867 W CN 2015099867W WO 2017101165 A1 WO2017101165 A1 WO 2017101165A1
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real
time
scheduling
chamber
robot
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English (en)
French (fr)
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崔琳
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Beijing NMC Co Ltd
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Beijing NMC Co Ltd
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Priority to KR1020187016002A priority Critical patent/KR102041512B1/ko
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Priority to US16/009,573 priority patent/US11308453B2/en
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/10—Office automation; Time management
    • G06Q10/109—Time management, e.g. calendars, reminders, meetings or time accounting
    • G06Q10/1093—Calendar-based scheduling for persons or groups
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
    • B62D—MOTOR VEHICLES; TRAILERS
    • B62D61/00—Motor vehicles or trailers, characterised by the arrangement or number of wheels, not otherwise provided for, e.g. four wheels in diamond pattern
    • B62D61/06—Motor vehicles or trailers, characterised by the arrangement or number of wheels, not otherwise provided for, e.g. four wheels in diamond pattern with only three wheels
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00—Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
    • G06Q50/04—Manufacturing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0446—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0606—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0612—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0468—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Definitions

  • the invention belongs to the field of microelectronics and relates to a semiconductor processing device, in particular to a material scheduling method and system based on real-time state of a semiconductor device.
  • the material when processing materials using a distributed Bragg mirror apparatus, as shown in FIG. 1, the material usually needs to be in a buffer chamber (not shown), a pre-clean chamber 1, a high temperature desorption degassing chamber 2, and a process chamber. Transfers between chambers 3, and materials may also be transferred between different process locations A, B, C, D within process chamber 3. The transfer of material between the different chambers is achieved by the robot 6, and the transfer between the different process positions A, B, C, D is achieved by rotating the turntable 5.
  • Table 1 shows the steps and corresponding time parameters of the two materials when processed in a distributed Bragg mirror apparatus, respectively. It can be seen from Table 1 that there are idle resources in the device due to different time of transmission and processing of materials, and the idle resources become a bottleneck in production.
  • Table 1 is the processing steps and time parameter table of the material in the distributed Bragg mirror equipment.
  • the relevant technicians have proposed an enumeration method based on a search tree, which is based on a preset material transfer path and parameters of various components of the device (for example, the transfer time of the robot), and the material is possible by using a search tree. All the moves are exhausted, and the branch with the shortest time is selected as the moving order of the materials.
  • the search tree generates more branches. In this case, it takes a lot of time to exhaust all the possible moving orders of the material, so the calculation efficiency is low and cannot meet the real-time. Calculation requirements.
  • the technician proposed a segmentation scheduling strategy through N steps, that is, given a search range N, the algorithm simulates the results of the system simulation scheduling within N steps, and evaluates the branches of the N steps, and then determines the most based on the evaluation results.
  • the excellent path branch is a sequence of moving order scheduling of the material.
  • Table 2 shows the time spent on the theoretical optimal path and the time spent actually using the N-step segmentation schedule.
  • the present invention provides a material scheduling method and system based on real-time status of equipment, which can obtain a preferred path of materials in real time, improve calculation accuracy, and thereby improve processing efficiency of the equipment.
  • the technical solution adopted to solve the above technical problem is to provide a material scheduling method based on the real-time state of the device, which is characterized in that it comprises the following steps:
  • step S2 determining whether all materials have completed the specified transmission and process tasks, and if so, ending the scheduling; if not, executing step S3;
  • step S4 Update the real-time status information of the device to the device status corresponding to the execution of the operation instruction, and return to step S2.
  • the key parameters include: a pre-cleaning time, a degassing time, a time when the material is processed in each process position, a pick-and-place time of the robot, and a movement of the material from the current process position to the next process position. Transmission time.
  • step S3 further comprises the following steps:
  • Step S31 combining the state parameters in the real-time state information of the device one by one, traversing the material scheduling rule until obtaining operation instructions corresponding to all the state parameters;
  • step S32 it is determined whether all the material scheduling rules have been traversed, and if so, the operation instructions corresponding to all the state parameters are executed; if not, the process returns to the step S31.
  • step S4 further comprises the following steps:
  • Step S41 determining whether all the operation instructions are executed at the same time, and if so, executing Step S42; if not, proceed to step S43;
  • Step S42 the real-time status information of the device is updated to the device status after all the operation instructions are executed, and the process returns to the step S2;
  • step S43 the real-time status information of the device is updated to the device status corresponding to the first executed operation instruction, and the device status corresponding to the operation instruction being executed, and the process returns to the step S2.
  • the apparatus comprises a loading chamber, a pre-cleaning chamber, a degassing chamber and a process chamber, wherein a robot is disposed in the loading chamber for the pre-cleaning chamber and the degassing chamber Transferring material between the chamber and the process chamber; a plurality of process bits are symmetrically distributed in the process chamber and along the circumferential direction thereof for processing materials independently of each other, and a turntable is further disposed in the process chamber a disc for transferring the material to a corresponding disc by rotation; the disc transporting the material to the process bit or a turntable by lifting;
  • the material scheduling rules include:
  • Step S100 obtaining initial state information of the device
  • Step S101 updating a state of the robot
  • Step S102 updating the state of the disc
  • Step S103 it is determined whether the loading chamber has the material and the pre-cleaning chamber is empty, and if so, step S103-1 is performed; if not, step S104 is performed;
  • Step S104 it is determined whether the pre-cleaning chamber is processed, and if so, step S105 is performed, and if not, step S104-1 is performed;
  • Step S105 it is determined whether the degassing chamber is empty, if not, proceed to step S105-1; if yes, and the robot is idle, then step S106;
  • Step S106 using the robot to transfer the material from the pre-cleaning chamber to the degassing chamber, and updating the state of the pre-cleaning chamber, the degassing chamber and the robot; If the robot is not idle, step S107 is performed;
  • Step S107 determining whether it is an end output, and if so, scheduling the material according to the end processing rule; if not, executing step S108; the ending output means: the loading chamber has no material, the pre-cleaning chamber And the degassing chamber has been processed, and only the unprocessed material is present on the disc;
  • Step S108 it is determined whether the processing is completed, and if so, the end; if not, then step S101;
  • Step S103-1 it is determined whether the robot is idle, and if so, step S103-2 is performed; if not, step S104 is performed;
  • Step S103-2 using the robot to transfer the material from the loading chamber to the pre-cleaning chamber, and update the state of the robot and the pre-cleaning chamber, and then perform step S107;
  • Step S104-1 it is determined whether the process of the degassing chamber is completed, and if so, and the robot is idle, step S104-2 is performed; if not, step S105 is performed;
  • Step S104-2 determining whether the disc is available, and if so, executing step S104-3;
  • Step S104-3 using the robot to transfer material from the degassing chamber to the process bit, and update the state of the robot, the degassing chamber and the process bit, and then perform step S107;
  • step S105-1 it is determined whether the degassing chamber is processed. If yes, and the robot is idle, step S104-2 is performed; if not, step S106 is performed.
  • the device further comprises a buffer chamber
  • step S104-4 if the disc is not available, step S104-4 is performed;
  • Step S104-4 determining whether the cache chamber is available, and if so, executing step S104-5; if not, executing step S105;
  • Step S104-5 the robot transfers material from the degassing chamber to the buffer chamber, and updates states of the robot, the buffer chamber, and the degassing chamber, and then performs the Step S107.
  • the end processing rule is:
  • the unprocessed material is simultaneously processed.
  • an optimal material scheduling rule is obtained based on the dynamic programming theory.
  • the present invention further provides a material scheduling system based on real-time status of a device, including a storage unit, a determining unit, a scheduling unit, an executing unit, and an updating unit, wherein the storage unit is configured to pre-store optimally Material scheduling rules, the material scheduling rules are obtained according to the determined key parameters; the determining unit is configured to determine whether all materials have completed the specified transmission and process tasks, and if so, send the relevant scheduling to the scheduling unit a signal; if not, sending a traversal signal to the scheduling unit; the scheduling unit is configured to end scheduling when receiving a signal regarding ending scheduling; and receiving real-time status information of the device when receiving the traversing signal Traversing the material scheduling rules in the storage unit one by one, and sending an operation instruction corresponding to the material scheduling rule to the execution unit according to the traversal result; the execution unit is configured to execute an operation instruction from the scheduling unit And sending a signal to the update unit when the execution of the operation instruction is completed The update unit according to a signal from the execution unit of the real-
  • the key parameters include: a pre-cleaning time, a degassing time, a time when the material is processed in each process position, a pick-and-place time of the robot, and a movement of the material from the current process position to the next process position. Transmission time.
  • the scheduling unit includes a traversal module and a first determining module, where a traversing module, configured to combine the state parameters in the real-time state information of the device one by one, traverse the material scheduling rule until the operation instruction corresponding to all the state parameters is obtained, when the traversal signal is received; a judging module, configured to determine whether the traversal module has traversed all material scheduling rules, and if so, controlling the traversing module to send an operation instruction corresponding to all state parameters to the execution unit; if not, controlling the traversal The module continues to traverse the material scheduling rules.
  • the update unit includes an update module and a second determination module, where
  • the second determining module is configured to determine, according to a signal from the execution unit, whether all of the operation instructions are simultaneously executed, and if yes, send a first signal to the update module; if not, send the update command to the update module a second signal; the update module is configured to: when receiving the first signal from the second determining module, update the real-time status information of the device to a device status after all the operation instructions are executed, and The determining unit sends a signal about the re-judgment; when receiving the second signal from the second determining module, updating the real-time status information of the device to the device status corresponding to the first executed operation instruction, and executing The device status corresponding to the operation command, and sends a signal regarding the re-judgment to the judgment unit.
  • the material scheduling method based on the real-time state of the device provided by the invention obtains an optimal material scheduling rule according to the determined key parameters in advance online, and then traverses the material scheduling one by one according to the real-time state information of the device after online scheduling. Rule, and execute the operation instruction corresponding to the material scheduling rule according to the traversal result.
  • This kind of offline material scheduling rule the online real-time status information of the equipment is matched with the material scheduling rules, not only can the material's preferred path be obtained in real time, but also the calculation accuracy can be improved, thereby improving the processing efficiency of the equipment.
  • the material scheduling system based on the real-time state of the device provided by the invention pre-stores the optimal material scheduling rules by means of the storage unit, and uses the scheduling unit to perform online real-time according to the device.
  • the status information traverses the material scheduling rule one by one, and controls the execution unit to execute the operation instruction corresponding to the material scheduling rule according to the traversal result, so that not only the preferred path of the material can be obtained in real time, but also the calculation accuracy can be improved, thereby improving the processing efficiency of the device. .
  • Figure 1 is a schematic view showing the structure of a typical distributed Bragg mirror device
  • FIG. 2 is a flowchart of a material scheduling method based on real-time status of a device according to a first embodiment of the present invention
  • FIG. 3 is a flowchart of a material scheduling method based on real-time status of a device according to a second embodiment of the present invention
  • FIG. 4 is a schematic diagram of a material scheduling rule in a second embodiment of the present invention.
  • FIG. 5 is a schematic block diagram of a material scheduling system based on real-time status of a device according to an embodiment of the present invention.
  • FIG. 2 is a flowchart of a material scheduling method based on real-time status of a device according to a first embodiment of the present invention.
  • the material scheduling method includes the following steps:
  • step S2 judging whether all materials have completed the specified transmission and process tasks, and if so, ending the scheduling; if not, executing step S3.
  • step S4 Update the real-time status information of the device to the device status corresponding to the execution of the operation instruction, and return to step S2.
  • Step S1 is performed offline, and in this step S1, the material scheduling rule refers to the order in which the materials are transferred throughout the process.
  • the material scheduling rule refers to the order in which the materials are transferred throughout the process.
  • the above material scheduling rules are formulated according to the determined key parameters, including: pre-cleaning time, degassing time, time of material processing in each process position, robot pick-and-place time, and material from current The transfer time of the process bit to the next process bit, and so on.
  • an optimal material scheduling rule is obtained based on a dynamic programming theory (similar to a mathematical model) to achieve the purpose of improving equipment productivity.
  • the real-time status information of the device refers to a current working state such as a chamber, a robot, etc., which includes a plurality of state parameters, such as whether the chamber has material, whether the chamber is processed, whether the robot is idle, and the like.
  • the optimal material scheduling rule is obtained according to the determined key parameters in advance, and then, when scheduling online, the material scheduling rule is traversed one by one according to the real-time state information of the device, and the operation instruction corresponding to the material scheduling rule is executed according to the traversal result.
  • This kind of offline material scheduling rule the online real-time status information of the equipment is matched with the material scheduling rules, not only can the material's preferred path be obtained in real time, but also the calculation accuracy can be improved, thereby improving the processing efficiency of the equipment.
  • FIG. 3 is a flowchart of a material scheduling method based on real-time status of a device according to a second embodiment of the present invention.
  • the material scheduling method includes the following steps:
  • step S12 Determine whether all materials have completed the specified transmission and process tasks, and if so, terminate the scheduling; otherwise, perform step S13.
  • step S14 it is judged whether all the material scheduling rules have been traversed, and if so, step S15 is performed; if not, the process returns to step S13.
  • step S16 it is judged whether all the operation instructions are simultaneously executed; if yes, step S17 is performed; if not, step S18 is performed.
  • the real-time status information of the device includes a plurality of status parameters, and the material scheduling rule is traversed for each status parameter until an operation instruction corresponding to all the status parameters is obtained. Moreover, after the previous state parameter traverses the material scheduling rule and obtains the corresponding operation instruction, the operation instruction is not immediately executed, but is only stored, and after all the operation instructions corresponding to the state parameters are obtained, carried out.
  • step S16 is to judge the above two different cases and update the state of the device. If it is the first case, step S17 is performed; if it is the second case, step S18 is performed.
  • the device includes a loading chamber, pre-cleaning A chamber, a degassing chamber, and a process chamber, wherein a robot is disposed within the loading chamber for transferring material between the pre-cleaning chamber, the degassing chamber, and the process chamber.
  • a plurality of process bits are symmetrically distributed in the process chamber and along the circumferential direction thereof for processing materials independently of each other, and a turntable and a disc are also disposed in the process chamber, wherein the turntable is used to transfer the material to the rotary material Above the corresponding disc; the disc is transported by lift to the process location or to the turntable.
  • the discs are located one by one correspondingly below each process bit.
  • a plurality of load-bearing positions for carrying materials are evenly distributed along the circumferential direction of the turntable, and the robot transfers the materials to the respective load-bearing positions on the turntable at the designated pick-and-place position.
  • each load bearing position can be rotated one by one to the top of each disc, and then the respective discs are lifted, and the materials on the respective bearing positions of the turntable are lifted one by one, and transmitted to the process.
  • the process is carried out.
  • the material is re-transferred to the turntable by lowering the disk, and then the material is rotated to the designated pick-and-place position by the rotary turntable and taken out by the robot.
  • the material scheduling rules include:
  • step S100 initial state information of the device is obtained.
  • the initial status information of the device includes whether there is material in each chamber, the processing status of the material (unprocessed, being processed and processed), the state of the robot (idle and transmission), the state of the turntable (rotation, non-rotation) and the disc State (whether idle) and so on.
  • step S101 the state of the robot is updated.
  • Step S102 updating the state of the turntable.
  • step S103 it is judged whether there is material in the loading chamber, and it is judged whether the pre-cleaning chamber is empty. If it is satisfied at the same time, step S103-1 is performed; if not, step S104 is performed.
  • step S104 it is determined whether the pre-cleaning chamber is processed. If yes, step S105 is performed, and if no, step S104-1 is performed.
  • step S105 it is determined whether the degassing chamber is empty. If not, step S105-1 is performed; if yes, and the robot is idle, step S106 is performed. If the robot is not idle, step S107 is performed.
  • step S106 the material is transferred from the pre-cleaning chamber to the degassing chamber by the robot, and the state of the pre-cleaning chamber, the degassing chamber and the robot are updated.
  • step S107 it is judged whether it is the end output, and if so, the material is scheduled according to the end processing rule; if not, step S108 is performed.
  • the so-called end output means that there is no material in the loading chamber, the pre-cleaning chamber and the degassing chamber have been processed, and only the unprocessed material is on the disc.
  • step S108 it is determined whether the processing is completed, and if so, the processing ends; if not, the processing returns to step S101.
  • step S103-1 it is determined whether the robot is idle, and if so, step S103-2 is performed; if not, step S104 is performed.
  • step S103-2 the material is transferred from the loading chamber to the pre-cleaning chamber by the robot, and the state of the robot and the pre-cleaning chamber is updated, and then step S107 is performed.
  • step S104-1 it is determined whether the process of the degassing chamber is completed. If yes, and the robot is idle, step S104-2 is performed; if not, step S105 is performed.
  • step S104-2 it is determined whether the disc is available, and if so, step S104-3 is performed.
  • step S104-3 the material is transferred from the degassing chamber to the process position by the robot, and the states of the robot, the degassing chamber and the process bit are updated, and then step S107 is performed.
  • step S105-1 it is determined whether the degassing chamber is processed, and if so, and the robot is idle, step S104-2 is performed; if not, step S106 is performed.
  • step S101 based on the transmission start time, the transmission target, and the current time of the robot, it is judged whether or not the transmission process of the robot is finished, and the state of the robot is updated according to the judgment result.
  • the transfer start time and transfer object of the above robot can be recorded in the state variable of the robot.
  • step S102 determining whether the material processing is completed according to the starting time of the material processing, the required processing time of the material processing, and the current time, and updating the state of the disc according to the judgment result; and, according to the rotation start time and rotation of the turntable It takes time and current time to judge whether the turntable rotation is completed, and update the state of the disc according to the judgment result. Further, if the disc is in an idle state, that is, the turntable is not rotated, and the disc is not in the machining position, in this case, if there is unprocessed material in the first process position, the machining is started.
  • the disc If the disc is in an idle state and the pick-and-place position on the turntable has material to be processed, in this case, first rotate the turntable so that the material is rotated below the first process position and the disc will be used The material is raised to the first process position; then, it is judged whether there is material to be processed on the turntable under the second process position after the turntable is rotated, and if so, the disc is used to The material is raised into the second process position, and the first process bit and the second process bit are simultaneously processed, and the processing time takes the longest of the processing times of the two process bits. If not, only the first process bit is processed. If the disc is in an idle state and there is a processed material on the first load position (ie, the pick-and-place position) on the turntable, the material is taken out by the robot and the state of the robot and the state of the disc are updated.
  • the end processing rule may be: determining whether the disc is free, and if so, rotating the dial to transfer the unprocessed material to the top of the disc; raising the disc to transport the material to the disc Processing in the process position. Further, if the disc is in an idle state and there is material to be processed or processed on the turntable under the second process position, the turntable is rotated. If there is material to be processed in the first process bit and the second process bit, the two are processed simultaneously, and the processing time takes the longest one of the processing times of the two process bits. If there is only material in the second process position to be processed, the machining starts and the machining time is the process time of the second process position.
  • the material scheduling rule further includes:
  • step S104-4 if the disc is not available, step S104-4 is performed.
  • step S104-4 it is determined whether the cache chamber is available, and if so, step S104-5 is performed; if not, step S105 is performed.
  • step S104-5 the robot transfers the material from the degassing chamber to the buffer chamber, and updates the state of the robot, the buffer chamber, and the degassing chamber, and then proceeds to step S107.
  • the above is the material scheduling rule calculated by offline calculation based on distributed Bragg mirror equipment.
  • the material scheduling rule is imported into the control system of the device, and the system traverses the material scheduling rule one by one according to the real-time state information of the device, and executes the operation instruction corresponding to the material scheduling rule according to the traversal result until it is determined whether all materials have completed the specified transmission. And craft tasks.
  • This kind of offline material scheduling rule the online real-time status information of the equipment is matched with the material scheduling rules, not only can the material's preferred path be obtained in real time, but also the calculation accuracy can be improved, thereby improving the processing efficiency of the equipment.
  • the present invention further provides a material scheduling system based on the real-time state of the device
  • FIG. 5 is a schematic block diagram of a material scheduling system based on the real-time state of the device according to an embodiment of the present invention.
  • the material scheduling system includes a storage unit 100, a determining unit 200, a scheduling unit 300, an executing unit 400, and an updating unit 500, wherein the storage unit 100 is configured to pre-store an optimal material scheduling rule, and the material scheduling rule The formulation is performed offline and is obtained based on the determined key parameters and then stored in the storage unit 100.
  • the material scheduling rules and key parameters have been described in detail in the material scheduling method described above, and are not described here.
  • the determining unit 200 is configured to determine whether all materials have completed the specified transmission and process tasks, and if so, send a signal to the scheduling unit 300 regarding the end of the scheduling; if not, send the traversal signal to the scheduling unit 300.
  • the scheduling unit 300 is configured to end the scheduling when receiving the signal about ending the scheduling; when receiving the traversal signal, according to the real-time status information of the device.
  • the material scheduling rules in the storage unit 100 are traversed one by one, and the operation instructions corresponding to the material scheduling rules are sent to the execution unit 400 according to the traversal result.
  • the execution unit 400 is configured to execute an operation instruction from the scheduling unit 300 and send a signal to the update unit 500 when the operation instruction is completed.
  • the update unit 500 is configured to update the real-time status information of the device according to the signal from the execution unit 400 to the device status corresponding to the execution of the operation instruction, and send a signal regarding the re-judgment to the determination unit 200.
  • the optimal material scheduling rule By storing the optimal material scheduling rule in advance by means of the storage unit 100, and traversing the material scheduling rule one by one according to the real-time state information of the device by means of the scheduling unit 300, and executing the operation instruction corresponding to the material scheduling rule according to the traversal result. Not only can the preferred path of the material be obtained in real time, but also the calculation accuracy can be improved, thereby improving the processing efficiency of the device.
  • the scheduling unit 300 further includes a traversing module 301 and a first determining module 302, wherein the traversing module 301 is configured to traverse the state parameters in the real-time state information of the device one by one when receiving the traversal signal from the determining unit 200. Material scheduling rules until the operation instructions corresponding to all status parameters are obtained.
  • the first judging module 302 is configured to determine whether the traversal module 301 has traversed all the material scheduling rules. If yes, the control traversal module 301 sends an operation instruction corresponding to all the state parameters to the execution unit 400; if not, the control traversal module 301 continues. Traverse the material scheduling rules.
  • the real-time status information of the device includes a plurality of status parameters, and the traversal module 301 traverses the material scheduling rules for each status parameter to obtain an operation instruction corresponding to all the status parameters. Moreover, after the previous state parameter traverses the material scheduling rule and obtains the corresponding operation instruction, the traversing module 301 does not immediately send the operation instruction corresponding to the material scheduling rule to the execution unit 400, but stores it in the storage unit 100. in. Then, the first determining module 302 determines whether the traversing module 301 traverses all the material scheduling rules. After obtaining the operation instructions corresponding to all the state parameters, all the operation instructions are simultaneously sent to the executing unit 400.
  • the updating unit 500 further includes an updating module 502 and a second judging module 501, wherein the second judging module 501 is configured to judge whether all the operation instructions are simultaneously executed according to the signal from the executing unit 400, and if yes, send to the updating module 502. The first signal; if not, the second signal is sent to the update module 502.
  • the update module 502 is configured to update the real-time status information of the device to the device status after the execution of all the operation instructions upon receiving the first signal from the second determination module 501, and send a signal regarding the re-judgment to the determination unit 200.
  • the update module 502 when receiving the second signal from the second determining module 501, updates the real-time status information of the device to the device status corresponding to the first executed operation instruction, and the device status corresponding to the operation instruction being executed, And a signal regarding the re-judgment is sent to the judging unit 200.
  • the second determination module 501 determines the two different situations, and uses the update module 502 to update the status of the device for the two cases.

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Abstract

一种基于半导体设备实时状态的物料调度方法及系统，其包括以下步骤：S1，根据已确定的关键参数，预先获得最优的物料调度规则；S2，判断所有物料是否均已完成指定的传输和工艺任务，若是，则结束调度；若否，则执行步骤S3；S3，根据设备的实时状态信息逐个遍历物料调度规则，并根据遍历结果执行物料调度规则所对应的操作指令；S4，将设备的实时状态信息更新为操作指令执行完毕之后所对应的设备状态，返回步骤S2。以上提供的基于设备实时状态的物料调度方法，其不仅可以实时获得物料的优选路径，而且还可以提高计算准确性，从而可以提高设备的加工效率。

Description

基于设备实时状态的物料调度方法及系统 技术领域
本发明属于微电子领域，涉及半导体加工设备，具体涉及一种基于半导体设备实时状态的物料调度方法及系统。
背景技术
随着半导体技术的发展，半导体加工设备越来越复杂。物料(待加工工件)在加工过程中需要在多个不同腔室之间传输，甚至还需在不同工艺进行加工处理。
例如，利用分布布拉格反射镜设备加工物料时，如图1所示，物料通常需要在缓冲腔室(图中未示出)、预清洗腔室1、高温脱附去气腔室2和工艺腔室3之间传输，而且物料还可能在工艺腔室3内的不同工艺位A、B、C、D之间进行传输。物料在不同腔室之间的传输是通过机械手6实现的，在不同工艺位A、B、C、D之间的传输是通过转动转盘5实现的。表1示出两种物料分别在分布布拉格反射镜设备中加工时的步骤和对应的时间参数。由表1可知，由于传输和处理物料时间不同，这使得设备中存在闲置资源，该闲置资源成为生产中的瓶颈。
表1为物料在分布布拉格反射镜设备的加工步骤及时间参数表
Figure PCTCN2015099867-appb-000001
Figure PCTCN2015099867-appb-000002
为此，相关技术人员提出了基于搜索树的枚举方法，其是根据预先设定的物料传输路径以及设备各部件的参数(例如机械手的传片时间)，用搜索树的方式将物料可能的所有移动顺序穷举一遍，最终选择时间最短的那个分支作为物料的移动顺序。然而，当物料的传输路径较为复杂时，搜索树产生的分支较多，在这种情况下，将物料可能的所有移动顺序穷举一遍需要消耗大量的时间，从而计算效率较低，无法满足实时计算的要求。
为此，技术人员提出了通过N步分段调度策略，即给定一个搜索范围N，算法模拟N步之内系统模拟调度的结果，并对N步的分支进行评价，然后根据评价结果决定最优的路径分支作为物料的移动顺序调度的序列。虽然这个方案解决了复杂情况下算法的实时性问题，但是，该方法计算出来的结果往往并不是理论上的最优路径，由此导致加工所需时间较多，特别是对于结构和物料路径都相对简单的设备，从产能上可以看出采用该方法所确定的物料移动顺序并不是最优的，这与客户对设备的产能要求有一定差距。在利用表1所述两种类别的工艺加工25片物料时，理论上的优选路径花费的时间和实际采用N步分段调度花费的时间存在较大的差距，如表2所示，差距等于N步分段调整路径与理论最优路径的差值；差距百分比等于差距与理论最优路径的比值。
表2为理论最优路径花费的时间与采用N步分段调度实际花费的时间比对表
Figure PCTCN2015099867-appb-000003
综上所述，如何设计一种在满足实时计算的前提下，能够提高计算准确性的物料调度方法是目前亟待解决的问题。
发明内容
为解决上述技术问题，本发明提供一种基于设备实时状态的物料调度方法及系统，其能够实时获得物料的优选路径，提高计算准确性，从而提高设备的加工效率。
解决上述技术问题的所采用的技术方案是提供一种基于设备实时状态的物料调度方法，其特征在于，包括以下步骤：
S1，根据已确定的关键参数，预先获得最优的物料调度规则；
S2，判断所有物料是否均已完成指定的传输和工艺任务，若是，则结束调度；若否，则执行步骤S3；
S3，根据设备的实时状态信息逐个遍历所述物料调度规则，并根据遍历结果执行所述物料调度规则所对应的操作指令；
S4，将所述设备的实时状态信息更新为所述操作指令执行完毕之后所对应的设备状态，返回步骤S2。
优选的，所述关键参数包括：预清洗时间、去气时间、所述物料在各个工艺位进行工艺的时间、机械手的取放片时间以及所述物料自当前工艺位移动至下一工艺位的传输时间。
优选的，所述步骤S3进一步包括下列步骤：
步骤S31，逐条结合所述设备的实时状态信息中的状态参数，遍历所述物料调度规则，直至获得所有状态参数所对应的操作指令；
步骤S32，判断是否已遍历全部的物料调度规则，若是，则执行所有状态参数所对应的操作指令；若否，则返回所述步骤S31。
优选的，所述步骤S4进一步包括下列步骤：
步骤S41，判断所有所述操作指令是否同时执行完毕，若是，则执 行步骤S42；若否，则执行步骤S43；
步骤S42，将所述设备的实时状态信息更新为所有操作指令执行完毕之后的设备状态，返回所述步骤S2；
步骤S43，将所述设备的实时状态信息更新为先执行完毕的操作指令所对应的设备状态，以及正在执行的操作指令所对应的设备状态，返回所述步骤S2。
优选的，所述设备包括装载腔室、预清洗腔室、去气腔室和工艺腔室，其中，在所述装载腔室内设置有机械手，用于在所述预清洗腔室、去气腔室和工艺腔室之间传输物料；在所述工艺腔室内、且沿其周向对称分布有多个工艺位，用于彼此独立地加工物料，并且在所述工艺腔室内还设置有转盘和圆盘，所述转盘用于通过旋转将所述物料传输至相应的圆盘上方；所述圆盘通过升降将所述物料传输至所述工艺位或者转盘上；
所述物料调度规则包括：
步骤S100，获得所述设备的初始状态信息；
步骤S101，更新所述机械手的状态；
步骤S102，更新所述圆盘的状态；
步骤S103，判断所述装载腔室是否有所述物料且所述预清洗腔室是否为空，若是，则执行步骤S103-1；若否，则执行步骤S104；
步骤S104，判断所述预清洗腔室是否加工完毕，若是，则执行步骤S105，若否，则执行步骤S104-1；
步骤S105，判断所述去气腔室是否为空，若否，则执行步骤S105-1；若是，且所述机械手空闲，则执行步骤S106；
步骤S106，利用所述机械手将所述物料自所述预清洗腔室传输至所述去气腔室，并更新所述预清洗腔室、所述去气腔室和所述机械手的状态；若所述机械手不空闲，则执行步骤S107；
步骤S107，判断是否是结尾输出，若是，则按照结尾加工规则调度物料；若否，则执行步骤S108；所述结尾输出是指：所述装载腔室没有所述物料、所述预清洗腔室和所述去气腔室已加工完毕、只有所述圆盘上还有未加工的所述物料；
步骤S108，判断是否加工完毕，若是，则结束；若否，则执行步骤S101；
步骤S103-1，判断所述机械手是否空闲，若是，则执行步骤S103-2；若否，则执行步骤S104；
步骤S103-2，利用所述机械手将所述物料自所述装载腔室传输至所述预清洗腔室，并更新所述机械手和所述预清洗腔室的状态，然后执行步骤S107；
步骤S104-1，判断所述去气腔室的工艺是否完毕，若是，且所述机械手空闲，则执行步骤S104-2；若否，则执行步骤S105；
步骤S104-2，判断所述圆盘是否可用，若是，则执行步骤S104-3；
步骤S104-3，利用所述机械手将物料自所述去气腔室传输至所述工艺位，并更新所述机械手、所述去气腔室和所述工艺位的状态，然后执行步骤S107；
步骤S105-1，判断所述去气腔室是否加工完毕，若是，且所述机械手空闲，则执行步骤S104-2；若否，则执行步骤S106。
优选的，所述设备还包括缓存腔室；
在所述步骤S104-2中，若所述圆盘不可用，则执行步骤S104-4；
步骤S104-4，判断所述缓存腔室是否可用，若是，则执行步骤S104-5；若否，则执行步骤S105；
步骤S104-5，所述机械手将物料自所述去气腔室传输至所述缓存腔室，并更新所述机械手、所述缓存腔室、所述去气腔室的状态，然后执行所述步骤S107。
优选的，所述结尾加工规则为：
判断所述圆盘是否空闲，若是，则转动所述转盘，以将未加工的物料传输至所述圆盘上方；升起所述圆盘，以将所述物料传输至相应的所述工艺位内进行加工。
优选的，若所述圆盘空闲，且两个以上的所述工艺位均有未加工的物料，则同时对该未加工的物料进行加工。
优选的，在所述步骤S1中，根据已确定的关键参数，基于动态规划理论，获得最优的物料调度规则。
作为另一个技术方案，本发明还提供一种基于设备实时状态的物料调度系统，其包括存储单元、判断单元、调度单元、执行单元和更新单元，其中，所述存储单元用于预先存储最优的物料调度规则，所述物料调度规则根据已确定的关键参数获得；所述判断单元用于判断所有物料是否均已完成指定的传输和工艺任务，若是，则向所述调度单元发送有关结束调度的信号；若否，则向所述调度单元发送遍历信号；所述调度单元用于在接收到有关结束调度的信号时，结束调度；在接收到所述遍历信号时，根据设备的实时状态信息逐个遍历所述存储单元中的所述物料调度规则，并根据遍历结果向所述执行单元发送所述物料调度规则所对应的操作指令；所述执行单元用于执行来自所述调度单元的操作指令，并在所述操作指令执行完毕时向所述更新单元发送信号；所述更新单元用于根据来自所述执行单元的信号将所述设备的实时状态信息更新为所述操作指令执行完毕之后所对应的设备状态，并向所述判断单元发送有关重新判断的信号。
优选的，所述关键参数包括：预清洗时间、去气时间、所述物料在各个工艺位进行工艺的时间、机械手的取放片时间以及所述物料自当前工艺位移动至下一工艺位的传输时间。
优选的，所述调度单元包括遍历模块和第一判断模块，其中，所述 遍历模块，用于在接收到所述遍历信号时，逐条结合所述设备的实时状态信息中的状态参数，遍历所述物料调度规则，直至获得所有状态参数所对应的操作指令；所述第一判断模块，用于判断所述遍历模块是否已遍历全部的物料调度规则，若是，则控制所述遍历模块向所述执行单元发送所有状态参数所对应的操作指令；若否，则控制所述遍历模块继续遍历所述物料调度规则。
优选的，所述更新单元包括更新模块和第二判断模块，其中，
所述第二判断模块用于根据来自所述执行单元的信号判断所有所述操作指令是否同时执行完毕，若是，则向所述更新模块发送第一信号；若否，则向所述更新模块发送第二信号；所述更新模块用于在接收到来自所述第二判断模块的第一信号时，将所述设备的实时状态信息更新为所有操作指令执行完毕之后的设备状态，并向所述判断单元发送有关重新判断的信号；在接收到来自所述第二判断模块的第二信号时，将所述设备的实时状态信息更新为先执行完毕的操作指令所对应的设备状态，以及正在执行的操作指令所对应的设备状态，并向所述判断单元发送有关重新判断的信号。
本发明具有以下有益效果：
本发明提供的基于设备实时状态的物料调度方法，其通过预先在线下根据已确定的关键参数，获得最优的物料调度规则，之后在线上调度时，根据设备的实时状态信息逐个遍历该物料调度规则，并根据遍历结果执行物料调度规则所对应的操作指令。这种线下获得物料调度规则，线上结合设备的实时状态信息匹配物料调度规则的方式，不仅可以实时获得物料的优选路径，而且还可以提高计算准确性，从而可以提高设备的加工效率。
本发明提供的基于设备实时状态的物料调度系统，通过借助存储单元预先存储最优的物料调度规则，并借助调度单元在线根据设备的实时 状态信息逐个遍历该物料调度规则，并根据遍历结果控制执行单元执行物料调度规则所对应的操作指令，不仅可以实时获得物料的优选路径，而且还可以提高计算准确性，从而可以提高设备的加工效率。
附图说明
图1为典型的分布布拉格反射镜设备的结构示意图；
图2为本发明第一实施例提供的基于设备实时状态的物料调度方法的流程图；
图3为本发明第二实施例提供的基于设备实时状态的物料调度方法的流程图；以及
图4为本发明第二实施例中物料调度规则的示意图；
图5为本发明实施例提供的基于设备实时状态的物料调度系统的原理框图。
具体实施方式
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图对本发明提供的基于设备实时状态的物料调度方法及系统进行说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。
图2为本发明第一实施例提供的基于设备实时状态的物料调度方法的流程图。请参阅图2，该物料调度方法包括以下步骤：
S1，根据已确定的关键参数，预先获得最优的物料调度规则。
S2，判断所有物料是否均已完成指定的传输和工艺任务，若是，则结束调度；若否，则执行步骤S3。
S3，根据设备的实时状态信息逐个遍历物料调度规则，并根据遍历结果执行物料调度规则所对应的操作指令。
S4，将设备的实时状态信息更新为操作指令执行完毕之后所对应的设备状态，返回步骤S2。
步骤S1是在线下进行的，且在该步骤S1中，物料调度规则是指在整个工艺过程中物料的传送顺序。在实际应用中，由于传输和加工物料的时间不同，而且设备往往又是同时对多片物料同时进行连续加工，导致设备中存在闲置资源，该闲置资源成为生产中的瓶颈。因此，如何安排物料的传送顺序，以及工艺腔室中每个工艺位进行工艺的起始时间等等(即，设定最优的物料调度规则)是提高设备产能的重要因素。此外，上述物料调度规则是根据已确定的关键参数而制定，该关键参数具体包括：预清洗时间、去气时间、物料在各个工艺位进行工艺的时间、机械手的取放片时间以及物料自当前工艺位移动至下一工艺位的传输时间等等。
优选的，根据上述关键参数，基于动态规划理论(类似数学模型)获得最优的物料调度规则，以达到提高设备产能的目的。
在步骤S3中，设备的实时状态信息是指诸如腔室、机械手等的当前工作状态，其包含有多个状态参数，例如腔室是否有物料、腔室是否加工完毕、机械手是否空闲等等。
预先在线下根据已确定的关键参数，获得最优的物料调度规则，之后在线上调度时，根据设备的实时状态信息逐个遍历该物料调度规则，并根据遍历结果执行物料调度规则所对应的操作指令。这种线下获得物料调度规则，线上结合设备的实时状态信息匹配物料调度规则的方式，不仅可以实时获得物料的优选路径，而且还可以提高计算准确性，从而可以提高设备的加工效率。
图3为本发明第二实施例提供的基于设备实时状态的物料调度方法的流程图。请参阅图3，该物料调度方法包括以下步骤：
S11，根据已确定的关键参数，预先获得最优的物料调度规则。
S12，判断所有物料是否均已完成指定的传输和工艺任务，若是，结束调度；否则，执行步骤S13。
S13，逐条结合设备的实时状态信息中的状态参数，遍历物料调度规则，直至获得所有状态参数所对应的操作指令。
S14，判断是否已遍历全部的物料调度规则，若是，则执行步骤S15；若否，则返回步骤S13。
S15，执行所有状态参数所对应的操作指令。
S16，判断所有操作指令是否同时执行完毕；若是，则执行步骤S17；若否，则执行步骤S18。
S17，将设备的实时状态信息更新为所有操作指令执行完毕之后的设备状态，返回步骤S12。
S18，将设备的实时状态信息更新为先执行完毕的操作指令所对应的设备状态，以及正在执行的操作指令所对应的设备状态，返回步骤S12。
在步骤S13中，设备的实时状态信息包含有多个状态参数，针对每个状态参数遍历物料调度规则，直至获得所有状态参数所对应的操作指令。而且，在前一个状态参数遍历物料调度规则完毕，并获得对应的操作指令之后，并不立即执行该操作指令，而仅是存储，待获得了所有状态参数所对应的操作指令之后，再一并执行。
由于所有操作指令的执行完毕时间存在两种情况，即，第一种情况是所有操作指令同时执行完毕；第二种情况是所有操作指令中有先执行完毕的操作指令。因此，步骤S16是对上述两种不同的情况进行判断，并对设备的状态进行更新。若是第一种情况，则执行步骤S17；若是第二种情况，则执行步骤S18。
下面以图1所示的分布布拉格反射镜设备为例，对本发明实施例中的物料调度规则进行详细描述。具体地，该设备包括装载腔室、预清洗 腔室、去气腔室和工艺腔室，其中，在该装载腔室内设置有机械手，用于在预清洗腔室、去气腔室和工艺腔室之间传输物料。在工艺腔室内、且沿其周向对称分布有多个工艺位，用于彼此独立地加工物料，并且在该工艺腔室内还设置有转盘和圆盘，其中，转盘用于通过旋转物料传输至相应的圆盘上方；圆盘通过升降将该物料传输至工艺位内或者转盘上。
进一步说，圆盘一一对应地位于各个工艺位的下方。在转盘上设置有沿其周向均匀分布的多个用于承载物料的承载位，机械手在指定的取放片位置将物料传递至该转盘上的各个承载位上。通过旋转转盘，可以使各个承载位一一对应地旋转至各个圆盘的上方，然后通过升起各个圆盘，而一一对应地托起转盘各个承载位上的物料，并将其传输至工艺位进行工艺，待工艺完毕之后，通过降低圆盘，而使物料重新被传递至转盘上，然后通过旋转转盘将该物料旋转至指定的取放片位置，并由机械手取出。
图4为本发明中以分布布拉格反射镜设备为例，计算得到的物料调度规则的示意图。请参阅图4，物料调度规则包括：
步骤S100，获得设备的初始状态信息。该设备的初始状态信息包括各个腔室是否存在物料、物料的加工状态(未加工、正在加工和已加工)、机械手的状态(空闲和传输)、转盘的状态(旋转、未旋转)和圆盘的状态(是否空闲)等等。
步骤S101，更新机械手的状态。
步骤S102，更新所述转盘的状态。
步骤S103，判断装载腔室是否有物料，同时判断预清洗腔室是否为空，若同时满足，则执行步骤S103-1；若不满足，则执行步骤S104。
步骤S104，判断预清洗腔室是否加工完毕，若是，则执行步骤S105，若否，则执行步骤S104-1。
步骤S105，判断去气腔室是否为空，若否，则执行步骤S105-1；若是，且机械手空闲，则执行步骤S106。若机械手不空闲，则执行步骤S107。
步骤S106，利用机械手将物料自预清洗腔室传输至去气腔室，并更新预清洗腔室、去气腔室和机械手的状态。
步骤S107，判断是否是结尾输出，若是，则按照结尾加工规则调度物料；若否，则执行步骤S108。所谓结尾输出是指：装载腔室没有物料，预清洗腔室和去气腔室已加工完毕，只有圆盘上还有未加工的物料。
步骤S108，判断是否加工完毕，若是，则结束；若否，则返回步骤S101。
步骤S103-1，判断机械手是否空闲，若是，则执行步骤S103-2；若否，则执行步骤S104。
步骤S103-2，利用机械手将物料自装载腔室传输至预清洗腔室，并更新机械手和预清洗腔室的状态，然后执行步骤S107。
步骤S104-1，判断去气腔室的工艺是否完毕，若是，且机械手空闲，则执行步骤S104-2；若否，则执行步骤S105。
步骤S104-2，判断圆盘是否可用，若是，则执行步骤S104-3。
步骤S104-3，利用机械手将物料自去气腔室传输至工艺位，并更新机械手、去气腔室和工艺位的状态，然后执行步骤S107。
步骤S105-1，判断去气腔室是否加工完毕，若是，且机械手空闲，则执行步骤S104-2；若否，则执行步骤S106。
在步骤S101中，根据机械手的传输起始时间、传输对象和当前时间，判断机械手的传输过程是否结束，并根据判断结果更新机械手的状态。上述机械手的传输起始时间和传输对象可以记录在机械手的状态变量中。
在步骤S102中，根据物料加工的起始时间、物料加工所需时长和当前时间，判断物料加工是否完毕，并根据判断结果更新圆盘的状态；以及，根据转盘的旋转起始时间、旋转所需时长和当前时间，判断转盘旋转是否完毕，并根据判断结果更新圆盘的状态。进一步说，若圆盘处于空闲状态，即转盘未转动，同时圆盘未在加工位置，在这种情况下，若第一个工艺位中有未加工的物料，则开始加工。若圆盘处于空闲状态，同时转盘上的取放片位置有待加工的物料，在这种情况下，首先旋转转盘，以使将该物料旋转至第一个工艺位的下方，并利用圆盘将该物料升起至该第一个工艺位内；然后，判断在转盘旋转完毕之后，转盘上位于第二个工艺位下方的承载位上是否有待加工的物料，若有，则利用圆盘将该物料升起至该第二个工艺位内，并且第一个工艺位和第二个工艺位同时进行加工，且加工时间取两个工艺位的加工时间中最长的一个。若没有，则只有第一个工艺位进行加工。若圆盘处于空闲状态，同时转盘上第一个承载位(即取放片位置)上有已加工完毕的物料，则利用机械手将该物料取出，并更新机械手的状态和圆盘的状态。
在步骤S107中，结尾加工规则可以为：判断圆盘是否空闲，若是，则转动转盘，以将未加工的物料传输至圆盘上方；升起该圆盘，以将物料传输至该圆盘上方的工艺位内进行加工。进一步说，若圆盘处于空闲状态，同时在转盘上位于第二个工艺位下方的承载位上有待加工或者已加工完毕的物料，则旋转转盘。若第一个工艺位和第二工艺位内均有待加工的物料，则二者同时进行加工，且加工时间取两个工艺位的加工时间中最长的一个。若只有第二个工艺位内有待加工的物料，则开始加工，加工时间即为第二个工艺位的工艺时间。针对其他情况，只要转盘上还有物料，则旋转转盘；若转盘上没有物料，则表示加工完毕，停止程序。需要说明的是，本实施例是以两个工艺位的加工方式为例，但是本发明并不局限于此，在实际应用中，三个以上工艺位的加工方式与两个工艺 位相类似。
优选的，若设备还包括缓存腔室，则物料调度规则还包括：
在上述步骤S104-2中，若圆盘不可用，则执行步骤S104-4。
步骤S104-4，判断缓存腔室是否可用，若是，则执行步骤S104-5；若否，则执行步骤S105。
步骤S104-5，机械手将物料自去气腔室传输至缓存腔室，并更新机械手、缓存腔室、去气腔室的状态，然后执行步骤S107。
以上为基于分布布拉格反射镜设备，通过线下计算得到的物料调度规则。将上述物料调度规则导入设备的控制系统，该系统根据设备的实时状态信息逐个遍历物料调度规则，并根据遍历结果执行物料调度规则所对应的操作指令，直至判断所有物料是否均已完成指定的传输和工艺任务。这种线下获得物料调度规则，线上结合设备的实时状态信息匹配物料调度规则的方式，不仅可以实时获得物料的优选路径，而且还可以提高计算准确性，从而可以提高设备的加工效率。
相应于本发明的基于设备实时状态的物料调度方法，本发明还提供一种基于设备实时状态的物料调度系统，图5为本发明实施例提供的基于设备实时状态的物料调度系统的原理框图。请参阅图5，物料调度系统包括存储单元100、判断单元200、调度单元300、执行单元400和更新单元500，其中，存储单元100用于预先存储最优的物料调度规则，该物料调度规则的制定是在线下进行的，并根据已确定的关键参数获得，然后存入存储单元100中。物料调度规则和关键参数在上述物料调度方法中已有了详细描述，在此不再赘述。
判断单元200用于判断所有物料是否均已完成指定的传输和工艺任务，若是，则向调度单元300发送有关结束调度的信号；若否，则向调度单元300发送遍历信号。调度单元300用于在接收到有关结束调度的信号时，结束调度；在接收到遍历信号时，根据设备的实时状态信息 逐个遍历存储单元100中的物料调度规则，并根据遍历结果向执行单元400发送物料调度规则所对应的操作指令。执行单元400用于执行来自调度单元300的操作指令，并在该操作指令执行完毕时向更新单元500发送信号。更新单元500用于根据来自执行单元400的信号将设备的实时状态信息更新为操作指令执行完毕之后所对应的设备状态，并向判断单元200发送有关重新判断的信号。
通过借助存储单元100预先存储最优的物料调度规则，并借助调度单元300在线根据设备的实时状态信息逐个遍历该物料调度规则，并根据遍历结果控制执行单元400执行物料调度规则所对应的操作指令，不仅可以实时获得物料的优选路径，而且还可以提高计算准确性，从而可以提高设备的加工效率。
优选的，调度单元300进一步包括遍历模块301和第一判断模块302，其中，遍历模块301用于在接收到来自判断单元200的遍历信号时，逐条结合设备的实时状态信息中的状态参数，遍历物料调度规则，直至获得所有状态参数所对应的操作指令。第一判断模块302用于判断遍历模块301是否已遍历全部的物料调度规则，若是，则控制遍历模块301向执行单元400发送所有状态参数所对应的操作指令；若否，则控制遍历模块301继续遍历物料调度规则。
设备的实时状态信息包含有多个状态参数，遍历模块301针对每个状态参数遍历物料调度规则，以获得所有状态参数所对应的操作指令。而且，在前一个状态参数遍历物料调度规则完毕，并获得对应的操作指令之后，遍历模块301并不立即向执行单元400发送物料调度规则所对应的操作指令，而是将其存储在存储单元100中。然后，利用第一判断模块302判断遍历模块301是否遍历全部的物料调度规则，待获得了所有状态参数所对应的操作指令之后，再同时向执行单元400发送所有操作指令。
另外，由于所有操作指令的执行完毕时间存在两种情况，即，第一种情况是所有操作指令同时执行完毕；第二种情况是所有操作指令中有先执行完毕的操作指令。因此，更新单元500进一步包括更新模块502和第二判断模块501，其中，第二判断模块501用于根据来自执行单元400的信号判断所有操作指令是否同时执行完毕，若是，则向更新模块502发送第一信号；若否，则向更新模块502发送第二信号。更新模块502用于在接收到来自第二判断模块501的第一信号时，将设备的实时状态信息更新为所有操作指令执行完毕之后的设备状态，并向判断单元200发送有关重新判断的信号。更新模块502在接收到来自第二判断模块501的第二信号时，将设备的实时状态信息更新为先执行完毕的操作指令所对应的设备状态，以及正在执行的操作指令所对应的设备状态，并向判断单元200发送有关重新判断的信号。由上可知，利用第二判断模块501对上述两种不同的情况进行判断，并利用更新模块502针对这两种情况对设备的状态进行更新。
以上所述实施例仅表达了本发明的几种实施方式，其描述较为具体和详细，但并不能因此而理解为对本发明专利范围的限制。应当指出的是，对于本领域的普通技术人员来说，在不脱离本发明构思的前提下，还可以做出若干变形和改进，这些都属于本发明的保护范围。

Claims (13)

  1. 一种基于设备实时状态的物料调度方法，其特征在于，包括以下步骤：
    S1，根据已确定的关键参数，预先获得最优的物料调度规则；
    S2，判断所有物料是否均已完成指定的传输和工艺任务，若是，则结束调度；若否，则执行步骤S3；
    S3，根据设备的实时状态信息逐个遍历所述物料调度规则，并根据遍历结果执行所述物料调度规则所对应的操作指令；
    S4，将所述设备的实时状态信息更新为所述操作指令执行完毕之后所对应的设备状态，返回步骤S2。
  2. 根据权利要求1所述的基于设备实时状态的物料调度方法，其特征在于，所述关键参数包括：预清洗时间、去气时间、所述物料在各个工艺位进行工艺的时间、机械手的取放片时间以及所述物料自当前工艺位移动至下一工艺位的传输时间。
  3. 根据权利要求1所述的基于设备实时状态的物料调度方法，其特征在于，所述步骤S3进一步包括下列步骤：
    步骤S31，逐条结合所述设备的实时状态信息中的状态参数，遍历所述物料调度规则，直至获得所有状态参数所对应的操作指令；
    步骤S32，判断是否已遍历全部的物料调度规则，若是，则执行所有状态参数所对应的操作指令；若否，则返回所述步骤S31。
  4. 根据权利要求1所述的基于设备实时状态的物料调度方法，其特征在于，所述步骤S4进一步包括下列步骤：
    步骤S41，判断所有所述操作指令是否同时执行完毕，若是，则执行步 骤S42；若否，则执行步骤S43；
    步骤S42，将所述设备的实时状态信息更新为所有操作指令执行完毕之后的设备状态，返回所述步骤S2；
    步骤S43，将所述设备的实时状态信息更新为先执行完毕的操作指令所对应的设备状态，以及正在执行的操作指令所对应的设备状态，返回所述步骤S2。
  5. 根据权利要求1所述的基于设备实时状态的物料调度方法，其特征在于，
    所述设备包括装载腔室、预清洗腔室、去气腔室和工艺腔室，其中，在所述装载腔室内设置有机械手，用于在所述预清洗腔室、去气腔室和工艺腔室之间传输物料；在所述工艺腔室内、且沿其周向对称分布有多个工艺位，用于彼此独立地加工物料，并且在所述工艺腔室内还设置有转盘和圆盘，所述转盘用于通过旋转将所述物料传输至相应的圆盘上方；所述圆盘通过升降将所述物料传输至所述工艺位或者转盘上；
    所述物料调度规则包括：
    步骤S100，获得所述设备的初始状态信息；
    步骤S101，更新所述机械手的状态；
    步骤S102，更新所述圆盘的状态；
    步骤S103，判断所述装载腔室是否有所述物料且所述预清洗腔室是否为空，若是，则执行步骤S103-1；若否，则执行步骤S104；
    步骤S104，判断所述预清洗腔室是否加工完毕，若是，则执行步骤S105；若否，则执行步骤S104-1；
    步骤S105，判断所述去气腔室是否为空，若否，则执行步骤S105-1；若是，且所述机械手空闲，则执行步骤S106；若所述机械手不空闲，则执行步骤S107；
    步骤S106，利用所述机械手将所述物料自所述预清洗腔室传输至所述去气腔室，并更新所述预清洗腔室、所述去气腔室和所述机械手的状态；
    步骤S107，判断是否是结尾输出，若是，则按照结尾加工规则调度物料；若否，则执行步骤S108；所述结尾输出是指：所述装载腔室没有所述物料、所述预清洗腔室和所述去气腔室已加工完毕、只有所述圆盘上还有未加工的所述物料；
    步骤S108，判断是否加工完毕，若是，则结束；若否，则执行步骤S101；
    步骤S103-1，判断所述机械手是否空闲，若是，则执行步骤S103-2；若否，则执行步骤S104；
    步骤S103-2，利用所述机械手将所述物料自所述装载腔室传输至所述预清洗腔室，并更新所述机械手和所述预清洗腔室的状态，然后执行步骤S107；
    步骤S104-1，判断所述去气腔室的工艺是否完毕，若是，且所述机械手空闲，则执行步骤S104-2；若否，则执行步骤S105；
    步骤S104-2，判断所述圆盘是否可用，若是，则执行步骤S104-3；
    步骤S104-3，利用所述机械手将物料自所述去气腔室传输至所述工艺位，并更新所述机械手、所述去气腔室和所述工艺位的状态，然后执行步骤S107；
    步骤S105-1，判断所述去气腔室是否加工完毕，若是，且所述机械手空闲，则执行步骤S104-2；若否，则执行步骤S106。
  6. 根据权利要求5所述的基于设备实时状态的物料调度方法，其特征在于，所述设备还包括缓存腔室；
    在所述步骤S104-2中，若所述圆盘不可用，则执行步骤S104-4；
    步骤S104-4，判断所述缓存腔室是否可用，若是，则执行步骤S104-5；若否，则执行步骤S105；
    步骤S104-5，所述机械手将物料自所述去气腔室传输至所述缓存腔室， 并更新所述机械手、所述缓存腔室、所述去气腔室的状态，然后执行所述步骤S107。
  7. 根据权利要求5所述的基于设备实时状态的物料调度方法，其特征在于，所述结尾加工规则为：
    判断所述圆盘是否空闲，若是，则转动所述转盘，以将未加工的物料传输至所述圆盘上方；升起所述圆盘，以将所述物料传输至相应的所述工艺位内进行加工。
  8. 根据权利要求7所述的基于设备实时状态的物料调度方法，其特征在于，若所述圆盘空闲，且两个以上的所述工艺位均有未加工的物料，则同时对该未加工的物料进行加工。
  9. 根据权利要求1所述的基于设备实时状态的物料调度方法，其特征在于，在所述步骤S1中，根据已确定的关键参数，基于动态规划理论，获得最优的物料调度规则。
  10. 一种基于设备实时状态的物料调度系统，其特征在于，包括存储单元、判断单元、调度单元、执行单元和更新单元，其中，
    所述存储单元用于预先存储最优的物料调度规则，所述物料调度规则根据已确定的关键参数获得；
    所述判断单元用于判断所有物料是否均已完成指定的传输和工艺任务，若是，则向所述调度单元发送有关结束调度的信号；若否，则向所述调度单元发送遍历信号；
    所述调度单元用于在接收到有关结束调度的信号时，结束调度；在接收到所述遍历信号时，根据设备的实时状态信息逐个遍历所述存储单元中的所述物料调度规则，并根据遍历结果向所述执行单元发送所述物料调度规则所 对应的操作指令；
    所述执行单元用于执行来自所述调度单元的操作指令，并在所述操作指令执行完毕时向所述更新单元发送信号；
    所述更新单元用于根据来自所述执行单元的信号将所述设备的实时状态信息更新为所述操作指令执行完毕之后所对应的设备状态，并向所述判断单元发送有关重新判断的信号。
  11. 根据权利要求10所述的基于设备实时状态的物料调度系统，其特征在于，所述关键参数包括：预清洗时间、去气时间、所述物料在各个工艺位进行工艺的时间、机械手的取放片时间以及所述物料自当前工艺位移动至下一工艺位的传输时间。
  12. 根据权利要求10所述的基于设备实时状态的物料调度系统，其特征在于，所述调度单元包括遍历模块和第一判断模块，其中，
    所述遍历模块，用于在接收到所述遍历信号时，逐条结合所述设备的实时状态信息中的状态参数，遍历所述物料调度规则，直至获得所有状态参数所对应的操作指令；
    所述第一判断模块，用于判断所述遍历模块是否已遍历全部的物料调度规则，若是，则控制所述遍历模块向所述执行单元发送所有状态参数所对应的操作指令；若否，则控制所述遍历模块继续遍历所述物料调度规则。
  13. 根据权利要求10所述的基于设备实时状态的物料调度系统，其特征在于，所述更新单元包括更新模块和第二判断模块，其中，
    所述第二判断模块用于根据来自所述执行单元的信号判断所有所述操作指令是否同时执行完毕，若是，则向所述更新模块发送第一信号；若否，则向所述更新模块发送第二信号；
    所述更新模块用于在接收到来自所述第二判断模块的第一信号时，将所 述设备的实时状态信息更新为所有操作指令执行完毕之后的设备状态，并向所述判断单元发送有关重新判断的信号；在接收到来自所述第二判断模块的第二信号时，将所述设备的实时状态信息更新为先执行完毕的操作指令所对应的设备状态，以及正在执行的操作指令所对应的设备状态，并向所述判断单元发送有关重新判断的信号。
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