WO2017095097A1 - Capteur à haute sensibilité contenant des fissures linéairement induites et son procédé de fabrication - Google Patents

Capteur à haute sensibilité contenant des fissures linéairement induites et son procédé de fabrication Download PDF

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WO2017095097A1
WO2017095097A1 PCT/KR2016/013789 KR2016013789W WO2017095097A1 WO 2017095097 A1 WO2017095097 A1 WO 2017095097A1 KR 2016013789 W KR2016013789 W KR 2016013789W WO 2017095097 A1 WO2017095097 A1 WO 2017095097A1
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Prior art keywords
sensor
crack
high sensitivity
sensitivity sensor
thin film
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PCT/KR2016/013789
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English (en)
Korean (ko)
Inventor
최용환
이태민
이건희
최만수
강대식
페트로피키트사
Original Assignee
재단법인 멀티스케일 에너지시스템 연구단
서울대학교산학협력단
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Priority claimed from KR1020160097970A external-priority patent/KR101898604B1/ko
Application filed by 재단법인 멀티스케일 에너지시스템 연구단, 서울대학교산학협력단 filed Critical 재단법인 멀티스케일 에너지시스템 연구단
Priority to CN201680069974.2A priority Critical patent/CN108291797B/zh
Priority to US15/779,202 priority patent/US20200240859A1/en
Publication of WO2017095097A1 publication Critical patent/WO2017095097A1/fr

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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/02—Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
    • A61B5/024—Detecting, measuring or recording pulse rate or heart rate
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes

Definitions

  • the present invention relates to a linear sensor-induced crack-containing high sensitivity sensor and a method for manufacturing the same, and applied to a measurement or artificial skin requiring high precision for sensing tensile force and pressure by using a conductive thin film formed with linear cracks. This relates to a possible high sensitivity sensor.
  • a high sensitivity sensor is a device that detects a minute signal and delivers it as data such as an electrical signal, which is one of the components required in the modern industry.
  • capacitive sensors piezoelectric sensors, strain gauges and the like are known as sensors for measuring pressure and tensile force.
  • Strain gauge sensor which is a conventional tensile sensor, detects mechanical change as an electrical signal. When it is attached to the surface of a machine or structure, the strain gauge sensor is used to measure the change in fine dimension, that is, the strain. It is possible to know the stress which is important for confirming the strength and the safety from the size of the strain.
  • strain gauge measures the deformation of the surface of the workpiece in accordance with the change in the resistance value of the metal resistance element, and in general, the resistance value of the metal material increases with increasing force from the outside and decreases with compression.
  • Strain gages are applied to sensors as sensors for converting physical quantities such as force, pressure, acceleration, displacement, and torque into electrical signals, and are widely used for measurement control as well as experiments and research.
  • strain gauge sensors are susceptible to corrosion due to the use of metal wires, are not only very sensitive, but also have low output values, requiring additional circuitry to compensate for small signals, and semiconductor tension sensors are heat sensitive.
  • the pressure sensor is a sensor that can measure the pressure applied to the surface, which is an essential element when manufacturing artificial skin. Strain represents the horizontal change in length applied to the surface, while pressure represents the force applied perpendicular to the surface.
  • Conventional pressure sensors measure the resistance value of a silicon film made of thin film that changes with pressure, and is widely used not only for research and measurement but also in industry.
  • the conventional pressure sensor has a disadvantage of being unable to distinguish small pressures due to its very low sensitivity and cannot be bent. This disadvantage makes it impossible to apply to artificial skin, it is necessary to manufacture a sensor that can bend while detecting a small pressure.
  • the senor can be driven only in a specific environment, or affected by various environmental factors, such that the accuracy of the measured value is degraded. There is a problem that is difficult to secure. In addition, these sensors have a problem that it is difficult to manufacture a flexible structure due to its structural problems.
  • strain sensors based on carbon nanotubes, nanofibers, graphene platelets and mechanical cracks have been reported.
  • the crack sensor was affected by the spider's sensory system. Spider sensor is known to be very sensitive to strain and vibration.
  • the technical problem to be solved in the present invention is to maintain the accuracy of the measured value even after repeated use while being less affected by the environment, and has a high sensitivity sensor that can sense the change in tension and pressure applicable to a variety of fields with flexibility To provide.
  • Another technical problem to be solved by the present invention is to provide a method for manufacturing the high sensitivity sensor.
  • a flexible support having a hole pattern formed thereon;
  • the conductive thin film includes cracks induced in a straight line having a crack surface facing each other and at least some of the surfaces in contact with each other,
  • the crack surface is guided in a straight shape by a regular hole pattern formed in the flexible support,
  • a high sensitivity sensor for measuring an external stimulus by measuring an electrical change caused by a change in contact area or a short circuit or re-contact as the crack plane moves in response to an external physical stimulus.
  • the present invention also provides
  • It provides a method of manufacturing a high-sensitivity sensor comprising a; stretching the conductive thin film to induce a linear crack.
  • the high-sensitivity sensor of the present invention is capable of measuring tension and / or pressure with high sensitivity using a conductive thin film in which linearly induced cracks are formed on one surface of the support, and has flexibility to be applicable to various fields.
  • the high-sensitivity sensor as described above can be applied to highly accurate measurement or artificial skin, and can be utilized as a positioning detection sensor by pixelating the sensor, and thus can be used as a precision measurement field, a biometric device using human skin, and the like. It can be usefully used in the field of motion measuring sensor, display panel sensor and the like.
  • the high-sensitivity sensor can be mass-produced in a simple process, thereby having a very high economy.
  • FIG. 1 is a model of a crack lip having grains of size 1.
  • FIG 3 is a schematic diagram of a manufacturing process of a crack sensor according to an exemplary embodiment.
  • FIG. 4 is an SEM image (c, d) showing changes in the surface of the sensor (a, b) before and after pulling the crack sensor and changes in the crack on the conductive thin film according to one embodiment.
  • FIG. 5 is an SEM image showing that cracks are formed (b, c) before (a) and after the cracks are applied.
  • FIG. 6 is an SEM image showing the formation of cracks in various gap lengths.
  • FIG. 7 is a graph (b, d) showing a difference (a) of crack formation patterns and a FEM simulation result (c) for identifying the gaps at various gap lengths, and illustrating resistance changes according to crack formation differences.
  • FIG. 8 is a graph of the surface of a crack-based sensor randomly formed without patterning and a resistance change measured using the same.
  • FIG. 9 is a conceptual diagram and a result graph showing a change pattern of resistance in the tensile direction.
  • 10 is a load cell for measuring changes due to pressure and tension.
  • Figure 11 is a graph showing the reproducibility of the change in the resistance and repeated experiments by loading and unloading according to the range of change rate.
  • FIG. 13 shows a normalized resistance vs strain curve comparing the theoretical value obtained by equation 6 with the experimental value measured by the crack sensor.
  • Fig. 15 shows experimental results showing resistance changes caused by various pressurization conditions of a pressure range (a) of 0 to 10 kPa, a pressure caused by a small ant (b) and a pressure caused by a wrist pulse (c, d).
  • FIG. 16 illustrates a high sensitivity sensor capable of simultaneously indicating position and pressure using a multi-pixel array and measured results using the same.
  • the present invention provides an inexpensive ultra high sensitivity strain and pressure sensor based on the induction formation of more precise mechanical cracks in a regular micro scale pattern.
  • the sensor according to the present invention can concentrate stress in a specific area around the hole by patterning a hole on the surface of the device, from which it is possible to precisely form a uniform crack connecting the hole.
  • the sensor of the present invention is a sensor capable of measuring the tensile rate and measuring the pressure applied to the surface. After depositing a thin metal film on the polymer to produce a mechanical crack. It can be effectively applied to wearable healthcare and can replace existing stretch or pressure sensors.
  • a flexible support having a hole pattern formed thereon;
  • the conductive thin film includes cracks induced in a straight line having a crack surface facing each other and at least some of the surfaces in contact with each other,
  • the crack surface is guided in a straight shape by a regular hole pattern formed in the flexible support,
  • a high sensitivity sensor for measuring an external stimulus by measuring an electrical change caused by a change in contact area or a short circuit or re-contact as the crack plane moves in response to an external physical stimulus.
  • It provides a method of manufacturing a high-sensitivity sensor comprising a; stretching the conductive thin film to induce a linear crack.
  • the high-sensitivity sensor according to the present invention may form cracks uniformly formed in a straight line along the hole pattern by the hole pattern formed on the flexible support, and the formation of such a straight crack may further improve the sensitivity of the sensor. Can be.
  • the crack sensor when a conductive thin film formed on a hole pattern formed on the flexible support is subjected to an external physical stimulus due to tension or pressure, a stress sensor is formed around a position where a hole formed on the flexible support is located. ), The crack surface can be uniformly formed along the contact surface between the hole and the hole.
  • the crack surface is formed between the hole and the hole as shown in the adjacent c and d of Figure 4, the length (G) of the crack surface as shown in Figure 7a is the center of the hole adjacent to the center of the hole It may have a length of 50% or more with respect to the length (P) of the straight line followed by, preferably, having a length of 60% or more.
  • the crack may not be formed in a straight line, which is formed in the form of a plurality of cracks are not straight, as shown in Figure 6a and 7a Sensitivity may be reduced.
  • the hole (hole) pattern may be any shape, such as circular, oval, square, rhombus, asterisk, cross, etc., preferably a rhombus made of a curve as shown in c, d of FIG. That is, a rhombus consisting of four arcs with four vertices in the shape of a cross or a curve may be suitable.
  • the hole pattern described above may be advantageous for uniformly forming cracks of a straighter shape by providing directionality in the generation of cracks at each vertex.
  • Crack sensor according to the present invention is generated by the stress concentrated in two adjacent hole pans by the external force by the hole pattern as shown in Figure 4c, d, as shown in Figure 4d and 6b by the external force Cracks may be formed in a straight line along the hole pattern.
  • the high sensitivity sensor of the present invention may exhibit a sensitivity ( ⁇ R / R 0 ) of 1 to 1 ⁇ 10 6 at a strain of 0 to 10%.
  • the gauge factor of the high sensitivity sensor according to the present invention is defined as ( ⁇ R / R 0 ) / ⁇ , and the gauge factor may be 2 ⁇ 10 6 or more in a strain range of 0 to 10%.
  • the high sensitivity sensor according to the present invention may exhibit a sensitivity ( ⁇ R / R 0 ) of 2 ⁇ 10 4 or more at a pressure in the range of 7 to 10 kPa, and preferably 1 ⁇ 10 5 or more at a pressure in the range of 8 to 9.5 kPa. .
  • the present invention exhibits high sensitivity by pressure sensitivity, which can be used to measure physiological signals such as pulses by attaching to the wrist as shown in FIGS. 15C and 15D.
  • Figure 15c is a result of measuring the pulse by attaching a high-sensitivity sensor according to the present invention to the wrist
  • Figure 15d is a high-sensitivity sensor according to the present invention can distinguish the three minute differences, such as pulse percussion wave, tidal wave, diastolic wave It means that it has high precision as much as possible.
  • the external physical stimulus may be applied at various angles with respect to the crack surface, the axis of force with respect to the direction in which the external physical stimulus exerts a force on the crack surface is perpendicular (90 °) or 45 degrees.
  • the axis of force with respect to the direction in which the external physical stimulus exerts a force on the crack surface is perpendicular (90 °) or 45 degrees.
  • the gauge factor The change in gauge factor may be greater, and more preferably an external force may be applied to the crack surface in an angle range of 90 ° ⁇ 10 °.
  • the high-sensitivity sensor is a sensor in which cracks formed in the conductive thin film are spaced according to tension or pressure, thereby measuring the change in resistance of the conductive thin film to measure external tension or pressure.
  • the resistance increases as the metal thin film is stretched, but in the case of the present invention, the crack gap of the metal thin film is opened. As crack cracks open, electrical shorts increase, and resistance increases rapidly. For this reason, it has a much higher sensitivity than the conventional strain gauge sensor.
  • the cracks present in the conductive thin film may be induced in a straight line according to the hole pattern formed in the flexible support, the extent of the crack is also generated lifespan spacing, shape, thickness of the conductive thin film, forming conditions And the like, and are not particularly limited.
  • the flexible support is selected from the group consisting of polyurethane acrylate (PUA), polydimethylsiloxane (PDMS), polyethylene terephthalate (PET), polypropylene (PP), polyethylene (PE) and the like. It is preferably any one selected or a combination thereof, most preferably polyurethane acrylate (PUA).
  • PUA polyurethane acrylate
  • PDMS polydimethylsiloxane
  • PET polyethylene terephthalate
  • PP polypropylene
  • PE polyethylene
  • the conductive thin film is preferably any one selected from the group consisting of Au, Ag, Pt, Cu, Cr, Pt, etc., or a combination thereof, most preferably Cr / Pt combination. Can be.
  • the thickness of the conductive thin film is not limited, but preferably has a thickness such that cracks can be formed by mechanical methods such as tensile and bending, and the formation conditions of such a crack is a conductive thin film. And the type of flexible support.
  • the thickness of the conductive thin film is preferably 0.1 nm to 1 ⁇ m, more preferably 10 nm to 50 nm, even more preferably 20 nm to 30 nm.
  • the Young's modulus of the conductive thin film may be 10 10 to 10 12 .
  • the gauge factor of the high sensitivity sensor may be 1 x 10 5 to 1 x 10 6 (1 to 10% tensile range).
  • the gauge factor refers to the rate of change of the strain gauge's resistance to generated strain.
  • the flexibility of the high sensitivity sensor means that it can be bent to a minimum radius of 1 mm or more.
  • the high-sensitivity sensor of the present invention can be applied in various fields such as pressure sensor, tension sensor, artificial skin, etc., and can be utilized as positioning detection sensor by pixelating the sensor.
  • the present invention carried out a theoretical analysis of the resistance vs strain data, which was in agreement with the results of the experimental data at strains not too large.
  • the inventors have revealed a universal mechanism for strain sensors based on parallel cracks formed on a uniform 20 nm Pt film of particulate form cracked on a stretchable polymer.
  • free cracks cut the sensor strip by a technique that produces a large unidirectional strain.
  • the normalized conductance S vs. strain ⁇ of the sensor, defined by Equation (1) below, is the probability distribution function (pdf) P (x) of the steps on the cracks that form the contact between the cracks lip: Is determined by
  • equation P (x) has only parameters related to size.
  • x ⁇ / ⁇ 0 and k is a proportional coefficient defined in relation to the crack gap width with respect to strain. k may differ depending on the materials constituting the parallel crack system, which can be obtained from the experiment.
  • Equation 2 indicates that the small step of the crack protrusion formed by the shift of the grain is the same distribution as the large step formed by the accumulation of the grain, which is the elasticity of the substrate having no scale and any length characteristics. Because of the presence of the area, it may not be possible to distinguish between large and small meandering projections.
  • ⁇ and B are variables of pdf.
  • the large non-zero probability, except for the rare contact between the crack lip, is in the nature of the conduction mechanism through the crack, and therefore coincides with the long tail distribution.
  • Equation 5 renders the normalized resistance. The normalized resistance is remarkably consistent with the experimental results with strains up to 2%.
  • Equation 4 the log-logistic pdf of Equation 4 can be derived with Equation 1 below.
  • the present invention can propose a generalized exponential law for data fitting by experimenters doing free parallel crack studies.
  • FIGS. 5B and 5C Important differences between the cracks formed in previous studies and the present invention are shown in FIGS. 5B and 5C.
  • the cracks between the pattern patches closely follow the "crests" of the wrinkles on the metal / polymer film.
  • the local deviation is related to the size of the grains and, therefore, may not satisfy the modification equation 1 for free crack generation.
  • the pattern patches are pressed to each other in a direction horizontal and perpendicular to the deformation direction, due to a Poisson ratio of 0.5, which is an inherent property of the rubbery material.
  • each i-th particle along the crack (crack orbit) lip can move up and down with a probability of 1/2 and yi movement (in the deformation direction).
  • the crack step size refers to the travel distance of the up (down) trajectory by several adjacent particles.
  • the sum of three grain movements in one direction produces a step of size X.
  • the local grain shift is distributed in the local pdf P (y).
  • the grains adjacent to normalized size 1 moving perpendicular to the small steps y1, ..., y2 may have an overall pdf P (x) function of step size x.
  • Equation 7 Equation 7 as the Fourier integral of the delta function
  • Equation 11 The Cauchy integration of Equation 11 can be analyzed in general terms.
  • the decay of the function P (x) may be nearly exponential and may indicate that it may be nearly independent of the particular form of P (y).
  • All other poles can be complex and can lie at the bottom of the complex plane (see example in FIG. 2).
  • Equation 6 The exponential law function and the exponential function can be regarded as the difference between Equations 6 and 16.
  • Equation 10 Equation 17
  • Equation 13 then takes the form:
  • Equation 17 can be found numerically.
  • the lowest z 0 1.256, and the other poles are 2.789 ⁇ 7.438 i and 3.360 ⁇ 13.866 i ... (see Figure 2).
  • the resistance reacts as flattening by increasing the slope of the resistance on the semi-logarithmic scale.
  • the parameter measures the flatness of the crack.
  • the parameter of strain measured in% is to be.
  • a crack sensor was prepared as shown in FIGS. 3A-3C.
  • PDMS polydimethylsiloxane
  • PUA polyurethane acrylate
  • the patterned 10 nm chromium layer was formed by thermal evaporation with a thermal evaporator (Selcos Inc.) and deposited a sputtered 20 nm platinum layer.
  • the metal layer deposited PUA film was carefully peeled off the PDMA / glass mold and then tensioned 5% in the x / y direction using a custom stretcher.
  • the crack sensor before and after tensioning is shown in FIG. 4.
  • FIGS. 4 and 5 show that the crack is opened as the deformation is applied to the high sensitivity sensor.
  • FIG. 16b A schematic diagram of a multiple pixel system is shown in FIGS. 16A and 16C.
  • Each pixel (1 ⁇ 1 cm 2 islands) was constructed with a thickness of 100 ⁇ m PUA / 10 nm Cr / 20 nm Pt with a hole pattern, and then stretched and stretched 10% bi-axially to generate cracks.
  • the electrical connection between cracked Pt and Lab View-based PXI-4071 system (NI instrument Inc.) was formed by gold lines (Au, 50 nm thick) deposited on PET films using the shadow mark method.
  • Each pixel manufactured was freely placed on a PET film by a conductive polymer (CW2400, circuitworks) or electrically connected by a gold line.
  • CW2400 conductive polymer
  • P is the shortest distance to the hole center, is the same in all three patterns tested, G is the length of the gap, and the gap represents the shortest distance between the tip of the hole.
  • 6A shows that when the length of the gap G is 10 ⁇ m and 15 ⁇ m, several cracks can be induced, and 6b shows that a very straight crack can be generated when G is 20 ⁇ m.
  • the occurrence of a large number of uneven cracks, such as that shown in FIG. 6A, can lower the sensitivity to changes in resistance, and these results are shown in FIGS. 7B and 7D.
  • the crack of the crack sensor according to the invention is advantageous in the case where it is induced in a straight line, which is shown in the results of FIGS. 7b and 7d.
  • the resistance change at 20 ⁇ m of FIG. 7B shows a sharper graph compared to the sensor based on the disordered crack, which shows the change in resistance according to the change of the distance of the crack lip. Respond more accurately to changes in the distance of cracks.
  • Figure 9d is a result of the resistance change that occurs as the angle of the crack generated in the lattice shape, the largest change in resistance when the angle is 90 °, the change in resistance is shown in the order of 45 °, 60 ° .
  • the change in resistance is more sensitive when the rectangular patch formed by the cracks generated in the form of a lattice is tensioned through the force symmetrically at the same angle, which means that the distance of the cracks can be more effectively opened (90 ° -tension).
  • the angle generated by the difference of the angle) is an angle of 45 ° or less at an angle of 45 ° or more, which may result in a lower resistance compared to 45 ° as a narrower distance between cracks is formed. However, this may have less effect at angles close to 90 °.
  • FIGS. 11A to 11D illustrate changes in electrical resistance measured by stretching up to a maximum of 10% and returning to an original state, that is, 0% strain
  • FIGS. 11A to 11C illustrate hysteresis and reproducibility of the sensor of Example 1. It is a graph.
  • the high sensitivity crack sensor of Example 1 was fixed by a custom pressure test equipment.
  • FIG. 11A shows the results of reproducibility tests measured at 5000 repetition cycles in the strain ranges of 0 to 2.5%, 0 to 5%, and 0 to 10%
  • FIG. 11B shows reproducibility after 5000 cycles at 10% strain. It represents. From this, it can be seen that the crack sensor according to the present invention shows little difference in performance even after 5000 or more repeated measurements.
  • FIG. 11C shows a reproducibility result of repeating the loading-unloading test using the loading cell of FIG. 10 1800 times in the strain range of 0 to 10%, and the crack sensor according to the present invention has excellent reproducibility from the results of the graph. It can be seen that.
  • 12A to 12C show graphs measuring resistance changes measured in loading and unloading tests in the strain ranges of 0 to 2.5%, 0 to 5%, and 0 to 10%.
  • the crack-based sensor of Example 1 according to the present invention shows little hysteresis in the loading and unloading process, but the hysteresis increases slightly as the applied strain range increases.
  • FIG. 13 shows a strain-resistance curve in which the resistance change according to the strain is fitted based on data obtained experimentally and theoretically. Plot of From the above results, it can be seen that the crack sensor according to the present invention exhibits almost the same result as the experimental data in the range of strain not too large.
  • Figure 14 is a graph showing the reaction time when a sudden change, it can be seen that the reaction within 100ms through the results of the experiment. In addition, it can be seen from FIG. 14 that the change of the strain and the change of resistance show almost the same response.
  • the application of pressure can stretch the sample and increase the resistance of the metal film.
  • the crack-based sensor of Example 1 is mounted on a custom machine, and the resistance data can be measured with a resistance analyzer (PXI-4071, National Instruments).
  • the resistance of the pressure data obtained can be linearized into three pressure zones, which is shown in Figure 15a.
  • the graph of FIG. 15A is
  • FIG. 15B shows a result of measuring a small ant mass (Ponera japonica, 1 mg) corresponding to a pressure of 0.2 Pa using the crack sensor, which shows that the crack sensor according to the present invention exhibits high sensitivity to pressure. .
  • the crack sensor was mounted on the wrist to measure the physiological signal of the wrist pulse.
  • FIG. 15C and 15D show graphs of measuring physiological signals of the wrist pulse, and FIG. 15D shows enlarged results of a part of the 15C graph, and the crack sensor according to the present invention is shown in FIG. It can be seen that the sensitivity is high enough to measure all the step changes.
  • Example 2 To demonstrate sensor scalability and spatial resolution and pressure sensing capability, a multi-pixel array was fabricated by the method of Example 2, which is shown in FIG. 16A. Crack-based devices exhibit high flexibility and may be warped as shown in FIG. 16B.

Abstract

L'invention concerne un capteur à haute sensibilité ayant une couche mince conductrice contenant des fissures linéairement induites. Le capteur à haute sensibilité se rapporte à un capteur, obtenu en formant des microfissures linéairement induites sur une couche mince conductrice formée sur un support, pour mesurer la traction et la pression externes par la mesure d'un changement de la résistance électrique dû à une modification, à un court-circuit, ou à des ouvertures dans des structures de jonction formées par les microfissures. Le capteur de fissure conducteur à haute sensibilité peut être appliqué à des mesures à haute précision ou à des peaux artificielles, et peut être utilisé comme capteur de détection de positionnement par pixellisation du capteur. Ainsi, le capteur à haute sensibilité peut être efficacement utilisé dans les domaines des mesures précises, des dispositifs de mesure biologique à travers la peau humaine, des capteurs de mesure de mouvement humain, des capteurs de panneau d'affichage, etc.
PCT/KR2016/013789 2015-11-30 2016-11-28 Capteur à haute sensibilité contenant des fissures linéairement induites et son procédé de fabrication WO2017095097A1 (fr)

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CN201680069974.2A CN108291797B (zh) 2015-11-30 2016-11-28 含直线诱导的裂纹的高灵敏度传感器及其制造方法
US15/779,202 US20200240859A1 (en) 2015-11-30 2016-11-28 High-sensitivity sensor containing linearly induced cracks and method for manufacturing same

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Cited By (2)

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CN110327026A (zh) * 2019-05-16 2019-10-15 杨松 呼吸心跳检测装置和方法
CN114878034A (zh) * 2022-04-27 2022-08-09 厦门大学 可设计线性灵敏度传感器半球形超弹性微结构的确定方法

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