KR20170040109A - Collector of electrolyzer for manufacturing nitrogen trifluoride and manufacturing method the same - Google Patents

Abstract

The present invention relates to a collector in electrolyzers to produce NF_3. According to an embodiment of the present invention, the collector in electrolyzers to produce NF_3 comprises: a lateral side part having a square pipe-like shape and surrounding the periphery of a certain number of anode electrodes; a flange vertically extended to an upper end of the lateral side part; and a reinforcing ring having a plate-like ring shape, disposed on a lower end side of the lateral side part, and covering the lateral side part up to predetermined height. Additionally, formed on the lateral side part is a reinforcing ring coupling part which protrudes inwards to an extent corresponding to the thickness of the reinforcing ring, from the lower end to the height corresponding to the height of the reinforcing ring.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a collector of an electrolytic bath for producing nitrogen trifluoride,

The present invention relates to a collector of an electrolytic cell for producing nitrogen trifluoride (NF ₃ ) and a method for producing the same.

In general, fluorine gas is a periodic gas that can not be excluded from the semiconductor manufacturing field. Among them, nitrogen trifluoride (NF ₃ ) gas is widely used as a semiconductor cleaning gas or dry etching gas for semiconductor and TFT-LCD manufacturing. Recently, demand for chamber cleaning gas has been rapidly increasing due to the activation of semiconductor industry and FPD industry.

In particular, the use of other fluorides (eg, SF ₆ or C ₃ F ₈ ) is limited due to global warming countermeasures. Nitrogen trifluoride (NF ₃ ), which is easily decomposed, And has become more popular in the field.

Generally, nitrogen trifluoride (NF ₃ ) can be produced by a direct fluorination method, a plasma method, or an electrolysis method. The direct fluorination reaction is a method of synthesizing fluorine gas by introducing it into a reactor containing ammonium bifluoride, which is synthesized through a two-step process, so that the apparatus cost for the purification after synthesis is rather high There are disadvantages. The method using the plasma has a problem that the compatibility is low, high energy is required, and the efficiency is low. The method of producing SF3 by electrolysis of molten salt is suitable for high yield and mass production.

Electrolyte may be the NH ₄ F and NH ₄ F-HF or NH ₄ F-HF was added to the KF to induce KF-HF or NH ₄ F-NH-4F LiF-HF derived from the HF used. In the NF ₃ gas production process, NF ₃ and N ₂ gases are generated at the anode and H ₂ gas is generated at the cathode. A gas generating reaction occurs simultaneously in the cathode and the anode. Since the NF ₃ gas generated in the anode reacts with the H ₂ gas generated at the cathode, there is a possibility of explosion. Therefore, in order to suppress the explosion, it is required to design an electrolytic cell which prevents mixing of H ₂ gas and NF ₃ gas and improves safety.

Generally, in order to reduce the possibility of explosion, the electrolytic cell is provided with a separating plate for separating the electrodes. The separator plate is lined with a fluororesin to prevent corrosion of the separator and to prevent the separator from acting as an electrode. Carbon and nickel electrodes can be used as the material of the anode, and a nickel electrode is generally used as the anode to reduce the amount of CF ₄ . However, the nickel electrode has a disadvantage that it is easily dissolved, and a part of the dissolved nickel is deposited on the cathode. When such an electrolytic cell is operated for a long period of time, the gap between the cathode and the separator plate becomes narrow, which is close to the explosion limit due to the mixture of NF ₃ and H ₂ .

Very little NF ₃ bubbles generated in the nickel electrode for the diffusion obliquely moved to the upper portion without being raised to the vertical occurs along the electrode increase the amount of NF ₃ gas generation stage of the anode nickel electrode area and the cathode by diffusion of NF ₃ The reaction of the electrode becomes violent.

When nickel electrode is used, NiF is deposited on the bottom of the electrolytic cell, and the distance between the electrode tip and the deposit gradually becomes closer. After the reaction progresses, the tip of the electrode near the bottom of the electrolytic cell gradually gets buried in the NiF. The tip of the NiF-coated electrode no longer functions as an electrode, leading to an increase in current density, an increase in the voltage of the electrolyzer, and a decrease in the yield. In severe cases, the circuit may short-circuit or explode. Therefore, it is very important to maintain the uniformity of the temperature distribution of the electrolyzer and to maintain the distance between the bottom and the electrode tip by eliminating the reaction heat generated between the two electrodes by electrolysis. Therefore, it is preferable to cool the upper end of the electrolytic cell while heating the lower end.

In the molten salt electrolysis process, the temperature of the molten salt is preferably 100-130 ° C because it is easy to operate, has good electrical conductivity and good electric current efficiency. In the NH ₄ F-HF (melting point: 126 ° C) system, when the temperature of the molten salt is 100 to 130 ° C, the vaporized ones are adversely deposited at a temperature lower than the electrolytic bath temperature of NH ₄ F-HF. As a result of the operation NH ₄ F-HF is deposited on the lead of the electrolytic cell, which blocks the product gas outlet. Accordingly, with the NF _3, and has an anode chamber and, H ₂ surrounded by the separation plate becomes due to the pressure difference between the cathode chamber surrounded by the separating plate varies the height of the electrolytic solution surface.

For example, if the outlet is clogged due to NF ₃ produced in the anode, gas can not be discharged from the anode chamber, and the internal pressure is increased. As a result, the electrolyte interface is pressed and conversely the interface of the cathode chamber is raised. In this case, when the pressure becomes larger and the interface is further lowered than the separation plate, NF ₃ is mixed into the cathode chamber. Accordingly, there is a problem that mixing of NF ₃ and H ₂ occurs and explosion occurs in the worst case. Therefore, it includes a collector for separating NF ₃ generated in the anode and H ₂ generated in the cathode so as not to be mixed.

Korean Patent Publication No. 10-1991-0008172 Korean Patent No. 10-0742484 Korean Patent No. 10-0515412

The present invention is the object of the present invention to provide a collector and a method of manufacturing an electrolytic cell for producing NF ₃ strengthened to prevent damage to the explosive reaction of the NF ₃ generated.

NF ₃ for producing a collector of an electrolytic cell according to the present embodiment causes a plurality of anode electrodes and a plurality of electrolytic reaction at the cathode electrode according to the collector of an electrolytic cell for producing NF ₃ for producing a NF _3,

A square tubular side surface surrounding a predetermined number of anode electrodes;

A flange extending perpendicularly to an upper end of the side portion; And

And a ring-shaped reinforcement ring arranged on the lower end side of the side portion and formed to surround the side portion up to the set height,

Wherein the side portion is formed with a reinforcing ring engaging portion formed to be thickly protruded inwardly in a size corresponding to the thickness of the reinforcing ring from the lower end to a height corresponding to the height of the reinforcing ring, An inner stepped portion is formed on the inner periphery of the lower end connected to the lower side of the reinforcing ring coupling portion to a thickness smaller than that of the reinforcing ring coupling portion,

The side portion of the collector, the reinforcing ring coupling portion, and the flange are integrally injection-

The support ring is formed of a plurality of holes penetrating along the circumference, there is provided a collector of an electrolytic cell for producing NF _3, characterized in that seated on the support ring engaging portion.

And the reinforcing ring is made of stainless steel (SUS).

Wherein the reinforcing ring coupling portion has a shape corresponding to the reinforcing ring and the outer side is removed after the incision to form a reinforcing ring receiving groove, and the reinforcing ring receiving groove is formed in the reinforcing ring receiving groove so as to cover the outer surface of the reinforcing ring And a reinforcing ring cover of the same material as the side surface of the shape is welded.

And the reinforcing ring is integrally injection molded together when the side portions are injected so as to be disposed inside the reinforcing ring engagement portion.

The side surface of the collector and the flange are made of PFA (Perfluoroalkoxy Alkane) or Polytetrafluoroethylene (PTFE).

The collector of the electrolytic cell for manufacturing NF ₃ according to the present embodiment is characterized in that the collector is preheated and the injector is provided with a reinforcing ring fixing pin at a position where the reinforcing ring through hole is to be formed so as to be protruded and insertable, Placing a mold, a collector separation mold, a collector outer injection mold forming an outer shape of the collector, and a collector inner step injection mold forming the inner step;

Closing the molds and then heating them to a high temperature;

Assembling the reinforcing ring on the in-collector injection mold by operating the projecting pins of the reinforcing ring after opening the molds;

Molding the molds and injecting the collector material into the molds;

Separating the fixing pin by giving a time difference before the injection is completed in the injection step; And

And when the injection is completed, opening the injection dies and operating the collector separation mold to extract the completed collector.

According to the invention, the generated NF ₃ is smoothly collected, of the collector, is compromised by the formation reaction of NF ₃ NF ₃ that it is possible to prevent reaction with the leakage H _2, due to destruction of the collector electrolytic bath life It is possible to prevent shortening.

Further, according to the present invention, it is possible to provide a collector of an electrolytic cell for NF ₃ production, in which a reinforcing ring is stably coupled to an explosive reaction even in a high temperature.

Further, according to the present invention, it is possible to prevent the collector side portion from being damaged by the reinforcing ring in an explosive reaction with high temperature.

Further, according to the present invention, it is possible to provide a collector of an electrolytic cell for NF ₃ production that does not cause interference when a collector is replaced in an electrolytic cell.

1 is a partial cross-sectional view schematically showing an electrolytic bath for producing NF ₃ to which a collector according to an embodiment of the present invention is applied;
2 is a perspective view of a collector according to an embodiment of the present invention,
Figure 3 is a top view of the collector of Figure 2,
4 is a cross-sectional view of a collector according to a first embodiment of the present invention,
FIG. 5 is a cross-sectional view showing a side cross-section of a body ejected for manufacturing the collector of FIG. 4,
FIG. 6 is a cross-sectional view showing a state in which a reinforcing ring seating portion is formed on a body that is injected for manufacturing the collector of FIG. 5;
FIG. 7 is an enlarged cross-sectional view of portion C of FIG. 4,
8 is a sectional view showing a collector according to a second embodiment of the present invention,
FIG. 9 is a partial cross-sectional view showing an enlarged enlarged view of the reinforcing ring mounting portion of the collector of FIG. 8,
10 is a schematic view showing a mold and a collector for injection molding for manufacturing the collector of Fig. 8, and Fig.
11 is an enlarged partial cross-sectional view showing a mounting portion of a reinforcing ring of a collector according to the related art.

The description of the present invention is merely an example for structural or functional explanation, and the scope of the present invention should not be construed as being limited by the embodiments described in the text. That is, the embodiments are to be construed as being variously embodied and having various forms, so that the scope of the present invention should be understood to include equivalents capable of realizing technical ideas.

The drawings referred to for explaining embodiments of the present disclosure are exaggerated in size, height, thickness, and the like intentionally for convenience of explanation and understanding, and are not enlarged or reduced in proportion. In addition, any of the components shown in the drawings may be intentionally reduced, and other components may be intentionally enlarged.

All terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs, unless otherwise defined. Terms such as those defined in commonly used dictionaries should be interpreted to be consistent with the meanings in the context of the relevant art and can not be construed as having ideal or overly formal meaning unless explicitly defined in the present application .

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.

FIG. 1 is a partial cross-sectional view schematically showing an electrolytic bath for manufacturing NF ₃ to which a collector according to an embodiment of the present invention is applied, FIG. 2 is a perspective view showing a collector installed in the electrolytic bath of FIG. 1, Is a top view of the collector.

An electrolyzer for manufacturing NF ₃ to which a collector 500 according to an embodiment of the present invention is applied includes an electrolytic bath body 100, an electrolytic bath body cover 200, a cathode portion 300, an anode portion 400, a collector 500, An H ₂ vent portion 600, and an NF ₃ vent portion 700.

The electrolytic bath body 100 may be formed in a cylindrical shape, a polygonal shape, or the like in the shape of a container having an open top with an accommodation space for an electrolyte. It is preferable that the inner surface for containing the electrolytic solution is lined with a fluororesin or made of a fluororesin material in order to prevent corrosion. The fluororesin material that can be used is not particularly limited, but polytetrafluoroethylene (PTFE), polychlorotrifluoroethylene, polyvinylidene, polyvinyl fluoride, tetrafluoroethylene-hexafluoropropylene copolymer , Tetrafluoroethylene-ethylene copolymer, and the like, and it is preferable to use a polytetrafluoroethylene or tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer having acid resistance and heat resistance . The electrolyzer body 100 may include a fastening portion for engagement with the electrolytic cell body cover 200 coupled to seal the open top. The fastening portion may be formed by extending perpendicularly from the vertical plane as shown in Fig.

Ammonium fluoride (NH ₄ F-HF) is used as the electrolytic solution and the composition ratio of the electrolyte in the nitrogen trifluoride (NF ₃ ) electrolytic bath is the ratio of the weight percentage of hydrofluoric acid (HF) to ammonium fluoride (NH ₄ F) 1.0 to 2.6. Considering the production efficiency of nitrogen trifluoride (NF ₃ ), it is preferable that the temperature range of the electrolytic solution is 100-130 ° C. If the temperature of the electrolytic solution is less than 100 ° C., ammonium fluoride (NH ₄ F-HF) has a melting point of 126 ° C. and ammonium fluoride-NH ₃ F-HF is likely to be deposited in the electrolytic bath. ₃ ) The rate of formation is rapidly decreased. When the reaction temperature exceeds 130 ° C, the reaction rate may be increased. However, there is a problem that the hydrofluoric acid (HF) increases in the reaction gas, thereby blocking the vent. Therefore, the temperature of the electrolyte is set at 100-130 ° C during the reaction.

The electrolytic bath body cover 200 is coupled to the upper part of the electrolytic bath body 100 to seal the upper part of the electrolytic bath body 100. The electrolytic bath body cover 200 is formed in a plate shape and has a size corresponding to the fastening portion of the electrolytic bath body 100 And shape. A coupling groove can be formed at the edge of the electrolytic bath body cover 200 so as to be coupled to the coupling part and the coupling part of the cover 200 and the electrolytic bath body 100 are coupled via a packing, Do. A cathode insertion hole and an anode insertion hole into which a plurality of cathode portions 300 and a plurality of anode portions 400 are respectively inserted are formed in the electrolytic bath body cover 200. An H ₂ vent portion 600 is formed on one side And extends in the anode part 400 to join the NF ₃ vent part 700.

The cathode part 300 and the anode part 400 are preferably made of nickel-based electrodes. Although a carbon electrode can be used in addition to the nickel electrode, it is not easy to remove carbon tetrafluoride (CF ₄ ), which is an impurity that easily occurs during the reaction. Therefore, it is preferable to use a nickel electrode. One or more cathode electrodes and anode electrodes may be provided. The cathode electrode and the anode electrode are preferably arranged alternately.

The H ₂ vent portion 600 discharges H ₂ gas generated from the cathode electrode to the outside of the electrolytic bath, and is coupled through the electrolytic bath body cover 200. Since the H ₂ gas has an upward characteristic, it is preferable that at least one of the cathode and anode electrodes is sealed to the electrolytic bath body cover 200 through the packing without the necessity of individually bonding the vent portions to each cathode electrode.

It is preferable that the NF ₃ vent portions 700 are individually coupled to the respective anode portions 400. The NF ₃ vent portion 700 is located above the anode portion 400. The NF ₃ vent portion 700 is also hermetically coupled to the cover 200 through a packing. The NF ₃ vent portion 700 has a structure for discharging the NF ₃ gas collected by the collector 500 to be described later and includes a discharge pipe for discharging NF ₃ gas and a discharge pipe inserted into the anode insertion hole of the electrolyzer body cover 200 And a connecting member.

The collector 500 is provided for partitioning the anode portion and the cathode portion, and prevents mixing of the anode generating gas and the cathode generating gas. The collector 500 further includes a square tubular side surface 510 surrounding the anode electrodes of each anode 400 to collect the gas generated by the electrolysis of the electrolytic solution at the anode, (Not shown). A coupling flange 520 extends from the side portion 510 perpendicularly to the upper end of the side portion 510 so as to be hermetically engaged with the electrolytic bath body cover 200, . The collector 500 is preferably disposed in the electrolyte and may be formed of PFA (Perfluoroalkoxy Alkane) or Polytetrafluoroethylene (PTFE) to prevent damage during a violent electrolysis reaction due to the generation of NF 3. Since the collector 500 generates a strong electrolysis reaction to generate NF ₃ in the anode electrode located inside, it is preferable that the collector 500 is integrally formed without welding. A reinforcing ring 530 to be described later is joined to the collector side surface portion 510 to prevent the side surface portion 510 of the collector 500 from being damaged due to a repeated violent reaction occurring inside the collector 500. [

FIG. 4 is a cross-sectional view showing a collector according to a first embodiment of the present invention, FIG. 5 is a cross-sectional view showing a side cross-section of an injected body for manufacturing the collector of FIG. 4, FIG. 7 is a cross-sectional view of the portion C of FIG. 4 in an enlarged scale. FIG.

The collector 500 according to the first embodiment of the present invention will be described in more detail with reference to FIGS. 4 to 7. FIG. As shown in the figure, the reinforcing ring 530 is coupled to the lower portion of the side portion 510 of the collector 500. The reinforcing ring 530 is preferably made of stainless steel (SUS). The reinforcing ring 530 is formed in a plate-like ring shape that can wrap around the collector side surface 510. The reinforcing ring 530 is set to a height at which the protection is required up to a predetermined height at which the electrolytic reaction occurs violently at the lower end of the collector side portion 510. The collector 500 according to the first embodiment has a height and a thickness corresponding to the height and the thickness of the reinforcing ring 530 engaged with the lower circumference of the side surface 510 of the collector 500 for coupling the reinforcing ring 530 A reinforcing ring engaging portion 511 is formed. 5, the reinforcing ring coupling portion 511 is integrally formed thicker corresponding to the thickness of the reinforcing ring 530 and the reinforcing ring cover 540 than the upper thickness of the collector side portion 510 . 6, the reinforcing ring seating grooves 513 are cut and removed corresponding to the thickness and height of the reinforcing ring 530 and the reinforcing ring cover 540. In order to mount the reinforcing ring 530, 7, the reinforcing ring 530 is caught by the reinforcing ring seating portion 513. When the reinforcing ring 530, which is a metal, is exposed to the electrolyte, the reinforcing ring 530 is corroded. Therefore, the reinforcing ring 530 is made of the same material as that of the collector 500 And covers the reinforcing ring 530 by the reinforcing ring cover 540. [ The reinforcing ring cover 540 is vertically welded and joined. Reference numeral 550 denotes a welded portion. The reinforcing ring cover 540 is disposed outside the collector 500 where NF ₃ is generated, so that the welded portion 550 is not damaged by the electrolysis reaction. Meanwhile, as shown in the figure, a plurality of through holes 531 are formed in the reinforcing ring 530 along the circumference. The plurality of through holes 531 formed in the reinforcing ring 530 absorb the impact due to the explosion reaction occurring when NF ₃ occurs inside the collector 500. Since the material of the collector coupling portion 511 and the reinforcing ring cover 540 is different from that of the reinforcing ring 530, if the explosion continues due to the impact force due to the explosive reaction, if the explosion continues, There is a possibility that a continuous force is applied and it is damaged. The penetration hole 531 absorbs the impact force to reduce the possibility of such damage. Further, since the material of the collector coupling portion 511 and the reinforcing ring cover 540 is different from that of the reinforcing ring 530, the coefficient of thermal expansion is different. The penetration hole 531 absorbs deformation due to thermal expansion and reduces the force applied by the reinforcing ring 530 to the collector coupling portion 511 and the collector cover 540 and the welded portion 550 according to the difference in thermal expansion coefficient, It is possible to reduce the possibility of damage due to the difference between the two.

FIG. 8 is a cross-sectional view showing a cross section of a collector 500 according to a second embodiment of the present invention, FIG. 9 is a partial cross-sectional view showing the lower portion of the collector side portion 510 of FIG. 8 in more detail, A schematic view showing a mold for injection molding of the collector 500; As shown in the figure, in the collector 500 according to the second embodiment of the present invention, the reinforcing ring 530 is integrally injected into the collector side portion 510. The reinforcing ring engaging portion 511 is formed thicker than the upper portion of the side portion 510 with a thickness that can protect the reinforcing ring 530 from the inside and the outside and the thickness of the reinforcing ring 530. As shown in the drawing, when the collector 500 including the SUS reinforcing ring 530 and integrally injection-molded is applied, the SUS reinforcing ring 530 is not damaged even when the NF _{3 is} generated, The side portion can be strengthened. The reinforcing ring 530 of the collector 500 according to the second embodiment is also preferably made of stainless steel (SUS). The reinforcing ring 530 is formed in a plate-like ring shape that can wrap around the collector side surface 510. The reinforcing ring 530 is set to a height at which the protection is required up to a predetermined height at which the electrolytic reaction occurs violently at the lower end of the collector side portion 510. A plurality of through holes 531 are formed in the reinforcing ring 530 along the periphery. The plurality of through holes 531 formed in the reinforcing ring 530 absorb the impact due to the explosion reaction when NF ₃ occurs inside the collector 500. Since the material of the collector 500 body and the reinforcing ring 530 are different from each other, the strain due to the impact force due to the explosive reaction is different, and if the explosion continues, there is a possibility of being damaged due to the interaction due to the difference in strain. The penetration hole 531 absorbs the impact force to reduce the possibility of such damage. Also, since the material of the collector 500 body and the reinforcing ring 530 are different, the coefficient of thermal expansion is different. The through hole 531 absorbs deformation due to thermal expansion and reduces the force applied by the reinforcing ring 530 to the reinforcing ring coupling part 510 in accordance with the difference in thermal expansion rate, thereby reducing the possibility of damage due to the difference in the thermal expansion coefficient .

 A method of manufacturing the collector 500 according to the second embodiment will be described with reference to FIG. The collector inner injection mold 1200, the collector outer injection mold 1300, the collector inner step injection mold 1400, the collector inner injection mold 1300, and the collector inner injection injection mold 1400 for integrally injection molding the body of the collector 500 together with the reinforcement ring 530. [ ) Is used. The collector internal injection mold 1100 is formed such that a reinforcing ring fixing pin 1110 can protrude and be inserted into a position where the reinforcing ring through hole 531 is to be formed and forms an internal shape of the collector 500, The collector outer injection mold 1300 forms the outer surface shape of the collector 500 and the collector inner step injection mold 1400 forms the inner step 512. [

First, the injection machine is preheated and the molds (1100, 1200, 1300, 1400) are placed on the injection machine. Mold the injection mold and heat it to high temperature. After the injection mold is opened, the reinforcing ring fixing pin 1110 is operated to protrude to assemble the reinforcing ring 530 to the mold. Thereafter, the mold is closed and the material of the collector 500 such as PFA is injected. During the injection, the fixing pin 1110 is operated to be inserted and separated from the reinforcing ring 530. That is, when separating the fixing pin 1110, the fixing pin control device is used to give a time difference so that the reinforcing ring 530 does not move or deform. At this time, the through hole 531 of the reinforcing ring 530 is filled with the PFA. Then, the mold is opened and the collector separation mold 1200 is operated to extract the product.

Conventional collectors cut the fluororesin sheet to fabricate side portions and flanges by welding and fusion processes, so that thermal stress is concentrated on the welded and fused portions due to high temperature, and cracks due to mechanical strength resistance may occur, There is a short life span. In the collector 500 according to the first and second embodiments of the present invention, both the side surface portion 510 and the flange 520 are integrally formed so as to eliminate or minimize the weld portion, thereby improving the life and quality of the collector 500 .

According to the prior art, when a metal reinforcing ring is to be provided inside the collector, it is difficult to manufacture due to jig interference during welding and fusion. As shown in FIG. 11, when the metal reinforcing ring is coupled to the outer surface of the collector by welding or the like, when the welding is performed to weld the reinforcing ring 53 and the cover 54 to the collector side surface 51 having a small thickness, There is a risk that the reinforcing ring 53 and the side surface of the side sheet 51 are deformed or damaged due to the overheating reaction, so that it is difficult to secure the bonding safety. In contrast, in the collector 500 according to the first and second embodiments of the present invention, the thickness of the reinforcing ring coupling portion 511 is increased, and the possibility of deformation damage due to overheating is greatly reduced.

7, in order to solve such a problem, the collector 500 according to the first embodiment of the present invention has the reinforcing ring coupling portion 511 formed integrally with the side portion 510, The reinforcing ring attaching portion 513 is formed by applying a cutting and removing process to the reinforcing ring fitting portion 511. The reinforcing ring fitting portion 513 is formed by injection molding. Therefore, the collector 500 according to the first embodiment of the present invention can stably install the metal reinforcing ring 530 on the outside of the collector 500. In addition, the collector 500 according to the first embodiment of the present invention includes a plurality of through holes 531 formed around the plate-shaped reinforcing ring 530 to absorb and disperse the impact force due to an explosive reaction and to absorb deformation due to thermal expansion There is an effect that can be done.

9, the collector 500 according to the second embodiment of the present invention is integrally injection-molded in a state where the reinforcing ring 530 is inserted into the reinforcing ring coupling portion 511, The reinforcing ring 530 may be more completely protected.

The collector 500 according to the first and second embodiments of the present invention has an inner step 512 formed inside the lower end connected to the reinforcing ring coupling part 511 on which the reinforcing ring 530 is installed The gas generating space is widened and the production amount of the electrolytic cell is improved.

In addition, in the case of the collector according to the related art, it is difficult to install the reinforcing ring due to jig interference inside the collector. Therefore, the reinforcing ring 53 is provided on the outer surface of the collector side surface 51 as shown in FIG. Therefore, a step is formed with the collector side surface 51 by the thickness of the reinforcing ring 53 and the reinforcing ring cover 54. The collector of an electrolytic cell for manufacturing NF ₃ is a consumable, and includes a step of installing and removing the electrolytic cell in the NF ₃ manufacturing process. In the structure having the step on the outer surface of the collector, interference occurs when the collector is installed in or removed from the electrolytic bath, and the time required is long and the process becomes difficult. The collector 500 according to the first and second embodiments of the present invention is formed such that the outer surface of the collector ring 510 and the outer surface of the reinforcing ring coupling part 511 to which the reinforcing ring 530 is coupled is formed without a step, 500) No interference with other parts of the electrolytic cell during replacement or installation, making the process convenient and safe.

100: electrolytic bath body 200: electrolytic bath body cover
300: cathode part 400: anode part
500: collector 510: side surface
511: reinforcement ring engaging portion 512: internal step
513: reinforcement ring seat groove 520: flange
530: reinforcement ring 531: through-hole
540: reinforcing ring cover 550: welding part
600: H2 vent part 700: NF ₃ vent part
1100: in-collector injection mold 1110: reinforcing ring fixing pin
1200: collector separating mold 1300: collector outside injection mold
1400: In-stage step injection mold for collector

Claims (6)

A collector of an electrolytic cell for production of NF ₃ for producing NF ₃ by causing an electrolysis reaction between a plurality of anode electrodes and a plurality of cathode electrodes,
A square tubular side surface surrounding a predetermined number of anode electrodes;
A flange extending perpendicularly to an upper end of the side portion; And
And a ring-shaped reinforcement ring arranged on the lower end side of the side portion and formed to surround the side portion up to the set height,
Wherein the side portion is formed with a reinforcing ring engaging portion formed to be thickly protruded inwardly in a size corresponding to the thickness of the reinforcing ring from the lower end to a height corresponding to the height of the reinforcing ring, An inner stepped portion is formed on the inner periphery of the lower end connected to the lower side of the reinforcing ring coupling portion to a thickness smaller than that of the reinforcing ring coupling portion,
The side portion of the collector, the reinforcing ring coupling portion, and the flange are integrally injection-
The support ring is formed of a plurality of holes penetrating along the periphery, and the collector of an electrolytic cell for producing NF _3, characterized in that seated on the support ring engaging portion. The method according to claim 1,
She said side portions and said flange of said collector, the collectors of NF ₃ for producing an electrolytic cell consisting of ethylene (Polytetrafluoroethylene (PTFE)) as a PFA (Perfluoroalkoxy alkane) or polytetrafluoroethylene with the material. The method according to claim 1,
The support ring is a collector of NF ₃ for producing an electrolytic cell consisting of SUS (Stainless Steel) material. The method according to claim 1,
Wherein the reinforcing ring coupling portion has a shape corresponding to the reinforcing ring and the outer side is removed after the incision to form a reinforcing ring receiving groove, and the reinforcing ring receiving groove is formed in the reinforcing ring receiving groove so as to cover the outer surface of the reinforcing ring Wherein a reinforcing ring cover of the same material as the side surface of the shape is welded to the collector of the electrolytic cell for manufacturing NF ₃ . The method according to claim 1,
The support ring is the collector of an electrolytic cell for producing NF ₃ emitted integrally together when the side molding so as to be disposed inside the support ring engaging portion. The method of manufacturing a collector of an electrolytic cell for manufacturing NF _{3 according} to claim 5,
A collector separating mold, a collector separating mold, and an outer surface shape of the collector, which are preheated by the injector and are formed in the injector so that the reinforcing ring fixing pin can be protruded and inserted at a position where the reinforcing ring through hole is to be formed, And a collector inner step injection mold for forming the inner step;
Closing the molds and then heating them to a high temperature;
Assembling the reinforcing ring on the in-collector injection mold by operating the projecting pins of the reinforcing ring after opening the molds;
Molding the molds and injecting the collector material into the molds;
Separating the reinforcing ring fixing pin by giving a time difference before the injection is completed in the injecting step; And
Once the injection is completed, the collector of the NF ₃ production method for producing an electrolytic cell comprising the step of opening of the injection mold and extracting the finished yarn exhibited by operating the separate collector mold.

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