WO2017057950A1 - Collector of electrolyzer for manufacturing nitrogen trifluoride and method for manufacturing same - Google Patents

Abstract

A collector of an electrolyzer for manufacturing NF₃ according to the present embodiment comprises: a side portion, which surrounds the periphery of a predetermined number of anode electrodes, and which has the shape of a quadrangular tube; a flange formed to extend vertically with regard to the upper end of the side portion; and a reinforcement ring, which is arranged on the lower-end side of the side portion, which is formed to surround the side portion up to a preset height, and which has the shape of a plate-shaped ring, wherein the side portion has a reinforcement ring coupling portion formed thereon so as to protrude inwards and to be as thick as a size, which corresponds to the thickness of the reinforcement ring, from the lower end thereof to a height that corresponds to the height of the reinforcement ring.

Description

Collector of Nitrogen Trifluoride Electrolyzer and Manufacturing Method Thereof

The present invention relates to a collector of an electrolytic cell for producing nitrogen trifluoride (NF ₃ ) and a method for producing the same.

In general, fluorine gas is a period gas indispensable in the semiconductor manufacturing field, and nitrogen trifluoride (NF ₃ ) gas is widely used in semiconductor and TFT-LCD manufacturing as a cleaning gas or dry etching gas of a semiconductor. Recently, with the activation of the semiconductor industry and the FPD industry, the demand for the chamber cleaning gas is rapidly increasing.

In particular, the use of other fluorides (eg, SF ₆ or C ₃ F _8, etc.) is limited by global warming measures, and easy to decompose nitrogen trifluoride (NF ₃ ) as an alternative to these fluorides. It is getting more attention in the field.

In general, the production of nitrogen trifluoride (NF ₃ ) may be a method for direct fluorination reaction, a method using plasma or a method using electrolysis. The method using the direct fluorination reaction is to synthesize fluorine gas after it is introduced into a reactor containing ammonium bifluoride, which is synthesized through a two-step process. There are disadvantages. The method using plasma has a problem of low compatibility, high energy, and low efficiency. The production method of nitrogen trifluoride by electrolysis of molten salt is suitable for high yield and mass production.

Electrolyte may be the NH ₄ F and NH ₄ F or HF-NH ₄ F in the addition of the KF-HF induces KF or LiF HF-NH ₄ F-NH-4F-HF derived from the HF used. In the NF ₃ gas production process, NF ₃ and N ₂ gases are generated at the anode and H ₂ gas is generated at the cathode. The gas evolution reaction occurs simultaneously at the cathode and anode. Since NF ₃ gas generated at the anode reacts with H ₂ gas generated at the cathode, there is a possibility of explosion. Therefore, in order to suppress this, an electrolytic cell design that improves the prevention and mixing of H ₂ gas and NF ₃ gas is required.

In general, electrolytic cells are equipped with separator plates to separate the electrodes to reduce the possibility of explosion. In order to prevent corrosion of the separator and to prevent the separator from acting as an electrode, the separator is lined with fluorocarbon resin. Carbon and nickel electrodes can be used as the anode material, and nickel electrodes are generally used as anodes to reduce the amount of CF ₄ . Nickel electrodes, however, have the disadvantage of being easily dissolved, and some of the dissolved nickel is deposited on the cathode. When the electrolyzer is operated for a long time, the gap between the cathode and the separator becomes narrow, so that there is a problem of approaching the explosion limit due to the mixing of NF ₃ and H ₂ .

The very small NF ₃ bubbles produced at the nickel electrode do not rise vertically along the electrode but are diffused upwardly at an angle. The amount of NF ₃ gas generated per cross-sectional area of the anode nickel electrode is increased and the cathode is diffused by the diffusion of NF ₃ . The reaction of the electrode becomes extreme.

When the nickel electrode is used, deposition occurs on the bottom of the electrolytic cell in the form of NiF, and the distance between the electrode tip and the deposit gradually approaches. After the reaction progressed, the electrode tip close to the bottom of the electrolytic cell was buried in NiF. The tip of the NiF-embedded electrode can no longer function as an electrode, resulting in an increase in current density, an increase in voltage in the electrolyzer, and a decrease in yield. In extreme cases, the circuit may be shorted or exploded. Therefore, eliminating the heat of reaction generated between the two electrodes by electrolysis, keeping the temperature distribution of the electrolytic cell uniform, and maintaining the distance between the bottom and the electrode tip are very important factors for safe operation. Therefore, it is preferable to cool the upper end of the electrolyzer while heating the lower end.

In molten salt electrolysis, the temperature of molten salt is preferably 100 to 130 ° C. because it is easy to operate, has good electrical conductivity, and has good electrical current efficiency. NH ₄ F-HF: when the molten salt temperature at (melting point 126 ℃) system is one 100~130 ℃, NH ₄ F-HF that is the ones adversely the deposition in the electrolytic bath temperature lower than the temperature of vaporization. As a result of operation, NH ₄ F-HF is deposited on the lid of the electrolyzer, which blocks the off-gas outlet. Accordingly, the height of the electrolyte interface is changed due to the pressure difference between the anode chamber having NF ₃ and surrounded by the separator, and the cathode chamber having H ₂ and surrounded by the separator.

For example, if the outlet is blocked by NF ₃ generated at the anode, the internal pressure is increased because gas cannot be discharged from the anode chamber. As a result, the electrolyte interface is pressed and the interface of the cathode chamber is raised. In this case, when the pressure is increased and the interface is further lowered than the separator plate, NF ₃ is introduced into the cathode chamber. Accordingly, there is a problem that the mixture is made of NF ₃ and H ₂ causes the explosion in the worst case. Thus, it comprises a collector for separating so that NF ₃ produced at the anode and H ₂ generated at the cathode are not mixed.

The present embodiment is the object of the present invention to provide a collector and a method of manufacturing the enhanced NF ₃ for producing the electrolytic cell to prevent damage in the explosive reaction of the NF ₃ generated.

NF ₃ for producing a collector of an electrolytic cell according to the present embodiment causes a plurality of anode electrodes and a plurality of electrolytic reaction at the cathode electrode according to the collector of an electrolytic cell for producing NF ₃ for producing a NF _3,

A side surface portion of a square tube shape wrapped around a predetermined number of anode electrodes;

A flange extending vertically with respect to an upper end of the side portion; And

It is disposed on the lower end side of the side portion includes a plate-shaped reinforcement ring formed to surround the side portion up to a set height,

The side portion is formed with a reinforcing ring coupling portion is formed thick so as to protrude inwards by the size corresponding to the thickness of the reinforcing ring from the bottom to a height corresponding to the height of the reinforcing ring, the outer surface is formed without a step, An inner step is formed at an inner circumference of the lower end connected to the lower side of the reinforcing ring coupling portion to a thickness smaller than that of the reinforcing ring coupling portion.

The side portion of the collector, the reinforcing ring coupling portion and the flange are integrally injection molded,

The reinforcing ring is provided with a plurality of through-holes along the circumference, and provides a collector of the electrolytic cell for manufacturing NF ₃ characterized in that it is seated on the reinforcing ring coupling portion.

The reinforcing ring is characterized by consisting of SUS (Stainless Steel) material.

The reinforcing ring coupling portion may be removed after cutting the outer surface in a shape corresponding to the reinforcing ring to form a reinforcing ring seating groove, and the reinforcing ring seating groove may cover the outer surface of the reinforcing ring after the reinforcing ring is disposed. Reinforcement ring cover of the same material as the side portion of the shape is characterized in that the welded.

The reinforcing ring is integrally injection-molded together when the side portion is injected to be disposed in the reinforcing ring coupling portion.

The side portion and the flange of the collector is characterized in that composed of PFA (Perfluoroalkoxy alkane) or polytetrafluoroethylene (PTFE).

The collector of the NF ₃ electrolytic cell according to the present embodiment preheats the injection molding machine, and the reinforcing ring fixing pin is formed at the position where the reinforcing ring through hole is to be formed in the injection molding machine. Seating an injection mold, a collector separation mold, a collector outer injection mold forming an outer surface shape of the collector, and a collector inner step injection mold forming the inner step;

Heating the mold at a high temperature after mold closing;

Assembling the reinforcement ring to the collector internal injection mold by operating the reinforcing ring fixing pin to protrude after opening the molds;

Mold closing the molds and injecting the collector material into the molds;

Separating the fixing pin by giving a time difference before the injection is completed in the injection step; And

And when the injection is completed, opening the injection molds and operating the collector separation mold to extract the completed collector.

According to the invention, the generated NF ₃ is smoothly collected, of the collector, is compromised by the formation reaction of NF ₃ NF ₃ that it is possible to prevent reaction with the leakage H _2, due to destruction of the collector electrolytic bath life Shortening can be prevented.

In addition, according to the present invention, it is possible to provide a collector of the electrolytic cell for NF ₃ production in which a reinforcing ring is stably coupled to high heat and explosive reactions.

In addition, according to the present invention, it is possible to prevent the collector side portion from being damaged by the reinforcing ring during the high temperature and explosive reaction.

In addition, according to the present invention, it is possible to provide a collector of an electrolytic cell for manufacturing NF ₃ which does not generate interference when the collector is replaced in the electrolytic cell.

1 is a partial cross-sectional view schematically showing an electrolytic cell for manufacturing NF ₃ to which the collector is applied according to an embodiment of the present invention;

2 is a perspective view showing a collector according to an embodiment of the present invention;

3 is a top view of the collector of FIG. 2;

4 is a cross-sectional view showing a collector according to a first embodiment of the present invention;

Figure 5 is a cross-sectional view showing a side cross-section of the body injected for the collector of Figure 4,

6 is a cross-sectional view showing a state in which a reinforcing ring seating part is processed in the body injected for manufacturing the collector of FIG. 5;

7 is an enlarged cross-sectional view of a portion C of FIG. 4;

8 is a cross-sectional view showing a collector according to a second embodiment of the present invention;

9 is a partial cross-sectional view showing an enlarged reinforcing ring mounting portion of the collector of FIG.

10 is a schematic view showing a mold and a collector for injection production for manufacturing the collector of FIG. 8, and

11 is an enlarged partial cross-sectional view showing a reinforcing ring mounting portion of the collector according to the prior art.

Description of the present invention is only an embodiment for structural or functional description, the scope of the present invention should not be construed as limited by the embodiments described in the text. That is, since the embodiments may be variously modified and may have various forms, the scope of the present invention should be understood to include equivalents capable of realizing the technical idea.

The drawings referred to for describing the embodiments of the present disclosure are intentionally exaggerated in size, height, thickness, etc. for ease of explanation and easy understanding, and are not to be enlarged or reduced in proportion. In addition, any component illustrated in the drawings may be intentionally reduced in size, and other components may be intentionally enlarged in size.

All terms used herein have the same meaning as commonly understood by one of ordinary skill in the art unless otherwise defined. Terms such as those defined in the commonly used dictionaries should be construed to be consistent with the meanings in the context of the related art and should not be construed as having ideal or overly formal meanings unless expressly defined in this application. .

Hereinafter, with reference to the accompanying drawings will be described in detail the present invention. The accompanying drawings show preferred embodiments of the present invention, which are provided only to assist in understanding, and thus, the technical scope of the present invention is not limited thereto.

1 is a partial cross-sectional view schematically showing an electrolytic cell for manufacturing NF ₃ to which the collector is applied according to an embodiment of the present invention, FIG. 2 is a perspective view showing a collector installed in the electrolytic cell of FIG. 1, and FIG. Top view of the collector.

The electrolyzer for manufacturing NF ₃ to which the collector 500 according to the embodiment of the present invention is applied is an electrolyzer body 100, an electrolyzer body cover 200, a cathode part 300, an anode part 400, and a collector 500. , H ₂ vent part 600, and NF ₃ vent part 700.

The electrolyzer body 100 may be formed in a cylindrical shape or a polygonal shape in a container shape having an open top having a receiving space of an electrolyte solution. The inner surface containing the electrolyte solution is preferably lined with fluorine resin or made of fluorine resin material to prevent corrosion. The usable fluororesin material is not particularly limited but may be polytetrafluoroethylene (PTFE), polychlorotrifluoroethylene, polyvinylidene, polyvinylfluoride, tetrafluoroethylene-hexafluoro propylene copolymer , Tetrafluoroethylene-ethylene copolymer and the like, and it is preferable to use polytetrafluoroethylene or tetrafluoroethylene-perfluoroalkylvinyl ether copolymer having acid resistance and heat resistance. . The electrolyzer body 100 may include a fastening portion for coupling with the electrolyzer body cover 200 which is coupled to seal the open top. The fastening portion may be formed extending perpendicularly from the vertical surface as shown in FIG.

As the electrolyte, ammonium fluoride-fluoric acid (NH ₄ F-HF) is used, and the composition ratio of the electrolyte in the nitrogen trifluoride (NF ₃ ) electrolytic cell is a ratio of the weight% of hydrofluoric acid (HF) to ammonium fluoride (NH ₄ F). It should be composed of 1.0 to 2.6. In consideration of the production efficiency of nitrogen trifluoride (NF ₃ ), the temperature range of the preferred electrolyte solution is preferably 100 to 130 ° C. Ammonium fluoride-fluoric acid (NH ₄ F-HF) has a melting point of 126 ° C. When the temperature of the electrolyte is less than 100 ° C, ammonium fluoride-fluoric acid (NH ₄ F-HF) is more likely to deposit in the electrolytic cell. ₃₎ If the production rate is greater than the decreases, 130 ℃ rapid reaction rate can be increased. However, since the problem in that prevents the reaction gas hydrofluoric acid (HF) portion vent to increase the temperature of the reaction of the electrolytic solution is 100 - are set 130 ℃.

The electrolyzer body cover 200 is to be coupled to seal the upper portion of the electrolyzer body 100, the electrolyzer body cover 200 is formed in a plate shape and corresponding size to be coupled to the fastening portion of the electrolyzer body 100 Has a shape with. Fastening grooves may be formed at the edges of the electrolyzer body cover 200 so as to be coupled to the fastening portions, and the fastening portion of the cover 200 and the electrolyzer body 100 may be coupled through a packing to increase the degree of sealing. Do. On the other hand, the electrolytic cell body cover 200 is formed with a cathode insertion hole and an anode insertion hole in which a plurality of cathode portions 300 and a plurality of anode portions 400 can be inserted, respectively, and H ₂ vent portion 600 is formed at one side. And the NF ₃ vent part 700 is coupled to extend from the anode part 400.

The cathode part 300 and the anode part 400 are preferably made of an electrode made of nickel. A carbon electrode may be used in addition to the nickel electrode. However, since nickel tetrafluoride (CF ₄ ), which is an impurity that is easily generated during the reaction, is not easily removed, it is preferable to use a nickel electrode. One or more cathode and anode electrodes may be installed. The cathode electrode and the anode electrode are preferably arranged alternately.

H ₂ vent unit 600 is for discharging the H ₂ gas generated in the cathode in the electrolytic cell external, is coupled through said electrolytic cell body cover 200. Since the H ₂ gas has an upward characteristic, it is preferable that one or more of the H ₂ gas is hermetically coupled to the electrolytic cell body cover 200 through the packing without the need to individually couple the vent parts.

NF ₃ vent unit 700 is preferably coupled to each anode unit 400 individually. The NF ₃ vent part 700 is located above the anode part 400. NF ₃ vent unit 700 is also hermetically coupled to the cover 200 via a packing. NF ₃ vent unit 700 is a structure for discharging the NF ₃ gas collected by the collector 500 to be described later, the discharge pipe and the discharge pipe for discharging the NF ₃ gas is inserted into the anode insertion hole of the electrolytic cell body cover 200 It is preferable to include a connecting member.

The collector 500 is installed to partition the anode portion and the cathode portion to prevent mixing of the anode generation gas and the cathode generation gas. The collector 500 also has a square tubular side portion 510 and an electrolytic cell body cover 200 which wrap around the anode electrodes for each anode portion 400 to collect gas generated by the electrolysis reaction of the electrolyte at the anode. And a coupling flange 520 that is hermetically coupled with. Opening in the vertical direction and the side portion 510 surrounds the anode electrodes and the coupling flange 520 extends from the side portion 510 perpendicular to the upper side of the side portion 510 so as to be hermetically coupled to the electrolytic cell body cover 200 above. Form. The collector 500 is disposed inside the electrolyte and is preferably made of PFA (Perfluoroalkoxy alkane) or polytetrafluoroethylene (PTFE) in order to prevent damage during the intense electrolysis reaction caused by NF 3 generation. Since the collector 500 has a violent electrolysis reaction to generate NF ₃ at the anode electrode located inside, the collector 500 is preferably integrally injection-molded without a part connected by welding. In addition, the reinforcement ring 530 which will be described later for reinforcement is coupled to the collector side portion 510 in order to prevent the intense reaction from occurring inside the collector 500 and damage to the side portion 510 of the collector 500.

Figure 4 is a cross-sectional view showing a collector according to a first embodiment of the present invention, Figure 5 is a cross-sectional view showing a side cross-sectional view of the body injected for the collector of Figure 4, Figure 6 is an injection for manufacturing the collector of Figure 5 7 is a cross-sectional view illustrating a state in which a reinforcing ring seating part is processed to the body, and FIG. 7 is an enlarged cross-sectional view of part C of FIG. 4.

4 to 7, the collector 500 according to the first embodiment of the present invention will be described in more detail. As shown, the reinforcing ring 530 is coupled around the lower side of the side portion 510 of the collector 500. Reinforcing ring 530 is preferably composed of SUS (Stainless Steel) material. The reinforcing ring 530 is formed in a plate-shaped ring shape that can wrap all around the collector side portion 510. The reinforcing ring 530 is set to a height that requires protection up to a predetermined height at which the electrolytic reaction occurs violently at the lower end of the collector side part 510. The collector 500 according to the first embodiment has a height and thickness corresponding to the height and thickness of the reinforcing ring 530 which is coupled to the lower circumference of the side portion 510 of the collector 500 for coupling the reinforcing ring 530. Reinforcing ring coupling portion 511 is formed. That is, as shown in FIG. 5, the reinforcing ring coupling part 511 is integrally formed to be thicker corresponding to the thickness of the reinforcing ring 530 and the reinforcing ring cover 540 than the upper thickness of the collector side part 510. . For seating the reinforcing ring 530, as shown in Figure 6, the reinforcing ring seating groove 513 is cut and removed corresponding to the thickness and height of the reinforcing ring 530 and the reinforcing ring cover 540. The reinforcing ring 530 is fitted to the reinforcing ring seating portion 513 as shown in FIG. 7, and is made of the same material as the collector 500 since the reinforcing ring 530, which is a metal, is corroded when exposed to the electrolyte. The reinforcing ring cover 540 covers the reinforcing ring 530. The reinforcing ring cover 540 is welded up and down. Reference numeral 550 denotes a weld. Since the reinforcing ring cover 540 is disposed outside the inside of the collector 500 where NF ₃ is generated, the weld 550 is not damaged by the electrolysis reaction. On the other hand, as shown in the reinforcing ring 530, a plurality of through holes 531 are formed along the circumference. The plurality of through holes 531 formed in the reinforcing ring 530 absorb shocks due to an explosive reaction occurring when NF ₃ occurs inside the collector 500. Since the materials of the collector coupling part 511 and the reinforcing ring cover 540 and the reinforcing ring 530 are different, the strain due to the impact force due to the explosive reaction is different, and if the explosion continues, the welding part 550 may interact due to the difference in the strain. There is a possibility of constant force acting on and damaging it. The through hole 531 absorbs the impact force to reduce the possibility of such damage. In addition, because the materials of the collector coupling portion 511 and the reinforcing ring cover 540 and the reinforcing ring 530 are different, the coefficient of thermal expansion is different. The through hole 531 also absorbs deformation due to thermal expansion and reduces the force applied by the reinforcing ring 530 to the collector coupling portion 511, the collector cover 540, and the welding portion 550 according to the difference in thermal expansion coefficient. It also reduces the possibility of damage due to the difference of.

8 is a cross-sectional view showing a cross-section of the collector 500 according to the second embodiment of the present invention, FIG. 9 is a partial cross-sectional view showing in detail the lower portion of the collector side portion 510 of FIG. 8, and FIG. A schematic diagram showing a mold for injection production of the collector 500. As shown, in the collector 500 according to the second embodiment of the present invention, the reinforcing ring 530 is integrally injected into the collector side portion 510. Reinforcing ring coupling portion 511 is formed thicker than the side portion 510 to the thickness of the reinforcing ring 530 and the thickness to protect the reinforcing ring from the inside and the outside. As shown, when the collector 500 including the SUS reinforcement ring 530 and integrally injection-molded is applied, the SUS reinforcement ring 530 is not damaged while the NF _{3 is} generated. The side portion can be reinforced. The reinforcing ring 530 of the collector 500 according to the second embodiment is also preferably made of SUS (Stainless Steel). The reinforcing ring 530 is formed in a plate-shaped ring shape that can wrap all around the collector side portion 510. The reinforcing ring 530 is set to a height that requires protection up to a predetermined height at which the electrolytic reaction occurs violently at the lower end of the collector side part 510. The reinforcing ring 530 is formed with a plurality of through holes 531 along the circumference. The plurality of through holes 531 formed in the reinforcing ring 530 absorb shocks due to an explosive reaction when NF ₃ occurs inside the collector 500. Since the materials of the collector 500 body and the reinforcing ring 530 are different, strain due to the impact force due to the explosive reaction is different, and if the explosion continues, there is a possibility of being damaged by the interaction due to the difference in strain. The through hole 531 absorbs the impact force to reduce the possibility of such damage. In addition, since the materials of the collector 500 body and the reinforcing ring 530 are different, the coefficient of thermal expansion is different. The through hole 531 also absorbs deformation due to thermal expansion and reduces the force applied by the reinforcement ring 530 to the reinforcing ring coupling part 510 according to the difference in thermal expansion rate, thereby reducing the possibility of damage due to the difference in thermal expansion rate. .

 A method of manufacturing the collector 500 according to the second embodiment will be described with reference to FIG. 10. In order to integrally injection-collect the collector 500 body together with the reinforcing ring 530, the collector internal injection mold 1100, the collector separation mold 1200, the collector external injection mold 1300, and the collector internal step injection mold 1400. ) Is used. The collector internal injection mold 1100 has a reinforcing ring fixing pin 1110 formed at the position where the reinforcing ring through hole 531 is to be formed so as to protrude and insert, and forms the internal shape of the collector 500, and the collector separation mold ( After the injection is completed, 1200 separates the finished product, the collector outer injection mold 1300 forms the outer surface shape of the collector 500, and the collector inner step injection mold 1400 forms the inner step 512.

First, preheat the injection machine and seat the mold (1100, 1200, 1300, 1400) in the injection machine. Mold the injection mold and heat it to high temperature. After opening the injection mold to operate the reinforcing ring fixing pin 1110 to assemble the reinforcing ring 530 to the mold. Thereafter, the mold is closed and the collector 500 body material such as PFA is injected. The fixing pins 1110 are inserted to separate the reinforcement ring 530 during the injection. That is, when the fixing pin 1110 is removed, the reinforcing ring 530 does not move or deform by using a fixing pin control device so that the reinforcing ring 530 does not move or deform, and the through hole 531 of the reinforcing ring 530 is filled with PFA. Then, the mold is opened and the collector separation mold 1200 is operated to extract the injection molded product.

Conventional collectors are produced by cutting the fluororesin sheet to produce the side and flanges by welding and fusion processes, whereby thermal stress is concentrated on the welding and fusion zones due to high temperature, which may cause cracking due to mechanical strength resistance. There is a problem of short life. In the collector 500 according to the first and second embodiments of the present invention, both the side portion 510 and the flange 520 are integrally formed so that no welded portion is minimized and the life and quality of the collector 500 are improved. .

According to the prior art, when the metal reinforcing ring is to be installed inside the collector, when welding and welding, it is difficult to manufacture due to jig interference. As shown in FIG. 11, when a metal reinforcing ring is coupled to the outer surface of the collector by welding or the like, welding and welding for bonding the reinforcing ring 53 and the cover 54 to the thinner collector side 51 may occur. Due to the overheating reaction, there is a risk that the reinforcing ring 53 and the side 51 sheet may be deformed, damaged or dropped, thereby making it difficult to guarantee the bonding safety. On the contrary, in the collector 500 according to the first and second embodiments of the present invention, the thickness of the reinforcing ring coupling part 511 is formed to be thick, thereby greatly reducing the possibility of deformation damage due to overheating.

As shown in Figure 7, the collector 500 according to the first embodiment of the present invention, in order to solve this problem, the reinforcing ring coupling portion 511 is formed integrally with the side portion 510, reinforcing ring coupling After the part 511 is injection-molded thicker than the upper portion of the side part 510, the reinforcing ring coupling part 511 is cut and removed to form the reinforcing ring seating part 513. Therefore, the collector 500 according to the first embodiment of the present invention can stably install the metal reinforcement ring 530 on the outside of the collector 500. In addition, the collector 500 according to the first embodiment of the present invention forms a plurality of through holes 531 around the plate-shaped reinforcement ring 530 to absorb and disperse the impact force due to the explosive reaction, and to absorb the deformation due to thermal expansion. It can work.

As shown in FIG. 9, the collector 500 according to the second embodiment of the present invention is integrally injection-molded in a state where the reinforcing ring 530 is inserted into the reinforcing ring coupling part 511, thereby forming a metal material. The reinforcing ring 530 may be more completely protected.

In addition, the collector 500 according to the first and second embodiments of the present invention forms an inner step 512 inside the lower end connected to the reinforcing ring coupling part 511 where the reinforcing ring 530 is installed. The gas generating space is increased, and the production volume of the electrolytic cell is improved.

In addition, in the case of the collector according to the prior art, since it is difficult to install the reinforcing ring due to jig interference inside the collector, the reinforcing ring 53 is installed on the outer surface of the collector side 51 as shown in FIG. 11. Therefore, a step with the collector side 51 occurs as much as the thickness of the reinforcing ring 53 and the reinforcing ring cover 54. The collector of the NF ₃ electrolytic cell is a consumable and includes a process of installing and removing the electrolytic cell in the NF ₃ manufacturing process. The structure with the step on the outer surface of the collector has the disadvantage that the interference occurs when installing or removing the collector in the electrolytic cell, the required time is long and the process is difficult. In the collector 500 according to the first and second embodiments of the present invention, the outer side of the reinforcing ring coupling part 511 to which the outer side of the collector side part 510 and the reinforcing ring 530 are formed is provided without a step. 500) The process is convenient and safe since there is no interference with other parts of the electrolyzer during replacement or installation.

Listed above

Claims (6)

1. Causing a plurality of anode electrodes and a plurality of electrolytic reaction at the cathode electrode according to the collector of an electrolytic cell for producing NF ₃ for producing a NF _3,

   A side surface portion of a square tube shape wrapped around a predetermined number of anode electrodes;

   A flange extending vertically with respect to an upper end of the side portion; And

   It is disposed on the lower end side of the side portion includes a plate-shaped reinforcement ring formed to surround the side portion up to a set height,

   The side portion is formed with a reinforcing ring coupling portion is formed thick so as to protrude inwards by the size corresponding to the thickness of the reinforcing ring from the bottom to a height corresponding to the height of the reinforcing ring, the outer surface is formed without a step, An inner step is formed at an inner circumference of the lower end connected to the lower side of the reinforcing ring coupling portion to a thickness smaller than that of the reinforcing ring coupling portion.

   The side portion of the collector, the reinforcing ring coupling portion and the flange are integrally injection molded,

   The reinforcing ring is a collector of NF ₃ manufacturing electrolytic cell, characterized in that a plurality of through-holes are formed along the circumference, and is seated on the reinforcing ring coupling portion.
2. The method of claim 1,

   The side portion and the flange of the collector is a collector of NF ₃ electrolytic cell consisting of PFA (Perfluoroalkoxy alkane) or polytetrafluoroethylene (PTFE) material.
3. The method of claim 1,

   The reinforcing ring is a collector of the electrolytic cell for manufacturing NF ₃ consisting of SUS (Stainless Steel) material.
4. The method of claim 1,

   The reinforcing ring coupling portion may be removed after cutting the outer surface in a shape corresponding to the reinforcing ring to form a reinforcing ring seating groove, and the reinforcing ring seating groove may cover the outer surface of the reinforcing ring after the reinforcing ring is disposed. The collector of the NF ₃ electrolytic cell to which the reinforcing ring cover of the same material as the side portion of the shape is welded.
5. The method of claim 1,

   The reinforcement ring is a collector of the NF ₃ manufacturing electrolytic cell is integrally injection-molded together when the side portion injection to be disposed inside the reinforcing ring coupling portion.
6. The fifth term in the collector of the NF ₃ production process for manufacture of the electrolytic cell,

   A collector internal injection mold, a collector separation mold, and an outer surface shape of the collector, which preheat the injection molding machine, and the reinforcement ring fixing pin is protruded and inserted into a position where the reinforcing ring through hole is to be formed in the injection molding machine, and forms the internal shape of the collector. Seating the collector outer injection mold forming the inner step, and the collector inner step injection mold forming the inner step;

   Heating the mold at a high temperature after mold closing;

   Assembling the reinforcement ring to the collector internal injection mold by operating the protruding ring fixing pin after opening the molds;

   Mold closing the molds and injecting the collector material into the molds;

   Separating the fixing pin by giving a time difference before the injection is completed in the injection step; And

   Once the injection is completed, the collector of the NF ₃ production method for producing an electrolytic cell comprising the step of opening of the injection mold and extracting the finished collector to the collector operates the mold separation.

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