JP2019065392A - Gas collecting apparatus - Google Patents

Abstract

To provide a technology capable of achieving good workability in cleaning a gas-chamber forming surface of a gas collecting apparatus.SOLUTION: A gas collecting apparatus includes a bulkhead 28 that encircles an electrode on which electrolytic gas G is generated due to electrolysis of electrolyte and forms a gas chamber 32 for collecting the electrolytic gas G on the electrolyte. An aperture 38 opening downward is formed in the bulkhead 28. When the electrolyte is removed from an electrolytic bath, a cleaning instrument can be arranged so as to pass through the aperture 38 of the bulkhead 28 and cleaning solution can be jetted out upwardly, without disassembling or removing the bulkhead 28. Therefore, a gas-chamber forming surface such as the bulkhead can easily be cleaned and good workability in the cleaning can be achieved.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a gas recovery apparatus used for an electrolysis facility.

  DESCRIPTION OF RELATED ART Conventionally, the electrolysis installation which surface-treats to-be-processed material using electrolysis of electrolyte solution is known. In this type of electrolytic facility, an electrolytic gas such as hydrogen is generally generated from the electrode along with the electrolysis of the electrolytic solution. In recent years, attempts have been made to recover and use this electrolytic gas. For example, Patent Document 1 discloses a technique in which the entire cathode from which electrolytic gas is generated is surrounded by a partition to form a cathode chamber, and the electrolytic gas is collected and recovered in a gas chamber above the electrolytic solution.

Japanese Patent Application Laid-Open No. 56-33496

  By the way, when bubbles of the electrolytic gas burst on the electrolytic solution, the mist scatters around. When the mist adheres to the gas chamber forming surface forming the gas chamber, the material to be treated, the electrolytic equipment and the like, crystals are deposited by the drying. If this crystal remains attached to the gas chamber formation surface or the like, it causes problems such as deterioration due to corrosion. Therefore, the cleaning operation of the gas chamber formation surface or the like is usually performed for the purpose of removing the crystals adhering to the gas chamber formation surface or the like.

  Here, under the technique of Patent Document 1, the partition covers the entire cathode. Therefore, in order to allow the cleaning liquid to reach the gas chamber formation surface when the gas chamber formation surface is cleaned, it is necessary to go through the disassembly or removal of the partition wall, and there is a problem that the workability is inferior.

  One aspect of the present invention is made in view of such a subject, and one of the objects is to provide art which can acquire good operativity by cleaning operation of a gas room formation side of a gas recovery device.

  One aspect of the present invention for solving the above-mentioned subject is a gas recovery device. The gas recovery apparatus according to the first aspect includes a partition that surrounds an electrode generated by an electrolytic gas as the electrolytic solution is electrolyzed, and forms a gas chamber for collecting the electrolytic gas on the electrolytic solution. A gas recovery device in which an opening that opens downward is formed.

  According to the first aspect, when the electrolytic solution in the electrolytic cell is removed, the cleaning device can be disposed or the cleaning solution can be ejected so as to pass through the opening of the partition without involving disassembly and removal of the partition. Therefore, the gas chamber formation surface such as the partition can be easily cleaned, and good workability can be obtained in the cleaning operation.

It is a front sectional view showing typically an electrolysis installation where gas recovery equipment of a 1st embodiment is used. It is a block diagram which shows a gas collection | recovery apparatus with the typical side surface cross section of the electrolysis installation of 1st Embodiment. It is an enlarged view of a part of FIG. It is an enlarged view of a part of FIG. It is a block diagram which shows the functional block of the gas recovery system of 1st Embodiment. It is a perspective view which shows typically a part of partition body of 1st Embodiment. Fig.7 (a) is the figure seen from arrow Pa of FIG. 6, FIG.7 (b) is the sectional view on the AA line of FIG. 7 (a). It is a perspective view which shows the state which removed the 2nd partition member from the partition of 1st Embodiment. Fig.9 (a) is a figure which shows operation | movement of the gas collection | recovery apparatus of a 1st modification, FIG.9 (b) is a figure which shows operation | movement of the gas collection | recovery apparatus of 1st Embodiment. It is a perspective view which shows typically the gas recovery system of 2nd Embodiment. It is front sectional drawing of the gas recovery apparatus of 2nd Embodiment. It is a figure which shows typically the structure around the liquid level of the cathode of 3rd Embodiment. It is a figure showing a part of gas recovery device of the 2nd modification. It is sectional drawing which shows the partition of 4th Embodiment with peripheral structure. It is a front sectional view showing an electrolysis installation of a 5th embodiment typically. Fig.16 (a) is a side view of the gas recovery apparatus of the range B of FIG. 15, FIG.16 (b) is the side sectional view. It is an enlarged view of the range B of FIG. It is the figure which looked at the partition of 6th Embodiment from the same viewpoint as FIG. Fig.19 (a) is a side view which shows a part of partition body of 7th Embodiment, FIG.19 (b) is an exploded view of several partition body units. Fig.20 (a) is the DD sectional view taken on the line of Fig.19 (a), and FIG.20 (b) is a figure which shows the middle condition of an assembly of a partition unit.

  Hereinafter, in the embodiment and the modification, the same reference numerals are given to the same components, and the overlapping description will be omitted. In the drawings, for convenience of explanation, some of the components are omitted as appropriate, and the dimensions of the components are appropriately enlarged and reduced. Unless otherwise specified, the terms "contact" and "connection" in the present specification include cases in which the two mentioned conditions are satisfied directly, as well as the case where they are satisfied via other members.

  FIG. 1: is front sectional drawing which shows typically the electrolysis installation 12 in which the gas recovery apparatus 10 of 1st Embodiment is used. The electrolytic equipment 12 is for performing surface treatment on a material to be treated immersed in the electrolytic solution 14 by causing the electrolytic solution 14 to be electrolyzed by energizing the cathode 16 and the anode 18 immersed in the electrolytic solution 14. It is. The surface treatment of the present embodiment is an anodizing treatment to form an anodic oxide film (alumite film) on a material to be treated. In the anodizing treatment, aluminum, platinum or the like is used for the cathode 16, and a material to be treated made of aluminum is used as the anode 18. The cathode of the present embodiment is made of aluminum.

  The electrolysis facility 12 mainly includes a cathode 16, an anode 18, an electrolytic cell 20, and a support structure 22.

  FIG. 2 is a block diagram showing the gas recovery apparatus 10 together with a schematic side cross-sectional view of the electrolysis facility 12. As shown in FIGS. 1 and 2, the cathodes 16 are elongated members extending in the vertical direction, and a plurality of cathodes 16 are arranged in the horizontal direction. The anodes 18 are elongated members extending in the vertical direction, and although not shown, a plurality of the anodes 18 are arranged in the arrangement direction of the plurality of cathodes 16 (hereinafter referred to as the X direction). A voltage is applied between the cathode 16 and the anode 18 by a power supply (not shown).

  In the electrolytic cell 20, an electrolytic solution 14 corresponding to the content of the surface treatment is stored. In the present embodiment, for example, an aqueous solution containing sulfuric acid is used as the electrolytic solution 14 for anodizing treatment. The electrolytic cell 20 of the present embodiment has an open-type structure in which the liquid surface of the electrolytic solution 14 is exposed to the atmospheric pressure, and an opening 20 a is opened on the upper surface thereof.

  FIG. 3 is an enlarged view of a part of FIG. 1, and FIG. 4 is an enlarged view of a part of FIG. The cathode 16 of the present embodiment has a plate portion 16a provided at the upper end portion of the cathode 16, and a pipe portion 16b provided below the plate portion 16a and connected to the plate portion 16a.

  The support structure 22 has a base member 24 which is an elongated body, and an electrode connection portion 26 provided on the base member 24. The support structure 22 is a part of the conduction path from the power supply (not shown) to the plurality of cathodes 16, and is configured using a conductive material such as metal. The base member 24 has a cross-sectional shape excellent in rigidity, and has a rectangular cylindrical cross-sectional shape in the present embodiment. Both ends of the base member 24 are mounted on other structures such as the upper surface of the electrolytic cell 20, and the support structure 22 is supported by the structure.

  The electrode connection 26 protrudes downward from the base member 24. The electrode connection portion 26 is a plate-like elongated body along the longitudinal direction of the base member 24. The base member 24 and the electrode connection portion 26 extend in the X direction as a longitudinal direction. The electrode connection portion 26 of the present embodiment is a separate body from the base member 24 and is connected to the base member 24 by welding or the like. The electrode connection portion 26 is provided at a position that is fitted inward in the longitudinal direction from both end portions in the longitudinal direction of the base member 24, and is disposed in the electrolytic cell 20 (see FIG. 2). "Longitudinal inside" as used herein means the side closer to the longitudinal center of the component being referred to (here base member 24). The plate portion 16a of the cathode 16 is superimposed on the electrode connection portion 26, and the plate portion 16a is connected using a plurality of connectors such as bolts.

In the above-mentioned electrolysis installation 12, electrolysis gas G arises from cathode 16 with electrolysis of electrolysis solution 14. In the present embodiment, hydrogen (H ₂ ) gas is generated as the electrolytic gas G. The gas recovery device 10 is used to recover the electrolytic gas G generated from the cathode 16.

  The gas recovery apparatus 10 of the present embodiment mainly includes a partition 28 and a bubble guide member 30. The partition body 28 surrounds the cathode 16 where the electrolytic gas G is generated, and forms a gas chamber 32 for collecting the electrolytic gas G on the electrolytic solution 14. The gas in the gas chamber 32 is sent to another space through a gas recovery passage 52 and a gas discharge passage 56 described later.

  The bubble guide member 30 can be guided so as to lead the bubble of the electrolytic gas G generated at the cathode 16 to the gas chamber 32. The bubble guide member 30 is provided to surround the cathode 16 in a range from above the liquid surface of the electrolyte 14 to below the lower end of the cathode 16. The air bubble guide member 30 according to the present embodiment is a net-like body in which meshes forming a plurality of minute openings are formed, and has flexibility. The size of the opening of the bubble guide member 30 is set to a size that blocks air bubbles that are going to pass through the opening.

  The partition body 28 separates the external space 34 around the partition body 28 and the gas chamber 32. The partition body 28 is made of a material that has corrosion resistance to the electrolyte solution 14 and is insulating. This material is, for example, vinyl chloride resin or the like. The condition of the insulating property is to avoid a situation where current is passed through the partition 28 between the support structure 22 and the electrolyte 14.

  FIG. 5 is a block diagram showing a functional block of the gas recovery system 10 together with a schematic plan cross section of the partition 28. As shown in FIGS. 3 to 5, the partition body 28 has a top wall portion 28 a provided above the cathode 16 and a cylindrical peripheral wall portion 28 b surrounding the cathode 16. The peripheral wall portion 28 b has a pair of side wall portions 28 c extending along the X direction, and a pair of end wall portions 28 d provided on both end sides in the X direction.

  The gas chamber 32 is formed by being surrounded by the inner wall surface of the peripheral wall portion 28 b of the partition body 28, the outer surface (lower surface) of the base member 24 of the support structure 22, and the liquid surface of the electrolyte solution 14. Hereinafter, the surface of the partition 28 and the support structure 22 forming the gas chamber 32 will be referred to as a gas chamber forming surface 36.

  In a plan view, the gas chamber 32 has an X direction as a longitudinal direction, and a direction orthogonal to the X direction (hereinafter, referred to as a Y direction) as a narrow direction. This means that the internal dimension along the Y direction is smaller than the internal dimension along the X direction of the gas chamber 32 in plan view.

  The partition body 28 is provided so as to cover the cathode 16 from the upper side, and functions as a kind of hood. The partition 28 is in the form of a box that opens downward, and the partition 28 is formed with an opening 38 that opens downward. The opening 38 is provided such that a portion of the partition 28 does not exist at a position vertically overlapping the cathode 16 at least below the liquid surface of the electrolyte solution 14. The opening 38 of the present embodiment is formed by the lower end of the peripheral wall 28 b. The opening 38 is sunk below the surface of the electrolyte 14. The opening 38 of the present embodiment is provided at a position where the upper end 16 c of the cathode 16 penetrates. Here, the “upper end portion 16 c of the cathode 16” refers to a region of 10% of the entire length of the cathode 16 in the longitudinal direction from the upper end of the cathode 16. The opening 38 is provided at a position overlapping the cathode 16 in the horizontal direction. A gap 40 is provided between the opening 38 and the air bubble guide member 30 for passing the cleaning liquid.

  The partition 28 of the present embodiment surrounds a plurality of cathodes 16 to form one gas chamber 32. The partition body 28 of the present embodiment forms one gas chamber 32 by surrounding all the cathodes 16 other than the cathode 16 at both ends in the X direction among the plurality of cathodes 16 (see FIG. 2). The electrolytic gas G generated from the cathodes 16 on both ends in the X direction is not recovered, and the electrolytic gas G generated from the other cathodes 16 is recovered.

  FIG. 6 is a perspective view schematically showing a part of the partition 28. As shown in FIG. Fig.7 (a) is the figure seen from arrow Pa of FIG. 6, FIG.7 (b) is the sectional view on the AA line of FIG. 7 (a). The partition body 28 has a first partition member 42 and a second partition member 44. The first partition wall member 42 has a top surface portion 42 a forming the top wall portion 28 a of the partition wall 28 and a first partition wall portion 42 b forming a pair of side wall portions 28 c of the partition wall 28. The top surface portion 42 a is covered on the base member 24 of the support structure 22, and the first partition wall portion 42 b is suspended from each of both end portions in the Y direction. The pair of first partition portions 42 b is provided in contact with or in the vicinity of the side surface of the base member 24 in the Y direction.

  The second partition members 44 are provided at both ends of the gas chamber 32 in the X direction. The second partition wall member 44 includes a second partition wall portion 44 a forming the end wall portion 28 d of the partition wall body 28, a pair of first connection wall portions 44 b connected to the first partition wall member 42, and an electrode of the support structure 22. And a pair of second connection wall portions 44 c connected to the connection portion 26.

  FIG. 8 is a perspective view showing a state in which the second partition wall member 44 is removed from the partition wall 28. As shown in FIG. As shown in FIGS. 7 and 8, the end wall 28 d of the partition body 28, that is, the second partition 44 a of the second partition member 44 is longer than one end 26 a in the longitudinal direction (X direction) of the electrode connection portion 26. Placed inside the direction. Here, “inward in the longitudinal direction” refers to the side closer to the center in the longitudinal direction of the electrode connection portion 26 as described above. In order to realize this, a notch 44 d having a shape corresponding to the electrode connection portion 26 of the support structure 22 is formed in the second partition wall 44 a. The notch 44d has a groove shape that is recessed downward from the upper side of the second partition wall 44a. The electrode connection portion 26 of the support structure 22 penetrates the notch 44 d and is fitted into the notch 44 d.

  As shown in FIGS. 6 and 7, the first connection wall 44 b extends inward in the longitudinal direction of the electrode connection portion 26 from both ends of the first partition 42 b in the Y direction. The first connection wall 44b of the present embodiment is provided as part of the same member as the second partition 44a. The first connection wall 44 b is superimposed on the first partition 42 b of the first partition 42 and is connected to the first partition 42 b using a connector 46 such as a screw. The first connection wall 44 b and the first partition 42 b are sealed by a sealing material (not shown) which is an elastic body sandwiched therebetween.

  The pair of second connection wall portions 44 c is disposed on both sides of the electrode connection portion 26 of the support structure 22. The second connection wall 44 c extends from the edge of the notch 44 d of the second partition 44 a to the outside in the longitudinal direction of the electrode connection 26. The second connection wall portion 44c of the present embodiment is separate from the second partition wall portion 44a, and is connected to the second partition wall portion 44a by welding or the like. The pair of second connection wall portions 44 c is superimposed on the electrode connection portion 26 and is connected to the electrode connection portion 26 using a connection tool 48 such as a screw. The second connection wall portion 44c and the electrode connection portion 26 are sealed by a sealing material (not shown) which is an elastic body sandwiched therebetween. The second connection wall 44 c may form part of the same single member as the second partition 44 a.

  The first partition wall member 42 described above is placed on the support structure 22 and is fixed to the support structure 22 by being connected to the support structure 22 via the second partition wall member 44. The connector 46 for connecting the first partition member 42 to the second partition member 44 and the connector 48 for connecting the second partition member 44 to the support structure 22 are the first partition member 42, the second partition member 44, and the support. It can be attached to and detached from the structure 22. The partition body 28 is detachably attached to the support structure 22 by removing and attaching the connectors 46 and 48.

The effects of the above gas recovery apparatus 10 will be described.
(A) As shown in FIG. 3 and FIG. 4, the partition wall 28 is formed with an opening 38 opening downward. Therefore, when the electrolytic solution 14 of the electrolytic cell 20 is removed, the cleaning tool can be disposed or the cleaning solution can be ejected so as to pass through the opening 38 of the partition 28 without disassembling or removing the partition 28. Therefore, the gas chamber forming surface 36 such as the partition 28 can be easily cleaned, and good workability can be obtained in the cleaning operation. Here, the cleaning device means an device capable of spouting the cleaning solution. Further, this cleaning operation is performed by spouting the cleaning liquid onto the crystals deposited on the gas chamber forming surface 36 to wash out the crystals.

(B) The partition body 28 surrounds a plurality of cathodes 16 to form one gas chamber 32. Therefore, the number of partition bodies 28 can be reduced compared to using individual partition bodies 28 for each cathode 16, and the installation work of the partition bodies 28 becomes easier. Further, along with this, the product cost of the gas recovery apparatus 10 can be reduced.

(C) The partition 28 has a structure in which there is no wall between the plurality of cathodes 16. Therefore, the cleaning solution can easily reach the wide area of the gas chamber forming surface 36 of the partition body 28 without moving the cleaning tool largely, as compared with the structure in which the wall portion is provided between the plurality of cathodes 16.

(D) The opening 38 of the partition 28 is provided at a position where the upper end 16 c of the cathode 16 penetrates. Therefore, the distance from the gas chamber forming surface 36 such as the partition 28 to the opening 38 is shortened, and the gas chamber forming surface 36 can be easily cleaned using the cleaning tool or the cleaning liquid passing through the opening 38.

  Consider a case where the load of the bulkhead 28 has to be transmitted to the support structure 22 through the connector 80 as in the structure of FIG. 11 described later. In this case, in order to securely transmit the load of the partition 28 to the support structure 22, the large-area connected portion 22 a is formed on the support structure 22 in order to secure the connection strength between the support structure 22 and the partition 28. It is necessary to provide or increase the number of connectors 80. Along with this, the connection structure for connecting the partition body 28 to the support structure 22 becomes complicated.

  In this regard, as shown in FIGS. 6 and 7, the first partition member 42 of the partition body 28 is covered on the support structure 22. Therefore, in order to transmit the load of the partition 28 firmly to the support structure 22, the load of the partition 28 can be directly transmitted to the support structure 22. For this reason, the connection structure for connecting the partition body 28 to the support structure 22 can be simplified, and the product cost of the gas recovery apparatus 10 can be reduced.

  Further, as compared with the structure of FIG. 11 described later, in order to connect the partition body 28 to the support structure 22, it is not necessary to provide the connection portion 22a which is a protrusion on the support structure 22. Therefore, when using the gas recovery apparatus 10, the support structure 22 can be miniaturized, and interference with the peripheral structure of the connected portion 22a can be avoided.

  In addition, as shown in FIG. 8, the string-like body 50 is connected to the upper end part of the bubble guide member 30 of this embodiment. The air bubble guide member 30 is supported by the support structure 22 by winding the cord-like body 50 around the base member 24 of the support structure 22. Here, according to the present embodiment, when the string-like body 50 of the air bubble guide member 30 is wound around the support structure 22, since there is no connected portion 22a of the support structure 22 to be a protrusion, the winding operation is performed. Becomes easy.

  The end wall portion 28d of the partition body 28 is disposed longitudinally inward of one end 26a of the electrode connection portion 26 of the support structure 22, as shown in FIG. Therefore, the partition body 28 has a layout that does not extend beyond the electrode connection portion 26 of the support structure 22 in the longitudinal direction. For this reason, as shown in FIG. 2, even when there is not much gap between the inner wall surface of the existing electrolytic cell 20 and one end 26a of the electrode connection portion 26 of the support structure 22, interference with the electrolytic cell 20 is avoided. While the partition body 28 can be used.

  In the present embodiment, the second connection wall portion 44c of the second partition member 44 can be disposed between the one end 26a of the electrode connection portion 26 of the support structure 22 and the electrode 16 at the end of the X direction. There is no space. Therefore, in the present embodiment, the existing cathode 16 (not shown) at the second place is removed from the electrode 16 on the endmost side in the X direction, and the second partition member 44 is connected to the attachment place of the cathode 16. ing. At this time, a bolt is inserted into an existing bolt hole for connecting the existing cathode 16 to the electrode connection portion 26, and the second partition member 44 is connected to the electrode connection portion 26 using the bolt. The existing cathode 16 removed in order to secure the connection point of the second partition wall member 44 is not particularly limited. For example, the cathode 16 at the endmost side in the X direction may be targeted. A case will be considered where there is a space in which the second connection wall portion 44c of the second partition wall member 44 can be disposed between one end 26a of the electrode connection portion 26 and the cathode 16 at the end of the X direction. In this case, a bolt may be inserted through a bolt hole newly formed in the electrode connection portion 26 without removing the existing cathode 16, and the second partition member 44 may be connected using the bolt.

  Other features of the gas recovery apparatus 10 will be described. The gas recovery apparatus 10 further includes a gas recovery passage 52, a gas supply passage 54, a gas discharge passage 56, a switching valve 58, a measuring unit 60, and a control unit 62, as shown in FIGS. Prepare.

  The gas recovery passage 52 is for sending the electrolytic gas G in the gas chamber 32 to the recovery space 64. In the gas recovery passage 52, a liquid tank 68 in which a sealing liquid 66 such as water is stored is installed. The gas in the gas chamber 32 is sent to the recovery space 64 while passing through the sealing liquid 66 in the liquid tank 68. The liquid tank 68 plays a role in removing soluble mist from the gas, in addition to serving as a flashback protector.

  The gas recovery passage 52 has a gas outlet 52a from which the gas flows out. The gas outlet 52 a is entirely submerged in the sealing liquid 66. A portion of the sealing liquid 66 fills the inside of the downstream portion 52 b of the gas recovery passage 52. The sealing liquid 66 blocks the communication between the gas chamber 32 in the partition 28 and the recovery space 64 in the liquid tank 68.

  The gas supply passage 54 is for supplying an inert gas from the gas source to the gas chamber 32. The inert gas here is, for example, nitrogen, argon or the like. An on-off valve 70 is installed at an intermediate position of the gas supply passage 54. When the on-off valve 70 is in the open state, the inert gas is supplied to the gas chamber 32, and when the on-off valve 70 is in the closed state, the supply of the inert gas is stopped. The on-off state of the on-off valve 70 of the present embodiment is switched under the control of the control unit 62. The on-off valve 70 may switch the open / close state manually.

  The gas discharge passage 56 is branched from the gas recovery passage 52 and is for sending the gas in the gas chamber 32 to the exhaust space 72. In the present embodiment, the air remaining in the gas chamber 32 is to be discharged through the gas discharge passage 56, and the exhaust space 72 becomes an atmospheric space.

  The switching valve 58 is for switching the destination of the gas in the gas chamber 32 to any one of the recovery space 64 and the exhaust space 72. The switching valve 58 of the present embodiment is a three-way valve provided at a branch point where the gas discharge passage 56 branches from the gas recovery passage 52. The switching valve 58 has a first state in which the gas in the gas chamber 32 can be circulated only to the recovery space 64 and a second state in which the gas in the gas chamber 32 can be circulated only to the exhaust space 72. It is possible to switch between the states. The switching valve 58 of the present embodiment can switch these operation states under the control of the control unit 62. When the switching valve 58 is in the first state, the gas destination in the gas chamber 32 becomes the recovery space 64. When the switching valve 58 is in the second state, the gas destination in the gas chamber 32 is the exhaust space 72.

  The measuring unit 60 is an oxygen sensor. The measurement unit 60 can measure the concentration of oxygen in the gas chamber 32, and can output the measurement result to the control unit 62 as a measurement signal. The measurement unit 60 of the present embodiment is a portion upstream of the switching valve 58 of the gas recovery passage 52 and is installed downstream of a junction point described later. Accordingly, the measuring unit 60 measures the concentration of oxygen sent from the inside of the gas chamber 32 into the gas recovery passage 52 as the concentration in the gas chamber 32.

  The control unit 62 controls the switching valve 58 and the on-off valve 70 based on the measurement signal output from the measurement unit 60. Specifically, when the concentration of oxygen measured by the measurement unit 60 exceeds the predetermined lower limit concentration, the control unit 62 switches the on-off valve 70 to the open state to supply the inert gas into the gas chamber 32. At the same time, the control unit 62 switches the switching valve 58 to the second state to set the gas destination in the gas chamber 32 to the exhaust space 72. Thus, the air remaining in the gas chamber 32 of the partition 28 is purged by the inert gas and discharged to the exhaust space 72. The lower limit concentration is set so that the mixing ratio of the mixed gas does not belong to the combustion range when the electrolytic gas G and air in the gas chamber 32 are mixed. The lower limit concentration is set, for example, in the range of less than 5%.

  When the concentration of oxygen measured by the measurement unit 60 is equal to or less than the predetermined lower limit concentration, the control unit 62 switches the on-off valve 70 to the closed state to stop the supply of the inert gas into the gas chamber 32. At the same time, the control unit 62 switches the switching valve 58 to the first state, and sets the gas destination in the gas chamber 32 to the recovery space 64. Accordingly, when the electrolytic gas G is collected in the gas chamber 32 of the partition body 28, the electrolytic gas G is sent to the recovery space 64.

  At this time, the internal pressure of the electrolytic gas G in the gas chamber 32 increases as the gas amount of the electrolytic gas G in the gas chamber 32 of the partition body 28 increases. Along with this, the liquid level of the sealing liquid 66 filled in the downstream portion 52 b of the gas recovery passage 52 gradually decreases. When the liquid level of the sealing liquid 66 falls to a position overlapping the gas outlet 52a of the gas recovery passage 52, the electrolytic gas G in the gas chamber 32 is sent to the recovery space 64 of the liquid tank 68 through the gas outlet 52a. .

The effects of the above gas recovery apparatus 10 will be described.
In the gas recovery apparatus 10, maintenance is performed periodically for the purpose of cleaning the gas chamber forming surface 36 and replacing the cathode 16. When the electrolyte solution 14 is removed after the maintenance of the gas recovery apparatus 10 and the electrolyte solution 14 is stored again in the electrolytic cell 20, air remains in the gas chamber 32 of the partition 28. Here, in the present embodiment, the gas supply passage 54 for supplying an inert gas into the gas chamber 32 is provided. Therefore, by supplying the inert gas into the gas chamber 32 before generating the electrolytic gas G, the air remaining in the gas chamber 32 can be purged by the inert gas through the gas recovery passage 52. Therefore, the electrolytic gas G can be recovered after removing the oxygen component of air remaining in the gas chamber 32 as much as possible. As a result, the electrolytic gas G mixed with a large amount of oxygen components in the air can be prevented from being recovered through the gas recovery passage 52.

  Further, the gas recovery apparatus 10 includes a switching valve 58 capable of switching the destination of the gas in the gas chamber 32 to any one of the recovery space 64 and the exhaust space 72. Therefore, after the air remaining in the gas chamber 32 is sent to the exhaust space 72, the electrolytic gas G can be sent to the recovery space 64. Therefore, the electrolytic gas G from which the oxygen component of air is removed as much as possible can be recovered in the recovery space 64.

  Further, as described above, the gas recovery apparatus 10 includes the control unit 62 that controls the switching valve 58 based on the measurement result of the measurement unit 60. Therefore, the operation of the gas recovery apparatus 10 can be automated so that the electrolytic gas G is sent to the recovery space 64 after the air remaining in the gas chamber 32 is sent to the exhaust space 72.

  The electrolytic gas G sent to the recovery space 64 may be temporarily stored in a storage tank (not shown) and then used in another manufacturing process. In addition to this, it may be used in other manufacturing processes without being stored in a storage tank.

  As shown in FIG. 5, the gas recovery passage 52 has a gas inlet 52 c into which the gas flows from the gas chamber 32. The gas inlet port 52c is opened to the inner wall surface of the first end wall portion 28d at one end side (right side in FIG. 5) of the partition body 28 in the X direction. As shown in FIGS. 5 and 6, the gas recovery passage 52 of the present embodiment has a plurality of first branch passages 52d branched upstream from a junction provided at an intermediate position. The gas inlet 52c is provided at the upstream end of the first branch passage 52d. A plurality of gas inlets 52 c are opened on the inner wall surface of the first end wall portion 28 d of the partition body 28. A part of the gas inlets 52 c is located above the lower end of the electrode connection 26, and the other gas inlet 52 c is located below the lower end of the electrode connection 26.

  The gas supply passage 54 has a gas outlet 54 a through which the inert gas flows out to the gas chamber 32. The gas outlet 54a is opened to the inner wall surface of the second end wall portion 28d on the other end side (left side in FIG. 5) of the partition body 28 in the X direction. The gas supply passage 54 of the present embodiment has a plurality of second branch passages 54b branched toward the downstream side from a branch point provided in the middle position, and the gas outlet at the downstream end of the second branch passage 54b. 54a is provided. A plurality of gas outlets 54a are opened on the inner wall surface of the second end wall portion 28d of the partition body 28. Although not shown, a part of the gas outlets 54a of the plurality of gas outlets 54a is located above the lower end of the electrode connection 26, and the other gas outlets 54a are below the lower end of the electrode connection 26. To position.

  Fig.9 (a) is a figure which shows operation | movement of the gas recovery apparatus 10 of a 1st modification. FIG. 9 (b) is a view showing the operation of the gas recovery system 10 of the first embodiment. Both figures show the gas flow direction Pb. The gas inlet 52 c of the gas recovery passage 52 of this example and the gas outlet 54 a of the gas supply passage 54 are opened on the inner wall surface of the side wall 28 c of the partition 28. It is assumed that the inert gas is supplied from the gas outlet 54 a to purge the air in the gas chamber 32. In this case, in the structure of the present embodiment, the inert gas hardly passes through the end 32 a of the gas chamber 32 in the X direction, and the air remaining in the end 32 a becomes difficult to push out by the inert gas.

  In this respect, the gas outlet 54 a and the gas inlet 52 c of the present embodiment are opened on the inner wall surface of the end wall portion 28 d of the partition 28. Therefore, the inert gas can easily pass through the end portion 32a in the X direction of the gas chamber 32, and the air remaining in the end portion 32a can be easily pushed out smoothly by the inert gas. As a result, it is possible to reduce the amount of use of the inert gas required to purge the air in the gas chamber 32.

  In addition, the electrolysis installation 12 is equipped with the aeration pipe 74 installed in the inner bottom part of the electrolytic vessel 20, as shown in FIG. The air diffusion tube 74 feeds the stirring bubble 76 rising in the electrolyte 14 into the electrolyte 14. The stirring bubble 76 is used for the purpose of homogenizing the temperature in the vertical direction by stirring the electrolytic solution 14. By making the temperature of the electrolytic solution 14 uniform, the film thickness of the anodic oxide film formed on the material to be treated can be made uniform in the vertical direction.

  When the stirring bubble enters the gas chamber 32, the gas component of the stirring bubble 76 mixes with the electrolytic gas G. As a countermeasure against this, the bubble guide member 30 is used in the present embodiment. The bubble guide member 30 can prevent the agitating bubble 76 from entering the bubble guide member 30 and prevent the agitating bubble 76 from entering the gas chamber 32.

  In order to exert the same effect, an inert gas may be used as the stirring bubble 76. In addition to this, another bubble guide member may be used so as to be able to separate the rising path of the stirring bubble 76 and the rising path of the electrolytic gas G.

Second Embodiment
FIG. 10 is a perspective view schematically showing the gas recovery apparatus 10 of the second embodiment. FIG. 11 is a front cross-sectional view of the gas recovery device 10. In the second embodiment, the configuration of the partition 28 mainly differs from the examples of FIGS. 3 and 8. The support structure 22 has a connected portion 22 a for connecting the partition 28. The connected portion 22a has a plate shape that protrudes from the base member 24 to both sides in the Y direction. The connected portion 22a is separate from the base member 24, and is connected to the base member 24 by welding or the like.

  In addition to the cylindrical peripheral wall portion 28b, the partition body 28 has a flange portion 28e which protrudes outward from the upper end opening of the peripheral wall portion 28b. The peripheral wall portion 28b of the present embodiment is configured using a single member. Unlike the example of FIG. 8, the end wall 28 d of the peripheral wall 28 b is disposed outside the one end 26 a of the electrode connection portion 26 of the support structure 22 in the longitudinal direction (X direction).

  The flange portion 28 e is superimposed on the connected portion 22 a of the support structure 22 from the lower side, and is connected to the connected portion 22 a using a connector 80 such as a bolt. Unlike the example of FIG. 3, the partition 28 can not cover the support structure 22. The effects (A) to (D) described above can be obtained with this partition 28 as well.

Third Embodiment
FIG. 12 is a view schematically showing the configuration around the liquid surface of the cathode 16 of the third embodiment. From the viewpoint of facilitating the cleaning operation of the gas chamber formation surface 36, it is preferable that the mist M can be prevented from scattering to the peripheral structure that is generated as the bubbles of the electrolytic gas G burst. From such a point of view, the gas recovery apparatus 10 captures mist M generated by the burst of bubbles of electrolytic gas G in the gas chamber 32, and captures mist for preventing scattering to the surrounding structure. The body 82 is provided. Here, the peripheral structure is the base member 24 of the support structure 22, the electrode connection portion 26, and the partition 28, and is a portion where the gas chamber forming surface 36 is provided. The mist capturing body 82 is separate from the support structure 22 and the partition 28, and is provided in the gas chamber 32 above the liquid surface of the electrolyte solution 14.

  The mist capturing body 82 of the present embodiment is provided as a part of the bubble guide member 30. Specifically, the mist capturing body 82 is provided as a point which is tapered upward at the upper end of the bubble guide member 30. The mist capturing body 82 is provided on the liquid surface of the electrolytic solution 14 and at a position that partially covers the floating point 14 a of the electrolytic gas G from the upper side. Here, the floated portion 14 a of the electrolytic gas G refers to a portion surrounded by the bubble guide member 30 on the liquid surface of the electrolytic solution 14. The mist capturing body 82 is provided with a gap with respect to the cathode 16 in at least a part of the range around the entire circumference of the cathode 16. As a result, the electrolytic gas G is less likely to stagnate inside the bubble guide member 30.

  According to the above configuration, even when mist M is generated along with the explosion of the bubbles of electrolytic gas G, mist M can be captured by mist capturing body 82 and scattering to the surrounding structure can be prevented. Therefore, the adhesion of the mist M in the peripheral structure can be prevented, and the cleaning operation of the gas chamber forming surface 36 can be facilitated. The mist M captured by the mist capturing body 82 flows down by its own weight in the state of droplets and is returned to the electrolyte solution 14.

  The mist capturing body 82 may be configured using a non-adhesive material to which the mist of the electrolyte solution 14 does not easily adhere. The non-adhesive material is, for example, polytetrafluoroethylene (PTFE), perfluoroalkoxyalkane (PFA) or the like.

  FIG. 13 is a view showing a part of a gas recovery apparatus 10 of a second modification. The mist capturing body 82 is not particularly limited as to its specific example. The mist capturing body 82 may be, for example, a filter provided separately from the bubble guide member 30. The filter is constructed using a breathable material. The material of the filter is preferably combined with liquid repellency (water repellency) that repels the mist of the electrolytic solution. This material is, for example, a non-woven fabric or the like. The mist capturing body 82 is provided on the liquid surface of the electrolytic solution 14 so as to entirely cover the floating point 14 a of the electrolytic gas G from the upper side.

Fourth Embodiment
FIG. 14 is a cross-sectional view showing the partition body 28 of the fourth embodiment together with the peripheral structure. In the example of FIG. 3, the cross-sectional shape of the base member 24 of the support structure 22 is square cylindrical shape, The example whose upper surface part is flat form was demonstrated. The cross-sectional shape of the base member 24 is not particularly limited, and may be, for example, a plate whose upper surface is curved.

  Further, it is preferable that the top surface portion 42 a of the first partition member 42 placed on the base member 24 be shaped to be able to contact along the upper surface portion of the base member 24. The top surface portion 42 a of the first partition wall member 42 of the present embodiment has a plate shape curved so as to be in contact along the upper surface portion of the base member 24. In order to realize this, the first partition member 42 is preferably configured using a flexible material. This material is, for example, soft polyvinyl chloride or the like. As a result, a gap is less likely to be generated between the top surface portion 42a of the first partition member 42 and the base member 24, and a situation in which the gas in the gas chamber 32 escapes to the external space through the gap can be avoided.

Fifth Embodiment
FIG. 15: is front sectional drawing which shows typically the electrolysis installation 12 of 5th Embodiment. The gas recovery apparatus 10 of the present embodiment includes a hood-like chute 100 that covers the partition 28. The chute 100 is used to avoid contact of the anode 18 with the bulkhead 28 when placing the anode 18 in the electrolytic cell 20.

  Fig.16 (a) is a side view of the gas recovery apparatus 10 of the range B of FIG. 15, and FIG.16 (b) is the side surface sectional view. FIG. 17 is an enlarged view of the range B of FIG. FIG. 17 is also a cross-sectional view taken along the line C-C in FIG. The pair of side wall portions 28 c of the partition body 28 is disposed with the cathode 16 (electrode) interposed therebetween. The partition body 28 includes an opening wall portion 104 in which an opening portion 102 for communicating the external space 34 and the gas chamber 32 is formed. The opening wall portion 104 is configured by one side wall portion 28c of the pair of side wall portions 28c in the present embodiment.

The partition 28 of the present embodiment includes an overpressure relief portion 106 capable of releasing the overpressure in the gas chamber 32 to the outside. Here, the overpressure refers to a pressure that exceeds a predetermined allowable pressure. Here, the allowable pressure refers to the maximum design allowable pressure at the partition 28. This allowable pressure is set to, for example, 1.3 × 10 ⁵ [Pa], which is larger than normal pressure (≒ 1.0 × 10 ⁵ [Pa]).

  The overpressure relief part 106 of the present embodiment is a part of the partition body 28 and a wall 108 for separating the external space 34 from the gas chamber 32 and a fixing for fixing the wall 108 to the other part of the partition 28 And a unit 110. The wall 108 of this embodiment covers and covers the opening 102 of the opening wall 104, and the fixing portion 110 fixes the wall 108 to the opening wall 104. The fixing portion 110 is, for example, a bolt, an adhesive, or the like.

  The wall body 108 of the present embodiment is constituted by a fragile wall portion whose rigidity is weaker than the other wall portions of the partition body 28 which separates the outer space 34 and the gas chamber 32. Here, the “other wall portion” is the opening wall portion 104 in the present embodiment. Thus, in order to weaken the rigidity, the fragile wall portion is configured to be thinner than the other wall portions of the partition body 28 described above. The thickness of the fragile wall portion is set to, for example, 0.2 times or less of the thickness of the other wall portion of the partition 28.

  The gas recovery apparatus 10 includes a partition member 114 which is disposed inside the partition body 28 and divides the gas chamber 32 into a plurality of small chambers 112. A plurality of partition members 114 in the present embodiment are disposed inside the partition body 28, and the plurality of partition members 114 divide the gas chamber 32 into three or more small chambers 112. The plurality of cells 112 in the present embodiment are arranged in the X direction. The partition member 114 of the present embodiment has a plate shape, more specifically, a flat plate shape. The partition member 114 is disposed between some of the plurality of cathodes 16 adjacent to one another in the X direction.

  In the partition member 114, a notch 116 having a shape corresponding to the electrode connection portion 26 of the support structure 22 is formed. The electrode connection portion 26 penetrates the notch portion 116 and is fitted into the notch portion 116.

  The upper side 114 a of the partition member 114 contacts the base member 24 of the support structure 22. Each of the pair of side portions 114 b of the partition member 114 is in contact with each of the pair of side wall portions 28 c of the partition body 28. The lower side portion 114 c of the partition member 114 is sunk below the liquid surface of the electrolytic solution 14. The partition member 114 is fixed to the side wall portion 28c of the partition body 28 by, for example, a bolt, welding or the like.

  The partition member 114 is formed with a communication passage 118 which communicates the plurality of adjacent small chambers 112. The communication passage 118 in the present embodiment is a through hole penetrating the partition member 114. The communication passage 118 can pass a gas such as an electrolytic gas G or an inert gas between adjacent small chambers 112. Thus, the number of parts can be reduced by providing the communication passage 118 using a member separate from the partition member 114. In the present embodiment, the communication passage 118 is formed in each of the plurality of partition members 114. Thus, all the small chambers 112 are communicated via the communication passage 118. Therefore, the inert gas can be sent from the gas supply passage 54 into all the cells 112, and the electrolytic gas G and the inert gas in all the cells 112 can be sent to the gas recovery passage 52.

  The communication passage 118 in the present embodiment is formed to communicate with the upper portion of each adjacent small chamber 112. As a result, the communication passage 118 is provided at a location away from the liquid surface of the electrolyte solution 14. Along with this, the mist of the electrolytic solution that scatters along with the rupture of the bubble of the electrolytic gas is less likely to adhere to the communication passage 118, and the communication passage 118 is less likely to be blocked by the crystal of the electrolytic solution. In addition, the electrolytic gas G, which is lighter than the inert gas, can be easily passed.

  The above-described overpressure relief portion 106 is provided corresponding to the plurality of small chambers 112. The overpressure relief part 106 of the present embodiment is individually provided corresponding to each of the plurality of small chambers 112. In the present embodiment, a plurality of (two) overpressure relief portions 106 are provided for one small chamber 112. The overpressure relief portion 106 can release the overpressure in the corresponding chamber 112 to the outside.

  The operation of the above gas recovery apparatus 10 will be described. A case where an overpressure is applied in the gas chamber 32 will be considered. This is because, for example, the electrolytic gas G in the gas chamber 32 burns while recovering the electrolytic gas G in the gas chamber 32, and the gas in the gas chamber 32 rapidly expands due to the heating accompanying the combustion. is there. As described above, when the overpressure is applied to the inside of the gas chamber 32, the overpressure relief portion 106 is broken before the other portion of the partition 28. In the present embodiment, the wall 108 of the overpressure relief portion 106 is broken, and the external space 34 and the gas chamber 32 communicate with each other through the opening 102 which was covered by the wall 108. As described above, the overpressure relief portion 106 causes the external space 34 and the gas chamber 32 to communicate with each other by being destroyed earlier than the other portions of the partition body 28 when the overpressure is applied in the gas chamber 32. An opening 102 can be provided.

  By providing such an opening 102, the overpressure in the gas chamber 32 is released from the opening 102 to the external space 34. (E) Thereby, the situation where the pressure in the gas chamber 32 further increases under the state where the overpressure is applied in the gas chamber 32 can be avoided, and the safety of the gas recovery apparatus 10 can be improved.

  Another operation of the gas recovery system 10 will be described. A case where the electrolytic gas G is ignited in any one of the small chambers 112 during collection of the electrolytic gas G in the gas chamber 32 is considered. In this case, a flame generated by the combustion of the electrolytic gas G tends to propagate from the ignition point to the periphery. When a flame is to be propagated from one of the small chambers 112 to the adjacent small chamber 112, the propagation of the flame is blocked by the partition member 114. The flame blocked by the partition member 114 is transmitted through the communication passage 118 into the other compartment 112 and propagates so as to spread in the compartment 112. As described above, while the flame propagation in the small chamber 112 and the blocking by the partition member 114 of the flame propagation are repeated, the flame tends to propagate throughout the gas chamber 32.

  Thus, in the process of flame propagation throughout the gas chamber 32, the propagation speed can be temporarily reduced by blocking the flame propagation by the partition member 114, and the flame propagates rapidly throughout the gas chamber 32. Can avoid Along with this, it is possible to allow a design for escaping the internal pressure of the gas chamber 32 before an excessive pressure is applied to the gas chamber 32 due to the rapid flame propagation as described below, and the safety of the gas recovery apparatus 10 I can improve it.

  When the electrolytic gas G burns in any of the small chambers 112, the gas in the small chamber 112 expands rapidly due to the heating accompanying the combustion, the pressure in the small chamber 112 becomes larger than that of the other small chambers 112, and the small chamber 112 Overpressure is applied inside. Thus, when the overpressure is applied to the small chamber 112, the overpressure relief portion 106 corresponding to the small chamber 112 is destroyed earlier than the other portion of the bulkhead 28, and the overpressure in the small chamber 112 is the external space 34. Be missed. As a result, in the process of propagation of the flame sequentially in the plurality of small chambers 112, the overpressure can be gradually released to the outside in the individual small chambers 112. Therefore, as compared with the case where the flame is propagated all at once in the entire gas chamber 32, an excessive pressure is not easily applied to the entire gas chamber 32, so that the safety of the gas recovery apparatus 10 can be further improved.

  The overpressure relief part 106 of the present embodiment is provided only on one of the pair of wall parts (side wall parts 28c). Here, the “pair of wall portions” refers to the pair of side wall portions 28 c in the present embodiment. Therefore, even if another object is placed near the other wall, interference with the other object can be avoided when the overpressure relief unit 106 operates. In the present embodiment, when the wall 108 of the overpressure relief portion 106 is broken, interference with a part of the broken wall 108 and another object can be avoided. For this reason, a design in which another object is placed near the other wall can be accepted, and the design freedom in providing the overpressure relief portion 106 in the bulkhead 28 can be improved. In the present embodiment, the “other object” here refers to another partition body 28 or a part of the electrolytic cell 20 (see FIG. 15).

  Although a pair of side wall part 28c was demonstrated to an example as a "pair of wall parts" here, a pair of end wall part 28d may be sufficient. In addition, the overpressure relief portion 106 may be provided on any wall portion of the bulkhead 28.

  Although the gas recovery apparatus 10 of the present embodiment is not shown, the gas recovery passage 52, the gas supply passage 54, the gas discharge passage 56, the switching valve 58, the measuring unit 60, and the control unit 62 described in the first embodiment. Etc. may be provided.

Sixth Embodiment
FIG. 18 is a view of the partition body 28 of the sixth embodiment as viewed from the same viewpoint as FIG. 17. In the present embodiment, the configuration of the overpressure relief part 106 is different from that of the sixth embodiment. The wall body 108 of the overpressure relief portion 106 of the present embodiment is rotatably attached to the opening wall portion 104 of the partition body 28 via the hinge mechanism 120. The wall 108 is pivotable between a closed position P1 covering and closing the opening 102 of the opening wall 104 and an open position P2 opening the opening 102. The fixing portion 110 of the present embodiment fixes the wall 108 at the closed position P1.

  The fixing portion 110 of the present embodiment is configured to be broken earlier than the other portions of the partition body 28 when an overpressure is applied to the inside of the gas chamber 32. In order to realize this, the fixing strength is adjusted through the adjustment of the material and structure of the fixing portion 110.

  As a result, when an overpressure is applied to the inside of the gas chamber 32, the fixing portion 110 of the overpressure relief portion 106 is destroyed earlier than the other portions of the partition 28. Along with this, the overpressure in the gas chamber 32 moves the wall 108 of the overpressure relief portion 106 from the closed position P1 to the open position P2, and the wall 108 covers the outside space 34 through the opening 102 which was covered. And the gas chamber 32 communicate with each other. As a result, the overpressure in the gas chamber 32 is released from the opening 102 to the external space 34. Therefore, the same effect as the above (E) can be obtained.

Seventh Embodiment
Fig.19 (a) is a side view which shows a part of partition body 28 of 7th Embodiment, FIG.19 (b) is an exploded view of several partition body unit 122 (it mentions later). Fig.20 (a) is the DD sectional view taken on the line of Fig.19 (a), and FIG.20 (b) is a figure which shows the state in the middle of the assembly of the partition unit 122. As shown in FIG.

  The partition 28 of the present embodiment includes a plurality of partition units 122 configured by dividing the partition 28 in the X direction. The partition body unit 122 includes a soft member 124 forming the top wall portion 28 a of the partition body 28 and a pair of hard members 126 forming the pair of side wall portions 28 c of the partition body 28. The soft member 124 is configured using a flexible material. The hard member 126 is configured using a material harder than the soft member 124. These materials are, for example, resin materials such as vinyl chloride. The soft member 124 and the hard member 126 are partially integrated with each other, and then integrated by bonding or the like at the overlapping portion.

  One partition body unit 122 of the adjacent partition body units 122 includes a first plugging material 130 that covers and closes the joint 128 of the adjacent partition body units 122. The first closing member 130 of the present embodiment is attached to the hard member 126 at the end of one of the partition units 122 by bolts, adhesion or the like. The first closing members 130 overlap the joint 128 by overlapping the ends of the adjacent bulkhead units 122.

  The above-mentioned partition member 114 is attached to the other partition unit 122 of the adjacent partition units 122. The partition member 114 of the present embodiment includes a pair of dividing members 132 configured by dividing the partition member 114 into two. One divided member 132 is fixed to one side wall portion 28 c of the other partition body unit 122, and the other divided member 132 is fixed to the other side wall portion 28 c of the partition body unit 122.

  The bulkhead unit 122 includes a second closing member 138 which covers and closes the joint 134 of the adjacent dividing members 132. The second closing member 138 is attached to one of the divided members 132 by a bolt, an adhesive, or the like. The second closing member 138 partially overlaps the joint 134 of the adjacent divided members 132 by being superimposed on the other divided member 132.

  The assembling method of the above-mentioned partition body unit 122 is demonstrated. First, the soft member 124 of the bulkhead unit 122 is covered on the base member 24 of the support structure 22. At this time, the soft member 124 is covered while being bent and deformed along the upper surface portion of the base member 24. Next, by moving one of the hard members 126 of the bulkhead unit 122 while bending the flexible member 124, the dividing member 132 fixed to the hard member 126 is disposed below the base member 24 (FIG. 20) (B)). Next, by moving the other hard member 126 of the bulkhead unit 122 while bending the flexible member 124, the dividing member 132 fixed to the hard member 126 is disposed below the base member 24 (FIG. 20) See (a)). Thus, the partition member 114 configured by the pair of divided members 132 can be disposed below the base member 24 while covering a part of the partition body unit 122 on the base member 24 of the support structure 22.

  Next, modifications of each component will be described.

  The type of surface treatment by the electrolytic facility 12 is not particularly limited. For example, it may be used for etching, electrolytic polishing and the like. Although the electrode which the electrolysis gas G produces | generates with electrolysis was demonstrated the example which is the cathode 16, the anode 18 may be sufficient. Further, the specific structure of the cathode 16 and the anode 18 is not particularly limited. For example, another plate portion may be connected to the plate portion 16a of the cathode 16 as an alternative to the pipe portion 16b.

  The partition 28 may be used individually for a plurality of electrodes from which the electrolytic gas G is generated. Although the opening part 38 of the partition body 28 demonstrated the example provided in the position which the upper end part of the electrode which electrolytic gas G produces penetrates, the position in particular is not limited. For example, it may be provided below the lower end of the electrode.

  The example in which the partition body 28 surrounds a part of several cathode 16 and forms one gas chamber 32 was demonstrated. In addition to this, when there is a sufficient space between the inner wall surface of the electrolytic cell 20 and the one end 26a of the electrode connection portion 26 of the support structure 22, a part of the partition 28 is disposed to pass through the space. However, one gas chamber 32 may be formed so as to surround all the electrodes.

  Although the example in which the switching valve 58 switches the operation state under the control of the control unit 62 has been described, it may be switched manually. Further, the switching valve 58 is not limited to the three-way valve. For example, a combination of a first on-off valve installed in the gas discharge passage 56 and a second on-off valve installed in the downstream portion of the gas recovery passage 52 may be used.

  In the case where the air remaining in the gas chamber 32 is purged by the inert gas through the gas recovery passage 52, an example of discharging the air from the gas recovery passage 52 through the gas discharge passage 56 has been described. The method of discharging the air is not particularly limited. For example, after the air in the gas chamber 32 is sent to the recovery space 64 through the gas recovery passage 52 and the air in the recovery space 64 is discharged by a pump or the like, the electrolytic gas G is recovered through the gas recovery passage 52. It may be sent to

  Further, in the case of sending the air remaining in the gas chamber 32 to the exhaust space 72, an example of using the inert gas supplied from the gas supply passage 54 has been described. The gas supply passage 54 is not essential to achieve the same purpose. For example, electrolytic gas G is collected in gas chamber 32 with air remaining in gas chamber 32, and the air in gas chamber 32 is discharged together with electrolytic gas G using exhaust gas G. You may send it to

  The example in which the gas outlet 52 a of the gas recovery passage 52 is opened to the side wall surface of the liquid tank 68 has been described. Besides this, the gas outlet 52a may be formed at the end of a pipe in which a part of the gas recovery passage 52 is formed. This assumes that the entire gas outlet 52 a at the tip of the pipe is immersed in the sealing liquid 66. The direction of the end of the pipe is not particularly limited, and it may be disposed either downward or sideways. Further, in the gas recovery passage 52, a plurality of liquid tanks 68 may be installed in order in the gas feed direction.

  The measuring unit 60 preferably uses an explosion-proof, chemical resistant sensor. Moreover, if the measurement part 60 can measure the density | concentration of the oxygen in the gas chamber 32, the installation position will not be specifically limited. For example, the measurement unit 60 may be installed in the gas chamber 32 in addition to the gas recovery passage 52. In addition, although the measurement unit 60 is disposed upstream of the sealing liquid 66 in the gas recovery passage 52, the measuring unit 60 may be disposed downstream of the sealing liquid 66. In this case, the measuring unit 60 may not use an explosion-proof sensor or a chemical resistant sensor.

  The control unit 62 may control the switching valve 58 and the on-off valve 70 in conjunction with the manufacturing system.

  The overpressure relief portion 106 is broken earlier than the other portions of the partition 28 when an overpressure is applied in the gas chamber 32, whereby the opening portion 102 communicating the external space 34 with the gas chamber 32 is formed. It should just be able to provide. In realizing this, for example, either the wall 108 of the overpressure relief part 106 or the fixing part 110 may be destroyed.

  The opening portion 102 may not be formed in the wall portion of the partition body 28, and a part of the wall portion where the opening portion 102 is not formed may constitute the wall body 108 (fragile wall portion) of the overpressure relief portion 106. In order to provide the overpressure relief part 106 in this manner, it is not essential to form the opening 102 in the partition 28.

  The wall body 108 which the overpressure relief part 106 constitutes may constitute a part of the partition 28. For example, the top wall 28 a and the end wall 28 d of the partition 28 may be configured as the wall 108.

  The overpressure relief portion 106 holds the wall 108 at the closed position P1 until the overpressure is applied in the gas chamber 32, and when the overpressure is applied, the internal pressure of the gas chamber 32 causes the wall 108 to reach the open position P2. It may be configured to move. This is realized, for example, by incorporating a biasing member such as a spring that holds the wall 108 in the closed position P1.

  The overpressure relief portion 106 may be provided without corresponding to the plurality of small chambers 112. For example, only one overpressure relief 106 may be provided per gas chamber 32.

  Although the plurality of cells 112 have been described as being arranged in the X direction, they may be arranged in both the X direction and the Y direction.

  The communication passage 118 communicating the adjacent small chambers 112 may be formed in a member different from the partition member 114. This other member is, for example, a piping member connected to the bulkhead 28.

  Any combination of the above components is also effective as an aspect of the present invention. For example, the overpressure relief unit 106 and the partition member 114 of the fifth to seventh embodiments may be combined with the gas recovery device 10 of the first to fourth embodiments. Similarly, optional components of the first to fourth embodiments (the gas recovery passage 52, the gas supply passage 54, the gas discharge passage 56, the switching valve 58, the measuring unit 60, the control unit 62, the mist capturing body 82, etc.) ) May be combined with the gas recovery device 10 of the fifth to seventh embodiments. Moreover, only one of the fifth to seventh embodiments may be used without combining the overpressure relief part 106 and the partition member 114.

  In the above, the example and modification of an embodiment of the present invention were explained in detail. The above-described embodiment and modifications are merely specific examples for implementing the present invention. The contents of the embodiments and the modifications do not limit the technical scope of the present invention, and many design changes such as changes, additions, and deletions of components can be made without departing from the spirit of the invention. In the above-mentioned embodiment, the contents which can be changed in design like this are emphasized with the notation of "of the embodiment", "in the embodiment" and the like, but even the contents without such notation are designed Changes are acceptable. Further, the hatching attached to the cross section of the drawing does not limit the material of the hatched object.

  By generalizing the invention embodied by the above embodiment and modification, the following technical ideas can be derived. Hereinafter, the present invention will be described using an aspect described in the problem to be solved.

In the gas recovery apparatus of the second aspect, in the first aspect, the partition may surround a plurality of the electrodes to form one gas chamber.
According to this aspect, the number of partition bodies can be reduced compared to using individual partition bodies for each electrode, and the installation work of the partition bodies becomes easy.

In the gas recovery apparatus of the third aspect, in the first or second aspect, the opening may be provided at a position where the upper end of the electrode penetrates. Here, "the upper end portion of the electrode" refers to a region of 10% of the total length in the longitudinal direction of the electrode from the upper end of the electrode.
According to this aspect, the distance from the gas chamber formation surface such as the partition wall to the opening becomes short, and the gas chamber formation surface can be easily cleaned using the cleaning tool or the cleaning liquid passing through the opening.

In the gas recovery apparatus of the fourth aspect, in any of the first to third aspects, the partition may be covered on a support structure that suspends and supports the electrode.
According to this aspect, the load of the partition can be directly transmitted to the support structure in order to securely transmit the load of the partition to the first support structure. Therefore, the connection structure for connecting the partition to the support structure can be simplified.

In the gas recovery apparatus of the fifth aspect, in the fourth aspect, the plurality of electrodes are arranged in the horizontal direction, the plurality of electrodes are connected to the support structure, and the arrangement direction of the plurality of electrodes is a longitudinal direction An electrode connection portion extending and disposed in the electrolytic cell, wherein a wall portion at one end side in the longitudinal direction of the partition body is disposed inside the longitudinal direction from one end in the longitudinal direction of the electrode connection portion It is also good.
According to this aspect, even when there is not much gap between the inner wall surface of the existing electrolytic cell and one end of the electrode connection portion of the support structure, the partition can be used while avoiding interference with the electrolytic cell.

In a gas recovery apparatus according to a sixth aspect, in any one of the first to fifth aspects, a gas recovery passage for sending a gas in the gas chamber to a recovery space, and an inert gas for supplying the gas chamber. And a gas supply passage.
According to this aspect, by supplying the inert gas into the gas chamber before generating the electrolytic gas, the air remaining in the gas chamber can be purged by the inert gas through the gas recovery passage. Therefore, the electrolytic gas can be recovered after removing the oxygen component of air remaining in the gas chamber as much as possible.

In a gas recovery apparatus according to a seventh aspect, in the sixth aspect, a plurality of the electrodes are arranged in the horizontal direction, and the gas chambers are elongated in a plan view with the arrangement direction of the plurality of electrodes as a longitudinal direction. The gas inlet of the gas recovery passage opens at a wall portion at one end side of the arrangement direction forming the gas chamber, and the gas outlet of the gas supply passage forms the gas chamber in the arrangement direction. You may open in the wall part of the other end side.
According to this aspect, the air remaining at the end of the gas chamber in the arrangement direction can be easily pushed out smoothly by the inert gas, and the amount of use of the inert gas required to purge the air in the gas chamber can be reduced.

In the gas recovery apparatus according to an eighth aspect, in any of the first to seventh aspects, a gas recovery passage for sending the gas in the gas chamber to a recovery space, and a branch from the gas recovery passage to an exhaust space The gas discharge passage to be connected, and the switching valve capable of switching the destination of the gas in the gas chamber may be provided in any of the recovery space and the exhaust space.
According to this aspect, after the air remaining in the gas chamber is sent to the exhaust space, the electrolytic gas can be sent to the recovery space.

The gas recovery apparatus according to a ninth aspect is, according to the eighth aspect, a measuring unit capable of measuring the concentration of oxygen in the gas chamber, and the destination when the concentration of the oxygen measured by the measuring unit exceeds a predetermined concentration. And a control unit configured to control the switching valve so as to set the destination as the recovery space when the concentration is lower than the predetermined concentration.
According to this aspect, after the air remaining in the gas chamber is sent to the exhaust space, the operation of the gas recovery apparatus can be automated to send the electrolytic gas to the recovery space.

The gas recovery system according to a tenth aspect of the present invention is the mist capturing body according to any of the first to ninth aspects, wherein the support structure for suspending and supporting the electrode and the partition body are separate members, and are provided in the gas chamber. May be provided.
According to this aspect, even when mist is generated due to the explosion of the bubble of the electrolytic gas, the mist can be captured by the mist capturing body, and scattering to the support structure or the partition can be prevented.

In the gas recovery apparatus of the eleventh aspect, in any of the first to tenth aspects, the partition may include an overpressure relief part capable of releasing the overpressure in the gas chamber to the outside.
According to this aspect, it is possible to avoid the situation in which the pressure in the gas chamber further increases when the gas chamber is over-pressured, and to improve the safety of the gas recovery apparatus.

In a gas recovery apparatus according to a twelfth aspect, in the eleventh aspect, the partition body has a pair of wall portions disposed with the electrode interposed therebetween, and the overpressure relief portion is a portion of the pair of wall portions It may be provided only on one of the walls.
According to this aspect, even if another object is placed near the other wall, interference with the other object can be avoided when the overpressure relief operates. Therefore, it is possible to allow a design in which another object is placed near the other wall portion, and it is possible to improve the design freedom in providing the overpressure relief portion in the bulkhead.

The gas recovery apparatus of the thirteenth aspect may include a partition member which is disposed inside the partition body and which divides the gas chamber into a plurality of small cells in any of the first to twelfth aspects.
According to this aspect, in the process of propagation of the flame throughout the gas chamber, the propagation speed can be temporarily reduced by blocking the flame propagation by the partition member, and the flame propagates rapidly throughout the gas chamber. Can avoid Accordingly, it is possible to allow a design for escaping the internal pressure of the gas chamber before the pressure of the gas chamber rapidly increases due to the rapid flame propagation, and the safety of the gas recovery system can be improved.

In the gas recovery system according to a fourteenth aspect, in the thirteenth aspect, the partition member may be formed with a communication passage communicating the plurality of adjacent small chambers.
According to this aspect, the number of parts can be reduced by providing the communication passage using a member separate from the partition member.

In a gas recovery apparatus according to a fifteenth aspect, in the thirteenth or fourteenth aspect, the partition body is provided corresponding to the plurality of cells, and an overpressure relief capable of releasing the overpressure in the corresponding cells to the outside. You may provide a part.
According to this aspect, in the process of propagation of the flame sequentially in the plurality of small chambers, the overpressure can be gradually released to the outside in each small chamber. Therefore, it becomes difficult to apply an excessive pressure to the whole gas chamber as compared with the case where the flame propagates to the whole gas chamber at once.

DESCRIPTION OF SYMBOLS 10 ... Gas recovery apparatus, 14 ... Electrolyte solution, 16 ... Cathode (electrode), 20 ... Electrolysis tank, 22 ... Support structure, 26 ... Electrode connection part, 28 ... Partition body, 32 ... Gas chamber, 38 ... Opening part, 52: gas recovery passage, 52c: gas inlet, 54: gas supply passage, 54a: gas outlet, 64: space for recovery, 82: mist capture body, 106: overpressure relief portion, 112: small chamber, 114: partition Member, 118 ... communication passage.

Claims (15)

A partition body surrounding an electrode that generates an electrolytic gas with the electrolysis of the electrolytic solution, and forming a gas chamber for collecting the electrolytic gas on the electrolytic solution,
The gas recovery device according to claim 1, wherein the partition has an opening that opens downward.   The gas recovery apparatus according to claim 1, wherein the partition body surrounds a plurality of the electrodes to form one gas chamber.   The gas recovery apparatus according to claim 1, wherein the opening is provided at a position where the upper end of the electrode penetrates.   The gas recovery apparatus according to any one of claims 1 to 3, wherein the partition is placed on a support structure that suspends and supports the electrode. The plurality of electrodes are arranged in the horizontal direction,
The support structure includes an electrode connection portion to which the plurality of electrodes are connected and which extends in the direction in which the plurality of electrodes are arranged as a longitudinal direction and which is disposed in the electrolytic cell,
5. The gas recovery apparatus according to claim 4, wherein a wall portion at one end side in the longitudinal direction of the partition body is disposed inward in the longitudinal direction from one end in the longitudinal direction of the electrode connection portion. A gas recovery passage for sending the gas in the gas chamber to a recovery space;
The gas recovery system according to any one of claims 1 to 5, further comprising: a gas supply passage for supplying an inert gas to the gas chamber. The plurality of electrodes are arranged in the horizontal direction,
The gas chamber is elongated in a plan view with the arrangement direction of the plurality of electrodes as a longitudinal direction,
The gas inlet of the gas recovery passage is open at a wall on one end side of the arrangement direction forming the gas chamber,
The gas recovery device according to claim 6, wherein the gas outlet of the gas supply passage is opened at a wall on the other end side in the arrangement direction forming the gas chamber. A gas recovery passage for sending the gas in the gas chamber to a recovery space;
A gas discharge passage branched from the gas recovery passage and connected to an exhaust space;
The gas recovery device according to any one of claims 1 to 7, further comprising: a switching valve capable of switching the destination of the gas in the gas chamber in any one of the recovery space and the exhaust space. A measurement unit capable of measuring the concentration of oxygen in the gas chamber;
The switching valve is configured to set the destination as the exhaust space when the concentration of the oxygen measured by the measurement unit exceeds the predetermined concentration, and to set the destination as the collection space when the concentration is less than the predetermined concentration. The controller according to claim 8, further comprising:   The gas recovery system according to any one of claims 1 to 9, further comprising: a support structure body for suspending and supporting the electrode and the partition body separately from the partition body, and including a mist capturing body provided in the gas chamber.   The gas recovery device according to any one of claims 1 to 10, wherein the partition includes an overpressure relief portion capable of releasing overpressure in the gas chamber to the outside. The partition body has a pair of wall portions disposed so as to sandwich the electrode therebetween,
The gas recovery apparatus according to claim 11, wherein the overpressure relief portion is provided only on one of the pair of wall portions.   The gas recovery apparatus according to any one of claims 1 to 12, further comprising: a partition member disposed inside the partition body and partitioning the gas chamber into a plurality of small chambers.   The gas recovery device according to claim 13, wherein a communication passage communicating the plurality of adjacent small chambers is formed in the partition member.   The gas recovery device according to claim 13, wherein the partition body is provided corresponding to the plurality of cells, and includes an overpressure relief portion capable of releasing the overpressure in the corresponding cells to the outside.

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