WO2017037948A1 - Système de mesure de caractéristique de réflexion - Google Patents

Système de mesure de caractéristique de réflexion Download PDF

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Publication number
WO2017037948A1
WO2017037948A1 PCT/JP2015/075236 JP2015075236W WO2017037948A1 WO 2017037948 A1 WO2017037948 A1 WO 2017037948A1 JP 2015075236 W JP2015075236 W JP 2015075236W WO 2017037948 A1 WO2017037948 A1 WO 2017037948A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
display surface
reflection characteristic
display
reflecting mirror
Prior art date
Application number
PCT/JP2015/075236
Other languages
English (en)
Japanese (ja)
Inventor
三由　貴史
卓二 堀江
石井　謙介
新 篠崎
さおり 松本
渡辺　伸之
福田　弘之
Original Assignee
オリンパス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オリンパス株式会社 filed Critical オリンパス株式会社
Priority to PCT/JP2015/075236 priority Critical patent/WO2017037948A1/fr
Publication of WO2017037948A1 publication Critical patent/WO2017037948A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications

Definitions

  • the present invention relates to a reflection characteristic measurement system.
  • the reflection characteristic measuring apparatus of Patent Document 1 arranges a light source that emits illumination light inward in the radial direction on a dome that constitutes a screen, and since there is a limit to the number of light sources that can be arranged, It is not possible to perform measurements with freely changing wavelengths. Further, the reflection characteristic measuring apparatus of Non-Patent Document 1 needs to accurately arrange various components such as a projector, an elliptical mirror, a half mirror, and a camera in a positioning state.
  • the present invention has been made in view of the above-described circumstances, and an object thereof is to provide a reflection characteristic measurement system capable of performing measurement with a simple configuration and freely changing the illumination direction and wavelength.
  • One embodiment of the present invention includes a display device having a flat display surface and capable of freely changing a light emission position, and a detection device disposed on the display surface of the display device, and the detection device includes: A reflective surface that is disposed at a position covering at least a part of the display surface of the display device and reflects the light emitted from the light emitting position of the display surface to collect at a predetermined position is provided on the inner surface.
  • a reflective surface that is disposed at a position covering at least a part of the display surface of the display device and reflects the light emitted from the light emitting position of the display surface to collect at a predetermined position is provided on the inner surface.
  • the reflection emitted from the opening of the reflecting mirror to the outside of the reflecting mirror It is a reflection characteristic measurement system provided with the detection part which detects light.
  • the reflecting mirror of the detection device is arranged so as to cover at least a part of the flat display surface of the display device, the object to be measured is arranged at a predetermined position inside the reflecting mirror, and any one of the display devices
  • emitted out of a reflective mirror from the opening part provided in the reflective mirror among the reflected light in a to-be-measured object is detected by a detection part.
  • the angle of the light reflected by the reflecting mirror and irradiated on the object to be measured changes, so that the light emission position is sequentially switched and the reflected light is detected each time. It is possible to measure the reflection characteristics of the object to be measured.
  • the display device is a color display device
  • the reflection characteristics can be measured by arbitrarily switching the wavelength of light to be irradiated. In this case, it is only necessary to position the object to be measured and the reflecting mirror with respect to the display surface of the display device, and the measurement can be performed with the illumination direction and wavelength freely changed with a simple configuration.
  • the reflecting surface of the reflecting mirror may be a paraboloid for condensing light emitted from the light emitting position in a direction orthogonal to the display surface at a single focal position.
  • strength of reflected light may be sufficient as the said detection part.
  • the light emission position in the display device is sequentially switched, and the reflection characteristic representing the relationship between the incident angle of the light applied to the object to be measured and the intensity of the reflected light detected by the photodetector is measured. be able to.
  • the image pick-up element which can acquire the image of the said to-be-measured object and the said display surface may be sufficient as the said detection part.
  • the reflection characteristic measurement system 1 includes a display device 2 and a detection device 3.
  • the display device 2 is a general-purpose tablet terminal, and includes a flat display surface 4 made of a color liquid crystal display, and a communication unit that receives information transmitted from the detection device 3 and transmits a signal to the detection device 3. 5, a processor, and a memory 7.
  • the communication unit 5 is configured to transfer an image by relaying a server 9 via a network 8 by wireless transmission / reception.
  • reference numeral 10 denotes a router.
  • the network 8 an arbitrary network such as the Internet or an intranet may be adopted.
  • the data may be transferred directly via short-distance communication or wireless without using the network 8 or via a portable memory device such as a memory card or USB memory.
  • a display control unit 6 that controls display contents on the display surface 4 by executing application software stored on the memory 7 is configured by a processor.
  • the display unit 11 and the operation input unit 12 are displayed on the display surface 4.
  • the display unit 11 includes an illumination area 13 and a display area 14 on which the measurement object X is placed and generates light that irradiates the measurement object X.
  • the operation input unit 12 displays an interface for starting measurement and setting measurement conditions with a GUI button 15a and a slide bar 15b.
  • the memory 7 stores the coordinates of the light emission positions for sequentially emitting light.
  • the application software sequentially emits light at a plurality of coordinate pixels in the illumination area 13 stored in the memory 7 and information on the intensity of light transmitted from the detection device 3 at the timing of light emission. Is received by the communication unit 5 and stored in the memory 7 in association with the coordinate information of the light emission position of the illumination area 13 by the display control unit 6.
  • the input made in the operation input unit 12 is also sent to the display control unit 6.
  • the display control unit 6 controls display in the illumination area 13 based on an instruction input by the operation input unit 12, for example, an instruction of light emission luminance or wavelength.
  • the illumination area 13 is formed in a donut shape that is arranged around a central arrangement area 16 where the DUT X is arranged.
  • the display control unit 6 switches on the light emitting area composed of a plurality of pixels in the illumination area 13 in a preset order and lights up sequentially.
  • the light emitted from each light emission position in the illumination area 13 has a profile that has the highest intensity in the direction orthogonal to the display surface 4.
  • the display area 14 displays an image indicating the light emission position in the illumination area 13.
  • the detection device 3 includes a dome-shaped reflection mirror 17 having a size arranged to cover the illumination area 13 of the display surface 4 of the display device 2, and the reflection mirror 17.
  • a light detector (detector) 18 that collects light passing through an opening 17a provided at the top of the light and detects its intensity, and temporarily stores the light intensity detected by the light detector 18
  • a memory 19 a communication unit 20 that transmits light intensity information stored in the memory 19 and receives a signal from the display device 2, and a control unit 21 that controls these.
  • the reflecting mirror 17 has a reflecting surface 17b having a parabolic shape on the inner surface.
  • the reflecting mirror 17 has a shape cut by a plane perpendicular to the symmetry axis S of the paraboloid, and a ring-shaped edge member 22 having a certain thickness is fixed to the end surface.
  • the edge member 22 is in close contact with the display surface 4 without a gap, and has a role of shielding external light from entering the internal space of the reflecting mirror 17.
  • the dome-shaped reflecting mirror 17 is arranged at a position that coincides with the illumination area 13 of the display device 2 that is horizontally arranged with the display surface 4 facing upward, the edge member 22 of the reflecting mirror 17 is moved to the outer periphery of the illumination area 13. Are arranged so as to cover the entire illumination area 13.
  • the symmetry axis S of the reflecting mirror 17 is arranged in the vertical direction as shown in FIG. 6, the light emitted vertically upward from each light emitting position of the illumination area 13 is reflected by the reflecting mirror 17.
  • the light is collected at the focal position O of the paraboloid constituting the reflecting mirror 17.
  • the display device 2 is placed on a flat place with the display surface 4 facing upward. Then, as shown in FIG. 7, the application software is started (step S1). When the application software is activated, the illumination area 13, the display area 14, and the operation input unit 12 are displayed on the display surface 4 (step S2).
  • an initial image stored in the memory 7 is displayed.
  • the initial image for example, as shown in FIG. 4, an image showing the outlines of the illumination area 13 and the measured object arrangement area 16.
  • An object to be measured (including a pedestal) X is arranged in the object arrangement area 16 displayed at the center of the illumination area 13 displayed on the display surface 4 (step S3) so as to match the outline of the illumination area 13.
  • the reflecting mirror 17 is placed and placed (step S4).
  • the photodetector 18 is disposed with the optical axis directed vertically downward so as to close the opening 17a provided in the reflecting mirror 17 (step S5).
  • the detection device 3 is activated (step S6).
  • the detection device 3 When the detection device 3 is activated and ready for measurement, the detection device 3 sends a signal indicating that measurement can be started to the display device 2 via the communication unit 20.
  • the transmitted measurement startable signal is received by the communication unit 5 of the display device 2 (step S7), and measurement is started (step S8). That is, when the measurement is started, the light emission position of the illumination area 13 corresponding to one of the coordinates stored in the memory 7 is emitted (step S9). From the light emitting position, the light with the highest luminance is emitted vertically upward. The light emitted from the light emitting position is reflected by the reflecting mirror 17 disposed vertically upward, and is irradiated to the object to be measured X disposed at the focal position O of the paraboloid constituting the reflecting mirror 17.
  • the transmitted measurement startable signal is received by the communication unit 5 of the display device 2 (step S7), and measurement is started (step S8). That is, when the measurement is started, the light emission position of the illumination area 13 corresponding to one
  • the light reflected by the object to be measured X is reflected and scattered according to the surface state of the object to be measured X, and a part of the light passes through the opening 17a of the reflecting mirror 17 and is a condensing lens (optical element). 23 is collected and received by the light receiving element 24 of the photodetector 18 (step S10). As a result, the intensity of the reflected light from the object to be measured X is detected, and the detected intensity information is temporarily stored in the memory 19 and then sent to the display device 2 by the communication unit 20. The transmitted intensity information is received by the communication unit 5 and stored in the memory 7 in association with the coordinate information of the light emission position (step S11).
  • the reflection characteristic of the object to be measured X is acquired (step S12). That is, when the coordinates of the light emission position are determined, the incident angle of the light to the measurement object X is determined. Therefore, by associating the coordinates of the light emission position with the intensity information of the reflected light, as shown in FIG. The incident angle characteristic of the reflected light can be easily obtained.
  • the illumination region 13 on the display surface 4 can be obtained simply by placing the DUT X and the detection device 3 on the flat display surface 4 of the display device 2.
  • the reflection characteristic of the object to be measured X can be easily and accurately measured by arbitrarily switching the light emission position formed on the object.
  • the reflecting mirror 17 is not limited to a continuous unitary paraboloid or the like, and a pseudo paraboloid or the like is configured by arranging a plurality of small plane mirrors, spherical or aspherical concave mirrors. You may decide to do it.
  • the opening 17a for attaching the photodetector 18 is provided on the top of the reflecting mirror 17, but instead, at a position shifted by a predetermined angle from the top as shown in FIG. You may provide so that the optical axis of the photodetector 18 may cross
  • the light detector 18 that detects the intensity of reflected light from the measurement object X is used. Instead, an image of the measurement object X and the display surface 4 is acquired. A possible image sensor may be adopted. According to the imaging device, it is possible to perform the same function as described above for measuring the reflection characteristics by detecting the reflected light from the object to be measured X, and confirm the light emission position based on the acquired image of the display surface 4. be able to. As a result, fine adjustment for correcting the light emission position with respect to the measurement object X can be performed, and the reflection characteristics can be measured with higher accuracy.
  • step S10 when the image sensor is installed (step S5 ′) and communication is started, the display device 2 displays a calibration pattern in the illumination area 13 of the display surface 4 ( In step S20), the displayed calibration pattern is pre-photographed by the image sensor (step S21). The acquired image is transferred to the display device 2 (step S22), and the positional deviation is measured (step S23). Based on the measured positional deviation, the light emission position in the illumination area 13 is finely adjusted (step S24), and thereafter, the reflection characteristic measurement process is performed as in FIG.
  • the light as it is is reflected by the reflecting mirror 17 using the fact that the component of the light emitted from the display device 2 is the largest in the vertical direction.
  • an illumination louver 25 for increasing a component directed in a substantially vertical direction may be employed.
  • the illumination louver 25 As shown in FIG. 12, a plurality of cylinders 26 whose inner surfaces are matted are arranged, and the display surface 4 is arranged such that the axis of the cylinders 26 is orthogonal to the display surface 4.
  • the one installed in the can be adopted.
  • the light emitted vertically upward from the illumination louver 25 is reduced in the components other than the vertical direction and the ratio of the vertical components is increased. It can be generated easily.
  • the measurement accuracy can be improved further by increasing the light which gathers at the focus O of the reflecting mirror 17 which consists of a paraboloid.
  • the cross section of the cylindrical body 26 constituting the illumination louver 25 is not limited to a quadrangle, and any other cross sectional shape may be adopted. Further, as shown in FIG. 14, as the illumination louver 25, by adopting a longer cylindrical body 26, the emitted light can be made closer to parallel light.
  • a microlens array may be arranged so that light emitted from a wider area of the display surface 4 is collected and condensed on the measurement object X. Thereby, brighter illumination can be performed.
  • a fiber composite or an anisotropic film may be employed.
  • a reflecting mirror 17 using a paraboloid partly (for example, half) may be employed.
  • Reference numeral 27 in the figure denotes a light shielding plate.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

Pour réaliser une mesure tout en changeant de manière flexible la direction d'éclairage et la longueur d'onde avec une structure simple, un système de mesure de caractéristique de réflexion (1) selon la présente invention comprend : un dispositif d'affichage (2) ayant un écran d'affichage plat (4) capable de changer de manière flexible une position d'éclairage ; et un dispositif de détection (3) à placer sur l'écran d'affichage (4) du dispositif d'affichage (2). Le dispositif de détection (3) comprend : un miroir réfléchissant en forme de dôme (17) comportant une surface réfléchissante interne (17b) et une partie d'ouverture (17a) passant à travers la surface réfléchissante (17b), la surface réfléchissante interne (17b) étant placée au niveau d'une position recouvrant au moins une partie de l'écran d'affichage (4) du dispositif d'affichage (2), et conçue pour réfléchir la lumière émise depuis la position d'éclairage de l'écran d'affichage (4) de façon à focaliser la lumière sur une position prédéterminée ; et une unité de détection (18) qui détecte la lumière réfléchie depuis un objet à mesurer (X) placé au niveau de la position prédéterminée et émise hors du miroir réfléchissant (17) à travers la partie d'ouverture (17a) du miroir réfléchissant (17).
PCT/JP2015/075236 2015-09-04 2015-09-04 Système de mesure de caractéristique de réflexion WO2017037948A1 (fr)

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PCT/JP2015/075236 WO2017037948A1 (fr) 2015-09-04 2015-09-04 Système de mesure de caractéristique de réflexion

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PCT/JP2015/075236 WO2017037948A1 (fr) 2015-09-04 2015-09-04 Système de mesure de caractéristique de réflexion

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018189517A (ja) * 2017-05-08 2018-11-29 キヤノン株式会社 計測装置、および物品製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08220016A (ja) * 1995-02-20 1996-08-30 Minolta Co Ltd 欠陥検出用光学装置
JP2010071721A (ja) * 2008-09-17 2010-04-02 Nippon Steel Corp 鋼板の凹凸疵検出装置及び凹凸疵検出方法
JP2011179898A (ja) * 2010-02-26 2011-09-15 Disk Tekku Kk レンズ欠陥検査装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08220016A (ja) * 1995-02-20 1996-08-30 Minolta Co Ltd 欠陥検出用光学装置
JP2010071721A (ja) * 2008-09-17 2010-04-02 Nippon Steel Corp 鋼板の凹凸疵検出装置及び凹凸疵検出方法
JP2011179898A (ja) * 2010-02-26 2011-09-15 Disk Tekku Kk レンズ欠陥検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018189517A (ja) * 2017-05-08 2018-11-29 キヤノン株式会社 計測装置、および物品製造方法

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