WO2017065048A1 - 光走査型の対象物検出装置 - Google Patents
光走査型の対象物検出装置 Download PDFInfo
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- WO2017065048A1 WO2017065048A1 PCT/JP2016/079409 JP2016079409W WO2017065048A1 WO 2017065048 A1 WO2017065048 A1 WO 2017065048A1 JP 2016079409 W JP2016079409 W JP 2016079409W WO 2017065048 A1 WO2017065048 A1 WO 2017065048A1
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- mirror surface
- mirror
- light beam
- rotation axis
- received light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/42—Simultaneous measurement of distance and other co-ordinates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
- G01S17/93—Lidar systems specially adapted for specific applications for anti-collision purposes
- G01S17/931—Lidar systems specially adapted for specific applications for anti-collision purposes of land vehicles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
- G01S7/4813—Housing arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/129—Systems in which the scanning light beam is repeatedly reflected from the polygonal mirror
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/09—Multifaceted or polygonal mirrors, e.g. polygonal scanning mirrors; Fresnel mirrors
Definitions
- the present invention relates to an optical scanning type object detection apparatus capable of detecting a distant object.
- an object detection device is used for crime prevention purposes to detect a suspicious person by installing it under the eaves of a building, or mounted on a helicopter or an aircraft, etc. It can also be applied to topographical survey applications that acquire the gas, and it can also be applied to gas detection applications that measure the gas concentration in the atmosphere.
- a light projecting system is composed of a laser diode as a light source and a collimating lens
- a light receiving system is composed of a light receiving lens (or mirror) and a light detecting element such as a photodiode.
- a reflecting mirror having a reflecting surface is disposed between the light projecting system and the light receiving system.
- the light emitted from the light projecting system is scanned and projected by the rotation of the reflecting mirror, so that the object can be measured two-dimensionally rather than measured at one point.
- an LED or the like may be used as the light source.
- a laser beam is projected onto a mirror or a polygon mirror having multiple mirror surfaces, and the laser beam is scanned by oscillating the mirror or rotating the polygon mirror.
- the technology to do is known.
- Patent Document 1 a first reflecting surface and a second reflecting surface are formed on a rotating mirror at an angle of 90 °, and a light beam emitted from a light source along a direction orthogonal to the rotation axis is transmitted to the first reflecting surface and the first reflecting surface.
- a configuration is disclosed in which the scanning line is not disturbed even when the rotation axis is tilted due to the rotational shake by scanning with two reflection surfaces reflected twice.
- Patent Document 2 a plurality of pairs of first mirrors and second mirrors are arranged, and the crossing angle of the first mirror and the second mirror is changed for each pair so that a single rotation can be performed at a plurality of different sub-scanning positions.
- a laser radar that can perform scanning is disclosed.
- An object of the present invention is to provide an optical scanning type object detection device.
- an optical scanning type object detection device reflecting one aspect of the present invention.
- a mirror unit formed with a first mirror surface and a second mirror surface that are inclined in a direction crossing the rotation axis and face each other at a predetermined angle, a light source, and a light receiving element;
- the light beam emitted from the light source is reflected by the first mirror surface, then reflected by the second mirror surface, and scanned and projected by the rotation of the mirror unit.
- a part of the light beam scattered by the object out of the scanned and projected light beam is reflected by the second mirror surface, then reflected by the first mirror surface and received by the light receiving element.
- the first mirror surface and the second mirror surface exceeding a predetermined distance from the rotation axis in the direction orthogonal to the rotation axis are cut.
- the distance in the rotation axis direction between the intersection of the extension lines of the side edges on the first mirror surface and the first point on the first mirror surface farthest from the intersection in the rotation axis direction is H, and the light receiving element
- r is the radius, and the first point and the first mirror surface of the received light beam
- the distance in the rotation axis direction to the center of gravity of the region when viewed from the direction orthogonal to the optical axis is h
- the first mirror surface that is farthest from the first point in the rotation axis direction When the distance in the rotation axis direction to the second point above is H ′,
- an optical scanning type object detection that is small and suppresses a decrease in the utilization efficiency of the received light flux at both ends of the peripheral part with respect to the central part of the scanning range, thereby ensuring sufficient object detection performance.
- (A) is a figure which shows the cross section of the mirror unit MU
- FIG. 1 is a schematic view showing a state in which a laser radar as an optical scanning type object detection device according to the present embodiment is mounted on a vehicle.
- the laser radar LR of the present embodiment is provided on the inner side of the upper end of the front window 1a of the vehicle 1, but may be disposed outside the vehicle (such as behind the front grill 1b).
- FIG. 2 is a cross-sectional view of the laser radar LR according to the present embodiment
- FIG. 3 is a perspective view showing the main part excluding the casing of the laser radar LR according to the present embodiment. It may be different from the actual situation.
- the laser radar LR is accommodated in the housing CS as shown in FIG.
- a window part WS capable of entering and exiting a light beam is formed on a side part of the casing CS, and the window part WS is formed of a transparent plate TR such as glass or resin.
- the laser radar LR narrows the divergence angle of the diverging light from the pulsed semiconductor laser (light source) LD that emits a laser beam and the semiconductor laser LD, for example, and converts it into substantially parallel light.
- the collimating lens CL and the laser beam made substantially parallel by the collimating lens CL are scanned and projected toward the object OBJ side (FIG. 1) by the rotating mirror surface, and from the scanned and projected object OBJ.
- a mirror unit MU for reflecting the scattered light
- an optical element MR for bending the optical path of the scattered light from the object OBJ reflected by the mirror unit MU
- a lens LS for collecting the reflected light reflected by the optical element MR
- a photodiode (light receiving element) PD that receives light collected by the lens LS.
- the emitted light beam and the received light beam overlap each other.
- the light emitting system LPS is constituted by the semiconductor laser LD and the collimating lens CL
- the light receiving system RPS is constituted by the optical element MR, the lens LS and the photodiode PD.
- the optical axis of the light projecting system LPS and the light receiving system RPS from the first mirror surface M1 to the optical element MR is substantially orthogonal to the rotation axis RO of the mirror unit MU.
- a hole MRa through which the outgoing light beam that has passed through the collimator lens CL passes is formed in the optical element MR arranged in the optical path of the outgoing light beam and the received light beam.
- the hole MRa is a transmission part that transmits the outgoing light beam, and a reflection surface other than the hole MRa constitutes a reflection part that reflects the received light beam.
- a reflection surface other than the hole MRa constitutes a reflection part that reflects the received light beam.
- the light projecting system LPS and the light receiving system RPS are replaced with an arrangement opposite to the arrangement shown in FIG. 2, and the light beam emitted from the collimating lens CL is reflected by the reflecting portion by the optical element MR and guided to the mirror surface M1, and the received light beam is guided.
- the configuration may be such that the light is transmitted through the transmission part, condensed by the lens LS, and guided to the photodiode (light receiving element) PD.
- a half mirror may be used as the optical element MR. When a half mirror is used, the surface on which the half mirror film is formed serves as both a transmission part and a reflection part.
- the mirror unit MU has a shape in which two quadrangular pyramids are joined together in opposite directions, that is, has four pairs of mirror surfaces M1 and M2 that are inclined in a direction facing each other. The crossing angles of each pair of mirror surfaces M1 and M2 are different.
- the mirror surfaces M1 and M2 that are inclined with respect to the rotation axis RO are preferably formed by depositing a reflective film on the surface of a resin material (for example, PC) in the shape of a mirror unit.
- the mirror unit MU is connected to the shaft SH of the motor MT and is driven to rotate.
- FIG. 4A is a schematic side view of the mirror unit MU
- FIG. 4B is a view of the configuration shown in FIG. 4A taken along line BB and viewed in the direction of the arrow.
- the mirror unit MU has a configuration in which the quadrangular pyramids are connected as shown by a dotted line in FIG. 4, when the mirror unit MU is rotated as shown in FIG.
- the circumscribed circle becomes a rotation locus of the corner portion C of the mirror unit MU and requires a large space. Other members need to avoid interference with this rotation locus. For this reason, it becomes an obstacle to miniaturization of the mirror unit MU and thus the laser radar LR.
- the mirror surfaces M1 and M2 are cut at a position of a radius R as a predetermined distance from the rotation axis RO.
- the rotation trajectory of the mirror unit MU is a circle with a radius R as indicated by a solid line. Depending on the inclination of the mirror surface and the setting of the radius R, there may be an edge. Thereby, the space required for the rotation of the mirror unit MU can be reduced, and the downsizing and thus the downsizing of the laser radar LR can be achieved.
- divergent light intermittently emitted in a pulse form from the semiconductor laser LD is converted into a substantially parallel light beam by the collimator lens CL, passes through the hole MRa of the optical element MR, and is rotated by the rotating mirror unit MU.
- a laser spot light having a vertically long rectangular cross section on the side of the external object OBJ after being incident on the first mirror surface M1, reflected there, and further reflected by the second mirror surface M2, then passing through the transparent plate TR. Scanned light is emitted.
- a substantially parallel light beam emitted from the collimating lens CL passes through a region (shown by hatching in FIG. 3) occupied by the received light beam RB on the first mirror surface M1.
- FIG. 5 is a diagram showing a state in which the detection range G of the laser radar LR is scanned with the emitted laser spot light SB (indicated by hatching) according to the rotation of the mirror unit MU.
- the crossing angles are different.
- the laser spot light is sequentially reflected by the rotating first mirror surface M1 and second mirror surface M2.
- the laser spot light reflected by the first pair of the first mirror surface M1 and the second mirror surface M2 moves from the left in the horizontal direction to the uppermost region Ln1 of the detection range G according to the rotation of the mirror unit MU. Scan to the right.
- the laser spot light reflected by the second pair of the first mirror surface M1 and the second mirror surface M2 moves horizontally in the second region Ln2 from the top of the detection range G according to the rotation of the mirror unit MU. Scanned from left to right.
- the laser spot light reflected by the third pair of the first mirror surface M1 and the second mirror surface M2 passes through the third region Ln3 from the top of the detection range G in the horizontal direction according to the rotation of the mirror unit MU. Scanned from left to right.
- the laser spot light reflected by the fourth pair of the first mirror surface M1 and the second mirror surface is moved from left to right in the horizontal direction in the lowermost region Ln4 of the detection range G according to the rotation of the mirror unit MU. Is scanned.
- the lens LS that functions as an aperture stop (here circular). Therefore, a part of the incident light finally enters the photodiode PD. That is, the scattered light shown by hatching in FIG. 2 does not enter the photodiode PD and is not used for light reception.
- the light beam condensed by the lens LS is a received light beam RB
- a predetermined cross section is obtained via the second mirror surface M2, the first mirror surface M1, and the optical element MR as shown by a one-dot chain line in FIG. Is received by the lens LS.
- the received light beam RB is not necessarily a circular cross section, it will be described here as a circular cross section.
- a region occupied by the received light beam RB on the first mirror surface M1 (a region incident on the lens LS) is represented by a circle.
- the received light beam RB moves horizontally from end to end of the first mirror surface M1, but by ensuring the moving length as long as possible, the received light beam RB Vignetting can be suppressed.
- the reflection position of the received light beam RB is too close to the second mirror surface M2 on the first mirror surface M1, and a part of the reflected light beam RB protrudes to the second mirror surface M2 side, the amount of light received by the photodiode PD decreases.
- the first mirror surface M1 is cut at the position of the radius R from the rotation axis RO (see FIG. 4). ), A part of the received light beam RB (part indicated by hatching in FIG. 6) protrudes from the first mirror surface M1, and similarly, the amount of light received by the photodiode PD decreases. Therefore, in the present embodiment, as indicated by the following formula (1) or (2), the position of the received light beam RB on the first mirror surface M1 is defined. As a result, it is possible to provide a laser radar LR that is small and can suppress a decrease in the mirror utilization efficiency of the received light beam at both ends of the peripheral portion of the scanning range, and ensures sufficient object detection performance.
- FIG. 7A shows a cross section of the mirror unit MU
- FIG. 7B shows a front view of the first mirror surface M1.
- the distance in the direction of the rotation axis RO from P2 is H
- the radius when the area of the light beam RB facing the first mirror and viewed from the direction orthogonal to the optical axis is converted to a circle is r
- FIGS. 8 to 11 show the mirror utilization efficiency of the received light beam with respect to the rotation angle of the mirror unit when the received light beam has a circular cross section.
- the received light beam faces the first mirror surface and is viewed from the direction perpendicular to the optical axis.
- the value of the center of gravity h of the region is changed from 1 to 8 mm.
- R is the radius of the region when the received light beam faces the first mirror surface and viewed from the direction perpendicular to the optical axis.
- the rotation angle of the mirror unit is set to 0 ° at the position facing the first mirror surface and is swung to one side.
- the criterion for determining the mirror utilization efficiency was 0.35 or more at a mirror unit rotation angle of 30 ° (60 ° on one side in the scanning range). The value of 0.35 is a value at which the detectable distance at a position of 60 ° on one side in the scanning range is approximately 60% of the detectable distance in the center of the scanning range.
- the mirror utilization efficiency becomes 0.17 when the rotation angle of the mirror unit is 30 °, which is lower than the reference value.
- the mirror utilization efficiency is 0.26, which is lower than the reference value.
- the mirror utilization efficiency is 0.42 or more, which exceeds the reference value.
- the example shown in FIG. 10 is the case where the radius r of the received light beam is 3 mm.
- the mirror utilization efficiency becomes 0.29 when the rotation angle of the mirror unit is 30 °, and the reference value is Below.
- the mirror utilization efficiency is 0.43 or more, which exceeds the reference value.
- the mirror utilization efficiency is 0.31 or less when the rotation angle of the mirror unit is 30 °. And below the standard value.
- the mirror utilization efficiency is 0.37 or more, which exceeds the reference value.
- FIGS. 12 to 15 show the mirror utilization efficiency of the received light beam with respect to the rotation angle of the mirror unit when the received light beam has a square cross section.
- the received light beam faces the first mirror surface and is orthogonal to the optical axis.
- the value of the distance h to the center of gravity of the region when viewed from above was changed to 1 to 8 mm, and the examination was performed.
- the rotation angle of the mirror unit is set to 0 ° at the position facing the first mirror surface and is swung to one side.
- H 10 mm.
- the criterion for determining the mirror utilization efficiency was 0.35 or more at a mirror unit rotation angle of 30 °.
- the mirror utilization efficiency is 0 when the rotation angle of the mirror unit is 30 °. .18, which is below the standard value.
- the mirror utilization efficiency is 0.75 or more, which exceeds the reference value.
- the mirror utilization efficiency is 0 when the rotation angle of the mirror unit is 30 °. .25, which is below the standard value.
- the mirror utilization efficiency is 0.43 or more, which exceeds the reference value.
- the mirror utilization efficiency is increased when the rotation angle of the mirror unit is 30 °. Is 0.31 or less, which is below the reference value.
- the mirror utilization efficiency is 0.44 or more, which exceeds the reference value.
- the rotation angle of the mirror unit is 30 °.
- the mirror utilization efficiency is 0.33 or less, which is below the reference value.
- the mirror utilization efficiency is 0.38 or more, which exceeds the reference value.
- the area occupied on the first mirror surface of the emitted light beam emitted from the light source and the area occupied on the first mirror surface of the received light beam have been described as examples.
- the areas occupied on one mirror surface may not overlap and may be in different positions.
- the present invention is not limited to the embodiments described in the specification, and other embodiments and modifications are included for those skilled in the art from the embodiments and technical ideas described in the present specification. it is obvious.
- the description and the embodiments are for illustrative purposes only, and the scope of the present invention is indicated by the following claims.
- all the contents of the present invention described with reference to the drawings can be applied to the embodiments, and can also be applied to a vehicle such as a helicopter or a security sensor that is installed in a building and detects a suspicious person.
- the semiconductor laser is used as the light source.
- the present invention is not limited to this, and it goes without saying that an LED or the like may be used as the light source.
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Abstract
Description
回転軸と交差する方向に傾斜し所定の角度で向き合う第1ミラー面と第2ミラー面とが形成されたミラーユニットと、光源と、受光素子と、を有し、
前記光源から出射された光束は、前記第1ミラー面で反射した後、前記第2ミラー面で反射されると共に前記ミラーユニットの回転により走査投光され、
前記走査投光された光束のうち対象物で散乱された光束の一部が、前記第2ミラー面で反射した後、前記第1ミラー面で反射されて前記受光素子で受光されるよう構成された光走査型の対象物検出装置において、
前記ミラーユニットは、前記回転軸に直交する方向の前記回転軸から所定の距離を越える第1ミラー面及び第2ミラー面が切断されており、
前記第1ミラー面における側辺の延長線の交点と、前記交点から前記回転軸方向に最も離れた前記第1ミラー面上の第1点との前記回転軸方向の距離をH、前記受光素子が受光する受光光束を前記第1ミラー面に正対し光軸直交方向から見たときの領域面積を円形に換算したときの半径をr、前記第1点と前記受光光束の前記第1ミラー面に正対し光軸直交方向から見たときの領域の重心との前記回転軸方向の距離をh、前記第1点と、前記第1点から前記回転軸方向に最も離れた前記第1ミラー面上の第2点との前記回転軸方向の距離をH’としたとき、
r<0.4Hのとき、0.1<h/H≦(H’-r)/H (1)
r≧0.4Hのとき、0.2<h/H≦(H’-r)/H (2)
を満たすものである。
r<0.4Hのとき、0.1<h/H≦(H’-r)/H (1)
r≧0.4Hのとき、0.2<h/H≦(H’-r)/H (2)
本発明者らが行った実施例について説明する。図8~11は、受光光束が円形断面を持つ場合において、ミラーユニットの回転角度に対する受光光束のミラー利用効率を示すものであり、受光光束を第1ミラー面に正対し光軸直交方向から見たときの領域の重心位置hの値を1~8mmと変えて検討を行ったものである。また、rは受光光束を第1ミラー面に正対し光軸直交方向から見たときの領域の半径である。但し、ミラーユニットの回転角度は、第1ミラー面に正対する位置を0°とし、片側に振ったものである。又、ミラー利用効率が1の場合には受光光束にケラレが生じず、0の場合には受光光束がミラー面から外れ、完全なケラレが生じることを意味する。更に、H=10mmとしている。尚、ミラー利用効率の判定基準は、ミラーユニット回転角度30°(走査範囲における片側60°の位置)で0.35以上とした。この0.35という値は、走査範囲の中央における検知可能距離に対し、走査範囲における片側60°の位置での検知可能距離が、ほぼ6割の距離となる値である。
1a フロントウィンドウ
1b フロントグリル
CL コリメートレンズ
CS 筐体
G 検出範囲
LD 半導体レーザー
Ln1~Ln4 領域
LPS 投光系
LR レーザーレーダー
LS レンズ
M1 第1ミラー面
M2 第2ミラー面
MR 光学素子
MRa 孔
MT モータ
MU ミラーユニット
OBJ 対象物
PD フォトダイオード
RB 受光光束
RO 回転軸
RPS 受光系
SB レーザースポット光
SH 軸
TR 透明板
WS 窓部
Claims (4)
- 回転軸と交差する方向に傾斜し所定の角度で向き合う第1ミラー面と第2ミラー面とが形成されたミラーユニットと、光源と、受光素子と、を有し、
前記光源から出射された光束は、前記第1ミラー面で反射した後、前記第2ミラー面で反射されると共に前記ミラーユニットの回転により走査投光され、
前記走査投光された光束のうち対象物で散乱された光束の一部が、前記第2ミラー面で反射した後、前記第1ミラー面で反射されて前記受光素子で受光されるよう構成された光走査型の対象物検出装置において、
前記ミラーユニットは、前記回転軸に直交する方向の前記回転軸から所定の距離を越える第1ミラー面及び第2ミラー面が切断されており、
前記第1ミラー面における側辺の延長線の交点と、前記交点から前記回転軸方向に最も離れた前記第1ミラー面上の第1点との前記回転軸方向の距離をH、前記受光素子が受光する受光光束を前記第1ミラー面に正対し光軸直交方向から見たときの領域面積を円形に換算したときの半径をr、前記第1点と前記受光光束の前記第1ミラー面に正対し光軸直交方向から見たときの領域の重心との前記回転軸方向の距離をh、前記第1点と、前記第1点から前記回転軸方向に最も離れた前記第1ミラー面上の第2点との前記回転軸方向の距離をH’としたとき、
r<0.4Hのとき、0.1<h/H≦(H’-r)/H (1)
r≧0.4Hのとき、0.2<h/H≦(H’-r)/H (2)
を満たす光走査型の対象物検出装置。 - 前記ミラーユニットは、前記第1ミラー面と前記第2ミラー面を複数対有し、前記第1ミラー面と前記第2ミラー面の交差角が各々異なっている請求項1に記載の光走査型の対象物検出装置。
- 前記光源から出射された出射光束の前記第1ミラー面上で占める領域と、前記受光光束の前記第1ミラー面上で占める領域は、少なくとも一部が重なっている請求項1又は2に記載の光走査型の対象物検出装置。
- 前記光源から前記第1ミラー面までの前記出射光束の光路と、前記第1ミラー面から前記受光素子までの前記受光光束の光路中に、前記出射光束及び前記受光光束のうち一方を透過させる透過部と、他方を反射させる反射部と、を有する光学素子が配置されている請求項3に記載の光走査型の対象物検出装置。
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WO2008137601A1 (en) * | 2007-05-01 | 2008-11-13 | Reliant Technologies, Inc. | Optical scan engine using rotating mirror sectors |
AT508562B1 (de) * | 2009-09-02 | 2011-02-15 | Riegl Laser Measurement Sys | 3-d vermessungseinrichtung |
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JPH06324274A (ja) * | 1993-01-20 | 1994-11-25 | Asahi Optical Co Ltd | 走査光学系 |
JPH07182439A (ja) * | 1993-12-24 | 1995-07-21 | Sumitomo Electric Ind Ltd | ベッセルビーム走査装置 |
JP2014029317A (ja) * | 2012-07-03 | 2014-02-13 | Ricoh Co Ltd | レーザレーダ装置 |
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JPWO2017065048A1 (ja) | 2018-08-02 |
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